JP2001284203A - Semiconductor process flow changing method and semiconductor process flow changing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To shorten the time required for changing a process flow or its processing condition for a plurality of semiconductor process flows. SOLUTION: After a process flow specifying means 14 specifies a process flow to be changed containing a process to be changed to a new process from among a group of process flows, a changeability discriminating means 15 discriminates whether the process to be changed contained in the process flow can be changed to a new process and, when the process is discriminated changeable, a process changing means 16 changes the process, namely, the changeable process to a new process.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor process flow changing method and a semiconductor process flow changing apparatus for changing a process step or a processing condition for a plurality of semiconductor process flows constituted by a plurality of process steps. . In particular, when the present invention is applied to a production management system that manages the development or prototyping of an LSI by repeatedly changing a process step or a processing condition for many semiconductor process flows, a special effect is obtained. .

[0002]

2. Description of the Related Art A conventional semiconductor process flow changing device,
For example, when the processing conditions of the process steps are changed for a plurality of semiconductor process flows using the process flow creation device of JP-A-6-325992, the processing conditions can be changed for each semiconductor process flow. After setting the process steps, it is necessary to change the processing conditions of the process steps for each semiconductor process flow, and to change the processing conditions of the process steps repeatedly for each semiconductor process flow.

Hereinafter, a specific description will be given with reference to a block diagram of a conventional semiconductor process flow changing apparatus shown in FIG.

As shown in FIG. 19, a conventional semiconductor process flow changing device includes a process flow storing means 1, a process flow specifying means 2, a processable process setting means 3, a process changing means 4, and a changed process flow storing means 5. It has.

The process flow accumulating means 1 stores processing conditions of a plurality of process steps in a plurality of semiconductor process flows (hereinafter, referred to as a process flow group) as process flow information in a storage device of a computer in accordance with various purposes. accumulate.

[0006] The process flow designating means 2 designates and extracts a semiconductor process flow from which a processing condition of a process step is to be changed, from a group of process flows.

The processable process setting means 3 designates a process step group capable of changing processing conditions for the semiconductor process flow extracted by the process flow designating means 2 so that the process apparatus corresponding to the process step group can process the semiconductor process flow. Prevent it from being processed.

[0008] The process changing means 4 selects a specific process step from the group of process steps designated by the processable process setting means 3 and changes the processing conditions of the specific process step.

The change process flow accumulating means 5 accumulates, on the storage device of the computer, the processing conditions of the specific process step whose processing conditions have been changed by the process changing means 4 as changed process flow information.

[0010]

However, when a conventional semiconductor process flow changing apparatus is used, a process step group capable of changing processing conditions for each semiconductor process flow is set, and then each semiconductor process flow is changed. Since the processing conditions of the process steps are changed for the flow, the following problems occur. (1) Even when the processing conditions of specific process steps included in a plurality of semiconductor process flows are similarly changed, it is necessary to repeatedly change the processing conditions of specific process steps for each semiconductor process flow. ,
The time required for changing the processing conditions of the process step becomes longer. (2) Before changing the processing conditions of the process steps for each semiconductor process flow, it is necessary to designate a process step group in which the processing conditions can be changed, in other words, a process step group in which processing by the processing device is prohibited. Because
The time required for changing the processing conditions of the process step is further increased.

By the way, in the development stage of LSI,
While the development of LSI processes or devices is being promoted by a plurality of development lots having the same semiconductor process flow, it is often necessary to change the processing conditions of the process steps in the semiconductor process flow based on a number of experimental results. (About several times), and the frequency of changing the processing conditions of the process steps is increasing with the miniaturization of LSIs. Also, at the LSI manufacturing stage, many studies have been made on improving the yield or shortening the manufacturing TAT (Turn Around Time) in order to overcome the intensifying manufacturing competition in recent years. On the other hand, there is an increasing need to simultaneously change the processing conditions of the process steps. Therefore, when a conventional semiconductor process flow changing device is used in the development or manufacturing stage of an LSI, there is a problem that a large amount of time is required to change the processing conditions of the process.

In the above description, the processing conditions of the process steps for a plurality of semiconductor process flows are changed. However, when a conventional semiconductor process flow changing apparatus is used, the process steps for the plurality of semiconductor process flows are not changed. There is a problem that a great deal of time is required for the change.

In view of the above, it is an object of the present invention to reduce the time required for changing process steps or processing conditions for a plurality of semiconductor process flows.

[0014]

In order to achieve the above object, a first semiconductor process flow changing method according to the present invention comprises a plurality of process steps in a plurality of semiconductor process flows constituted by a plurality of process steps. And accumulating the processing conditions as process flow information;
A step of designating a process step to be changed, which is a process step to be changed, from all the process steps of at least one semiconductor process flow of the plurality of semiconductor process flows; A process for designating a new process which is a process to be replaced with a process to be changed, a processing result and a processing schedule of a plurality of process in a plurality of semiconductor process flows, or an operation status of a processing apparatus for processing the process And identifying a process flow to be changed, which is a semiconductor process flow including a process process to be changed to a new process process from a plurality of semiconductor process flows based on the process process to be changed, and Change status of multiple process steps in semiconductor process flow or Based on the change reservation status, a process that determines whether the process steps to be changed included in the process flow to be changed can be changed to new process steps, and changes the process steps to be changed that are determined to be changeable to new process steps And a step of designating processing conditions of the changed new process step, and a step of accumulating the new process step with the designated processing condition and the processing condition as changed process flow information.

According to the first semiconductor process flow changing method, after a process flow to be changed including a process to be changed to a new process is specified from a plurality of semiconductor process flows, the process flow to be changed is specified. It is determined whether or not the change target process step included in the process can be changed to a new process step, and thereafter, the change target process step determined to be changeable is changed to a new process step. Therefore, even when there are a plurality of change target process flows including the change target process steps determined to be changeable, the change target process steps included in the plurality of change target process flows are changed to the new process steps. Since the process steps can be changed collectively, the time required to change the process steps for a plurality of semiconductor process flows can be reduced as compared with the case where the process steps are changed for each individual semiconductor process flow.

Further, according to the first semiconductor process flow changing method, the change target is determined based on the processing results and the processing schedules of a plurality of process steps in the plurality of semiconductor process flows, or the operation status of a processing apparatus for processing the process steps. The process flow is specified. For this reason, it is not necessary to designate a process step group in which processing by the processing apparatus is prohibited before changing the process step for each semiconductor process flow, which is necessary for changing the process steps for a plurality of semiconductor process flows. The time can be further reduced.

