JP2002048752A - Flow cell and method for forming polymer film - Google Patents

Abstract

(57) [Abstract] [Problem] It is possible to use even a gas or liquid for analysis having high temperature or pressure without leakage, easily separate adhered substrates, replace only unnecessary parts, or deteriorate. The present invention provides a flow cell and a method for manufacturing the same, in which a flow cell having a multi-layered structure can be easily recovered and a function of an analyzer can be added or changed economically and quickly. Kind Code: A1 A flow cell in which a substrate having a fine channel pattern formed on a surface thereof and a flat substrate are opposed to and in close contact with each other to form a fine channel, the substrate having the fine channel pattern formed thereon and a flat substrate. On at least one side of the surface to which the
Plastic elastic film (P
(DMS film) is attached, the contact surfaces of both substrates on which the PDMS film is attached are overlapped, and the substrates are pressed and pressed together from both sides to form a flow cell. At the time of maintenance, the two substrates with the PDMS film are attached. The contact surface is peeled off and separated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flow cell for component analysis in which a gas or a liquid flows through a fine flow path formed by closely contacting a flat substrate with a substrate having a fine flow path pattern formed on its surface. A polydimethylsiloxane (PDMS) polymer film is used on at least one side of the surface where the substrates are opposed to each other, so that airtightness enough to withstand use as a flow cell can be obtained simply by pressing the substrates together, It can withstand the use of gas or liquid for component analysis with high pressure without leakage, and can easily separate the adhered substrates during maintenance, replace only unnecessary parts with new ones, Degraded parts can be easily recovered, and a multi-layer flow cell can be realized, making it possible to economically add or change the functions of the analyzer.
The present invention relates to a flow cell having an excellent structure that can be performed quickly and a method for manufacturing the same.

[0002]

2. Description of the Related Art As a technique for producing a fine flow path in a flow cell of a conventional component analyzer, a groove of a fine flow path pattern is formed on a part of a flat surface of a first substrate, and the groove of the fine flow path pattern is formed. A technique is known in which a flat surface of a second substrate is covered with a flat surface of a second substrate to cover the upper surface of the second substrate, thereby forming a fine channel. As a bonding technique for flat surfaces of substrates, irregularities made of a polymer or a substrate material are provided on one surface of a first substrate, and one surface of a first substrate and one surface of a second substrate are bonded with an adhesive, anodic bonding, or fusion bonding. A technique for producing a fine flow channel by joining them with each other is known. Also, a replica mold technique of polydimethylsiloxane (hereinafter referred to as PDMS) is known (Analytical Chemistry, 1998, Vol. 70, N.
o.23, pp4974-4984 and Analytical Chemistry, 1999, Vo
l.71, No.20, pp4741-4785).

This technique describes a method in which a PDMS polymer precursor (prepolymer) is applied on a flat surface, and a PDMS polymer is obtained by heat treatment. This P
By using DMS, the following four characteristics can be used. (1) By forming the reverse irregularities of the desired fine flow channel pattern on the flat surface to which the polymer precursor of PDMS is applied in advance, the desired fine flow channel is formed on the flat surface side of the polymerized PDMS. The pattern irregularities are transferred. (2) By attaching a surfactant or a fluoride polymer to the flat surface on which the polymer precursor of PDMS is applied in advance, the polymerized PDMS can be easily peeled off from the flat surface. (3) Since PDMS has quick adhesion to various substances, a fine channel is formed by adding PDMS having irregularities of the fine channel pattern on the flat surface of the first substrate and pressing the PDMS by hand. it can. In this case, the PDMS and the first substrate can be separated again by hand. (4) In order to enhance the adhesion between the PDMS and the substrate and make the substrate permanent, it is only necessary to perform oxygen plasma treatment on both bonding surfaces immediately before bonding the PDMS and the substrate.

In addition, as a technique for forming a fine flow path without using bonding, a photoresist having a fine flow path pattern on the surface of a first substrate is produced (however, the bottom of the pattern is
A polymer or solid deposition layer is formed in advance), and a polymer or solid deposition layer is formed on both side surfaces and an upper portion, and then the photoresist is removed.
Techniques for producing a microchannel made of the polymer or the solid deposition layer are known.

[0005]

In the conventional anodic bonding or fusion bonding technology, it is necessary to raise the temperature of the substrate to a high temperature of about 200 ° C. or more, and a material that cannot withstand such a high temperature is required in a fine channel. Can not be used for the purpose.
In addition, in bonding with an adhesive, it is necessary to avoid adhesion of the adhesive into the fine flow path, so that it is difficult to apply the adhesive to a complicated fine flow path pattern.

