JP2002098789A - Pellet detection method, pellet detection device and pellet removal device - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To realize stable detection of pellets. A pellet position detecting device (20) irradiates a pellet (2) on a sheet (1) with a beam light (laser light), receives a reflected light of the beam light, and detects a beam at each position in a direction crossing the pellet (2). By recognizing the reduced position of the received light amount as the outer edge position of the pellet 2,
A device that detects the position of the pellet 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pellet detecting method, a pellet detecting device, and a pellet extracting device.

[0002]

2. Description of the Related Art A pellet take-out apparatus used in a pellet bonding apparatus positions a pellet adhered on a wafer sheet placed on a pellet supply table at a pellet take-out position, pushes up the pellet with a pellet push-up needle, and pushes the pellet up. The pellets are sucked and taken out by a pellet suction nozzle and bonded to the bonding position of the substrate.

In the prior art, in order to position a pellet to be taken out by a pellet take-out device at a pellet take-out position, the position of the pellet is detected by a pellet position detecting device. The pellet position detecting device captures an image of a pellet by a camera, and detects a position of the pellet based on an image processing result of the captured image.

[0004]

In the prior art, the position of the pellet is detected by processing the image of the pellet captured by a camera. If it falls, stable image processing cannot be performed, and the position of the pellet may not be detected.

Further, when the position of the pellet cannot be detected, the pellet cannot be taken out, and the operating rate of the pellet bonding apparatus is reduced.

An object of the present invention is to realize stable detection of pellets.

Another object of the present invention is to stabilize the removal of pellets by the pellet removal device and improve the operation rate of the pellet bonding device.

[0008]

According to a first aspect of the present invention, there is provided a pellet detecting method for detecting a pellet mounted on a mounting member, wherein the pellet mounted on the mounting member is detected. The apparatus is characterized in that the light beam is scanned in the transverse direction of the pellet, the reflected light is received, and the state of the pellet is detected based on the irradiation position of the light beam and the amount of reflected light from the irradiation position.

According to a second aspect of the present invention, there is provided a pellet detecting device for detecting a pellet mounted on a mounting member, wherein the pellet mounted on the mounting member is irradiated with a beam light. The device, a light receiving device that receives the reflected light of the beam light emitted by the irradiation device, a beam light scanning device that scans the beam light emitted by the irradiation device in the transverse direction of the pellet, and the beam light scanning device An irradiation position detecting device for detecting an irradiation position of the scanned beam light in a direction crossing the pellet, and a detection result of the irradiation position detecting device and a light receiving result of the light receiving device are obtained, and a direction crossing the pellet. And an arithmetic unit for recognizing a change state of the amount of received light at each position and detecting a state of the pellet based on the recognition result.

According to a third aspect of the present invention, there is provided a pellet detecting device for detecting a pellet mounted on a mounting member, wherein the pellet mounted on the mounting member is irradiated with a beam light. The apparatus, a light receiving device that receives the reflected light of the beam light emitted by the irradiation device, a beam light scanning device that scans the beam light emitted by the irradiation device in the transverse direction of the pellet, and this beam light scanning device An irradiation position detection device that detects an irradiation position of the scanned light beam in a direction crossing the pellet, and a detection result of the irradiation position detection device and a light reception result of the light receiving device are obtained.
An arithmetic unit for detecting the position of the pellet by recognizing the change position of the amount of received light at each position in the direction traversing the pellet as the outer edge position of the pellet.

According to a fourth aspect of the present invention, there is provided a pellet removing apparatus provided with the pellet detecting device according to the third aspect, wherein the pellet is attached to a sheet serving as a mounting member. A pellet push-up needle that pushes up the pellet from the back surface of the sheet, and a pellet suction nozzle that sucks and takes out the pellet pushed up by the pellet push-up needle is arranged, based on the position of the pellet detected by the pellet detection device, Said pellets,
It has a control device for controlling the relative positions of the pellet push-up needle and the pellet suction nozzle.

