JP2002062475A - Computer-readable recording medium storing a program for designing an optical system and optical system design system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To promote an advanced judgment process of an optical system designer in a computer-readable recording medium and an optical system design system, to improve the efficiency of the optical system design and to shorten the design time. . SOLUTION: An optical element for inputting or changing an optical characteristic is recognized by directly indicating an optical element graphic A on a display, and when data of the optical characteristic of the optical element is input or changed, the optical element is recognized based on the data. Performs optical calculations of the optical system, and displays on the display interactively and in real time numerical information such as the shape of the optical element, figure information such as figure patterns such as light rays passing through the optical system, and numerical values such as aberration values. , A series of operations of "command input", "various optical calculations", "result display" and "judgment", which are the basics of the design work of optical system designers, can be integrated on a computer display, and advanced judgment processing of optical system design Can be promoted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a projection optical system, an illumination optical system and an alignment optical system in an exposure apparatus, for example.
The present invention relates to a computer-readable recording medium storing a program for designing an optical system including a plurality of optical elements in an optical device such as a camera, a microscope, an endoscope, and a telescope, and an optical system design system.

[0002]

2. Description of the Related Art As an apparatus for manufacturing a semiconductor element, a liquid crystal display element, an image pickup element (CCD or the like), a thin film magnetic head, or the like using a photolithography technique, a projection exposure apparatus (step / step exposure method) such as a batch exposure method or a scanning exposure method. And repeater type steppers, step-and-scan type steppers, etc.) are used, but these exposure apparatuses use a projection optical system, an illumination optical system, and an alignment optical system composed of a plurality of optical elements such as lenses. Etc. are provided. Examples of an optical system including optical elements such as a lens, a prism, a reflecting mirror, and a diffraction grating include a photographic lens, a microscope lens, and an endoscope lens.

[0003] The design of an optical system including such an optical element has been known as an extremely difficult problem. This is because factors such as the multidimensionality of the parameter space of the optical system and complicated constraints on parameters are involved. In an optical system design that has been conventionally performed, first, data stored in the past that is close to a given specification is changed, and initial data is completely newly created. Then, the design is advanced by performing aberration correction and performance evaluation using an optimization program (program software originally developed or commercially available software) having functions such as manual aberration correction or automatic aberration correction.

[0004] With the current aberration correction optimization program,
If the initial data given to the optimization program is not appropriate, it is susceptible to the potential capability of the initial data of the optical system, that is, if the initial data given to the optimization program falls into a stopping point called local minimum, the search for the design solution can not proceed from there I will. Therefore, as an escape method from the local minimum, Boltzmann distribution of thermal statistical mechanics, Simulated A
Attempts to incorporate physical phenomena such as nnealing, etc., and methods such as genetic algorithms (hereinafter referred to as GA) and escape functions into optimization programs have been made. Few, not very effective methods.

[0005]

When designing an optical system, even if a manual aberration correction program or an automatic aberration correction program is used, if the initial data of the optical system to be given is not good, a huge amount of time is required for calculation. Does not give very good results. That is, it is important in the design of an optical system how to find initial data with good family name and potentially excellent ability at first. If the work at this stage can be made more efficient, the design time can be significantly reduced.

Although the above-described optimization program using GA performs various calculations / evaluations of mathematical formulas on a computer, the interpretation of the calculation results may not match the interpretation of the optical system designer. Many. This means that in the process of optimizing programs etc., it is not possible to make appropriate judgments for scenes that come one after another, and to determine the context of multiple scenes and how this scene relates to the actual optical system. This is because the optimization program cannot recognize whether or not there is. This is analogous to a blindfolded, desperately searching for lost coins in a vast desert.

On the other hand, the designer of the optical system visually recognizes the shape of the optical element and the state of the light beam passing through the optical system as a two-dimensional or three-dimensional pattern, and further, based on the evaluation values of aberrations and past experiences. Advanced judgment processing. That is, all the judgment processing in the optical system design is performed based on the evaluation values of the shape of the optical element, the figure pattern of the state of the light beam passing through the optical system, the aberration, and the like. As described above, with the conventional method, it is difficult to effectively utilize the advanced judgment processing of the optical system designer, and there is a problem that the optical system design is not efficient and the design period becomes long. .

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and promotes a high-level decision process of an optical system designer, and can improve the efficiency of optical system design and shorten the design time. It is an object of the present invention to provide a computer-readable recording medium storing a program for designing a computer and an optical system design system.

[0009]

The present invention has the following features to attain the object mentioned above. That is to say, in association with FIGS. 1 to 20, the computer-readable recording medium of the present invention is a computer-readable recording medium that records a program for designing an optical system including a plurality of optical elements. In addition, the program includes an optical element graphic (A,
A first step of displaying the optical system on a display (4) as B, C) and recognizing the optical element for inputting or changing optical characteristics by directly indicating the optical element graphic on the display. The second step;
When data of the optical characteristics of the recognized optical element is input or changed, a third step of performing an optical calculation of the optical system based on the data in real time, and displaying the result of the optical calculation in real time on the display. And causing the computer to execute the fourth step displayed above.