[0006] In the conventional replica molding technique using PDMS, the adhesion between PDMS and the substrate on the other side is determined as follows.
When a sample solution is injected by applying pressure to the fine channel, the strength of the adhesion cannot withstand the pressure, and the sample solution leaks. In addition, permanent bonding by oxygen plasma treatment cannot be applied to applications in which a substance having no oxygen plasma resistance needs to be set in advance in a fine channel.

Further, in a flow cell of a component analyzer manufactured by the conventional technique, even if the fine flow path is divided into two or more substrates during the manufacturing, once the fine flow path is completed as a flow path, It has a structure that cannot be decomposed again. For this reason, if a part of the flow path becomes defective due to malfunction (for example, a flow obstruction due to deposits on the inner wall), the countermeasure against the defect is processing from the inlet side or the outlet side of the flow path. Limited.

Further, in the component analyzer having the fine flow path, a portion which is permanently connected to the component mounting surface of the component analyzer and an interface with an external device of the component analyzer can be removed. Divided into parts. Conventionally, the components of the microchannel are required to have high adhesion, and therefore are formed as permanently connected portions in the flow cell of the component analyzer. In this case, in order to connect the tube connecting the flow cell in the main body of the component analyzer and the external device with high adhesion to the flow cell side, permanent fixing with an adhesive or the like is necessary. However, once the tube is permanently connected to the flow cell, it is uneconomical to replace the entire flow cell when a part of the function of the flow cell reaches the end of its life.

An object of the present invention is to solve the above-mentioned problems in the prior art. In a flow cell for component analysis, a plastic elastic film having high adhesion and easy peeling is used, and the temperature and pressure are reduced. A flow cell that does not leak even if it is a gas or liquid for high component analysis without leakage and can be used sufficiently. During maintenance, the adhered substrates can be easily separated, and only unnecessary parts can be replaced with new ones. A flow cell with an excellent structure that can easily recover the deteriorated part and realize a multi-layer flow cell, and can add and change the functions of the analyzer in a compact, economical and quick manner. It is to provide a manufacturing method.

[0010]

Means for Solving the Problems In order to achieve the above object of the present invention, the present invention is configured as described in the claims. That is, as described in claim 1, each of the substrates is configured by at least two or more substrates, each having a flat surface on the front surface and the back surface, and a fine flow path pattern is formed on a part of the flat surface of the set substrate. A flow cell for an analyzer in which a formed substrate and a substrate having the flat surface are closely opposed to each other to form a fine flow path, and a gas or a liquid for component analysis flows into the fine flow path. The substrate on which the flow path pattern was formed, and the substrate having the flat surface opposed to and adhered to at least one side of the surface, a plastic elastic film capable of close contact or peeling was mounted, and the plastic elastic film was mounted. The contact surfaces of the two substrates are overlapped, and a flow cell having airtightness is brought into close contact by means of pressing and pressing from both sides of the substrate, and during maintenance of the flow cell, It is an flow cell has a structure which can be separated by removing the contact surface of the substrates fitted with plastic elastic film. Note that the above-mentioned airtightness means airtightness that can sufficiently withstand use even when a gas or liquid for component analysis is passed through the flow cell.

Further, as described in claim 2, claim 1
In the means for crimping, a substrate to be brought into close contact with the housing of the crimping means is arranged, and a hollow pressing screw member containing a tube for supplying gas or liquid for analysis is provided on the upper part of the case. A flow cell having a function of being inserted from the screw hole portion, pressing the through hole communicating with the fine flow path of the substrate, pressing the substrate, and connecting the tube to the fine flow path of the substrate. is there.

Further, as described in claim 3, claim 1
Wherein the plastic elastic film is a flow cell using a polymer film containing polydimethylsiloxane.

[0013] Also, as described in claim 4, claim 1 is as follows.
3. A flow cell according to claim 1, wherein a polymer film containing polydimethylsiloxane having a uniform thickness is provided on one flat surface of the first substrate, and an electrode pattern and an interlayer film are provided on the surface of the second substrate. To form a flow cell in which a fine channel is formed in a region including a part of the electrode pattern.

Further, as described in claim 5, claim 1 is
The flow cell according to the above, wherein a polymer film containing polydimethylsiloxane having a fine channel transferred thereto is provided on one surface of the first substrate, and the first substrate is provided without providing an interlayer film on the surface of the second substrate. To form a flow cell.

