JP2001259728A - Method for annealing and pickling copper and copper alloys - Google Patents
Method for annealing and pickling copper and copper alloysInfo
- Publication number
- JP2001259728A JP2001259728A JP2000071521A JP2000071521A JP2001259728A JP 2001259728 A JP2001259728 A JP 2001259728A JP 2000071521 A JP2000071521 A JP 2000071521A JP 2000071521 A JP2000071521 A JP 2000071521A JP 2001259728 A JP2001259728 A JP 2001259728A
- Authority
- JP
- Japan
- Prior art keywords
- pickling
- annealing
- copper
- oxide film
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005554 pickling Methods 0.000 title claims abstract description 72
- 238000000137 annealing Methods 0.000 title claims abstract description 57
- 239000010949 copper Substances 0.000 title claims abstract description 33
- 229910000881 Cu alloy Inorganic materials 0.000 title claims abstract description 19
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 19
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 16
- 238000000034 method Methods 0.000 title claims abstract description 14
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims abstract description 40
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 5
- 229910021645 metal ion Inorganic materials 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 239000002253 acid Substances 0.000 claims description 3
- 238000007598 dipping method Methods 0.000 claims description 3
- 238000005406 washing Methods 0.000 claims 1
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 abstract description 22
- 239000002184 metal Substances 0.000 abstract description 7
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 239000000243 solution Substances 0.000 description 26
- 239000000463 material Substances 0.000 description 9
- 239000000047 product Substances 0.000 description 7
- 239000007864 aqueous solution Substances 0.000 description 6
- 239000001273 butane Substances 0.000 description 6
- 229910002091 carbon monoxide Inorganic materials 0.000 description 6
- 238000002485 combustion reaction Methods 0.000 description 6
- IJDNQMDRQITEOD-UHFFFAOYSA-N n-butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 description 6
- OFBQJSOFQDEBGM-UHFFFAOYSA-N n-pentane Natural products CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 6
- 239000002244 precipitate Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 101100243025 Arabidopsis thaliana PCO2 gene Proteins 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- MOFOBJHOKRNACT-UHFFFAOYSA-N nickel silver Chemical compound [Ni].[Ag] MOFOBJHOKRNACT-UHFFFAOYSA-N 0.000 description 1
- 239000010956 nickel silver Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Abstract
(57)【要約】
【課題】焼鈍工程で酸化損耗する金属量が多く,生産歩
留が低下する。厚く存在する酸化膜を短時間で酸洗除去
するには,硫酸及び過酸化水素の濃度を高くし,その使
用量を多くする必要がある。とくに過酸化水素は高価
で,消耗量も多いという問題があった。
【解決手段】銅および銅合金の焼鈍酸洗処理において,
焼鈍後の酸化皮膜の厚さを100 nm以下に制御し,次い
で,硫酸水溶液に浸漬することにより酸洗処理を行なう
銅及び銅合金の焼鈍酸洗方法。(57) [Abstract] [PROBLEMS] A large amount of metal is oxidized and worn in an annealing step, and the production yield is reduced. In order to remove a thick oxide film by pickling in a short time, it is necessary to increase the concentrations of sulfuric acid and hydrogen peroxide and increase the amount of use. In particular, there is a problem that hydrogen peroxide is expensive and consumes a large amount. In an annealing pickling treatment of copper and a copper alloy,
An annealing and pickling method for copper and copper alloys in which the thickness of the oxide film after annealing is controlled to 100 nm or less and then immersed in an aqueous sulfuric acid solution for pickling.
Description
【0001】[0001]
【発明の属する技術分野】本発明は,ブタン燃焼型焼鈍
炉等を用いた連続焼鈍酸洗ラインにおける,銅及び銅合
金の焼鈍酸洗方法に関する。The present invention relates to a method for annealing and pickling copper and copper alloys in a continuous annealing pickling line using a butane combustion type annealing furnace or the like.
