JP2002014466A - Photosensitive resin composition - Google Patents
Photosensitive resin compositionInfo
- Publication number
- JP2002014466A JP2002014466A JP2000195051A JP2000195051A JP2002014466A JP 2002014466 A JP2002014466 A JP 2002014466A JP 2000195051 A JP2000195051 A JP 2000195051A JP 2000195051 A JP2000195051 A JP 2000195051A JP 2002014466 A JP2002014466 A JP 2002014466A
- Authority
- JP
- Japan
- Prior art keywords
- acrylate
- resin composition
- group
- photosensitive resin
- acid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000011342 resin composition Substances 0.000 title claims abstract description 52
- 150000001875 compounds Chemical class 0.000 claims abstract description 53
- 229920001577 copolymer Polymers 0.000 claims abstract description 40
- 239000002253 acid Substances 0.000 claims abstract description 38
- 125000003700 epoxy group Chemical group 0.000 claims abstract description 28
- 229920005989 resin Polymers 0.000 claims abstract description 26
- 239000011347 resin Substances 0.000 claims abstract description 26
- -1 acrylic ester Chemical class 0.000 claims abstract description 25
- 239000004593 Epoxy Substances 0.000 claims abstract description 23
- 125000002723 alicyclic group Chemical group 0.000 claims abstract description 18
- CYUZOYPRAQASLN-UHFFFAOYSA-N 3-prop-2-enoyloxypropanoic acid Chemical compound OC(=O)CCOC(=O)C=C CYUZOYPRAQASLN-UHFFFAOYSA-N 0.000 claims abstract description 16
- 238000007747 plating Methods 0.000 claims abstract description 16
- 239000000178 monomer Substances 0.000 claims abstract description 12
- 239000003085 diluting agent Substances 0.000 claims abstract description 11
- 239000003999 initiator Substances 0.000 claims abstract description 10
- XLPJNCYCZORXHG-UHFFFAOYSA-N 1-morpholin-4-ylprop-2-en-1-one Chemical compound C=CC(=O)N1CCOCC1 XLPJNCYCZORXHG-UHFFFAOYSA-N 0.000 claims abstract description 8
- MUTNCGKQJGXKEM-UHFFFAOYSA-N tamibarotene Chemical compound C=1C=C2C(C)(C)CCC(C)(C)C2=CC=1NC(=O)C1=CC=C(C(O)=O)C=C1 MUTNCGKQJGXKEM-UHFFFAOYSA-N 0.000 claims abstract description 8
- YHSYGCXKWUUKIK-UHFFFAOYSA-N 2-prop-2-enoyloxyethyl 3-oxobutanoate Chemical compound CC(=O)CC(=O)OCCOC(=O)C=C YHSYGCXKWUUKIK-UHFFFAOYSA-N 0.000 claims abstract description 7
- 125000006841 cyclic skeleton Chemical group 0.000 claims abstract description 7
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 33
- 229910000679 solder Inorganic materials 0.000 claims description 26
- 229920003986 novolac Polymers 0.000 claims description 14
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 11
- 239000003795 chemical substances by application Substances 0.000 claims description 11
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 10
- 239000000047 product Substances 0.000 claims description 7
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 claims description 6
- 239000007795 chemical reaction product Substances 0.000 claims description 5
- 238000013329 compounding Methods 0.000 claims description 5
- 125000005442 diisocyanate group Chemical group 0.000 claims description 5
- 239000011256 inorganic filler Substances 0.000 claims description 5
- 229910003475 inorganic filler Inorganic materials 0.000 claims description 5
- 238000005886 esterification reaction Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 239000011810 insulating material Substances 0.000 claims 1
- 239000011229 interlayer Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 abstract description 28
- 239000011248 coating agent Substances 0.000 abstract description 27
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 11
- 239000010931 gold Substances 0.000 abstract description 11
- 229910052737 gold Inorganic materials 0.000 abstract description 11
- 206010034972 Photosensitivity reaction Diseases 0.000 abstract description 9
- 230000036211 photosensitivity Effects 0.000 abstract description 9
- 238000012360 testing method Methods 0.000 description 45
- 239000003822 epoxy resin Substances 0.000 description 30
- 229920000647 polyepoxide Polymers 0.000 description 30
- 239000000203 mixture Substances 0.000 description 20
- 239000000126 substance Substances 0.000 description 20
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 20
- 238000001035 drying Methods 0.000 description 19
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 18
- 239000000243 solution Substances 0.000 description 18
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 16
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 13
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 12
- 238000007650 screen-printing Methods 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 10
- 238000001723 curing Methods 0.000 description 10
- CNHDIAIOKMXOLK-UHFFFAOYSA-N toluquinol Chemical compound CC1=CC(O)=CC=C1O CNHDIAIOKMXOLK-UHFFFAOYSA-N 0.000 description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 229910052757 nitrogen Inorganic materials 0.000 description 9
- 229920000642 polymer Polymers 0.000 description 9
- 239000002904 solvent Substances 0.000 description 9
- 238000003786 synthesis reaction Methods 0.000 description 9
- 239000007864 aqueous solution Substances 0.000 description 8
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 238000011161 development Methods 0.000 description 7
- 230000018109 developmental process Effects 0.000 description 7
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 6
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 6
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 6
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 6
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 6
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 6
- 238000010992 reflux Methods 0.000 description 6
- 229920006395 saturated elastomer Polymers 0.000 description 6
- 239000007921 spray Substances 0.000 description 6
- 239000003513 alkali Substances 0.000 description 5
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- OMIGHNLMNHATMP-UHFFFAOYSA-N 2-hydroxyethyl prop-2-enoate Chemical compound OCCOC(=O)C=C OMIGHNLMNHATMP-UHFFFAOYSA-N 0.000 description 4
- DPTGFYXXFXSRIR-UHFFFAOYSA-N 7-oxabicyclo[4.1.0]heptan-4-ylmethyl prop-2-enoate Chemical compound C1C(COC(=O)C=C)CCC2OC21 DPTGFYXXFXSRIR-UHFFFAOYSA-N 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical group N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 4
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 4
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 244000028419 Styrax benzoin Species 0.000 description 4
- 235000000126 Styrax benzoin Nutrition 0.000 description 4
- 235000008411 Sumatra benzointree Nutrition 0.000 description 4
- 230000032683 aging Effects 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 235000019382 gum benzoic Nutrition 0.000 description 4
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 4
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 4
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 150000005846 sugar alcohols Polymers 0.000 description 4
- 229920001187 thermosetting polymer Polymers 0.000 description 4
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- 229920000877 Melamine resin Polymers 0.000 description 3
- SJRJJKPEHAURKC-UHFFFAOYSA-N N-Methylmorpholine Chemical compound CN1CCOCC1 SJRJJKPEHAURKC-UHFFFAOYSA-N 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 3
- 229960002130 benzoin Drugs 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 229920006026 co-polymeric resin Polymers 0.000 description 3
- QGBSISYHAICWAH-UHFFFAOYSA-N dicyandiamide Chemical compound NC(N)=NC#N QGBSISYHAICWAH-UHFFFAOYSA-N 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000003208 petroleum Substances 0.000 description 3
- 150000003003 phosphines Chemical class 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 229910000029 sodium carbonate Inorganic materials 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 150000003512 tertiary amines Chemical class 0.000 description 3
- 238000010998 test method Methods 0.000 description 3
- FVQMJJQUGGVLEP-UHFFFAOYSA-N (2-methylpropan-2-yl)oxy 2-ethylhexaneperoxoate Chemical compound CCCCC(CC)C(=O)OOOC(C)(C)C FVQMJJQUGGVLEP-UHFFFAOYSA-N 0.000 description 2
- ROLAGNYPWIVYTG-UHFFFAOYSA-N 1,2-bis(4-methoxyphenyl)ethanamine;hydrochloride Chemical compound Cl.C1=CC(OC)=CC=C1CC(N)C1=CC=C(OC)C=C1 ROLAGNYPWIVYTG-UHFFFAOYSA-N 0.000 description 2
- FKTHNVSLHLHISI-UHFFFAOYSA-N 1,2-bis(isocyanatomethyl)benzene Chemical compound O=C=NCC1=CC=CC=C1CN=C=O FKTHNVSLHLHISI-UHFFFAOYSA-N 0.000 description 2
- VZXTWGWHSMCWGA-UHFFFAOYSA-N 1,3,5-triazine-2,4-diamine Chemical compound NC1=NC=NC(N)=N1 VZXTWGWHSMCWGA-UHFFFAOYSA-N 0.000 description 2
- BOCJQSFSGAZAPQ-UHFFFAOYSA-N 1-chloroanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl BOCJQSFSGAZAPQ-UHFFFAOYSA-N 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 2
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 2
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 2
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 2
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 2
- CWLKGDAVCFYWJK-UHFFFAOYSA-N 3-aminophenol Chemical compound NC1=CC=CC(O)=C1 CWLKGDAVCFYWJK-UHFFFAOYSA-N 0.000 description 2
- QZPSOSOOLFHYRR-UHFFFAOYSA-N 3-hydroxypropyl prop-2-enoate Chemical compound OCCCOC(=O)C=C QZPSOSOOLFHYRR-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical group CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 2
- JLTDJTHDQAWBAV-UHFFFAOYSA-N N,N-dimethylaniline Chemical compound CN(C)C1=CC=CC=C1 JLTDJTHDQAWBAV-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 2
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical class CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 2
- 239000007983 Tris buffer Substances 0.000 description 2
- 150000008065 acid anhydrides Chemical class 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 150000004056 anthraquinones Chemical class 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 235000013877 carbamide Nutrition 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 229930003836 cresol Natural products 0.000 description 2
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 2
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 2
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 2
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 2
- LEQAOMBKQFMDFZ-UHFFFAOYSA-N glyoxal Chemical compound O=CC=O LEQAOMBKQFMDFZ-UHFFFAOYSA-N 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 2
- 239000011976 maleic acid Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- CHJJGSNFBQVOTG-UHFFFAOYSA-N methylguanidine Chemical compound CNC(N)=N CHJJGSNFBQVOTG-UHFFFAOYSA-N 0.000 description 2
- 239000012766 organic filler Substances 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
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- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229920005601 base polymer Polymers 0.000 description 1
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 1
- 150000001558 benzoic acid derivatives Chemical class 0.000 description 1
- MTZQAGJQAFMTAQ-UHFFFAOYSA-N benzoic acid ethyl ester Natural products CCOC(=O)C1=CC=CC=C1 MTZQAGJQAFMTAQ-UHFFFAOYSA-N 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- UUZYBYIOAZTMGC-UHFFFAOYSA-M benzyl(trimethyl)azanium;bromide Chemical compound [Br-].C[N+](C)(C)CC1=CC=CC=C1 UUZYBYIOAZTMGC-UHFFFAOYSA-M 0.000 description 1
- KXHPPCXNWTUNSB-UHFFFAOYSA-M benzyl(trimethyl)azanium;chloride Chemical compound [Cl-].C[N+](C)(C)CC1=CC=CC=C1 KXHPPCXNWTUNSB-UHFFFAOYSA-M 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- JRPRCOLKIYRSNH-UHFFFAOYSA-N bis(oxiran-2-ylmethyl) benzene-1,2-dicarboxylate Chemical compound C=1C=CC=C(C(=O)OCC2OC2)C=1C(=O)OCC1CO1 JRPRCOLKIYRSNH-UHFFFAOYSA-N 0.000 description 1
- QUDWYFHPNIMBFC-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,2-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC=C1C(=O)OCC=C QUDWYFHPNIMBFC-UHFFFAOYSA-N 0.000 description 1
- OOORLLSLMPBSPT-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,3-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC(C(=O)OCC=C)=C1 OOORLLSLMPBSPT-UHFFFAOYSA-N 0.000 description 1
- MQDJYUACMFCOFT-UHFFFAOYSA-N bis[2-(1-hydroxycyclohexyl)phenyl]methanone Chemical compound C=1C=CC=C(C(=O)C=2C(=CC=CC=2)C2(O)CCCCC2)C=1C1(O)CCCCC1 MQDJYUACMFCOFT-UHFFFAOYSA-N 0.000 description 1
- VYHBFRJRBHMIQZ-UHFFFAOYSA-N bis[4-(diethylamino)phenyl]methanone Chemical compound C1=CC(N(CC)CC)=CC=C1C(=O)C1=CC=C(N(CC)CC)C=C1 VYHBFRJRBHMIQZ-UHFFFAOYSA-N 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 239000007809 chemical reaction catalyst Substances 0.000 description 1
- 229930016911 cinnamic acid Natural products 0.000 description 1
- 235000013985 cinnamic acid Nutrition 0.000 description 1
- 239000004927 clay Substances 0.000 description 1
- 229910052570 clay Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- LDHQCZJRKDOVOX-NSCUHMNNSA-N crotonic acid Chemical compound C\C=C\C(O)=O LDHQCZJRKDOVOX-NSCUHMNNSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000007766 curtain coating Methods 0.000 description 1
- IFDVQVHZEKPUSC-UHFFFAOYSA-N cyclohex-3-ene-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCC=CC1C(O)=O IFDVQVHZEKPUSC-UHFFFAOYSA-N 0.000 description 1
- QSAWQNUELGIYBC-UHFFFAOYSA-N cyclohexane-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCCCC1C(O)=O QSAWQNUELGIYBC-UHFFFAOYSA-N 0.000 description 1
- 125000004386 diacrylate group Chemical group 0.000 description 1
- GUJOJGAPFQRJSV-UHFFFAOYSA-N dialuminum;dioxosilane;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3].O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O GUJOJGAPFQRJSV-UHFFFAOYSA-N 0.000 description 1
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 1
- OZLBDYMWFAHSOQ-UHFFFAOYSA-N diphenyliodanium Chemical compound C=1C=CC=CC=1[I+]C1=CC=CC=C1 OZLBDYMWFAHSOQ-UHFFFAOYSA-N 0.000 description 1
- ZZTCPWRAHWXWCH-UHFFFAOYSA-N diphenylmethanediamine Chemical compound C=1C=CC=CC=1C(N)(N)C1=CC=CC=C1 ZZTCPWRAHWXWCH-UHFFFAOYSA-N 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000002845 discoloration Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- SSTAXLJQSRFHMB-UHFFFAOYSA-N ethyl 1,4-dimethylcyclohexa-2,4-diene-1-carboxylate Chemical compound CCOC(=O)C1(C)CC=C(C)C=C1 SSTAXLJQSRFHMB-UHFFFAOYSA-N 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229940015043 glyoxal Drugs 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- RRAMGCGOFNQTLD-UHFFFAOYSA-N hexamethylene diisocyanate Chemical compound O=C=NCCCCCCN=C=O RRAMGCGOFNQTLD-UHFFFAOYSA-N 0.000 description 1
- ACCCMOQWYVYDOT-UHFFFAOYSA-N hexane-1,1-diol Chemical compound CCCCCC(O)O ACCCMOQWYVYDOT-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 150000002430 hydrocarbons Chemical group 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- FRCAGVUKJQCWBD-UHFFFAOYSA-L iodine green Chemical compound [Cl-].[Cl-].C1=CC(N(C)C)=CC=C1C(\C=1C=CC(=CC=1)[N+](C)(C)C)=C/1C=C(C)C(=[N+](C)C)C=C\1 FRCAGVUKJQCWBD-UHFFFAOYSA-L 0.000 description 1
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 1
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 208000013469 light sensitivity Diseases 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004850 liquid epoxy resins (LERs) Substances 0.000 description 1
- 229940057995 liquid paraffin Drugs 0.000 description 1
- 229940018564 m-phenylenediamine Drugs 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- AYLRODJJLADBOB-QMMMGPOBSA-N methyl (2s)-2,6-diisocyanatohexanoate Chemical compound COC(=O)[C@@H](N=C=O)CCCCN=C=O AYLRODJJLADBOB-QMMMGPOBSA-N 0.000 description 1
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000002480 mineral oil Substances 0.000 description 1
- 229910052901 montmorillonite Inorganic materials 0.000 description 1
- GEMHFKXPOCTAIP-UHFFFAOYSA-N n,n-dimethyl-n'-phenylcarbamimidoyl chloride Chemical compound CN(C)C(Cl)=NC1=CC=CC=C1 GEMHFKXPOCTAIP-UHFFFAOYSA-N 0.000 description 1
- 229940088644 n,n-dimethylacrylamide Drugs 0.000 description 1
- UQKAOOAFEFCDGT-UHFFFAOYSA-N n,n-dimethyloctan-1-amine Chemical compound CCCCCCCCN(C)C UQKAOOAFEFCDGT-UHFFFAOYSA-N 0.000 description 1
- YLGYACDQVQQZSW-UHFFFAOYSA-N n,n-dimethylprop-2-enamide Chemical compound CN(C)C(=O)C=C YLGYACDQVQQZSW-UHFFFAOYSA-N 0.000 description 1
- XTAZYLNFDRKIHJ-UHFFFAOYSA-N n,n-dioctyloctan-1-amine Chemical compound CCCCCCCCN(CCCCCCCC)CCCCCCCC XTAZYLNFDRKIHJ-UHFFFAOYSA-N 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- WZESLRDFSNLECD-UHFFFAOYSA-N phenyl prop-2-eneperoxoate Chemical class C=CC(=O)OOC1=CC=CC=C1 WZESLRDFSNLECD-UHFFFAOYSA-N 0.000 description 1
- 150000004714 phosphonium salts Chemical class 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 239000002685 polymerization catalyst Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 238000011417 postcuring Methods 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- QCTJRYGLPAFRMS-UHFFFAOYSA-N prop-2-enoic acid;1,3,5-triazine-2,4,6-triamine Chemical compound OC(=O)C=C.NC1=NC(N)=NC(N)=N1 QCTJRYGLPAFRMS-UHFFFAOYSA-N 0.000 description 1
- GHJOIQFPDMIKHT-UHFFFAOYSA-N propane-1,2,3-triol;prop-2-enoic acid Chemical compound OC(=O)C=C.OCC(O)CO GHJOIQFPDMIKHT-UHFFFAOYSA-N 0.000 description 1
- FAIDIRVMPHBRLT-UHFFFAOYSA-N propane-1,2,3-triol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OCC(O)CO FAIDIRVMPHBRLT-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000007151 ring opening polymerisation reaction Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- JRMUNVKIHCOMHV-UHFFFAOYSA-M tetrabutylammonium bromide Chemical compound [Br-].CCCC[N+](CCCC)(CCCC)CCCC JRMUNVKIHCOMHV-UHFFFAOYSA-M 0.000 description 1
- UFDHBDMSHIXOKF-UHFFFAOYSA-N tetrahydrophthalic acid Natural products OC(=O)C1=C(C(O)=O)CCCC1 UFDHBDMSHIXOKF-UHFFFAOYSA-N 0.000 description 1
- DDFYFBUWEBINLX-UHFFFAOYSA-M tetramethylammonium bromide Chemical compound [Br-].C[N+](C)(C)C DDFYFBUWEBINLX-UHFFFAOYSA-M 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 150000003573 thiols Chemical class 0.000 description 1
- KUAZQDVKQLNFPE-UHFFFAOYSA-N thiram Chemical compound CN(C)C(=S)SSC(=S)N(C)C KUAZQDVKQLNFPE-UHFFFAOYSA-N 0.000 description 1
- 229960002447 thiram Drugs 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- DVKJHBMWWAPEIU-UHFFFAOYSA-N toluene 2,4-diisocyanate Chemical compound CC1=CC=C(N=C=O)C=C1N=C=O DVKJHBMWWAPEIU-UHFFFAOYSA-N 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- FUTRAFMCQUHVQM-UHFFFAOYSA-M tributyl(decyl)phosphanium;chloride Chemical compound [Cl-].CCCCCCCCCC[P+](CCCC)(CCCC)CCCC FUTRAFMCQUHVQM-UHFFFAOYSA-M 0.000 description 1
- QEXITCCVENILJI-UHFFFAOYSA-M tributyl(phenyl)azanium;chloride Chemical compound [Cl-].CCCC[N+](CCCC)(CCCC)C1=CC=CC=C1 QEXITCCVENILJI-UHFFFAOYSA-M 0.000 description 1
- GLSQMJPVEVGXMZ-UHFFFAOYSA-N tributyl-(2,5-dihydroxyphenyl)phosphanium;bromide Chemical compound [Br-].CCCC[P+](CCCC)(CCCC)C1=CC(O)=CC=C1O GLSQMJPVEVGXMZ-UHFFFAOYSA-N 0.000 description 1
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 150000003672 ureas Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- DGVVWUTYPXICAM-UHFFFAOYSA-N β‐Mercaptoethanol Chemical compound OCCS DGVVWUTYPXICAM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Materials For Photolithography (AREA)
- Polymerisation Methods In General (AREA)
- Macromonomer-Based Addition Polymer (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は感光性樹脂組成物に
関し、特に、ソルダーレジストなどのプリント配線板材
料、プラスチックレリーフ材料、フラット・パネル・デ
ィスプレー(FPD)用部材、コーティング保護膜、並
びにガラスや石の蝕刻、及び金属精密加工などに好適に
用いられる新規な感光性樹脂組成物に関する。The present invention relates to a photosensitive resin composition, and more particularly to a printed wiring board material such as a solder resist, a plastic relief material, a member for a flat panel display (FPD), a coating protective film, a glass protective film, The present invention relates to a novel photosensitive resin composition suitably used for stone etching, metal precision processing, and the like.