[0015] Also, as described in claim 6, claim 1
In the flow cell described in the above, a polymer film containing polydimethylsiloxane having a uniform film thickness is formed on one flat surface of the first substrate to form two through holes, and an external device is provided in each of the through holes. A second substrate having a microchannel and an electrode pattern on the surface of the first substrate on which the two through holes are formed is covered and fixed by a third substrate provided with a tube connection groove for the first substrate. This is a flow cell in which the substrate is in close contact.

Further, as described in claim 7, claim 1 is
In the flow cell described in 1 above, the first substrate and the second substrate are combined to form a fine channel, and the lower surface of the third substrate and the upper surface of the fourth substrate are formed above the first substrate. A bonding substrate having a groove for connecting a tube to an external device formed on a bonding surface of the fourth substrate; an interlayer film having a filter pattern region formed on a lower surface of the fourth substrate; A through-hole for connecting to the connection groove is formed in the fourth
The first substrate is a flow cell provided with a through-hole for connecting the filter pattern region and the fine channel.

Also, as described in claim 8, claim 1 is
8. The flow cell according to any one of 7 to 7, wherein a coating layer made of at least one of Saran wrap, Teflon, a surfactant, and a fluoride is provided on a substrate surface on which a polymer film containing polydimethylsiloxane is formed. Flow cell.

Further, as set forth in claim 9, a substrate having a fine channel pattern formed on its surface and a flat substrate are opposed to each other to form a fine channel, and a component analysis is performed on the fine channel. In a flow cell for an analyzer for flowing a gas or liquid to flow, a polydimethylsiloxane in which a fine channel pattern is transferred to at least one side of a surface on which the fine channel pattern is formed and a flat substrate is brought into close contact with the flat substrate. A method for forming a polymer film comprising: mixing a polydimethylsiloxane oligomer and a crosslinking agent and performing a defoaming treatment,
After forming a prepolymer of polydimethylsiloxane, applying a surfactant or a fluoride to one surface of a second substrate on which a fine channel pattern is formed by applying a surfactant or a fluoride to a flat first substrate surface. Placed on a polydimethylsiloxane prepolymer applied to the surface of the first substrate,
The distance between the surface of the first substrate and one surface of the second substrate is controlled by the height difference between the height of a table placed around the first substrate and the height of the surface of the first substrate. Adjusting the film thickness of the formed polydimethylsiloxane film to be equal to the height difference, and polymerizing and curing the polydimethylsiloxane prepolymer in a state where a polymer can be formed with the film thickness equal to the height difference. Separating the second substrate on which the fine flow path pattern is formed, thereby forming a polydimethylsiloxane polymer film with the transferred fine flow path pattern on the surface of the first substrate. This is a method for forming a siloxane polymer film.

Further, as described in the tenth aspect, a substrate having a fine channel pattern formed on its surface and a flat substrate are opposed to each other to form a fine channel, and a component analysis is performed on the fine channel. In a flow cell for an analyzer for flowing a gas or a liquid to be flowed, at least one side of a surface on which the fine channel pattern is formed and a flat substrate are opposed to and adhered to each other. A method of forming a polymer film containing polydimethylsiloxane, comprising mixing an oligomer of polydimethylsiloxane and a crosslinking agent, performing defoaming treatment to obtain a prepolymer of polydimethylsiloxane, and then forming a flat first substrate. Applying a surfactant or a fluoride to one surface of the flat second substrate to form a polydimethylsiloxane applied to the surface of the first substrate. Placed on the polymer, the distance between the surface of the first substrate and one surface of the second substrate is higher or lower than the height of the table placed around the first substrate and the height of the surface of the first substrate. Controlling by the difference and adjusting the film thickness of the polymerized polydimethylsiloxane film to be equal to the height difference; and Forming a flat polydimethylsiloxane polymer film on the surface of the first substrate by separating the flat second substrate by polymerizing and curing the polydimethylsiloxane polymer film Is formed.

In the flow cell of the present invention, a PDMS film is provided on one surface of a first substrate, and one surface of the first substrate is superimposed on one surface of a second substrate having irregularities of a fine flow path pattern. The two substrates are bonded by pressing with a pressing jig to strengthen the adhesion of the connection surface. Also,
A portion of the holding jig for holding the substrate is formed of a tube connecting the component analyzer main body and an external device. Further, the component analyzer main body is divided into a part that is permanently connected to the external tube and a part that forms a fine channel, and PDMS is formed with a uniform film thickness on at least one surface of both connecting surfaces. In a state where the surface and the mating surface are overlapped with each other, the connection surface is pressed by a pressing jig to strengthen the adhesion of the connection surface.

