JP2002001963A - Method of manufacturing orifice plate for inkjet printer head - Google Patents

Abstract

(57) [Object] To stably stabilize the meniscus of ink near a nozzle and to properly control the ink discharge speed and the discharge volume of an ink jet printer head. SOLUTION: A nozzle 7 penetrating the base material 10 and the fluorine-containing polyimide film 9 is formed on a base material 10 on which a fluorine-containing polyimide film 9 is formed. This allows
Since the fluorine-containing polyimide film 9 is not formed on the inner surface of the nozzle 7, the film-forming state of the fluorine-containing polyimide film 9 in each nozzle 7 is made equal to stabilize the meniscus of the ink near the nozzle 7. be able to.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for manufacturing an orifice plate of an ink jet printer head.

[0002]

2. Description of the Related Art Conventionally, an ink jet printer head having a plurality of pressure chambers and a nozzle communicating with each pressure chamber and the outside is provided, and by causing a volume change in a pressure chamber filled with ink, an ink droplet is ejected from the nozzle. There is an ink jet printer that discharges ink.

In such an ink jet printer head, ink droplets ejected from the nozzles may wrap around the nozzles depending on the affinity between the ink and members around the nozzles, but the ink droplets wrap around the nozzles. This causes problems such as the loss of straightness of ink droplets and the inability to perform good printing, and the inconvenience of ink wrapping around the nozzles adhering to the nozzles and causing stains around the nozzles. May occur.

As a countermeasure, Japanese Unexamined Patent Publication No. Hei 7-25015 discloses that, as shown in FIG. 5, a surface of an orifice plate 101 (see FIG. 6A) on which a nozzle 100 is formed is provided.
An inkjet printer head is disclosed in which a fluorine-containing polyimide resin having ink repellency is formed by vapor deposition polymerization (see FIG. 6B). According to the technology disclosed in the publication, the periphery of the nozzle 100 is covered with the fluorine-containing polyimide film 102 having ink repellency.
It is possible to prevent the wraparound of zero. Further, according to the technology disclosed in the publication, a fluorine-containing polyimide film capable of maintaining stable ink repellency over a long period of time by applying a vapor deposition polymerization method having good adhesion after film formation. 102 can be formed.

[0005]

SUMMARY OF THE INVENTION Incidentally, Japanese Patent Application Laid-Open No.
In the technique disclosed in Japanese Patent No. 25015, the nozzle 100
A fluorine-containing polyimide film 102 is formed on the orifice plate 1 on which is formed by using a vapor deposition polymerization method excellent in film coverage. Therefore, as shown in FIG. 6B, the fluorine-containing polyimide film 10
2 is deposited. By forming a fluorine-containing polyimide film 102 on the inner surface of the nozzle 100, the nozzle 1
In 00, a repulsive force acts between the ink and the inner surface of the nozzle 100. The ink liquid level at the nozzle 100 (hereinafter referred to as meniscus) is determined by the repulsive force.

On the other hand, since it is difficult to control the state of film formation of the fluorine-containing polyimide film 102 formed on the inner surface of the nozzle 100, the technique disclosed in Japanese Patent Laid-Open No. Are different in the film formation state of the fluorine-containing polyimide film. As a result, the meniscus varies for each nozzle 100.

Generally, in an ink jet printer head having a plurality of pressure chambers, the position of the ink surface at the nozzle affects the ink discharge speed and the discharge volume. For this reason, according to the technique disclosed in Japanese Patent Application Laid-Open No. 7-25015, it is difficult to control the ink ejection speed and the ejection volume of the ink jet printer head in a satisfactory manner because the meniscus varies for each nozzle 100.

An object of the present invention is to provide a method for manufacturing an orifice plate of an ink jet printer head which can stabilize the meniscus of ink near a nozzle.

The present invention stabilizes the meniscus of the ink near the nozzles by equalizing the film-forming state of the fluorine-containing polyimide film for each nozzle, thereby making it possible to stabilize the ink discharge speed and the discharge volume of the ink jet printer head. It is an object of the present invention to obtain a method for manufacturing an orifice plate of an ink jet printer head, which can control satisfactorily.

[0010]

According to a first aspect of the present invention, there is provided a method of manufacturing an orifice plate for an ink jet printer head, comprising: a film forming step of forming a fluorine-containing polyimide film on a surface of a substrate; A nozzle processing step of irradiating the base material on which the fluorine-containing polyimide film is formed with a laser beam to form a nozzle penetrating the base material and the fluorine-containing polyimide film.

Therefore, the substrate of the orifice plate on which the fluorine-containing polyimide film is formed on the surface in the film forming step is irradiated with laser light in the nozzle processing step to penetrate the base material and the fluorine-containing polyimide film. A nozzle is formed. Accordingly, the fluorine-containing polyimide film formed on the surface of the base material is processed so as to penetrate with the base material by the laser beam, so that the fluorine-containing polyimide film is not formed on the inner surface of the nozzle.