In the first semiconductor process flow changing method, the step of determining whether or not the process step to be changed can be changed to a new process step includes the step of changing at least one of a plurality of process steps in the process flow to be changed. If there is, or if a change reservation is set in the processing conditions of the process flow to be changed included in the process flow to be changed, it is determined that the process flow to be changed included in the process flow to be changed cannot be changed to a new process process Preferably, a step is included.

In this manner, it is possible to reliably determine whether or not the process step to be changed included in the process flow to be changed can be changed to a new process step.

In the first method for changing a semiconductor process flow, the step of designating the processing conditions of the new process step is performed in a recipe, a comment, and a processing device, which are processing conditions of the process step to be changed determined to be changeable. Is preferably copied as a processing condition of the new process step.

In this way, the processing conditions of the new process step can be easily specified.

A second semiconductor process flow changing method according to the present invention includes a step of accumulating processing conditions of a plurality of process steps in a plurality of semiconductor process flows composed of a plurality of process steps as process flow information;
A step of designating a process step to be changed, which is a process step for which a process condition is to be changed, from among all process steps of at least one semiconductor process flow of the plurality of semiconductor process flows; A change in which a processing condition should be changed from among a plurality of semiconductor process flows based on a processing result and a processing schedule of a plurality of process steps in a flow or an operation status of a processing apparatus that processes the process step and a process step to be changed. Based on the step of identifying the process flow to be changed, which is the semiconductor process flow including the target process step, and the change target included in the change target process flow based on the change status or change reservation status of multiple process steps in the multiple semiconductor process flows Whether the processing conditions of the process step can be changed The process of determining, the process of changing the processing condition of the process to be changed determined that the process condition can be changed, and the processing condition of the process of the process to be changed whose process condition has been changed are accumulated as the changed process flow information. And a step of performing

According to the second semiconductor process flow changing method, after specifying a process flow to be changed including a process process to be changed from among a plurality of semiconductor process flows, the process flow is changed to the process flow to be changed. It is determined whether the processing conditions of the included process steps to be changed can be changed, and then the processing conditions of the process steps to be changed that are determined to be changeable are changed. Therefore, even when there are a plurality of change target process flows including the change target process flow determined to be capable of changing the processing condition, even if there are a plurality of change target process flows included in the plurality of change target process flows, Since the processing conditions can be changed collectively, the time required to change the processing conditions of the process steps for a plurality of semiconductor process flows can be reduced as compared with the case where the process steps are changed for each individual semiconductor process flow. .

Further, according to the second semiconductor process flow changing method, the change target is changed based on the processing results and the processing schedules of the plurality of process steps in the plurality of semiconductor process flows, or the operation status of the processing apparatus for processing the process steps. The process flow is specified. For this reason, it is not necessary to designate a process step group in which processing by the processing apparatus is prohibited before changing the processing conditions of the process step for each semiconductor process flow. The time required for changing the processing conditions can be further reduced.

In the second method for changing a semiconductor process flow, the step of determining whether the processing conditions of the process step to be changed can be changed is that at least one of a plurality of process steps in the process flow to be changed is being changed. In the case where, or when a change reservation is set in the processing conditions of the process flow to be changed included in the process flow to be changed, the process that determines that the processing conditions of the process flow to be changed included in the process flow to be changed cannot be changed It is preferred to include.

This makes it possible to reliably determine whether the processing conditions of the process step to be changed included in the process flow to be changed can be changed.

In the first or second semiconductor process flow changing method, the step of specifying the process flow to be changed includes the process process to be changed from a plurality of semiconductor process flows, and the process of the process flow to be changed is performed. It is preferable to include a step of specifying a semiconductor process flow that has not been performed yet and in which the processing of the process step to be changed is not performed within a predetermined time as a process flow to be changed.

In this manner, the semiconductor process flow including the process step to be changed to the new process step can be reliably specified as the process flow to be changed.

In this case, the step of specifying the process flow to be changed is performed by extracting a semiconductor process flow including the process process to be changed from a plurality of semiconductor process flows, and then extracting a plurality of semiconductor process flows in the extracted semiconductor process flow. The number of remaining steps, which is the number of process steps from the process step in process to the process step to be changed among the process steps, is calculated, and the extracted semiconductor process flow is determined based on the processing priority of the extracted semiconductor process flow. The number of progresses, which is the number of process steps that can be processed within a certain time, is determined, and then the number of progresses is compared with the number of remaining steps, so that the processing of the process steps to be changed included in the extracted semiconductor process flow is constant. Preferably, the method includes a step of determining whether the operation is performed in time.

In this way, it is possible to reliably determine whether or not the processing of the process step to be changed included in the extracted semiconductor process flow is performed within a predetermined time.

In this case, the step of specifying the process flow to be changed is included in the extracted semiconductor process flow after extracting a semiconductor process flow including the process process to be changed from a plurality of semiconductor process flows. It is preferable to include a step of determining whether or not the processing of the change target process included in the extracted semiconductor process flow is performed within a predetermined time based on the operation status of the processing apparatus that processes the change target process.

In this manner, it is possible to reliably determine whether or not the processing of the process step to be changed included in the extracted semiconductor process flow is performed within a predetermined time.

A first semiconductor process flow changing device according to the present invention is a process flow accumulating means for accumulating a plurality of process steps in a plurality of semiconductor process flows constituted by a plurality of process steps and process conditions thereof as process flow information. A change step designating means for designating a change target process step, which is a process step to be changed, from all the process steps of at least one semiconductor process flow of the plurality of semiconductor process flows; A new process designating unit for designating a new process step which is a process step to be replaced with a process step to be changed from among the process steps, and a processing result and a processing schedule of the plurality of process steps in the plurality of semiconductor process flows or the process step Status of the processing unit that processes A process flow specifying means for specifying a process flow to be changed, which is a semiconductor process flow including a process flow to be changed from a plurality of semiconductor process flows to a new process process based on the process process; Change enable determination means for determining whether a change target process step included in a change target process flow can be changed to a new process step based on a change status or a change reservation status of a plurality of process steps in a process flow, and a change enable determination means Process change means for changing the process step to be changed determined to be changeable to a new process step, new condition specifying means for specifying the processing conditions of the new process step changed by the process change means, and new condition specification New process steps whose processing conditions are specified by means and their processing conditions And a change process flow accumulating means for accumulating a change process flow information.

