JP2001163494A - Web take-up device and take-up method - Google Patents

Abstract

(57) [Problem] To provide a web winding device capable of winding a web with a web end aligned with a winding bobbin. A web winding device for use in a device for transporting a web in a vacuum vessel in a roll-to-roll manner for winding a web by a winding bobbin. Placed,
The apparatus includes a detection sensor 2 for detecting a displacement of the web in the width direction, and a correction roller 11 that is disposed upstream of the detection sensor in the transport direction of the web and corrects the displacement of the web in the width direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a web winding device and a web winding method in a device for transporting a web in a vacuum vessel on a roll-to-roll basis.

[0002]

2. Description of the Related Art Conventionally, as a web meandering correction device in a web take-up device in a vacuum vessel, Japanese Patent Application Laid-Open No. 6-34 is disclosed.
One disclosed in Japanese Patent No. 9745 is known.

FIG. 8 is a diagram showing a configuration of a meandering correction device disclosed in the above publication. In this figure, in order to facilitate understanding, a strip-shaped substrate (web) 33 is shown.
4 is partially cut away.

In FIG. 8, reference numeral 601 denotes a lateral displacement detecting mechanism;
602 is a rotation mechanism, 603 is a roller, 604 is a conveyance direction, 605 is a bearing, and 606 is a conveyance speed detection encoder.

[0005] The belt-shaped substrate 334 is bent upward in the transport direction 604 by a roller 603. In addition, the roller 60
Numeral 3 is rotatable in a horizontal plane by a rotation mechanism 602 via a bearing 605, and the three members constitute a steering mechanism for correcting the meandering of the band-shaped substrate 334. The rotation mechanism 602 is connected to a motor via a speed reducer (not shown).

In such a configuration, the band-shaped substrate 334
Is meandering to the left and right with respect to the roller 603, the roller 603 is inclined by a predetermined angle in a horizontal plane by the rotating mechanism 602 to correct the meandering of the belt-shaped substrate 334.

[0007]

However, in the above-described conventional example, since the axis of the rotation mechanism 602 for rotating the roller 603 in the horizontal plane is located directly below the axis of rotation of the roller 603, the rotation mechanism 602 is rotated. Even if this is done, the response of the meandering correction is poor, and there is a problem that it takes time until the meandering is corrected.

In the above publication, as shown in FIG. 9, the rotating shaft 702 of the rotating mechanism is largely separated from the axis of the roller 603, and the sliding mechanism
There is also disclosed a configuration in which the roller 603 is rotationally driven in the direction indicated by 5 to increase the responsiveness of the meandering correction. However, in this configuration, since the rotation center 702 of the rotation mechanism is provided on the downstream side in the transport direction of the band-shaped substrate 334, when the rotation mechanism of the roller 603 is rotated to correct the meandering of the band-shaped substrate 334, Since the belt-shaped substrate 334 is wound along the inclination according to the rotation angle, the roller 603 does not return to the neutral position,
There was a problem that the meandering could not be corrected at the stroke end.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a web winding device and a web winding method capable of winding a web with a web bobbin aligned at its end. To provide.

[0010]

Means for Solving the Problems To solve the above-mentioned problems,
In order to achieve the object, a web take-up device according to the present invention is used in a device that transports a web in a vacuum vessel by roll-to-roll, and the web is taken up by a take-up bobbin. In the winding device, a detecting unit that is arranged near the winding bobbin and detects a deviation in the width direction of the web, and is disposed upstream of the detecting unit in the conveying direction of the web, and is disposed in a width direction of the web. And a correcting means for correcting the deviation.

In the web winding device according to the present invention, the correcting means includes a rotatable roller disposed in a direction perpendicular to the web conveying direction, a rotatable roller supporting the roller, and A support member for rotating in a plane parallel to the support member, the rotation center of which is located at a position separated by a predetermined distance from the axis of the roller,
A drive source for rotating the support member.

Further, in the web take-up device according to the present invention, the rotation of the support member by the drive source is performed based on a signal from the detection means.

Further, in the web winding device according to the present invention, the rotation center of the support member is provided on the upstream side in the web transport direction.

Further, the web winding method according to the present invention is applied to an apparatus for transporting a web in a vacuum container by roll-to-roll, and the web winding for winding the web by a winding bobbin. In the method,
By a sensor arranged near the winding bobbin,
A detecting step of detecting a deviation in the width direction of the web, and a correcting means for correcting a deviation in the width direction of the web disposed on the upstream side in the transport direction of the web with respect to the detection sensor; And a correcting step of correcting

In the web winding method according to the present invention, the correcting means includes a rotatable roller disposed in a direction orthogonal to a web transport direction, a rotatable roller supporting the roller, and A support member for rotating in a plane parallel to the support member, the rotation center of which is located at a position separated by a predetermined distance from the axis of the roller,
A drive source for rotating the support member.

