JP2002071654A - Scanner - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily align a scan head in a scanner (a non-destructive inspection device for flaw detection) constituted to allow the scan head to scan along the surface of an inspected body. SOLUTION: The scan head 12 comprises an ultrasonic probe 88 disposed in proximity to the surface of the inspected body 2; a rotor mounting plate 98 for supporting the ultrasonic probe 88 rotatably around a point P together with a probe housing 90 and a probe holder 92; a bolt 108 for fixing the ultrasonic probe 88 in a specified angle attitude to the rotor mounting plate 98; and a space adjusting mechanism 100 for adjusting a space between the lower face of the ultrasonic probe 88 and the surface of the inspected body 2. The lower end face 88a of the ultrasonic probe 88 is brought into close contact with the surface of the inspected body 2 and fixed in this state to the rotor mounting plate 98 by the bolt 108 together with the ultrasonic probe 88. The ultrasonic probe 88 is then displaced upward by a specified quantity by the space adjusting mechanism 100. The lower end face 88a of the ultrasonic probe 88 can thereby be easily positioned in the parallel position relation to the surface of the inspected body 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scanning device configured to scan a scanning head along a surface of a scanned object.

[0002]

2. Description of the Related Art In general, in a nondestructive inspection device for flaw detection, an ultrasonic probe is arranged so as to be close to an object to be inspected.
The scanning head supporting the ultrasonic probe is configured to scan along the surface of the inspection object. that time,
It is important for the scanning head to scan with a sufficient degree of parallelism between the ultrasonic probe and the object to be inspected in order to perform the inspection with high accuracy.

For this reason, a conventional nondestructive inspection device for flaw detection has a structure provided with a scanning head as shown in FIG.

The illustrated scanning head 200 is an ultrasonic probe 2.
02 is supported and supported such that the lower end surface 202a of the ultrasonic probe 202 projects slightly downward from the lower end surface 200a of the scanning head 200. At the four corners of the lower end surface 200a of the scanning head 200, adjustment screws 204 having projections 204a projecting downward are attached. Then, the four adjusting screws 20 are set so that the lower end surface 202a of the ultrasonic probe 202 and the surface of the device under test 2 face each other in parallel at a predetermined minute interval.
By adjusting some of the protrusions 204a by turning some of the four, the alignment of the scanning head 200 is performed.

[0005]

However, in the above-mentioned conventional nondestructive inspection apparatus for flaw detection, the ultrasonic probe 20
In order to increase the parallelism between the lower end surface 202a of the test piece 2 and the surface of the test object 2 to a required level, it is necessary to repeat the adjustment work of the adjustment screw 204 many times. There is a problem that it becomes very troublesome.

Such a problem can occur not only in the case of a nondestructive inspection device for flaw detection but also in the case of a scanning device generally configured to scan a scanning head along the surface of a scanned object. .

The present invention has been made in view of such circumstances, and in a scanning apparatus configured to scan a scanning head along a surface of a scanned body, alignment of the scanning head is easily performed. It is an object of the present invention to provide a scanning device that can perform the scanning.

[0008]

According to the present invention, the above object is achieved by devising a support structure for a head body. That is, a scanning device according to the present invention is a scanning device configured to scan a scanning head along a surface of a scanned object, wherein the scanning head is disposed in proximity to the surface of the scanned object. A body support member that supports the head body so as to be rotatable about a predetermined point, a body fixing unit that fixes the head body to the body support member at a predetermined angle, and a tip end surface of the head body. Interval adjusting means for adjusting the interval with the surface of the object to be scanned.

The use of the "scanning device" is not particularly limited as long as it is configured to scan the scanning head along the surface of the object to be scanned. An inspection apparatus, a plotter, an image scanner, a laser processing apparatus, or the like can be used. The specific configuration of the “interval adjusting unit” is not particularly limited as long as the interval between the tip surface of the head main body and the surface of the scanned object can be adjusted.

[0010]

As described above, in the scanning apparatus according to the present invention, the scanning head has a head main body arranged close to the surface of the object to be scanned, and the head main body is rotated around a predetermined point. A main body supporting member for supporting the main body, a main body fixing means for fixing the head main body to the main body supporting member at a predetermined angular posture, and an interval adjusting means for adjusting an interval between the tip end surface of the head main body and the surface of the scanned object. With the provision, the following operation and effect can be obtained.

