JP2002001192A - Fluid supply device and fluid supply method - Google Patents

Abstract

(57) [Summary] [PROBLEMS] In the production process in the field of electronic parts, home appliances, etc., various liquids such as adhesives, clean solder, phosphor, grease, paint, hot melt, medicine, food, etc. are intermittently and continuously. Regardless of, high-speed and high-precision fixed-quantity discharge and supply. SOLUTION: There is provided an axial driving means for giving a relative displacement in the axial direction between a piston and a cylinder, a means for giving a rotational movement, and a means for pressure-feeding a fluid. The on / off control of the discharge flow rate is enabled by changing the fluid resistance of the passage.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production process in the fields of electronic parts, home electric appliances and the like, which is used for adhesives, clean solder, grease, paint, hot melt, chemicals, etc.
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid supply device for discharging and supplying various liquids such as food in a fixed amount, or for applying a phosphor material or the like on a display surface such as a CRT or PDP uniformly and with high accuracy.

[0002]

2. Description of the Related Art Liquid ejecting apparatuses (dispensers) have been used in various fields, but with the recent demand for miniaturization and high recording density of electronic components, a minute amount of fluid material can be dispensed with high precision. There is a demand for a technique for stably controlling supply.

[0003] Alternatively, there is a great demand for a fluid supply method for uniformly applying a phosphor on a display surface such as a CRT or PDP.

For example, in the field of surface mounting (SMT), high-speed mounting, miniaturization, high density, high quality,
The problems with dispensers in the trend of unmanned operation can be summarized as follows: high-precision application amount reduction of ejection time miniaturization of application amount per dot. Conventionally, a dispenser using an air pulse method as shown in FIG. 17 has been widely used as a liquid ejection apparatus, and the technique is introduced in, for example, "Automation Technology '93 .25 Vol. 7".

In the dispenser according to this method, a fixed amount of air supplied from a constant pressure source is applied in a pulsed manner to a container 150 (cylinder), and a fixed amount of liquid corresponding to an increase in the pressure in the cylinder 150 is supplied to a nozzle 151. Is discharged from the

Further, a micropump using a piezoelectric element has been developed for the purpose of supplying a small flow rate of fluid. For example, "Ultrasonic TECHNO, June, '5
9 ”introduces the following contents. FIG. 18 shows the principle, and FIG. 19 shows the specific structure. When a voltage is applied to the laminated piezoelectric actuator 200, mechanical elongation occurs, and this elongation is expanded by the action of the displacement expansion mechanism 201. Further, the diaphragm 203 is pushed through the push-up rod 202.
Is pushed upward in the figure, and the volume of the pump chamber 204 decreases. At this time, the check valve 206 of the suction port 205 is closed, the check valve 208 of the discharge port 207 is opened, and the fluid in the pump chamber 204 is discharged. Next, when the applied voltage is reduced, the mechanical elongation is reduced as the voltage is reduced. Diaphragm 203
Is pulled down by the coil spring 209 (return action), the volume inside the pump chamber 204 increases, and the pressure inside the pump chamber 204 becomes negative. Due to this negative pressure, the suction check valve 206
Opens, and the fluid is filled in the pump chamber 204. At this time, the discharge port check valve 208 is closed. The coil spring 209 has a function of pulling back the diaphragm 203 and also has a function of increasing the thickness of the laminated piezoelectric actuator 200 via a displacement enlarging mechanism 201.
Plays an important role in applying mechanical preload to the Hereinafter, this operation is repeated.

It is considered that a small-sized pump with a small flow rate and excellent flow rate accuracy can be realized by the configuration using the piezoelectric actuator.

[0008]

Among the prior arts described above, the air pulse type dispenser has the following problems.

(1) Dispersion of discharge amount due to discharge pressure pulsation (2) Dispersion amount due to head difference (3) Discharge amount change due to change in viscosity of liquid The phenomenon (1) has a short tact time and a short discharge time. Appears more markedly. For this reason, various measures have been taken such as providing a stabilizing circuit for making the height of the air pulse uniform.

[0010] The above (2) is based on the air gap 152 in the cylinder.
The reason for this is that the degree of pressure change in the gap 152 greatly changes depending on the H when a certain amount of high-pressure air is supplied because the volume of the liquid varies depending on the liquid remaining amount H. If the remaining amount of the liquid decreases, there is a problem that the application amount is reduced by about 50 to 60% compared to the maximum value, for example. For this purpose, measures such as detecting the liquid remaining amount H for each ejection and adjusting the time width of the pulse so that the ejection amount becomes uniform are taken.

The above (3) occurs, for example, when the viscosity of a material containing a large amount of solvent changes with time. As a countermeasure for this, a measure has been taken in which the tendency of the viscosity change with respect to the time axis is programmed in advance in a computer and the pulse width is adjusted so as to correct the influence of the viscosity change.

[0012] In any of the measures against the above problems, the control system including the computer becomes complicated, and it is difficult to cope with changes in irregular environmental conditions (temperature, etc.), so that it has not been a drastic solution.

Also, when the piezo pump using the laminated piezoelectric actuator shown in FIGS. 18 and 19 is used for high-speed intermittent application of a high-viscosity fluid used in the field of surface mounting or the like, or sharply after continuous application. If it is necessary to stop the spill, the following problems are expected.

In the field of surface mounting, for example, 0.1 m
There is a demand for a dispenser that instantly applies an adhesive (viscosity of 100,000 to several million CPS) of 0.1 g or less in 0.1 seconds or less. Therefore, it is expected that a high fluid pressure needs to be generated in the pump chamber 204, and that the suction valve 206 and the discharge valve 208 communicating with the pump chamber 204 need to have high responsiveness. However, passive discharge valves,
With the above pump having a suction valve, it is extremely difficult to intermittently discharge a high-viscosity rheological fluid having poor fluidity at high flow rate accuracy and at high speed.

In order to apply a small flow rate of a high viscosity fluid,
A thread-type dispenser, which is a viscous pump, has already been put to practical use. In the case of the screw groove type, since a pump characteristic that is hardly dependent on the nozzle resistance can be selected, continuous application can provide a preferable result, but intermittent application is not good in terms of the characteristics of a viscous pump. Therefore, in the conventional screw groove type, (1) an electromagnetic clutch is interposed between the motor and the pump shaft, and this electromagnetic clutch is connected or released when the discharge is turned on or off.

(2) Use a DC servomotor to start or stop the rapid rotation.

However, since the response is determined by the time constant of the mechanical system in any of the above cases, the high-speed intermittent operation is limited. Also during transient response of the pump shaft (when starting and stopping rotation)
Since there are many uncertain factors in the rotational characteristics of the, the precise control of the flow rate is difficult, and the coating accuracy is limited.