【0002】[0002]
【従来の技術】ソルダーレジストは、通常、プリント配
線板表面に電子部品を実装する際に回路をはんだから保
護するためのレジストであり、回路導体のうちの実装パ
ッド(はんだパッド)を除いた全面に被覆される。この
ように、ソルダーレジストは、回路導体が空気に直接曝
されて酸化したり、あるいは湿分により腐食されるのを
防止する保護膜として機能する他、はんだが不要な部分
に流出したり付着するのを防止するソルダーダムとして
も機能する。そのため、ソルダーレジストには、密着性
や電気絶縁性、はんだ耐熱性、耐溶剤性、耐アルカリ
性、耐酸性、耐めっき性などの諸特性が要求される。2. Description of the Related Art Solder resist is a resist for protecting a circuit from solder when electronic components are mounted on the surface of a printed wiring board, and the entire surface of a circuit conductor excluding mounting pads (solder pads). Coated. As described above, the solder resist functions as a protective film for preventing the circuit conductor from being directly exposed to the air and being oxidized or corroded by moisture, and also flows out or adheres to an unnecessary portion of the solder. It also functions as a solder dam that prevents Therefore, the solder resist is required to have various properties such as adhesion, electrical insulation, solder heat resistance, solvent resistance, alkali resistance, acid resistance, and plating resistance.
【0003】このような諸特性が要求されるソルダーレ
ジストを形成する従来技術の一つとして、熱硬化型又は
紫外線硬化型の組成物を基板上にスクリーン印刷法にて
印刷し、その塗膜を紫外線又は熱により硬化する方法が
挙げられる(特公昭51−14044号、特公昭61−
48800号参照)。しかし、近年の電子機器類の小型
化・高機能化により、配線基板においても回路のパター
ン密度やパターン精度の向上に対する要求が高くなって
おり、従来の熱硬化型又は紫外線硬化型の組成物を用い
たスクリーン印刷法では、印刷精度の限界から満足でき
る結果は得られていない。しかも、スクリーン印刷法で
は、印刷時のブリードや滲み、ダレといった現象が発生
し、所定位置のはんだパッドにはんだが付かないなどの
トラブルの発生が見られた。[0003] As one of the conventional techniques for forming a solder resist requiring such various properties, a thermosetting or ultraviolet curable composition is printed on a substrate by a screen printing method, and the coating film is applied. Examples of the method include curing by ultraviolet light or heat (JP-B-51-14044, JP-B-61-14044).
No. 48800). However, due to the recent miniaturization and high functionality of electronic devices, the demand for improvement in circuit pattern density and pattern accuracy has been increasing even in wiring boards, and conventional thermosetting or ultraviolet-curing compositions have been used. With the screen printing method used, satisfactory results have not been obtained due to limitations in printing accuracy. Moreover, in the screen printing method, phenomena such as bleeding, bleeding, and sagging at the time of printing occur, and troubles such as solder not attaching to the solder pad at a predetermined position were observed.
【0004】これに対し、上記問題を解消し、パターン
精度の向上を図り得る他の従来技術として、溶剤現像型
又はアルカリ現像型の感光性樹脂組成物を用い、露光、
現像によりパターンを形成するフォト法が知られてい
る。特に最近では、環境汚染の問題から、このようなフ
ォト法に用いる感光性樹脂組成物としては、溶剤現像型
からアルカリ現像型の組成物を用いる傾向にある。この
ようなアルカリ現像型の感光性樹脂組成物として、例え
ば、ノボラック型エポキシ樹脂と不飽和モノカルボン酸
との反応生成物に多塩基酸無水物を付加させて得られる
感光性プレポリマーをベースポリマーとして含有する組
成物が挙げられる(特開昭61−243869号、特開
平7−50473号、特公平7−17737号参照)。On the other hand, another conventional technique which can solve the above problem and improve the pattern accuracy is to use a photosensitive resin composition of a solvent development type or an alkali development type to expose,
A photo method for forming a pattern by development is known. Particularly, recently, due to the problem of environmental pollution, as a photosensitive resin composition used in such a photo method, there is a tendency to use a composition of a solvent development type to an alkali development type. As such an alkali-developing type photosensitive resin composition, for example, a photosensitive prepolymer obtained by adding a polybasic anhydride to a reaction product of a novolak type epoxy resin and an unsaturated monocarboxylic acid as a base polymer (See JP-A-61-243869, JP-A-7-50473, and JP-B-7-17737).
【0005】また一方で、脂環式エポキシ基含有不飽和
化合物をポリ(メタ)アクリル系樹脂に付加した重合体
を含有する樹脂組成物が提案されている。しかしなが
ら、この提案に係る組成物では、光感度が未だ充分とは
いえず、また、金めっき等の過酷な条件において塗膜が
剥がれる等の金めっき耐性に劣るといった問題があっ
た。On the other hand, a resin composition containing a polymer obtained by adding an alicyclic epoxy group-containing unsaturated compound to a poly (meth) acrylic resin has been proposed. However, the composition according to this proposal has a problem that the photosensitivity is not yet sufficient and the gold plating resistance is poor such as peeling of the coating film under severe conditions such as gold plating.
【0006】[0006]
【発明が解決しようとする課題】そこで、本発明は、前
記従来技術が抱える問題を解決するためになされたもの
であり、その主たる目的は、ソルダーレジストに要求さ
れる諸特性を満足すると共に、光感度及び解像性を飛躍
的に向上でき、しかも無電解金めっき耐性に優れた硬化
皮膜が得られる感光性樹脂組成物を提供することにあ
る。SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above-mentioned problems of the prior art, and its main purpose is to satisfy various characteristics required for a solder resist, An object of the present invention is to provide a photosensitive resin composition capable of dramatically improving photosensitivity and resolution and obtaining a cured film having excellent electroless gold plating resistance.
【0007】[0007]
【課題を解決するための手段】前記目的を達成するため
に、本発明の第一の態様によれば、(A−1)(a)β
−カルボキシエチルアクリレート(以下、「β−CE
A」と略記する。)、(b)酸基含有不飽和化合物及び
(c)(メタ)アクリル酸エステルからなる共重合体の
一部の酸基に、脂環式エポキシ基含有不飽和化合物のエ
ポキシ基を付加させて得られる変性共重合体、(B)ア
セトアセトキシエチルアクリレート、アクリロイルモル
フォリン及びテトラヒドロフルフリルアクリレートより
なる群から選ばれる少なくとも1種のモノマー、(C)
1分子中に2つ以上の不飽和基を有し、環状骨格を持つ
活性エネルギー線硬化性樹脂、(D)希釈剤、及び
(E)光重合開始剤を含有することを特徴とする感光性
樹脂組成物が提供される。According to a first aspect of the present invention, there is provided (A-1) (a) β
-Carboxyethyl acrylate (hereinafter, “β-CE
A ". ), (B) adding an epoxy group of an alicyclic epoxy group-containing unsaturated compound to some acid groups of a copolymer comprising an acid group-containing unsaturated compound and (c) a (meth) acrylic ester; The resulting modified copolymer, (B) at least one monomer selected from the group consisting of acetoacetoxyethyl acrylate, acryloylmorpholine and tetrahydrofurfuryl acrylate, (C)
Photosensitivity characterized by containing an active energy ray-curable resin having two or more unsaturated groups in one molecule and having a cyclic skeleton, (D) a diluent, and (E) a photopolymerization initiator. A resin composition is provided.
【0008】また、本発明の第二の態様によれば、(A
−2)(a)β−CEA、(b)酸基含有不飽和化合
物、(c)(メタ)アクリル酸エステル、及び(d)ア
セトアセトキシエチルアクリレート、アクリロイルモル
フォリン及びテトラヒドロフルフリルアクリレートより
なる群から選ばれる少なくとも1種のモノマーからなる
共重合体の一部の酸基に、脂環式エポキシ基含有不飽和
化合物のエポキシ基を付加させて得られる変性共重合
体、(C)1分子中に2つ以上の不飽和基を有し、環状
骨格を持つ活性エネルギー線硬化性樹脂、(D)希釈
剤、及び(E)光重合開始剤を含有することを特徴とす
る感光性樹脂組成物が提供される。According to a second aspect of the present invention, (A
-2) a group consisting of (a) β-CEA, (b) an acid group-containing unsaturated compound, (c) (meth) acrylate, and (d) acetoacetoxyethyl acrylate, acryloylmorpholine and tetrahydrofurfuryl acrylate. (C) a modified copolymer obtained by adding an epoxy group of an alicyclic epoxy group-containing unsaturated compound to a part of acid groups of a copolymer composed of at least one monomer selected from the group consisting of: Resin composition comprising an active energy ray-curable resin having two or more unsaturated groups and having a cyclic skeleton, (D) a diluent, and (E) a photopolymerization initiator. Is provided.
【0009】特に好適な態様として、上記活性エネルギ
ー線硬化性樹脂(C)は、(e)ノボラック型エポキシ
化合物と(f)不飽和モノカルボン酸とのエステル化反
応により生成するエポキシ基のエステル化物である感光
性プレポリマー(C−1)、及び(g)ジイソシアネー
ト類と(h)1分子中に1個の水酸基を有する(メタ)
アクリレート類との反応生成物を上記感光性プレポリマ
ー(C−1)の二級水酸基と反応させて得られる感光性
プレポリマー(C−2)よりなる群から選択される少な
くとも1種であり、(A)成分と(C)成分の配合比は
100:2〜100:50(質量基準)の範囲内にあ
る。In a particularly preferred embodiment, the active energy ray-curable resin (C) is an esterified product of an epoxy group formed by an esterification reaction between (e) a novolak type epoxy compound and (f) an unsaturated monocarboxylic acid. A photosensitive prepolymer (C-1), and (g) a diisocyanate and (h) a (meth) having one hydroxyl group in one molecule.
At least one selected from the group consisting of a photosensitive prepolymer (C-2) obtained by reacting a reaction product with an acrylate with a secondary hydroxyl group of the photosensitive prepolymer (C-1); The mixing ratio of the component (A) and the component (C) is in the range of 100: 2 to 100: 50 (by mass).
【0010】さらに他の態様として、本発明の感光性樹
脂組成物は、(F)エポキシ化合物、及び/又は(G)
潜在性硬化密着付与剤、及び/又は(H)無機充填剤を
含有することを特徴としている。なお、上記脂環式エポ
キシ基含有不飽和化合物は、3,4−シクロヘキシルメ
チル(メタ)アクリレートであることが好ましい。In still another embodiment, the photosensitive resin composition of the present invention comprises (F) an epoxy compound and / or (G)
It is characterized by containing a latent cured adhesion-imparting agent and / or (H) an inorganic filler. The alicyclic epoxy group-containing unsaturated compound is preferably 3,4-cyclohexylmethyl (meth) acrylate.
【0011】[0011]
【発明の実施の形態】本発明の感光性樹脂組成物は、組
成物を構成するβ−CEA(a)、酸基含有不飽和化合
物(b)、(メタ)アクリル酸エステル(c)からなる
共重合体の一部の酸基に脂環式エポキシ基含有不飽和化
合物のエポキシ基を付加させて得られる変性共重合体
(A)に対し、アセトアセトキシエチルアクリレート、
アクリロイルモルフォリン及びテトラヒドロフルフリル
アクリレートよりなる群から選ばれる少なくとも1種の
モノマーを組成物成分として添加するか、あるいは前記
共重合体の骨格中に予め導入してなる点に第1の特徴が
ある。また本発明の感光性樹脂組成物は、1分子中に2
つ以上の不飽和基を有し、環状骨格を持つ活性エネルギ
ー線硬化性樹脂(C)を配合した点に第2の特徴があ
る。これにより、ソルダーレジストに要求される諸特性
を満足すると共に、光感度及び解像性を飛躍的に向上で
き、しかも無電解金めっき耐性に優れた硬化皮膜が得ら
れる感光性樹脂組成物を提供することができる。BEST MODE FOR CARRYING OUT THE INVENTION The photosensitive resin composition of the present invention comprises β-CEA (a), an acid group-containing unsaturated compound (b), and a (meth) acrylate (c) which constitute the composition. To a modified copolymer (A) obtained by adding an epoxy group of an alicyclic epoxy group-containing unsaturated compound to a part of acid groups of the copolymer, acetoacetoxyethyl acrylate,
The first feature is that at least one monomer selected from the group consisting of acryloylmorpholine and tetrahydrofurfuryl acrylate is added as a composition component or is previously introduced into the skeleton of the copolymer. . In addition, the photosensitive resin composition of the present invention contains 2 per molecule.
The second feature is that the active energy ray-curable resin (C) having at least one unsaturated group and having a cyclic skeleton is blended. This provides a photosensitive resin composition that satisfies various characteristics required for a solder resist, can dramatically improve photosensitivity and resolution, and can provide a cured film having excellent electroless gold plating resistance. can do.
