JP2001133768A - Manufacturing method of liquid crystal element and liquid crystal element - Google Patents

Abstract

(57) [Summary] In a liquid crystal element, a gap between substrates is made uniform, a light-shielding property is enhanced, and film peeling outside a display area is prevented. SOLUTION: At least one of the substrates has first and second peripheral regions on opposite sides via an effective optical modulation region, wherein the electrodes are substantially strip-shaped lines. Extending from the vicinity of the boundary between the effective optical modulation region and the first peripheral region to the outside of the second peripheral region through the effective optical modulation region and the second peripheral region, and A liquid crystal element having a drive line having a region to be connected, and a dummy pattern separated from the drive line in a first peripheral region.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal device, and more particularly to a color liquid crystal display device having a color filter and a method of manufacturing the same.

[0002]

2. Description of the Related Art There is known a liquid crystal element in which a liquid crystal is sandwiched between a pair of substrates provided with electrodes and a voltage is applied to the liquid crystal to control the arrangement of liquid crystal molecules and perform optical modulation. In particular, a liquid crystal display element that obtains a display image by controlling the arrangement of liquid crystal molecules by applying a voltage in accordance with image information has attracted attention as a flat panel display as an alternative to a CRT. A substrate on which at least a red (R), green (G), and blue (B) color filter film portion is disposed, an electrode as an optical switch having a pattern shape corresponding to each color filter film, and a color liquid crystal including a liquid crystal Panel development is being actively pursued.

As an example of such a liquid crystal element, a cross-sectional structure of a color liquid crystal display element will be described with reference to FIGS.

The liquid crystal element 4 shown in FIG.
The liquid crystal 42 is sandwiched between the substrates 41 and 41 ′ which are opposed to each other with a constant gap therebetween, and has an effective optical modulation region a having a plurality of display pixels and a predetermined area corresponding to the display region, and is in contact with the region a. And has a peripheral region b located outside the front end.

In the area a, at least one of the substrates 41 corresponds to a display pixel, for example, a color filter film (group) 43 made of at least red, green and blue colored resins, and the color filter film (group) 43. For example, a flattening layer 44 mainly composed of a transparent resin and covering the group 43 is formed. Further, on the flattening layer 44, a plurality of transparent electrodes (groups) 45 for driving liquid crystal having a pattern corresponding to the display pixels are formed. Also on the other substrate 41 ', a plurality of transparent electrodes (groups) 45' having a pattern shape corresponding to the display pixels are formed. In the region a, a voltage is applied to the liquid crystal 42 by the transparent electrodes (groups) 45 and 45 ′, the arrangement state of the liquid crystal molecules is controlled, optical modulation is appropriately performed, and image display is performed.

On the other hand, the peripheral area b is not an area that contributes to optical modulation. However, in the region b, in order to make the optical modulation characteristics in the region a better, the gap between the substrates, that is, the gap between the substrates into which liquid crystal is injected is made as equal as possible to the region a. On the 41 side, a flattening layer 44 is provided continuously from the region a.

The substrates 41 and 41 ′ are sealed at their ends (for example, at the ends of the peripheral region b) by a sealing material 47.

The basic configuration of the liquid crystal element 5 shown in FIG. 2 is the same as that shown in FIG. 4 (the same reference numerals as in FIG. 1 indicate the same members as in FIG. 1). However, in order to uniformly control the alignment state of the liquid crystal, insulating films (alignment control films) 48 and 48 ′ that have been subjected to uniaxial alignment processing are provided on both sides of the substrates 41 and 41 ′ (on the transparent electrodes 45 and 45 ′). Are formed. Further, for the same reason as in the liquid crystal element of FIG. 4, the gap between the substrates in the region b is made as equal to that of the region a as possible. Then, a color filter film 43 'is provided,
The planarizing film 44 and the insulating film 48 are provided continuously from the region a. Further, also on the substrate 41 ', the insulating film 48' is provided continuously from the region a.

[0009]

However, in the liquid crystal device having the structure shown in FIGS. 4 and 5 as described above, the gap (cell gap) between the substrates in the regions a and b is not sufficiently uniform. There is no uniform control of the alignment state of the liquid crystal over the entire panel. In particular, the alignment state near the end of the effective optical modulation region is not good.

Further, in the liquid crystal element having the above structure, defects are easily generated due to the manufacturing process of the substrate and the materials used.

