JP2001289898A - Inspecting device, inspecting unit, and manufacturing method for inspecting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device which allows a contact-type inspection as well as noncontact type inspection. SOLUTION: There are provided a jig 101 comprising a plurality of probes 101a and a non-contact sensor 11, a transmitting/receiving unit 102 for contact- type inspection, a transmitting/receiving unit 12 for non-contact inspection, a switcher 13 for switching between the transmitting/receiving unit 102 and the transmitting/receiving unit 12, and a computer 103.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to inspection of circuit wiring on a circuit board.

[0002]

2. Description of the Related Art In the manufacture of a circuit board, it is necessary to make a pattern-like circuit wiring on a substrate and then inspect the circuit wiring for disconnections, short circuits, and the like.

Conventionally, as such an inspection technique, a probe such as a pin is brought into contact with both ends of a circuit wiring, a test signal is transmitted from the probe on one end to the circuit wiring, and the inspection signal is transmitted from the probe on the other end. There is known a contact-type inspection method for performing a continuity test or the like of a circuit wiring by receiving a signal.

FIG. 5 is a schematic view showing an example of a conventional inspection apparatus 100. Such an inspection apparatus 100 includes a so-called dedicated tester and a universal tester.

The inspection apparatus 100 includes a jig 101, an inspection signal transmitting / receiving unit 102, a computer 103,
Is provided.

[0006] The jig 101 has a plurality of probes 101a for contacting the circuit wiring 201 of the circuit board 200 and transmitting and receiving inspection signals. The probes 101 a are provided in a number corresponding to the number of terminals at both ends of the circuit wiring 201, for example, and are fixed to the main body of the jig 101. Such a jig 101 is generally provided for each circuit board to be inspected.
It is manufactured individually corresponding to the configuration of the circuit wiring.

The transmitting / receiving unit 102 includes a test signal generator 102a for transmitting a test signal to any one of the probes 101a, and a probe 10
1a, a receiving unit 102c for a test signal received from the probe 1a, and a probe 101a for transmitting or receiving the test signal.
And a switching unit 102b that switches and connects the generating unit 102a or the receiving unit 102c.

The generator 102a generates a test signal as an electric signal such as a single waveform or a pulse waveform. The receiving unit 102c performs amplification, signal shaping, AD conversion, and the like of the received test signal. Switching unit 10
2b is composed of a multiplexer, a duplexer, etc.
Any one or a plurality of probes 101a
2a, and one or more other probes 101a are connected to the receiving unit 102c as appropriate.

The transmission / reception unit 102 may be realized as an interface board inserted into an expansion slot or the like of the computer 103 in some cases.

The computer 103 includes a transmitting / receiving unit 1
02, and outputs the inspection result of the inspected circuit wiring 201 on a display or outputs sound. Specifically, the computer 103 issues a timing at which the generation unit 102a of the transmission / reception unit 102 generates a test signal, issues a switching instruction to the switching unit 102b, and receives a test signal from the reception unit 102c to perform a test. The presence / absence of a defect such as disconnection, short circuit, chipping or the like of the circuit wiring 201 that has transmitted the signal is determined.

It is needless to say that the computer 103 may be configured as a dedicated machine for the inspection apparatus in addition to the case where a general-purpose computer is used.

An example of the operation of the inspection apparatus 100 having such a configuration will be described. First, the computer 103 selects a circuit wiring 201 to be inspected, and the circuit wiring 201 is selected.
The probe 101a in contact with is identified.

Next, the computer 103 operates such that the switching unit 102b operates so that one of the specified probes 101a is connected to the generating unit 102a and one of the other probes 101a is connected to the receiving unit 102c. Also, a control signal is sent to the transmitting / receiving unit 102 so that the generator 102a starts generating the inspection signal.

The transmission / reception unit 102 is a computer
The switching unit 102b is switched based on the control signal from the control unit 03, and an inspection signal is generated from the generation unit 102a.

The inspection signal is transmitted to the specified probe 101a through the switching unit 102b, and further transmitted from the probe 101a to the circuit wiring 201.

Here, if no disconnection or the like has occurred in the circuit wiring 201, the inspection signal transmitted from the probe 101a is received by another probe 101a through the circuit wiring 201. The received inspection signal is transmitted to the switching unit 102
b, and is received by the receiving unit 102c, subjected to signal processing as necessary, and transmitted to the computer 103.

