JP2001271871A - Active vibration control device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To attain weight reduction and miniaturization. SOLUTION: Air springs 64 and 65 are arranged on the upper and lower sides of an added control mass body 63. The air quantity of the air springs 64 is controlled by a servo valve 66a with a feedback signal from a sensor 59, to prevent the vibration of the added control mass body 63. Since the air spring 64 functions as a member for supplying vibration damping force to the added control mass body 63, in addition to serving as a buffer member to a vibration source 62 and the added control mass body 63, miniaturization and weight reduction can be attained, comparing with the case of providing these members separately.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an active vibration isolator and, more particularly, to a small and lightweight active vibration isolator. Here, "vibration isolation" means to cut off the transmission of force from the device that is the source of vibration to its support, and propagate from the floor or other support to the device that dislikes the vibration supported by it. This is a different concept from “vibration isolation”, which means suppressing the vibration.

[0002]

2. Description of the Related Art A passive vibration isolator is known as a vibration isolator for preventing a vibration force generated by a vibrating body (vibration source) such as an engine from being transmitted to a supporting body thereof.
The passive vibration isolator includes a cushioning member having an elastic action and a damping action (damper action), and is arranged between a vibration source and its support. The passive vibration isolation system thus formed is designed so that the natural frequency is lower than the frequency of the vibration source. However, the passive vibration isolator amplifies the vibration near the natural frequency and transmits it to the support when the vibration frequency of the vibration source is extremely low or when the vibration source is subjected to impact vibration. There's a problem.

[0003] Therefore, in recent years, active vibration isolators provided with actuators have been actively developed. As one type of such active vibration isolator, Japanese Patent Laid-Open Publication No. HEI 1 (1999) discloses a device in which an intermediate mass is arranged between a vibration source and a support.
No. 0-252820. JP Hei 10
FIG. 17 shows a schematic structure of an active vibration isolator described in Japanese Patent Application Publication No. 252820.

[0004] The active vibration isolator shown in FIG. 17 includes a support 20 through a spring element 211 and a damper element 212.
1 and a spring element 221 and a damper element 22
Intermediate body 203 connected to vibration source 202 through
And a sensor 204 for detecting vibration of the intermediate mass body 203
And a controller 205 to which a detection signal of the sensor 204 is input, and an actuator coupled only to the intermediate mass body 203 and providing a vibration damping force for canceling vibration of the intermediate mass body 203 based on a control signal from the controller 205 206. According to the active vibration isolator configured as described above, the vibration of the intermediate mass body 203 is suppressed by the actuator 206, so that the support 2
01 can be prevented, the vibration source 202
When the vibration frequency of the support 201 is very low, or when an impact vibration is applied to the vibration source 202, the support 201 can be favorably damped.

[0005]

However, in the active vibration isolator described in the above-mentioned publication, in order to apply a vibration damping force to the intermediate mass body 203 from the actuator 206 coupled only to the intermediate mass body 203, it is necessary to use an actuator. 206 is required to be an active dynamic vibration absorber having a mass of its own (the 39th Automatic Control Alliance Lecture, which was the basis of the application for the application of Patent Law Article 30 (1) of the invention according to the above publication) (See page 191). Therefore, the actuator 206 becomes relatively large, and accordingly, the active vibration isolator also becomes large, causing a problem that its structure becomes complicated and that it cannot be manufactured at low cost.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an active vibration isolator having an intermediate mass that is relatively small, has a simple structure, and can be manufactured at low cost.

[0007]

According to a first aspect of the present invention, there is provided an active vibration isolator which includes an intermediate mass disposed between a vibrating body and a support; It is possible to control a first shock-absorbing member provided on the vibrating body side, a second shock-absorbing member provided on the support side of the intermediate mass body, and a damping force applied to the intermediate mass body. And a damping force control means disposed between the vibrating body and the intermediate mass body and having a coupling portion for coupling the two.

According to the first aspect, the damping force control means has a connecting portion which is arranged between the vibrating body and the intermediate mass body and couples the both, so that the vibration damping force is applied to the intermediate mass body. The inertial force of the vibrating body can be used as a source of damping force to apply a damping force to the intermediate mass body and at the same time to apply a reaction force to the vibrating body. And the connecting portion itself of the damping force control means does not have to have a mass. for that reason,
Since the first cushioning member and the connecting portion can be formed by a common member, the active vibration isolator is relatively lightweight, small-sized and has a simplified structure, and can be manufactured at low cost. Will be possible.

In the first aspect, it is preferable that the first cushioning member and the second cushioning member have both an elastic action and a damping action. In addition, the vibrating body includes not only rotating machines such as engines, pumps, and fans, but also shocking machines such as presses and forging machines, as well as shocking vibrating bodies such as pedestrians and aerobics (or by directly contacting them). Any member such as a member to which vibration is transmitted may be used. According to the present invention, it is possible to perform effective vibration damping especially for an impact vibrating body, which is difficult to perform effective vibration damping with the conventional passive vibration damping device.

Here, four models of the active vibration isolator according to claim 1 (the present invention is not limited to these four models) will be described with reference to FIGS. Will be sequentially described. <Model 1> shown in FIG. 1 shows that the vertical vibration of the vibration source 2
A vibration isolating device for preventing transmission to the first damping member (spring element 2).
1 and the damping element 22). An additional control mass 3 as an intermediate mass is arranged between the support 1 and the vibration source 2. The additional control mass 3 is connected to the support 1 via a second damping element comprising a vertically displaceable spring element 11 and a damping element 12. Further, the additional control mass body 3 is connected to the vibration source 2 via a second buffer member including a spring element 21 and a damping element 22 that can be displaced in the vertical direction.

Further, between the vibration source 2 and the additional control mass body 3, the vibration damping force applied to the additional control mass body 3 can be controlled in the vertical direction, and the vibration source 2 and the additional control mass body 3 can be controlled. A coupling portion 6 is provided which is coupled to both of them. The coupling portion 6 for generating a vibration damping force in the vertical direction includes a vibration damping force control means together with a sensor 4 attached to the additional control mass 3 and a controller 5 for receiving a feedback signal representing a vibration acceleration from the sensor 4. Make up. The damping force control means is attached to the vibration source 2 and generates a feed-forward signal or a feedback signal representing the vibration acceleration, and / or is attached to the support 1 to control the vibration acceleration. It may further comprise a sensor 8 for generating a feedback signal to represent.

[0014] The coupling portion 6 is connected to the controller 5 based on a feedback signal representing the vibration acceleration from the sensor 4 (a feed-forward signal and / or a feedback signal representing the vibration acceleration from the sensors 7 and 8 may be added). With the generated control signal, an operation is performed to apply a vibration damping force to the additional control mass body 3 to cancel the vibration of the additional control mass body 3. As a result, the vibration of the additional control mass body 3 is suppressed, and the transmission of the vibration to the support 1 can be effectively prevented.

