JP2002071353A - Angular velocity measuring instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress noise of a detection signal, due to vibration and shocks applied to a housing from the outside, when an angular velocity measuring instrument for detecting the angular velocity of rotation on a specific axis of rotation is manufactured, by fixing and putting a vibrator in a package and putting the package in the housing together with a circuit. SOLUTION: The angular velocity measuring instrument is equipped with the vibrator 3, which is formed along a prescribed plane X-Y nearly perpendicular to the axis Z of rotation, a vibrator support member 15 which supports the vibrator 3, a 1st container 2 which contains the support member and vibrator, and a circuit board 4 where the 1st container 2 is fixed and an electronic circuit 12 is provided, a board support member 6 which supports the circuit board, and a 2nd container 25 which supports the board support member 6 and contains the 1st container 2, circuit board 4, and board support member 6.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an angular velocity measuring device using a vibratory gyroscope.

[0002]

2. Description of the Related Art Recently, the use of a vibratory gyroscope as a rotation speed sensor used in a vehicle rotation speed feedback type vehicle control method of an automobile has been studied. A vibratory gyroscope is an angular velocity sensor using Coriolis force accompanying rotation of a vibrator, and measures an angular velocity by electrically oscillating the vibrator and detecting vibration induced by Coriolis force. In such a system, the direction of the steered wheels is detected by the rotation angle of the steering wheel. At the same time, the rotational speed at which the vehicle body is actually rotating is detected by the vibration gyroscope. Then, the direction of the steered wheels is compared with the actual rotational speed of the vehicle body to obtain a difference, and the wheel torque and the steering angle are corrected based on the difference, thereby realizing stable vehicle body control.

In such a vibratory gyroscope, it is necessary to fix the vibrator to a container such as a can package, house the vibrator in a predetermined housing together with a circuit, and attach the housing to a vehicle body. .

[0004] As a specific mounting method of the vibrator,
For example, there is a method described in Japanese Patent Application Laid-Open No. 4-3260065. This method aims at suppressing the phase delay between the actual angular velocity and the angular velocity acting on the vibrator housed in the housing when the oscillator is fixed in the housing.

In Japanese Patent Application Laid-Open No. 2000-9476, when a tuning-fork type vibrator is fixed on a support substrate and the vibrator and the support substrate are accommodated in a package, vibration applied to the package from the outside may be reduced. In order to prevent the vibrator from swinging and being damaged by the impact, a swing preventing member is provided.

[0006]

However, in the conventional vibrator housing structure, noise appearing in the detection signal due to externally applied vibration or impact (disturbance) has not been sufficiently suppressed. Such external vibrations have the property of being applied to the housing three-dimensionally from all directions, and may include extremely wide frequency components. For this reason, in the conventional vibrator housing structure, the vibration noise tends to increase particularly in the vicinity of a specific frequency, which tends to increase the measurement error of the rotational angular velocity.

The vibratory gyroscope has a difference between a resonance frequency of a driving vibration mode used for electric oscillation of a vibrator and a resonance frequency of a detection vibration mode used for detecting vibration caused by Coriolis force, that is, a detuning frequency. , The vibration noise tended to increase.

An object of the present invention is to provide an angular velocity measuring device for detecting a rotational angular velocity around a predetermined rotational axis by fixing and housing a vibrator in a housing. The purpose of the present invention is to make it possible to suppress noise of a detection signal due to vibration or shock applied from the outside, and in particular to suppress noise over a wide frequency range.

[0009]

SUMMARY OF THE INVENTION The present invention is an angular velocity measuring device for detecting a rotational angular velocity around a predetermined rotation axis, and is formed along a predetermined plane substantially perpendicular to the rotation axis. A vibrator, a vibrator support member for supporting the vibrator, a first container for supporting the vibrator support member and accommodating the vibrator support member and the vibrator, the first container being fixed, and an electronic circuit Provided with a circuit board, a substrate supporting member for supporting the circuit board, and a first container for supporting the substrate supporting member and accommodating the circuit board and the substrate supporting member. And

The inventor used a planar vibrator and arranged the vibrator so as to be substantially perpendicular to the rotation axis. At the same time, the vibrator and the vibrator supporting member for directly supporting the vibrator are accommodated in the first container, which is fixed to the circuit board, and the first container, the circuit board and the circuit board are directly connected. The present inventors have conceived a structure in which a substrate supporting member for supporting the substrate is accommodated in a second container.

