JP2001072489A - Integrated control system of single crystal-producing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To perform the remote control operation of a single crystal-producing apparatus in operation. SOLUTION: A control unit for remote control operation and a control unit for alteration are installed in a group control computer 21 and a single crystal- producing apparatus 1, respectively. When operator action for the apparatus 1 in operation is wanted to be altered, the control unit for remote control operation in the computer 21 outputs control information for altering operator action toward the apparatus 1 to be wanted to alter the operator action. The control unit for alteration in the apparatus 1 gives instructions for altering operator action when receiving the control information for altering operator action. An operation control unit in the apparatus 1 usually controls operator action on the basis of operation control information previously given and controls operator action on the basis of not operation control information but control information for altering operator action from the computer 21 when given instructions for altering operator action.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a centralized management system for centrally monitoring the operation status of a plurality of single crystal manufacturing apparatuses.

[0002]

2. Description of the Related Art FIG. 5 schematically shows a configuration example of a single crystal manufacturing apparatus. Single crystal manufacturing apparatus 1 shown in FIG.
Is an apparatus for producing a single crystal such as silicon by the CZ method (Czochralski method). As shown in FIG. 5, the apparatus has a chamber 2 in which a crucible 3 is provided. The crucible 3 has a double structure of an inner crucible 3a and an outer crucible 3b. Below the crucible 3 is a crucible 3
Is provided. The crucible rotating means 4 includes a rotation driving unit 4a and a shaft 4b that transmits the rotation of the rotation driving unit 4a to the crucible 3 to rotate the crucible 3.

A heater 5 is provided so as to surround a side wall of the crucible 3.
The crucible 3 is heated, and the single crystal raw material in the crucible 3 is melted to form a single crystal raw material melt 6. Further, a seed crystal 7 is disposed above the center of the opening of the crucible 3.
Is connected to the seed crystal moving means 8. Further, a monitoring window 10 for looking inside the chamber 2 is formed on the wall of the chamber 2.

Further, although not shown, a gas supply means for supplying an inert gas such as an argon gas into the chamber 2 is provided. Also, a flow rate detection sensor for detecting the flow rate of the gas supplied by the gas supply means, a temperature sensor for measuring the temperature in the chamber 2, a pressure sensor for measuring the pressure in the chamber 2, and the rotation of the crucible 3 Various sensors such as a rotational speed sensor for detecting the number are also provided.

As shown in FIG. 5, a single crystal manufacturing apparatus 1 is usually provided with a control device 12 for controlling the operation of the apparatus. The control device 12 controls the operation of the device as described below based on the sensor outputs of the various sensors and operation control information such as a program given in advance.
For example, first, a heater 5 is heated to produce a melt 6 of a single crystal raw material in the crucible 3, and a gas supply means supplies a gas into the chamber 2 to create an environment for producing a single crystal. In this state, the seed crystal moving means 8 is driven to move the seed crystal 7 downward, and the seed crystal 7 is immersed in the melt 6.

Then, the seed crystal 7 is gradually pulled up while being rotated by the driving of the seed crystal moving means 8, while the rotation direction of the seed crystal 7 is reversed by the crucible rotating means 4. The crucible 3 is rotated in the direction to grow a single crystal 14 on the lower end side of the seed crystal 7. The state of the production of the single crystal 14 can be visually monitored from the monitoring window 10.

[0007]

In a factory or the like for manufacturing a single crystal, many single crystal manufacturing apparatuses 1 as described above are arranged. Conventionally, a plurality of single-crystal manufacturing apparatuses 1 are assigned to one person who operates and monitors the apparatus, and the person who operates and monitors the apparatus walks around between the plurality of single-crystal manufacturing apparatuses 1 in charge. The operation and monitoring of the single crystal manufacturing apparatus 1 were performed.

