JP2002090759A - Apparatus and method for manufacturing liquid crystal display element - Google Patents

Abstract

(57) [Problem] To provide a manufacturing apparatus and a manufacturing method of a liquid crystal display element which can use a mask even in a vacuum atmosphere and have no damage to a substrate. SOLUTION: A mask 5 is screwed and fixed to a lower surface plate 1a, and an adhesive member 5b is embedded in a recess 5a provided in a portion corresponding to a liquid crystal display area of a lower substrate 2a. The lower substrate 2 is placed on the mask 5 by the adhesive member 5b.
a is adhesively fixed. The lower surface plate 1a is provided on the upper substrate 2b by the Z-axis drive source 10 in a state where the power of the electrostatic chuck 8 provided on the upper surface plate 1b is turned on, and the upper substrate 2b is electrostatically attracted and fixed to the upper surface plate 1b. The O-ring 9 is moved upward until it contacts the O-ring 9. Both surface plates 1a, 1b and O-ring 9
After the surroundings of the substrates surrounded by are set to a vacuum atmosphere, the two substrates 2a and 2b are aligned by the XYθ-axis driving source 11, and the lower platen 1a is moved upward to move the substrates 2a and 2b.
And stick them together.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for manufacturing a liquid crystal display device, in which a pair of substrates are superimposed, and the two substrates are bonded to each other with a pair of facing plates.

[0002]

2. Description of the Related Art A liquid crystal display device is manufactured by laminating a pair of substrates on each of which a display electrode, an alignment film and the like are formed, and sealing a liquid crystal between the substrates. In the substrate bonding step, a pair of substrates is held on a surface plate, bonded while performing horizontal positional alignment, pressurized to a predetermined cell gap, and the temporarily fixed sealing material is cured. In the subsequent step, sealing is performed by pressing to the cell gap of the product specification.

FIG. 5 is a diagram showing a configuration of a conventional apparatus for manufacturing a liquid crystal display element. The substrates 2a and 2b are a pair of surface plates 1.
The substrates are held by vacuum suction at a and 1b, and the substrates are bonded by applying a load by performing horizontal position alignment using the XYθ-axis drive source 10 and the Z-axis drive source 11. At this time, as shown in FIG. 6, when small foreign matter 3 such as cullet exists on the lower surface plate 1a, a raised portion 4 centering on the foreign matter portion is formed on the lower substrate 2a. If horizontal alignment is performed in the presence of the raised portion 4, there is a problem that the bonding surface is damaged.

On the other hand, there has been proposed a method and apparatus for bonding substrates as shown in FIG. 7 and a method for manufacturing a liquid crystal display element. In this apparatus and method, a mask 5 having a recess 5a is placed on a lower platen 1a, a lower substrate 2a is placed on the mask 5, and both substrates 2a and 2b are bonded to each other. The substrate 2a is formed by the recess 5a formed in the mask 5.
Since the surface facing the mask 5 does not contact the mask 5, in the region where the recess 5a faces the substrate 2a, even if there is foreign matter between the mask 5 and the substrate 2a, the foreign matter is Go into 5a. This can prevent the substrate from being damaged at the time of bonding. The mask 5 is fixed to the lower surface plate 1a by vacuum suction, and the lower substrate 2a is fixed to the mask 5 by vacuum suction through a through hole formed in the mask 5. Therefore, even when the size of the substrate and the shape of the liquid crystal display area are changed,
This can be dealt with simply by replacing the mask 5.

The method of manufacturing a liquid crystal panel described in Japanese Patent Application Laid-Open No. 59-17533 discloses a liquid crystal panel arranged on a first support member in a vacuum chamber. By bonding the thin film held through the adhesive member under the body, the thin film is prevented from being damaged or broken by the bonding pressure.

[0006]

In the conventional process for manufacturing a liquid crystal display element, a substrate cutting step, a liquid crystal injection and a sealing step are required following the above-mentioned substrate bonding step. A manufacturing method called a bonding injection method (or a drop injection method) has been proposed.

FIG. 8 is a view showing an apparatus for manufacturing a liquid crystal display element by a bonding injection method. The device is a pair of surface plates 1a,
1b and holds a pair of substrates 2a and 2b. A certain amount of liquid crystal 6 is applied to one substrate 2a, and a sealing material is applied to the other substrate 2b, and spacers are scattered (not shown). Vacuum is drawn by the vacuum pump 12 to form the vacuum chamber 7. Horizontal position alignment is performed using the XYθ-axis drive source 10 and the Z-axis drive source 11, and the substrates 2a and 2b are bonded with a predetermined load. Furthermore, press to the cell gap of the product specification.

As described above, since the bonding is performed in a vacuum atmosphere in the bonding injection method, when the manufacturing apparatus shown in FIG. 7 is applied, the mask 5 and the substrates 2a and 2b are used.
Cannot be fixed by vacuum suction, so that there is a problem that horizontal alignment cannot be performed.