【0012】このような本発明の感光性樹脂組成物にお
いて、前記β−CEA(a)は下記構造式を有するもの
であり、共重合樹脂の主骨格を形成する不飽和二重結合
がカルボキシル基と離れている構造であるため、そのカ
ルボキシル基と付加反応する脂環式エポキシ基含有不飽
和化合物の不飽和二重結合が主鎖による立体障害の影響
を受けない位置となる。その結果、本発明の感光性樹脂
組成物は、光感度が向上する。In the photosensitive resin composition of the present invention, the β-CEA (a) has the following structural formula, and the unsaturated double bond forming the main skeleton of the copolymer resin has a carboxyl group. And the unsaturated double bond of the alicyclic epoxy group-containing unsaturated compound that undergoes an addition reaction with the carboxyl group is a position not affected by steric hindrance by the main chain. As a result, the photosensitive resin composition of the present invention has improved photosensitivity.
【化1】 Embedded image
【0013】前記酸基含有不飽和化合物(b)は、分子
中に不飽和基を有し、かつ少なくとも1個の酸基を有す
る化合物であればよく、特定のものに限定されない。そ
の具体例としては、(メタ)アクリル酸、ビニルフェノ
ール類、分子中に2個以上のカルボキシル基を含むマレ
イン酸などが挙げられ、これらを単独で又は2種以上を
組み合わせて用いることができる。本発明では、これら
の中でも(メタ)アクリル酸が好ましい。なお、本明細
書中で(メタ)アクリル酸とは、アクリル酸とメタアク
リル酸を総称する用語であり、他の類似の表現について
も同様である。The acid group-containing unsaturated compound (b) may be any compound having an unsaturated group in the molecule and at least one acid group, and is not limited to a specific compound. Specific examples thereof include (meth) acrylic acid, vinylphenols, and maleic acid having two or more carboxyl groups in a molecule, and these can be used alone or in combination of two or more. In the present invention, (meth) acrylic acid is preferable among these. In this specification, (meth) acrylic acid is a general term for acrylic acid and methacrylic acid, and the same applies to other similar expressions.
【0014】前記(メタ)アクリル酸エステル(c)の
具体例としては、メチル(メタ)アクリレート、エチル
(メタ)アクリレート、プロピル(メタ)アクリレー
ト、ブチル(メタ)アクリレート、ペンチル(メタ)ア
クリレート、ヘキシル(メタ)アクリレート、アダマン
チル(メタ)アクリレート、ノルボルニル(メタ)アク
リレートなどの(メタ)アクリル酸アルキルエステル
類;2−ヒドロキシエチル(メタ)アクリレート、ヒド
ロキシプロピル(メタ)アクリレート、ヒドロキシブチ
ル(メタ)アクリレート、カプロカクトン変性2−ヒド
ロキシエチル(メタ)アクリレート、ヒドロキシアダマ
ンチル(メタ)アクリレート、ヒドロキシノルボルニル
(メタ)アクリレートなどの水酸基を有する(メタ)ア
クリル酸エステル類;メトキシジエチレングリコール
(メタ)アクリレート、エトキシジエチレングリコール
(メタ)アクリレート、イソオクチルオキシジエチレン
グリコール(メタ)アクリレート、フェノキシトリエチ
レングリコール(メタ)アクリレート、メトキシトリエ
チレングリコール(メタ)アクリレート、メトキシポリ
エチレングリコール(メタ)アクリレートなどの(メ
タ)アクリレート等が挙げられる。Specific examples of the (meth) acrylate (c) include methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, pentyl (meth) acrylate, and hexyl. (Meth) acrylate alkyl esters such as (meth) acrylate, adamantyl (meth) acrylate, norbornyl (meth) acrylate; 2-hydroxyethyl (meth) acrylate, hydroxypropyl (meth) acrylate, hydroxybutyl (meth) acrylate, (Meth) acrylates having a hydroxyl group such as caprocactone-modified 2-hydroxyethyl (meth) acrylate, hydroxyadamantyl (meth) acrylate, and hydroxynorbornyl (meth) acrylate; Toxiethylene glycol (meth) acrylate, ethoxydiethylene glycol (meth) acrylate, isooctyloxydiethylene glycol (meth) acrylate, phenoxytriethylene glycol (meth) acrylate, methoxytriethylene glycol (meth) acrylate, methoxypolyethylene glycol (meth) acrylate, etc. (Meth) acrylate and the like.
【0015】このような本発明における共重合体成分
(A−1)を構成する上記(a)、(b)、(c)成分
のモル比率は、任意に選択することができるが、(a)
/(b)/(c)が2〜50/20〜60/30〜80
の範囲にあることが好ましく、より好ましくは、5〜4
0/30〜60/30〜50の範囲とする。この理由
は、β−CEA(a)のモル比率が上記範囲より小さい
と光感度が大幅に低下し、一方、上記範囲を超えると乾
燥塗膜の指触乾燥性が低下するからである。The molar ratio of the components (a), (b) and (c) constituting the copolymer component (A-1) in the present invention can be arbitrarily selected. )
/ (B) / (c) is 2 to 50/20 to 60/30 to 80
And more preferably 5 to 4
The range is 0/30 to 60/30 to 50. The reason for this is that if the molar ratio of β-CEA (a) is smaller than the above range, the photosensitivity is significantly reduced, while if it exceeds the above range, the dryness of the dry coating film to the touch is reduced.
【0016】また、本発明の他の態様における共重合体
成分(A−2)において、上記(a)、(b)、(c)
からなる共重合体の樹脂骨格中に導入するアセトアセト
キシエチルアクリレート、アクリロイルモルフォリン及
びテトラヒドロフルフリルアクリレートよりなる群から
選ばれる少なくとも1種のモノマー(d)の量は、任意
に選択することができるが、好ましくは(a)、
(b)、(c)からなる共重合樹脂100質量部に対し
て1〜20質量部とする。この(d)成分は、添加成分
(B)として組成物中に配合する場合には、その使用量
をさらに多くすることが望ましく、好ましくは(a)、
(b)、(c)からなる共重合樹脂100質量部に対し
て1〜50質量部の範囲で添加する。これらの理由は、
モノマー成分(d)又は添加成分(B)の導入量又は添
加量が上記範囲よりも少ないと、得られる硬化皮膜の無
電解金めっき耐性が不充分となり、一方、上記範囲を超
えると硬化皮膜のめっき耐性のさらなる向上が期待でき
ず、また乾燥塗膜の指触乾燥性に悪影響が生じるからで
ある。In the copolymer component (A-2) according to another embodiment of the present invention, the copolymer component (A), (b), (c)
The amount of at least one monomer (d) selected from the group consisting of acetoacetoxyethyl acrylate, acryloylmorpholine and tetrahydrofurfuryl acrylate to be introduced into the resin skeleton of the copolymer consisting of But preferably (a),
The amount is 1 to 20 parts by mass based on 100 parts by mass of the copolymer resin composed of (b) and (c). When the component (d) is added to the composition as the additional component (B), it is desirable to further increase the amount of the component (A) to be used.
It is added in the range of 1 to 50 parts by mass with respect to 100 parts by mass of the copolymer resin composed of (b) and (c). These reasons are:
When the introduction amount or the addition amount of the monomer component (d) or the additional component (B) is less than the above range, the obtained cured film has insufficient resistance to electroless gold plating. This is because further improvement in plating resistance cannot be expected, and the dryness of the dry coating film to the touch is adversely affected.
【0017】本発明では、前述した(a)、(b)、
(c)からなる共重合体、又は(a)、(b)、
(c)、(d)からなる共重合体の一部の酸基に、脂環
式エポキシ基含有不飽和化合物のエポキシ基を触媒存在
下で付加させて、本発明の感光性樹脂組成物において感
光性成分となる変性共重合体(A−1)又は(A−2)
が得られる。この脂環式エポキシ基含有不飽和化合物
は、1分子中に1個のラジカル重合性の不飽和基と脂環
式エポキシ基とを有する化合物であればよく、特定のも
のに限定されない。その具体的な例としては、下記一般
式(1)〜(13)で示される化合物が挙げられる。In the present invention, the aforementioned (a), (b),
(C) a copolymer, or (a), (b),
The epoxy resin of the alicyclic epoxy group-containing unsaturated compound is added to a part of the acid groups of the copolymer composed of (c) and (d) in the presence of a catalyst to provide a photosensitive resin composition of the present invention. Modified copolymer (A-1) or (A-2) serving as a photosensitive component
Is obtained. The unsaturated compound having an alicyclic epoxy group may be a compound having one radically polymerizable unsaturated group and an alicyclic epoxy group in one molecule, and is not limited to a specific compound. Specific examples thereof include compounds represented by the following general formulas (1) to (13).
【化2】 各式中、R1は水素原子又はメチル基、R2は炭素数1〜
10のアルキレン基、R3は炭素数1〜10の炭化水素
基、kは0又は1〜10の整数を示す。これらの脂環式
エポキシ基含有不飽和化合物は、単独で又は2種以上を
組み合わせて用いることができる。これらの中でも、
3,4−エポキシシクロヘキシルメチル(メタ)アクリ
レートが好ましい。Embedded image In each formula, R 1 is a hydrogen atom or a methyl group, and R 2 has 1 to 1 carbon atoms.
An alkylene group of 10, R 3 represents a hydrocarbon group having 1 to 10 carbon atoms, and k represents 0 or an integer of 1 to 10. These alicyclic epoxy group-containing unsaturated compounds can be used alone or in combination of two or more. Among these,
3,4-Epoxycyclohexylmethyl (meth) acrylate is preferred.
【0018】このような脂環式エポキシ基含有不飽和化
合物は、その付加量を変性共重合体に対して5〜50モ
ル%とすることが望ましい。この理由は、付加量が5モ
ル%未満であると、得られる感光性樹脂組成物の紫外線
硬化性が悪く、硬化皮膜の物性が低下する。一方、付加
量が50モル%を超えると、樹脂の保存安定性が悪くな
るからである。It is desirable that the alicyclic epoxy group-containing unsaturated compound be added in an amount of 5 to 50 mol% based on the modified copolymer. The reason for this is that if the added amount is less than 5 mol%, the resulting photosensitive resin composition will have poor ultraviolet curability, and the physical properties of the cured film will be reduced. On the other hand, if the added amount exceeds 50 mol%, the storage stability of the resin will be poor.
【0019】このようにして得られる変性共重合体(A
−1)又は(A−2)は、その酸価を10〜150mg
KOH/gの範囲に調整することが好ましい。この理由
は、酸価が10mgKOH/g未満の場合には、弱アル
カリ水溶液での未露光部の除去が難しく、一方、酸価が
150mgKOH/gを超えると、硬化皮膜の耐水性や
電気特性が劣るなどの問題が生じるからである。また、
変性共重合体(A−1)又は(A−2)は、重量平均分
子量を5,000〜100,000の範囲に調整するこ
とが好ましい。この理由は、重量平均分子量が5,00
0未満であると、乾燥塗膜の指触乾燥性が著しく劣り、
一方、重量平均分子量が100,000を超えると、光
硬化皮膜の現像性や組成物の貯蔵安定性が著しく悪くな
るといった問題が生じるからである。The modified copolymer (A) thus obtained
-1) or (A-2) has an acid value of 10 to 150 mg.
It is preferable to adjust to a range of KOH / g. The reason for this is that if the acid value is less than 10 mgKOH / g, it is difficult to remove the unexposed portions with a weak alkaline aqueous solution, while if the acid value exceeds 150 mgKOH / g, the water resistance and electrical properties of the cured film become poor. This is because problems such as inferiority occur. Also,
The modified copolymer (A-1) or (A-2) preferably adjusts the weight average molecular weight to a range of 5,000 to 100,000. The reason is that the weight average molecular weight is 5,000.
If it is less than 0, the dryness of the dry coating film is extremely poor,
On the other hand, if the weight average molecular weight exceeds 100,000, there arises a problem that the developability of the photocurable film and the storage stability of the composition are significantly deteriorated.
【0020】なお、上記共重合体(酸基含有樹脂)の一
部の酸基に脂環式エポキシ基含有不飽和化合物を付加さ
せる際に使用する触媒としては、ジメチルベンジルアミ
ン、トリエチルアミン、テトラメチルエチレンジアミ
ン、トリ−n−オクチルアミンなどの3級アミン、テト
ラメチルアンモニウムクロライド、テトラメチルアンモ
ニウムブロマイド、テトラブチルアンモニウムブロマイ
ドなどの4級アンモニウム塩、テトラメチル尿素などの
アルキル尿素、テトラメチルグアニジンなどのアルキル
グアジニン、ナフテン酸コバルト等に代表される金属化
合物、有機金属錯体、トリフェニルホスフィン等のホス
フィン系及びこれらの塩などを挙げることができ、とり
わけトリフェニルホスフィンに代表される3級のホスフ
ィンが好適に用いられる。これらの触媒は、単独で又は
2種以上を組み合わせて用いることができ、使用する脂
環式エポキシ基含有不飽和化合物の量の0.01〜10
質量%、好ましくは0.5〜3.0質量%用いるのが望
ましい。この理由は、触媒量が0.01質量%より少な
いとその触媒効果が低く、一方、10質量%を超えても
触媒効果の増大は望めず、それ以上の量は加える必要が
ないからである。The catalyst used for adding the alicyclic epoxy group-containing unsaturated compound to some of the acid groups of the copolymer (acid group-containing resin) is dimethylbenzylamine, triethylamine, tetramethylamine or the like. Tertiary amines such as ethylenediamine and tri-n-octylamine; quaternary ammonium salts such as tetramethylammonium chloride, tetramethylammonium bromide and tetrabutylammonium bromide; alkyl ureas such as tetramethyl urea; alkyl guars such as tetramethyl guanidine Examples include metal compounds represented by dinin, cobalt naphthenate, etc., organometallic complexes, phosphines such as triphenylphosphine, and salts thereof, and tertiary phosphines represented by triphenylphosphine are particularly preferred. Used That. These catalysts can be used alone or in combination of two or more, and the amount of the alicyclic epoxy group-containing unsaturated compound to be used is 0.01 to 10%.
%, Preferably 0.5 to 3.0% by mass. The reason is that if the amount of the catalyst is less than 0.01% by mass, the catalytic effect is low, while if it exceeds 10% by mass, the catalytic effect cannot be expected to increase and it is not necessary to add more amount. .
【0021】次に、本発明の感光性樹脂組成物を構成す
る活性エネルギー線硬化性樹脂(C)としては、1分子
中に2つ以上の不飽和基を有し、環状骨格を持つ感光性
プレポリマーが用いられ、具体的には、(e)ノボラッ
ク型エポキシ化合物と(f)不飽和モノカルボン酸との
エステル化反応により生成するエポキシ基のエステル化
物である感光性プレポリマー(C−1)、及び/又は
(g)ジイソシアネート類と(h)1分子中に1個の水
酸基を有する(メタ)アクリレート類との反応生成物を
上記感光性プレポリマー(C−1)の二級水酸基と反応
させて得られる感光性プレポリマー(C−2)が好適に
用いられる。Next, the active energy ray-curable resin (C) constituting the photosensitive resin composition of the present invention is a photosensitive resin having two or more unsaturated groups in one molecule and having a cyclic skeleton. A prepolymer is used. Specifically, a photosensitive prepolymer (C-1) which is an esterified product of an epoxy group generated by an esterification reaction between (e) a novolak type epoxy compound and (f) an unsaturated monocarboxylic acid is used. And / or (g) a reaction product of a diisocyanate and (h) a (meth) acrylate having one hydroxyl group in one molecule with a secondary hydroxyl group of the photosensitive prepolymer (C-1). The photosensitive prepolymer (C-2) obtained by the reaction is suitably used.
【0022】上記ノボラック型エポキシ化合物(e)と
しては、東都化成(株)製 YDCN−701、YDC
N−704;大日本インキ化学工業(株)製 N−66
5、N−680、N−695;日本化薬(株)製 EO
CN−102、EOCN−104;旭化成工業(株)製
ECN−265、ECN−293、ECN−285、
ECN−299などのクレゾールノボラック型エポキシ
樹脂や、東都化成(株)製 YDPN−638、YDP
N−602;ダウ・ケミカル日本(株)製 DEN−4
31、DEN−438、DEN−439;チバ・スペシ
ャルティ・ケミカルズ(株)製 EPN−1138、E
PN−1235、EPN−1299;大日本インキ化学
工業(株)製 N−730、N−770などのフェノー
ルノボラック型エポキシ樹脂が挙げられる。また、ノボ
ラック型エポキシ樹脂の一部を、例えばビスフェノール
A型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、
ビスフェノールS型エポキシ樹脂、ビフェニル型エポキ
シ樹脂、ビキシレノール型エポキシ樹脂、トリスヒドロ
キシフェニルメタン型エポキシ樹脂、テトラフェニルエ
タン型エポキシ樹脂、脂環式エポキシ樹脂等のエポキシ
化合物に置き代えることができるが、プリント配線板用
ソルダーレジストとしてはフェノールノボラック型エポ
キシ化合物を用いるのが特に好ましい。Examples of the novolak type epoxy compound (e) include YDCN-701 and YDCN manufactured by Toto Kasei Co., Ltd.
