JP2001172769A - Reducing activation treatment solution for electroless nickel plating and method for producing printed wiring board using the same - Google Patents
Reducing activation treatment solution for electroless nickel plating and method for producing printed wiring board using the sameInfo
- Publication number
- JP2001172769A JP2001172769A JP35430199A JP35430199A JP2001172769A JP 2001172769 A JP2001172769 A JP 2001172769A JP 35430199 A JP35430199 A JP 35430199A JP 35430199 A JP35430199 A JP 35430199A JP 2001172769 A JP2001172769 A JP 2001172769A
- Authority
- JP
- Japan
- Prior art keywords
- plating
- solution
- copper
- nickel plating
- electroless
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Manufacturing Of Printed Wiring (AREA)
Abstract
(57)【要約】
【課題】 本発明は白ムラの発生を抑制するとともに、
実装信頼性に優れたニッケル−金めっき皮膜を形成可能
にするための無電解ニッケルめっき用還元性活性化処理
液およびそれを用いたプリント配線板の製造方法を提供
することを目的とするものである。
【解決手段】 還元剤を無機塩基の水溶液に溶解してな
ることを特徴とし、特に還元剤が次亜りん酸ナトリウム
或いは次亜りん酸カリウムからなり、無機塩基の水溶液
が水酸化ナトリウムおよび/または水酸化カリウムから
なる水酸化物を溶解した、pH9〜13の水溶液である
ことを特徴としている。
(57) [Summary] [PROBLEMS] The present invention suppresses the occurrence of white unevenness,
An object of the present invention is to provide a reducing activation treatment solution for electroless nickel plating for enabling formation of a nickel-gold plating film having excellent mounting reliability and a method for manufacturing a printed wiring board using the same. is there. SOLUTION: The reducing agent is dissolved in an aqueous solution of an inorganic base, and in particular, the reducing agent comprises sodium hypophosphite or potassium hypophosphite, and the aqueous solution of the inorganic base is sodium hydroxide and / or It is characterized by being an aqueous solution having a pH of 9 to 13 in which a hydroxide composed of potassium hydroxide is dissolved.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、銅表面に選択的に
ニッケルめっき層を形成する無電解ニッケルめっきに関
し、特にその前処理に使用される無電解ニッケルめっき
用還元性活性化処理液、並びにかかる還元性活性化処理
液を用いたプリント配線板の製造方法に関するものであ
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electroless nickel plating for selectively forming a nickel plating layer on a copper surface, and more particularly to a reducing activation treatment solution for electroless nickel plating used for pretreatment thereof, and The present invention relates to a method for manufacturing a printed wiring board using such a reducing activation treatment solution.
【0002】[0002]
【従来の技術】近年、情報通信機器、情報通信端末機器
など電子機器の小型化に伴い、プリント配線板の高密度
化、多層配線板、小径ランドへのCSP,BGA実装高
度の技術及び低コスト化などが要求されている。2. Description of the Related Art In recent years, as electronic devices such as information communication equipment and information communication terminal equipment have become smaller, the density of printed wiring boards has increased, multilayer wiring boards, CSP and BGA mounting on small-diameter lands have advanced technologies, and low cost. Is required.
【0003】これらの要求に対して、銅の表面処理とし
て、電解めっきに替わり、無電解めっき技術が採用され
てきている。この無電解めっき技術について図4,5の
(a)〜(d)に添って説明する。In response to these demands, electroless plating technology has been adopted in place of electrolytic plating as a surface treatment of copper. This electroless plating technique will be described with reference to FIGS.
【0004】従来、この無電解ニッケルめっきによりプ
リント配線板1の表層に配設された銅配線または銅ラン
ド3の表面にニッケルめっき層を形成するには、めっき
処理に先立ち前処理として銅表面の脱脂とソフトエッチ
ング及びアクチベータと呼ばれるPdCl2或いはPd
SO4等を含むPdによって活性化処理(パラジウムの
核9付け)をした後、無電解ニッケルめっき液11に浸
漬し、ニッケルめっき膜12を形成し、その上にニッケ
ルめっき膜12の酸化を防止するとともに、はんだ付け
性を劣化させないためのフラッシュ金めっき膜13を無
電解金めっきにより形成していた。なお、図中の4はソ
ルダーレジスト、5は導通ビア、7は内層銅配線、8は
絶縁樹脂層である。Conventionally, in order to form a nickel plating layer on the surface of copper wiring or copper land 3 disposed on the surface layer of the printed wiring board 1 by this electroless nickel plating, the copper surface must be pretreated before plating. Degreasing, soft etching and PdCl 2 or Pd called activator
After an activation treatment (palladium nucleus 9 attachment) with Pd containing SO 4 or the like, the substrate is immersed in an electroless nickel plating solution 11 to form a nickel plating film 12, on which oxidation of the nickel plating film 12 is prevented. In addition, the flash gold plating film 13 for preventing the solderability from being deteriorated is formed by electroless gold plating. In the figure, 4 is a solder resist, 5 is a conductive via, 7 is an inner copper wiring, and 8 is an insulating resin layer.
