JP2001276561A - Discharge apparatus equipped with honeycomb structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrode structure for generating pulse discharge over the whole of a honeycomb structure, in a discharge apparatus capable of efficiently decomposing a harmful substance contained in exhaust gas, which flows through the through-holes of the honeycomb structure, to a harmless substance by pulse discharge plasma generated along the through-holes. SOLUTION: The electrodes provided to both end surfaces of the electric insulating honeycomb structure are connected to a pulse power supply to generate pulse discharge plasma along the through-holes of the honeycomb structure and exhaust gas is passed through the through-holes to be reacted with high energy electrons or radicals formed in the pulse discharge plasma to decompose a harmful substance. A non-uniform electric field forming electrode, which intentionally generates non-uniform electric field distribution on at least one end surface of the honeycomb structure partially on the whole and also generates a large number of pulse streamers at the same time, is provided to at least one end surface of the honeycomb structure so as to generate discharge over the whole of the honeycomb structure.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrically insulating honeycomb structure having a plurality of through-holes extending from a first end face to a second end face formed in parallel with each other, and first and second honeycomb structures. 2 and a first electrode for applying a pulse voltage for generating a discharge plasma along the through hole.

[0002]

BACKGROUND ART Exhaust gas discharged from the combustion furnace incinerators of urban waste incinerators and industrial waste includes various harmful substances but, NO _x, recently in addition of the SO _x Is attracting attention as dioxin is a harmful substance. It is important to reduce these harmful substances to a safe level or less and then discharge them to the atmosphere. For this purpose, various treatment methods have been proposed.

[0003] However, all of the conventional proposals have drawbacks such as large-scale equipment, low processing efficiency, high running cost, and troublesome maintenance. There is a problem. For example, many incinerators use electric dust collectors, but they are considered to be one of the sources of dioxin, and bag filters have been used instead of electric dust collectors. Is poor in durability and troublesome in maintenance.

In order to reduce such a drawback, electrons generated by corona discharge or dielectric barrier discharge are reacted with the above-mentioned harmful substances to convert them into harmless substances or to promote trapping. Proposed. For example, as shown in FIG. 1, a wire electrode 2 is provided at the center of a conductive pipe 1 called a coaxial cylindrical reaction vessel, and a pulse power source 3 is connected between these pipes and the wire electrode. to generate a corona discharge within the exhaust gas flow from one end of the pipe 1 to the other, radicals or accelerated electrons dioxin and NO _x and SO generated by corona discharge
It is known that it reacts with _x to decompose and transform into harmless substances.

As a modification of the above-mentioned exhaust gas processing method using pulse discharge plasma, a method using a dielectric barrier discharge as shown in FIG. 2 has been proposed. In this method, a pipe 4 made of a dielectric material is provided on the inner periphery of a pipe 1 made of a conductive material, and a wire electrode 2 is arranged at the center of the dielectric pipe. In this case, an AC power supply 5 is connected between the conductive pipe 1 and the wire electrode 2 to cause a barrier discharge.

In such a conventional exhaust gas treatment method, since the wire electrode is disposed at the center of the fluid passage having a relatively large cross-sectional area, the problem that the discharge plasma is not uniformly generated over the space where the fluid flows. There is. For example, in the example shown in FIG. 1, the discharge plasma is concentrated only around the wire electrode 2 as shown in FIGS. 3 and 4, and the discharge plasma outside the wire electrode is very weak. When the discharge plasma is localized in the fluid passage as described above, there is a problem that the probability that a specific substance contained in the fluid reacts with the electrons generated by the plasma is low, and the processing efficiency is low.

Further, in the above-mentioned conventional material processing method,
Although a pulse power supply or an AC power supply is connected between the two electrodes, for example, a considerably high energy for decomposing dioxin contained in exhaust gas, typically 3 to 10 eV
It is necessary to react with electrons having a certain level of energy, but there is no deep consideration on efficiently generating such high-energy electrons. That is, even if a simple AC voltage is applied between the electrodes, electrons having a desired high energy cannot be efficiently generated. That is, when an AC power supply is used, as shown by the curve A in the graph of FIG. 5, the electrons having the energy of about 1 eV are generated most, but the density of the electrons having the energy of about 5 eV is as follows. Lower. On the other hand, to efficiently decompose dioxin, the density of electrons having an energy of about 3 to 10 eV is low, and the processing efficiency is low.

