JP2001247960A - Clad wire type vapor deposition material and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vapor deposition material capable of depositing, by a single vapor-deposition operation, a deposit film where a vapor-deposition composition in the initial stage of vapor deposition is different from that in the final stage of vapor deposition and the dispersion of film composition in the initial stage of vapor deposition is minimized. SOLUTION: In the clad wire type vapor deposition material in which high vapor pressure metal is used as a core material and a low vapor pressure metal is used as a sheath material, the vapor pressure of the core material is lower than that of aluminum and the wall thickness deflection of the sheath material is <=2.0. The core material is clad with the sheath material, which is wiredrawn, to the prescribed outside diameter and length. The end face of the resultant nearly cylindrical vapor deposition material is chamfered. By this method, the material can be easily subjected to automatic feed into a vapor deposition mechanism by means of a parts feeder, etc.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vapor deposition material used for producing a heat radiation film, and more particularly to a vapor deposition material used for producing a heat radiation film provided on the inner wall of a cathode ray tube.

[0002]

2. Description of the Related Art A fluorescent material, a light reflection film, and a shadow mask are arranged on the inner wall of glass of a cathode ray tube. When the electrons emitted from the electron gun pass through the shadow mask and hit the phosphor, the phosphor emits light and an image is obtained. In order to effectively use light emitted from the phosphor, a light reflecting film is provided.
As this light reflection film, an aluminum vapor deposition film having high light reflectance in the visible light region is mainly used.

In a cathode ray tube, electrons emitted from an electron gun also hit a shadow mask, and the temperature of the shadow mask rises and infrared rays are emitted. The infrared rays are reflected on the aluminum, and the temperature of the shadow mask increases more and more. When the shadow mask thermally expands, electrons do not accurately hit the phosphor, causing a problem of color shift. As a method of preventing this color shift, an invar material having a small coefficient of thermal expansion is used for a shadow mask, or a carbon powder is applied on a light reflection film to reduce infrared reflection, that is, to act as a heat radiation film. Is being done. However, there were problems that the invar material was expensive and that the application of carbon powder became large-scale in terms of equipment. In the case of a cathode ray tube, an aluminum film is vapor-deposited on the inner wall to form a single-layer heat dissipation film, or a carbon film is sprayed / coated on the aluminum film to provide a two-layer heat dissipation film. In many cases, the heat dissipation film is composed of two or more layers than a single layer film. In the case of a film having two or more layers, the composition of each layer was composed of completely different elements.

[0004] In these prior arts, a method of producing films having different compositions at the initial stage and the final stage in a single vapor deposition operation has hardly been studied. Originally, technical studies have focused on obtaining a uniform deposited film with no difference in the composition of the deposited film between the initial and final stages of deposition. A raw material (referred to as a raw material A) is placed on an evaporating tray to evaporate, and then a vapor deposition raw material (referred to as a B raw material) different from the initial vapor deposition raw material is mounted again on the evaporating tray and evaporated. However, in this method, the A composition film and the B composition film are completely separated from each other to form a vapor deposition film having a two-layer structure, and two vapor deposition operations are required.

As a method of realizing a film which continuously changes from the A composition to the B composition by one vapor deposition, it is conceivable to use a difference in vapor pressure. That is, it is conceivable that the raw material A and the raw material B are integrated by melting or powder metallurgy to form a raw material for vapor deposition. Different compositions are obtained between the initial stage and the final stage of vapor deposition due to the difference in vapor pressure, but the composition difference is small.

For example, 81.4% by weight of nickel, 1% of iron
The composition of the film when deposited using a deposition material prepared by melting 8.6 wt% of the raw material is 80.2 wt% of nickel and 19.8 wt% of iron in the film at the initial stage of the deposition, and the deposition is performed at about 3800 °. At the end, 81.0 wt% nickel, 1 iron
It becomes 9.0 wt%. 0.8wt% at the beginning and end of deposition
A difference in the composition of The difference in the composition of the deposited film compared to the deposition material is that the vapor pressure of iron is higher than nickel,
This is because iron evaporates more easily than nickel. The difference of 0.8 wt% between the initial stage and the final stage of deposition is large for producing a film having the same composition, but it is not a satisfactory composition difference for producing a film having a large composition difference between the initial stage and the final stage of vapor deposition in one deposition.