【0005】[0005]
【発明が解決しようとする課題】しかしながら、プリン
ト配線板1が、細線化すると同時に多層化し、高密度配
線になるに伴い、パターン構成によってはめっき析出に
異常な現象が発生することがある。特に特定の銅ランド
あるいは銅配線、例えば、図4,5中の広い面積を有す
る内層銅パターン6に繋がった細い銅配線または小さい
銅ランド2等に発生する。However, as the printed wiring board 1 becomes thinner and more multilayered at the same time as high-density wiring, an abnormal phenomenon may occur in plating deposition depending on the pattern configuration. In particular, it occurs on a specific copper land or copper wiring, for example, a thin copper wiring or a small copper land 2 connected to an inner copper pattern 6 having a large area in FIGS.
【0006】これは、ニッケルの析出が遅れ、またその
上に無電解金めっきを行うと、金のニッケル皮膜への置
換が異常に進み、他のランドと比較すると異常に白っぽ
く見えるめっき表面(発明者らは白ムラと呼んでいる)
となる。[0006] This is because the deposition of nickel is delayed, and when electroless gold plating is performed thereon, the replacement of gold with a nickel film proceeds abnormally, and the plating surface looks abnormally whitish when compared with other lands. Call them white spots)
Becomes
【0007】例えば、ニッケルを5μmめっきにより形
成する場合、通常の銅配線または銅ランド3のめっき厚
をbとし、広い面積を有する内層銅パターン6に繋がっ
た細い銅配線または小さい銅ランド2をb1とすると、
b=5μmのときb1=1.5〜2μmであった。For example, when nickel is formed by plating with a thickness of 5 μm, the plating thickness of the normal copper wiring or copper land 3 is set to b, and the thin copper wiring or the small copper land 2 connected to the inner copper pattern 6 having a large area is set to b1. Then
When b = 5 μm, b1 = 1.5 to 2 μm.
【0008】またこのニッケルめっき膜12は無電解金
めっきにアタックされやすく、正常なニッケルめっき膜
に比べ金の置換が激しく、他の金めっき皮膜に比べ白っ
ぽく見えることがわかった。さらに、はんだ付け後のは
んだボールプル強度も弱く、はんだ接合強度が低下する
現象があった。Further, it has been found that the nickel plating film 12 is easily attacked by electroless gold plating, the substitution of gold is intense as compared with a normal nickel plating film, and it looks whitish as compared with other gold plating films. Furthermore, the solder ball pull strength after soldering is weak, and there has been a phenomenon that the solder joint strength is reduced.
【0009】本発明は上記従来の課題を解決し、実装信
頼性に優れたニッケル−金めっき皮膜を形成するための
無電解ニッケルめっき用還元性活性化処理液及びそれを
用いたプリント配線板の製造方法を提供することを目的
とするものである。The present invention solves the above-mentioned conventional problems, and provides a reducing activation treatment solution for electroless nickel plating for forming a nickel-gold plating film having excellent mounting reliability, and a printed wiring board using the same. It is intended to provide a manufacturing method.
【0010】[0010]
【課題を解決するための手段】上記課題を解決するため
に、本発明の構成は還元剤を無機塩基の水溶液に溶解し
てなることを特徴とする無電解めっき用還元性活性化処
理液にあり、還元剤が次亜りん酸塩である次亜りん酸ナ
トリウム或いは次亜りん酸カリウムからなり、無機塩基
の水溶液が水酸化ナトリウムおよび/または水酸化カリ
ウムからなる水酸化物を溶解した、pH9以下〜13の
水溶液であることを特徴としている。In order to solve the above-mentioned problems, the present invention provides a reducing activation solution for electroless plating, characterized in that a reducing agent is dissolved in an aqueous solution of an inorganic base. A reducing agent consisting of sodium hypophosphite or potassium hypophosphite, which is a hypophosphite, and an aqueous solution of an inorganic base in which a hydroxide consisting of sodium hydroxide and / or potassium hydroxide is dissolved; It is characterized by the following aqueous solutions of to 13.
