JP2002006930A - Manufacturing history tracking system - Google Patents

Abstract

(57) [Summary] [Problem] It is necessary to track under what kind of manufacturing conditions a product has been manufactured in each process, but the progress status of the product and the conditions and timing of process changes and equipment maintenance are required. Such tracking is difficult because they are not synchronized. The present invention includes means for collecting collected inspection results and progress management information and operation results of manufacturing equipment, and means for superimposing manufacturing condition results, and an output means for displaying the result information on the same output device. Prepare system.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing history for specifying a process and an apparatus causing a defect in a thin film manufacturing process such as a magnetic head manufacturing process for a disk drive, and for performing a setup operation and changing manufacturing conditions. It is about tracking technology.

[0002]

2. Description of the Related Art In a manufacturing line that requires processing in a number of processes using a plurality of facilities, such as manufacturing a magnetic head for a disk drive, work results for each process are collected and the progress of a product is performed. We have built a progress management system that manages / understands the results, and an inspection result management system that manages / evaluates product workmanship and evaluation inspection results.

The factory uses these systems to manage the distribution and inspection of products in the factory.

For example, in the manufacture of a magnetic head for a disk drive or the manufacture of a semiconductor, a product progress graph is prepared by plotting the progress of a product on the vertical axis with the process from product introduction to withdrawal on the vertical axis and the start date on the horizontal axis. Manages / understands the progress status of

Further, in these lines, in order to improve the process stability and the yield, the factors which hinder these processes are specified, and some management systems and methods for realizing the factors have been developed. .

For example, Japanese Patent Application Laid-Open No. 05-160239 and Japanese Patent Application Laid-Open No. 10-326816 are cited as those for a semiconductor manufacturing process.

In Japanese Patent Application Laid-Open No. 05-160239, the same defective products are selected from the inspection results of the products, a progress graph showing the relationship between the start dates of the respective processes of these products is created, and the intersection points and the difference in progress of the graphs are produced. , A process which causes a defect of a desired product is specified.

In Japanese Patent Application Laid-Open No. Hei 10-326816, a process which causes a defect is specified by using image information obtained by performing an arithmetic process on operation result information of each process of a product and a result of workmanship inspection of the product. .

[0009]

However, in the above prior art, even if it is determined that the process is a cause of failure, it may not be possible to specify whether the process is caused by a process or equipment. Even if it can be specified, since it is not possible to estimate which part of the equipment is defective, it takes a lot of time to improve the equipment and take measures against defects.

[0010] In addition, the inspection results are superimposed for each product position in an arbitrary product unit, and the relative frequency of each position is displayed for each of good / bad classifications to extract a factor inhibiting yield.
For products where the process of each step changes frequently,
It can be said that it is not easy to identify the equipment that hinders the process stability and the improvement of the yield even if the classification is simply made into good / defective only by inspecting the quality of the manufactured product.

In such a product, it is necessary to track under what manufacturing conditions the product has been manufactured in each process in order to identify the factors that hinder process stability and yield improvement. Such tracking is difficult with technology.

Furthermore, in these prior arts, the progress of the product is not synchronized with the process change and equipment maintenance conditions and the timing thereof. Therefore, the progress of the target product is hindered by the timing of the process change, and unnecessary progress is prevented. Process changes and equipment maintenance have been performed, causing defects.

[0013]

In order to solve the above-mentioned problems, the present invention has a means for collecting collected inspection results and progress management information and operation results of manufacturing equipment, and a means for superimposing manufacturing condition results. And output means for displaying the result information on the same output device.

That is, a manufacturing history tracking system for tracking a manufacturing / inspection history of a product, an inspection result collecting means for collecting inspection results for evaluating the quality of the product and characteristics of the product, and an operation of a manufacturing line. Progress management means for collecting results, manufacturing condition management means for collecting product manufacturing condition results, operation result management means for collecting operation results of manufacturing equipment, and cause estimating means for performing calculations for estimating the cause of failure And an output unit for displaying information from the management unit on the same output device, and extracting a step causing a defect in the manufacturing process. With the above configuration, the system according to the present invention can display work results, production condition results, and equipment operation results on the same output screen, and from now on, the cause of a product defect can be quickly, easily, and reliably identified. It becomes possible.

Further, the provision of the means for calculating the predicted value of the progress of the product makes it possible to instruct the operator to start the setup work of the manufacturing equipment and to change the manufacturing conditions, thereby making the setting of the manufacturing conditions inconsistent or inconsistent. As a result, the production of defective products can be prevented beforehand, which is effective in supporting the production process design.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment of the present invention will be described.

