JP2001185798A - Element separation device - Google Patents

Abstract

(57) [PROBLEMS] To provide an element separation device capable of forming a scar on an element forming member and cleaving the element forming member from the scar forming position. SOLUTION: An element arrangement surface 12 on which a bar 1 formed by arranging a plurality of elements is placed and arranged, and orthogonal X, Y directions and an XY plane of two planes of the bar 1 arranged on the element arrangement surface 12 are described. Position detecting means provided with a camera 40 for detecting a position in a rotation direction about a Z-axis perpendicular to the device;
Moving stage means 14 capable of moving the bar 1 disposed in the X and Y directions and the rotation direction about the Z axis, and scar forming means for forming a scar on the surface side of the bar 1 disposed on the element placement surface 12 13 and cleaving means 80 for cleaving the bar 1 from the scar formed by the scar forming means 13.
The scar forming means 13 presses the cutter 9 against the bar 1 while supporting the cutter 9 in a direction substantially orthogonal to the bar 1 to form a scar.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an element isolation device used for cleaving one or more elements from an element forming member formed by arranging a plurality of elements when manufacturing an element such as a semiconductor element. It concerns the device.

[0002]

2. Description of the Related Art Various semiconductor chips (semiconductor elements) are:
It is formed using a semiconductor wafer. As shown in FIG. 25A, a plurality of device forming regions 49 in which a plurality of devices 8 are formed and formed are formed on a semiconductor wafer 48 for forming a semiconductor device. First, the semiconductor wafer is placed in the element formation region 49.
Then, as shown in FIG. 2B, a bar 1 as an element forming member is formed. Since the bar 1 is formed by separating the element formation region 49, a plurality of elements 8 are arranged and formed on the bar 1.

As shown in FIG. 26, when the bar 1 is cut at the boundary between the elements 8 (positions indicated by broken lines in the figure), the respective elements 8 are separated. Bar 1 to element 8
For example, as shown in FIG. 27,
A scar 2 is formed at the boundary position between the elements 8 on the surface side of the bar 1.
Is formed, and the bar 1 is cleaved along the scar 2. The bar 1 has a very small width of, for example, 1 mm or less and a width of the cleavage separation portion of 0.1 mm or less.

[0004] The above scar forming operation is generally performed using a scar forming apparatus. This scar forming apparatus is an apparatus for forming a linear scar 2 in parallel at a predetermined set pitch with reference to a specified position (for example, the position of S in the figure). When the scar 2 is formed by using the mark, first, the operator detects the head position (the position of S) of the element formation area of the bar 1 and designates the head position by manual operation, and inputs it to the scar forming apparatus.

In this state, when the scar forming device is operated, the scar forming device scratches the surface of the bar 1 with the needle 50 having a sharp tip with respect to the leading position, so as to scratch the surface of the bar 1. The linear scar 2 is formed in parallel at the set pitch.

The bar 1 on which the scar 2 has been formed is collected and cleaving along the scar 2 is performed manually by a cleavage operator. The cleavage operation, for example, as shown in FIG. 28, by using a tool such as a knife, the rear surface of the bar 1 (back) from 5 side being performed by applying a force F ₁ for the formation of the scar 2 is there.

The semiconductor wafer 48 is formed of a single crystal, and the bond between the single crystals is parallel to a cleavage plane to be formed along the scar 2 of the bar 1. Therefore, from the back 5 side of the bar 1, the addition of equal force against Scars 2 (i.e., from one end of the cleavage plane to form such a force F ₁ is applied toward the scars 2, the knife edge like , Placed exactly on the opposite side of the scar 2 and the force F ₁
) Is cleaved along the scar 2 in a mirror-like manner.

[0008]

However, conventionally, as described above, the scar 2 is formed on the bar 1 by the scar forming apparatus, and thereafter, the bar 1 on which the scar 2 is formed is formed.
And the work of cleaving the bar 1 by hand, the work of separating the element 8 from the bar 1 was inefficient and took a long time.

That is, conventionally, when the scar 2 is formed on the bar 1, as described above, the operator detects the top position of the element forming area of the bar 1, and forms the scar 2 based on the detected position. Despite doing it, at the time of cleavage,
The cleavage operator has to take the trouble of twice re-detecting the formation position of the scar 2 at another place, and there is no exchange of information between the scar formation operation and the cleavage operation. Therefore, as described above, the yield of separation of the element 8 cannot be improved, and it is difficult to improve the quality.

Further, as shown in FIG. 27, the conventional scar forming apparatus forms the scar 2 by scratching the surface of the bar 1 with the needle 50 having a sharp tip. A mechanism that slides the needle 50 along is required. Therefore, the conventional scar forming device,
The configuration of the device is complicated, and it is difficult to reduce the size of the device.

Further, as described above, when the scar 2 is formed by sliding one point at the tip of the needle 50, the tip of the needle 50 tends to become dull. Therefore, the needle 50 whose tip becomes dull is removed from the scar forming device,
It takes time and effort to re-grind the tip and set it again in the scar forming device, which further reduces the workability of separating the element 8 from the bar 1.

Furthermore, the conventional cleaving operations, but is intended to cleave the mirror surface along by the backside 5 side of the formation of scar 2 bar 1 applies a force F ₁ to the scars 2, the cleavage task Since it is performed manually, it is difficult to accurately position the edge of the knife or the like on the opposite side of the formation portion of the scar 2. If the disposition position of the knife edge or the like is slightly deviated, for example, as shown in FIG. 28, it is difficult to obtain a mirror-like cleavage plane because a mirror-like cleavage plane cannot be obtained. There was a problem.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional problems. An object of the present invention is to form a scar on an element forming member formed by arranging a plurality of elements, and cleave the element from the scar. It is an object of the present invention to provide a small-sized device separation apparatus which has good work efficiency of separation work and is capable of cleaving and separating devices on an ideal mirror-like vertical cleavage plane as designed.

[0014]

In order to achieve the above-mentioned object, the present invention has the following structure to solve the problem. That is, in the first invention, an element arrangement surface on which an element formation member formed by arranging and forming a plurality of elements is placed, and orthogonal X and Y axes of two planes of the element formation member arranged on the element arrangement surface. An arrangement position detecting means provided with a camera for detecting an arrangement position in a rotation direction about a Z axis perpendicular to the direction and the XY plane; and an element forming member arranged on the element arrangement surface in the X, Y directions and the Z axis. Moving stage means movable in the direction of rotation, wound forming means for forming a scar on the surface side of the element forming member arranged on the element placement surface, and the element forming member from the scar formed by the scar forming means. A configuration having a cleavage means for cleaving is a means for solving the problem.

According to a second aspect of the present invention, in addition to the configuration of the first aspect, the scar forming means includes a disc-shaped cutter,
A means for solving the problem is provided by a structure having cutter support means for supporting the disk-shaped surface of the cutter in a direction substantially orthogonal to the surface of the element.

According to a third aspect of the present invention, in addition to the configuration of the second aspect, the scar forming means presses one end on the outer peripheral side of the disk-shaped cutter supported by the cutter supporting means against the surface of the element forming surface. A configuration having cutter pressing means is a means for solving the problem.