【0011】無機塩基の水溶液は、還元剤の反応の駆動
力を上げるためのものであり、これを阻害するものでな
ければよく、例えばNaOHまたはKOHの水溶液とす
ることができる。この無機塩基の濃度により水溶液のp
Hを調整する。水溶液のpH即ち還元性活性化処理液の
pHは、pH9以下では活性化が低下し、無電解ニッケ
ルめっきの被着性が劣化する。他方、pH13を越える
とレジストマスクが侵される可能性がある。The aqueous solution of the inorganic base is used for increasing the driving force of the reaction of the reducing agent, and may be any one which does not inhibit this. For example, an aqueous solution of NaOH or KOH can be used. Depending on the concentration of the inorganic base, p
Adjust H. When the pH of the aqueous solution, that is, the pH of the reducing activation treatment solution is pH 9 or less, the activation is reduced, and the adherence of electroless nickel plating is deteriorated. On the other hand, if the pH exceeds 13, the resist mask may be damaged.
【0012】従って、還元性活性化処理液のpHは無電
解ニッケルめっきの被着性を考慮してpH9以上が好ま
しく、さらにレジストマスクの腐食防止が必要とされる
用途ではpHは13以下であることが望ましい。Accordingly, the pH of the reducing activation treatment solution is preferably pH 9 or more in consideration of the adherence of electroless nickel plating, and the pH is 13 or less in applications where corrosion of the resist mask is required. It is desirable.
【0013】また、従来の無電解めっき法である銅配線
および/または銅ランドの表面をまず脱脂処理、酸洗処
理、ソフトエッチング処理を行った後、パラジウムのめ
っき核付けを行う第1の活性化処理工程の後に、本発明
の還元剤を無機塩基の水溶液に溶解した無電解めっき用
還元性活性化処理液に浸漬する第2の活性化処理工程
と、前記還元性活性化処理液を銅配線および/または銅
ランドの表面に付着させた状態で前記表面を酸化還元反
応型の無電解ニッケルめっき液に浸漬するという本発明
のプロセスによる無電解ニッケルめっき工程を経ること
により、均一なニッケルめっき皮膜が形成できるととも
に、さらに無電解めっき液に浸漬する無電解金めっき工
程でも緻密で均一なニッケルめっき皮膜のために、ニッ
ケル皮膜と金の置換も均一に行われ信頼性に優れたニッ
ケル−金皮膜を有することを特徴とするプリント配線板
の製造が可能となる。[0013] A first activity in which a surface of copper wiring and / or copper land, which is a conventional electroless plating method, is first degreased, pickled, and soft-etched, and then nucleated with palladium plating. After the activating treatment step, a second activating treatment step of immersing the reducing agent of the present invention in a reducing activation treatment solution for electroless plating in which the reducing agent is dissolved in an aqueous solution of an inorganic base; By applying an electroless nickel plating step according to the process of the present invention in which the surface is immersed in a redox reaction type electroless nickel plating solution while being attached to the surface of the wiring and / or copper land, uniform nickel plating is achieved. In addition to the formation of a film, the nickel film can be replaced by a nickel film for a dense and uniform nickel plating film even in the electroless gold plating process of dipping in an electroless plating solution. Uniformly conducted reliability superior nickel - it becomes possible to produce a printed wiring board, characterized in having a gold coating.
【0014】[0014]
【発明の実施の形態】本発明によるプリント配線板の銅
配線および銅ランド表面にニッケル−金めっき皮膜を形
成する方法を図面を参照して説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS A method for forming a nickel-gold plating film on the surfaces of copper wiring and copper lands of a printed wiring board according to the present invention will be described with reference to the drawings.
【0015】まず、銅配線および銅ランド表面へのニッ
ケルめっき法の基本は、表層に銅配線および/または銅
ランドが形成されたプリント配線板をまず通常の脱脂処
理し、62%硫酸で酸洗浄をした後、過硫酸ナトリウム
/62%硫酸溶液でソフトエッチングを行う。続いてア
ンモニウム塩でプレディップし、パラジウム塩を含むア
クチベータで第1の活性化処理を行う。First, the nickel plating method on the copper wiring and copper land surface is based on the following principle. First, a printed wiring board having copper wiring and / or copper land formed on the surface layer is subjected to ordinary degreasing treatment and acid cleaning with 62% sulfuric acid. After that, soft etching is performed with a sodium persulfate / 62% sulfuric acid solution. Subsequently, pre-dip is performed with an ammonium salt, and a first activation process is performed using an activator containing a palladium salt.
【0016】次に次亜りん酸ナトリウムのような次工程
の酸化還元反応型無電解ニッケルめっき液に使用する還
元剤をpHを9.0〜13.0に調整した水酸化ナトリ
ウムのような無機塩に溶解した無電解めっき用還元性活
性化処理液に浸漬する第2の活性化処理を行う。Next, a reducing agent such as sodium hypophosphite used in the redox reaction type electroless nickel plating solution in the next step is made of an inorganic material such as sodium hydroxide whose pH is adjusted to 9.0 to 13.0. A second activation process of immersing in a reductive activation treatment solution for electroless plating dissolved in salt is performed.