As described above, when a person walks between a plurality of single crystal manufacturing apparatuses 1 in charge and operates and monitors each single crystal manufacturing apparatus 1, the operation and monitoring of each single crystal manufacturing apparatus 1 are performed. Due to the very large number of items, the number of devices that can be handled by one person is limited, which causes a problem that labor productivity is extremely low.

In view of the above, a centralized management system has been proposed which can monitor the operating status of a plurality of single crystal manufacturing apparatuses in one place (see Patent No. 2726773). However, the proposed method has a configuration in which the operating state of each single crystal manufacturing apparatus 1 can be intensively monitored, but the operating single crystal manufacturing apparatus 1 cannot be remotely controlled. When an abnormal operation occurs, a person must go to the device where the abnormality has occurred to deal with the abnormal operation, and there is a problem that it is very troublesome, and the method of this proposal is not satisfactory. Was.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to construct a management system capable of centrally monitoring a plurality of single crystal manufacturing apparatuses, and to operate such a system during operation. It is an object of the present invention to provide a management system for a single crystal manufacturing apparatus which enables remote control of the single crystal manufacturing apparatus.

[0011]

Means for Solving the Problems In order to achieve the above object, the present invention has the following structure to solve the above problems. That is, in the first invention, a plurality of single crystal manufacturing apparatuses are arranged, each single crystal manufacturing apparatus has a status information collecting means for collecting status information of the apparatus operation, and an operation control unit for controlling the operation of the apparatus. An information storage unit in which information is stored, and an operation control unit that controls device operation based on the situation information collected by the situation information collection unit and the operation control information stored in the information storage unit. Each single crystal manufacturing apparatus is connected to a common group management computer by a signal, and each single crystal manufacturing apparatus outputs an operation status notification signal to the group management computer to notify the operation state of the apparatus. A centralized management system for a single crystal manufacturing apparatus, wherein each operation status of the plurality of single crystal manufacturing apparatuses is intensively monitored by the group management computer based on a status notification signal. The group management computer is provided with a remote control unit that outputs control information for changing the operation to the selected operating single crystal manufacturing apparatus. A change control unit that issues an operation operation change command when receiving the operation operation change control information from the group management computer is provided, and the operation control unit of each single crystal manufacturing apparatus includes:
When the driving operation change command is issued, the operation control information stored in advance in the information storage unit is changed to the driving operation change control information to perform the device operation control. The means for solving the above-mentioned problem has a configuration in which a single crystal manufacturing apparatus in operation can be remotely controlled from the management computer.

According to a second aspect of the present invention, there is provided the structure of the first aspect, wherein each single crystal manufacturing apparatus automatically detects an abnormality in the operation of the apparatus based on the status information collected by the status information collecting means. An operation abnormality detection unit, an apparatus-side alarm unit that notifies the occurrence of an abnormality when an abnormality in the apparatus operation is detected, and an abnormality occurrence notification unit that outputs an abnormality notification signal notifying the abnormality to the group management computer. The group management computer is provided with a group management computer side alarm means for notifying the occurrence of an abnormality when the abnormality notification signal is applied from the single crystal manufacturing apparatus, and an abnormality countermeasure for the single crystal manufacturing apparatus in which the abnormality has occurred. External input means for manually inputting control information for external use is provided, and the remote control unit of the group management computer is externally input by the external input means. The control information for the normal measures as control information for operating behavior changes, and is configured as characterized in that a configuration in which output to the single-crystal manufacturing apparatus of the abnormality.

According to a third aspect of the present invention, there is provided the structure of the first or second aspect, wherein each single crystal manufacturing apparatus stores predetermined process data on the basis of the status information collected by the status information collecting means. A process data detecting unit for detecting and a process data storing unit for storing the detected process data are provided, and the group management computer stores the process data storing unit in the process data storing unit of each of the single crystal manufacturing apparatuses. Read process data at any time,
A process data display control unit for displaying the process data on a screen is provided.