According to the first semiconductor process flow changing apparatus, the process flow specifying means specifies a change target process flow including a change target process step to be changed to a new process step from a plurality of semiconductor process flows. Then, the change possibility determining means determines whether the change target process step included in the change target process flow can be changed to a new process step, and thereafter, the process change means determines whether the change target process flow can be changed. Change the process to a new process. Therefore, even when there are a plurality of change target process flows including the change target process steps determined to be changeable, the change target process steps included in the plurality of change target process flows are changed to the new process steps. Since the process steps can be changed collectively, the time required to change the process steps for a plurality of semiconductor process flows can be reduced as compared with the case where the process steps are changed for each individual semiconductor process flow.

Further, according to the first semiconductor process flow changing apparatus, the process flow specifying means executes the processing result and the processing schedule of the plurality of process steps in the plurality of semiconductor process flows, or operates the processing apparatus for processing the process steps. The process flow to be changed is specified based on the situation. For this reason, it is not necessary to designate a process step group in which processing by the processing apparatus is prohibited before changing the process step for each semiconductor process flow, which is necessary for changing the process steps for a plurality of semiconductor process flows. The time can be further reduced.

In the first semiconductor process flow changing apparatus, the new condition designating means changes the whole or a part of the processing conditions of the process step to be changed, which is determined to be changeable by the changeable determining means, to the new process step. It is preferable to copy as all or part of the processing conditions.

This makes it possible to easily specify the processing conditions for the new process step.

[0037] A second semiconductor process flow changing device according to the present invention is a process flow accumulating means for accumulating processing conditions of a plurality of process steps in a plurality of semiconductor process flows composed of a plurality of process steps as process flow information. Changing step designating means for designating, among all the process steps of at least one semiconductor process flow of the plurality of semiconductor process flows, a change target process step which is a process step for which a process condition is to be changed; Based on the processing results and processing schedules of a plurality of process steps in a plurality of semiconductor process flows or the operation status of a processing apparatus that processes the process steps, and the process steps to be changed, processing conditions are selected from the plurality of semiconductor process flows. Semiconductors containing the process steps to be changed A process flow specifying means for specifying a process flow to be changed, which is a process flow, and a processing condition of the process flow to be changed included in the process flow to be changed included in the process flow to be changed based on a change status or a change reservation status of a plurality of process processes in a plurality of semiconductor process flows. Changeable determining means for determining whether or not the processing condition can be changed; condition changing means for changing the processing condition of the process object to be changed determined that the processing condition can be changed by the changeable determining means; and condition changing means. A change process flow accumulating unit that accumulates, as change process flow information, the process condition of the change target process step whose process condition has been changed.

According to the second semiconductor process flow changing apparatus, after the process flow specifying means specifies a change target process flow including a change target process step whose processing condition is to be changed from a plurality of semiconductor process flows. The change possibility determining means determines whether the processing condition of the change target process step included in the change target process flow can be changed, and thereafter, the condition changing means determines that the processing condition can be changed. Change the processing conditions of the process step to be changed. For this reason, even when there are a plurality of change target process flows including the change target process flow determined to be capable of changing the processing conditions, the change target processes included in the plurality of change target process flows are included. Since the processing conditions of the processes can be changed collectively, the time required for changing the processing conditions of the process steps for a plurality of semiconductor process flows can be reduced as compared with a case where the process steps are changed for each individual semiconductor process flow. Can be.

Further, according to the second semiconductor process flow changing device, the process flow specifying means can process the plurality of process steps in a plurality of semiconductor process flows and the processing schedule, or operate the processing apparatus for processing the process steps. The process flow to be changed is specified based on the situation. For this reason, it is not necessary to designate a process step group in which processing by the processing apparatus is prohibited before changing the processing conditions of the process step for each semiconductor process flow. The time required for changing the processing conditions can be further reduced.

[0040]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) Hereinafter, a semiconductor process flow changing method and a semiconductor process flow changing apparatus according to a first embodiment of the present invention will be described, for example, by LS
An example in which process steps are changed for a plurality of different semiconductor process flows (hereinafter, referred to as a process flow group) in the development and manufacturing process of I will be described with reference to the drawings.

FIG. 1 is a block diagram of a semiconductor process flow changing apparatus according to the first embodiment, and FIG. 2 is a flowchart of a semiconductor process flow changing method according to the first embodiment.

As shown in FIG. 1, the semiconductor process flow changing device according to the first embodiment comprises a process flow accumulating means 1 for accumulating a plurality of process steps and processing conditions in each semiconductor process flow in a process flow group.
1, a change process designating unit 12 for designating a process process to be changed, which is a process process to be changed, and a new process designating unit 13 for designating a new process process, which is a process process to be replaced with the process process to be changed. A process flow specifying means 14 for specifying, from a group of process flows, a process flow to be changed, which is a semiconductor process flow including a process to be changed to be changed to a new process, a process to be changed included in the process flow to be changed Change enable determination means 15 for determining whether a process step can be changed to a new process step, and process change means 16 for changing a changeable process step, which is a change target process step determined to be changeable, to a new process step When,
New condition specifying means 17 for specifying the processing conditions of the new process step changed by the process changing means 16, new process steps for which the processing conditions are specified by the new condition specifying means 17, and change process flow accumulation for accumulating the processing conditions Means 1
8 is provided.

Hereinafter, a semiconductor process flow changing method performed by using the semiconductor process flow changing apparatus shown in FIG. 1 will be described with reference to FIGS.

First, in step SA1, the process flow accumulating means 11 stores a plurality of process steps and processing conditions in each semiconductor process flow in a process flow group for manufacturing and developing an LSI as process flow information in a computer storage device. Accumulate on top.

Hereinafter, step SA1 will be specifically described with reference to FIG.

In step S11, as shown in FIG. 4, a flow name (name for specifying a semiconductor process flow) is stored in a record of the flow management table having at least the flow name, priority, current process number, and change status as items.
And priority (processing priority of the semiconductor process flow)
It is registered repeatedly as many times as the number of semiconductor process flows in the process flow group.