【0017】更に、前記還元性活性化処理液を銅配線お
よび銅ランドに付着させた状態で前記銅表面を酸化還元
反応型の無電解ニッケルめっき液に浸漬した後、無電解
金めっき液に浸漬し、金めっきを行うことを特徴とする
ものである。Further, the copper surface is immersed in an electroless nickel plating solution of an oxidation-reduction reaction type while the reducing activation treatment solution is attached to copper wiring and copper lands, and then immersed in an electroless gold plating solution. And gold plating is performed.
【0018】ところで、プリント配線板が細線化すると
ともに、プリント配線板が高周波化された電子機器に採
用されるにつれ、ノイズ対策あるいはインピーダンスの
マッチング性のために、非常に細い配線あるいは小さな
銅ランドが内層の広い面積の配線パターンに繋がること
が多くなった。By the way, as the printed wiring board becomes thinner and the printed wiring board is adopted in electronic equipment of higher frequency, very thin wiring or small copper lands are required for noise suppression or impedance matching. It often leads to a wiring pattern with a large area in the inner layer.
【0019】これらの多層配線板を無電解めっき液中に
浸漬すると、広い配線パターンとそうでないところと
で、局部電池を形成するため、局部電池形成の仕方によ
ってはめっきが析出しなかったり、あるいはめっきの析
出速度が著しく低下する現象が発生する。When these multilayer wiring boards are immersed in an electroless plating solution, a local battery is formed between a wide wiring pattern and a place other than the wiring pattern. Therefore, depending on the method of forming the local battery, plating does not precipitate, or A phenomenon occurs in which the plating deposition rate is significantly reduced.
【0020】そこで無電解ニッケルめっきの反応の駆動
力を考えたとき、Ni2+の還元電位は、酸性側ではpH
4付近まではほぼ一定であるが、アルカリ側ではNi錯
イオンの安定のために相当変動する。一方還元剤の酸化
還元電位は全pH域にわたって直線的に変化する。従っ
て、めっき反応、すなわち還元反応の駆動力の値はpH
によっても変化することがわかった。Therefore, considering the driving force of the reaction of electroless nickel plating, the reduction potential of Ni 2+ is pH on the acidic side.
It is almost constant up to around 4, but fluctuates considerably on the alkali side due to the stability of Ni complex ions. On the other hand, the redox potential of the reducing agent changes linearly over the entire pH range. Therefore, the value of the driving force of the plating reaction, that is, the reduction reaction is pH
Was also changed by
【0021】例えば、無電解ニッケルめっきにおいて
は、 pH4で Ni2++2e-=Ni………E0=−0.250V H2PO2 -+H2O=H2PO3 -+2H++2e- ………E0′=−0.750V E0′−E0=−0.5V pH12で Ni−cit+2e-=Ni………E0=−0.4V H2PO2 -+H2O=H2PO3 -+2H++2e- ………E0′=−1.25V E0′−E0=−0.85V であり、pHが高いほど還元反応の駆動力が大きくなる
ことがわかる。For example, in electroless nickel plating, Ni 2+ + 2e − = Ni at pH 4 E 0 = −0.250 V H 2 PO 2 − + H 2 O = H 2 PO 3 − + 2H + + 2e − . ...... E 0 '= -0.750V E 0 ' in -E 0 = -0.5V pH12 Ni-cit + 2e - = Ni ......... E 0 = -0.4V H 2 PO 2 - + H 2 O = H 2 PO 3 - + 2H + + 2e - ......... E 0 '= -1.25V E 0' -E a 0 = -0.85 V, it can be seen that the driving force of the reduction reaction higher pH increases.
【0022】従って、この反応の駆動力を生かし、めっ
き面積の違う銅ランドおよび銅配線パターンの各パター
ン間の電位差を上回る還元力を発生させることが重要で
ある。つまり、各めっき面積の違う銅配線パターンの表
面をe-(H2PO2 -+H2O=H2PO3 -+2H++2
e-)がリッチな状態にし、Ni2 ++2e-=Niの反応
を促進するには、各めっき面積の違う銅ランドおよび銅
配線パターンの表面のpHを高く(アルカリ側)にする
とともに還元剤である次亜りん酸ナトリウムの量もリッ
チな状態にしておくことが重要である。Therefore, it is important to utilize the driving force of this reaction to generate a reducing force exceeding the potential difference between the copper lands and the copper wiring patterns having different plating areas. That is, the surface of the copper wiring pattern having a different plating area is defined as e − (H 2 PO 2 − + H 2 O = H 2 PO 3 − + 2H + +2).
