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JP2001290017A - Two-wavelength diffraction element and optical head device - Google Patents

Two-wavelength diffraction element and optical head device

Info

Publication number
JP2001290017A
JP2001290017A JP2000218976A JP2000218976A JP2001290017A JP 2001290017 A JP2001290017 A JP 2001290017A JP 2000218976 A JP2000218976 A JP 2000218976A JP 2000218976 A JP2000218976 A JP 2000218976A JP 2001290017 A JP2001290017 A JP 2001290017A
Authority
JP
Japan
Prior art keywords
wavelength
light
diffraction grating
diffraction
diffraction element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000218976A
Other languages
Japanese (ja)
Other versions
JP4560906B2 (en
Inventor
Yoshiharu Oi
好晴 大井
Yuzuru Tanabe
譲 田辺
Shinko Murakawa
真弘 村川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP2000218976A priority Critical patent/JP4560906B2/en
Publication of JP2001290017A publication Critical patent/JP2001290017A/en
Application granted granted Critical
Publication of JP4560906B2 publication Critical patent/JP4560906B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Polarising Elements (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Optical Head (AREA)

Abstract

(57)【要約】 【課題】2波長用半導体レーザを用いた安定した信号検
出ができる高性能な光ヘッド装置を提供する。 【解決手段】波長λ1の入射光を透過するとともに波長
λ2の入射光を回折させる回折格子11Bと、2つの波
長λ1または波長λ2のうち少なくとも一方の波長の透過
光の偏光状態を変化させる位相板11Cとが一体化され
た2波長用回折素子を作製し、光ヘッド装置に搭載す
る。
(57) Abstract: Provided is a high-performance optical head device capable of performing stable signal detection using a two-wavelength semiconductor laser. A diffraction grating 11B for diffracting incident light having a wavelength of lambda 2 while passing through the A wavelength lambda 1 of the incident light, the two least one polarization state of the transmitted light of wavelength in the wavelength lambda 1 or wavelength lambda 2 A two-wavelength diffraction element integrated with the phase plate 11C to be changed is manufactured and mounted on an optical head device.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、少なくとも2つの
波長の光を光源とする光ディスクなどの光記録媒体用の
記録装置や再生装置などに用いる光ヘッド装置用の2波
長用回折素子およびその光ヘッド装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-wavelength diffractive element for an optical head device used in a recording device or a reproducing device for an optical recording medium such as an optical disk using light of at least two wavelengths as a light source, and its light. It relates to a head device.

【0002】[0002]

【従来の技術】例えばCDやDVDのような光ディスク
または光磁気ディスクなどの光記録媒体(以下、これら
をまとめて光ディスクとよぶ)の情報記録面上に情報を
記録し、または情報記録面上に記録された情報を再生す
る光ヘッド装置が各種用いられている。
2. Description of the Related Art Information is recorded on an information recording surface of an optical recording medium such as an optical disk such as a CD or a DVD or a magneto-optical disk (hereinafter collectively referred to as an optical disk). Various optical head devices for reproducing recorded information have been used.

【0003】通常、この光ヘッド装置では、レーザ光な
どのビーム(光束)を使用して光学的に情報記録面上に
情報を記録したり情報記録面上に記録された情報を再生
するようになっているが、そのビームを(情報記録面の
トラック上に集光させた状態で)光ディスクの回転に追
随させながらトラック上をトレースさせていくために、
各種のトラッキング方法が開発されている。
Normally, in this optical head device, information is optically recorded on an information recording surface by using a beam (light flux) such as a laser beam, and information recorded on the information recording surface is reproduced. However, in order to trace the beam on the track while following the rotation of the optical disk (with the beam focused on the track on the information recording surface),
Various tracking methods have been developed.

【0004】これらのトラッキング方法を用いて情報記
録面の記録情報を再生する際の信号検出方法としては、
例えば3ビーム法が知られている。この3ビーム法で
は、光源の半導体レーザから出射される1本のビームを
回折格子によって回折し、この回折光の中から0次およ
び±1次の3本の回折光を各ビームとして用いている。
このうち、0次光はメインビームとしてトラック上に記
録されたピットの信号再生に使用するが、残りの±1次
光はトラッキング用の2つのサブビームとして使用する
ために、例えばトラック線方向に対してピットの前後に
トラックピッチの約1/4だけずらして照射するように
配置する。これにより、3本のビームの情報記録面での
反射光は、それぞれ適宜位置に配置した受光素子に入射
し、受光した光強度に応じた電気信号に変換される。
[0004] As a signal detecting method when reproducing the recorded information on the information recording surface using these tracking methods, there are the following methods.
For example, a three-beam method is known. In the three-beam method, one beam emitted from a semiconductor laser as a light source is diffracted by a diffraction grating, and three diffracted lights of the 0th order and ± 1st order among the diffracted lights are used as each beam. .
Of these, the zero-order light is used as a main beam for signal reproduction of pits recorded on the track, while the remaining ± first-order light is used as two tracking sub-beams. It is arranged so that it is irradiated before and after the pit by shifting by about 1/4 of the track pitch. As a result, the reflected lights of the three beams on the information recording surface are respectively incident on the light receiving elements arranged at appropriate positions, and are converted into electric signals corresponding to the intensity of the received light.

【0005】このような3ビーム法では、サブビーム側
の電気信号の平均値レベルの差をとることで、トラック
追跡サーボ用のトラッキング誤差信号が得られ、このト
ラッキング誤差信号を利用してメインビームをトラック
上から逸脱せぬようにサーボ制御を行う。すなわち、メ
インビームがトラック中心を走査しているときには、サ
ブビームの平均レベルはどちらも同じレベルであるが、
メインビームがトラック中心を外れると、サブビームの
平均レベルに相違が生じ、トラッキング誤差信号として
検知される。
In such a three-beam method, a tracking error signal for track tracking servo is obtained by calculating the difference between the average values of the electric signals on the sub-beam side, and the main beam is used by utilizing the tracking error signal. Servo control is performed so as not to deviate from the track. That is, when the main beam is scanning the center of the track, the average level of both sub beams is the same level,
When the main beam deviates from the center of the track, a difference occurs in the average level of the sub-beams, which is detected as a tracking error signal.

【0006】また、これとは別の信号検出方法として
は、情報記録面で反射したビームをトラックと平行に2
分割させた受光素子で受け、このときの出力差からトラ
ッキング誤差信号を検出するようにしたプッシュプル法
も知られている。このプッシュプル法においては、1本
のビームだけでは信号にオフセットが生じ、トラッキン
グ精度が劣化するので、そのオフセットをキャンセルす
るために差動プッシュプル法が用いられる。
As another signal detection method, a beam reflected on an information recording surface is parallel to a track.
There is also known a push-pull method in which a divided light receiving element receives a signal and a tracking error signal is detected from an output difference at this time. In this push-pull method, an offset occurs in the signal with only one beam, and the tracking accuracy deteriorates. Therefore, the differential push-pull method is used to cancel the offset.

【0007】すなわち、この差動プッシュプル法でも、
前述の3ビーム法と同様に半導体レーザから出射した1
本のビームを回折格子で回折させて生成した0次光およ
び±1次光の3本のビームを用いるが、メインビームの
0次光はトラック上に配置し、±1次光は2本のサブビ
ームとしてトラック線方向に対して斜めの方向に配置
し、メインビームが配置されたピットの前後にトラック
ピッチの約1/2だけトラックに垂直方向にずらして照
射するように配置する。そして、それぞれのビームに対
して配置された2分割の受光素子で情報記録面からの反
射光を受け、2つの受光部における受光光量のプッシュ
プルを行う。この差動プッシュプル法では、メインビー
ムのプッシュプル値とサブビームのプッシュプル値を減
算することでオフセットをキャンセルする。
That is, even in this differential push-pull method,
1 emitted from the semiconductor laser in the same manner as in the three-beam method described above.
Three beams of 0-order light and ± 1st-order light generated by diffracting this beam with a diffraction grating are used. The 0th-order light of the main beam is arranged on the track, and the ± 1st-order light is 2 beams. The sub-beams are arranged obliquely with respect to the track line direction, and are arranged so as to be shifted vertically by about 1/2 of the track pitch before and after the pit where the main beam is arranged. Then, the reflected light from the information recording surface is received by two divided light receiving elements arranged for each beam, and push-pull of the received light amount in the two light receiving units is performed. In the differential push-pull method, the offset is canceled by subtracting the push-pull value of the main beam and the push-pull value of the sub beam.

【0008】また、最近では、例えば同一の光ヘッド装
置を用いて、規格・構成の異なるCDおよびDVDの双
方に記録された情報を再生するため、CD/DVD互換
光ヘッド装置が実用化されている。この互換光ヘッド装
置にあっては、特に光記録媒体層に波長依存性の高い媒
質を用いるCD−Rなどの再生を前提とする場合には、
CD系の光ディスク再生用には790nm波長帯の半導
体レーザが、またDVD系の光ディスク再生用には65
0nm波長帯の半導体レーザが用いられている。
Recently, CD / DVD compatible optical head devices have been put into practical use, for example, in order to reproduce information recorded on both CDs and DVDs having different standards and configurations using the same optical head device. I have. In this compatible optical head device, in particular, when the reproduction of a CD-R or the like using a medium having a high wavelength dependency in the optical recording medium layer is assumed,
A semiconductor laser in the 790 nm wavelength band is used for reproducing a CD-based optical disk, and a semiconductor laser of 65 nm is used for reproducing a DVD-based optical disk.
A semiconductor laser having a wavelength band of 0 nm is used.

【0009】ここで、790nm波長帯の半導体レーザ
と650nm波長帯の半導体レーザとが分離した状態で
配置された従来の光ヘッド装置について、図7の構成例
を参照しながら説明する。
Here, a conventional optical head device in which a semiconductor laser in the 790 nm wavelength band and a semiconductor laser in the 650 nm wavelength band are arranged separately will be described with reference to the configuration example of FIG.

【0010】光ヘッド装置は、2つの半導体レーザ3A
(650nm波長帯)および3B(790nm波長帯)
と、波長合成プリズム9と、ビームスプリッタ4と、コ
リメータレンズ5と、対物レンズ6と、光検出器8とを
備えている。また、この光ヘッド装置には、半導体レー
ザ3Bと波長合成プリズム9との間に、3ビーム発生用
の回折格子10が配設されている。
The optical head device has two semiconductor lasers 3A.
(650 nm wavelength band) and 3B (790 nm wavelength band)
, A wavelength synthesizing prism 9, a beam splitter 4, a collimator lens 5, an objective lens 6, and a photodetector 8. In this optical head device, a diffraction grating 10 for generating three beams is disposed between the semiconductor laser 3B and the wavelength synthesizing prism 9.

【0011】この光ヘッド装置では、半導体レーザ3
A、3Bからの出射光は、波長合成プリズム9により同
一光軸α上で合成され、ビームスプリッタ4を透過した
後に、コリメータレンズ5で平行光とされ、対物レンズ
6に入射する。そして、この対物レンズ6を透過し、光
ディスク7の情報記録面に集光されたビームが、その情
報記録面で反射された光(以下、信号光とよぶ)は、元
の往路と同じ光路を逆行していく。すなわち、この信号
光は、再び、対物レンズ6によって平行光となり、コリ
メータレンズ5で集光されたのち、ビームスプリッタ4
に入射するが、このビームスプリッタ4で反射されたも
のが、元の往路の光軸αとは90度偏向した光軸βに沿
って進行して、光検出器8の受光面に集光されて入射す
る。そして、この光検出器8で電気信号に変換される。
In this optical head device, the semiconductor laser 3
Light emitted from A and 3B is combined on the same optical axis α by a wavelength combining prism 9, passes through a beam splitter 4, is converted into parallel light by a collimator lens 5, and enters an objective lens 6. The beam transmitted through the objective lens 6 and condensed on the information recording surface of the optical disk 7 is reflected by the information recording surface (hereinafter referred to as signal light) along the same optical path as the original outward path. Going backwards. That is, this signal light is again converted into parallel light by the objective lens 6, collected by the collimator lens 5, and
The light reflected by the beam splitter 4 travels along the optical axis β deflected by 90 degrees with respect to the optical axis α of the original outward path, and is condensed on the light receiving surface of the photodetector 8. Incident. Then, the light is converted into an electric signal by the photodetector 8.

【0012】このような構成の光ヘッド装置では、情報
記録面からの反射光が戻り光となって半導体レーザ3
A、3Bのレーザ発光点に入射すると、レーザの発振状
態が変動し、これに応じて半導体レーザ3A、3Bの出
力変動が生じるので、情報の記録再生の際の障害とな
る。そこで、この対策として、半導体レーザ3A、3B
の電源に高周波重畳回路を組み合わせて出力変動を低減
させたり、あるいは、半導体レーザ3A、3Bと光ディ
スク7との間の光路中に、レーザ発振波長λに対してほ
ぼ1/4波長板となる位相板を配置する方法がとられて
いる。この位相板を使用することにより、往路の光路中
での位相に対して復路では1/2波長だけ位相が変化
し、戻り光の偏光方向がレーザ発振光の偏光方向と直交
するので、レーザ発振の偏光に作用しないようにして半
導体レーザの出力変動を抑制できる。
In the optical head device having such a configuration, the reflected light from the information recording surface becomes return light and becomes the semiconductor laser 3.
When the laser light enters the laser emission points A and 3B, the oscillation state of the laser fluctuates, and the output of the semiconductor lasers 3A and 3B fluctuates accordingly. Therefore, as a countermeasure, the semiconductor lasers 3A, 3B
The power supply is combined with a high-frequency superimposing circuit to reduce output fluctuations, or in the optical path between the semiconductor lasers 3A and 3B and the optical disk 7, a phase that becomes an almost quarter-wave plate with respect to the laser oscillation wavelength λ. A method of arranging the boards has been adopted. By using this phase plate, the phase in the return optical path changes by 1 / wavelength with respect to the phase in the optical path in the outward path, and the polarization direction of the return light is orthogonal to the polarization direction of the laser oscillation light. And the output fluctuation of the semiconductor laser can be suppressed.

【0013】また、2つの波長の光を発光する半導体レ
ーザとして、例えば790nm波長帯の半導体レーザと
650nm波長帯の半導体レーザとを1チップ内に形成
したモノリシックな2波長用半導体レーザや、各波長帯
のレーザチップを発光点間が100〜300μm程度の
間隔となるように配置した複数チップからなる2波長用
半導体レーザも提案されている。これらの半導体レーザ
を用いれば、図7に示したような2つの半導体レーザが
別ユニットで構成された従来の光ヘッド装置に比べ、部
品点数が低減し、小型化および低コスト化を図ることが
できる。
As a semiconductor laser that emits light of two wavelengths, for example, a monolithic two-wavelength semiconductor laser in which a semiconductor laser having a wavelength band of 790 nm and a semiconductor laser having a wavelength band of 650 nm are formed in one chip, A two-wavelength semiconductor laser comprising a plurality of chips in which laser chips in a band are arranged so that the distance between light emitting points is about 100 to 300 μm has also been proposed. When these semiconductor lasers are used, the number of parts is reduced, and the size and cost are reduced as compared with a conventional optical head device in which two semiconductor lasers as shown in FIG. it can.