Further, even when a pulse power source is used, in order to efficiently decompose dioxin, in order to generate electrons having an energy of about 3 to 10 eV, the rising of a voltage pulse generated between discharge electrodes is made steep. It is important to make the pulse width short. For this purpose, it is conceivable to use a pulse power source using a thyratron as an active element. A pulse power supply using a thyratron has the characteristics of a steep rise, a short pulse width, and a large discharge current. Problems, such as a change in the system, which takes time for maintenance. Especially when used in refuse incineration facilities,
It is not suitable in that it consumes a large amount of power in a cathode heater or the like, is expensive in terms of replacement costs, has a short life, and requires a lot of maintenance.

In order to solve such a problem, it is desirable to use a pulse power supply using a semiconductor element having high power efficiency and a semi-permanent life as a switching element. As this semiconductor device, GTO (Gate Turn-off
Thyristor) and IGBT (Insulated Gate Bipolar Tra)
GTO has a very slow rise and a long pulse width. Unless multiple large-scale circuits such as magnetic compression circuits are provided in multiple stages, electrons with the desired energy can be collected at a high density. Cannot be generated. Although the IGBT also has a steeper rise and a shorter pulse width than the GTO, it realizes a pulse rise characteristic sufficient to generate electrons having energy of about 3 to 10 eV at a high density for efficiently decomposing dioxin. It is difficult.

The present applicant has solved or mitigated the various drawbacks of the prior art and efficiently treated a substance by uniformly generating a discharge plasma along a passage through which a fluid containing the substance to be treated passed. And proposes a material processing technique capable of efficiently processing a substance by a pulse discharge plasma that generates electrons having a predetermined high energy at a high density. The present application further proposes a material processing technique capable of generating the above-described pulse discharge plasma for generating electrons having predetermined high energy by a high-speed pulse power supply using a semiconductor element as a switching element. According to such a processing technique, for example, harmful substances such as dioxin contained in exhaust gas discharged from waste incineration equipment can be efficiently decomposed into harmless substances by pulse discharge plasma.

According to the substance processing method developed by the present applicant, discharge plasma is generated inside an electrically insulating honeycomb structure having a plurality of through holes through which a fluid containing a substance to be processed passes, and the discharge plasma passes through the through holes. In this method, a specific substance in a fluid is reacted with radicals generated in the discharge plasma or accelerated electrons.

In such a material treatment method, a gas or a liquid containing a substance to be treated, that is, a fluid is caused to flow along the through-hole of the honeycomb structure, and discharge plasma is generated inside the through-hole. Therefore, the discharge plasma is generated uniformly over the entire cross section of the fluid passage, the probability that the substance reacts with radicals and electrons in the discharge plasma is increased, and the processing efficiency is significantly improved. Accordingly, such materials processing methods can be applied to various applications, in particular urban dioxin and NO _x and SO _x contained in exhaust gas discharged from the incinerator of garbage and industrial waste etc. It is preferable to apply the present invention to a use in which the harmful substance is decomposed into a harmless substance by a reaction with plasma generated inside the honeycomb structure.
In such applications, the discharge plasma generated inside the honeycomb structure is referred to as pulse discharge plasma, and pulse discharge is performed to specifically generate a large amount of high-energy electrons that efficiently decompose harmful substances such as dioxin. Is particularly preferred. This pulse discharge is a pulse corona discharge, but is hereinafter simply referred to as a pulse discharge for simplicity.

[0013]

FIG. 6 shows an example of a discharge device used in the above-described substance processing method proposed by the present applicant. Discharge plasma is formed in a direction parallel to the extending direction of a plurality of through holes 12 formed in a honeycomb structure 11 made of an electrically insulating material as a member constituting a passage through which a substance to be treated passes and constituting a discharge space for generating plasma. In order to apply an electric field, mesh electrodes 13 and 14 are attached to both end faces of the honeycomb structure 11, respectively, and these mesh electrodes are connected to a pulse power supply 15.

