JP2001260095A - Micromanipulator and actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide micromanipulator technology capable of easily restraining rotation looseness at a movable part of a linear movable mechanism. SOLUTION: A linear actuator 10 of a micromanipulator has a piezo-electric element 11, a guide shaft 12 and a slider 13 functioning as a movable part. The guide shaft 12 is vibrated in the direction X by the piezo-electric element 11, so that the slider 13 slides and moves in the direction X. In this case, since the surfaces 12a, 12b of the guide shaft 12 intersecting perpendicularly to each other are pressed against orthogonal surfaces 13a, 13b abutting on the slider 13 by an energizing spring 17, its rotation around the X-axis is restricted. As a result, the rotation looseness of the slider 13 around the guide shaft 12 can easily be restrained.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a micromanipulator technology for working on a minute object,
In particular, it relates to improvement of a linear movable mechanism.

[0002]

2. Description of the Related Art In the technical field of cell micromanipulation and the like, in order to perform micromanipulation at a cell level under a microscope,
Conventionally, various micromanipulators have been used. As a mechanism for operating the micromanipulator, there is a mechanism having a linear actuator (linear movable mechanism).

FIG. 9 is a sectional view showing an example of the configuration of a linear actuator in a micromanipulator.

In the linear actuator 90, a guide shaft 91 extending in the X-axis direction and a slider 92, which is a movable portion, are frictionally engaged, and the guide shaft 91 vibrates in the X direction, so that the slider 92 moves. Here, the slider 92
The guide shaft 91 moves in the axial direction (X-axis direction), but needs to be prevented from rotating around the axis. For this reason,
The key 91a and the keyway 92a are combined.

[0005]

However, in the case of the configuration using the key groove 92a, the key 91a and the key groove 92a are not provided.
The ease of movement in the axial direction is determined by the size of the gap G between the two. If the clearance G is too small, the slider 92 becomes difficult to move. If the clearance G is too large, the rotation of the slider 92 around the axis becomes large. In particular, in the case of a thin guide shaft 91 such as a micromanipulator, there is a play due to the clearance G, but when the linear actuator is further extended therefrom, the tip of the linear actuator is enlarged, and the required play is increased. Accuracy cannot be obtained.

For example, when the diameter of the guide shaft 91 is considered to be 2 mm in FIG.
Assuming that the tolerance with respect to a is 0 to 0.1 mm, the maximum length of the outer circumference of the guide shaft 92 is 0.1 mm. At this time, when this play is converted into an angle, 360 ° × 0.1 / (2π) = 5.7 °.

The slider 92 has a length of 10 mm.
When the linear actuator 99 is attached, the tip of the linear actuator is 10 × tan5.7 ° =
It is 0.998 mm, which is about 1 mm at maximum.

Here, it is conceivable to use a backlash. However, there is an adverse effect such as an increase in size due to a biasing mechanism for the backlash and an increase in the number of parts. In order to reduce the backlash, the processing accuracy of the parts is required, the difficulty increases, and the cost increases.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object to provide a micromanipulator technology capable of easily suppressing rotation in a movable portion of a linear movable mechanism.

[0010]

According to a first aspect of the present invention, there is provided a micromanipulator for performing a predetermined operation on a minute object by using a linear movable means. The linear movable means includes: (a) a non-cylindrical guide shaft having a first surface and a second surface extending in a predetermined guide direction; and (b) a sliding contact with the first surface and the second surface.
(C) pressing means for pressing the first surface and the second surface of the guide shaft relatively to the second surface; and (d) the guide in the predetermined guide direction. And vibrating means for vibrating the shaft, wherein the member relatively slides along the guide shaft by vibration of the guide shaft.

According to a second aspect of the present invention, in the micromanipulator according to the first aspect, the first surface and the second surface are planes perpendicular to each other.

According to a third aspect of the present invention, in the micromanipulator according to the first or second aspect, the linear movable means has a plurality of linear movable mechanisms, and the plurality of linear movable mechanisms are sequentially arranged. It is connected to.

According to a fourth aspect of the present invention, in the micromanipulator according to any one of the first to third aspects, the guide shaft and the pressing means are in point contact or line contact.