[0007] As a method of increasing the composition difference, a material having a low vapor pressure is placed on an evaporating tray facing an object to be deposited, and a material having a high vapor pressure is placed thereon.
For example, nickel and iron plates may be replaced with nickel 81.
4wt%, iron 18.6wt% weight on the evaporation tray,
When iron is deposited in the order of nickel and iron, the composition of the deposited film is 60.0 wt% nickel and 40.0% iron in the initial stage of the deposition.
wt%, nickel at the end of vapor deposition 92.0 wt%, iron4.
At 0 wt%, the composition difference is larger than that of the alloy method, but it is difficult to set the vapor deposition raw material on the evaporation tray without shifting, and automation has been a bottleneck. When the deposition material is shifted, the composition of the film changes. That is, the composition difference between the initial stage and the final stage of the deposition varies for each deposition operation. When 30 experiments were conducted, the film composition at the initial stage of deposition was nickel 5
3.4 to 81.0 wt%, iron 19.0 to 46.6 wt%
It could not be used widely.

[0008] In order to automate the supply of vapor deposition raw materials to the evaporation tray, it is important that the vapor deposition raw materials have the same shape, that they can be easily aligned and fed by the parts feeder, and that they are easy to handle when handled by a robot. In addition, it is necessary to make the volume (weight) of the raw material accurate in order to control the thickness of the deposited film.
In the case of a round bar-shaped deposition material having an outer diameter of φ1 to 3 mm and a length of 7 to 15 mm, the outer dimensions are ± 0.05 mm, length ± 0.1
A tolerance of about mm is required.

In powder metallurgy and melt casting, these shapes,
In order to obtain accuracy, it was necessary to manufacture a very expensive mold or machine the base material to a desired shape.
There is a drawback that the cost is high regardless of whether an expensive mold is manufactured or machined.

[0010] Further, when producing by powder metallurgy, it is difficult to use tin having a low melting point as a raw material. For example, melting point 660
In a powder metallurgy method using hot pressing (HP) of aluminum powder having a melting point of 231 ° C. and tin powder having a melting point of 231 ° C., the powder hardly hardens at a temperature of about 200 ° C. lower than the melting point of tin even when HP is performed. Specific gravity of aluminum 2.69 (g / cm ³ )
In comparison with tin, the specific gravity of tin is 7.28 (g / cm ³ ), which is about three times, and even at 50 wt%, the volume is about 20 vol%, so that aluminum cannot be welded and is very brittle even when HP is performed. , Could not be machined to the required shape.

As a measure to solve these problems, the inventors have provided a columnar core material and a cylindrical exterior material provided so as to cover the core material, wherein the exterior material is a metal having a high vapor pressure, A clad wire type vapor deposition material whose core material is a low vapor pressure metal has been developed and filed. By using the clad wire type vapor deposition material, for example, a vapor deposition film having an inclined composition in which the initial vapor deposition is aluminum-rich, the intermediate vapor deposition is an alloy of aluminum and nickel, and the final vapor deposition is nickel-rich, is a single vapor deposition operation. Are disclosed.

However, when a large number of vapor-deposited films were formed using a clad wire type vapor-deposited material in which the core material was nickel and the exterior material was aluminum, and the composition was analyzed in the film thickness direction, the It has been found that variations occur. It was found that the aluminum content varied in the range of 98 to 100% (the remainder being nickel) in the composition at the initial stage of vapor deposition.

[0013]

Therefore, in the present invention,
The film composition at the beginning of deposition and the film composition at the end of deposition are different,
The composition at the beginning of vapor deposition is rich in a material having a high vapor pressure, and the composition at the end of vapor deposition is to obtain a vapor-deposited film having a material rich in a low vapor pressure. In addition, a vapor deposition film can be easily obtained, and a vapor deposition film having a large composition difference between the initial stage and the final period of the vapor deposition can be skipped by a single vapor deposition, thereby providing a vapor deposition material having a small variation in the vapor deposition film composition, or An object of the present invention is to provide a vapor deposition material that can easily supply a vapor deposition raw material to an apparatus easily.

[0014]

The clad wire type vapor deposition material of the present invention comprises a core material and a cylindrical exterior material provided so as to cover the core material, wherein the exterior material is a metal having a high vapor pressure. Wherein the core material is a metal having a low vapor pressure, and the thickness deviation ratio of the exterior material is 2.0 or less. In the present invention, the core material is preferably a columnar core material. The column shape means a shape including a rod or a rod shape, a column or a column shape, a polygonal column or a polygonal column shape, and the like. What is cylindrical
It means a structure including a configuration in which the core material is closely attached to at least the side surface.