According to a second aspect of the present invention, in the method of manufacturing an orifice plate for an ink jet printer head according to the first aspect, the nozzle processing step forms a nozzle by irradiating an excimer laser beam.

Therefore, in the nozzle processing step, a nozzle is formed by irradiating an excimer laser beam having low permeability to the fluorine-containing polyimide film. Thereby, for example, it is possible to suppress the occurrence of burrs and the like on the nozzle end face, and to improve the processability of the fluorine-containing polyimide film having good film forming properties.

According to a third aspect of the present invention, in the method for manufacturing an orifice plate for an ink jet printer head according to the second aspect, the base material is formed of polyimide.

Therefore, in the nozzle processing step, a nozzle is formed by irradiating an excimer laser beam having low permeability to the fluorine-containing polyimide film and polyimide. This makes it possible to satisfactorily process both the substrate formed of polyimide and the fluorine-containing polyimide film formed on the surface of the substrate during nozzle processing.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIGS.

<Inkjet Printer> First, an inkjet printer will be described with reference to FIGS. FIG. 1 is a perspective view showing a part of an ink jet printer head according to an embodiment of the present invention, and FIG. 2 is a horizontal sectional view of the ink jet printer head. On a substrate 2 of an ink-jet printer head 1 provided in the ink-jet printer, a plurality of rectangular columns 3 composed of a multi-layer laminated piezoelectric member in which a plurality of piezoelectric members are laminated are arranged at predetermined intervals. As a result, between the columns 3, the front opening 4 opening on the front side (lower side of the paper in FIG. 2) to the rear end opening 5 opening on the rear end (upper side of the paper in FIG. 2). A groove 6 penetrating through is formed.

In the groove 6, the front opening 4 is closed by an orifice plate 8 in which a plurality of nozzles 7 corresponding to each groove 6 are formed. Here, FIG. 3 is a perspective view showing a part of the orifice plate. The orifice plate 8 is formed with a polyimide film 10 as a base material having one end face covered with a fluorine-containing polyimide film 9, and a plurality of nozzles 7 penetrating the polyimide film 10 and the fluorine-containing polyimide film 9. The nozzle 7 is formed in a tapered shape in which the groove 6 is wider than the outside when the front opening 4 is closed by the orifice plate 8 (see FIG. 5C).

In the middle of the groove 6, a closing member 11 is provided so as to divide the groove 6 into a front surface side and a rear end side. As a result, a concave portion 12 whose upper surface is opened is formed by the column 3, the orifice plate 8, and the closing member 11.

The open portion on the upper surface of the recess 12 is
Is blocked by Thereby, the recess 1 is formed by the orifice plate 8, the closing member 11 and the lid member 13.
2 is closed to form a plurality of pressure chambers 14.
In the lid member 13, an ink supply path 15 communicating with each pressure chamber 14 is formed. An ink supply pipe 16 that communicates with an ink tank (not shown) is connected to the ink supply path 15. Thus, the pressure chamber 14 has a structure in which ink is supplied from the ink tank via the ink supply pipe 16 and the ink supply path 15.

Electrodes 17 are formed on both side surfaces of the column 3 (left and right surfaces of the column 3 in FIG. 2). The electrode 17 is connected to a flexible cable connected to a power supply and a control unit (not shown) for applying a voltage to each column 3.

Incidentally, it is generally difficult to form the groove 6 in the multilayer laminated piezoelectric member by grinding or the like. In the ink jet printer of the present embodiment, the grooves 6 are formed by arranging, on the substrate 2 at predetermined intervals, multilayer laminated piezoelectric members formed in a strip shape in advance.
Accordingly, even when the multilayer laminated piezoelectric member is used as the column 3, the groove 6 can be easily formed.

In such a configuration, in the ink jet printer, the pressure chamber 14 is filled with ink,
The control section applies a voltage to the electrodes 17 of the columns 3 located on both sides of the pressure chamber 14 for discharging ink. As a result, the pair of columns 3 corresponding to the electrode 17 to which the voltage has been applied is deformed so that the volume in the pressure chamber 14 is increased, and then the volume in the pressure chamber 14 is contracted again to reduce the pressure. The ink in the chamber 14 is pressurized, and a part of the ink in the pressure chamber 14 is ejected from the nozzle 7 as an ink droplet.

Incidentally, in order to obtain good printing results in an ink jet printer using the ink jet printer head 1 having a plurality of pressure chambers 14,
It is required that the ejection speed and ejection volume of ink droplets ejected from each pressure chamber 14 of the inkjet printer head 1 be uniform.