In order to solve the drawbacks of the above-described air pulse type, piezo type using a laminated piezoelectric actuator, or a screw groove type pump, the present inventor has already proposed a minute flow rate pump shown below (Japanese Patent Application No. 08-08,083). -28954
3) Has been done.

In this method, relative linear and rotational movements between the piston and the cylinder are given by independent actuators, and the operation of each actuator is electrically synchronized with each other to control the suction or discharge of the pump. What you get.

In FIG. 20, reference numeral 301 denotes a first actuator constituted by a laminated piezoelectric element. 302
Is a piston driven by the first actuator 1 and corresponds to a direct-acting portion of the pump. This piston 30
A pump chamber 304 whose capacity is changed by the axial movement of the piston 302 is formed between the second housing 303 and the lower housing 303. The lower housing 303 has a suction port 305 and discharge ports 306a, 30
6b are formed.

Reference numeral 307 denotes a second actuator, which gives relative rotation and swing between the piston 302 and the lower housing 303, and comprises a pulse motor, a DC servo motor, and the like. 308 is a motor rotor constituting the second actuator 307, and 309 is a stator.

The rotating member 310 is connected to the piston 302 via a disc-shaped leaf spring 311. Also the first
The plate spring 311 has a shape that is easily elastically deformed in the axial direction in order to transmit the expansion and contraction of the piezoelectric element as the actuator 301 in the axial direction to the piston 302. Rotating member 31
The rotation of 0 is transmitted to the piston 302 via the leaf spring 311. With this configuration, the piston 302 of the pump can perform the rotary motion and the linear motion simultaneously and independently.

Reference numeral 312 denotes a coupling joint for supplying electric power from the outside to the first actuator 301 which rotates.

At the lower end of the lower housing 303, a discharge sleeve 314 having a discharge nozzle 313 at the tip is mounted. On the inner surface of the discharge sleeve 314, a flow passage 315 that connects the discharge holes 306a and 306b and the discharge nozzle 313 is formed. Lower housing 303
The relative rotational movement of the two members causes the pump chamber 304 and the suction hole 30 to move relative to each other.
5 and flow channels 316b, 317b are formed such that the pump chamber 304 and the discharge holes 306a, 306b are connected alternately. These flow grooves serve as suction and discharge valves of a normal pump.

Reference numeral 318 denotes a displacement sensor, and 319 denotes a rotating disk fixed to the piston 302. The displacement sensor 318 and the rotating disk 319 detect the axial position of the piston 302. In the above proposal, a piezoelectric actuator is used for the linear motion, and a motor is used for the rotary motion. With the above proposal, it seems that a dispenser that can perform intermittent coating at high speed is feasible.

However, in the field of circuit formation, which is becoming more and more precise and ultra-fine in recent years, or in the field of forming electrodes and ribs of picture tubes such as PDPs and CRTs, and in the process of manufacturing liquid crystals, optical discs, and the like, the technique of fine coating is used. For example,
The following requests were made.

Both continuous and intermittent coating are used.

For example, the coating can be stopped immediately after the continuous coating, and the continuous coating can be sharply started after a short time.

In any case, high-precision coating can be performed, and ultra-high-speed coating can be performed intermittently.

The present invention is to provide a fluid supply device which can greatly improve the conventional embodiments and the inventive examples relating to the minute flow rate dispenser and meet the new requirements of the fine coating technology.

That is, a relative linear motion and a rotary motion are provided between the piston and the cylinder, and a fluid transport means is provided by the rotary motion, and the relative gap between the fixed side and the rotary side is changed using the linear motion. Thus, the discharge amount of the fluid is controlled.

According to the present invention, it is possible to obtain a fluid supply device capable of supplying and applying a very small amount of a high-viscosity fluid having poor fluidity with high accuracy and high speed regardless of intermittent or continuous operation.

[0033]

According to the fluid supply apparatus of the present invention, means for relatively rotating a shaft and a housing accommodating the shaft, and an axial drive for providing an axial relative displacement between the shaft and the housing. Means, a fluid suction port and a discharge port for communicating a pump chamber formed by the shaft and the housing with the outside, and a means for pumping the fluid flowing into the pump chamber to a discharge port side. In the supply device, a fluid supply device is provided in which the gap between the shaft and the housing is changed by the axial driving means to increase or decrease the fluid resistance between the pump chamber and the discharge port. I do.

[0034]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [First Embodiment] [Explanation of the Principle of the Present Invention (Part 1)] Before starting the detailed description of the first embodiment, the principle of the present invention (Part 1) will be described with reference to FIG. It will be described using FIG.

In FIG. 1A, reference numeral 500 denotes an axis;
Denotes a sleeve, 502 denotes a radial groove formed on a shaft for fluid pressure feeding, 503 denotes a radial groove for sealing, 504 denotes a suction port, and 505 denotes a discharge nozzle. As shown in FIG. 1B, reference numeral 506 denotes a thrust end face protruding from the discharge-side end face of the shaft, and an opposite face 507 of the thrust end face.
The opening 508 of the discharge nozzle is formed at the bottom.

The radial groove is a known one known as a spiral groove dynamic pressure bearing, and is also used as a screw groove pump.

Reference numeral 509 denotes a motor for rotating the shaft.
Reference numeral 510 denotes an axial driving unit that gives the rotating shaft 500 a reciprocating motion in the axial direction.

For example, when a giant magnetostrictive element is used, electric power for expanding and contracting a rotating shaft can be supplied from outside without contact (motor and giant magnetostrictive element are not shown).

When the gap δ between the thrust end surface 506 and the opposing surface 507 is sufficiently large, the discharge amount is not affected by the gap δ. That is, the discharge amount is determined by the parameters of the radial groove (groove depth, radial gap, groove angle, etc.), the rotation speed, the fluid viscosity, and the fluid resistance of the nozzle 505.

When suppressing the discharge amount of the fluid, the axial positioning means 510 is used while the shaft is rotated.
The thrust end surface 506 of the rotating shaft is brought closer to the fixed-side facing surface 507. When the gap δ becomes small, the viscous resistance R between the outer peripheral portion of the thrust end face 506 and the discharge nozzle opening 508 rapidly increases in inverse proportion to the cube of the gap δ as shown by the following equation.

[0041]

(Equation 1)

In the equation (1), P is the thrust end face 50
6, Q is the flow rate, μ is the viscosity coefficient of the fluid, R ₀ is the outer diameter of the thrust end face 506, and R _i is the radius of the discharge nozzle opening.

If the axial position x is detected by the displacement sensor 511 and the axial position is determined so that the gap δ is kept as small as possible (several μm), the rotational state is maintained and the non-contact state is maintained. , The discharge amount of the fluid can be reduced to a negligible level.

That is, in the present invention, by utilizing the non-linearity of the “gap-flow rate characteristic” in the viscous fluid, that is, the characteristic that the fluid resistance is inversely proportional to the cube of the gap, the “non-contact” is established between the rotating member and the fixed member. A "contact seal".