【0014】[0014]

【発明が解決しようとする課題】しかし、前述したよう
な光ヘッド装置において、3ビーム法や差動プッシュプ
ル法での3ビーム発生に用いる回折格子を2波長用半導
体レーザと組み合わせて使用すると、CD系再生用の7
90nm波長帯またはDVD系再生用の650nm波長
帯のいずれの光が回折格子に入射しても回折光が形成さ
れるので、余分な回折光が迷光となって光検出器に混入
することがあり、情報の記録や記録された情報の再生が
できなくなる問題が生じる。
However, in the above-described optical head device, when a diffraction grating used for generating three beams by a three-beam method or a differential push-pull method is used in combination with a two-wavelength semiconductor laser, 7 for CD system playback
Even if light in the 90 nm wavelength band or the 650 nm wavelength band for DVD reproduction is incident on the diffraction grating, the diffracted light is formed, so that extra diffracted light may become stray light and enter the photodetector. This causes a problem that information cannot be recorded or the recorded information cannot be reproduced.

【0015】また、3ビーム法や差動プッシュプル法
を、CD系再生用のみに、またはDVD系再生用のみに
利用する場合には、回折格子により生成された回折光
が、他方の波長光に対しては光量損失をもたらし、信号
光が低下する問題が生じる。
When the three-beam method or the differential push-pull method is used only for reproducing the CD system or only for reproducing the DVD system, the diffracted light generated by the diffraction grating emits the other wavelength light. Causes a light quantity loss, and causes a problem that signal light is reduced.

【0016】さらに、3ビーム法や差動プッシュプル法
に用いる回折格子と、レーザ出力変動を抑制するために
戻り光の低減対策に設けた位相板とが個別に配置された
場合には、個々の光学素子の波面収差値が合算されるた
め、全体の波面収差値が増大する問題が生じる。
Further, when the diffraction grating used for the three-beam method or the differential push-pull method and the phase plate provided for reducing the return light in order to suppress the fluctuation of the laser output are individually arranged, Since the wavefront aberration values of the optical elements are summed up, a problem arises that the total wavefront aberration value increases.

【0017】また、2波長用半導体レーザを用いた場
合、各波長帯のレーザチップの発光点間隔が100〜3
00μm程度離れているため、CD系光ディスクおよび
DVD系光ディスクの信号を受光する光検出器として従
来のように受光面積の小さな単一光検出器が適用できな
いといった問題点があった。
When a two-wavelength semiconductor laser is used, the distance between the light emitting points of the laser chips in each wavelength band is 100 to 3
Since they are separated by about 00 μm, there is a problem that a single photodetector having a small light receiving area as in the related art cannot be applied as a photodetector for receiving signals of a CD optical disk and a DVD optical disk.

【0018】本発明の目的は、2波長用半導体レーザを
光源として2つの波長帯の光によりCD系光ディスクお
よびDVD系光ディスクなどのような異種の光記録媒体
への情報の記録・再生を行う際に、安定した信号検出が
できる2波長用回折素子および光ヘッド装置を提供する
ことである。
An object of the present invention is to record / reproduce information on / from different types of optical recording media such as a CD optical disk and a DVD optical disk by using light of two wavelength bands using a semiconductor laser for two wavelengths as a light source. Another object of the present invention is to provide a two-wavelength diffraction element and an optical head device capable of performing stable signal detection.

【0019】[0019]

【課題を解決するための手段】本発明は、波長λ1また
は波長λ2(λ1≠λ2)の少なくとも一方の波長の光が
入射する2波長用回折素子において、前記一方の波長λ
1の入射光を透過するとともに、前記他方の波長λ2の入
射光を回折させる回折格子と、前記2つの波長λ1また
は波長λ2のうち少なくとも一方の波長の透過光の偏光
状態を変化させる位相板とが一体化されたことを特徴と
する2波長用回折素子を提供する。
According to the present invention, there is provided a two-wavelength diffraction element to which light of at least one of the wavelengths λ 1 or λ 21 ≠ λ 2 ) is incident.
As well as transmitted through the incident light, a diffraction grating for diffracting the other wavelength lambda 2 of the incident light and changes the polarization state of the transmitted light of at least one wavelength of the two wavelengths lambda 1 or wavelength lambda 2 Provided is a two-wavelength diffraction element in which a phase plate is integrated.

【0020】また、前記回折格子は、断面形状が周期的
な凹凸状であり、凹部と凸部の透過光の位相差が波長λ
1または波長λ2のいずれか一方の透過光に対して2πで
ある2波長用回折素子を提供する。
Further, the diffraction grating has a periodic cross-sectional shape of a concavo-convex shape, and the phase difference between transmitted light between the concave portion and the convex portion is a wavelength λ.
Providing a diffraction element for two wavelengths is 2π for one or either of the transmitted light through the wavelength lambda 2.

【0021】また、前記回折格子は、第1の直線偏光方
向の入射光に対しては回折格子として作用せず透過し、
第1の直線偏光方向と直交する第2の直線偏光方向の入
射光に対しては回折格子として作用する複屈折性材料か
らなる偏光性の回折素子である2波長用回折素子を提供
する。
The diffraction grating transmits incident light in the first linear polarization direction without acting as a diffraction grating,
Provided is a two-wavelength diffraction element that is a polarizing diffraction element made of a birefringent material that acts as a diffraction grating for incident light in a second linear polarization direction orthogonal to the first linear polarization direction.

【0022】また、前記位相板は、λ1≦λ≦λ2の関係
にある波長λの直線偏光を円偏光に変換する機能を有す
る有機物薄膜である2波長用回折素子を提供する。
Further, the phase plate provides a two-wavelength diffraction element which is an organic thin film having a function of converting linearly polarized light having a wavelength λ having a relationship of λ 1 ≦ λ ≦ λ 2 into circularly polarized light.

【0023】また、前記位相板は、一方の直線偏光に対
しては2π・(m1−1/2)(m1は自然数)の位相差
を、他方の直線偏光に対しては2π・m2(m2は自然
数)の位相差を発生する有機物薄膜である2波長用回折
素子を提供する。
The phase plate has a phase difference of 2π · (m 1 −1/2) (m 1 is a natural number) for one linearly polarized light and 2π · m for the other linearly polarized light. Provided is a two-wavelength diffraction element that is an organic thin film that generates a phase difference of 2 (m 2 is a natural number).

【0024】また、波長λ1および波長λ2の光を出射す
る光源と、波長λ1および波長λ2の光を光記録媒体に集
光する対物レンズとを少なくとも備え、光記録媒体に情
報の記録・再生を行う光ヘッド装置であって、前記光源
と前記対物レンズとの間の光路中に、上記いずれかの2
波長用回折素子が設置されていることを特徴とする光ヘ
ッド装置を提供する。
Further, a light source for emitting light having a wavelength lambda 1 and wavelength lambda 2, comprising at least an objective lens that focuses the light of the wavelength lambda 1 and wavelength lambda 2 to the optical recording medium, the optical recording medium of the information An optical head device for performing recording / reproduction, wherein any one of the above two light sources is provided in an optical path between the light source and the objective lens.
An optical head device provided with a wavelength diffraction element is provided.

【0025】[0025]

【発明の実施の形態】以下、図面を参照して本発明の実
施の形態を詳細に説明する。
Embodiments of the present invention will be described below in detail with reference to the drawings.

【0026】[第1実施形態]図1は、本発明の第1実
施形態に係る2波長用回折素子の構成を示す模式図であ
る。2波長用回折素子1は、回折格子と位相板とが一体
化された構成となっている。この2波長用回折素子1
は、概略構成として、第1の透光性基板11Aと、位相
板11Cと、第2の透光性基板11Dとを互いに接着剤
11Eで接着した3層構造となっている。
[First Embodiment] FIG. 1 is a schematic view showing a configuration of a two-wavelength diffraction element according to a first embodiment of the present invention. The two-wavelength diffraction element 1 has a configuration in which a diffraction grating and a phase plate are integrated. This two-wavelength diffraction element 1
Has a three-layer structure in which a first light-transmitting substrate 11A, a phase plate 11C, and a second light-transmitting substrate 11D are bonded to each other with an adhesive 11E.

【0027】本実施形態における透光性基板11Aは、
均一屈折率の透光性材料で形成されており、位相板11
Cを接着してある一面とは逆の(空気と界面をなす)他
面側の表面に凹凸部分からなる均一屈折率の回折格子1
1Bを形成してある。この回折格子11Bである凹凸部
分の格子深さ(厚さ)d1および凸部の屈折率n1は、波
長λ1および波長λ2の入射光に対して、以下の関係式を
満すように形成されている。波長λ1の入射光が空気と
の屈折率差により形成される位相差が、 2π・(n1−1)・d1/λ1≒2πN ……(1) 同様に、波長λ2の入射光が空気との屈折率差により形
成される位相差が、 2π・(n1−1)・d1/λ2≠2πN ……(2) ここで、n1は回折格子11Bの凸部の屈折率、Nは自
然数である。
The translucent substrate 11A in the present embodiment is
The phase plate 11 is made of a transparent material having a uniform refractive index.
Diffraction grating 1 having a uniform refractive index on the surface on the other surface opposite to the surface on which C is bonded (interfacing with air) on the other surface side
1B is formed. The grating depth (thickness) d 1 of the concave-convex portion of the diffraction grating 11B and the refractive index n 1 of the convex portion satisfy the following relational expression with respect to the incident light of the wavelength λ 1 and the wavelength λ 2. Is formed. The phase difference formed by the refractive index difference between the incident light of wavelength λ 1 and air is 2π · (n 1 −1) · d 1 / λ 1 ≒ 2πN (1) Similarly, the incident light of wavelength λ 2 The phase difference formed by the refractive index difference between light and air is 2π · (n 1 −1) · d 1 / λ 2 ≠ 2πN (2) where n 1 is the convex portion of the diffraction grating 11B. The refractive index, N, is a natural number.

【0028】また、位相板11Cは、有機物薄膜からな
り、例えば、ポリカーボネート膜を延伸させることによ
り延伸方向に光軸のそろった複屈折性膜を形成させて位
相差機能を発生させている。この場合、波長λ1の直線
偏光の入射光が有機物薄膜を透過するとき、ほぼ円偏光
となる位相差が発生するように位相板11Cの進相軸
(複屈折軸)方向と入射光の直線偏光方向とが調整され
ている。
The phase plate 11C is made of an organic thin film. For example, a polycarbonate film is stretched to form a birefringent film whose optical axes are aligned in the stretching direction to generate a phase difference function. In this case, when the incident light of the linearly polarized light having the wavelength λ 1 passes through the organic thin film, the direction of the fast axis (birefringent axis) of the phase plate 11C and the straight line of the incident light are so set that a phase difference of substantially circular polarization is generated. The polarization direction is adjusted.

【0029】回折格子11Bは屈折率n1の第1の透光
性基板11Aの表面を凹凸形状に加工してもよいし、第
1の透光性基板11A上に屈折率n1の膜が厚さd1の凸
部を形成するように成膜・加工してもよい。
The diffraction grating 11B is may be processing the surface of the first light-transmitting substrate 11A having a refractive index n 1 to irregularities, the film having a refractive index n 1 on the first light-transmissive substrate 11A it may be deposited and processed to form a convex portion in the thickness d 1.

【0030】このような構成の2波長用回折素子1に、
波長λ1と波長λ2の異なる波長で同じ偏光方向あるいは
直交する偏光方向の直線偏光が入射すると、図1(A)
に示すように、一方の波長λ1の直線偏光入射光は回折
されることなく円偏光となって透過するが、図1(B)
に示すように、他方の波長λ2の直線偏光入射光はその
一部が回折される。この波長λ2の直線偏光入射光は、
一般に楕円偏光となって出射する。つまり、一方の波長
の光に対しては回折格子として作用するが、他方の波長
の光に対しては回折格子として作用しない2波長用回折
素子が実現できる。
In the two-wavelength diffraction element 1 having the above structure,
When linearly polarized lights having the same polarization direction or orthogonal polarization directions are incident at different wavelengths of the wavelength λ 1 and the wavelength λ 2 , FIG.
As shown in FIG. 1 , the linearly polarized incident light having one wavelength λ 1 is transmitted as circularly polarized light without being diffracted.
As shown in the above, a part of the other linearly polarized incident light having the wavelength λ 2 is diffracted. This linearly polarized incident light of wavelength λ 2 is
Generally, the light is emitted as elliptically polarized light. In other words, a two-wavelength diffractive element that functions as a diffraction grating for light of one wavelength but does not function as a diffraction grating for light of the other wavelength can be realized.

【0031】本実施形態では、位相板11Cと回折格子
11Bの形成された透光性基板11Aと透光性基板11
Dとを接着剤11Eを用いて接着した構造としたが、透
光性基板11Dを用いないで、透光性基板11Aと位相
板11Cのみを接着剤11Eで接着した構成でもよい。
これにより、部品点数削減および軽量化につながる。
In this embodiment, the transparent substrate 11A and the transparent substrate 11A having the phase plate 11C and the diffraction grating 11B are formed.
D is bonded using the adhesive 11E, but a configuration in which only the light-transmitting substrate 11A and the phase plate 11C are bonded with the adhesive 11E without using the light-transmitting substrate 11D may be used.
This leads to a reduction in the number of parts and a reduction in weight.

【0032】[第2実施形態]図2は、本発明の第2実
施形態に係る2波長用回折素子の構成を示す模式図であ
る。第2実施形態は前述した第1実施形態の変形例を示
す。
[Second Embodiment] FIG. 2 is a schematic diagram showing a configuration of a two-wavelength diffraction element according to a second embodiment of the present invention. The second embodiment is a modification of the first embodiment.