<Orifice Plate> Next, with reference to FIGS. 4 and 5, a process of manufacturing the orifice plate 8 will be described. In manufacturing the orifice plate 8, first, a film forming step of forming a fluorine-containing polyimide film 9 on the polyimide film 10 is performed, and then, a nozzle processing step of forming the nozzle 7 by irradiating an excimer laser beam is performed.

The fluorine-containing polyimide film 9 of the present embodiment
Is formed by a vapor deposition polymerization method. Here, the vapor deposition polymerization method is a method in which a plurality of types of activated monomers that are evaporated by thermal energy and adhered to a target substrate surface, and a polymerization reaction occurs on the substrate surface to form a polymer film. This is a polymerization method for forming a film.

In this embodiment, a fluorine-containing polyimide film 9 is formed on the surface of the polyimide film 10 by using the vapor deposition polymerization apparatus shown in FIG. The vapor deposition polymerization apparatus 18 includes a chamber 20 in which a stage 19 for holding a sample (the polyimide film 10 in the present embodiment) to be formed by vapor deposition polymerization is provided. The stage 19 is provided with a sample temperature adjusting mechanism (not shown) for adjusting the temperature of the sample. Chamber 2
Inside 0, an indoor temperature control mechanism (not shown) for controlling the temperature inside the chamber 20 is provided.

Although not shown, the chamber 20
Is provided with a pressure reducing mechanism for reducing the pressure in the chamber 20. The decompression mechanism forcibly forces air in the chamber 20 by a fan or the like, for example.
A mechanism for discarding outside 0 may be used.

A mixing tank 21 is provided above the chamber 20. The chamber 20 and the mixing vessel 21 are communicated via a shower plate 22 having a plurality of holes.

Further, the vapor deposition polymerization apparatus 18 is provided with a plurality of evaporation tanks 23 for holding raw material monomers to be adhered to the substrate. In the present embodiment, 2,2-bis (3,4-phenylcarboxyl) hexafluoropropane and diaminodiphenyl ether are held in the evaporation tank 23, respectively. Although not particularly shown, each evaporating tank 23 is provided with a heating mechanism for heating the raw material monomer. Further, each evaporating tank 23 is provided with a monomer introduction pipe 24 for communicating each evaporating tank 23 and the mixing tank 21 respectively. Each monomer introduction tube 24 is provided with a valve 25 for opening and closing the monomer introduction tube 24. The monomer introduction tube 24 is closed by a valve 25 except when performing vapor deposition polymerization.

Next, the manufacturing process of the orifice plate 8 will be described. First, the polyimide film 10 is mounted on the stage 19 with the surface on which the fluorine-containing polyimide film 9 is to be formed facing upward. In the present embodiment, the lower surface of the polyimide film 10 is in close contact with the stage 19. Thereby, the fluorine-containing polyimide film 9 can be formed on one end surface side of the polyimide film 10 without special masking or the like.

Next, the raw material monomers held in each evaporation layer are heated by a heating mechanism. The heated raw monomer evaporates as a gas. In this state, the valve 25 is opened, and the evaporation layer and the mixing tank 21 are communicated with each other by the monomer introduction pipe 24. Thereby, the evaporated monomer is
Each of the evaporation layers is introduced into the mixing tank 21 through the monomer introduction pipe 24.

The various monomers introduced into the mixing tank 21 are as follows:
Since it is a gas, it is uniformly diffused in the mixing tank 21. Thereby, in the mixing tank 21, various raw material monomers are uniformly mixed.

Then, the pressure in the chamber 20 with respect to the mixing tank 21 is reduced by the pressure reducing mechanism. This allows
A pressure difference occurs between the mixing tank 21 and the chamber 20,
The monomer vapor in the mixing tank 21 is introduced into the chamber 20 by this pressure difference. The raw material monomer introduced into the chamber 20 adheres to the surface of the polyimide film 10.

In the chamber 20, the temperature in the chamber 20 and the polyimide film 10
The polymerization of the monomer molecules adhering to the surface of the polyimide film 10 is started by adjusting the temperature. In the present embodiment, the temperature in the chamber 20 and the stage 1
9 and the temperature of the polyimide film 10
80 ° C. Thereby, the polyimide film 10
A polymer film is formed on the surface of the substrate.

In this embodiment, the polyimide film 1
On the surface of No. 0, 2,2-bis (3,4-phenylcarboxyl) hexafluoropropane and diaminodiphenyl ether are adhered at an environmental temperature of 180 ° C. In this state, since the functional group has amic acid, the polyimide film 10 is then heat-treated at 250 ° C. to imidize the amic acid. As a result, a fluorine-containing polyimide film 9 having ink repellency is formed on the sample surface (see FIG. 5B). The fluorine-containing polyimide film 9 of the present embodiment is formed so as to have a thickness of about 0.01 to 3 μm.