Further, in the web winding method according to the present invention, the rotation of the support member by the driving source is performed based on a signal from the sensor.

Further, in the web winding method according to the present invention, the rotation center of the support member is provided on the upstream side in the web transport direction.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is an overall view of an embodiment of an apparatus for transporting a web (strip-like substrate) 101 in a vacuum vessel in a roll-to-roll manner used in the present invention.

The web 101 wound around the bobbin 204 in the unwinding device 202 is conveyed to the film forming chamber 203 in a substantially horizontal direction by the folding roller 205.
The film forming chamber includes a plurality of vacuum vessels, and a desired film is formed in each chamber. When the film formation is completed, the film is turned upward by the steering roller 11 and wound up by the winding bobbin 3 in the winding device 201.

FIG. 2 is an overall view of the winding device as viewed from the front.

A detection sensor 2 for detecting a displacement of the web 101 in the width direction is attached to a side of the web 101 folded upward by the steering roller 11. The web 101 that has passed through the detection sensor 2 is taken up by the take-up bobbin 3 via the return roller 4.
Note that the folding roller 4 may not be provided. At this time, the surface S side of the web 101 is a film-forming surface, and the web 101 is wound so that rollers do not touch the surface. Further, when the web is wound by the winding bobbin 3, the slip paper 106 is stacked and wound so that the webs are not rubbed with each other and are not damaged. The slip sheet 106 is a slip sheet unwinding unit 1
05. These units are housed in the take-up chamber 102 so that a vacuum is maintained. FIG. 3 shows an overall view of the winding device as viewed from the side.

The take-up chamber 102 includes the rear mount 10
4 and is fixed to a gantry 103 that supports the whole.

FIG. 4 is a view showing the entire steering unit.

The steering roller 11 is rotatably supported by a bearing 13 mounted on a fixed shaft 12. The fixed shaft 12 is fixed to a mounting plate 14 and is mounted on a support plate 15. An arc motion guide bearing 16 is attached to a lower portion of the support plate 15,
The circular motion is performed along the curvature of the circular motion guide rail 17.

A drive shaft 20 is connected to a lower portion of the support plate 15 via a spherical joint 18. A flange 25 is welded to one end of the drive shaft 20, and a bellows seal 21 is attached between the flange 25 and a side surface 102 a of the winding chamber 102. Thus, one end of the drive shaft 20 can be exposed to the air while maintaining the vacuum in the winding chamber 102. Further, an end of the drive shaft 20 on the atmosphere side is connected to a linear drive source 24 via a connect end 22 and a spherical joint 23. In this embodiment, a hydraulic servo cylinder is used as a drive source. However, a mechanism such as a servomotor, a speed reducer, and a ball screw may be used as a direct drive source.

FIG. 5 is a plan view of the steering unit.

The center of the circular arc of the circular motion guide rails 17a and 17b is located on the upstream side in the web transport direction, and the steering roller 11 makes a circular motion of radius R by the operation of the linear drive source 24. . The sensor 28 is
The sensor detects the neutral position of the steering roller 11. When the operation of setting the web 101 on the winding bobbin 3 is started, the steering roller 11 is preferably set at a neutral position. The sensors 26 and 27 are sensors for detecting stroke ends before and after the steering roller 11. When the stroke end is detected by these sensors, the misalignment of the web is abnormally shifted, and the machine is stopped.

FIG. 6 is a view showing a sensor for detecting a displacement in the width direction of the web.

The position detecting sensor 2 includes a light projecting unit 2a and a light receiving unit 2
b) is a light emitting / receiving type laser displacement sensor composed of b.
The laser light is emitted with a width W. When the laser beam is blocked by the web 101, the position from the neutral point P is measured as a displacement on the light receiving side. As a result, for example, assuming that the position deviates from the neutral point P by d to the left, a signal is sent to the control device as a deviation amount of -d. When the position shifts to the right side, a signal is sent to the control device as a shift amount of + d.

In FIG. 5, when the web is shifted to the left, the steering roller 11 moves to the right to correct it. The steering roller 11 moves in an arc, but because the curvature R is large, when the steering roller 11 moves, the position of the web immediately moves to the position of the neutral point P of the position detection sensor 2. Then the steering roller 11
Is terminated. However, in this state, the steering roller 11 is slightly inclined with respect to the web transport direction. Therefore, the web gradually moves to the right.

FIG. 7 is a plan view showing the state of movement of the web as viewed from above.