In the bonding and injection method, the substrate is pressed to the cell gap of the product specification in the same process, so that a press with a load larger than the conventional load is required. At this time, there is a problem that the substrate is deformed due to the recess 5a formed in the mask 5, and a uniform cell gap cannot be obtained.

An object of the present invention is to provide a manufacturing apparatus and a manufacturing method of a liquid crystal display element which can use a mask even in a vacuum atmosphere and have no damage to a substrate.

[0011]

SUMMARY OF THE INVENTION The present invention relates to an apparatus for manufacturing a liquid crystal display element which is manufactured by laminating a pair of substrates and laminating the two substrates with a pair of facing plates facing each other. A mask having rigidity and a concave portion provided in a portion corresponding to a liquid crystal display area of the substrate, having an adhesive and soft property in the concave portion of the mask, and holding the substrate by adhesive force. A manufacturing apparatus for a liquid crystal display element, comprising:

According to the present invention, since the concave portion of the mask has an adhesive member having adhesiveness and softness and holding the substrate by adhesive force, the substrate is adhesively fixed and horizontal displacement is prevented. In addition, even if a foreign substance exists between the substrate and the surface plate, the substrate can be prevented from being damaged.

Further, the present invention is characterized in that there is provided a means for applying a vacuum atmosphere around the substrate and a coating means for coating a liquid crystal on one of the substrates held by the surface plate.

According to the present invention, since there is provided means for applying a vacuum atmosphere to the periphery of the substrate and application means for applying liquid crystal to one of the substrates held on the surface plate, the mask is provided even in the vacuum atmosphere. Can be used, and damage to the substrate can be prevented.

Further, the present invention is characterized in that, when bonding both substrates while sandwiching them between a pair of platens, a load having a magnitude commensurate with the bonding force is applied from the back side of the adhesive member.

According to the present invention, since a load having a magnitude commensurate with the force for bonding the substrates is applied from the back side of the adhesive member, it is possible to prevent the deformation of the substrates caused during the bonding. Further, the present invention is characterized in that the load applied from the back side is generated using a pressurized gas.

According to the present invention, since the load is generated using the pressurized gas, the load is uniformly applied to the back side of the adhesive member, and the deformation of the substrate can be prevented.

The present invention also relates to a method for manufacturing a liquid crystal display element in which a pair of substrates are overlapped, and the two substrates are bonded to each other with a pair of opposed surface plates. A recess is formed in a corresponding portion, a mask provided with an adhesive member having adhesiveness and softness in the recess is provided on one surface plate, and a display area portion of one substrate is adhered to the adhesive member, A method for manufacturing a liquid crystal display element, characterized in that a peripheral portion of a display area is supported by a mask and held on one surface plate, and the other substrate is held on the other surface plate and both substrates are bonded to each other.

According to the present invention, a mask can be used even in a vacuum atmosphere, and a liquid crystal display element having no damage to a substrate can be manufactured.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a diagram showing a configuration of a liquid crystal display element manufacturing apparatus (also simply referred to as "manufacturing apparatus") according to an embodiment of the present invention. The manufacturing apparatus includes a pair of platens 1
a, 1b, a mask 5 having rigidity and a recess 5a formed therein,
Adhesive member 5b having flexibility and embedded in recess 5a, electrostatic chuck 8, O (o) ring 9, XYθ axis driving source 10
And a Z-axis drive source 11.

A method for manufacturing a liquid crystal display element using the manufacturing apparatus having the above configuration will be described. First, the upper substrate 2b is fixed to the upper platen 1b under atmospheric pressure by vacuum suction using a vacuum suction device such as a vacuum pump (not shown).
b, on a side surface facing the lower substrate 2a, in a region substantially equal to the liquid crystal display area, by a liquid crystal coating means (not shown),
Liquid crystal 6 is applied. A mask 5 is fixed to the lower surface plate 1a by screws, and an adhesive member 5b is embedded in a recess 5a provided in a portion corresponding to a liquid crystal display area of the lower substrate 2a. The lower substrate 2a is adhesively fixed on the mask 5 by the adhesive member 5b, and a sealing material is applied and spacers are spread on a side surface of the lower substrate 2b facing the upper substrate 2a.

Next, the lower platen 1a is brought into contact with the O-ring 9 provided on the upper platen 1b. As a result, as shown in FIG. 2, the periphery of the substrate surrounded by the stools 1a and 1b, which are sealing means, and the O-ring 9 is sealed, and the periphery of the substrate is evacuated using a vacuum suction machine such as a vacuum pump (not shown). Make the atmosphere.
The upper platen 1b is moved back and forth, right and left, and rotated by the XYθ-axis drive source 11 to align the positions of the substrates 2a and 2b.
The lower platen 1a is moved upward to bond the two substrates 2a and 2b together. An additional load is applied by the Z-axis drive source 10 to press to the product-specific cell gap. The portion of the lower substrate 2a in contact with the recess 5a may be deformed by the additional load. Therefore,
By applying a load of a magnitude proportional to the bonding force from the back side of the adhesive member 5b embedded in the recess 5a, the load applied to the substrate can be offset to prevent deformation of the lower substrate 2a.