According to a fifth aspect of the present invention, in the micromanipulator according to the first to fourth aspects of the present invention, the pressing means is configured to connect the first surface and the second surface of the guide shaft to the second surface. Press almost evenly on the surface.

According to a sixth aspect of the present invention, there is provided an actuator used in a micromanipulator for performing a predetermined operation on a minute object, wherein (a) a first surface and a second surface extending in a predetermined guide direction. A non-cylindrical guide shaft having
(b) a member having two surfaces that are in sliding contact with the first surface and the second surface; and (c) the first surface and the second surface of the guide shaft are relatively positioned with respect to the second surface. Pressing means for pressing, and (d) vibrating means for vibrating the guide shaft in the predetermined guide direction, wherein the member slides relatively along the guide shaft by vibration of the guide shaft. Move.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment <Configuration of Micromanipulator> FIG. 1 is a schematic configuration diagram of a micromanipulator 1 according to a first embodiment of the present invention. In FIG. 1, X, Y, and Z indicate three axes orthogonal to each other.

The micromanipulator 1 includes a first linear actuator 10, a second linear actuator 20, a third linear actuator 30, a rotary actuator 40, and an end effector 45.

First to third linear actuators 10
30 are sequentially connected so as to be orthogonal to each other.
In addition, the rotation system actuator 40 can change the attitude of the minute object supported by the end effector 45 by changing the attitude of the end effector 45 coupled to the distal end portion to an arbitrary angle.

The first linear actuator 10 includes a piezoelectric element 11, a guide shaft 12, and a slider 13.
The slider 13 is configured to be movable along the axial direction (described in detail later).

Similarly to the first linear actuator 10, the second linear actuator 20 includes a piezoelectric element 21, a guide shaft 22, and a slider 23, and is configured so that the slider 23 can move along the Y-axis direction. One end of the piezoelectric element 21 is fixed to the side surface of the slider 13 of the first linear actuator 10, and the other end is connected to the guide shaft 2.
2 is fixed to the end face. Therefore, the guide shaft 22
Moves in the Y-axis direction, which is the longitudinal direction thereof, with the expansion and contraction operation of the piezoelectric element 21. The piezoelectric element 21 and the guide shaft 2
The connection and configuration between the slider 2 and the slider 23 are the same as those of the first linear actuator 10.

The third linear actuator 30 is similar to each of the linear actuators described above, and includes a piezoelectric element 31, a guide shaft 32, and a slider 33 so that the slider 33 can move along the Z-axis direction. One end of the piezoelectric element 31 is connected to the second linear actuator 20.
Of the guide shaft 3
2 is fixed to the end face. Therefore, the guide shaft 32
Moves in the Z-axis direction with the expansion and contraction of the piezoelectric element 31. The piezoelectric element 31, the guide shaft 32, and the slider 33
The connection and the configuration are the same as those of other linear actuators.

A rotary actuator 40 is fixed to the slider 33 of the third linear actuator 30 along the X-axis direction. The rotary actuator 40 includes a stepping motor 41, a rotary plate 42, a pitch yaw actuator 43, and an inclined plate 44.

The main body of the stepping motor 41 is formed in a small-diameter cylindrical shape, and is fixed to the slider 33 of the third linear actuator 30. The energization of the stepping motor 41 from a driving circuit provided outside causes the rotating plate 42 connected to the rotor provided inside the stepping motor 41 to rotate the stepping motor 4.
It is configured to rotate around one rotation axis. In FIG. 1, the rotation axis of the stepping motor 41 is provided so as to be parallel to the X axis, but the invention is not limited to this. The stepping motor 41 enables a rotation operation (rolling) about a rotation axis parallel to the X-axis among the operations of the rotation system.

One end of a pitch yaw actuator 43 is attached to the rotary plate 42, and the pitch yaw actuator 43 rotates around the rotation axis of the stepping motor 41 as the rotary plate 42 rotates. A tilt plate 44 is provided on the other end side of the pitch yaw actuator 42 in the form of a pivot bearing. When the pitch yaw actuator 42 is driven, the tilt plate 44 becomes YZ.
It is configured to incline in any direction and angle from a state parallel to the plane. The pitch yaw actuator 43 enables a rotation operation (pitching) about a rotation axis parallel to the Z-axis and a rotation operation (yawing) about a rotation axis parallel to the Y-axis among the operations of the rotation system. .

