JP2002059369A - Biodegradable polishing film and its manufacturing method - Google Patents
Biodegradable polishing film and its manufacturing methodInfo
- Publication number
- JP2002059369A JP2002059369A JP2000247521A JP2000247521A JP2002059369A JP 2002059369 A JP2002059369 A JP 2002059369A JP 2000247521 A JP2000247521 A JP 2000247521A JP 2000247521 A JP2000247521 A JP 2000247521A JP 2002059369 A JP2002059369 A JP 2002059369A
- Authority
- JP
- Japan
- Prior art keywords
- biodegradable
- film
- polishing
- resin
- plastic film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 title claims abstract description 35
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 239000006061 abrasive grain Substances 0.000 claims abstract description 17
- 229920006167 biodegradable resin Polymers 0.000 claims abstract description 16
- 229920000704 biodegradable plastic Polymers 0.000 claims abstract description 15
- 239000002985 plastic film Substances 0.000 claims description 21
- 239000002245 particle Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 5
- 239000003973 paint Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 description 12
- 239000011347 resin Substances 0.000 description 11
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 9
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 9
- 239000007789 gas Substances 0.000 description 7
- 229920006255 plastic film Polymers 0.000 description 7
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 6
- 239000002689 soil Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 4
- 238000009933 burial Methods 0.000 description 4
- 238000002485 combustion reaction Methods 0.000 description 4
- 244000005700 microbiome Species 0.000 description 4
- 229920001610 polycaprolactone Polymers 0.000 description 4
- 239000004632 polycaprolactone Substances 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910003460 diamond Inorganic materials 0.000 description 3
- 239000010432 diamond Substances 0.000 description 3
- 239000013505 freshwater Substances 0.000 description 3
- 229920000747 poly(lactic acid) Polymers 0.000 description 3
- 239000004626 polylactic acid Substances 0.000 description 3
- -1 polypropylene Polymers 0.000 description 3
- 239000013535 sea water Substances 0.000 description 3
- 239000010865 sewage Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229920002261 Corn starch Polymers 0.000 description 2
- 229920002472 Starch Polymers 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000008120 corn starch Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000000813 microbial effect Effects 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000003208 petroleum Substances 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229920000856 Amylose Polymers 0.000 description 1
- 241001464430 Cyanobacterium Species 0.000 description 1
- 240000003183 Manihot esculenta Species 0.000 description 1
- 235000016735 Manihot esculenta subsp esculenta Nutrition 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229920003232 aliphatic polyester Polymers 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 229940099112 cornstarch Drugs 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229920005615 natural polymer Polymers 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001592 potato starch Polymers 0.000 description 1
- 108090000623 proteins and genes Proteins 0.000 description 1
- 229940100486 rice starch Drugs 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 235000019698 starch Nutrition 0.000 description 1
- 239000008107 starch Substances 0.000 description 1
- 229940100445 wheat starch Drugs 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する分野】本発明は、金属、セラミックス、
ガラス、半導体材料等の研磨に用いる研磨フィルム及び
その製造方法に関するものである。The present invention relates to metal, ceramics,
The present invention relates to a polishing film used for polishing glass, semiconductor materials, and the like, and a method for producing the polishing film.
【０００２】[0002]
【従来の技術及び発明の解決しようとする課題】金属、
セラミックス、ガラス、半導体材料等の研磨に用いる研
磨フィルムとしては、バインダ樹脂で砥粒を固定した研
磨層をプラスチックフィルムの表面に形成したものが広
く使用されている（例えば、特開昭６２−２０３７６７
号公報、特開平２−８３１７２号公報を参照）。BACKGROUND OF THE INVENTION Metals,
As a polishing film used for polishing ceramics, glass, semiconductor materials, and the like, a film in which a polishing layer in which abrasive grains are fixed with a binder resin is formed on the surface of a plastic film is widely used (for example, Japanese Patent Application Laid-Open No. Sho 62-203767).
JP-A-2-83172).