[0015] Another clad wire type vapor deposition material of the present invention comprises a core material and a cylindrical exterior material provided so as to cover the core material, wherein the exterior material is a metal having a high vapor pressure. The core material is a metal having a low vapor pressure, and the thickness ratio of the exterior material is 1.
6 or less.

Here, a description relating to the thickness deviation ratio will be given. Insert the rod shape as the core material into the pipe as the exterior material and perform cold drawing to produce a clad wire type vapor deposition material, but when producing a long vapor deposition material, the inner diameter of the pipe and the core It is difficult to insert the core rod into the pipe unless the difference in the outer diameter of the rod, that is, the gap is secured.
For example, according to the study of the inventor, the maximum outer diameter of a rod that can be easily inserted into a pipe (inner diameter φ6.25 mm) having a length of several meters is about φ5.5 mm. Therefore,
The outer diameter of the core is preferably 80% or less of the inner diameter of the pipe. However, if cold drawing is performed in a state where there is a difference between the inner diameter of the exterior material and the outer diameter of the core material, the center of the core material does not exactly coincide with the center of the exterior material. It has been found that a vapor deposition material having a difference is easily generated.

When a vapor deposition material is produced by processing a vapor deposition material having a difference in the thickness of the exterior material and is placed on a tray for vapor deposition,
It was found that the thinner part and the thicker part of the exterior material oppose the object to be deposited separately. A comparative study of the thickness of the exterior material and the initial composition of the deposited film revealed a strong relationship. If the ratio of the thickness of the thick part of the exterior material to the thickness of the thin part (hereinafter, referred to as uneven thickness ratio) is 2.0 or less, preferably 1.6 or less, a deposition material with little variation in the deposition film composition can be used. It can be provided.

The uneven thickness ratio is a value obtained by dividing the maximum thickness of the exterior material by the minimum thickness on a surface obtained by cutting the columnar vapor deposition material at right angles to the longitudinal direction, and is from 1 to infinity. Uneven thickness ratio 1
Means that the thickness of the exterior material is constant. Infinity means that the minimum thickness portion is zero, that is, the core material appears on the surface. FIG. 5 shows a measurement example of the maximum thickness and the minimum thickness, which will be described in detail. FIG. 5a) shows a state in which the exterior material 2a and the core material 1a are substantially circular, and their center points do not coincide.
In FIG. 5B), the center points of the exterior material 2b and the core material 1b coincide, but the exterior material is circular and the core material is elliptical.
FIG. 5c) shows a shape in which the exterior material 2c is substantially circular and irregularities are formed on the outer periphery of the core material 1c. In any case, the portion where the dimension between the surface of the exterior material and the core material is the smallest is the minimum thickness, and the largest portion is the maximum thickness. The measurement is performed using an optical microscope having a length measuring function in a state of being magnified 10 to 20 times, or taking a magnified photograph of 10 to 20 times and measuring the size with a caliper or the like.

At the same degree of vacuum, a metal that evaporates at a low temperature is called a metal with a high vapor pressure, and a metal that does not evaporate unless heated to a high temperature is called a metal with a low vapor pressure. For example, when aluminum and nickel are compared, if the degree of vacuum is the same, aluminum can be said to have a high vapor pressure because aluminum evaporates at a lower temperature, and nickel can be said to have a low vapor pressure since nickel does not evaporate unless heated to a higher temperature than aluminum. That is, at the same degree of vacuum, it can be said that the temperature required for evaporation increases in the order of aluminum and nickel.

Further, another clad wire type vapor deposition material of the present invention comprises a core material and a cylindrical exterior material provided so as to cover the core material, wherein the exterior material is a metal having a high vapor pressure. The core material is a metal having a lower vapor pressure than aluminum. Further, it is desirable to satisfy the condition of the thickness deviation ratio described in any of the present invention.

Further, another clad wire type vapor deposition material of the present invention comprises a core material and a cylindrical exterior material provided so as to cover the core material, wherein the core material is made of one kind of metal or two kinds of metal. It is characterized by being composed of the above-mentioned metal, and having a thickness deviation ratio of the exterior material of 2.0 or less. Further, the exterior material may be composed of two or more kinds of metals. More preferably, the thickness deviation ratio of the exterior material is set to 1.6 or less.