The base of the end effector 45 of the micromanipulator 1 is connected to the tip of the rotary actuator 40. The end effector 45 has a mechanism suitable for performing a predetermined operation on a minute target. For example, a micro gripper having a hand mechanism, a needle, or the like is used as the end effector 45.

The micromanipulator 1 is configured as described above, and the first to third linear actuators 10 to 30 move the position of the end effector 45 to X, Y, Z.
, And the rotary actuator 40 can rotate and move the end effector 45 in three directions of roll, pitch, and yaw. That is, with the above-described configuration, a total of six degrees of freedom, three degrees of freedom for linearly moving the end effector 45 and three degrees of freedom for rotating the end effector 45, are realized. The three degrees of freedom of the rotating system are determined by the stepping motor 41.
Roll motion and pitch yaw actuator 43
And yaw angle motion.

Therefore, by making the configuration of the micromanipulator 1 as described above, the end effector 45 can be moved to an arbitrary position, and the end effector 45 can be changed to an arbitrary posture. .

<Configuration of First Linear Actuator 10>
Next, a detailed configuration of the first linear actuator 10 will be described. FIG. 2 is a perspective view of the first linear actuator 10. FIG. 3 is a cross-sectional view as viewed from the position of III-III in FIG.

The piezoelectric element 11 is made of laminated piezoelectric ceramics or the like, and expands and contracts along the X-axis direction by applying a voltage from a driving circuit provided outside. One end of the piezoelectric element 11 is fixed to the fixing portion 19, and the other end is fixed to the end face of the guide shaft 12. Therefore, the guide shaft 12 is vibrated in the X-axis direction, which is the longitudinal direction, with the expansion and contraction of the piezoelectric element 11. The fixing unit 19 is a member of a device (for example, a microscope) on which the micromanipulator 1 is installed.

The guide shaft 12 is a rectangular rod-shaped (generally non-cylindrical) member extending in the X-axis direction.
Axis) parallel to the first guide surface 12a and the second guide surface 12b
And a curved surface 12c contacting the biasing spring 17.
The first guide surface 12a and the second guide surface 12b are planes perpendicular to each other, and the magnetized pattern forming portion 14 is embedded in the center of the first guide surface 12a.

The slider 13 has an L-shape and functions as a movable portion of the first linear actuator. The slider 13 has two mutually perpendicular contact surfaces 1 slidably contacting the first guide surface 12 a and the second guide surface 12 b of the guide shaft 12.
3a and 13b. Also, the slider 13
A magnetoresistive element 15 is embedded in the surface 13a of the guide shaft 12 at a position corresponding to the magnetized pattern forming portion 14.

The urging spring 17 has a structure in which one end of a leaf spring-like member is fixed to the slider 13 by a pin 16, and the other end presses the surface against the guide shaft 12. The end portion 17a of the biasing spring 17 is bent in order to smoothly slide with the guide shaft 12.
The biasing spring 17 allows the guide shaft 1 to move between the first guide surface 12 a of the guide shaft 12 and the surface 13 a of the slider 13.
A constant frictional force is generated between the second second guide surface 12b and the surface 13b of the slider 13. Further, since the urging spring 17 comes into line contact with the circular arc surface 12c of the guide shaft 12, the driving of the slider 13 becomes smooth, and the variation in the operation of the movable portion of the linear actuator is reduced.

The angle of the pressing force FA by the urging spring 17 is
The perpendicular of the first guide surface 12a on the guide shaft 12 and the second
It is preferable that the angle be an average angle with respect to the perpendicular of the guide surface 12b, and in this embodiment, be 45 degrees with respect to the first guide surface 12a and the second guide surface 12b. Thereby, the first guide surface 12a of the guide shaft 12 and the surface 1 of the slider 13
3a, the pressing force, and the pressing force between the second guide surface 12b of the guide shaft 12 and the surface 13b of the slider 13 can be made substantially uniform, and the rotation of the slider 12 can be effectively suppressed. The balance of the frictional force on the two surfaces can be made appropriate.