That is, the front end surface of the head main body is brought into contact with the surface of the object to be scanned (for example, the front end surface of the head main body is brought into close contact with the surface of the object to be scanned), and the main body fixing means holds the head main body in this angular posture Is fixed to the main body support member, and thereafter the head main body is displaced upward by a predetermined amount by the interval adjusting means, so that the head main body is positioned in a predetermined positional relationship with respect to the scanned object (for example, (Positioning the leading end surface in a positional relationship parallel to the surface of the scanned object) can be easily performed.

Therefore, according to the present invention, alignment of the scanning head can be easily performed in the scanning device configured to scan the scanning head along the surface of the object to be scanned.

[0013] In the above configuration, the interval adjusting means may include:
The configuration may include a ball in contact with the surface of the scanned object, a ball support member rotatably supporting the ball, and a vertical displacement mechanism for vertically displacing the ball support member with respect to the head body. For example, the distance between the tip end surface of the head main body and the surface of the scanned object can be accurately adjusted with a simple configuration.

In such a case, the ball rolls on the surface of the object to be scanned with the scanning of the scanning head. The rolling trajectory may hinder the maximum performance of the scanning device.
Therefore, if a plurality of the balls are provided, it is possible to easily prevent the above-mentioned trouble from occurring by appropriately adjusting the arrangement.

As described above, the use of the scanning device according to the present invention is not particularly limited. However, when the scanning device is a non-destructive inspection device for flaw detection equipped with an ultrasonic probe, It is particularly effective to employ the above-described configuration, since maintaining the positional relationship between the scanning target and the scanning target accurately is extremely important for improving the inspection accuracy.

[0016]

Embodiments of the present invention will be described below.

FIG. 1 is a front view showing a scanning device according to an embodiment of the present invention, and FIG. 2 is a plan view thereof.
FIGS. 3 and 4 show parts III and IV of FIGS.
5 and 6 are a left side detailed view and a right side detailed view showing the scanning device.

As shown in these figures, a scanning device 10 according to the present embodiment is a flaw detector for inspecting the surface or inside of a test object 2 made of a ferromagnetic material such as a steel plate for a flaw or thickness. This is a destructive inspection device, and is configured to scan a scanning head 12 having an ultrasonic probe (which will be described later) along the surface of the inspection object 2.

The scanning device 10 includes a pair of front and rear shafts 14 arranged parallel to each other at a predetermined interval, and two pairs of front and rear magnet rollers 16 fixed to both left and right ends of each of the shafts 14. Shaft driving means 18 for rotating the shaft 14, a slider 20 supported by the shafts 14 while supporting the scanning head 12, and movable in the direction of the axis Ax of the shafts 14; And a slider driving means 22 for moving the slider in the direction.

Brackets 24A and 24B for supporting the shafts 14 are provided near the left and right ends of the pair of front and rear shafts 14, respectively. The brackets 24A and 24B are provided above the brackets 24A and 24B, respectively.
A, 24Ba for grasping A, 24B by hand
Are formed.

A slide guide 2 extending in the direction of the axis Ax is provided near the upper side of the shaft 14 on the front side (front side).
6 are provided. The slide guide 26 is fixed at its left end to a gear box 40 of the shaft drive means 18 via a guide holder 28A, and at its right end to a right bracket 24B via a guide holder 28B. On the other hand, the back side (back side)
A rack holder 30 extending in the direction of the axis Ax is provided near the upper part of the shaft 14. The rack holder 30 has brackets 24A, 2
4B. And this rack holder 30
A rack 32 extending in the direction of the axis Ax is fixed to a front surface of the rack holder 30. Proximity dogs 70 (which will be described later) are attached to portions near both right and left ends of the rack holder 30. FIG. 7 shows the shaft driving means 1.
FIG. 7 is a sectional view taken along line VII-VII of FIG.

As shown in FIGS. 5 and 5, the shaft driving means 18 includes a pulse motor 34, a gear unit 36, and a rotary encoder 38, and is mounted on the left bracket 24A.

The gear unit 36 has a plurality of gears 42, 44, 46, 48 and 50 housed in a gear box 40. And this shaft driving means 18
, The driving force of the pulse motor 34 is transmitted to both shafts 14 via a reduction gear train composed of gears 42, 44, 46 and 48 connected to the output shaft 34a.