【0033】本実施形態の2波長用回折素子1では、第
1の透光性基板11Aのみに回折格子11Bを形成する
だけではなく、図2(A)に示すように、2波長用回折
素子1において、第2の透光性基板11Dにも、表面に
凹凸部分からなる均一屈折率の回折格子11Gを形成す
る。この場合、回折格子11Gである凹凸部分の格子深
さ(厚さ)d2および凸部の屈折率n2は、波長λ1およ
び波長λ2の入射光に対して、以下の関係式を満足する
ように形成されている。波長λ1の入射光が空気との屈
折率差により形成される位相差が、 2π・(n2−1)・d2/λ1≠2πN ……(3) 同様に、波長λ2の入射光が空気との屈折率差により形
成される位相差が、 2π・(n2−1)・d2/λ2≒2πN ……(4) ここで、n2は回折格子11Gの凸部の屈折率、Nは自
然数である。
In the two-wavelength diffraction element 1 of this embodiment, not only is the diffraction grating 11B formed only on the first light-transmitting substrate 11A, but also as shown in FIG. In 1, the diffraction grating 11G having a uniform refractive index is formed on the surface of the second light-transmitting substrate 11D. In this case, the grating depth (thickness) d 2 of the concave-convex portion serving as the diffraction grating 11G and the refractive index n 2 of the convex portion satisfy the following relational expression with respect to the incident light of the wavelength λ 1 and the wavelength λ 2. It is formed so that. The phase difference formed by the refractive index difference between the incident light of wavelength λ 1 and air is 2π · (n 2 −1) · d 2 / λ 1 ≠ 2πN (3) Similarly, the incident light of wavelength λ 2 The phase difference formed by the refractive index difference between light and air is 2π · (n 2 −1) · d 2 / λ 2 ≒ 2πN (4) where n 2 is the convex portion of the diffraction grating 11G. The refractive index, N, is a natural number.

【0034】これにより、異なる波長光に対しそれぞれ
回折機能を持った波長選択性回折格子を実現できる。す
なわち、図2(A)に示すように、波長λ1の入射光に
対しては、回折格子11Gが回折作用を及ぼし、0次光
および±1次回折光を生成できる。一方、図2(B)に
示すように、波長λ2の入射光に対しては、回折格子1
1Bが回折作用を及ぼし、0次光および±1次回折光を
生成できる。ここで図2中の11Cおよび11Eは、図
1の同符号の要素と同じものを意味する。
Thus, it is possible to realize a wavelength-selective diffraction grating having a diffraction function for light of different wavelengths. That is, as shown in FIG. 2 (A), to the wavelength lambda 1 of the incident light, the diffraction grating 11G exerts a diffraction effect can generate the 0-order light and ± 1-order diffracted light. On the other hand, as shown in FIG. 2 (B), to the wavelength lambda 2 of the incident light, the diffraction grating 1
1B exerts a diffractive action, and can generate zero-order light and ± first-order diffracted light. Here, 11C and 11E in FIG. 2 mean the same elements as those in FIG.

【0035】[第3実施形態]図3は、本発明の第3実
施形態に係る2波長用回折素子の構成を示す模式図であ
る。この第3実施形態に係る2波長用回折素子2は、第
1実施形態と同様に、回折格子と位相板とが一体化され
て構成され、第1の透光性基板21Aと、位相板21C
と、第2の透光性基板21Dとを互いに充填材21Fお
よび接着剤21Eで接着した3層構造となっている。
[Third Embodiment] FIG. 3 is a schematic diagram showing a configuration of a two-wavelength diffraction element according to a third embodiment of the present invention. As in the first embodiment, the two-wavelength diffraction element 2 according to the third embodiment is formed by integrating a diffraction grating and a phase plate, and includes a first light-transmitting substrate 21A and a phase plate 21C.
And a second light-transmitting substrate 21D are bonded to each other with a filler 21F and an adhesive 21E.

【0036】第1の透光性基板21Aは、ガラス基板な
どの透光性材料で形成され、界面が外部(空気)と接し
ていない一方の面には、常光屈折率noで異常光屈折率
eである複屈折性直線格子が周期的に形成された透過
型の回折格子21Bが設けられている。この回折格子2
1Bは、凹凸部分を形成した複屈折性材料からなり、そ
の凹部には複屈折性材料の常光屈折率noとほぼ等しい
屈折率nsの充填材21Fを充填させてある。これによ
り、常光偏光入射光に対しては回折せず、異常光偏光入
射光に対しては回折する偏光性回折格子を構成する。
The first light-transmitting substrate 21A is formed of a translucent material such as a glass substrate, on one surface of the interface is not in contact with the outside (air), an extraordinary refractive with the ordinary refractive index n o diffraction grating 21B of the transmissive birefringence linear grating is the rate n e are periodically formed is provided. This diffraction grating 2
1B is made of a birefringent material forming the uneven portion, is in the recess are allowed to fill the filling material 21F of substantially equal refractive index n s and ordinary refractive index n o of the birefringent material. Thus, a polarizing diffraction grating is formed that does not diffract incident light of ordinary polarization but diffracts incident light of extraordinary polarization.

【0037】この偏光性の回折格子21Bの凹凸部分の
格子深さをd1とすると、常光偏光入射光に対しては、
凹凸部分と充填材21Fとで屈折率差がないので、位相
差が生じないため、回折されることなく直進透過する。
一方、異常光偏光入射光に対しては、波長を例えばλ2
とすると、 2π・(ne−ns)・d1/λ2 ……(5) で与えられる位相差を発生し、回折格子として作用す
る。
Assuming that the grating depth of the concavo-convex portion of the polarizing diffraction grating 21 B is d 1 , for ordinary polarized incident light,
Since there is no difference in refractive index between the uneven portion and the filler 21F, there is no phase difference, and the light is transmitted straight without being diffracted.
On the other hand, for extraordinary polarized light, the wavelength is set to, for example, λ 2
When, to generate a phase difference given by 2π · (n e -n s) · d 1 / λ 2 ...... (5), it acts as a diffraction grating.

【0038】また、位相板21Cは、前述した第1実施
形態の2波長用回折素子1での位相板11Cと同様のも
のが設けられており、波長λ1の直線偏光の入射光がこ
の有機物薄膜を透過する際にほぼ円偏光となる位相差を
発生するように、位相板21Cの進相軸(複屈折軸)方
向と入力光の直線偏光方向とが調整されている。
Further, the phase plate 21C is the first embodiment is provided with the same as the phase plate 11C at the two-wavelength diffraction element 1 in the form, the wavelength lambda 1 of the linear polarization of the incident light organics previously described The direction of the fast axis (birefringence axis) of the phase plate 21C and the direction of the linear polarization of the input light are adjusted so as to generate a phase difference that becomes substantially circularly polarized light when transmitted through the thin film.

【0039】このような構成の2波長用回折素子2に、
波長の異なる波長λ1と波長λ2の偏波面が直交し、か
つ、偏光性の回折格子21Bに対して、一方の波長λ1
の光が常光偏光で、他方の波長λ2の光が異常光偏光と
なる直線偏光が回折格子21B側から入射すると、波長
λ1の常光偏光の入射光は回折されることなく円偏光と
なって透過するが、波長λ2の異常光偏光の入射光はそ
の一部が回折される。この波長λ2の入射光は、一般に
楕円偏光となって出射する。
The two-wavelength diffractive element 2 having such a configuration has:
The polarization planes of the wavelengths λ 1 and λ 2 having different wavelengths are orthogonal to each other, and one of the wavelengths λ 1
Become light in ordinary polarization, the linearly polarized light and the other wavelength lambda 2 of the light becomes extraordinarily polarized light is incident from the diffraction grating 21B side, the circularly polarized light without incident light ordinarily polarized light of wavelength lambda 1 is diffracted The incident light of the extraordinary polarized light of wavelength λ 2 is partially diffracted. The incident light having the wavelength λ 2 is generally emitted as elliptically polarized light.

【0040】なお、波長λ1と波長λ2の入射光偏波面が
平行の場合、位相板21Cとして、例えば波長λ1の直
線偏光に対しては2π・(m1−1/2)(m1は自然
数)の位相差を、波長λ2の直線偏光に対しては2π・
2(m2は自然数)の位相差を発生する機能を有する有
機物薄膜を用いるとともに、2波長用回折素子2におい
て光入射側に位相板21Cを配置し、光出射側に回折格
子21Bを配置する構成が好ましい。
[0040] Incidentally, when the incident light polarization of the wavelength lambda 1 and wavelength lambda 2 are parallel, as a phase plate 21C, for example, 2 [pi · (m 1 -1/2) is with respect to the wavelength lambda 1 of the linearly polarized light (m 1 2 [pi · is a phase difference between natural number), relative to the linearly polarized light of wavelength lambda 2
An organic thin film having a function of generating a phase difference of m 2 (m 2 is a natural number) is used, and a phase plate 21C is arranged on the light incident side and a diffraction grating 21B is arranged on the light emitting side in the two-wavelength diffraction element 2. The preferred configuration is as follows.

【0041】この場合、偏波面が平行な波長λ1と波長
λ2が位相板21Cを透過したとき、波長λ1は偏波面が
90゜回転するが、波長λ2は偏波面が回転しないた
め、直交偏光となって回折格子21Bへ入射する。その
結果、波長λ1と波長λ2の入射光に対して、一方の入射
光は回折するが、他方の入射光は回折しないで透過する
2波長用回折素子が得られる。
In this case, when the wavelengths λ 1 and λ 2 whose polarization planes are parallel pass through the phase plate 21C, the polarization plane of the wavelength λ 1 is rotated by 90 °, but the polarization plane of the wavelength λ 2 is not rotated. , And enters the diffraction grating 21B as orthogonally polarized light. As a result, a two-wavelength diffractive element that diffracts one incident light but transmits the other incident light without diffracting the incident light having the wavelengths λ 1 and λ 2 is obtained.

【0042】[第4実施形態]図4は、本発明の第4実
施形態に係る2波長用回折素子の構成を示す模式図であ
る。第4実施形態は前述した第3実施形態の変形例を示
す。
[Fourth Embodiment] FIG. 4 is a schematic diagram showing a configuration of a two-wavelength diffraction element according to a fourth embodiment of the present invention. The fourth embodiment is a modification of the above-described third embodiment.

【0043】本実施形態の2波長用回折素子2では、第
1の透光性基板21Aのみに複屈折性材料で形成された
偏光性の回折格子21B(格子深さd1)を設けるだけ
でなく、図4(A)に示すように、位相板21Cにも、
複屈折性材料で形成された偏光性の回折格子21Gを設
けて構成する。この回折格子21Gは、回折格子21B
と同一の常光屈折率noと異常光屈折率neを有する複屈
折性材料を用いるが、この複屈折性材料での常光屈折率
方向が、回折格子21Bを形成する複屈折性材料での常
光屈折率方向と直交するように形成されている。ここで
21Dは、透光性基板である。
In the two-wavelength diffractive element 2 of this embodiment, only the first light-transmitting substrate 21A is provided with a polarizing diffraction grating 21B (grating depth d 1 ) formed of a birefringent material. In addition, as shown in FIG.
A polarizing diffraction grating 21G made of a birefringent material is provided. This diffraction grating 21G includes a diffraction grating 21B.
Using a birefringent material having the same ordinary refractive index n o and extraordinary refractive index n e and but ordinary refractive index direction in the birefringent material is a birefringent material forming the diffraction grating 21B It is formed so as to be orthogonal to the ordinary light refractive index direction. Here, 21D is a translucent substrate.

【0044】したがって、偏光性の回折格子21Gの格
子深さをd2とすると、波長λ2の入射偏光に対しては、
凹凸部分と充填材21Fとで屈折率差がないので、位相
差が生じないため、回折されることなく直進透過する。
一方、波長λ1の入射偏光に対しては、 2π・(ne−ns)・d2/λ1 ……(6) で与えられる位相差を発生し、回折格子として作用す
る。
Accordingly, assuming that the grating depth of the polarizing diffraction grating 21G is d 2 , for incident polarized light of wavelength λ 2 ,
Since there is no difference in refractive index between the uneven portion and the filler 21F, there is no phase difference, and the light is transmitted straight without being diffracted.
On the other hand, with respect to the incident polarized light of wavelength lambda 1, to generate a phase difference given by 2π · (n e -n s) · d 2 / λ 1 ...... (6), it acts as a diffraction grating.

【0045】これにより、異なる波長の光に対しそれぞ
れ回折機能を持った波長選択性回折格子を実現できる。
すなわち、図4(A)に示すように、波長λ1の入射光
に対しては、回折格子21Gのみが回折作用を及ぼし、
一方、図4(B)に示すように、波長λ2の入射光に対
しては、回折格子21Bのみが回折作用を及ぼし、それ
ぞれ0次光および±1次回折光を生成できる。
Thus, it is possible to realize a wavelength-selective diffraction grating having a diffraction function for light of different wavelengths.
That is, as shown in FIG. 4A, only the diffraction grating 21G exerts a diffractive action on the incident light having the wavelength λ 1 .
On the other hand, as shown in FIG. 4B, only the diffraction grating 21B exerts a diffractive action on the incident light having the wavelength λ 2 , and can generate the 0th-order light and ± 1st-order diffracted light, respectively.

【0046】なお、図4では、位相板21Cと偏光性の
回折格子21Gとが接した構成となっているが、別途ガ
ラス基板を設けてその片面に偏光性の回折格子21Gを
形成して、偏光性の回折格子21Bが形成されたガラス
基板21Aと一体化した後、位相板21Cを光入射側に
接着してもよい。
Although FIG. 4 shows a configuration in which the phase plate 21C and the polarizing diffraction grating 21G are in contact with each other, a separate glass substrate is provided, and the polarizing diffraction grating 21G is formed on one surface thereof. After being integrated with the glass substrate 21A on which the polarizing diffraction grating 21B is formed, the phase plate 21C may be bonded to the light incident side.

【0047】また、第3実施形態と同様に、波長λ1
波長λ2の入射光偏波面が平行の場合、位相板21Cと
して、例えば波長λ1の直線偏光に対しては2π・(m1
−1/2)(m1は自然数)の位相差を、波長λ2の直線
偏光に対しては2π・m2(m2は自然数)の位相差を発
生する機能を有する有機物薄膜を用いるとともに、2波
長用回折素子2において光入射側に位相板21Cを配置
し、光出射側に回折格子21Bを配置する構成とすれば
よい。この場合、偏波面が平行な波長λ1と波長λ2の入
射光が位相板21Cを透過したとき、波長λ1は偏波面
が90゜回転するが、波長λ2は偏波面が回転しないた
め、直交偏光となって回折格子21Bと21Gへ入射す
る。その結果、波長λ1は回折格子21Gで、波長λ2
回折格子21Bでそれぞれ独立に回折される2波長用回
折素子が得られる。ここで、2波長用回折素子の光出射
側にさらに波長λ1または波長λ2の入射光が透過したと
き、ほぼ円偏光となる位相差が発生する位相板(図示せ
ず)を配置してもよい。
[0047] As in the third embodiment, a wavelength lambda 1 in the case of parallel incident light polarization of the wavelength lambda 2, as a phase plate 21C, for example to the wavelength lambda 1 of the linearly polarized light 2 [pi · (m 1
An organic thin film having a function of generating a phase difference of -1/2) (m 1 is a natural number) and a phase difference of 2π · m 2 (m 2 is a natural number) for linearly polarized light of wavelength λ 2 is used. In the two-wavelength diffraction element 2, the phase plate 21C may be arranged on the light incident side, and the diffraction grating 21B may be arranged on the light emission side. In this case, when the incident light of the wavelengths λ 1 and λ 2 having parallel polarization planes is transmitted through the phase plate 21C, the polarization plane of the wavelength λ 1 is rotated by 90 °, but the polarization plane of the wavelength λ 2 is not rotated. , And enters the diffraction gratings 21B and 21G as orthogonally polarized light. As a result, a two-wavelength diffraction element is obtained, in which the wavelength λ 1 is diffracted by the diffraction grating 21G and the wavelength λ 2 is diffracted independently by the diffraction grating 21B. Here, a phase plate (not shown) is provided on the light emission side of the two-wavelength diffraction element, which further generates a phase difference of substantially circular polarization when incident light of wavelength λ 1 or λ 2 is transmitted. Is also good.