[0012]

According to the first and second aspects of the present invention, the pellet mounted on the mounting member is scanned with the beam light in the transverse direction, and the irradiation position of the beam light and the irradiation position are determined. The state of the pellet is detected based on the amount of reflected light.

According to the third aspect of the present invention, the pellet mounted on the mounting member is scanned with the light beam in the transverse direction thereof, and the irradiation position of the light beam and the light receiving result from the irradiation position are determined. Based on this, the position of the pellet is detected.

According to a fourth aspect of the present invention, a pellet removing device is provided for detecting a position of a pellet, a pellet push-up needle, and a pellet suction nozzle based on the position of the pellet detected by the pellet detecting device according to the third aspect. The relative position is controlled.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a schematic diagram showing a pellet extracting apparatus according to a first embodiment, FIG. 2 is a schematic diagram showing a light beam irradiation state, and FIG. 3 is a schematic diagram showing a beam light scanning state. 4
Is a schematic diagram showing the amount of light received by the light receiving device, and FIG. 5 is a schematic diagram showing the pellet extracting device of the second embodiment.

(First Embodiment) (FIGS. 1 to 4) A pellet take-out device 10 shown in FIG.
Each of the plurality of pellets 2 stuck on the wafer sheet 1 placed on the wafer is pushed up by a pellet push-up needle 13 of a pellet push-up device 12, and the pushed-up pellets 2 are sucked and taken out by a pellet suction nozzle 14, Bonding is performed at a bonding position on a substrate (not shown). The pellet supply table 11 has an XY drive unit 11A composed of a motor or the like, the pellet push-up needle 13 has a push-up drive unit 13A composed of a motor or the like, and the pellet suction nozzle 14 has an XYZ drive unit 14A composed of a motor or the like.
The adjacent pellets 2 on the wafer sheet 1 pass through a dicing line 1A (groove).

That is, the pellet removing device 10
On both sides of the pellet 2 stuck on the sheet, a pellet push-up needle 13 for pushing up the pellet 2 from the back surface of the sheet 1
And a pellet suction nozzle 1 for sucking and taking out a pellet 2
4 and the center position (X0, Y0) of the pellet 2 detected by the pellet position detecting device 20 in the X and Y directions when the pellet 2 is taken out is aligned with the push-up position by the pellet push-up needle 13. XY drive unit 1
It has a control device 15 for driving 1A.

The pellet position detecting device 20 detects the position of the pellet 2 stuck on the sheet 1, in this embodiment, the center position (X0, Y0) in the X direction and the Y direction. And a pair of a pellet position detecting device for Y direction and a pellet position detecting device for Y direction. Each of the pellet position detecting devices 20 includes an irradiation device 21, a light receiving device 22, a beam light scanning device 23, and an irradiation position detecting device 2.
4. It has a pellet position calculation device (calculation device) 25.

The irradiation device 21 irradiates the pellet 2 on the sheet 1 with beam light (parallel light including laser light). In the present embodiment, the irradiation device 21 is a laser light irradiation device, and has a laser oscillation unit 21A driven by the control device 15.

The light receiving device 22 receives the reflected light of the beam light irradiated on the pellet 2 by the irradiation device 21. Light receiving device 2
2 is a light receiving element 22B at the focal point of the dome-shaped reflecting mirror 22A.
The light receiving element 22B outputs a light reception level signal corresponding to the light reception amount, and the signal is output to the control device 15B.
Is forwarded to

The beam scanning device 23 transmits the beam light emitted from the irradiation device 21 in the transverse direction of the pellet 2 (X direction or Y direction).
Direction). The light beam scanning device 23 includes a mirror 23A that receives the light beam of the irradiation device 21 and a mirror 23A.
Is constituted by a rotation drive unit 23B such as a motor for rotating the motor forward and backward. The rotation drive unit 23B is driven by the control device 15.