It should be noted that the stroke of the axial positioning means is sufficiently small, for example, several tens of microns or less, since the fluid resistance is greatly reduced if the gap δ is slightly increased. Therefore, if, for example, a giant magnetostrictive element or a piezo element is used for the actuator used for the axial positioning means, the application can be stopped from the continuous application state, or the transition from the stop state to the continuous application can be made immediately.

[Detailed Description of First Embodiment] A specific embodiment in which the present invention is applied to a dispenser for surface mounting electronic components will be described below with reference to FIG.

Reference numeral 1 denotes a first actuator, which comprises an electrostrictive type actuator using a giant magnetostrictive element or the like, an electrostatic type actuator, an electromagnetic solenoid or the like.

In the embodiment, in order to supply a high-viscosity fluid at high speed and intermittently in a very small amount and with high precision, a giant magnetostrictive element having high positioning accuracy, high responsiveness and a large generated load can be obtained. Using. 2 is the first actuator 1
Is driven by the main shaft. The first actuator is housed in a housing 3, and a cylinder 4 for housing the main shaft 2 is mounted on a lower end of the housing. Reference numeral 5 denotes a radial groove for pressure-feeding the fluid formed on the outer surface of the main shaft 2 to the discharge side, and reference numeral 6 denotes a radial groove for sealing.

A pump chamber 7 for obtaining a pumping action by the relative rotation of the main shaft 2 and the cylinder 4 is formed between the main shaft 2 and the cylinder 4. Further, a suction hole 8 communicating with the pump chamber 7 is formed in the cylinder 4.
9 is a discharge nozzle mounted on the lower end of the cylinder,
An ejection hole 10 is formed at the center. Reference numeral 11 denotes a discharge-side thrust end surface of the main shaft, and an opening 51 of a discharge nozzle is formed in a surface 50 facing the thrust end surface.

Reference numeral 12 denotes a second actuator, which is a main shaft 2
And a cylinder 4 is provided with a relative rotational motion.

The motor rotor 13 is fixed to an upper main shaft 14, and the motor stator 15 is housed in a housing 16. The upper main shaft 14 is supported by a ball bearing 17,
The outer ring side of the ball bearing is housed in a housing 18.

Numeral 19 is a giant magnetostrictive rod composed of a giant magnetostrictive element. The giant magnetostrictive rod 19 is fastened to the upper main shaft 14 at the upper part and to the main shaft 2 at the lower part.

Reference numeral 20 denotes a magnetic field coil for applying a magnetic field in the longitudinal direction of the giant magnetostrictive rod 19, and reference numeral 21 denotes a permanent magnet for applying a bias magnetic field, which is housed in the housing 3.

The permanent magnet 21 applies a magnetic field to the giant magnetostrictive rod 19 in advance to increase the operating point of the magnetic field, and the magnetic bias can improve the linearity of the giant magnetostriction with respect to the strength of the magnetic field. Reference numeral 22 denotes a cylindrical yoke member A, and reference numeral 23 denotes a yoke member B having a thin thrust disk 24 at a lower portion.
19 → 22 → 21 → 23 → 19, the giant magnetostrictive rod 1
9 to form a closed loop magnetic circuit to control the expansion and contraction of 19 →
22 → 21 → 23 → 19 forms a closed loop magnetic circuit for applying a bias magnetic field.

That is, the members 19 to 23 constitute a known giant magnetostrictive actuator 1 capable of controlling the expansion and contraction of the giant magnetostrictive rod in the axial direction by a current applied to the magnetic field coil.

The giant magnetostrictive material is an alloy of a rare earth element and iron. For example, TbFe ₂ , DyFe ₂ , SmFe _{2 and the} like are known, and their practical use has been rapidly advanced in recent years.

Reference numeral 25 denotes a sleeve press-fitted on the inner ring side of the ball bearing 26, and the outer ring side of the ball bearing 26 is
It is stored in. Reference numeral 27 denotes a bias spring mounted between the thrust disk 24 and the sleeve 25.

The compressive stress is always applied to the giant magnetostrictive rod 19 in the axial direction (upward direction in FIG. 1) by the bias spring 27. Therefore, when the repetitive stress is generated, the drawback of the giant magnetostrictive element which is weak to the tensile stress is the disadvantage. Will be resolved.

Since the bias spring 27 also has rigidity in the radial direction with respect to the main shaft 2, the main shaft 2 and the giant magnetostrictive rod 19
Although it is supported by two ball bearings 17 and 26 and is rotatable, the center position of the shaft composed of the members 2, 19 and 14 can be regulated with high rigidity. That is, with the above configuration, in the fluid rotating device of the present invention, the main shaft 2 of the pump is provided.
Can simultaneously and independently control the rotational motion and the linear motion with minute displacement.

Further, in the embodiment, since the giant magnetostrictive element is used as the first actuator, power for linearly moving the giant magnetostrictive rod 19 (and the main shaft 2) can be applied from outside without contact.

Reference numeral 28 denotes a displacement sensor mounted on the housing 3, and the displacement sensor 28 and the thrust disk 24
Thus, the absolute position of the spindle 2 in the axial direction is detected.

When the giant magnetostrictive element is the first actuator 1, the input current of the element is proportional to the displacement. Therefore, even in the open loop control without the displacement sensor, the axial positioning control of the main shaft 2 is possible. However, if feedback control is performed by providing the position detecting means as in the present embodiment, the hysteresis characteristic of the giant magnetostrictive element can be improved, and positioning with higher accuracy can be performed.

By using this positioning function, the gap δ between the discharge-side thrust end face 11 of the main shaft and the fixed-side opposed face 50 can be controlled.

As described in the principle (part 1) of the present invention, in a pump handling a very small flow rate, the stroke of the gap δ for forming the “non-contact seal” may be, for example, on the order of several tens of microns, and The limit of the stroke of the magnetostrictive element, the piezo element, etc. does not matter.

When a high-viscosity fluid is discharged, a large discharge pressure is expected to be generated by the pumping action of the radial groove. In this case, since the first actuator 1 is required to have a large thrust against high fluid pressure, it is preferable to use an electromagnetic strain type actuator which can easily output a force of several hundred to several thousand N.

Instead of using the bias spring 27 to regulate the radial position of the piston 2, a plain bearing may be formed between the inner surface of the sleeve 25 and the main shaft 2 to support the main shaft 2 in the radial direction. Good. The axial direction between the inner surface of the sleeve 25 and the main shaft 2 is relatively free, but the rotation direction may be restricted.

In this embodiment, a giant magnetostrictive element is used for the axial driving means.

In this configuration, the conventional proposal (Japanese Patent Application No. 08-28
9543), the overall configuration is extremely simple, so that the moment of inertia of the moving part can be reduced as much as possible, and the diameter of the dispenser can be reduced. Further, as compared with the case where a piezoelectric element is used, the conductive brush can be omitted, so that the load on the motor (rotating means) can be reduced. The electromagnetic distortion element is
Since it has a sufficiently high response of several MHz or more, it has a high response to linear motion. As a result, the discharge amount of the high-viscosity fluid can be controlled with high response and high accuracy.