As described above, the coupling portion 6 of the vibration damping force control means is provided.
, Like the spring element 21 and the damping element 22, are coupled to both the vibration source 2 and the additional control mass 3. Therefore, the inertial force of the vibration source 2 can be used as a source of the vibration damping force to the additional control mass body 3 even if the coupling portion 6 itself has no mass. Accordingly, the vibration of the additional control mass body 3 can be substantially eliminated by using the coupling portion 6 as a common member with the spring element 21 and the damping element 22 and controlling the elastic coefficient and the damping coefficient thereof. Therefore, claim 1
According to this, the coupling part 6 and the spring element 21 and the damping element 2
This eliminates the need to provide the active vibration isolator 2 separately from the active vibration isolator, so that the active vibration isolator can be made relatively lightweight, small in size and simplified in structure, and can be manufactured at low cost.

<Model 2> shown in FIG. 2 is a vibration isolator for preventing the vertical vibration of the vibration source 2 from being transmitted to the support 1, wherein the coupling portion 6 is provided with the first portion. It is arranged in parallel with the spring element 21 and the damping element 22 of the buffer member, and in series with the spring element 23 and the damping element 24 arranged in parallel with each other.

This model is suitable for generating a large damping force when the coupling portion 6 is made of a solid-state element such as a piezo (piezoelectric) element or a giant magnetostrictive element. This is because the solid-state element is a displacement actuator, and the damping force is determined by the product of the amount of displacement and the spring constant of the elastic element connected in series with the displacement element. This is because a large vibration damping force cannot be obtained.

<Model 3> shown in FIG. 3 is a vibration isolator for preventing horizontal vibration of the vibration source 2 from being transmitted to the support 1, and includes a first and a second buffer. The spring elements 41 and 51 and the damping elements 42 and 52, which are members, are arranged so as to be displaceable in the horizontal direction, and only at the point where the coupling portion 36 generates a vibration damping force in the horizontal direction <Model 1> of FIG. Is different.

Normally, in order to perform horizontal vibration suppression, a spring element 51 and a damping element 52 are inevitably disposed separately from each other in parallel with the coupling portion 36 in order to support the weight of the vibration source 2. . The same applies to simultaneous control in the vertical and horizontal directions. At this time, the magnitude of the required damping force increases, and when considering three-dimensional control, it is necessary to devise an elastic element in a direction orthogonal to the control axis to a parameter as small as possible. . When a solid element is used, an elastic body is arranged and used in series with the element.

<Model 4> shown in FIG. 4 is a vibration isolator for preventing horizontal vibration of the vibration source 2 from being transmitted to the support 3, and is a first buffer member. 3 only in that the spring element 53 and the damping element 54 are connected in parallel and they are connected in series with the coupling part 36.

FIG. 5 is a graph for explaining an example of the anti-shake effect according to the present invention. In FIG. 5, a curve A represents a vibration transmission characteristic to the support when no intermediate mass is added and only the vibration source is present, and a curve B is an intermediate between the vibration source and the support. The curve C represents the vibration transmission characteristic to the support when the mass is added and the control for the mass is not performed. FIG. 6 shows the characteristics of transmitting vibration to the support when various controls are performed.

A curve B shows a double vibration isolation system in which two resonance points appear. The vibration is larger than the curve A at some frequencies. However, by driving the coupling portion based on a feedback signal representing the vibration acceleration of the intermediate mass and suppressing the vibration of the intermediate mass, the curve C
As shown in (1), the vibration of the support can be greatly reduced.

It is to be noted that, although not necessarily required, when the coupling portion is driven based on a feedback signal or a feedforward signal representing the vibration acceleration of the vibration source 2 from the sensor 7 in addition to the feedback signal from the intermediate mass body, Is increased, and the vibration of the support 1 can be further reduced.

The sensor 8 attached to the support 1
Is used for the control by the controller 5, thereby further improving the anti-vibration effect. That is, the feedback signal from the sensor 8 includes dynamic characteristic information of the support 1 such as amplification information at the resonance point of the support 1, and therefore, by using this feedback signal for control, the feedback signal of the support 1 It is possible to eliminate vibration of the additional control mass body 3 caused by amplification due to resonance.

In order to realize such control, the sensor 8 is not always necessary. If the dynamic characteristic information of the support 1 is known in advance, the feedback from the sensor 4 is performed based on the information. If control is performed with weighted signals, the same effect as when the sensor 8 is used can be obtained. The same applies to the vibration source 2, and control may be performed by weighting the feedback signal from the sensor 4 based on the dynamic characteristic information of the vibration source 2 without using the sensor 7. .

In the case where a large vibration is generated in the support 1 due to, for example, an earthquake or the like, the normal control as described above can prevent transmission of the vibration from the vibration source 2 to the intermediate mass 3. Because of this premise, the vibration of the intermediate mass body 3 caused by the support body 1 becomes a disturbance, and the intermediate mass body 3 cannot be suitably controlled. Therefore, the transfer amount is predicted using the transfer function from the support 1 to the intermediate mass 3, and the coupling portion is controlled based on compensating for the vibration of the intermediate mass 3 caused by the vibration of the support 1. Is preferred. At this time, for example, the vibration of the support 1 and the vibration source 2
Such a control may be performed when there is a significant difference between the two in comparison with the above vibration.

In the present invention, the connecting portion may be an air spring formed as a common member with the first cushioning member. At this time, it is preferable that the air spring applies a vertical vibration damping force to the intermediate mass body.
This is because the air spring can easily support the static load of the vibration source only by changing the pressure, and always consumes current to support the static load like a piezoelectric element or linear motor described later. This is because there is no occurrence, and therefore, no temperature rise due to heat generation occurs.

Further, in the present invention, a solid actuator such as an electrostrictive element (for example, a piezoelectric element) or a magnetostrictive element (including a giant magnetostrictive element), wherein the coupling portion is formed as a common member with the first buffer member. It may be.
At this time, it is preferable that the electrostrictive element and the magnetostrictive element apply a horizontal vibration damping force to the intermediate mass body.
This is because they have excellent vibration damping characteristics in a high frequency range, and need not always support a static load in the horizontal direction, so that the space can be reduced in size and space.

Further, in the present invention, the connecting portion may be a linear motor formed as a common member with the first buffer member. Since the linear motor can couple the intermediate mass and the vibration source in a non-contact manner, there is an advantage that a vibration damping force can be applied without giving a dynamic change thereto. At this time, it is preferable that the linear motor applies a horizontal damping force to the intermediate mass body. Because the linear motor has excellent vibration damping characteristics in the high frequency range, and it is not necessary to always support a static load in the horizontal direction, so the current consumption is small, and furthermore, it has no elasticity. This is because the transmission vibration does not increase.

In the present invention, the damping force control means can apply damping forces in two directions crossing each other or three directions crossing each other that are not in the same plane to the intermediate mass body. May be configured. According to this, for example, so-called two-axis control or X
So-called three-axis control can be performed in the YZ directions.

