JP2001300285A - Abrasive grain dispersing agent for polishing and slurry for grinding - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an abrasive grain dispersing agent having improved polishing speed and surface roughness, and slurry for polishing. SOLUTION: An abrasive grain dispersing agent containing a polymer of a specified monomer, and slurry for polishing comprising abrasive grains and water are used.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an abrasive dispersant for polishing and a polishing slurry. More specifically, glass,
The present invention relates to a dispersant for abrasive grains and a polishing slurry for polishing a surface of a silicon wafer, magnetic disk, ceramic, synthetic quartz, quartz, sapphire, or the like to a mirror surface.

[0002]

2. Description of the Related Art Conventionally, as a method for mirror finishing glass or the like, abrasives having an average particle size of 3 μm or less such as cerium oxide, alumina, zirconium oxide, silicon dioxide, diamond and the like are used between a vertically rotating platen. A method in which a slurry in which a dispersant for dispersing abrasive grains and water are mixed is continuously supplied and polishing is performed using a urethane polishing cloth or the like is used. Further, in the manufacturing process of a semiconductor device, an insulating film layer such as silicon dioxide formed by a method such as CVD is planarized (CMP:
Investigations using these slurries have also been conducted in chemical mechanical polishing). Polyacrylates and the like are known as dispersants for abrasive grains. (Japanese Unexamined Patent Publication No.
1-1181406).

[0003]

However, when a polyacrylate is used as a dispersant, there is a problem that neither the polishing rate nor the improvement in surface roughness is sufficient.

[0004]

Means for Solving the Problems The present inventors have conducted intensive studies to solve the above problems, and as a result, the above problems can be solved by using a polymer obtained by polymerizing a specific monomer. That is, the present invention has been achieved.

That is, the present invention provides (a) represented by the following general formula (1) and / or (b) represented by the following general formula (2)
Abrasive dispersant (I) for polishing, characterized by containing a monomer polymer (A) consisting of: and an abrasive dispersant (I) for polishing comprising abrasive (II) and water. This is an abrasive slurry. General formula R ¹ —O — [(C ₂ H ₄ O) _m1 / (C ₃ H ₆ O) _n1 ] —R ² (1) wherein R ¹ is an alkenyl group having 2 to 5 carbon atoms; R ²
Is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. m1
Is an integer of 1 to 30, and n1 is 0 or an integer of 1 to 10. When n1 ≠ 0, [(C ₂ H ₄ O) _m1 / (C ₃ H ₆ O) _n1 ]
Indicates random addition or block addition, and the addition order does not matter. } General formula _{^{R 3 -COO - [(C 2}} H 4 O) m2 / (C 3 H 6 O) n2] -R 4 (2) { wherein, R ³ is an alkenyl group having 2 to 5 carbon atoms , R ⁴
Is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. m2
Is an integer of 1 to 30, and n2 is 0 or an integer of 1 to 10. When n2 ≠ 0, [(C ₂ H ₄ O) _m2 / (C ₃ H ₆ O) _n2 ]
Indicates random addition or block addition, and the addition order does not matter. ｝

[0006]

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, the present invention will be described in detail. In the monomer (a) represented by the general formula (1) of the present invention, R ¹ is an alkenyl group having 2 to 5 carbon atoms.
CH ₂ = CH- group, CH ₃ CH = CH- group, CH ₂ = CH
CH ₂ — group, CH ₂ ＣC (CH ₃ ) — group, CH ₃ CH ＝ CHC
H ₂ — group, CH ₃ CH ＝ CHCH ₂ CH ₂ — group, CH ₂ ＣC
HCH ₂ CH ₂ CH ₂ — group, CH ₂ ＣC (CH ₃ ) CH ₂ CH ₂
-Groups and the like. Preference is, CH ₂ = CH- group and _{CH 2 = C (CH 3)} - is a group. When n1 ≠ 0,
[(C ₂ H ₄ O) _m1 / (C ₃ H ₆ O) _n1 ] may be random addition or block addition, and the addition order is not limited, but is preferably block addition. m1 is 1 to 30, n1 is 0
Or an integer of 1 to 10, preferably m1 is 5 to 2
0 and n1 are integers of 1 to 6. The ratio of m1 / n1 is usually from 100/0 to 20/80, preferably 95 / n1.
5 to 40/60. R ² is a hydrogen atom or carbon number 1
And specific examples thereof include a methyl group, an ethyl group, an isopropyl group, and an n-butyl group. Preferred are a hydrogen atom and a methyl group, and particularly preferred is a hydrogen atom.