As described above, the first linear actuator 10
Of the guide shaft 1 by a constant frictional force of an urging spring (generally urging means or elastic means) 17.
The slider 13 is slid in a direction along the X axis when a force greater than the frictional force acts on the slider 13. More specifically, when the piezoelectric element 11 stops or performs a gradual expansion / contraction operation with respect to the guide shaft 12, a force greater than the frictional force of the urging spring 17 does not act on the slider 13. The position of the slider 13 with respect to 12 does not change. On the other hand, the piezoelectric element 1
In the case where the slider 1 performs an instantaneous expansion / contraction operation, an inertia force greater than the frictional force of the urging spring 17 acts on the slider 13, and the position of the slider 13 with respect to the guide shaft 12 is opposite to the expansion / contraction direction of the piezoelectric element 11. It moves in the direction.

In the magnetized pattern forming section 14 formed on the guide shaft 12, magnetic patterns are formed at substantially equal intervals along the X direction. Is configured to detect the movement of the magnetic pattern. Therefore, the slider 13 is
If the slider 15 is moved along 2, the magnetic pattern corresponding to the amount of movement passes near the magnetoresistive element 15, so that a pulse waveform corresponding to the amount of movement of the slider 15 is obtained from the magnetoresistive element 15.

<Operation of Micromanipulator 1> Before describing the operation of the micromanipulator 1, the operation of the first linear actuator 10 configured as described above will be described.

FIG. 4 is a diagram showing an asymmetrical voltage waveform such as a sawtooth waveform as an example of the voltage waveform applied to the piezoelectric element 11. Here, FIG. 4A illustrates a voltage waveform when the slider 13 is moved in the + X direction, and FIG. 4B illustrates a voltage waveform that moves the slider 13 in the −X direction.

In this embodiment, when a negative voltage is applied to the piezoelectric element 11, the piezoelectric element 11 contracts, and conversely,
When a positive voltage is applied to the piezoelectric element 11, the piezoelectric element 11 expands. The amount of expansion and contraction can be varied by the absolute value (that is, the magnitude) of the applied voltage. Therefore, by controlling the voltage applied to the piezoelectric element 11, the amount of expansion and contraction, that is, the vibration width of the guide shaft 12 connected to the piezoelectric element 11 can be controlled,
As a result, it is possible to control the movement of the guide shaft 12 along the X axis.

For example, the voltage waveform in FIG. 4A shows a gentle slope at the rising portion Ka, and the voltage waveform at the falling portion K
b shows a steep inclination. Therefore, at the gentle rising portion Ka of the sawtooth waveform, the slider 13 is integrated with the guide shaft 12 along the X-axis according to the amount of expansion and contraction of the piezoelectric element 11 due to the frictional force between the guide shaft 12 and the slider 13. Move.

On the other hand, at the sharp falling portion Kb of the sawtooth waveform shown in FIG. 4A, the piezoelectric element 11 tries to return to the original position rapidly, while the slider 13 stays at the position after the movement. A large inertial force to be generated occurs, and the inertial force becomes larger than the frictional force, thereby causing a slip between the slider 13 and the guide shaft 12. As a result, the slider 13 relatively moves toward the + X direction by the distance at which the slider 13 slides with respect to the guide shaft 12.

By repeatedly applying a sawtooth waveform as shown in FIG. 4A to the piezoelectric element 11, the slider 13 moves in the + X direction along the guide shaft 12 in a stepwise manner.

Further, the voltage waveform of FIG.
It has the opposite polarity to the waveform of (a). That is, the voltage waveform in FIG. 4B has a rising portion Kc in the negative direction.
Shows a gentle slope, and shows a steep slope at the falling portion Kd. For this reason, at the gentle rising portion Kc of the sawtooth waveform, the slider 13 is integrated with the spline shaft 12 due to the frictional force between the guide shaft 12 and the slider 13, and X is adjusted according to the amount of expansion and contraction of the piezoelectric element 11.
Move along an axis. Since the piezoelectric element 11 contracts when a negative voltage is applied, the piezoelectric element 11 contracts slowly at a gentle rising portion Kc in FIG. 4B. On the other hand, the sharp falling portion K in FIG.
In (d), since the piezoelectric element 11 tries to return from the contracted state to the original state rapidly, a large inertia force is generated in the slider 13, and this inertia force becomes larger than the frictional force. A slip occurs between them and No. 12. As a result, the slider 13 moves relatively to the -X direction side by the distance at which the slider 13 slides with respect to the guide shaft 12.

