JP2002012931A - Titanium plate excellent in surface properties and method for producing the same - Google Patents
Titanium plate excellent in surface properties and method for producing the sameInfo
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- JP2002012931A JP2002012931A JP2000195912A JP2000195912A JP2002012931A JP 2002012931 A JP2002012931 A JP 2002012931A JP 2000195912 A JP2000195912 A JP 2000195912A JP 2000195912 A JP2000195912 A JP 2000195912A JP 2002012931 A JP2002012931 A JP 2002012931A
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- titanium
- thickness
- polishing
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Abstract
(57)【要約】
【課題】研磨面の表面性状が板厚内部に亘って均一であ
るチタン熱延板およびその製造方法の提供。
【解決手段】0.015〜0.120質量%の酸素を含有するチタ
ン板であって、肉厚の全断面において100μmを超える
結晶粒が存在しない電解析出ドラムの表面部材用チタン
熱延板。このチタン熱延板は、熱間圧延の終止温度を20
0〜750℃として圧延した後、圧延板の中心部における冷
却速度を10℃/min以上で冷却した後、550〜700℃の温
度範囲に、下式を満足する保持時間で熱処理を施すこと
によって製造することができる。
1.2≦T/t≦15
ここで、tはチタン材の板厚(mm)、Tは保持時間(mi
n)である。(57) Abstract: Provided is a hot rolled titanium sheet having a polished surface having a uniform surface property throughout the inside of the sheet thickness, and a method for producing the same. The titanium hot rolled sheet for a surface member of an electrolytic deposition drum is a titanium plate containing 0.015 to 0.120% by mass of oxygen and having no crystal grains exceeding 100 μm in the entire cross section. This hot rolled titanium sheet has a hot rolling end temperature of 20.
After rolling at 0 to 750 ° C., the cooling rate at the center of the rolled sheet is cooled at 10 ° C./min or more, and then heat-treated in a temperature range of 550 to 700 ° C. for a holding time satisfying the following formula. Can be manufactured. 1.2 ≦ T / t ≦ 15 where t is the thickness of the titanium material (mm) and T is the holding time (mi)
n).
Description
【0001】[0001]
【発明の属する技術分野】本発明は、銅あるいはニッケ
ルなどの金属箔を電解析出法によって製造する電解析出
ドラムの表面部材に使用される表面性状に優れた安価な
チタン熱延板およびそれを製造する方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inexpensive hot rolled titanium sheet having excellent surface properties and used for a surface member of an electrolytic deposition drum for producing a metal foil such as copper or nickel by an electrolytic deposition method. To a method for producing
【0002】[0002]
【従来の技術】近年、電子機器などの急速な発展に伴
い、これら機器に用いられる銅またはニッケルなどの金
属箔は、需要が増大するとともに品質に対する要求も厳
しくなっており、特に表面性状(表面の平滑性)に優れ
たものの要求が増している。2. Description of the Related Art In recent years, with the rapid development of electronic devices and the like, metal foils such as copper and nickel used for these devices have been in increasing demand and strict requirements for quality. Requirements) are increasing.
【0003】これらの金属箔は、銅またはニッケルの電
解液から金属製ドラム(以下、これを「電解ドラム」と
記載する)の表面に銅またはニッケルを析出させ、この
析出した箔を連続的に回収することによって製造されて
いる。このため、金属箔の表面には電解ドラムの表面形
状が転写されるため、金属箔の表面性状は電解ドラムの
表面性状の良否に左右される。[0003] These metal foils are obtained by depositing copper or nickel on the surface of a metal drum (hereinafter referred to as "electrolytic drum") from a copper or nickel electrolytic solution, and continuously depositing the deposited foil. Manufactured by recovery. For this reason, since the surface shape of the electrolytic drum is transferred to the surface of the metal foil, the surface property of the metal foil depends on the quality of the surface property of the electrolytic drum.
【0004】この電解ドラムには、電解液での耐食性の
点からチタン材が多用されている。たとえばチタン材を
圧延などによって板材とし、これを円筒状に成形加工し
て端部を溶接によってリング状とした後、鋼製のインナ
ードラムに焼きばめなどの方法で、はめ込み製造され
る。チタン板材の表面は、研削加工および研磨加工を施
して仕上げられる。したがって、チタン材の研磨後の表
面形状が電解析出箔にプリントされる。[0004] In this electrolytic drum, a titanium material is frequently used from the viewpoint of corrosion resistance with an electrolytic solution. For example, a titanium material is formed into a plate material by rolling or the like, formed into a cylindrical shape, the end portion is formed into a ring shape by welding, and then fitted into a steel inner drum by a method such as shrink-fitting. The surface of the titanium plate material is finished by performing grinding and polishing. Therefore, the surface shape after polishing of the titanium material is printed on the electrolytic deposition foil.
【0005】電解金属箔の表面性状を改善するため、チ
タン材の研磨後の表面性状を改善する方法が提案されて
いる。たとえば、 (1) 熱間圧延によって得られたチタン板を円弧状に成形
し、突き合わせ部を溶接によって接合してリング状の中
間製品とした後、冷間において再び圧下を加え、引き続
き焼鈍することによって、微細な結晶粒(25μm以下)
を生成させることでチタンドラム表面に生じる段差を無
くし、電解箔の品質を向上させるチタン製電着ドラムの
製造方法(特開平6-93401号公報、参照)がある。In order to improve the surface properties of the electrolytic metal foil, there has been proposed a method of improving the surface properties of a titanium material after polishing. For example, (1) forming a titanium plate obtained by hot rolling into an arc shape, joining the butted portions by welding to form a ring-shaped intermediate product, then applying a reduction again in the cold, followed by annealing. Fine crystal grains (less than 25μm)
There is a method of producing a titanium electrodeposition drum (see Japanese Patent Application Laid-Open No. 6-93401) in which a step formed on the surface of a titanium drum is eliminated by producing a titanium electrode to improve the quality of an electrolytic foil.