In a fourth aspect of the present invention, in addition to the configuration of the third aspect, the problem is solved by a configuration in which the scar forming means has a load force adjusting means for adjusting the pressing force of the cutter by the cutter pressing means. Means.

Further, the fifth invention is directed to the first to fourth embodiments.
In addition to the constitution of any one of the inventions, the lower surface side of the element forming member arranged on the element arrangement surface is supported in parallel to the scar at at least two or more points with the scar interposed therebetween. The supporting position of the lower fulcrum member is different from the position of supporting the upper surface side of the element forming member disposed on the element disposing surface with the scar in between and supporting the scar inwardly on the lower side with the scar in between. A moving load for applying a fulcrum force is applied to the element forming member from the upper fulcrum member which is supported at least at two or more positions in parallel to the scar and the fulcrum members at least one of the upper and lower sides. A dynamic load application unit, and a support status observation unit using a camera for observing a support status of the element forming member supported by the upper and lower fulcrum members; A support that supports the innermost part with the scar in between The problem is solved by a configuration in which a fulcrum force that makes the shear force of the element forming member in between zero to be zero is applied to the element forming member and pure bending tensile stress is applied to the scar to cleave the element forming member from the scar. Means to do that.

According to a sixth aspect of the present invention, in addition to the constitution of the fifth aspect, each fulcrum member to which a moving load is applied from the dynamic load applying means is a virtual surface connecting the tip of the element forming member fulcrum of each fulcrum member. Is connected to the dynamic load applying means via a floating mechanism that autonomously adjusts the parallel to the fulcrum force applying surface of the element forming member.

Further, a seventh aspect of the present invention is directed to the first to sixth aspects.
In addition to the configuration of the invention described in any one of the above, movement control means for moving the position of the element forming member to an appropriate scar formation position by controlling the movement stage means based on the detection result by the arrangement position detection means Is provided as means for solving the problem.

In the present invention having the above structure, when an element forming member formed by arranging a plurality of elements is mounted and arranged on the element arranging surface, the X and Y directions orthogonal to two planes of the element forming member and the XY plane. An arrangement position in the rotation direction around the vertical Z axis is detected by an arrangement position detecting means provided with a camera. When the moving stage means is controlled based on the detection result, the element forming member can be moved in the X and Y directions and in the rotation direction around the Z axis.

Then, by controlling the moving stage means, the position of the element forming member is moved to an appropriate position for forming a scar, and a scar is formed on the surface side of the element forming member by the scar forming means. The element forming member can be cleaved from the scar formed by the scar forming means.

As described above, in the present invention, since both the scar forming means and the cleavage means are provided and the arrangement position detecting means for detecting the arrangement position of the element forming member is also provided, Since the formation of a scar on the element forming member and the cleavage from the scar can be accurately performed by one device based on the member arrangement position, workability is good, and
This makes it possible to provide a device capable of appropriately performing cleavage and separation of elements.

[0024]

Embodiments of the present invention will be described below with reference to the drawings. In the description of the present embodiment, the same reference numerals are given to the same parts as those in the conventional example, and the overlapping description will be omitted. FIG. 1 is a perspective view showing a main configuration of an embodiment of an element isolation device according to the present invention.

The feature of this embodiment is that an operation of forming a scar 2 on a bar 1 formed by arranging a plurality of elements and a method of forming the scar 2
And the operation of cleaving the bar 1 from a single device can be performed by one apparatus.

Hereinafter, the device of this embodiment will be described in detail. As shown in FIG. 1, a tool section arranging section 62 is provided on an upper side of a base section 61 having an operation panel section 60, and monitor sections 51 and 52 are provided on a front surface of the tool section arranging section 62. Is provided. In addition, the tool section arranging section 6
2 includes a camera 40 for displaying the image of bar 1 and a bar 1
A scar forming means 13 for forming a scar 2 on the surface side of the surface and a cleavage head 3 used for cleaving the bar 1 from the scar 2 formed by the scar forming means 13 are attached.

A concave portion 63 is formed in the center of the base portion 61, and the pedestal 15 is fixed to the central portion of the concave portion 63 so as to extend in the X direction. In addition, pedestal 1
5, a sheet holder 10 is fitted movably in the X direction, and the sheet holder 10 has an element arrangement surface 12 on which the bar 1 is placed and arranged. An adhesive sheet 11 is provided on the element placement surface 12. In this embodiment, the bar 1 is provided on the adhesive sheet 11 so that the bar 1 is fixed to the element placement surface 12.

As shown in FIG. 2, a flat surface 2 of the bar 1
A moving stage means 14 is provided which is movable in a rotation direction (θ direction) around a Z axis perpendicular to the X and Y directions orthogonal to the axis and the XY plane.

The moving stage means 14 is provided with the base 6
1, a base 64 fixed to the base 64, an X table 16 fitted slidably in the X direction with respect to the base 64, a fixed part 65 fixed to the X table 16, and a fixed part 65. It has a Y table 17 fitted slidably in the Y direction, a fixed part 66 fixed to the Y table 17, and a θ table 18 provided rotatably in the θ direction with respect to the fixed part 66. ing. table 18 is provided so as to freely rotate forward and reverse (θ rotation) along the X and Y planes.

The camera 40 detects an arrangement position of the bar 1 arranged on the element arrangement surface 12 in the X, Y and θ directions. In this embodiment, the camera 40 is provided. Arranged position detecting means is provided. The arrangement position detecting means includes the camera 40, the monitor units 51 and 52, and the image processing device 50 shown in FIG.

The camera 40 is a CCD camera, and displays the arrangement state of the bar 1 arranged on the element arrangement surface 12 and captures an image of the bar 1. The captured image of the camera 40 is transmitted to the image processing device 50, processed by the image processing device 50, and the video is displayed on the monitor units 51 and 52, and the position of the bar 1 in the X and Y directions and the θ direction An angle is calculated. Although only one monitor unit can be provided, in this embodiment, two monitor units 5 are provided.
1 and 52, the whole image of the bar 1 can be monitored on the monitor 52 and the enlarged image of the bar 1 can be monitored on the monitor 51, for example, so that the arrangement of the bar 1 can be further improved. I can tell you clearly.

The method of calculating the position of the bar 1 in the X and Y directions and the angle in the θ direction is not particularly limited. For example, the following method is applied to the calculation method in the θ direction. Is done. That is, as shown in FIG. 3A, a method of calculating the angle between the side surface of the bar 1 and the X axis as θ, or as shown in FIG. 3B, the element 8 formed on the bar 1 A method of calculating the angle between the vertical side of the formation pattern of the element 8 and the Y axis and the angle between the horizontal side of the formation pattern of the element 8 and the X axis as θ is applied.

Further, as shown in FIG.
A method of calculating an angle between a line connecting the area centroids of the formation patterns of the elements 8 formed on the bar and the X axis as θ, and a formation pattern of the elements 8 formed on the bar 1 as shown in FIG. Is the angle between the line connecting the intersections of the diagonals of
May be applied.

As described above, based on the image captured by the camera 40, the image processing device 50 calculates the angle θ, and furthermore, based on the calculation result, it is necessary to move the bar 1 to an appropriate position. The amount of rotation is obtained by calculation. Then, the calculation result is transmitted to the movement control device 53.