The honeycomb structure 11 is made of an insulator such as ceramics, and has through holes 12 at a rate of approximately 5 per square centimeter. Also, the mesh electrode 13
And 14 have a mesh size of 40 mesh. Therefore, the mesh of the mesh electrodes 13 and 14 is much finer than the mesh structure of the through holes 12 formed in the honeycomb structure 11. The length and diameter of the honeycomb structure 11 are 1 to 100 cm and 5 to 20 cm, respectively. The diameter of the inscribed circle of the through hole 12 is selected between 5 and 10 mm.

By using the pulse power supply 15, pulse discharge plasma is generated in the through-hole 12 of the honeycomb structure 11. However, the pulse power supply 15 can effectively decompose dioxin into the pulse discharge plasma. It is configured to specifically generate high-energy electrons and radicals having energy at a high density.

By using such a pulse power supply 15, as shown by a curve B in FIG. 5 showing the relationship between the energy and density of electrons generated in the pulse discharge plasma,
Electrons having a high energy of about 3 to 10 eV, which can efficiently decompose dioxin, can be generated at a high density, so that the processing efficiency can be significantly improved.

As described above, the pulse power supply 16 for generating electrons having a high energy of about 3 to 10 eV capable of efficiently decomposing dioxin at a high density has a pulse current rising characteristic of 5 × 10 ¹⁰ amps / sec or more. It preferably has a sharp characteristic of 1 × 10 ¹¹ amps / sec or more, consumes little energy, and has a power consumption of 10 to 70 KV.
It is preferable to use a pulse power supply which has a high voltage and can make the current at the time of conduction several thousand amperes. The voltage rise rate of the pulse voltage generated between the discharge electrodes by such a power supply is about 1 × 10 ¹² V / s. It is preferable that the pulse width be several nanoseconds to several hundred nanoseconds. As a pulse power supply that can output such a pulse discharge, a power supply using a thyratron as a switching device is conceivable, but it becomes large, consumes a large amount of power, has a high cost, has a short life, and requires maintenance such as replacement. Is also troublesome.

In order to solve such a drawback, a pulse power supply using an electrostatic induction thyristor as a switching element is used as the pulse power supply 15. Such an electrostatic induction thyristor has a steep rise and can flow a large current. Of course, since the electrostatic induction thyristor is a semiconductor device, it can be miniaturized, consumes very little power, has low cost, has a semi-permanent life, and requires no maintenance. Using a pulse power supply 15 having such an electrostatic induction thyristor as an active element, a pulse having a voltage amplitude of about 10 to 70 kV and a repetition frequency of about several kHz to about 10 kHz is generated.

FIG. 7 shows the configuration of another example of the discharge device proposed by the present applicant. In this example, the electrodes 13 and 14 connected to the pulse power source 15 are connected to the honeycomb structure 1.
1 is formed with a conductive layer attached to both end surfaces facing each other. By thus forming the electrodes 13 and 14 with the conductive layer adhered to the end face of the honeycomb structure 11, the opening of the through hole 12 is not blocked by the electrode. Further, the mesh of the electrodes 13 and 14 is the same as the mesh of the through hole 12 of the honeycomb structure 11.

In the above-described discharge device shown in FIGS. 6 and 7, a pulse corona discharge occurs along the through-hole 12 of the honeycomb structure 11, so that the region where the gas to be treated comes into contact with the discharge plasma is widened, It is possible to efficiently decompose the harmful substances therein and convert them to harmless substances or substances that can be easily captured. However, it was confirmed that such discharge did not occur over the entire inside of the honeycomb structure 11, and that the discharge location was unevenly distributed in the peripheral portion as shown in FIG. At the site where the discharge occurs, the discharge occurs over the entire length of the inner wall of the through hole 12 of the honeycomb structure 11, so that the harmful substance can be efficiently decomposed. However, only the site where no discharge occurs or only the weak discharge occurs No effective processing is performed in a part where the processing is not performed.