That is, in the manufacture of each substrate constituting the liquid crystal element, particularly in the manufacture of the substrate 41 having the color filter film, the color filter films (groups) 43 and 43 'are formed on a substrate such as a soda lime glass. After that, a flattening film 44 is formed on the entire surface. Subsequently, after a film made of a transparent conductive material such as ITO is entirely formed by vacuum deposition or the like, a resist pattern having a predetermined shape is formed on the film by a photolithography method. Thereafter, using the resist pattern as a mask, the conductive film is etched, and an electrode (group) having a predetermined pattern is formed in a region corresponding to the effective optical modulation region a.
45 is formed. Further, if necessary, the electrode (group) 45
An insulating film 48 and the like are formed on the entire upper surface.

In the above process, a chlorine ion-containing solution such as a mixed solution of hydroiodic acid and ferric chloride or a mixed solution of hydrochloric acid and ferric chloride is used as an etchant in the etching of the transparent conductive film. In a region where the transparent conductive film is completely removed, such as the peripheral region b, chloride ions in the etchant during and after the processing proceed to the inside of the flattening layer 44 and the color filter film 43 ′ which are the lower layers of the transparent conductive film. And remain. Similarly, when another etching wave is used, the impurity ions travel inside the flattening layer 44 and the color filter film 43 '. Further, in a heating step in a later step, for example, heating and baking of a film performed when the insulating film 48 to be an upper layer is formed, or in a step of aligning liquid crystal material,
Upon heating at 00 ° C. or higher, sodium ions are generated on the surface of the substrate. As a result, in the heating step, chloride ions and sodium ions react to precipitate sodium chloride. Due to this effect, layers located below the electrodes, such as the flattening film 44 and the color filter film 43 ', are easily peeled off. Such a phenomenon is a problem that also affects the layer formed in the effective optical modulation area a. Also, even if a film is provided as necessary under the electrode on the substrate 41 side where the color filter film is not provided. Is a problem that arises as well.

In order to solve such a problem, in the construction of the liquid crystal element, a high-purity glass substrate having a small content of impurity components such as sodium is used as a substrate, or a lower layer of a color filter film or an upper layer of a flattening layer. Attempts have been made to provide a layer having a barrier function to prevent penetration and reaction of chlorine ions and sodium ions. However, at present, sufficient effects cannot be obtained, and costs have been increased and the process has been complicated, and the problem has not been solved.

[0014]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide a liquid crystal device having a liquid crystal sandwiched between a pair of substrates each having an electrode. The gap between substrates (so-called cell gap) is uniform, and has good characteristics uniformly over the entire surface. Further, in the laminated structure of the substrates, the separation of the lower layer, especially outside the effective optical modulation region, is prevented. Another object of the present invention is to provide a high-performance liquid crystal element in which the occurrence of alignment defects and driving failures that are finally caused are suppressed.

An object of the present invention is to provide a liquid crystal device having a liquid crystal sandwiched between a pair of substrates each having an electrode and having an effective optical modulation region having a predetermined area and a peripheral region in contact with the region. A layer made of a predetermined material is formed on a substrate, and on the substrate, the electrode is provided on both the portion corresponding to the effective optical modulation region and the portion corresponding to the peripheral region. The problem is solved by a liquid crystal element characterized in that the electrodes formed through a layer made of and separated in both regions are separated from each other.

Another object of the present invention is to provide a liquid crystal device in which a liquid crystal is sandwiched between a pair of substrates each having an electrode, and has a predetermined area and a peripheral area in contact with the area. The substrate has first and second peripheral regions at edges facing each other via the effective optical modulation region, and the electrodes on the substrate are substantially band-shaped lines, and the effective optical modulation region From a vicinity of the boundary of the first peripheral region, through the effective optical modulation region and the second peripheral region, a drive line having a region extending to the outside of the second peripheral region and connected to the drive unit. A dummy pattern separated from the drive line in the first peripheral region;
The problem is solved by a liquid crystal element characterized by comprising:

Further, according to the present invention, there is provided a method for manufacturing a liquid crystal device having a liquid crystal sandwiched between a pair of substrates each having an electrode pattern and having an effective optical modulation region having a predetermined area and a peripheral region in contact with the region. Forming a layer made of a predetermined material on the substrate, forming a film made of the electrode material on the entire surface of the layer, and then planning a portion where an effective optical modulation region is planned and a peripheral region. Across both parts,
The problem is solved by a method for manufacturing a liquid crystal element, comprising a step of performing photolithography and etching processing to form an electrode pattern on both portions.

