JP2001201340A - Circularity measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a circularity measuring device capable of further simplifying the centering and leveling work and conducting the accurate centering and leveling work. SOLUTION: This circularity measuring device is provided with an off-center adjusting motor 83 and a tilt adjusting motor 86 on an off-center adjusting means 17 and a tilt adjusting means 18 adjusting the off-center quantity and tilt quantity of a work respectively. Off-center and tilt correcting means 105, 106 drive the motors 83, 86 based on the off-center quantity and tilt quantity of the work obtained by an arithmetic processor 2 to correct the off-center quantity and tilt quantity of the work.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a roundness measuring device for measuring the roundness of an object to be measured, and more particularly to the correction of misalignment (centering) and the amount of inclination (horizontalization) of an object to be measured. The present invention relates to a roundness measuring device having improved operability.

[0002]

2. Description of the Related Art A roundness measuring device includes a stage (table).
Place a columnar or cylindrical work on the surface and rotate the stage, or rotate the detector itself around the work and trace the peripheral surface (outer surface or inner surface) of the work with the detector, The roundness is measured. The mechanical measurement range (stroke) of the detector is usually about 1 mm, but as the sensitivity (magnification) increases, the electrical measurement range decreases. This is mainly due to the performance (bit width) of the A / D converter. If there is a misalignment between the center of the workpiece and the rotation center of the table or the detector during measurement, the detector will require a larger stroke (at least twice the amount of misalignment) and the stroke will be over, making measurement impossible. Or
Alternatively, the sensitivity cannot be increased for the reasons described above. Therefore, when measuring with high sensitivity, accurate centering is indispensable. Furthermore, when measuring the roundness at a plurality of locations in the height direction of the work, if the axis of the work is inclined, the work will be misaligned as described above, so that leveling is also required.

For the above reasons, a centering and leveling mechanism is provided on a work table (for example, Japanese Patent No. 2569390, Japanese Patent No. 2628122). The centering mechanism is an X-axis perpendicular to the axis of the workpiece (vertical axis = Z axis).
It comprises a mechanism for moving the mounting table in the axial direction and the Y-axis direction. Hereinafter, the centering adjustment axes are referred to as CX axis and CY axis. The leveling mechanism is a mechanism in which a work table is placed on a spherical base, and the work table is slid along the spherical base by pushing the work table in the X-axis direction and the Y-axis direction. Consists of Hereinafter, this leveling adjustment axis is referred to as LX axis, L
Called the Y axis.

In centering and leveling, a work is first placed on a stage, the periphery of the work is traced by a detector, and the work is positioned so as not to deviate from the detector stroke. The height of the detector at this time is defined as ZA.
In this state, measurement is performed once, data is taken in, and the center coordinates of the workpiece at the height ZA are obtained from these data. Next, the height of the detector is positioned at ZB, measurement is performed once in the same manner, data is taken in, and the center coordinates of the workpiece at height ZB are obtained from these data. From the center coordinates of the work at the height ZA and the center coordinates of the work at the height ZB, the centering amount in the X-axis direction and the Y-axis direction and the horizontal centering amount in the X-axis direction and the Y-axis direction (center misalignment correction amount) And the inclination correction amount) are calculated and displayed. Since the centering mechanism and the leveling mechanism are composed of a micrometer head, the centering mechanism and the leveling mechanism are manually operated based on the displayed correction amount while reading the display of the micrometer head. And leveling.

[0005]

SUMMARY OF THE INVENTION It is an object of the present invention to provide a roundness measuring apparatus in which such centering and leveling operations can be further simplified and accurate centering and leveling can be performed. And

[0006]

According to the present invention, there is provided a roundness measuring apparatus, comprising: a stage on which an object to be measured having a peripheral surface whose roundness is to be measured is placed; and a peripheral surface of the object to be measured. A displacement detecting means for detecting a displacement of the object, a rotation driving means for rotationally driving the stage or the displacement detecting means so that the displacement detecting means detects a displacement along the peripheral surface of the object to be measured; A misalignment adjusting means for adjusting a misalignment amount of the object to be measured by driving the motor, the misalignment adjusting motor including a misalignment adjusting motor for moving the writing table in a plane orthogonal to a rotation axis of the rotation driving means; A tilt adjusting means for changing the tilt of the stage, including a tilt adjusting motor for changing a tilt amount of the measured object with respect to the rotation axis by driving the motor; and a measured object detected by the displacement detecting means. From the displacement of the peripheral surface of the object Calculating means for calculating the amount of misalignment and inclination, and correcting the misalignment and inclination by driving and controlling the misalignment adjusting motor and the inclination adjusting motor based on the amount of misalignment and inclination calculated by the calculating means. Misalignment
And a tilt correcting means.