The computer 103 includes a transmitting / receiving unit 1
02 based on the inspection signal sent from the
Inspect 1 For example, if the inspection signal does not return within a predetermined time, it is determined that the wire is broken. The result of the determination is output to a display or the like.

The above is the conventional inspection apparatus.

On the other hand, in recent years, it has become difficult to accurately and sequentially contact probes with each circuit wiring due to the increase in the density of circuit wiring. There has been proposed a non-contact type inspection method for receiving an inspection signal transmitted to a circuit wiring without performing the inspection.

In this non-contact type inspection method, a probe is disposed at one end of a circuit wiring to be inspected, which is in contact with the circuit wiring, and a sensor is disposed at the other end in a non-contact proximity to the circuit wiring. After that, by transmitting a time-varying test signal to the probe, a signal appearing on the sensor (hereinafter also referred to as a test signal for convenience) is detected by an electromagnetic wave generated based on the test signal on the circuit wiring. Inspection of disconnection or the like of the circuit wiring is performed.

According to this method, it is sufficient that the pin is brought into contact with only one end of the circuit wiring, so that there is an advantage that a fine circuit wiring can be inspected.

[0022]

However, depending on the circuit wiring to be inspected, there are cases where it is desired to use both the contact type inspection and the non-contact type inspection. There is also a demand that an existing contact-type inspection device be effectively used so that a non-contact type inspection can be performed.

Accordingly, it is an object of the present invention to provide an apparatus capable of performing a contact type inspection and a non-contact type inspection.

It is another object of the present invention to provide an apparatus for performing a non-contact type inspection by utilizing an existing contact-type inspection apparatus and a method of manufacturing the apparatus.

[0025]

According to the present invention, there is provided an inspection apparatus for inspecting a circuit wiring by supplying an inspection signal to a circuit wiring on a circuit board, wherein the inspection signal contacts the circuit wiring. A jig having a plurality of probes for transmitting or receiving the test signal, a sensor for receiving the test signal transmitted to the circuit wiring from the circuit wiring in a non-contact manner, and generating the test signal. A first signal generation unit, a first reception unit that receives the test signal from the probe, and the first signal generation unit or the switch that switches the probe that is a target of transmission or reception of the test signal. A first switching unit for connecting to each of the first receiving units;
A first transmission / reception means having a second signal generation unit for generating the inspection signal, a second reception unit for receiving the inspection signal from the sensor, and a transmission target of the inspection signal. A second switching unit having a second switching unit for switching a probe to connect to the second signal generation unit, and controlling the first transmission / reception unit and the second transmission / reception unit; The first transmitting / receiving means or the second
Processing means for outputting a test result of the circuit wiring based on the test signal received by the transmitting / receiving means.

In this case, the test signal generated by the first signal generator of the first transmitting / receiving means, the test signal generated by the second signal generator of the second transmitting / receiving means, And a switching means for switching and supplying the jig to the jig.

Further, the second signal generator can generate a time-varying test signal.

According to the present invention, the inspection signal is supplied to the circuit wiring on the circuit board, so that the inspection signal is transmitted or received in contact with the circuit wiring in order to inspect the circuit wiring. A jig having a plurality of probes, a first signal generating unit for generating the inspection signal, a first receiving unit for receiving the inspection signal from the probe, and an object for transmitting or receiving the inspection signal A first transmission / reception unit having a first switching unit for switching the probe to be connected to the first signal generation unit or the first reception unit, respectively. A sensor attached to the jig for receiving the inspection signal transmitted to the circuit wiring from the circuit wiring in a non-contact manner, and a second signal generator for generating the inspection signal. Department A second receiving unit that receives the test signal from the sensor, and a second switching unit that switches the probe to be transmitted with the test signal and connects to the second signal generating unit. And a second transmission / reception unit having the function of controlling the first transmission / reception unit and the second transmission / reception unit, based on the inspection signal received by the first transmission / reception unit or the second transmission / reception unit. ,
A test unit that outputs a test result of the circuit wiring.