【0048】[第5実施形態]図5は、本発明の第5実
施形態に係る2波長用回折素子の構成を示す模式図であ
る。第5実施形態の2波長用回折素子2Aは、前述した
第1から第4実施形態の2波長用回折素子1または2
に、波長λ1と波長λ2の入射光のうちで一方の波長のみ
を偏向する偏向機能層が付加された形態である。
[Fifth Embodiment] FIG. 5 is a schematic diagram showing a configuration of a two-wavelength diffraction element according to a fifth embodiment of the present invention. The two-wavelength diffraction element 2A of the fifth embodiment is the same as the two-wavelength diffraction element 1 or 2 of the first to fourth embodiments.
In this embodiment, a deflecting function layer for deflecting only one of the wavelengths λ 1 and λ 2 is added.

【0049】2波長用半導体レーザを光源として用いた
場合、各波長帯のレーザチップの発光点間隔が100〜
300μm程度離れているため、2波長用回折素子への
入射光の光軸を例えば波長λ1の発光点に合わせると、
波長λ2の入射光は光軸外の斜入射光となる。図5で
は、斜入射光となる波長λ2の入射光が偏向機能層を形
成する回折格子21Hにより波長λ1の入射光と同じ光
軸上に偏向され、波長λ1と波長λ2ともに同じ光軸の光
として2波長用回折素子から出射する。
When a two-wavelength semiconductor laser is used as a light source, the distance between the light emitting points of the laser chips in each wavelength band is 100 to 100.
Because apart about 300 [mu] m, when align the optical axis of the incident light to the two-wavelength diffraction element, for example, in the light emitting point of the wavelength lambda 1,
The incident light having the wavelength λ 2 is obliquely incident light off the optical axis. In Figure 5, it is deflected on the same optical axis the wavelength lambda 1 of the incident light by the diffraction grating 21H to the incident light of wavelength lambda 2 to be obliquely incident light to form a deflecting function layer, the wavelength lambda 1 and wavelength lambda 2 are both the same The light is emitted from the two-wavelength diffraction element as light on the optical axis.

【0050】偏向機能層を形成する回折格子21Hの具
体的構成として、偏向機能に偏光依存性のないタイプA
と偏光依存性のあるタイプBとがある。
As a specific configuration of the diffraction grating 21H forming the deflecting function layer, a type A having no polarization dependence in the deflecting function is used.
And type B having polarization dependence.

【0051】タイプAは、均一屈折率n1の透光性基板
の表面を階段状に形状加工した回折格子で、波長λ1
よび波長λ2の入射光に対して、回折格子の階段1段当
たりの深さd1が前述の関係式(1)および(2)を満
たすように形成されている。階段の段数は4から8段で
ある。このような回折格子に波長λ1の光が入射すると
回折されることなく透過し、波長λ2の入射に対して5
0%以上が1次回折光として格子ピッチで規定される回
折角度方位に回折される。
[0051] Type A, the translucent surface of the substrate of uniform refractive index n 1 at stepwise shape processed diffraction grating for wavelength lambda 1 and wavelength lambda 2 of the incident light, staircase one step of the diffraction grating The contact depth d 1 is formed so as to satisfy the above-mentioned relational expressions (1) and (2). The number of steps is four to eight. Such diffraction grating of the wavelength lambda 1 light is transmitted without being diffracted and is incident, 5 with respect to the incident wavelength lambda 2
0% or more is diffracted as a first-order diffracted light in a diffraction angle direction defined by a grating pitch.

【0052】このようなタイプAの回折格子は、図1の
2波長用回折素子1において第2の透光性基板11Dの
表面、あるいは、図3または図4の2波長用回折素子2
において、第1の透光性基板21Aまたは第2の透光性
基板21Dの表面に形成される。
Such a type A diffraction grating is formed by the surface of the second light-transmitting substrate 11D in the two-wavelength diffraction element 1 of FIG. 1 or the two-wavelength diffraction element 2 of FIG. 3 or FIG.
Is formed on the surface of the first light-transmitting substrate 21A or the second light-transmitting substrate 21D.

【0053】タイプBは、常光屈折率noで異常光屈折
率neの複屈折性材料を鋸波状または階段状で周期的な
回折格子として透光性基板上に形成し、複屈折性材料の
常光屈折率noとほぼ等しい屈折率nsの充填剤で回折格
子の凹凸部を充填して別の透光性基板により狭持した構
造となっている。
[0053] Type B, the birefringent material of the extraordinary refractive index n e is formed on a transparent substrate as a periodic grating with sawtooth or stepped at the ordinary refractive index n o, birefringent material has a sandwich structure by a separate light-transmitting substrate substantially equal to the refractive index n s and ordinary refractive index n o of the filler filling the concavo-convex portion of the diffraction grating.

【0054】ここで、常光偏光入射光に対しては、複屈
折性材料と充填材とで屈折率差がないので、位相差が生
じないため、回折されることなく直進透過する。一方、
異常光偏光入射光に対しては、波長を例えばλ2とし、
階段状回折格子の格子深さをd、階段の段数をN(N≧
3)とすると、 2π・(ne−ns)・d={(N−1)/N}・λ2 ……(7) で規定される格子深さdとして構成することで、1次回
折光の効率が60%以上となる位相差が発生する回折格
子、すなわち偏向機能層が得られる。鋸波状のブレーズ
格子の場合はNが無限大の場合に相当する。
Here, with respect to the ordinary polarized incident light, since there is no difference in refractive index between the birefringent material and the filler, there is no phase difference, and the incident light is transmitted straight without being diffracted. on the other hand,
For extraordinarily polarized incident light, and the wavelength for example, lambda 2,
The grating depth of the stepped diffraction grating is d, and the number of steps is N (N ≧
3) If, by configuring as 2π · (n e -n s) · d = {(N-1) / N} · λ grating depth d which is defined by 2 ... (7), first order A diffraction grating having a phase difference at which the efficiency of folding light becomes 60% or more, that is, a deflection function layer is obtained. The case of a sawtooth blaze grating corresponds to the case where N is infinite.

【0055】このようなタイプBの複屈折性材料からな
る回折格子は、図1または図2の2波長用回折素子1に
おいて第2の透光性基板11Dの位相板11C面側に形
成する。あるいは、図3または図4の2波長用回折素子
2において、第1の透光性基板21Aの表面に形成した
後、充填剤を用いて別の透光性基板と接合する。
The diffraction grating made of the type B birefringent material is formed on the phase plate 11C side of the second light-transmitting substrate 11D in the two-wavelength diffraction element 1 shown in FIG. 1 or FIG. Alternatively, in the two-wavelength diffraction element 2 of FIG. 3 or FIG. 4, after being formed on the surface of the first light-transmitting substrate 21A, it is bonded to another light-transmitting substrate using a filler.

【0056】また、タイプAおよびタイブBいずれも、
偏向機能層である階段状またはブレーズ状に形状加工し
た回折格子は、格子ピッチが空間的に分布したまたは透
光性基板面上の格子パターンが直線でなく空間的に曲線
となったいわゆるホログラムパターンとすることにより
光学系の収差を補正してもよいし、集光性や発散性など
のレンズ機能を付加した構成としてもよい。
In addition, both type A and type B
The diffraction grating, which is shaped like a staircase or blaze, is a so-called hologram pattern in which the grating pitch is spatially distributed or the grating pattern on the translucent substrate surface is not a straight line but a spatial curve. By doing so, the aberration of the optical system may be corrected, or a configuration may be adopted in which a lens function such as light collecting property or diverging property is added.

【0057】また、第3実施形態と同様に、図3または
図4において波長λ1と波長λ2の入射光偏波面が平行の
場合、位相板21Cとして、例えば波長λ1の直線偏光
に対しては2π・(m1−1/2)(m1は自然数)の位
相差を、波長λ2の直線偏光に対しては2π・m2(m2
は自然数)の位相差を発生する機能を有する有機物薄膜
を用いるとともに、2波長用回折素子において光入射側
に位相板21Cを配置し、波長λ1と波長λ2の入射光偏
波面を直交化する。その後に、タイプBの複屈折性材料
からなる回折格子および偏向機能層を積層した構成とす
ればよい。なお、図5では、タイプBの回折格子21H
が用いられた場合の構成例が示されている。
[0057] As in the third embodiment, FIG. 3 or the incident light polarization of the wavelength lambda 1 and wavelength lambda 2 in Fig. 4 are parallel, as a phase plate 21C, with respect to a wavelength lambda 1 of the linearly polarized light 2 [pi · is Te (m 1 -1/2) (m 1 is a natural number) the phase difference of, for the wavelength lambda 2 of the linearly polarized light 2π · m 2 (m 2
With the use of organic thin film having a function of generating a phase difference of a natural number), the phase plate 21C arranged on the light incident side in the diffractive element for two wavelengths, orthogonalization incident light polarization of the wavelength lambda 1 and wavelength lambda 2 I do. Thereafter, a configuration in which a diffraction grating made of a type B birefringent material and a deflecting function layer are stacked may be used. In FIG. 5, the type B diffraction grating 21H
2 shows a configuration example in the case where is used.

【0058】[第6実施形態]次に、第6実施形態とし
て、上述した第1〜第5実施形態の2波長用回折素子を
搭載した光ヘッド装置について説明する。図6は第6実
施形態に係る光ヘッド装置を示す概略構成図である。
[Sixth Embodiment] Next, as a sixth embodiment, an optical head device equipped with the two-wavelength diffraction element of the first to fifth embodiments will be described. FIG. 6 is a schematic configuration diagram showing an optical head device according to the sixth embodiment.

【0059】光ヘッド装置は、DVD系光ディスク用の
波長λ1のレーザ光を発生する半導体レーザとCD系光
ディスク用の波長λ2のレーザ光を発生する半導体レー
ザとの2つの半導体レーザが一体化されて構成された2
波長用半導体レーザ3と、2波長用回折素子1または2
と、ビームスプリッタ4と、コリメータレンズ5と、対
物レンズ6と、光検出器8とを備えて構成され、光ディ
スク7に対してレーザ光のビームを照射して情報の記録
・再生を行うものである。ここで、例えば、DVD系光
ディスク用の波長λ1をλ1=650nm、CD系光ディ
スク用の波長λ 2をλ2=790nmの各波長帯とする。
An optical head device is used for a DVD-type optical disc.
Wavelength λ1Laser and CD-based light that generate laser light
Wavelength λ for diskTwoSemiconductor laser that generates laser light
And two semiconductor lasers integrated with each other.
Wavelength semiconductor laser 3 and two-wavelength diffraction element 1 or 2
, A beam splitter 4, a collimator lens 5, and a pair
It is configured to include an object lens 6 and a photodetector 8, and
Recording of information by irradiating the disk 7 with a laser beam
-It is for regenerating. Here, for example, DVD-based light
Wavelength λ for disk1To λ1= 650 nm, CD optical disc
Wavelength λ for disk TwoTo λTwo= 790 nm.

【0060】このように構成された光ヘッド装置におい
て、2波長用半導体レーザ3から出射した波長λ1の光
は、2波長用回折素子1または2で回折されることなく
光軸α上を直進透過し、さらにビームスプリッタ4を透
過し、コリメータレンズ5により平行光にされる。その
後、この平行光は、対物レンズ6により光ディスク7
(DVD系)の情報記録面の情報記録トラック上に集光
される。そして、情報記録面で反射された光は、再び対
物レンズ6およびコリメータレンズ5を透過し、ビーム
スプリッタ4により反射されて往路の光軸αとは90度
偏向した光軸βに沿って進行し、光検出器8の受光面に
集光される。
In the optical head device thus configured, the light of wavelength λ 1 emitted from the two-wavelength semiconductor laser 3 travels straight on the optical axis α without being diffracted by the two-wavelength diffraction element 1 or 2. The light passes through the beam splitter 4 and is made into parallel light by the collimator lens 5. Thereafter, the parallel light is transmitted to the optical disk 7 by the objective lens 6.
The light is focused on the information recording track on the (DVD) information recording surface. Then, the light reflected by the information recording surface again passes through the objective lens 6 and the collimator lens 5, is reflected by the beam splitter 4, and travels along the optical axis β deflected by 90 degrees with respect to the optical axis α on the outward path. Are collected on the light receiving surface of the photodetector 8.

【0061】一方、2波長用半導体レーザ3から出射し
た波長λ2の光は、2波長用回折素子1または2で入射
光の一部(例えば、10%から40%)が±1次回折光
として回折し、さらにビームスプリッタ4を透過し、コ
リメータレンズ5により平行光にされる。その後、この
平行光は、対物レンズ6により光ディスク7(CD系)
の情報記録面の情報記録トラック上に、0次光および±
1次回折光が3ビームとなって集光される。そして、情
報記録面で反射された光は、再び対物レンズ6およびコ
リメータレンズ5を透過し、ビームスプリッタ4により
反射されて光検出器8の受光面に集光される。
On the other hand, with respect to the light of wavelength λ 2 emitted from the two-wavelength semiconductor laser 3, a part (for example, 10% to 40%) of the incident light is converted into ± first-order diffracted light by the two-wavelength diffraction element 1 or 2. The light is diffracted, further passes through the beam splitter 4, and is made parallel by the collimator lens 5. Thereafter, the parallel light is transmitted to the optical disk 7 (CD system) by the objective lens 6.
0th-order light and ±
The first-order diffracted light is collected as three beams. Then, the light reflected on the information recording surface again passes through the objective lens 6 and the collimator lens 5, is reflected by the beam splitter 4, and is collected on the light receiving surface of the photodetector 8.

【0062】このように、本実施形態の2波長用回折素
子1または2を搭載した光ヘッド装置の場合、波長λ1
の光は、2波長用回折素子1または2により回折される
ことなく直進透過するため、効率低下をもたらさず、ま
た、迷光も生じない。したがって、DVD系の光ディス
クにおける光検出法として一般的な4分割の受光面で構
成される光検出器を用いて、ヘテロダイン検波法や位相
差法によるトラッキング誤差信号検出、非点収差法によ
る光ディスク情報記録面へのフォーカス信号検出、およ
び記録情報であるピット信号検出が安定して行える。
As described above, in the case of the optical head device equipped with the two-wavelength diffraction element 1 or 2 of the present embodiment, the wavelength λ 1
Is transmitted straight without being diffracted by the two-wavelength diffractive element 1 or 2, so that there is no reduction in efficiency and no stray light is generated. Therefore, as an optical detection method for a DVD-based optical disk, a tracking error signal is detected by a heterodyne detection method or a phase difference method, and an optical disk information is detected by an astigmatism method using a general photodetector composed of four divided light receiving surfaces. Detection of a focus signal on a recording surface and detection of a pit signal as recording information can be stably performed.