【0006】上記の方法は、隣接する結晶粒の段差によ
る表面欠陥をなくすことができるが、研磨加工によって
チリメン模様といわれる研磨むらが生じることがある。
また、リング状のものを冷間加工によって成形すると形
状が不安定になり、後工程の焼きばめなどの施工を困難
にする。これを解消する方法として、本出願人は下記
(2)に示す電着ドラム用チタン材の製造方法および(3)に
示す電着ドラム用チタン材を提案した。[0006] The above method can eliminate surface defects due to steps of adjacent crystal grains, but may cause uneven polishing called a chirimen pattern by polishing.
Further, when a ring-shaped material is formed by cold working, the shape becomes unstable, and it becomes difficult to perform a post-process shrink fit or the like. As a method to solve this, the applicant has
A method for producing a titanium material for an electrodeposition drum shown in (2) and a titanium material for an electrodeposition drum shown in (3) were proposed.
【0007】(2) 鋳塊の冷却過程、熱間圧延または環状
圧延の冷却過程で1000℃/h以上の冷却速度でβ変態点
を通過させる急冷処理を与え、その処理後に行う成形加
工または熱処理をβ変態点未満の温度域で行い、チリメ
ン模様を生じることのない電着ドラム用チタンリングの
製造方法(特開平9-20971号公報、参照)。(2) A quenching process for passing the β transformation point at a cooling rate of 1000 ° C./h or more in the cooling process of the ingot, hot rolling or annular rolling, and forming or heat treatment performed after the cooling process In a temperature range lower than the β transformation point to produce a titanium ring for an electrodeposition drum that does not produce a chirimen pattern (see JP-A-9-20971).
【0008】(3) 厚さが4〜30mmであり、その表面を平
均あらさ(Ra)で0.3μm以下に研磨仕上げしたときの
「表面の任意方向に0.3〜1mmピッチで10点以上の位置に
おいて荷重1kg(試験力:約9.8N)以下でのビッカース
硬さ測定値」の最大値と最小値との差が10以下である電
着ドラム用チタン材(特開平9-20990号公報、参照)。(3) When the thickness is 4 to 30 mm and the surface is polished to an average roughness (Ra) of 0.3 μm or less, “at a position of 10 or more points at a pitch of 0.3 to 1 mm in any direction of the surface” The difference between the maximum and minimum values of the "Vickers hardness measured value under a load of 1 kg (test force: about 9.8 N) or less" is 10 or less (see Japanese Patent Application Laid-Open No. 9-20990). .
【0009】このチタン材は、鋳塊の鋳込みから板状あ
るいはリング状チタン材を製造する工程において鋳塊の
冷却時、熱間圧延後または環状圧延後に1000℃/h以上
の冷却速度でβ変態点を通過させる冷却処理を行い、こ
の処理後の成形加工または熱処理をβ変態点未満の温度
域で実施する製造方法(すなわち、上記(2)に示す方
法)によって製造することができる。This titanium material is subjected to β transformation at a cooling rate of 1000 ° C./h or more at the time of cooling the ingot, after hot rolling or after annular rolling, in the step of producing a plate-shaped or ring-shaped titanium material from the casting of the ingot. It can be manufactured by a manufacturing method in which a cooling treatment for passing through a point is performed, and a forming process or a heat treatment after this process is performed in a temperature range lower than the β transformation point (that is, the method described in (2) above).
【0010】[0010]
【発明が解決しようとする課題】上記(2)の方法で製造
された上記(3)のチタン材は、板厚の表層部を研磨した
ときには表面性状が良好であるが、電解を繰り返し板厚
の内部にまで再研磨すると表面性状が劣化することがあ
る。The titanium material of the above (3) produced by the method of the above (2) has good surface properties when the surface layer of the plate thickness is polished, but the electrolysis is repeated. Re-polishing to the inside may deteriorate the surface properties.
【0011】本発明の目的は、電解ドラムを何回も再研
磨する場合でも、研磨面の表面性状が均一であるチタン
板材およびその製造方法を提供することにある。An object of the present invention is to provide a titanium plate material having a uniform polished surface even when the electrolytic drum is re-polished many times, and a method for producing the same.
【0012】[0012]
【課題を解決するための手段】本発明者は、上記(2)の
方法で製造された上記(3)のチタン材を板厚の内部にま
で研磨したとき、研磨面の表面性状が劣化する原因につ
いて研磨機構の解明を含む調査を行った。The inventor of the present invention has found that when the titanium material (3) manufactured by the method (2) is polished to the inside of the plate thickness, the surface properties of the polished surface deteriorate. The cause was investigated including the elucidation of the polishing mechanism.
【0013】チタンは、常温において稠密六方晶(HC
P)の結晶構造を持つ。一般的にチタンは、変形におい
てHCP結晶構造のC軸と平行な方向にはすべり成分を持た
ないために、この方向での変形が抑制され、より高い変
形抵抗を持つ双晶の活動が必要となる。Titanium is a dense hexagonal crystal (HC
It has the crystal structure of P). In general, since titanium does not have a slip component in the direction parallel to the C-axis of the HCP crystal structure during deformation, deformation in this direction is suppressed, and twinning with higher deformation resistance is required. Become.
【0014】一方、研磨加工において、研磨抵抗が場所
により微妙に変化すると、研磨加工においていわゆるビ
ビリ現象による「むしれ」が発生し、平滑な研磨面が得
られない。この場合に結晶粒径が大きければ研磨加工に
おいて双晶の発生を招きやすく、結果としてビビリ現象
を誘発しやすい。特に、100μmを超える結晶粒が混在
すると、この結晶粒において双晶が密に発生し、研磨抵
抗を局所的に著しく増大させることが判明した。On the other hand, in the polishing process, if the polishing resistance slightly changes depending on the location, a so-called chattering phenomenon occurs in the polishing process, and a smooth polished surface cannot be obtained. In this case, if the crystal grain size is large, twins are likely to be generated in the polishing process, and as a result, chatter phenomenon is easily induced. In particular, it was found that when crystal grains exceeding 100 μm were mixed, twins were densely generated in the crystal grains, and the polishing resistance was significantly increased locally.