Specific examples of the monomer (a) include a block-shaped adduct of 10 mol of allyl alcohol ethylene oxide / 2 mol of propylene oxide, and a random adduct of 8 mol of allyl alcohol ethylene oxide / 2 mol of propylene oxide. Examples of the adduct include a block-form adduct of 6 mol of ethylene oxide of methallyl alcohol / 2 mol of propylene oxide and a block-form adduct of 12 mol of ethylene oxide of crotyl alcohol / 2 mol of propylene oxide.

In the monomer (b) represented by the general formula (2), R ³ is an alkenyl group having 2 to 5 carbon atoms, and specific examples thereof include the same as the above R ¹ . Preference is, CH ₂ = CH- group and _{CH 2 = C (CH 3)} - is a group. When n2 ≠ 0, [(C ₂ H ₄ O) _m2 / (C ₃ H ₆ O) _n2 ]
May be random addition or block addition, and the addition order does not matter, but preferably block addition. m
2 is 1 to 30, n2 is 0 or an integer of 1 to 10, preferably m2 is 5 to 20, and n2 is an integer of 1 to 6.
The ratio of m2 / n2 is usually from 10/0 to 2/8, preferably from 8/2 to 4/6. R ⁴ is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and specific examples include a methyl group, an ethyl group, an isopropyl group, and an n-butyl group. Preferred are a hydrogen atom and a methyl group, and particularly preferred is a hydrogen atom.

A specific example of the monomer (b) is polyethylene glycol ｛weight average molecular weight [measured by gel permeation chromatography (hereinafter abbreviated as GPC). The same applies hereinafter. 300 ° mono (meth) acrylate, polyethylene glycol (weight average molecular weight 500) monoacrylate, esterified product of acrylic acid and a block-like adduct of ethylene oxide 10 mol / propylene oxide 3 mol, and the like. The monomers (a) and (b) may be used alone or in combination, but preferably (a) alone or in combination of (a) and (b).

From the viewpoint of dispersibility, (A) of the present invention comprises a monomer containing a monomer (c) represented by the following general formula (3) and optionally another monomer (d). It is preferably a solid polymer. Formula ^{Z-R 5 -COOX (3)} [ wherein, Z is hydrogen atom or a carboxyl group. X is a hydrogen atom or M1 _{/ k} . M _{1 / k} represents a k-valent cation, where k is 1 or 2. R5 is an alkenylene group having 2 to ⁵ carbon atoms. When Z is a carboxyl group and X is a hydrogen atom, it may form an anhydride. ]

In the monomer (c) represented by the general formula (3) of the present invention, Z is a hydrogen atom or a carboxyl group. R ⁵ is an alkenylene group having 2 to ⁵ carbon atoms, and specific examples thereof include the same as those described above for R ¹ . Preference is, CH ₂ = CH- group and _{CH 2 = C (CH 3)} - is a group.