In the invention having the above configuration, the plurality of single crystal manufacturing apparatuses are connected to a common group management computer by a signal, and each single crystal manufacturing apparatus sends to the group management computer an operation status notification signal for notifying the apparatus operation status. Has been output. Based on the operation status notification signal, the operation status of each of the plurality of single crystal manufacturing apparatuses is intensively monitored by the group management computer.

For example, when the operation status of each of the plurality of single crystal manufacturing apparatuses is intensively monitored by the group management computer, one of the monitored single crystal manufacturing apparatuses is operated. When an abnormality occurs, the occurrence of the abnormality is immediately notified by the device-side alarm unit and the group management computer-side alarm unit. By this alarm, when a person (operator) who detects the occurrence of an abnormality manually inputs control information for the countermeasure against the single crystal manufacturing apparatus in which the error has occurred using an external input means, the control information for the countermeasure is remotely controlled. The control unit outputs the control information for changing the operation from the group management computer to the single crystal manufacturing apparatus in which the abnormality has occurred.

In the single crystal manufacturing apparatus in which the abnormality has occurred, when the control information for countermeasures for the abnormality is added, an operation operation change command is issued by the change control unit.
The operation control unit changes the operation control information stored in advance in the information storage unit to the abnormality countermeasure control information added from the group management computer, and performs device operation control capable of coping with the abnormality.

As described above, the provision of the configuration of the present invention makes it possible to remotely control the operating single crystal manufacturing apparatus from the group control computer. When a problem occurs, the group management computer only outputs control information for abnormality countermeasures (control information for operating operation change) without having to go to the location of the single crystal manufacturing apparatus where the operation abnormality has occurred. It is possible to cope with the abnormal operation of the single crystal manufacturing apparatus, and to dramatically improve labor productivity.

[0018]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 schematically shows a centralized management system for a single crystal manufacturing apparatus according to this embodiment. As shown in FIG. 1, in the centralized management system 20 for a single crystal manufacturing apparatus, a plurality of single crystal manufacturing apparatuses 1 are signal-connected to a common group management computer 21 and a centralized image display means 22.

In this embodiment, each single crystal manufacturing apparatus 1 is an apparatus having a configuration for manufacturing a single crystal by the CZ method as shown in FIG. In this embodiment, the description of the single crystal manufacturing apparatus shown in FIG. 5 will not be repeated.

The group management computer 21 and the image centralized display means 22 are arranged in the same centralized management room 23 remote from the position where the single crystal manufacturing apparatus 1 is arranged. The computer 21, each single crystal manufacturing apparatus 1, and the image centralized display means 22 are connected to each other by wire or wireless signal.

A feature of the centralized management system 20 for a single crystal manufacturing apparatus in this embodiment is that a group management computer 21 can remotely control the operation change operation of the single crystal manufacturing apparatus 1 during operation. It is to have.

That is, as shown in FIGS. 1 and 2, the group management computer 21 has a display 30 as display means, a control unit 31, and external input means 32. Printer 33
And alarm means (group management computer side alarm means) 34 are connected by signal.

The control unit 31 includes a communication control unit 35A, 3
5B and 35C, a process data acquisition unit 36, a process data storage unit 37, and a device abnormality display control unit 3
8, the device selection control unit 39, and the process recipe storage unit 4
0, a running process display control unit 41, an abnormality content display control unit 42, a process recipe creation unit 43, an operation status display control unit 44, a process data display control unit 45, a remote operation control unit 46, An output control unit 47 is provided.

Each single crystal manufacturing apparatus 1 has a monitoring window 10 as shown in FIGS. 1 and 3 in addition to the configuration shown in FIG.
(Here, two surveillance cameras 50a and 50b having different focal lengths from each other), a display 51 as a display means, and an external input means 52 are provided. In addition, each single crystal manufacturing apparatus 1 is signal-connected to an alarm means (apparatus-side alarm means) 53 and a camera video display means 54 arranged near the apparatus.

Further, the controller 1 of each single crystal manufacturing apparatus 1
2 includes a process control unit (CPU) 55 and a sequencer (S
(EQ) 56 and a video signal processing unit (MTV) 57.