When such a structure is employed, the detection signal is less affected by external vibrations having a wide frequency range.

Hereinafter, the present invention will be described in more detail with reference to the drawings of embodiments embodying the present invention.

FIG. 1 is an exploded perspective view showing components of an angular velocity measuring device according to an embodiment of the present invention.

Reference numeral 1 denotes a main body of the second container.
a and a terminal 1b for making an electrical connection to the outside. 2 is a first container. The first container includes a container base 15 and a lid 22 mounted on the container base 15. A vibrator 3 is housed in the container 2. A leg 20 is provided on the lower surface of the container base 15.

Reference numeral 4 denotes a circuit board, and a through hole 4a for inserting a leg portion is formed at a predetermined position. The circuit board 4 has 4
The substrate support member 6 is attached to one of the corners. 7 is a lid part of the first container, and 7a is a concave part thereof.

FIG. 2 is a plan view showing the angular velocity measuring device after assembling the components shown in FIG. However, only the periphery of the vibrator 3 is shown as a perspective view for convenience. FIG. 3 is a sectional view of the apparatus of FIG. FIG. 4 is a schematic view showing a planar positional relationship between the vibrator 3, the first container 2, and the circuit board 4, and FIG. 5 is a positional relationship between the vibrator 3, the first container 2, and the circuit board 4. FIG. FIG. 6 is a plan view showing the form of the vibrator 3 in more detail, and FIG. 7 is a front view showing the structures of the vibrator 3 and the vibrator support member 16 in further detail.

The vibrator 3 extends along a predetermined plane (XY plane) substantially perpendicular to the rotation axis Z. Here, that the vibrator is formed along the predetermined surface does not mean that the vibrator is formed on the predetermined surface in a strictly geometrical sense because the vibrator has a thickness. . If the vibrator is formed within a thickness of about 1 mm when viewed from a predetermined surface, the present invention is included in the present invention.

The predetermined surface substantially perpendicular to the rotation axis is
It does not mean that it is strictly geometrically perpendicular, but it naturally includes manufacturing errors and the like. In reality, if it is within 5 ° from the direction strictly perpendicular to the rotation axis, Good.

As shown in FIG. 7, the vibrator 3 is supported by a vibrator support member 16, and the vibrator support member 1
6 is supported on a container base 15. In this example, the vibrator support member 16 includes an adhesive layer 16a that contacts the main surface of the vibrator 3, and a vibrator support member body 16b that supports the adhesive layer 16a. Details of these will be described later.
A predetermined number of legs 20 are formed on the lower surface of the container base 15.

The form of the vibrator 3 is not particularly limited, but in this example, it has a form as shown in FIG. And
For example, four driving vibration pieces 28 and two detection vibration pieces 8 are provided. A drive electrode 18 is provided on each drive vibrating piece 28, and a detection electrode 17 is provided on each detection vibrating piece 8. When each driving vibrating piece 28 is vibrated as Vd and the vibrator 3 is rotated around the rotation axis Z in this state, each detecting vibrating piece 8 vibrates as Vg. Each signal voltage excited in each detection electrode 17 by this detection vibration is measured, and the difference is taken. The rotational angular velocity is calculated from this difference.

As shown in FIGS. 3 and 5, the first container 2 is manufactured by mounting the lid 22 on the container base 15. At this time, the filler 10 is provided in the gap between the vibrator 3 and the lid portion 22 so as to close the space around the vibrator as much as possible.

The container base 15 is mounted on the circuit board 4. One main surface 4b of the circuit board 4 and the other main surface 4
An electronic circuit 12 is installed at a predetermined position in each of the sections c. This electronic circuit is for operating the vibrator 3 to output a signal corresponding to the angular velocity from the terminal 1b.
The circuit board 4 is supported by the board support member 6 at each corner as shown in FIGS.