X is a hydrogen atom or M _{1 / k} . M _{1 / k} is k
Represents a cation having a valence, and k is 1 or 2. Examples of the monovalent cation include an alkali metal cation, an ammonium cation, an organic amine cation, and a quaternary ammonium cation. Examples of the alkali metal cation include cations of sodium, potassium and lithium. Preferred among these are the sodium cations. As the organic amine cation,
For example, an alkylamine cation having 1 to 24 carbon atoms and an alkanolamine cation having 2 to 8 carbon atoms; and ethylene oxide adducts (1 to 10 mol), propylene oxide adducts (1 to 10 mol), and ethylene oxide ( (1-9 mol) / propylene oxide (1-9 mol) adducts (block-like or random-like). Examples of the alkylamine cation include cations of methylamine and dodecylamine. Examples of the alkanolamine cation include a cation of monoethanolamine. As the quaternary ammonium cation, for example,
Examples thereof include a tetraalkyl quaternary ammonium cation having 1 to 12 carbon atoms. Examples of the tetraalkyl quaternary ammonium cation include a cation of tetraethylammonium. Of these, preferred are primary and secondary amines having 6 to 18 carbon atoms and ethylene oxide adducts of primary amines having 6 to 18 carbon atoms, and more preferred are primary amines having 6 to 18 carbon atoms. It is an ethylene oxide adduct of an amine.

Examples of the divalent cation include an alkaline earth metal cation and an alkylenediamine cation having 2 to 6 carbon atoms. Examples of the alkaline earth metal cation include cations of calcium and magnesium. Examples of the alkylenediamine cation include a cation of ethylenediamine. Preferred among these are magnesium cations.

Specific examples of the monomer (c) include acrylic acid, methacrylic acid, maleic acid, itaconic acid, crotonic acid, mesaconic acid, fumaric acid, citraconic acid, maleic anhydride, citraconic anhydride, Itaconic acid and the sodium, magnesium and alkylamine salts of these acids. Monomers (a), (b),
(C) is not limited to one type, and two or more types of monomers may be used as constituent units.

In the polymer (A) of the present invention, in addition to the above structural units, another unsaturated monomer (d) may be copolymerized, if necessary, in an amount not to impair the performance of the present invention. You can also. Specific examples of such a monomer include alkyl (meth) acrylates having 3 to 24 carbon atoms such as methyl (meth) acrylate, ethyl (meth) acrylate, and butyl (meth) acrylate; Vinyl aromatic compounds having 8 to 30 carbon atoms; olefins having 2 to 24 carbon atoms such as isobutylene and isoprene; allyl alcohol, methallyl alcohol, crotyl alcohol, 3-butenyl alcohol, 4-pentenyl alcohol and 3-methyl- 2 carbon atoms such as 3-butenyl alcohol
To 24 alkenyl alcohols; acrylamide; and alkenyl alcohol sulfate ether.

In the copolymer (A), the monomer (a) /
The content ratio of the structural unit represented by (b) / (c) is mol%
(A) is 0 to 100, (b) is 0 to 100, (c)
Is preferably from 0 to 90, particularly (a) is from 30 to 99,
(B) 0 to 69 and (c) are preferably 1 to 70 from the viewpoint of abrasive grain dispersibility. If you use (d),
It is preferably 30 parts by weight or less based on 100 parts by weight in total of (a), (b) and (c). The weight average molecular weight of the copolymer (A) is usually from 4,000 to 20,000, preferably from 6,000 to 15,000.

The method for producing the copolymer (A) of the present invention is not particularly limited, and any conventionally known method can be applied. The reaction is generally performed by radical polymerization, and methods such as solution polymerization, emulsion polymerization, suspension polymerization, and bulk polymerization can be used. For example, in the case of solution polymerization, examples of the solvent include water; alcohols such as methyl alcohol, ethyl alcohol, and isopropyl alcohol; ketones such as acetone; and hydrocarbons such as benzene, xylene, toluene, n-hexane, and cyclohexane. Can be Peroxides such as benzoyl peroxide and hydrogen peroxide; azo compounds such as azobisisobutyronitrile;
In addition, persulfates and the like can be used. In order to control the weight average molecular weight and the molecular weight distribution, a chain transfer agent such as mercaptoethanol, mercaptopropionic acid, laurylmercaptan, and triethylene glycol dimercaptan may be used. Although the reaction temperature varies depending on the solvent and the polymerization initiator, the reaction can be usually performed at 50 ° C to 200 ° C.

The amount of (A) in (I) of the present invention is usually 1
It is 0 to 90% by weight, preferably 20 to 80% by weight.