The process control section 55 includes a sampling section 58, a process data conversion section 59, a process data storage section 60, a control operation section 61, a process recipe storage section 62 as an information storage section, and a control output section. 63, a process shift notification unit 64, an operation abnormality detection unit 65, and a communication control unit 66A. Sequencer 5
6, an input unit 68, an output unit 69, a sequence control unit 70, a change control unit 71, and a communication control unit 7
2B.

Further, as shown in FIGS. 1 and 4, the image centralized display means 22 includes an external input means 74a, an external signal receiving means 74b, a monitor 75, and a control section 76. The unit 76 is a video signal reception control unit 77
And a display control unit 78.

The external input means 32, 52, 74a provided in each of the single crystal manufacturing apparatus 1, the group management computer 21 and the image centralized display means 22 are used by a person (operator) to manually input information externally. For example, an appropriate form such as a keyboard, a mouse, and a switch button can be adopted.

The process recipe creating unit 43 shown in FIG. 2 of the group management computer 21 is configured to provide information for operation control of each single crystal manufacturing apparatus 1 based on information manually input by the operator using the external input means 32. Is created in accordance with a predetermined creation procedure. The process recipe specifically refers to, for example, the heating temperature of the heater 5 that changes with the transition of the single crystal manufacturing process, the single crystal 1
Target values of various operating conditions such as the lifting speed of No. 4 are data associated with time information.

During the creation of the process recipe, the process recipe creation section 43 outputs a display control signal for a process recipe creation screen to the output control section 47, and the output control section 47 receives the control signal. Then, a screen for creating a process recipe in a predetermined form is displayed on the display 30. As described above, while looking at the process recipe creation screen displayed on the display 30, the operator inputs information necessary for creating a process recipe to the external input unit 3.
Manual input is to be performed using 2.

After the process recipe is completed, the process recipe creating section 43 stores the completed process recipe in the process recipe storage section 40.

The process recipe stored in the process recipe storage section 40 is output to the single crystal manufacturing apparatus 1 as follows. For example, the operator selects one of the process recipes stored in the process recipe storage unit 40, selects the single crystal manufacturing apparatus 1 to which the process recipe is to be supplied, and outputs the selected information to the external input means. When the information is input using the device 32, the information is added to the device selection control unit 39. Device selection control unit 3
Reference numeral 9 denotes a plurality of single crystal manufacturing apparatuses 1 connected to the group management computer 21 based on the added information.
, The selected process recipe is read out from the process recipe storage unit 40, and the read process recipe is directed to the selected single crystal manufacturing device 1. Output through the communication control unit 35A.

The communication control unit 35A of the group management computer 21 and the communication control unit 6 shown in FIG.
6A, the process recipe output through the communication control unit 35A is stored in the process recipe storage unit 62 of the single crystal manufacturing apparatus 1 through the communication control unit 66A of the selected single crystal manufacturing apparatus 1. You.

The input unit 68 shown in FIG. 3 of each single crystal manufacturing apparatus 1 is configured to receive, for example, output signals of various switch sensor means for outputting on / off signals of limit switches and the like. The signal applied to the input unit 68 is output to the sequence controller 70.

An information storage unit (not shown) is built in the sequence control unit 70, and a sequence program as operation control information is given to the information storage unit in advance. The sequence control unit 70 controls the input unit 68
For example, an on / off control signal is output to the output unit 69 to control the on / off operation of a driving means such as a solenoid valve magnet switch based on the signal added from the above and the sequence program. The output unit 69 outputs the on / off control signal applied from the sequence control unit 70 to the drive unit to be controlled, and the drive unit is controlled based on the control signal.

The sampling unit 58 of each single crystal manufacturing apparatus 1
Has a configuration in which the detection values of various sensors such as a gas flow rate detection sensor and a temperature sensor and a pressure sensor in the chamber 2 which are provided in the single crystal manufacturing apparatus 1 are captured every moment. The detection value of the sensor taken in by the sampling unit 58 represents physical information such as a gas flow rate, a temperature, a pressure, or the like according to the magnitude of the voltage or the current, and is an analog signal.