【０００３】バインダ樹脂としては、石油を原料とする
芳香族ポリエステル、ポリ塩化ビニルなどが使用され、
プラスチックフィルムとしては、上記のバインダ樹脂と
同様に石油を原料とする６−ナイロン、ポリプロピレ
ン、ポリエチレン、ポリエチレンテレフタレート、ポリ
塩化ビニルなどの耐薬品性に優れ、高引張強度を有する
プラスチックフィルムが使用される。[0003] As the binder resin, aromatic polyester, polyvinyl chloride and the like made from petroleum are used.
As the plastic film, a plastic film having excellent chemical resistance and high tensile strength such as 6-nylon, polypropylene, polyethylene, polyethylene terephthalate and polyvinyl chloride made from petroleum as in the case of the binder resin is used. .
【０００４】砥粒としては、アルミナ、ダイヤモンド、
炭化珪素、酸化鉄、酸化珪素等の硬質の粒子が使用され
る。[0004] As abrasive grains, alumina, diamond,
Hard particles such as silicon carbide, iron oxide, and silicon oxide are used.
【０００５】このような研磨フィルムは、使用後回収さ
れ、焼却処理や土中埋没処理等による廃棄処理が行われ
る。[0005] Such a polishing film is collected after use, and is subjected to a disposal process such as an incineration process or a burial process in the soil.
【０００６】しかし、このような研磨フィルムを焼却処
理すると、有害ガスが発生し、環境を汚染することとな
り、また高カロリーの燃焼熱が発生したり、腐食性のガ
スが発生し、焼却炉を損傷する恐れがある。さらに、土
中埋没処理を行った場合、研磨フィルムが土中に半永久
的に残留し、土中埋没処理場の限られたスペースでの廃
棄処理が困難となりつつある。However, when such an abrasive film is incinerated, harmful gases are generated and the environment is polluted. In addition, high calorie combustion heat is generated and corrosive gas is generated, so that the incinerator is burned. There is a risk of damage. Furthermore, when the underground burial treatment is performed, the polishing film remains semipermanently in the soil, and it is becoming difficult to dispose of the abrasive film in a limited space of the underground burial treatment plant.
【０００７】したがって、本発明の目的は、自然分解
し、環境を汚染することのない研磨フィルム及びその製
造方法を提供することである。Accordingly, it is an object of the present invention to provide a polishing film which decomposes spontaneously and does not pollute the environment, and a method for producing the same.
【０００８】[0008]
【課題を解決するための手段】上記目的を解決する本発
明の生分解性研磨フィルムは、バインダ樹脂で砥粒を固
定した研磨層をプラスチックフィルム表面に形成した研
磨フィルムにおいて、バインダ樹脂として生分解性樹脂
を使用し、プラスチックフィルムとして生分解性プラス
チックフィルムを使用したことを特徴とするものであ
る。According to the present invention, there is provided a biodegradable polishing film according to the present invention, wherein a polishing layer having abrasive grains fixed with a binder resin is formed on a plastic film surface. And a biodegradable plastic film is used as the plastic film.
【０００９】砥粒としては、研磨フィルムに使用される
従来既知の硬質の粒子が使用され、燃焼時に有害ガスを
発生せず、環境に無害のアルミナ、ダイヤモンド、炭化
珪素、酸化鉄、酸化珪素等の粒子が使用される。As the abrasive grains, conventionally known hard particles used for a polishing film are used, and do not generate harmful gas during combustion and are harmless to the environment such as alumina, diamond, silicon carbide, iron oxide, silicon oxide and the like. Of particles are used.
【００１０】生分解性樹脂としては、水（淡水、海水、
下水等）や土壌等の環境中で微生物によって分解され、
また燃焼カロリーが低く、有害ガスを発生しない樹脂が
使用され、好適に、ポリカプロラクトンが使用される。As the biodegradable resin, water (fresh water, seawater,
Microorganisms in the environment such as sewage) and soil,
In addition, a resin that has a low combustion calorie and does not generate harmful gas is used, and polycaprolactone is preferably used.