[Second Embodiment] [Explanation of the Principle of the Present Invention (Part 2)] The outline of a second embodiment in which the first embodiment is further improved will be described with reference to FIGS.
This will be described with reference to FIG.

In the first embodiment, at the end of the discharge, the main shaft is positioned so that the fluid resistance of the flow path leading to the discharge nozzle is as large as possible, that is, the gap δ at the thrust end face is as small as possible. Had been suppressed.

However, in this case, since the flow path is not completely shut off, a slight leak cannot be avoided in the case of a process in which the viscosity of the transport fluid is low. In addition, when there is a small amount of leak, the fluid that has flowed out of the discharge nozzle adheres to the tip of the discharge nozzle due to surface tension and bulges like a dumpling. If the application work is performed on the mounting board or the like in this state, it causes troubles such as stringing and dripping.

In the second embodiment, this point is greatly improved, and it is possible to completely shut off the leak channel when the discharge is turned off.
This enables extremely sharp application work without stringing or dripping.

In FIG. 3A, reference numeral 600 denotes an axis;
Is a sleeve, 602 is a radial groove for fluid pressure feeding formed on the shaft, 603 is a radial groove for sealing, 604 is a suction port, 605 is a discharge port, 606 is a discharge-side end face of the shaft, 6.
Reference numeral 07 denotes a sealing thrust groove formed on the end face 606. An opening 609 of the discharge nozzle and a discharge nozzle 610 are formed on a surface 608 opposite to the thrust end surface 606.

As in the first embodiment, the radial groove 602 is a known one known as a spiral groove hydrodynamic bearing, and is also used as a screw groove pump. The sealing thrust groove 607 is generally known as a herringbone thrust dynamic pressure bearing.

Reference numeral 611 denotes a motor for rotating the shaft.
Reference numeral 612 denotes a rotating shaft 600 and a displacement sensor 613.
This is an axial driving means for positioning in the axial direction by using the output x of, for example, a giant magnetostrictive element, a piezoelectric element and the like (a motor and each element are not shown) as in the first embodiment.

With the displacement sensor 613, the axial driving means 612, and a control / drive circuit (not shown) provided outside, the gap δ at the thrust end face can be controlled to an arbitrary value.

FIGS. 4 and 5 schematically illustrate that the discharge passage is completely opened or completely shut off by changing the gap δ.

FIGS. 4A and 4B show the case where the discharge passage is open because the gap δ is sufficiently large, and there is almost no effect of the sealing thrust groove 607. In this case, the pumping pressure of the radial groove 602 is P
r, the pressure P ≒ near the opening 609 of the discharge nozzle
Pr.

FIGS. 5A and 5B show a case where the gap δ is sufficiently small and the discharge passage is blocked by the effect of the sealing thrust groove. In this case, a large sealing pressure: Ps is generated by the effect of the herringbone thrust dynamic pressure bearing, and Ps> Pr (pumping pressure of the radial groove), so that the fluid does not flow in the radial direction.

The fluid near the opening 609 of the discharge nozzle is subjected to a centrifugal pumping action [arrow a in FIG. 3A] by the thrust groove 607, so that the fluid has a negative pressure (atmospheric pressure or lower). Due to this effect, the discharge nozzle 610
The fluid remaining inside is sucked into the pump again. As a result, a fluid soul is not formed due to surface tension at the tip of the discharge nozzle 610, and stringing and dropping are eliminated.

The generated seal pressure of the thrust bearing is given by the following equation.

[0082]

(Equation 2)

In the equation (2), ω is the rotational angular velocity, R ₀
Is the outer diameter of the thrust bearing, R ₀ is the inner diameter of the thrust bearing, f
Is a function determined by the groove depth, groove angle, groove width and ridge width, and the like.

The curve A in the graph of FIG.
FIG. 6 shows the characteristics of the seal pressure Ps with respect to the gap δ when the herringbone type thrust groove shown in FIG.

A curve C in the graph of FIG. 6 is an example showing the relationship between the pumping pressure of the radial groove and the gap δ at the tip of the shaft when there is no axial flow. The pumping pressure of the radial groove can be selected in a wide range by selecting the radial gap, the groove depth, and the groove angle, similarly to the thrust groove. However, qualitatively, the pumping pressure Pr of the radial groove does not depend on the size of the gap at the tip of the shaft (that is, the size of the gap δ).

When the gap δ of the sealing thrust groove is sufficiently large, for example, when the gap δ = 10 μm, the generated pressure is extremely small, that is, P <0.01 kg / mm ² .

With the shaft kept rotating, the end face of the rotating shaft is brought closer to the fixed-side facing surface. When the gap δ becomes 3 to 4 μm, the sealing pressure generated in the thrust groove 506 sharply increases. When δ <2.5 μm, the sealing pressure becomes larger than the pumping pressure of the radial groove, and the outflow of the fluid to the discharge port side is blocked.

Therefore, in the embodiment of the present invention, the ON / OFF state of the fluid discharge state can be freely controlled by moving the rotating shaft by only about 10 μm in the axial direction.

To summarize the point of the present invention, while the sealing pressure by the thrust groove increases sharply as the gap δ becomes smaller, the pumping pressure of the radial groove is extremely insensitive to the change of the gap δ. , To take advantage of the point.

Note that both the radial groove and the thrust groove may be formed on either the rotating side or the fixed side.

When a powder fluid such as an adhesive containing fine particles is applied, the minimum value δmin of the gap δ may be set to be larger than the fine particle diameter φd.

[0092]

(Equation 3)

In order to obtain a larger gap for the same generated pressure, it is sufficient to increase the number of revolutions or increase the radius of the thrust groove 506 and select appropriate values for the groove depth, groove angle, and the like. .

If a flange larger than the diameter of the rotating shaft is provided on the end face of the rotating shaft and a groove is formed on the flange and the relative movement surface on the discharge side, a larger gap δ is maintained at the same generated pressure. (Not shown).

[0095]

[Table 1]

[Detailed description of the second embodiment] In the concrete embodiment of the second embodiment, except for the vicinity of the thrust groove at the tip of the shaft,
Since it is not much different from the first embodiment (FIG. 2), detailed description is omitted.

[Third Embodiment] [Explanation of the Principle of the Present Invention (Part 3)] An outline of a third embodiment in which the first and second embodiments are further improved will be described with reference to FIG.
This will be described with reference to FIG.

In the first and second embodiments, the method of controlling the ON / OFF state of the discharge state by moving the rotating shaft in the axial direction and changing the gap of the thrust end face has been described.
When the time between ON and OFF of the discharge state is shortened as much as possible in order to use the dispenser of the present invention for intermittent coating and to improve production tact, the following problems occur.