In any one of the above clad wire type vapor deposition materials of the present invention, the core material is formed of a second exterior material and a second exterior material.
Characterized in that the clad structure has a core material of
Here, the clad wire type refers to a cut wire having a core wire and a covered wire substantially coaxial with the core wire. The clad structure refers to a state in which the core wire of the wire has a coaxial clad wire shape. That is, the second
A second exterior material is provided so as to cover the core material, and an exterior material is further provided so as to cover the second exterior material.

In any of the above clad wire type vapor deposition materials of the present invention, the core material is an alloy composed of two or more metals. Further, the exterior material may be an alloy composed of two or more metals.

Further, another clad wire type vapor deposition material of the present invention comprises a core material and a cylindrical exterior material provided so as to cover the core material, wherein the core material is made of cobalt, chromium, molybdenum, niobium. , Tantalum, tungsten, beryllium, nickel, tin, iron, silicon, vanadium, and platinum. Further, it is preferable to satisfy the condition of the thickness deviation ratio according to any one of the present invention.

Further, another clad wire type vapor deposition material of the present invention comprises a core material, and a cylindrical exterior material provided so as to cover the core material, wherein the exterior material is made of aluminum, silver, manganese, or magnesium. , Zinc, cadmium, and indium. Further, it is preferable that any one of the above conditions of the uneven thickness ratio of the present invention is provided.

Further, another clad wire type vapor deposition material of the present invention comprises a core material and a cylindrical exterior material provided so as to cover the core material, wherein the exterior material is made of aluminum, silver, manganese, or magnesium. , Zinc, cadmium, and indium. Furthermore, in combination with the exterior material of these compositions, the core material is cobalt, chromium, molybdenum, niobium, tantalum, tungsten, beryllium, nickel, tin,
It is desirable to be composed of at least one material selected from iron, silicon, vanadium and platinum. More desirably, a configuration is provided which satisfies any of the above conditions of the uneven thickness ratio of the present invention.

If the thickness of the exterior material is thin, it may be broken during cold drawing. Therefore, in any of the embodiments of the present invention, it is desirable that the inner diameter of the exterior material is 90% or less of the outer diameter. More preferably, it is at most 80%.

In any one of the above-mentioned inventions, the end face of the clad wire type vapor deposition material is characterized in that the end face is chamfered. It is desirable that at least the corners of the ends of the side surfaces (longitudinal surfaces) of the exterior material be removed by chamfering. The chamfering of the end surface can be performed by mechanically removing the end portion using a lathe or the like, or by chamfering the end portion by plastically deforming the exterior material as in rolling. The end of the cylindrical member may cover the end of the core material by chamfering.
The vapor deposition material according to the present invention is uniform in the longitudinal direction in the sense that the region excluding the end face deformed by the processing is within a range satisfying the above-mentioned condition of the wall thickness variation.

In the method for producing a clad wire type vapor deposition material of the present invention, a core material is coated with an exterior material to form a vapor deposition material, and the vapor deposition material is stretched to bring the exterior material into close contact with the core material. A step of cutting the stretched vapor deposition material and dividing it into a predetermined length to obtain a clad wire type vapor deposition material.

The exterior material and the core material can be annealed in an inert gas or a reducing gas before or during the cold drawing process. For example, when aluminum is used for the exterior material and nickel is used for the core material, nickel, which is harder to expand than aluminum, may be broken during cold drawing. Making the clad wire in which the aluminum sheath and the nickel core material are in close contact with each other by heating and cooling in hydrogen for about 30 minutes at 900 ° C in nickel for easy elongation, and without breaking during cold drawing. Can be. Here, it is important to cool nickel to near room temperature in hydrogen. When exposed to the air at a high temperature, a nickel oxide layer is formed on the surface and cannot be firmly integrated with aluminum.

The vapor deposition method according to the present invention employs a vacuum deposition apparatus including a holding member for heating the deposition material, a support member for supporting the object to be deposited, and a current supply device capable of applying a voltage to the holding member. An evaporation method, wherein the object to be evaporated and an evaporation material are attached to the vacuum evaporation apparatus, the inside of the vacuum evaporation apparatus is evacuated, a voltage is applied to the holding member from the energizing means, and the voltage is increased on the way. The deposition material is evaporated to form a deposition film on the deposition body.

