JP2001161084A - Direct-acting mechanism using ultrasonic motor and electronic device therewith - Google Patents

Abstract

PROBLEM TO BE SOLVED: To attain a small-sized direct-acting mechanism, which is capable of fine and coarse movements and resistant to disturbance, using a rotating type ultrasonic motor. SOLUTION: This direct-acting mechanism having the ultrasonic motor is provided with the rotating type ultrasonic motor and a pressure mechanism permitting a mobile body to be direct-actuated by means of output transfer members such as a cam and a pinion rotating in synchronization with the rotor of the ultrasonic motor and giving contact pressure to portion between the mobile body and the output transfer member, thereby forming the direct-acting mechanism capable of coarse and fine feeds without backlash and with high accuracy and rigid enough to be resistant to an influence of external oscillation. The small-sized and high-powered ultrasonic motor is used, so that the entire direct-acting mechanism can be reduced in size and thickness as well as it is free from magnetic influence and exert no influence on others. Furthermore, no power is consumed while it is being stopped. It is thus possible to attain the direct-acting mechanism having the ultrasonic motor, which is reduced in size, consumes small amount of power, and is capable of highly accurate positioning, and an electronic device using it.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic motor for driving a moving body frictionally with a vibrating body having a piezoelectric element and an electronic apparatus using the ultrasonic motor, and more particularly to a moving body using a rotary ultrasonic motor. The present invention relates to a micro mechanism for performing a linear motion.

[0002]

2. Description of the Related Art In recent years, applications requiring linear movement have been increasing in various electronic devices, optical devices, medical devices and the like. In such a case, for example, an actuator using a combination of an electromagnetic motor and a feed screw, a voice coil motor or a movable coil motor, or an actuator using a piezoelectric element is generally used.

[0003]

However, when an electromagnetic motor and a feed screw are combined, the mechanism becomes complicated and large, and the feed amount cannot be finely controlled due to backlash in the feed mechanism. Further, when a voice coil motor or a movable coil motor is used, it is difficult to perform minute positioning, and the rigidity is low, and the position may be shifted due to external vibration. In particular, the voice coil motor and the movable coil motor are often used in combination with a leaf spring or the like, and in this case, the rigidity is further reduced. Actuators that use these electromagnetic forces are susceptible to electromagnetic noise and generate electromagnetic noise at the same time, which may affect recording media such as magnetic disks and radio waves used in communications. .

When an actuator using a piezoelectric element is used, fine movement control is possible, but displacement is small and coarse movement cannot be performed. When the enlargement mechanism is provided, the mechanism becomes complicated and large.

[0005] In the case of the motors and actuators described above, power is consumed even when stopped at a specific position.

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a small linear motion mechanism capable of fine movement and coarse movement using a rotary ultrasonic motor.

[0007]

According to the present invention, a moving body is moved linearly or oscillatingly by a rotary ultrasonic motor and an output transmitting means such as a cam or a pinion which rotates in conjunction with a rotor of the ultrasonic motor. This realizes a linear motion mechanism with an ultrasonic motor.

According to the present invention, an ultrasonic motor for driving a rotor by the vibration of a vibrating body having a piezoelectric element, a cam interlocked with the movement of the rotor, and a moving body that operates in a fixed direction in accordance with the rotation of the cam are provided. The moving body is provided with a pressurizing mechanism for applying a contact pressure to the cam and the moving body, thereby realizing a linear motion mechanism with an ultrasonic motor or a swing mechanism.

Further, according to the present invention, an ultrasonic motor for driving a rotor by the vibration of a vibrating body having a piezoelectric element,
A pinion interlocked with the movement of the rotor and a moving body having a rack that operates in a fixed direction in accordance with the rotation of the pinion, and is provided with a pressing mechanism that applies a contact pressure to the pinion and the rack of the moving body. This realizes a linear motion mechanism with an ultrasonic motor.

Next, according to the present invention, a cam or a pinion is provided integrally with the rotor. As a result, a greater driving force can be obtained from the ultrasonic motor, and a small and thin linear motion mechanism with an ultrasonic motor can be realized.