According to the present invention, the misalignment adjusting motor and the inclination adjusting means for respectively adjusting the misalignment amount and the inclination amount of the object to be measured are provided with the misalignment adjusting motor and the inclination adjusting motor, respectively. Based on the obtained misalignment amount and inclination amount of the DUT, the misalignment / inclination correction means drives and controls these motors to correct the misalignment amount and the inclination amount of the measured object. No alignment error or the like due to manual operation occurs, and operability and alignment accuracy are improved.

The motor can be controlled by open loop control. Preferably, the motor is controlled by detecting the amount of movement of the stage in a plane perpendicular to the rotation axis and in a direction inclined with respect to the rotation axis. The misalignment / inclination correction means drives and controls the misalignment adjustment motor and the inclination adjustment motor using the amount of movement of the stage detected by the detection means as a feedback amount. This enables more accurate centering and leveling operations by feedback control.

In the case where the amount of misalignment and the amount of inclination of the object to be measured are obtained by the calculating means, for example, the displacement detecting means is provided at a plurality of positions in the rotation axis direction of the object to be measured mounted on the stage. Then, the displacement of the peripheral surface of the object to be measured is measured to obtain the center coordinates at each position, and the amount of misalignment and the amount of inclination may be calculated based on the center coordinates.

Further, if the misalignment / inclination correcting means drives the misalignment adjusting motor and the inclination adjusting motor simultaneously, the correction time is further reduced.

Further, the roundness measuring apparatus according to the present invention detects a stage on which an object to be measured having a peripheral surface whose roundness is to be measured is placed, and detects a displacement of the peripheral surface of the object to be measured. Displacement detecting means, a rotational drive means for rotating the stage or the displacement detecting means so that the displacement detecting means detects a displacement along the peripheral surface of the object to be measured, and Alignment adjustment means for adjusting the amount of misalignment of the object to be measured, comprising: eccentricity adjustment amount detection means for detecting the amount of movement when moved in a plane perpendicular to the rotation axis of the rotation drive means. A misalignment calculating means for calculating a misalignment amount of the measured object from the displacement of the peripheral surface of the measured object detected by the displacement detecting means; and a misalignment adjustment amount detected by the misalignment adjustment amount detecting means. The misalignment amount obtained by the misalignment calculating means is used as the misalignment correction amount. Characterized in that a Shimesuru display means.

According to the present invention, since the amount of operation of the misalignment adjusting means is accurately detected and displayed by the misalignment adjustment amount detecting means, the misalignment can be accurately adjusted. Therefore, it is not necessary to repeat the misalignment correction operation, and the preparation work time prior to the main measurement of the roundness can be shortened, and the work efficiency is improved.

[0013] A roundness measuring apparatus according to the present invention includes a stage on which an object to be measured having a peripheral surface whose roundness is to be measured is mounted, and a displacement of the peripheral surface of the object to be measured is detected. A displacement detection means, a rotation driving means for rotatingly driving the displacement table or the displacement detection means so that the displacement detection means detects a displacement along the peripheral surface of the measured object; A tilt adjusting means for adjusting a tilt amount of the object to be measured with respect to the rotation axis, comprising a tilt adjusting amount detecting means for detecting a moving amount when the tilt is changed, and a measured object detected by the displacement detecting means. Tilt calculating means for calculating the amount of tilt of the object to be measured from displacement of the peripheral surface of the object; tilt adjusting amount detected by the tilt adjusting amount detecting means; and tilt correcting amount obtained by the tilt calculating means. Display means for displaying as .