【００１１】生分解性プラスチックフィルムとしては、
上記の生分解性樹脂と同様に自然分解する樹脂を押出し
等の成形手段によりフィルム状に加工したものが使用さ
れ、好適に、ポリ乳酸からなるプラスチックフィルムが
使用される。As a biodegradable plastic film,
A resin which decomposes naturally like the above-mentioned biodegradable resin is processed into a film by molding means such as extrusion, and a plastic film made of polylactic acid is preferably used.
【００１２】[0012]
【発明の実施の形態】図１（ａ）及び（ｂ）に示すよう
に、本発明の生分解性研磨フィルム１０、１０´は、生
分解性樹脂１３で砥粒１２を固定した研磨層１４を生分
解性プラスチックフィルム１１表面に形成したものであ
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIGS. 1 (a) and 1 (b), a biodegradable polishing film 10, 10 'of the present invention comprises a polishing layer 14 in which abrasive grains 12 are fixed with a biodegradable resin 13. Is formed on the surface of the biodegradable plastic film 11.
【００１３】砥粒１２としては、燃焼時に有害ガスを発
生せず、環境に無害のアルミナ、ダイヤモンド、炭化珪
素、酸化鉄、酸化珪素等の粒子が使用される。砥粒の粒
径は、０．００１μｍ〜数十μｍの範囲から研磨用途に
応じて適宜選択される。As the abrasive grains 12, particles of alumina, diamond, silicon carbide, iron oxide, silicon oxide, etc. which do not generate harmful gas during combustion and are harmless to the environment are used. The particle size of the abrasive grains is appropriately selected from the range of 0.001 μm to several tens μm according to the polishing application.
【００１４】生分解性樹脂１３としては、遺伝子をらん
藻等の微生物に導入することによる所謂微生物工場によ
り合成される微生物系樹脂（例えば、平成１２年８月１
０日付日経産業新聞第一面を参照）、ポリカプロラクト
ン（ＰＣＬ）、ポリ乳酸、脂肪族ポリエステル、ヒドロ
キシポリエステル等の化学合成系樹脂（例えば、特開平
４−１４６９２９号公報を参照）、又は馬鈴薯澱粉、タ
ピオカ澱粉、コーンスターチ、ハイアミロースコーンス
ターチ、小麦澱粉、米澱粉等の天然高分子系樹脂（例え
ば、特開平９−７７９１０号公報を参照）が使用され
る。The biodegradable resin 13 is a microbial resin synthesized by a so-called microbial factory by introducing a gene into a microorganism such as a cyanobacterium (for example, August 1, 2000).
0, Nikkei Sangyo Shimbun, page 1), chemically synthesized resins such as polycaprolactone (PCL), polylactic acid, aliphatic polyester, and hydroxy polyester (see, for example, JP-A-4-146929), or potato starch And natural polymer resins such as tapioca starch, corn starch, high amylose corn starch, wheat starch and rice starch (see, for example, JP-A-9-77910).
【００１５】生分解性プラスチックフィルム１１として
は、上記の生分解性樹脂を押出し等の既知の成形手段に
よりフィルム状に加工したものが使用される。フィルム
の厚さは、数十μｍ〜数百μｍの範囲から適宜選択され
る。As the biodegradable plastic film 11, a film obtained by processing the biodegradable resin into a film by a known molding means such as extrusion is used. The thickness of the film is appropriately selected from the range of several tens μm to several hundred μm.
【００１６】図１（ａ）に示す本発明の生分解性研磨フ
ィルム１０は、トルエン、メチルエチルケトン等の溶剤
中に生分解性樹脂１３を溶解した樹脂溶液中に砥粒１２
を分散させた研磨塗料を生分解性プラスチックフィルム
１１の表面に塗布し、乾燥させて研磨塗料中の溶剤を蒸
発させ、生分解性樹脂１３で砥粒１２を固定した研磨層
１４を生分解性プラスチックフィルム１１の表面に形成
することによって製造される。The biodegradable polishing film 10 of the present invention shown in FIG. 1 (a) is obtained by dissolving abrasive grains 12 in a resin solution obtained by dissolving a biodegradable resin 13 in a solvent such as toluene and methyl ethyl ketone.