The reason why the discharge is unevenly distributed in the peripheral portion cannot be sufficiently clarified because of the complexity of the discharge mechanism. However, when a pulse voltage is applied between the electrodes 13 and 14, the electrode is not located outside the peripheral portion. The electric fields generated by the parts of are equalized by weakening each other's electric fields,
It is considered that this is because a portion where the electric field is concentrated occurs around the electrode. As described above, in the discharge device using the honeycomb structure and arranging electrodes having meshes equal to or smaller than the mesh of the through holes 12 of the honeycomb structure 11 on both end surfaces, the entire honeycomb structure is provided. As a result, there is a problem that no electric discharge occurs and therefore the gas processing capacity does not become so high.

Therefore, an object of the present invention is to solve the above-mentioned problems, to generate a discharge uniformly over the entire honeycomb structure, and to discharge a predetermined substance more efficiently. It is intended to provide a device.

[0023]

An electric discharge device according to the present invention comprises an electrically insulating honeycomb structure having a plurality of through-holes extending from a first end face to a second end face formed in parallel with each other, and this honeycomb structure. A first and a second electrode disposed on the first and second end faces, and a pulse power supply for applying a pulse voltage for generating a discharge plasma along the through hole to the electrodes. At least one of the first and second electrodes generates a partially uneven electric field distribution over the entire surface when a pulse voltage is applied, and a large number of pulse streamers are simultaneously generated in almost the entire honeycomb structure. An uneven electric field generating electrode having such a structure as to cause the uneven electric field generation.

In such a discharge device of the present invention,
The uneven electric field generating electrode described above is used as the first electrode of the honeycomb structure.
And the second end face. In this case, the first and second uneven electric field generating electrodes having mutually parallel electrode elements are arranged on the first and second end faces of the honeycomb structure so that the mutually parallel electrode elements are orthogonal to each other. It is preferable to arrange them. Alternatively, in the discharge device according to the present invention, the above-mentioned uneven electric field generating electrode can be arranged only on one end face of the honeycomb structure.

As described above, when at least one of the first and second electrodes of the honeycomb structure is configured as an uneven electric field generating electrode, the uneven electric field is generated when a pulse voltage is applied between the electrodes. It is possible to intentionally distribute the site where a large electric field is generated over the entire end face of the honeycomb structure, and therefore, it is possible to generate a discharge over almost the entire end face.

[0026]

FIG. 9 is a diagram showing a basic configuration of a first embodiment of the discharge device according to the present invention. A plurality of through-holes 22 are formed in a honeycomb structure 21 made of an electrically insulating material in parallel with each other as a member constituting a passage through which a substance to be treated passes and constituting a discharge space for generating plasma. The cross-sectional shape of the through hole 22 is not necessarily limited to a hexagon, but may be a triangle, a quadrangle, a circle, or the like. First end face 2 of honeycomb structure 21
An uneven electric field generating electrode 23 is arranged in 1a. In this example, the uneven electric field generating electrode 23 is connected to a plurality of electrode elements 2.
3a are configured as grid-like electrodes arranged in parallel with each other at a pitch equal to the pitch of the through holes 22 of the honeycomb structure 21, and are present only on the end face of the wall that defines the through holes of the honeycomb structure. Arrange so that it does not straddle the hole. A mesh electrode 24 made of stainless steel is arranged on the second end face 21b of the honeycomb structure 21. The mesh electrode 23 is the same as the mesh electrode shown in FIG. 6 described above, and the mesh is smaller than the mesh of the through hole 22 of the honeycomb structure 21. In this example, such an uneven electric field generating electrode 23 and a mesh electrode 24 were manufactured by processing a stainless steel wire. However, in the present invention, the electrode material is not limited to stainless steel, and the shape is also limited to only the wire. It is not something to be done. Also,
In this example, the mesh of the mesh electrode 24 is finer than the mesh of the honeycomb structure, but may be the same as or coarser than the mesh of the honeycomb structure.