【0002】[0002]
【従来の技術】銅および銅合金条は,高性能バネ,コネ
クタ,端子,リードフレーム,プリント基板等の電子電
気材料等,多岐の分野で用いられていおり,その製造工
程においては,圧延と焼鈍を繰り返して製品厚みまで加
工している。ここで焼鈍は,(1)圧延で硬化した材料
を軟化させ圧延加工性を回復させること,(2)結晶粒
径および結晶方位を調整し製品に所望の特性を付与する
こと,(3)最終圧延後の歪取焼鈍として,製品のばね
性を向上させ,残留応力を除去すること等を目的として
実施される。2. Description of the Related Art Copper and copper alloy strips are used in various fields such as high-performance springs, connectors, terminals, lead frames, electronic and electrical materials such as printed circuit boards, and the like. Is repeatedly processed to the product thickness. Here, annealing includes (1) softening a material hardened by rolling to restore rolling workability, (2) adjusting crystal grain size and crystal orientation to impart desired properties to a product, and (3) finalizing. The strain relief annealing after rolling is performed for the purpose of improving the resiliency of the product, removing residual stress, and the like.
【0003】一般的に,銅および銅合金の焼鈍では,ブ
タン燃焼型等の連続焼鈍炉が用いられることが多いが,
このタイプの焼鈍炉を用いた場合,材料表面には不可避
的に厚さが100〜300nmの酸化皮膜が形成される。このよ
うな酸化皮膜は,製品の外観不良を引き起こし,さらに
製品の表面特性をも劣化させるため,次工程の酸洗で酸
化皮膜を除去している。酸洗処理では,従来から混酸と
呼ばれる硫酸と過酸化水素を混合した水溶液が使用され
てきた。In general, for annealing copper and copper alloys, a continuous annealing furnace such as a butane combustion type is often used.
When this type of annealing furnace is used, an oxide film having a thickness of 100 to 300 nm is inevitably formed on the surface of the material. Such an oxide film causes poor appearance of the product and also deteriorates the surface characteristics of the product. Therefore, the oxide film is removed by pickling in the next step. In the pickling treatment, an aqueous solution called a mixed acid, in which sulfuric acid and hydrogen peroxide are mixed, has conventionally been used.
【0004】[0004]
【発明が解決しようとする課題】従来,ブタン燃焼型等
の焼鈍炉を用いた連続焼鈍処理においては,製品特性の
作り込みにのみ関心が払われてきた。すなわち,所望の
特性を得るため炉の温度および材料の通板速度が重視さ
れ,酸化膜の生成に重要な影響を及ぼす焼鈍炉内の雰囲
気については配慮されていなかった。そして,焼鈍炉で
厚い酸化膜を生成させ,この酸化膜を,次の酸洗工程に
おいて,強力な腐食力を有する硫酸と過酸化水素の混合
水溶液で除去する方法で,銅および銅合金条を製造して
いた。Heretofore, in the continuous annealing using an annealing furnace such as a butane combustion type, attention has been paid only to the production of product characteristics. That is, in order to obtain desired characteristics, importance is placed on the furnace temperature and the material passing speed, and the atmosphere in the annealing furnace, which has an important effect on the formation of an oxide film, is not considered. Then, a thick oxide film is formed in an annealing furnace, and in the next pickling step, copper and copper alloy strips are removed by a method of removing with a mixed aqueous solution of sulfuric acid and hydrogen peroxide having a strong corrosive power. Had been manufactured.
【0005】このような従来の焼鈍酸洗様態では,以下
のような問題があり,これらが生産効率を低下させ製造
コストを増大させる要因となっていた。 (1)焼鈍工程で酸化損耗する金属量が多く,生産歩留
が低下する。 (2)厚く存在する酸化膜を短時間で酸洗除去するに
は,硫酸及び過酸化水素の濃度を高くし,その使用量を
多くする必要がある。とくに過酸化水素は高価で,消耗
量も多いことから,コスト増加の大きな要因となってい
た。[0005] In such a conventional mode of annealing and pickling, there are the following problems, which are factors that lower the production efficiency and increase the production cost. (1) The amount of metal that is oxidized and worn in the annealing step is large, and the production yield is reduced. (2) In order to remove a thick oxide film by pickling in a short time, it is necessary to increase the concentrations of sulfuric acid and hydrogen peroxide and increase the amount of use. In particular, hydrogen peroxide is expensive and consumes a large amount, which has been a major factor in increasing costs.