FIG. 1 is a configuration diagram of a manufacturing history tracking system according to an embodiment of the present invention.

In FIG. 1, reference numeral 11 denotes inspection result collecting means for collecting inspection results for evaluating the quality of the product and characteristics of the product, 12 denotes progress management means for collecting the operation results of the production line, and Manufacturing condition management means for collecting manufacturing condition results, operation result management means for collecting operation results of manufacturing equipment, cause estimation means for performing an operation for estimating the cause of failure, and output means for output. , All management means are organically connected via a network 17.

The inspection result collecting means collects inspection results such as the content of failure, the defect occurrence rate, and the yield from each inspection facility or input terminal.

The progress managing means collects a product number (lot number), a process name (process number), and a facility name (facility number) from each manufacturing facility, inspection facility or input terminal.

The manufacturing condition management means collects the manufacturing condition name (manufacturing condition number) and the equipment name (equipment number) from each manufacturing facility or input terminal.

The operation record management means collects record information such as start information, failure, and maintenance of the product from each inspection facility or input terminal.

The cause estimating means obtains information from each managing means and investigates the cause of the defect.

The output means obtains information from each management means,
The information is output so that the cause can be estimated.

The operation of the manufacturing history tracking system configured as described above will be described below with reference to FIG.

First, inspection result information such as a defect occurrence rate and a lot number is taken into the defect cause estimating means 15 from the inspection result collecting means 11 (step 21).

Further, progress management information such as a lot number, a process name or a process number, and a facility number is fetched from the progress management information means 12 into the defect cause estimating means 15 (step 2).
2).

Then, a lot having a high defect occurrence rate is selected (step 23).

Next, the lot number of the selected lot is compared with the progress management information means (step 24) to obtain the progress management information. Further, the equipment number is collated with the operation result information means to obtain operation result information (step 25). Further, the lot number is checked against the manufacturing condition information means to obtain the manufacturing condition information (step 26). By extracting lots whose operation results match under the same manufacturing conditions based on the acquired information, it is possible to extract the process, manufacturing conditions, and equipment that cause the defect (step 27).

In this case, each extracted data is managed in a defect cause extraction table as shown in FIG. In this table, the process name 32, the manufacturing condition 33, the manufacturing equipment 34, and the operation status 35 are extracted for a predetermined period 36 using the lot number 31 as a key.

In this example, lot 1001 and lot 10
10 processes the same process A under the same manufacturing conditions and the same equipment, and the operating status of the manufacturing equipment is also the same. Therefore,
From this, it can be inferred that, in the manufacturing equipment A that processes the process A, a defect occurs after the occurrence of a failure and under the manufacturing conditions of “sputtering time of one hour”.

Next, a description will be given of a function implemented as a manufacturing process design support.

The lot number of the selected lot is compared with the progress management information means to obtain the progress management information. Next, the equipment number is collated with the operation result information means to obtain operation result information.

Further, the lot number is collated with the manufacturing condition information means to obtain the manufacturing condition information.

The progress graph is output to the output means based on each information taken.

FIG. 4 shows a progress graph output to the output means.

In the progress graph 41, the process numbers are plotted on the horizontal axis on the vertical axis, and the horizontal axis represents the progress of each lot. The vertical axis represents the manufacturing conditions 42 of each lot, and the horizontal axis represents the operation results of each facility. 43 is added.

From this graph, the operation status of the staff can be inferred from the processing time and the set number of times of the manufacturing conditions 42 and the operation results 43. For example, progress graph 44 of lot 1
Is selected, the arrow line 45 and the manufacturing conditions 42 of the lot 1 are displayed. If the production conditions are not displayed before the arrow 45, it means that the setting of the production conditions 42 is delayed due to the progress of the lot, and that the work required for the staff production is delayed. Conversely, if the progress of the lot and the update of the manufacturing conditions are synchronized, this means that the work of the staff is being performed based on the progress of the lot.

On the other hand, since the progress of the lot can be grasped, it is possible to display the predicted progress value by accumulating the preset manufacturing time of the product and adding it to the current progress actual value. Thereby, the progress of the lot can be predicted. Further, by selecting the progress graph of the lot, the manufacturing conditions 32 of the lot can be displayed on the vertical axis and the equipment setup instruction 33 can be displayed on the horizontal axis. By using this graph, it is possible to instruct the site to change the manufacturing conditions and to start the setup work of the manufacturing equipment.

Further, from the progress graph, it is possible to provide the business status at the manufacturing site to the staff who sets the manufacturing conditions and sets up the setup work of the manufacturing equipment.