The movement control device 53 functions as movement control means for moving the position of the bar 1 to an appropriate position for scar formation by controlling the movement stage means 14 based on the detection result of the arrangement position detection means. Yes, by operating the θ table 18 of the moving stage 14 based on the calculation result transmitted from the image processing device 50, the sheet holder 10 is rotated by an amount necessary for moving the bar 1 to an appropriate position. By rotating, the angular position of the bar 1 is rotationally moved to an appropriate position.

The angle θ of the bar 1 as described above.
When the operation from the calculation of (1) to the rotational movement of the bar 1 is performed once, and the bar 1 cannot be moved to the optimum angle, the above operation can be repeated.

FIG. 4 shows the bar 1 in the state where the angular position of the bar 1 and the position in the Y direction are optimized by the above operation.
3 shows a state in which the image of the monitor is monitored by the monitor unit 51. As shown in the figure, when the angle position of the bar 1 and the position in the Y direction are optimal, the boundary position of the element 8 formed on the bar 1 is obtained and recognized, and the recognition result is sent to the movement control device 53. Send. The movement control device 53 moves the bar 1 to an optimum position for forming the scar 2 necessary for cleavage based on the recognition result.

The method for recognizing the boundary position is not particularly limited. For example, the following method is applied. That is, as shown in FIG. 5A, a set position is set in advance, such as setting the upper left corner of the formation pattern of each element 8 as a set position, and is separated from the set position by a set distance in the X direction. The position is recognized as the position where the scar 2 is formed, or as shown in (b) of the figure, from the intermediate position between the set position of the element 8 on the left side of the figure and the set position of the element 8 next to it. A method of recognizing a position separated by a set distance in the X direction as a formation position of the scar 2 is applied.

Further, as shown in FIG. 4C, the center of the line connecting the area centroids of the formation patterns of the adjacent elements 8 is recognized as the formation position of the scar 2, or (d) of FIG. )
As shown in (2), a method of recognizing that the center of a line connecting the intersections of diagonal lines of the formation patterns of the adjacent elements 8 is the formation position of the scar 2 is also applied.

The scar forming means 13 shown in FIG. 1 is used for the surface side of the bar 1 disposed on the element placement surface 12 (the surface side of the bar 1 is the upper surface side of the bar 1 disposed on the element placement surface 12). 7). The scar forming means 13 includes a disk-shaped cutter 9 as shown in FIG.
And cutter support means 44 as shown in FIG. The cutter 9 has, for example, a diameter of 10 mm to 50 mm and a thickness of 1 m.
It is formed by processing a disk-shaped peripheral surface of m to 10 mm at an angle of 30 ° to 150 °.

The cutter supporting means 44 is formed by a plate portion which supports the disk-shaped surface of the cutter 9 in a direction substantially orthogonal to the surface of the element 8.
Is supported by a cutter supporting means 44 by a shaft 46.

The scar forming means 13 has cutter pressing means for pressing one end 45 on the outer peripheral side of the disk-shaped cutter 9 supported by the cutter supporting means 44 against the surface of the surface on which the element 8 is formed. This cutter pressing means,
In the present embodiment, the cutter moving stage 71, the compression spring 72, the weight 73, and the weight mounting plate portion 75 are provided.

The weight mounting plate portion 75 is provided at the upper end of the cutter support means 44, and the weight mounting plate portion 75 is provided so as to be substantially perpendicular to the longitudinal direction of the cutter support means 44. The weight 73 is mounted on the weight mounting plate 75, and a compression spring 72 is interposed between the weight mounting plate 75 and the cutter moving stage 71.

The cutter moving stage 71 is screwed to a ball screw 70 which is an output shaft of a stepping motor 69, and the stepping motor 69 is fixed to a motor fixing portion 76 having a U-shaped cross section fixed to a mounting portion 74. Have been. The ball screw 70 extends in the longitudinal direction of the motor fixing portion 76, and the extending direction of the ball screw 70 matches the longitudinal direction of the cutter support means 44.

The ball screw 70 rotates forward / reverse in response to an output pulse output from a stepping motor (also referred to as a pulse motor) 69. The forward / reverse rotation of the ball screw 70 causes the cutter moving stage 71 to reciprocate in the Z direction. .
That is, the cutter moving stage 71 moves by a fixed distance per pulse according to the output pulse of the stepping motor 69. The principle of rotation of the ball screw 70 corresponding to the driving of the stepping motor 69 and the principle of movement of the moving unit (the cutter moving stage 71 in the present embodiment) screwed to the ball screw 70 are well known. The description is omitted.

In the present embodiment, the compression spring 72, the weight mounting plate portion 75, the weight 73, the cutter support means 44, and the cutter 9 move together with the movement of the cutter movement stage 71.
When the cutter 1 moves downward from the position shown in FIG. 8A to the position shown by the dashed line in FIG. 8B, the cutter 9 also moves to the lower side in FIG. Abut on the surface of

When the cutter moving stage 71 further moves to the lower side in the figure, the compression spring 72 expands, as shown in FIG.
5, among the weights of the cutter support means 44 and the cutter 9,
Part of the load is applied to the bar 1. This load corresponds to the extension of the compression spring 72, and the greater the extension of the compression spring 72, the larger the load bar 1 becomes.
It takes The amount of extension of the compression spring 72 corresponds to the amount of movement of the cutter moving stage 71.

That is, in this embodiment, the pressing force of the cutter 9 against the bar 1 can be adjusted in accordance with the output pulse of the stepping motor 69. In this embodiment, the cutter pressing means is used. The load force adjusting means for adjusting the pressing force of the cutter 9 by the motor includes a stepping motor 69 and a compression spring 62.

Further, as shown in FIG.
A concave portion 54 corresponding to the scar forming means 13 is provided on the front surface of the bar 1. When the scar 2 is formed on the front side of the bar 1 by the scar forming means 13, the moving stage 14 is driven. The operation is performed by moving the sheet holder 10 to a position corresponding to the concave portion 54.

In FIG. 2, the scar forming means 13 and the camera 40 are shown in FIG.
The recess 54 is shown to be located on the right side of the figure with respect to the sheet holder 10 when the bar 1 is disposed on the lower side of the camera 40.
The formation position and the arrangement position of the scar formation means 13 may be located closer to the camera 40 than the position shown in FIG.

As shown in FIG. 2, a cleavage head 7 is provided on the surface of the pedestal 15 at a position corresponding to the cleavage head 3. In the embodiment, the cleaving head 7 and the cleaving head 3 are provided, and the scar forming means 13 is provided.
Cleaving means 80 for cleaving the bar 1 from the scar 2 formed by the process is formed.

As shown in FIG. 11, the cleaving head 7 is provided on the lower surface side (the back surface 5) of the bar 1 arranged on the element arrangement surface 12.
Side) is the position of two points sandwiching the scar 2 (fulcrum position)
C and D function as lower fulcrum members for supporting the scar 2 in parallel. The fulcrum positions C and D are shown in FIG.
As shown in FIG. 2, the scar 2 is sandwiched from both sides, and is formed at a position separated from the scar 2 by equal intervals (a / 2). In order to make the configuration of the cleavage head 7 easy to understand, in FIG. 11, the adhesive sheet 11 on which the bar 1 is mounted is shown.
Is omitted.