The web pulled up by the steering roller 11 is pulled obliquely as shown in the figure because the steering roller 11 is inclined. When the web 101 is wound by the winding bobbin 3 in this state, the web is shifted rightward on the winding bobbin as illustrated. When this displacement is detected by the position detection sensor 2, the steering roller 11 performs an arc motion so as to move to the left. As described above, since the steering roller 11 moves not in parallel but in a circular motion, that is, in such a manner that the steering roller 11 is inclined, the steering roller 11 repeats a minute movement at a substantially neutral position, and the steering roller 11 is moved at the stroke end. , So that the position deviation of the web cannot be corrected.

As described above, according to the above-described embodiment, the detection sensor for detecting the deviation in the width direction of the web is provided near the winding bobbin, and the deviation in the width direction of the web is provided upstream of the detection sensor. Since the correction mechanism is provided for correction, the web can be wound with the end faces of the web aligned with high precision.

In the meandering correction device for a web, the rotating shaft of the support member is provided on the upstream side in the web transport direction.
Since the steering roller can perform the meandering correction operation at a substantially neutral position, the meandering correction can be performed in a stable operation without stopping the machine.

As described above, it is possible to obtain a high-quality, low-cost web provided with a functional deposition film.

[0037]

As described above, according to the present invention,
The end of the web can be wound around the winding bobbin.

[Brief description of the drawings]

FIG. 1 is an overall view of one embodiment of an apparatus for transporting a web in a vacuum vessel by roll-to-roll used in the present invention.

FIG. 2 is an overall view of the winding device as viewed from the front.

FIG. 3 is an overall view of the winding device as viewed from a side.

FIG. 4 is a view showing the entire steering unit.

FIG. 5 is a plan view of the steering unit.

FIG. 6 is a diagram showing a sensor for detecting a displacement in the width direction of the web.

FIG. 7 is a plan view showing a state of movement of the web when viewed from above.

FIG. 8 is a diagram showing a conventional example.

FIG. 9 is a diagram showing a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Steering unit 2 Position detection sensor 3 Take-up bobbin 4 Folding roller 11 Steering roller 12 Fixed shaft 13 Bearing 14 Mounting plate 15 Support plate 16 Arc motion guide bearing 17 Arc motion guide rail 18 Spherical joint 20 Drive shaft 21 Bellows seal 22 Connect end Reference Signs List 23 Spherical joint 24 Linear drive source 25 Flange 26, 27, 28 Sensor 101 Web 102 Take-up chamber 103, 104 Stand 105 Slip-sheet unit 201 Take-up device 202 Unwind device 203 Film-forming chamber 204 Take-out bobbin 205 Folding roller

Claims (8)

[Claims] 1. A web winding device for use in a device for transporting a web in a vacuum vessel on a roll-to-roll basis, wherein the web is wound by a winding bobbin, wherein the web is arranged near the winding bobbin. Detecting means for detecting a displacement of the web in the width direction; and correcting means for correcting the displacement of the web in the width direction, which is disposed upstream of the detecting means in the transport direction of the web. A web winding device characterized by the above-mentioned. 2. The correction means includes a rotatable roller disposed in a direction perpendicular to a web transport direction, and a support for supporting the roller and rotating the roller in a plane parallel to the axis of the roller. A support member whose rotation center is located at a position separated by a predetermined distance from the axis of the roller;
The web winding device according to claim 1, further comprising: a driving source for rotating the support member. 3. The web winding device according to claim 2, wherein the rotation of the support member by the driving source is performed based on a signal from the detection unit. 4. The web winding device according to claim 2, wherein the rotation center of the support member is provided on an upstream side in a web transport direction. 5. A method for winding a web in a vacuum vessel, which is applied to a device for transporting the web in a roll-to-roll manner, wherein the web is wound by a winding bobbin, wherein the web is disposed near the winding bobbin. With the sensor
A detecting step of detecting a shift in the width direction of the web; and a correcting means for correcting a shift in the width direction of the web disposed on the upstream side in the transport direction of the web from the detection sensor. And a correcting step of correcting the following. 6. The correction means includes a rotatable roller disposed in a direction perpendicular to the web transport direction, and a support for supporting the roller and rotating the roller in a plane parallel to the axis of the roller. A support member whose rotation center is located at a position separated by a predetermined distance from the axis of the roller;
The web winding method according to claim 5, further comprising a driving source for rotating the support member. 7. The web winding method according to claim 6, wherein the rotation of the support member by the driving source is performed based on a signal from the sensor. 8. The web winding method according to claim 6, wherein the rotation center of the support member is provided on an upstream side in a web transport direction.