An uneven electric field generating electrode 23 provided on the first and second end faces 21a and 21b of the honeycomb structure 21
The mesh electrode 24 is connected to a pulse power supply 25. The pulse power supply 24 is the same as the pulse power supply 15 shown in FIGS. 6 and 7, and can flow a large pulse current that rapidly rises using an electrostatic induction thyristor as an active element. Of course, since the electrostatic induction thyristor is a semiconductor device, it can be miniaturized, consumes very little power, has low cost, has a semi-permanent life,
Maintenance work is not required. Therefore, the use of a pulse power supply using an electrostatic induction thyristor as an active element is optimal as a pulse power supply when the discharge device according to the present invention is used as a substance processing device. The honeycomb structure 21 is the same as the honeycomb structure 1 shown in FIGS.
As in the case of 1, it is formed of an insulator such as ceramics.

FIG. 10 is a diagram showing a second embodiment of the discharge device according to the present invention. The same parts as those in the previous example are denoted by the same reference numerals as those in the previous example, and detailed description thereof will be omitted. FIG.
In the first embodiment shown in FIG. 1, the uneven electric field generating electrode 23 is arranged on the first end face 21a of the honeycomb structure 21, and the mesh electrode 24 is arranged on the second end face 21b. The second uneven electric field generating electrode 26 is also arranged on the second end surface 21b of the second 22. In this example, the second uneven electric field generating electrode 26 is also an electrode element 26
a are arranged in a lattice pattern arranged in parallel with each other, and are arranged so as to be present only on the end face of the wall defining the through hole 22 of the honeycomb structure 22 and not to extend over the through hole.

FIG. 11 is a diagram showing a third embodiment of the discharge device according to the present invention, in which parts similar to those of the previous example are denoted by the same reference numerals as those of the previous example, and detailed description thereof will be omitted. In this example, the first and second unequal electric field generating electrodes 23 and 26 in the second embodiment shown in FIG. The grid-like electrode elements 23a and 26a are arranged so as to be orthogonal to each other.

As shown in FIGS. 9 to 11 described above, at least the first end face 21a of the honeycomb structure 21 has unequal electric field generating electrodes 24, 2 that intentionally generate an unequal electric field.
When a pulse voltage is applied between the electrodes on both end faces, the concentration of the electric field occurs over almost the entire end face of the honeycomb structure, and a large number of pulse streamers are simultaneously generated between both end faces. As a result, discharge is generated on almost the entire end face of the honeycomb structure. Therefore, a pulse corona discharge is generated throughout the inside of the honeycomb structure 11, and the harmful substances can be efficiently decomposed by a reaction between the pulse discharge plasma and the exhaust gas.

The present invention is not limited to the above-described embodiment, and many modifications and variations are possible. For example, in the embodiment shown in FIGS. 9 to 11, the non-uniform electric field generating electrodes 23 and 26 are manufactured by processing a stainless steel wire. However, the conductive paste is applied to the end face of the honeycomb structure, and the conductive paste is formed. May be attached to the end face of the honeycomb structure.

The non-uniform electric field generating electrode according to the present invention is not limited to the one in which a plurality of electrode elements are arranged in a grid pattern in parallel with each other as in the above-described embodiment.
As shown in FIGS. Here, the unequal electric field generating electrode 31 shown in FIG. 12 has a comb-tooth shape in which electrode elements 31a are arranged in parallel with each other and one end thereof is connected to a base element 31b. The non-uniform electric field generating electrode 32 shown in FIG. 13 has a plurality of electrode elements 32a arranged in parallel with each other, one end of which is connected to a base element 32b and arranged in a comb shape.
In each of a, the electrode elements 32c having a short length are configured to be orthogonally arranged.

The uneven electric field generating electrode 33 shown in FIG.
This is a shape in which one electrode element 33 is folded back in a zigzag shape. The non-uniform electric field generating electrode 34 shown in FIG. 15 is configured such that one electrode element 34 is formed into a rectangular spiral shape. Further, the uneven electric field generating electrode 35 shown in FIGS.
And 36 are one electrode element 35a and 3 respectively.
6a is formed in a bent shape as shown in each drawing.