The process data conversion unit 59 is provided with conversion data for converting the analog detection value of the sensor into digital data with a physical unit. The detection values of the various sensors sampled by the above are converted into data with physical units using the conversion data.

The control calculation section 61 fetches the detected values of the various sensors converted by the process data conversion section 59 and the control operation information of the sequence control section 70 every moment. Then, the control calculation unit 61, for example, detects the gas in the chamber 2 based on the captured sensor detection value and the control operation information of the sequence control unit 70 and the process recipe stored in the process recipe storage unit 62. The power supply control of the heater 5 and the gas flow control means are controlled by a predetermined control method so that the flow rate, the temperature, and the pressure become the target values predetermined by the process recipe, respectively. That is, the control calculation unit 61 outputs a control signal for controlling each of the above-described units to the control unit to be controlled through the control output unit 63 to control the control unit.

As described above, in this embodiment, various sensors, various switch sensor means, and the sampling section 58 are used.
And an input unit 68 constitute a situation information collecting means. The control operation unit 61 and the sequence control unit 70
The operation control unit controls the operation of the single crystal manufacturing apparatus 1 based on the apparatus operation status information collected by the status information collection unit.

The process data converter 59 has a function of converting the sampling value and also has a function as a process data detector. The process data includes, for example, a pulling speed of the single crystal 14, a rotation speed of the single crystal 14, a heating temperature of the heater 5, a gas pressure and a gas flow rate in the chamber 2 during the operation of the single crystal manufacturing apparatus 1. Is data representing the lapse of time of the driving situation.

There are various methods for detecting the process data. Here, the process data may be detected by any of the methods. As an example, for example, the process data conversion unit 59 includes a clock mechanism (not shown).
And creates and detects process data by associating the converted detection values of the various sensors with times based on the clock mechanism. Process data conversion unit 59
Stores the process data thus detected in the process data storage unit 60.

The process data storage section 60 has a sufficient storage capacity to store one batch of process data of the single crystal manufacturing process, and when a new batch is started, the process data of the previous batch is stored. The data is erased by an erasing unit (not shown), and process data from the start of a new batch is stored and accumulated.

The process data stored in the process data storage unit 60 of each single crystal manufacturing apparatus 1 is stored in the group management computer 2 at an arbitrary timing during the manufacturing of the single crystal.
1 is adopted. In other words, the process data capturing unit 36 of the group management computer 21 shown in FIG. 2 transmits the single crystal manufacturing apparatus 1 selected by the operator according to the instruction of the operator of the group management computer 21 input using the external input means 32. The process data stored in the process data storage unit 60 is sequentially fetched through the communication control unit 66A of the single crystal manufacturing apparatus 1 and the communication control unit 35A of the group management computer 21, and the fetched process data is stored in the process data The display control unit 45 and the output control unit 47 display a screen on the display 30 in a predetermined process data display form such as a table or a graph.

By this screen display, the operator can confirm the result of the process data of the selected single crystal manufacturing apparatus 1 from the start of the batch until the time when the instruction of the operator is issued.

At the time when one batch is completed, the process data of the batch is automatically taken into the group management computer 21 from the process data storage section 60 of the single crystal manufacturing apparatus 1. That is, the process data capturing unit 3 of the group management computer 21 shown in FIG.
6 is a process data storage unit 6 of the single crystal manufacturing apparatus 1
When the pulling of the single crystal 14 from one batch of process data stored in the single crystal 14 is completed, the single crystal manufacturing apparatus 1
The data is fetched sequentially through the communication control unit 66A on the side and the communication control unit 35A of the group management computer 21, and the fetched process data is stored in the process data storage unit 37 in association with the unique information of each single crystal manufacturing apparatus 1.