Further, according to the present invention, in the above-described linear motion mechanism with an ultrasonic motor, the outer diameter of the cam or the pinion is made smaller than the outer diameter of the output take-out portion of the vibrator. Thereby, the moving body can obtain a larger driving force.

Further, according to the present invention, an ultrasonic motor for driving a rotor by the vibration of a vibrating body having a piezoelectric element, a cam interlocked with the movement of the rotor, and a movement that swings in accordance with the rotation of the cam A swing mechanism with an ultrasonic motor can be realized by having a body and a pressurizing mechanism provided on a part of the moving body and applying a contact pressure to the cam and the moving body.

Further, according to the present invention, an ultrasonic motor for driving a rotor by the vibration of a vibrating body having a piezoelectric element,
On the extension of the cam or pinion linked to the movement of the rotor, the moving body that moves in a fixed direction according to the rotation of the cam or the pinion, and the guide part that guides the movement of the moving body,
A pressure mechanism for applying a contact pressure to the cam or the pinion and the moving body is provided. According to this, since the guidance of the moving body and the pressurization to the moving body act coaxially, the movement of the moving body does not tilt, becomes smooth, and becomes strong against disturbance such as vibration.

Further, according to the present invention, an ultrasonic motor for driving a rotor by the vibration of a vibrating body having a piezoelectric element,
On a straight line that connects a cam linked to the movement of the rotor, a moving body that moves in a fixed direction in accordance with the rotation of the cam, and two guide portions that guide the movement of the moving body or two support portions that support the moving body. And a pressure application mechanism for applying a contact pressure to the cam and the moving body.
According to this, by providing the point of action of the force by the cam and the point of action of the force by the pressurizing mechanism in one straight line, the movement of the moving body does not tilt, becomes smooth, and becomes strong against disturbance such as vibration. .

Further, according to the present invention, an ultrasonic motor for driving a rotor by the vibration of a vibrating body having a piezoelectric element,
The cam includes a cam that is linked to the movement of the rotor and a moving body that moves in a certain direction in accordance with the rotation of the cam. According to this, since the point of action of the force of the cam is concentrated on the center of gravity of the moving body, the moving body does not tilt, operates smoothly, and is strong against disturbance such as vibration.

Further, according to the present invention, a guide member for guiding the movement of the moving body is provided on a part of the rotor pressing member that applies a contact pressure to the rotor and the moving body. According to this, a small and thin linear motion mechanism can be realized.

Further, according to the present invention, when the ultrasonic motor is started, the rotor is rotated in advance in a direction in which the pressing force of the pressurizing mechanism gives a rotational force to the rotor, or the standing wave is generated by the vibrator. It is characterized by causing the rotor to perform a predetermined operation after the rotor is rotated in advance by the pressing force of the pressurizing mechanism. According to this, a linear motion mechanism with an ultrasonic motor or a oscillating mechanism with an ultrasonic motor that is excellent in reliability because it can be prevented from starting failure due to sticking or uneven wear between the vibrating body and the rotor that occurs after long-term storage. Can be realized.

Further, according to the present invention, the linear motion mechanism with the ultrasonic motor is used in an electronic device, and a load member is driven by a moving body. Thus, it is possible to realize an electronic device that is smaller in size, lower in power consumption, resistant to disturbances such as vibration, and is not affected by electromagnetic noise.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment to which the present invention is applied will be described below in detail with reference to FIGS. Embodiment 1 First, an example of an ultrasonic motor applicable to the present invention will be described.