【0015】チタン板は、熱間圧延によって製造される
が、熱間圧延後に徐冷されると静的な再結晶が生じ、結
晶粒の粗大化が進行する。この再結晶過程では、再結晶
の優先方位が存在し、特定の方位を持つ結晶粒が他の方
位を持つ結晶粒を浸食しつつ成長する。この結果、結晶
粒の大きさに著しい不均一が生じ、特に粒径の大きい結
晶粒で研磨抵抗が高まる結果、ビビリ現象を誘発させや
すくなる。これを回避するためには圧延時の終止温度
(仕上げ圧延温度)をある一定の範囲に抑えると共に、
圧延後の冷却速度を制御することで静的な再結晶の進行
を阻止する必要がある。また、焼鈍処理において保持時
間が長くなれば結晶粒の成長が生じるため、熱処理の温
度と時間を制御することが必要である。[0015] The titanium plate is manufactured by hot rolling. When the titanium plate is gradually cooled after the hot rolling, static recrystallization occurs and the crystal grains become coarse. In this recrystallization process, there is a preferred orientation of recrystallization, and a crystal grain having a specific orientation grows while eroding a crystal grain having another orientation. As a result, remarkable non-uniformity in the size of the crystal grains occurs, and particularly, the polishing resistance is increased in the crystal grains having a large grain size, so that the chatter phenomenon is easily induced. To avoid this, the final temperature during rolling (finish rolling temperature) is kept within a certain range,
It is necessary to control the progress of static recrystallization by controlling the cooling rate after rolling. In addition, if the holding time is increased in the annealing treatment, the crystal grains grow, so it is necessary to control the temperature and time of the heat treatment.
【0016】チタン材の研磨後の表面性状はチタンが化
学的に活性であること、および材料の硬度が低ければ研
磨加工面にムシレが生じ、このムシレがチタン表面に押
し付けられるために、良好な表面性状が得られないこと
が、上記研磨機構の調査で明らかとなった。チタン材の
硬度を高めるには、酸素の含有量を高めることが有効で
ある。The surface properties of the titanium material after polishing are such that the titanium is chemically active, and if the hardness of the material is low, a polished surface is formed, and the polished surface is pressed against the titanium surface. Investigation of the polishing mechanism revealed that no surface properties could be obtained. In order to increase the hardness of the titanium material, it is effective to increase the oxygen content.
【0017】本発明は上記の調査に基づく知見によって
完成され、その要旨は下記(1)に示す電解析出ドラムの
表面部材用チタン熱延板、下記(2)に示すチタン熱延板
の製造方法にある。The present invention has been completed based on the findings based on the above-mentioned investigations. The gist of the present invention is to produce a hot-rolled titanium sheet for a surface member of an electrolytic deposition drum shown in (1) below and a hot-rolled titanium sheet shown in (2) below. In the way.
【0018】(1)0.015〜0.120質量%の酸素を含有する
チタン板であって、肉厚の全断面において100μmを超
える結晶粒が存在しないチタン板。(1) A titanium plate containing 0.015 to 0.120% by mass of oxygen and having no crystal grains exceeding 100 μm in the entire cross section of the thickness.
【0019】(2)0.015〜0.120質量%の酸素を含有する
チタン鋳塊を仕上げ熱間圧延の終止温度を200〜750℃と
して圧延し、圧延板の中心部における冷却速度を10℃/
min以上で冷却した後、550〜700の温度範囲に、下式を
満足する保持時間で熱処理を施すチタン熱延板の製造方
法。 1.2≦T/t≦15 ここでtはチタン材の板厚(mm)、Tは保持時間(mi
n)である。(2) Rolling a titanium ingot containing 0.015 to 0.120 mass% of oxygen at a finish hot rolling end temperature of 200 to 750 ° C., and a cooling rate of 10 ° C. /
A method for producing a hot-rolled titanium sheet, which is subjected to a heat treatment in a temperature range of 550 to 700 after cooling at a temperature of 550 min or more for a holding time satisfying the following formula. 1.2 ≦ T / t ≦ 15 where t is the thickness of the titanium material (mm) and T is the retention time (mi)
n).
【0020】[0020]
【発明の実施の形態】本発明の電解ドラム用のチタン板
材は酸素含有量が0.015〜0.120質量%を含むチタン板材
であって、肉厚の全断面において100μmを超える結晶
粒が存在しないものである。なお、上記の酸素のほか
に、通常の不純物が含まれていてもよい。BEST MODE FOR CARRYING OUT THE INVENTION The titanium plate material for an electrolytic drum of the present invention is a titanium plate material having an oxygen content of 0.015 to 0.120% by mass and having no crystal grains exceeding 100 μm in the entire cross section of the wall thickness. is there. Note that ordinary impurities may be contained in addition to the above oxygen.
【0021】本発明のチタン板材で化学組成および結晶
粒径の最大値を規定した理由について説明する。以下、
成分組成を表す%は質量%を意味する。The reason why the maximum values of the chemical composition and the crystal grain size are defined in the titanium sheet material of the present invention will be described. Less than,
% Representing the component composition means mass%.
【0022】チタン材に含有する酸素量は、後述の(実
施例4)から明らかなように材料の硬さを変化させ、研
磨による表面性状の良否に影響する。酸素含有量が0.01
5%未満では、チタン材が軟らかく研磨加工で焼き付き
を発生しやすい。このため研磨後の表面は、肌がムシレ
たような状態となり、研磨粉が押し込まれた状態にな
る。また、酸素含有量が0.120%を超えるとチタン材が
硬くなり、ドラム製作時の曲げ加工性を低下させる。し
たがって、酸素含有量は、0.015〜0.120%とした。な
お、望ましい上限は、0.10%である。The amount of oxygen contained in the titanium material changes the hardness of the material, as will be apparent from (Example 4) described later, and affects the quality of the surface properties due to polishing. Oxygen content is 0.01
If it is less than 5%, the titanium material is soft and easily burns in during polishing. For this reason, the surface after polishing is in a state where the skin is lumpy and the polishing powder is pressed. On the other hand, when the oxygen content exceeds 0.120%, the titanium material becomes hard, and the bending workability at the time of manufacturing the drum decreases. Therefore, the oxygen content was set to 0.015 to 0.120%. Note that a desirable upper limit is 0.10%.