In the dispersant (I) of the present invention, for the purpose of adjusting the viscosity, a water-soluble alcohol is added in an amount that does not adversely affect the performance (for example, 40 parts by weight or less for 100 parts by weight of (A)). May be blended. As the water-soluble alcohol,
Monohydric alcohols and dihydric or higher alcohols can be used. Examples of the monohydric alcohol include methanol,
Examples include ethanol and propanol. Examples of the dihydric or higher alcohol include ethylene glycol,
Examples include propylene glycol, butylene glycol, and glycerin. These may be used in combination of two or more.

The (I) of the present invention may contain known anionic surfactants, nonionic surfactants, cationic surfactants, and amphoteric surfactants.

As the anionic surfactant, a carboxylic acid or a salt thereof, a sulfate ester salt, a salt of a carboxymethylated product, a sulfonate salt and a phosphate ester salt can be used.

As the carboxylic acid or a salt thereof, a saturated or unsaturated fatty acid having 8 to 22 carbon atoms or a salt thereof can be used. For example, lauric acid, stearic acid and oleic acid can be mentioned. As salts, those sodium,
Salts such as potassium, ammonium, alkanolamine and the like can be mentioned.

As the above-mentioned sulfate, higher alcohol sulfate, higher alkyl ether sulfate, sulfated oil, sulfated fatty acid ester and sulfated olefin can be used. As the salt, a sodium salt, a potassium salt, an ammonium salt and an alkanolamine salt can be used. As the higher alcohol sulfate, a sulfate of an aliphatic alcohol having 8 to 18 carbon atoms can be used. For example, octyl alcohol sulfate, lauryl alcohol sulfate, stearyl alcohol sulfate and the like can be mentioned. As the higher alkyl ether sulfate, a sulfate of 1 to 10 moles of ethylene oxide adduct of an aliphatic alcohol having 8 to 18 carbon atoms can be used. For example, a sulfuric acid ester salt of lauryl alcohol ethylene oxide 2 mol adduct and a sulfuric acid ester salt of octyl alcohol ethylene oxide 3 mol are exemplified.

As the sulfated oil, natural unsaturated fats and oils or unsaturated waxes which have been sulfated and neutralized can be used. Examples include sodium, potassium, ammonium and alkanolamine salts of sulfates such as castor oil, olive oil and tallow. As the sulfated fatty acid ester, those obtained by sulfating and neutralizing a lower alcohol ester of an unsaturated fatty acid can be used. Examples include sodium, potassium, ammonium and alkanolamine salts of sulfates such as butyl oleate and butyl ricinoleate. As the sulfated olefin, those obtained by sulfating and neutralizing an olefin having 12 to 18 carbon atoms can be used. For example, a tea pole (manufactured by Shell Inc.) and the like can be mentioned.

The carboxymethylated salts include:
A salt of a carboxymethylated product of an aliphatic alcohol (8 to 16 carbon atoms) and a salt of a carboxymethylated product of an ethylene oxide (1 to 10 mol) adduct of an aliphatic alcohol (8 to 16 carbon atoms) can be used. Examples of the salt of a carboxymethylated aliphatic alcohol include octyl alcohol carboxymethylated sodium salt and lauryl alcohol carboxymethylated sodium salt. Examples of the salt of a carboxymethylated product of an ethylene oxide adduct of an aliphatic alcohol include sodium carboxymethylated octyl alcohol ethylene oxide 3 mol adduct and sodium carboxymethylated lauryl alcohol ethylene oxide 4 mol adduct. .

The sulfonic acid salt includes alkyl (8 to 16 carbon atoms) benzene sulfonate, alkyl (8 to 16 carbon atoms) naphthalene sulfonate, α-olefin (8 to 16 carbon atoms) sulfonate and Igepon T type can be used. Examples of the alkylbenzene sulfonate include sodium dodecylbenzenesulfonate. Examples of the alkyl (C.sub.8 to C.sub.16) naphthalenesulfonic acid salt include sodium dodecylnaphthalenesulfonic acid salt.