【0006】(3)過酸化水素を混合した硫酸水溶液を
使用する場合,酸化膜だけでなく銅及び銅合金の母材ま
で溶解する。このため, 酸洗液中に溶出する金属量が多くなり,液の寿命が短
くなる。また,廃液中の金属量が増え,その処理コスト
が増大する。 酸洗液中の金属濃度が高くなると沈殿物が生成する。
また,Sn等を含有する銅合金を処理する場合,SnO2の酸
化沈殿物が生成する。これら沈殿物は,酸洗槽の配管詰
まり等の不具合を引き起こす。(3) When an aqueous sulfuric acid solution mixed with hydrogen peroxide is used, not only the oxide film but also the base material of copper and copper alloy are dissolved. For this reason, the amount of metal eluted in the pickling solution increases, and the life of the solution is shortened. In addition, the amount of metal in the waste liquid increases, and the processing cost increases. When the metal concentration in the pickling solution increases, a precipitate is formed.
Further, when a copper alloy containing Sn or the like is treated, an oxide precipitate of SnO 2 is generated. These precipitates cause problems such as clogging of the pickling tank piping.
【0007】材料の結晶組織が現出することがあり,
この場合,酸洗後の材料表面に色調ムラが生じる。The crystal structure of the material may appear,
In this case, color unevenness occurs on the surface of the material after the pickling.
【0008】本発明は以上の事情を背景としてなされた
もので,(1)ブタン燃焼型等の焼鈍炉の炉内雰囲気を
制御することで酸化皮膜の生成を抑制した上で,(2)
酸洗処理条件を最適化し,過酸化水素を含有しない硫酸
水溶液により酸化膜除去を行なうことにより,上記課題
を解消し,銅及び銅合金の焼鈍酸洗処理を低コストで効
率よく実施できる方法を提供することを目的とする。The present invention has been made in view of the above circumstances. (1) After controlling the atmosphere in a furnace such as a butane combustion type annealing furnace to suppress the formation of an oxide film, (2)
By optimizing the pickling conditions and removing the oxide film with a sulfuric acid aqueous solution containing no hydrogen peroxide, the above-mentioned problems can be solved and a method that can efficiently and efficiently perform the annealing and pickling of copper and copper alloys at low cost. The purpose is to provide.
【0009】[0009]
【課題を解決するための手段】ブタン燃焼型の焼鈍炉内
雰囲気は,C4H10,CO,CO2,O2およびH2Oが存在してい
る。焼鈍後の酸化膜の厚みは,CO,CO2ならびにO2の各
濃度や焼鈍時間,温度により決定される。焼鈍時間およ
び温度は,目標とする製品特性によって決められるた
め,酸化膜の生成を抑制するにはCO,CO2ならびにO2の
各濃度を制御する必要がある。Means for Solving the Problems The atmosphere in the butane combustion type annealing furnace contains C 4 H 10 , CO, CO 2 , O 2 and H 2 O. The thickness of the oxide film after annealing is determined by the respective concentrations of CO, CO 2 and O 2 , the annealing time, and the temperature. Since the annealing time and temperature are determined depending on the target product characteristics, it is necessary to control the concentrations of CO, CO 2 and O 2 to suppress the formation of an oxide film.
【0010】本発明者等は, 1)銅および銅合金の焼鈍酸洗処理において,焼鈍後の
酸化皮膜の厚さを100 nm以下に制御し,次いで,硫酸水
溶液に浸漬することにより酸洗処理を行なうことを特徴
とする表面性状にすぐれた銅及び銅合金の焼鈍酸洗方
法。 2)焼鈍処理において、焼鈍炉内の酸素濃度を0.01 vol%
以下,PCO/PCO2比(Piはiの圧力)を0.29以上に調整
し,焼鈍後の酸化皮膜の厚さを100 nm以下に制御する上
記1)記載の焼鈍酸洗方法。[0010] The inventors of the present invention have stated that 1) in the annealing and pickling treatment of copper and copper alloys, the thickness of the oxide film after annealing is controlled to 100 nm or less, and then the pickling treatment is performed by dipping in an aqueous sulfuric acid solution. A method of annealing and pickling copper and copper alloys having excellent surface properties. 2) In the annealing process, the oxygen concentration in the annealing furnace was reduced to 0.01 vol%.