【0023】本発明のチタン板に含有されてもよい不純
物は、下記のような元素である。The impurities which may be contained in the titanium plate of the present invention are the following elements.
【0024】Fe(鉄)は、原料スポンジチタンに混入し
ている元素である。Feの含有量が0.09%を超えると耐食
性が低下する。したがって、Feの含有量は0.09%以下と
するのが望ましい。Fe (iron) is an element mixed in the raw material sponge titanium. If the Fe content exceeds 0.09%, the corrosion resistance decreases. Therefore, the content of Fe is desirably 0.09% or less.
【0025】Ni(ニッケル)は、原料のスポンジチタン
に混入している元素である。Niの含有量が0.05%を超え
ると耐食性が低下する。したがって、Niの含有量は0.05
%以下とするのが望ましい。Cr(クロム)は、原料のス
ポンジチタンに混入している元素である。Crの含有量が
0.05%を超えると耐食性が低下する。したがって、Crの
含有量は0.05%以下とするのが望ましい。Ni (nickel) is an element mixed in the raw material titanium sponge. If the Ni content exceeds 0.05%, the corrosion resistance decreases. Therefore, the content of Ni is 0.05
% Is desirable. Cr (chromium) is an element mixed into the raw material sponge titanium. Cr content
If it exceeds 0.05%, the corrosion resistance decreases. Therefore, the content of Cr is desirably 0.05% or less.
【0026】N(窒素)は、スポンジチタンに混入して
いるか、または溶解工程で混入する元素である。Nの含
有量が0.02%を超えるとNが局所的に濃化する結果、局
部的に硬度の高い領域が形成されて研磨による表面性状
が低下する。したがって、Nの含有量は0.02%以下とす
るのが望ましい。N (nitrogen) is an element mixed in titanium sponge or mixed in the dissolving step. When the content of N exceeds 0.02%, N is locally concentrated, so that a locally high-hardness region is formed and the surface properties due to polishing deteriorate. Therefore, the content of N is desirably 0.02% or less.
【0027】H(水素)は、スポンジチタンに混入して
いるか、または溶解工程ないしは焼鈍処理工程で混入す
る元素である。Hの含有量が0.015%を超えると水素脆化
を引き起こす。したがって、Hの含有量は0.015%以下に
するのが望ましい。H (hydrogen) is an element mixed in the titanium sponge or mixed in the dissolving step or the annealing step. If the H content exceeds 0.015%, hydrogen embrittlement occurs. Therefore, the content of H is desirably 0.015% or less.
【0028】C(炭素)は、原料のスポンジチタンに混
入している元素である。Cの含有量が0.01%を超えると
加工性が低下する。したがって、Cの含有量を0.01%以
下にするのが望ましい。C (carbon) is an element mixed in the raw material sponge titanium. If the content of C exceeds 0.01%, the workability is reduced. Therefore, the content of C is desirably 0.01% or less.
【0029】次に結晶粒径の最大値を100μm以下に規
定した理由について説明する。研磨加工における圧縮力
の作用によって、結晶粒径が100μmを超える大きな結
晶粒では双晶変形が密に生じる。特に100μmを超える
結晶粒が、50μm以下の微細な結晶粒と混在して存在す
ると、微細な結晶粒では双晶変形が生じにくいが、100
μmを超える結晶粒では双晶変形が密に生じるため、局
所的に変形抵抗が変化する。この結果、ビビレ現象を招
き、良好な研磨面を得ることができない。Next, the reason why the maximum value of the crystal grain size is set to 100 μm or less will be described. Due to the action of the compressive force in the polishing process, twinning deformation occurs densely in large crystal grains having a crystal grain size exceeding 100 μm. In particular, when crystal grains exceeding 100 μm are present together with fine crystal grains of 50 μm or less, twin deformation is unlikely to occur in fine crystal grains.
In crystal grains exceeding μm, twinning deformation occurs densely, so that deformation resistance locally changes. As a result, the vibrating phenomenon is caused, and a good polished surface cannot be obtained.
【0030】次に、本発明のチタン板の製造条件を規定
した理由について説明する。Next, the reason for defining the manufacturing conditions of the titanium plate of the present invention will be described.
【0031】チタン材の熱間圧延時の終止温度およびそ
の後の冷却速度は、後述の実施例1の結果から明らかな
ように、結晶粒の大きさに影響を与える。The final temperature during hot rolling of the titanium material and the subsequent cooling rate affect the size of the crystal grains, as is apparent from the results of Example 1 described later.
【0032】熱間圧延の終止温度が200℃未満では、圧
延材に歪みエネルギーが蓄積され、これが焼鈍処理で一
気に解放されるため特定の結晶粒で異常粒成長を生じ、
特に100μmを超える結晶粒が存在する混粒状態とな
る。この結果、研磨による表面性状が低下する。一方、
熱間圧延の終止温度が750℃を超えると、圧延後の冷却
過程において肉厚中心部で粗大な結晶粒が生成するた
め、研磨による表面性状が低下する。したがって、熱間
圧延の終止温度は、200℃以上、750℃以下とした。な
お、望ましい熱間圧延の終止温度は300℃から650℃の範
囲である。ここで熱間圧延の終止温度とは、圧延材の表
面温度を意味する。If the end temperature of the hot rolling is less than 200 ° C., strain energy is accumulated in the rolled material, and this is released at once by annealing, so that abnormal grain growth occurs in specific crystal grains,
In particular, a mixed particle state in which crystal grains exceeding 100 μm exist. As a result, the surface properties due to polishing decrease. on the other hand,
If the end temperature of hot rolling exceeds 750 ° C., coarse crystal grains are generated at the center of the wall thickness in the cooling process after rolling, so that the surface properties due to polishing deteriorate. Therefore, the end temperature of the hot rolling was set to 200 ° C. or more and 750 ° C. or less. The desired hot rolling end temperature is in the range of 300 ° C to 650 ° C. Here, the end temperature of hot rolling means the surface temperature of the rolled material.