FIG. 2 shows an ultrasonic motor 1 applicable to the present invention.
FIG. 3 shows the operation principle of the ultrasonic motor 1. First, the operation principle of the ultrasonic motor according to the present invention will be described. In FIG. 2, the disk-shaped vibrator 3 is supported at its center by a central shaft 6 fixed to a support plate 5. The piezoelectric element 2 is bonded to the first surface of the vibrating body 3, and the vibration displacement of the vibrating body 3 is enlarged on the second surface.
Protrusions 3a for applying a rotational force to the rotor 4 are provided.
A bearing 7 is provided at the center of the rotor 4, and the center is guided by a center shaft 6. Also, a contact 8 is provided between the protrusion 3a of the vibrating body 3 and the rotor 4 by pressing a pivot 8 provided at the center of the upper surface of the rotor and having a curved end with a spring member 9 having one end fixed to a spring seat 10. give. The vibration wave excited by the vibrating body 3 by the piezoelectric effect of the piezoelectric element 2 is converted into the rotational force of the rotor 4 via the frictional force.

FIG. 3 shows the detailed operation principle. The piezoelectric element 2 bonded to the vibrating body 3 is divided in the circumferential direction for every quarter wavelength, and is polarized in the thickness direction so that every other direction is reversed. Every other electrode pattern is electrically short-circuited to form two electrode pattern groups of a hatched portion 11a and a non-hatched portion 11b. Then, the vibrating body 3 and the piezoelectric element 2 are joined so that the protrusion 3a of the vibrating body 3 is located exactly at the boundary of the electrode pattern of the hatched portion 11a or the non-hatched portion 11b. An electrode 11c is provided on the entire surface of the piezoelectric element 2 joined to the vibrating body 3.

When a drive signal of a predetermined frequency is applied to the hatched pattern group 11a, a standing wave as shown in FIG. At this time, the raised protrusion 3a is tilted rightward, and the rotor 4 in contact therewith moves rightward.

Next, when a drive signal is applied to the pattern group 11b in the non-hatched portion, a standing wave as shown in (d) is generated in the vibrating body 3, and the rotor 4 moves to the left this time. As described above, one surface of the piezoelectric element is used as the common electrode 11c, and two electrode groups 11a and 11b are provided on the other surface, and an electrode group to which a drive signal is applied is selected from the two electrode groups 11a and 11b. Thus, the position of the standing wave generated in the vibrating body is shifted, and the moving direction of the rotor 4 in contact with the vibrating body 3 can be controlled.

The drive signal is the electrode pattern group 1 of the piezoelectric element 2.
Flexible board 1 electrically connected to 1a, 11b
2 and support plate 5. The support plate 5 has a central axis 6,
It is electrically connected to the electrode 11c via the vibrating body 3.

If the piezoelectric element 2 of this embodiment is used, the vibrating body 3
A standing wave having three wave numbers in the circumferential direction can be excited. In addition, since the number of nodes in the radial direction differs depending on the frequency, it is preferable to provide the projection 3a at the maximum amplitude portion in the radial direction of the vibration mode to be excited.

Next, the first embodiment will be described.
The support plate 5 of the ultrasonic motor 1 is connected to a second support plate 18. The rotor 4 is provided with a cam 13 integrally with the rotor 4. The moving body 14 can move in one direction according to the guide surface of the guide 16 attached to the second support plate 18 and has a curved end 14 a of the moving body 14.
Is in contact with the cam 13. A preload spring 15 is accommodated between the guide 16 and the tip 14a of the moving body 14, and applies a contact pressure to the cam 13 and the tip 14a of the moving body 14. Rotor 4
Rotates, the cam 13 also rotates accordingly. Cam 1
The moving body 14 moves in accordance with the change in the length in the radial direction 3. At this time, since a preload is applied between the tip 14a of the moving body 14 and the cam 13, the cam 13 and the rotor 4
There is no play between the moving object 14 and the moving object 14. In addition, stable operation can be performed even with respect to external vibrations and posture differences. Further, due to the feature of the ultrasonic motor, a frictional force acts between the rotor 4 and the projection 3a of the vibrating body 3 at the time of stoppage without consuming power, and the movement of the moving body 14 is maintained.

Therefore, by utilizing the features of the ultrasonic motor capable of high-precision positioning, high-precision positioning can be performed even with respect to the linear motion of the moving body 14. In addition, electromagnetic type motor,
Excellent responsiveness compared to actuators. By making the outer shape of the cam 13 smaller than the diameter of the projection 3a that transmits the force of the vibrating body, a large force can be transmitted to the moving body 14.