According to the present invention, the amount by which the tilt adjustment means is operated is accurately detected and displayed by the tilt adjustment amount detection means, so that the tilt adjustment can be performed accurately. Therefore, it is not necessary to repeatedly perform the tilt correction operation,
The preparation work time prior to the main measurement of the roundness can be shortened, and the work efficiency is improved.

[0015]

Preferred embodiments of the present invention will be described below with reference to the accompanying drawings. FIG.
1 is a perspective view showing the appearance of a roundness measuring device according to one embodiment of the present invention. This roundness measuring device is a measuring machine body 1
And an arithmetic processing unit 2. Measuring machine body 1
A centering table 5 provided on the base 3 for mounting and rotating a columnar or cylindrical work 4, and a peripheral surface of the work 4 mounted on the centering table 5. A displacement detection device 6 for detecting the radial displacement of the device, and an operation unit 7 for operating these devices.

The centripetal table 5 includes a disk-shaped stage 11.
Is rotationally driven by a rotation drive device 12 disposed therebelow to rotate the work 4 placed on the table 11. On the side of the centripetal table 5, centering knobs 13 and 14 for adjusting misalignment and horizontal centering knobs 15 and 16 for adjusting inclination are arranged at intervals of approximately 90 degrees in the circumferential direction. By operating the table 16, centering and leveling of the stage 11 can be performed by manual operation.

The displacement detecting device 6 is configured as follows. That is, an upwardly extending column 21 is erected on the base 3, and a slider 22 is mounted on the column 21 so as to be vertically movable. An arm 23 is mounted on the slider 22. The arm 23 is driven in the horizontal direction, and the tracing stylus 24 provided at the tip of the arm 23 comes into contact with the outer peripheral surface of the work 4, and when the work 4 rotates, the radial displacement of the outer peripheral surface of the work 4 is measured as measurement data. You can get it.

The measurement data obtained by the displacement detecting device 6 is as follows:
The coordinates are taken into the arithmetic processing unit 2, and the center coordinates, roundness, and the like of the measured cross section of the work 4 are obtained here. In addition, the arithmetic processing unit 2 operates the operation unit 31 during the preliminary measurement prior to the main measurement.
Calculating means for calculating the amount of misalignment or the amount of inclination to be corrected based on the operation to the display screen 32 and displaying the calculated amount on the display screen 32.
On the basis of the calculated amount of misalignment and the amount of inclination, the misalignment adjusting means for controlling the misalignment adjusting means and the inclination adjusting means, which will be described later,
An inclination correcting unit is provided.

Next, a more detailed configuration of the centripetal table 5 will be described. FIG. 2 is a longitudinal sectional view of the centripetal table 5, and FIG. 3 is a sectional view taken along line AA in FIG. The centripetal table 5 includes a stage 11 on which the workpiece 4 is placed.
And a rotary drive device 12 for driving the mounting table 11 to rotate.
And the misalignment adjusting means 17 and the inclination adjusting means 18 formed inside the rotary drive device 12. The rotation drive device 12 includes a cylindrical side wall 41 whose upper end is closed by the stage 11, a movable base 42 that closes its lower end,
A rotary base 43 for driving these components is provided. The movable base 42 is supported on the rotating base 43 via a hard sphere 45 held by a retainer 44, so that substantially the entire centering table 5 can be moved in an arbitrary direction on a horizontal plane.

In the center of the movable base 42, a center hole 4 is provided.
A rotation shaft 47 protruding upward from the center of the rotation base 43 penetrates the center hole 46 with a certain gap. A rectangular piece 48 is provided at the upper end of the rotating shaft 47.
Is provided. Four connecting columns 49 are protrudingly provided at positions around the rotation shaft 47 of the movable base 42.
A disc-shaped inclined base 50 is supported on the upper end of the disc. An inclined ring 51 having a spherical concave portion is fixed on the inclined base 50, and the stage 11 is mounted on the inclined ring 51. A spherical convex portion 52 that fits the spherical concave portion of the inclined ring 51 is provided below the stage 11, and a preload is applied by a spring 53 between the center of the lower surface of the stage 11 and the center of the inclined base 50. Has been granted. The stage 11 changes its position along the spherical surface so that the stage 1
1 can be adjusted.