The above-mentioned phosphoric acid ester salt includes a higher alcohol (8 to 16 carbon atoms) phosphoric acid ester salt and a higher alcohol (8 to 16 carbon atoms) ethylene oxide (1 to 6).
20 mol) Phosphate salt of the adduct can be used. Examples of the higher alcohol phosphate ester salts include lauryl alcohol phosphate monoester disodium salt, lauryl alcohol phosphate diester sodium salt, and the like. Examples of the phosphoric acid ester salt of a higher alcohol ethylene oxide adduct include disodium phosphate monoester of a oleyl alcohol ethylene oxide 5 mol adduct.

Examples of the nonionic surfactant include an alkylene oxide addition type nonionic surfactant and a polyhydric alcohol type nonionic surfactant. Examples of the alkylene oxide-added nonionic surfactant include polyoxyalkylene (C2-4, polymerization degree 2-50) alkyl (C8-18) ether, polyoxyalkylene (C2-4, polymerization degree 2). -50) fatty acids (12 carbon atoms)
-24) esters, polyoxyalkylenes (2 to 2 carbon atoms)
4, polymerization degree 2-50) polyhydric alcohol (2-6, C2-12) fatty acid (C12-24) ester, polyoxyalkylene (C2-4, polymerization degree 2-50)
Alkyl (C8-12) phenyl ether, polyoxyalkylene (C2-4, degree of polymerization 2-50) alkyl (C8-24) amino ether and polyoxyalkylene (C2-4, degree of polymerization) 2 to 50) alkyl (C12 to C24) alkanol (C2 to C12)
Amides can be used.

Examples of the polyoxyalkylene alkyl ether include octyl alcohol ethylene oxide adduct and lauryl alcohol ethylene oxide adduct. Examples of the polyoxyalkylene fatty acid ester include stearyl acid ethylene oxide adduct and lauric acid ethylene oxide adduct. Examples of the polyoxyalkylene polyhydric alcohol fatty acid ester include lauric acid diester of polyethylene glycol and oleic acid diester of polyethylene glycol. Examples of the polyoxyalkylene alkylphenyl ether include a nonylphenol ethylene oxide adduct and a nonylphenol ethylene oxide propylene oxide block adduct. Examples of the polyoxyalkylene alkylamino ether include an adduct of laurylamine ethylene oxide and an adduct of stearylamine ethylene oxide. As the polyoxyalkylene alkyl alkanolamide, for example,
Examples thereof include an ethylene oxide adduct of hydroxyethyl lauric amide.

Examples of the polyhydric alcohol type nonionic surfactant include polyhydric (2 to 6) alcohols (2 to 1 carbon atoms).
2) fatty acid (C8-24) ester, polyvalent (2-6)
(Valent) alcohol (C2-12) fatty acid (C8-8)
24) Ester alkylene oxide (C2-4)
Adducts (2 to 50 mol), polyhydric (2 to 6 valent) alcohols (2 to 12 carbons) alkyl (1 to 24 carbons) ethers and polyhydric (2 to 6 valent) alcohols (2 to 12 carbons) )
An alkyl (1 to 24 carbon atoms) ether alkylene oxide (2 to 4 carbon atoms) adduct (2 to 50 mol) can be used. Examples of the polyhydric alcohol fatty acid ester include pentaerythritol monolaurate and pentaerythritol monooleate. Examples of the polyhydric alcohol fatty acid ester alkylene oxide adduct include ethylene glycol monooleate ethylene oxide adduct and ethylene glycol monostearate ethylene oxide adduct. Examples of the polyhydric alcohol alkyl ether include pentaerythritol monobutyl ether and pentaerythritol monolauryl ether. Examples of the polyhydric alcohol alkyl ether alkylene oxide adduct include sorbitan monostearyl ether ethylene oxide adduct and methyl glycoside ethylene oxide propylene oxide random adduct.