Then, the second container 25 is manufactured by combining the main body 1 of the second container and the lid 7, and the first container 2 and the circuit board 4 are accommodated in the container 25. The first container and the circuit board are housed inside the side wall 1 d of the main body 1. A fixing portion 1c of the main body 1 of the second container 25;
The respective corners of the circuit board and the board support member 6 are positioned between the main surface of the lid 7 and the main surface. As a result, each corner of the circuit board is sandwiched and fixed between the main body 1 and the lid 7 via the board support member 6, as shown in FIG. Further, the side surface of the circuit board 4 is also sandwiched between the inner side surfaces of the main body 1 via the board supporting member 6. Each electronic circuit on the circuit board 4 is connected to a corresponding terminal 1b.

The angular velocity measuring device having such a structure is relatively insensitive to external vibrations of various frequencies from any direction. In particular, the structure of the present invention is a form in which irregular vibration such as torsional vibration hardly occurs when external vibration is applied.

In a preferred embodiment, as shown in FIG. 5 and the like, the first container 2 has a container base 15 for supporting the vibrator support member 16 and is mounted on the container base 15, and A lid 22 is provided to surround the member and the vibrator.

In a preferred embodiment, the space between the vibrator and the container 2 is reduced as much as possible by providing the filler 10 in the first container 2. This makes the angular velocity measurement device less susceptible to temperature changes.

The material of the filler is not particularly limited as long as it is a solid having the property of reflecting sound waves, but it is preferable that the filler has high sound wave reflection characteristics, is stable for a long time in an atmosphere, and is resistant to temperature changes. . From these viewpoints, ceramics (alumina, zirconia, etc.), glass, stainless steel, vinyl chloride resin, acrylic resin, polycarbonate resin, quartz, silicon and the like are preferable.

In a preferred embodiment, the detected vibration mode of the vibrator is substantially in a predetermined plane (XY plane). Thus, when external vibration in the Z-axis direction is applied, it becomes difficult to sense the external vibration as a signal.

Particularly preferably, as shown in FIG. 6, the driving vibration mode Vd of the vibrator is also substantially in a predetermined plane.

In a preferred embodiment, the circuit board 4 extends substantially parallel to a predetermined plane (XY plane). The circuit board 4 supports the entire container base 15, the vibrator support member 16, and the vibrator 3 thereon. For this reason, if the circuit board 4 is inclined with respect to the XY plane, when an external vibration is applied to the circuit board 4, unnecessary vibration components in the same direction as the detected vibration mode of the vibrator 3 are generated. Easily occur.

In a preferred embodiment, the container base 15
Extend substantially parallel to the predetermined surface. Particularly preferably, both the container base 15 and the circuit board 4 extend substantially parallel to the predetermined surface.

In a preferred embodiment, a rubber elastic body having a spring function between the circuit board 4 and the second container 25 is used as the substrate supporting member 6. By doing this,
Vibrations transmitted from the second container side to the inside thereof can be attenuated.

The substrate supporting member 6 can be interposed at a plurality of positions between the circuit board 4 and the second container 25, for example, as shown in FIG. In this case, the spring characteristics of the entire substrate support member 6 are obtained by adding the individual spring characteristics in a vector manner for each point of action, and are equivalent to equivalently acting as a single spring on the spring center. Become.

The structure of the angular velocity measuring apparatus of the present invention is also characterized in that the symmetry of each part can be extremely increased.
Specifically, in a preferred embodiment, when projected and viewed in the direction of the rotation axis Z, a total gravity center GP of the circuit board 4 and all members on the circuit board, and a plurality of, for example, four The entire spring center GR of the substrate support member 6 is located in the vicinity area. For example, as shown in FIGS. 4 and 5, when the circuit board 4 is substantially rectangular and the total center of gravity GP of the circuit board 4 and all members on the circuit board is substantially at the center of the circuit board 4, , The board supporting members are provided symmetrically at each corner of the circuit board, so that the total center of gravity G
P and the entire spring center GR of the substrate support member 6 can be arranged in the vicinity.