In order to make e − ) rich and promote the reaction of Ni 2 + + 2e − = Ni, the pH of the surface of the copper land and the copper wiring pattern having different plating areas is increased (alkaline side) and the reducing agent is used. It is important to keep the amount of sodium hypophosphite rich as well.
【0023】本発明では、次のニッケルめっきに持ち込
んでもめっき作用に支障を与えることのない水酸化ナト
リウム溶液にニッケルめっき液中に含まれる還元剤(例
えば次亜りん酸ナトリウム)を溶かし、この還元性活性
化処理液を銅配線および銅ランドにそのまま付着させた
状態で直ちに酸化還元型無電解ニッケルめっきをすれば
銅表面に大きな還元力を得ることができ、銅配線および
銅上に先に核付けしたパラジウムの粒子を中心にニッケ
ル膜が析出する。このように前記第2の活性化処理を施
すことにより、銅配線および銅上を有するプリント配線
板がめっき液の中に入った際、初期のニッケル析出を容
易にする。また、このニッケルめっきができれば、この
ニッケル膜の上には無電解金めっき等のめっき処理は問
題なくできることも確認した。According to the present invention, a reducing agent (eg, sodium hypophosphite) contained in a nickel plating solution is dissolved in a sodium hydroxide solution which does not interfere with the plating operation even when brought into the next nickel plating. If redox-type electroless nickel plating is performed immediately with the chemical activation treatment liquid directly attached to the copper wiring and copper land, a large reducing power can be obtained on the copper surface, and the nucleus is first placed on the copper wiring and copper. A nickel film is deposited around the attached palladium particles. By performing the second activation process as described above, when the printed wiring board having the copper wiring and the copper wiring enters the plating solution, the initial nickel deposition is facilitated. It was also confirmed that if this nickel plating could be performed, plating treatment such as electroless gold plating could be performed on this nickel film without any problem.
【0024】上記無電解めっき液としては、例えば無電
解Ni−Pめっき液、無電解Ni−Bめっき液を用いる
ことができる。As the electroless plating solution, for example, an electroless Ni-P plating solution or an electroless Ni-B plating solution can be used.
【0025】また、無電解ニッケルめっき液としては次
亜りん酸ナトリウムを還元剤とするアルカリ性めっき液
はもちろん酸性めっき液でも可能である。本発明におい
ては酸性めっき液としては、pH4.0〜6.8が各銅
配線および銅ランドに均一にニッケルめっき皮膜を形成
するのに重要であることが実験でわかっており、また、
pHが7を超えるとニッケルの水酸化物が析出し白濁す
るが、上記本発明の還元剤を含むアルカリ溶液はpHを
9.0〜13.0に調整しているので、本発明の処理で
はpHは7を超えることはなく非常にうまくめっきでき
る。さらにめっきが進みニッケルイオンが消費されると
pHが下がるが、このpHの低下に対しても上記処理に
よるアルカリ液の持ち込みによりpHの低下をある程度
抑えめっき付着に良い結果を示した。また上記還元性活
性化処理液のpHを13.0以上にするとソルダーレジ
スト等の有機物を侵す等の悪い影響がでる。As the electroless nickel plating solution, not only an alkaline plating solution using sodium hypophosphite as a reducing agent but also an acidic plating solution can be used. In the present invention, it has been experimentally found that the pH of the acidic plating solution is 4.0 to 6.8 in order to uniformly form a nickel plating film on each copper wiring and copper land.
When the pH exceeds 7, nickel hydroxide precipitates and becomes cloudy. However, since the pH of the alkaline solution containing the reducing agent of the present invention is adjusted to 9.0 to 13.0, in the treatment of the present invention, The plating does not exceed 7 and can be plated very well. Further, as the plating progresses and the nickel ions are consumed, the pH drops. However, even with this drop in pH, the pH was suppressed to some extent by bringing in the alkaline solution by the above treatment, and good results were obtained for plating adhesion. Further, when the pH of the reducing activation treatment solution is set to 13.0 or more, adverse effects such as attack of organic substances such as a solder resist are caused.
【0026】以下、本発明の具体的な実施の形態につい
て図1,2の(a)〜(e)を参照しながら説明する。
なお、従来と同様の構成については同一の符号を付して
その説明を省略する。Hereinafter, specific embodiments of the present invention will be described with reference to FIGS.
The same components as those in the related art are denoted by the same reference numerals, and description thereof is omitted.
【0027】先ず、図1(a)に示すように従来と同様
の方法により銅配線または銅ランド3等が形成された多
層プリント配線板1を準備した。First, as shown in FIG. 1A, a multilayer printed wiring board 1 having copper wiring or copper lands 3 formed thereon was prepared in the same manner as in the prior art.