According to the present invention, it is possible to perform bonding between substrates at room temperature, and to use a component analyzer that requires a substance having low temperature resistance or low plasma resistance to be set in a fine flow path, or a complicated fine flow path. It can also be applied to a component analyzer having a simple pattern.
Further, in the component analyzer forming the fine channel,
The fine channel can be divided and opened as necessary from the desorption characteristics of the PDMS film, even if a problem occurs in the fine channel while satisfying the requirement for high adhesion of the fine channel.

Further, according to the present invention, the main body of the component analyzer is divided into a portion where a tube connected to an external device is permanently connected, and a portion where a fine channel is formed with high adhesion. During use, the two can be connected with high adhesiveness, and when a part of the function of the component analyzer has a life, it can be divided again to replace only that part. As described above, the flow cell of the present invention has a feature that connection and division with high adhesion can be repeated.

[0023]

FIG. 1 shows a first embodiment of the present invention, in which a process for forming a PDMS film having a uniform thickness on one surface of a substrate is described. FIG.

As shown in FIG. 1A, after washing with a mixed solution of sulfuric acid and hydrogen peroxide, the PDMS oligomer and a crosslinking agent are mixed on the surface of the first substrate 1 washed and dried.
The PDMS polymer 3 from which bubbles generated have been removed (hereinafter, the PDMS polymer is simply referred to as a PDMS film) is applied.

Subsequently, as shown in FIG.
The second substrate 2 is placed on the S film 3. The distance between the first substrate 1 and the second substrate 2 is controlled by the height difference between the height of the table 20 installed around the first substrate 1 and the height of the surface of the first substrate 1. The thickness of the PDMS film 3 is adjusted to be equal to the height difference.

Here, on the surface of the second substrate 2 which is in contact with the PDMS film 3, an uneven pattern 10 is previously formed on a photoresist, or after forming the uneven pattern 10 by etching, a surfactant or a fluoride is added. When attached and brought into contact with the PDMS film 3, the uneven pattern 10 is transferred to the surface of the PDMS film 3, and the separation between the second substrate and the PDMS film 3 becomes easy, as shown in FIG. Then, a PDMS film 3 is formed on the surface of the first substrate 1,
On the surface of the PDMS film 3, a substrate structure on which the above-mentioned uneven pattern 10 is transferred is obtained.

After mixing the crosslinking agent, the PDMS film 3 cures in about one day at room temperature and about one hour at a constant temperature of 60 ° C. PD
The MS film has the property of being strongly and permanently bonded when cured on glass, silicon, polyimide, or the like. After the curing is completed, the PDMS film 3 adheres to glass, silicon, and the polymer film with an adhesive force that can be separated. In the description of FIGS. 1A, 1B, and 1C, the uneven pattern 10 is formed on the contact surface side above the PDMS film 3.
It may be formed on the contact surface on the lower side of the PDMS film 3.

Second Embodiment FIG. 2 shows a flow cell exemplified as a second embodiment of the present invention. FIG. 2 (a)
2 shows a perspective view from above, and FIGS. 2B and 2C show perspective views from the side. 3A, 3B, 3C, and 3D are process diagrams showing a process for manufacturing the flow cell shown in FIG. Hereinafter, based on the structure shown in a perspective view from the side of FIGS. 2B and 2C, a manufacturing process thereof will be described with reference to FIG. (A) A PDMS film 3 having a uniform thickness is formed on one flat surface of a first substrate 1. (B) The surface of the second substrate 2 has an electrode pattern 4 and an interlayer film 5
To form (C) Patterning the interlayer film 5 to form a fine channel pattern 6 in a region including a part of the electrode pattern 4. As the material of the interlayer film 5, photolithography and resist for electron beam lithography, other SiO _2, PDMS film, is applicable to any path tanning material capable be uniformly formed on the substrate. (D) The surface of the second substrate 2 is cut with a dicing saw to form a fine channel pattern 6 and a tube mounting connection groove 7 for connecting an external device.

During operation of the component analyzer, the first substrate 1
Between the PDMS film 3 side and the interlayer film 5 side of the second substrate 2
As shown in FIG. 2 (b), the substrates are superimposed and pressed on four sides of the superimposed substrates as shown in FIG. 4 by a pressing jig shown in FIG. 5, thereby improving the adhesion of the contact surface. The tube 8 is inserted into the tube connection groove 7, and the outer periphery of the tube 8 is joined with an adhesive. PDMS film 3 on first substrate 1
Has excellent adhesion, so the tube connection groove 7
The surface of the substrate 1 on which the PDMS film 3 is formed can be formed by cutting the surface with a dicing saw.

