JP2001348664A - Method and apparatus for assembling mask assembly - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily assemble a mask assembly with excellent accuracy. SOLUTION: The mask assembly MA comprises a liquid crystal glass substrate W, a magnetic mask M for partially shield a film deposition surface thereof, and a holder having a built-in magnet for attracting the mask M, and pressing the liquid crystal glass substrate W against the mask M from a back side. In the method for assembling the mask assembly MA, the holder is held in a separate manner from the mask above the liquid crystal glass substrate W positioned and placed on the mask M. Next, the liquid crystal glass substrate W is energized to the mask M to prevent the positional deviation by pressing the back side of the liquid crystal glass substrate W on the mask M by a plurality of pressing pins 5 passed through a plurality of apertures Ha made in the holder H, respectively. The holder H is then released with the liquid crystal glass substrate W energized to the mask M by the plurality of pressing pins 5, and the holder H is pressed against the liquid crystal glass substrate W.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of assembling a mask assembly which is disposed and moved to face a film forming material source in a mask film forming line for forming a mask on a liquid crystal glass substrate or the like. The present invention relates to an assembling apparatus used for assembling such a mask assembly.

[0002]

2. Description of the Related Art In a film forming line for forming a mask on a liquid crystal glass substrate, for example, in the case of a deposition-type apparatus configuration in which a film forming material source is on the lower side, the liquid crystal glass substrate is placed on the upper side of the mask, and the liquid crystal glass substrate is mounted together with the mask. The mask film is formed by moving the film in a certain direction above the film forming material source.

[0003]

At this time, if the liquid crystal glass substrate is simply placed on the mask, a gap occurs between the glass substrate and the mask during the film formation, and high quality film formation cannot be performed. There is. Therefore, it is conceivable to provide a mask assembly in which a holding plate in which a magnet is embedded is further mounted on the liquid crystal glass substrate, and a magnetic mask is sucked and fixed through the liquid crystal glass substrate. Then, by carrying such a mask assembly at a constant speed above the film-forming material source, a desired film can be formed on the substrate portion exposed from the mask.

However, if the holder is to be placed on the liquid crystal glass substrate positioned on the mask, the mask and the liquid crystal glass substrate are attracted to the holder by the magnetic force of the magnet and float up, and the mask and the liquid crystal glass substrate are lifted. Cannot be held while being accurately positioned. Therefore, when placing the mask holder on the liquid crystal glass substrate, it is necessary to hold down the glass substrate. Although this work can be performed manually, workability is poor and sufficient accuracy cannot be obtained.

Accordingly, an object of the present invention is to provide a method for assembling the above mask assembly simply and accurately.

Another object of the present invention is to provide an assembling apparatus used for assembling the mask assembly simply and accurately.

[0007]

In order to solve the above-mentioned problems, a method of assembling a mask assembly according to the present invention comprises a substrate to be formed and a film-forming surface of the substrate which is partially supported and shielded. And a holder for pressing a substrate against the mask from the back side by a suction force between the mask and the holder, wherein the positioning is performed with the film-forming surface on the mask facing down. Holding the holder above the substrate on which the holder has been separated from the mask
A second step of pressing the substrate against the mask by pressing the back surface of the substrate on the mask with a plurality of pressing pins respectively inserted through a plurality of openings provided in the holder, thereby preventing displacement. And a third step of bringing the holder close to the substrate and pressing the holder against the substrate with a suction force while the substrate is being urged against the mask by the plurality of pressing pins.

Here, it is desirable that the plurality of pressing pins for pressing the back surface of the substrate on the mask be driven by a pneumatic cylinder. Accordingly, even when the pressing pins are retracted when the holder is brought close to the substrate, the pressing force of the pressing pins against the back surface of the substrate can be kept constant.

In the above assembling method, in a second step, the back surface of the substrate on the mask is pressed by a plurality of pressing pins inserted through a plurality of openings provided in the holder, thereby attaching the substrate to the mask. When the holder is brought close to the substrate and pressed against the substrate by the suction force in the third step, no positional deviation occurs between the mask and the substrate. A mask assembly with no displacement can be obtained.

Further, the assembling apparatus according to the present invention comprises a holder capable of pressing the substrate against the mask from the back side by a suction force between the mask and the mask for partially supporting and shielding the film-forming surface of the substrate. Holder holding means for holding in a state of being separated from the plurality of pressing pins, a plurality of pressing pins which are inserted through a plurality of openings provided in the holder and which can abut on the back surface of the substrate positioned on the mask, and a plurality of pressing pins And pin driving means for pressing the substrate against the back surface of the substrate to urge the substrate against the mask, thereby preventing displacement of the substrate and the mask.