The irradiation position detecting device 24 detects the irradiation position of the light beam scanned by the light beam scanning device 23 in the direction (X direction or Y direction) crossing the pellet 2. The irradiation position detection device 24 includes an encoder 24A connected to the rotation drive unit 23B of the light beam scanning device 23. The detection result of the irradiation position detection device 24 is transferred to the control device 15.

The pellet position calculating device 25 includes the control device 1
5, the detection result of the irradiation position detecting device 24 and the light receiving result of the light receiving device 22 are obtained, and the reduction (change) of the amount of received light at each position in the direction (X direction or Y direction) crossing the pellet 2 is obtained. By recognizing the position as the outer edge position of the pellet 2, the center position (X0, Y0) of the pellet 2 is detected as described below.

The procedure for detecting the position by the pellet position detecting device 20 is as follows (FIGS. 2 to 4).

(1) The irradiation device 21 irradiates a light beam.

(2) The light beam of the irradiation device 21 is scanned by the light beam scanning device 23 in the X-direction crossing the pellet shown in FIG. The beam light is reflected at each irradiation position on the surface of the pellet 2 detected by the irradiation position detection device 24. The reflected light is incident on the surface of the pellet 2 at an incident angle θ (θ1, θ2
The reflected light 3A reflected within the light receiving range of the light receiving device 22 at the same reflection angle theta as in the case of ()), and the dicing line 1A near the outer edge of the pellet 2 reflects the outer edge of the pellet 2 after being reflected on the sheet 1 The reflected light 3B is reflected by the sheet 1 having a lower reflectivity than the pellets 2 and is reflected out of the light receiving range of the light receiving device 22 on the side surface, so that the amount of reflected light 3B is attenuated. The reflected light 3A is guided to the light receiving element 22B of the light receiving device 22, and the light receiving element 22B receives the reflected light 3A.
S1 is output as a received light level signal corresponding to the received light amount of
The reflected light 3B does not reach the light receiving element 22B or is guided to the light receiving element 22B, and the light receiving element 22B outputs a light receiving amount level signal S2 corresponding to the light receiving amount (see FIG. 4).

(3) The pellet position calculating device 25 obtains the detection result of the irradiation position detecting device 24 and the light receiving result of the light receiving device 22. The light receiving result of the light receiving device 22 is output as the light receiving amount level signal of the above (2). As a result, the pellet position calculating device 25 collects the received light level signals at the respective irradiation positions in the X direction crossing the pellet 2 detected by the irradiation position detecting device 24 as shown in FIG. Then, the pellet position calculating device 25 recognizes the reduced positions XA and XB of the received light level signal in the X direction shown in FIG. 4 as outer edge positions on both sides of the pellet 2 in the X direction, and determines an intermediate point (X
0 = (XA + XB) / 2) is detected as the center position X0 of the pellet 2 in the X direction. In this embodiment, the reduced position XA of the received light level signal is determined by detecting the position immediately before the received light level signal starts to increase from the received light level signal S2 (the most reduced value). XB is
It is assumed that the position at which the received light level signal decreases from the received light level signal S1 and reaches the received light level signal S2 is detected. Similarly, Y-direction pellet position detecting device 20
Thus, the center position Y0 of the pellet 2 in the Y direction is also detected.

After the center position (X0, Y0) of the pellet 2 is detected, the control device 15 controls the pellet center position (X0, Y0).
The XY drive unit 11A is driven and controlled so that Y0) is positioned at a position pushed up by the pellet push-up needle 13. Further, the control device 15 controls the XYZ drive unit 14A to position the pellet suction nozzle 14 right above the push-up position. Thereafter, the push-up drive unit 13A and the XYZ drive unit 14
By driving and controlling A, the pellet 2 positioned at the push-up position is pushed up by the pellet push-up needle 13, and the pushed-up pellet 2 is sucked and taken out by the pellet suction nozzle 14.

According to the first embodiment, the following operations are provided.