【0028】次に、図1(b)に示すようにこの多層プ
リント配線板1の銅配線または銅ランド3等の銅表面を
まず通常の脱脂処理し、62%硫酸で酸洗浄をした後、
過硫酸ナトリウム−後62%硫酸溶液でソフトエッチン
グを行う。続いてアンモニウム塩でプレディップし、パ
ラジウム塩を含むアクチベータで第1の活性化処理液に
この多層プリント配線板1を3分間浸漬して、露出した
銅表面にパラジウムの核9付けを行った後純粋で洗浄し
た。Next, as shown in FIG. 1 (b), the copper surface of the copper wiring or the copper land 3 of the multilayer printed wiring board 1 is first subjected to ordinary degreasing treatment, followed by acid cleaning with 62% sulfuric acid.
Perform a soft etch with a sodium persulfate-post 62% sulfuric acid solution. Subsequently, the multilayer printed wiring board 1 is pre-dipped with an ammonium salt, and immersed in the first activation treatment solution for 3 minutes with an activator containing a palladium salt, and a palladium nucleus 9 is formed on the exposed copper surface. Pure and washed.
【0029】次いで、図1(c)に示すように第2の活
性化処理液として、還元剤である次亜りん酸ナトリウム
25gを750mLの水に溶かした後、水酸化ナトリウ
ム溶液でpH9.0〜13.0に調整しながら純水を加
え、トータルで1000mLにした還元性活性化処理液
10に10秒間浸漬した後、直ちにあるいは純水にさっ
と浸漬した後、この多層プリント配線板1を下記の組成
からなり、さらにチオグリコール酸等のイオウ化合物を
反応促進剤として数ppm添加し、更に安定化剤として
酢酸鉛を5ppm添加し、pHを4.0〜6.8に調整
し、温度80〜90℃の酸化還元反応型の無電解ニッケ
ルめっき液に約25分間浸漬して、露出した銅配線また
は銅ランド3上に5〜6μmのリンを含むニッケルめっ
き膜12を形成した。Next, as shown in FIG. 1C, as a second activation treatment solution, 25 g of sodium hypophosphite as a reducing agent was dissolved in 750 mL of water, and then pH 9.0 with sodium hydroxide solution. After adding pure water while adjusting to ~ 13.0, immersing in the reducing activation treatment solution 10 having a total of 1000 mL for 10 seconds, or immediately or immersed in pure water, the multilayer printed wiring board 1 was prepared as follows. Further, several ppm of a sulfur compound such as thioglycolic acid is added as a reaction accelerator, 5 ppm of lead acetate is further added as a stabilizer, the pH is adjusted to 4.0 to 6.8, and the temperature is adjusted to 80. Immersion in an oxidation-reduction type electroless nickel plating solution of about 90 ° C. for about 25 minutes to form a nickel plating film 12 containing phosphorus of 5 to 6 μm on the exposed copper wiring or copper land 3. .
【0030】更に、図2(e)に示すように多層プリン
ト配線板を純水で洗浄するとともに置換反応型の無電解
金めっき液(例えば奥野製薬工業(株)製のOPCムデ
ンゴールド、pH5.8、液温90℃)中に約10分間
浸漬し、ニッケルめっき膜12の表面に厚さ0.05μ
mのフラッシュ金めっき膜13を形成した。Further, as shown in FIG. 2 (e), the multilayer printed wiring board is washed with pure water and a substitution reaction type electroless gold plating solution (for example, OPC Muden Gold, pH5, manufactured by Okuno Pharmaceutical Co., Ltd.) .8, a liquid temperature of 90 ° C.) for about 10 minutes, and a thickness of 0.05 μm is formed on the surface of the nickel plating film 12.
m of the flash gold plating film 13 was formed.
【0031】ここで、本実験例に用いた酸化還元型反応
型の無電解ニッケルめっき液の組成を次に示す。Here, the composition of the oxidation-reduction type electroless nickel plating solution used in this experimental example is shown below.
【0032】 (酸化還元反応型の無電解ニッケルめっき液の組成) 硫酸ニッケル 7.4g/L 次亜りん酸ナトリウム 13 g/L ロッセル塩 14 g/L リンゴ酸 10 g/L 酢酸ナトリウム 6 g/L 水酸化ナトリウム水溶液を加えてpH4.0〜pH6.
8に調整 以上のめっき処理により、多層プリント配線板1の全て
の露出した銅配線または銅ランド3の表面にNi(5〜
6μm)−Au(0.05μm)のめっき膜が形成され
た。このニッケルめっき膜12は露出した銅配線または
銅ランド3に対して極めて強固に密着し、さらには、緻
密なニッケル膜がされていた。また、このめっき膜はん
だボールプル試験を実施したところ図3に示されるよう
に非常に良好なはんだボールプル強度を示した。(Composition of Redox Reaction Type Electroless Nickel Plating Solution) Nickel sulfate 7.4 g / L Sodium hypophosphite 13 g / L Rossel salt 14 g / L Malic acid 10 g / L Sodium acetate 6 g / L L sodium hydroxide aqueous solution to add pH 4.0 to pH 6.0.