[0032]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is a perspective view of an embodiment of the clad wire type vapor deposition material 25 of the present invention. A substantially cylindrical core material 1 and a substantially cylindrical exterior material 2 provided to cover the core material are provided, and both end surfaces are chamfered 3. The outer diameter of the core material 1 is φ
0.75 ± 0.05mm, outer diameter of exterior material 2 is φ2.0 ±
The length is 0.03 mm, the length is 15 ± 0.2 mm, and the chamfer of the end face is C0.4 mm. In this embodiment, the core material is nickel and the exterior material is aluminum. About 35 wt% of nickel and about 65 wt% of aluminum
% Composition.

Next, regarding the manufacturing method used in this embodiment,
This will be described with reference to FIG. First, a process of forming a deposition material by covering a core material with an exterior material will be described. Nickel to be the core material 1 is a round bar 4 having an outer diameter of 5.5 mm and a length of 2 m, and aluminum to be the exterior material 2 is an inner diameter of 6.25 mm and an outer diameter of 15 mm.
It is a pipe of 0 mm and length of 2.05 m. Before inserting the nickel round bar 4 into the hollow portion of the aluminum pipe 5, pickling was performed to remove deposits such as oil and oxide films on the surface of each material. The nickel round bar 4 was annealed at 960 ° C. in hydrogen for about 30 minutes (step 1). Aluminum pipe 5
A nickel round bar 4 is inserted into the hole (step 2). Both ends 6 of the aluminum pipe 5 were hit with a hammer to fix the nickel round bar 5 so that the nickel round bar 4 did not fall out of the aluminum pipe 5. The reason for making the aluminum pipe 5 0.05 m longer than the nickel round bar 5 is to make the aluminum pipe 5 deformable to easily fix the nickel round bar 5. The fixed state is shown by a cross section for easy understanding (step 3). A heading portion 7 was formed using a device called a heading machine so that one end 6 of the aluminum pipe was smaller than the inner diameter of the drawing die 20 (step 4). This step was called a plateau, and was performed as appropriate as the inner diameter of the drawing die was gradually reduced.

Next, a process of bringing the aluminum pipe 5 and the nickel round bar 4 into close contact with each other and extending them will be described. The nickel round bar 4 is inserted into the aluminum pipe 5 and passed through a drawing die 20, the beating portion 7 is clamped by a tension load device 21, the tension load device is moved, and the outer diameter is gradually reduced. It is extended to obtain a predetermined outer diameter (step 5). In this embodiment, the outer diameter is φ15.0 mm to the outer diameter φ2 m.
m, the cross-sectional area is about 5 to 1 by one drawing
Since the scale was reduced at a reduction rate of 0%, 45 kinds of drawing dies were used. In the present embodiment, cold drawing was performed at room temperature. However, it is possible to increase the drawing rate in one drawing and reduce the number of drawing dies by hot drawing, but it is possible to reduce the number of drawing dies. Since it is necessary to take preventive measures, it is easier to lower the draw ratio for one time and increase the number of draws.

Next, a process of obtaining a clad wire type vapor deposition material divided into a predetermined length will be described. Drawing is performed to a predetermined wire diameter to obtain a vapor deposition material 22. This vapor deposition material is cut along aa 'and bb' to form a heading portion 7 and a terminal portion 7 '.
Was removed (step 6). The vapor deposition material was cut into a predetermined length and chamfered to obtain a clad wire type vapor deposition material 25 (step 7). In this embodiment, after cutting to a predetermined length, the chamfer 3 was formed using a lathe. Of course, it is also possible to form the chamfer 3 by a rolling process for plastically deforming aluminum. As shown in FIG. 1, the round bar shape with the chamfer was formed, so that the vapor deposition material could be supplied to the vapor deposition machine without any problem even if the vapor deposition material was aligned and transported by the vibrating parts feeder. Although experiments were conducted with a vapor-deposited material that was not chamfered, the end surface of the vapor-deposited material was caught by the wall surface of the parts feeder and between the vapor-deposited materials, and alignment and transport did not work. Further, when the chamfer was C1 mm, that is, when the end portion was formed in a conical shape, another vapor deposition material entered under the vapor deposition material, and alignment and conveyance were not successful. From these facts, it is considered that the chamfering is C 0.3 to 0.6 mm, which is the value at which alignment and conveyance can be performed without any problem. However, these optimal chamfer dimensions are for a vapor-deposited material having an outer diameter of φ2 and a length of 15 mm. The optimum value changes when the outer diameter and length change, but approximately 15 to 30% of the outer diameter value. The chamfer should be done.
In the embodiment, C chamfering is performed, but r chamfering having a curved surface may be used.