In step S12, as shown in FIG. 5, at least a flow name, a process number, a process name, a recipe,
In the record of the process condition management table having items such as a comment, a processing device name, and a change reservation status, a flow name, a process number (a number defining a processing order of the process process in the semiconductor process flow), and a process name (a process process is specified) Name), recipe (processing recipe of process step), comment (annotation on processing of process step, etc.) and processing apparatus name (name specifying processing apparatus for processing the process step) are added to the semiconductor process flow in the process flow group. Repeat registration for the number of process steps included. However, in the first embodiment, the processing condition of the process is defined by the process name, recipe, comment, and processing device name registered in the record of the process condition management table.

In step S13, every time the processing of one process step included in one semiconductor process flow is started, a record is extracted from the flow management table using the flow name of one semiconductor process flow as a search key, The current process number (the process number of one process process that has started processing) is registered in the current process number field of the record. That is, the process flow accumulating unit 11 accumulates the processing status of each process step in each semiconductor process flow in the process flow group as process processing result information on a storage device of the computer.

In step S14, every time a change in one process step or its processing condition included in one semiconductor process flow is started, a record is read from the flow management table using the flow name of one semiconductor process flow as a search key. The value “changed” indicating that the process step or its processing condition has been changed is registered in the change status item of the record. Further, at the time when the change of the process step or its processing condition is completed, a record is extracted from the flow management table using the flow name of one semiconductor process flow as a search key and registered in the item of the change status of the record. Delete the value "changing". That is, the process flow accumulating unit 11 accumulates the change status of each semiconductor process flow in the process flow group as flow change information on the storage device of the computer.

At step S15, when a change reservation is made for the processing condition of one process step included in one semiconductor process flow, the flow name of one semiconductor process flow and the process number of one process step Is used as a search key, a record is extracted from the process condition management table, and in the item of the change reservation status of the record, a value “change reservation” indicating that a change reservation is made for the processing condition of one process step Is registered. Further, at the time when the change of the processing condition of one process step is completed, a record is extracted from the process condition management table using the flow name of one semiconductor process flow and the process number of one process step as search keys, and Delete the value "change reservation" registered in the record change reservation status item. That is,
The process flow accumulating means 11 accumulates, on the storage device of the computer, the change reservation status of each semiconductor process flow in the process flow group as flow change reservation information.

In step S16, each time the operating status of a processing device that processes each process step included in each semiconductor process flow in the process flow group changes, the processing device name (processing device As shown in FIG. 6, a record is extracted from a device operation status management table having at least the processing device name and the operation status as items, and the processing device name is registered in advance, as shown in FIG. Change the value of the record operation status item to “operate” or “stop”. That is, the process flow accumulating means 11 accumulates, on the storage device of the computer, the operation status of the processing device that processes each process step in each semiconductor process flow in the process flow group as device operation information.

In step S17, as shown in FIG. 7, at least the priority and the number of progresses (within a certain period of time in the semiconductor process flow), the processing priority of each semiconductor process flow in the process flow group, that is, the priority is used as a search key. A record is extracted from a progress management table in which the number of process steps that can be processed is registered as an item and the priority is registered in advance. Register the value. However, the registration timing of the progress number is not particularly limited, but the progress timing is changed when the progress number of each semiconductor process flow in the process flow group changes due to introduction or change of the processing device, change of the line operation, trouble of the processing device, or the like. You may register the number. That is, the process flow accumulating means 11 accumulates the number of progress of each semiconductor process flow in the process flow group, that is, the number of progress of each semiconductor process flow for each processing priority, as process process schedule information in the storage device of the computer.

Next, in step SA2, the change step designating means 12 designates a process step to be changed using an input device of a computer.

Specifically, as shown in FIG. 8, in step S21, a list of process names corresponding to all the semiconductor process flows in the process flow group or all the process steps included in the specific semiconductor process flow is stored, for example. After the display on the display device of the computer such as a window, in step S22, the process name of the process step to be changed is designated from the list of process names displayed on the display device using a mouse or the like.

Next, the new process designating means 13 executes step S
In A3, a new process step is specified using an input device of a computer.

Specifically, as shown in FIG. 9, in step S31, similarly to step S21 shown in FIG.
After the process name list is displayed on the display device of the computer, in step S32 shown in FIG. 9, the process name of the new process process is designated from the process name list displayed on the display device using a mouse or the like.

Next, the process flow specifying unit 14 specifies the process processing result information and the process processing schedule information or the device operation information accumulated by the process flow accumulating unit 11 and the changed process specifying unit 12 in step SA4. Based on the change target process step, a change target process flow including a change target process step to be changed to a new process step is specified from the process flow group.

The process flow to be changed is a semiconductor process flow having the following conditions. (1) Includes a process step to be changed specified by the change step specifying means 12. (2) The process step to be changed has not yet been processed by the processing apparatus. (3) Based on the processing priority of the semiconductor process flow or the operating status of the processing apparatus that processes the process step to be changed, it is expected that the process step to be changed will not be processed within a certain time in the future.

Hereinafter, step SA4 will be specifically described with reference to FIG.

In step 41, a record is extracted from the process condition management table shown in FIG. 5 using the process name of the process process to be changed as a search key, and each of the flow name, process number, and processing device name of the record is extracted. Extract the value of an item.

In step 42, the flow name and the process number extracted in step 41 are
A record is extracted from the flow management table shown in (1), and the values of the items of the flow name, priority, and current process number in the record are extracted. However, the search condition for the flow management table is “(flow name extracted in step 41) = (flow name of flow management table)” and “(process number extracted in step 41)> (current of flow management table) Process number) ". The search for the flow management table and the extraction of the flow name, priority, and current process number are repeated as many times as the number of combinations of the flow name and process number extracted in step 41 (that is, the number of records).

In step 43, the current process number extracted in step 42 is subtracted from the process number extracted in step 41 to obtain a semiconductor process flow having the flow name extracted in step 41 (hereinafter referred to as “extraction process flow”). ) (Hereinafter referred to as the number of remaining processes). That is, (remaining process number) = (process number extracted in step 41) − (current process number extracted in step 42).

In step 44, a record is extracted from the progress count management table shown in FIG. 7 using the priority extracted in step 42 as a search key, and the value of the item of the progress count in the record is extracted. However, the search for the progress number management table and the extraction of the progress number are performed in step 42.
Are repeated as many times as the number of priorities extracted in step (1).

In step 45, the number of remaining steps calculated in step 43 is compared with the number of progresses extracted in step 44.