The pellet position detecting device 20 is provided for the sheet 1
By irradiating the upper pellet 2 with the light beam and recognizing the reduced position of the reflected light amount of the light beam (the amount of light received by the light receiving device 22) at each position in the direction traversing the pellet 2 as the outer edge position of the pellet 2, 2 is detected. At this time, the reflected light applied to the sheet 1 around the outer edge of the pellet 2 is scattered out of the light receiving range of the light receiving device 22 on the side surface of the outer edge of the pellet 2 or is reflected as compared with the pellet 2. Since the light is reflected by the sheet 1 having a low efficiency, the amount of light received by the light receiving device 22 is significantly reduced from that of the reflected light generated in the surface of the pellet 2. That is, even if the surface of the pellet 2 is dirty, the amount of reflected light inside and outside the outer edge of the pellet 2, in other words, the amount of light received by the light receiving device 22 is significantly different, and the outer edge of the pellet 2, and thus the position of the pellet 2 Can be detected stably.

The pellet removing device 10 uses the pellet position detecting device 20 described above to
Of the pellet 2 by the pellet push-up needle 13 and the pellet suction nozzle 1
Since the operation of taking out the pellet 2 such as the adsorption of the pellet 2 in Step 4 can always be stabilized, the operation rate of the pellet bonding apparatus can be improved.

Laser light is used as the beam light,
Since the spot diameter (irradiation area) can be made as small as possible by passing through an objective lens, the detection range and resolution are determined by the objective lens and the number of pixels. It is possible to detect a wide field of view with high resolution,
Accurate position detection of the pellet 2 can be performed.

Since the light beam (laser light) is scanned by swinging the relatively lightweight mirror 23A by the forward / reverse rotation of the rotation drive unit 32B, the light beam can be scanned at a high speed. This makes it possible to perform the position detecting operation of the pellet 2 in a short time.

(Second Embodiment) (FIG. 5) The second embodiment of FIG. 5 is different from the first embodiment in that
Is that a pellet position detecting device 30 instead of the above is used. The pellet position detecting device 30 includes an irradiation device 31, a light receiving device 32, a beam light scanning device 33, and an irradiation position detecting device 3.
4. It has a pellet position calculation device 35 (calculation device).

The irradiation device 31 irradiates the pellet 2 on the sheet 1 with a light beam. In the present embodiment, the irradiation device 31 is a laser light irradiation device, and has a laser oscillation unit 31A driven by the control device 15.

The light receiving device 32 receives the reflected light of the beam light emitted from the irradiation device 31 to the pellet 2. Light receiving device 3
2 includes a light receiving element 32A.
2A outputs a light reception level signal corresponding to the light reception,
The signal is transferred to the control device 15.

The light beam scanning device 33 transmits the light beam irradiated by the irradiation device 31 in the transverse direction of the pellet 2 (X direction and Y direction).
Direction). The light beam scanning device 33 includes a scanning frame 33A that supports the irradiation device 31 and the XY driving device 3.
At 6, the camera can be moved in the XY directions. The scanning frame 33A also supports the light receiving device 32. XY drive device 36
Has an X drive section 36A and a Y drive section 36B, and each drive section has an X direction feed screw 36C and a Y direction feed screw 36D,
The drive units 36A and 36B are driven and controlled by the control device 15.

The irradiation position detecting device 34 detects the irradiation position of the light beam scanned by the light beam scanning device 33 in the direction crossing the pellet 2 (X direction and Y direction). The irradiation position detecting device 34 is an X driving unit 36 of the light beam scanning device 33.
A, encoders 34A, 3 connected to Y drive unit 36B
4B. The detection result of the irradiation position detection device 34 is transferred to the control device 15.

The pellet position calculating device 35 includes the control device 1
5, the detection result of the irradiation position detecting device 34 and the light receiving result of the light receiving device 32 are obtained, and the reduced position of the received light amount at each position in the direction (X direction and Y direction) crossing the pellet 2 is determined. The center position (X0, Y0) of the pellet 2 is detected by recognizing the center position of the pellet 2 as the outer edge position.