In the optical system design system of the present invention,
An optical system design system for designing an optical system including a plurality of optical elements, comprising: an arithmetic unit (1) for performing optical calculation of the optical system; and a data input unit (1) for inputting data of the optical system to the arithmetic unit. 3) and a display (4) for displaying the information of the optical system and the optical calculation, wherein the arithmetic unit is configured to display optical element graphics (A, B,
(C) inputting or changing optical characteristics by using a graphic display unit (8) for displaying the optical system on the display and an optical element graphic on the display directly specified by the data input unit; A figure recognizing unit (9) for recognizing an optical element, and an optical calculating unit for performing optical calculation of the optical system based on the data of the recognized optical element in real time when the data of the recognized optical characteristic is input or changed. (10) and a result display unit (11) for displaying the result of the optical calculation on the display in real time.

In the computer readable recording medium and the optical system design system, the display (4)
By directly indicating the above optical element graphic (A, B, C), an optical element whose optical characteristic is to be input or changed is recognized, and when data of the optical characteristic of the optical element is input or changed, the data is based on the data. The optical calculation of the optical system is performed, and furthermore, the graphical result such as the shape of the optical element, the graphic pattern such as the light beam passing through the optical system, and the numerical information such as the aberration value are displayed on the display interactively and in real time. Therefore, a series of operations of “command input”, “various optical calculations”, “result display” and “judgment”, which are the basics of the design work of the optical system designer, can be integrated on the computer display, and advanced judgment of the optical system design Processing can be accelerated.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a computer-readable recording medium storing a program for designing an optical system according to the present invention and an optical system design system will be described below with reference to FIGS. 1 to 20. explain. In these figures, reference numeral 1 denotes an operation unit, 2 denotes a storage unit, 3 denotes an input unit, and 4 denotes a display.

The optical system design system of the present embodiment comprises a plurality of optical elements such as a projection optical system of an exposure apparatus, an illumination optical system and an alignment optical system, a photographic lens, a microscope lens, and an endoscope lens. The optical system is designed to have the function of ray tracing (paraxial, astigmatism, skew, etc.) for calculating the optical path of the optical system, etc. And a function for calculating a spot diagram and the like. As shown in FIG. 1, the optical system design system includes an arithmetic unit 1 for performing optical calculation and performance evaluation calculation of the optical system, and a RAM, a ROM, and the like for storing an optical system design program executed by the arithmetic unit 1. A storage unit 2, an input unit (data input unit) 3 for inputting data of an optical system to the arithmetic unit 1, an output unit 5 having a display 4 for displaying information of the optical system, optical calculation, and performance evaluation calculation; An external storage device 6 such as a hard disk,
The computer is provided with an input unit 3, an output unit 5, and an input / output interface unit 7 for inputting and outputting data between the external storage device 6 and the arithmetic unit 1 and the storage unit 2.

Based on the optical system design program stored in the storage unit 2, the arithmetic unit 1 converts the optical system into optical element figures A, B, and B corresponding to the optical elements as shown in FIGS.
A graphic display section 8 displayed on the display 4 as C;
A graphic recognition unit 9 for recognizing the optical element graphics A, B, and C on the display 4 directly specified by the input unit 3 as optical elements to be input or changed in optical characteristics, and data of the recognized optical characteristics of the optical elements Is input by the input unit 3, an optical calculation unit 10 that performs optical calculation and performance evaluation calculation of the optical system based on the data, and a result display unit 11 that displays the results of the optical calculation and performance evaluation calculation on the display 4. It is composed of

The input unit 3 includes a keyboard 12 that can directly indicate the optical element figures A, B, and C by key input, and a pointing device that can directly indicate the position of the pointer 13 on the main screen 17 displayed on the display 4. (Mouse, pen, trackball, etc.) 14, CD-ROM, FD,
There is provided a drive 16 capable of inputting optical data or an optical system design program optically or magnetically recorded from a storage medium such as an MO or a magnetic tape to the storage unit 2. Note that the optical system design program stores the R
It may be stored in the OM or the external storage device 6.

The output unit 5 includes a display 4 such as a CRT or a liquid crystal display, and an FD.
The optical disc drive includes an output drive (not shown) for storing data and the like of the optical system in a storage medium such as an optical disk and an MO, and a printer (not shown) for printing a graphic display of the optical system and information on optical calculations.

The graphic display unit 8 has a function of changing the display state of the optical element figures A, B, and C directly instructed by the figure recognizing unit 9 on the display 4. At least one of the color, brightness, pattern or line type of B and C can be changed, or the designated optical element graphics A, B and C can be blinked.

The graphic display section 8 displays additional optical element figures D, E, and F corresponding to optical elements that can be added to the optical system on the display 4 separately from the optical element figures A, B, and C. The figure recognizing unit 9 is capable of recognizing an optical element to be added to the optical system by directly specifying the additional optical element figures D, E, and F.

The optical calculator 10 can move, add, and delete optical elements corresponding to the optical element figures A, B, and C that have been directly designated. The graphic display unit 8 can move on the display 4 in a state where the optical element figures A, B, and C are directly instructed by the input unit 3, and the optical calculation unit 10 outputs the optical element figures A, B, and C. According to the display position, the position where the corresponding optical element is moved or added can be input as data. Further, the optical calculation unit 10 can calculate by inputting or changing data of a plurality of optical characteristics at the same time in a state where the subordinate relationship is maintained between the plurality of optical characteristics.

The result display section 11 displays the results of the optical calculation and the performance evaluation calculation in a diagram, a graph or a table. Further, the graphic display section 8 displays the optical element graphics A, B, C
Is displayed on the main screen 17 on the display 4, and the result display unit 11 displays the results of the optical calculation and the performance evaluation calculation on the child screen 1, which is a separate screen independent of the main screen 17, as shown in FIG.
8a, 18b,... Can be displayed.