As the amphoteric surfactant, amino acid-type amphoteric surfactants and betaine-type amphoteric surfactants can be used. Examples of the amino acid-type amphoteric surfactant include sodium stearylaminopropionate, sodium laurylaminopropionate, and sodium laurylaminoacetate. Examples of the betaine-type amphoteric surfactant include betaine stearyldimethylaminoacetate.

Examples of the cationic surfactant include the following:
Grade ammonium salt type cationic surfactants and amine salt type cationic surfactants can be used. Examples of the quaternary ammonium salt type cationic surfactant include lauryltrimethylammonium chloride and didecyldimethylammonium chloride. Examples of the amine salt type cationic surfactant include an inorganic acid salt or an organic acid salt of laurylamine and an inorganic acid salt or an organic acid salt such as an ethylene oxide adduct of an aliphatic amine. These may be used in combination of two or more. Among these surfactants, anionic surfactants and nonionic surfactants are preferred.

The amount of the anionic surfactant, nonionic surfactant, cationic surfactant, and amphoteric surfactant in (I) is not particularly limited, and may be any amount that does not affect the performance. [For example, 40 parts per 100 parts by weight of (A)
Weight parts or less]

The (I) of the present invention may further contain known chelating agents, pH adjusters, preservatives, defoamers, water and the like.

Examples of the chelating agent include sodium polyacrylate, sodium ethylenediaminetetraacetate, sodium succinate, sodium 1-hydroxyethane-1,1-diphosphonate and the like. The amount is not particularly limited, but is usually 0 to 40% by weight, preferably 0 to 30% by weight. Examples of the pH adjuster include acids such as acetic acid, boric acid, citric acid, oxalic acid, phosphoric acid, and hydrochloric acid; and alkalis such as sodium hydroxide and potassium hydroxide. The blending amount in (I) is not particularly limited, but is usually 0 to 10% by weight, preferably 0 to 5% by weight. Examples of the antifoaming agent include dimethyl silicone oil mixed with fine powdered silica and emulsions thereof, and silicone-based antifoaming agents such as polyoxyalkylene-modified silicone oil; polyalkylene glycol obtained by adding alkylene oxide to higher alcohol. -Defoamers and the like. The compounding amount in (I) is not particularly limited, but is usually 0 to 5% by weight, preferably 0.001 to 3% by weight.
% By weight. Although the amount of water in (I) of the present invention can be arbitrarily changed, it is usually 10 to 90% by weight, preferably 20 to 80% by weight.

The abrasive grains (II) in the present invention are not particularly limited. For example, cerium oxide, alumina, zirconium oxide, silicon dioxide, diamond and the like are ground to a mean particle size of 3 μm or less using a dry or wet mill. Things. Preferred is cerium oxide.

(I) of the present invention may be a mixture of (A) and other components in advance, or (A) and other components may be mixed at the time of preparing a polishing slurry.

The proportion of each of the dispersant (I) and the abrasive (II) in the abrasive slurry for polishing according to the second invention of the present invention is% by weight, preferably (I) is 0.3 to 3%. , (I
I) is 3 to 30%. The ratio of (I) and (II) is
From the viewpoint of abrasive grain dispersibility, the weight ratio is 1/100 to 30/1.
00 is preferred.

The slurry of the present invention can be prepared by diluting (I) with water such as ion-exchanged water and mixing with (II). The slurry of the present invention using the dispersant of the present invention is suitable for mirror finish polishing of a glass disk and the like, but in addition, silicon wafer, aluminum, ceramic, synthetic quartz, crystal, sapphire and the like mirror finish polishing, It can be suitably used for CMP processing for flattening an insulating film layer such as silicon dioxide.

[0041]

EXAMPLES The present invention will be described in more detail with reference to the following Examples, but it should not be construed that the present invention is limited thereto. Unless otherwise specified, parts in the text indicate parts by weight and% indicates% by weight. The conditions for measuring the weight average molecular weight by GPC are as follows. However, the molecular weight when an acid is used as a monomer is a value when completely neutralized with sodium hydroxide.