【0063】一方、CD系の光ディスクでは、DVD系
と同一の4分割受光面の光検出器を用いて、非点収差法
による光ディスク情報記録面へのフォーカス信号検出お
よびピット信号検出が行われ、さらに光検出器における
他の2つの受光面で±1次回折光を受光することによ
り、3ビーム法によるトラッキング誤差信号の検出が行
われる。
On the other hand, in the case of a CD optical disk, detection of a focus signal and detection of a pit signal on an optical disk information recording surface by an astigmatism method are performed using the same photodetector having a four-division light receiving surface as in the DVD system. Further, by detecting the ± 1st-order diffracted light on the other two light receiving surfaces of the photodetector, the tracking error signal is detected by the three-beam method.

【0064】さらに、2波長用回折素子1または2を透
過した波長λ1の直線偏光は、位相差発生機能を有する
有機物薄膜からなる図1または図3などの位相板11C
または21Cにより、円偏光となる。したがって、情報
記録面で反射され無偏光のビームスプリッタ4を透過す
る戻り光は、再び2波長用回折素子1または2を透過す
ることで、レーザ発振光の直線偏光方向と直交する直線
偏光方向となって半導体レーザの発光点に入射する。こ
のため、光ディスクからの戻り光がレーザ発振光と干渉
することがなく、発振出力変動が発生しないので、安定
した光ディスクの情報の記録・再生ができる。また、波
長λ2の光に対しても、同様に、2波長用半導体レーザ
3への戻り光の偏光状態はレーザ発振光の偏光状態と異
なるので、半導体レーザの発振出力変動が抑制されて安
定した光ディスクの情報の記録・再生ができる。
Further, the linearly polarized light having the wavelength λ 1 transmitted through the two-wavelength diffraction element 1 or 2 is converted into a phase plate 11C as shown in FIG. 1 or 3 made of an organic thin film having a phase difference generating function.
Or, it becomes circularly polarized light by 21C. Therefore, the return light reflected by the information recording surface and transmitted through the unpolarized beam splitter 4 passes through the two-wavelength diffractive element 1 or 2 again, so that the return light has a linear polarization direction orthogonal to the linear polarization direction of the laser oscillation light. And enter the light emitting point of the semiconductor laser. Therefore, the return light from the optical disk does not interfere with the laser oscillation light, and the oscillation output does not fluctuate, so that information can be stably recorded and reproduced on the optical disk. Similarly, for the light of wavelength λ 2 , the polarization state of the return light to the two-wavelength semiconductor laser 3 is different from the polarization state of the laser oscillation light. Recording / reproduction of information on an optical disc that has been performed.

【0065】ここで、2波長用回折素子として、第1お
よび第2実施形態の2波長用回折素子1を用いる場合に
は、入射光の直線偏光の方向に依存しない回折格子が形
成されるため、2波長用回折素子の配置の制約がなく、
位相板11Cが回折格子11Bに対して半導体レーザ側
にあっても、その逆でもよいという構成の自由度があ
る。一方、第3および第4実施形態の2波長用回折素子
2を用いる場合には、波長λ1の入射光偏光方向と波長
λ2の入射光偏光方向とを直交させれば、一方の波長の
みに作用する偏光性の回折格子となるため、これを形成
している複屈折性材料の格子深さを変えることにより、
0次透過光および±1次回折光の効率比を目的に応じて
調整できる自由度がある。特に、0次光の透過率を70
%以上に設定することが好ましい記録用の光ヘッド装置
に有効である。
Here, when the two-wavelength diffraction element 1 of the first and second embodiments is used as the two-wavelength diffraction element, a diffraction grating independent of the direction of the linearly polarized light of the incident light is formed. There is no restriction on the arrangement of diffraction elements for two wavelengths.
There is a degree of freedom in the configuration that the phase plate 11C may be on the semiconductor laser side with respect to the diffraction grating 11B or vice versa. On the other hand, when the two-wavelength diffraction element 2 of the third and fourth embodiments is used, if the polarization direction of the incident light of the wavelength λ 1 is orthogonal to the polarization direction of the incident light of the wavelength λ 2 , only one wavelength is used. Since it becomes a polarizing diffraction grating that acts on, by changing the grating depth of the birefringent material forming it,
There is a degree of freedom to adjust the efficiency ratio between the zero-order transmitted light and the ± first-order diffracted light according to the purpose. In particular, the transmittance of the zero-order light is set to 70
% Is effective for an optical head device for recording, which is preferably set to not less than%.

【0066】なお、2波長用回折素子1および2の格子
ピッチは、それが搭載される光ヘッド装置の光学系およ
び光記録媒体のトラッキング法に応じて適宜定められ
る。また、位相板として、位相差発生機能を有する有機
物薄膜、例えば面内に光軸がそろったポリカーボネート
などの複屈折性材料を用いることにより、従来の水晶位
相板に比べて入射光の入射角度の相違による位相差変動
が少ないため、発散光が2波長用回折素子に入射するよ
うな半導体レーザの近傍に配置する構成であっても、一
定で均一な位相差を発生できる。特に、面内に光軸がそ
ろった有機物薄膜の2種の位相板を2種の光軸方向が面
内で角度をなすように張り合わせることにより、広い波
長帯の直線偏光の入射光に対しても、ほぼ円偏光となる
位相差を発生できるため、波長λ1および波長λ2の入射
光に対して、レーザ発振出力の変動をより効果的に低減
し、安定した光ディスクの情報の記録・再生ができる。
The grating pitch of the two-wavelength diffraction elements 1 and 2 is appropriately determined according to the optical system of the optical head device on which the diffraction elements are mounted and the tracking method of the optical recording medium. In addition, by using a birefringent material such as polycarbonate having an optical axis aligned in a plane as an organic thin film having a phase difference generating function as a phase plate, the incident angle of incident light can be reduced as compared with a conventional quartz phase plate. Since the phase difference fluctuation due to the difference is small, a constant and uniform phase difference can be generated even in a configuration in which the divergent light is arranged near the semiconductor laser such that it enters the two-wavelength diffraction element. In particular, by bonding two types of phase plates made of organic thin film with aligned optical axes in the plane so that the directions of the two optical axes are at an angle in the plane, the incident light of linearly polarized light in a wide wavelength band can be obtained. even, it is possible to generate a phase difference becomes substantially circularly polarized light, to the wavelength lambda 1 and wavelength lambda 2 of the incident light, to reduce the fluctuation of laser oscillation output more effectively, recorded and stable information of the optical disc Can be played.

【0067】また、図1および図3では、位相板とし
て、ポリカーボネート複屈折性膜をガラス基板に接着剤
を用いて固定した構成のものを示したが、位相差発生機
能を有する有機物薄膜をガラス基板に直接成膜してもよ
い。例えば、具体的には、ガラス基板上に配向膜用の膜
を塗布し、所望の配向処理を施した後配向膜とし、複屈
折性材料である液晶とモノマーの混合液を塗布すること
により、配向膜の配向方向に液晶分子の光軸方向をそろ
える。さらに、液晶とモノマーの混合液にあらかじめ光
重合硬化剤を含有させておき、光重合用の光源光を照射
することでモノマーを高分子化し、高分子液晶層とする
ことによって、接着剤を用いないで位相板を形成でき
る。
In FIGS. 1 and 3, the phase plate has a structure in which a polycarbonate birefringent film is fixed to a glass substrate using an adhesive, but an organic thin film having a phase difference generating function is made of glass. The film may be formed directly on the substrate. For example, specifically, by applying a film for an alignment film on a glass substrate, and performing a desired alignment treatment to form an alignment film, and applying a mixed liquid of a liquid crystal and a monomer that is a birefringent material, The optical axis direction of the liquid crystal molecules is aligned with the alignment direction of the alignment film. Further, a photopolymerization curing agent is previously contained in the liquid mixture of the liquid crystal and the monomer, and the monomer is polymerized by irradiating a light source for photopolymerization to form a polymer liquid crystal layer. Without forming a phase plate.

【0068】なお、上述した実施形態では、2波長用回
折素子をCD系の光ディスクで用いる波長λ2の光に対
する3ビーム法のビーム発生に適用した構成について説
明したが、情報記録用に用いられる差動プッシュプル法
やDVD系の光ディスクで用いる波長λ1の光に対し
て、回折格子として作用する構成としても有効である。
In the above-described embodiment, the configuration in which the two-wavelength diffraction element is applied to the generation of the beam of the three-beam method for the light of the wavelength λ 2 used in the CD-type optical disk has been described. with respect to the wavelength lambda 1 of the light used in the differential push-pull method or a DVD family optical disc, it is also effective as a structure which acts as a diffraction grating.

【0069】さらに、第2実施形態の2波長用回折素子
1の光入射面である透光性基板11Aの表面と光出射面
である透光性基板11Dの表面との両面に、それぞれ波
長λ 1の光および波長λ2の光のみに回折格子として機能
する凹凸形状を形成して、CD系およびDVD系の光デ
ィスクに対応させて仕様の異なる3ビームを生成するよ
うにしてもよい。
Further, the two-wavelength diffraction element of the second embodiment
1. The surface of the light-transmitting substrate 11A as the light incident surface and the light emitting surface
Waves on both sides of the surface of the transparent substrate 11D.
Long λ 1Light and wavelength λTwoFunction as diffraction grating for only light
The optical data of CD and DVD
We will generate three beams with different specifications according to the disk
You may do it.

【0070】同様に、第4実施形態の2波長用回折素子
2においても、透光性基板21Aの表面に形成された複
屈折性材料の回折格子21Bと対向する位相板21Cの
面にも複屈折性材料の回折格子を形成し、それぞれ波長
λ1の偏光および波長λ2の偏光のみに回折格子として機
能する偏光性回折格子を設けて、CD系およびDVD系
の光ディスクに対応させて仕様の異なる3ビームを生成
するようにしてもよい。
Similarly, in the two-wavelength diffractive element 2 of the fourth embodiment, the two-wavelength diffractive element 2 is also provided on the surface of the phase plate 21C opposed to the birefringent material diffraction grating 21B formed on the surface of the translucent substrate 21A. diffraction grating of the refractive material is formed, each provided with a polarizing diffraction grating which functions as a polarization and polarization only the diffraction grating of the wavelength lambda 2 wavelength lambda 1, in association with the CD system and DVD family optical disc specifications Different three beams may be generated.

【0071】また、図6に示した光ヘッド装置の例で
は、ビームスプリッタ4が用いられ、2波長用半導体レ
ーザ3のユニットと光検出器8とが分離された構成とし
たが、ビームスプリッタ4の代わりにホログラムビーム
スプリッタを用いて、情報記録面で反射された光を回折
させることにより分離し、2波長用半導体レーザユニッ
ト内の半導体レーザ近傍に配置された光検出器に集光す
るように構成してもよい。この場合、半導体レーザと光
検出器とが同一のユニット内に配置されるため、光ヘッ
ド装置を小型化できる。
In the example of the optical head device shown in FIG. 6, the beam splitter 4 is used, and the unit of the two-wavelength semiconductor laser 3 and the photodetector 8 are separated. Instead of using a hologram beam splitter, the light reflected on the information recording surface is diffracted and separated, and focused on a photodetector located near the semiconductor laser in the two-wavelength semiconductor laser unit. You may comprise. In this case, since the semiconductor laser and the photodetector are arranged in the same unit, the size of the optical head device can be reduced.

【0072】また、第5実施形態の2波長用回折素子で
は、偏向機能層が付加されているため、各波長帯の発光
点間隔が離れている2波長用半導体レーザと組み合わせ
て用いた場合であっても、出射光は同一発光点位置から
出射する光源として取り扱うことができる。したがっ
て、光ヘッド装置に搭載する場合、光源位置の調整が簡
便となり取り付け精度も向上する。2波長用回折素子を
2波長用半導体レーザが内側に配置されたパッケージの
光出射窓位置に固定した光源装置とすることにより、従
来の単一波長の光源と同様に扱うことができるため、光
ヘッド装置の組立調整が著しく簡略化される。
In the two-wavelength diffraction element of the fifth embodiment, since a deflection function layer is added, the two-wavelength diffraction element can be used in combination with a two-wavelength semiconductor laser in which the light emitting points in each wavelength band are separated. Even if there is, the emitted light can be handled as a light source emitted from the same light emitting point position. Therefore, when mounted on an optical head device, adjustment of the light source position is simplified and mounting accuracy is improved. Since the two-wavelength diffraction element is a light source device in which the two-wavelength semiconductor laser is fixed at the light emission window position of the package in which the two-wavelength semiconductor laser is disposed, it can be handled in the same manner as a conventional single-wavelength light source. The assembly adjustment of the head device is greatly simplified.

【0073】[0073]

【実施例】以下の実施例において、前述した実施形態の
構成の具体例を示す。
EXAMPLES In the following examples, specific examples of the configuration of the above-described embodiment will be described.

【0074】「例1」例1は図1に示した第1実施形態
の具体例である。第1の透光性基板11Aを屈折率n1
がn1=1.5の均一屈折率材料で構成し、凹凸形状に
加工して空気と界面をなす回折格子11Bを形成する。
そして、この凹凸部分の格子深さd1を、(n1−1)・
1がλ1となるよう、すなわちd1=1.3μmとす
る。このような構成とすると、DVD系の光ディスクに
使用する波長λ1=650nmの入射光では、生じる位
相差が2πとなり、一方、CD系の光ディスクに使用す
る波長λ2=790nmの入射光では、生じる位相差が
2πにならない。これにより、図1(B)に示すよう
に、波長λ2の光に対しては回折格子として作用し、図
1(A)に示すように、波長λ1の光に対しては回折格
子として作用しない波長選択性回折格子が得られる。
Example 1 Example 1 is a specific example of the first embodiment shown in FIG. The first light-transmitting substrate 11A has a refractive index n 1
Is made of a material having a uniform refractive index of n 1 = 1.5, and is processed into an uneven shape to form a diffraction grating 11B which forms an interface with air.
Then, the lattice depth d 1 of the uneven portion is calculated as (n 1 -1) ·
Let d 1 be λ 1 , that is, d 1 = 1.3 μm. With such a configuration, the incident light having a wavelength of λ 1 = 650 nm used for a DVD-based optical disc has a phase difference of 2π, while the incident light having a wavelength of λ 2 = 790 nm used for a CD-based optical disc has The resulting phase difference does not become 2π. Thereby, as shown in FIG. 1 (B), it acts as a diffraction grating for light of wavelength λ 2 , and as shown in FIG. 1 (A), as a diffraction grating for light of wavelength λ 1 A wavelength-selective diffraction grating that does not work is obtained.