Here, "projecting in the direction of the rotation axis Z" indicates the positional relationship of each part when viewed in the direction of the rotation axis as shown in FIG. In other words, the positional relationship in the XY plane (predetermined plane) when the position in the Z-axis direction is ignored is shown. The expression that each center of gravity and the center of the spring exist in the vicinity region includes a case where the planar positions of the respective centers of gravity and the spring center substantially match. However, at the same time, when the external vibration is applied to the component in question, the respective centers of gravity coincide with each other so that irregular vibration caused by the asymmetry of the component in question does not become a problem. For example, the distance may be within 1 mm within a predetermined plane.

Here, on the circuit board, the electronic circuit 12 is not necessarily provided symmetrically due to a design problem of the electronic circuit. For this reason, the center of gravity GP of the entire circuit board
Is at a position different from the geometric center of the circuit board. When the substrate support member 6 is arranged so that the spring center GR is located at the geometric center of the circuit board, a weight (balancer) having a predetermined weight is required to move the center of gravity GP to the vicinity of the geometric center of the circuit board. Preferably, 14 is added to the circuit board 4.

In the preferred embodiment, when projected in the direction of the rotation axis Z, the center of gravity GO of the vibrator 3 and the center of gravity GS of the vibrator support member 16 are present in the vicinity.

In a preferred embodiment, when projected in the direction of the rotation axis Z, the center of gravity GO of the vibrator 3 and the center of gravity GC of the first container 1 exist in the vicinity.

In a preferred embodiment, FIG.
As shown in FIG. 5, when projected in the direction of the rotation axis Z, the center of gravity GO of the vibrator 3 and the center of gravity GP are present in the vicinity area.

In a preferred embodiment, the entire vibrator 3, the vibrator support member 16 and the container base 15 are
It is substantially symmetric with respect to at least one first plane (XZ plane) perpendicular to the predetermined plane (XY plane). More preferably, the entirety of the vibrator 3, the vibrator support member 16, and the container base 15 is perpendicular to a predetermined plane and on a second plane (YZ plane) different from the first plane. It is almost symmetric.

Preferably, the height of the first container 2 in the direction of the rotation axis Z is smaller than the width of the circuit board 4 in the direction perpendicular to the rotation axis Z.

Preferably, the height of the first container 2 in the direction of the rotation axis Z is smaller than the width of the first container 2 in the direction perpendicular to the rotation axis Z.

Preferably, as shown in FIG.
Is a detection vibration mode V substantially perpendicular to the rotation axis Z.
It has at least one pair of detection vibrating bars 8 having g, and calculates the angular velocity using a difference between the detection signals obtained from each of the detection vibrating bars 8.

The electronic circuit components include, for example, preamplifier IC components and chip components. The material of the circuit board 4 is not particularly limited, and examples thereof include a glass epoxy board, a paper phenol board, and a ceramic board. The thickness of the circuit board 4 is preferably as large as unnecessary vibration is less likely to be generated. Circuit board 4
Is preferably about 1 to 2 mm.

The connection between the electronic circuit on the circuit board 4 and the terminal 1b can be made directly,
Can also be connected via. It is preferable that the connection portion on the circuit board 4 is located at the center of the circuit board 4 because vibration noise hardly occurs. When there are a plurality of connection parts, when projected and viewed in the direction of the rotation axis Z, the total center of gravity of the connection parts and the total center of gravity GP of the circuit board 4 and all the members supported by the circuit board 4 are calculated. Is preferably present in the vicinity region.

As the first container, for example, a metal can package, a ceramic package, or a combination of a glass epoxy substrate and a metal shield plate can be used. As the second container, for example, a metal housing such as aluminum or magnesium, or a plastic package such as PBT or ABS can be used.