<< GPC Measurement Conditions >> Model Column: Waters 510 (manufactured by Nippon Waters Limited) TSK gel G5000pwXL TSK gel G3000pwXL (both manufactured by Tosoh Corporation) Column temperature: 40 ° C. Detector: RI solvent: 0.5% Sodium acetate / water / methanol (volume ratio 70/30) Flow rate: 1.0 ml / min Sample concentration: 0.25% Injection volume: 200 μl Standard: polyethylene glycol (Tosoh Corporation; TSK STANDARD POLYETHYLENE OXIDE) Data processing device: SC-8010 (Tosoh Corporation)

Example 1 498 parts of an alkylene oxide adduct of allyl alcohol (a block adduct of 10 mol of ethylene oxide and 1 mol of propylene oxide) were equipped with a stirrer, a nitrogen inlet tube, a thermometer, a reflux tube, and a dropping funnel. Then, 284.8 parts of water was further added and uniformly dissolved at room temperature, and heated to 100 ° C. while replacing the atmosphere with nitrogen. Here, 23.8 parts of sodium persulfate was added to 95.
The mixture diluted with 4 parts and 290 parts of a 40% aqueous solution of maleic acid were simultaneously dropped to initiate polymerization, and the reaction temperature was further reduced to 1 part.
The reaction was completed in 4 hours while maintaining the temperature at 00 ° C. This was neutralized with 166.6 parts of a 48% aqueous solution of sodium hydroxide to obtain Dispersant 1 of the present invention. (The weight average molecular weight of Dispersant 1 is 7,
300, the structural unit from (a) in the copolymer (A) is 4
6 mol%, the constitutional unit from (c) is 54 mol%. )

Example 2 498 parts of an alkylene oxide adduct of allyl alcohol (a random adduct of 15 mol of ethylene oxide / 3 mol of propylene oxide) was equipped with a stirrer, a nitrogen inlet tube, a thermometer, a reflux tube, and a dropping funnel. Then, 284.8 parts of water was further added and uniformly dissolved at room temperature, and heated to 100 ° C. while replacing the atmosphere with nitrogen. Here, 23.8 parts of sodium persulfate was added to 95.95 parts of water.
The polymerization was started by simultaneously dripping the solution diluted with 4 parts and 100 parts of a 40% aqueous solution of maleic acid.
The reaction was completed in 4 hours while maintaining the temperature at 00 ° C. This was neutralized with 57.4 parts of a 48% aqueous solution of sodium hydroxide to obtain Dispersant 2 of the present invention. (The weight average molecular weight of Dispersant 2 is 9,7
00, the structural unit from (a) in the copolymer (A) is 62
Mol%, the constituent unit from (c) is 38 mol%. )

Example 3 498 parts of polyethylene glycol (weight average molecular weight: 660) monomethacrylate were charged into a glass reaction vessel equipped with a stirrer, a nitrogen inlet tube, a thermometer, a reflux tube, and a dropping funnel, and furthermore, water was charged with 284.8. The mixture was uniformly dissolved at room temperature and heated to 100 ° C. while replacing the atmosphere with nitrogen.
A solution obtained by diluting 23.8 parts of sodium persulfate with 95.4 parts of water and 100 parts of a 40% aqueous solution of maleic acid were simultaneously added dropwise to initiate polymerization, and the reaction was further continued for 4 hours while maintaining the reaction temperature at 100 ° C. Completed. This was neutralized with 57.4 parts of a 48% aqueous sodium hydroxide solution, and the dispersant 3 of the present invention was used.
I got (The weight average molecular weight of Dispersant 3 is 8,500, the structural unit from (b) in copolymer (A) is 66 mol%,
The constituent unit from (c) is 34 mol%. )

Each of the dispersants of Examples 1 to 3 was
% And cerium oxide to 10%, and water was added and mixed to obtain polishing slurries of Examples 4 to 6. In addition, polyacrylic acid sodium salt (weight average molecular weight is 10,000
Water was added to and mixed with 1.0% of a 40% aqueous solution of 0) and 10% of cerium oxide to obtain a polishing slurry of Comparative Example 1.