In the present invention, the effective optical modulation region corresponds to a display region including a large number of pixels and performing display by controlling the transmittance of the pixels by applying a drive signal. Speaking of a non-display element, it corresponds to a region where optical modulation is performed according to a drive signal.

In the present invention, the peripheral area means at least a part of the effective optical modulation area (the effective optical modulation area is 4
In the case of a quadrilateral, it is an outer region that is in contact with at least one side thereof and corresponds to a region that does not directly contribute to optical modulation. Particularly preferably, it corresponds to a region surrounding the display region (usually four sides) of the display element and not contributing to display.

[0020]

According to the liquid crystal device of the present invention, electrodes are provided on the substrate over both the effective optical modulation region and the peripheral region (region that does not substantially contribute to optical modulation). In the entire region where the liquid crystal is sandwiched, the cell gap is made uniform, and the alignment state of the liquid crystal can be more uniformly controlled over the entire surface through the effective optical modulation region and the peripheral region. Note that the electrodes provided in the peripheral region are separated from the electrodes provided in the effective optical modulation region, and are preferably not actually driven and do not contribute to the switching operation of the liquid crystal molecules.

Further, in consideration of the general manufacturing process (substrate process) of the liquid crystal element of the present invention, since electrodes are also provided in the peripheral region, the entire surface is formed by etching similarly to the effective optical modulation region. Pattern the layer of electrode material. At this time, since the pattern of the electrode layer that cannot be removed by the etching process remains, a specific ion contained in the etching solution used in the etching process, for example, a lower layer of the electrode material layer of chlorine ions, that is, a substrate side To the layer.
Further, the adverse effect of the liquid crystal used for stripping the resist film pattern used in the electrode patterning process on the lower layer of the electrode material layer is suppressed. Eventually, even when impurity ions such as sodium ions are generated from the substrate side in a heating step such as heating and baking of the film in a later step or a liquid crystal alignment treatment, a reaction with ions contained in the etching solution occurs. And a defect such as peeling of a layer (for example, an insulating layer or a functional layer made of a material different from the electrode material) located closer to the substrate than the electrode is prevented.

The electrode provided at a portion corresponding to the effective optical modulation area on the substrate of the present invention is, for example, a display element,
Although the pattern has a pattern corresponding to the display pixels and the like, it is preferable that the electrode provided at a portion corresponding to the peripheral region also has the pattern as described above in consideration of the capacitance between the substrates and the like. At this time, it is more preferable that the electrode patterns in both regions are appropriately selected and formed into the same shape or different shapes in consideration of the degree of control of the gap between the substrates and the like. In particular, in order to suppress the separation of the electrode provided in the peripheral region, it is preferable that the planar area be larger than the electrode formed in the effective optical modulation region. In the present invention, the matter of providing an electrode in a portion corresponding to an effective optical modulation area on a substrate and a peripheral area thereof is not limited to a transparent electrode corresponding to a display pixel. Therefore, the present invention can be applied to an auxiliary electrode provided on a transparent electrode or a side surface.

The liquid crystal device of the present invention can be preferably applied to a color liquid crystal display device.

In the color liquid crystal display device, at least a portion corresponding to the effective optical modulation region on one substrate, that is, a portion corresponding to the display region, a color filter film (group) composed of, for example, red, green, and blue colored resins is further required. Accordingly, a color filter film (group) made of a white (transparent) resin is formed, and one pixel is constituted by a predetermined combination of these. A transparent layer (flattening layer) is provided on the color filter film to correct a step between the color filter films formed in a pattern, and one pixel or a color filter film constituting the pixel is provided on the flattening layer. In response to the ITO
A transparent electrode pattern made of a transparent conductive material such as

In the present invention, even in the case of a color liquid crystal display element, a transparent electrode (pattern) is provided in a peripheral region outside the effective optical modulation region, that is, in a portion corresponding to a non-display region. In this case, in order to more effectively realize the uniformization of the gap over the entire region between the substrates, a color filter film (group) serving as a dummy and a flattening layer are provided even in a portion corresponding to a peripheral region on the substrate. In addition, it is most preferable to provide a transparent electrode as an upper layer. The dummy color filter film (group) may have the same shape as the color filter film pattern in the display area or may have a different shape. In particular, by setting one dot of the color filter film (group) to be a dummy to have an area larger than one dot of the color filter film in the display area, the separation of the filter film can be further suppressed. In such a configuration, the presence of the transparent electrode has a great effect in preventing the color filter film (group) and the planarizing layer from being separated as described above.