Referring to FIG. 5 of the second embodiment, for example, when the shaft 600 is rapidly lowered to turn off the discharge state, the space 614 near the shaft end between the shaft 600 and the sleeve 601 is sharply reduced. To shrink. As a result, the fluid 614 between the discharge side end surface 606 of the shaft and the opposite surface 608 is formed.
The pressure increases due to the compression action or an action called the squeeze action effect. Since the radial groove 602 is connected to the low-pressure suction side, the high-pressure fluid escapes to the suction side, and returns to the original steady-state pumping pressure Pr after a lapse of time.

However, while the pressure is increasing, the discharge flow rate flowing out through the discharge nozzle 609 increases, which causes an error in the required application amount.

The third embodiment is a drastic improvement on this point, and eliminates the influence of the coating accuracy on the pressure change at the shaft end when the shaft is suddenly lowered or raised. According to the present invention,
When the discharge is OFF, the leak flow path can be quickly and completely shut off, and stringing and dripping do not occur, and extremely sharp, high-speed, high-precision intermittent coating can be performed.

In FIG. 7A, reference numeral 700 denotes an outer peripheral shaft;
01 is a sleeve, 702 is a radial groove for fluid pressure feeding formed on the outer peripheral shaft, 703 is a radial groove for sealing, 7
Reference numeral 04 denotes a suction port, reference numeral 705 denotes a discharge port, reference numeral 706 denotes a discharge-side end surface of the outer peripheral shaft, and reference numeral 707 denotes a sealing thrust groove formed in the end surface 706. The opening 709 of the discharge nozzle and the discharge nozzle 71 are formed on the surface 708 opposite to the thrust end surface 706.
0 is formed.

As in the first and second embodiments, the radial groove 702 is a known one known as a spiral groove dynamic pressure bearing, and is also used as a screw groove pump. The sealing thrust groove 707 is generally known as a spiral groove thrust dynamic pressure bearing.

Reference numeral 711 denotes a central shaft, which is a hollow outer peripheral shaft 70.
0 is inserted so as to be relatively movable in the axial direction. The ejection side end 712 of the central shaft 711 faces the opening 709 of the ejection nozzle. The opposite side 713 is fixed to the other movable side of the giant magnetostrictive element described later. Therefore, the outer peripheral axis 700 and the central axis 711 are
At the time of FF, it moves in the opposite direction with respect to the absolute coordinate system.

Reference numeral 714 denotes a motor for rotating the shaft.
The outer peripheral shaft 700 and the central shaft 711 are rotated together. 715
Reference numerals 716 and 716 denote axial driving means for performing axial positioning on the rotating outer peripheral shaft 700 using the output x of the displacement sensor 717, and use, for example, a giant magnetostrictive element as in the first embodiment. (The motor and the giant magnetostrictive element are not shown.) The displacement sensor 717, the axial drive means 715, and a control / drive circuit (not shown) provided outside can control the gap δ at the thrust end face to an arbitrary value. .

FIGS. 8 and 9 show that the discharge passage is completely opened or completely shut off by changing the gap δ.
It is a model explanation that the size of the space between the outer peripheral axis, the discharge side end face of the central axis, and the facing surface 708 does not change.

FIG. 8 shows a case where the discharge passage is open because the gap δ is sufficiently large and the thrust groove 707 for sealing has almost no effect. In this case, assuming that the pumping pressure of the radial groove 702 is Pr, the pressure P ≒ Pr near the opening 709 of the discharge nozzle is obtained.

In this case, the volume V of the space formed by the discharge-side end surface of each shaft and the facing surface 708 is equal to the outer peripheral shaft 700.
And the gap δmax between the opposed surfaces, determined by the difference between h ₁ of the end face position of the outer peripheral shaft 700 and the central axis 711.

FIG. 9 shows the state of FIG.
Reference numeral 15 indicates a state where the outer peripheral shaft 700 is lowered. At this time, the central axis 711 rises simultaneously with the outer peripheral axis 700.

In this case, the gap δ is sufficiently small, and the discharge passage is blocked by the effect of the sealing thrust groove. Also, due to the effect of the spiral groove dynamic pressure bearing,
Large sealing pressure: Ps is generated, and there is no radial flow of the fluid.

The gap between the outer peripheral shaft 700 and the facing surface decreases from δmax to δmin, and the difference between the end surface positions of the outer peripheral shaft 700 and the central shaft 711 increases from h _{1 to} h ₂ , so that the total volume V is constant. is there. Therefore, a pressure increase of the fluid due to the compression action or the squeeze action effect can be suppressed.

The same applies to the case where the outflow of fluid is started by rapidly raising the outer peripheral shaft 700.

Therefore, in the dispenser of the present embodiment, high discharge flow rate accuracy can be obtained even during high-speed intermittent operation.

The clearance δ of the dynamic thrust bearing shown in FIG.
Is shown in graph B of FIG.

[Detailed Description of Third Embodiment] Hereinafter, a specific embodiment in which the present invention is applied to a dispenser for surface mounting electronic components will be described with reference to FIG.

Reference numeral 801 denotes a first actuator, which uses a giant magnetostrictive element as in the first and second embodiments. Reference numeral 802 denotes an outer peripheral shaft driven by the first actuator 801. The first actuator is housed in a housing 803, and a lower end of the housing has an outer peripheral shaft 8 attached thereto.
02 is mounted. 80
Reference numeral 5 denotes a radial groove for pressure-feeding a fluid formed on the outer surface of the outer peripheral shaft 802 to the discharge side, and reference numeral 806 denotes a radial groove for sealing.

A pump chamber 807 for obtaining a pumping action by the relative rotation of the outer peripheral shaft 802 and the cylinder 804 is formed between the outer peripheral shaft 802 and the cylinder 804. The cylinder 804 is formed with a suction hole 808 communicating with the pump chamber 807. Reference numeral 809 denotes a discharge nozzle mounted on the lower end of the cylinder, and a discharge hole 810 is formed in the center. Reference numeral 811 denotes a discharge-side thrust end surface of the outer peripheral shaft, and an opening 851 of a discharge nozzle is formed on a surface 850 facing the thrust end surface.

Reference numeral 812 denotes a second actuator, which gives a relative rotational movement between the main shaft 802 and the cylinder 804.

The motor rotor 813 is fixed to the upper main shaft 814, and the motor stator 815 is connected to the housing 816.
It is stored in.

An upper sleeve 817 is press-fitted on the inner ring side of the ball bearing 818, and the outer ring side of the ball bearing 818 is housed in the housing 819. Reference numeral 820 denotes an upper bias spring mounted between the thrust disk 821 and the upper sleeve 817.

The upper main shaft 814 has a sliding bearing 82 formed between the upper main shaft 814 and the upper sleeve 817.
2 supported.