If (number of remaining processes)> (number of progresses), in step 46, the number of process steps to be changed included in the extraction process flow is within a certain period of time (eg, within one hour).
And the extraction process flow is determined to be the process flow to be changed.

If (the number of remaining processes) ≦ (the number of progresses), it is determined in step 47 that the process steps to be changed included in the extraction process flow are processed within a predetermined time, and the extraction process flow is changed to the process to be changed. It is determined that it is not a flow.

In steps 41 to 47 described above, the process flow to be changed is specified based on the process processing result information and the process processing schedule information accumulated by the process flow accumulating means 11. The process flow to be changed can also be specified based on the device operation information accumulated by the process flow accumulation means 11. Hereinafter, a specific description will be given with reference to FIG.

In step 48, a record is extracted from the device operation status management table shown in FIG. 6 by using the processing device name extracted in step 41 as a search key, and the value of the operation status item in the record is extracted. I do. However, the search for the device operation status management table and the extraction of the operation status are repeatedly performed by the number of processing device names extracted in step 41.

In step 49, it is determined whether or not the operation status extracted in step 48 is "stop".

If the operation status extracted in step 48 is “stop”, it is determined in step 46 that the process to be changed included in the extraction process flow is not processed within a predetermined time, and It is determined that the process flow is a process flow to be changed.

If the operation status extracted in step 48 is not “stopped”, it is determined in step 47 that the process to be changed included in the extraction process flow is processed within a certain time, and the extraction process flow It is determined that the process flow is not the change target process flow.

In Steps 41 to 49, it is determined whether or not the process to be changed included in the extraction process flow is processed within a predetermined time based on the process processing result information and the process processing schedule information or the apparatus operation information. At times, a lot scheduler or the like may be used.

Next, in step SA 5, the change possibility determining means 15 determines the process flow to be changed specified by the process flow specifying means 14 based on the flow change information or the flow change reservation information accumulated by the process flow accumulating means 11. It is determined whether or not the change target process included in the process can be changed to the new process specified by the new process specifying means 13.

When the following conditions are satisfied, it is determined that the process step to be changed cannot be changed to a new process step. (1) At least one of the plurality of process steps in the process flow to be changed is in a “changed” state. (2) The processing conditions of the process steps to be changed included in the process flow to be changed are in the “change reservation” state.

Hereinafter, step SA5 will be specifically described with reference to FIG.

In step 51, a record is extracted from the process condition management table shown in FIG. 5 by using the process name of the process step to be changed as a search key, and the values of the items of the flow name and the process number in the record are extracted. Extract.

In step 52, the flow name and the process number extracted in step 51 are used as search keys in FIG.
A record is extracted from the flow management table shown in (1), and the value of each item of the flow name and the change status in the record is extracted. However, the search condition for the flow management table is “(flow name extracted in step 51) = (flow name of flow management table)” and “(process number extracted in step 51)> (current of flow management table) Process number) ". In addition, the search of the flow management table and the extraction of the flow name and the change status are repeated together with the subsequent step 53 by the number of combinations of the flow name and the process number extracted in step 51 (that is, the number of records).

In step 53, it is determined whether or not the change status extracted in step 52 is "change in progress".

If the change status extracted in step 52 is “being changed”, in other words, if the process flow to be changed is in the “changed” state, in step 54, the process flow It is determined that the process step cannot be changed.

If the change status extracted in step 52 is not “being changed”, in other words, if the process flow to be changed is not in the “changed” state, in step 55, the process to be changed included in the process flow to be changed is It is determined that the process can be changed.

In step 56, a record is extracted from the process condition management table shown in FIG. 5 using the process name of the process process to be changed as a search key, and the values of the process name and change reservation status items of the record are extracted. Is extracted.

At step 57, it is determined whether or not the change reservation status extracted at step 56 is "change reservation". However, the change reservation status is determined in step 56.
Are repeated by the number of process names extracted in (i.e., the number of records).

If the change reservation status extracted in step 56 is “change reservation”, in other words, if the change target process step included in the change target process flow is in the “change reservation” state, the process proceeds to step 54. It is determined that the change target process step included in the target process flow cannot be changed.

If the change reservation status extracted in step 56 is not “change reservation”, in other words, if the change target process step included in the change target process flow is not in the “change reservation” state, step 55 It is determined that the change target process step included in the target process flow can be changed.

Next, the process changing means 16 determines in step SA
In FIG. 6, as shown in FIG. 12, a changeable process that is a changeable process that is determined to be changeable by the changeability determination means 15 for the changeable process flow identified by the process flow identification means 14. The step is changed to a new process step specified by the new step specifying means 13.

Next, the new condition specifying means 17 executes step S
In A7, as shown in FIG.
The processing conditions (recipe,
The comment or the processing device name) is specified using an input device of a computer such as a mouse or a keyboard. At this time, the whole or a part of the processing conditions of the changeable process step is set as the whole or a part of the processing condition of the new process step,
Copying may be performed using an input device of a computer.

Next, the change process flow accumulating means 18
In step SA8, the new process step and the processing condition for which the processing condition is specified by the new condition specifying means 17 are stored in the storage device of the computer as changed process flow information.

Specifically, as shown in FIG. 14, in step S81, the process number of the changeable process
A record is extracted from the process condition management table shown in FIG. 5 using the flow name of the process flow to be changed including the changeable process step as a search key, and the process name, recipe, comment or processing device name of the record is extracted. Extract the value of the item. Then, in step S82, the process name extracted in step S81 is updated and registered as the process name of the new process process, or the recipe, comment, or processing device name extracted in step S81 is replaced with the recipe name of the new process process. , A comment or a processing device name. However, the update and registration of the process name, the recipe, the comment, or the processing device name are repeatedly performed by the number of change process flows.

As described above, according to the first embodiment, the process flow specifying means 14 selects, from a group of process flows, a process flow to be changed that includes a process flow to be changed to a new process process. After the identification, the change possibility determination means 15 determines whether or not the change target process step included in the change target process flow can be changed to a new process step.
Changes the change-target process step determined to be changeable, ie, the changeable process step, to a new process step. Therefore, even when there are a plurality of change target process flows including changeable process steps, the changeable process steps included in the plurality of change target process flows can be collectively changed to a new process step. As compared with the case where the process steps are changed for each semiconductor process flow, the time required for changing the process steps for a plurality of semiconductor process flows can be reduced.