The annealing pickling method as described in 1) above, wherein the P CO / P CO2 ratio (Pi is the pressure of i) is adjusted to 0.29 or more and the thickness of the oxide film after annealing is controlled to 100 nm or less.
【0011】3)酸洗処理において,硫酸濃度を2〜30
wt%,pHを1以下,温度を20〜40℃,Cu2+濃度を0.1〜3 w
t%とする酸洗液に浸漬することにより酸洗処理を行なう
上記1)および2)記載の焼鈍酸洗方法。 4)酸洗処理において,Cu以外の金属イオン濃度の総計
を2wt%以下とする酸洗液に浸漬することにより酸洗処理
を行なう上記1)および2)記載の焼鈍酸洗方法。を見
出した。3) In the pickling treatment, the concentration of sulfuric acid is 2 to 30.
wt%, pH 1 or less, temperature 20 ~ 40 ℃, Cu 2+ concentration 0.1 ~ 3 w
The annealing and pickling method according to the above 1) and 2), wherein the pickling treatment is performed by immersing the pickling solution in a pickling solution having a concentration of t%. 4) The annealing and pickling method according to the above 1) and 2), wherein the pickling treatment is performed by dipping in a pickling solution having a total concentration of metal ions other than Cu of 2 wt% or less. Was found.
【0012】以下本発明について詳細に述べる。 (1)焼鈍後の酸化膜厚み 過酸化水素を含有しない硫酸水溶液で酸化膜を安定して
除去するためには,酸化膜の厚みを100 nm以下にする必
要がある。酸化膜の厚みが100 nmを超えると,後述する
ように酸洗条件を調整しても,硫酸水溶液では酸化膜を
完全に除去することはできない。酸化膜厚さは薄いほど
好ましいが,次に述べるように焼鈍雰囲気によって限定
される。Hereinafter, the present invention will be described in detail. (1) Thickness of oxide film after annealing In order to stably remove the oxide film with a sulfuric acid aqueous solution containing no hydrogen peroxide, the thickness of the oxide film needs to be 100 nm or less. If the thickness of the oxide film exceeds 100 nm, the sulfuric acid aqueous solution cannot completely remove the oxide film even if the pickling conditions are adjusted as described later. Although the oxide film thickness is preferably as small as possible, it is limited by the annealing atmosphere as described below.
【0013】(2)焼鈍炉の雰囲気 O2濃度を0.01 vol%以下にし,かつPCO/PCO2比を0.29(P
iはiの圧力)以上とすることで,焼鈍後の銅及び銅合金
の酸化皮膜厚さを100 nm以下に制御できる。もちろん,
O2濃度が低くPCO/PCO2比が大きいほど,酸化皮膜をより
薄くすることができるが,焼鈍コストが増大する,ガス
爆発および火災の危険性が増すなどの弊害が生じる。よ
り好ましい範囲は、 0.001≦O2濃度(vol%)≦0.01, 0.29≦PCO/PCO2≦1.0 である。O2濃度およびPCO/PCO2比は,空気と燃料ガスの
比(空燃比)を調整することにより制御できる。(2) The atmosphere in the annealing furnace has an O 2 concentration of 0.01 vol% or less and a P CO / P CO 2 ratio of 0.29 (P
When i is equal to or higher than i), the thickness of the oxide film of copper and copper alloy after annealing can be controlled to 100 nm or less. of course,
The lower the O 2 concentration and the higher the P CO / P CO2 ratio, the thinner the oxide film, but the disadvantages include increased annealing costs and increased gas explosion and fire risks. A more preferred range is 0.001 ≦ O 2 concentration (vol%) ≦ 0.01, 0.29 ≦ P CO / P CO2 ≦ 1.0. O 2 concentration and PCO / PCO2 ratio can be controlled by adjusting the ratio of air and fuel gas (air-fuel ratio).