Is applied to the surface of the biodegradable plastic film 11 and dried to evaporate the solvent in the abrasive paint, and the polishing layer 14 in which the abrasive grains 12 are fixed with the biodegradable resin 13 is biodegradable. It is manufactured by forming on the surface of the plastic film 11.
【００１７】図１（ｂ）に示す本発明の生分解性研磨フ
ィルム１０´は、トルエン、メチルエチルケトン等の溶
剤中に生分解性樹脂１３を溶解した樹脂溶液を塗布した
生分解性プラスチックフィルム１１の表面に砥粒１２を
吹き付け、乾燥させ、樹脂溶液中の溶剤を蒸発させ、生
分解性樹脂１３で砥粒１２を固定した研磨層１４を生分
解性プラスチックフィルム１１の表面に形成することに
よって製造される。The biodegradable polishing film 10 'of the present invention shown in FIG. 1 (b) is formed of a biodegradable plastic film 11 coated with a resin solution obtained by dissolving a biodegradable resin 13 in a solvent such as toluene or methyl ethyl ketone. Manufacturing by spraying abrasive grains 12 on the surface, drying and evaporating the solvent in the resin solution, and forming a polishing layer 14 on which the abrasive grains 12 are fixed with the biodegradable resin 13 on the surface of the biodegradable plastic film 11. Is done.
【００１８】本発明の生分解性研磨フィルムは、水（淡
水、海水、下水等）や土壌等の環境中で微生物によって
分解されるので、土中埋没処理により自然分解する。ま
た、燃焼カロリーが低く、有害ガスを発生しない。The biodegradable polishing film of the present invention is decomposed by microorganisms in the environment such as water (fresh water, seawater, sewage, etc.) and soil, and is naturally decomposed by burial treatment in soil. In addition, the calorie burn is low and no harmful gas is generated.
【００１９】＜実施例＞ 本発明の生分解性研磨フィル
ムを製造した。<Example> A biodegradable abrasive film of the present invention was produced.
【００２０】まず、トルエン、メチルエチルケトン及び
酢酸エチルの混合溶液中でペレット状の生分解性樹脂
（ポリカプロラクトン）（３０重量％）を溶解し、これ
に砥粒を分散させて研磨塗料（固形分７０％）を製造し
た。生分解性樹脂として、市販のセルグリーン（商標）
（ダイセル化学工業株式会社、東京都千代田区霞ヶ関）
を使用し、砥粒として、平均粒径９μｍの炭化珪素粒子
を使用した。First, a biodegradable resin (polycaprolactone) (30% by weight) in the form of pellets is dissolved in a mixed solution of toluene, methyl ethyl ketone and ethyl acetate, and abrasive grains are dispersed therein to form an abrasive paint (solid content 70%). %). As a biodegradable resin, commercially available Cell Green (trademark)
(Daicel Chemical Industries, Kasumigaseki, Chiyoda-ku, Tokyo)
And silicon carbide particles having an average particle diameter of 9 μm were used as abrasive grains.
【００２１】次に、この研磨塗料を生分解性プラスチッ
クフィルム（ポリ乳酸系フィルム）の表面にリバース方
式にて塗布し、６０℃で乾燥して研磨塗料中の溶剤を蒸
発させ、生分解性プラスチックフィルム表面に厚さ２５
μｍの研磨層を形成し、本発明の生分解性研磨フィルム
を製造した。生分解性プラスチックフィルムとして、市
販の厚さ２５μｍのエコロージュ（商標）（三菱樹脂株
式会社、東京都千代田区丸の内）を使用した。Next, this polishing paint is applied to the surface of a biodegradable plastic film (polylactic acid-based film) by a reverse method, and dried at 60 ° C. to evaporate the solvent in the polishing paint. 25 thickness on film surface
A μm polishing layer was formed to produce a biodegradable polishing film of the present invention. As the biodegradable plastic film, a commercially available 25 μm-thick Ecolog ™ (Mitsubishi Resin Co., Ltd., Marunouchi, Chiyoda-ku, Tokyo) was used.