Further, in the present invention, a plurality of the above-described active anti-vibration devices may be combined.
According to this, by using a plurality of active vibration isolation devices as appropriate, it is possible to control arbitrary multidimensional and multiple degrees of freedom. For example, in the case of performing three-axis control, by arranging active vibration isolating devices capable of applying to the intermediate mass body three different vibration damping forces that are not in the same plane but intersect with each other, at three places, Higher-precision vibration suppression control with three-dimensional six-degree-of-freedom of the control object is possible.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings.

FIG. 6 is a schematic side view for explaining a use state of the active vibration isolator according to the first embodiment of the present invention. In FIG. 6, an active vibration isolator 60 according to the present embodiment includes an additional control mass 63 that is an intermediate mass disposed between a support 61 and a vibration source 62 that vibrates in a vertical direction. Vibration source 62 of body 63
An air spring 64 (a first cushioning member, a coupling portion) provided on the side, and an air spring 65 (a second cushioning member) at a position facing the air spring 64 with the additional control mass body 63 interposed therebetween.
A pedestal 61b for supporting the air spring 65;
b, a displacement sensor 59b and a mechanical leveler 59c. The air springs 64 and 65 can expand and contract by a change in internal pressure, and have an elastic action and a damping action.

The air spring 64 is electrically openable and closable, and serves as a supply source of air to the air spring 64 via a servo valve 66a that can dynamically control the internal pressure of the air spring 64. Are connected.
A compressor 67 is connected to the air spring 65 and the mechanical leveler 59c via a leveling valve 66b such as a mechanical three-way valve or a regulator. The internal pressure of the air spring 65 is previously adjusted to a constant value by a leveling valve 66b.

The displacement sensor 59b is a relative displacement meter using an eddy current, usually called a gap sensor. The potential sensor 59b detects a gap distance h between the upper surface thereof and the vibration source 62, and outputs a difference from the target value to the controller 68 as a control error.

A sensor 59 for detecting the vibration acceleration is attached to the additional control mass 63, and an output signal of the sensor 59 is sent as a feedback signal to a controller 68 including a sensor amplifier. Based on the output signal of the sensor 59, the controller 68 applies a vibration damping force for eliminating vibration of the additional control mass 63 to the air spring 6
A control signal for opening and closing the servo valve 66a so as to generate the signal No. 4 is generated, and the control signal is output to the servo valve driver 69. The controller 68 may include a preprocessor, an A / D converter, a matrix calculator, a filter calculator, a matrix calculator, and a D / A converter arranged in order from the sensor 59 side.

The control signal can be generated by, for example, frequency-weighted optimal control such that the air springs 64 and 65 generate a damping force in a direction opposite to the exciting force of the additional control mass 63. By opening and closing the servo valve 66a or the leveling valve 66b by the servo valve driver 69 in response to this control signal, the air springs 64, 65 are opened.
Can be changed, and as a result, the vibration of the additional control mass body 63 is removed, and the transmission of the vibration to the support body 61 can be prevented.

In this embodiment, either of the air springs 64 and 65 may perform the level control (active vibration control). Although the leveling valve 66b has a slow response in terms of control performance, a mechanical system can reduce the cost. On the other hand, the servo valve 66a responds at high speed and the control is accurate, but is relatively expensive. Hereinafter, some cases will be exemplified.

(1) The air spring 65 causes the additional control mass body 63 to float by the air spring 65 only at static pressure, that is, at a constant pressure set manually by the leveling valve 66b.
The level control is performed by the servo valve 66a based on the detection result of the displacement sensor 59b. (2) The leveling valve 66b is made like an electropneumatic regulator or a proportional valve, and the servo valve 66a and the leveling valve 6 are controlled based on the output signal of the displacement sensor 59b.
6b, the level control is performed. (3) The level is controlled by the leveling valve 66b using the mechanical leveler 59c. The air spring 64 floats at a constant pressure. The servo valve 66a controls the bias by using the constant pressure as a bias and adding only the vibration signal of the sensor 59 to the bias. (4) The output signal of the displacement sensor 59b may be added to (3) to further control the position of the air spring 64.

As described above, in the present embodiment, the damping force control means includes the air springs 64 and 65, the sensor 59, the controller 68, the servo valve driver 69, the servo valve 66a, the leveling valve 66b, and the displacement sensor 59b. , And a mechanical leveler 59c. Among them, the air spring 64 is connected to the vibration source 62 and also to the additional control mass body 63, so that the first buffer that performs a buffering action between the vibration source 62 and the additional control mass body 63 is provided. Functions as a member. In addition, the air spring 64 also functions as a coupling part that applies a vibration damping force to the vibration source 62. That is, in the present embodiment, it is not necessary to separately provide a member for giving a vibration damping force to the additional control mass body 63 in addition to the air spring 64 as in the related art.

Therefore, the active vibration damping device according to the present embodiment is smaller than the device disclosed in Japanese Patent Application Laid-Open No. H10-252820, can save the space of the entire device, and has a simple structure. Therefore, it can be manufactured at low cost.

Further, in this embodiment, since the air spring 64 is configured to apply a vertical vibration damping force to the additional control mass body 63, it is easy to change only the internal pressure of the air spring 64. Can support the static load of the vibration source 62, and does not consume current constantly to support the static load like a piezoelectric element or a linear motor described later.
Therefore, there is an advantage that the temperature does not increase due to heat generation.

In this embodiment, the air springs 64, 6
As 5, any known one such as a bellows type, a rolling seal type, and a diaphragm type can be used. For example, when a rolling seal type having a large spring stiffness in a direction perpendicular to the control axis is used as the air spring 64, it is preferable to arrange an elastic element such as a laminated rubber in series instead of the air spring 65 (FIG. 8). reference).

Next, a second embodiment of the present invention will be described with reference to FIG.

FIG. 7A is a schematic side view for explaining a use state of the active vibration isolator according to the second embodiment of the present invention, and FIG. It is a schematic diagram. In these drawings, the same members as those in the first embodiment described with reference to FIG. 6 are denoted by the same reference numerals, and detailed description thereof will be omitted in this embodiment. FIG.
As shown in (a) and (b), the active vibration damping device 70 of the present embodiment is an additional control that is an intermediate mass body disposed between the support 61 and the vibration source 72 that vibrates in the vertical direction. A mass body 63, an air spring 64 (first buffer member) provided on the vibration source 72 side of the additional control mass body 63, and an air spring 65 provided on the support body 61 side of the additional control mass body 63
(Second buffer member) and the vibration source 7 of the additional control mass body 63
A pair of linear motors 7 provided on two sides facing each other
3, 74 (coupling portion). In the present embodiment, the peripheral end of the vibration source 72 extends downward while maintaining a state separated from the side surface of the additional control mass body 63, and the lower extension of the vibration source 72 and the additional control mass body Linear motors 73, 74 are arranged between the side surfaces of the motor 63. The air springs 64 and 65 can expand and contract by a change in internal pressure, and have an elastic action and a damping action.