N-704; N-66 manufactured by Dainippon Ink and Chemicals, Inc.
5, N-680, N-695; EO manufactured by Nippon Kayaku Co., Ltd.
CN-102, EOCN-104; ECN-265, ECN-293, ECN-285, manufactured by Asahi Kasei Corporation
Cresol novolak type epoxy resin such as ECN-299, YDPN-638, YDP manufactured by Toto Kasei Co., Ltd.
N-602; DEN-4 manufactured by Dow Chemical Japan Co., Ltd.
31, DEN-438, DEN-439; EPN-1138, E manufactured by Ciba Specialty Chemicals Co., Ltd.
PN-1235, EPN-1299; phenol novolak type epoxy resins such as N-730 and N-770 manufactured by Dainippon Ink and Chemicals, Inc .; Further, a part of the novolak type epoxy resin is, for example, bisphenol A type epoxy resin, bisphenol F type epoxy resin,
It can be replaced with epoxy compounds such as bisphenol S type epoxy resin, biphenyl type epoxy resin, bixylenol type epoxy resin, trishydroxyphenylmethane type epoxy resin, tetraphenylethane type epoxy resin, alicyclic epoxy resin, etc. It is particularly preferable to use a phenol novolak type epoxy compound as a solder resist for a wiring board.
【0023】上記不飽和モノカルボン酸(f)として
は、アクリル酸、メタクリル酸、β−スチリルアクリル
酸、β−フルフリルアクリル酸、クロトン酸、α−シア
ノ桂皮酸、桂皮酸など、及び飽和もしくは不飽和二塩基
酸無水物と1分子中に1個の水酸基を有する(メタ)ア
クリレート類との半エステル類、あるいは飽和もしくは
不飽和二塩基酸と不飽和モノグリシジル化合物との半エ
ステル類、例えばフタル酸、テトラヒドロフタル酸、ヘ
キサヒドロフタル酸、マレイン酸、コハク酸、イタコン
酸、クロレンド酸、メチルヘキサヒドロフタル酸、メチ
ルエンドメチレンテトラヒドロフタル酸及びメチルテト
ラヒドロフタル酸などの飽和もしくは不飽和二塩基酸無
水物とヒドロキシエチルアクリレート、ヒドロキシプロ
ピルアクリレート、ヒドロキシブチルアクリレート、ポ
リエチレングリコールモノアクリレート、グリセリンア
クリレート、トリメチルロールプロパンジアクリレー
ト、ペンタエリスリトールトリアクリレート、ジペンタ
エリスリトールペンタアクリレート及びトリグリシジル
イソシアヌレートのジアクリレートあるいは上記アクリ
レートに対応するメタクリレート類、あるいは前記飽和
もしくは不飽和二塩基酸とグリシジル(メタ)アクリレ
ートを常法により等モル比で反応させて得られる半エス
テルなどを、単独で又は2種以上を混合して用いられる
が、なかでも光反応性の点からアクリル酸が好ましい。Examples of the unsaturated monocarboxylic acid (f) include acrylic acid, methacrylic acid, β-styryl acrylic acid, β-furfuryl acrylic acid, crotonic acid, α-cyanocinnamic acid, cinnamic acid and the like. Half-esters of unsaturated dibasic acid anhydrides and (meth) acrylates having one hydroxyl group in one molecule, or half-esters of saturated or unsaturated dibasic acids and unsaturated monoglycidyl compounds, for example Saturated or unsaturated dibasic acids such as phthalic acid, tetrahydrophthalic acid, hexahydrophthalic acid, maleic acid, succinic acid, itaconic acid, chlorendic acid, methylhexahydrophthalic acid, methylendomethylenetetrahydrophthalic acid and methyltetrahydrophthalic acid Anhydride and hydroxyethyl acrylate, hydroxypropyl acrylate, Roxybutyl acrylate, polyethylene glycol monoacrylate, glycerin acrylate, trimethylolpropane diacrylate, pentaerythritol triacrylate, dipentaerythritol pentaacrylate and triglycidyl isocyanurate diacrylate or methacrylates corresponding to the above acrylates, or the saturated or unsaturated acrylates. A half ester obtained by reacting a saturated dibasic acid and glycidyl (meth) acrylate in an equimolar ratio by an ordinary method is used alone or in combination of two or more. Among them, from the viewpoint of photoreactivity. Acrylic acid is preferred.
【0024】上記ジイソシアネート類(g)としては、
トリレンジイソシアネートやキシリレンジイソシアネー
ト、水添キシリレンジイソシアネート、ヘキサメチレン
ジイソシアネート、イソホロンジイソシアネート、ジフ
ェニルメタンジイソシアネート、トルイジンジイソシア
ネート、リジンジイソシアネートなどが用いられる。The diisocyanates (g) include:
Tolylene diisocyanate, xylylene diisocyanate, hydrogenated xylylene diisocyanate, hexamethylene diisocyanate, isophorone diisocyanate, diphenylmethane diisocyanate, toluidine diisocyanate, lysine diisocyanate and the like are used.
【0025】1分子中に1個の水酸基を有する上記(メ
タ)アクリレート類(h)としては、ヒドロキシエチル
アクリレートやヒドロキシプロピルアクリレート、ヒド
ロキシブチルアクリレート、ポリエチレングリコールモ
ノアクリレート、グリセリンジアクリレート、トリメチ
ロールプロパンジアクリレート、ペンタエリスリトール
トリアクリレート、ジペンタエリスリトールペンタアク
リレート、トリス(ヒドロキシエチル)イソシアネート
などのジアクリレート、あるいはこれらのアクリレート
に対応するメタクリレートなどが用いられ、特にヒドロ
キシエチルアクリレート又はペンタエリスリトールトリ
アクリレートが好ましい。The above (meth) acrylates having one hydroxyl group in one molecule (h) include hydroxyethyl acrylate, hydroxypropyl acrylate, hydroxybutyl acrylate, polyethylene glycol monoacrylate, glycerin diacrylate, and trimethylolpropanediene. Diacrylates such as acrylate, pentaerythritol triacrylate, dipentaerythritol pentaacrylate, and tris (hydroxyethyl) isocyanate, and methacrylates corresponding to these acrylates are used, and hydroxyethyl acrylate or pentaerythritol triacrylate is particularly preferable.
【0026】また、本発明で使用される前記(A)成分
と(C)成分の配合比は、100:2〜100:50
(質量基準)の範囲にあることが好ましい。(C)成分
の配合比が上記範囲よりも少ないと、(A)成分による
剛直性が充分緩和できず、無電解金めっき耐性が充分で
ない。一方、(C)成分の配合比が上記範囲を超える
と、乾燥後の塗膜の指触乾燥性が劣るようになるので好
ましくない。The compounding ratio of the components (A) and (C) used in the present invention is 100: 2 to 100: 50.
(Based on mass). When the compounding ratio of the component (C) is less than the above range, the rigidity of the component (A) cannot be sufficiently reduced, and the electroless gold plating resistance is not sufficient. On the other hand, when the blending ratio of the component (C) exceeds the above range, the dryness of the coating film after drying becomes poor, which is not preferable.
【0027】次に、本発明の感光性樹脂組成物を構成す
る希釈剤(D)としては、光重合性モノマー及び/又は
有機溶剤を用いることができる。光重合性モノマーの代
表的なものとしては、2−ヒドロキシエチルアクリレー
ト、2−ヒドロキシブチルアクリレートなどのヒドロキ
シアルキルアクリレート類;エチレングリコール、メト
キシテトラエチレングリコール、ポリエチレングリコー
ル、プロピレングリコールなどのグリコールのモノ又は
ジアクリレート類;N,N−ジメチルアクリルアミド、
N−メチロールアクリルアミドなどのアクリルアミド
類;N,N−ジメチルアミノエチルアクリレートなどの
アミノアルキルアクリレート類;ヘキサンジオール、ト
リメチロールプロパン、ペンタエリスリトール、ジペン
タエリスリトール、トリス−ヒドロキシエチルイソシア
ヌレートなどの多価アルコール又はこれらのエチレンオ
キサイドもしくはプロピレンオキサイド付加物の多価ア
クリレート類;フェノキシアクリレート、ビスフェノー
ルAジアクリレート及びこれらのフェノール類のエチレ
ンオキサイドもしくはプロピレンオキサイド付加物など
のアクリレート類;グルセリンジグリシジルエーテル、
トリメチロールプロパントリグリシジルエーテルなどの
グリシジルエーテルのアクリレート類;メラミンアクリ
レート;及び/又は上記アクリレート類に対応するメタ
クリレート類などが挙げられる。Next, as the diluent (D) constituting the photosensitive resin composition of the present invention, a photopolymerizable monomer and / or an organic solvent can be used. Representative photopolymerizable monomers include hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxybutyl acrylate; and mono- or di-glycols such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol and propylene glycol. Acrylates; N, N-dimethylacrylamide;
Acrylamides such as N-methylol acrylamide; aminoalkyl acrylates such as N, N-dimethylaminoethyl acrylate; polyhydric alcohols such as hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol, and tris-hydroxyethyl isocyanurate; Polyhydric acrylates of these ethylene oxide or propylene oxide adducts; phenoxy acrylates, bisphenol A diacrylates and acrylates of these phenols such as ethylene oxide or propylene oxide adducts; glycerin diglycidyl ether;
Acrylates of glycidyl ether such as trimethylolpropane triglycidyl ether; melamine acrylate; and / or methacrylates corresponding to the above acrylates.
【0028】一方、有機溶剤としては、メチルエチルケ
トン、シクロヘキサノンなどのケトン類;トルエン、キ
シレン、テトラメチルベンゼンなどの芳香族炭化水素
類;メチルセロソルブ、エチルセロソルブ、ブチルセロ
ソルブ、メチルカルビトール、ブチルカルビトール、プ
ロピレングリコールモノメチルエーテル、ジエチレング
リコールモノエチルエーテル、ジプロプレングリコール
モノエチルエーテル、トリエチレングリコールモノエチ
ルエーテルなどのグリコールエーテル類;酢酸エチル、
酢酸ブチル、セロソルブアセテート、ジエチレングリコ
ールモノエチルエーテルアセテート及び上記グリコール
エーテル類のエステル化物などのエステル類;エタノー
ル、プロパノール、エチレングリコール、プロピレング
リコールなどのアルコール類;オクタン、デカンなどの
脂肪族炭化水素類;石油エーテル、石油ナフサ、水添石
油ナフサ、ソルベントナフサなどの石油系溶剤などが挙
げられる。On the other hand, organic solvents include ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene; methyl cellosolve, ethyl cellosolve, butyl cellosolve, methyl carbitol, butyl carbitol, propylene Glycol ethers such as glycol monomethyl ether, diethylene glycol monoethyl ether, dipropylene glycol monoethyl ether, and triethylene glycol monoethyl ether; ethyl acetate;
Esters such as butyl acetate, cellosolve acetate, diethylene glycol monoethyl ether acetate and esterified products of the above glycol ethers; alcohols such as ethanol, propanol, ethylene glycol and propylene glycol; aliphatic hydrocarbons such as octane and decane; Examples include petroleum solvents such as ether, petroleum naphtha, hydrogenated petroleum naphtha, and solvent naphtha.
【0029】上記のような希釈剤(D)は、単独で又は
2種以上を組み合わせて用いることができ、その好適な
使用量は、前記変性共重合体(A−1)又は(A−2)
100質量部に対して20〜300質量部とすることが
好ましい。この希釈剤の使用目的は、光重合性モノマー
の場合は、前記変性共重合体を希釈せしめて塗布しやす
い状態にすると共に、光重合性を増強するものであり、
一方、有機溶剤の場合は、前記変性共重合体を溶解し希
釈せしめ、それによって液状として塗布し、次いで、乾
燥させることにより造膜せしめたるためである。従っ
て、用いる希釈剤に応じて、フォトマスクを塗膜に接触
させる接触方式あるいは非接触方式のいずれかの露光方
式が用いられる。The above-mentioned diluents (D) can be used alone or in combination of two or more. The preferred amount of the diluents is (A-1) or (A-2). )
It is preferable that the amount be 20 to 300 parts by mass with respect to 100 parts by mass. The purpose of use of this diluent is, in the case of a photopolymerizable monomer, to dilute the modified copolymer to make it easy to apply, and to enhance photopolymerizability,
On the other hand, in the case of an organic solvent, the modified copolymer is dissolved and diluted, whereby the modified copolymer is applied as a liquid, and then dried to form a film. Therefore, depending on the diluent to be used, either a contact type or a non-contact type in which a photomask is brought into contact with a coating film is used.
【0030】本発明の感光性樹脂組成物を構成する光重
合開始剤(E)としては、例えば、ベンゾイン、ベンジ
ル、ベンゾインメチルエーテル、ベンゾインエチルエー
テル、ベンゾインn−プロピルエーテル、ベンゾインイ
ソプロピルエーテル、ベンゾインn−ブチルエーテルな
どのベンゾイン類;ベンゾインアルキルエーテル類;ベ
ンゾフェノン、p−メチルベンゾフェノン、ミヒラーズ
ケトン、メチルベンゾフェノン、4,4′−ジクロロベ
ンゾフェノン、4,4′−ビスジエチルアミノベンゾフ
ェノンなどのベンゾフェノン類;アセトフェノン、2,
2−ジメトキシ−2−フェニルアセトフェノン、2,2
−ジエトキシ−2−フェニルアセトフェノン、1,1−
ジクロロアセトフェノン、1−ヒドロキシシクロヘキシ
ルフェニルケトン、2−メチル−〔4−(メチルチオ)
フェニル〕−2−モルフォリノ−1−プロパノン、N,
N−ジメチルアミノアセトフェノンなどのアセトフェノ
ン類;2,4−ジメチルチオサントン、2,4−ジエチ
ルチオキサントン、2−クロロチオキサントン、2,4
−ジイソプロピルチオキサントンなどのチオキサントン
類;アントラキノン、クロロアントラキノン、2−メチ
ルアントラキノン、2−エチルアントラキノン、2−t
ert−ブチルアントラキノン、1−クロロアントラキ
ノン、2−アミルアントラキノン、2−アミノアントラ
キノンなどのアントラキノン類;アセトフェノンジメチ
ルケタール、ベンジルジメチルケタールなどのケタール
類;エチル−4−ジメチルアミノベンゾエート、2−
(ジメチルアミノ)エチルベンゾエート、p−ジメチル
安息香酸エチルエステルなどの安息香酸エステル類;フ
ェニルジスルフィド2−ニトロフルオレン、ブチロイ
ン、アニソインエチルエーテル、アゾビスイソブチロニ
トリル、テトラメチルチウラムジスルフィド等が挙げら
れる。The photopolymerization initiator (E) constituting the photosensitive resin composition of the present invention includes, for example, benzoin, benzyl, benzoin methyl ether, benzoin ethyl ether, benzoin n-propyl ether, benzoin isopropyl ether, benzoin n Benzoins such as -butyl ether; benzoin alkyl ethers; benzophenones such as benzophenone, p-methylbenzophenone, Michler's ketone, methylbenzophenone, 4,4'-dichlorobenzophenone and 4,4'-bisdiethylaminobenzophenone; acetophenone, 2,
2-dimethoxy-2-phenylacetophenone, 2,2
-Diethoxy-2-phenylacetophenone, 1,1-
Dichloroacetophenone, 1-hydroxycyclohexyl phenyl ketone, 2-methyl- [4- (methylthio)
Phenyl] -2-morpholino-1-propanone, N,
Acetophenones such as N-dimethylaminoacetophenone; 2,4-dimethylthiosanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4
Thioxanthones such as diisopropylthioxanthone; anthraquinone, chloroanthraquinone, 2-methylanthraquinone, 2-ethylanthraquinone, 2-t
anthraquinones such as tert-butylanthraquinone, 1-chloroanthraquinone, 2-amylanthraquinone and 2-aminoanthraquinone; ketals such as acetophenone dimethyl ketal and benzyl dimethyl ketal; ethyl-4-dimethylaminobenzoate;
Benzoic acid esters such as (dimethylamino) ethyl benzoate and p-dimethylbenzoic acid ethyl ester; phenyl disulfide 2-nitrofluorene, butyroin, anisoin ethyl ether, azobisisobutyronitrile, tetramethylthiuram disulfide and the like. .
【0031】これらの光重合開始剤(E)は、単独で又
は2種以上を組み合わせて用いることができ、その使用
量は、前記変性共重合体(A−1)又は(A−2)10
0質量部に対して0.05〜30質量部の範囲が好適で
ある。本発明では、上記光重合開始剤による光重合反応
を促進させる目的で、さらに光促進剤を併用することが
でき、かかる光促進剤の代表的なものとしては、例え
ば、トリエチルアミン、トリエタノールアミン、2−ジ
メチルアミノエタノール等の第三級アミン類;トリフェ
ニルホスフィンで代表されるアルキルホスフィン類;β
−チオグリコールで代表されるチオール類、のような公
知の光増感剤を挙げることができる。These photopolymerization initiators (E) can be used alone or in combination of two or more. The amount of the photopolymerization initiators used is the same as that of the modified copolymer (A-1) or (A-2).