【0075】この場合、回折格子として作用する波長λ
2の入射光のみに対して、0次光の透過率がほぼ70%
であり、±1次回折光の回折効率がほぼ10%となる2
波長用回折素子を構成できる。なお、第1の透光性基板
11Aにおいて空気との界面をなす回折格子11Bの形
成された面および第2の透光性基板11Dにおいて空気
との界面をなす一面には、波長λ1および波長λ2の入射
光に対してフレネル反射の発生を1%以下に抑えるため
に、反射防止膜が成膜されている。
In this case, the wavelength λ acting as a diffraction grating
The transmittance of the zero-order light is almost 70% for only the incident light of 2.
And the diffraction efficiency of ± 1st-order diffracted light is almost 10%.
A wavelength diffraction element can be configured. Note that the wavelength λ 1 and the wavelength λ 1 are provided on the surface of the first light-transmitting substrate 11A on which the diffraction grating 11B forming the interface with air and the surface of the second light-transmitting substrate 11D forming the interface with air are provided. An anti-reflection film is formed to suppress the occurrence of Fresnel reflection to incident light of λ 2 to 1% or less.

【0076】また、位相板11Cは、ポリカーボネート
膜を延伸させることにより、延伸方向に光軸のそろった
複屈折性膜を形成して位相差機能を発生させている。こ
こで、延伸条件を調整することにより、具体的には、位
相板11Cの進相軸を波長λ 1の直線偏光方向に対して
45°傾斜した配置とすることにより、波長λ1の4分
の1波長板として機能させている。したがって、この位
相板11Cでは、例えば波長λ1の直線偏光の入射光が
この位相板11Cを透過すると、円偏光となって出射す
る。
The phase plate 11C is made of polycarbonate.
By stretching the film, the optical axes are aligned in the stretching direction
The phase difference function is generated by forming a birefringent film. This
Here, by adjusting the stretching conditions, specifically,
The fast axis of the phase plate 11C is set to the wavelength λ. 1For the linear polarization direction of
With the arrangement inclined at 45 °, the wavelength λ14 minutes
As a one-wavelength plate. Therefore, this
In the phase plate 11C, for example, the wavelength λ1Linearly polarized incident light
When transmitted through the phase plate 11C, the light is emitted as circularly polarized light.
You.

【0077】なお、位相板11Cを構成するポリカーボ
ネート膜自体は20μmから80μm程度の厚さの薄膜
であり、膜厚分布が均一とはいえないため、このポリカ
ーボネート膜を単体で用いる場合には、ここを透過する
レーザ光の透過波面収差にばらつきが多く発生するおそ
れがある。そこで、この例1では、ポリカーボネートの
位相板11Cを平均屈折率とほぼ等しい接着剤を用い
て、厚さ精度および面精度の優れた変形の少ない透光性
基板11A、11Dに挟んで接合させるように構成する
ことで、2波長用回折素子1としての透過波面収差が安
定した小さな値に抑えることができる。具体的には、波
長λ1および波長λ2の光に対して、二乗平均波面収差値
で0.015λ(ただし、λ=λ1またはλ2)以下の値
となった。
Incidentally, the polycarbonate film itself constituting the phase plate 11C is a thin film having a thickness of about 20 μm to 80 μm, and the film thickness distribution cannot be said to be uniform. There is a possibility that the transmitted wavefront aberration of the laser light transmitted through the optical disk varies greatly. Therefore, in this example 1, the polycarbonate phase plate 11C is bonded to the transparent substrate 11A, 11D which is excellent in thickness accuracy and surface accuracy and has little deformation by using an adhesive having substantially the same average refractive index. The transmitted wavefront aberration as the two-wavelength diffraction element 1 can be suppressed to a stable and small value. Specifically, the root-mean-square wavefront aberration value of the light having the wavelengths λ 1 and λ 2 was 0.015λ (where λ = λ 1 or λ 2 ) or less.

【0078】したがって、このような構成の2波長用回
折素子1に、位相板11Cの光軸に対して直線偏光方向
が+45°または−45°傾いた波長λ1および波長λ2
の異なる波長の直線偏光が入射すると、一方の波長λ1
の直線偏光入射光は回折されることなく円偏光となって
直進透過するが、他方の波長λ2の直線偏光入射光は一
部が回折され、楕円偏光となって前述した効率で回折光
が生成されて透過する。つまり、一方の波長の光に対し
ては回折格子として作用するが、他方の波長の光に対し
ては回折格子として作用しないようになる。
Therefore, the wavelength λ 1 and the wavelength λ 2 in which the linear polarization direction is inclined by + 45 ° or −45 ° with respect to the optical axis of the phase plate 11C are added to the two-wavelength diffraction element 1 having such a configuration.
When the linearly polarized light of different wavelengths are incident, one wavelength lambda 1
The linearly polarized incident light is straightly transmitted becomes circularly polarized light without being diffracted, but some other linear polarized incident light of wavelength lambda 2 is is diffracted, becomes elliptically polarized diffracted light efficiency described above Generated and transmitted. That is, it acts as a diffraction grating for light of one wavelength, but does not act as a diffraction grating for light of the other wavelength.

【0079】このような構成の2波長用回折素子を光ヘ
ッド装置に搭載することにより、装置構成が簡略化され
るため、部品点数の削減および小型化が実現でき、か
つ、CD系およびDVD系の各光ディスクに対して、そ
れぞれ光利用効率の高い安定した記録・再生信号の検出
ができる。
By mounting the two-wavelength diffractive element having such a structure on the optical head device, the structure of the device is simplified, so that the number of components can be reduced and the size can be reduced. For each of the optical discs, a stable recording / reproducing signal having high light use efficiency can be detected.

【0080】「例2」例2は図2に示した第2実施形態
の具体例である。回折格子11Bが形成された第1の透
光性基板11Aに加えて、第2の透光性基板11Dを屈
折率n2がn2=1.5の均一屈折率材料で構成し、凹凸
形状に加工して空気と界面をなす回折格子11Gを形成
する。そして、この凹凸部分の格子深さd2を、(n2
1)・d2がλ2となるよう、すなわちd2=1.58μ
mとする。この構成により、波長λ1=650nmの入
射光のみに対して0次光の透過率がほぼ60%であり、
±1次回折光の回折効率がほぼ10%となる波長選択性
回折格子が得られる。すなわち、異なる波長λ1、λ2
光に対しそれぞれ回折機能を持った波長選択性の2波長
用回折素子を実現できる。
"Example 2" Example 2 is a specific example of the second embodiment shown in FIG. In addition to the first light-transmitting substrate 11A on which the diffraction grating 11B is formed, the second light-transmitting substrate 11D is made of a uniform refractive index material having a refractive index n 2 of n 2 = 1.5. To form a diffraction grating 11G which forms an interface with air. Then, the lattice depth d 2 of this uneven portion is calculated as (n 2
1) · d 2 becomes λ 2 , that is, d 2 = 1.58 μ
m. With this configuration, the transmittance of the zero-order light for only the incident light having the wavelength λ 1 = 650 nm is approximately 60%,
A wavelength-selective diffraction grating having a diffraction efficiency of ± 1st-order diffracted light of about 10% is obtained. That is, it is possible to realize a wavelength-selective two-wavelength diffraction element having a diffraction function for light of different wavelengths λ 1 and λ 2 .

【0081】この場合、図2(A)に示すように、波長
λ1の入射光に対しては、回折格子11Gが回折作用を
及ぼし、0次光および±1次回折光が生成される。一
方、図2(B)に示すように、波長λ2の入射光に対し
ては、回折格子11Bが回折作用を及ぼし、0次光およ
び±1次回折光が生成される。したがって、このような
構成の2波長用回折素子を光ヘッド装置に搭載すること
により、CD系およびDVD系の各光ディスクに対し
て、それぞれ独立に信号検出用の3ビームを発生できる
ので、光利用効率の高い安定した記録・再生信号の検出
ができる。
In this case, as shown in FIG. 2A, the diffraction grating 11G exerts a diffractive action on the incident light having the wavelength λ 1 , and generates the 0th-order light and ± 1st-order diffracted light. On the other hand, as shown in FIG. 2B, the diffraction grating 11B exerts a diffractive action on the incident light having the wavelength λ 2 , and generates 0th-order light and ± 1st-order diffracted light. Therefore, by mounting the two-wavelength diffraction element having such a configuration in the optical head device, three beams for signal detection can be generated independently for each of the CD and DVD optical discs. Highly stable recording / reproducing signals can be detected.

【0082】「例3」例3は図3に示した第3実施形態
の具体例である。第1の透光性基板21Aの一面に、常
光屈折率no=1.5、異常光屈折率ne=1.65の複
屈折性材料を凹凸形状に加工形成してなる偏光性の回折
格子21Bを設ける。そして、凹部には前記複屈折性材
料の常光屈折率noとほぼ等しい均一屈折率nsの充填材
21Fを充填させ、常光偏光入射光に対しては回折せ
ず、異常光偏光入射光に対しては回折する偏光性の回折
格子を構成する。
Example 3 Example 3 is a specific example of the third embodiment shown in FIG. On one surface of the first light-transmitting substrate 21A, the ordinary refractive index n o = 1.5, processing the birefringent material of the extraordinary refractive index n e = 1.65 to irregularities formed comprising polarizing diffraction A grating 21B is provided. Then, the concave portion is filled with a filler 21F substantially equal uniform refractive index n s and ordinary refractive index n o of the birefringent material, not diffracted for ordinarily polarized incident light, the extraordinarily polarized incident light On the other hand, a polarizing diffraction grating that diffracts light is formed.

【0083】この構成において、例えば、偏光性の回折
格子21Bに対して、DVD系の光ディスクに使用する
波長λ1=650nmの入射光が常光に、CD系の光デ
ィスクに使用する波長λ2=790nmの入射光が異常
光に対応するように、波長λ1と波長λ2の入射光の偏光
方向を直交させることにより、波長λ1の入射光に対し
ては回折格子として作用しないが、波長λ2の入射光に
対しては回折格子として作用する波長選択性回折格子が
得られる。具体的には、格子深さd1をd1=0.92μ
mに形成することにより、波長λ2=790nmの入射
光のみに対して0次光の透過率がほぼ70%であり、±
1次回折光の回折効率がほぼ10%となる波長選択性の
2波長用回折素子を実現できる。
In this configuration, for example, the incident light having a wavelength λ 1 = 650 nm used for a DVD-based optical disk is made to be ordinary light and the wavelength λ 2 = 790 nm used for a CD-based optical disk to the polarizing diffraction grating 21B. By making the polarization directions of the wavelength λ 1 and the wavelength λ 2 orthogonal to each other so that the incident light of the wavelength corresponds to the extraordinary light, the wavelength λ 1 does not act as a diffraction grating for the wavelength λ 1 , but the wavelength λ 1 For the incident light of No. 2 , a wavelength-selective diffraction grating acting as a diffraction grating is obtained. Specifically, let the lattice depth d 1 be d 1 = 0.92 μ
m, the transmittance of the zero-order light with respect to only the incident light of wavelength λ 2 = 790 nm is approximately 70%, and ±
A wavelength-selective two-wavelength diffraction element in which the diffraction efficiency of the first-order diffracted light is approximately 10% can be realized.

【0084】なお、例えば、この例3の構成の2波長用
回折素子2を光ヘッド装置に使用する場合、波長λ1
波長λ2をそれぞれ出射する2つのレーザチップからな
る2波長用半導体レーザを搭載するには、一般に、半導
体レーザからの出射光は直線偏光であるため、各レーザ
チップを波長λ1と波長λ2の偏光方向が直交するよう
に、ベースにマウントすればよい。
For example, when the two-wavelength diffraction element 2 having the structure of the third embodiment is used in an optical head device, a two-wavelength semiconductor laser comprising two laser chips for emitting a wavelength λ 1 and a wavelength λ 2 respectively. In general, since the emitted light from the semiconductor laser is linearly polarized light, each laser chip may be mounted on the base such that the polarization directions of the wavelengths λ 1 and λ 2 are orthogonal to each other.

【0085】また、波長λ1と波長λ2の偏光方向が同一
方向にそろって出射する2波長用半導体レーザを用いる
場合には、2波長用半導体レーザと2波長用回折素子2
との間に、波長λ1と波長λ2のうちいずれか一方の波長
の光の偏波面を90°回転し、他方の波長の光の偏波面
は回転しない位相板あるいは旋光子を配置すればよい。
例えば、波長λ1=650nmの波長の光に対して5/
2波長板となる位相板を用いれば、波長λ2=790n
mの波長の光に対してはほぼ4/2波長板となるので、
位相板を透過する波長λ1の出射光の偏光方向は90°
回転するが、波長λ2の出射光の偏光方向は回転しな
い。したがって、これら波長λ1および波長λ2の出射光
は互いに直交する偏光方向となる。
In the case where a two-wavelength semiconductor laser that emits light with the polarization directions of the wavelengths λ 1 and λ 2 aligned in the same direction is used, the two-wavelength semiconductor laser and the two-wavelength diffraction element 2 are used.
A phase plate or a rotator that rotates the polarization plane of light of one of the wavelengths λ 1 and λ 2 by 90 ° and does not rotate the polarization plane of the light of the other wavelength is disposed between them. Good.
For example, for light of wavelength λ 1 = 650 nm, 5 /
If a phase plate serving as a two-wave plate is used, the wavelength λ 2 = 790 n
For light with a wavelength of m, it becomes almost a 4/2 wavelength plate,
The polarization direction of the outgoing light of wavelength λ 1 transmitted through the phase plate is 90 °
Rotates, but the polarization direction of the emitted light having a wavelength lambda 2 does not rotate. Therefore, the emitted lights of wavelengths λ 1 and λ 2 have polarization directions orthogonal to each other.