Further, according to the first embodiment, the process flow specifying means 14 determines the processing results and the processing schedules of a plurality of process steps in each semiconductor process flow in the process flow group, or the processing apparatus for processing the process steps. The process flow to be changed is specified based on the operating status of the process. For this reason, it is not necessary to designate a process step group in which processing by the processing apparatus is prohibited before changing the process step for each semiconductor process flow, which is necessary for changing the process steps for a plurality of semiconductor process flows. The time can be further reduced.

In the first embodiment, the method of registering, updating, deleting, retrieving, or extracting data in the flow management table, the process condition management table, the progress management table, or the apparatus operation status management table is particularly limited. However, it may be performed using SQL or the like of a DBMS (database management system) or the like.

In the first embodiment, the location where the flow management table, the process condition management table, the progress count management table, or the device operation status management table is created is not particularly limited, but is created on the storage device of the computer. Alternatively, the program may be created in a storage medium on a network accessible by a computer.

In the first embodiment, the process flow storage means 11 stores the process processing result information, the process processing schedule information, the device operation information, the flow change information, or the flow change reservation information. The above information may be stored in advance in a storage device of a computer.

In the first embodiment, when the process flow information and the like are accumulated by the process flow accumulating means 11, the flow management table shown in FIG. 4, the process condition management table shown in FIG. 5, and the progress shown in FIG. Although the number management table or the device operation status management table shown in FIG. 7 is used, a list structure or the like corresponding to each table may be used instead.

In the first embodiment, a recipe, a comment, or a processing device name is used as a processing condition of a process, but the processing condition of the process is not limited to these.

(Second Embodiment) Hereinafter, a semiconductor process flow changing method and a semiconductor process flow changing apparatus according to a second embodiment of the present invention will be described. Hereinafter, a process flow group will be referred to as a process flow group).
This will be described with reference to the drawings.

FIG. 15 is a block diagram of a semiconductor process flow changing apparatus according to the second embodiment, and FIG. 16 is a flowchart of a semiconductor process flow changing method according to the second embodiment.

As shown in FIG. 15, the semiconductor process flow changing device according to the second embodiment has a process flow accumulating means 21 for accumulating processing conditions of a plurality of process steps in each semiconductor process flow in a process flow group.
Change process designating means 22 for designating a process process to be changed, which is a process process to be changed in processing conditions
A process flow specifying unit 23 for specifying a process flow to be changed, which is a semiconductor process flow including a process process to be changed in which a processing condition is to be changed; and changing a processing condition of a process flow to be changed included in the process flow to be changed. Changeable determination means 24 for determining whether or not the processing conditions can be changed, and condition change means 2 for changing the processing conditions of the process step to be changed determined to be capable of changing the processing conditions
5 and a change process flow accumulating means 18 for accumulating the processing conditions of the process steps to be changed whose processing conditions have been changed by the condition changing means 25.

Hereinafter, a semiconductor process flow changing method performed using the semiconductor process flow changing apparatus shown in FIG. 15 will be described with reference to FIGS.

First, in step SB1, the process flow storage means 21 stores the processing conditions of a plurality of process steps in each semiconductor process flow in the process flow group for manufacturing and developing an LSI as process flow information on a storage device of a computer. To accumulate.

The specific processing content of step SB1 is the same as that of step SA1 (step S1) of the first embodiment shown in FIG.
11 to step S17).

That is, the process flow storage means 21
In step SB1, together with the process flow information, process processing result information (the processing status of each process step in each semiconductor process flow in the process flow group)
Flow change information (change status of each semiconductor process flow in the process flow group), flow change reservation information (change reservation status of each semiconductor process flow in the process flow group), device operation information (each semiconductor process in the process flow group) The operation status of the processing device that processes each process step in the flow) and the process processing schedule information (the number of progress of each semiconductor process flow in the process flow group) are stored in the storage device of the computer.

Next, in step SB2, the change step designation means 22 designates a process step to be changed using an input device of a computer.

The specific processing contents of step SB2 are the same as those in step SA2 (step S2) of the first embodiment shown in FIG.
21 to step S22).

Next, the process flow specifying means 23 specified in step SB 3 by the process processing result information and the process processing schedule information or the apparatus operation information accumulated by the process flow accumulating means 21 and the changed process specifying means 22. Based on the change target process step, a change target process flow including a change target process step whose processing condition is to be changed is specified from the process flow group.

The process flow to be changed is a semiconductor process flow having the following conditions. (1) Includes a process step to be changed designated by the change step designation means 22. (2) The process step to be changed has not yet been processed by the processing apparatus. (3) Based on the processing priority of the semiconductor process flow or the operating status of the processing apparatus that processes the process step to be changed, it is expected that the process step to be changed will not be processed within a certain time in the future.

The specific processing content of step SB3 is the same as step SA4 (steps S41 to S49) of the first embodiment shown in FIG.

Next, in step SB 4, the change possibility determining means 24 determines the process flow to be changed specified by the process flow specifying means 23 based on the flow change information or the flow change reservation information accumulated by the process flow accumulating means 21. It is determined whether or not the processing condition of the process step to be changed included in the process can be changed.

When the following conditions are satisfied, it is determined that the processing conditions of the process step to be changed cannot be changed. (1) At least one of the plurality of process steps in the process flow to be changed is in a “changed” state. (2) The processing conditions of the process steps to be changed included in the process flow to be changed are in the “change reservation” state.

The specific processing content of step SB4 is the same as step SA5 (steps S51 to S57) of the first embodiment shown in FIG.

Next, the condition changing means 25 executes step SB.
In FIG. 5, as shown in FIG. 17, in the change-target process step determined by the change-possibility determination means 24 to be capable of changing the processing condition, with respect to the change-target process flow specified by the process-flow specifying means 23. The processing conditions (recipe, comment, or processing device name) of a changeable process step are changed as necessary to a new recipe, comment, or processing device name using a computer input device such as a mouse or a keyboard.

Next, the change process flow accumulating means 26
Accumulates, in step SB6, the processing condition of the changeable process step whose processing condition has been changed by the condition changing means 25 as change process flow information on the storage device of the computer.