The range of 0.05 to 30 parts by mass relative to 0 parts by mass is preferred. In the present invention, for the purpose of accelerating the photopolymerization reaction by the photopolymerization initiator, a photopromoting agent can be further used in combination, and typical photopromoting agents include, for example, triethylamine, triethanolamine, Tertiary amines such as 2-dimethylaminoethanol; alkylphosphines represented by triphenylphosphine; β
And known photosensitizers such as thiols represented by thioglycol.
【0032】次に、本発明の感光性樹脂組成物におい
て、任意成分として添加するエポキシ化合物(F)とし
ては、固形又は液状の公知のエポキシ樹脂を含むエポキ
シ化合物を用いることができる。具体的には、日本化薬
(株)製 BPS−200、エー・シー・アール(株)
製 EPX−30、大日本インキ化学工業(株)製 エ
ピクロンEXA−1514などのビスフェノールS型エ
ポキシ樹脂;日本油脂(株)製 ブレンマーDGTなど
のジグリシジルフタレート樹脂;日産化学(株)製 T
EPIC、チバ・スペシャルティ・ケミカルズ(株)製
アラルダイトPT810などのヘテロサイクリックエ
ポキシ樹脂;油化シェルエポキシ(株)製YX−400
0などのビキシレノール型エポキシ樹脂;油化シェルエ
ポキシ(株)製 YL−6056などのビフェノール型
エポキシ樹脂;東都化成(株)製ZX−1063などの
テトラグリシジルキシレノイルエタン樹脂;日本化薬
(株)製 EPPN−201、EOCN−103、EO
CN−1020、EOCN−1025、旭化成工業
(株)製 ECN−278、ECN−292、ECN−
299、チバ・スペシャルティ・ケミカルズ(株)製
ECN−1273、ECN−1299、東都化成(株)
製 YDCN−220L、YDCN−220HH、YD
CN−702、YDCN−704、YDPN−601、
YDPN−602、大日本インキ化学工業(株)製 エ
ピクロンN−665、N−680、N−695、N−7
70、N−775などのノボラック型エポキシ樹脂:旭
化成工業(株)製 EPX−8001、EPX−800
2、EPPX−8060、EPPX−8061、大日本
インキ化学工業(株)製 エピクロンN−880などの
ビスフェノールAのノボラック型エポキシ樹脂;旭電化
工業(株)製 EPX−49−69、EPX−49−3
0などのキレート型エポキシ樹脂;東都化成(株)製Y
DG−414などのグリオキザール型エポキシ樹脂;東
都化成(株)製 YH−1402、ST−110、油化
シェルエポキシ(株)製 YL−931、YL−933
などのアミノ基含有エポキシ樹脂;大日本インキ化学工
業(株)製エピクロンTSR−601、旭電化工業
(株)製 EPX−84−2、EPX−4061などの
ゴム変性エポキシ樹脂;山陽国策パルプ(株)製 DC
E−400などのジシクロペンタジエンフェノリック型
エポキシ樹脂;旭電化工業(株)製 X−1359など
のシリコーン変性エポキシ樹脂;ダイセル化学工業
(株)製 プラクセルG−402、G−710などのε
ーカプロラクトン変性エポキシ樹脂などを用いることが
できる。なお、本発明では、これらのエポキシ化合物の
(メタ)アクリル酸による部分エステル化物、及び該部
分エステル化物に酸無水物を付加した不飽和基と酸基を
有する化合物もしくは樹脂を併用することができる。Next, as the epoxy compound (F) added as an optional component in the photosensitive resin composition of the present invention, an epoxy compound containing a known solid or liquid epoxy resin can be used. Specifically, Nippon Kayaku Co., Ltd. BPS-200, AC R Co., Ltd.
Bisphenol S-type epoxy resin such as EPX-30 manufactured by Dainippon Ink and Chemicals, Inc., Epicron EXA-1514; diglycidyl phthalate resin such as Blenmer DGT manufactured by NOF Corporation; T manufactured by Nissan Chemical Industries, Ltd.
Heterocyclic epoxy resin such as EPIC, Araldite PT810 manufactured by Ciba Specialty Chemicals Co., Ltd .; YX-400 manufactured by Yuka Shell Epoxy Co., Ltd.
Nippon Kayaku Co., Ltd. Nippon Kayaku Co., Ltd. Nippon Kayaku Co., Ltd. Nippon Kayaku Co., Ltd. Nippon Kayaku Co., Ltd. Co., Ltd. EPPN-201, EOCN-103, EO
CN-1020, EOCN-1025, ECN-278, ECN-292, ECN-, manufactured by Asahi Kasei Corporation
299, manufactured by Ciba Specialty Chemicals Co., Ltd.
ECN-1273, ECN-1299, Toto Kasei Co., Ltd.
YDCN-220L, YDCN-220HH, YD
CN-702, YDCN-704, YDPN-601,
YDPN-602, manufactured by Dainippon Ink and Chemicals, Inc. Epicron N-665, N-680, N-695, N-7
Novolak epoxy resins such as No. 70 and N-775: EPX8001, EPX-800 manufactured by Asahi Kasei Corporation
2, novolak type epoxy resin of bisphenol A such as EPPX-8060, EPPX-8061, Epicron N-880 manufactured by Dainippon Ink and Chemicals, Inc .; EPX-49-69, EPX-49- manufactured by Asahi Denka Kogyo KK 3
Chelate type epoxy resin such as 0; Y manufactured by Toto Kasei Co., Ltd.
Glyoxal type epoxy resin such as DG-414; YH-1402, ST-110 manufactured by Toto Kasei Co., Ltd., YL-931, YL-933 manufactured by Yuka Shell Epoxy Co., Ltd.
Amino group-containing epoxy resins such as; Epoxy TSR-601 manufactured by Dainippon Ink and Chemicals, EPX-84-2, EPX-4061 manufactured by Asahi Denka Kogyo Co., Ltd .; rubber-modified epoxy resins; Sanyo Kokusaku Pulp Co., Ltd. ) Made DC
Dicyclopentadiene phenolic epoxy resin such as E-400; silicone-modified epoxy resin such as X-1359 manufactured by Asahi Denka Kogyo Co., Ltd .; ε such as Plaxel G-402 and G-710 manufactured by Daicel Chemical Industries, Ltd.
Caprolactone-modified epoxy resin and the like can be used. In the present invention, it is possible to use a partially esterified product of these epoxy compounds with (meth) acrylic acid, and a compound or resin having an unsaturated group and an acid group obtained by adding an acid anhydride to the partially esterified product. .
【0033】このようなエポキシ化合物(F)の配合比
率は、前記変性共重合体(A−1)又は(A−2)に対
して質量比で(A−1)又は(A−2):(E)=5
0:50〜99:1とすることが好ましい。この理由
は、エポキシ化合物(E)の配合比率が上記範囲を超え
ると、アルカリ現像タイプの場合は、現像液での未露光
部分の溶解性が低下し、現像残りが発生し易くなり、ま
た、溶剤現像タイプの場合は、現像液に侵され、塗膜の
脱落やフクレが発生し易くなり、実用上使用することが
難しくなるからである。The mixing ratio of the epoxy compound (F) is such that the modified copolymer (A-1) or (A-2) has a mass ratio of (A-1) or (A-2) to the modified copolymer (A-1) or (A-2): (E) = 5
The ratio is preferably set to 0:50 to 99: 1. The reason for this is that if the compounding ratio of the epoxy compound (E) exceeds the above range, in the case of the alkali developing type, the solubility of the unexposed portion in the developing solution is reduced, and the undeveloped portion is easily generated. This is because, in the case of the solvent development type, the film is easily eroded by the developer, and the coating film is liable to fall off or blister, which makes practical use difficult.
【0034】なお、前記変性共重合体(A−1)又は
(A−2)のカルボキシル基とエポキシ化合物(F)の
エポキシ基とは開環重合により反応するが、エポキシ化
合物(F)として希釈剤(F)や組成物中の他の物質に
易溶性のエポキシ樹脂を用いた場合、乾燥時の熱により
架橋が進み易い。そのため、それを抑制して乾燥時間を
長くとりたい場合には、難溶性の微粒状エポキシ樹脂を
単独で又は易溶性のエポキシ樹脂と共に用いることが好
ましい。但し、難溶性のエポキシ樹脂は反応性が低いた
め、硬化促進剤を併用することが望ましい。The carboxyl group of the modified copolymer (A-1) or (A-2) and the epoxy group of the epoxy compound (F) react by ring-opening polymerization. When an epoxy resin which is easily soluble in the agent (F) or another substance in the composition is used, the crosslinking is likely to proceed due to heat during drying. Therefore, when it is desired to suppress the above and increase the drying time, it is preferable to use the hardly soluble fine-grained epoxy resin alone or together with the easily soluble epoxy resin. However, since a hardly soluble epoxy resin has low reactivity, it is desirable to use a curing accelerator together.
【0035】任意成分として添加する潜在性硬化密着付
与剤(G)としては、メラミン、エチルジアミノ−S−
トリアジン、2,4−ジアミノ−S−トリアジン、2,
4−ジアミノ−6−トリル−S−トリアジン、2,4−
ジアミノ−6−キシリル−S−トリアジン及びそれらの
誘導体などのS−トリアジン化合物;グアナミン、アセ
トグアナミン、ベンゾグアナミン、3,9−ビス〔2−
(3,5−ジアミノ−2,4,6−トリアザフェニル)
エチル〕−2,4,8,10−テトラオキサスピロ
〔5.5〕ウンデカンなどのグアナミン類;四国化成工
業(株)製 2MZ、2E4MZ、C11Z、C17
Z、2PZ、1B2HZ、2MZ−CN、2E4MZ−
CN、C11Z−CN、2PZ−CN、2P11Z−C
N、2MZ−CNS、2E4MZ−CNS、2PZ−C
NS、2MZ−AZINE、2E4MZ−AZINE、
C11Z−AZINE、2MA−OK、2P4MHZ、
2PHZ、2P4BHZなどのイミダゾール及びその誘
導体;ジアミノジフェニルメタン、m−フェニレンジア
ミン、ジアミノジフェニルスルフォン、シクロヘキシル
アミン、m−キシリレンジアミン、4,4′−ジアミノ
−3,3′ジエチルジフェニルメタン、ジエチレントリ
アミン、テトラエチレンペンタミン、N−アミノエチル
ピベラジン、イソホロンジアミン、ジシアンジアミド、
尿素、尿素誘導体、多塩基ヒドラジドなどのポリアミン
類、これらの有機酸塩及び/又はエポキシアダクト;三
フッ化ホウ素のアミン錯体;トリメチルアミン、トリエ
タノールアミン、N,N−ジメチルオクチルアミン、
N,N−ジメチルアニリン、N−ベンジルジメチルアミ
ン、ピリジン、N−メチルピリジン、N−メチルモルホ
リン、ヘキサメトキシメチルメラミン、2,4,6−ト
リス(ジメチルアミノフェノール)、N−シクロヘキシ
ルジメチルアミン、テトラメチルグアニジン、m−アミ
ノフェノールなどの三級アミン類;トリブチルホスフィ
ン、トリフェニルホスフィン、トリス−2−シアノエチ
ルホスフィンなどの有機ホスフィン類;トリ−n−ブチ
ル(2,5−ジヒドロキシフェニル)ホスホニウムブロ
マイド、ヘキサデシルトリブチルホスホニウムクロライ
ドなどのホスホニウム塩類;ベンジルトリメチルアンモ
ニウムクロライド、フェニルトリブチルアンモニウムク
ロライド、ベンジルトリメチルアンモニウムブロマイド
などの4級アンモニウム塩;ジフェニルヨードニウムテ
トラフルオロボロエート、トリフェニルスルホニウムヘ
キサフルオロアンチモネート、2,4,6−トリフェニ
ルチオピリリウムヘキサフルオロホスフェート、チバ・
スペシャルティ・ケミカルズ(株)製 イルガキュア2
61などの光カチオン重合触媒;スチレン−マレイン酸
樹脂、シランカップリング剤などが挙げられ、特に接着
性、密着性、耐めっき性の向上の点からはS−トリアジ
ン化合物が好適に用いられる。このような潜在性硬化密
着付与剤(G)は、単独で又は2種以上を組み合わせて
用いることができ、その使用量は、前記変性共重合体
(A−1)又は(A−2)100質量部に対して0.0
5〜15質量部とすることが好ましい。As the latent curing adhesion promoter (G) added as an optional component, melamine, ethyldiamino-S-
Triazine, 2,4-diamino-S-triazine, 2,
4-diamino-6-tolyl-S-triazine, 2,4-
S-triazine compounds such as diamino-6-xylyl-S-triazine and derivatives thereof; guanamine, acetoguanamine, benzoguanamine, 3,9-bis [2-
(3,5-diamino-2,4,6-triazaphenyl)
Guanamines such as ethyl] -2,4,8,10-tetraoxaspiro [5.5] undecane; 2MZ, 2E4MZ, C11Z, C17 manufactured by Shikoku Chemicals Corporation
Z, 2PZ, 1B2HZ, 2MZ-CN, 2E4MZ-
CN, C11Z-CN, 2PZ-CN, 2P11Z-C
N, 2MZ-CNS, 2E4MZ-CNS, 2PZ-C
NS, 2MZ-AZINE, 2E4MZ-AZINE,
C11Z-AZINE, 2MA-OK, 2P4MHZ,
Imidazole such as 2PHZ and 2P4BHZ and derivatives thereof; diaminodiphenylmethane, m-phenylenediamine, diaminodiphenylsulfone, cyclohexylamine, m-xylylenediamine, 4,4'-diamino-3,3'diethyldiphenylmethane, diethylenetriamine, tetraethylenepentane Min, N-aminoethylpiverazine, isophoronediamine, dicyandiamide,
Urea, urea derivatives, polyamines such as polybasic hydrazide, their organic acid salts and / or epoxy adducts; amine complexes of boron trifluoride; trimethylamine, triethanolamine, N, N-dimethyloctylamine;
N, N-dimethylaniline, N-benzyldimethylamine, pyridine, N-methylpyridine, N-methylmorpholine, hexamethoxymethylmelamine, 2,4,6-tris (dimethylaminophenol), N-cyclohexyldimethylamine, Tertiary amines such as methylguanidine and m-aminophenol; organic phosphines such as tributylphosphine, triphenylphosphine and tris-2-cyanoethylphosphine; tri-n-butyl (2,5-dihydroxyphenyl) phosphonium bromide, hexa Phosphonium salts such as decyltributylphosphonium chloride; quaternary ammonia such as benzyltrimethylammonium chloride, phenyltributylammonium chloride and benzyltrimethylammonium bromide Umushio; diphenyliodonium tetrafluoroboronate benzoate, triphenylsulfonium hexafluoroantimonate, 2,4,6-triphenyl-thio pyrylium hexafluorophosphate, Ciba
Irgacure 2 manufactured by Specialty Chemicals Co., Ltd.
Photocationic polymerization catalysts such as 61; styrene-maleic acid resins, silane coupling agents, etc .; and S-triazine compounds are preferably used from the viewpoint of improving adhesiveness, adhesion and plating resistance. Such a latent curing adhesion imparting agent (G) can be used alone or in combination of two or more, and the amount of the latent curing adhesion imparting agent is 100% of the modified copolymer (A-1) or (A-2). 0.0 to parts by mass
The content is preferably 5 to 15 parts by mass.
【0036】なお、本発明の感光性樹脂組成物には、密
着性、硬度などの特性を向上させる目的で、無機充填剤
(H)を必要に応じて用いることができる。この無機充
填剤(H)としては、硫酸バリウムやチタン酸バリウ
ム、酸化ケイ素、無定形シリカ、タルク、クレー、炭酸
マグネシウム、炭酸カルシウム、酸化アルミニウム、水
酸化アルミニウム、雲母などの公知の無機粉体を配合す
ることができる。その配合比率は、感光性樹脂組成物の
0〜60質量%、好ましくは5〜40質量%とすること
が望ましい。The photosensitive resin composition of the present invention may optionally contain an inorganic filler (H) for the purpose of improving properties such as adhesion and hardness. Examples of the inorganic filler (H) include known inorganic powders such as barium sulfate, barium titanate, silicon oxide, amorphous silica, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, and mica. Can be blended. The compounding ratio is preferably 0 to 60% by mass of the photosensitive resin composition, and more preferably 5 to 40% by mass.
【0037】また、必要に応じてフタロシアニン・ブル
ー、フタロシアニン・グリーン、アイオジン・グリー
ン、ジスアゾイエロー、クリスタルバイオレット、酸化
チタン、カーボンブラック、ナフタレンブラックなどの
公知の着色剤、ハイドロキノン、ハイドロキノンモノメ
チルエーテル、tert−ブチルカテコール、ピロガロ
ール、フェノチアジンなどの公知の熱重合禁止剤、オル
ベン、ベントン、モンモリロナイトなどの公知の増粘
剤、シリコーン系、フッ素系、流動パラフィンなどの鉱
物油系、アクリル共重合系などの消泡剤、レベリング
剤、酸化防止剤のような公知の添加剤類を配合すること
ができる。If necessary, known coloring agents such as phthalocyanine blue, phthalocyanine green, iodine green, disazo yellow, crystal violet, titanium oxide, carbon black and naphthalene black, hydroquinone, hydroquinone monomethyl ether, tert- Known thermal polymerization inhibitors such as butyl catechol, pyrogallol, and phenothiazine; known thickeners such as orben, bentone, and montmorillonite; silicone oils, fluorine oils, mineral oils such as liquid paraffin, and defoaming acrylic copolymers and the like Known additives such as agents, leveling agents and antioxidants can be blended.