【0014】(3)酸洗液 過酸化水素を含有しない硫酸水溶液を用いて,厚さ100
nm以下の酸化皮膜を安定して除去するためには,酸洗液
を以下の状態で使用する必要がある。(3) Pickling solution: Use an aqueous sulfuric acid solution containing no hydrogen peroxide to a thickness of 100
In order to stably remove oxide films of nm or less, it is necessary to use a pickling solution in the following conditions.
【0015】pH:金属酸化物の安定性はpHにより支配
されており,酸洗液のpHを低くするほど,酸化膜の除去
が容易になる。pHは高くても,1以下の範囲に調整する
必要がある。 酸洗液の温度:20℃より低温では酸化膜の除去速度
が低下する。一方,40℃より高温ではpHを安定して維
持することが困難になる。酸洗液の温度は,20〜40℃が
最適である。PH: The stability of the metal oxide is governed by the pH, and the lower the pH of the pickling solution, the easier the removal of the oxide film. Even if the pH is high, it must be adjusted to a range of 1 or less. When the temperature of the pickling solution is lower than 20 ° C., the removal rate of the oxide film decreases. On the other hand, if the temperature is higher than 40 ° C., it becomes difficult to stably maintain the pH. The optimal temperature of the pickling solution is 20-40 ° C.
【0016】Cu2+濃度:Cu2+が酸洗液中に存在する
と,Cu2+が酸化剤として作用し,酸洗液の腐食能が向上
する。このような効果はCu2+が0.1 wt%以上存在する場
合に認められる。一方,Cu2+濃度が3 wt%を超えると,
却って酸洗液の酸化膜の除去能力は低下する。 よってC
u2+濃度は、0.1〜3 wt%が好ましい。Cu 2+ concentration: When Cu 2+ is present in the pickling solution, Cu 2+ acts as an oxidizing agent, and the corrosion ability of the pickling solution is improved. Such an effect is recognized when Cu 2+ is present at 0.1 wt% or more. On the other hand, when the Cu 2+ concentration exceeds 3 wt%,
Rather, the ability of the pickling solution to remove the oxide film decreases. Therefore C
The u 2+ concentration is preferably 0.1 to 3 wt%.
【0017】Cu2+以外の金属イオン濃度:酸洗処理を
続けると,酸洗液中の金属濃度が増加し,酸洗液の酸化
膜除去能力が低下する。また,りん青銅等のSnを含有す
る銅合金を処理した場合,酸洗液中に溶出したSn2+が時
間の経過とともにSn4+となって液中に沈殿物(SnO2)を
生成し,酸洗槽の配管詰まりを引き起こす。Cu2+以外の
金属イオン濃度が2 wt%以下であれば,酸洗液の酸化能
力低下は認められず,沈殿物による実害は生じない。Concentration of metal ions other than Cu 2+ : If the pickling treatment is continued, the metal concentration in the pickling solution increases, and the ability of the pickling solution to remove an oxide film decreases. When a Sn-containing copper alloy such as phosphor bronze is treated, Sn 2+ eluted in the pickling solution becomes Sn 4+ over time to form a precipitate (SnO 2 ) in the solution. , Clogging the pickling tank piping. If the concentration of metal ions other than Cu 2+ is 2 wt% or less, no decrease in the oxidizing ability of the pickling solution is observed, and no actual harm is caused by the precipitate.
【0018】硫酸濃度:硫酸濃度を2 wt%以上にすれ
ば,酸洗液の状態を上記範囲に調整した場合に,厚さ10
0 nmの銅合金酸化皮膜を除去することができる。一方,
硫酸濃度が30 wt%を超えると,酸洗液の作製コストおよ
び廃液の処理コストが増大する。よって硫酸濃度は、2
〜30wt%であることが好ましい。Sulfuric acid concentration: If the sulfuric acid concentration is 2 wt% or more, the thickness of the pickling solution is adjusted to the above range, the thickness becomes 10%.
The 0 nm copper alloy oxide film can be removed. on the other hand,
If the sulfuric acid concentration exceeds 30 wt%, the cost of preparing the pickling solution and the cost of treating the waste liquid increase. Therefore, the sulfuric acid concentration is 2
It is preferably about 30% by weight.