According to the present invention, the inspection signal is supplied to the circuit wiring on the circuit board, so that the inspection signal is transmitted or received in contact with the circuit wiring in order to inspect the circuit wiring. A jig having a plurality of probes, a first signal generating unit for generating the inspection signal, a first receiving unit for receiving the inspection signal from the probe, and an object for transmitting or receiving the inspection signal A first transmission / reception unit having a first switching unit for switching the probe to be connected to the first signal generation unit or the first reception unit, and a first transmission / reception unit. A processing unit for controlling and outputting an inspection result of the circuit wiring based on the inspection signal received by the first transmission / reception unit. To Attached, a sensor for receiving the test signal transmitted to the circuit wiring from the circuit wiring in a non-contact manner, a second signal generator that generates the test signal, and the test signal from the sensor. A second receiving unit for receiving, and a second switching unit for switching the probe to be transmitted of the test signal and connecting the probe to the second signal generating unit; And a second transmission / reception unit that is controlled and sends the inspection signal received by the second reception unit to the processing unit.

In this case, the test signal generated by the first signal generation unit of the first transmission / reception means, the test signal generated by the second signal generation unit of the second transmission / reception means, And a switching means for switching and supplying the jig to the jig.

According to the present invention, the inspection signal is supplied to the circuit wiring of the circuit board, so that the inspection signal is transmitted or received in contact with the circuit wiring in order to inspect the circuit wiring. A jig having a plurality of probes, a first signal generating unit for generating the inspection signal, a first receiving unit for receiving the inspection signal from the probe, and an object for transmitting or receiving the inspection signal A first transmission / reception unit having a first switching unit for switching the probe to be connected to the first signal generation unit or the first reception unit, and a first transmission / reception unit. A computer that controls and outputs a test result of the circuit wiring based on the test signal received by the first transmitting / receiving unit. A manufacturing method, the step of attaching a sensor for receiving the test signal sent to the circuit wiring in a non-contact from the circuit wiring to the jig,
A second signal generator that generates the test signal; a second receiver that receives the test signal from the sensor; and a second signal that switches the probe to which the test signal is to be transmitted. Connecting a second transmission / reception unit having a second switching unit for connection to the generation unit to the computer, and controlling the first transmission / reception unit and the second transmission / reception unit by the computer And a program for outputting a test result of the circuit wiring based on the test signal received by the first transmission / reception unit or the second transmission / reception unit. A method of manufacturing an inspection apparatus is provided.

Further, according to the present invention, there is provided an inspection apparatus for inspecting the circuit wiring by supplying an inspection signal to the circuit wiring on the circuit board, wherein the inspection signal is transmitted to the circuit wiring by contacting the circuit wiring. Multiple probes to receive,
A jig having a sensor for receiving the test signal transmitted to the circuit wiring from the circuit wiring in a non-contact manner, a jig that generates the test signal, and the test signal from the probe. A receiving unit for receiving, a switching unit for switching the probe to be transmitted or received of the test signal and connecting to the signal generating unit or the receiving unit, respectively, a transmitting / receiving unit having: Receiving means for receiving the test signal, processing means for controlling the transmitting / receiving means and the receiving means, and outputting a test result of the circuit wiring based on the test signal received by the transmitting / receiving means or the receiving means And an inspection device characterized by comprising:

In this case, the signal generator can generate a time-varying test signal.

According to the present invention, the inspection signal is supplied to the circuit wiring on the circuit board, so that the inspection signal is transmitted or received in contact with the circuit wiring in order to inspect the circuit wiring. A jig having a plurality of probes, a signal generating unit for generating the inspection signal, a receiving unit for receiving the inspection signal from the probe, and switching the probe as a transmission or reception target of the inspection signal. A switching unit for connecting to the signal generating unit or the receiving unit, respectively, and a transmitting and receiving unit, and a testing unit used for a testing device comprising: A sensor for receiving the transmitted inspection signal in a non-contact manner, a receiving unit for receiving the inspection signal from the sensor, a transmission / reception unit, and controlling the transmission / reception unit. With, on the basis of the transmission and reception means or the test signal received by the receiving unit, the inspection unit, characterized by comprising a processing means for outputting a test result of the circuit wiring is provided.

Further, according to the present invention, the inspection signal is supplied to the circuit wiring on the circuit board, so that the inspection signal is transmitted or received in contact with the circuit wiring in order to inspect the circuit wiring. A jig having a plurality of probes, a signal generating unit for generating the inspection signal, a receiving unit for receiving the inspection signal from the probe, and switching the probe as a transmission or reception target of the inspection signal. A transmission / reception unit having a switching unit for connecting to the signal generation unit or the reception unit, and controlling the transmission / reception unit, and based on the test signal received by the transmission / reception unit, Processing means for outputting an inspection result, the inspection unit being attached to an inspection apparatus, wherein the inspection unit is attached to the jig and transmitted to the circuit wiring. A sensor for receiving a non-contact from the circuit wiring No. is controlled by the processing means,
Further, there is provided an inspection unit comprising: a receiving unit that receives the inspection signal from the sensor and sends the received inspection signal to the processing unit.