The present invention can be applied to devices using various liquid crystal materials including a nematic liquid crystal and a smectic liquid crystal. The structure of the present invention is suitable for a liquid crystal element having a small cell gap. Particularly, in an element using a chiral smectic liquid crystal such as a ferroelectric liquid crystal, the gap between the substrates is set to an extremely small value of (cell gap) 5 μm or less (preferably 2 to 0.5 μm, particularly preferably about 1 μm). In addition, it is important to control the uniformity of the gap, and it is more preferable to provide a color filter film and a transparent electrode in the configuration of the present invention, that is, in any portion corresponding to the effective optical modulation region and its peripheral region.

FIGS. 3 and 4 show the first embodiment of the liquid crystal device of the present invention.
1A and 1B are a plan view (a plan view of one substrate) and a cross-sectional view (a cross-sectional view of both substrates along AA ′ in FIG. 1) showing the configuration of the example of FIG. In the figure, reference numeral 11 denotes a substrate formed of, for example, blue plate glass, and 13 denotes a color filter film made of a colored resin such as red, green, and blue disposed in an effective optical modulation area (corresponding to a display area) a. It is. As a material of such a color filter, for example, a material in which a pigment or the like is dispersed in a photosensitive resin layer such as polyimide or polyamide is used. Numeral 13 'denotes a (outside of the display area) dummy pattern of a color filter film disposed in the peripheral area b up to the inside of the sealing material 17 when opposed to the other substrate 11' made of glass or the like via the spacer 16. It is. Color filter group 13 and color filter dummy pattern 1
Each pattern shape of 3 'may be the same or different. Reference numeral 14 denotes a flattening film made of a transparent resin for flattening the difference in film thickness between the three color filter groups and the dots. Reference numerals 15 and 15 'denote stripe-shaped liquid crystal driving transparent electrodes made of a transparent conductive material such as ITO disposed on the color filter group 13 in the display area a. An auxiliary electrode having a predetermined pattern made of a metal material may be provided in an arbitrary region on the surface of the transparent electrodes 15 and 15 'in order to reduce the wiring resistance (not shown). Reference numeral 19 denotes a dummy pattern 1 of a color filter in the peripheral areas b and b '.
This is an electrode pattern arranged on 3 'to the vicinity of the end face of the glass substrate. The electrode pattern 19 is not driven separately from the electrode for driving the liquid crystal.

In the effective optical modulation area a, the color filter films 13 may be arbitrarily formed on the substrate 11 in order to prevent unnecessary color mixing or the like between the individual color filter films 13. A light-shielding layer having a predetermined pattern may be provided in the plane.

In the liquid crystal element 3 having such a structure, the transparent electrode pattern is formed outside the display area, and the gap (cell gap) between the substrates 11 and 11 'is small throughout the inside and outside of the display area. Further, reference numerals 18 and 18 'denote insulating films made of a polymer material or an inorganic material subjected to a uniaxial alignment treatment for controlling the alignment state of the liquid crystal 12 held between the substrates.

As a method of forming each member in such a configuration, first, the effective optical modulation area a and the peripheral areas b and b '
For the color filter film group 13 ′ made of a colored resin, a solution containing a color filter material mainly composed of a photosensitive resin of one color is applied to the glass substrate 1 by a spinner, and preliminarily dried by a hot plate. . Next, only the necessary parts are photocured via a photomask,
Unnecessary portions (unexposed portions) are removed by development, and main curing is again performed using a hot plate to obtain a color filter film of one color. This process is repeated, for example, in the order of red, green, blue and, if necessary, white to obtain color filter films 13 and 13 'of all colors. Next, a transparent resin 14 for flattening a subtle thickness difference between the color filter films (red, green, and blue) and between dots is applied by a spinner, and is dried and cured by a hot plate to form. Next, a transparent conductive film such as ITO is formed on the entire surface by a vacuum film forming apparatus. Subsequently, a photoresist pattern is formed by photolithography on the transparent conductive film, and using such a pattern as a mask, etching is performed using an etching solution containing chlorine ions or the like, such as a mixed solution of hydroiodic acid or hydrochloric acid and ferric chloride, By stripping the photoresist pattern, a transparent electrode group 15 in, for example, a stripe shape in the display area and a transparent electrode group 19 outside the display area are formed. Next, at least one or more insulating films 8 are formed at least in a region corresponding to the effective optical modulation region by a vacuum film forming apparatus or a printing method, and a uniaxial orientation treatment such as rubbing is performed as necessary.