By repeatedly applying a sawtooth waveform as shown in FIG. 4B to the piezoelectric element 11, the slider 13 moves in the -X direction along the guide shaft 12 in a stepwise manner.

As described above, the first linear actuator 10
Can reciprocate the guide shaft 12 coupled to the piezoelectric element 11 by reciprocating the piezoelectric element 11 serving as the driving means at an asymmetrical speed, whereby the slider 13 can be relatively inertially moved. Will be possible. In other words, the first linear actuator 10 effectively utilizes the frictional force generated between the guide shaft 12 and the slider 13 by the biasing spring 17 and the inertial force acting on the slider 13 to thereby make the slider 13 and the guide shaft A slip in a predetermined direction can be generated between the slider 13 and the guide shaft 12, and as a result, a driving mechanism by a stick-slip mechanism that moves the slider 13 with respect to the guide shaft 12 is configured.

Here, the urging spring 17 presses the first guide surface 12a and the second guide surface 12b of the guide shaft 12 against the two surfaces 13a and 13b of the slider 13. Thirteen rotations can be restricted. Further, the slider 13 with respect to the guide shaft 12
It is possible to appropriately generate a frictional force necessary for sliding of the motor.

A linear encoder 18 is formed by integrally forming a magnetized pattern forming portion 14 formed on the guide shaft 12 and a magnetoresistive element 15 provided inside the slider 13, and moves the slider 13. Accordingly, a pulse signal corresponding to the amount of movement is generated from the magnetoresistive element 15. Then, by performing a predetermined calculation based on this pulse signal, the position of the slider 13 with respect to the guide shaft 12 can be detected.

The operation of the first linear actuator 10 has been described above.
And the third linear actuator 30
The configuration and operation are the same as those of the linear actuator 10.

Therefore, the position of the end effector 45 in the XYZ coordinate system can be controlled by driving the first to third linear actuators 10 to 30.
The rotation operation of the end effector 45 can be controlled to an arbitrary angle by the rotary actuator 40.

By the operation of the micromanipulator 1 described above, it is possible to easily suppress the rotation of the slider of the linear actuator. Further, even when the linear actuators are sequentially connected as in the case of the micromanipulator 5, the present invention is effective in suppressing the accumulation of backlash.

<Second Embodiment><Configuration of Micromanipulator> FIG. 5 is a schematic configuration diagram of a micromanipulator according to a second embodiment of the present invention. In FIG. 5, X, Y, and Z indicate three axes orthogonal to each other.

The micromanipulator 5 includes a first linear actuator 50, a second linear actuator 60, a third linear actuator 70, a rotary actuator 80, and an end effector 85.

First to third linear actuators 50
Are sequentially connected so as to be orthogonal to each other.
In addition, the rotary actuator 80 can change the attitude of the minute object supported by the end effector 85 by changing the attitude of the end effector 85 connected to the distal end portion to an arbitrary angle.

The micromanipulator 5 of the second embodiment
5 is similar to the micromanipulator 1 of the first embodiment, but includes first to third linear actuators 50 to 70 having a configuration different from that of the first embodiment. Hereinafter, the configuration of this linear actuator will be described.

FIG. 6 is a perspective view of the first linear actuator 50. FIG. 7 is a sectional view as viewed from the position VII-VII in FIG.

In the first linear actuator 10 of the first embodiment, the guide shaft 12 is pressed against the slider 13 by the biasing spring 17.
In this configuration, a pressing is performed by a ball 56 which is a steel ball and an urging member 57.

The urging member 57 is made of an elastic member such as polyacetal resin, and has a cylindrical hole 57h into which the ball 56 is fitted. The end of the urging member 57 and the end of the slider 53 are connected, and the ball 56 is fitted and held in the hole 57 to press the guide shaft 52. Further, since the ball 56 comes into a point contact with the contact surface 52c of the guide shaft 52, the driving of the slider 53 becomes smooth, and the variation of the operation of the movable portion as the linear actuator is reduced.

The guide shaft 52 is, as in the first embodiment,
It has a first guide surface 52a and a second guide surface 52b that are in sliding contact with the slider 53, and has a planar contact surface 52c that is in contact with the ball 56. The first guide surface 52a and the second guide surface 52b are planes perpendicular to each other. The guide shaft 52 is provided with a first guide surface 52.
The magnetized pattern forming part 54 is embedded in the center of the area a.