On the other hand, the cleavage head 3
The upper side (front side) of the bar 1 disposed on the upper side 2 is supported at two points (fulcrum positions) A and B sandwiching the scar 2 in parallel with the scar 2. Functions as a fulcrum member. The fulcrum positions A and B where the cleavage head 3 supports the front surface of the bar 1 are different from the fulcrum positions C and D where the cleavage head 7 supports the back surface of the bar 1. Specifically, the fulcrum positions A,
B has a mode in which the scar 2 is sandwiched from the outside of the fulcrum positions C and D, and the fulcrum positions A and B are equally spaced (b
/ 2) at a distance from each other.

The cleavage head 3 is provided with a dynamic load applying means (not shown) for applying a moving load for applying a fulcrum force from the cleavage head 3 to the bar 1. This dynamic load applying means has a load applying driver 24 (see FIG. 1) for moving the cleavage head 3 forward and backward in the Z direction, and moves the cleavage head 3 toward the bar 1 as shown in FIG. Thus, a moving load for applying a fulcrum force is applied to the bar 1. The load applying driver 24 automatically connects the cleavage head 3 to the motor via a converter for converting the rotation of the motor into forward and backward movement, and controls the rotation of the motor by a control device to automatically push down the cleavage head 3. Control.

In the present embodiment, for example, when there is a concern that the fulcrum force of the bar 1 applied to the bar 1 from the cleavage head 3 side may damage the lower end of the cleavage head 3 as necessary. A buffer is provided between the bar 1 and the surface of the bar 1.

In this embodiment, the cleavage means 80 is
By moving the cleavage head 3 toward the bar 1 as described above, the shearing of the bar 1 between the fulcrum positions C and D that support the innermost sides of the scar 2 from the cleavage heads 3 and 7 on both the upper and lower sides. A fulcrum force with a force of zero is applied to the bar 1 to apply pure bending tensile stress to the scar 2 to cleave the bar 1 from the scar 2. The description of the shearing force when the bar 1 is cleaved will be described later.

Further, the device isolation device of this embodiment includes:
A support condition observation means (not shown) for observing the support condition of the bar 1 supported by the cleavage heads 3 and 7 on both the upper and lower sides is provided, and the support condition observation means includes the camera 40. Have been.

In the present embodiment, the relative positioning of the cleavage heads 3 and 7 and the scar 2 formed on the bar 1, that is, the movement control of the moving stage means 14, is performed based on the image captured by the camera 40. However, as a method of this control, for example, the captured image of the camera 40 is analyzed, and the fulcrum positions A to D of the corresponding cleavage heads 3 and 7 are set at appropriate positions with respect to the scar 2 formed on the bar 1. The movement amount of the bar 1 is calculated as follows, and the movement control means 53 automatically controls the movement of the movement stage means 14 by the movement amount. The camera 40 is configured to be movable to positions where the fulcrum positions A to D of the cleavage heads 3 and 7 and the image of the scar 2 of the bar 1 can be clearly captured.

The device isolation device of this embodiment is configured as described above. Next, a method of cleaving the bar 1 using this device will be described. First, as shown in FIG. 2, the bar 1 is placed on the element placement surface 12 of the sheet holder 10, and the mounting state of the bar 1 is observed by the camera 40. When performing the operation from the formation of a scar on the bar 1 to the cleavage and separation by the element separation device of the present embodiment, on / off driving of each operation unit (for example, the camera 40, the movement control device 53, and the stepping motor 69) is performed. Is performed by operating the operation panel unit 60.

The captured image of the bar 1 captured by the camera 40 is processed by the image processing device 50, and the image of the bar 1 is displayed on the monitor units 51 and 52. Movement control device 5 based on the calculation result of the positional deviation amount from
3, the sheet holder 10 is moved by moving the moving stage 14, and as shown in FIG. 7A and FIG. 8A, the boundary position of the element 8 formed on the bar 1 is determined by the cutter 9 of the scar forming device 13. Be placed directly below.

In this state, the stepping motor 69 is driven to move the cutter moving stage 71 downward along the axial direction (Z direction) of the ball screw 70 as shown in FIG. Using the restoring force of 72, the outer peripheral side one end 45 of the cutter 9 is pressed against the surface of the bar 1,
As shown in FIG. 10A, the scar 2 is formed at the boundary position of the element 8 of the bar 1.

After one scar 2 is formed on the bar 1, the cutter moving stage 71 is driven by the stepping motor 69.
Is moved upward along the axial direction of the ball screw 70 to move the cutter 9 away from the bar 1. Thereafter, the sheet holder 10 is moved by an appropriate amount of movement in the X direction by the moving stage means 14 so that the next scar forming position (boundary position of the element 8) is directly below the cutter 9, and the stepping motor 69 By moving the cutter moving stage 71 downward by driving, the scar 2
Formed on the surface of

Then, by repeating the operation of moving the cutter moving stage 71 in the Z direction and the operation of moving the sheet holder 10 in the X direction, the scar 2 is formed at the boundary position of each element 8 of the bar 1.

Next, the movement stage 14 is moved by the movement control device 53 to move the sheet holder 10, and the bar 1 is moved to the cleavage heads 3, 7 as shown in FIGS.
To support the scar 2 in parallel with the cleavage head 3 sandwiched from both sides by the positions A and B of the cleavage head 3 and to support the scar 2 in parallel with the cleavage head 7 sandwiched from both sides by the positions C and D of the cleavage head 3. Bar 1 is placed where it can be.

In this state, when the cleavage head 3 is pushed down by the dynamic load applying means, the fulcrums A and B of the cleavage head 3 come into contact with the surface of the bar 1 as shown in FIG. . Then, when the cleavage head 3 is further pushed downward, the bar 1 reaches the breaking point, and as shown in FIG.
Is cleaved along the scar 2.

FIG. 14 shows the relationship between the shearing force and the bending moment when the bar 1 is cleaved in this embodiment. In the present embodiment, the fulcrum positions A and B of the upper cleavage head 3 are set.
FIG. 14A shows a configuration in which the bar 1 is cleaved by a four-point bending method in which the fulcrum positions C and D of the lower cleavage head 7 are arranged symmetrically about the scar 2. As described above, the shearing force is applied to the fulcrum positions C and
In the section where the shearing force becomes zero as shown in FIG. 14B, the bending moment becomes a constant maximum value.

At this time, as shown in FIG. 13A, the minute volume dvb on one half side of the scar 2 is extracted and shown.
No shear stress acts on the vertical cleavage plane of the scar 2, and only the bending tensile stress σ _x acts. FIG. 15 shows the relationship between the shear stress and the bending tensile stress in the region of the scar 2 by using a molding stress circle. That is, the shear stress τ becomes zero between the fulcrum positions C and D, and a maximum principal stress σ _bx of bending and tension is generated in a direction perpendicular to the ideal vertical cleavage plane of the scar 2 (X direction).