In the above assembling apparatus, the back surface of the substrate positioned on the mask is pressed by a plurality of pressing pins in a state where the holder is separated from the mask by the holder holding means. When the holder is released, the holder is brought close to the substrate, and the holder is pressed against the substrate by a suction force, the bias between the mask and the substrate can be prevented. The mask assembly can be accurately assembled by a simple operation without causing any positional deviation.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of a method and an apparatus for assembling a mask assembly according to the present invention will be specifically described below with reference to the drawings.

FIG. 1 is a view for explaining the structure of a film forming apparatus for forming a mask using a mask assembly. The film forming apparatus includes a vacuum chamber 10 serving as a film forming chamber, a plasma gun 30 serving as a plasma source for supplying a plasma beam PB into the vacuum chamber 10, and a plasma beam PB disposed at the bottom in the vacuum chamber 10. The incident anode member 50 and the vacuum vessel 1
A transport mechanism 70 arranged above the anode member 50 to move the mask assembly MA above the anode member 50, and an atmosphere adjusting device 90 such as a vacuum exhaust device for adjusting the inside of the vacuum vessel 10 to a predetermined degree of vacuum and atmosphere. Prepare.

Here, the plasma gun 30 is a pressure gradient type plasma gun for generating a plasma beam PB.
Between the plasma gun 30 and the vacuum vessel 10, intermediate electrodes 41 and 4 for guiding the plasma beam PB to the vacuum vessel 10 are provided.
2. The steering coil 44 and the like are arranged. The anode member 50 includes a hearth 51 having a hearth body 53 that guides the plasma beam PB from the plasma gun 30 downward and contains an evaporating material, and an annular auxiliary anode 52 disposed around the hearth 51. The transport mechanism 70
A plurality of rollers 72 arranged at equal intervals in the horizontal direction in the transport path 71, and a driving device (not shown) for rotating these rollers 72 at an appropriate speed to move the mask assembly MA at a constant speed. Is provided.

In this film forming apparatus, the plasma gun 3
Discharge occurs between the 0 cathode 31 and the hearth 51 in the vacuum vessel 10, thereby generating a plasma beam PB. This plasma beam PB is applied to the steering coil 4
4 and a magnetic field determined by a permanent magnet or the like in the auxiliary anode 52 to reach the hearth 51. The evaporation material such as ITO (indium tin oxide) stored in the hearth body 53 is heated and evaporated by the plasma beam PB. These vaporized particles are ionized by the plasma beam PB and adhere to the surface of the liquid crystal glass substrate exposed on the lower surface of the mask assembly MA that moves at a constant speed by the transport mechanism 70, where it is made of ITO (indium tin oxide) or the like. A coating is formed.

FIG. 2 is an exploded perspective view illustrating the structure of the mask assembly MA. The mask assembly MA has a structure in which a liquid crystal glass substrate W to be formed into a film is sandwiched between a mask M and a holder H.

The liquid crystal glass substrate W is a rectangular thin plate,
The film formation surface Wa faces the mask M, and the back surface Wb faces the holder H. The mask M is a frame-shaped thin plate having a pair of openings, and is formed of a magnetic material. Holder H is
It has the same outer shape as the mask M, but has a certain thickness, and incorporates a magnet for attracting the mask M. In addition,
A large number of openings Ha are formed in the holder H at equal intervals in order to allow a pressing pin of an assembly device described later to pass therethrough.

The mask M partially supports and shields the film formation surface Wa of the liquid crystal glass substrate W during film formation. Holder H
Presses the liquid crystal glass substrate W against the mask M from the back surface Wb side by the magnetic attraction force between the substrate and the mask M. Thereby, the mask M and the liquid crystal glass substrate W can be held in an aligned state.

FIG. 3 is a view for explaining the structure of an assembling apparatus for the mask assembly MA. The assembling apparatus includes an assembling hand 100 for setting a holder H held on a mask M on which a liquid crystal glass substrate W is placed, and a transfer device 20 as a transfer robot for transferring the assembling hand 100 to a target location.
0 and the position of the assembling hand 100, and
00 and a suction / exhaust device 400 for operating a suction pad, a pneumatic cylinder, and the like, which will be described later, provided on the assembly hand 100 at appropriate timing.
And The transfer device 200 and the position sensor 30
0 and the operation of the intake / exhaust device 400 are totally controlled by a computer not shown.