8 By the above plating process, Ni (5 to 5) is applied to the surface of all exposed copper wiring or copper land 3 of multilayer printed wiring board 1.
6 μm) -Au (0.05 μm) plating film was formed. This nickel plating film 12 adhered extremely firmly to the exposed copper wiring or copper land 3, and further, a dense nickel film was formed. Further, when the plating ball solder ball pull test was performed, as shown in FIG. 3, a very good solder ball pull strength was exhibited.
【0033】以上のように本実施の形態によれば、極め
て簡単な操作で従来のめっきが困難であった。すなわ
ち、例えば図1,2中の広い面積を有する銅パターン6
に繋がった細い銅配線または小さい銅ランド2にも他の
露出した銅配線または銅ランド3とほぼ同じめっき厚が
得られる。例えば、図2(e)でニッケルめっき厚aが
5μmであれば、めっき厚a1も5±0.5μmでニッ
ケルめっき膜12を安定的に形成できる。また、形成さ
れたニッケル膜は非常に緻密に形成され、はんだ付けに
よるNi−Snの合金層の形成も少なく、はんだ接合性
にも優れ、CSP,BGAなどのはんだ実装強度に対し
ても信頼性に優れた実施が可能となった。As described above, according to the present embodiment, it has been difficult to perform conventional plating with an extremely simple operation. That is, for example, the copper pattern 6 having a large area in FIGS.
The thin copper wiring or the small copper land 2 connected to the same can obtain almost the same plating thickness as the other exposed copper wiring or the copper land 3. For example, if the nickel plating thickness a is 5 μm in FIG. 2E, the nickel plating film 12 can be formed stably with a plating thickness a1 of 5 ± 0.5 μm. In addition, the formed nickel film is formed very densely, the formation of the Ni-Sn alloy layer by soldering is small, and the solder bonding property is excellent, and the reliability for the solder mounting strength of CSP, BGA, etc. is high. Excellent implementation has become possible.
【0034】[0034]
【発明の効果】以上のように、本発明によれば、白ムラ
の発生を抑制するとともに、実装信頼性に優れたニッケ
ル−金めっきをプリント配線板の銅配線や銅ランド等の
銅表面に形成することができる。As described above, according to the present invention, it is possible to suppress the occurrence of white unevenness and to apply nickel-gold plating having excellent mounting reliability to the copper surface of a copper wiring or a copper land of a printed wiring board. Can be formed.
【図1】本発明の一実施の形態における多層プリント配
線板のめっき処理工程の様子を模式的に示した工程模式
断面図FIG. 1 is a process schematic cross-sectional view schematically showing a state of a plating process of a multilayer printed wiring board according to an embodiment of the present invention.
【図2】同工程模式断面図FIG. 2 is a schematic sectional view of the same process.
【図3】同実施の形態におけるはんだボールプル強度を
示した特性図FIG. 3 is a characteristic diagram showing solder ball pull strength in the embodiment.
【図4】従来の多層プリント配線板のめっき処理工程の
様子を模式的に示した工程模式断面図FIG. 4 is a process schematic cross-sectional view schematically showing a state of a plating process of a conventional multilayer printed wiring board.
【図5】同工程模式断面図FIG. 5 is a schematic sectional view of the same process.
1 多層プリント配線板 2 広い面積を有する内層銅パターンに繋がった細い銅
配線または小さい銅ランド 3 銅配線または銅ランド 4 ソルダーレジスト 5 導通ビア 6 広い面積を有する内層銅パターン 7 内層銅配線 8 絶縁樹脂層 9 パラジウムの核 10 還元性活性化処理液 11 無電解ニッケルめっき液 12 ニッケルめっき膜 13 フラッシュ金めっき膜DESCRIPTION OF SYMBOLS 1 Multilayer printed wiring board 2 Fine copper wiring or small copper land connected to wide area inner layer copper pattern 3 Copper wiring or copper land 4 Solder resist 5 Conducting via 6 Large area inner layer copper pattern 7 Inner layer copper wiring 8 Insulating resin Layer 9 Palladium nucleus 10 Reducing activation treatment solution 11 Electroless nickel plating solution 12 Nickel plating film 13 Flash gold plating film
───────────────────────────────────────────────────── フロントページの続き (72)発明者 水越 淳二 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 山田 剛 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 (72)発明者 岡本 泉 大阪府門真市大字門真1006番地 松下電器 産業株式会社内 Fターム(参考) 4K022 AA02 AA42 BA03 BA04 BA14 BA16 BA36 CA03 CA05 CA06 CA15 CA16 CA21 DA01 DB01 DB02 5E343 BB23 BB44 CC44 CC73 CC74 DD33 DD76 EE02 GG06 GG13 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Junji Mizukoshi 1006 Kadoma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. 72) Inventor Izumi Okamoto 1006 Kadoma, Kazuma, Osaka Pref.F-term in Matsushita Electric Industrial Co., Ltd. (Reference) EE02 GG06 GG13
Claims (4)
線および/または銅ランドの表面を活性化処理するため
の処理液として、還元剤を無機塩基の水溶液に溶解して
なることを特徴とする無電解ニッケルめっき用還元性活
性化処理液。1. A treatment solution for activating a surface of copper wiring and / or copper land formed on a surface layer of a printed wiring board, wherein a reducing agent is dissolved in an aqueous solution of an inorganic base. Activating solution for electroless nickel plating.
