JP2002018675A - Feed screw device of machine tool - Google Patents
Feed screw device of machine toolInfo
- Publication number
- JP2002018675A JP2002018675A JP2000203153A JP2000203153A JP2002018675A JP 2002018675 A JP2002018675 A JP 2002018675A JP 2000203153 A JP2000203153 A JP 2000203153A JP 2000203153 A JP2000203153 A JP 2000203153A JP 2002018675 A JP2002018675 A JP 2002018675A
- Authority
- JP
- Japan
- Prior art keywords
- screw shaft
- feed screw
- screw
- machine tool
- feed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002826 coolant Substances 0.000 claims abstract description 28
- 239000000110 cooling liquid Substances 0.000 abstract description 2
- 238000001816 cooling Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 230000010485 coping Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
- Transmission Devices (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、工作機械等におい
て送り装置として用いられる送りねじ装置に関する。The present invention relates to a feed screw device used as a feed device in a machine tool or the like.
【0002】[0002]
【従来の技術】従来、マシニングセンタ等の工作機械に
は、主軸頭、コラム、テーブル等の送り装置としてボー
ルねじ送り装置が採用され、且つ高速送り工作機械や高
精度工作機械においては、ねじ軸の両端部に軸受群を設
けた、いわゆるダブルアンカ方式の送りねじ装置を用い
ることが多い。2. Description of the Related Art Conventionally, a ball screw feeder has been employed as a feeder for a spindle head, a column, a table, and the like in a machine tool such as a machining center. A so-called double anchor type feed screw device having bearing groups at both ends is often used.
【0003】ねじの回転で発生する摩擦熱による熱変位
に起因した真直度や直角度といった機械精度の変化や軸
受群の破損を防止するため、ねじ軸を冷却媒体、例えば
冷却液によって冷却する送りねじ装置が広く用いられて
いる。このような冷却機能付送りねじ装置の例を図3に
示す。送りねじ装置は工作機械のベッド1、図示しない
コラム等に設けられた2つのブラケット2、3間に回転
自在に軸支されたねじ軸14を有しており、ナット15
は駆動対象であるテーブル4等に固定されており、ねじ
軸14の回転に応じてねじ軸14の軸方向に駆動され
る。ねじ軸14の内部には軸方向に冷却液流通孔14b
が形成されている。また、ねじ軸14は駆動用サーボモ
ータ11にカップリング12を介して連結されている。
さらに、ねじ軸14には冷却液回収ジャケット16がサ
ーボモータ11とは反対側の軸端14nに設けられてい
る。また、ねじ軸14のサーボモータ11側の軸端14
m付近に冷却液供給ジャケット13が設けられている。In order to prevent changes in mechanical accuracy such as straightness and squareness due to thermal displacement due to frictional heat generated by rotation of a screw and damage to a bearing group, a feed for cooling a screw shaft with a cooling medium, for example, a cooling liquid. Screw devices are widely used. FIG. 3 shows an example of such a feed screw device with a cooling function. The feed screw device has a screw shaft 14 rotatably supported between two brackets 2 and 3 provided on a bed 1 of a machine tool, a column (not shown) or the like, and a nut 15.
Is fixed to the table 4 or the like to be driven, and is driven in the axial direction of the screw shaft 14 according to the rotation of the screw shaft 14. A coolant flow hole 14b is provided in the screw shaft 14 in the axial direction.
Are formed. The screw shaft 14 is connected to the driving servomotor 11 via the coupling 12.
Further, a coolant recovery jacket 16 is provided on the screw shaft 14 at a shaft end 14 n opposite to the servomotor 11. Also, a shaft end 14 of the screw shaft 14 on the servo motor 11 side is used.
A coolant supply jacket 13 is provided near m.
【0004】冷却液の供給流量は、冷却液供給ユニット
18の供給管18aに設けた流量調整弁17にNC装置
20からねじの回転速度に応じた信号が送出されて調整
する方法がとられている。The supply flow rate of the coolant is adjusted by sending a signal corresponding to the rotation speed of the screw from the NC device 20 to the flow rate control valve 17 provided in the supply pipe 18a of the coolant supply unit 18. I have.