【0038】さらに、アリル化合物であるジアリルフタ
レートプレポリマー又はジアリルイソフタレートプレポ
リマーを有機フィラーとして添加することができ、これ
らの添加により耐薬品性を向上させることが可能とな
る。この有機フィラーの添加量は、前記変性共重合体
(A−1)又は(A−2)100質量部に対して30質
量部以下、好ましくは20質量部以下とすることが望ま
しい。上記プレポリマーとしては、ダイソー(株)製
ダイソー・ダップ、ダイソー・イソダップなどが挙げら
れ、平均分子量2,000〜30,000のものが好適に
用いられる。中でも平均分子量が5,000〜20,00
0のジアリルイソフタレートプレポリマーが好ましい。Furthermore, diallyl phthalate prepolymer or diallyl isophthalate prepolymer, which is an allyl compound, can be added as an organic filler, and the addition thereof can improve chemical resistance. The amount of the organic filler to be added is preferably 30 parts by mass or less, more preferably 20 parts by mass or less based on 100 parts by mass of the modified copolymer (A-1) or (A-2). As the above prepolymer, Daiso Co., Ltd.
Daiso Dap, Daiso Isodap, and the like, and those having an average molecular weight of 2,000 to 30,000 are preferably used. Among them, the average molecular weight is 5,000 to 20,000
A diallyl isophthalate prepolymer of 0 is preferred.
【0039】さらにまた、硬化皮膜の耐衝撃性を増進す
る目的で、アクリル酸エステル類などのエチレン性不飽
和化合物の共重合体類や、多価アルコール類と飽和もし
くは不飽和多塩基酸化合物から合成されるポリエステル
樹脂類などの公知のバインダー樹脂、及び多価アルコー
ル類と飽和もしくは不飽和多塩基酸化合物とグリシジル
(メタ)アクリレートから合成されるポリエステル(メ
タ)アクリレート類や、多価アルコール類とジイソシア
ネート類と水酸基含有(メタ)アクリレート類から合成
されるウレタン(メタ)アクリレート類などの公知の感
光性オリゴマーを、ソルダーレジストマスクとしての諸
特性に影響を及ばさない範囲で配合することができる。Further, for the purpose of enhancing the impact resistance of the cured film, copolymers of ethylenically unsaturated compounds such as acrylates or polyhydric alcohols and saturated or unsaturated polybasic acid compounds are used. Known binder resins such as synthesized polyester resins, and polyester (meth) acrylates synthesized from polyhydric alcohols, saturated or unsaturated polybasic acid compounds and glycidyl (meth) acrylate, and polyhydric alcohols Known photosensitive oligomers such as urethane (meth) acrylates synthesized from diisocyanates and hydroxyl group-containing (meth) acrylates can be blended within a range that does not affect various properties as a solder resist mask.
【0040】但し、上記成分のうちアクリル酸エステル
類などのエチレン性不飽和化合物の共重合体類やポリエ
ステル樹脂類などのバインダー材料に関しては、感光基
を含有しない共重合体類や公知のバインダー樹脂の使用
量が多いと現像性や感度が悪くなる等の問題を生じるた
め、使用量は変性共重合体(A−1)又は(A−2)の
10質量%以下(組成物全体の5質量%以下)とするこ
とが望ましい。However, among the above components, as for binder materials such as copolymers of ethylenically unsaturated compounds such as acrylates and polyester resins, copolymers containing no photosensitive group and known binder resins If a large amount is used, problems such as poor developability and sensitivity may occur. Therefore, the amount used is 10% by mass or less of the modified copolymer (A-1) or (A-2) (5% by mass of the entire composition). % Or less).
【0041】以上説明したような本発明の感光性樹脂組
成物を用いてソルダーレジストを形成する場合、例え
ば、プリント配線板上に当該感光性樹脂組成物を塗布
し、予備乾燥した後、フォトマスクを介して選択的に活
性エネルギー線により露光して光重合させ、未露光部分
を現像液で現像してレジストパターンを形成し、その後
加熱して熱硬化させることによりレジストパターン形成
される。ここで、本発明の感光性樹脂組成物を基板上に
塗布して塗膜を形成する方法としては、既知の方法を採
用することができ、例えば、スクリーン印刷法、カーテ
ン塗装、ロール塗装、スプレー塗装など適宜の塗布方法
を採用することができる。When a solder resist is formed by using the photosensitive resin composition of the present invention as described above, for example, the photosensitive resin composition is applied on a printed wiring board, preliminarily dried, and then subjected to a photomask. The resist pattern is formed by selectively exposing with an active energy ray and photopolymerizing, developing the unexposed portion with a developing solution to form a resist pattern, and then heating and thermosetting. Here, as a method of applying the photosensitive resin composition of the present invention on a substrate to form a coating film, known methods can be adopted, for example, screen printing, curtain coating, roll coating, spraying An appropriate coating method such as painting can be adopted.
【0042】現像液としては、活性エネルギー線硬化性
樹脂(変性共重合体A−1又はA−2)の選択により異
なるが、シクロヘキサノン、キシレン、テトラメチルベ
ンゼン、ブチルセロソルブ、ブチルカルビトール、プロ
ピレングリコールモノメチルエーテル、セロソルブアセ
テート、プロパノール、プロピレングリコールなどの有
機溶剤や、水酸化カリウム、水酸化ナトリウム、炭酸ナ
トリウム、炭酸カリウム、リン酸ナトリウム、ケイ酸ナ
トリウム、アンモニア、アミン類などのアルカリ水溶
液、及び界面活性剤水溶液等が使用できる。The developer varies depending on the selection of the active energy ray-curable resin (modified copolymer A-1 or A-2), but includes cyclohexanone, xylene, tetramethylbenzene, butyl cellosolve, butyl carbitol, propylene glycol monomethyl. Organic solvents such as ether, cellosolve acetate, propanol, and propylene glycol; alkaline aqueous solutions such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, and amines; and surfactants An aqueous solution or the like can be used.
【0043】特に、本発明の感光性樹脂組成物によれ
ば、希アルカリ水溶液にて現像することができる点で有
利である。即ち、具体的な処方は、まず本発明の感光性
樹脂組成物を基板上に所望の厚さで塗布し、次いで60
〜80℃で15〜60分の加熱にて有機溶剤を揮散さ
せ、その後、像部分が透明な所望のパターンを描画した
マスクを基板の塗膜上に置き、活性エネルギー線、好ま
しくは紫外線を照射して所望のパターンを選択的に露光
する。これにより塗膜の露光領域の組成物は交差結合を
生じて不溶性になる。次いで、未露光領域を希アルカリ
水溶液で現像除去し、望ましくは耐熱性を向上させるた
めに、このようにして得られたパターンを紫外線、10
0〜200℃の熱又は遠赤外線を加えて二次硬化する。
ここで用いられる希アルカリ水溶液としては、既知のア
ルカリ水溶液を用いることができるが、0.5〜5重量
%の炭酸ナトリウム水溶液が一般的である。In particular, the photosensitive resin composition of the present invention is advantageous in that it can be developed with a dilute aqueous alkaline solution. That is, a specific prescription is to first apply the photosensitive resin composition of the present invention to a substrate at a desired thickness, and then apply
The organic solvent is volatilized by heating at 8080 ° C. for 15 to 60 minutes, and then a mask on which a desired pattern with a transparent image portion is drawn is placed on the coating film of the substrate, and irradiated with active energy rays, preferably ultraviolet rays. To selectively expose a desired pattern. This causes the composition in the exposed areas of the coating to crosslink and become insoluble. Next, the unexposed area is developed and removed with a dilute alkaline aqueous solution. Desirably, the pattern thus obtained is irradiated with ultraviolet light,
Secondary curing is performed by applying heat at 0 to 200 ° C. or far infrared rays.
As the diluted alkaline aqueous solution used here, a known alkaline aqueous solution can be used, and a 0.5 to 5% by weight aqueous solution of sodium carbonate is generally used.
【0044】[0044]
【実施例】以下に、実施例及び比較例を示して本発明に
ついて具体的に説明するが、本発明は下記実施例に限定
されるものではない。なお、「部」及び「%」とあるの
は、特に斬りのない限り全て質量基準である。EXAMPLES The present invention will be specifically described below with reference to examples and comparative examples, but the present invention is not limited to the following examples. Note that “parts” and “%” are all based on mass unless otherwise specified.
【0045】合成例1 攪拌機、温度計、環流冷却管、滴下ロート及び窒素導入
管を備えた2リットルのセパラブルフラスコに、ジプロ
ピレングリコールモノメチルエーテル(日本乳化剤
(株)製、MFDG)325gを導入し、110℃に昇
温した後、β−CEA(β カルボキシエチルアクリレ
ート)37.6g、メタクリル酸 201.9g、メチ
ルメタクリレート 186.4g、MFDG 222
g、及びt−ブチルパーオキシ−2−エチルヘキサノエ
ート(日本油脂(株)製、パーブチルO)12.0gを
3時間かけて滴下した。滴下後、3時間の熟成によりカ
ルボキシル基を有する幹ポリマーを合成した。次に、こ
の幹ポリマーの溶液に、3,4−エポキシシクロヘキシ
ルメチルアクリレート(ダイセル化学工業(株)製、サ
イクロマーA200)289.2g、トリフェニルホス
フィン 2.9g、メチルハイドロキノン 1.3gを
加えて、100℃で10時間反応させた。この反応は、
空気/窒素の混合雰囲気下で行い、これにより、酸価が
100mgKOH/g、二重結合当量(不飽和基1モル
当たりの樹脂重量)が450、重量平均分子量が15,
000である(A−1)の光硬化性樹脂溶液を得た。Synthesis Example 1 325 g of dipropylene glycol monomethyl ether (MFDG, manufactured by Nippon Emulsifier Co., Ltd.) was introduced into a 2-liter separable flask equipped with a stirrer, thermometer, reflux condenser, dropping funnel and nitrogen inlet tube. After raising the temperature to 110 ° C., 37.6 g of β-CEA (β carboxyethyl acrylate), 201.9 g of methacrylic acid, 186.4 g of methyl methacrylate, MFDG 222
g and 12.0 g of t-butylperoxy-2-ethylhexanoate (manufactured by NOF Corporation, Perbutyl O) were added dropwise over 3 hours. After dropping, a trunk polymer having a carboxyl group was synthesized by aging for 3 hours. Next, 289.2 g of 3,4-epoxycyclohexylmethyl acrylate (manufactured by Daicel Chemical Industries, Ltd., Cyclomer A200), 2.9 g of triphenylphosphine, and 1.3 g of methylhydroquinone were added to the solution of the trunk polymer. At 100 ° C. for 10 hours. This reaction is
The reaction was carried out in a mixed atmosphere of air / nitrogen, whereby the acid value was 100 mgKOH / g, the double bond equivalent (resin weight per mole of unsaturated group) was 450, and the weight average molecular weight was 15,
000 (A-1) was obtained.
【0046】合成例2 攪拌機、温度計、環流冷却管、滴下ロート及び窒素導入
管を備えた2リットルのセパラブルフラスコに、ジプロ
ピレングリコールモノメチルエーテル(日本乳化剤
(株)製、MFDG)250gを導入し、110℃に昇
温した後、β−CEA(β−カルボキシエチルアクリレ
ート)26.3g、メタクリル酸 141.2g、メチ
ルメタクリレート 34.8g、アセトアセトキシエチ
ルメタクリレート 26.3g、MFDG 223g、
及びt−ブチルパーオキシ−2−エチルヘキサノエート
(日本油脂(株)製、パーブチルO)12.0gを3時
間かけて滴下した。滴下後、3時間の熟成によりカルボ
キシル基を有する幹ポリマーを合成した。次に、この幹
ポリマーの溶液に、3,4−エポキシシクロヘキシルメ
チルアクリレート(ダイセル化学工業(株)製、サイク
ロマーA200)202.2g、トリフェニルホスフィ
ン 2.0g、メチルハイドロキノン 1.0gを加え
て、100℃で10時間反応させた。この反応は、空気
/窒素の混合雰囲気下で行い、これにより、酸価が10
0mgKOH/g、二重結合当量が450、重量平均分
子量が15,000である(A−2)の光硬化性樹脂溶
液を得た。Synthesis Example 2 250 g of dipropylene glycol monomethyl ether (MFDG, manufactured by Nippon Emulsifier Co., Ltd.) was introduced into a 2-liter separable flask equipped with a stirrer, thermometer, reflux condenser, dropping funnel and nitrogen inlet tube. After heating to 110 ° C., β-CEA (β-carboxyethyl acrylate) 26.3 g, methacrylic acid 141.2 g, methyl methacrylate 34.8 g, acetoacetoxyethyl methacrylate 26.3 g, MFDG 223 g,
And 12.0 g of t-butyl peroxy-2-ethylhexanoate (manufactured by NOF Corporation, Perbutyl O) was added dropwise over 3 hours. After dropping, a trunk polymer having a carboxyl group was synthesized by aging for 3 hours. Next, 202.2 g of 3,4-epoxycyclohexylmethyl acrylate (manufactured by Daicel Chemical Industries, Ltd., Cyclomer A200), 2.0 g of triphenylphosphine, and 1.0 g of methylhydroquinone were added to the solution of the trunk polymer. At 100 ° C. for 10 hours. This reaction is carried out in a mixed atmosphere of air / nitrogen, whereby an acid value of 10
A photocurable resin solution (A-2) having 0 mgKOH / g, a double bond equivalent of 450, and a weight average molecular weight of 15,000 was obtained.
【0047】合成例3 攪拌機、温度計、環流冷却管、滴下ロート及び窒素導入
管を備えた2リットルのセパラブルフラスコに、プロピ
レングリコールモノメチルエーテル(ダイセル化学工業
(株)製、MMPG)250gを導入し、110℃に昇
温した後、β−CEA(β−カルボキシエチルアクリレ
ート)26.3g、メタクリル酸 141.2g、メチ
ルメタクリレート 59.8g、アクリロイルモルフォ
リン 70.5g、MFDG 223g、及びt−ブチ
ルパーオキシ−2−エチルヘキサノエート(日本油脂
(株)製、パーブチルO)12.0gを3時間かけて滴
下した。この滴下後、3時間の熟成によりカルボキシル
基を有する幹ポリマーを合成した。次に、この幹ポリマ
ーの溶液に、3,4−エポキシシクロヘキシルメチルア
クリレート(ダイセル化学工業(株)製、サイクロマー
A200)202.2g、トリフェニルホスフィン
2.0g、メチルハイドロキノン 1.0g加えて、1
00℃で10時間反応させた。この反応は、空気/窒素
の混合雰囲気下で行い、これにより、酸価が100mg
KOH/g、二重結合当量が450、重量平均分子量が
14,000である(A−2)の光硬化性樹脂溶液を得
た。Synthesis Example 3 250 g of propylene glycol monomethyl ether (manufactured by Daicel Chemical Industries, Ltd., MMPG) was introduced into a 2-liter separable flask equipped with a stirrer, thermometer, reflux condenser, dropping funnel and nitrogen inlet tube. After heating to 110 ° C., 26.3 g of β-CEA (β-carboxyethyl acrylate), 141.2 g of methacrylic acid, 59.8 g of methyl methacrylate, 70.5 g of acryloylmorpholine, 223 g of MFDG, and t-butyl 12.0 g of peroxy-2-ethylhexanoate (manufactured by NOF Corporation, Perbutyl O) was added dropwise over 3 hours. After this dropping, a trunk polymer having a carboxyl group was synthesized by aging for 3 hours. Next, 202.2 g of 3,4-epoxycyclohexylmethyl acrylate (manufactured by Daicel Chemical Industries, Ltd., Cyclomer A200) was added to a solution of the trunk polymer, and triphenylphosphine was used.
2.0 g, 1.0 g of methylhydroquinone and 1
The reaction was performed at 00 ° C. for 10 hours. This reaction is carried out under a mixed atmosphere of air / nitrogen, whereby the acid value is 100 mg.
A photocurable resin solution (A-2) having a KOH / g, a double bond equivalent of 450, and a weight average molecular weight of 14,000 was obtained.