Each of the linear motors 73 and 74 includes a coil connected to the vibration source 72 and a pair of magnets arranged to be separated from the coil so as to sandwich the coil and connected to the additional control mass 63. It may be. In this way, the linear motors 73 and 74 are connected to both the additional control mass 63 and the vibration source 72, and the additional control mass 6
A vertical damping force is applied to 3.

A sensor 59 for detecting the vibration acceleration is attached to the additional control mass 63, and an output signal of the sensor 59 is sent as a feedback signal to a controller 68 including a sensor amplifier. The controller 68 generates, based on the output signal of the sensor 59, a control signal that causes the linear motors 73 and 74 to generate a damping force that eliminates the vibration of the additional control mass 63, and converts the control signal into a linear signal. Output to the driver amplifier 76. By driving the linear motors 73 and 74 by the linear driver amplifier 76 according to the control signal, the vibration of the additional control mass body 63 is removed, and the transmission of the vibration to the support body 61 can be prevented.

As described above, in the present embodiment, the vibration damping force control means includes the linear motors 73 and 74, the sensor 59,
Controller 68 and linear driver amplifier 76
It is composed of Of these, the linear motors 73, 7
Reference numeral 4 denotes a connecting portion connected to the vibration source 72 and the additional control mass body 63, and also a first buffering member for providing a buffering action between the both. In the present embodiment, there is an advantage that the compressor is not required to supply the compressed gas to the air spring 64 as in the first embodiment, and the configuration is simplified.

According to the active vibration damping device 70 of the present embodiment, since the magnets and the coils are not in contact with each other in the linear motors 73 and 74, the vibration damping force is not applied to the additional control mass 63 without giving a dynamic change. There is an advantage that can be added. Further, the active vibration damping device of the present embodiment is smaller than the device disclosed in Japanese Patent Application Laid-Open No. Hei 10-252820, and can save space in the entire device. Manufacturable at cost.

In this embodiment, the linear motor 7
As the members 3 and 74, any known members such as those arranged in a plane and circular ones of a VCM type can be used.

Next, a third embodiment of the present invention will be described with reference to FIG.

FIG. 8A is a schematic side view for explaining a use state of the active vibration isolator according to the third embodiment of the present invention, and FIG. It is a schematic diagram. In these drawings, the same members as those in the first and second embodiments are denoted by the same reference numerals, and detailed description is omitted in this embodiment. FIG. 8A,
As shown in (b), the active vibration isolator 80 of the present embodiment includes a vibration source 82 that vibrates in the horizontal direction with the support 61.
Additional mass 8 which is an intermediate mass disposed between
3, an air spring 64 (first buffer member) provided on the vibration source 82 side of the additional control mass body 83, and an additional control mass body 8
3 is a vibration-proof rubber 8 which is an elastic body provided on the support 61 side.
5 (second buffer member), a piezo element 86 inserted horizontally from the side with respect to the additional control mass body 83, and both sides of the additional control mass body 83 so as to be in series with the piezo element 86. It has laminated rubbers 87a and 87b (coupling portions) which are elastic bodies. In the present embodiment, the vibration source 82
Of the additional control mass body 63 extends downward while maintaining a state of being separated from the side surface of the additional control mass body 63. A laminated rubber is provided between the lower extension portion of the vibration source 82 and the side surface of the additional control mass body 63. 8
7a and 87b are arranged. The air spring 64 and the vibration isolating rubber 85 have an elastic action and a damping action.

The piezo element 86 is a displacement actuator similar to a giant magnetostrictive element, and is arranged in series with an elastic body such as laminated rubbers 87a and 87b, so that the piezo element 86 is the product of the spring constant of the elastic body and the actuator displacement. Generates a determined damping force. Then, the vibration source 82 is damped in the horizontal direction by the damping force.

A sensor 88 for detecting the vibration acceleration is attached to the additional control mass 83, and the output signal of the sensor 88 is sent as a feedback signal to the controller 68 including a sensor amplifier. Based on the output signal of the sensor 88, the controller 68 generates a control signal such that the piezo element 86 and the laminated rubbers 87a and 87b generate a vibration damping force for eliminating vibration of the additional control mass body 83, The control signal is output to the piezo driver amplifier 89. By driving the piezo element 86 by the piezo driver amplifier 89 according to this control signal,
The vibration of the additional control mass body 83 is removed, and the transmission of the vibration to the support body 61 can be prevented.

As described above, in the present embodiment, the vibration damping force control means includes the piezo element 86, the laminated rubbers 87a, 87
b, a sensor 88, a controller 68, and a piezo driver amplifier 89. Among these, the piezo element 86 and the laminated rubbers 87a and 87b are a coupling portion coupled to the vibration source 82 and the additional control mass body 83, and are also a first cushioning member that performs a cushioning action between them. In the present embodiment, since the horizontal vibration damping force is generated using the piezo element 86, excellent controllability can be obtained in a high frequency range. Also, the active vibration damping device of the present embodiment is described in Japanese Patent Application Laid-Open No. 10-252820
The apparatus is smaller than the apparatus disclosed in Japanese Patent Application Laid-Open No. H10-209, and the entire apparatus can be saved in space. In addition, since the apparatus has a simple structure, it can be manufactured at low cost.

In the active vibration isolator according to the third embodiment described above, the servo valve and the compressor are connected to the air spring 64 and the sensor 59 is arranged in the same manner as in the first embodiment, so that the vibration source 8
The vertical vibration damper 2 may be performed. As a result, it is possible to generate a damping force in two directions, one horizontal direction and one vertical direction.

By using a plurality of active vibration isolators configured as described above, it is possible to perform vibration reduction with three dimensions and six degrees of freedom.
This example will be described with reference to FIG. In FIG. 9, four active vibration isolators 80 a to 80 d are arranged in an area 90. These four active vibration isolators are different from the active vibration isolators 80 described in the third embodiment in that a servo valve and a compressor are connected to an air spring 64 and a sensor 59 is disposed, so that the vibration source 82 is moved in the vertical direction. And a vibration damping force having one degree of freedom along the vertical direction and a vibration damping force having one degree of freedom in the horizontal direction are generated. Of the four active anti-vibration devices 80a to 80d depicted in FIG. 9, the active anti-vibration devices 80a and 80b are arranged so as to generate only a vibration damping force in the horizontal direction in the horizontal direction in the drawing. The active vibration isolator 80c, 80d
In the horizontal direction, they are arranged so as to generate only a damping force in the vertical direction in the figure.

As described above, the four active vibration isolators 80
By arranging a to 80d and appropriately combining the damping forces generated by them, the damping control is performed in two horizontal degrees of freedom and one degree of rotation in the horizontal plane shown in FIG. 9 with a total of three degrees of freedom. It becomes possible. Also, the air spring 64
In combination with the vertical vibration suppression by the above, three-dimensional control with six degrees of freedom is possible.