FIG. 4 shows a first modification of the present embodiment. The direction of the ultrasonic motor 1 is rotated by 90 degrees, and the tip 14 a of the moving body 14 is brought into contact with the upper surface of the rotor 4. The rotor 4 has a cam portion 13 having a different thickness, and the moving member 14 in contact with the rotor 4 is operated as the rotor 4 rotates.

FIG. 5 shows a second modification of the present embodiment. Here, a pinion 19 is provided on the rotor 4, and meshes with a rack 14 b provided on the moving body 14.
The moving body is operated in accordance with the movement of. The movable body 14 is guided by a guide 16 and a second guide 10b provided on the spring seat 10 so as to be movable in one direction. By providing the second guide 10b on the spring seat, downsizing and simplification of the mechanism are realized. Step 1 provided on a part of the moving body 14
Preload spring 15 provided between 4c and second guide 10b
Thus, the backlash between the rack 14b and the pinion 19 is closed.

FIG. 6 shows a third modification of this embodiment. Here, a gear 20 is provided on the rotor 4 and a cam 22 provided with the gear 21 is rotated. The moving body 14 operates with the movement of the cam 22. The gears 21 and 20 operate to reduce the rotation of the rotor 4 and transmit a large force to the moving body 14. Further, the backlash between the gears 20 and 21 is reduced by the preload spring 15, so that the moving body 14 can be precisely positioned.

For example, the magnetic head 1
7, a high-density hard disk can be realized. Further, since the ultrasonic motor does not generate magnetism, it does not adversely affect the magnetic head 17 and a magnetic disk (not shown). If a stage is provided instead of the magnetic head 17, a small fine movement stage can be realized. In this case, both fine movement and coarse movement are possible. If a lens is attached to the tip of the moving body 14 and a CCD camera is provided at a position parallel to an extension of the moving direction of the moving body 14, an autofocus and zoom mechanism of a catheter camera used in medical treatment can be realized. By attaching a cutting tool instead of a lens, surgery by remote control becomes possible.

One of the drawbacks of the ultrasonic motor is that when the ultrasonic motor is not operated for a long period of time and left unattended, the contact surface between the rotor 4 and the vibrating body 3 may be fixed to cause malfunction. These depend on, for example, the influence of the external environment (temperature, humidity, etc.), the material of the contact surface, and the like. By using this rotational force, it is possible to avoid malfunction due to sticking.

For example, when the ultrasonic motor 1 is started, the rotor 4 is rotated in a direction in which the force of the preload spring 15 applies a rotational force to the rotor 4 in advance. Alternatively, by generating a standing wave as shown in FIG. 3 (e) and reducing the frictional force between the rotor 4 and the vibrating body 3 without applying a rotating force to the rotor 4, the rotor 4 is preloaded with a pre-load spring 15. It is operated only by the torque generated by the preload. After exiting the fixed state by such a method, a predetermined operation is performed. Incidentally, in order to excite the standing wave shown in FIG. 3 (e), a drive signal may be applied to both the electrode patterns of the hatched portion 11a and the non-hatched portion 11b. Embodiment 2 Embodiment 2 of the present invention will be described. FIG. 7 shows a side view of the linear motion mechanism and a top view of the moving body 25. The support plate 23 of the ultrasonic motor 1 is fixed to a second support plate 28. The moving body 25 is provided with two guide holes, and can move in a certain direction along two shafts 24 each having one end fixed to the second support plate 28. A part 25a of the moving body 25 and the cam 13 are in contact with each other in the moving direction of the moving body. The cam 13 rotates with the rotation of the rotor 4 to operate the moving body 25. At this time, a preload spring 15 is accommodated between the moving body 25 and one end 24a of the shaft 24, and a part 25a of the moving body and the cam 1
3 is given a contact pressure.