According to the present invention, the inspection signal is supplied to the circuit wiring of the circuit board, so that the inspection signal is transmitted or received in contact with the circuit wiring in order to inspect the circuit wiring. A jig having a plurality of probes, a signal generating unit for generating the inspection signal, a receiving unit for receiving the inspection signal from the probe, and switching the probe as a transmission or reception target of the inspection signal. A transmission / reception unit having a switching unit connected to the signal generation unit or the reception unit, and controlling the transmission / reception unit, and based on the inspection signal received by the transmission / reception unit, a test result of the circuit wiring. And a computer for outputting a test signal, wherein the test signal transmitted to the circuit wiring is a method for manufacturing a new test device using the test device provided with the test signal. Attaching a sensor for receiving non-contact from the circuit wiring to the jig; connecting a receiving unit for receiving the inspection signal from the sensor to the computer; And a program for outputting a test result of the circuit wiring based on the test signal received by the transmission / reception means or the reception means. A method of manufacturing an inspection apparatus is provided.

[0037]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic diagram of an inspection unit 10 according to one embodiment of the present invention.

The inspection unit 10 is a unit that can be used as a non-contact inspection device by being added to a contact-type inspection device. Hereinafter, a case where the above-described conventional inspection apparatus 100 is used will be described. FIG.
1 is a schematic diagram of a new inspection device A configured by using the inspection unit 10 for the inspection device 100.

Here, the inspection unit 10 includes a jig 101
And a sensor 11 for receiving the inspection signal transmitted to the circuit wiring 201 in a non-contact manner, a generator 12a for generating the inspection signal, and one of the probes 101a to which the inspection signal is transmitted is selected. Unit 12 having a switching unit 12b connected to the generating unit 12a, and a receiving unit 12c for receiving a test signal from the sensor 11.
And a switch 13 for switching between an inspection signal from the transmission / reception unit 102 and an inspection signal from the transmission / reception unit 12 and supplying the inspection signal to the jig 101. Attached to the CDROM 14 is a computer 103 which records a program for controlling the transmission / reception units 12 and 102 and the switch 13 and outputting a test result of the circuit wiring 201 based on a test signal from these units. is there.

As the sensor 11, a known sensor used as a non-contact sensor for inspecting a circuit board can be employed. Such a sensor is formed of, for example, a conductive electrode or the like. The principle that the sensor 11 can receive the inspection signal transmitted to the circuit wiring 201 in a non-contact manner is based on the electromagnetic wave generated based on the inspection signal on the circuit wiring 201, and is as described in the section of the related art. .

In the transmitting / receiving unit 12, the generating unit 12
a generates a test signal as a time-varying electric signal such as a pulse waveform. The receiving unit 12c performs amplification, signal shaping, AD conversion, and the like of the inspection signal from the sensor 11. The switching unit 12b includes a multiplexer, a duplexer, and the like, and connects any one or a plurality of probes 101a to the generation unit 102a as appropriate.

The transmitting / receiving unit 12 may be realized as an interface board inserted into an expansion slot or the like of the computer 103 in some cases.

The switch 13 connects one of the transmission / reception unit 12 and the transmission / reception unit 102 to the jig 101, and is composed of, for example, a relay circuit or the like.

The transmission / reception unit 12 can transmit an inspection signal to the probe 101a of the jig 101 via the switch 13. Note that the inspection signal from the sensor 11 is directly received by the transmission / reception unit 12 without passing through the switch 13.

On the other hand, the transmission / reception unit 102 transmits an inspection signal to the probe 101 a of the jig 101 via the switch 13, and also transmits the jig 1 via the switch 13.
The test signal from the probe 101a can be received.

The switch 13 is connected to the computer 103
The switching operation is performed under the control of the transmission / reception unit 12, but may be controlled by the transmission / reception unit 12.

The CDROM 14 has a transmission / reception unit 102
In this case, a computer program that allows the computer 103 that supports only the communication units to correspond to both the transmission / reception units 12 and 102 is recorded. Also, a program for controlling the switch 13 is included.