Next, the polyimide film 10 on which the fluorine-containing polyimide film 9 has been formed is irradiated with excimer laser light from the fluorine-containing polyimide film 9 side.

Although a detailed description is omitted because it is a known technique, an excimer laser is a high-power pulse laser that oscillates in an ultraviolet region, and is characterized by a short wavelength, a short pulse, and a high output. Another feature is that processing can be performed with less heat influence by contact.

By the way, fluorine-containing polyimide and polyimide are materials having low transmittance of excimer laser light and excellent workability by excimer laser light.

In this embodiment, since the excimer laser beam is applied to the orifice plate 8 on which the fluorine-containing polyimide film 9 and the polyimide, both of which have good processability by the excimer laser beam, are laminated, the nozzle 7 is processed with high precision. (See FIG. 5C).

Although the description is omitted because it is a known technique, when irradiating a laser beam including an excimer laser, the laser beam is focused on the position where the nozzle 7 is formed. The optical axis diameter increases. This makes it easy to form the nozzle 7 in a tapered shape such that the groove 6 expands from the outside of the pressure chamber 14 without using a special processing method.

Here, the nozzle 7 is formed on an orifice plate 8 on which a fluorine-containing polyimide film 9 having both good workability by excimer laser light and good ink repellency is formed on polyimide having good workability by excimer laser light. As a result, the orifice plate 8 having the fluorine-containing polyimide film 9 formed only on the ink discharge side can be obtained without forming the fluorine-containing polyimide film 9 on the inner peripheral surface of the nozzle 7.

By applying the orifice plate 8 formed as described above to the ink jet printer head 1, the meniscus in the nozzle 7
It can be uniform every time. Thus, the ejection speed and the ejection volume of the ink droplet can be controlled well.

In the present embodiment, polyimide is used as the base material of the orifice plate 8. However, the present invention is not limited to this. For example, PET (polyethylene terephthalate), polysulfuric acid, or the like may be used. Any resin that can be processed may be used.

[0045]

According to the method for manufacturing an orifice plate of an ink jet printer head according to the first aspect of the present invention, a nozzle penetrating a substrate and a fluorine-containing polyimide film is formed by irradiating a laser beam in a nozzle processing step. By doing so, since a fluorine-containing polyimide film is not formed on the inner surface of the nozzle, the ink meniscus around the nozzle is stabilized, and an ink jet printer head having good ejection performance can be obtained.

According to a second aspect of the present invention, in the method of manufacturing an orifice plate for an ink jet printer head according to the first aspect, in the nozzle processing step, an excimer laser beam having low permeability to the fluorine-containing polyimide film is applied. By forming the nozzle, for example, it is possible to suppress the occurrence of burrs and the like on the nozzle end face, and to improve the workability of the fluorine-containing polyimide film having good film formability. It is possible to prevent the fluorine-containing polyimide film from interfering with the ejection path and stabilize the meniscus of the ink around the nozzle more reliably.

According to a third aspect of the present invention, in the method for manufacturing an orifice plate of an ink jet printer head according to the second aspect, in the nozzle processing step, an excimer laser beam having low permeability to the fluorine-containing polyimide film and the polyimide is applied. By forming the nozzle by doing, at the time of nozzle processing, since it becomes possible to process both the base material formed of polyimide and the fluorine-containing polyimide film formed on the surface thereof,
By stabilizing the meniscus of the ink inside and around the nozzle, an ink jet printer head having good ejection performance can be obtained.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a part of an inkjet printer head according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view showing a part of the inkjet printer head cut horizontally along a direction in which grooves extend.

FIG. 3 is a perspective view showing an orifice plate.

FIG. 4 is a schematic view showing a vapor deposition polymerization apparatus.

FIG. 5 is a cross-sectional view illustrating a process of forming an ink-repellent film on an orifice plate.

FIG. 6 is a cross-sectional view showing a conventional process of forming an ink-repellent film on an orifice plate.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Ink jet printer head 7 Nozzle 8 Orifice plate 9 Fluorine containing polyimide film 10 Substrate

Claims (3)

[Claims] A film forming step of forming a fluorine-containing polyimide film on a surface of a substrate, and irradiating the substrate with the fluorine-containing polyimide film formed in the film forming step with a laser beam. A method for manufacturing an orifice plate for an ink jet printer head, comprising: a nozzle processing step of forming a nozzle penetrating a base material and the fluorine-containing polyimide film. 2. A method for manufacturing an orifice plate for an ink jet printer head according to claim 1, wherein said nozzle processing step forms the nozzle by irradiating an excimer laser beam. 3. The method for manufacturing an orifice plate of an ink jet printer head according to claim 2, wherein said base material is formed of polyimide.