Each of the shafts 14 has a left end formed as a small diameter portion 14a, and is rotatably supported by a gear box 40 and a bracket 24A via a bearing 52 at two places of the small diameter portion 14a. The magnet roller 16 is fixed to the distal end of the small diameter portion 14a via an aluminum outer shaft 54. This fixation is performed by affixing a screw 56 screwed into the outer shaft 54 to a concave flat surface formed in the small-diameter portion 14a and tightening the same, whereby the magnet roller 16 and the outer shaft 54 are detachably attached and replaced as a unit. It is possible to do.

The magnet roller 16 includes a cylindrical magnet (permanent magnet) 16A and the magnet 16A.
1 having a larger diameter than the magnet 16A provided on both sides of
A pair of ferromagnetic rings 16B made of steel are fixed to the outer shaft 54 by press fitting. The other positions of the magnet roller 16 are also screwed and fixed to the small diameter portion 14a at the end of the shaft 14 via the outer shaft 54.

The rotation amount of the pulse motor 34 is
0, and is detected by the rotary encoder 38, and according to the detection result, the pulse motor 3
The feed pitch of the scanning head 12 in the front-rear direction in accordance with the rotation of No. 4 is controlled. 8 and 9 are a front view and a plan view showing the slider 20 and the slider driving means 22 in detail, and FIG. 10 is a sectional view taken along line XX of FIG.

As shown in these figures, the slider 20 and the slider driving means 22 are provided with a pair of front and rear shafts 14.
It is located between.

The slider 20 includes a slide guide 26
, A ball slider 58 slidably engaged in the direction of the axis Ax, a slider block 60 fixed to the rear surface of the ball slider 58, and a head holder 62 fixed to the right side of the slider block 60. The scanning head 1 in the head holder 62.
2 is supported.

A plunger holder 64 is fixed to the upper end surface of the slider block 60. The plunger holder 64 elastically presses the head holder 62 from above, so that the scanning head 12 inadvertently floats. Is supported.

A proximity switch 68 projecting rearward is attached to the head holder 62. When the slider 20 moves to a position facing the proximity dog 70 (see FIGS. 2 and 4) in the direction of the axis Ax, the proximity switch 68 magnetically detects the position and stops the driving of the slider driving means 22. This prevents the slider 20 from moving more than necessary in the direction of the axis Ax.

On the other hand, the slider driving means 22 includes a motor unit 72 and a motor bracket fixed to the left side surface of the slider block 60 in a state where the motor unit 72 is supported so that its output shaft 72a faces downward. 74, a pinion 76 attached to the output shaft 72a of the motor unit 72 and meshing with the rack 32;
A shield cover 78 and a shield cap 80 for electromagnetically shielding the motor unit 72 are provided. The motor unit 72 includes a DC motor 82,
A reduction gear train 84 and a rotary encoder 86 are provided. FIG. 11 and FIG.
FIG. 1 is a front partial cross-sectional view and a plan view showing
3 is a right side view thereof.

As shown in these figures, the scanning head 12
Is an oblique incidence type ultrasonic probe 88 (head body) that transmits an ultrasonic wave obliquely downward and rightward to the inspected object 2 in a state where the ultrasonic probe 88 is disposed close to the surface of the inspected object 2; A probe housing 90 for accommodating and supporting the ultrasonic probe 88 with its lower end surface 88a (tip surface) exposed, and a probe holder 92 for fixedly supporting the probe housing 90.
A rotor mounting plate 98 (body supporting member) that supports the probe holder 92 so as to be rotatable in all directions around a point P (predetermined point) via a rotor 94 and a rotor holder 96; An interval adjusting mechanism 100 (interval adjusting means) for adjusting the interval between the lower end surface 88a of the ultrasonic probe 88 and the surface of the device under test 2 is provided, and the slider 20 is provided at the left end of the rotor mounting plate 98. It is fixed to the head holder 62. The ultrasonic probe 88 is incorporated in the probe housing 90 such that the lower end surface 88 a thereof is flush with the lower end surface of the probe housing 90.

A pair of guide plates 102 are provided on both front and rear sides of the probe housing 90 to prevent the probe holder 92 from being inadvertently damaged by irregularities on the surface of the device under test 2. Is attached. That is, a wedge portion 102a having a lower end surface inclined obliquely upward is formed at the lower right end portion of each of the guide plates 102, and when the scanning head 12 moves rightward along the axis Ax, the object to be inspected is moved. Even if a convex portion exists on the surface of the wedge portion 1, the wedge portion 1
The ultrasonic probe 88 is prevented from being damaged by riding the 02a.