【0033】熱間圧延後の圧延材の冷却速度の影響は、
後述の実施例2から明らかなように、100μmを超える
粗大な結晶粒を生成させないためには、10℃/min以上の
冷却速度を確保する必要がある。The effect of the cooling rate of the rolled material after hot rolling is as follows:
As is apparent from Example 2 described later, it is necessary to secure a cooling rate of 10 ° C./min or more in order to prevent the generation of coarse crystal grains exceeding 100 μm.
【0034】熱間圧延後の圧延材の冷却速度が板厚の中
心部において10℃/min未満では、冷却過程で静的な再結
晶が進行するため、圧延材には100μmを超える粗大な
結晶粒が生成する。仕上げ圧延後に粗大な結晶粒が生成
すると焼鈍熱処理によっても消滅しないため、チタン板
材の板厚中心部を研磨したとき、表面性状を低下させ
る。なお、冷却速度の上限は特に制限しない。If the cooling rate of the rolled material after hot rolling is less than 10 ° C./min at the center of the sheet thickness, static recrystallization proceeds during the cooling process. Grains are formed. When coarse crystal grains are formed after the finish rolling, they do not disappear even by annealing heat treatment, so that when polishing the central part of the thickness of the titanium sheet material, the surface properties are reduced. The upper limit of the cooling rate is not particularly limited.
【0035】次に焼鈍過程においては、後述の実施例3
から明らかなように焼鈍温度と板厚との関係で保持時間
を設定する必要がある。Next, in the annealing process, a third embodiment described later will be described.
As is clear from the above, it is necessary to set the holding time in relation to the annealing temperature and the sheet thickness.
【0036】焼鈍温度が550℃未満では再結晶が進行し
ない。この結果、チタン材には熱間圧延によって生じた
加工組織が残留する。加工組織が残留すると、研磨時に
研磨加工圧力が高まるため、ムシレが生じやすくなり、
良好な製品は得られない。一方、700℃を超えると結晶
粒の粗大化が著しく進行し、研磨による表面性状が低下
する。If the annealing temperature is lower than 550 ° C., recrystallization does not proceed. As a result, a processed structure generated by hot rolling remains in the titanium material. If the processed structure remains, the polishing processing pressure increases during polishing, so it is easy to cause wrinkles,
Good products cannot be obtained. On the other hand, when the temperature exceeds 700 ° C., the coarsening of the crystal grains remarkably progresses, and the surface properties due to polishing decrease.
【0037】焼鈍過程における保持時間は、チタン材の
板厚との関係において定めなければならない。すなわ
ち、保持時間T(min)が板厚t(mm)との関係において
保持時間Tが1.2×t未満である場合、保持時間が不足と
なり、チタン材の厚さ方向中心部まで均一に加熱されな
い。このために、チタン材の厚さ方向中心部に熱間圧延
組織が残留する。また、保持時間Tが15×tを超える場
合、保持時間が長くなり、表面での酸化、あるいは結晶
粒の粗大化のため研磨による表面性状が劣化する。した
がって、焼鈍過程における保持時間は、板厚との関係で
下式を満足させるのが望ましい。 1.2≦T/t≦15 ここで、tはチタン材の板厚(mm)、Tは保持時間(mi
n)である。なお、保持時間の望ましい範囲としては1.2
≦T/t≦10である。The holding time in the annealing process must be determined in relation to the thickness of the titanium material. That is, when the holding time T (min) is less than 1.2 × t in relation to the plate thickness t (mm), the holding time is insufficient, and the titanium material is not uniformly heated to the center in the thickness direction. . For this reason, a hot-rolled structure remains at the center in the thickness direction of the titanium material. If the holding time T exceeds 15 × t, the holding time becomes longer, and the surface properties due to polishing deteriorate due to oxidation on the surface or coarsening of crystal grains. Therefore, it is desirable that the holding time in the annealing process satisfies the following expression in relation to the sheet thickness. 1.2 ≦ T / t ≦ 15 where t is the thickness of the titanium material (mm) and T is the retention time (mi)
n). Note that a desirable range of the holding time is 1.2
≦ T / t ≦ 10.
【0038】[0038]
【実施例】(実施例1)圧延終止温度の影響を調査し
た。素材は、表1に示す化学成分を有するJIS1種の純
チタンを用いた。直径1mのインゴットから1m長さの
素材を切り出し、950℃に加熱した後、断面の一辺が500
mmまで鍛造した。さらに850℃に加熱した後、幅500mm、
厚さ80mmまで鍛造した。この素材から、厚さ80mm、幅20
0mm、長さ100mmの圧延用素材を切り出し、厚さ10mmまで
圧延した。圧延では850℃加熱とし、厚さ20mmまで圧延
し、さらに表2に示す終止温度になるまで待った後、厚
さ10mmまで2パスで仕上げた。終止温度の管理は接触式
の熱電対で行った。圧延後は、送風機の前に試料を放置
して冷却速度を速くした。圧延材と同一形状の試験材の
板厚中心部に熱電対を設置し700℃に加熱後の同じ条件
で冷却した場合、650℃から室温までの平均冷却速度は1
5℃/minであった。この圧延材を650℃で30分間焼鈍し
た。EXAMPLES (Example 1) The influence of the rolling end temperature was investigated. As the material, JIS Class 1 pure titanium having the chemical components shown in Table 1 was used. Cut out a 1m long material from a 1m diameter ingot and heat it to 950 ° C.
mm. After further heating to 850 ° C, width 500mm,
Forged to a thickness of 80 mm. From this material, thickness 80mm, width 20
A rolling material having a length of 0 mm and a length of 100 mm was cut out and rolled to a thickness of 10 mm. In the rolling, the material was heated at 850 ° C., rolled to a thickness of 20 mm, waited until the final temperature shown in Table 2 was completed, and finished to a thickness of 10 mm in two passes. The termination temperature was controlled by a contact thermocouple. After rolling, the sample was left in front of the blower to increase the cooling rate. When a thermocouple is installed at the center of the thickness of the test material of the same shape as the rolled material and cooled under the same conditions after heating to 700 ° C, the average cooling rate from 650 ° C to room temperature is 1
It was 5 ° C / min. This rolled material was annealed at 650 ° C. for 30 minutes.