Next, a fourth embodiment of the present invention will be described with reference to FIG.

FIG. 10 is a schematic side view for explaining a use state of the active vibration isolator according to the fourth embodiment of the present invention. In this drawing, first to third
The same reference numerals are used for members that are the same as in the above-described embodiment, and a detailed description thereof is omitted in this embodiment. As shown in FIG. 10, the active vibration isolator 100 according to the present embodiment
Is an additional control mass 103 that is an intermediate mass disposed between the support 61 and the vibration source 82 that vibrates in the horizontal and vertical directions, and is vertically inserted into the additional control mass 103 from above. The piezo element 104a and the piezo element 10
A laminated rubber 105a which is an elastic body disposed between the vibration control element 4a and the vibration source 82, and an anti-vibration rubber 85 which is an elastic body disposed on the opposite side of the additional control mass body 103 so as to be in series with the piezo element 104a. (A second cushioning member), a piezo element 104b inserted horizontally from the side with respect to the additional control mass body 103, and elastic members arranged on both sides of the additional control mass body 103 in series with the piezo element 104b. It has laminated rubber 105b and 105c which are bodies. In the present embodiment, the peripheral end of the vibration source 82 extends downward while maintaining a state separated from the side surface of the additional control mass body 103,
Laminated rubber pieces 105b and 105c are arranged between the downwardly extending portion of the vibration source 82 and the side surface of the additional control mass body 103.

A sensor 106a for detecting the vibration acceleration in the horizontal direction and a sensor 106b for detecting the vibration acceleration in the vertical direction are attached to the additional control mass 103. The output signal is sent as a feedback signal to a controller 68 including a sensor amplifier. Based on the output signals of the sensors 106a and 106b, the controller 68 applies a vibration damping force for eliminating horizontal and vertical vibrations of the additional control mass body 103 to the piezo elements 104a and 104b,
A control signal for generating the anti-vibration rubber 85 is generated, and the control signal is output to the piezo driver amplifier 89. By driving the piezo elements 104a and 104b by the piezo driver amplifier 89 in response to the control signal, the vibration of the additional control mass body 103 is removed, and the transmission of the vibration to the support 61 can be prevented.

As described above, in the present embodiment, the vibration damping force control means includes the piezo elements 104a and 104b, the laminated rubbers 105a to 105c and the vibration isolating rubber 85, the sensor 10
6a and 106b, a controller 68, and a piezo driver amplifier 89. Among them, the piezo elements 104a and 104b and the laminated rubbers 105a to 105
c is a coupling portion coupled to the vibration source 82 and the additional control mass body 103, and is also a first cushioning member that performs a cushioning action between the both. In the present embodiment, the horizontal and vertical damping forces are applied to the piezo elements 104a and 104b.
, And excellent controllability can be obtained in a high frequency range. Further, the active vibration damping device of the present embodiment is smaller than the device disclosed in Japanese Patent Application Laid-Open No. Hei 10-252820, and can save space in the entire device. Manufacturable at cost.

Next, a fifth embodiment of the present invention will be described with reference to FIG.

FIG. 11A is a schematic side view for explaining a use state of the active vibration isolator according to the fifth embodiment of the present invention, and FIG. It is a schematic diagram. In these drawings, the same members as those in the first to fourth embodiments are denoted by the same reference numerals, and detailed description is omitted in the present embodiment. FIG.
As shown in (a) and (b), the active vibration damping device 110 of the present embodiment is an additional control that is an intermediate mass body disposed between the support body 61 and the vibration source 82 that vibrates in the horizontal direction. A mass body 103, a piezo element 104 a vertically inserted into the additional control mass body 103 from above, a laminated rubber 105 a which is an elastic body disposed between the piezo element 104 a and the vibration source 82, and a piezo element An anti-vibration rubber 85 (second cushioning member), which is an elastic body, disposed on the opposite side of the additional control mass body 103 so as to be in series with 104 a; And two voice coil linear motors 112a and 112b whose operation directions are orthogonal to each other. In the present embodiment, the peripheral end of the vibration source 82 extends downward while maintaining a state separated from the side surface of the additional control mass body 103, and the lower extension of the vibration source 82 and the additional control mass body Linear motors 112 a and 112 b are disposed between the linear motors 103 and 103.

In this embodiment, the piezo element 104
a, the laminated rubber 105a and the vibration damping rubber 85 generate a vertical vibration damping force on the additional control mass body 103, and the linear motors 112a and 112b
Generates two horizontal vibration damping forces orthogonal to each other.

The additional control mass body 103 has sensors 106a, 106 for detecting its horizontal vibration acceleration.
b and a sensor 10 for detecting vertical vibration acceleration
6c are attached, and the sensors 106a to 106c are attached.
The output signal of c is sent as a feedback signal to the controller 68 including the sensor amplifier. Controller 68
Is based on the output signals of the sensors 106a to 106c,
The piezo element 104a and the laminated rubber 1 apply a vibration damping force to eliminate horizontal and vertical vibrations of the additional control mass body 103.
05a, anti-vibration rubber 85 and linear motor 112a, 1
A control signal for generating 12b is generated, and the control signal is output to the piezo driver amplifier 89 and the linear drive amplifier 76. In response to the control signal, the piezo element 104a is driven by the piezo driver amplifier 89, and the linear motor 112a,
By driving the 112b, the horizontal and vertical vibrations of the additional control mass body 103 are substantially eliminated, and the transmission of the vibrations to the support 61 can be prevented.

As described above, in the present embodiment, the vibration damping force control means includes the piezo element 104a, the laminated rubber 105
a, anti-vibration rubber 85, linear motors 112a, 112b,
Sensors 106a to 106c, controller 68, piezo driver amplifier 89, and linear drive amplifier 7
6. Among them, the piezo element 104
a, laminated rubber 105a, linear motors 112a, 112
“b” is a coupling portion coupled to the vibration source 82 and the additional control mass body 103, and is also a first cushioning member that performs a cushioning action between the both. In the present embodiment, since the horizontal vibration damping force is generated using the linear motors 112a and 112b, excellent controllability can be obtained in a high frequency range. In addition, in the horizontal direction, there is no need to always support a static load, so the linear motors 112a, 112
b consumes less current, and the linear motor 1
Since 12a and 112b do not have elasticity, transmission vibration does not increase. Further, the active vibration damping device of the present embodiment is described in Japanese Patent Application Laid-Open No. H10-252820.
The apparatus is smaller than the apparatus disclosed in Japanese Patent Application Laid-Open No. H10-209, and the entire apparatus can be saved in space. In addition, since the apparatus has a simple structure, it can be manufactured at low cost. Also, the linear motor 112a,
Since 112b can couple the vibration source 82 and the additional control mass 103 in a non-contact manner, there is an advantage that a vibration damping force can be applied without giving a dynamic change to them.

Next, a sixth embodiment of the present invention will be described with reference to FIG.