The assembling hand 100 includes a plurality of suction members 3 attached to a lower portion of the hand main body 2 at equal intervals and extending downward, a movable member 4 approaching to or separated from the hand main body 2, and a lower surface of the movable member 4. A plurality of pressing pins 5 attached at equal intervals and extending downward, and a pneumatic cylinder 6 for moving the movable member 4 up and down.

The suction members 3 are holder holding means, and each suction member 3 has a suction pad 3a at the tip. Each suction pad 3a can suction a proper position on the upper surface of the holder H of the mask assembly MA shown in FIG. 2 by generating a negative pressure by the suction and exhaust device 400. The movable member 4 is provided with a guide rod 4 a that is passed through an opening 2 a provided in the hand body 2.
And moves up and down smoothly with respect to the hand body 2. The movable member 4 is provided with a plurality of openings 4d, and each of the suction members 3 is passed through the openings 4d so that interference between the movable member 4 and each of the suction members 3 is avoided. The lower ends of the pressing pins 5 extending from the movable member 4 have the same height and are arranged on the same plane. With the pressing pins 5 having such an arrangement, the liquid crystal glass substrate W placed on the mask M can be pressed uniformly from the back surface, which will be described later in detail. The pneumatic cylinder 6 is connected to the movable member 4 via a connecting member 7 as a pin driving means, and lowers the lower end of the pressing pin 5 to a lower end position that is lower than the lower end of the suction pad 3a by a predetermined distance. be able to.

FIGS. 4 to 6 are views for explaining the assembling of the mask assembly MA using the assembling apparatus shown in FIG.

First, in the assembling hand 100, gas at an appropriate pressure is supplied to the pneumatic cylinder 6 to lower the movable member 4 to the lower end position. Further, by using the transport device 200 and the position sensor 300, the assembling hand 100 is moved to a position above the holder H placed on the support pin SP and lowered there. Thereby, the suction pad 3a can be sucked to the back surface of the holder H, and the holder H can be held at the lower part of the assembling hand 100 (see FIG. 4A). At this time, since the pressing pin 5 is passed through the opening Ha provided in the holder H, interference between the holder H and the pressing pin 5 is avoided.

Next, the transfer device 200 and the position sensor 300
And the assembling hand 100 holding the holder H
Is moved above the liquid crystal glass substrate W on the mask M (see FIG. 4B). Here, the mask M and the liquid crystal glass substrate W with the film-forming surface on the lower side are precisely positioned and arranged in advance.

Next, the transport device 200 and the position sensor 300
And the assembling hand 100 holding the holder H
Is appropriately lowered, and the liquid crystal glass substrate W on the mask M is pressed from the back side by the tip of the pressing pin 5 to urge the liquid crystal glass substrate W against the mask M, and the liquid crystal glass substrate W and the mask M are mutually moved. Fix (see FIG. 5A). At this time, since the internal pressure of the pneumatic cylinder 6 is adjusted to an appropriate value, the force for pressing the liquid crystal glass substrate W against the mask M can be maintained at an appropriate value.

In the illustrated state, the magnetic force from the holder H does not reach the mask M. That is, when the movable member 4 is at the lower end position, the lower end of the pressing pin 5 is
Is lower than the lower end by a distance obtained by adding the thickness of the holder H and the distance at which the magnetic field of the holder H is sufficiently attenuated.

Next, the transfer device 200 and the position sensor 300
And the assembling hand 100 holding the holder H
Is further lowered, the holder H is gradually approached to the back surface of the liquid crystal glass substrate W, and the holder H is brought into contact with the back surface of the liquid crystal glass substrate W. (See FIG. 5B). Here, even if the assembling hand 100 is lowered, the pneumatic cylinder 6 becomes an interference member and the movable member 4 rises, so that the liquid crystal glass substrate W is fixed to the mask M with a predetermined pressing force. You. That is, even when the mask M is attracted to the holder H by the magnetic force of the magnet in the holder H, the mask M and the liquid crystal glass substrate W are not moved while being positioned because the pressing pins 5 press the liquid crystal glass substrate W.
The pressing force of the pressing pin 5 on the liquid crystal glass substrate W is
Even if the assembling hand 100 is lowered, it is maintained at a constant value determined by the supply pressure and the pressure receiving area of the pneumatic cylinder 6.