The process data display control unit 45 outputs a signal for process data display control to the output control unit 47,
The output controller 47 causes the display 30 to display the process data stored in the process data 37 on the display 30 in a predetermined process data display form using characters, graphs, and the like.

When the operator issues a command to print out the process data displayed on the screen of the display 30 using the external input means 32, the output control unit 47 receives the command and outputs the command. The output control unit 47 causes the printer 33 to print out the process data displayed on the screen of the display 30.

In this embodiment, the communication control unit 35C of the group management computer 21 is signal-connected to a host computer (not shown),
7 is stored in the host computer through the communication control unit 35C at a predetermined timing or in response to a request from the host computer, for example. In this way, the process data taken into the host computer is compared and verified with, for example, the product quality of the single crystal 14 manufactured and completed. By the comparison and verification, it is possible to modify the process recipe and the like in order to produce a better single crystal product.

As described above, during or after the operation, the process data for producing a single crystal can be detected, stored, and displayed.

During operation of the single crystal manufacturing apparatus 1, for example, when an operator issues a command for displaying the operating status of the single crystal manufacturing apparatus 1 on a screen using the external input means 32, the apparatus selection control is performed. The unit 39 receives the instruction, determines the device selected by the operator, and transmits the operation status information of the single crystal manufacturing apparatus 1 selected by the operator through the communication control unit 72B and the communication control unit 35B to manufacture the single crystal. Import from the device 1 side. Then, the apparatus selection control section 39 outputs the acquired operation state information to the operation state display control section 44 in association with the unique information of the single crystal manufacturing apparatus 1 corresponding to the operation state information.

When the operation status information is added from the device selection control unit 39, the operation status display control unit 44 outputs a signal for operation status display control to the output control unit 47, and the output control unit 47 The operating status of the single crystal manufacturing apparatus 1 selected by the operator is displayed on the display 30 in a predetermined display mode.

The single crystal 14 is formed, for example, by a vacuum step of evacuating the chamber 2, a melting step of forming a melt 6 of the single crystal raw material in the crucible 3, a seed step of dipping the seed crystal 7.・ Manufactured through a plurality of predetermined processes.

The process shift notifying section 64 shown in FIG. 3 of each single crystal manufacturing apparatus 1 fetches the control operation information of the control operation section 61 from time to time, and based on the control operation information, for example, melts from the vacuum process. When it is detected that the manufacturing process has shifted to a process, a process shift notification signal notifying the process shift is output to the group management computer 21 via the input unit 68, the sequence control unit 70, and the communication control unit 72B in order. .

Communication control section 72B of single crystal manufacturing apparatus 1
Is output to the operating process display control unit 41 through the communication control unit 35B of the group management computer 21.

The operating process display control unit 41 determines which process is being performed by the operating single crystal manufacturing apparatus 1 based on the process transition notification signal added from the single crystal manufacturing apparatus 1. Then, the running process display control unit 41
Outputs a signal for process display control during operation to the output control unit 47, and the output control unit 47
Is displayed on the display 30 in a predetermined display form using characters and symbols. For example, information on the operating steps of a plurality of single crystal manufacturing apparatuses 1 connected to the group management computer 21 by signal is displayed on the screen collectively in parallel.

The video signal processing unit 57 shown in FIG. 3 of each single crystal manufacturing apparatus 1 has a monitoring camera 50 (50a, 50a) on the input side.
b), and the output side is connected to the camera image display means 54 arranged in the vicinity of the single crystal manufacturing apparatus 1 by a signal. The video signal processing unit 57 includes the monitoring camera 5
The video signal added from 0 is signal-processed by a predetermined signal processing method, and the video signal after the signal processing is output to the camera video display means 54. Camera image display means 54
Displays the video of the monitoring camera 50 on the screen based on the video signal added from the video signal processing unit 57.

The video signal processing section 57 is also connected to the video centralized display means 22 by a signal, and outputs the video signal after the signal processing to the video centralized display means 22. Control unit 7 in video centralized display means 22 shown in FIG.
The video signal reception control unit 6 controls the reception of the video signal applied from each single crystal manufacturing apparatus 1 in accordance with a reception control program given in advance.