Using the polishing slurries of Examples 4 to 6 and Comparative Example 1, 20 glass disk substrates having a diameter of 3.5 inches and a thickness of 600 μm were placed on a precision flat lapping machine 9BF4.
Table 1 shows the results of polishing with M5G (manufactured by Hamai Sangyo Co., Ltd.) for 15 minutes. Evaluation and judgment were performed by the following methods. Processing speed: The thickness of the glass disk substrate before and after polishing was measured, and the amount of reduction in thickness per minute was calculated. Surface roughness: Surface roughness (Ra: μm) of a glass disk after polishing using a surface roughness measuring device (manufactured by Kosaka Laboratory Co., Ltd.)
Was evaluated. Glass dirtiness: The polished glass disk was immersed in a 500 ml beaker containing ion-exchanged water for 30 seconds, pulled up, and visually checked for dirt such as abrasive grains adhered to the disk surface. ：: no stain △: stained ×: marked stain

[0048]

[Table 1]

From these results, it can be seen that the slurry containing the abrasive dispersant for polishing of the present invention has an excellent polishing rate, good surface roughness and no generation of stain on the glass surface after polishing. I understand.

[0050]

The polishing slurry containing the abrasive dispersant for polishing according to the present invention is excellent in processing speed as compared with the conventionally used polyacrylate, and is capable of polishing with good surface roughness. It can be made and the generation of stain on the glass surface after polishing is small. Further, the polishing dispersant of the present invention is useful not only for glass disks, but also for mirror finish polishing of silicon wafers, aluminum, ceramics, synthetic quartz, quartz, sapphire and the like, and CMP processing for flattening an insulating film layer such as silicon dioxide. is there.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) C09K 3/14 550 C09K 3/14 550Z H01L 21/304 622 H01L 21/304 622D

Claims (5)

[Claims] (1) A compound represented by the following general formula (1):
Or an abrasive dispersant (I) for polishing, comprising a polymer (A) of a monomer comprising (b) represented by the general formula (2). General formula R ¹ —O — [(C ₂ H ₄ O) _m1 / (C ₃ H ₆ O) _n1 ] —R ² (1) wherein R ¹ is an alkenyl group having 2 to 5 carbon atoms; R ²
Is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. m1
Is an integer of 1 to 30, and n1 is 0 or an integer of 1 to 10. When n1 ≠ 0, [(C ₂ H ₄ O) _m1 / (C ₃ H ₆ O) _n1 ]
Indicates random addition or block addition, and the addition order does not matter. } General formula _{^{R 3 -COO - [(C 2}} H 4 O) m2 / (C 3 H 6 O) n2] -R 4 (2) { wherein, R ³ is an alkenyl group having 2 to 5 carbon atoms , R ⁴
Is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. m2
Is an integer of 1 to 30, and n2 is 0 or an integer of 1 to 10. When n2 ≠ 0, [(C ₂ H ₄ O) _m2 / (C ₃ H ₆ O) _n2 ]
Indicates random addition or block addition, and the addition order does not matter. ｝ 2. The composition of claim 1, wherein (A) is a polymer of a monomer containing a monomer (c) represented by the following general formula (3) and optionally another monomer (d). Item 4. The abrasive dispersant according to Item 1. Formula ^{Z-R 5 -COOX (3)} [ wherein, Z is hydrogen atom or a carboxyl group. X is a hydrogen atom or M1 _{/ k} . M _{1 / k} represents a k-valent cation, where k is 1 or 2. R5 is an alkenylene group having 2 to ⁵ carbon atoms. When Z is a carboxyl group and X is a hydrogen atom, it may form an anhydride. ] 3. The abrasive dispersant according to claim 1, which is used for polishing glass. 4. A polishing abrasive slurry comprising the abrasive dispersant (I) according to any one of claims 1 to 3, the abrasive particles (II) and water. 5. The abrasive slurry according to claim 4, wherein the content of (I) in the abrasive slurry for polishing is 1 to 30% by weight based on (II).