At the top of each of the guide plates 102,
Vertically elongated holes 102b are formed at three positions in the left-right direction, and each guide plate 102 is connected to the probe housing 9 by a bolt 104 in these three long holes 102b.
It is fixed to 0. Thus, each guide plate 102 can adjust the vertical position and the horizontal inclination angle of the lower end surface 102c.

The probe housing 90 is screwed and fixed to the probe holder 92 at four positions on the upper end surface thereof. The probe holder 92 is fixed to the rotor 94 by bolts 106. I have.

The right end of the rotor mounting plate 98 has two front and rear parts.
And the rotor holder 96 is made up of two front and rear members along the spherical shape of the rotor 94. And these rotor holders 96
The rotor 94 is inserted from above into the space between both arms 98a of the rotor mounting plate 98 with the rotor 94 interposed therebetween, and is fixed to the rotor mounting plate 98 by bolting.

At the right end of the rotor mounting plate 98, there is provided a bolt 108 (main body fixing means) which is inserted from the rear into the rear arm 98a and is screwed with the front arm 98a. By loosening the bolt 108, the probe holder 92 with respect to the rotor mounting plate 98 is
(That is, the rotor 94 with respect to the rotor holder 96)
The rotation of the probe holder 92 is allowed, and the probe holder 92 is fixed to the rotor mounting plate 98 by tightening the bolt 108.

The distance adjusting mechanism 100 includes a ball 110 that contacts the surface of the device under test 2 near the left side of the ultrasonic probe 88 and a free bearing 112 (ball) that supports the ball 110 so that it can rotate in all directions. Support member),
An adjusting screw 114 fixed to the upper end of the free bearing 112, extending upward, and screwing with the probe holder 92.
(Vertical displacement mechanism), a plurality of disc springs 116 interposed between the free bearing 112 and the probe holder 92 so as to surround the adjustment screw 114, and the probe holder 92.
And a stopper screw 118 which comes into contact with the adjusting screw 114 from the front side to prevent the adjusting screw 114 from rotating. Adjustment screw 11
An engagement groove 114a for engaging with a flathead screwdriver is formed at the upper end of the fourth screwdriver.

The rotor mounting plate 98 has an adjusting opening 98 for exposing the upper end of the adjusting screw 114.
In addition, a cord insertion opening for allowing a cord (not shown) connected to the ultrasonic probe 88 to pass through the rotor mounting plate 98 and the probe holder 92. 98c and 92a are formed.

In the scanning head 12, the lower end surface 88 a of the ultrasonic probe 88 is aligned with the surface of the test object 2 at a minute interval (for example, about 0.15 to 0.20 mm). Is performed.

This alignment is performed by bringing the lower end face 88a of the ultrasonic probe 88 into close contact with the surface of the device under test 2, and then displacing the ultrasonic probe 88 slightly upward. ing.

The operation of bringing the lower end face 88a of the ultrasonic probe 88 into close contact with the surface of the device under test 2 is performed by the interval adjusting mechanism 10
Rotating the ball 110 sufficiently upward by turning the adjustment screw 114 of the
This is performed by rotating the probe holder 92 about the point P with respect to the rotor mounting plate 98 in a state where is loosened. At this time, the bolts 104 for fixing each guide plate 102 to the probe housing 90 are loosened, and the lower end surfaces 102c of both guide plates 102 are also brought into close contact with the surface of the test object 2.

Then, the lower end face 88a of the ultrasonic probe 88
Are brought into close contact with the surface of the test object 2, and then the bolts 104 are tightened so that each guide plate 102 is moved to the probe housing 9.
And the probe holder 92 is fixed to the rotor mounting plate 98 by tightening the bolts 108.

After that, the adjusting screw 1 of the interval adjusting mechanism 100
14 to lower the ball 110 together with the free bearing 112 to bring the ball 110 into contact with the surface of the device 2 to be inspected. 88a is slightly lifted from the surface of the device under test 2. Then, after the lower end surface 88a of the ultrasonic probe 88 is directly opposed to the surface of the device under test 2 with a small interval, the stopper screw 118 is brought into contact with the adjusting screw 114 to thereby adjust the adjusting screw 114. To prevent accidental rotation. In the present embodiment, the scanning of the scanning head 12 is performed as follows.