For example, video signals are automatically selected and received one by one from the video signals output from each single crystal manufacturing apparatus 1 in sequence. Alternatively, when the operator manually selects the desired single crystal manufacturing apparatus 1 to view the image of the monitoring camera 50 using the external input means 74a, the video signal of the manually selected single crystal manufacturing apparatus 1 is given priority. To receive. Alternatively, when the operator manually selects the desired single crystal manufacturing apparatus 1 using the external input means 32 of the group management computer 21 as described above, the information of the manually selected apparatus is output to the output control unit of the group management computer 21. 47
To the video signal reception control unit 77 through the external signal receiving means 74b of the video centralized display means 22, and preferentially receives the video signal of the single crystal manufacturing apparatus 1 selected by the operator on the group management computer 21 side. I do.

The display controller 78 controls the monitor 75 of the single crystal manufacturing apparatus 1 on the monitor 75 based on the video signal received by the reception control operation of the video signal reception controller 77.
Display the image of on the screen. That is, the images of the monitoring camera 50 of each single crystal manufacturing apparatus 1 are sequentially switched and displayed on the monitor 75.

In the centralized control room 23, as described above, the process data during operation, the process information during operation, and the operation status of each single crystal manufacturing apparatus 1 are displayed on the display 30 of the group management computer 21, or The monitor 75 of the central display means 22 displays an image of the monitoring camera 50 of each single crystal manufacturing apparatus 1. When the operator is monitoring the display on the display 30 of the group management computer 21 or the monitor 75 on the image centralized display means 22, there is a case where the operator wants to change the operation of the operating single crystal manufacturing apparatus 1.

In this embodiment, in such a case,
It is provided with an epoch-making control structure capable of remote operation, in which the operating operation of the operating single crystal manufacturing apparatus 1 can be changed while being in the central control room 23.

That is, when the operator manually inputs the control information for changing the operation of the single crystal manufacturing apparatus 1 that the operator wants to change, using the external input means 32 of the group management computer 21, the operation is changed. Control information is added to the remote control unit 46. The remote operation control unit 46 outputs control information for changing the driving operation to the device selection control unit 39, and the device selection control unit 39
The control information for changing the operation is output from the communication control unit 35B to the single crystal manufacturing apparatus 1 selected by the operator.

In the selected single crystal manufacturing apparatus 1, the control information for changing the operation is added to the change controller 71 via the communication controller 72B. The change control unit 71 outputs the control information for driving operation change to the sequence control unit 70 as a driving operation change command.

When the control information for changing the driving operation is added, the sequence control unit 70 changes the driving operation set value stored in the built-in information storage unit to a set value based on the control information for changing the driving operation. Change and perform the control action,
The control information for changing the driving operation is output to the control calculation unit 61 as a driving operation change command.

When receiving the control information for changing the operation, the control calculation section 61 changes the process recipe stored in the process recipe storage section 62 based on the control information for changing the operation. Control operation based on this recipe.

As described above, the group management computer 2
From 1, the operation of the single crystal production apparatus 1 can be remotely controlled.

Further, in this embodiment, a configuration is provided in which the occurrence of an operation abnormality can be automatically detected in each single crystal manufacturing apparatus 1. In addition, a configuration is provided in which the operation of the single crystal manufacturing apparatus 1 in which the operation abnormality has occurred can be remotely controlled while staying in the central control room 23. Hereinafter, the configuration will be described in detail.

The process recipe storage section 62 of each single crystal manufacturing apparatus 1 stores the above-described process recipes and includes, for example, the single crystal 1 contained in the process recipe.
Data of an allowable range associated with each target value such as the lifting speed of the heater 4 and the heating temperature of the heater 5 is stored.