As shown in FIG. 2C, the fine channel pattern 6 may be formed on the side of the PDMS film 3 in the same manner as in the transfer of the concavo-convex pattern described in the first embodiment. It is possible. In this case, the step of manufacturing the interlayer film 5 on the surface of the second substrate 2 becomes unnecessary.

By the way, a PDMS film is formed on the surface of the second substrate 2 on which the electrode pattern 4 is formed by a replica molding technique using a conventional PDMS film. First Embodiment
It is of course possible to cover a substrate corresponding to the substrate 1 and press down as shown in FIG. However, in this case, the substrate may be damaged unless handled carefully. In contrast, in this embodiment, the PDMS film is brought into close contact with a flat substrate in a state where the PDMS film is already formed with a uniform film thickness, so that the distribution of the pressing force is uniform, and the substrate has high adhesion without being damaged. There is a characteristic that skill is not required to obtain the property.

<Embodiment 3> FIG. 6 shows a third embodiment of the flow cell of the present invention. A PDMS film 3 having a uniform film thickness is formed on one flat surface of the first substrate 1, and two through holes 11 are formed by, for example, a drill. In order to connect a tube 8 for connecting an external device to each of the through holes 11, the tube 8 and the through hole 11 are connected to the tube connecting groove 7 by an arrangement shown in a perspective view from the side of FIG. The outer periphery of the tube 8 is permanently fixed with an adhesive by covering with the third substrate 101 formed. At this time, the upper surface of the first substrate 1 shown in FIG. 6A and the lower surface of the third substrate 101 are permanently bonded by anodic bonding or an adhesive. On the other hand, as shown in a perspective view from the side of FIG. 6B, an electrode pattern 4 and an interlayer film 5 are formed on the surface of the second substrate 2, and the interlayer film 5 is patterned to form an electrode pattern. The fine channel pattern 6 is formed in a region including a part of the channel 4.

During operation of the component analyzer, the first substrate 1
The PDMS film 3 side and the interlayer film 5 side of the second substrate 2 are overlapped with each other to obtain a configuration shown in a perspective view from the side of FIG. 6C, and a holding jig shown in FIG. When used, the adhesion of the contact surface is enhanced. If the electrode pattern 4 is used for a long period of time, its performance will be degraded due to adsorbed substances on the surface. In that case, the mounting jig is removed, the first substrate 1 and the second substrate 2 are divided, a new second substrate 2 is prepared, and the first substrate 1 and the first substrate 1 are again overlapped. Then, the component analyzer is operated.

FIG. 7 shows another embodiment having the same configuration as that of FIG. In the configuration of FIG. 7, as shown in FIG. 7A, a PDM formed on one flat surface of the first substrate 1 is formed.
As shown in FIG. 7B, the PDMS film 3 is formed on the surface of the second substrate 2 on which the electrode pattern is formed, as shown in FIG. Connect and use. In this case, since the surface configuration of the second substrate 2 used while being replaced is limited to the electrode pattern (that is, no interlayer film is required), only the second substrate 2 needs to be treated with a strong chemical cleaning action. By doing so, the function can be recovered, so that it is more economical than the flow cell having the configuration shown in FIG.

<Embodiment 4> In this embodiment, the PD
The following properties of the MS film 3 are used. (1) The PDMS film can be easily peeled off on a polyvinylidene chloride-based synthetic film (hereinafter referred to as “Saranwrap”) or Teflon and on a substrate coated with a surfactant or a fluoride. (2) When the surface of the PDMS film and the surface of the PDMS film to be bonded or the glass surface are exposed to oxygen plasma, the PDM
The S film and the PDMS film or the PDMS film and the glass are strongly permanently bonded.

As shown in FIG. 8A, a PDMS film 3 is formed on a first substrate 1 having a surface covered with Saran wrap or Teflon or a surfactant or a fluoride. Is applied and cured. In this case, the substrate may be made of Teflon.
On the other hand, on the third substrate 101, a tube connection groove 7 for connecting a fine channel pattern separately formed by cutting the surface with a dicing saw and an external device is formed.

Next, the PDMS formed on the first substrate 1
The surface of the film 3 is subjected to oxygen plasma treatment, and as shown in FIG. 8B, is brought into close contact with the third substrate 101 on the side where the tube connection groove 7 is formed.