Computer 103, transmission / reception unit 10
2, and the jig 101 are as described in the above-mentioned conventional technique. <Manufacturing of inspection apparatus A> The inspection apparatus A is an existing inspection apparatus 1
It can be manufactured by using the inspection unit 10 at 00.

Specifically, first, the sensor 11 of the inspection unit 10 is attached to the jig 101. The attachment position is desirably attached to a portion of the circuit wiring 201 corresponding to the position where the non-contact inspection is to be performed. By attaching the sensor 11 to the existing jig 101 as described above,
Effective use of the jig 101 can be achieved.

Next, the transmitting / receiving unit 102 and the jig 101
And the switch 13 is connected between them. The transmission / reception unit 12 and the switch 13 are connected to the computer 103 so that they can communicate with the computer 103.

The CDROM 14 is stored in the computer 1
03 to the computer 103
To install. It goes without saying that the program can be installed on the computer 103 on a recording medium other than the CDROM.

As described above, the contact type inspection apparatus 100
The inspection apparatus A will be reborn as a non-contact type inspection apparatus, and existing equipment can be effectively used. However, it goes without saying that the inspection apparatus A can be completely newly configured with the same configuration without using the existing inspection apparatus 100. Further, it is not necessary to configure the inspection apparatus A by adopting all the configurations of the existing inspection apparatus 100. For example, in the existing inspection apparatus 100, the transmission / reception unit 10
It is also possible to employ only the jig 101 and the jig 101, and to employ a computer corresponding to both the transmission / reception units 102 and 12 instead of the computer 103. In this case, the transmission / reception unit 12 may be a dedicated unit integrated with the computer.

As the inspection apparatus 100, both a dedicated tester and a universal tester are applicable.

In the inspection apparatus A, the transmission / reception units 102 and 12 are switched by the switch 13, but the switching unit 1
Instead of using 3, any one may be simply selected by a control signal of the computer 103. in this case,
The wiring between each of the units 102 and 12 and the jig 101 is always in an electrically connected state.

Next, an inspection procedure by the inspection apparatus A will be described. <Contact-type inspection> In the case of contact-type inspection, the transmission / reception unit 1
02 and the transmitting / receiving unit 12 is not used.

For this reason, the computer 103 first
A control signal to use the transmission / reception unit 102 is sent to them. Next, the transmission / reception unit 10 is provided to the switch 13.
A control signal for switching the connection between the jig 101 and the jig 101 is transmitted.

Thereafter, a contact-type inspection is performed according to the procedure described in the above prior art. <Non-contact type inspection> In the case of the non-contact type inspection, the transmission / reception unit 12 is used and the transmission / reception unit 12 is not used.

For this reason, the computer 103 first
A control signal to use the transmission / reception unit 12 is sent to them. Next, a control signal for switching the transmission / reception unit 12 and the jig 101 to be connected to the switch 13 is transmitted.

Next, the computer 103 selects the circuit wiring 201 to be inspected, and specifies the probe 101a in contact with the circuit wiring 201.

The computer 103 operates the switching unit 12b so that one of the identified probes 101a is connected to the generating unit 12a, and operates the generating unit 12a.
Starts transmitting / receiving unit 1 so that
2 to send a control signal.

The transmission / reception unit 12 includes the computer 10
3, the switching unit 12b is switched based on the control signal from
In addition, an inspection signal is generated from the generator 12a.

The inspection signal is supplied to the switching unit 12b and the switching unit 13
Is transmitted to the specified probe 101a, and further transmitted from the probe 101a to the circuit wiring 201.

The inspection signal transmitted to the circuit wiring 201 is
The signal appears on the sensor 11 and the signal received by the sensor 11 is sent to the receiving unit 12c. The receiving unit 12c performs signal processing or the like on the inspection signal from the sensor 11, and then sends the signal to the computer 103.

Here, the strength of the inspection signal appearing on the sensor 11 differs depending on whether or not the circuit wiring 201 is disconnected. That is, for example, the circuit wiring 20
If the wire 1 is disconnected, the intensity of the test signal appearing on the sensor 11 becomes smaller than usual.

Based on such characteristics, the computer 103 analyzes the inspection signal from the transmission / reception unit 12 and determines whether or not the circuit wiring 201 is good. The determined test result is output in a form such as display on a display and audio. <Other Embodiments> In the inspection unit 10 described above, the transmission / reception unit 12 has an independent transmission / reception function of the inspection signal. However, the transmission of the inspection signal is performed by the transmission / reception unit 10.
2 are provided in the first place. Therefore, a mode in which the transmission / reception unit 102 always transmits the inspection signal will be described.