As a substrate supporting member, PBT, ABS,
Various plastics such as vinyl chloride, epoxy resin, nylon and Teflon (registered trademark), various metals such as iron, aluminum and magnesium, or various synthetic rubbers such as silicone rubber, neoprene (registered trademark) and butyl rubber can be used. . When using synthetic rubber as the substrate support member, it is preferable that the temperature change of the elastic modulus within the operating temperature range of the angular velocity measuring device is small, and that the ratio of the dynamic loss to the dynamic elastic modulus, that is, the loss tangent is large. Is preferred. The operating temperature range of the angular velocity measuring device for vehicle control is usually from -30 ° C to + 85 ° C.

As the driving means and the detecting means in the vibrator, any means usually used in the field of the vibrating gyroscope can be employed. When the vibrator is formed of a piezoelectric material, the vibrator is provided with a drive unit and a drive electrode and a detection electrode as a detection unit. Examples of the piezoelectric material include a piezoelectric ceramic such as PZT in addition to a piezoelectric single crystal. Further, when the vibrator is formed of a constant elastic metal, piezoelectric ceramics can be attached on the vibrator as a driving unit and a detecting unit.

The method of supporting the vibrator is not limited, and examples thereof include a bonding method, a method using an adhesive, a method of mechanically fixing with a clamp or the like, a welding method, a solid phase diffusion method, and the like. . However, the bonding method is most preferable from the viewpoint of keeping the detection sensitivity of the vibrator high.

The kind of the adhesive of the adhesive layer 16a interposed between the vibrator support member main body 16b and the vibrator 3 is not limited, and a synthetic rubber adhesive such as a silicone adhesive or a urethane adhesive, or an epoxy adhesive is used. There are an adhesive, a synthetic resin adhesive such as a polyimide adhesive, and the like.

It is preferable that the dynamic elastic modulus of the adhesive is not more than 1/100 of the dynamic elastic modulus of the vibrator since the influence on the oscillation state of the vibrator is small. Specifically, when the vibrator material is a piezoelectric single crystal, a piezoelectric ceramic or a constant elastic metal,
The adhesive preferably has a dynamic elastic modulus of 10 ⁶ -10 ⁸ Pa.

In this case, a vibration mode in which the vibrator 3 rotates or translates with respect to the vibrator support member main body 16b due to the elastic deformation of the adhesive layer 16a, may cause vibration noise. In order to suppress the vibration noise around the adhesive layer, when projected in the direction of the rotation axis Z, the center of gravity GO of the vibrator 3 and the center of the spring of the adhesive layer 16a exist in the vicinity area. Is preferred. For example, when the adhesive layer 16a is formed in a columnar shape having a constant thickness along the rotation axis Z and projected in the direction of the rotation axis Z, the center of gravity GO of the vibrator 3 and the center of gravity of the bottom surface of the adhesive layer 16a are obtained. Can be realized by disposing in the vicinity area.

If the resonance frequency of the vibration mode due to the elastic deformation of the adhesive layer 16a and the detuning frequency of the vibrator are close to each other, the vibration noise increases, and both are separated by 1.4 times or more. Is preferred. In particular, if the resonance frequency of the torsional vibration mode in which the adhesive layer 16a is torsionally deformed around the rotation axis Z is close to the detuning frequency of the vibrator 3, large vibration noise is generated. It is preferable that they are four times or more apart.

The thickness of the adhesive layer 16a is preferably 1 mm or less, more preferably 0.4 mm or less, from the viewpoint of securely fixing the vibrator. The thickness of the adhesive portion interposed between the support member and the vibrator is such that the change in the Q value of the driving vibration of the vibrator is further reduced over the entire operating temperature range, and the sensitivity of the detected vibration is improved. Therefore, the thickness is preferably 0.05 mm or more, and more preferably 0.1 mm or more.

The loss tangent of the adhesive in the adhesive layer 16a increases the Q value of the driving vibration of the vibrator over the entire operating temperature range (normally -30 ° C. to + 85 ° C., particularly preferably -40 ° C. to + 85 ° C.). From the viewpoint of making the fluctuation possible and reducing the fluctuation, 0.05 or less is preferable. The lower limit of the loss tangent is not particularly limited, and may be 0.00.

The ratio of the maximum value to the minimum value of the loss tangent of the adhesive within the operating temperature range is preferably within three times.