Thereafter, the pellet 2 whose center position (X0, Y0) is detected is taken out by the same operation as that described in the first embodiment.

The second embodiment has the following operation.

The pellet position detecting device 30 detects the sheet 1
The upper pellet 2 is irradiated with the light beam, and the reduced position of the reflected light amount of the light beam (the received light level signal output from the light receiving device 32) at each position in the direction crossing the pellet 2 is recognized as the outer edge position of the pellet 2. Thus, the position of the pellet 2 is detected. At this time, the reflected light applied to the sheet 1 in the vicinity of the outer edge of the pellet 2 is reflected by the sheet 1 having a lower reflectance than that of the pellet 2. Is significantly reduced from that of the reflected light generated in the surface of the pellet 2. That is, even if there is dirt on the surface of the pellet 2,
The amount of reflected light inside and outside the outer edge of the pellet 2, in other words, the amount of light received by the light receiving device 32 is significantly different, and the outer edge position of the pellet 2, and thus the position of the pellet 2, can be detected stably.

The pellet removing device 10 uses the pellet position detecting device 30 described above to
Of the pellet 2 by the pellet push-up needle 13 and the pellet suction nozzle 1
Since the operation of taking out the pellet 2 such as the adsorption of the pellet 2 in Step 4 can always be stabilized, the operation rate of the pellet bonding apparatus can be improved.

Laser light is used as the beam light,
Since the spot diameter (irradiation area) can be made as small as possible by passing through an objective lens, the detection range and resolution are determined by the objective lens and the number of pixels. It is possible to detect a wide field of view with high resolution,
Accurate position detection of the pellet 2 can be performed.

The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration of the present invention is not limited to this embodiment, and the design can be changed without departing from the scope of the present invention. The present invention is also included in the present invention. For example, in the practice of the present invention, when recognizing the outer edge position of the pellet by the pellet position calculating device, the standard light receiving amount when receiving the reflected light in the surface of the pellet, and the sheet on the side of the outer edge of the pellet. A threshold value may be provided between the reflected light and the standard received light amount when the reflected light is received. The amount of received light exceeding the threshold value is considered to be due to reflected light inside the surface of the pellet, and the amount of received light below the threshold value is considered to be due to reflected light outside the surface of the pellet.

In the above two embodiments, the position where the amount of received light is reduced is recognized as the outer edge position of the pellet 2 on the assumption that the reflectance of the sheet 1 is lower than that of the pellet 2. When the reflectance of the sheet 1 is higher than that of the pellet 2, the position where the amount of received light increases is recognized as the outer edge position of the pellet.

In the two embodiments described above, the case where the center position of the pellet 2 is detected from the reduced positions XA and XB of the light receiving level signal of the light receiving element 22B has been described. pattern,
That is, by using the pattern shape of the output signal when scanning in the transverse direction (X direction or Y direction) of the pellet 2, it is possible to detect the state of the pellet, such as chipping of the pellet or adhesion of foreign matter.

Hereinafter, this point will be described.

FIG. 6 is a schematic diagram for detecting chipping of the pellet 2. As shown in FIG.
Is missing on the right side of the mark, and the portion 2a indicated by the broken line is missing, it is possible to detect this missing as follows. The same device configuration as that of FIG. 1 can be used, and the control device 15
(The width LX0 of the pellet 2 in the X direction and the width LY0 of the pellet 2 in the Y direction).

That is, as in the first embodiment, after performing the procedures (1) and (2) shown in the first embodiment, in the procedure (3), as shown in FIG. The level signal of the light receiving amount of the light receiving element 22B at each irradiation position of the light is collected. Then, the reduced positions XA ′ and XB ′ of the received light level signal in the X direction are recognized by the pellet position calculating device 25. Then, when the reduction position of the received light level signal is recognized, the width of the pellet 2 in the X direction (LX1 = XB'-X
A ′) is obtained and compared with the width dimension LX0 of the pellet 2 in the X direction that is set in the control device 15 in advance.