FIG. 3 is a schematic view of an inspection unit 20 according to another embodiment of the present invention. FIG. 4 is a schematic diagram of a new inspection apparatus B configured by using the inspection unit 20 for the inspection apparatus 100. Hereinafter, the points different from the inspection unit 10 and the inspection apparatus A described above will be mainly described.

The inspection unit 20 includes a sensor 21 and a receiving unit 22. In addition, the computer 103 includes the receiving unit 22 and the transmitting / receiving unit 1.
There is a CDROM 23 in which a program for controlling the operation of the test circuit 02 and outputting the test result of the circuit wiring 201 based on the test signal from the control program 02 is recorded.

The sensor 21 is the same as the sensor 11 described above.

The receiving unit 22 has a function corresponding to the function of the receiving unit 12c of the transmitting / receiving unit 12 described above.
It performs signal shaping, AD conversion, and the like.

The inspection unit 20 does not require the switch 13 as in the inspection unit 10. <Manufacture of Inspection Apparatus B> The inspection apparatus B can be manufactured by using the inspection unit 20 in the existing inspection apparatus 100 similarly to the inspection apparatus A.

That is, first, the sensor 21 of the inspection unit 20 is attached to the jig 101.

Next, the receiving unit 22 is connected to the computer 1
03, and can communicate with the computer 103.

Then, the CDROM 23 is stored in the computer 1
03 to the computer 103
To install.

As described above, the contact type inspection apparatus 100
It will be reborn as an inspection device B that enables non-contact type inspection.

Next, an inspection procedure by the inspection apparatus B will be described. <Contact-type inspection> In the case of contact-type inspection, the transmission / reception unit 1
02 and the receiving unit 22 is not used. The contact-type inspection is performed according to the procedure described in the above-described related art. <Non-contact type inspection> In the case of a non-contact type inspection, both the transmission / reception unit 102 and the reception unit 22 are used. In this case, the transmitting / receiving unit 102 functions for transmitting the inspection signal.

For this reason, the computer 103 first
A control signal for executing a non-contact type inspection is transmitted to the transmission / reception unit 102 and the reception unit 22.

Next, the computer 103 selects the circuit wiring 201 to be inspected, and specifies the probe 101a in contact with the circuit wiring 201.

The computer 103 operates the switching unit 102b so that one of the identified probes 101a is connected to the generating unit 102a, and operates the generating unit 1
2a sends a control signal to the transmitting / receiving unit 102 so as to start generating a test signal. The test signal in this case needs to be a signal that changes with time. The generating unit 1
Even if the test signal 2a outputs only a single-waveform test signal, the output can be repeatedly turned on / off by the computer 103 to generate a time-varying signal.

The transmission / reception unit 102 is connected to the computer 1
The switching unit 102b is switched based on the control signal from the control unit 03, and an inspection signal is generated from the generation unit 102a.

The inspection signal is transmitted to the specified probe 101a through the switching unit 102b, and further transmitted from the probe 101a to the circuit wiring 201.

The inspection signal transmitted to the circuit wiring 201 is
The signal appears on the sensor 21, and the signal received by the sensor 21 is sent to the receiving unit 22. The receiving unit 22 performs signal processing and the like on the inspection signal from the sensor 21, and then sends it to the computer 103.

The computer 103 includes the receiving unit 22
Is analyzed to determine the quality of the circuit wiring 201. The determined test result is output in a form such as display on a display and audio.

As described above, according to the inspection unit 20 and the inspection device B, there is an advantage that the configuration is simpler and the cost can be reduced compared to the inspection unit 10 and the inspection device A.
Other advantages and variations of the embodiment are the same as those of the inspection unit 11 and the inspection apparatus A.

[0085]

As described above, according to the present invention,
A contact-type inspection and a non-contact-type inspection can be performed.

Further, according to the present invention, a non-contact type inspection can be performed by utilizing an existing contact type inspection apparatus.

[Brief description of the drawings]

FIG. 1 is a schematic diagram of an inspection unit 10 according to an embodiment of the present invention.

FIG. 2 is a schematic diagram of an inspection device A.

FIG. 3 shows an inspection unit 20 according to another embodiment of the present invention.
FIG.

FIG. 4 is a schematic diagram of an inspection device B.