【0048】合成例4 攪拌機、温度計、環流冷却管、滴下ロート及び窒素導入
管を備えた2リットルのセパラブルフラスコに、プロピ
レングリコールモノメチルエーテル(ダイセル化学工業
(株)製、MMPG)250gを導入し、110℃に昇
温した後、β−CEA(β−カルボキシエチルアクリレ
ート)26.3g、メタクリル酸 141.2g、メチ
ルメタクリレート 91.3g、テトラヒドロフルフリ
ルアクリレート 39.0g、MFDG 223g、及
びt−ブチルパーオキシ−2−エチルヘキサノエート
(日本油脂(株)製、パーブチルO)12.0gを3時
間かけて滴下した。滴下後、3時間の熟成によりカルボ
キシル基を有する幹ポリマーを合成した。次に、この幹
ポリマーの溶液に、3,4−エポキシシクロヘキシルメ
チルアクリレート(ダイセル化学工業(株)製、サイク
ロマーA200)202.2g、トリフェニルホスフィ
ン 2.0g、メチルハイドロキノン 1.0g加え
て、100℃で10時間反応させた。この反応は、空気
/窒素の混合雰囲気下で行い、これにより、酸価が10
0mgKOH/g、二重結合当量が450、重量平均分
子量が13,500である(A−2)の光硬化性樹脂溶
液を得た。Synthesis Example 4 250 g of propylene glycol monomethyl ether (manufactured by Daicel Chemical Industries, Ltd., MMPG) was introduced into a 2-liter separable flask equipped with a stirrer, thermometer, reflux condenser, dropping funnel and nitrogen inlet tube. After raising the temperature to 110 ° C, β-CEA (β-carboxyethyl acrylate) 26.3 g, methacrylic acid 141.2 g, methyl methacrylate 91.3 g, tetrahydrofurfuryl acrylate 39.0 g, MFDG 223 g, and t- 12.0 g of butyl peroxy-2-ethylhexanoate (manufactured by NOF Corporation, Perbutyl O) was added dropwise over 3 hours. After dropping, a trunk polymer having a carboxyl group was synthesized by aging for 3 hours. Next, 202.2 g of 3,4-epoxycyclohexylmethyl acrylate (manufactured by Daicel Chemical Industries, Ltd., Cyclomer A200), 2.0 g of triphenylphosphine, and 1.0 g of methylhydroquinone were added to the solution of the trunk polymer. The reaction was performed at 100 ° C. for 10 hours. This reaction is carried out in a mixed atmosphere of air / nitrogen, whereby an acid value of 10
A photocurable resin solution (A-2) having 0 mgKOH / g, a double bond equivalent of 450, and a weight average molecular weight of 13,500 was obtained.
【0049】合成例5(感光性プレポリマーの合成) フェノールノボラック型エポキシ化合物(大日本インキ
化学工業(株)製 エピクロンN−770、エポキシ当
量=190)190部を、温度計、滴下ロート、攪拌機
及び還流冷却器の付いた4つ口フラスコに入れ、カルビ
トールアセテート141部を加え、加熱溶解した。次
に、重合禁止剤としてハイドロキノン0.1部と反応触
媒としてトリフェニルホスフィン2.0部を加えた。こ
の混合物を85〜95℃に加熱し、アクリル酸72部を
徐々に滴下し、16時間攪拌下に反応させ、不揮発分6
5%のノボラック型エポキシ化合物のアクリル酸による
全エステル化物である活性エネルギー線硬化性樹脂(C
−1)が得られた。Synthesis Example 5 (Synthesis of Photosensitive Prepolymer) 190 parts of a phenol novolak type epoxy compound (Epiclon N-770, manufactured by Dainippon Ink and Chemicals, Inc., epoxy equivalent = 190) was measured with a thermometer, a dropping funnel and a stirrer. The mixture was placed in a four-necked flask equipped with a reflux condenser, and 141 parts of carbitol acetate was added, followed by heating and dissolving. Next, 0.1 part of hydroquinone as a polymerization inhibitor and 2.0 parts of triphenylphosphine as a reaction catalyst were added. The mixture was heated to 85 to 95 ° C., 72 parts of acrylic acid was gradually added dropwise, and the mixture was reacted with stirring for 16 hours.
Active energy ray-curable resin (C) which is a total esterified product of 5% novolak type epoxy compound with acrylic acid
-1) was obtained.
【0050】比較合成例 攪拌機、温度計、環流冷却管、滴下ロート及び窒素導入
管を備えた2リットルのセパラブルフラスコに、クレゾ
ールノボラック型エポキシ樹脂(日本化薬(株)製、E
OCN−104S、軟化点92℃、エポキシ当量22
0)660g、カルビトールアセテート 421.3
g、及びソルベントナフサ 180.6gを導入し、9
0℃に加熱・攪拌し、溶解した。次に、一旦60℃まで
冷却し、アクリル酸 216g、トリフェニルホスフィ
ン 4.0g、メチルハイドロキノン1.3gを加え
て、100℃で12時間反応させ、酸価が0.2mgK
OH/gの反応生成物を得た。これにテトラヒドロ無水
フタル酸 241.7gを仕込み、90℃に加熱し、6
時間反応させ、固形分酸価が80mgKOH/g、固形
分濃度が65%の樹脂溶液を得た。Comparative Synthesis Example A cresol novolak-type epoxy resin (Nippon Kayaku Co., Ltd., E) was placed in a 2-liter separable flask equipped with a stirrer, thermometer, reflux condenser, dropping funnel and nitrogen inlet tube.
OCN-104S, softening point 92 ° C, epoxy equivalent 22
0) 660 g, carbitol acetate 421.3
g, and 180.6 g of solvent naphtha, and 9
The mixture was heated and stirred at 0 ° C. to dissolve. Next, the mixture was once cooled to 60 ° C., added with 216 g of acrylic acid, 4.0 g of triphenylphosphine, and 1.3 g of methylhydroquinone, and allowed to react at 100 ° C. for 12 hours.
An OH / g reaction product was obtained. This was charged with 241.7 g of tetrahydrophthalic anhydride and heated to 90 ° C.
The reaction was carried out for an hour to obtain a resin solution having a solid content acid value of 80 mgKOH / g and a solid content concentration of 65%.
【0051】実施例1〜6及び比較例 このようにして得られた合成例1〜5及び比較合成例の
樹脂溶液を用い、下記成分組成以外の成分については表
1に示す組成比にて配合し、攪拌機にて予備混合した
後、3本ロールミルで混練し、感光性樹脂組成物を調製
した。ここで、得られた感光性樹脂組成物の分散度をエ
リクセン社製グラインドメータによる粒度測定にて評価
したところ15μm以下であった。なお、各実施例及び
比較例では、組成物の硬化剤成分は、下記エポキシ化合
物(F)成分、メラミン、及び表1の希釈剤成分を指
し、主剤成分は、これら以外の成分を指す。Examples 1 to 6 and Comparative Examples Using the resin solutions of Synthesis Examples 1 to 5 and Comparative Synthesis Examples thus obtained, the components other than the following components were mixed at the composition ratios shown in Table 1. Then, the mixture was preliminarily mixed with a stirrer and kneaded with a three-roll mill to prepare a photosensitive resin composition. Here, when the degree of dispersion of the obtained photosensitive resin composition was evaluated by particle size measurement using a grindmeter manufactured by Eriksen, it was 15 μm or less. In each of Examples and Comparative Examples, the curing agent component of the composition refers to the following epoxy compound (F) component, melamine, and the diluent component in Table 1, and the main component component refers to components other than these.
【0052】表1に示す成分以外に実施例1〜6及び比
較例の各組成物が含有する成分: [光重合開始剤(E)] ・2−メチル[4−(メチルチオ)フェニル]−2−モルフォリノ−1−プロパ ノン(チバ・スペシャルティ・ケミカルズ(株)製、イルガーキュアー907) : 5部 ・ジエチルチオキサントン(日本化薬(株)製、カヤキュアDETX−S) :0.5部 [エポキシ化合物(F)] ・ビキシレノール型エポキシ樹脂 (油化シェルエポキシ(株)製、YX−4000): 10部 ・フェノールノボラック型エポキシ樹脂成分 (日本化薬(株)製、RE306): 3部 [潜在性硬化密着付与剤(G)] ・ジシアンジアミド(DICY): 0.2部 ・メラミン: 3部 [無機充填剤(H)] ・硫酸バリウム: 6部 ・タルク: 4部 ・シリカ:10部 [その他の成分] ・消泡剤(共栄社化学(株)製、フローレンAC−300): 1部 ・フタロシアニングリーン: 0.3部In addition to the components shown in Table 1, components contained in each of the compositions of Examples 1 to 6 and Comparative Example: [photopolymerization initiator (E)] 2-methyl [4- (methylthio) phenyl] -2 -Morpholino-1-propanone (Irgarcure 907, manufactured by Ciba Specialty Chemicals Co., Ltd.): 5 parts Diethylthioxanthone (Kayacure DETX-S, manufactured by Nippon Kayaku Co., Ltd.): 0.5 parts [Epoxy Compound (F)] ・ Bixylenol type epoxy resin (YY-4000 manufactured by Yuka Shell Epoxy Co., Ltd.): 10 parts ・ Phenol novolak type epoxy resin component (Nippon Kayaku Co., Ltd., RE306): 3 parts [ Latent curing adhesion imparting agent (G)] Dicyandiamide (DICY): 0.2 part Melamine: 3 parts Inorganic filler (H) Barium sulfate: 6 parts Talc 4 parts Silica: 10 parts [Other Components] - antifoaming agent (manufactured by Kyoeisha Chemical Co., Ltd., Flowlen AC-300): 1 parts Phthalocyanine Green 0.3 part
【0053】[0053]
【表1】 [Table 1]
【0054】次に、このようにして調製した感光性樹脂
組成物を、スクリーン印刷法により銅スルーホール・プ
リント配線板の全面に塗布し、その塗膜を熱風循環炉内
において80℃で20分間乾燥した後、フォトマスクを
介して波長365nmの紫外線をオーク製作所(株)製
積算光量計を用いて200mJ/cm2の光量で照射
し、光硬化させた後、1wt%炭酸ナトリウムの現像液
にて0.2MPaのスプレー圧で60秒間現像した後、
150℃に設定した熱風循環式硬化炉内で60分間熱硬
化させることによりソルダーレジストパターンを形成し
た。Next, the photosensitive resin composition thus prepared was applied to the entire surface of the copper through-hole printed wiring board by screen printing, and the coating was applied at 80 ° C. for 20 minutes in a hot air circulating furnace. After drying, UV light having a wavelength of 365 nm was irradiated through a photomask at a light amount of 200 mJ / cm 2 using an integrating luminometer manufactured by Oak Manufacturing Co., Ltd., and photo-cured, and then applied to a 1 wt% sodium carbonate developing solution. After developing at a spray pressure of 0.2 MPa for 60 seconds,
A solder resist pattern was formed by heat curing in a hot air circulation type curing furnace set at 150 ° C. for 60 minutes.
【0055】こうして得られたソルダーレジスト用感光
性樹脂組成物及びソルダーレジストパターンの諸特性に
ついて、以下に示す試験を行なった。その評価結果を表
2に示す。The following tests were performed on the various characteristics of the thus obtained photosensitive resin composition for solder resist and the solder resist pattern. Table 2 shows the evaluation results.
【表2】 [Table 2]
【0056】上記表2に示す結果から明らかなように、
本発明に係る感光性樹脂組成物は、ソルダーレジストに
要求される諸特性、即ち、乾燥性、乾燥塗膜の指触乾燥
性、熱硬化性、及び硬化皮膜のはんだ耐熱性、耐溶剤
性、耐薬品性、密着性、電気絶縁性、耐電食性などを満
足すると共に、光感度及び解像性を飛躍的に向上でき、
しかも無電解金めっき耐性に優れるものであることが確
認できた。なお、表2に示す試験内容と評価方法は以下
のとおりである。As is clear from the results shown in Table 2 above,
The photosensitive resin composition according to the present invention has various properties required for a solder resist, that is, drying properties, dryness of a dry coating to the touch, thermosetting properties, and solder heat resistance of a cured film, solvent resistance, In addition to satisfying chemical resistance, adhesion, electrical insulation, electrolytic corrosion resistance, etc., light sensitivity and resolution can be dramatically improved,
In addition, it was confirmed that the electroless gold plating resistance was excellent. The test contents and evaluation methods shown in Table 2 are as follows.
【0057】(1)乾燥後の指触乾燥性 感光性樹脂組成物を銅スルーエッチング回路基板にスク
リーン印刷で塗布し、熱風循環式乾燥炉を用いて80℃
で10分間又は20分間乾燥したものをテストピースと
し、指で塗布面を強く押し、粘着性を調査し、塗膜の状
態を判定した。 ◎:全くベタツキや指紋跡が認められないもの。 ○:表面に僅かにベタツキと指紋跡がみられるもの。 △:表面に顕著なベタツキと指紋跡がみられるもの。 ×:表面が完全にベタツク状態のもの。(1) Drying to the touch after drying The photosensitive resin composition is applied to a copper through-etched circuit board by screen printing, and is heated to 80 ° C. using a hot-air circulation drying oven.
The test piece was dried for 10 minutes or 20 minutes using a test piece, and the coated surface was strongly pressed with a finger, and the adhesiveness was investigated to determine the state of the coating film. A: No stickiness or fingerprint mark was observed at all. :: Slight stickiness and fingerprint marks are observed on the surface. Δ: Remarkable stickiness and fingerprint marks are observed on the surface. X: The surface is completely tacky.
【0058】(2)ホットタックフリー性 感光性樹脂組成物を銅スルーエッチング回路基板にスク
リーン印刷で塗布し、熱風循環式乾燥炉を用いて80℃
で15分間乾燥し、放冷後、さらに印刷面を下にして8
0℃で20分間水平乾燥したものをテストピースとし、
塗膜の状態を目視判定した。 ◎:全く傷やへこみが認められないもの。 ○:表面に僅かに傷やへこみがみられるもの。 △:表面に顕著な傷やへこみがみられるもの。 ×:表面が完全に傷つく状態のもの。(2) Hot tack-free property The photosensitive resin composition is applied to a copper through-etched circuit board by screen printing, and is heated to 80 ° C. using a hot-air circulation drying oven.
After drying for 15 minutes and allowing to cool,
The test piece was dried horizontally at 0 ° C for 20 minutes.
The state of the coating film was visually determined. :: No scratches or dents were observed. :: The surface is slightly scratched or dented. Δ: Notable scratches and dents are observed on the surface. ×: The surface is completely damaged.
【0059】(3)現像性試験 感光性樹脂組成物を銅スルーエッチング回路基板にスク
リーン印刷で塗布し、熱風循環式乾燥炉を用いて80℃
で所定時間(60〜90分)乾燥したものをテストピー
スとし、スプレー圧0.2MPaの現像液にて60秒間
の現像を行なった後、その塗膜の除去状態を目視判定し
た。 ◎:完全に現像ができたもの。 ○:表面に薄く現像されない部分があるもの。 △:全体的に現像残りがあるもの。 ×:ほとんど現像されていないもの。(3) Developability Test The photosensitive resin composition is applied to a copper through-etched circuit board by screen printing, and is heated to 80 ° C. using a hot air circulation drying oven.
The test piece was dried for a predetermined time (60 to 90 minutes) as a test piece, developed with a developer having a spray pressure of 0.2 MPa for 60 seconds, and the state of removal of the coating film was visually determined. A: Completely developed. :: There is a part which is not developed easily on the surface. Δ: Development residual as a whole. X: Hardly developed.
【0060】(4)感光性試験 感光性樹脂組成物を銅スルーエッチング回路基板にスク
リーン印刷で塗布し、熱風循環式乾燥炉を用いて80℃
で20分間乾燥した後、フォトマスクを介して、波長3
65nmの紫外線をオーク製作所(株)製の積算光量計
を用いて100mJ/cm2又は200mJ/cm2の光
量で照射し、それぞれをスプレー圧0.2MPaの現像
液にて60秒間の現像を行なった後、その塗膜の状態を
目視判定した。 ◎:全く変化が認められないもの。 ○:表面がわずかに変化しているもの。 △:表面が顕著に変化しているもの。 ×:塗膜が脱落するもの。(4) Photosensitivity test The photosensitive resin composition is applied to a copper through-etched circuit board by screen printing, and is heated to 80 ° C. using a hot air circulation type drying furnace.
After drying for 20 minutes at a wavelength of 3
The 65nm UV using ORC Manufacturing Co., Ltd. integrated light intensity meter and irradiated with light intensity of 100 mJ / cm 2 or 200 mJ / cm 2, by developing for 60 seconds with a developer solution of a spray pressure 0.2MPa, respectively After that, the state of the coating film was visually determined. A: No change was observed. :: The surface is slightly changed. Δ: The surface is significantly changed. ×: The coating film comes off.
【0061】(5)密着性試験 感光性樹脂組成物を銅スルーエッチング回路基板にスク
リーン印刷で塗布し、熱風循環式乾燥炉を用いて80℃
で20分間乾燥した後、フォトマスクを介して、波長3
65nmの紫外線をオーク製作所(株)製の積算光量計
を用いて350mJ/cm2の光量で照射したものをテ
ストピースとし、スプレー圧0.2MPaの現像液にて
60秒間の現像を行なった後、150℃で60分間ポス
トキュアしてテストピースとし、JIS D0202の
試験方法に従って碁盤目状のクロスカットを入れ、次い
でセロハン粘着テープによるピーリングテストを行い、
塗膜の剥離状態を目視判定した。 ◎:100/100で全く剥れのないもの。 ○:100/100でクロスカット部が少し剥れたも
の。 △:50/100〜90/100の範囲で剥がれたも
の。 ×:0/100〜50/100の範囲で剥がれたもの。(5) Adhesion test The photosensitive resin composition was applied to a copper through-etched circuit board by screen printing, and then heated to 80 ° C. using a hot-air circulation drying oven.