Specifically, as shown in FIG. 18, in step S61, the process number of the changeable process
A record is extracted from the process condition management table shown in FIG. 5 using the flow name of the process flow to be changed including the changeable process step as a search key, and the recipe, comment, or item of the processing device name in the record is extracted. Extract the value. Then, in step S62, step S6
The recipe, comment, or processing device name extracted in 1 is updated and registered with a new recipe, comment, or processing device name. However, updating and registration of a recipe, a comment, or a processing device name are repeatedly performed by the number of change process flows.

As described above, according to the second embodiment, the process flow specifying means 23 determines, from the group of process flows, the process flow to be changed that includes the process process to be changed in the processing condition. After identifying,
The changeability determination means 24 determines whether the processing condition of the change target process step included in the change target process flow can be changed, and then the condition change means 25 determines that the processing condition can be changed. The processing conditions of the changed process step to be changed, ie, the changeable process step, are changed. For this reason, even when there are a plurality of change target process flows including the changeable process steps, the processing conditions of the changeable process steps included in the plurality of change target process flows can be changed collectively. Compared with the case where the process steps are changed for each semiconductor process flow, the time required for changing the processing conditions of the process steps for a plurality of semiconductor process flows can be reduced.

Further, according to the second embodiment, the process flow specifying means 23 determines the processing results and the processing schedules of a plurality of process steps in each semiconductor process flow in the process flow group, or the processing apparatus for processing the process steps. The process flow to be changed is specified based on the operating status of the process. For this reason, it is not necessary to designate a process step group in which processing by the processing apparatus is prohibited before changing the processing conditions of the process step for each semiconductor process flow. The time required for changing the processing conditions can be further reduced.

In the second embodiment, methods for registering, updating, deleting, retrieving, or extracting data in the flow management table, the process condition management table, the progress count management table, or the device operation status management table are particularly limited. However, it may be performed using SQL or the like of a DBMS (database management system) or the like.

In the second embodiment, the place where the flow management table, the process condition management table, the progress number management table, or the apparatus operation status management table is created is not particularly limited, but is created on the storage device of the computer. Alternatively, the program may be created in a storage medium on a network accessible by a computer.

In the second embodiment, the process flow storage means 21 stores process process result information, process process schedule information, device operation information, flow change information, or flow change reservation information. The above information may be stored in advance in a storage device of a computer.

In the second embodiment, when process flow information and the like are accumulated by the process flow accumulating means 21, the flow management table shown in FIG. 4, the process condition management table shown in FIG. 5, and the progress shown in FIG. Although the number management table or the device operation status management table shown in FIG. 7 is used, a list structure or the like corresponding to each table may be used instead.

In the second embodiment, a recipe, a comment, or a processing apparatus name is used as a processing condition of a process, but the processing condition of the process is not limited to these.

[0121]

According to the present invention, specific process steps or their processing conditions included in a plurality of semiconductor process flows can be changed collectively, and the process steps or their processing conditions can be changed for each semiconductor process flow. Since it is not necessary to specify a process step group in which the processing by the processing apparatus is prohibited before performing the process, the time required for changing the process steps or the processing conditions for a plurality of semiconductor process flows can be reduced.

[Brief description of the drawings]

FIG. 1 is a block diagram of a semiconductor process flow changing device according to a first embodiment of the present invention.

FIG. 2 is a flowchart of a semiconductor process flow changing method according to the first embodiment of the present invention.

FIG. 3 is a flowchart illustrating each process of a process flow accumulating step in the semiconductor process flow changing method according to the first or second embodiment of the present invention.

FIG. 4 is a diagram showing a flow management table used in the semiconductor process flow changing device and the semiconductor process flow changing method according to the first or second embodiment of the present invention.

FIG. 5 is a diagram showing a process condition management table used in the semiconductor process flow changing device and the semiconductor process flow changing method according to the first or second embodiment of the present invention.

FIG. 6 is a diagram showing an apparatus operation status management table used in the semiconductor process flow changing apparatus and the semiconductor process flow changing method according to the first or second embodiment of the present invention.

FIG. 7 is a diagram showing a progress management table used in the semiconductor process flow changing device and the semiconductor process flow changing method according to the first or second embodiment of the present invention.

FIG. 8 is a flowchart illustrating each process of a change step designating step in the semiconductor process flow changing method according to the first or second embodiment of the present invention.

FIG. 9 is a flowchart illustrating each process of a new process designating step in the semiconductor process flow changing method according to the first embodiment of the present invention.

FIG. 10 is a flowchart illustrating each process of a process flow specifying step in the semiconductor process flow changing method according to the first or second embodiment of the present invention.

FIG. 11 is a flowchart illustrating each process of a changeability determination step in the semiconductor process flow changing method according to the first or second embodiment of the present invention.

FIG. 12 is a diagram illustrating a process changing step in the semiconductor process flow changing method according to the first embodiment of the present invention.

FIG. 13 is a diagram illustrating a new condition specifying step in the semiconductor process flow changing method according to the first embodiment of the present invention.

FIG. 14 is a flowchart illustrating each process of a change process flow accumulating step in the semiconductor process flow changing method according to the first embodiment of the present invention.

FIG. 15 is a block diagram of a semiconductor process flow changing device according to a second embodiment of the present invention.

FIG. 16 is a flowchart of a semiconductor process flow changing method according to a second embodiment of the present invention.

FIG. 17 is a diagram illustrating a condition changing step in the semiconductor process flow changing method according to the second embodiment of the present invention.

FIG. 18 is a flowchart illustrating each process of a change process flow accumulating step in the semiconductor process flow changing method according to the second embodiment of the present invention.

FIG. 19 is a block diagram of a conventional semiconductor process flow changing device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Process flow accumulation means 12 Change process designation means 13 New process designation means 14 Process flow identification means 15 Change possibility determination means 16 Process change means 17 New condition designation means 18 Change process flow accumulation means 21 Process flow accumulation means 22 Change process designation means 23 process flow specifying means 24 changeable determination means 25 condition changing means 26 changed process flow storage means

Claims (11)