From the viewpoint of further keeping the Q value of the driving vibration of the vibrator, the specific gravity of the adhesive is particularly preferably 1.1 or less. Thus, the specific gravity of the adhesive is set to 1.
In order to approach zero, the filler in the adhesive
Is preferably 7% by weight or less.

[0058]

(Example of the present invention) An angular velocity measuring apparatus shown in FIGS. 1 to 7 was manufactured. Drive resonance mode resonance frequency 22kHz
z, and the detuning frequency between the driving vibration mode and the detection vibration mode was 370 Hz. Specifically, a chromium film having a thickness of 200 angstroms and a gold film having a thickness of 5000 angstroms were formed at predetermined positions on a quartz Z-plate wafer having a thickness of 0.3 mm by sputtering. The resist was coated on both sides of the wafer.

The wafer is immersed in an aqueous solution of iodine and potassium iodide, and an excess gold film is removed by etching. Was removed by etching. Immerse the wafer in ammonium bifluoride at a temperature of 80 ° C for 20 hours, etch the wafer,
The outer shape of the vibrator was formed.

Further, a chromium film having a thickness of 200 angstroms and a gold film having a thickness of 2000 angstroms are formed again at predetermined positions by the sputtering method, coated with a resist, and the extra gold film and the chromium film are formed by etching. After removal, an electrode film was formed.

Using a metal mask, a silicone RTV adhesive was formed into a cylindrical shape having a diameter of 5 mm and a thickness of 0.1 mm on one main surface of the vibrator 3 thus obtained.
6a, and one bottom surface of a cylindrical metal pin 16b having a diameter of 5 mm and a height of 1 mm was bonded thereon. Adhesive layer 16
The metal pin 16a and the metal pin 16b are arranged so that a straight line passing through the center of gravity GO of the vibrator and perpendicular to the main surface of the vibrator is used as the central axis of the cylinder. A silicone RTV adhesive having a dynamic elastic modulus after curing of 5 × 10 ⁶ Pa and a dynamic loss of 0.03 was used.

As the first container 2, a can package for projection welding was used. The drawer leg portion 20 of the can package is glass-sealed, so that an electric signal can be applied and taken out while maintaining airtightness. As shown in FIG. 7, on the metal can package base 15,
The other bottom surface of the metal pin 16b was bonded and fixed using a conductive epoxy adhesive.

The vibrator 3 was twisted around the rotation axis Z by flipping with a wire, and freely vibrated in a torsional vibration mode around the rotation axis Z. The vibration frequency was measured using a laser Doppler vibrometer. The resonance frequency of the torsional vibration about the rotation axis Z of the support was about 1 kHz.

When the can package was sealed and welded, the can package and its contents were heated in a decompression device to remove adsorbed gas and moisture, and then the can package and its contents were moved into the welding chamber. The welding chamber is also isolated from the outside by a partition. The welding chamber was filled with dry air.

The through-hole metal can package base 15 is
The circuit board 4 is placed on the circuit board 4, and the leg 20 is
a and soldered and fixed. A 1.6 mm thick glass epoxy substrate was used for the circuit board 4.

F is connected to the electronic circuit on the circuit board 4 and the terminal 1b.
Both ends of the PC wiring were soldered and electrically connected.

One substrate support member 6 made of silicone rubber was attached to each of the four corners of the circuit board 4 and housed in a second aluminum container 25.

The dynamic elastic modulus and size and shape of the substrate supporting member 6 were designed so that the resonance point of the vibration isolating system including the substrate supporting member 6 and the circuit board 4 was about 600 Hz.

Each of the substrate supporting members 6 is interposed between the second container 25 and the circuit board 4 to support the upper and lower main surfaces and two side surfaces of the corners of the circuit board 4. Member 6
As a whole, the circuit board 4 is sandwiched from six directions of ± X, ± Y, ± Z.

The inner diameter of each opposing portion of the inner surface of the second container 25 that sandwiches the substrate supporting member 6 is smaller by about 0.2 mm than the outer diameter of the substrate supporting member 6 attached to the circuit board 4. The four substrate support members 6 housed in the second container 25 are each compressed by about 0.1 mm.