The slider 53 is, like the first embodiment,
First guide surface 52a and second guide surface 52 of guide shaft 52
b, and two vertical surfaces 53a and 53b that are in sliding contact with the first surface b. The slider 53 has a surface 53a corresponding to the magnetized pattern forming portion 54 of the guide shaft 52, and
5 is embedded.

The angle of the pressing force FB from the ball 56 is an average angle between the perpendicular of the first guide surface 52a and the perpendicular of the second guide surface 52b of the guide shaft 52. In this embodiment, the first guide surface Preferably, the angle is 45 degrees with respect to 52a and the second guide surface 52b. Thereby, the first guide surface 52a of the guide shaft 52 and the slider 53
Surface 53a, pressing force, and second guide surface 5 of guide shaft 52
The pressing force between the slider 2b and the surface 53b of the slider 53 can be substantially equalized, and the rotation of the slider 53 can be effectively suppressed, and the frictional force can be appropriately generated.

As described above, the first linear actuator 50
The slider 53 is fixed to the guide shaft 52 by a constant frictional force of the ball 56, and slides in a direction along the X axis when a force greater than the frictional force acts on the slider 53. More specifically, when the piezoelectric element 51 serving as a vibrating means of the guide shaft 72 along the X-axis direction stops or performs a gradual expansion / contraction operation, the slider 53 exerts more force than the frictional force of the ball 56. Since no force acts, the position of the slider 53 with respect to the guide shaft 52 does not change. On the other hand, when the piezoelectric element 51 expands and contracts instantaneously, the urging member 7
7 has an inertia force greater than the frictional force.
The position of the slider 53 relative to 2 moves in the direction opposite to the direction in which the piezoelectric element 51 expands and contracts.

<Operation of Micromanipulator 5> Second
The operation of the micromanipulator according to the embodiment is the same as that of the first embodiment except for the operation of the linear actuator 50.

In the first linear actuator 50, the first
Similar to the linear actuator 10 of the embodiment, by applying the voltage waveform shown in FIG. 4 to the piezoelectric element 51, the piezoelectric element 51 vibrates (expands and contracts), and the slider 53 can be moved with respect to the guide shaft 52. .

In this case, the guide shaft 5 is
Since the second first guide surface 52a and the second guide surface 52b are pressed against the second surfaces 53a and 53b of the slider 53,
The rotation of the slider 53 with respect to the guide shaft 52 can be restricted. Further, the frictional force required for sliding the slider 53 with respect to the guide shaft 52 can be appropriately generated.

Although the operation of the first linear actuator 50 has been described, the same applies to the second linear actuator 60 and the third linear actuator 70.

Accordingly, the position of the end effector 85 in the XYZ coordinate system can be controlled by driving the first to third linear actuators 50 to 70.
The rotation operation of the end effector 85 can be controlled to an arbitrary angle by the rotation actuator 80.

By the operation of the micromanipulator 5, the rotation of the slider of the linear actuator can be easily suppressed as in the first embodiment. Further, even when the linear actuators are sequentially connected as in the case of the micromanipulator 5, it is effective to prevent the accumulation of backlash.

<Modifications> The contact surface 12c of the guide shaft of the first embodiment with the urging spring 17 is not necessarily required to be a curved surface but may be a flat surface.

◎ The first guide surface and the second guide surface in each of the above embodiments.
The guide surfaces are not necessarily perpendicular to each other, and may be at an acute angle or an obtuse angle.

The first guide surface and the second guide surface in each of the above embodiments.
The guide surface is not necessarily a flat surface, but may be a curved surface other than a cylindrical surface.

The sliders 13 and 2 of the first embodiment described above
Regarding 3 and 33, as shown in FIG.
Escape grooves 13f and 13g may be provided in 3b, respectively.
Thereby, the frictional force between the first guide surface 12a of the guide shaft 12 and the contact surface 13a of the slider 13 and the friction force between the second guide surface 12b of the guide shaft 12 and the contact surface 13b of the slider 13 are reduced. Can be optimized by reducing. It is not essential to provide the relief groove on the contact surfaces 13a and 13b of the slider 13, and it may be provided on one of them. Further, the sliders 53 and 6 of the second embodiment
A similar relief groove may be provided for 3 and 73.