In this case, the width LX1 of the pellet 2
Is calculated, and the width dimensions LX0 and LX1 of the pellet 2 are compared, for example, by the pellet position calculation device 25.

As a result of this comparison, if LX0> LX1 or LX0 <LX1, it is determined that the pellet 2 is in a defective state, the subsequent processing on the pellet 2 is interrupted, and the processing of the next pellet 2 is started. Transition. On the other hand, LX0
= LX1 (actually, the allowable value is considered to some extent), the pellet 2 is determined to be normal, and the X of the pellet 2 is determined.
After the center position X0 in the direction is determined, the center position Y0 of the pellet 2 in the Y direction is detected by the pellet position detecting device 20 for the Y direction.
Is detected.

In the case of the pellet 2 shown in FIG. 6A, since the right side of the pellet 2 is chipped, LX0
> LX1, the pellet 2 is determined to be in a defective state, and the subsequent processing on the pellet 2 is interrupted.

By doing so, the following operation is obtained in addition to the operation according to the first embodiment.

That is, by comparing the width of the normal pellet 2 with the width of the detected pellet 2, the defective pellet 2 having a chip or the like can be reliably found and removed. Pellets with chips 2
Can be prevented from being produced due to the removal of the defective products, and as a result, the yield of non-defective products can be improved.

FIG. 7A shows a case in which the presence or absence of foreign matter 2b such as silicon dust on the surface of the pellet 2 is detected. In this case as well, the same device configuration as that of FIG. 1 can be used, and the control device 15 receives light when scanning the pellet 2 in a normal state (no foreign matter adheres to the surface) as shown in FIG. It has information on the pattern of the received light level signal of the element 22B.

In this case, when the light beam is scanned in the X direction, a light receiving amount level signal of the light receiving element 22B as shown in FIG. Then, the pattern of the received light level signal collected this time is compared with the pattern of the received light level signal of the pellet 2 in the normal state stored in the control device 15. As a result of this comparison, if the pattern of the light reception level signal stored in advance does not match the pattern of the light reception level signal collected this time, the foreign matter 2b
Is determined to be present, and since there is a possibility that such a pellet 2 does not operate normally, the subsequent processing is interrupted and the processing proceeds to the processing of the next pellet. On the other hand, when the stored pattern of the received light amount level signal matches the pattern of the received light amount level signal collected this time, it is determined that the foreign matter 2b is not attached to the surface of the pellet 2, and the X of the pellet 2 is determined.
After the center position X0 in the direction is determined, the center position Y0 of the pellet 2 in the Y direction is detected by the pellet position detecting device 20 for the Y direction.
Is detected.

In this case, the comparison between the pattern of the received light level signal collected this time and the pattern of the received light level signal of the pellet 2 in the normal state stored in the controller 15 is performed by, for example, the pellet position calculator 25. Done.

In the case of the pellet 2 shown in FIG. 7A, on the surface of the pellet 2, the reflectivity of the light beam is different between a portion corresponding to the foreign material 2b and a portion having no foreign material (normal portion). The pattern of the collected light reception level signal does not match the pattern of the light reception level signal stored in the control device 15, the pellet 2 is determined to be defective, and the subsequent processing on the pellet 2 is interrupted.

In this manner, the following operation is obtained in addition to the operation of the first embodiment.

That is, by comparing the pattern of the light receiving level signal of the light receiving element 22B obtained by scanning the normal pellet 2 with the pattern of the light receiving level signal collected this time, the abnormal pellet to which the foreign matter 2b or the like has adhered. 2 can be reliably detected and eliminated, so that the foreign matter 2b
Production of defective products caused by taking out the pellets 2 with the adhered particles can be prevented beforehand, and as a result, the yield of non-defective products can be improved.

Further, in the above-described embodiment, the scanning of the light beam may be partially performed in each of the X direction and the Y direction of the pellet 2, or the scanning of the pellet 2 may be performed.
May be scanned over the entire surface.