【0039】[0039]
【表1】 [Table 1]
【0040】[0040]
【表2】 [Table 2]
【0041】以下、評価方法について説明する。Hereinafter, the evaluation method will be described.
【0042】熱間圧延後のミクロ組織は、圧延材の縦断
面でミクロ組織を観察した。このとき、表面から1mmの
位置(これを「表層部」という)と厚さ方向中心部(表
面から5mm、これを「中心部」という)について観察を行
った。この組織観察において結晶粒の大きさを100倍の
倍率にて観察し、結晶粒径が100μmを超えるものが1
視野内に観察されたものは粗大粒生成として、表2の評
価欄を×として示した。As for the microstructure after hot rolling, the microstructure was observed in a longitudinal section of the rolled material. At this time, observations were made at a position 1 mm from the surface (this is referred to as “surface portion”) and at the center in the thickness direction (5 mm from the surface, this is referred to as “center”). In this microstructure observation, the size of the crystal grains was observed at a magnification of 100 times.
Those observed in the visual field were regarded as coarse grains, and the evaluation column in Table 2 was indicated by x.
【0043】研磨後の表面性状の評価は一辺が100mmの
試験材を表面から板厚方向の1mm及び5mmの位置をシェ
ーパー(形削り機)で切削加工した後、PVA研磨(ポリ
ビニールアルコール、1000番)にて仕上げ研磨した。こ
のとき100mm角内の試験材の表面に模様が観察されたも
のは研磨性不良として、表2の評価欄を×とした。表2
の結果から明らかなように、熱間圧延の終止温度が200
〜745℃の範囲にある試験材1〜4は、表層部及び中心部
の結晶粒において100μmを超えるものは観察されず、
研磨試験においていずれの表面でも模様は認められなか
った。The surface properties after polishing were evaluated by cutting a test material 100 mm on a side at a position of 1 mm and 5 mm in the thickness direction from the surface with a shaper (shaping machine), and then performing PVA polishing (polyvinyl alcohol, 1000 No.) and finished polishing. At this time, those in which a pattern was observed on the surface of the test material within a 100 mm square were regarded as poor polishing properties, and the evaluation column of Table 2 was evaluated as x. Table 2
As is evident from the results, the hot rolling end temperature was 200
Test materials 1 to 4 in the range of 745745 ° C. do not exceed 100 μm in the surface layer and the central part of the crystal grains,
No pattern was observed on any surface in the polishing test.
【0044】これに対して試験材5は、圧延終止温度が7
80℃であるため、冷却過程で結晶粒の成長が生じる結
果、100μmを超える結晶粒が中心部において発生し、
研磨性も不良となっている。On the other hand, the test material 5 has a rolling end temperature of 7
Since the temperature is 80 ° C., as a result of the growth of crystal grains during the cooling process, crystal grains exceeding 100 μm are generated at the center,
Polishability is also poor.
【0045】さらに試験材6は圧延の終止温度が150℃で
あるため表層部で粗大な結晶粒が観察され、研磨性も不
良であった。これは圧延時に蓄積された歪エネルギーが
焼鈍処理の際に解放され、特定方位を持つ結晶粒が優先
的に成長するため、伸張粒となるためである。 (実施例2)ここでは圧延後の冷却速度の影響を調査し
た。Further, since the end temperature of rolling of the test material 6 was 150 ° C., coarse crystal grains were observed in the surface layer portion, and the polishing property was poor. This is because the strain energy accumulated at the time of rolling is released during the annealing treatment, and the crystal grains having a specific orientation grow preferentially, so that they become elongated grains. (Example 2) Here, the influence of the cooling rate after rolling was investigated.
【0046】素材の製造は、熱間圧延の段階までは実施
例1と同じであるが、最終圧延厚さを15mmとし、圧延後
に氷水中に焼き入れした。焼き入れ前の材料の表面温度
は、650℃であった。The production of the raw material was the same as in Example 1 up to the hot rolling stage, except that the final rolling thickness was 15 mm, and after rolling, it was quenched in ice water. The surface temperature of the material before quenching was 650 ° C.
【0047】得られた材料から直径10mm、長さ12mmの試
験材を採取した。試験片の採取方向は、長手方向が素材
の肉厚方向と平行になるように採取した。この試験材を
高周波加熱によって650℃に5分間加熱した後、表3に
示す種々の冷却速度で室温まで冷却し、さらに650℃で3
0分間熱処理した。試験片中心部に熱電対を埋め込み、
これにより冷却速度を制御した。表3中の冷却速度は65
0℃から室温までの冷却速度である。A test material having a diameter of 10 mm and a length of 12 mm was sampled from the obtained material. The test piece was sampled so that the longitudinal direction was parallel to the thickness direction of the material. After heating the test material to 650 ° C. for 5 minutes by high frequency heating, it was cooled to room temperature at various cooling rates shown in Table 3, and further heated at 650 ° C. for 3 minutes.
Heat treated for 0 minutes. Embed a thermocouple in the center of the test piece,
This controlled the cooling rate. The cooling rate in Table 3 is 65
The cooling rate from 0 ° C to room temperature.