Regarding the linear actuators 10 and 50 of the above embodiments, it is not essential to make the sliders 13 and 53 movable. Instead, the sliders 13 and 53 are fixed and the guide shafts 12 and 52 are moved. You may do it.

[0072]

As described above, according to the first to sixth aspects of the present invention, the first surface and the second surface of the guide shaft are pressed relatively to the second surface of the member. Can be easily suppressed.

Further, the pressing means has both functions of generating a frictional force necessary for the members to slide relatively by the vibration of the guide shaft and preventing rotation of the members. Therefore, these functions can be achieved compactly with a small number of parts.

In particular, according to the second aspect of the present invention, since the first surface and the second surface of the guide shaft are planes perpendicular to each other,
Rotation of the member can be appropriately suppressed.

According to the third aspect of the present invention, since the rotation of the members can be suppressed, even if a plurality of linear movable mechanisms are sequentially connected, the accumulation of the backlash can be suppressed.

According to the fourth aspect of the present invention, since the guide shaft and the pressing means are in point contact or line contact, the members can be moved smoothly.

According to the fifth aspect of the present invention, since the pressing means presses the first surface and the second surface of the guide shaft substantially evenly on the second surface of the member, the rotation of the member can be effectively prevented. Can be suppressed.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a micromanipulator 1 according to a first embodiment of the present invention.

FIG. 2 is a perspective view of the first linear actuator 10. FIG.

FIG. 3 is a cross-sectional view as viewed from the position of III-III in FIG. 2;

FIG. 4 is a diagram showing an example of a voltage waveform applied to a piezoelectric element 11;

FIG. 5 is a schematic configuration diagram of a micromanipulator 5 according to a second embodiment of the present invention.

6 is a perspective view of the first linear actuator 50. FIG.

FIG. 7 is a sectional view as viewed from a position VII-VII in FIG. 6;

FIG. 8 is a sectional view of a linear actuator according to a modification.

FIG. 9 is a cross-sectional view of a linear actuator according to a conventional example.

[Explanation of symbols]

1,5 Micromanipulator 10,20,30,50,60,70 Linear actuator 11,21,31,51,61,71 Piezoelectric element 12,22,32,52,62,72 Guide shaft 12a, 52a First guide Surface 12b, 52b Second guide surface 13, 23, 33, 53, 63, 73 Slider 13a, 13b, 53a, 53b Slider contact surface 17 Urging spring 56 Ball 57 Elastic member

Claims (6)

[Claims] 1. A micromanipulator for performing a predetermined operation on a minute object by using a linear movable means, the linear movable means comprising: (a) a first surface extending in a predetermined guide direction; A non-cylindrical guide shaft having a second surface; (b) a member having two surfaces slidingly contacting the first surface and the second surface; and (c) a first surface of the guide shaft. The second surface is
(D) vibrating means for vibrating the guide shaft in the predetermined guide direction, wherein the member is provided on the guide shaft by vibration of the guide shaft. A micromanipulator characterized in that it slides relatively along. 2. The micromanipulator according to claim 1, wherein the first surface and the second surface are planes perpendicular to each other. 3. The micromanipulator according to claim 1, wherein the linear movable means has a plurality of linear movable mechanisms, and the plurality of linear movable mechanisms are sequentially connected. And a micromanipulator. 4. The micromanipulator according to claim 1, wherein the guide shaft and the pressing unit are in point contact or line contact. 5. The micromanipulator according to claim 1, wherein said pressing means includes a first surface of said guide shaft and said second surface.
A micromanipulator that presses the surface substantially evenly against the second surface. 6. An actuator used in a micromanipulator for performing a predetermined operation on a minute object, wherein: (a) a non-cylindrical shape having a first surface and a second surface extending in a predetermined guide direction. A guide shaft, (b) a member having two surfaces that are in sliding contact with the first surface and the second surface, and (c) the first surface and the second surface of the guide shaft
(D) vibrating means for vibrating the guide shaft in the predetermined guide direction, wherein the member is provided on the guide shaft by vibration of the guide shaft. An actuator characterized by relatively sliding along.