The arithmetic unit 1 includes a plurality of optical element figures A, B,
By directly instructing C, data can be input to a plurality of optical elements. In addition, the arithmetic unit 1 includes an optical system design program (OR) different from the optical system design program of the present invention.
Data generated by a commercial program such as CODEV of Company A) can be input as data of the optical system, and the design result of the optical system by the optical system design program of the present invention can be input to the optical system design program of the present invention. Can be output to another storage medium or the like via the external storage device 6 or the drive of the output unit 5 as data that can be executed (input) by another optical system design program (commercially available program or the like).

Next, an optical system design program by the optical system design system of the present embodiment will be described with reference to the flowchart shown in FIG. The optical system design program of the present invention for realizing the function of the arithmetic unit 1 is recorded on a computer-readable recording medium, and the program recorded on the recording medium is read and executed by a computer system. Perform optical system design processing.

First, lens data created by a commercial program such as CODEV of ORA company is input to the input unit 3.
Is read from the drive 16 via the input / output interface unit 7 (step S1 in FIG. 4). The read lens data is stored in the storage unit 2 as a list structure in which the lens objects 19 as shown in FIG. 5 corresponding to the optical elements in one-to-one correspondence are linked by pointers as shown in FIG. The lens data may be input from the beginning with the keyboard 12 or the like without reading from the drive 16, but as described above, by inputting the lens data created by a commercially available program or the like from the drive 16, It is possible to save time and effort for data input, and it is possible to perform design based on data of an optical system designed to some extent in advance.

Based on the lens data, the graphic display unit 8 of the arithmetic unit 1 displays the optical element figures A, B, and C corresponding to the respective optical elements of the lens data on the display 4 as shown in FIG. Is displayed on the main screen 17. As described above, data generated by an optical system design program different from the optical system design program of the present embodiment can be input as optical system data and displayed on the display 4.

Next, the pointing device 14 such as a mouse is operated to directly designate and select the optical element graphic B corresponding to the optical element to be changed on the display 4 as shown in FIG. 7 (step S2). .

For example, a case where the value of the radius of curvature is changed will be described. First, the user operates the pointing device 14 such as a mouse to bring the pointer 13 close to the lens surface of the optical element graphic B corresponding to the optical element to be changed, as shown in FIG. Directly instruct at 14. At this time, the figure recognizing unit 9 of the arithmetic unit 1 recognizes that the instruction is an input or change instruction of the optical characteristic of the optical element corresponding to the optical element figure B on the display 4 which is directly instructed, 8, changes the display state of the optical element figure B directly instructed on the display 4, as shown in FIG.

That is, in the present embodiment, the line indicating the lens surface of the designated optical element graphic B is blinked on the display 4. In FIG. 8, a plurality of diagonal lines are described around the designated lens surface in order to express the blinking state in the figure, but the diagonal lines are not always displayed on the actual main screen 17. As another change of the display state, the color of the line indicating the lens surface may be changed from black to red, the brightness of the line may be changed, or the type of the line may be changed from the solid line to the broken line. Also, when the entire optical element graphic is directly instructed, the color in the optical element graphic can be changed from just white to red, or the pattern in the optical element graphic can be changed from a simple blank to a hatched pattern. I do not care.

Next, the radius of curvature on the lens surface of the optical element graphic B, which has been directly designated, is changed by pressing a button of the pointing device 14 or a key of the keyboard 12 whose operation function is registered in advance with respect to increase or decrease of the value of the radius of curvature. (Step S3). At this time, the optical calculation unit 10 of the calculation unit 1 performs the optical calculation of the optical system based on the input or changed data of the radius of curvature input by the pointing device 14 or the like, and the performance evaluation calculation of the optical system based on the result. At the same time, the result display unit 11 of the operation unit 1 displays the results of the optical calculation and the performance evaluation calculation on the display 4.

That is, as shown in FIG. 8, the optical path L optically calculated by the optical calculator 10 is continuously redrawn on the display 4 as shown in FIG. The line representing the lens surface B also changes and is displayed in real time according to the change in the value of the radius of curvature.

The result display section 11 can display the input or change of the optical characteristics and the calculation results, for example, the effective diameter and the like on the display 4 as a table.
When the operation button "F1" displayed on the screen is designated by the pointing device 14, as shown in FIG. 9, the input or change of the optical characteristics indicating the surface type, the surface number, the curvature radius, the surface interval, the effective diameter, the glass material, and the like are performed. And the calculation result can be displayed on the main screen 17 in real time as a table of the child screen 18a.

Further, the result display unit 11 can also graphically display the performance evaluation calculation results of the optical system. For example,
When the operation button “F2” displayed on the main screen 17 is pointed by the pointing device 14, a graph of spherical aberration, astigmatism, distortion, chromatic aberration of magnification, and lateral aberration is displayed as the main screen 18b as shown in FIG. It is displayed over the screen 17. When the operation button “F3” displayed on the main screen 17 is pointed by the pointing device 14, the graph of the wavefront aberration is displayed on the child screen 1 as shown in FIG.
8c is superimposed on the main screen 17 and displayed.