FIG. 5 is a schematic diagram of a conventional inspection apparatus 100.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H05K 3/00 G01R 31/28 L F-term (Reference) 2G011 AA01 AC03 AC04 AC05 AC09 AE01 2G014 AA02 AA13 AB59 AC10 AC15 AC18 2G032 AD08 AE08 AE09 AE10 AE12 AF02 AF07 AG01 AK04 9A001 BB05 JJ45 JJ49 KK54 LL05

Claims (12)

[Claims] 1. An inspection apparatus for inspecting a circuit wiring by supplying an inspection signal to circuit wiring of a circuit board, wherein a plurality of test signals for transmitting or receiving the inspection signal by contacting the circuit wiring are provided. A jig including a probe, a sensor for receiving the inspection signal transmitted to the circuit wiring from the circuit wiring in a non-contact manner, a first signal generation unit that generates the inspection signal, and the probe A first receiving unit for receiving the test signal from the first and a probe for transmitting or receiving the test signal, for connection to the first signal generating unit or the first receiving unit, respectively. And a first switching unit of
Transmitting and receiving means, a second signal generating unit for generating the test signal, a second receiving unit for receiving the test signal from the sensor, and switching the probe to which the test signal is to be transmitted. A second switching unit for connecting to the second signal generation unit;
A second transmission / reception unit having: and controlling the first transmission / reception unit and the second transmission / reception unit, and based on the test signal received by the first transmission / reception unit or the second transmission / reception unit, A testing unit for outputting a test result of the circuit wiring. 2. The test signal generated by the first signal generator of the first transceiver, the test signal generated by the second signal generator of the second transceiver,
The inspection apparatus according to claim 1, further comprising: switching means for switching and supplying the jig to the jig. 3. The inspection apparatus according to claim 1, wherein the second signal generator generates a time-varying inspection signal. 4. A plurality of probes for transmitting or receiving the inspection signal by contacting the circuit wiring to test the circuit wiring by supplying an inspection signal to the circuit wiring of the circuit board. A jig, a first signal generator that generates the test signal, a first receiver that receives the test signal from the probe, and the probe that is a transmission or reception target of the test signal. And a first switching unit for connecting to the first signal generating unit or the first receiving unit, respectively.
A transmission / reception means, comprising: a sensor attached to the jig, for receiving the inspection signal transmitted to the circuit wiring from the circuit wiring in a non-contact manner; A second signal generator that generates the test signal, a second receiver that receives the test signal from the sensor, and the second probe that switches the probe to be transmitted with the test signal. A second switching unit for connecting to the signal generating unit;
A second transmission / reception unit having: and controlling the first transmission / reception unit and the second transmission / reception unit, and based on the test signal received by the first transmission / reception unit or the second transmission / reception unit, A test unit for outputting a test result of the circuit wiring. 5. A plurality of probes for transmitting or receiving the inspection signal by contacting the circuit wiring to test the circuit wiring by supplying an inspection signal to the circuit wiring on the circuit board. A jig, a first signal generator that generates the test signal, a first receiver that receives the test signal from the probe, and the probe that is a transmission or reception target of the test signal. And a first switching unit for connecting to the first signal generating unit or the first receiving unit, respectively.
A transmission / reception means, and a processing means for controlling the first transmission / reception means and outputting a test result of the circuit wiring based on the test signal received by the first transmission / reception means. A sensor attached to the jig for receiving the inspection signal transmitted to the circuit wiring from the circuit wiring in a non-contact manner, and a second sensor for generating the inspection signal. A signal generator, a second receiver for receiving the test signal from the sensor, and a second for switching the probe to be transmitted with the test signal and connecting to the second signal generator. A switching unit,
And controlled by the processing means, and the second
And a second transmitting / receiving means for transmitting the test signal received by the receiving unit to the processing means. 6. The test signal generated by the first signal generator of the first transceiver, the test signal generated by the second signal generator of the second transceiver,
The inspection unit according to claim 4, further comprising: a switching unit configured to switch and supply the jig to the jig. 7. A plurality of probes for transmitting or receiving the inspection signal by contacting the circuit wiring for inspecting the circuit wiring by supplying an inspection signal to the circuit wiring of the circuit board. A jig, a first signal generator that generates the test signal, a first receiver that receives the test signal from the probe, and the probe that is a transmission or reception target of the test signal. And a first switching unit for connecting to the first signal generating unit or the first receiving unit, respectively.