That is, as shown in FIGS. 1 and 2, first, the scanning device 10 is set on the surface of the inspection object 2. At this time, a couplant is applied to the scanning target area of the scanning head 12 on the surface of the inspection object 2 so that a minute space between the surface of the inspection object 2 and the lower end surface 88 a of the ultrasonic probe 88 is formed. The couplant is filled with the couplant.

In this state, the slider driving means 22
The scanning in the left and right direction is performed by reciprocating the slider 20 at a predetermined stroke in the direction of the axis Ax, and the scanning device 10 is minutely fed forward by intermittently rotating the shafts 14 and the magnet roller 16 by the shaft driving means 18. It is moved at a pitch (for example, 1 mm pitch or 2 mm pitch).

The slider driving means 22 and the shaft driving means 18 are driven by control means (not shown) connected thereto. When the shaft driving means 18 is driven in the reverse direction by this control means, the scanning device 1
It is also possible to move 0 backward.

As described in detail above, the scanning device 10 according to the present embodiment is a non-destructive inspection device for flaw detection, and the scanning head 12 of the scanning device 10 is disposed close to the surface of the inspection object 2. A probe 88; a rotor mounting plate 98 for supporting the ultrasonic probe 88 so as to be rotatable about a point P together with a probe housing 90 and a probe holder 92;
A bolt 108 for fixing the probe 8 to the rotor mounting plate 98 at a predetermined angular orientation, and a spacing adjusting mechanism 100 for adjusting the spacing between the lower end face 88a of the ultrasonic probe 88 and the surface of the device under test 2 are provided. Therefore, the following operation and effect can be obtained.

That is, the lower end face 88 of the ultrasonic probe 88
a is brought into close contact with the surface of the test object 2 and the bolt 1
08, the ultrasonic probe 88 is fixed to the rotor mounting plate 98 together with the probe housing 90, and then the ultrasonic probe 88 is displaced upward by a predetermined amount by the interval adjusting mechanism 100. It is possible to easily position the lower end face 88 a of the acoustic probe 88 in a positional relationship parallel to the surface of the device under test 2.

Therefore, according to the present embodiment, the alignment of the scanning head can be easily performed in the scanning device configured to scan the scanning head along the surface of the inspection object.

In particular, since the scanning device 10 according to the present embodiment is a nondestructive inspection device for flaw detection having an ultrasonic probe 88, the lower end surface 88a of the ultrasonic probe 88 is Inspection accuracy can be sufficiently improved by being able to accurately position in a parallel positional relationship with respect to.

Further, in the present embodiment, the distance adjusting mechanism 100 is provided so that the ball 1 in contact with the surface of the test object 2
10, a free bearing 112 for rotatably supporting the ball 100, and an adjusting screw 114 for vertically displacing the free bearing 112 with respect to the probe holder 92. The distance between the lower end surface 88a of the acoustic probe 88 and the surface of the device under test 2 can be accurately adjusted. FIG. 14 is a view similar to FIG. 13 showing a modification of the above embodiment.

The scanning head 12 according to the present modification is not a single ball 110 as in the above-described embodiment, but is arranged at a predetermined interval in the front-rear direction so as to straddle the center of the ultrasonic probe 88 in the front-rear direction. And a pair of balls 110 that are arranged. And by adopting such a configuration,
The following operational effects can be obtained.

That is, since the ultrasonic probe 88 transmits and receives ultrasonic waves at the central portion in the front-rear direction, the ball 1 can be used as in the above embodiment.
When the scanning head 12 moves leftward along the axis Ax when the scanning probe 12 is disposed at the center in the front-rear direction near the left side of the ultrasonic probe 88, the rolling locus of the ball 110 Above, transmission and reception of ultrasonic waves by the ultrasonic probe 88 are performed. In this case, the couplant is swept to the front and rear sides on the rolling trajectory of the ball 110 on the surface of the test object 2, which is not always sufficient for performing the test accurately.

Therefore, as in this modification, a pair of balls 110 are provided at a predetermined interval in the front-rear direction, and these are arranged so as to straddle the center of the ultrasonic probe 88 in the front-rear direction. It is possible to prevent the couplant at the part where the transmission and reception of the ultrasonic wave is performed on the surface of the inspection object 2 from being swept away to the front and rear sides, thereby improving the inspection accuracy.

In the above embodiment, the ball 1
If the ultrasonic probe 88 is disposed at a position slightly shifted forward or backward from the center in the front-rear direction in the vicinity of the left side of the ultrasonic probe 88, the ultrasonic probe 88 transmits the ultrasonic wave on the rolling trajectory of the ball 110. In addition, it is possible to prevent reception from being performed.