【0086】さらに、上記の位相板の代わりに、電圧印
加により偏光方向を0°と90°での回転角度の切替え
ができる偏光方向切替え素子を用いてもよい。この場合
の構成としては、例えば、1対のガラス基板の各片面上
に透明電極および直交する配向膜を形成し、セル化させ
た後、ネマティック液晶を注入してツイステッドネマテ
ィック液晶素子を形成する。そして、この液晶素子の透
明電極間への電圧印加をオン・オフすると、入射光の直
線偏光方向を90°回転させる偏光方向切替え素子が形
成できる。このような素子を半導体レーザとこの2波長
用回折素子2との間に配置すれば、例えば波長λ1の波
長の光入射に対しては電圧をオフして偏光方向を変化さ
せず、波長λ2の波長の光入射に対しては電圧をオンし
て偏光方向を変化させる偏光方向の切替えができる。
Further, instead of the above-mentioned phase plate, a polarization direction switching element capable of switching the rotation direction between 0 ° and 90 ° by applying a voltage may be used. As a configuration in this case, for example, a transparent electrode and an orthogonal alignment film are formed on each side of a pair of glass substrates, and after forming a cell, a nematic liquid crystal is injected to form a twisted nematic liquid crystal element. Then, when the voltage application between the transparent electrodes of the liquid crystal element is turned on / off, a polarization direction switching element for rotating the linear polarization direction of the incident light by 90 ° can be formed. If such an element is arranged between the semiconductor laser and the two-wavelength diffractive element 2, for example, the voltage is turned off for light incident at a wavelength of λ 1 and the polarization direction is not changed. With respect to the light of the second wavelength, the polarization direction can be switched by turning on the voltage to change the polarization direction.

【0087】「例4」例4は図4に示した第4実施形態
の具体例である。第1の透光性基板21Aに設けた回折
格子21Bに加えて、位相板21Cにも複屈折性材料で
形成された偏光性の回折格子21Gを設ける。この場
合、回折格子21Bと同一の常光屈折率no=1.5と
異常光屈折率ne=1.65を有する複屈折性材料を用
いるが、この複屈折性材料での常光屈折率方向が、回折
格子21Bを形成する複屈折性材料での常光屈折率方向
と直交するように形成する。すなわち、DVD系光ディ
スクで用いる波長λ1の入射偏光に対して、回折格子2
1Bでは常光屈折率noであるが、回折格子21Gでは
異常光屈折率neとなる。一方、CD系光ディスクで用
いる波長λ2の入射偏光に対して、偏光性回折格子21
Bでは異常光屈折率neであるが、偏光性の回折格子2
1Gでは常光屈折率noとなる。
Example 4 Example 4 is a specific example of the fourth embodiment shown in FIG. In addition to the diffraction grating 21B provided on the first translucent substrate 21A, the phase plate 21C is provided with a polarizing diffraction grating 21G formed of a birefringent material. In this case, uses a birefringent material having a diffraction grating 21B and the same ordinary refractive index n o = 1.5 and an extraordinary refractive index n e = 1.65, the ordinary refractive index direction in the birefringent material Are formed so as to be orthogonal to the ordinary light refractive index direction of the birefringent material forming the diffraction grating 21B. That is, with respect to the incident polarized light having a wavelength lambda 1 used in the DVD-based optical disc, a diffraction grating 2
It is a 1B In the ordinary refractive index n o, a diffraction grating 21G In extraordinary refractive index n e. On the other hand, with respect to the incident polarized light having a wavelength lambda 2 used in the CD system optical disk, the polarization diffraction grating 21
In B, the extraordinary light refractive index ne is used.
In 1G the ordinary refractive index n o.

【0088】したがって、波長λ2の入射偏光に対して
は、回折格子21Gの凹凸部分と充填材21Fとで屈折
率差がないので、位相差が生じることなく、回折格子と
して作用せずに直進透過する。一方、波長λ1の入射偏
光に対しては、上記(6)式で示される位相差を発生
し、回折格子として作用する。具体的には、偏光性の回
折格子21Gの格子深さd2をd2=0.78μmとする
ことにより、波長λ1=650nmの入射光のみに対し
て、0次光の透過率がほぼ70%であり、±1次回折光
の回折効率がほぼ10%となる波長選択性回折格子が得
られる。すなわち、異なる波長λ1、λ2の光に対しそれ
ぞれ回折機能を持った波長選択性の2波長用回折素子を
実現できる。
Therefore, for incident polarized light of wavelength λ 2 , there is no difference in refractive index between the uneven portion of the diffraction grating 21 G and the filler 21 F, so that there is no phase difference and the light does not act as a diffraction grating and goes straight. To Penetrate. On the other hand, with respect to the incident polarized light of wavelength lambda 1, and generates a phase difference represented by the equation (6), it acts as a diffraction grating. Specifically, by setting the grating depth d 2 of the polarizing diffraction grating 21G to d 2 = 0.78 μm, the transmittance of the zero-order light is substantially reduced for only the incident light having the wavelength λ 1 = 650 nm. 70%, and a wavelength-selective diffraction grating having a diffraction efficiency of ± 1st-order diffracted light of about 10% is obtained. That is, it is possible to realize a wavelength-selective two-wavelength diffraction element having a diffraction function for light of different wavelengths λ 1 and λ 2 .

【0089】この場合、図4(A)に示すように、波長
λ1の入射光に対しては、回折格子21Gのみが回折作
用を及ぼし、一方、図4(B)に示すように、波長λ2
の入射光に対しては、回折格子21Bのみが回折作用を
及ぼし、それぞれ0次光および±1次回折光が生成され
る。したがって、このような構成の2波長用回折素子を
光ヘッド装置に搭載することにより、CD系およびDV
D系の各光ディスクに対して、それぞれ独立に信号検出
用の3ビームを発生できるので、光利用効率の高い安定
した記録・再生信号の検出ができる。
In this case, as shown in FIG. 4 (A), only the diffraction grating 21G exerts a diffractive action on the incident light having the wavelength λ 1 , while the wavelength as shown in FIG. λ 2
Only the diffraction grating 21B exerts a diffractive action on the incident light of, and 0th-order light and ± 1st-order diffracted light are generated, respectively. Therefore, by mounting the two-wavelength diffraction element having such a configuration on the optical head device, the CD system and the DV
Since three beams for signal detection can be generated independently for each optical disk of the D system, a stable recording / reproducing signal with high light use efficiency can be detected.

【0090】また、この例4では、前述した例2の2波
長用回折素子1(図2参照)と比較して、DVD系の光
ディスクに用いる波長λ1の入射光とCD系の光ディス
クに用いる波長λ2の入射光の0次光の透過効率および
±1次回折光の回折効率を、独立に、かつ、任意の値に
設定できるため、種々の光ヘッド装置の光学系構成に対
して容易に適用できる。
[0090] In this Example 4, as compared to the two-wavelength diffraction element 1 of Example 2 described above (see FIG. 2), used in the wavelength lambda 1 of the incident light and the CD-type optical disk used in the DVD family optical disc Since the transmission efficiency of the 0th-order light and the diffraction efficiency of the ± 1st-order diffracted light of the incident light having the wavelength λ 2 can be set independently and to arbitrary values, it can be easily applied to various optical system configurations of the optical head device. Applicable.

【0091】「例5」例5は上述した例1〜4の2波長
用回折素子1、2において位相板の構成を変更した変形
例である。
Example 5 Example 5 is a modified example in which the configuration of the phase plate is changed in the two-wavelength diffraction elements 1 and 2 of Examples 1 to 4 described above.

【0092】2波長用回折素子1、2において、位相板
11Cまたは21Cとして用いられる位相差発生機能を
有する有機物薄膜を2種類積層することにより、波長λ
1=650nmと波長λ2=790nmの双方の波長に対
してほぼ1/4波長板となる位相板を構成する(図示せ
ず)。
In the two-wavelength diffraction elements 1 and 2, two types of organic thin films having a phase difference generating function used as the phase plate 11C or 21C are laminated to obtain a wavelength λ.
A phase plate, which is a quarter-wave plate for both 1 = 650 nm and λ 2 = 790 nm, is formed (not shown).

【0093】具体的には、例えば、リターデーション値
が180nmのポリカーボネート膜位相板Xと、リター
デーション値が360nmのポリカーボネート膜位相板
Yとを各々の進相軸方向がほぼ60°の角度をなすよう
に、接着剤で張り合わせて一体の積層位相板とする。す
なわち、この積層位相板を形成する際に、進相軸を位相
板Xと位相板Yのそれぞれの進相軸方向の中間の方向と
し、波長λ1と波長λ2の入射偏光方向に対して積層位相
板の進相軸が45°の角度をなすようにして、ガラス基
板などの透光性基板に接着剤で固着する。
More specifically, for example, a polycarbonate film phase plate X having a retardation value of 180 nm and a polycarbonate film phase plate Y having a retardation value of 360 nm form an angle of approximately 60 ° in the fast axis direction. As described above, an integrated laminated phase plate is attached by bonding with an adhesive. That is, when forming the laminated phase plate, the fast axis is set to a direction intermediate between the fast axis directions of the phase plate X and the phase plate Y, and the incident polarization directions of the wavelength λ 1 and the wavelength λ 2 are set. The laminated phase plate is fixed to a transparent substrate such as a glass substrate with an adhesive so that the fast axis forms an angle of 45 °.

【0094】このような構成の位相板を有する2波長用
回折素子を光ヘッド装置に搭載することにより、光ディ
スクの情報記録面で反射されて半導体レーザに入射する
波長λ1と波長λ2の戻り光は、偏光方向がいずれもレー
ザ出射光の偏光方向に対して直交するため、レーザ発振
状態に影響を及ぼさない。したがって、波長λ1と波長
λ2のいずれのレーザ光についてもレーザ発振強度の変
動が抑制され、安定した記録・再生ができる。
By mounting the two-wavelength diffractive element having the phase plate having such a structure on the optical head device, the wavelength λ 1 and the wavelength λ 2 which are reflected on the information recording surface of the optical disk and enter the semiconductor laser are returned. The light does not affect the laser oscillation state because the polarization direction of each light is orthogonal to the polarization direction of the laser emission light. Thus, also be suppressed variation of lasing intensity for any of the laser beam having a wavelength lambda 1 and wavelength lambda 2, it is stable recording and playback.

【0095】「例6」例6は図5に示した第5実施形態
の具体例である。第1の透光性基板21Aの一面に、常
光屈折率no=1.5、異常光屈折率ne=1.65の複
屈折性材料を8段の階段形状に加工形成してなる偏光性
の回折格子21Hを設ける。また、第2の透光性基板2
1Dに同じ複屈折性材料を凹凸矩形形状に加工形成して
なる偏光性の回折格子21Gを設ける。ここで、回折格
子21Hは常光偏光入射光に対して常光屈折率noとし
て作用するが、回折格子21Gは異常光屈折率neとし
て作用するように複屈折性材料の配向軸方向が直交する
構成としている。次に、第1の透光性基板21Aと第2
の透光性基板21Dを各偏光性の回折格子が形成された
側を対向させ、複屈折性材料の常光屈折率no=1.5
とほぼ等しい均一屈折率nsの充填材21Fを回折格子
の凹部に充填させる。
Example 6 Example 6 is a specific example of the fifth embodiment shown in FIG. On one surface of the first light-transmitting substrate 21A, the ordinary refractive index n o = 1.5, extraordinary refractive index n e = 1.65 of the birefringent material is processed and formed into 8-step staircase shape formed by polarization Diffraction grating 21H is provided. Further, the second light-transmitting substrate 2
1D is provided with a polarizing diffraction grating 21G formed by processing the same birefringent material into a concave and convex rectangular shape. Here, the diffraction grating 21H acts as the ordinary refractive index n o with respect to ordinary light polarized incident light, the diffraction grating 21G is orientation axis direction of the birefringent material to act as extraordinary refractive index n e is perpendicular It has a configuration. Next, the first light-transmitting substrate 21A and the second
Of the birefringent material with the ordinary light refractive index n o = 1.5
The concave portion of the diffraction grating is filled with a filler 21F having a uniform refractive index n s substantially equal to.

【0096】さらに、位相板21Cとして位相差発生機
能を有する有機薄膜を用い、第1の透光性基板21Aの
片面に接着材21Eで位相板21Cが固定されている。
ここで、位相板21Cは例1と同様にポリカーボネート
膜を延伸させることで複屈折膜を形成して位相差機能を
発生させている。位相板21Cは、波長λ1=650n
mの入射光に対する位相差が5πとなる複屈折とし、波
長λ2=790nmの入射光に対する位相差はほぼ4π
となっている。さらに、第3の透光性基板21Kに同じ
複屈折性材料を凹凸矩形形状に加工形成してなる偏光性
の回折格子21Bを設ける。ここで、回折格子21Bは
常光偏光入射光に対して常光屈折率noとして作用する
複屈折性材料の配向軸方向としている。偏光性の回折格
子21Bと回折格子21Gは例4で説明した構成および
作用と同一である。回折格子21Bの凹部には前記複屈
折性材料の常光屈折率noとほぼ等しい均一屈折率ns
充填材21Iを充填させる。
Further, an organic thin film having a phase difference generating function is used as the phase plate 21C, and the phase plate 21C is fixed to one surface of the first light-transmitting substrate 21A with an adhesive 21E.
Here, the phase plate 21 </ b> C forms a birefringent film by stretching a polycarbonate film in the same manner as in Example 1 to generate a phase difference function. The phase plate 21C has a wavelength λ 1 = 650 n
The birefringence is such that the phase difference for incident light of m is 5π, and the phase difference for incident light of wavelength λ 2 = 790 nm is approximately 4π.
It has become. Further, a polarizing diffraction grating 21B formed by processing the same birefringent material into an uneven rectangular shape is provided on the third translucent substrate 21K. Here, the diffraction grating 21B is set to the orientation axis direction of the birefringent material that acts as the ordinary refractive index n o with respect to ordinary light polarized incident light. The polarizing diffraction grating 21B and the diffraction grating 21G have the same configuration and operation as described in Example 4. The concave diffraction grating 21B is filled with a filler 21I substantially equal uniform refractive index n s and ordinary refractive index n o of the birefringent material.

【0097】このような構成の2波長用回折素子2Aに
波長λ1の異常光偏光が入射すると、位相板21C透過
後に偏波面が90゜回転して常光偏光となり、回折格子
21Hおよび回折格子21Bでは回折されず、回折格子
21Gのみで回折され0次光と±1次回折光が発生す
る。一方、波長λ2の異常光偏光が入射すると、位相板
21C透過後に偏波面は回転しないため異常光偏光のま
まで、回折格子21Hおよび回折格子21Gで回折さ
れ、回折格子21Bでは回折されない。
When the extraordinary light having the wavelength λ 1 is incident on the two-wavelength diffraction element 2A having such a configuration, the polarization plane is rotated by 90 ° after passing through the phase plate 21C to become ordinary light polarization, and the diffraction grating 21H and the diffraction grating 21B. Are diffracted only by the diffraction grating 21G to generate 0th-order light and ± 1st-order diffracted light. On the other hand, when extraordinary light polarized light of wavelength λ 2 is incident, since the plane of polarization does not rotate after transmission through the phase plate 21C, it is diffracted by the diffraction grating 21H and the diffraction grating 21G with the extraordinary light polarized, and is not diffracted by the diffraction grating 21B.