とする請求項1記載の無電解ニッケルめっき用還元性活
性化処理液。2. The reducing activation treatment solution for electroless nickel plating according to claim 1, wherein the reducing agent is hypophosphite.
よび/または水酸化カリウムからなる水酸化物を溶解し
た、pH9〜13の水溶液であることを特徴とする請求
項1記載の無電解ニッケルめっき用還元性活性化処理
液。3. The electroless nickel plating solution according to claim 1, wherein the aqueous solution of the inorganic base is an aqueous solution having a pH of 9 to 13 in which a hydroxide composed of sodium hydroxide and / or potassium hydroxide is dissolved. Reductive activation treatment solution.
線および/または銅ランドの表面に無電解めっきを行う
際に、上記銅配線および/または銅ランドの表面を脱脂
処理、酸洗処理、ソフトエッチング処理後、パラジウム
のめっき核付けを行う第1の活性化処理工程と、還元剤
を無機塩基の水溶液に溶解した無電解めっき用還元性活
性化処理液に浸漬する第2の活性化処理工程と、前記還
元性活性化処理液を銅配線および/または銅ランドの表
面に付着させた状態で前記表面を酸化還元反応型の無電
解ニッケルめっき液に浸漬して無電解ニッケルめっき
し、さらに無電解金めっき液に浸漬して無電解金めっき
する工程とを有するプリント配線板の製造方法。4. When the surface of the copper wiring and / or copper land formed on the surface layer of the printed wiring board is subjected to electroless plating, the surface of the copper wiring and / or copper land is degreased, pickled, After the soft etching treatment, a first activation treatment step of nucleating the palladium plating, and a second activation treatment of immersing in a reducing activation treatment solution for electroless plating in which a reducing agent is dissolved in an aqueous solution of an inorganic base. A step of immersing the surface in an oxidation-reduction type electroless nickel plating solution and electroless nickel plating with the reducing activation treatment solution adhered to the surface of the copper wiring and / or copper land; and A method of immersing in an electroless gold plating solution to perform electroless gold plating.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35430199A JP2001172769A (en) | 1999-12-14 | 1999-12-14 | Reducing activation treatment solution for electroless nickel plating and method for producing printed wiring board using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP35430199A JP2001172769A (en) | 1999-12-14 | 1999-12-14 | Reducing activation treatment solution for electroless nickel plating and method for producing printed wiring board using the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001172769A true JP2001172769A (en) | 2001-06-26 |
Family
ID=18436624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP35430199A Pending JP2001172769A (en) | 1999-12-14 | 1999-12-14 | Reducing activation treatment solution for electroless nickel plating and method for producing printed wiring board using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001172769A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007243033A (en) * | 2006-03-10 | 2007-09-20 | Seiko Epson Corp | Wiring board manufacturing method |
| WO2012165168A1 (en) * | 2011-05-30 | 2012-12-06 | セーレン株式会社 | Resin substrate having metal film pattern formed thereon |
-
1999
- 1999-12-14 JP JP35430199A patent/JP2001172769A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007243033A (en) * | 2006-03-10 | 2007-09-20 | Seiko Epson Corp | Wiring board manufacturing method |
| WO2012165168A1 (en) * | 2011-05-30 | 2012-12-06 | セーレン株式会社 | Resin substrate having metal film pattern formed thereon |
| JP2012248770A (en) * | 2011-05-30 | 2012-12-13 | Seiren Co Ltd | Resin base material with metal film pattern |
| CN103733738A (en) * | 2011-05-30 | 2014-04-16 | 世联株式会社 | Resin substrate having metal film pattern formed thereon |
| US9578751B2 (en) | 2011-05-30 | 2017-02-21 | Seiren Co., Ltd. | Method for producing a resin substrate having a metal film pattern formed thereon |
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