FIG. 3 is an enlarged view of the recess 5a formed in the mask 5. The recess 5a is divided into a portion facing the lower substrate 2a and a portion facing the lower platen 1a by a thin plate 5c that can move up and down while maintaining the airtightness. A closed space 5e surrounded by the thin plate 5c and the lower half of the recess 5a is formed in a portion facing the lower surface plate 1a, and a ventilation hole 5f for introducing gas from the outside into the closed space 5e is provided with the lower surface plate 1a. From the surface in contact with the closed space 5e. An adhesive member 5b is bonded to and embedded in the thin plate 5c at a portion facing the lower substrate 2a, and a protrusion 5d is formed so that the thin plate 5c does not come out of the recess 5a.

When the Z-axis drive source 10 is moved upward for bonding the substrates, a force corresponding to the force for bonding the substrates is applied to the adhesive member 5b from the lower substrate 2a toward the lower platen 1a. At this time, a pressurized gas is sent from a compressor (not shown) or the like to the closed space 5e through the ventilation hole 5f, and as shown in FIG. A load proportional to the bonding force is generated, and deformation of the substrate can be prevented.

[0025]

As described above, according to the present invention, the substrate is fixed by the adhesive member to prevent the displacement in the horizontal direction, and the substrate is not damaged even if there is a foreign substance between the substrate and the surface plate. Can be prevented.

Further, according to the present invention, a mask can be used even in a vacuum atmosphere, and damage to a substrate can be prevented.

Further, according to the present invention, since a load having a magnitude commensurate with the force for bonding the substrates is applied from the back side of the adhesive member, it is possible to prevent the substrate from being deformed at the time of bonding.

Further, according to the present invention, a load is uniformly applied to the back side of the adhesive member, and the deformation of the substrate can be prevented.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a manufacturing apparatus of a liquid crystal display element according to an embodiment of the present invention.

FIG. 2 is a diagram showing the periphery of a sealed substrate.

FIG. 3 is an enlarged view of a recess 5a formed in the mask 5.

FIG. 4 is a diagram illustrating a state in which a load is applied to an adhesive member 5b by a pressurized gas.

FIG. 5 is a diagram showing a configuration of a conventional apparatus for manufacturing a liquid crystal display element.

FIG. 6 is a diagram showing a state of the surface plates 1a and 1b and substrates 2a and 2b when a foreign substance 3 exists.

FIG. 7 is a diagram showing a configuration of a liquid crystal display element manufacturing apparatus using a mask 5.

FIG. 8 is a view showing an apparatus for manufacturing a liquid crystal display element by a bonding injection method.

[Explanation of symbols]

 Reference Signs 1a, 1b Surface Plates 2a, 2b Substrate 5 Mask 5a Depression 5b Adhesive Member 5c Thin Plate 5d Projection 5e Sealed Space 5f Vent 6 Liquid Crystal 7 Vacuum Chamber 8 Electrostatic Chuck 9 O (O) Ring 10 XYθ Axis Drive Source 11 Z axis drive source 12 Vacuum pump

Claims (5)

[Claims] 1. A manufacturing apparatus for a liquid crystal display element, wherein a pair of substrates are laminated and bonded to each other with a pair of facing plates facing each other. A mask having a recess in a portion corresponding to the liquid crystal display area of
An apparatus for manufacturing a liquid crystal display device, comprising: an adhesive member having adhesiveness and softness in the recess of the mask and holding a substrate by adhesive force. 2. The liquid crystal device according to claim 1, further comprising: means for applying a vacuum atmosphere around the substrate; and application means for applying a liquid crystal to one of the substrates held on the surface plate. Display device manufacturing equipment. 3. The liquid crystal according to claim 1, wherein when the two substrates are sandwiched between a pair of base plates, a load having a magnitude commensurate with the bonding force is applied from the back side of the adhesive member. Display device manufacturing equipment. 4. The apparatus according to claim 1, wherein the load applied from the back side is generated by using a pressurized gas. 5. A method for manufacturing a liquid crystal display element, wherein a pair of substrates are overlapped, and the two substrates are bonded to each other with a pair of facing plates, the portion having rigidity and corresponding to a liquid crystal display area of the substrate. A recess is formed in the recess, a mask provided with an adhesive member having adhesiveness and softness is provided on one surface plate, and a display area portion of one substrate is adhered to the adhesive member, and a A method for manufacturing a liquid crystal display element, comprising: supporting a peripheral portion on a mask, holding the substrate on one surface plate, holding the other substrate on the other surface plate, and bonding both substrates together.