【0048】[0048]
【表3】 [Table 3]
【0049】熱処理後の試験材について長さ方向の中央
部(圧延素材肉厚中心部)のミクロ組織を圧延縦断面に
ついて調査した。再現性を調査するために同一の冷却速
度の条件において3個の試験片を調査した。この調査に
おいて一つでも結晶粒径が100μmを超えるものが観察
されたものについて、表3の評価欄を×とした。With respect to the test material after the heat treatment, the microstructure at the center in the length direction (the center of the thickness of the rolled material) was examined for the rolled longitudinal section. In order to investigate reproducibility, three test pieces were examined under the same cooling rate conditions. In this investigation, the evaluation column of Table 3 was evaluated as x when at least one crystal grain size exceeding 100 μm was observed.
【0050】表3の結果から明らかなように、冷却速度
を10〜25℃/minとした試験材の7〜9は、結晶粒の大きさ
が100μmを超えるものは観察されなかった。これに対
して冷却速度が10℃/minよりも遅い試験材10および11
は結晶粒径が100μmを超えるものが観察された。 (実施例3)ここでは、焼鈍における熱処理条件の影響
を調査した。As is evident from the results shown in Table 3, in the test materials 7 to 9 in which the cooling rate was 10 to 25 ° C./min, those having a crystal grain size exceeding 100 μm were not observed. On the other hand, test materials 10 and 11 whose cooling rate was slower than 10 ° C./min
As for, those having a crystal grain size exceeding 100 μm were observed. Example 3 Here, the influence of heat treatment conditions on annealing was investigated.
【0051】試験材の製造は、実施例1と同じであり、
厚さ10mmの圧延材を製造した。素材の圧延条件は、表2
に示す試験番号2(圧延終止温度が650℃、圧延後の冷却
速度15℃/min)と同じである。この圧延材に表4に示す
条件で熱処理(焼鈍処理)を施し、研磨性とミクロ組織
を調査した。比較として、厚さ10mmの圧延材を機械加工
(切削加工)によって片面切削で8mmとしたものを用意
した。ミクロ組織と研磨性の調査方法は、実施例1の方
法と同じである。The production of the test material is the same as in Example 1,
A rolled material having a thickness of 10 mm was manufactured. Table 2 shows the rolling conditions for the material.
Test No. 2 (rolling end temperature is 650 ° C., cooling rate after rolling is 15 ° C./min). This rolled material was subjected to a heat treatment (annealing treatment) under the conditions shown in Table 4, and the abrasiveness and microstructure were investigated. As a comparison, a rolled material having a thickness of 10 mm was prepared by machining (cutting) to a thickness of 8 mm by one-side cutting. The method for investigating the microstructure and the polishing property is the same as the method of Example 1.
【0052】[0052]
【表4】 [Table 4]
【0053】この調査において結晶粒径が100μmを超
えるものが観察された場合および研磨性が悪いものにつ
いては表4の評価欄をそれぞれ×とした。評価基準は、
実施例1と同じである。In this investigation, when a crystal grain size exceeding 100 μm was observed and when the polishing property was poor, the evaluation column of Table 4 was evaluated as x. Evaluation criteria are
This is the same as the first embodiment.
【0054】表4の結果から、本発明の条件で熱処理さ
れた板材(番号12〜19)は、100μm以上の結晶粒が認
められず、研磨性も良好であった。From the results shown in Table 4, the plate materials (Nos. 12 to 19) heat-treated under the conditions of the present invention did not show crystal grains of 100 μm or more, and had good polishing properties.
【0055】これに対して、番号20の板材は、焼鈍温度
が500℃と低いため、100μm以上の結晶粒が認められ、
研磨性も悪い。On the other hand, in the sheet material of No. 20, since the annealing temperature was as low as 500 ° C., crystal grains of 100 μm or more were recognized.
Poor polishability.
【0056】番号21の板材は、焼鈍温度が800℃と高い
ため、板材の表層部に100μm以上の結晶粒が認めら
れ、研磨性も悪い。Since the plate No. 21 has a high annealing temperature of 800 ° C., crystal grains of 100 μm or more are recognized in the surface layer portion of the plate, and the abrasion is poor.
【0057】番号22の板材は、焼鈍時の保持時間Tが10
分であり、保持時間Tと板厚tとの比T/tが1.0とな
り、肉厚中心部では熱間加工組織が残存するため、研磨
性も悪い。The plate material of No. 22 has a holding time T of 10 during annealing.
And the ratio T / t between the holding time T and the plate thickness t is 1.0, and the hot work structure remains in the center of the thickness, so that the polishing property is poor.
【0058】番号23の板材は、焼鈍時の保持時間Tが200
分であり、保持時間Tと板厚tとの比T/tが20.0となる
ため、板材の表層部に100μm以上の結晶粒が認めら
れ、研磨性も悪い。The plate No. 23 has a holding time T of 200 during annealing.
And the ratio T / t between the holding time T and the plate thickness t is 20.0, so that crystal grains of 100 μm or more are recognized in the surface layer of the plate material, and the polishing property is poor.
【0059】番号24の板材は、焼鈍時の保持時間Tが8分
であり、保持時間Tと板厚tとの比T/tが1.0となり、
肉厚中心部では熱間加工組織が残存するため、研磨性も
悪い。For the sheet No. 24, the holding time T during annealing is 8 minutes, and the ratio T / t of the holding time T to the sheet thickness t is 1.0,
Since the hot-worked structure remains in the center of the thickness, the polishing property is poor.
【0060】番号25の板材は、焼鈍時の保持時間Tが150
分であり、保持時間Tと板厚tとの比T/tが18.8となる
ため、板材の表層部に100μm以上の結晶粒が認めら
れ、研磨性も悪い。 (実施例4)ここでは、酸素量の影響を調査した。The plate No. 25 has a holding time T of 150 during annealing.
And the ratio T / t of the holding time T to the plate thickness t is 18.8, so that crystal grains of 100 μm or more are recognized in the surface layer portion of the plate material, and the polishing property is poor. (Example 4) Here, the influence of the amount of oxygen was investigated.