The non-uniform electric field generating electrode 37 shown in FIG. 18 has a configuration in which a plurality of electrode elements 37a each of which is bent in a flower bed shape are arranged in parallel with each other. The uneven electric field generating electrode 38 shown in FIG. 19 has a plurality of electrode elements 3 each of which is bent in a zigzag shape.
8a are formed in a shape arranged in parallel with each other so that the directions of the concavities and convexities are sequentially reversed. Further, FIG.
The non-uniform electric field generating electrode 39 shown in FIG. 3 is configured such that a plurality of electrode elements 39a arranged in parallel with each other are connected to a base element 39b, and a relatively long element 39c is arranged orthogonal to each electrode element 39a. Things.

Further, in the above-described embodiment, the electrode elements constituting the non-uniform electric field generating electrode have a pitch equal to the pitch of the walls defining the through holes of the honeycomb structure. It may be an integral multiple of the pitch of the wall defining the through hole of the honeycomb structure.

In all of the above-described embodiments,
Although the non-uniform electric field generating electrode is disposed so as to be in close contact with the end face of the honeycomb structure, in the present invention, the non-uniform electric field generating electrode or the mesh electrode may be disposed apart from the end face of the honeycomb structure.

In the various non-uniform electric field generating electrodes according to the present invention described above, the electrodes exist only on the end surfaces of the walls defining the through holes of the honeycomb structure, and are arranged so as not to cross the through holes. With this configuration, discharge occurs over the entire honeycomb structure. However, when the electrode is formed so as to straddle the through hole, discharge occurs only at the intersection between the wall defining the through hole and the electrode element. Is generated, and no discharge occurs over the entire honeycomb structure.

In the above-described embodiment, the discharge device according to the present invention is applied to decompose harmful substances contained in exhaust gas in an incineration facility for municipal waste and industrial waste. It can also be applied to the treatment of exhaust gas, the plasma synthesis of organic compounds, and the deposition of silicon by decomposition of silane. Also, CFCs,
It can also be applied to the treatment of trichlorethylene.

[0039]

As described above, according to the discharge device of the present invention, a non-uniform electric field distribution that is partially partially viewed as a whole is intentionally generated on at least one end face of the honeycomb structure. Since the non-uniform electric field generating electrodes for simultaneously generating the pulse streamers are arranged, when a pulse voltage is applied between the end faces of the honeycomb structure, a pulse corona discharge can be generated on almost the entire end faces.
Therefore, electrons generated in this discharge plasma,
The substance to be treated flowing through the through holes of the honeycomb structure can be effectively reacted, and the treatment efficiency can be improved.

In addition, by using a high-speed pulse power supply using an electrostatic induction thyristor as a switching element as a power supply for generating discharge plasma, high-energy electrons capable of effectively decomposing dioxin in exhaust gas can be selectively supplied to a high density. Thus, dioxin, which has been difficult to decompose in the past, can be decomposed efficiently into harmless substances. Therefore, it is suitable for application to incineration facilities for urban waste and industrial waste. Electrostatic induction thyristors can rapidly start a large current, are small, consume little power, have a semi-permanent life, are easy to maintain, and have low initial costs as well as running costs. it can.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of a conventional exhaust gas treatment apparatus utilizing corona discharge generated using a pipe-shaped electrode and a wire electrode.

FIG. 2 is a diagram showing a configuration of a conventional exhaust gas treatment apparatus using dielectric barrier discharge.

FIG. 3 is a cross-sectional view showing a state of occurrence of corona discharge in the conventional exhaust gas treatment device shown in FIG.

FIG. 4 is a longitudinal sectional view showing a state of occurrence of corona discharge in the conventional exhaust gas treatment device shown in FIG.

FIG. 5 is a graph showing a relationship between energy and density of electrons generated in a conventional high-frequency plasma.

FIG. 6 is a diagram showing a configuration of an example of a discharge device already proposed by the present applicant.

FIG. 7 is a diagram showing the configuration of another example of a discharge device already proposed by the present applicant.