Accordingly, in this embodiment, a region where the shear stress is zero and the X direction is the direction of the maximum principal stress can be created over a relatively wide section with the scar 2 interposed therebetween. It is cleaved with an ideal vertical cleavage plane along the scar 2 and separated.

The conventional manual cleaving method of the bar 1 as shown in FIG. 28 is, for example, as shown in FIG.
The basic principle is the same as that in the case of using the three-point bending method in which cleave stress is concentrated on the scar 2 by applying the fulcrum forces P ₂ , P ₁ , and F ₁ and the bar 1 is cleaved from the position of the scar 2. is there.

The relationship between the shearing force and the bending moment at the time of cleavage by the three-point bending method is shown in FIG.
The positive / negative of the shearing force is reversed at the point of application of ₁ . Shear stress actually acting point of fulcrum force F ₁ acting on the bar 1 is is very small but the action whole area of the pivot force F ₁ for having a finite width is not a zero. As shown in FIG. 21, when a portion of the minute volume dva in one half of the scar 2 is extracted and considered, a shear stress τ _az parallel to the surface to be cleaved and a bending tensile stress σ _ax perpendicular to the surface to be cleaved are generated. .

FIG. 24 shows this as a stress circle of the molding.
Swell. That is, the dominance of the cleavage that occurs on the cleavage surface of the scar
Maximum principal stress σ_a1Works in the ideal vertical cleavage of bar 1.
Σ perpendicular to the open plane (ZOY plane)_axNot the direction of σ_axDirection
And α₁Angle (this angle is more easily
Can be calculated), even if the fulcrum force P_Two, P₁, F ₁
Even if the power is automatically controlled to be a stable force,
Like the cleavage plane in the cleavage state, the scar 2 on the cleavage plane of the bar 1
The cleavage part 7a in the oblique direction is generated in the lower part
As a result, the expected cleavage plane cannot be obtained stably.

On the other hand, in the present embodiment, as described above, the fulcrum positions A and B of the upper cleavage head 3 and the fulcrum positions C and D of the lower cleavage head 7 are both left and right around the scar 2. By employing a configuration in which the bar 1 is cleaved by a symmetrically arranged four-point bending method, the bar 1 is cleaved along an ideal vertical cleavage plane along the scar 2.

According to the present embodiment, the X and Y axes orthogonal to the two axes of the plane of the bar 1 are detected by the arrangement position detecting means provided with the camera.
The position of the bar 1 can be detected by the scar forming means 13 by controlling the moving stage means 14 based on the detection result and the rotational position around the Z axis perpendicular to the direction and the XY plane. It can be moved to a position or an appropriate position for cleavage by the cleavage means 80.

Therefore, according to the present embodiment, the bar 1
Is moved to the above-mentioned appropriate position for forming a scar, and the scar 2 can be formed at an appropriate position of the bar 1 (boundary position of the element 8) by the scar forming means 13;
Thereby, the bar 1 can be cleaved from the formed scar 2.

As described above, according to this embodiment, since both the scar forming means 13 and the cleaving means 80 are provided and the arrangement position detecting means for detecting the arrangement position of the bar 1 is also provided, Bar 1 based on the position of the bar 1
The formation of the scar 2 and the cleavage from the scar 2 can be accurately performed by one device, so that the workability is good, and
An excellent effect such that the cleavage and separation of the element 8 can be appropriately performed can be obtained.

According to the present embodiment, the scar forming operation by the scar forming means 13 is the same as the conventional needle 50.
Unlike the operation performed by scratching the surface side of the bar 1 on the tip end side of the bar 1, the disk-shaped cutter 9 is supported in a direction substantially orthogonal to the surface of the element 8, and the outer peripheral end 45 of the cutter 9 is held. Is pressed against the surface of the bar 1, the structure of the scar forming means 13 can be simplified.

That is, according to the present embodiment, the scar forming means 13 does not need a mechanism for moving the cutter 9 along the surface of the bar 1 and only needs to move the cutter 9 in the Z direction. By providing the cutter 9, the cutter supporting means 44, and the cutter pressing means for pressing the cutter 9 against the surface of the bar 1, the scar forming means 13 can be configured very easily.

Further, in this embodiment, as described above, one end 45 of the outer peripheral side of the cutter 9 is pressed against the surface of the bar 1 by the cutter pressing means to form the scar 2. Since the load force adjusting means for adjusting the pressing force applied to the side is provided, the formation depth of the scar 2 can be stabilized.

In particular, as shown in FIG. 9, between the compression spring 72 and the lower side of the weight mounting plate portion 75 of the scar forming means 13 applied to the apparatus of this embodiment, the cutter 9 and the bar 1 side. A load sensor 77 for detecting the pressing force applied to the bar 1 is provided. The pressing force applied from the cutter 9 to the bar 1 can be adjusted based on the detection result of the load sensor 77. When forming the bar 2, even if the thickness, hardness, etc. of the bars 1 are different from time to time, the above-mentioned load adjustment is performed corresponding to each bar 1, and the scars 2 are always formed. 2 can be more stably and appropriately formed.

Further, according to this embodiment, the scar 2 is not formed by one point of the tip of the needle 50 as in the prior art, but as shown in FIG. Since the scar 2 is formed by the surface of the side end portion 45, unlike the case where the scar 2 is formed by one point of the blade, the blade portion of the cutter 9 is less consumed and the life of the cutter 9 can be extended. Therefore, it is possible to reduce the trouble of replacing the cutter 9 whose blade portion has been worn.

Further, according to the present embodiment, the cutter 9 is supported by the cutter support means 44 by the shaft 46, and when the blade portion of the cutter 9 is worn, the cutter 9 shown in FIG. As shown in b), the cutter 9 is rotated about the shaft 46 to remove the non-consumed portion with the bar 1.
In this case, a scar 2 can be formed on the bar 1 by the contact portion (the lower side in the figure). Therefore, by forming the scar 2 by sequentially using the entire peripheral surface of the disc-shaped cutter 9 as the contact portion with the bar 1, the cutter 9 can be used without waste, and the frequency of replacement work of the cutter 9 is extremely reduced. Can be.

Further, according to the present embodiment, the bar 1 is cleaved by the four-point bending method using the cleavage heads 3 and 7 as described above. In this way, a region where the shear stress is zero and the X direction is the direction of the maximum principal stress can be created, and the bar 1
Can be cleaved and separated by an ideal vertical cleavage plane along the.

As described above, since the section where the shear stress becomes zero can be secured over a relatively wide section across the scar 2, the fulcrum positions A, B, C, D and the parallel of the scar 2 can be secured. Even if the degree is slightly deviated, the scar 2 is located between the fulcrum members where the shear stress becomes zero, so that it is cleaved only by the bending tensile stress in the X direction (pure bending tensile stress), and the cleavage plane becomes oblique. Since a high-quality and straight vertical cleavage plane can be obtained without bending, the alignment between the cleavage heads 3 and 7 and the bar 1 (scratch 2) becomes easy, and the cleavage work efficiency is sufficiently improved. Can be.