【0005】[0005]
【発明が解決しょうとする課題】しかしながら、ねじ軸
14の冷却液流通孔14bに冷却液を流しているにもか
かわらず、従来の技術ではこのダブルアンカ方式におい
てねじ軸14の温度が上昇し、熱膨張によりねじ軸14
に軸方向に掛る力、例えば引張りまたは圧縮力等が発生
するため、ねじ軸14を支持するベッド1あるいは図示
しないコラムに曲げモーメントが働いてベッド1あるい
はコラムを変形させ、機械精度である真直度や直角度を
狂わせることがあった。また、ねじ軸14の熱膨張によ
り軸受荷重が増大して軸受群の破損を生じることもあっ
た。However, in spite of the fact that the coolant flows through the coolant flow hole 14b of the screw shaft 14, the temperature of the screw shaft 14 increases in the conventional double anchor system. Screw shaft 14 due to thermal expansion
In this case, a bending force acts on the bed 1 or the column (not shown) that supports the screw shaft 14 to deform the bed 1 or the column. And upset the right angle. In addition, the bearing load may increase due to the thermal expansion of the screw shaft 14, and the bearing group may be damaged.
【0006】ボールねじ送り装置は比較的高効率である
が、送り所要動力をW、伝達効率をηとすると、W×
(1−η)分のエネルギが熱に変換されてねじ軸14お
よびナット15の温度上昇を生じさせる。ねじの回転速
度が増加すれば、ねじ軸14の温度上昇値は大きくなる
ことからこの回転量に応じて供給する冷却液の流量を調
整する方法が従来はとられていた。しかし詳細にねじの
回転速度とねじ軸14の温度上昇値の関係を観察する
と、この方法ではねじ軸14に作用する軸方向に掛る力
の変化に冷却液の流量調整は精度良く追随することが困
難であることがわかった。Although the ball screw feeder has a relatively high efficiency, if the required feed power is W and the transmission efficiency is η, W ×
The energy of (1- [eta]) is converted into heat, which causes the screw shaft 14 and the nut 15 to rise in temperature. As the rotation speed of the screw increases, the temperature rise value of the screw shaft 14 increases. Therefore, a method of adjusting the flow rate of the coolant to be supplied according to the rotation amount has been conventionally used. However, by observing the relationship between the rotation speed of the screw and the temperature rise value of the screw shaft 14 in detail, it can be seen that in this method, the adjustment of the flow rate of the cooling fluid accurately follows the change in the axial force acting on the screw shaft 14. It turned out to be difficult.
【0007】理論式によれば、温度上昇値をΔT〔℃〕
とすると、簡略モデルに対して ΔT=Q/β(1−exp(−β/CM×t)) と表
される。ここで、 Q:ねじ軸14に与えられる単位時間当りの熱量〔J/
h〕 β:ねじ軸14外径・内径からの単位時間・単位温度差
当りの放熱量〔J/(h・℃)〕 CM:ねじ軸14の熱容量〔J/℃〕 t:経過時間〔h〕According to the theoretical formula, the temperature rise value is ΔT [° C.]
Then, for the simplified model, ΔT = Q / β (1−exp (−β / CM × t)). Here, Q: the amount of heat given to the screw shaft 14 per unit time [J /
h] β: Heat release amount per unit time / unit temperature difference from outer diameter and inner diameter of screw shaft 14 [J / (h · ° C)] CM: Heat capacity of screw shaft 14 [J / ° C] t: Elapsed time [h ]
【0008】この式から、Qによって、ある送り速度で
運転開始して十分時間が経過した後、ねじ軸14の温度
上昇は予測された値になる。From this equation, the temperature rise of the screw shaft 14 becomes a predicted value after a sufficient time has elapsed since the start of the operation at a certain feed speed by Q.
【0009】送り速度を上げた時ねじの回転速度に応じ
て温度上昇値ΔTが一定になるようなβを実現する冷却
液流量に直ちに切り換えると、ねじ軸14は十分時間が
経過するまでの間は、「冷しすぎ」の状態となり、ねじ
軸14の軸方向に掛る力は減少して、前述の「ベッド1
あるいはコラムの曲げ変形」を生じさせてしまう。When the feed rate is increased and the coolant flow rate is immediately changed to β so that the temperature rise value ΔT becomes constant in accordance with the rotation speed of the screw, the screw shaft 14 is rotated until a sufficient time elapses. Is in a state of “too cold”, the force applied in the axial direction of the screw shaft 14 decreases, and the “bed 1”
Or, "bending deformation of the column" is caused.