In the above-described embodiment and the modified example, a pair of guide plates 102 are mounted on both front and rear sides of the probe housing 90, so that the probe holder 92 is formed on the surface of the device under test 2. The guide plate 102 is configured to prevent careless damage due to irregularities or the like. However, these guide plates 102 are not necessarily required when it is clear that no harmful irregularities or the like exist on the surface of the test object 2. is not. And these guide plates 1
When the 02 is abolished, the size of the scanning head 12 can be reduced, and the size of the scanning device 10 can be further reduced.

[Brief description of the drawings]

FIG. 1 is a front view showing a scanning device according to an embodiment of the present invention.

FIG. 2 is a plan view showing the scanning device.

FIG. 3 is a detailed view of a part III in FIG. 1;

FIG. 4 is a detailed view of an IV section in FIG. 2;

FIG. 5 is a detailed left side view showing the scanning device.

FIG. 6 is a detailed right side view showing the scanning device.

FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 5, showing the shaft driving means of the scanning device in detail

FIG. 8 is a front view showing the slider and the slider driving means of the scanning device in detail.

FIG. 9 is a plan view showing the slider and the slider driving means in detail.

FIG. 10 is a sectional view taken along line XX of FIG. 9;

FIG. 11 is a partial front sectional view showing a scanning head of the scanning device in detail.

FIG. 12 is a plan view showing the scanning head in detail.

FIG. 13 is a right side view showing the scanning head in detail.

FIG. 14 is a view similar to FIG. 13, showing a modification of the embodiment.

FIG. 15 is a front view and a lower perspective view showing a conventional example.

[Explanation of symbols]

 2 Inspection object (scanning object) 10 Scanning device (non-destructive inspection device for flaw detection) 12 Scan head 14 Shaft 14a Small diameter portion 16 Magnet roller 16A Magnet 16B Ferromagnetic ring 18 Shaft driving means 20 Slider 22 Slider driving means 24A, 24B Bracket 24Aa, 24Ba Gripping part 26 Slide guide 28A, 28B Guide holder 30 Rack holder 32 Rack 34 Pulse motor 36 Gear unit 38 Rotary encoder 40 Gear box 42, 44, 46, 48, 50 Gear 52 Bearing 54 Outer shaft 56 Screw 58 Ball slider 60 Slider block 62 Head holder 64 Plunger holder 66 Plunger 68 Proximity switch 70 Proximity dog 72 Motor unit 72a Output shaft 74 Motor Racket 76 Pinion 78 Shield cover 80 Shield cap 82 DC motor 84 Reduction gear train 86 Rotary encoder 88 Ultrasonic probe (head body) 88a Lower end surface (tip surface) 90 Probe housing 92 Probe holder 92a Code insertion Opening 94 Rotor 96 Rotor holder 98 Rotor mounting plate (main body support member) 98a Arm 98b Adjustment opening 98c Cord insertion opening 100 Interval adjustment mechanism (interval adjustment means) 102 Guide plate 102a Wedge 102b Length Hole 102c Lower end surface 104, 106 Bolt 108 Bolt (body fixing means) 110 Ball 112 Free bearing (Ball support member) 114 Adjusting screw (Vertical displacement mechanism) 114a Engagement groove 116 Disc spring 118 Stopper screw Ax Axis P point (place) Point)

Claims (4)

[Claims] 1. A scanning device configured to scan a scanning head along a surface of an object to be scanned, wherein the scanning head is arranged near the surface of the object to be scanned; A main body supporting member for rotatably supporting the main body around a predetermined point, a main body fixing means for fixing the head main body to the main body supporting member at a predetermined angular posture, a tip end surface of the head main body, and a surface of the scanned object. And a distance adjusting means for adjusting the distance between the scanning device and the scanning device. 2. The apparatus according to claim 1, wherein the distance adjusting means includes a ball in contact with the surface of the object to be scanned, a ball supporting member for rotatably supporting the ball, and a vertically moving ball supporting member with respect to the head body. The scanning device according to claim 1, further comprising a vertical displacement mechanism for displacing. 3. The scanning device according to claim 2, wherein a plurality of said balls are provided in a predetermined arrangement. 4. The scanning device according to claim 1, wherein the scanning device is a flaw detection non-destructive inspection device including an ultrasonic probe.