Subsequently, as shown in FIG. 8C, when the first substrate 1 and the third substrate 101 are separated, the PDMS film 3 is separated from the first substrate 1 and is permanently attached to the third substrate 101. Adhesively.

As shown in FIG. 8D, the tube 8 connected to the external device is inserted into the tube mounting connection groove 7, and the outer periphery of the tube is connected with an adhesive. Also, PDM
A through-hole 11 is formed in the S film 3 at the tip of the tube 8. This structure has the same function as that of FIG. Then, the second substrate of FIG.
A flow cell as shown in FIG.

<Embodiment 5> FIGS. 9 and 10 show a fifth embodiment of the present invention. FIG. 9 is a cross-sectional perspective view of a crimping jig with a tube. One side of a rectangular square ring is open, and a screw hole 61 is formed on the other side. A hollow screw 62 is passed through the screw hole 61. The hollow portion of the hollow screw 62 has a tube 6 connected to an external device.
A metal ring 64 for locking the tube is formed through the tube 63 at the end of the tube 63 on the screw side. FIG. 10 is a perspective view of a component analyzer constituted by a crimping jig with a tube, FIG. 11 is a perspective view as viewed from the side, and FIG. 12 is a cross-sectional perspective view as viewed from the vertical direction. Here, on one flat surface of the transparent first substrate 1,
A PDMS film 3 having a uniform thickness is formed, and two through holes 11 are formed.
Is provided. An interlayer film 5 is formed on the surface of the second substrate 2,
The fine channel pattern 6 is formed by patterning the interlayer film 5. The PDMS film 3 side of the first substrate 1 and the interlayer film 5 side of the second substrate 2 are overlapped with each other, and are used with a contact jig having a tube 63 shown in FIG.

Embodiment 6 FIGS. 13A and 13B show a sixth embodiment of the present invention. Fig. 1
As shown in the cross-sectional view of FIG. 3A, PDMS films 3 are formed on both surfaces of the first substrate 1, and the first substrate 1 and the second
Substrates 2 are superposed to form a fine channel pattern 6. The lower surface of the third substrate 101 and the upper surface of the fourth substrate 102 are joined, and a tube 8 for connection to an external device is provided.
Is bonded to the tube connection groove 7. Third substrate 1
01, a through hole 111 is formed so as to overlap the region of the tube connection groove 7, and an interlayer film 5 is formed on the lower surface of the third substrate 101, and a filter pattern 105 is formed in the interlayer film 5. Is formed. Further, a through hole 11 is formed in the first substrate 1, and the upper filter region 106 and the lower fine channel pattern 6 are connected to the through hole 11.

By forming the PDMS films 3 on both surfaces of the first substrate 1 with a uniform film thickness, the lower surface of the third substrate 101 is superimposed on the first substrate 1 and the first By bringing the upper surface of the second substrate 2 from below the substrate 1 into close contact with an overlapping and pressing jig, it is possible to configure a component analyzer that combines the fine flow path and the filter action. Since the composition of such a component analyzer is not limited to the number of sheets to be superimposed, it is possible to laminate as many components as necessary, and the substrate as each component can be freely removed at the contact portion of the PDMS film 3. It can be replaced according to. Further, the first substrate and the third substrate can be separated and washed when clogging of the filter occurs due to the repetitive desorption characteristics of the PDMS film and the substrate, so that the clogging can be easily recovered. After washing, the same performance as the new filter can be restored by overlapping and pressing again. When it is desired to change the filter characteristics, as shown in FIG. 13B, the filter characteristics can be replaced with a filter pattern having characteristics different from those of the filter pattern 105.

[0043]

According to the flow cell of the present invention, a fine channel having high adhesion is realized by the elasticity and adhesion of the PDMS film.
The separation of the MS film makes it possible to replace only an unnecessary portion with a new one or to easily recover a deteriorated portion by separating the MS film. This improves the economics of using the component analyzer. Furthermore, since a multi-layered structure can be realized via the PDMS film, addition or change of the function of the component analyzer can be performed compactly, economically, and quickly. Further, according to the present invention, it becomes possible to set a substance that cannot withstand high temperature or plasma processing in a fine channel having a complicated pattern, which was impossible with the related art. Further, according to the present invention, the PDMS can be formed in a uniform film thickness in a state of being permanently adhered to the substrate surface, so that the force for tightening the pressure bonding jig for increasing the bonding strength of the substrate is evenly distributed, so that the glass or crystal can be formed. A substrate that is easily broken can be used. In addition, a PD that is permanently adhered to the substrate
Since an uneven pattern can be formed on the surface side of the MS film, it is possible to reduce the number of flow cell manufacturing steps and to make the substrate surface in contact with the PDMS film only of a material that can withstand a strong cleaning action.

[Brief description of the drawings]

FIG. 1 shows a PD on a substrate exemplified in Embodiment 1 of the present invention.
FIG. 4 is a schematic diagram showing a means for forming an MS film with a uniform thickness and a means for forming irregularities on the surface of a PDMS film.

FIG. 2 is a perspective view from above (a), a perspective view from side (b), and (c) of the flow cell exemplified in the second embodiment of the present invention.
FIG.

FIG. 3 is a process chart showing a manufacturing process of the flow cell exemplified in Embodiment 2 of the present invention.

FIG. 4 is an explanatory view showing a method of using the crimping jig exemplified in Embodiment 2 of the present invention.

FIG. 5 is a schematic view showing an example of the structure of a crimping jig exemplified in Embodiment 2 of the present invention.

FIG. 6 is a schematic diagram showing a cross section of the flow cell exemplified in Embodiment 3 of the present invention.

FIG. 7 is a schematic diagram showing a cross section of the flow cell exemplified in Embodiment 3 of the present invention.

FIG. 8 is a process chart showing a manufacturing process of the flow cell exemplified in Embodiment 4 of the present invention.

FIG. 9 is a perspective view showing a cross-sectional structure of a crimping jig with a tube exemplified in the fifth embodiment of the present invention.

FIG. 10 is a schematic diagram showing the structure of a crimping jig with a tube exemplified in the fifth embodiment of the present invention.

FIG. 11 is a schematic diagram illustrating a structure of a crimping jig with a tube illustrated in Embodiment 5 of the present invention as viewed from a lateral direction.

FIG. 12 is a schematic diagram illustrating a structure of a crimping jig with a tube illustrated in Embodiment 5 of the present invention as viewed from the vertical direction.

FIGS. 13A and 13B are a schematic diagram illustrating a structure of a flow cell exemplified in Embodiment 6 of the present invention and a schematic diagram illustrating an example of a filter pattern.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... 1st board | substrate 2 ... 2nd board | substrate 3 ... PDMS film (PDMS polymer) 4 ... Electrode pattern 5 ... Interlayer film 6 ... Microchannel pattern 7 ... Tube connection groove 8 ... Tube 10 ... Uneven pattern 11 ... Penetration Hole 20 ... Table 50 ... Crimping jig casing 51 ... Screw hole 52 ... Screw 60 ... Crimping jig casing with tube 61 ... Screw hole 62 ... Hollow screw 63 ... Tube 64 ... Locking metal ring 100 ... Saran wrap ( A coating film such as Saranwrap 101, a third substrate 102, a fourth substrate 105, a filter pattern 106, a filter region (flow path) 111, a through hole

Continuation of front page (72) Inventor Osamu Niwa F-term (reference) 2G058 AA01 DA07 in 2-3-1 Otemachi, Chiyoda-ku, Tokyo

Claims (10)

[Claims] 1. A semiconductor device comprising at least two or more substrates, each having a flat surface on a front surface and a rear surface of the substrate,
A substrate in which a fine channel pattern is formed on a part of a flat surface of a setting substrate, and a substrate having the flat surface are opposed to each other to form a fine channel, and a gas or a gas for component analysis is formed in the fine channel. A flow cell for an analysis device into which a liquid flows, wherein at least one side of a surface on which the substrate on which the fine channel pattern is formed and the substrate having the flat surface face and adhere to each other can be adhered or separated. A flexible plastic elastic film is mounted, the contact surfaces of both substrates on which the plastic elastic film is mounted are overlapped, and the flow cell having tight airtightness is formed by means of pressing and pressing from both sides of the substrate to form an airtight flow cell. During maintenance, the flow cell has a structure that can be separated by peeling off the contact surfaces of both substrates with the plastic elastic film attached 2. The means for crimping according to claim 1,
Placing a substrate in close contact with the housing of the crimping means, inserting a hollow holding screw member containing a tube for supplying gas or liquid for analysis from a screw hole at the top of the housing, A flow cell having a function of holding down a through hole communicating with a micro flow path of a substrate, pressing the substrate, and connecting the tube to the micro flow path of the substrate. 3. The flow cell according to claim 1, wherein the plastic elastic film is a polymer film containing polydimethylsiloxane. 4. The flow cell according to claim 1, wherein a polymer film containing polydimethylsiloxane having a uniform film thickness is provided on one flat surface of the first substrate, and an electrode pattern and an interlayer are provided on the surface of the second substrate. A flow cell, comprising: providing a film; patterning the interlayer film; and forming a fine channel in a region including a part of the electrode pattern. 5. The flow cell according to claim 1, wherein:
A polymer film containing polydimethylsiloxane with a fine channel transferred thereon is provided on one side of the substrate, and the second substrate is in close contact with the first substrate without providing an interlayer film on the surface thereof. Flow cell. 6. The flow cell according to claim 1, wherein:
After forming a polymer film containing polydimethylsiloxane having a uniform film thickness on one flat surface of the substrate, two through holes communicating with the fine flow path are provided at predetermined positions, and each of the through holes is provided with an external device. A third substrate provided with a tube connection groove is disposed and fixed so as to match the position of the through hole on the first substrate to form two through holes in the first substrate. A flow cell, wherein a second substrate provided with a fine channel and an electrode pattern is adhered to the above-mentioned polymer film surface. 7. The flow cell according to claim 1, wherein:
And the second substrate are combined to form a fine flow path, and the upper surface of the first substrate is connected to a bonding surface between the lower surface of the third substrate and the upper surface of the fourth substrate. A bonding substrate having a tube connection groove formed therein is provided, an interlayer film having a filter pattern region is formed on the lower surface of the fourth substrate, and a through hole connecting the filter pattern region and the tube connection groove is provided. Is provided on the fourth substrate, and the first substrate has
A flow cell comprising a through-hole connecting the filter pattern region and the fine flow path. 8. The flow cell according to claim 1, wherein Saran wrap, Teflon (registered trademark), a surfactant, and a fluoride are provided on the surface of the substrate on which the polymer film containing polydimethylsiloxane is formed. A flow cell comprising a coating film made of at least one of the above. 9. An analyzer for forming a fine flow path by closely contacting a substrate having a fine flow path pattern formed on its surface with a flat substrate and flowing a gas or liquid for component analysis through the fine flow path. In the flow cell, a method in which a polymer film containing polydimethylsiloxane to which the fine channel pattern is transferred is formed on at least one side of the surface on which the fine channel pattern is formed and the flat substrate is opposed to and adhered to the flat substrate. A step of mixing an oligomer of polydimethylsiloxane and a cross-linking agent and performing a defoaming treatment to form a prepolymer of polydimethylsiloxane, and then applying the prepolymer to a flat surface of the first substrate; A surfactant or a fluoride is attached to one surface of the second substrate on which is formed, and is placed on the polydimethylsiloxane prepolymer applied to the surface of the first substrate. And a first substrate surface, the distance between the one surface of the second substrate pedestal and height were placed around the first substrate,
A step of controlling the height of the polymerized polydimethylsiloxane film to be equal to the height difference by controlling the height difference with the height of the first substrate surface; and forming the polymer with a thickness equal to the height difference. In a state where it is possible, the prepolymer of polydimethylsiloxane is polymerized and cured to separate the second substrate on which the fine channel pattern is formed, thereby forming a fine channel pattern on the surface of the first substrate. A method for forming a polydimethylsiloxane polymer film, comprising a step of forming a transferred polydimethylsiloxane polymer film. 10. An analyzer for forming a fine channel by closely contacting a substrate having a fine channel pattern formed on its surface and a flat substrate and flowing a gas or liquid for component analysis through the fine channel. In the flow cell, a polymer film containing a flat polydimethylsiloxane without transfer of the fine flow path pattern is formed on at least one side of the surface on which the fine flow path pattern is formed and the flat substrate is opposed to and adhered to the flat flow path pattern. A method of mixing an oligomer of polydimethylsiloxane and a cross-linking agent and performing a defoaming treatment to form a prepolymer of polydimethylsiloxane, and then applying the prepolymer to a flat surface of the first substrate; A surfactant or a fluoride is adhered to one surface of the second substrate, and placed on the polydimethylsiloxane prepolymer applied to the surface of the first substrate. The distance between the surface of the substrate and one surface of the second substrate is controlled by the height difference between the height of the table placed around the first substrate and the height of the surface of the first substrate. A step of adjusting the film thickness of the siloxane film to be equal to the height difference, and polymerizing and curing the prepolymer of polydimethylsiloxane in a state where a polymer can be formed with a film thickness equal to the height difference, thereby flattening. Forming a flat polydimethylsiloxane polymer film on the surface of the first substrate by separating the second substrate.