Next, the suction by the suction pad 3a is released, and the assembling hand 100 is raised using the transfer device 200 and the position sensor 300 (see FIG. 6A). Further, the assembling hand 100 is raised so that the tip of the pressing pin 5 is higher than the upper end of the holder H (see FIG. 6B). At this stage, since the mask M is attracted by the magnetic force of the magnet in the holder H, the three points of the mask M, the liquid crystal glass substrate W, and the holder H are in close contact.

As described above, the liquid crystal glass substrate W can be positioned and sandwiched between the mask M and the holder H.
The mask assembly MA to be put into the film forming apparatus can be assembled.

Although the present invention has been described with reference to the embodiment, the present invention is not limited to the above embodiment. For example, the mask assembly MA is used not only in a deposition film formation line of a depot-up type as shown in FIG. 1 but also in a deposition film line of a deposition-down type in which the material source is on the upper side and the mask assembly MA is on the lower side. be able to.

The material to be formed by using the mask assembly MA is not limited to a transparent conductive film material such as ITO, but may be various materials such as a metal film, a dielectric film, and an insulating film.

[0032]

As is apparent from the above description, according to the method for assembling a mask assembly according to the present invention, in the second step,
By pressing the back surface of the substrate on the mask with a plurality of pressing pins respectively inserted through a plurality of openings provided in the holder, the substrate is urged against the mask to prevent positional displacement. When the holder is brought close to the substrate and pressed against the substrate by the suction force, no displacement occurs between the mask and the substrate, and the displacement can be prevented by a simple operation.

Further, according to the assembling apparatus according to the present invention, in the assembling apparatus, the back surface of the substrate positioned on the mask is held by the plurality of pressing pins while the holder is separated from the mask by the holder holding means. By pressing, this substrate can be urged against the mask to prevent displacement, so when holding the holder is released and the holder is brought close to the substrate and pressed against this substrate by suction force Also, no displacement occurs between the mask and the substrate, and the mask assembly can be accurately assembled by a simple operation.

[Brief description of the drawings]

FIG. 1 is a structural diagram of a film forming apparatus that performs mask film formation using a mask assembly.

FIG. 2 is an exploded perspective view illustrating the structure of a mask assembly.

FIG. 3 is a diagram illustrating the structure of a mask assembly assembling apparatus.

FIGS. 4A and 4B are diagrams illustrating a process of assembling a mask assembly using the apparatus of FIG. 3;

5 (a) and 5 (b) are diagrams illustrating a process of assembling a mask assembly using the apparatus of FIG.

FIGS. 6A and 6B are diagrams illustrating an assembly process of a mask assembly using the apparatus of FIG. 3;

[Explanation of symbols]

 2 Hand body 3 Suction member 3a Suction pad 4 Movable member 5 Pressing pin 6 Pneumatic cylinder 10 Vacuum container 30 Plasma gun 50 Anode member 51 Hearth 70 Transport mechanism 71 Transport path 72 Roller 100 Assembly hand 200 Transport device 300 Position sensor 400 Exhaust device H Holder M Mask MA Mask assembly PB Plasma beam W Liquid crystal glass substrate

Claims (2)

[Claims] 1. A substrate on which a film is to be formed, a mask that partially supports and shields a film formation surface of the substrate, and a holder that presses the substrate against the mask from a back surface side by a suction force between the mask and the mask. A method of assembling a mask assembly, comprising: holding the holder above the mask, the holder being separated from the mask, above the substrate positioned and placed with the film-forming surface facing down. A first step of: pressing the back surface of the substrate on the mask by a plurality of pressing pins respectively inserted through a plurality of openings provided in the holder, thereby urging the substrate with respect to the mask; A second step of preventing displacement, and in a state where the substrate is urged against the mask by the plurality of pressing pins, the holder is brought close to the substrate and pressed against the substrate by the suction force. And a third step of attaching the mask assembly. 2. A state in which a holder capable of pressing the substrate against the mask from the back surface side by a suction force between the mask and a mask for partially supporting and shielding the deposition surface of the substrate is separated from the mask. A plurality of pressing pins that are respectively inserted through a plurality of openings provided in the holder and that can contact the back surface of the substrate positioned on the mask, and a plurality of pressing pins. An assembling apparatus comprising: a pin driving unit capable of preventing a positional shift between the substrate and the mask by pressing the substrate against the mask by pressing against the back surface of the substrate.