【0061】純チタン材に表5に示す酸素含有量となる
ようにVAR溶解法によって10kg鋳塊(直径150mm、長さ15
0mm)を溶製した。この鋳塊を950℃に加熱した後、幅10
0mm、厚さ50mmの角材に鍛造した。その後、850℃に加熱
して、厚さ10mmまで圧延した。圧延時の終止温度は650
℃とした。圧延後、600℃で30分保持する熱処理を行っ
た。A 10 kg ingot (150 mm in diameter, 15 mm in length) was prepared by the VAR melting method so that the pure titanium material had the oxygen content shown in Table 5.
0mm). After heating this ingot to 950 ° C, width 10
It was forged into a square bar having a thickness of 0 mm and a thickness of 50 mm. Then, it was heated to 850 ° C. and rolled to a thickness of 10 mm. End temperature during rolling is 650
° C. After rolling, heat treatment was performed at 600 ° C. for 30 minutes.
【0062】[0062]
【表5】 [Table 5]
【0063】熱処理後の素材から一辺が100mmの試験材
を採取し、研磨性を調査した。調査方法は実施例1と同
じである。この中で研磨性が不良と判断された材料につ
いては表5の評価を×とした。また、試験材の硬度をビ
ッカース硬度計を用いて、荷重1kg(試験力9.8N)で10
カ所を測定した。A test material having a side of 100 mm was sampled from the material after the heat treatment, and the polishing property was examined. The investigation method is the same as in the first embodiment. Among these, the evaluation of Table 5 was evaluated as x for the materials judged to have poor polishing properties. The hardness of the test material was measured using a Vickers hardness tester at a load of 1 kg (test force 9.8 N).
Measurements were made at various locations.
【0064】発明例の試験番号26〜29は、ビッカース硬
さが131〜195の範囲にあり、研磨したときの表面性状お
よび曲げ加工性は良好である。これに対し、比較例の試
験番号30の試験材は、酸素含有量が0.012質量%と低い
ため、研磨したときの表面性状が悪い。また、試験番号
31の試験材は、酸素含有量が0.135質量%と高いため、
ビッカース硬さが210となって曲げ加工性が悪い。In Test Nos. 26 to 29 of the invention examples, the Vickers hardness is in the range of 131 to 195, and the surface properties and bending workability when polished are good. On the other hand, the test material of Test No. 30 of the comparative example had a low oxygen content of 0.012% by mass, and thus had poor surface properties when polished. Also, the test number
The 31 test materials had a high oxygen content of 0.135% by mass.
Vickers hardness is 210 and bending workability is poor.
【0065】[0065]
【発明の効果】本発明のチタン材は、酸素含有量と結晶
粒の大きさを調整したので、研磨性に優れ、平滑な表面
が得られる。これを電解析出ドラムの表面部材に用いれ
ば、平滑な表面を持つ電解金属箔の製造が可能となる。
このチタン熱延板は、圧延終止温度、圧延後の冷却速度
および冷却後の熱処理条件を規定することによって安価
に製造することができる。According to the titanium material of the present invention, the oxygen content and the size of crystal grains are adjusted, so that the polishing material is excellent in abrasiveness and a smooth surface can be obtained. If this is used for the surface member of the electrolytic deposition drum, it becomes possible to produce an electrolytic metal foil having a smooth surface.
The hot rolled titanium sheet can be manufactured at low cost by defining the rolling end temperature, the cooling rate after rolling, and the heat treatment conditions after cooling.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) C22F 1/00 683 C22F 1/00 683 691 691B 691C 692 692A 694 694B ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (reference) C22F 1/00 683 C22F 1/00 683 691 691B 691C 692 692A 694 694B
Claims (2)
を含有するチタン板であって、肉厚の全断面において10
0μmを超える結晶粒が存在しないことを特徴とする電
解析出ドラムの表面部材用熱延チタン板。1. A titanium plate containing oxygen in an amount of not less than 0.015% by mass and not more than 0.12% by mass.
A hot-rolled titanium sheet for a surface member of an electrolytic deposition drum, characterized in that no crystal grains exceeding 0 μm are present.
を含有するチタン材を熱間での圧延における終止温度を
200℃以上、750℃以下として圧延し、板材中心を10℃/
min以上の冷却速度で冷却した後、550℃以上、700℃以
下の温度範囲に、下式の範囲で保持することからなる熱
処理を施すことを特徴とするチタン熱延板の製造方法。 1.2≦T/t≦15 ここで、tはチタン材の板厚(mm)、Tは保持時間(mi
n)である。2. The end temperature in hot rolling of a titanium material containing oxygen in an amount of 0.015% by mass or more and 0.12% by mass or less.
Roll at 200 ° C or higher and 750 ° C or lower.
A method for producing a hot-rolled titanium sheet, comprising: cooling at a cooling rate of not less than min and maintaining a temperature in a range of not less than 550 ° C. and not more than 700 ° C. according to the following formula. 1.2 ≦ T / t ≦ 15 where t is the thickness of the titanium material (mm) and T is the holding time (mi)
n).
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|---|---|---|---|
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013001961A (en) * | 2011-06-16 | 2013-01-07 | Nippon Steel & Sumitomo Metal Corp | α-TYPE TITANIUM MEMBER |
| CN116356233A (en) * | 2023-04-11 | 2023-06-30 | 重庆大学 | A method of improving the hydrogen embrittlement resistance of zirconium alloys by using deformation twins |
-
2000
- 2000-06-29 JP JP2000195912A patent/JP3951564B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013001961A (en) * | 2011-06-16 | 2013-01-07 | Nippon Steel & Sumitomo Metal Corp | α-TYPE TITANIUM MEMBER |
| CN116356233A (en) * | 2023-04-11 | 2023-06-30 | 重庆大学 | A method of improving the hydrogen embrittlement resistance of zirconium alloys by using deformation twins |
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