FIG. 8 is a diagram showing a discharge state in a discharge device already proposed by the present applicant.

FIG. 9 is a diagram showing a configuration of a first embodiment of a discharge device according to the present invention.

FIG. 10 is a diagram showing the configuration of a second embodiment of the discharge device according to the present invention.

FIG. 11 is a diagram showing the configuration of a third embodiment of the discharge device according to the present invention.

FIG. 12 is a diagram showing another example of the uneven electric field generation electrode used in the discharge device of the present invention.

FIG. 13 is a diagram showing another example of the uneven electric field generation electrode used in the discharge device of the present invention.

FIG. 14 is a diagram showing another example of the uneven electric field generating electrode used in the discharge device of the present invention.

FIG. 15 is a diagram showing another example of the uneven electric field generating electrode used in the discharge device of the present invention.

FIG. 16 is a diagram showing another example of the uneven electric field generating electrode used in the discharge device of the present invention.

FIG. 17 is a diagram showing another example of the uneven electric field generating electrode used in the discharge device of the present invention.

FIG. 18 is a diagram showing another example of the uneven electric field generating electrode used in the discharge device of the present invention.

FIG. 19 is a diagram showing another example of the uneven electric field generating electrode used in the discharge device of the present invention.

FIG. 20 is a diagram showing another example of the uneven electric field generating electrode used in the discharge device of the present invention.

FIG. 21 is a diagram showing still another example of the uneven electric field generating electrode used in the discharge device of the present invention.

[Explanation of symbols]

Reference Signs List 21 honeycomb structure, 22 through-hole, 23, non-uniform electric field generating electrode, 24 mesh electrode, 25 pulse power supply, 31-39 non-uniform electric field generating electrode

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B01D 53/74 B01D 53/34 122Z B01J 19/08 129C H01T 19/00 (72) Inventor Wataru Shionoya Aichi 2nd 56, Suda-cho, Mizuho-ku, Nagoya-shi Nihon Insulators Co., Ltd. (72) Inventor Takeshi Takeshi 2-56, Suda-cho, Mizuho-ku, Nagoya-shi, Aichi F-term in Nihon Insulators Co., Ltd. 4D002 AA02 AA12 AA21 AC04 BA07 4G075 AA03 AA37 BA05 BD05 CA14 CA18 CA47 EB42 EC21 EE33 FB04 FC15

Claims (6)

[Claims] 1. An electrically insulating honeycomb structure having a plurality of through holes extending from a first end face to a second end face formed in parallel with each other, and disposed on the first and second end faces of the honeycomb structure. First and second electrodes, and a pulse power supply for applying a pulse voltage for generating a discharge plasma along the through-hole to the electrodes, and at least one of the first and second electrodes is provided. , When pulse voltage is applied,
A honeycomb structure characterized by an uneven electric field generating electrode having a structure in which an uneven electric field distribution is partially generated over the entire surface and a large number of pulse streamers are simultaneously generated in almost the entire honeycomb structure. Discharge device with body. 2. The uneven electric field generating electrode according to claim 1, wherein both the first and second electrodes disposed on the first and second end faces of the honeycomb structure are constituted by the non-uniform electric field generating electrodes. Discharge device comprising a honeycomb structure of the above. 3. A first and a second non-uniform electric field generating electrode having electrode elements parallel to each other are provided on the first and second end faces of the honeycomb structure so that the electrode elements parallel to each other are orthogonal to each other. A discharge device comprising the honeycomb structure according to claim 2, wherein the discharge device is arranged. 4. The non-uniform electric field generating electrode according to claim 1, wherein only one of the first and second electrodes disposed on the first and second end faces of the honeycomb structure is constituted by the non-uniform electric field generating electrode. A discharge device comprising the honeycomb structure according to claim 1. 5. A discharge comprising a honeycomb structure according to claim 1, wherein said uneven electric field generating electrode is formed only along an end face of a wall of said honeycomb structure. apparatus. 6. A discharge device comprising a honeycomb structure according to claim 1, wherein said pulse power supply is a high-speed pulse power supply using an electrostatic induction thyristor as an active element.