FIG. 12A is a schematic side view for explaining a use state of the active vibration isolator according to the sixth embodiment of the present invention, and FIG. It is a schematic diagram. In these drawings, the same members as those in the first to fifth embodiments are denoted by the same reference numerals, and detailed description thereof will be omitted in this embodiment. FIG.
As shown in FIGS. 2A and 2B, the active vibration isolator 120 of the present embodiment is an intermediate mass body disposed between the support 61 and the vibration source 82 that vibrates vertically and horizontally. An additional control mass body 103 and an additional control mass body 103
Element 104a vertically inserted from the upper surface with respect to
A laminated rubber 105a which is an elastic body disposed between the piezoelectric element 104a and the vibration source 82;
a between the side of the additional control mass body 103 and the vibration source 82, which is an elastic body, which is an elastic body and is disposed on the opposite side of the additional control mass body 103 so as to be in series with “a”. Sets of air springs 12 arranged in the
1a and 121b: 122a and 122b.
In the present embodiment, the peripheral end of the vibration source 82 extends downward while maintaining a state separated from the side surface of the additional control mass body 103, and the lower extension of the vibration source 82 and the additional control mass body The two sets of air springs 121a, 121a and 12
1b: 122a and 122b are arranged. The two air springs 121a and 121b are arranged so as to face each other with the additional control mass body 103 interposed therebetween, and these are controlled so as to be in opposite phases. Another two air springs 122a, 1
The same applies to 22b.

The air springs 121a and 122a are electrically openable and closable, and are connected to the air springs 121a and 122a via a servo valve 66a which can dynamically control the internal pressure of the air springs 121a and 122a. The compressor 67 is connected as a supply source of air. The air springs 121b and 122b have a leveling valve 66.
The compressor 67 is connected via b. The internal pressure of the air springs 121b and 122b is adjusted by the leveling valve 66b.
Is adjusted in advance to a constant value.

In this embodiment, the piezo element 104
a, the laminated rubber 105a and the vibration-isolating rubber 85 generate a vertical damping force on the additional control mass body 103, and the air springs 121a, 121b: 122a, 122b are arranged in two horizontal directions perpendicular to the additional control mass body 103. Generates vibration damping force.

The additional control mass body 103 has sensors 106a and 106 for detecting its horizontal vibration acceleration.
b and a sensor 10 for detecting vertical vibration acceleration
6c are attached, and the sensors 106a to 106c are attached.
The output signal of c is sent as a feedback signal to the controller 68 including the sensor amplifier. Controller 68
Is based on the output signals of the sensors 106a to 106c,
The piezo element 104a and the laminated rubber 1 apply a vibration damping force to eliminate horizontal and vertical vibrations of the additional control mass body 103.
05a, anti-vibration rubber 85 and air springs 121a, 121
b: Generate a control signal for generating 122a and 122b, and output the control signal to the piezo driver amplifier 89 and the servo valve driver 69. In response to this control signal, the piezo element 1
04a, and the servo valve 66a is opened and closed by the servo valve driver 69, whereby the additional control mass 10
3 is removed, and the transmission of the vibration to the support 61 can be prevented.

As described above, in the present embodiment, the vibration damping force control means includes the piezo element 104a, the laminated rubber 105
a, anti-vibration rubber 85, air springs 121a, 121b: 12
2a and 122b, sensors 106a to 106c, a controller 68, a piezo driver amplifier 89, and a servo valve driver 69. Among them, the piezo element 104a, the laminated rubber 105a, the air spring 121
a, 121b: 122a, 122b are coupling portions coupled to the vibration source 82 and the additional control mass body 103, and are also first cushioning members that provide a cushioning action between them. The active vibration damping device according to the present embodiment is smaller than the device disclosed in Japanese Patent Application Laid-Open No. H10-252820, and can save space in the entire device. Manufacturable.

Next, an example in which a plurality of active vibration isolators according to the above-described sixth embodiment can be used to perform vibration isolation with multiple degrees of freedom will be described. FIG. 13 is a diagram showing an example of this case, in which three active vibration isolation devices 120a to 120c are arranged in the area 130. These three active anti-vibration devices are similar to the active anti-vibration device 120 described in the sixth embodiment, and generate a total of three degrees of freedom in two horizontal directions and a vertical direction. It is.

As described above, the three active vibration isolators 12
By arranging Oa to 120c and appropriately combining the damping forces generated by them, it becomes possible to perform three-dimensional vibration suppression control with six degrees of freedom. By using the active anti-vibration device 120 in this manner, the number of active anti-vibration devices required to realize three-dimensional six degrees of freedom can be reduced to three as compared with the example described with reference to FIG.

Next, a seventh embodiment of the present invention will be described with reference to FIG.

FIG. 14 is a schematic side view for explaining a use state of the active vibration isolator according to the seventh embodiment of the present invention. In this drawing, first to sixth
The same reference numerals are used for members that are the same as in the above-described embodiment, and a detailed description thereof is omitted in this embodiment. As shown in FIG. 14, the active vibration isolator 140 of the present embodiment
Is an additional control mass 103 that is an intermediate mass disposed between the support 61 and the vibration source 82 that vibrates in the horizontal and vertical directions, and is vertically inserted into the additional control mass 103 from above. The piezo element 104a and the piezo element 10
A laminated rubber 105a that is an elastic body disposed between the vibration control element 4a and the vibration source 82, and an elastic body disposed on the pedestal 61b opposite to the additional control mass body 103 so as to be in series with the piezo element 104a. Anti-vibration rubber 85 (second cushioning member)
A piezo element 104b inserted horizontally from the side with respect to the additional control mass body 103, and a laminated rubber 105b which is an elastic body disposed on both sides of the additional control mass body 103 so as to be in series with the piezo element 104b; 105c. In the present embodiment, the peripheral end of the vibration source 82 extends downward while maintaining a state separated from the side surface of the additional control mass body 103, and the lower extension of the vibration source 82 and the additional control mass body The laminated rubber 105b, 10
5c is arranged.

A sensor 106b for detecting the horizontal vibration acceleration and a sensor 106a for detecting the vertical vibration acceleration are attached to the additional control mass 103. A sensor 107b for detecting the horizontal vibration acceleration and a sensor 107a for detecting the vertical vibration acceleration are attached to the vibration source 82. These sensors 106a, 106
The output signals of b, 107a, and 107b are controllers 68a, 68 including a sensor amplifier as a feedback signal.
b. That is, in the present embodiment, the sensor 1
Control of the additional control mass body 103 by 06a, 106b, 107a, and 107b is feedback control for returning a sensor signal to a nearby actuator.

In the present embodiment, the sensors 107a and 107b attached to the vibration source 82 are used for suppressing the vibration of the machine which is the vibration source and for suppressing the excitation signal by feedforward. A sensor attached to the vibration source 82 is an actuator (piezoelectric elements 104a, 104a in this embodiment) as in this embodiment.
In addition to forming a local loop by arranging the same number of actuators in the vicinity of b), the motion of the vibrating machine having six degrees of freedom is detected by six sensors and coordinate-transformed to obtain a rectangular coordinate system or a mode coordinate system. Can be controlled. In the case of the mode coordinate system, the number of sensors need not be six,
The number of sensors may be determined so as to be observable according to the mode to be controlled.