When another operation button or the like displayed on the main screen 17 is designated by the pointing device 14, as shown in FIG. 12, FIG. 13, FIG. 14 and FIG. , The point image intensity versus defocus, and the wave optical MTF graphs are the sub-screens 18d, 18e, 18
f and 18g are superimposed and displayed on the main screen 17.

Next, a case where the value of the surface interval is changed will be described.

First, the pointing device 14 such as a mouse is operated to bring the pointer 13 close to the center of the lens of the optical element graphic A corresponding to the optical element to be changed, as shown in FIG. Is directly instructed by the pointing device 14. At this time, the figure recognizing unit 9 of the arithmetic unit 1 recognizes that it is an instruction to input or change the optical characteristic of the optical element corresponding to the optical element figure A on the display 4 which has been directly instructed, 8 changes the display state on the display 4 of the optical element graphic A directly instructed, as shown in FIG. That is, the center line portion at the center of the designated optical element graphic A is blinked. In FIG. 17, as in FIG.
In order to express the blinking state in the figure, a plurality of oblique lines are described around the center line portion of the designated optical element graphic A.
Oblique lines are not always displayed on the main screen 17.

Next, with respect to the increase or decrease of the plane spacing, the plane spacing of the optical element graphic A which is directly instructed is changed by pressing a button of the pointing device 14 or a key of the keyboard 12 whose operation function is registered in advance. At this time, the optical calculation unit 10 of the calculation unit 1
At the same time, the optical calculation of the optical system and the performance evaluation calculation of the optical system based on the result are performed on the basis of the input or changed data of the surface interval input by the user, and the result display unit 1 of the arithmetic unit 1
As in the case where 1 is the radius of curvature described above, the results of the optical calculation and the performance evaluation calculation are displayed on the display 4. Note that, after performing these editing processes, an undo that returns to the state before the editing and a redraw that repeats the same editing process are also possible.

A case of performing a bending operation (changing the radius of curvature of a designated surface to keep the focal length constant when a certain optical characteristic is changed) will be described.
Here, a case where the surface distance of the optical element is changed to keep the focal length of the entire optical system constant will be described.

First, the pointing device 14 such as a mouse is operated to bring the pointer 13 close to the lens surface to be bent of the optical element figure f corresponding to the optical element to be bent, as shown in FIG. Point the lens surface on the display 4 with the pointing device 1
Instruct 4 directly. Next, among the optical element figures a to f,
The pointer 13 is brought closer to the center of the lens of the optical element graphics c and e corresponding to the optical element to be changed, and the center of the lens is directly indicated on the display 4 by the pointing device 14.

At this time, the figure recognizing section 9 of the arithmetic section 1 recognizes that the input or change of the surface interval of the optical element corresponding to the optical element figure c on the display 4 which has been directly instructed, and recognizes the optical element figure. The designated surface of f is recognized as an optical element to be bent. Further, the graphic display unit 8
(B), the display state of the optical element graphics c and f directly instructed on the display 4 is changed. That is, the center line portion of the designated optical element graphics c and e and the bending designation surface of the optical element graphic f are blinked.

Next, with respect to the increase or decrease of the surface spacing, the operation of the pointing device 14 or the key of the keyboard 12 whose operation function is registered in advance changes the surface spacing of the optical element figures c and e which are directly designated. . At this time,
At the same time as the optical calculation unit 10 of the calculation unit 1 calculates the bending based on the input or change data of the surface interval input by the pointing device 14 or the like, the calculation unit 1
The result display unit 11 displays the result of the optical calculation on the display 4 as shown in FIG. That is, when the surface spacing of the designated optical element figures c and e is changed, the shape of the optical element figure f bent in real time on the basis of the calculation result is deformed and displayed on the display 4.

It is also possible to perform an undo that returns to the state before the editing (before the change) after performing these editing processes or a redraw that repeats the same editing process.

The selected optical element figure is edited to determine whether or not the desired optical system characteristics have been obtained, ie, whether or not the design or change has been completed (step S4 in FIG. 4). If not completed, the pointing device 14 again selects the optical element graphic A or the like to edit or change the optical element parameters. When the design or change is completed, a data file for controlling an automatic design function for another optical system design program is created based on the optical system data (step S5), and the external storage device 6 or the output unit 5 is prepared. Is output (stored) to an FD or the like together with the optical system data via the drive of (1).

In addition to the above-described values of the radius of curvature and the surface interval, the following editing of the optical element, change of the optical element parameters, and the like are possible. "Editing optical elements"
Deletion, addition, movement, copying of an optical element, inversion of an optical element alone, inversion of the entire optical system / part, copying and inversion of a group of optical elements (creation of an optical element group symmetric to the original optical element group), etc. It is possible to copy an optical element in the optical system described above and to perform proportional enlargement / reduction of the entire optical system.

For example, when an optical element is added, it can be easily performed by a so-called drag-and-drop operation of the pointing device 14 on the display 4. That is, as shown in FIG. 3, additional optical element figures D, E, and D corresponding to optical elements that can be added to the optical system.
A state where the additional optical element graphic moves following the movement of the pointer by operating the pointing device 14 by directly pointing any one of the F with the pointing device 14;
This is in a dragged state. The additional optical element figures D, E, and F are displayed on a sub-screen 18h that can be arbitrarily displayed.