On the other hand, a transparent electrode (15 ') and an insulating film (18') are formed on another substrate in the above steps. These two substrates are bonded to each other with a sealing material 17 disposed at an end via a spacer 16. Subsequently, the liquid crystal 12 is injected into the gap between the substrates, and an alignment process including heating at a high temperature is performed to form an element having a structure shown in FIG. In the first embodiment, for example, a drive IC or the like is mounted on the electrode 15 at the right end of the element structure shown in FIGS. 3 and 4 to form a drive line.

A liquid crystal cell having the structure shown in FIGS. 3 and 4 was formed by applying the following design and material in accordance with the above-described process. -Substrate (11, 11 '): Blue glass substrate (1.1 m)
m) ・ Color filter film (13, 13 ′): red, green, blue,
Three colors (thickness: about 2 μm) ・ Transparent electrodes (15, 15 ′, 19): ITO (thickness: about 0.1 μm) ・ Etching solution used for patterning the transparent electrodes: hydrochloric acid and ferric chloride (volume ratio: 3) : Liquid mixture of 2) ・ Liquid crystal material: Chiral smectic liquid crystal (mixed liquid crystal) ・ Alignment treatment of liquid crystal material: including heat treatment at 270 ° C. for 1 hour ・ Planarization layer: about 3 μm ・ Cell gap: about 1.0 μm In such a liquid crystal cell, even when an alignment treatment is performed through a high-temperature process, neither the flattening layer nor the color filter film is peeled off, and alignment defects are not generated at the boundary between the display region (effective optical modulation region) and the non-display region. I couldn't see it.

Referring to FIG. 5, the second embodiment of the liquid crystal device of the present invention
The configuration of the embodiment will be described. The liquid crystal element of the embodiment is
Since the structure shown in FIG. 4 differs from that of the substrate having the color filter film, this point will be described in detail. That is,
FIG. 5 is a plan view of the substrate side having the color filter film of the present embodiment, and the same reference numerals as in FIG. 4 indicate the same members.

In the liquid crystal device shown in FIG.
In the upper peripheral region b, a dot-shaped dummy color filter film 13 ′ is formed in a region from the outer periphery of the effective optical modulation region (display region) a to the inner periphery of the sealing material 17. Further, along the dot shape of the color filter film 13 ′, a dot-shaped transparent electrode (group) 20 is arranged via a flattening layer (not shown). The dot-shaped transparent electrode group 20 is separated from the liquid crystal driving electrode 15 and does not contribute to driving. Further, the dot-shaped transparent electrode (group) 20 is arranged on the entire surface up to the edge of the substrate via the portion to be the lower layer of the sealing material. In the second embodiment, similarly to the first embodiment, a drive IC is mounted on the electrode 15 at the right end of the element structure shown in FIG. 5 to form a drive line.

According to the element of the second embodiment, the first
Similarly to the embodiment of the present invention, in addition to the fact that the gap between the substrates inside and outside the display area is more uniform, the transparent electrode is arranged particularly in the area near the sealing material. The same liquid crystal alignment regulating force as described above is maintained.

The substrate having the structure of the second embodiment was prepared by using a mixed solution of hydroiodic acid and ferric chloride (volume ratio of 3: 2) as an etching solution for patterning the transparent electrode. It was manufactured by the same process as in the first embodiment. Further, a liquid crystal cell was formed using this substrate, and the other substrate was manufactured, and the substrates were bonded and aligned, and liquid crystal injection was performed in the same manner as in the first embodiment. Color filter film 1
No peeling of the 3 ′ and flattening films was observed at all, and excellent display characteristics were obtained.