In this embodiment, a sensor 108b for detecting the horizontal vibration acceleration and a sensor 108a for detecting the vertical vibration acceleration are provided on the pedestal 61b. Sensors 108a, 10
The output signal of 8b is supplied to controllers 68a and 68b via floor vibration compensators 109a and 109b, respectively. When the support 61 itself becomes a vibration source, the floor vibration compensators 109a and 109b can be used as a canceller of the vibration. That is, when the support 61 vibrates relatively large, the vibration is generated by the additional control mass 103.
And is detected as a feedback signal from the sensors 106a and 106b, and the vibration source 82 is vibrated by vibration that the vibration source 82 does not originally have.

Therefore, in the present embodiment, the contribution of the vibration of the support 61 to the additional control mass 103 is eliminated from the control loop. That is, the signal x ₀ from the sensors 108a and 108b is converted to V ₀ by the floor vibration compensators 109a and 109b.
(Z) = H × T × x ₀
a and 68b. Here, T is the sensor 108a,
H is a transfer characteristic from 108b to the sensors 106a and 106b, and H is a transfer characteristic from the controller 68a to the addition point of the controller 68b. On the other hand, the vibration of the additional control
When _1, the sensor 106a, a feedback signal from 106b can be placed between _{V 1 (z) = H ×} x 1, control signals for determining the _{V (z) = V 1 (} z) -V
₀ (z). Here, (z) indicates an operation in a discrete region by z-transformation, but this operation can be performed in an analog manner.

If it is not necessary to consider the vibration generated in the support 61 itself, the sensors 108a, 108b
May be supplied to the controllers 68a and 68b without passing through the floor vibration compensators 109a and 109b.

The controllers 68a and 68b
06a, 106b, 107a, 107b, 108a, 1
08b, a vibration damping force for eliminating horizontal and vertical vibrations of the additional control mass body 103 is applied to the piezo elements 104a and 104b and the laminated rubbers 105a to 105a.
5c and a control signal for generating the vibration isolating rubber 85, and the control signal is transmitted to the piezo driver amplifiers 89a and 89a.
9b. In response to this control signal, the piezo driver amplifiers 89, 89b cause the piezo elements 104a,
By driving 4b, the vibration of the additional control mass body 103 is removed, and the transmission of the vibration to the support body 61 can be prevented.

As described above, in the present embodiment, the vibration damping force control means includes the piezo elements 104a, 104b, the laminated rubbers 105a to 105c, the vibration damping rubber 85, the sensor 10
6a, 106b, 107a, 107b, 108a, 10
8b, controllers 68a and 68b, and piezo driver amplifiers 89a and 89b. Among them, the piezo elements 104a and 104b and the laminated rubber 105
a to 105c are the vibration source 82 and the additional control mass body 10;
3 as well as a first cushioning member that buffers between them. In the present embodiment, the horizontal and vertical damping forces are applied to the piezo element 104.
Since it is generated by using a and 104b, excellent controllability can be obtained in a high frequency range. Further, the active vibration damping device according to the present embodiment is described in
The apparatus is smaller than the apparatus disclosed in Japanese Patent Publication No. 820 and can save space in the entire apparatus, and can be manufactured at low cost because of its simple structure.

Further, the active vibration damping device of the present embodiment compensates for the vibration of the additional control mass body 103 caused by the support 61 using the floor vibration compensators 109a and 109b. Can be realized with higher accuracy.

Next, an eighth embodiment of the present invention will be described with reference to FIG.

FIG. 15 is a schematic perspective view for explaining a use state of the active vibration isolator according to the eighth embodiment of the present invention. As shown in FIG. 15, the active vibration isolator 150 of the present embodiment is an intermediate mass body disposed between a lower support (not shown) and a vibration source 92 that vibrates in the horizontal and vertical directions. Some additional control mass 93
And four air springs 94a to 94d disposed between the additional control mass body 93 and the vibration source 92, and the air springs 94a to 94d.
Four laminated rubbers 95a to 95d (not shown in FIG. 15), which are elastic bodies, are disposed between the support 94d and the support, and two on each of two adjacent side surfaces of the vibration source 92. Linear motor arranged horizontally (non-contact actuator, unlike air spring or solid actuator, it is not necessary to consider the balance of static pressure) 9
6a to 96d. Although illustration is omitted, in the present embodiment, similarly to the first to seventh embodiments, a control system such as a sensor or a controller is provided, and similar vibration control is performed. Shall be.

However, in the present embodiment, by using the four air springs 94a to 94d, three axes (Z, Xθ, Yθ) in the vertical direction can be controlled, and the four linear motors 96a to 96d can be controlled. , Three horizontal axes (X, Y, Zθ) can be controlled. As described above, in the present embodiment, since multi-axis control is performed, high-precision vibration control with three-dimensional and six degrees of freedom of a control target can be performed by using only one active vibration damping device. .

Next, a modification of the present embodiment will be described with reference to FIG.
This will be described with reference to FIG. FIG. 16A is an example in which the arrangement position of the linear motor is changed while the four air springs 94a to 94d are kept as they are in the example of FIG. In this example, the linear motors 97a to 97d are arranged such that the balance of the torque applied to the vibration sources 92 by these motors is balanced.

Further, the example shown in FIG.
In this example, the linear motor is changed to an air spring while the four air springs 94a to 94d are kept as they are, and the arrangement place and number thereof are changed. In this example, eight air springs 98a
To 98h are arranged at positions facing each other, two on each side of the vibration source 92.

Further, the example shown in FIG.
In this example, four air springs 94a to 94d are reduced to three, and the location and number of linear motors are changed. In this example, three air springs 99a to 98c that apply a horizontal force to the vibration source 92 are arranged on one side of the vibration source 92 and two on the side adjacent thereto. As in this example, at least three in the vertical direction and three in the horizontal direction
By arranging the two actuators, three-dimensional vibration control with six degrees of freedom is possible. The type of the actuator used here can be arbitrarily changed to a known type.

[0090]

As described above, according to the first aspect, since the vibration damping force control means has a connecting portion which is disposed between the vibration source and the intermediate mass body and connects the two, the intermediate mass control means is provided. It is possible to apply the inertia force of the vibration source to the body as the source of the damping force when applying the damping force to the body, and to apply the reaction force to the vibration source at the same time as applying the reaction force to the vibration source. Of these, the binding portion itself does not have to have a mass. Therefore, the first shock-absorbing member and the coupling portion can be formed by a common member, and the vibration-damping-force control means and the active vibration isolator including the same are relatively lightweight and small, and the structure is simplified. As a result, manufacturing at low cost becomes possible.