【0010】また、一般に工作機械の送り速度は加工物
の加工の進捗に伴って頻繁に変化するので、ねじ軸14
の温度が定常化することは期待できない。すなわち、ね
じ軸14の回転速度に応じて供給する冷却液の流量を調
整する従来の方法では、ねじ軸14の温度変化の時間遅
れが発生し、ねじ軸14に作用する軸方向に掛る力を一
定に保つことができないために真直度や直角度といった
機械精度の変化および軸受群の損傷をもたらすという問
題点があった。In general, the feed speed of a machine tool frequently changes with the progress of machining of a workpiece.
Cannot be expected to be steady. That is, in the conventional method of adjusting the flow rate of the supplied coolant according to the rotation speed of the screw shaft 14, a time delay of the temperature change of the screw shaft 14 occurs, and the force acting on the screw shaft 14 in the axial direction is reduced. Since it cannot be kept constant, there is a problem that changes in machine accuracy such as straightness and squareness and damage to the bearing group are caused.
【0011】そこで、本発明の目的は前記従来技術の有
する問題点を解消し、ねじ軸14に作用する軸方向に掛
る力を一定に保ち、機械の急激な、真直度や直角度とい
った機械精度の変化および軸受群22、23の損傷が無
い送りねじ装置を提供することにある。Therefore, an object of the present invention is to solve the above-mentioned problems of the prior art, to keep the axial force acting on the screw shaft 14 constant, and to improve the machine accuracy such as the sharpness, straightness and squareness of the machine. Of the present invention is to provide a feed screw device which is free from changes of the bearings and damage to the bearing groups 22 and 23.
【0012】[0012]
【課題を解決するための手段】前記の目的を達成するた
めに、本発明は工作機械の両端支持方式送りねじ装置で
ねじ軸の中心に軸方向に沿って冷却媒体を流す孔を形成
した送り装置において、ねじ軸に作用する軸方向に掛る
力を検出して、通過させる冷却媒体の流量と流入温度を
制御することを特徴とするものである。SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a feed screw device in which a cooling medium is formed in the center of a screw shaft through which a cooling medium flows along an axial direction by a feed screw device of a two-end supporting type of a machine tool. The apparatus is characterized in that the axial force acting on the screw shaft is detected to control the flow rate and the inflow temperature of the cooling medium to be passed.
【0013】また請求項2にあっては前記軸方向に掛る
力検出手段として、両端部ねじ軸の軸受群の外輪に作用
する力を用いることを特徴とするものである。According to a second aspect of the present invention, as the force detecting means applied in the axial direction, a force acting on an outer ring of a bearing group of a screw shaft at both ends is used.
【0014】また請求項3にあっては前記軸受群の外輪
に作用する力を検出する手段として、両端部軸受群の軸
端側外輪およびねじ側外輪の両方にロードセルを設け
て、各ロードセルの計測した力の差を用いてねじ軸に作
用する軸方向に掛る力を検出することを特徴とするもの
である。According to a third aspect of the present invention, as means for detecting the force acting on the outer ring of the bearing group, a load cell is provided on both the shaft end outer ring and the screw outer ring of the both end bearing group, and the load cell of each load cell is provided. The present invention is characterized in that an axial force acting on a screw shaft is detected using a difference between the measured forces.
【0015】また請求項4にあっては前記送りねじ装置
において、両端部ねじ軸の軸受ブラケットに設けた歪ゲ
ージを前記軸方向に掛る力検出手段とすることを特徴と
するものである。According to a fourth aspect of the present invention, in the feed screw device, a strain gauge provided on a bearing bracket of a screw shaft at both ends is used as force detecting means for applying the force in the axial direction.
【0016】[0016]
【発明の実施の形態】以下本発明の実施形態について添
付の図面を参照して説明する。図1は本発明に係る工作
機械の送りねじ装置の断面図を示す。図2は本発明に係
る工作機械の送りねじ装置の他の実施例を示す。説明に
際し、本発明は従来例とはねじ軸14に作用する軸方向
に掛る力の検出のみを変えてあるので、従来例と同一部
材は同一番号を付し、その説明を省き、新たに追加され
た部材のみ新番号を付してその説明をする。Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a sectional view of a feed screw device of a machine tool according to the present invention. FIG. 2 shows another embodiment of the feed screw device for a machine tool according to the present invention. In the description, the present invention differs from the conventional example only in the detection of the axial force acting on the screw shaft 14. Therefore, the same members as those in the conventional example are denoted by the same reference numerals, and the description thereof will be omitted and newly added. Only the members that have been described are given new numbers and will be described.