In particular, according to the present embodiment, the fulcrum positions A,
By arranging B, C, and D symmetrically about the scar 2, each of the cleavages is performed by applying a load from one or both of the upper and lower sides with a load application surface parallel to the upper and lower surfaces of the bar 1. Since the fulcrum force acting on the bar 1 from the heads 3 and 7 becomes equal and the shear force between the fulcrum supporting the innermost part is necessarily zero, adjust the shear stress between the fulcrum sandwiching the scar 2 to zero. Becomes very easy.

Further, in this embodiment, the bar 1 is arranged on the adhesive sheet 11 so that the adhesive sheet 11 is interposed between the back surface 5 of the bar 1 and the cleavage head 7. Accordingly, since a buffer material is interposed between the surface side of the bar 1 and the cleavage head 3, even if the bar 1 is a glass wafer that is easily damaged, the bar 1 is connected to each of the cleavage heads 3 and 7. Since the acting fulcrum force can be reduced, it is possible to prevent damage such as damage to the bar 1. Further, since the bar 1 is cleaved in a state where it is adhered and arranged on the adhesive sheet 11, it is possible to prevent the elements 8 that have been cleaved and separated from flying.

The present invention is not limited to the above embodiment, but can adopt various embodiments. For example,
In the above embodiment, the columnar cleavage heads 3 and 7 as shown in FIG.
The fulcrum members 80 for cleaving the bar 1 from the scar 2 are configured as fulcrum members on both the upper and lower sides that support the bar 1. The fulcrum member is, for example, a fulcrum member 4a of a circular rod, as shown in FIGS. 4b, 6a, 6b, or a triangular rod member in cross section.

As described above, when a plurality of rod-shaped fulcrum members are provided on the upper and lower sides of the bar 1 to constitute the cleavage means 80, as shown in FIGS. 16 to 20, for example, the upper fulcrum members 4a and 4b Is held by the fulcrum member holding portion 23 and connected to the load application driving body 24, it is easy to apply a moving load for applying a fulcrum force to the bar 1 from the fulcrum members 4a and 4b as in the above-described embodiment.

In this case, as shown in FIGS. 16 to 20, the fulcrum member holding portion 23 and the load application driving body 24 may be connected via a floating mechanism. The floating mechanism includes a fulcrum member 4a to which a moving load is applied from dynamic load applying means.
4b autonomously adjusts a virtual plane connecting the fulcrum tips supporting the bar 1 in parallel with the fulcrum force applying surface of the bar 1. Hereinafter, a configuration example of the floating mechanism will be described first with reference to FIGS.

In these figures, (a) is a view as seen from the side, and (b) is a view as seen from the front. FIG.
The floating mechanism 27 shown in FIG. 7 has a ball plunger 28 and a tension spring 30. The ball plunger 28 is formed by rotatably mounting a ball 31 on the tip end side of a holder 32 and projecting the ball 31 downward from a ball receiving surface at the lower end of the holder 32 by a compressed ball pressing spring 29 (the ball 31 is The holder 32 is fixed to the lower surface of the load applying driver 24 by screwing.

A conical hole 33 is provided on the upper surface of the fulcrum member holding portion 23 facing the ball 31.
The ball 31 is fitted into the fulcrum member holding portion 23. One end of the tension spring 30 is connected to the load applying driver 2.
4, the other end is fixed to the fulcrum member holding portion 23, and is interposed between the fulcrum member holding portion 23 and the load application driving body 24. The fulcrum member holding portion 23 is pulled upward by the tensile force of the tension spring 30, and is pressed against the ball 31, so that it can rotate in the direction of the arrow in FIG. 17B.

The floating mechanism 27 shown in FIG. 18 is similar to the floating mechanism shown in FIG.
a and 28b are added, and the other configuration is the same as that shown in FIG. This ball plunger 2
8a and 28b are provided at intervals in a direction orthogonal to a linear direction connecting a pair of ball plungers 28 along the fulcrum members 4a and 4b, and these ball plungers 28, 28, 28a and 28b are supported at four points. Thereby, the fulcrum member holding portion 23 can be more accurately horizontally supported.

The floating mechanism 27 shown in FIG. 19 has a V-groove 34 instead of a conical hole on the upper surface of the fulcrum member holding portion 23, and the ball 31 of the ball plunger 28 is
The other configuration is the same as that of the mechanism shown in FIG.

The floating mechanism 27 shown in FIG. 20 has a ball plunger 2 in a V-groove 34 provided on the upper surface of the fulcrum member holding portion 23.
19, and the upper surface of the fulcrum member holding portion 23 is horizontally balanced in the front-rear direction (the direction connecting the pair of ball plungers 28, 28) as in the case of FIG. are doing. Further, a ball plunger 98 for supporting the left and right sides of the fulcrum member holding portion 23 from below is provided on the load application driver 24 side, and the fulcrum member is held by the ball 99 by the urging force of a compression spring provided in the ball plunger 98. The portion 23 is supported by being biased upward with a horizontal balance in the left and right directions.

In the actual cleaving operation using the floating mechanism shown in FIG. 20, the fulcrum members 4a, 4b
Is pushed up, the ball 31 of the ball plunger 28 contracts further against the internal compression spring. In the mechanism shown in FIG.
Is capable of applying a dynamic load to the bar 1 from the fulcrum members 4a, 4b while maintaining the horizontal balance in the front, rear, left and right directions autonomously.

As described above, when the floating mechanism 27 as shown in FIGS. 17 to 20 is provided, the fulcrum member holding portion 23 is kept horizontal, that is, an imaginary plane connecting the lower ends of the fulcrum members 4a and 4b is formed. The fulcrum force can be applied to the bar 1 with a uniform load that is kept horizontal and does not fluctuate.

That is, for example, the fulcrum member holding portion 2 suspended and held by the upper surface of the bar 1 and the tension spring 30
3 is slightly shifted in parallel with the opposing surface, and the fulcrum members 4a,
Even if 4b first comes into contact with the upper surface of the bar 1 in a single contact state, since the ball 31 protrudes downward from the holder 32 by the ball press-down spring 29, the fulcrum is supported when the load applying means 24 is further pressed down. The member holding portion 23 pushes the ball 31 toward the holder 32 against the ball push-down spring 29 so as to be parallel to the surface of the bar 1, that is, the entire lengths of the fulcrum members 4 a and 4 b contact the surface of the bar 1. Rotate in the direction.

Then, since the pressing surface of the fulcrum member holding portion 23 is pushed down while keeping the pressing surface parallel to the upper surface of the bar 1, a fulcrum force with a constant load is applied to the bar 1 from the fulcrum members 4a and 4b. Thus, the bar 1 can be cleaved.

Further, after the bar 1 is cleaved, the fulcrum member holding portion 23 is pushed down a little further further.
The moment the cleavage is completed, the ball push-down spring 29 extends,
Since the ball 31 protrudes downward away from the ball receiving surface of the holder 32, the function of alleviating the fluctuating load acts on the ball press-down spring 29, which allows the fulcrum member holding portion 23 to be further pressed down after the wafer is cleaved. It is possible to prevent the bar 1 from being overloaded.