Here, for example, if a through hole is made in the moving body 25 and the second support plate 28 and the lenses 26 and 27 are provided, a focus mechanism for adjusting the focus of light, an attenuator for adjusting the intensity of light, and the like are realized. it can.

The method of fixing the ultrasonic motor 1 is not limited at all, and the force by the rotation of the cam 13 may be applied in the moving direction of the moving body 25. Further, in the present embodiment, the rotor 4 and the cam 13 are integrated, but the rotor 4 and the cam 13 may be formed as separate members and the force of the rotor 4 may be transmitted to the cam 13 using a gear, a friction wheel, or the like. By reducing the rotation of the rotor 4, it is possible to generate a large force on the cam 13. Also, a rack is provided on a part 25a of the moving body,
The moving body may be operated by a pinion interlocked with the rotor 4.

FIG. 8 shows another example related to the second embodiment of the present invention, and shows a side view of a linear motion mechanism and a top view of a moving body 28. The support plate 23 of the ultrasonic motor 1 is fixed to the second support plate 31. The movable body 28 is provided with a guide shaft 30, which is movable in a certain direction along a guide hole 31 a of the second support plate 31. A shaft 29 having one end fixed to a second support plate 31 enters a guide portion 28b provided on the moving body 28,
The movement in the direction perpendicular to the moving direction of the moving body 28 is restricted. The projection 28a provided on a part of the moving body 28 and the cam 13 are in contact with each other in the moving direction of the moving body. The cam 13 rotates with the rotation of the rotor 4 to operate the moving body 28. At this time, the preload spring 15 is accommodated between the step portion 30a of the guide shaft and the second support plate 31, and applies a contact pressure to the projection 28a provided on a part of the moving body and the cam 13. .

Here, for example, if a through hole is made in the moving body 28 and the second support plate 31 and the lenses 26 and 27 are provided, a focus mechanism for adjusting the focus of light, an attenuator for adjusting the intensity of light, and the like are realized. it can.

The method of fixing the ultrasonic motor 1 is not limited at all, and the force by the rotation of the cam 13 may be applied in the moving direction of the moving body 28. Further, in the present embodiment, the rotor 4 and the cam 13 are integrated, but the rotor 4 and the cam 13 may be formed as separate members and the force of the rotor 4 may be transmitted to the cam 13 using a gear, a friction wheel, or the like. By reducing the rotation of the rotor 4, it is possible to generate a large force on the cam 13. Also, a rack is provided on a part 28b of the moving body,
The moving body may be operated by a pinion interlocked with the rotor 4.

FIG. 9 shows another example related to the second embodiment of the present invention, and shows a side view of a linear motion mechanism and a top view of a moving body 32. The support plate 23 of the ultrasonic motor 1 is fixed to a second support plate 36. The movable body 32 is provided with two guide holes, and is movable in a certain direction along two shafts 35 having one ends fixed to the second support plate 36. The power transmission member 33 is rotatably supported by a guide pin 34 a of the fixed member 34. Projection 32 provided on part of moving body 32
A different end of the power transmission member 33 is in contact with the a, 32b and the cam 13 in the moving direction of the moving body 32. The cam 13 rotates with the rotation of the rotor 4 to operate the moving body 32 via the power transmission member 33. At this time, the preload spring 15 is accommodated between the step portion 35a of the shaft 35 and the moving body 32, and the projection 32 provided on a part of the moving body is provided.
a, a contact pressure is applied to the power transmission member 33 and the cam 13.

In FIG. 9, since the lens 26 is attached to the moving body 32 and light passes through the lens, the ultrasonic motor 1 including the cam 13 cannot be arranged on the lens. However, when there is no lens, the force of the cam 13 can be applied directly to the point located at the center of the lens, that is, the center of the line connecting the two shafts 35, or at the very least, the center of gravity of the moving body 32. desirable. As the structure, for example, a protrusion may be provided at the center of gravity of the moving body as shown in FIG.

Here, for example, if a through hole is formed in the moving body 32 and the second support plate 36 and the lenses 26 and 27 are provided, a focus mechanism for adjusting the focus of light, an attenuator for adjusting the intensity of light, and the like are realized. it can.