And a computer that controls the first transmitting / receiving means and outputs a test result of the circuit wiring based on the test signal received by the first transmitting / receiving means. A method of manufacturing an inspection apparatus for manufacturing a new inspection apparatus by using a method for attaching a sensor for receiving the inspection signal transmitted to the circuit wiring from the circuit wiring in a non-contact manner, to the jig, A second signal generator that generates the test signal; a second receiver that receives the test signal from the sensor; and a second signal that switches the probe to which the test signal is to be transmitted. Connecting a second transmission / reception unit having a second switching unit for connection to the generation unit to the computer; and transmitting the first transmission / reception unit and the second transmission / reception to the computer. Incorporating a program for controlling communication means and a program for outputting a test result of the circuit wiring based on the test signal received by the first transmitting / receiving means or the second transmitting / receiving means. A method for manufacturing an inspection apparatus, comprising: 8. An inspection apparatus for inspecting the circuit wiring by supplying an inspection signal to circuit wiring on a circuit board, wherein a plurality of test signals for transmitting or receiving the inspection signal by contacting the circuit wiring are provided. A jig including a probe, and a sensor for receiving the inspection signal transmitted to the circuit wiring from the circuit wiring in a non-contact manner; a signal generating unit that generates the inspection signal; and A receiving unit for receiving a test signal, and a switching unit for switching the probe to be transmitted or received for the test signal to connect to the signal generating unit or the receiving unit, respectively, Receiving means for receiving the test signal from a sensor; controlling the transmitting / receiving means and the receiving means; and controlling the test signal received by the transmitting / receiving means or the receiving means. Zui, the test apparatus characterized by comprising a processing means for outputting a test result of the circuit wiring. 9. The inspection apparatus according to claim 8, wherein the signal generation unit generates an inspection signal that changes with time. 10. A plurality of probes for transmitting or receiving the inspection signal by contacting the circuit wiring to test the circuit wiring by supplying an inspection signal to the circuit wiring on the circuit board. A jig, a signal generation unit that generates the inspection signal, a reception unit that receives the inspection signal from the probe, and the signal generation unit that switches the probe that is a transmission or reception target of the inspection signal. A transmission / reception unit having a switching unit for connecting to each of the reception units, wherein the inspection unit is attached to the jig and transmitted to the circuit wiring. A sensor for receiving the contactlessly, receiving means for receiving the inspection signal from the sensor, and controlling the transmitting and receiving means and the transmitting and receiving means,
A test unit that outputs a test result of the circuit wiring based on the test signal received by the transmitting / receiving unit or the receiving unit. 11. A plurality of probes for transmitting or receiving the inspection signal by contacting the circuit wiring for inspecting the circuit wiring by supplying an inspection signal to the circuit wiring on the circuit board. A jig, a signal generation unit that generates the inspection signal, a reception unit that receives the inspection signal from the probe, and the signal generation unit that switches the probe that is a transmission or reception target of the inspection signal. A transmission / reception unit having a switching unit for connecting to the reception unit; and a process of controlling the transmission / reception unit and outputting an inspection result of the circuit wiring based on the inspection signal received by the transmission / reception unit. Means for attaching the inspection signal attached to the jig and transmitted to the circuit wiring to the circuit arrangement. A sensor for receiving the test signal from the sensor in a non-contact manner, and receiving means for receiving the test signal from the sensor and transmitting the received test signal to the processing means. An inspection unit characterized in that: 12. A plurality of probes for transmitting or receiving the test signal by contacting the circuit wiring to test the circuit wiring by supplying a test signal to the circuit wiring on the circuit board. A jig, a signal generation unit that generates the inspection signal, a reception unit that receives the inspection signal from the probe, and the signal generation unit that switches the probe that is a transmission or reception target of the inspection signal. A transmission / reception unit having a switching unit connected to the reception unit, and a computer that controls the transmission / reception unit and outputs a test result of the circuit wiring based on the test signal received by the transmission / reception unit, A method of manufacturing a new inspection apparatus using an inspection apparatus having a method of manufacturing a semiconductor device, comprising: transmitting the inspection signal transmitted to the circuit wiring to the circuit wiring. And attaching a sensor for receiving a non-contact with the jig, the receiving means for receiving the test signal from the sensor,
Connecting to the computer, outputting to the computer a program for controlling the transmission / reception means and the reception means, and an inspection result of the circuit wiring based on the inspection signal received by the transmission / reception means or the reception means And a step of incorporating the program into the inspection apparatus.