The centering adjusting means 17 is configured as follows. That is, as shown in FIG.
Reference numeral 14 is provided as a knob for manually adjusting the amount of misalignment adjustment in the CX axis, which is the misalignment adjustment axis, and the CY axis direction (however, the CX axis and the CY axis are orthogonal to each other). A spindle 61 is provided at the tip of the centering knob 13. The spindle 61 extends in the CX axis direction and is rotatably supported by a support member 62, and moves forward and backward by rotation of the centering knob 13, similarly to the micrometer head. It has become. The tip of the spindle 61 contacts the movable portion 64 of the linear guide 63, and the tip of the movable portion 64 contacts the piece 48 at the upper end of the rotating shaft 47. Spindle 6
A rotation shaft of a stepping motor 83 is connected to 1 via non-backlash gears 81 and 82, and the rotation of the spindle 61 can be controlled by the stepping motor 83. The centering knob 14 also has a similar configuration.

The inclination adjusting means 18 is configured as follows. That is, as shown in FIG.
Reference numeral 16 denotes a knob for manually adjusting the amount of tilt adjustment in the directions of the LX axis and the LY axis (however, the LX axis and the LY axis are orthogonal to each other), which are tilt adjustment axes. A spindle 65 is also provided at the tip of the horizontal knob 15 in the same manner as described above. The spindle 65 extends in the LX axis direction and is rotatably supported by a support member 66. As a result, the spindle 65 moves forward and backward by the rotation of the horizontal knob 15 in the same manner as the micrometer head.
The tip of the spindle 65 is opposed to the movable portion 69 of the linear guide 68 with a tilt operation bar 67 extending downward from the lower surface of the mounting table 11 therebetween. The movable portion 69 is a double cylindrical structure urged in a direction in which the movable portion 69 extends by a spring 70, and the tip thereof presses the piece 48. Further, a downward preload is applied by a spring 71 to the opposite side of the stage 11 from the tilt operation bar 67. The stepping motor 8 is connected to the spindle 65 via non-backlash gears 84 and 85.
6 are connected to each other, and the stepping motor 86
Thus, the rotation of the spindle 65 can be controlled. The horizontal knob 16 has the same configuration.

A main scale 72 is fixed on the upper surface of the movable portion 64 of the linear guide 63, and the index scale 73 is fixed to the movable base 4 so as to face the upper portion thereof.
It is fixed to 2. A linear encoder 74 which is a detecting means for detecting the amount of misalignment by the scales 72 and 73 is configured. Also, the movable portion 69 of the linear guide 68
A main scale 75 is also fixed to the upper surface of the movable base 42, and an index scale 76 is fixed to the movable base 42 so as to face the main scale 75, thereby constituting a linear encoder 77 which is a detecting means for detecting the amount of tilt. . Then, by these linear encoders 74 and 77, C
The adjustment amounts in the X and CY axis directions and the LX and LY axis directions can be detected. The centering knob 14 side and the horizontal centering knob 16 side have the same configuration as the centering knob 13 side and the horizontal centering knob 15 side.

A rotation shaft of a motor 91 serving as a rotation driving means is connected to the lower side of the rotation base 43, and the whole of the centripetal table 5 is rotationally driven by the motor 91.
The rotation angle is detected by a rotary encoder 92 connected to a rotation shaft of a motor 91.

FIG. 4 is a block diagram showing the flow of signals and information of the roundness measuring device. The arithmetic processing unit 2
As internal functions, central coordinate calculating means 101, roundness calculating means 102, inclination calculating means 103, misalignment calculating means 1
04, a misalignment correcting unit 105 and a tilt correcting unit 106. The displacement detecting device 6 includes a displacement detecting unit 111 that detects a displacement of the surface of the work 4 by tracing the surface of the work 4 with the tracing stylus 24, , A stylus moving means 113 for moving the stylus 24 forward and backward. The center coordinate calculating means 101 and the roundness calculating means 102 are provided with a tracing stylus elevating means 112 and a tracing stylus moving means 113 of the displacement detecting device 6.
In addition, by controlling the drive of the rotation driving motor 91 of the centripetal table 5, the measurement data is taken in from the displacement detecting means 111, and the output from the rotary encoder 92 indicating the rotation angle of the centripetal table 5 is associated with the measurement data. take in. The center coordinate calculating means 101 calculates the center coordinates of the work 4 from these data, and calculates the roundness calculating means 10.
2. Output to the inclination calculating means 103 and the misalignment calculating means 104. The roundness calculating means 102 calculates the roundness of the work 4 based on the input data. Slope calculation means 1
03 and the misalignment calculation means 104 are the center coordinate calculation means 1
The inclination amount and the misalignment amount of the work 4 are calculated based on the center coordinates obtained in step 01.