Referring to FIG. 6, a third embodiment of the liquid crystal device of the present invention is shown.
The configuration of the embodiment will be described. The liquid crystal element of the embodiment is
Since the structure of the substrate having the color filter film is different from the structure shown in FIGS. 3 and 4 (first embodiment) and the structure shown in FIG. 5 (second embodiment), this point will be described in detail. That is, FIG. 6 is a plan view on the substrate side having the color filter film of the present embodiment, and the same reference numerals as those in FIGS. 4 and 5 denote the same members.

In the liquid crystal device shown in FIG.
In the upper peripheral region b, a dot-shaped dummy color filter film 13 ′ is formed in a region from the outer periphery of the effective optical modulation region (display region) a to the inner periphery of the sealing material 17. Further, according to the dot shape of the color filter film 13 ', a dot-shaped transparent electrode (group) 20 is disposed via a flattening layer (not shown). The transparent electrode group 20 is separated from the band-shaped liquid crystal driving electrode 15. Further, the transparent electrode group 20 in this embodiment has a different pattern shape between the peripheral region b in the longitudinal direction of the liquid crystal driving electrode and the peripheral region b ′ in the lateral direction of the electrode 15. Further, in this embodiment, the dot-shaped transparent electrode (group) 20 is disposed on the entire surface up to the edge of the substrate via the lower layer of the sealing material.

In the device of this embodiment, the peripheral region b shown in FIG.
A peripheral area (here, a second peripheral area) facing the effective optical modulation area (here, a first peripheral area) is provided. The strip-shaped electrode 15 extends through the effective optical modulation area and the second peripheral area to the outside of the second peripheral area (through the lower layer of the sealing material to the outside), and a driving IC or the like is mounted thereon. Configure the drive line.

In this embodiment, on the substrate 11 in the effective optical modulation area b, between the color filter films 13, specifically between the color filter films 13, in order to shield light between pixels, specifically A stripe-shaped light shielding layer 21 is provided in a region corresponding to between the electrodes 15. The light shielding layer 21 further extends in a region between the color filter films 13 ′ (a region corresponding to between the dot-shaped transparent electrodes (groups) 20) on the substrate in the peripheral region a. Specifically, after a layer made of a light-shielding material such as metal is formed on the entire surface of the substrate, the light-shielding layer pattern is obtained by patterning the layer into a desired shape by a photolithography process or the like.

According to the device of the third embodiment, the color filter film and the light-shielding layer are formed inside and outside the display area, and the display area is equal to or larger than that of the first and second embodiments. The inner and outer cell gaps are made more uniform. In addition, the transparent electrode is arranged particularly in a region near the sealing material. In the vicinity of such a region, the same liquid crystal orientation as the display region is maintained, and higher-quality display characteristics can be obtained.

A Mo—Ta alloy layer is formed as a light-shielding layer (pattern) on the substrate having the structure of the third embodiment (about 1000 μm).
Ii), except that the process was performed in the same manner as in the second embodiment. Further, a liquid crystal cell was formed using this substrate, and the other substrate was prepared, and the substrates were bonded and aligned, and the liquid crystal was injected in the same manner as in the first embodiment. ', No peeling of the color filter film 13' and the flattening film was observed at all, and excellent display characteristics were obtained.

[0043]

As described in detail above, according to the present invention,
A liquid crystal element in which liquid crystal is sandwiched between a pair of substrates each having an electrode, in which a gap between the substrates is uniform, and has good characteristics uniformly over the entire surface. In particular, a high-performance liquid crystal element in which separation of a layer outside the effective optical modulation region is prevented and generation of defects is suppressed is provided. In particular, a color liquid crystal display device having a color filter film, in which peeling of the color filter film and its flattening film outside the display region is reduced and excellent display characteristics are obtained over the entire surface, is obtained.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating an example of the structure of a liquid crystal element.

FIG. 2 is a cross-sectional view illustrating another example of the structure of the liquid crystal element.

FIG. 3 is a plan view showing the structure of the liquid crystal element according to the first embodiment of the present invention.

FIG. 4 is a sectional view showing the structure of the liquid crystal element according to the first embodiment of the present invention.

FIG. 5 is a plan view showing a structure of a liquid crystal element according to a second embodiment of the present invention.

FIG. 6 is a plan view showing a structure of a liquid crystal element according to a third embodiment of the present invention.