After drying for 20 minutes at a wavelength of 3
A test piece was irradiated with 65 nm ultraviolet light at a light amount of 350 mJ / cm 2 using an integrating light meter manufactured by Oak Manufacturing Co., Ltd., and developed for 60 seconds with a developer at a spray pressure of 0.2 MPa. A test piece was prepared by post-curing at 150 ° C. for 60 minutes, and a cross cut in a grid pattern was made according to the test method of JIS D0202, and then a peeling test was performed using a cellophane adhesive tape.
The peeling state of the coating film was visually determined. A: 100/100 without any peeling. :: The cross cut portion was slightly peeled off at 100/100. Δ: Peeled in the range of 50/100 to 90/100. ×: Peeled in the range of 0/100 to 50/100.
【0062】(6)鉛筆硬度試験 密着性試験(5)と同じテストピースを用い、それぞれ
JIS K5400の試験方法に従って1kgの荷重で
硬度を測定した。(6) Pencil hardness test Using the same test piece as in the adhesion test (5), the hardness was measured under a load of 1 kg in accordance with the test method of JIS K5400.
【0063】(7)耐酸性試験 密着性試験(5)と同じテストピースを用い、それぞれ
10容量%硫酸水溶液に20℃で30分間浸漬した後取
り出し、塗膜の状態と密着性とを総合的に判定評価し
た。 ◎:全く変化が認められないもの。 ○:ほんの僅か変化しているもの。 △:顕著に変化しているもの。 ×:塗膜にフクレあるいは膨潤脱落があるもの。(7) Acid Resistance Test Using the same test piece as in the adhesion test (5), each was immersed in a 10% by volume aqueous sulfuric acid solution at 20 ° C. for 30 minutes and then taken out. Was evaluated. A: No change was observed. :: slightly changed. Δ: Notably changed. X: The coating film has blisters or swelling and falling off.
【0064】(8)耐アルカリ性試験 10容量%硫酸水溶液を10重量%水酸化ナトリウム水
溶液に代えたこと以外は、上記耐酸性試験(7)と同様
にして試験、評価した。(8) Alkali Resistance Test An acid resistance test was conducted and evaluated in the same manner as in the above acid resistance test (7), except that the 10% by volume aqueous sulfuric acid solution was replaced with a 10% by weight aqueous sodium hydroxide solution.
【0065】(9)耐溶剤性試験 10容量%硫酸水溶液をアセトンに代えたこと以外は、
上記耐酸性試験(7)と同様にして試験、評価した。(9) Solvent Resistance Test Except that the 10% by volume sulfuric acid aqueous solution was replaced with acetone,
The test and evaluation were performed in the same manner as in the acid resistance test (7).
【0066】(10)耐無電解金めっき性試験 密着性試験(5)と同じテストピースをそれぞれ、「オ
ーレット(AURED)」(小島化学薬品(株)製めっ
き液)を用い、75℃の液温で10分間めっきを行って
0.5μmの厚さの金を析出させた後の塗膜の状態を耐
酸性試験(7)と同様に評価した。(10) Electroless Gold Plating Resistance Test The same test piece as in the adhesion test (5) was used at 75 ° C. with “AURED” (a plating solution manufactured by Kojima Chemical Co., Ltd.). The state of the coating film after plating at a temperature for 10 minutes to deposit gold having a thickness of 0.5 μm was evaluated in the same manner as in the acid resistance test (7).
【0067】(11)はんだ耐熱性試験 密着性試験(5)と同じテストピースを用い、それぞれ
JIS C6481の試験方法に従って、260℃のは
んだ浴に10秒間浸漬する操作を1回及び3回行なった
後、その塗膜の状態を耐酸性試験(7)と同様に評価し
た。(11) Solder heat resistance test Using the same test piece as in the adhesion test (5), the operation of dipping in a solder bath at 260 ° C. for 10 seconds was performed once and three times in accordance with the test method of JIS C6481. Thereafter, the state of the coating film was evaluated in the same manner as in the acid resistance test (7).
【0068】(12)絶縁抵抗測定 IPC−B−25のくし型テストパターンBを用い、密
着性試験(5)と同様の条件でテストピースを作製し、
初期の絶縁抵抗と、相対温度85℃、相対湿度85%、
直流50V印加の条件下で500時間の加湿試験を行な
った後の絶縁抵抗を測定した。(12) Insulation Resistance Measurement A test piece was prepared using the comb test pattern B of IPC-B-25 under the same conditions as in the adhesion test (5).
Initial insulation resistance, relative temperature 85 ° C, relative humidity 85%,
The insulation resistance was measured after performing a humidification test for 500 hours under the condition of applying a direct current of 50 V.
【0069】(13)耐電食性試験 IPC−B−25のくし型テストパターンBを用い、密
着性試験(5)と同様の条件でテストピースを作製し、
相対温度85℃、相対湿度85%、直流50V印加の条
件下で500時間の加湿試験を行い、試験後の銅箔の変
色を調査した。 ◎:全く変化が認められないもの。 ○:ほんの僅か変化しているもの。 △:顕著に変化しているもの。 ×:塗膜にフクレあるいは膨潤脱落があるもの。(13) Electric corrosion resistance test A test piece was prepared using the comb test pattern B of IPC-B-25 under the same conditions as in the adhesion test (5).
A humidification test was performed for 500 hours under the conditions of a relative temperature of 85 ° C., a relative humidity of 85%, and a direct current of 50 V, and the discoloration of the copper foil after the test was investigated. A: No change was observed. :: slightly changed. Δ: Notably changed. X: The coating film has blisters or swelling and falling off.
【0070】(14)解像性測定 感光性樹脂組成物を銅スルーエッチング回路基板にスク
リーン印刷で塗布し、熱風循環式乾燥炉を用いて80℃
で20分間乾燥した後、所定のフォトマスク(ライン3
0μm〜100μmのもの)を介して、波長365nm
の紫外線をオーク製作所(株)製の積算光量計を用いて
200mJ/cm2の光量で照射したものをテストピー
スとし、スプレー圧0.2MPaの現像液にて60秒間
の現像を行なった後、露光部のラインの残存とスペース
の抜け性の状態を目視判定した。(14) Measurement of Resolution The photosensitive resin composition is applied to a copper through-etched circuit board by screen printing, and is heated to 80 ° C. using a hot-air circulation drying oven.
After drying for 20 minutes with a predetermined photomask (line 3)
0 μm to 100 μm), wavelength of 365 nm
The test piece was irradiated with ultraviolet light of 200 mJ / cm 2 using an integrating luminometer manufactured by Oak Manufacturing Co., Ltd., and developed for 60 seconds with a developer having a spray pressure of 0.2 MPa. The state of remaining lines in the exposed area and the state of space removability were visually determined.
【0071】(15)感度測定 感光性樹脂組成物を銅スルーエッチング回路基板にスク
リーン印刷で塗布し、熱風循環式乾燥炉を用いて80℃
で20分間乾燥した後、フォトマスクを介して、波長3
65nmの紫外線をオーク製作所(株)製の積算光量計
を用いて200mJ/cm2の光量で照射したものをテ
ストピースとし、スプレー圧0.2MPaの現像液にて
60秒間の現像を行なった後、残存塗膜の段数を目視判
定した。フォトマスクはイーストマン・コダック社製、
ステップタブレットNo.2を使用した。(15) Sensitivity Measurement The photosensitive resin composition is applied to a copper through-etched circuit board by screen printing, and is heated to 80 ° C. using a hot air circulation type drying furnace.
After drying for 20 minutes at a wavelength of 3
A test piece was irradiated with an ultraviolet light of 65 nm at a light amount of 200 mJ / cm 2 using an integrating light meter manufactured by Oak Manufacturing Co., Ltd., and was developed for 60 seconds with a developing solution at a spray pressure of 0.2 MPa. The number of steps of the remaining coating film was visually determined. The photomask is made by Eastman Kodak,
Step tablet No. 2 was used.
【0072】[0072]
【発明の効果】以上説明したように、本発明の感光性樹
脂組成物によれば、ソルダーレジストに要求される諸特
性を満足すると共に、光感度及び解像性を飛躍的に向上
でき、無電解金めっき耐性に特に優れたソルダーレジス
トを形成することができる。As described above, according to the photosensitive resin composition of the present invention, various characteristics required for a solder resist can be satisfied, and the photosensitivity and resolution can be significantly improved. A solder resist particularly excellent in electrolytic gold plating resistance can be formed.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) C08F 2/46 C08F 2/46 290/04 290/04 299/02 299/02 G03F 7/004 501 G03F 7/004 501 Fターム(参考) 2H025 AA01 AA02 AB15 AC01 AD01 BC34 BC52 BC53 BC66 BC73 BC74 BC82 BC84 CA00 CC06 CC08 CC17 4J011 AA05 PA04 PA07 PA09 PA13 PA36 PA43 PA45 PA46 PA47 PA48 PA65 PA70 PB22 PB39 QA03 QA37 QA39 QB03 QB19 QB22 SA01 SA21 SA31 SA51 SA61 SA63 SA64 SA79 SA83 WA01 4J027 AA01 AA02 AE03 AE07 BA07 BA13 CA02 CA10 CA14 CA16 CA18 CA23 CA25 CA26 CA27 CA31 CA36 CD10 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) C08F 2/46 C08F 2/46 290/04 290/04 299/02 299/02 G03F 7/004 501 G03F 7 / 004 501 F-term (reference) 2H025 AA01 AA02 AB15 AC01 AD01 BC34 BC52 BC53 BC66 BC73 BC74 BC82 BC84 CA00 CC06 CC08 CC17 4J011 AA05 PA04 PA07 PA09 PA13 PA36 PA43 PA45 PA46 PA47 PA48 PA65 PA70 PB22 PB39 QA03 QA37 QA Q19 SA31 SA51 SA61 SA63 SA64 SA79 SA83 WA01 4J027 AA01 AA02 AE03 AE07 BA07 BA13 CA02 CA10 CA14 CA16 CA18 CA23 CA25 CA26 CA27 CA31 CA36 CD10
Claims (8)
アクリレート、(b)酸基含有不飽和化合物及び(c)
(メタ)アクリル酸エステルからなる共重合体の一部の
酸基に、脂環式エポキシ基含有不飽和化合物のエポキシ
基を付加させて得られる変性共重合体、(B)アセトア
セトキシエチルアクリレート、アクリロイルモルフォリ
ン及びテトラヒドロフルフリルアクリレートよりなる群
から選ばれる少なくとも1種のモノマー、(C)1分子
中に2つ以上の不飽和基を有し、環状骨格を持つ活性エ
ネルギー線硬化性樹脂、(D)希釈剤、及び(E)光重
合開始剤を含有することを特徴とする感光性樹脂組成
物。1. (A-1) (a) β-carboxyethyl acrylate, (b) an acid group-containing unsaturated compound, and (c)
(B) acetoacetoxyethyl acrylate, a modified copolymer obtained by adding an epoxy group of an alicyclic epoxy group-containing unsaturated compound to a part of acid groups of a copolymer composed of a (meth) acrylate ester, (C) at least one monomer selected from the group consisting of acryloylmorpholine and tetrahydrofurfuryl acrylate, (C) an active energy ray-curable resin having two or more unsaturated groups in one molecule and having a cyclic skeleton, A photosensitive resin composition comprising: D) a diluent; and (E) a photopolymerization initiator.
アクリレート、(b)酸基含有不飽和化合物、(c)
(メタ)アクリル酸エステル、及び(d)アセトアセト
キシエチルアクリレート、アクリロイルモルフォリン及
びテトラヒドロフルフリルアクリレートよりなる群から
選ばれる少なくとも1種のモノマーからなる共重合体の
一部の酸基に、脂環式エポキシ基含有不飽和化合物のエ
ポキシ基を付加させて得られる変性共重合体、(C)1
分子中に2つ以上の不飽和基を有し、環状骨格を持つ活
性エネルギー線硬化性樹脂、(D)希釈剤、及び(E)
光重合開始剤を含有することを特徴とする感光性樹脂組
成物。2. (A-2) (a) β-carboxyethyl acrylate, (b) an acid group-containing unsaturated compound, (c)
(D) a part of an acid group of a copolymer comprising at least one monomer selected from the group consisting of (meth) acrylic acid ester and (d) acetoacetoxyethyl acrylate, acryloylmorpholine and tetrahydrofurfuryl acrylate; A modified copolymer obtained by adding an epoxy group of an unsaturated compound having the formula epoxy group, (C) 1
An active energy ray-curable resin having at least two unsaturated groups in the molecule and having a cyclic skeleton, (D) a diluent, and (E)
A photosensitive resin composition comprising a photopolymerization initiator.
(e)ノボラック型エポキシ化合物と(f)不飽和モノ
カルボン酸とのエステル化反応により生成するエポキシ
基のエステル化物である感光性プレポリマー(C−
1)、及び(g)ジイソシアネート類と(h)1分子中
に1個の水酸基を有する(メタ)アクリレート類との反
応生成物を上記感光性プレポリマー(C−1)の二級水
酸基と反応させて得られる感光性プレポリマー(C−
2)よりなる群から選択される少なくとも1種であり、
(A)成分と(C)成分の配合比が100:2〜10
0:50(質量基準)であることを特徴とする請求項1
又は2に記載の感光性樹脂組成物。3. An active energy ray-curable resin (C) comprising:
A photosensitive prepolymer (C-) which is an esterified product of an epoxy group formed by an esterification reaction between (e) a novolak type epoxy compound and (f) an unsaturated monocarboxylic acid.
Reacting a reaction product of 1) and (g) a diisocyanate with (h) a (meth) acrylate having one hydroxyl group in one molecule with a secondary hydroxyl group of the photosensitive prepolymer (C-1); The photosensitive prepolymer (C-
2) at least one selected from the group consisting of:
The compounding ratio of the component (A) and the component (C) is 100: 2 to 10
0:50 (based on mass).
Or the photosensitive resin composition according to 2.
ことを特徴とする請求項1乃至3のいずれか一項に記載
の感光性樹脂組成物。4. The photosensitive resin composition according to claim 1, further comprising (F) an epoxy compound.
有することを特徴とする請求項1乃至4のいずれか一項
に記載の感光性樹脂組成物。5. The photosensitive resin composition according to claim 1, further comprising (G) a latent curing adhesion-imparting agent.
を特徴とする請求項1乃至5のいずれか一項に記載の感
光性樹脂組成物。6. The photosensitive resin composition according to claim 1, further comprising (H) an inorganic filler.
が3,4−シクロヘキシルメチル(メタ)アクリレート
であることを特徴とする請求項1乃至6のいずれか一項
に記載の感光性樹脂組成物。7. The photosensitive resin composition according to claim 1, wherein the alicyclic epoxy group-containing unsaturated compound is 3,4-cyclohexylmethyl (meth) acrylate. object.
ト、層間絶縁材料、めっきレジスト、又はFPD用部材
として使用されることを特徴とする請求項1乃至7のい
ずれか一項に記載の感光性樹脂組成物。8. The photosensitive resin composition according to claim 1, which is used as a solder resist, an etching resist, an interlayer insulating material, a plating resist, or an FPD member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000195051A JP2002014466A (en) | 2000-06-28 | 2000-06-28 | Photosensitive resin composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000195051A JP2002014466A (en) | 2000-06-28 | 2000-06-28 | Photosensitive resin composition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002014466A true JP2002014466A (en) | 2002-01-18 |
Family
ID=18693788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000195051A Withdrawn JP2002014466A (en) | 2000-06-28 | 2000-06-28 | Photosensitive resin composition |
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| Country | Link |
|---|---|
| JP (1) | JP2002014466A (en) |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003069410A1 (en) * | 2002-02-18 | 2003-08-21 | Jsr Corporation | Radiation-sensitive resin composition |
| JP2007264377A (en) * | 2006-03-29 | 2007-10-11 | Jsr Corp | Radiation-sensitive composition for forming colored layer, color filter, and color liquid crystal display element |
| JP2007316506A (en) * | 2006-05-29 | 2007-12-06 | Jsr Corp | Radiation-sensitive composition for forming colored layer, color filter, and color liquid crystal display element |
| JP2007316485A (en) * | 2006-05-29 | 2007-12-06 | Jsr Corp | Radiation-sensitive composition for forming colored layer, color filter, and color liquid crystal display element |
| JP2008019336A (en) * | 2006-07-12 | 2008-01-31 | Taiyo Ink Mfg Ltd | Photo-curable and thermosetting one-component solder resist composition and printed wiring board using the same |
| JP2014052309A (en) * | 2012-09-07 | 2014-03-20 | Hitachi Chemical Co Ltd | Membrane, substrate and cell sampling method |
| KR101529720B1 (en) * | 2006-05-29 | 2015-06-17 | 제이에스알 가부시끼가이샤 | A radiation-sensitive composition for forming a colored layer, a color filter, and a color liquid crystal display element |
| JP2017186514A (en) * | 2016-03-31 | 2017-10-12 | 東洋インキScホールディングス株式会社 | Coating composition |
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