【００２２】[0022]
【発明の効果】本発明が以上のように構成されるので、
以下のような効果を奏する。As the present invention is configured as described above,
The following effects are obtained.
【００２３】本発明の生分解性研磨フィルムは、水（淡
水、海水、下水等）や土壌等の環境中で微生物によって
分解されるので、廃棄処理場に土中埋没しておくだけ
で、自然分解し、また、燃焼カロリーが低く、有害ガス
を発生しないので、環境を汚染することがない、という
効果を奏する。The biodegradable abrasive film of the present invention is decomposed by microorganisms in the environment such as water (fresh water, seawater, sewage, etc.) and soil. It decomposes, burns less calories, and does not generate harmful gases, so it has the effect of not polluting the environment.
【図１】図１（ａ）及び（ｂ）は、それぞれ、本発明の
生分解性研磨フィルムの断面図である。FIGS. 1A and 1B are cross-sectional views of a biodegradable polishing film of the present invention, respectively.
１０、１０´・・・生分解性研磨フィルム １１・・・生分解性プラスチックフィルム １２・・・砥粒 １３・・・生分解性樹脂 １４・・・研磨層 10, 10 ': biodegradable polishing film 11: biodegradable plastic film 12: abrasive grains 13: biodegradable resin 14: polishing layer
Claims (2)
生分解性プラスチックフィルムの表面に形成した、生分
解性樹脂で砥粒を固定した研磨層、から成る生分解性研
磨フィルム。1. A biodegradable polishing film comprising: a biodegradable plastic film; and a polishing layer formed on the surface of the biodegradable plastic film and having abrasive particles fixed with a biodegradable resin.
研磨塗料を生分解性プラスチックフィルムの表面に塗布
し、乾燥させて、前記生分解性樹脂で前記砥粒を固定し
た研磨層を前記生分解性プラスチックフィルムの表面に
形成する、生分解性研磨フィルムの製造方法。2. A polishing method in which an abrasive paint in which abrasive grains are dispersed in a solution of a biodegradable resin is applied to the surface of a biodegradable plastic film and dried, and polishing is performed by fixing the abrasive grains with the biodegradable resin. A method for producing a biodegradable abrasive film, wherein a layer is formed on the surface of the biodegradable plastic film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000247521A JP2002059369A (en) | 2000-08-17 | 2000-08-17 | Biodegradable polishing film and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000247521A JP2002059369A (en) | 2000-08-17 | 2000-08-17 | Biodegradable polishing film and its manufacturing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002059369A true JP2002059369A (en) | 2002-02-26 |
Family
ID=18737599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000247521A Pending JP2002059369A (en) | 2000-08-17 | 2000-08-17 | Biodegradable polishing film and its manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002059369A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015073736A (en) * | 2013-10-09 | 2015-04-20 | 株式会社三共 | Polishing equipment |
| USD803653S1 (en) | 2015-05-07 | 2017-11-28 | Craig R. Smith | Rotary cleaning tool for hardened surfaces |
| WO2024248134A1 (en) * | 2023-06-02 | 2024-12-05 | 株式会社クレハ | Polishing pad and method for polishing object to be polished |
-
2000
- 2000-08-17 JP JP2000247521A patent/JP2002059369A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015073736A (en) * | 2013-10-09 | 2015-04-20 | 株式会社三共 | Polishing equipment |
| USD803653S1 (en) | 2015-05-07 | 2017-11-28 | Craig R. Smith | Rotary cleaning tool for hardened surfaces |
| US10687613B2 (en) | 2015-05-07 | 2020-06-23 | Craig R. Smith | Rotary cleaning tool for commode surfaces |
| WO2024248134A1 (en) * | 2023-06-02 | 2024-12-05 | 株式会社クレハ | Polishing pad and method for polishing object to be polished |
| WO2024248137A1 (en) * | 2023-06-02 | 2024-12-05 | 株式会社クレハ | Polishing pad and method for polishing object to be polished |
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