Further, when the fulcrum member holding portion 23 is connected to the load applying means 24 via the floating mechanism 27, the floating mechanism 27 is constituted only by the tension spring 30, as shown in FIG. The ball plunger 28 may be omitted. In FIG. 16, the lower end of the load application unit 24 facing the operation unit 37 is used as the stopper 42, and the upper surface of the bar 1 and the fulcrum members 4 a, the distance between the upper surface of the stopper 42 and the stopper block 36 than the distance l ₁ between the lower end of 4b (depressing stroke of the load applying means 24)
l ₀ is set large.

In the case of the structure shown in FIG.
3 is supported by the tension spring 30 and can rotate (tilt) freely, so that even if the load applying means 24 is pushed down and the bar 1 first hits the bar 1 via the fulcrum member, the load applying means 24 is further pushed down. Then, the fulcrum member holding portion 23 rotates so as to be parallel to the upper surface of the bar 1 and the fulcrum member holding portion 23 is pushed down while maintaining this parallel state, so that the fulcrum member holding portion 23 is fixed through the fulcrum members 4a and 4b. A stable load can be applied to bar 1. Further, at the moment when the bar 1 is cleaved, the tension spring 30 extends and functions in a direction to absorb the reaction force from the bar 1 side, so that even if the load applying unit 24 further descends until it hits the stopper block 36, the bar 1 A large fulcrum force is prevented from being applied.

Note that the floating mechanism of each configuration as described above is
It may be provided between the upper surface side of the cleavage block 3 and the load applying means 24.

Further, in the above example, the moving load is applied to the bar 1 from the upper cleavage head 3 side or the fulcrum members 4a, 4b side of the bar 1, but the lower cleavage head 7 side or the fulcrum member 6a, The moving load may be applied from the 6b side, or the moving load may be applied from the cleavage heads 3, 7 or the fulcrum members on the upper and lower sides.

Further, in the above-described embodiment, the downward movement of the cleavage head 3 is automatically controlled by the dynamic load applying means. However, for example, the dynamic load applying means has a configuration having a manual operation unit. The cleaving head 3 may be pushed down by manually pushing down the operation unit. However, when the downward movement of the cleavage head 3 is automatically controlled as in the above embodiment,
The cleavage operation can be performed more efficiently and stably.

Further, in the above embodiment, the arrangement position detecting means for detecting the arrangement position of the bar 1 in the X, Y, and θ directions and the support state observing means for observing the support state of the bar 1 are shared by a common camera. Although the camera 40 is provided, the cameras provided in the arrangement position detecting means and the support state observing means may be separate from each other. Further, a plurality of cameras having different magnifications, such as a low-magnification camera and a high-magnification camera, may be provided to constitute the arrangement position detecting means and the support state observing means.

In this case, coarse positioning may be quickly performed with a low-magnification camera, and then fine positioning may be performed with a high-magnification camera. The work of adjusting the arrangement position of the pieces and the work of aligning the bar 1 and the fulcrum member can be performed efficiently.

Further, in the above example, the number of fulcrums supporting the bar 1 by the fulcrum member (including the cleavage head) is determined by the bar 1
The upper part is two pieces and the lower two pieces are used. A total of four pieces are used, but two pieces or more (preferably one or more pairs) are provided on the upper side, and two or more pieces (preferably one or more pairs are provided) The bar 1 may be supported by a total of four or more fulcrums (several). Also in this case, it is necessary to apply a load to each fulcrum member so that the shear stress becomes zero in the region of the bar 1 between the fulcrum members sandwiching the scar 2 on the innermost side.

Further, in the above-described embodiment, the moving stage means 14 based on the detection result by the arrangement position detecting means.
, The movement control device 53 for moving the position of the bar 1 to the appropriate position for scar formation is provided, but based on the detection result by the arrangement position detection means, for example, by operating the operation panel section 60, the movement stage means 14 May be operated to move the position of the bar 1 to an appropriate position for scar formation. However, when the position of the bar 1 is automatically moved to the appropriate position for forming a scar as described above, the position of the bar 1 is moved more quickly and accurately to the appropriate position for forming a scar, and the bar 1 Can be formed.

[0108]

According to the present invention, the arrangement position detecting means provided with a camera detects the orthogonal X, X of two planes of the element forming member.
Since the arrangement position in the rotation direction around the Z-axis perpendicular to the Y direction and the XY plane can be detected, the element forming member is moved to a proper scar formation position or a proper cleavage position by the scar forming means based on the detection result. be able to. Therefore,
According to the present invention, the position of the element forming member can be moved to the appropriate position for forming the scar, and the scar forming means can form a scar at an appropriate position (for example, a boundary position of the element) on the element forming member. By the cleavage means, the element forming member can be cleaved from the formed scar.

As described above, according to the present invention, both the scar forming means and the cleavage means are provided, and the arrangement position detecting means for detecting the arrangement position of the element forming member is also provided.
Based on the detected position of the element forming member, the formation of a scar on the element forming member and the cleavage from the scar can be accurately performed by a single device, so that workability is good and
An excellent device capable of appropriately performing cleavage and separation of elements can be provided.

Further, according to the present invention, the scar forming means has cutter supporting means for supporting the disc-shaped cutter in a direction substantially perpendicular to the surface of the element. By pressing against the surface of the member, a scar can be formed on the element forming member.
In this case, unlike the case of applying the conventional scar forming method of forming a scar by scratching the surface side of the element forming member at the tip side of the blade such as a needle, the cutter is moved along the surface of the element forming member. The structure of the scar forming means can be simplified by the amount that the moving mechanism is not required.

Further, according to the present invention, in which the cutter pressing means for pressing one end on the outer peripheral side of the disk-shaped cutter supported by the cutter supporting means against the surface of the element forming surface is provided, the pressing operation of the cutter pressing means allows
One end on the outer peripheral side of the cutter is pressed against the surface of the element forming member, and a scar with a stable depth and size can be easily formed on the element forming member.

Further, according to the present invention provided with the load force adjusting means for adjusting the pressing force applied from the cutter to the element forming member side, the formation depth and size of the scar can be further stabilized.

Further, as described above, when the scar is formed by the surface at one end on the outer peripheral side of the cutter, unlike the case where the scar is formed by one point of the blade, the consumption of the blade portion of the cutter is reduced. The life of the cutter can be extended. Therefore, it is possible to reduce the trouble of replacing a cutter whose blade part has been consumed.

Further, the lower surface side of the element forming member on which the scar is formed is supported by a fulcrum member at two or more positions sandwiching the scar, and the upper surface side of the element forming member is similarly formed by two or more points sandwiching the scar. The fulcrum member is supported at the position, and a fulcrum force is applied from the fulcrum member to cleave the element formation member so that the shear stress in the region of the element formation member between the fulcrums sandwiching the scar on the innermost side becomes zero. According to the present invention, the element forming member can be cleaved by applying only the pure bending tensile stress of the maximum principal stress in a direction perpendicular to the vertical plane of the element forming member along the scar, and the element forming member can be straightened along the scar, In addition, an ideal vertical cleavage plane of a mirror surface can be obtained, and the quality of cleavage can be significantly improved.

Further, according to the present invention, since the entire section between the innermost fulcrums can be set to the section where the shear stress becomes zero as described above, the work of adjusting the scar to the section where the shear stress is zero becomes easy, and the cleavage is performed. Work efficiency can be sufficiently improved.