FIG. 8 shows a circuit configuration of the angular velocity measuring device. In FIG. 8, the upper side shows the configuration of the self-excited oscillation circuit of the drive electrode. In FIG. 8, the lower side shows the configuration of the detection circuit. The detection circuit is 120Hz after synchronous detection
A -5th order Butterworth type LPF is provided.

In the X, Y, and Z directions of the angular velocity measuring device, vibration was applied to the second container from the vibrator to measure the vibration noise characteristics. Excitation frequency is 100
Swept continuously at -500 Hz. These results are shown in FIGS. 9, 10, and 11.

As a result, there was almost no response to external vibration in the X direction. For external vibrations in the Y and Z directions, there was a slight noise peak at the detuning frequency, but the peak height was at most 0.3 deg / d / G or less.

Comparative Example 89183-5 manufactured by Toyota Motor Corporation
For 1010, the vibration noise characteristics were measured in the same manner as in the example of the present invention. The vibrator of this angular velocity measuring device is a vertical type crystal vibrator, the driving frequency is 6.5 Hz,
The detuning frequency is 165 Hz. The LPF of the detection circuit is 2
0 Hz-second order, and the resonance point of the vibration isolation system is 280 Hz.

As shown in FIGS. 12, 13 and 14, there is a considerably large peak in detuning, and a large noise of 2 deg / s / G or more is generated particularly when the vibration is applied from the Y direction. It is presumed that the vibrator inside the housing vibrated largely around the rotation axis in response to the vibration in the Y direction.

[0076]

As is apparent from the above description, according to the present invention, the vibrator is fixed and stored in the package,
By accommodating this in a housing together with a circuit, when an angular velocity measuring device for detecting a rotational angular velocity around a predetermined rotation axis is manufactured, it is caused by vibration or impact applied to the housing from the outside. Noise of the detection signal can be suppressed.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of each component of an angular velocity measuring device according to an embodiment of the present invention.

FIG. 2 is a plan view showing the angular velocity measuring device after assembling the components of FIG. 1;

FIG. 3 is a sectional view of the apparatus of FIG. 2;

FIG. 4 is a schematic diagram showing a planar positional relationship among a vibrator 3, a first container 2, and a circuit board 4.

FIG. 5 is a schematic sectional view showing a positional relationship among a vibrator 3, a first container 2, and a circuit board 4.

FIG. 6 is a plan view showing the form of the vibrator 3 in further detail.

FIG. 7 is a front view showing the structure of the vibrator 3 and its supporting member 16 in further detail.

FIG. 8 is a diagram showing a circuit configuration used in the angular velocity measuring device of the example of the present invention.

FIG. 9 is a graph showing the relationship between the vibration frequency and vibration noise when the angular velocity measuring device of the present invention is vibrated in the X direction.

FIG. 10 is a graph showing the relationship between the vibration frequency and vibration noise when the angular velocity measuring device of the present invention is vibrated in the Y direction.

FIG. 11 is a graph showing the relationship between the vibration frequency and vibration noise when the angular velocity measuring device of the present invention is vibrated in the Z direction.

FIG. 12 is a graph showing a relationship between an excitation frequency and vibration noise when the angular velocity measuring device of the comparative example is excited in the X direction.

FIG. 13 is a graph showing a relationship between an excitation frequency and vibration noise when the angular velocity measuring device of the comparative example is excited in the Y direction.