At this time, the figure recognizing section 9 recognizes the designated additional optical element figure D as an optical element to be added to the optical system. As shown in FIG. 18, the additional optical element graphic D is dragged on the display 4 and dropped at the position where the additional optical element graphic D is to be added (by releasing the button of the pointing device 14 and canceling the drag state), thereby setting the additional position. Determine and perform optical calculations. That is, the additional optical element graphic D is dragged and moved on the display 4 while directly instructed, and the position where the corresponding optical element is added is input as data by the drop position of the additional optical element graphic D.

When the optical element is moved, the corresponding optical element graphic is dragged, and the position where the corresponding optical element is moved or added is input as data according to the display position of the dropped optical element graphic. When an optical element is to be deleted, a corresponding optical element figure is directly designated by the pointing device 14 and a delete key on the keyboard 12 is input in that state, or an operation on the main screen 17 is performed by the pointing device 14. Button "Edit"
To display a so-called pull-down menu, and press the operation button “DELETE” in the pull-down menu with the pointing device 14 to delete the menu.

The “optical element parameters (optical characteristics)” include a glass material, a refractive index distribution of a refractive index distribution type glass material, a refractive index of the glass material, a transmittance of the glass material, a radius of curvature, a surface interval,
There are an aspheric coefficient, a diffraction order, a grating pitch, parameters for forming a special surface described later, and the like. The “optical system design parameters (optical characteristics)” include spherical surface, reflective surface, special surface (cylindrical surface, conic surface, toroidal surface, aspherical surface (quadric surface + polynomial), spline surface,
Anamorphic aspherical surface, diffraction grating, holographic surface, superconic surface, odd-order polynomial surface, standard Zernike surface, XY polynomial surface, extended spline surface, mixed elliptical condensing surface, Fresnel surface on right-angle cone, plane substrate Upper Fresnel surface, segment surface, lenticular surface, fly eye surface, toric surface), no sequential surface, uniquely defined surface, polygon mirror, focal length of all optical systems,
Magnification of all optical systems, total length of optical system, defocus of image plane,
Image height, object height, numerical aperture (NA), object-side numerical aperture, entrance pupil diameter, vignetting relative to entrance pupil diameter, wavelength, angle of view, wavelength weight, surface shift amount, surface tilt amount, center shielding amount, Specially shaped openings (rectangular, polygonal, elliptical, combinations thereof),
Tolerance, working distance, reflectivity of mirror, angle of optical axis of chief ray etc., start coordinate and direction cosine of ray, refractive index of optical system environment (change of refractive index of air etc. due to atmospheric pressure / temperature change), etc. is there.

Note that one-to-one, one-to-n or n-to-m (n, m
Can be changed while maintaining the relationship between the optical element parameters (for example, zooming, focusing, and the like), and the plurality of optical elements can be changed while maintaining the dependency between the plurality of optical characteristics. Characteristic data is entered or changed simultaneously and automatically calculated. Further, as the performance evaluation calculation, the focal length of the partial optical system, optical path length, aberration calculation, best image plane position calculation, wavefront aberration calculation, spot diagram, point image intensity distribution calculation, geometric optical MTF calculation, Calculation of wave optical MTF, third order /
Calculation of fifth-order or higher aberration coefficients, calculation of the incidence (emission) angle of light rays to / from optical elements, spectral transmittance analysis, ghost analysis, narcissus analysis, spectral analysis, multilayer film transmission / reflection analysis, illumination Analysis, Gaussian beam propagation analysis, fiber coupling analysis, partial coherent analysis, zoom construction parameter analysis, cam lens cam data calculation, atmospheric pressure fluctuation analysis, temperature fluctuation analysis, irradiation fluctuation analysis,
Aspherical curvature and curvature change rate, flare analysis, telecentricity, pupil aberration amount, image plane illuminance calculation, chromatic aberration calculation, polarization analysis, prototype alignment calculation, etc. can be executed, and the calculation results are shown in figures and graphs. Can be displayed. When inputting the data of the optical elements, the data can be simultaneously input to the plurality of optical elements by directly designating the plurality of optical element figures with the pointing device 14. In the present invention, “input or change of optical characteristics” refers to changing the radius of curvature or surface interval of the optical element as described above, and further, “editing the optical element”, “optical element parameters”, “optical system design parameters”. And changes in the characteristics described in the description.

The technical scope of the present invention is not limited to the above embodiment, and various changes can be made without departing from the spirit of the present invention.

For example, the storage unit 2 may be a non-volatile memory such as a hard disk drive, a magneto-optical disk drive, a flash memory, a read-only storage medium such as a CD-ROM, or a RAM (Random Access Memory). It is configured by a volatile memory or a combination thereof. The arithmetic unit 1 is configured by a CPU (central processing unit) and the like. As described above, the program for implementing the functions of the arithmetic unit 1 is loaded into the storage unit 2 as a memory and executed. In addition to the function that realizes the function, the function may be realized by dedicated hardware.

The “computer-readable recording medium” is a portable medium such as a floppy (registered trademark) disk, a magneto-optical disk, a ROM, a CD-ROM, or a storage device such as a hard disk built in a computer system. That means. In addition, a "computer-readable recording medium" is a program for dynamically storing a program for a short time, such as a communication line for transmitting a program via a network such as the Internet or a communication line such as a telephone line. In this case, a program that holds a program for a certain period of time, such as a volatile memory in a computer system serving as a server or a client in that case, is also included. Further, the above-mentioned program may be for realizing a part of the above-mentioned functions, or may be for realizing the above-mentioned functions in combination with a program already recorded in a computer system. .