【0017】ねじ軸14に設けた軸受群22の外輪の肩
22aと軸受押え16aの間にロードセル21、および
軸受群23の外輪の肩23aと軸受押え13aとの間に
ロードセル24を設け、前記ロードセル21、24はね
じ軸14およびナット15の温度上昇によって熱膨張し
発生したねじ軸14の軸方向に掛る力を検出する。切削
力などのテーブル4に働く外力はナット15、ねじ軸1
4を介しロードセル21、24に伝わる。前記外力はロ
ードセル21、24で検出した値をそれぞれF21、F
24とすると、その値の差|F21−F24|として現
れる。一方温度上昇によって発生したねじ軸14の軸方
向に掛る力はロードセル21、24で検出した値の平均
(F21+F24)/2として現れる。A load cell 21 is provided between the shoulder 22a of the outer ring of the bearing group 22 provided on the screw shaft 14 and the bearing retainer 16a, and a load cell 24 is provided between the shoulder 23a of the outer ring of the bearing group 23 and the bearing retainer 13a. The load cells 21 and 24 detect a force applied in the axial direction of the screw shaft 14 generated by thermal expansion due to a temperature rise of the screw shaft 14 and the nut 15. External forces acting on the table 4 such as cutting force are nut 15, screw shaft 1.
4 to the load cells 21 and 24. For the external force, the values detected by the load cells 21 and 24 are represented by F21 and F21, respectively.
24, it appears as the difference | F21−F24 |. On the other hand, the force applied in the axial direction of the screw shaft 14 generated by the temperature rise appears as an average (F21 + F24) / 2 of the values detected by the load cells 21 and 24.
【0018】NC装置20はロードセル21、24で検
出したねじ軸14の軸方向に掛る力が増加すると流量調
整弁17の開度を上げて冷却供給ユニット18からの冷
却液の流量を増やす。逆に、ねじ軸14の軸方向に掛る
力が減少すると流量調整弁17の開度を下げて冷却液の
流量を減らす。このように、ねじ軸14に作用する軸方
向に掛る力を検出してこの検出値にもとづいて冷却液の
流量を制御する。When the force applied in the axial direction of the screw shaft 14 detected by the load cells 21 and 24 increases, the NC device 20 increases the opening of the flow control valve 17 to increase the flow rate of the coolant from the cooling supply unit 18. Conversely, when the force applied in the axial direction of the screw shaft 14 decreases, the opening of the flow control valve 17 is reduced to reduce the flow rate of the coolant. As described above, the axial force acting on the screw shaft 14 is detected, and the flow rate of the coolant is controlled based on the detected value.
【0019】もし、ねじ軸14に初張力が与えられてい
る構造の場合、ロードセル21、24を軸受群22、2
3のねじ側に設ければよい。If the initial tension is applied to the screw shaft 14, the load cells 21 and 24 are
3 may be provided on the screw side.
【0020】一方、軸受群22、23の運転による発熱
が大きい条件では、外輪の温度がブラケット2、3の温
度よりかなり高くことがある。その時、軸受外輪はブラ
ケット2、3より大きく熱膨張してねじ軸14の軸方向
に掛る力が増加しないにもかかわらず、内力の増加分だ
けロードセル21、24に大きな力を発生させる。この
現象に対処する方法として、図2に軸受群22の外輪の
両側にロードセル21a、21bおよび軸受群23の外
輪の両側にロードセル24a、24bを設けた実施例を
示す。軸受群22、23外輪の熱膨張による内力の増加
分はロードセル21a、21bおよび24a、24bの
平均値として現れる。ロードセル21aと21bおよび
24aと24bとの検出値の差はねじ軸14の軸方向に
掛る力を示す。On the other hand, under the condition that the heat generated by the operation of the bearing groups 22 and 23 is large, the temperature of the outer ring may be considerably higher than the temperature of the brackets 2 and 3. At this time, the bearing outer ring thermally expands more than the brackets 2 and 3 and generates a large force on the load cells 21 and 24 by the increased internal force, even though the force applied in the axial direction of the screw shaft 14 does not increase. As a method for coping with this phenomenon, FIG. 2 shows an embodiment in which load cells 21a and 21b are provided on both sides of the outer ring of the bearing group 22 and load cells 24a and 24b are provided on both sides of the outer ring of the bearing group 23. The increase in the internal force due to the thermal expansion of the bearing groups 22, 23 appears as an average value of the load cells 21a, 21b and 24a, 24b. The difference between the detected values of the load cells 21a and 21b and the detected values of the load cells 24a and 24b indicates the force applied in the axial direction of the screw shaft 14.