Reference numeral 823 denotes a giant magnetostrictive rod composed of a hollow giant magnetostrictive element. The giant magnetostrictive rod 823 is sandwiched between a yoke material A 824 and a yoke material B 825 from the upper and lower parts. Reference numeral 826 denotes a magnetic field coil for applying a magnetic field in the longitudinal direction of the giant magnetostrictive rod 823, and reference numeral 827 denotes a permanent magnet for applying a bias magnetic field.
It is stored in.

A lower sleeve 828 is press-fitted on the inner ring side of the ball bearing 829. The outer ring side of the ball bearing 829 is housed in the housing 803. 830 is a lower bias spring mounted between the lower thrust disk 831 and the lower sleeve 828.

Reference numeral 832 denotes a displacement sensor mounted on the housing 803. The displacement sensor and the lower thrust disk 831 detect the absolute position of the outer peripheral shaft 802 in the axial direction.

Reference numeral 833 denotes a central shaft penetrating the hollow giant magnetostrictive element, and is fastened to the yoke member A 824 at the upper end. The lower end portion of the central shaft 833 is disposed so as to penetrate the inside of the outer peripheral shaft 802 so as to face the opening 851 of the discharge nozzle as shown in FIGS.

In the above configuration, the giant magnetostrictive rod 823 is
A bias load is always applied from both ends by an upper bias spring 820 at the upper part and by a lower bias spring 830 at the lower part. Therefore, the giant magnetostrictive rod 8
When a magnetic field is applied to 23, giant magnetostrictive rod 823 expands at both ends. On the discharge nozzle side of the outer peripheral shaft 802, the gap between the thrust end faces becomes smaller, and on the discharge nozzle side of the central shaft 833, the gap becomes larger. As a result, the total volume V between the thrust end faces can be kept constant, for example.

Further, by setting the spring constants of the two bias springs 820 and 830, the outer peripheral shaft 802 and the central shaft 833 are set.
Can be set arbitrarily.

When it is preferable to make the total volume V between the thrust end faces smaller, it is preferable that the spring stiffness of the upper bias spring 820 be larger than that of the lower bias spring 830.
The axial displacement of the central shaft 833 is reduced.

Conversely, when it is preferable to increase the total volume V, the spring stiffness of the upper bias spring 820 may be reduced and the displacement of the center shaft 833 may be increased.

[Description of Other Embodiments] The above-mentioned 3
An improvement proposal for one embodiment and another embodiment will be described.

FIGS. 11A and 11B show a method of effectively transmitting the rotational torque of the motor to the main shaft of the pump section via a giant magnetostrictive element. In the first to third embodiments, any of the main shafts on which the radial grooves are formed performs rotation and linear motion. In this case, it is preferable that the rotational torque transmitted from the motor to the main shaft is not applied to the giant magnetostrictive element, which is a brittle material, as much as possible. This is the same when a piezoelectric element, which is also a brittle material, is used instead of the giant magnetostrictive element.

Reference numeral 901 denotes a giant magnetostrictive rod composed of a hollow giant magnetostrictive element. The giant magnetostrictive rod 901 is sandwiched between a yoke material A 902 and a yoke material B 903 from above and below. 904, a magnetic field coil for applying a magnetic field in the longitudinal direction of the giant magnetostrictive rod 901, and 905, a permanent magnet for applying a bias magnetic field.

A lower sleeve 906 is press-fitted into the inner ring of the ball bearing 907, and the outer ring of the ball bearing 907 is housed in the housing 908. 909 is a yoke material B
The bias spring is mounted between the sleeve 903 and the sleeve 906.

Reference numeral 910 denotes a rotation transmission shaft provided through the center of the giant magnetostrictive rod 901. The rotation transmission shaft 910 has an upper end fixed to the yoke member A902 and a lower end relative to the yoke member B903 in the axial direction. Although it is movable in a certain way, it has a shape [FIG.

With this structure, the rotational torque transmitted from the motor (not shown) disposed above to yoke member A 902 can be transmitted to main shaft 911 of the pump chamber without applying torsional stress to giant magnetostrictive rod 901. .

FIGS. 12 (a) and 12 (b) show that a thrust-type groove is used as a means for transporting a fluid, and that the thrust-type groove is moved up and down.
A method for performing N, OFF control will be described.

950 is the central axis, 951 is the outer peripheral axis, 952
Is a housing, 953 suction port, and 954 is a discharge nozzle. 955 is an axial driving means, 956 is a rotating means of the central axis and the outer peripheral axis, 957 is a sealing groove formed on a relative movement surface of the discharge side end of the central axis 950, 9
Reference numeral 58 denotes a pump groove formed on the relative movement surface of the discharge side end of the outer peripheral shaft 951.

When the gap between the outer peripheral shaft 951 and the opposing surface is sufficiently small with the outer peripheral shaft 951 lowered, the pump groove 958 is formed.
Works effectively, and pressurizes the fluid to the discharge nozzle 954 side against the pumping pressure of the sealing groove 957.

When the outer peripheral shaft 951 is raised, the pumping pressure of the pump groove 958 decreases, and the outflow of the fluid is blocked by the sealing groove 957.

In the structure of this embodiment, the discharge flow rate can be adjusted not only by the number of rotations of the motor but also by the size of the gap between the end face of the outer peripheral shaft 951 and the opposing face.

Although the outer surface of the outer peripheral shaft 951 may be a perfect circle without a groove, a radial groove for assisting the pumping action of the pump groove 958 may be formed in the outer peripheral shaft 951 (not shown).

FIG. 13 shows a configuration in which an axial driving means is provided on a central axis penetrating the hollow outer peripheral axis.

Reference numeral 750 is a first actuator, which uses a giant magnetostrictive element or a piezoelectric element. Reference numeral 751 denotes a central axis driven by the first actuator 750. The first actuator is disposed on an upper portion of the housing 752. Reference numeral 753 denotes a second actuator, which gives a relative rotational movement between the outer peripheral shaft 754 and the cylinder 755.

Reference numeral 756 is a radial groove formed on the outer surface of the outer peripheral shaft 754 for feeding a fluid to the discharge side. Between the outer peripheral shaft 754 and the cylinder 755, the outer peripheral shaft 754
And a pump chamber 756 for obtaining a pumping action by the relative rotation of the cylinder and the cylinder 755. The cylinder 755 has a suction hole 7 communicating with the pump chamber 756.
57 are formed. Reference numeral 758 denotes a discharge nozzle mounted at the lower end of the cylinder, and a discharge hole 759 is formed at the center. Reference numeral 760 denotes a discharge-side thrust end surface of the central shaft, and an opening of a discharge nozzle is formed on a surface 761 facing the thrust end surface.

The motor rotor 762 is fixed to the outer peripheral shaft 754, and the motor stator 763 is housed in the housing 764. 765 and 766 are ball bearings that support the outer peripheral shaft 754.