The misalignment correcting means 105 is provided with a stepping motor 8 based on the misalignment amount from the misalignment calculating means 104.
3 (CX axis), 83 (CY axis), and linear encoders 74 (CX axis), 74 (CY axis)
Input the data of the movement amount from the stepping motor 8
3 is driven and controlled. The tilt correcting means 106 drives the stepping motors 86 (LX axis) and 86 (LY axis) based on the tilt amount from the tilt calculating means 103, respectively, and also controls the linear encoders 77 (LX axis) and 77 (LY).
The data of the movement amount from the axis (axis) is input to drive and control the stepping motor 86.

Next, a method of measuring roundness using the roundness measuring apparatus thus configured will be described. FIG. 5 is a flowchart showing a procedure of the roundness measurement. First, the work 4 is visually installed at substantially the center of the stage 11 of the centripetal table 5 (S1), and the displacement detection device 6 is set to the coarsest range (S2). Next, the stylus elevating means 11
2, the slider 22 is driven to set the position of the tip of the tracing stylus 24 in the Z-axis direction to the position ZA in FIG.
The tip of the tracing stylus 24 is brought into contact with the peripheral surface of the workpiece 4 to be measured by the tracing stylus advance / retreat means 113, and the centripe table 5 is rotated once by the motor 91, and the displacement data from the displacement detecting device 6 is used as measurement data as an arithmetic processing unit The XY coordinates (XA, XA, X) of the center A of the work 4 at the height ZA
YA) is calculated (S3). Subsequently, the stylus elevating means 11
2, the slider 22 is driven to set the position of the tip of the tracing stylus 24 in the Z-axis direction to the position ZB in FIG.
The tip of the tracing stylus 24 is brought into contact with the peripheral surface of the workpiece 4 to be measured by the tracing stylus advance / retreat means 113, and the centripe table 5 is rotated once by the motor 91, and the displacement data from the displacement detecting device 6 is used as measurement data as an arithmetic processing unit. 2, the XY coordinates (XB, Y) of the center B of the workpiece 4 at the height ZB.
B) is calculated (S4).

When the XY coordinate values of the center points A and B of the workpiece 4 at the heights ZA and ZB are determined, the misalignment calculating means 104 and the inclination calculating means 103 of the arithmetic processing unit 2 calculate the following values from these coordinate values. First, the misalignment amount and the inclination amount of the work 4 are calculated (S5). That is, let K be the spherical center of the spherical convex portion 52 and the spherical upper concave portion of the inclined ring 51 shown in FIG. 2, and the XY coordinate values thereof are (XK, Y
K), assuming that the Z-axis height is Z0, the point O at the height Z0 on the rotation axis of the motor 91 is the leveling center. Assuming that the XY coordinate value of the leveling center O is (0, 0), the amount of misalignment is (XK, YK), which is obtained as follows, as apparent from FIG.

[0029]

XK = XA + (Z0−ZA) · (XB−XA)
/ (ZB-ZA) YK = YA + (Z0-ZA). (YB-YA) / (ZB
-ZA)

The inclination amounts θX and θY are obtained as follows, as is apparent from FIG.