FIG. 14 is a graph showing the relationship between the vibration frequency and vibration noise when the angular velocity measuring device of the comparative example is vibrated in the Z direction.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Main body of 2nd container 1c Fixing part 2
First container 3 Vibrator 4 Circuit board 4a Through hole for leg 20 4b One main surface of circuit board 4 4c The other main surface of circuit board 4 6 Substrate support member 7 Second container lid 8 Pair Detection vibrating piece 10 Filler 12 Electronic circuit 15 Container base
Reference Signs List 16 vibrator support member 16a adhesive layer of vibrator support member 20 legs 22 lid of first container 2
25 Second container GO Center of gravity of vibrator GS Center of gravity of vibrator support member Total center of gravity of GP circuit board and all members supported by circuit board Total spring center of GR board support member GC Center of gravity of first container

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Shoji Yokoi 2-56, Suda-cho, Mizuho-ku, Nagoya-shi, Aichi F-term in Nihon Insulators Co., Ltd. 2F105 AA02 BB03 CC01 CD02 CD06 CD13

Claims (18)

[Claims] 1. An angular velocity measuring device for detecting a rotational angular velocity around a predetermined rotation axis, comprising: a vibrator formed along a predetermined surface substantially perpendicular to the rotation axis; A vibrator support member for supporting, a first container for supporting the vibrator support member and accommodating the vibrator support member and the vibrator, wherein the first container is fixed, and an electronic circuit is provided. Circuit board, a substrate supporting member that supports the circuit board, and a second container that supports the substrate supporting member and accommodates the first container, the circuit board, and the substrate supporting member. An angular velocity measuring device, characterized in that: 2. The container according to claim 1, wherein the first container is mounted on a container base supporting the vibrator support member, and the first container is mounted on the container base.
The apparatus according to claim 1, further comprising a lid surrounding the vibrator support member and the vibrator. 3. The apparatus according to claim 1, wherein the detected vibration mode of the vibrator is substantially in the predetermined plane. 4. The apparatus according to claim 1, wherein said circuit board extends substantially parallel to said predetermined plane. 5. The apparatus according to claim 2, wherein said container base extends substantially parallel to said predetermined plane. 6. The apparatus according to claim 1, wherein said substrate supporting member is a rubber elastic body having a spring function between said circuit board and said second container. An apparatus according to claim 1. 7. The apparatus according to claim 1, wherein said substrate supporting member is interposed at a plurality of positions between said circuit board and said second container. Equipment. 8. When projected and viewed in the direction of the rotation axis,
8. The method according to claim 1, wherein a total center of gravity GP of the circuit board and all members supported by the circuit board and an entire spring center GR of the board support member are present in a vicinity area. 9. Device according to one of the claims. 9. The apparatus according to claim 8, wherein a weight for moving said center of gravity GP is provided on said circuit board. 10. A center of gravity GO of the vibrator and a center of gravity GS of the vibrator support member are present in the vicinity when projected in the direction of the rotation axis. Apparatus according to any one of claims 1-9. 11. A center of gravity GO of the vibrator and a center of gravity GC of the first container when projected and viewed in the direction of the rotation axis.
Are present in the vicinity area.
Apparatus according to any one of claims -10. 12. When projected in the direction of the rotation axis, the center of gravity GO of the vibrator and the total center of gravity GP of the circuit board and all members supported by the circuit board are in the vicinity area. 12. The method according to claim 1, wherein
Apparatus according to any one of the preceding claims. 13. The vibrator, the vibrator support member, and the container base are generally symmetric with respect to at least one first plane perpendicular to the predetermined plane. Apparatus according to any one of claims 2-12. 14. The whole of the vibrator, the vibrator support member, and the container base is substantially perpendicular to a second plane that is perpendicular to the predetermined plane and different from the first plane. Device according to claim 13, characterized in that it is symmetric. 15. The semiconductor device according to claim 15, wherein the board supporting members are provided at respective corners of the circuit board.
Apparatus according to any one of claims 8 to 14. 16. The method according to claim 1, wherein a height of said first container in a direction of said rotation axis is smaller than a width of said circuit board in a direction perpendicular to said rotation axis. Device according to one of the claims. 17. The apparatus according to claim 1, wherein a height of said first container in a direction of said rotation axis is smaller than a width of said first container in a direction perpendicular to said rotation axis. Apparatus according to any one of the preceding claims. 18. The vibrator has at least a pair of detecting vibrating pieces having a detecting vibration mode in a direction substantially perpendicular to the rotation axis, and a difference between detection signals obtained from the respective detecting vibrating pieces. The apparatus according to any one of claims 1 to 17, wherein the angular velocity is calculated using: