JP2001331208A - Method for controlling movement of object of orthogonal coordinate type moving device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for controlling the movement of the object of an orthogonal coordinate type moving device, in which a moving object always moves at a fixed speed, fixed acceleration while taking a fixed moving time previously set for the moving amounts without depending on the number of shafts to be driven according to the prescribed moving amounts. SOLUTION: This device for driving an orthogonal coordinate type moving device is provided with a process for calculating the moving amounts of an object on an orthogonal coordinate type stage from the movement start point position to target position, a process for calculating a moving time, speed pattern, and acceleration pattern as reference data for the moving amounts, a process for calculating a position pattern from the start of movement to target position from the moving time, speed pattern, and acceleration pattern as the reference data, a process for calculating the ratio of the moving amounts of each shaft to the moving amounts of the object on the orthogonal coordinate type stage from the movement start point position to target position, and a process for calculating the position command signal of each shaft by multiplying the position pattern by the ratio of the moving amounts of each shaft. The driving device controls each shaft of the orthogonal coordinate type stage according to the position command signal, and positions the object on the orthogonal coordinate type stage at the movement target position.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rectangular coordinate type moving device comprising two or more axes, and more particularly to positioning control of an object moving on a rectangular axis at a target position with a predetermined speed pattern, acceleration pattern and moving time. The present invention relates to a method for controlling the movement of an object of a rectangular coordinate type moving device capable of performing the control.

[0002]

2. Description of the Related Art Conventionally, as an orthogonal coordinate type moving device having two or more axes, for example, an orthogonal XY stage which can be freely moved in a two-dimensional direction along an X axis and a Y axis is provided.
A semiconductor device is mounted by transporting a semiconductor chip or the like by mounting a Z-axis slide portion movable in a three-dimensional direction which is a vertical direction, or by driving a bonding arm of a bonding head mounted on an orthogonal XY stage up and down. There is a wire bonding apparatus for performing device bonding.

In the transfer device, a collet having a vacuum suction mechanism for holding and releasing a semiconductor chip, which is a transfer target, mounted on a Z-axis slide portion is an object of movement control. In this method, a capillary attached to the tip of a bonding arm of a bonding head is an object of movement control (hereinafter, these objects are referred to as movement objects).

[0004] These transfer devices and wire bonding devices move a moving object at a predetermined speed and acceleration to position it at a target position.

[0005] For example, in the above-described rectangular coordinate type moving device having three axes of X, Y and Z axes, the position of a moving object in a rectangular coordinate system is represented by (x, y, z), and x, y, z z is called an x position coordinate, a y position coordinate, and a z position coordinate, respectively. In the rectangular coordinate type moving device having two axes, position coordinates are represented by (x, y).

The coordinate position P of the object in the rectangular coordinate system
1 (x1, y1, z1) to the coordinate position P which is the target position
2 (x2, y2, z2) to stop
The movement amount of each of the axes, the Y axis and the Z axis is calculated, and movement control is performed by a position command signal based on the movement amount of each axis.
At this time, the movement amount of each axis is represented by X = X = X
x2-x1, the Y-axis movement amount Y is Y = y2-y1, and the Z-axis movement amount Z is Z = z2-z1.

In order to drive the X-axis, Y-axis and Z-axis of the rectangular coordinate type moving apparatus, the amount of movement of each axis to the target position and the speed and acceleration corresponding to the amount of movement are determined. Is controlled to rotate each axis to a predetermined position by rotating a motor or the like as an actuator of each axis by a position command signal based on the above.

FIG. 8A shows an example of a speed pattern for controlling the speed on the X axis. This speed pattern is
The travel time is T and the maximum speed is V. The acceleration and the deceleration are constant values A as shown in FIG.
And -A, and the times of the acceleration period (from 0 to T / 2 in FIG. 8A) and the deceleration period (from T / 2 to T) are set to be the same time.

The speed pattern of the X-axis is based on the amount of movement of the X-axis.
Is calculated, and then the maximum speed V is calculated from the calculated travel time T.
Is calculated and determined. The area of the speed pattern shown in FIG. 8A corresponds to the movement amount X. FIG.
The moving amount X of the speed pattern shown in (a) is X = (V ×
T) ÷ 2.

Further, the amount of movement X of the axis of the rectangular coordinate type moving device is represented by the following formula:
Is greater than Xm, as shown in FIG.
When the speed reaches the maximum speed Vm, a speed pattern is set in which the acceleration moves at a constant speed of "0 zero" and then decelerates. The moving amount X of the speed pattern shown in FIG.
m is Xm = (Vm × Tm) ÷ 2. However, the moving time is Tm.

For the other Y-axis and Z-axis, the speed pattern is set from the movement amount of the axis in the same procedure as the X-axis.

The orthogonal coordinate type moving device generates a position command signal for each axis from a speed pattern for each axis, and moves each axis at a predetermined speed and acceleration.

[0013]

The object to be moved by the conventional rectangular coordinate type moving device having two or more axes is a position coordinate P1 (x1, y1, z) of a movement start point designated by a rectangular coordinate system.
From 1), the position coordinates P2 of the target position (x2, y2, z2)
As described above, it is necessary to determine the speed pattern of each axis corresponding to the amount of movement of each axis and generate a position command signal for each axis from the speed pattern of each axis, as described above.

For example, as shown in FIG. 5A, an example is shown in which a moving object moves by a movement amount L1 on a coordinate axis having only a single axis (X axis in FIG. 5A). FIG. 5 (b)
As shown in the figure, the moving amount L1 by which the moving object moves in a single axis.
In order to move the same amount of movement in the direction of 45 degrees on the XY plane by two axes, the X and Y axes may be moved by the movement amounts X1 and Y1 shown in Expressions 1 and 2.

[0015]

(Equation 1)

[0016]

(Equation 2)

FIG. 6A shows that the moving object moves only by the single axis (the X axis in FIG. 5A) shown in FIG.
3 shows a speed pattern when moving. The moving time at this time is T1, and the maximum speed is V1.

As shown in FIG. 6A, FIG.
The speed pattern of the X-axis and the Y-axis when the moving object is moved on the two axes shown in (b) is indicated by v2. The moving time at this time is T2, and the maximum speed is V2.

FIG. 6B shows a speed pattern (a speed pattern obtained by synthesizing the speed patterns of the X-axis and the Y-axis) of the moving object when moving on two axes, as v3. The movement time at this time is T2, and the maximum speed is V3.
Also, as shown in FIG. 6B, the maximum speeds V1, V2,
Comparing the magnitude of V3, the maximum velocity V3 of the moving object
Is about 1.0 of the maximum speed V2 of the X-axis and the Y-axis in the two-axis movement.
4 times, which is about 1.2 times the maximum speed V1 in the single axis movement.

FIG. 7A is a diagram showing an acceleration pattern corresponding to the speed pattern shown in FIG. 6B. FIG.
A1 shown in (a) indicates an acceleration pattern of a single-axis movement, and a2 (a dashed line in FIG. 7A) indicates an acceleration pattern of an axis in a two-axis movement.

FIG. 7A shows the acceleration pattern (combination of the X-axis and Y-axis acceleration patterns) of the moving object when moving in two axes.

The acceleration patterns a1 and a2 have acceleration values of A1 and -A1, and the acceleration pattern a3 has acceleration values of A3 and -A3.

Comparing the magnitudes of the accelerations A1 and A3 shown in FIG. 7A, the value of A3 is about 1.4 times the value of A1.

FIG. 7B is a diagram showing the amount of movement with respect to time when the object moves by the amount of movement L1. In FIG. 7B, s1 indicates the time of single-axis movement.
S2 in (b) indicates the amount of movement during biaxial movement. Comparing the lengths of the moving times T1 and T2 shown in FIG. 7B, the moving time T2 of the moving object during biaxial movement is
This is about 84% of the moving time T1 of the moving object during the single-axis movement.

As shown in FIGS. 6B and 7A,
When the moving object moves the moving amount L1 by only the single axis,
In the case where the moving object moves by the same movement amount L1 as the single axis in two axes, the speed and acceleration of the moving object when moving in the two axes are larger than the movement of only the single axis. FIG.
As shown in (b), the moving time T of the moving object in two axes
2 is shorter than the movement time T1 of only the single axis.

In the above-described example, the movement is performed on two axes. However, the movement on the three axes is different from the movement on the single axis and the movement on the two axes. . That is, the speed, acceleration, and moving time of the moving object differ depending on the number of axes when moving the same moving amount.

For example, the first in a wire bonding apparatus
When moving to the second bonding point after bonding,
The capillary draws out the wire and moves to the second bonding point. The capillary moves uniaxially (moves only in the X-axis or Y-axis).
In the axial movement (simultaneous movement of the X-axis and the Y-axis), even if the same distance is moved, the speed and acceleration of the capillary at the time of movement are different, so the tension on the wire of the capillary changes, and the first movement occurs.
A case where the wire shape between the bonding point and the second bonding point is not constant may occur. Further, in the transport device, the transported object is held and moved to a predetermined target position. However, since the speed and acceleration change depending on the moving direction of the moving object, the position of the transported object held during the movement is changed. There may be a case where the object cannot be transported to a predetermined position due to deviation.

Then, the present invention provides a
Without depending on the number of axes to be driven, a moving object can always move at a constant speed, a constant acceleration, and a constant moving time set in advance with respect to a moving amount. An object of the present invention is to provide a method for controlling movement of an object.

[0029]

According to the present invention, there is provided a method for controlling the movement of an object in a rectangular coordinate type moving device, comprising: a rectangular coordinate type stage having at least two axes; and a driving device for driving each axis of the rectangular coordinate type stage. A method of controlling the movement of an object of a rectangular coordinate type moving device, wherein the driving device calculates a moving amount of the object on the rectangular coordinate type stage from a movement start point position to a target position; and Calculating a movement time as a reference data for the amount, a speed pattern and an acceleration pattern, and calculating a position pattern from a movement start to a target position from the movement time, the speed pattern and the acceleration pattern as the reference data, Calculating the ratio of the movement amount of each axis to the movement amount from the movement start point position of the object on the rectangular coordinate type stage to the target position; Calculating the position command signal of each axis by multiplying the position pattern by the ratio of the amount of movement of each axis, the drive device controls each axis of the rectangular coordinate type stage by the position command signal. The object on the rectangular coordinate stage is positioned at the movement target position.

Further, in the object movement control method of the rectangular coordinate type moving device according to the present invention, the driving device may be configured such that a moving time, a speed and an acceleration of the object on the rectangular coordinate type stage are determined by a moving time and a speed pattern of the reference data. And the acceleration pattern.

Further, in the method for controlling the movement of an object of a rectangular coordinate type moving device according to the present invention, the driving device controls the object on the rectangular coordinate type stage from a movement start point position to a target position by linear movement. is there.

[0032]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a method for controlling the movement of an object in a rectangular coordinate type moving apparatus according to the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram of a rectangular coordinate type moving device.

First, a description will be given of a rectangular coordinate type moving device having an X-axis, a Y-axis, and a Z-axis having a three-dimensional (X, Y, Z) rectangular coordinate system.

As shown in FIG. 1, the rectangular coordinate type moving device is configured to control an X axis, a Y axis and a Z axis in accordance with a target value so that an object follows the target value. And a drive unit 1 for driving each axis of the rectangular coordinate type stage 20.

As shown in FIG. 1, a driving device 1 for a rectangular coordinate type moving device includes a position command section 2, an X-axis position control section 5, and a Y-axis position control section 5.
Axis position control unit 6, Z axis position control unit 7 (hereinafter, X axis,
Y-axis and Z-axis position control units 5, 6, and 7), X-axis speed control unit 8, Y-axis speed control unit 9, and Z-axis speed control unit 10.
(Hereinafter also referred to as X-axis, Y-axis, and Z-axis speed controllers 8, 9, and 10), an X-axis power amplifier 11, and a Y-axis power amplifier 1.
2. Z-axis power amplification unit 13 (hereinafter also referred to as X-axis, Y-axis, Z-axis power amplification units 11, 12, 13), X-axis waveform shaping unit 14, Y-axis waveform shaping unit 15, Z-axis waveform shaping unit 16 (hereinafter also referred to as X-axis, Y-axis, and Z-axis waveform shaping units 14, 15, 16).

The rectangular coordinate type stage 20 of the rectangular coordinate type moving device includes an X-axis actuator 22, a Y-axis actuator 23, and a Z-axis actuator 24 (hereinafter, X-axis and Y-axis actuators).
Axis, Z axis actuators 22, 23, 24)
X stage 25, Y stage 26, Z stage 27
(Hereinafter also referred to as X, Y, and Z stages 25, 26, and 27) and an X-axis detector 28, a Y-axis detector 29, and a Z-axis detector 30 (hereinafter, X-, Y-, and Z-axis detectors 28, 28). 29,30
).

The position command section 2 of the drive device 1 has a microcomputer 2a as a calculating means, and generates a signal such as a position command from a speed pattern for moving a moving object by a predetermined distance. It is.

The X, Y, and Z axis position control units 5, 6,
7 outputs the difference between the commanded position from the position commanding unit 2 and the current position as a speed command to the X, Y, and Z axis speed controllers 8, 9, and 10 so that the commanded position matches the current position. To control.

The X-axis, Y-axis, and Z-axis speed controllers 8,
9 and 10 output the difference between the speed command signal from the X-axis, Y-axis, and Z-axis position controllers 5, 6, and 7 and the actual speed to the X, Y, and Z power amplifiers as a current (torque) command. , The speed command is controlled so as to match the actual speed.

The X, Y, and Z axis power amplifiers 11, 12,
A power amplification unit 13 amplifies the outputs from the X-axis, Y-axis, and Z-axis speed control units 8, 9, and 10 to control the X-axis of the rectangular coordinate stage 20.
To the X-axis, Y-axis, and Z-axis actuators 22, 23, and 24
Is to be driven. The currents flowing through the X-axis, Y-axis, and Z-axis actuators 22, 23, and 24 are fed back to the X-axis, Y-axis, and Z-axis power amplifiers 11, 12, and 13 so that the X-axis and Y-axis power are amplified. Axis, Z axis speed control unit 8, 9, 1
A current control unit (not shown) for controlling the flow of a command current from 0 is built in.

X, Y, and Z axis waveform shaping units 14, 15,
16 receives signals output from the X-axis, Y-axis, and Z-axis detectors 28, 29, and 30 of the rectangular coordinate type stage 20, generates stage position signals and speed signals, and outputs X-axis, Y-axis,
A circuit for determining the driving direction of the Z-axis actuators 22, 23, 24 is provided.

The X-axis, Y-axis, and Z-axis waveform shaping units 14,
The output signals of 15, 16 are X as a feedback signal.
Axis, Y axis, Z axis position control units 5, 6, 7 and X axis, Y axis,
The signals are input to the Z-axis speed controllers 8, 9, and 10 to control the position and the speed.

X-axis, Y-axis, Z of the rectangular coordinate stage 20
The axis actuators 22, 23, and 24 are configured by a servomotor, a linear motor, or the like, and drive each axis of the X, Y, and Z stages 25, 26, and 27.

The X, Y, Z stages 25, 26, 27
It consists of X, Y, and Z axes, and each axis is 90
° are arranged at an angle.

X, Y, and Z axis detectors 28, 29, 30
Outputs signals by moving the X, Y, and Z stages 25, 26, and 27, and outputs the X, Y, and Z axis waveform shaping units 14, 1.
5 and 16 are used for detecting the position, speed and the like of the X, Y and Z stages 25, 26 and 27. Note that X shown in FIG.
Axis, Y axis, Z axis detectors 28, 29, 30 are X, Y, Z
Although attached to each axis of the stages 25, 26, 27, the X-axis, Y-axis, and Z-axis actuators 22, 23, 24
X-axis, Y-axis, Z-axis actuator 22,
A configuration for detecting rotation or movement of 23 and 24 may be adopted.

Next, the operation of the rectangular coordinate type moving device according to the present invention will be described. In addition, the rectangular coordinate type moving device,
Although the X-axis, the Y-axis, and the Z-axis are composed of three axes, each axis has the same configuration. Therefore, only the X-axis will be described below, and the Y-axis and the Z-axis will be described. Omitted.

First, when the rectangular coordinate type moving apparatus according to the present invention is started by being operated by an external operating means such as a keyboard, a mouse and the like (not shown), as shown in FIG. The position command signal calculated based on the speed pattern, the acceleration pattern, and the movement time calculated based on the movement amount up to is output to the X-axis position control unit 5.

The X-axis position control unit 5 calculates the difference between the position data from the position command unit 2 and the current position of the X stage 25 output from the X-axis waveform shaping unit 14, and uses the difference as a speed command signal. Output to the X-axis speed controller 8. The X-axis speed control unit 8 calculates a difference between the speed command signal from the X-axis position control unit 5 and the speed of the X stage 25 output as a feedback signal from the X-axis waveform shaping unit 14, and calculates the difference in speed as a current. It is output as a (torque) command to the X-axis power amplifier 11, and is controlled so that the speed command matches the actual speed.

The X-axis power amplifier 11 includes an X-axis speed controller 8
The power output from the X-axis actuator 22 is amplified and applied to the X-axis actuator 22 of the orthogonal coordinate type stage 20 to drive the X-stage 25 by the operation of the X-axis actuator 22. The X stage 25 starts moving by the operation of the X-axis actuator 22, moves to a target position at a predetermined speed and acceleration, and stops.

Next, a method of controlling the movement of an object by the rectangular coordinate type moving device shown in FIG. 1 will be described.

The rectangular coordinate type moving apparatus according to the present invention first calculates a speed pattern, an acceleration pattern, and a moving time as reference data with respect to a moving amount of the moving object to the target position. The reference data defines the speed, acceleration and moving time of the moving object of the rectangular coordinate type moving device.

In the following, the moving object moves at a constant acceleration (acceleration is a constant value).
An example in which control is performed so as to be the same time will be described. The speed pattern at this time has a triangular waveform. Also,
When the movement amount is equal to or more than the predetermined value, the control is performed such that when the maximum speed is reached, the acceleration is moved at a constant speed of “0”, and thereafter the deceleration is performed. The speed pattern at this time has a trapezoidal waveform.

For example, as shown in FIG. 2 (a), assuming that the movement amounts of the X-axis, Y-axis, and Z-axis of the orthogonal coordinate stage 20 are X1, Y1, and Z1, respectively, on the coordinate axes. The movement amount L1 of the target object is expressed by Expression 3.

[0054]

(Equation 3)

Based on the movement amount L1 calculated by the equation (3),
Each data of the speed pattern V (t) and the moving time T of the moving object is calculated. However, the calculated movement amount L1 is a constant value L
s or less, the speed pattern V (t)
As shown in (b), the acceleration pattern has a constant value during acceleration and deceleration, so that the movement time T1 and the maximum speed V1 of the speed pattern V (t) are calculated. FIG. 2C from the calculated speed pattern V (t).
As shown in (1), a position pattern P (t) indicating the moving amount of the moving object with respect to time is obtained.

Next, the ratio of the amount of movement X1, Y1, Z1 of each of the X-axis, Y-axis, and Z-axis of the orthogonal coordinate stage 20 to the amount of movement L1 of the moving object is calculated. That is, X
Assuming that the ratio of the axis, Y axis, and Z axis is Kx, Ky, and Kz, Kx = X1 ÷ L1 Ky = Y1 ÷ L1 Kx = Z1 ÷ L1

Next, a position command signal for each axis is calculated. The position command signal is a signal that specifies the position of the axis of each stage with respect to time t from the start of movement. Position data to P
From (t), the position command signals Px (t), Py for each axis
(T), Pz (t) is calculated.

Position command signals Px (t), Py (t), P
z (t) is obtained as Px (t) = kx × P (t) Py (t) = ky × P (t) Pz (t) = kz × P (t)

The position command signals Px (t), Py
By controlling each axis with (t) and Pz (t), velocity patterns Vx (t), Vy (t), Vz (t) of each axis
Is as follows. Vx (t) = kx × V (t) Vy (t) = ky × V (t) Vz (t) = kz × V (t) where V (t) is the velocity pattern of the moving object.

The position command signals Px (t), Py
By controlling each axis with (t) and Pz (t), the acceleration patterns Ax (t), Ay (t) and Az (t) of each axis
Is as follows. Ax (t) = kx × A (t) Ay (t) = ky × A (t) Az (t) = kz × A (t) where A (t) is the acceleration pattern of the moving object.

The actuators of the respective axes are driven by the position command signals Px (t), Py (t) and Pz (t) of the respective axes calculated by the position controller, and the object is moved at a predetermined speed and acceleration. Move to target position. At this time, the velocity pattern of each axis is Vx (t), Vy (t), Vz (t), and the acceleration pattern of each axis is Ax (t), Ay (t),
Az (t).

FIG. 3 is a flowchart showing the movement control operation of the object of the above-described rectangular coordinate type moving device. Note that FIG.
The operation shown in the flowchart of (1) is executed by a control program built in the microcomputer 2a in the position command unit 2.

As shown in FIG. 3, first, the movement amount L1 of the moving object of the orthogonal coordinate stage 20 on the coordinate axes is calculated (step S1). It is determined whether the calculated moving amount L1 of the moving object is equal to or smaller than a fixed value Ls (step S2). If the calculated moving amount L1 is equal to or smaller than the fixed value Ls, a speed pattern of a triangular waveform is selected (step S3). ). When the moving amount L of the moving object exceeds the fixed value Ls, a trapezoidal waveform speed pattern is selected (step S4). Next, a moving time as reference data is calculated from the calculated moving amount L of the moving object (step S5). next,
A speed pattern and an acceleration pattern as reference data are calculated (step S6). Then, based on the movement time, speed pattern and acceleration pattern calculated in steps S5 and S6, a position pattern is calculated from the movement amount with respect to time (step S7). The ratio (Kx, Ky, Kz) of the movement amount of each axis to the movement amount of the object on the orthogonal coordinate type stage 20 is calculated (Step S8), and the position pattern calculated in Step S7 is used to calculate the movement amount of each axis. The position command signal of each axis is calculated by multiplying the ratio (step S9). The position command signal of each axis calculated in step S9 is transmitted from the position command unit 2 to the X-axis, Y-axis, and Z-axis position control units 5,
The data is output to the devices 6 and 7 (step S10). The driving device 1
The X-axis, Y-axis, and Z-axis power amplifying units 11, 12, and 13 control the X-axis of the rectangular coordinate stage 20 according to the designated position data.
The X, Y, and Z stages 25, 26, and 27 start moving by driving the axis, Y-axis, and Z-axis actuators 22, 23, and 24. (Step S11). X, Y, Z stage 25,
The moving object on 26 and 27 moves to the target position at a predetermined speed, is controlled to perform linear movement from the movement start point position to the movement target position, and stops at the target position (step S12).

In the movement control of the object of the rectangular coordinate type moving apparatus according to the present invention, the acceleration during acceleration and deceleration is set to a constant value. However, an arbitrary acceleration can be set according to the moving object.

The X axis of the rectangular coordinate stage 20 will be described below.
The movement amounts of the Y axis and the Z axis are respectively 5 mm, 5 mm, 2.
FIG. 4A shows a speed pattern when moving 5 mm.
FIG. 4B shows an acceleration pattern, and FIG.
(C) shows each. V (t) shown in FIG.
It shows a speed pattern as reference data, Vx (t),
Vy (t) and Vz (t) indicate velocity patterns on the X axis, the Y axis, and the Z axis. A (t) shown in FIG. 4B indicates an acceleration pattern as reference data, and Ax (t), Ay
(T) and Az (t) indicate acceleration patterns on the X axis, the Y axis, and the Z axis. Further, P (t) shown in FIG. 4C indicates a position pattern as reference data, and Px (t), Py
(T) and Pz (t) indicate position patterns on the X axis, the Y axis, and the Z axis.

As shown in FIG. 4C, the X axis, the Y axis, and the Z axis
Axis position pattern Px (t), Py (t), Pz (t)
As a position command signal, the X-axis, Y-axis, and Z-axis position control units 5,
6 and 7, the moving object on the rectangular coordinate stage 20 is moved linearly from the movement start point position to the target position, and the moving time, speed and acceleration of the moving object are based on a reference. The movement time, speed pattern, and acceleration pattern are controlled as data.

According to the object movement control method of the rectangular coordinate type moving apparatus described above, the object to be moved is always fixed to a predetermined amount with respect to the amount of movement without depending on the number of axes to be driven. At a constant speed, a constant acceleration and a constant moving time. As before,
The maximum speed of the object does not change according to the number of driving axes, the acceleration increases, the moving time does not change,
A predetermined moving operation can be performed.

[0068]

As described above, in the object movement control method of the rectangular coordinate type moving apparatus according to the present invention, the object to be moved is always independent of the number of axes driven for a predetermined movement amount. It is possible to move at a constant speed, constant acceleration, and constant moving time set in advance with respect to the moving amount. Therefore, for example, when the wire is moved to the second bonding point after bonding to the first bonding point by the wire bonding apparatus, the speed and acceleration of the capillary are constant regardless of the moving direction. It becomes constant, and the wire shape between the first bonding point and the second bonding point is stabilized. In the transfer device, the speed and acceleration are constant without being affected by the moving direction, and the transferred object can be transferred to a predetermined position without changing the position of the transferred object held during the movement. it can.

[Brief description of the drawings]

FIG. 1 is a diagram showing a block diagram of a rectangular coordinate type moving device.

FIG. 2A shows the amounts of movement of the X-axis, Y-axis, and Z-axis on coordinate axes, FIG. 2B shows a speed-velocity pattern V (t), and FIG. FIG. 9 is a diagram illustrating a position pattern P (t) indicating an amount of movement of an object.

FIG. 3 is a diagram illustrating a flowchart of an object movement control operation of the rectangular coordinate type moving apparatus.

4 (a) shows a speed pattern as reference data, FIG. 4 (b) shows an acceleration pattern, and FIG. 4 (c) for each movement amount of the X-axis, Y-axis and Z-axis of the rectangular coordinate stage 20. FIG. 4 is a diagram showing a position pattern.

5A is a diagram illustrating a movement amount L1 of only a single axis on a coordinate axis, and FIG. 5B is a diagram illustrating a movement amount L1 of two axes on a coordinate axis.

6A is a diagram showing a speed pattern of a single-axis movement and of two axes, and FIG. 6B is a diagram showing a speed pattern of a moving object.

7A is a diagram illustrating a change in acceleration with respect to time during single-axis movement and two-axis movement, and FIG. 7B is a diagram illustrating a movement amount with respect to time during single-axis movement and two-axis movement. is there.

8A illustrates an example of a speed pattern for controlling the speed of each axis, FIG. 8B illustrates acceleration and deceleration of the speed pattern of FIG. 8A, and FIG. Is a diagram showing a speed pattern when the speed exceeds Lm.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Drive device 2 Position command part 2a Microcomputer 5 X axis position control part 6 Y axis position control part 7 Z axis position control part 8 X axis speed control part 9 Y axis speed control part 10 Z axis speed control part 11 X axis power Amplifier 12 Y-axis power amplifier 13 Z-axis power amplifier 14 X-axis waveform shaping unit 15 Y-axis waveform shaping unit 16 Z-axis waveform shaping unit 20 Cartesian coordinate stage 22 X-axis actuator 23 Y-axis actuator 24 Z-axis actuator 25 X stage 26 Y stage 27 Z stage 28 X axis detector 29 Y axis detector 30 Z axis detector

 ──────────────────────────────────────────────────続 き Continued on front page F-term (reference)

Claims (3)

[Claims] 1. A method for controlling the movement of an object of a rectangular coordinate type moving device, comprising: a rectangular coordinate type stage having two or more axes; and a driving device for driving each axis of the rectangular coordinate type stage, wherein: Calculating a movement amount of the object on the rectangular coordinate type stage from the movement start point position to the target position; and a movement time as reference data for the movement amount,
Calculating a speed pattern and an acceleration pattern; calculating a position pattern from a movement start to a target position based on the movement time, the speed pattern and the acceleration pattern as the reference data; and moving the object on the rectangular coordinate type stage Calculating the ratio of the amount of movement of each axis to the amount of movement from the start point position to the target position; and calculating the position command signal of each axis by multiplying the position pattern by the ratio of the amount of movement of each axis. Wherein the driving device controls each axis of the rectangular coordinate type stage by the position command signal to position an object on the rectangular coordinate type stage at the movement target position. Object moving control method of a rectangular coordinate type moving device. 2. The apparatus according to claim 1, wherein the driving device controls a moving time, a speed, and an acceleration of the object on the rectangular coordinate type stage by a moving time, a speed pattern, and an acceleration pattern of the reference data. The object movement control method of the rectangular coordinate type moving device. 3. The object according to claim 1, wherein the driving device controls the object on the rectangular coordinate stage from a movement start point position to a target position by linear movement. Movement control method.