[0051]

According to the present invention, the following effects can be obtained.
According to the computer-readable recording medium and the optical system design system of the present invention, an optical element for inputting or changing an optical characteristic by directly indicating an optical element graphic on a display is recognized, and the optical characteristic of the optical element is recognized. When the data is input or changed, the optical calculation of the optical system is performed based on the data in real time, and the result of the optical calculation is displayed on the display in real time. By directly instructing, it is possible to interactively perform a design operation while confirming the result of the optical calculation in real time with numerical values, figures, and the like, thereby facilitating advanced judgment processing of the optical design. Therefore, a series of operations in the optical system design can be integrated by using the concept of a graphic, thereby facilitating an advanced judgment process of the optical system designer, and improving the efficiency of the optical system design and shortening the design time. be able to. In addition, the optical calculation and the result display of the optical calculation are simultaneously performed in real time according to the input or change of the optical characteristic, so that the calculation result can be immediately known, and the judgment process of the optical system designer can be further promoted. Can be.

Further, according to the computer readable recording medium and the optical system design system of the present invention, the optical element graphic can be directly pointed by the pointing device, so that the optical element on the display can be indicated by a pointer using a mouse or the like. The figure can be visually grasped and instructed, and the high operability makes it possible to quickly and accurately designate the figure.

Further, according to the computer-readable recording medium and the optical system design system of the present invention, the optical element figure can be directly designated by key input of the keyboard, so that the optical element figure can be optically input by one or several key inputs. The element figure can be reliably specified, and it becomes easy to simultaneously input numerical values of optical data.

Further, according to the computer-readable recording medium and the optical system design system of the present invention, by directly changing the display state of the optical element graphic designated, the designated optical element graphic can be displayed on the display. It can be easily grasped.

Further, according to the computer-readable recording medium and the optical system design system of the present invention, the change of the display state can be directly controlled by the color, brightness,
By changing at least one of the pattern or line types or directly blinking the designated optical element graphic, the designated optical element graphic becomes visually clear and the shape and arrangement of the optical element graphic itself are changed. Since it is not performed, the optical system can be accurately grasped on the display.

Further, according to the computer-readable recording medium and the optical system design system of the present invention, it is possible to move, add and delete optical elements corresponding to optical element figures directly designated, thereby achieving accurate and accurate operation. In addition, it is possible to design an optical system quickly and to increase the creativity of an optical system designer.

Further, according to the computer-readable recording medium and the optical system design system of the present invention, the optical element graphic can be moved on the display while directly indicating the optical element graphic, and the optical element corresponding to the display position of the optical element graphic can be changed. By making it possible to input the movement or addition position of the element as data, the movement or addition position of the optical element can be visually grasped on the display, and the position data of the optical element to be changed can be easily input. can do.

According to the computer-readable recording medium and the optical system design system of the present invention, an additional optical element graphic corresponding to an optical element that can be added to the optical system is displayed on a display separately from the optical element graphic. By directly indicating the additional optical element graphic and recognizing the optical element to be added to the optical system, the optical element to be added can be visually selected on the display, and the data of the optical element to be added can be displayed. The trouble of inputting from the beginning can be omitted, and the addition of an optical element becomes easy.

According to the computer-readable recording medium and the optical system design system of the present invention, the performance evaluation calculation of the optical system is performed based on the result of the optical calculation, and the result of the performance evaluation calculation is represented by a graph or a table. By displaying at least one of the above, the result of the performance evaluation calculation can be arbitrarily or real-time confirmed on a display in a diagram or a graph, and the quality of the design can be easily determined.

Further, according to the computer-readable recording medium and the optical system design system of the present invention, the optical element graphic is displayed on the main screen on the display, and the result of the performance evaluation calculation is displayed on a separate screen independent of the main screen. By enabling the display, various performance evaluation calculation results can be confirmed on another screen on the display while comparing with the optical element figure on the main screen.

According to the computer readable recording medium and the optical system design system of the present invention, data of a plurality of optical characteristics can be input or changed simultaneously while maintaining a dependency between the plurality of optical characteristics. By making the calculation possible, it is easy to input or change the mutually dependent data, and the design becomes easier.

Further, according to the computer-readable recording medium and the optical system design system of the present invention, it is possible to directly designate a plurality of optical element figures and to input or change data to the plurality of optical elements. Data of a plurality of optical elements can be input at the same time, and data input and optical calculations can be performed efficiently.

Further, according to the computer-readable recording medium and the optical system design system of the present invention, data generated by an optical system design program different from the program of the present invention is input as optical system data and displayed. By enabling display above, it is not necessary to input optical system data from scratch, and it is possible to perform design based on optical system data that has been designed to some extent in advance, thereby achieving more efficient design. Can be.

According to the computer-readable recording medium and the optical system design system of the present invention, the result of the change of the data of the optical characteristics based on the optical calculation is executed by an optical system design program different from the program of the present invention. By outputting the data as possible data, further detailed optical system design and performance evaluation calculation can be easily performed by another optical system design program based on the change result of the optical characteristic data obtained by the program of the present invention. Can be done.

[0065]

[Brief description of the drawings]

FIG. 1 is a system configuration diagram showing an embodiment of a computer-readable recording medium and an optical system design system according to the present invention.

FIG. 2 shows an embodiment of a computer-readable recording medium and an optical system design system according to the present invention.
It is a block diagram which shows each functional structure of a calculation part.