【0019】[0019]
【実施例】タフピッチ銅(C1100,Cu−0.01%O),りん
青銅(C5210,Cu−8%Sn−0.1%P),洋白(C7521,64%Cu
-18%Ni-18%Zn)および黄銅(C2689,Cu-35%Zn)の厚さ
0.3mmの条を,ブタン燃焼型の横型焼鈍炉を用い,炉温7
00℃において種々の炉内雰囲気で焼鈍し,その後,種々
の状態に調整した硫酸水溶液を用いて酸洗処理を行っ
た。[Example] Tough pitch copper (C1100, Cu-0.01% O), phosphor bronze (C5210, Cu-8% Sn-0.1% P), nickel silver (C7521, 64% Cu)
-18% Ni-18% Zn) and brass (C2689, Cu-35% Zn) thickness
Using a butane combustion type horizontal annealing furnace, a 0.3 mm strip was
Annealing was performed in various furnace atmospheres at 00 ° C., and thereafter, pickling treatment was performed using sulfuric acid aqueous solutions adjusted to various states.
【0020】酸洗前後の試料につき,オージェ電子分光
法により,Arスパッタリングを行ないながら,オージェ
電子スペクトルを測定し,合金成分および酸素ピーク強
度の深さ方向のプロファイルを求めた。そして,このプ
ロファイルより,酸化皮膜の厚さを測定した。酸化膜と
母材の境界は,酸素のピーク強度が,試料表層での値と
母材での値との中間の値となる位置とした。また,Arス
パッタリング速度は,標準試料SiO2での値を用いた。表
1に焼鈍条件および酸洗条件を示し,それぞれの場合に
測定された酸化膜厚さを示す。Auger electron spectra of the samples before and after pickling were measured by Auger electron spectroscopy while performing Ar sputtering, and the alloy component and oxygen peak intensity in the depth direction were determined. From this profile, the thickness of the oxide film was measured. The boundary between the oxide film and the base material was set at a position where the peak intensity of oxygen was an intermediate value between the value on the sample surface layer and the value on the base material. The Ar sputtering rate used was the value for the standard sample SiO 2 . Table 1 shows the annealing conditions and the pickling conditions, and shows the oxide film thickness measured in each case.
【0021】[0021]
【表1】 [Table 1]
【0022】本発明例No.1〜では,酸洗後の酸化膜厚さ
は,5 nm以下と薄く,酸洗後の表面色調も良好であっ
た。一方,比較例のNo.1およびNo.2は,それぞれ焼鈍炉
内のPCO/PCO2比および酸素濃度が規定範囲から外れたた
め,焼鈍後の酸化膜厚が100nmを超え,酸洗後にも5nmを
超える厚い酸化膜が残留した。比較例のNo.3〜7は,焼
鈍後の酸化膜厚は100nm以下であるが,No.3は酸洗液のp
Hが1を超えたため,No.4は酸洗液の温度が20℃を下回
ったため,No.5はCu2+濃度が0.1wt%を下回ったため,N
o.6はCu2+濃度が3wt%を超えたため,No.7はCu2+以外の
金属濃度が2wt%を超えたため,酸洗後にも5 nmを超える
厚い酸化膜が残留した。In Example Nos. 1 to 4 of the present invention, the oxide film thickness after pickling was as thin as 5 nm or less, and the surface color after pickling was also good. On the other hand, No.1 and No.2 of the comparative example, since the P CO / P CO2 ratio and the oxygen concentration of each annealing furnace off-specified range, exceeding the oxide film thickness is 100nm after annealing, even after pickling A thick oxide film exceeding 5 nm remained. In Comparative Examples Nos. 3 to 7, the oxide film thickness after annealing was 100 nm or less.
No. 4 because the temperature of the pickling solution was lower than 20 ° C because H exceeded 1, and No. 5 because the Cu 2+ concentration was lower than 0.1 wt%
In No. 6, the Cu 2+ concentration exceeded 3 wt%, and in No. 7, the metal concentration other than Cu 2 + exceeded 2 wt%, so that a thick oxide film exceeding 5 nm remained even after pickling.
【0023】なお,いずれの比較例においても,酸洗後
の試料表面の色調に,くすみやむら等が観察された。In each of the comparative examples, dullness and unevenness were observed in the color tone of the sample surface after pickling.