【0021】前記ロードセルで検出した値をそれぞれF
21a、F21b、F24a、F24bとすると、すな
わち{(F21b−F21a)+(F24b−F24
a)}/2がねじ軸14の熱膨張により発生した力であ
り、この値を冷却液の流量調整に使用すればよい。Each of the values detected by the load cell is F
21a, F21b, F24a, and F24b, that is, {(F21b-F21a) + (F24b-F24
a)} / 2 is a force generated by thermal expansion of the screw shaft 14, and this value may be used for adjusting the flow rate of the coolant.
【0022】このようにねじ軸14に発生した軸方向に
掛る力を直接検出して冷却液の流量を制御するようにし
たため、ねじ軸14の温度変化の時間遅れ影響を排除す
ることができねじ軸14の軸方向に掛る力をより一定に
制御できる。Since the flow rate of the coolant is controlled by directly detecting the axial force generated on the screw shaft 14 as described above, the time delay effect of the temperature change of the screw shaft 14 can be eliminated. The force applied in the axial direction of the shaft 14 can be controlled more constantly.
【0023】ブラケット2、3の側面に歪ゲージを設
け、軸受群22、23の外輪を介してブラケット2、3
に伝えられるねじ軸14の軸方向に掛る力を検出するこ
とにより前記と同様に冷却液の流量を制御することも可
能である。Strain gauges are provided on the side surfaces of the brackets 2 and 3, and the brackets 2 and 3 are provided via outer rings of the bearing groups 22 and 23.
It is also possible to control the flow rate of the coolant in the same manner as described above by detecting the force applied to the screw shaft 14 in the axial direction.
【0024】[0024]
【発明の効果】以上説明したように本発明においては、
ねじ軸の温度変化の時間遅れや、軸受の発熱変化の影響
を排除できるので、熱膨張に起因するねじ軸に作用する
力を取り除き、軸方向に掛る力を一定に保つことができ
るため、真直度や直角度といった機械精度の変化および
軸受群の損傷をもたらさない送りねじ装置と成った。As described above, in the present invention,
Since the effects of the time delay of the temperature change of the screw shaft and the change in the heat generation of the bearing can be eliminated, the force acting on the screw shaft due to thermal expansion can be removed, and the force applied in the axial direction can be kept constant. The feed screw device does not cause changes in mechanical precision such as degree or squareness and damage to the bearing group.
【図1】本発明の一実施形態例を示す送りねじ装置の説
明図である。FIG. 1 is an explanatory view of a feed screw device showing one embodiment of the present invention.
【図2】本発明の他の実施形態例を示す送りねじ装置の
説明図である。FIG. 2 is an explanatory view of a feed screw device showing another embodiment of the present invention.
【図3】従来の送りねじ装置の説明図である。FIG. 3 is an explanatory view of a conventional feed screw device.
1 ベッド 2、3 ブラケット 4 テーブル 11 サーボモータ 12 カップリング 13 冷却液供給ジャケット 14 ねじ軸 14b 冷却液流通孔 15 ナット 16 冷却液回収ジャケット 17 流量調整弁 18 冷却液供給ユニット 18a 供給管 20 NC装置 21、21a、21b ロードセル 24、24a、24b ロードセル 22、23 軸受群 1 Bed 2, 3 Bracket 4 Table 11 Servomotor 12 Coupling 13 Coolant Supply Jacket 14 Screw Shaft 14b Coolant Flow Hole 15 Nut 16 Coolant Recovery Jacket 17 Flow Rate Control Valve 18 Coolant Supply Unit 18a Supply Pipe 20 NC Device 21 , 21a, 21b Load cell 24, 24a, 24b Load cell 22, 23 Bearing group
Claims (4)
ねじ軸の中心に軸方向に沿って冷却媒体を流す孔を形成
した送り装置において、ねじ軸に作用する軸方向に掛る
力を検出して、通過させる冷却媒体の流量と流入温度を
制御することを特徴とする工作機械の送りねじ装置。In a feed device in which a cooling medium flows along the axial direction at the center of a screw shaft in a feed screw device of a two-end supporting type of a machine tool, an axial force acting on the screw shaft is detected. A feed screw device for a machine tool, wherein a flow rate and an inflow temperature of a cooling medium to be passed are controlled.