In the above description, the placing member for the pellets 2 is the wafer sheet 1 and the pellets 2 are adhered on the sheet 1. However, the placing members other than the sheet 1, for example, those placed on a tray Is also applicable.

[0064]

According to the present invention, stable detection of pellets can be realized.

Further, according to the present invention, the operation of removing the pellets by the pellet removing device can be stabilized, and the operation rate of the pellet bonding device can be improved.

[Brief description of the drawings]

FIG. 1 is a schematic view showing a pellet removing device according to a first embodiment.

FIG. 2 is a schematic diagram showing an irradiation state of a light beam.

FIG. 3 is a schematic diagram showing a scanning state of a light beam.

FIG. 4 is a schematic diagram showing a change in a received light level signal of a light receiving element.

FIG. 5 is a schematic view showing a pellet removing device according to a second embodiment.

FIG. 6A is a plan view showing a chip having a chip, and FIG. 6B is a schematic diagram showing a change in a received light level signal of a light receiving element when a light beam is scanned on the chip having a chip. FIG.

FIG. 7A is a plan view showing a pellet having a foreign substance adhered to the surface, and FIG. 7B is a plan view showing a light receiving level of the light receiving element when a beam light is scanned on the pellet having the foreign substance adhered to the surface. FIG. 4 is a schematic diagram illustrating a change in a signal.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 sheet 2 pellet 10 pellet take-out device 13 pellet push-up needle 14 pellet suction nozzle 15 control device 20, 30 pellet position detection device 21, 31 irradiation device 22, 32 light receiving device 23, 33 beam light scanning device 24, 34 irradiation position detection device 25, 35 Pellet position calculation device (calculation device)

Continued on front page F term (reference) 2F065 AA12 CC19 DD04 FF01 FF44 GG04 HH04 JJ01 LL13 LL19 MM16 QQ28 UU05 2G075 CA38 DA15 FA12 FC03 FC14 GA09

Claims (4)

[Claims] 1. A pellet detecting method for detecting a pellet mounted on a mounting member, wherein the beam light scans the pellet mounted on the mounting member in a transverse direction of the pellet and reflects the light beam. A pellet detection method, comprising: receiving light; and detecting a state of the pellet based on an irradiation position of the light beam and an amount of reflected light from the irradiation position. 2. A pellet detecting device for detecting pellets placed on a mounting member, wherein the irradiation device irradiates the pellets mounted on the mounting member with a beam light; A light receiving device that receives the reflected light of the beam light, a beam light scanning device that scans the beam light irradiated by the irradiation device in a transverse direction of the pellet, and a light beam that is scanned by the beam light scanning device. An irradiation position detection device for detecting an irradiation position in a transverse direction; and a detection result of the irradiation position detection device and a light reception result of the light receiving device. An arithmetic unit for recognizing the state and detecting the state of the pellet based on the recognition result. 3. A pellet detecting device for detecting a pellet mounted on a mounting member, wherein the irradiation device irradiates the pellet mounted on the mounting member with a beam light; A light receiving device that receives the reflected light of the beam light, a beam light scanning device that scans the beam light irradiated by the irradiation device in a transverse direction of the pellet, and a light beam that is scanned by the beam light scanning device. An irradiation position detection device for detecting an irradiation position in a transverse direction; and a detection result of the irradiation position detection device and a light reception result of the light receiving device. A pellet detecting device, comprising: an arithmetic unit that detects a position of a pellet by recognizing the position as an outer edge position of the pellet. 4. A pellet unloading device provided with the pellet detecting device according to claim 3, wherein the pellet is stuck on a sheet serving as a mounting member, and the pellet is pushed up from a back surface of the sheet. A pellet push-up needle, and a pellet suction nozzle that sucks and takes out the pellet pushed up by the pellet push-up needle is arranged, and based on a position of the pellet detected by the pellet detection device, the pellet, the pellet push-up needle, and A pellet removing device comprising a control device for controlling a relative position of a pellet suction nozzle.