[0031]

ΘX = tan ⁻¹ {(XB−XA) / (ZB−ZA)} θY = tan ⁻¹ {(YB−YA) / (ZB−ZA)}

The amount of misalignment (XK, YK) and the amount of inclination θX,
When θY is obtained, the misalignment correcting means 105 and the inclination correcting means 106 of the arithmetic processing unit 2 adjust the stepping motors 83 and 8 to minimize the misalignment amount and the inclination amount.
6 is driven to correct misalignment and inclination (S6). When the stepping motor 83 is driven, its rotational driving force is transmitted to the spindle 61 via the non-backlash gears 82, 81, and the tip of the spindle 61 moves forward and backward to move the movable portion 64 of the linear guide 63 to the CX axis and CY. Move in the axial direction. The distal end side of the movable portion 64 is brought into contact with the piece 48 by the spring pressure of the spring 70, and the piece 48 is fixed to the rotating base 43, so that the movable base 42 moves in the CX axis and CY axis directions. As a result, the misalignments XK and YK are corrected. When the stepping motor 86 is driven, the rotational driving force is transmitted to the spindle 65 via the non-backlash gears 85 and 84, and the tip of the spindle 65 moves forward and backward. The tip of the spindle 65 causes the movable portion 69 of the linear guide 68 to advance and retreat in the LX axis and LY axis directions via the tilt operation lever 67 to compress or expand the spring 70. As a result, the tilt operation lever 67 moves the LX axis and the LY
The stage 11 moves back and forth in the axial direction, and the stage 11 rotates around the center K of the spherical surface to change its inclination.

The linear encoders 74 and 77 are CX, C
The movement amounts in the Y, LX, and LY axis directions are detected and fed back to the arithmetic processing device 2, and the misalignment correction means 105 and the inclination correction means 106 of the arithmetic processing device 2 determine whether the feedback movement amounts in the respective axis directions are correct. When the calculated amounts of misalignment and inclination have been reached, the driving of the stepping motors 83 and 86 is stopped. Since the centering and leveling operations are completed by the above operations, the range of the displacement detection device 6 is set to an appropriate range, and the roundness measurement by the roundness calculating means 102 is started (S7).

Further, in another embodiment of the present invention,
CX, CY, LX by linear encoders 74 and 77,
The detection result of each movement amount in the LY axis direction is displayed on the display screen 32 of the arithmetic processing unit 2. On the other hand, the misalignment amount and the inclination amount calculated by the misalignment calculating means and the inclination calculating means are also displayed on the display screen 32 as the misalignment correction amount and the inclination correction amount. Therefore, the centering knob 1 is adjusted so that the detection result of the moving amount becomes equal to the misalignment correction amount and the inclination correction amount, respectively.
By operating 3,14 and leveling knobs 15,16,
Since accurate centering and leveling can be performed even by manual operation, preparation work prior to main measurement of roundness can be shortened, and efficiency of measurement can be improved.

In the above embodiment, the centripetal table 5
Is rotated, but the centripetal table 5 may be fixed and the displacement measuring device 6 may be rotated.

[0036]

As described above, according to the present invention, the inclination adjusting means and the inclination adjusting means for respectively adjusting the amount of misalignment and the amount of inclination of the object to be measured are provided with the motor for adjusting the misalignment and the motor for adjusting the inclination. Are provided, and based on the amount of misalignment and the amount of inclination of the measured object obtained by the calculating means,
Since the inclination correcting means drives and controls these motors to correct the misalignment amount and the inclination amount of the object to be measured, there is no need for complicated manual operation or manual alignment error, and operability and alignment accuracy are improved. It has the effect of improving.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a roundness measuring apparatus according to one embodiment of the present invention.

FIG. 2 is a longitudinal sectional view of a centripetal table in the circularity measuring device.

3 is a cross-sectional view of the centripetal table taken along the line AA in FIG. 2;

FIG. 4 is a block diagram showing a flow of signals and information of the roundness measuring device.

FIG. 5 is a flowchart for explaining a measuring method by the roundness measuring device.

FIG. 6 is a diagram for explaining a method of calculating the amount of misalignment and the amount of inclination in the measurement method.

FIG. 7 is a diagram for explaining a method of calculating the amount of misalignment and the amount of inclination in the same measuring method.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Measuring machine main body, 2 ... Calculation processing device, 3 ... Base, 4 ... Work, 5 ... Centering table, 6 ... Displacement detection device, 7 ... Operation unit, 11 ... Mounting table, 12 ... Rotation drive device, 13 , 14 ...
Centering knobs, 15, 16 ... horizontal centering knobs, 17 ... misalignment adjusting means, 18 ... inclination adjusting means, 74, 77 ... linear encoders, 83, 86 ... stepping motors.