Further, in a configuration in which the fulcrum member is connected to the dynamic load applying means via a floating mechanism, a virtual plane connecting the fulcrum force application points of the fulcrum members is formed on the fulcrum force operation surface of the element forming member. Since the load is applied to the fulcrum member by autonomous adjustment so as to be parallel to each other, an effect is obtained that the load equally distributed to each fulcrum member can be applied from the dynamic load applying means.

Further, according to the present invention, there is provided the movement control means for moving the position of the element forming member to an appropriate position for scar formation by controlling the movement stage means based on the detection result by the arrangement position detection means. By means of the movement control means, the position of the element forming member can be quickly and accurately moved to the appropriate scar formation position, and the scar formation operation can be performed efficiently and accurately.

[Brief description of the drawings]

FIG. 1 is a main part configuration diagram schematically showing an embodiment of an element isolation device according to the present invention.

FIG. 2 is an explanatory diagram showing an operation example of an element arrangement portion peripheral structure, an arrangement position detecting means, and a movement control device in the embodiment.

FIG. 3 is an explanatory diagram of an example of a bar angular position calculation method by an arrangement position detection unit in the embodiment.

FIG. 4 is an explanatory diagram showing another example of the operation of the element arrangement portion peripheral structure, the arrangement position detection means, and the movement control device in the embodiment.

FIG. 5 is an explanatory diagram of an example of a method of calculating a scar formation position by an arrangement position detection unit in the embodiment.

FIG. 6 is a side view (a) and a front view (b) showing a cutter provided in the embodiment.

FIG. 7 is a perspective view showing a main configuration of a scar forming means provided in the embodiment.

FIG. 8 is an explanatory side view schematically showing the operation of the scar forming means shown in FIG. 7;

9 is a schematic side view showing an example in which a load sensor is provided on the scar forming means shown in FIG. 7;

FIG. 10 is an explanatory diagram showing a contact state of the cutter with the bar when scars are formed in the embodiment and an operation example of changing a contact surface of the cutter with the bar in the embodiment;

FIG. 11 is an explanatory view showing a configuration of a cleavage means provided in the embodiment by a perspective view.

FIG. 12 is an explanatory diagram showing a side view of an example of a support state when the bar is cleaved by the cleavage means.

FIG. 13 is an explanatory view showing a side view of an example of the cleaving operation of the bar by the cleavage means.

FIG. 14 is a view showing a relationship between a shearing force and a bending moment when the bar is cleaved by the cleavage means.

FIG. 15 is a diagram of a stress circle of a molding showing a relation between a shearing force and a bending moment at the time of cleavage of a bar by the cleavage means at the time of cleavage.

FIG. 16 is a view showing an example of a cleavage unit provided in another embodiment of the element isolation device of the present invention.

FIG. 17 is a diagram illustrating an example of a floating mechanism in a cleavage unit provided in the element isolation device of the present invention.

FIG. 18 is a view showing another embodiment of the floating mechanism.

FIG. 19 is a view showing still another embodiment of the floating mechanism.

FIG. 20 is a view showing still another embodiment of the floating mechanism.

FIG. 21 is a diagram showing a method of cleaving a bar by a three-point bending method.

FIG. 22 is an explanatory diagram of an example of a defect in which an oblique plane is generated in a cleavage plane.

FIG. 23 is a diagram showing a relationship between a shearing force and a bending moment when cleaving a bar by a three-point bending method.

FIG. 24 is a diagram showing a relationship between a shearing force and a bending moment at the time of cleavage of a bar by a three-point bending method using a stress circle of a molding.

FIG. 25 is an explanatory diagram showing an operation of separating and forming a bar from a semiconductor wafer.

FIG. 26 is an explanatory diagram showing an operation of separating an element from a bar.

FIG. 27 is an explanatory view showing a conventional method of forming a scar on a bar.

FIG. 28 is an explanatory view showing a cleavage operation of a conventional scar forming bar.

[Explanation of symbols]

 Reference Signs List 1 bar 2 scar 3,7 cleavage head 4a, 4b, 6a, 6b fulcrum member 8 element 9 cutter 10 sheet holder 12 element arrangement surface 13 scar forming means 14 moving stage means 15 pedestal 24 load applying driver 40 camera 44 cutter supporting means 53 Movement control device 80 Cleaving means

Continuation of the front page (72) Inventor Xu Jie 2-6-1 Marunouchi, Chiyoda-ku, Tokyo Furukawa Electric Co., Ltd. F-term (reference) 5F073 DA32 DA34 DA35

Claims (7)

[Claims] 1. An element arrangement surface on which an element formation member formed by arranging and forming a plurality of elements is placed, and two orthogonal X and Y directions of two planes of the element formation member arranged on the element arrangement surface.
An arrangement position detecting means provided with a camera for detecting an arrangement position in a rotation direction about a Z axis perpendicular to the Y plane; and an element forming member arranged on the element arrangement surface, wherein the element forming member is arranged in the X, Y directions and around the Z axis. Moving stage means movable in the rotational direction, scar forming means for forming a scar on the surface side of the element forming member arranged on the element placement surface, and cleaving the element forming member from the scar formed by the scar forming means An element isolation device comprising: a cleavage unit. 2. A scar forming means, comprising: a disk-shaped cutter;
2. An element separating apparatus according to claim 1, further comprising cutter supporting means for supporting a disk-shaped surface of said cutter in a direction substantially orthogonal to a surface of said element. 3. The element separation device according to claim 2, wherein the scar forming means has a cutter pressing means for pressing one end on the outer peripheral side of the disk-shaped cutter supported by the cutter supporting means against the surface of the element forming surface. apparatus. 4. The element separating apparatus according to claim 3, wherein the scar forming means has a load force adjusting means for adjusting a pressing force of the cutter by the cutter pressing means. 5. A lower fulcrum member for supporting a lower surface side of an element forming member arranged on an element arrangement surface at least at two or more points in parallel with respect to the scar with a scar therebetween. At least two points or more at the supporting position different from the position where the upper surface side of the element forming member arranged on the element arrangement surface is sandwiched between the scars and the lower side is sandwiched between the innermost scars and supported. An upper fulcrum member supporting the scar in parallel with the scar at a position, a dynamic load applying means for applying a moving load for applying a fulcrum force to the element forming member from at least one of the upper and lower fulcrum members, And a support state observing means using a camera for observing the support state of the element forming member supported by the upper and lower fulcrum members. Force of element forming member between fulcrums supporting 5. A means for applying a fulcrum force to make the element forming member zero and applying pure bending tensile stress to the scar to cleave the element forming member from the scar. An element isolation device according to any one of the above. 6. A floating mechanism to which each fulcrum member to which a moving load is applied from the dynamic load applying means autonomously adjusts a virtual surface connecting the tip of the fulcrum of the element forming member in parallel with the fulcrum force applying surface of the element forming member. 6. The device separating device according to claim 5, wherein the device is connected to the dynamic load applying means via a link. 7. A movement control means for moving the position of the element forming member to an appropriate scar formation position by controlling the movement stage means based on the detection result by the arrangement position detection means. The device isolation device according to claim 1.