FIG. 3 shows an embodiment of a computer-readable recording medium and an optical system design system according to the present invention.
FIG. 7 is a diagram illustrating a main screen on a display before an optical element graphic is designated by a pointing device.

FIG. 4 shows a computer-readable recording medium and an optical system design system according to an embodiment of the present invention.
5 is a flowchart illustrating an optical system design method.

FIG. 5 shows an embodiment of a computer-readable recording medium and an optical system design system according to the present invention.
FIG. 3 is a block diagram illustrating a data structure of one optical element used in an optical system design program.

FIG. 6 shows an embodiment of a computer-readable recording medium and an optical system design system according to the present invention.
FIG. 3 is a block diagram illustrating a data structure of the entire optical system adopted by the optical system design program.

FIG. 7 shows an embodiment of a computer-readable recording medium and an optical system design system according to the present invention.
FIG. 7 is a diagram showing a main screen on a display in a state where a pointer is moved to a lens surface of an optical element graphic to be selected by a pointing device.

FIG. 8 shows an embodiment of a computer-readable recording medium and an optical system design system according to the present invention.
FIG. 9 is a diagram illustrating a main screen in a state where a lens surface of an optical element graphic directly instructed by a pointing device is blinking.

FIG. 9 shows an embodiment of a computer-readable recording medium and an optical system design system according to the present invention.
It is a figure showing the child screen on the display which showed the table of the data of the optical system.

FIG. 10 is a graph of a performance evaluation calculation result (a graph of a spherical aberration or the like) in one embodiment of the computer-readable recording medium and the optical system design system according to the present invention.
FIG. 7 is a diagram in which a child screen on a display showing “.” Is superimposed on a main screen.

FIG. 11 shows a computer-readable recording medium and an optical system design system according to an embodiment of the present invention, in which a child screen on a display showing a graph of performance evaluation calculation results (graph of wavefront aberration) is superimposed on a main screen. FIG.

FIG. 12 is a diagram showing a child screen on a display showing a graph (geometric optical MTF) of a performance evaluation calculation result in an embodiment of a computer-readable recording medium and an optical system design system according to the present invention. .

FIG. 13 is a graph (wavelength-transmittance graph) of a performance evaluation calculation result in one embodiment of the computer-readable recording medium and the optical system design system according to the present invention.
It is a figure which shows the child screen on the display which showed.

FIG. 14 shows a child screen on a display showing a graph (defocus-point image intensity graph) of a performance evaluation calculation result in one embodiment of the computer-readable recording medium and the optical system design system according to the present invention. FIG.

FIG. 15 is a diagram showing a child screen on a display showing a graph (wave optical MTF graph) of a performance evaluation calculation result in one embodiment of the computer-readable recording medium and the optical system design system according to the present invention. is there.

FIG. 16 shows a main screen on a display in a state where a pointer is moved to a central portion of an optical element graphic to be selected by a pointing device in an embodiment of a computer-readable recording medium and an optical system design system according to the present invention. FIG.

FIG. 17 shows a main screen in a state where the center line of the central part of the optical element graphic directly designated by the pointing device is blinking in the computer-readable recording medium and the optical system design system according to the embodiment of the present invention. FIG.

FIG. 18 is a diagram showing a main screen before a bending operation and various instruction states for bending in an embodiment of the computer-readable recording medium and the optical system design system according to the present invention.

FIG. 19 is a diagram showing a main screen after bending is performed in an embodiment of the computer-readable recording medium and the optical system design system according to the present invention.

FIG. 20 is a diagram showing a main screen when adding an optical element graphic in the computer-readable recording medium and the optical system design system according to the embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Calculation part 2 Storage part 3 Input part (data input part) 4 Display 5 Output part 6 External storage device 8 Graphic display part 9 Graphic recognition part 10 Optical calculation part 11 Result display part 12 Keyboard 13 Pointer 14 Pointing device 16 Drive 17 Main Screens 18a, 18b, 18c, 18d, 18e, 18f, 1
8g, 18h Subscreen A, B, C, a, b, c, d, e, f Optical element figure D, E, F Additional optical element figure L Optical path

Claims (28)