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Atsushi Tsuruta 6-8-20 Hiroko Shinkai, Kure-shi, Hiroshima F-term (reference) 2F069 AA21 AA56 AA93 CC02 CC05 DD25 EE11 EE12 GG01 GG52 GG62 HH02 HH14 HH15 HH24 JJ06 JJ17 PP01 QQ07

Claims (6)

[Claims] 1. A stage on which an object having a peripheral surface whose roundness is to be measured is placed, a displacement detecting means for detecting a displacement of the peripheral surface of the object, and the displacement detecting means comprises: A rotational drive unit configured to rotationally drive the stage or the displacement detection unit so as to detect a displacement along a peripheral surface of the object to be measured; and a perpendicular to the rotation axis of the rotational drive unit. A misalignment adjusting motor for adjusting the amount of misalignment of the object to be measured by driving the motor, and an inclination adjusting motor for changing the inclination of the stage. A tilt adjusting unit that adjusts a tilt amount of the measured object with respect to the rotation axis by driving the motor; and a misalignment amount of the measured object based on a displacement of a peripheral surface of the measured object detected by the displacement detecting unit. Calculating means for determining the amount of inclination, and calculating means And a misalignment / inclination correction unit for controlling the drive of the misalignment adjustment motor and the inclination adjustment motor based on the misalignment amount and the inclination amount obtained by the above-described method and correcting the misalignment amount and the inclination amount. A roundness measuring device characterized by the above-mentioned. 2. The apparatus according to claim 1, further comprising a detecting unit configured to detect a movement amount of the stage in a plane direction orthogonal to the rotation axis and an amount of movement in a tilt direction with respect to the rotation axis. 2. The roundness measuring apparatus according to claim 1, wherein the detected misalignment amount is used as a feedback amount to drive and control the misalignment adjustment motor and the inclination adjustment motor. 3. The computing unit measures displacement of a peripheral surface of the measured object at a plurality of positions in the rotation axis direction of the measured object mounted on the stage using the displacement detecting unit. 3. The roundness measuring device according to claim 1, wherein the center coordinates are obtained at each position, and the amount of misalignment and the amount of inclination are calculated based on the center coordinates. 4. The true circle according to claim 1, wherein the misalignment / inclination correcting means drives the misalignment adjusting motor and the inclination adjusting motor simultaneously. Degree measuring device. 5. A stage on which an object having a peripheral surface whose roundness is to be measured is placed, a displacement detecting means for detecting a displacement of the peripheral surface of the object, and the displacement detecting means comprises: A rotational drive unit configured to rotationally drive the stage or the displacement detection unit so as to detect a displacement along a peripheral surface of the object to be measured; and a perpendicular to the rotation axis of the rotational drive unit. A misalignment adjusting means for adjusting a misalignment amount of the object to be measured, the misalignment adjusting means comprising: a misalignment adjustment amount detecting means for detecting a moving amount when the object is moved in a plane to be measured; Misalignment calculating means for calculating the amount of misalignment of the measured object from the displacement of the peripheral surface of the measured object; misalignment adjustment amount detected by the misalignment adjustment amount detecting means; Display means for displaying the amount of misalignment as the amount of misalignment correction Roundness measuring apparatus according to claim. 6. A stage on which an object having a peripheral surface whose roundness is to be measured is placed, a displacement detecting means for detecting a displacement of the peripheral surface of the object, and the displacement detecting means comprises: A rotation drive unit configured to rotationally drive the stage or the displacement detection unit so as to detect a displacement along a peripheral surface of the measured object; and a movement amount when the inclination of the stage is changed. An inclination adjusting means for adjusting an amount of inclination of the object to be measured with respect to the rotation axis, and an inclination adjusting amount detecting means for detecting the amount of inclination of the object to be measured from the displacement of the peripheral surface of the object detected by the displacement detecting means. And a display means for displaying the tilt adjustment amount detected by the tilt adjustment amount detection means and the tilt amount obtained by the tilt calculation means as a tilt correction amount. Characteristic roundness measuring device.