[Explanation of symbols]

 11, 11 ', 41, 41' Substrate 12, 42 Liquid crystal 13, 13 ', 43, 43' Color filter film 14, 44 Flattening layer 15, 15 ', 19, 20, 45, 45' Transparent electrode 16, 46 Spacers 17, 47 Sealing material

Claims (17)

[Claims] 1. A method of manufacturing a liquid crystal element having a liquid crystal sandwiched between a pair of substrates each having an electrode pattern and having an effective optical modulation region having a predetermined area and a peripheral region in contact with the region. A step of forming a layer made of a predetermined material, and after forming a film made of the electrode material on the entire surface of the layer, over both the portion where the effective optical modulation region is scheduled and the portion where the peripheral region is scheduled And a step of performing photolithography and etching to form an electrode pattern on both portions. 2. The method according to claim 1, wherein a mixture of hydroiodic acid and ferric chloride or a mixture of hydrochloric acid and ferric chloride is used as the etching solution in the etching treatment. . Forming a color filter film pattern of at least one color on a portion where an effective optical modulation region is scheduled on the substrate and a portion where a peripheral region is scheduled on the substrate; Forming a transparent layer on the transparent layer, and forming an electrode pattern on both the portion where the effective optical modulation region is planned and the portion where the peripheral region is planned on the transparent layer. A method for manufacturing a liquid crystal element. 4. A step of forming a color filter film pattern of at least one color on a portion where an effective optical modulation region is scheduled on the substrate and a portion where a peripheral region is scheduled on the substrate; Forming a light-shielding layer in a region corresponding to the space between the color filter pattern films in a portion where a modulation region is planned and a portion where a peripheral region is planned; and forming a transparent layer on the color filter film pattern. The method according to claim 1, further comprising the steps of: forming an electrode pattern on both the portion where the effective optical modulation region is planned and the portion where the peripheral region is planned on the transparent layer. 5. The method according to claim 1, wherein the electrode pattern in the effective optical modulation and the electrode pattern in the peripheral region are formed separately from each other. 6. A liquid crystal device having a liquid crystal sandwiched between a pair of substrates each provided with an electrode, and having a predetermined area and a peripheral area in contact with the area, wherein at least one of the substrates has an effective optical modulation area interposed therebetween. First and second peripheral regions on opposite sides of the substrate, wherein the electrodes are substantially strip-shaped lines, wherein the substrate has a boundary between the effective optical modulation region and the first peripheral region. A drive line including a region extending from the vicinity of the portion, through the effective optical modulation region and the second peripheral region, to the outside of the second peripheral region, and connected to a driving unit; and the first peripheral region. Wherein the drive line and a dummy pattern spaced apart from each other,
Liquid crystal element. 7. The liquid crystal device according to claim 6, wherein the dummy pattern in the first peripheral region has a shape along an extension of the drive line. 8. The driving line and the dummy pattern,
7. The liquid crystal device according to claim 6, wherein both the effective optical modulation region and the first and second peripheral regions are formed on a substrate via a layer made of a predetermined material. 9. The liquid crystal device according to claim 6, wherein the effective optical modulation area has a plurality of display pixels, and the drive line has a pattern shape corresponding to the display pixels. 10. The effective optical modulation area has a plurality of display pixels, the drive line has a pattern shape corresponding to the display pixel, and the drive line and the dummy pattern have the effective optical modulation area and the drive line. 7. The liquid crystal device according to claim 6, wherein both of the first and second peripheral regions are formed on the substrate via one or more color filter films provided corresponding to the display pixels. 11. The liquid crystal device according to claim 10, wherein at least three color element groups of red (R), green (G), and blue (B) are arranged as the color filter film. 12. The liquid crystal device according to claim 10, wherein a light-shielding layer having a predetermined pattern is formed on at least a region corresponding to a region between the color filter films in the effective optical modulation region on the substrate. 13. A light-shielding layer having a predetermined pattern on both a region corresponding to a region between the color filter films in the effective optical modulation region and a region corresponding to a region between the color filter films in the first peripheral region on the substrate. The liquid crystal device according to claim 10, wherein is formed. 14. The liquid crystal device according to claim 6, wherein the electrode is made of a transparent conductive material. 15. The liquid crystal device according to claim 6, wherein the dummy pattern is not driven. 16. The liquid crystal device according to claim 6, wherein the cell gap is 5 μm or less. 17. The liquid crystal device according to claim 6, wherein the liquid crystal is a liquid crystal exhibiting a chiral smectic phase.