FIG. 2 shows that the exterior material of the present invention is made of aluminum,
S of cross section of clad wire type vapor deposition material whose core material is nickel
An EM photograph is shown. 2A) is an entire photograph, and FIG. 2B) is a partially enlarged photograph of FIG. 2A). 3a) and b) show FIG.
It is a schematic diagram corresponding to a) and b). The outer periphery of nickel of the core material 2 has irregularities, and a convex portion 31 exists and the convex portion 3
The vicinity of 1 is the minimum thickness portion of the exterior material. Code 32, 3
3 is a scale indicating a magnification. 32 corresponds to a length of 1 mm, and 33 corresponds to a length of 100 μm. Reference numeral 34 denotes a polishing scratch at the time of cross-section polishing. The thickness deviation ratio of the vapor deposition material shown in FIG. In addition, the cross-sectional dimension of the vapor deposition material is not limited to this. For example, a case in which the ratio of the outer diameter to the inner diameter of the exterior material was 1.5 to 5.0 could be produced.

By defining the thickness deviation ratio as in the present invention,
It is confirmed that a clad wire type deposition material with little variation can be obtained. For this purpose, a clad wire type vapor deposition material having an aluminum exterior material and a nickel core material was prototyped by the method described above using an uneven aluminum pipe 41 as shown in FIG. The cross section which cut | disconnected the aluminum pipe 41 which carried out the thickness deviation at point a, point b, and point c is shown typically. By using the aluminum pipe having the uneven thickness, a clad wire type vapor deposition material having an aluminum exterior material and a nickel core material having an uneven thickness can be easily obtained. When cut to a length of 15 mm with a diameter of 2 mm, a thickness deviation ratio of 1 to 7 was obtained. Since the thickness deviation ratio changes continuously, the average of the thickness deviation ratios at both ends of the 15 mm length was defined as the thickness deviation ratio of each clad wire type vapor deposition material.

A composite film of aluminum and nickel was formed on a silicon wafer by using a clad wire type vapor deposition material having an uneven thickness ratio of 1 to 7. Vapor deposition conditions are vacuum degree 1-5
x10 ^-2 Pa, applied voltage of 3.5 to 5.0 V, vapor deposition time of 90 seconds, boron nitride (BN) was used as a tray on which the vapor deposition material was placed, and the vapor deposition film thickness was 2500 °. The voltage applied to the tray was 3.5 in the first 20 seconds.
V, and then increased to 5.0 V.
The two-stage method is used to suppress the entry of nickel into the film at the initial stage of vapor deposition by raising the temperature to the temperature at which high vapor pressure aluminum evaporates at the initial stage of vapor deposition and then to the temperature at which nickel evaporates. . With respect to the deposited film, the composition of aluminum and nickel in the film thickness direction was analyzed using an Auger analyzer.

FIG. 7 shows the thickness deviation ratio and the aluminum content of the deposited film at the initial stage of the deposition. It can be seen that when the thickness deviation ratio is 1.6 or less, the aluminum is 100%, when the thickness deviation ratio is 2.0 or less, the aluminum is 99.5%, and when the thickness deviation ratio is 3.0 or more, the aluminum is 99% or less.

Next, the uneven thickness ratio 2. The experiment was performed using a clad wire type vapor deposition material in which the exterior material below O is aluminum and the core material is nickel. Fifty deposition experiments were performed to analyze the composition of the film at the beginning of the deposition. The aluminum content of the film at the initial stage of the vapor deposition was 99.5 to 100%, and an average of 99.8% was obtained.

[0041]

As described above, the present invention includes a columnar core material and a cylindrical exterior material provided so as to cover the core material, wherein the exterior material is a metal having a high vapor pressure. The material is a clad wire type vapor deposition material that is a metal with low vapor pressure. By setting the thickness deviation ratio of the exterior material to 2.0 or less, the film composition at the beginning of vapor deposition differs from the film composition at the end of vapor deposition. In the initial composition, a material having a high vapor pressure is rich, and in the final composition of the vapor deposition, a vapor-deposited film in which a material having a low vapor pressure is rich can be easily obtained. A vapor deposition film having a large difference in composition at the final stage can be blown off by a single vapor deposition, and the vapor deposition material can be easily automatically supplied to a vapor deposition apparatus.