According to the second and third aspects, it is possible to easily support the static load of the vibration source only by changing the pressure, and to support the static load like a piezoelectric element or a linear motor. Current is not always consumed, and therefore no temperature rise due to heat generation occurs.

According to claims 4 and 5, the electrostrictive element and the magnetostrictive element have excellent vibration damping characteristics in a high frequency range.
Moreover, because it can be placed in a small space,
The amount by which the floor is raised for vibration isolation can be reduced.

According to the sixth aspect, since the linear motor can couple the intermediate mass body and the vibration source in a non-contact manner, it is possible to apply a vibration damping force without dynamically changing them. . According to the seventh aspect, the linear motor has excellent vibration damping characteristics in a high frequency range.
In the horizontal direction, there is no need to constantly support a static load, so that the current consumption is small. Further, since it has no elasticity, the transmission vibration does not increase.

According to the eighth and ninth aspects of the present invention, since multi-axis control is performed, high-precision vibration suppression control with multi-dimensional and multi-degree-of-freedom of a control target can be achieved by using only one active vibration damping device. It becomes possible. According to the tenth aspect of the present invention, by arranging the active vibration damping device at a plurality of locations, it is possible to perform high-precision vibration suppression control with a multidimensional and multi-degree of freedom of a control target.

According to the eleventh aspect, high-precision control is performed by detecting the vibration of at least one of the vibration source, the support, and the intermediate mass body. According to the twelfth aspect, by controlling the coupling portion based on the vibration characteristics of the support, a simplified configuration that does not require a sensor is provided. According to the thirteenth aspect, by performing control in which at least one of the vibration characteristics of the vibration source and the support is weighted with the control weight, the accuracy of the control can be improved in the case of the twelfth aspect. According to claim 14,
Since the vibration of the intermediate mass body caused by the vibration of the support is compensated, high-precision control can be performed even when the support is a vibration source.

[Brief description of the drawings]

FIG. 1 is a view schematically showing a <model 1> which is an example of a schematic configuration of an active vibration isolator of the present invention.

FIG. 2 is a diagram schematically illustrating <model 2> which is an example of a schematic configuration of an active vibration isolation device of the present invention.

FIG. 3 is a diagram schematically illustrating <model 3> which is an example of a schematic configuration of the active vibration isolator of the present invention.

FIG. 4 is a diagram schematically showing <model 4> which is an example of a schematic configuration of the active vibration isolator of the present invention.

FIG. 5 is a graph for explaining an example of an anti-shake effect according to the present invention.

FIG. 6 is a schematic diagram for explaining a use state of the active vibration isolator according to the first embodiment of the present invention.

FIG. 7 is a schematic diagram for explaining a use state of the active vibration isolator according to the second embodiment of the present invention.

FIG. 8 is a schematic diagram for explaining a use state of an active vibration isolation device according to a third embodiment of the present invention.

FIG. 9 is a schematic diagram for explaining an example in which a plurality of active vibration isolators according to an embodiment of the present invention are used to enable vibration isolation with multiple degrees of freedom.

FIG. 10 is a schematic diagram for explaining a use state of an active vibration isolator according to a fourth embodiment of the present invention.

FIG. 11 is a schematic diagram for explaining a use state of an active vibration isolator according to a fifth embodiment of the present invention.

FIG. 12 is a schematic diagram for explaining a use state of an active vibration isolator according to a sixth embodiment of the present invention.

FIG. 13 is a schematic diagram for explaining an example in which a plurality of active anti-vibration devices according to the sixth embodiment of the present invention are used to enable anti-vibration with multiple degrees of freedom.

FIG. 14 is a schematic diagram for explaining a use state of an active vibration isolation device according to a seventh embodiment of the present invention.

FIG. 15 is a schematic perspective view for explaining a use state of an active vibration isolator according to an eighth embodiment of the present invention.

FIG. 16 is a schematic plan view for explaining a modification of the active vibration isolator according to the eighth embodiment of the present invention.

FIG. 17 is a view showing a schematic structure of an active vibration isolator according to the related art.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Support 2 Vibration source 3 Additional control mass 4, 7 Sensor 5 Controller 6 Connection part 11, 21 Spring element 12, 22 Damping element 59 Sensor 60 Active vibration isolator 61 Support 62 Vibration source 63 Additional control mass 64, 65 Air spring 66a Servo valve 67 Compressor 68 Controller 69 Servo valve driver

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H02K 33/06 H02K 33/06 33/16 33/16 A

Claims (14)

[Claims] 1. An intermediate mass body disposed between a vibrating body and a support, a first buffer member provided on the vibrating body side of the intermediate mass body, and on a support side of the intermediate mass body. A second shock-absorbing member provided, and a coupling portion that is capable of controlling a damping force applied to the intermediate mass body, is disposed between the vibrating body and the intermediate mass body, and couples the two. An active vibration isolator, comprising: a vibration suppression force control unit having: 2. The active vibration isolator according to claim 1, wherein the coupling portion is an air spring formed as a common member with the first cushioning member. 3. The active vibration damping device according to claim 2, wherein the air spring applies a vertical damping force to the intermediate mass body. 4. The active vibration isolator according to claim 1, wherein the coupling portion is a solid actuator formed as a common member with the first buffer member. 5. The active vibration damping device according to claim 4, wherein the solid actuator applies a horizontal vibration damping force to the intermediate mass body. 6. The active vibration isolator according to claim 1, wherein the coupling portion is a linear motor formed as a common member with the first buffer member. 7. The active vibration damping device according to claim 6, wherein the linear motor applies a horizontal vibration damping force to the intermediate mass body. 8. The apparatus according to claim 1, wherein said damping force control means is capable of giving damping forces in two directions crossing each other to said intermediate mass body. An active vibration isolator according to any one of the preceding claims. 9. The vibration control device according to claim 1, wherein said vibration control force control means is capable of applying to said intermediate mass body three different vibration control forces which are not in the same plane but intersect with each other. Item 8. The active vibration isolator according to any one of Items 1 to 7. 10. An active anti-vibration device comprising a plurality of active anti-vibration devices according to any one of claims 1 to 9 so that multi-dimensional and multi-degree-of-freedom control is possible. apparatus. 11. The vibration control device according to claim 11, wherein
The active prevention device according to any one of claims 1 to 10, wherein the coupling portion can be controlled based on detection of vibration of at least one of the support and the intermediate mass. Shaking device. 12. The active protection device according to claim 1, wherein said vibration damping force control means can control said coupling portion based on vibration characteristics of said support. Shaking device. 13. The vibration control apparatus according to claim 1, wherein the vibration control unit controls the vibration characteristics of at least one of the vibrator and the support with a control weight.
3. The active vibration isolator according to 2. 14. The coupling based on detecting vibration of the support and the intermediate mass body by the vibration suppression force control means and compensating for vibration of the intermediate mass body caused by vibration of the support body. The active vibration isolator according to any one of claims 1 to 13, wherein the portion is controllable.