For example, the state of the manufacturing site can be estimated by the following method (FIG. 5). That is, when the staff selects the progress graph 52 of the target lot, the planned progress graph 51 of the lot is displayed at the same time. If it takes longer than the production time set by the staff,
For example, it can be presumed that the processing time of the process has been prolonged due to the occurrence of a process trouble or equipment trouble. When the process is selected on this graph, the arrow lines 55 and 56 are displayed on the manufacturing conditions 53 and the operation results 54 of each facility at that time, and it is possible to easily match them. This makes it possible to determine what kind of processing by the staff is affecting the manufacturing site. For example, lot 1
Has passed through the process immediately before the maintenance of the equipment 1, and it can be inferred from this that the manufacturing state of the equipment was unstable.

[0042]

As described above, according to the present invention, the cause of a product failure can be quickly, easily, and reliably specified from the operation results, production condition results, and equipment operation results.
Furthermore, it is possible to prevent the production of defective products due to defects and inconsistencies in the setting of production conditions, which can be useful for designing the production process.

[Brief description of the drawings]

FIG. 1 is a system diagram showing a configuration of one embodiment of the present invention.

FIG. 2 is a flowchart showing a method for extracting the same production conditions and the same operation result lot.

FIG. 3 is a diagram used for extracting a failure factor, which is one embodiment of the present invention.

FIG. 4 is a diagram of a progress graph used for estimating a work state of a staff according to an embodiment of the present invention.

FIG. 5 is a diagram of a progress graph used for estimating a business state of a manufacturing site, which is one embodiment of the present invention.

[Explanation of symbols]

11 ... Information collection terminal for inspection result management means, 12
... Information collecting terminal for progress management means 13 Information collecting terminal for operation result managing means 14 Information collecting terminal for manufacturing condition managing means 15 Information for failure cause estimating means Collection terminal, 16 output device, 17 network, 31 lot number field, 32 process name field, 33 manufacturing condition field, 34 manufacturing equipment field, 35 operating status field, 41 progress chart, 42: list of production conditions, 43: list of operation results of equipment, 44: graph showing progress of an arbitrary lot, 45: arrow line for associating lots with production conditions, 51
... lot progress schedule graph, 52 ... lot progress result graph, 53 ... production condition list, 54 ... equipment operation result list, 5
5 Arrow line linking the lot with the list of equipment operation results 5
6 Arrow line linking the lot with the manufacturing conditions.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Naofumi Seki 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Prefecture F-term in Hitachi, Ltd. Production Technology Research Laboratories F-term (reference) 4M106 AA20 BA20 DH01 DH60 DJ20 DJ23 DJ38 5B049 AA06 BB07 EE56 EE59 FF03 GG04 GG07 GG09

Claims (5)

[Claims] 1. A manufacturing history tracking system for tracking the manufacturing / inspection history of a product, comprising: an inspection result collecting means for collecting inspection results for evaluating the performance of the product and characteristics of the product; Progress management means to collect work results, manufacturing condition management means to collect product manufacturing condition results, operation result management means to collect operation results of manufacturing equipment, and causes for performing calculations for estimating the cause of failure A manufacturing history tracking system, comprising: an estimating unit and an output unit for displaying information from the managing unit on the same output device, and extracting a step causing a defect in the manufacturing process. 2. A manufacturing history tracking system for tracking the manufacturing / inspection history of a product, comprising: a progress management means for collecting the performance of the manufacturing line; a manufacturing condition management means for collecting the performance of the product; Operation management means for collecting the operation results of the equipment, means for calculating the predicted value of product progress, and output means for displaying the information from these management means on the same output device. Manufacturing history tracking system characterized by supporting manufacturing process design by giving instructions. 3. A manufacturing history tracking system for tracking the manufacturing / inspection history of a product, comprising: a progress management means for collecting the actual performance of the manufacturing line; a manufacturing condition management means and a manufacturing facility for collecting the actual manufacturing conditions of the product. Operation results management means for collecting the operation results of the products, means for calculating the predicted value of product progress, and output means for displaying information from these management means on the same output device, and instructing to change manufacturing conditions. A manufacturing history tracking system characterized by support for manufacturing process design. 4. A manufacturing history tracking system for tracking the manufacturing / inspection history of a product, comprising: a progress management means for collecting performance results of a manufacturing line; a manufacturing condition management means for collecting performance results of a product; and a manufacturing facility. Operation result management means for collecting the operation results of the apparatus, means for calculating the predicted value of product progress, and output means for displaying the information from these management means on the same output device, A manufacturing history tracking system characterized by supporting manufacturing process design by changing the predicted value of product progress from setup work information of manufacturing equipment. 5. A product manufacturing method using the system described above to realize a manufacturing process design by synchronizing work on site and work by staff.