If a spiral groove dynamic pressure thrust seal is formed on the relative movement surface of the thrust end face, ON / OFF control of the discharge flow rate by moving the center axis can be performed.

When a giant magnetostrictive element is used for the first actuator 1, a giant magnetostrictive rod is mounted on the central shaft 751 as in the first to third embodiments, so that it can be moved in the axial direction and the rotational direction. (Not shown).

FIG. 14 shows a method for alleviating a pressure rise caused by a sudden approach between the thrust-side end surface of the shaft and the opposing surface. This method can be effectively applied to all embodiments of the present invention.

850 is a shaft, 851 is a cylinder, 852 is a suction port, and 853 is a discharge nozzle. The shaft 850 includes an axial driving unit 854 and a rotating unit 85 as in the above-described embodiment.
5 driven. Reference numeral 856 denotes a fixed-side gap formed on the cylinder side in the pump chamber 858, and 857 denotes a moving-side gap. Each of the gaps 856 and 857 is effective as an accumulator for alleviating the pressure rise of the fluid, and is particularly effective when a fluid having high compressibility is applied.

In the above-described embodiment of the present invention, the method of changing the gap between the discharge-side end face of the shaft and the opposing face in order to control the discharge flow rate has been mainly described. However, in the present invention, if the gap between the shaft and the housing can be changed, the discharge flow rate can be controlled.

FIG. 15 shows a method of changing the opening area of the fluid passage not in the thrust end face but in the axial direction by the axial driving means.

650 is a shaft, 651 is a cylinder, 652 is a discharge nozzle, 653 is a thrust dynamic pressure seal, 654 is a seal part formed on the inner surface of the cylinder 652, 655 is a small diameter part formed on the shaft side, and 656 is Axial driving means, 65
Reference numeral 7 denotes a rotating unit.

In FIG. 19A, the opening area of the seal portion 654 is sufficiently large, and the discharge flow rate is in the ON state. Figure (b)
Since the opening area is reduced, the discharge flow rate is in the OFF state.

Auxiliary thrust dynamic pressure seal 653
Has an effect of pumping in the centrifugal direction (arrows in the figure), and thus has an effect of preventing dripping of a fluid and stringing as in the above-described embodiment. Further, since a sufficient sealing effect has already been obtained by the seal portion 654, the sealing ability of the dynamic pressure seal 653 may be considerably small. That is, the minimum gap Δ2min between the thrust end faces may be sufficiently large.

When handling an adhesive or the like mixed with a powder having a large particle diameter (for example, the outer diameter of the powder φd = 20 to 30 μm), if the sealing portion 654 is set so that δ1min <φd, The phenomenon of crushing of powder at the seal portion can be avoided. The minimum gap between the thrust end faces is δ2min≫φd
It is good.

In some applications, the dynamic pressure seal may be omitted.

FIG. 16 shows the control of the ON / OFF control of the discharge flow rate.
A method of combining the method of the present invention for moving the rotating shaft in the axial direction with the control of the number of revolutions of the DC motor will be described.

For example, depending on the kind of the adhesive or the like, there is a material which changes its characteristics when left under high pressure for a long time. In this case, it is more advantageous to stop the rotation of the motor during the process without coating. However, as described at the beginning of this specification, in the case where the discharge flow rate is controlled to be ON / OFF by controlling the rotation speed of the motor, the flow rate accuracy is limited in terms of the response during the transient response.

FIG. 15A shows the relationship between the number of rotations of the motor and time, and FIG. 15B shows the relationship between the size of the gap at the thrust end face and time.

When the discharge flow rate is turned off, the operation of reducing the speed of the motor and the operation of narrowing the gap at the thrust end face by using the axial moving means are simultaneously started. If the electromagnetic displacement element is used for the axial moving means, the response is much higher than that of the DC motor, so that the discharge flow rate is sharply cut off instantaneously. The rotation of the shaft stops due to the gradual deceleration of the motor.

Conversely, when the discharge flow rate is turned on, the motor is started up in advance to achieve a steady rotation, and then the operation of increasing the gap at the thrust end face by using the axial moving means is started. You can start.

In the present invention, in the case of the second and third embodiments in which the dynamic pressure thrust bearing is used as a fluid seal, if the section where the discharge flow rate changes from ON to OFF is used,
Continuous control of the flow rate is possible. In this case, since the gap and the flow rate between the shaft end and the facing surface have a one-to-one relationship, the shaft may be positioned using the output of the displacement sensor so as to be in the gap. In this case, the relationship between the flow rate and the output value of the displacement sensor may be obtained in advance.

Although the flow rate can be controlled by changing the number of rotations of the motor, the response is limited as described above. If an electromagnetic strain element is used for the axial driving means, it is possible to control an arbitrary flow rate with an extremely fast response.

In any of the embodiments of the present invention, the gap between the shaft and the housing is changed by the axial driving means.
The method of controlling the discharge flow rate has been described.

The purpose of changing the gap between the shaft and the housing in this way is to increase or decrease the fluid resistance between the pump chamber and the discharge port. As a means to increase or decrease the fluid resistance,
As shown in the first embodiment, there is a method of changing the passage resistance. Further, as shown in the second embodiment, there is a method of forming a dynamic pressure seal. In addition, the discharge flow rate can be suppressed by utilizing the negative pressure effect caused by the space between the tip of the shaft on the thrust side and the facing surface due to the movement of the shaft. In the present invention, any of these methods is regarded as “the action of increasing or decreasing the fluid resistance”.

In the embodiment, the second actuator (motor) is arranged above the first actuator (giant magnetostrictive element). However, the arrangement may be reversed. Alternatively, the first actuator may be housed inside the second actuator.

If high responsiveness and generated load are not required,
A voice coil motor capable of obtaining a large stroke may be used instead of the giant magnetostrictive element.

Alternatively, even in the case of a DC servomotor in which the motor rotor is a magnet, the rotating shaft may be moved in the axial direction by adjusting the current flowing in the stator coil by utilizing the attraction force acting in the axial direction.

When a piezoelectric element is used, the piezoelectric element may be arranged on the rotating side, and power may be supplied to the rotating side by a conductive brush.

In the embodiment, the permanent magnet 21 for applying the bias magnetic field is arranged on the outer peripheral side of the magnetic field coil 20 in order to drive the giant magnetostrictive element (first actuator). If the permanent magnet is omitted and a bias magnetic field is applied by a bias current flowing through the magnetic field coil, the outer diameter of the dispenser body can be further reduced (not shown).

As a result, the present invention can be applied to a process in which a plurality of dispensers are arranged in parallel and a phosphor material or the like is applied on a flat plate, for example. In this case, the application material supply passage may be common, but the discharge flow rate (and ON, OF
In F), since each dispenser can be individually controlled, it is possible to apply a flat plate surface with a high degree of freedom.