There is no limitation on the method of fixing the ultrasonic motor 1, and the force by the rotation of the cam 13 may be applied in the moving direction of the moving body 32. Further, in the present embodiment, the rotor 4 and the cam 13 are integrated, but the rotor 4 and the cam 13 may be formed as separate members and the force of the rotor 4 may be transmitted to the cam 13 using a gear, a friction wheel, or the like. By reducing the rotation of the rotor 4, it is possible to generate a large force on the cam 13.

By applying the linear motion mechanism using the ultrasonic motor of the present invention to an electronic device, the voltage of the electronic device can be reduced.
Low power consumption, small size, and low cost can be realized. Since the ultrasonic motor is used, it is not affected by magnetism and no harmful magnetic noise is generated. Third Embodiment A third embodiment of the present invention will be described. FIG. 10 is a top view of a swing mechanism using the ultrasonic motor 1 and an application example using the same.

The moving body 37 has an arrow 3 around the point 40a.
9 so as to be rotatable. Although the supporting method is not limited here, for example, a bearing and a central axis provided on the lower surface of the moving body 37 at a position where the center thereof is the point 40a are used.

On one side of the rotating direction of the moving body 37, a rotor which rotates by receiving the driving force of the vibrating body 3 (not shown)
The cam 13 formed integrally with the abutment 4 is in contact. When the cam 13 rotates, the moving body 37 reciprocates according to its shape so as to return to the same position again. Moving body 37 and cam 13
Is always in contact with the preload of the preload spring 15. By converting the rotational movement of the rotor 4 into the oscillating movement of the moving body 37 via the cam 13, a minute angular displacement of the moving body 37 can be obtained. Therefore, it is possible to further enhance the high-precision positioning resolution of the ultrasonic motor 1.

For example, if a filter 38 made of a dielectric multilayer film is provided on the upper surface of the moving body 37 and an optical fiber 39 is provided at a position facing the filter 38, the light transmitted through the filter 38 according to the angle of the filter 38. The transmission center wavelength of the light incident from the fiber 39a changes, and the optical fiber 39a
b. Therefore, an optical filter having such an excellent variable resolution can be realized.

[0047]

As described above, according to the present invention, the moving body is linearly moved by the rotary ultrasonic motor and the output transmission means such as the cam and the pinion rotating in conjunction with the rotor of the ultrasonic motor. A pressurizing mechanism that applies contact pressure between the moving body and the output transmission member is provided, realizing a linear motion mechanism with an ultrasonic motor, which enables high-precision coarse and fine motion feed without backlash. In addition, a linear motion mechanism having high rigidity and hardly affected by external vibrations or the like can be configured.

Further, since a small and high-output ultrasonic motor is used, the whole mechanism can be reduced in size and thickness, and a linear motion mechanism which is not affected by magnetism and has no other influence can be constituted.

Another feature is that power consumption is not required during stoppage. Therefore, it is possible to realize a linear motion mechanism with an ultrasonic motor that is small in size, consumes low power and can perform high-precision positioning, and an electronic device using the same.

[Brief description of the drawings]

FIG. 1 shows a first example of a linear motion mechanism using an ultrasonic motor according to the present invention.

FIG. 2 is a sectional view showing the structure of the ultrasonic motor according to the present invention.

FIG. 3 illustrates a driving principle of the ultrasonic motor according to the present invention.

FIG. 4 shows a modification 1 of the first example of the linear motion mechanism using the ultrasonic motor of the present invention.

FIG. 5 shows a second modification of the first example of the linear motion mechanism using the ultrasonic motor of the present invention.

FIG. 6 shows a third modification of the first example of the linear motion mechanism using the ultrasonic motor of the present invention.

FIG. 7 shows a second example of a linear motion mechanism using the ultrasonic motor of the present invention.

FIG. 8 shows a modification 1 of the second example of the linear motion mechanism using the ultrasonic motor of the present invention.