【0024】[0024]
【発明の効果】以上の説明で明らかなように,この発明
によれば銅及び銅合金を焼鈍炉で焼鈍する際,炉内雰囲
気を管理し焼鈍での酸化膜生成を100nm以下に抑制する
ことができれば,次工程の酸洗工程において酸洗液とし
て過酸化水素を使用せず好ましい焼鈍酸洗を行うことが
出来る。また、硫酸2〜30wt%,pHを1以下,温度20〜40
℃,Cu2+濃度を0.1〜3wt%,Cu以外の金属イオン濃度の
総計を2wt%以下とすることで効率的な酸洗が可能であ
り,表面性状にすぐれた銅及び銅合金を得ることがで
き,これにより歩留の上昇,建浴コストや廃液処理コス
トの削減という効果が期待できる。As is apparent from the above description, according to the present invention, when copper and copper alloy are annealed in an annealing furnace, the atmosphere in the furnace is controlled and the formation of an oxide film during the annealing is suppressed to 100 nm or less. If it is possible, preferred annealing pickling can be performed without using hydrogen peroxide as a pickling solution in the next pickling step. Also, sulfuric acid 2 ~ 30wt%, pH 1 or less, temperature 20 ~ 40
Efficient pickling is possible by setting the concentration of Cu 2+ to 0.1 to 3 wt% and the total concentration of metal ions other than Cu to 2 wt% or less to obtain copper and copper alloy with excellent surface properties. This can be expected to have the effects of increasing the yield, reducing the cost of building baths and the cost of treating waste liquid.
Claims (4)
焼鈍後の酸化皮膜の厚さを100 nm以下に制御し,次い
で,硫酸水溶液に浸漬することにより酸洗処理を行なう
ことを特徴とする銅及び銅合金の焼鈍酸洗方法。Claims: 1. In the annealing and pickling treatment of copper and copper alloy,
A method for annealing and pickling copper and copper alloys, comprising controlling the thickness of an oxide film after annealing to 100 nm or less, and then performing an acid pickling treatment by immersing in an aqueous sulfuric acid solution.
0.01 vol%以下,PCO/PCO2比(Piはiの圧力)を0.29以上
に調整し,焼鈍後の酸化皮膜の厚さを100 nm以下に制御
することを特徴とする,請求項1の焼鈍酸洗方法。2. In the annealing treatment, the oxygen concentration in the annealing furnace is reduced.
0.01 vol% or less, by adjusting P CO / P CO2 ratio (Pi is the pressure of i) to 0.29 or higher, and controlling the thickness of the oxide film after annealing below 100 nm, of claim 1 Annealing pickling method.
%,pHを1以下,温度を20〜40℃,Cu2+濃度を0.1〜3 wt%
とする酸洗液に浸漬することにより酸洗処理を行なうこ
とを特徴とする請求項1および2の焼鈍酸洗方法。3. The pickling treatment, wherein the sulfuric acid concentration is 2 to 30 wt.
%, PH 1 or less, temperature 20 ~ 40 ℃, Cu 2+ concentration 0.1 ~ 3 wt%
3. An annealing pickling method according to claim 1, wherein the pickling treatment is performed by immersing the pickling liquid in the pickling liquid.
度の総計を2wt%以下とする酸洗液に浸漬することにより
酸洗処理を行なうことを特徴とする請求項1および2の
焼鈍酸洗方法。4. The annealing acid according to claim 1, wherein in the pickling treatment, the pickling treatment is performed by dipping in a pickling solution having a total concentration of metal ions other than Cu of 2 wt% or less. Washing method.
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|---|---|---|---|
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
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| Publication Number | Publication Date |
|---|---|
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| Country | Link |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010222654A (en) * | 2009-03-24 | 2010-10-07 | Nippon Steel Engineering Co Ltd | Method of pickling copper-based stock |
-
2000
- 2000-03-15 JP JP2000071521A patent/JP2001259728A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010222654A (en) * | 2009-03-24 | 2010-10-07 | Nippon Steel Engineering Co Ltd | Method of pickling copper-based stock |
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