Alternatively, if the contents of a plurality of dispensers are stored in a common housing, a coating device (not shown) having a simpler configuration of multi-nozzles can be obtained.

[0173]

According to the fluid rotating device using the present invention, the following effects can be obtained. 1. A dispenser applicable to both intermittent coating and continuous coating can be realized. 2. Intermittent application of ultra-high-speed response, which was difficult with the conventional screw groove type. 3. High reliability without performance degradation due to sliding wear and the like. 4. Further, the pump of the present invention can have the following features.

A high-viscosity fluid can be applied at high speed.

It is possible to discharge a very small amount with high precision.

Threading and liquid dripping can be prevented.

[0177] Since the pump shaft and the opposing surface can be brought into non-contact with each other, it is possible to cope with powders and fine particles mixed with fine particles.

If the present invention is applied to, for example, a surface mount dispenser, a phosphor coating for a PDP, or a CRT display, the advantages can be fully exhibited, and the effect is enormous.

[Brief description of the drawings]

FIG. 1 is a model diagram showing the principle of the present invention, in which (a) is a front sectional view and (b) is a view showing an end face of a shaft.

FIG. 2 is a front sectional view showing the dispenser according to the first embodiment;

FIGS. 3A and 3B are model diagrams showing the principle of the present invention, wherein FIG. 3A is a front sectional view, and FIG.

FIG. 4 is a model diagram showing a discharge ON state according to the principle of the present invention.

FIG. 5 is a model diagram showing a discharge OFF state according to the principle of the present invention.

FIG. 6 is a diagram showing a relationship between a seal pressure and a gap according to the principle of the present invention.

FIGS. 7A and 7B are model diagrams showing the principle of the present invention, wherein FIG. 7A is a front sectional view, and FIG.

FIG. 8 is a model diagram showing a discharge ON state according to the principle of the present invention.

FIG. 9 is a model diagram showing a state in which discharge is OFF according to the principle of the present invention.

FIG. 10 is a front sectional view showing a dispenser according to a third embodiment;

11A and 11B are views showing a device for preventing a torsional stress from being applied to the giant magnetostrictive element. FIG. 11A is a front sectional view, and FIG.

12A and 12B are model diagrams showing a case where a thrust groove is used for a pumping action, wherein FIG. 12A is a front sectional view, and FIG.

FIG. 13 is a front sectional view showing the dispenser when the axial moving means is provided on the central axis.

FIG. 14 is a model diagram showing a device for alleviating a rise in pressure at the shaft end.

15A and 15B are diagrams showing a case where a seal portion is provided in an axial flow path, wherein FIG. 15A is a model diagram showing a discharge ON state, and FIG. 15B is a model diagram showing a discharge OFF state.

16A and 16B are diagrams showing a case where motor control and control by the axial moving means are combined, wherein FIG. 16A shows a relationship between the motor rotation speed and time, and FIG. 16B shows a relationship between the thrust end face gap and time.

FIG. 17 is a front sectional view of a conventional air pulse type dispenser.

FIG. 18 is a principle view of a conventional piezo type dispenser.

FIG. 19 is a front sectional view of a conventional piezo type dispenser.

FIG. 20 is a front cross-sectional view of a dispenser using a multilayer piezoelectric element and rotation of a motor in a conventional proposal.

[Explanation of symbols]

 500 shaft 501 housing (sleeve) 509 means for rotating 510 axial driving means 504 suction port 505 discharge port (discharge nozzle) 502 means for pumping fluid

Claims (16)

[Claims] 1. A shaft and a means for relatively rotating a housing for housing the shaft, an axial drive means for providing an axial relative displacement between the shaft and the housing, and the shaft and the housing. In a fluid supply device including a suction port and a discharge port of a fluid that communicates with a pump chamber and the outside, and a unit that pumps the fluid that has flowed into the pump chamber to a discharge port side, the pump chamber and the discharge port A fluid supply device characterized in that a gap between the shaft and the housing is changed by the axial driving means in order to increase or decrease fluid resistance between the shaft and the housing. 2. The fluid supply according to claim 1, wherein an opening of a discharge flow passage communicating with the discharge port is formed on a relative movement surface of the end face on the discharge port side of the shaft and an opposing surface thereof. apparatus. 3. The fluid supply device according to claim 2, wherein a gap between an end face on the discharge port side of the shaft and a facing surface thereof can be changed by the axial driving means. 4. The fluid supply device according to claim 3, wherein a shallow groove for radially feeding the fluid in a radial direction is formed in a relative movement surface of the discharge port side end surface of the shaft. 5. A means for pressure-feeding the fluid to a discharge port side,
2. The fluid supply device according to claim 1, wherein the fluid supply device is a spiral groove formed on a relative movement surface between an outer peripheral portion of the shaft and an inner surface of the housing opposite to the shaft. 6. The axial driving apparatus according to claim 1, wherein the axial driving means adjusts the axial relative displacement using a signal from a displacement sensor for detecting an axial relative displacement between the housing and the shaft. Fluid supply device. 7. The actuator according to claim 1, wherein the axial driving means is an actuator having a function of moving or expanding and contracting by an electromagnetic non-contact power supply means.
The fluid supply device as described in the above. 8. The fluid supply device according to claim 1, wherein said axial driving means is a giant magnetostrictive element. 9. A central shaft which is relatively moved in a direction opposite to the outer peripheral shaft is inserted into an outer peripheral shaft which is a hollow shaft, and discharges the outer peripheral shaft and the central shaft when the outer peripheral shaft moves. 2. The fluid supply device according to claim 1, wherein a change rate of a size of a space formed by the side end surface and the opposing surface is reduced. 10. The fluid supply device according to claim 9, wherein both ends of the axial driving means are elastically supported, and the outer peripheral shaft and the central shaft are attached to respective ends. . 11. When the average particle diameter of the fine particles contained in the fluid is φd and the minimum value of the gap between the end face of the shaft on the discharge port side and the opposing face is δmin, δmin> φd. The fluid supply device according to claim 3, wherein 12. The fluid supply device according to claim 1, wherein the means for pressure-feeding the fluid to the discharge port side is a thrust type groove formed on an end surface of the shaft and a relative movement surface thereof. 13. The fluid supply device according to claim 1, wherein a gap is formed on an end face of the shaft on a discharge port side or on a housing side for housing the shaft. 14. The fluid supply device according to claim 1, wherein the axial flow area between the pump chamber and the discharge port is changed by the relative movement of the shaft and the housing by the axial driving means. 15. The fluid according to claim 1, wherein the discharge flow rate is controlled by combining control of fluid resistance by relative movement of the shaft and the housing using the axial driving means and control of the number of rotations of the motor. Feeding device. 16. A fluid supply method, wherein a discharge flow rate is controlled by combining control of fluid resistance by relative movement of a shaft and a housing using an axial driving means and control of the number of rotations of a motor.