[Claims] 1. A computer-readable recording medium on which a program for designing an optical system composed of a plurality of optical elements is recorded, wherein the program is an optical element graphic corresponding to the optical element on a display. A first step of displaying an optical system; a second step of recognizing the optical element for inputting or changing optical characteristics by directly indicating the optical element graphic on the display; and the recognized optical element. A third step of performing an optical calculation of the optical system based on the data in real time when the data of the optical characteristic is input or changed; and a fourth step of displaying the result of the optical calculation on the display in real time. And a computer-readable recording medium. 2. The computer-readable recording medium according to claim 1, wherein in the second step, the optical element graphic can be directly designated by a pointing device. 3. The computer-readable recording medium according to claim 1, wherein in the second step, the optical element graphic can be directly designated by key input of a keyboard. 4. The computer-readable recording medium according to claim 1, wherein the second step changes a display state of the optical element graphic directly instructed. 5. The method according to claim 5, wherein the change in the display state is a change in at least one of a color, a brightness, a pattern, or a line type of the directly indicated optical element graphic or a blink of the directly indicated optical element graphic. The computer-readable recording medium according to claim 4, wherein: 6. The method according to claim 1, wherein in the third step, movement, addition and deletion of the optical element corresponding to the optical element figure directly designated can be input as the data. A computer-readable recording medium according to any one of the above. 7. The method according to claim 7, wherein the third step comprises: moving the optical element on the display in a state in which the optical element graphic is directly instructed, and setting a position for moving or adding the optical element corresponding to a display position of the optical element graphic. The computer-readable recording medium according to claim 6, wherein the recording medium can be input as the data. 8. The first step displays an additional optical element graphic corresponding to an optical element that can be added to the optical system on the display separately from the optical element graphic. The second step includes: 8. The computer-readable recording medium according to claim 6, wherein an optical element to be added to the optical system can be recognized by directly indicating the additional optical element graphic. 9. The third step performs a performance evaluation calculation of the optical system based on a result of the optical calculation, and the fourth step calculates a result of the performance evaluation calculation by at least a graph or a table. 9. The computer-readable recording medium according to claim 1, wherein the recording medium is displayed as one. 10. The first step displays the optical element graphic on a main screen on the display, and the fourth step displays a result of the performance evaluation calculation on a separate screen independent of the main screen. 10. The computer-readable recording medium according to claim 9, wherein the recording medium can be displayed. 11. The method according to claim 11, wherein the third step is capable of calculating by simultaneously inputting or changing data of a plurality of optical properties while maintaining a dependency between the plurality of optical properties. Item 11. A computer-readable recording medium according to any one of Items 1 to 10. 12. The method according to claim 1, wherein the third step is capable of directly inputting or changing the data for a plurality of the optical elements by directly designating a plurality of the optical element figures. The computer-readable recording medium according to any one of the above. 13. The method according to claim 1, wherein in the first step, data generated by an optical system design program different from the program is input as data of the optical system and can be displayed on the display. A computer-readable recording medium according to claim 1. 14. The computer executes a fifth step of outputting a change result of data of optical characteristics based on the optical calculation as data executable by an optical system design program different from the program to a computer. 14. The computer-readable recording medium according to claim 1, wherein the recording medium is read. 15. An optical system design system for designing an optical system composed of a plurality of optical elements, comprising: an arithmetic unit for performing an optical calculation of the optical system; and a data input for inputting data of the optical system to the arithmetic unit. And a display that displays information of the optical system and the optical calculation, the arithmetic unit is a graphic display unit that displays the optical system on the display as an optical element graphic corresponding to the optical element, Using an optical element graphic on the display directly instructed by the data input unit, a graphic recognition unit recognizing the optical element for inputting or changing optical characteristics, and data of the recognized optical characteristics of the optical element Is input or changed, an optical calculation unit that performs an optical calculation of the optical system based on the data in real time; and Optics design system and having a result display unit for displaying on a display. 16. The optical system design system according to claim 15, wherein said data input unit includes a pointing device capable of directly indicating said optical element graphic. 17. The optical system design system according to claim 15, wherein the data input unit includes a keyboard capable of directly indicating the optical element graphic by key input. 18. The optical system design system according to claim 15, wherein said graphic display unit changes a display state of said optical element graphic directly specified by said graphic recognition unit. . 19. The method according to claim 19, wherein the change in the display state is a change in at least one of a color, a brightness, a pattern or a line type of the directly indicated optical element graphic, or a blink of the directly indicated optical element graphic. The optical system design system according to claim 17, wherein: 20. The optical calculation unit according to claim 15, wherein the optical calculation unit is capable of moving, adding, and deleting the optical element corresponding to the optical element figure directly instructed.
10. The optical system design system according to any one of 9. 21. The graphic display unit is movable on the display in a state where the optical element graphic is directly instructed by the data input unit, and the optical calculation unit is located at a display position of the optical element graphic. 21. The optical system design system according to claim 20, wherein a corresponding movement or addition position of the optical element can be input as the data. 22. The graphic display unit displays an additional optical element graphic corresponding to an optical element that can be added to the optical system on the display separately from the optical element graphic. 22. The optical system design system according to claim 20, wherein an optical element to be added to the optical system can be recognized by directly indicating an optical element graphic. 23. The optical calculation unit performs a performance evaluation calculation of the optical system based on a result of the optical calculation, and the result display unit displays the result of the performance evaluation calculation in at least one of a graph or a table. The optical system design system according to any one of claims 15 to 22, wherein the optical system design is displayed. 24. The graphic display unit displays the optical element graphic on a main screen on the display, and the result display unit can display a result of the performance evaluation calculation on a separate screen independent of the main screen. The optical system design system according to claim 23, wherein: 25. The optical calculation unit according to claim 25, wherein data of a plurality of optical characteristics can be input or changed at the same time, and the calculation can be performed in a state where a dependency relationship is maintained between the plurality of optical characteristics. 25. The optical system design system according to any one of 15 to 24. 26. The apparatus according to claim 15, wherein the arithmetic unit is capable of directly inputting or changing the plurality of optical elements by directly designating the plurality of optical element figures. The optical system design system according to 1. 27. The computer according to claim 27, wherein the calculation unit inputs data generated by an optical system design program different from the program as data of the optical system, and can display the data on the display. 27. The optical system design system according to any one of 15 to 26. 28. The computer according to claim 28, wherein the calculation unit is capable of outputting a change result of the data of the optical characteristic based on the optical calculation as data executable by an optical system design program different from the program. Item 28. The optical system design system according to any one of Items 15 to 27.