[Brief description of the drawings]

FIG. 1 is a perspective view of a clad wire type vapor deposition material of the present invention.

FIG. 2 is a sectional SE of a clad wire type vapor deposition material of the present invention.
It is an M photograph.

FIG. 3 is a schematic view of a cross-sectional scanning electron micrograph of FIG. 2;

FIG. 4 is a view showing an aluminum pipe on which vapor deposition materials having different thickness deviation ratios are experimentally obtained.

FIG. 5 is a diagram illustrating a maximum thickness and a minimum thickness.

FIG. 6 is a view showing a manufacturing process of the clad wire type vapor deposition material of the present invention.

FIG. 7 is a graph showing the relationship between the thickness deviation ratio and the aluminum content of the initial deposition film.

[Explanation of symbols]

1 core material, 2 exterior materials, 3 chamfered parts, 1a 1b 1
c core material, 2a 2b 2c exterior material, 4 round bar, 5
Pipe, 6 ends, 7 heads, 7 'end, 20
Wire drawing dies, 21 tension load device, 22 vapor deposition material, 25 clad wire type vapor deposition material, 31 convex portion, 3
2 33 Magnification scale, 34 Polishing scratch during cross section polishing, 41 Aluminum pipe with uneven thickness

Claims (12)

[Claims] 1. A core material, comprising a cylindrical exterior material provided so as to cover the core material, wherein the exterior material is a metal having a high vapor pressure, and the core material is a metal having a low vapor pressure. A clad wire type vapor deposition material, wherein the thickness deviation ratio of the exterior material is 2.0 or less. 2. A core material, comprising: a cylindrical exterior material provided so as to cover the core material, wherein the exterior material is a metal having a high vapor pressure, and the core material is a metal having a low vapor pressure. A clad wire-type vapor deposition material, wherein the thickness ratio of the exterior material is 1.6 or less. 3. The clad wire type vapor deposition material according to claim 1, wherein the exterior material is aluminum, and the core material is a metal having a lower vapor pressure than aluminum. 4. A core material and a cylindrical metal exterior material provided so as to cover the core material, wherein the core material is composed of one kind of metal or two or more kinds of metals. A clad wire type vapor deposition material characterized in that the thickness deviation ratio is 2.0 or less. 5. The clad wire type vapor deposition material according to claim 1, wherein the core material has a clad structure including a second exterior material and a second core material. 6. The clad wire type vapor deposition material according to claim 4, wherein the core material is an alloy composed of two or more kinds of metals. 7. A core material, comprising a cylindrical exterior material provided so as to cover the core material, wherein the core material is cobalt, chromium, molybdenum, niobium, tantalum, tungsten, beryllium, nickel, tin, iron, The clad wire type vapor deposition material according to any one of claims 1, 2, 3, 4, and 6, wherein the clad wire type vapor deposition material is made of at least one material selected from silicon, vanadium, and platinum. 8. A core material, and a cylindrical exterior material provided so as to cover the core material, wherein the exterior material is at least one material selected from aluminum, silver, manganese, magnesium, zinc, cadmium, and indium. The clad wire type vapor deposition material according to any one of claims 1, 2, and 4, wherein: 9. A core material, comprising a cylindrical exterior material provided so as to cover the core material, wherein the exterior material is aluminum,
5. The core according to claim 1, wherein the core is made of at least one material selected from nickel or cobalt, iron, lead, tin, niobium, tantalum, beryllium, and titanium. Clad wire type evaporation material. 10. The clad wire type vapor deposition material,
2. An end face having a chamfered shape.
10. A clad wire type vapor deposition material according to any one of claims 9 to 9. 11. A step of coating a core with an exterior material to form a vapor deposition material, a step of extending the vapor deposition material and bringing the exterior material into close contact with the core material, and cutting the stretched vapor deposition material. A method for producing a clad wire type vapor deposition material, comprising a step of obtaining a clad wire type vapor deposition material by dividing the material into predetermined lengths. 12. The method for producing a clad wire type vapor deposition material according to claim 11, wherein the core material is heat-treated in an inert gas atmosphere or a reducing gas atmosphere, and the vapor deposition material is elongated. A method for producing a clad wire-type vapor deposition material, comprising the step of bringing the core material into close contact with the exterior material.