[Claims] A step of accumulating the plurality of process steps and process conditions in a plurality of semiconductor process flows constituted by a plurality of process steps as process flow information; and at least one of the plurality of semiconductor process flows.
A step of specifying a process step to be changed, which is a process step to be changed, from all the process steps of one semiconductor process flow; and replacing the process step to be changed among all the process steps. A process step of designating a new process step, which is a process step to be performed, a processing result and a processing schedule of the plurality of process steps in the plurality of semiconductor process flows, or an operation status of a processing apparatus that processes the process step, and the process to be changed. And identifying a process flow to be changed, which is a semiconductor process flow including the process flow to be changed from the plurality of semiconductor process flows to the new process process, based on the plurality of semiconductor process flows. The change status or change of the plurality of process steps in the process flow A step of determining whether the change-target process step included in the change-target process flow can be changed to the new process step based on a reservation status; and determining the change-target process step determined to be changeable as the new process step. A step of designating processing conditions of the new process step changed to a process step and a step of accumulating the new process step in which the processing conditions are designated and the processing conditions as changed process flow information. A method for changing a semiconductor process flow, characterized in that: Determining whether or not the change target process step can be changed to the new process step, when at least one of the plurality of process steps in the change target process flow is being changed; or ,
When a change reservation is set in the processing condition of the change target process step included in the change target process flow, it is determined that the change target process step included in the change target process flow cannot be changed to the new process step. 2. The method according to claim 1, further comprising the steps of: 3. The step of designating processing conditions of the new process step includes: at least one of a recipe, a comment, and a processing device, which are processing conditions of the change target process step determined to be changeable. 2. The method according to claim 1, further comprising a copying step as a processing condition of the new process step. 4. A step of accumulating processing conditions of the plurality of process steps in a plurality of semiconductor process flows constituted by a plurality of process steps as process flow information;
A step of specifying a process step to be changed, which is a process step to be changed in processing conditions, from all the process steps of one semiconductor process flow; and processing of the plurality of process steps in the plurality of semiconductor process flows Based on a result and a processing schedule or an operating status of a processing apparatus that processes the process step, and the change target process step, the plurality of semiconductor process flows include the change target process step for changing a processing condition. Identifying a process flow to be changed, which is a semiconductor process flow to be changed; and, based on a change status or a change reservation status of the plurality of process steps in the plurality of semiconductor process flows, the change target process included in the change target process flow Determines whether the processing conditions of the process can be changed A process, a process of changing the processing condition of the process to be changed determined that the process condition can be changed, and a process of the process to be changed in which the process condition is changed are accumulated as changed process flow information. And a step of changing the semiconductor process flow. 5. The step of determining whether a processing condition of the process step to be changed can be changed, when at least one of the plurality of process steps in the process flow to be changed is being changed, or A step of determining that it is not possible to change the processing condition of the change target process step included in the change target process flow when a change reservation is set in the processing condition of the change target process step included in the change target process flow 5. The method according to claim 4, wherein the process flow is changed. 6. The step of specifying the change-target process flow includes the change-target process step from the plurality of semiconductor process flows, and the processing of the change-target process step has not been performed, and 5. The semiconductor process flow changing method according to claim 1, further comprising the step of specifying, as the change target process flow, a semiconductor process flow in which the processing of the change target process step is not performed within a predetermined time. 7. The step of identifying the process flow to be changed includes extracting a semiconductor process flow including the process process to be changed from the plurality of semiconductor process flows, and then extracting the plurality of semiconductor process flows in the extracted semiconductor process flow. The number of remaining steps, which is the number of process steps from the process step being processed to the process step to be changed among the process steps, is calculated, and based on the processing priority of the extracted semiconductor process flow, the extracted Determine the progress number, which is the number of process steps that can be processed within a certain time in the semiconductor process flow, and then compare the progress number with the remaining number of steps to obtain the change included in the extracted semiconductor process flow. It includes a step of determining whether the processing of the target process is performed within a certain time. 7. The method according to claim 6, wherein the process flow is changed. 8. The step of identifying the process flow to be changed is included in the extracted semiconductor process flow after extracting a semiconductor process flow including the process process to be changed from the plurality of semiconductor process flows. A step of determining whether or not the processing of the change target process included in the extracted semiconductor process flow is performed within a predetermined time, based on an operation state of a processing apparatus that processes the change target process. 7. The method according to claim 6, wherein the process flow is changed. 9. A process flow accumulating means for accumulating the plurality of process steps and processing conditions thereof as process flow information in a plurality of semiconductor process flows constituted by a plurality of process steps; At least one
Change step designating means for designating a change target process step, which is a process step to be changed, from all the process steps of one semiconductor process flow; and the change target process step among all the process steps New process designating means for designating a new process process which is a process process to be replaced with: a processing result and a processing schedule of the plurality of process processes in the plurality of semiconductor process flows, or an operation status of a processing apparatus for processing the process process And a process of identifying a process flow to be changed, which is a semiconductor process flow including the process process to be changed to the new process process, from the plurality of semiconductor process flows based on the process process to be changed. Flow identification means, and the plurality of semiconductor process flows Change-possible determination means for determining whether the change-target process step included in the change-target process flow can be changed to the new process step based on a change status or a change reservation status of the plurality of process steps; A step changing means for changing the process step to be changed determined to be changeable by the determining means to the new process step; and a new condition designation for designating processing conditions of the new process step changed by the step changing means. And a change process flow accumulating means for accumulating, as change process flow information, the new process step in which the process condition is specified by the new condition specifying means and change process flow information. apparatus. 10. The new condition designating means, for changing all or a part of the processing conditions of the process subject to change determined to be changeable by the changeability determining means, as a whole of the processing conditions of the new process. 10. The semiconductor process flow changing apparatus according to claim 9, wherein copying is performed as a part or a part. 11. Process flow accumulating means for accumulating processing conditions of the plurality of process steps in a plurality of semiconductor process flows constituted by a plurality of process steps as process flow information, and at least one of the plurality of semiconductor process flows. 1
Change step designating means for designating, among all the process steps of one semiconductor process flow, a process step to be changed, which is a process step for which a process condition is to be changed; and the plurality of processes in the plurality of semiconductor process flows The change target process for which a processing condition is to be changed from the plurality of semiconductor process flows based on a processing result and a processing schedule of a process or an operation status of a processing apparatus that processes the process step and the change target process step. A process flow specifying unit that specifies a process flow to be changed, which is a semiconductor process flow including a process; and a change status or a change reservation status of the plurality of process steps in the plurality of semiconductor process flows; The processing conditions of the process to be changed included Changeable determining means for determining whether or not the processing condition can be changed; condition changing means for changing the processing condition of the process to be changed which is determined to be changeable by the changeable determining means; and And a change process flow accumulating means for accumulating, as change process flow information, processing conditions of the process step to be changed, the processing conditions of which are changed by the changing means.