【0098】ここで、偏光性の回折格子21Hの平均格
子ピッチを28μmとした場合、θ=1.6゜光軸方向
が傾いて入射する波長λ2の異常光偏光のほぼ80%を
波長λ1と同じ光軸方向に1次回折して偏向する偏向機
能層として作用する。すなわち、回折格子21Hの形成
された面からほぼ3.6mm離れた面で、波長λ1のレ
ーザ発光点と100μm間隔を成して配置された波長λ
2のレーザ発光点からの出射光を波長λ1のレーザ発光点
からの出射光と同一軸に偏向する。
[0098] Here, when the average grating pitch of the diffraction grating 21H polarizing and 28 .mu.m, the wavelength for nearly 80% of the wavelength lambda 2 of the extraordinarily polarized light incident to tilt theta = 1.6 ° optical axis direction lambda It functions as a deflecting function layer that deflects by first-order diffraction in the same optical axis direction as 1. That is, the wavelength λ arranged at a distance of 100 μm from the laser emission point of the wavelength λ 1 on a surface approximately 3.6 mm away from the surface on which the diffraction grating 21H is formed.
The light emitted from the laser emission point No. 2 is deflected to the same axis as the light emitted from the laser emission point having the wavelength λ1.

【0099】また、格子ピッチが空間的に同一で直線状
の回折格子を用いた場合、1次回折光にはコマ収差等の
収差が発生するため、収差が生じないように1次回折光
に位相分布を付加するように面内の格子パターン形状が
空間的に分布したホログラム格子パターンを用いた。さ
らに、必要に応じて波長λ1と波長λ2の波長の相異に起
因した光学系の色収差を補正するホログラム格子パター
ンとしてもよい。また、偏光性の回折格子21Bと回折
格子21Gにより、例4と同様にCD系およびDVD系
の各ディスクに対して、それぞれ独立に信号検出用の3
ビームを発生する。図5では偏光性の回折格子21H、
回折格子21B、回折格子21G、位相板21Cが一体
化された構成例を示したが、個別に各回折素子を作製し
た後組み合わせて用いてもよい。
When a linear diffraction grating having a spatially uniform grating pitch is used, since the first-order diffracted light has an aberration such as coma, the phase distribution of the first-order diffracted light is reduced so that no aberration occurs. A hologram grating pattern in which the in-plane grating pattern shape is spatially distributed so as to add a pattern is used. Furthermore, it may be a hologram grating pattern for correcting the chromatic aberration of the optical system due to difference in wavelengths of lambda 1 and wavelength lambda 2 when necessary. In addition, as in the case of Example 4, each of the CD- and DVD-based disks is independently used for signal detection by the polarizing diffraction grating 21B and the diffraction grating 21G.
Generate a beam. In FIG. 5, a polarizing diffraction grating 21H,
Although the configuration example in which the diffraction grating 21B, the diffraction grating 21G, and the phase plate 21C are integrated has been described, the individual diffraction elements may be individually manufactured and then used in combination.

【0100】この例6では、前述した例4の2波長用回
折素子2(図4参照)と比較して、CD系およびDVD
系の各波長帯のレーザチップが互いの発光点間が離れて
配置された2波長用半導体レーザを用いた場合でも、偏
向機能層により一方の波長の大半の光が偏向され、結果
的に同一発光点から2波長の光が出射する光源装置とな
る。その結果、CD系光ディスクおよびDVD系光ディ
スクの信号を従来のように受光面積の小さな単一光検出
器で受光することができるため、光ヘッド装置の小型化
と高速応答が実現できる。
In the sixth embodiment, compared to the two-wavelength diffractive element 2 of the fourth embodiment (see FIG. 4), the CD system and the DVD are used.
Even when a laser chip for each wavelength band of the system uses a two-wavelength semiconductor laser in which the light emitting points are spaced apart from each other, most of light of one wavelength is deflected by the deflection function layer, and consequently the same. The light source device emits light of two wavelengths from the light emitting point. As a result, signals from a CD optical disk and a DVD optical disk can be received by a single photodetector having a small light receiving area as in the related art, so that downsizing and high-speed response of the optical head device can be realized.

【0101】上述したように、本実施形態の2波長用回
折素子によれば、波面収差を劣化させることなく、特定
の波長に対して3ビーム以上を発生する回折格子機能
と、直線偏光の入射光を円偏光の出射光に変換する位相
板機能とを、単一のもので併せ持った光学素子が実現で
き、部品点数の削減による小型化を図れる。
As described above, according to the two-wavelength diffraction element of this embodiment, the diffraction grating function of generating three or more beams for a specific wavelength without deteriorating the wavefront aberration, and the incidence of linearly polarized light An optical element having both a phase plate function of converting light into circularly polarized outgoing light can be realized by a single element, and downsizing by reducing the number of components can be achieved.

【0102】また、本実施形態の2波長用回折素子を光
ヘッド装置に搭載することにより、光源に2波長用半導
体レーザを用いて構成でき、光学系および光源の構成を
簡略化できるため、装置の部品点数の削減および小型化
が実現できる。しかも、例えばCD系光ディスクおよび
DVD系光ディスクなどの複数種の光ディスクそれぞれ
への信号の記録・再生時において、光利用効率が高く、
しかも安定した信号検出ができ、高い記録・再生性能を
実現できる。
Also, by mounting the two-wavelength diffraction element of this embodiment on an optical head device, it is possible to use a two-wavelength semiconductor laser as a light source, and to simplify the configuration of the optical system and the light source. The number of parts can be reduced and the size can be reduced. In addition, when recording / reproducing a signal to / from a plurality of types of optical disks such as a CD optical disk and a DVD optical disk, for example, the light use efficiency is high,
Moreover, stable signal detection can be performed, and high recording / reproducing performance can be realized.

【0103】[0103]

【発明の効果】以上説明したように本発明によれば、2
波長用半導体レーザを光源として2つの波長帯の光によ
りCD系光ディスクおよびDVD系光ディスクなどのよ
うな異種の光記録媒体への情報の記録・再生を行う際
に、安定した信号検出を行える2波長用回折素子および
それを用いた光ヘッド装置を実現できる。
As described above, according to the present invention, 2
When recording / reproducing information on / from different types of optical recording media such as CD-based optical discs and DVD-based optical discs using light in two wavelength bands using a semiconductor laser for wavelength as a light source, two wavelengths that can perform stable signal detection. Diffraction element and an optical head device using the same can be realized.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1実施形態に係る2波長用回折素子
の構成を示すものであり、(A)は一方の波長の入射光
の光路を示す模式図、(B)は他方の波長の入射光の光
路を示す模式図である。
FIG. 1 shows a configuration of a two-wavelength diffraction element according to a first embodiment of the present invention, where (A) is a schematic diagram showing an optical path of incident light of one wavelength, and (B) is another wavelength. FIG. 3 is a schematic diagram showing an optical path of incident light of FIG.

【図2】本発明の第2実施形態に係る2波長用回折素子
の構成を示すものであり、(A)は一方の波長の入射光
の光路を示す模式図、(B)は他方の波長の入射光の光
路を示す模式図である。
FIG. 2 shows a configuration of a two-wavelength diffraction element according to a second embodiment of the present invention, where (A) is a schematic diagram showing an optical path of incident light of one wavelength, and (B) is another wavelength. FIG. 3 is a schematic diagram showing an optical path of incident light of FIG.

【図3】本発明の第3実施形態に係る2波長用回折素子
の構成を示すものであり、(A)は一方の波長の入射光
の光路を示す模式図、(B)は他方の波長の入射光の光
路を示す模式図である。
FIGS. 3A and 3B show a configuration of a two-wavelength diffraction element according to a third embodiment of the present invention, wherein FIG. 3A is a schematic diagram showing an optical path of incident light of one wavelength, and FIG. FIG. 3 is a schematic diagram showing an optical path of incident light of FIG.

【図4】本発明の第4実施形態に係る2波長用回折素子
の構成を示すものであり、(A)は一方の波長の入射光
の光路を示す模式図、(B)は他方の波長の入射光の光
路を示す模式図である。
FIGS. 4A and 4B show a configuration of a two-wavelength diffraction element according to a fourth embodiment of the present invention, in which FIG. 4A is a schematic diagram showing an optical path of incident light of one wavelength, and FIG. FIG. 3 is a schematic diagram showing an optical path of incident light of FIG.

【図5】本発明の第5実施形態に係る2波長用回折素子
の構成を示すものであり、(A)は一方の波長の入射光
の光路を示す模式図、(B)は他方の波長の入射光の光
路を示す模式図である。
5A and 5B show a configuration of a two-wavelength diffraction element according to a fifth embodiment of the present invention, wherein FIG. 5A is a schematic diagram showing an optical path of incident light of one wavelength, and FIG. FIG. 3 is a schematic diagram showing an optical path of incident light of FIG.

【図6】本発明の第6実施形態に係る光ヘッド装置を示
す概略構成図である。
FIG. 6 is a schematic configuration diagram illustrating an optical head device according to a sixth embodiment of the present invention.

【図7】従来の光ヘッド装置の構成例を示す概略構成図
である。
FIG. 7 is a schematic configuration diagram showing a configuration example of a conventional optical head device.

【符号の説明】[Explanation of symbols]

1,2,2A 2波長用回折素子 3 2波長用半導体レーザ 4 ビームスプリッタ 5 コリメータレンズ 6 対物レンズ 7 光ディスク(光記録媒体) 8 光検出器 11A,21A,11D,21D,21K 透光性基板
(ガラス基板) 11B,11G 回折格子 11C,21C 位相板 11E,21E 接着剤 21B,21G,21H 偏光性の回折格子 21F,21I 充填材
1, 2, 2A 2-wavelength diffraction element 3 2-wavelength semiconductor laser 4 beam splitter 5 collimator lens 6 objective lens 7 optical disk (optical recording medium) 8 photodetector 11A, 21A, 11D, 21D, 21K translucent substrate ( Glass substrate) 11B, 11G Diffraction grating 11C, 21C Phase plate 11E, 21E Adhesive 21B, 21G, 21H Polarizing diffraction grating 21F, 21I Filler

───────────────────────────────────────────────────── フロントページの続き (72)発明者 村川 真弘 福島県郡山市待池台1−8 郡山西部第二 工業団地 旭硝子郡山電材株式会社内 Fターム(参考) 2H049 AA03 AA13 AA45 AA57 AA64 AA66 BA03 BA07 BA42 BB05 BB42 BB62 BC03 BC21 5D119 AA20 AA41 AA43 BA01 CA16 EC41 EC45 EC47 EC48 FA05 FA08 JA22 JA27 JA32  ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Masahiro Murakawa 1-8 Machiikedai, Koriyama-shi, Fukushima Prefecture Second industrial park in Koriyama Asahi Glass Koriyama Electric Materials Co., Ltd. F-term (reference) 2H049 AA03 AA13 AA45 AA57 AA64 AA66 BA03 BA07 BA42 BB05 BB42 BB62 BC03 BC21 5D119 AA20 AA41 AA43 BA01 CA16 EC41 EC45 EC47 EC48 FA05 FA08 JA22 JA27 JA32

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】波長λ1または波長λ2(λ1≠λ2)の少な
くとも一方の波長の光が入射する2波長用回折素子にお
いて、前記一方の波長λ1の入射光を透過するととも
に、前記他方の波長λ2の入射光を回折させる回折格子
と、前記2つの波長λ1または波長λ2のうち少なくとも
一方の波長の透過光の偏光状態を変化させる位相板とが
一体化されたことを特徴とする2波長用回折素子。
1. A two-wavelength diffraction element to which light of at least one of the wavelengths λ 1 or λ 21 ≠ λ 2 ) is incident, wherein the incident light of the one wavelength λ 1 is transmitted. a diffraction grating for diffracting the other wavelength lambda 2 of the incident light, that the two phase plates, changing at least one of the polarization state of the transmitted light of wavelength in the wavelength lambda 1 or wavelength lambda 2 are integrated A diffraction element for two wavelengths, characterized in that:
【請求項2】前記回折格子は、断面形状が周期的な凹凸
状であり、凹部と凸部の透過光の位相差が波長λ1また
は波長λ2のいずれか一方の透過光に対して2πである
請求項1に記載の2波長用回折素子。
2. The diffraction grating according to claim 1, wherein a cross-sectional shape of the diffraction grating is a periodic uneven shape, and a phase difference between transmitted light of the concave and convex portions is 2π with respect to transmitted light of either the wavelength λ 1 or the wavelength λ 2. The two-wavelength diffraction element according to claim 1, wherein
【請求項3】前記回折格子は、第1の直線偏光方向の入
射光に対しては回折格子として作用せず透過し、第1の
直線偏光方向と直交する第2の直線偏光方向の入射光に
対しては回折格子として作用する複屈折性材料からなる
偏光性の回折素子である請求項1に記載の2波長用回折
素子。
3. The diffraction grating transmits the incident light in the first linear polarization direction without acting as a diffraction grating, and transmits the incident light in a second linear polarization direction orthogonal to the first linear polarization direction. 2. The two-wavelength diffraction element according to claim 1, wherein the diffraction element is a polarizing diffraction element made of a birefringent material acting as a diffraction grating.
【請求項4】前記位相板は、λ1≦λ≦λ2の関係にある
波長λの直線偏光を円偏光に変換する機能を有する有機
物薄膜である請求項1、2または3に記載の2波長用回
折素子。
4. The method according to claim 1, wherein the phase plate is an organic thin film having a function of converting linearly polarized light having a wavelength λ having a relationship of λ 1 ≦ λ ≦ λ 2 into circularly polarized light. Diffraction element for wavelength.
【請求項5】前記位相板は、一方の直線偏光に対しては
2π・(m1−1/2)(m1は自然数)の位相差を、他
方の直線偏光に対しては2π・m2(m2は自然数)の位
相差を発生する有機物薄膜である請求項1、2または3
に記載の2波長用回折素子。
5. The phase plate has a phase difference of 2π · (m 1 −1/2) (m 1 is a natural number) for one linearly polarized light and 2π · m for the other linearly polarized light. 4. An organic thin film which generates a phase difference of 2 (m 2 is a natural number).
The diffraction element for two wavelengths according to 1.
【請求項6】波長λ1および波長λ2の光を出射する光源
と、波長λ1および波長λ2の光を光記録媒体に集光する
対物レンズとを少なくとも備え、光記録媒体に情報の記
録・再生を行う光ヘッド装置であって、前記光源と前記
対物レンズとの間の光路中に、請求項1から5のいずれ
かに記載の2波長用回折素子が設置されていることを特
徴とする光ヘッド装置。
A light source 6. A for emitting light having a wavelength lambda 1 and wavelength lambda 2, comprising at least an objective lens that focuses the light of the wavelength lambda 1 and wavelength lambda 2 to the optical recording medium, the optical recording medium of the information An optical head device for performing recording / reproduction, wherein the two-wavelength diffraction element according to any one of claims 1 to 5 is provided in an optical path between the light source and the objective lens. Optical head device.
JP2000218976A 2000-01-31 2000-07-19 Optical head device Expired - Fee Related JP4560906B2 (en)

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