て、前記軸方向に掛る力検出手段として、両端部ねじ軸
の軸受群の外輪に作用する力を用いることを特徴とする
工作機械の送りねじ装置。2. The feed screw of a machine tool according to claim 1, wherein a force acting on an outer ring of a bearing group of both end screw shafts is used as said axial force detecting means. Screw device.
て、前記軸受群の外輪に作用する力を検出する手段とし
て、両端部軸受群の軸端側外輪およびねじ側外輪の両方
にロードセルを設けて、各ロードセルの計測した力の差
を用いてねじ軸に作用する軸方向に掛る力を検出するこ
とを特徴とする工作機械の送りねじ装置。3. The feed screw device according to claim 2, wherein load cells are provided on both the shaft end outer ring and the screw side outer ring of the both end bearing group as means for detecting a force acting on the outer ring of the bearing group. A feed screw device for a machine tool, wherein a force acting on a screw shaft in an axial direction is detected by using a difference between measured forces of the load cells.
て、両端部ねじ軸の軸受ブラケットに設けた歪ゲージを
前記軸方向に掛る力検出手段とすることを特徴とする工
作機械の送りねじ装置。4. The feed screw device for a machine tool according to claim 1, wherein a strain gauge provided on a bearing bracket of the screw shaft at both ends is used as a force detecting means applied in the axial direction. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000203153A JP2002018675A (en) | 2000-07-05 | 2000-07-05 | Feed screw device of machine tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000203153A JP2002018675A (en) | 2000-07-05 | 2000-07-05 | Feed screw device of machine tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002018675A true JP2002018675A (en) | 2002-01-22 |
Family
ID=18700591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000203153A Pending JP2002018675A (en) | 2000-07-05 | 2000-07-05 | Feed screw device of machine tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002018675A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104139320A (en) * | 2014-07-04 | 2014-11-12 | 南京理工大学 | Device for cooling angular contact ball bearing of feed system |
| TWI512220B (en) * | 2013-10-29 | 2015-12-11 | Hiwin Tech Corp | Linear drive module with cooling device |
| US9897857B2 (en) | 2010-06-22 | 2018-02-20 | Toyobo Co., Ltd. | Liquid crystal display device, polarizer and protective film |
| JP2020501919A (en) * | 2016-12-15 | 2020-01-23 | ボストン ダイナミクス,インコーポレイテッド | Screw actuator for legged robot |
| JP2021018102A (en) * | 2019-07-18 | 2021-02-15 | Ntn株式会社 | Bearing abnormality prediction device and bearing abnormality prediction method |
-
2000
- 2000-07-05 JP JP2000203153A patent/JP2002018675A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9897857B2 (en) | 2010-06-22 | 2018-02-20 | Toyobo Co., Ltd. | Liquid crystal display device, polarizer and protective film |
| TWI512220B (en) * | 2013-10-29 | 2015-12-11 | Hiwin Tech Corp | Linear drive module with cooling device |
| CN104139320A (en) * | 2014-07-04 | 2014-11-12 | 南京理工大学 | Device for cooling angular contact ball bearing of feed system |
| JP2020501919A (en) * | 2016-12-15 | 2020-01-23 | ボストン ダイナミクス,インコーポレイテッド | Screw actuator for legged robot |
| JP2021018102A (en) * | 2019-07-18 | 2021-02-15 | Ntn株式会社 | Bearing abnormality prediction device and bearing abnormality prediction method |
| JP7335742B2 (en) | 2019-07-18 | 2023-08-30 | Ntn株式会社 | Bearing Abnormality Prediction Device and Bearing Abnormality Prediction Method |
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