FIG. 9 shows a second modification of the second example of the linear motion mechanism using the ultrasonic motor of the present invention.

FIG. 10 shows an example of a swing mechanism using the ultrasonic motor of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 ultrasonic motor 2 piezoelectric element 3 vibrator 4 rotor 13 cam 14, 25, 28, 32, 37 moving body 15 preload spring 16 guide 26, 27 lens

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Makoto Suzuki 1-8-8 Nakase, Mihama-ku, Chiba-shi, Chiba Seiko Instruments Inc.

Claims (11)

[Claims] An ultrasonic motor that drives a rotor by vibrating a vibrating body having a piezoelectric element; a cam that is linked to the movement of the rotor; a moving body that moves in a fixed direction in accordance with the rotation of the cam; And a pressurizing mechanism provided on a part of the moving body and applying a contact pressure to the cam and the moving body. 2. An ultrasonic motor for driving a rotor by vibration of a vibrating body having a piezoelectric element, a pinion interlocked with the movement of the rotor, and a rack for operating in a fixed direction in accordance with the rotation of the pinion. A linear motion mechanism with an ultrasonic motor, comprising: a moving body; and a pressurizing mechanism provided on a part of the moving body and applying a contact pressure to the pinion and the rack. 3. An ultrasonic motor for driving a rotor by the vibration of a vibrating body having a piezoelectric element; a cam interlocked with the movement of the rotor; a moving body that swings in accordance with the rotation of the cam; And a pressurizing mechanism provided on a part of the body to apply a contact pressure to the cam and the moving body. 4. When the ultrasonic motor is started, the rotor is rotated in advance in a direction in which the pressing force of the pressurizing mechanism applies a rotational force to the rotor, or a standing wave is generated by the vibrator. The linear motion mechanism with an ultrasonic motor according to claim 1 or 2, wherein the rotor is caused to perform a predetermined operation after the rotor is rotated in advance by the pressing force of the pressurizing mechanism. 3. A swing mechanism with an ultrasonic motor according to 3. 5. The linear motion mechanism with an ultrasonic motor according to claim 1, wherein the cam or the pinion is provided integrally with the rotor. 6. The linear motion mechanism with an ultrasonic motor according to claim 1, wherein an outer diameter of the cam or the pinion is smaller than an outer diameter of an output extracting portion of the vibrator. 4. The swing mechanism with an ultrasonic motor according to claim 3. 7. An ultrasonic motor for driving a rotor by vibration of a vibrating body having a piezoelectric element, a cam or a pinion interlocked with the movement of the rotor,
A moving body that operates in a fixed direction in accordance with the rotation of the cam or pinion, a guide that guides the movement of the moving body, and a cam that is provided on an extension of the guide, and that includes the cam or pinion and the moving body. A linear motion mechanism with an ultrasonic motor, comprising: a pressure mechanism for applying a contact pressure. 8. An ultrasonic motor for driving a rotor by vibrating a vibrating body having a piezoelectric element, a cam interlocking with the movement of the rotor, a moving body that operates in a fixed direction in accordance with the rotation of the cam, A plurality of guides for guiding the movement of the moving body; a point of action of a force provided by the cam provided on the moving body on a straight line connecting the plurality of guides; and a contact pressure between the cam and the moving body. And a point of action of a force by a pressurizing mechanism provided on the moving body. 9. An ultrasonic motor for driving a rotor by the vibration of a vibrating body having a piezoelectric element, a cam interlocked with the movement of the rotor, a moving body that operates in a fixed direction according to the rotation of the cam, A linear motion mechanism with an ultrasonic motor, comprising: a point of action of the force by the cam at the center of gravity of the moving body. 10. The guide member for guiding the movement of the moving body is provided on a part of a rotor pressing member that applies a contact pressure to the rotor and the moving body. Item 3. A linear motion mechanism with an ultrasonic motor according to Item 2. 11. A linear motion mechanism with an ultrasonic motor or a swing mechanism with an ultrasonic motor according to claim 1,
An electronic device, wherein a load member is driven by the moving body.