The operation abnormality detecting section 65 fetches the detected values of the various sensors converted by the process data converting section 59 from time to time, and stores the detected values of the fetched sensors in the process recipe storage section 62, respectively. Is compared to the corresponding tolerance. Then, the driving abnormality detecting unit 65 determines whether or not the detected value is within the allowable range, and when it is determined that the detected value is out of the allowable range, determines that an abnormality has occurred.

The operation abnormality detecting section 65 transmits the abnormality presence / absence notification signals respectively corresponding to the various sensors to the sequence control section 7
Output to 0.

When the sequence control unit 70 detects that the signal indicating the operation abnormality is included in the added abnormality presence / absence notification signal, the sequence control unit 70 immediately issues alarm means (for example, an alarm lamp or an alarm buzzer) 53. And the occurrence of a driving abnormality is notified by the alarm means 53.
Information about the sensor indicating the abnormality is input to the external input unit 5.
2 is displayed on the screen. Further, the sequence control unit 70 also has a function as an abnormality occurrence notification unit. When the sequence control unit 70 detects that an operation abnormality has occurred in the single crystal manufacturing apparatus 1 based on the abnormality presence / absence notification signal, an abnormality notification signal is issued. Is output to the group management computer 21 via the communication control unit 72B.

Communication control unit 72B of single crystal manufacturing apparatus 1
Is output to the device abnormality presence / absence display control unit 38 via the communication control unit 35B of the group management computer 21. The device abnormality display control unit 38
It is determined whether or not the abnormality notification signal has been issued for each single crystal manufacturing apparatus 1, and if it is detected based on the determination result that there is a single crystal manufacturing apparatus 1 in which an abnormality has occurred, an alarm is immediately issued. An issuance command is output to the output control unit 47,
The output control unit 47 notifies the presence of the single crystal manufacturing apparatus 1 in which an abnormality has occurred by the alarm means 34 such as an alarm lamp and an alarm buzzer.

The device abnormality display control unit 38
Outputs a signal based on the above determination result to the output control unit 47, and the output control unit 47
For each time, the presence or absence of an operation abnormality is displayed on the display 30 in parallel and collectively on the screen.

When the operator detects the occurrence of an abnormality by the alarm of the alarm means 34 or the screen display of the display 30, the operator displays on the display 30 the operating condition of the single crystal manufacturing apparatus 1 in which the abnormality has occurred. Is issued using the external input means 32, the command is applied to the abnormality content display control unit 42.
Upon receiving the instruction, the abnormality content display control unit 42 captures the operating status information of the desired single crystal manufacturing apparatus 1 selected by the operator through the communication control units 35B and 72B and the device selection control unit 39, and incorporates the information into the information. The output control unit 47 causes the output 30 to display a screen on the display 30 on the basis of the abnormal operation of the single crystal production apparatus 1 based on the occurrence of the abnormality.

The operator operates the external input means 32 to operate the process data capturing section 36 of the group control computer 21. As described above, the process data capturing section 36 of the single crystal manufacturing apparatus 1 in which an abnormality has occurred is operated by the process data capturing section 36. The process data can be taken into the group management computer 21 and the process data can be displayed on the display 30 on the screen. This allows the operator to determine the content of the abnormality and the single crystal 14 being pulled due to the occurrence of the abnormality.
It is possible to grasp the influence on the abnormality, and it is possible to accurately determine the means for coping with the abnormality.

The operator operates the external input means 32 to display the image of the surveillance camera 50 in the abnormal single crystal manufacturing apparatus 1 on the monitor 75 of the image centralized display means 22.
Is issued to the video signal reception control unit 77 via the output control unit 47 and the external signal reception unit 74b of the video centralized display unit 22 in that order, and the image is displayed as described above. The signal reception control is performed, and the image of the monitoring camera 50 in the abnormal single crystal manufacturing apparatus 1 is displayed on the monitor 75.

The operator operates the group management computer 21
The abnormal information displayed on the screen of the display 30 and the image of the surveillance camera 50 displayed on the monitor 75 of the image centralized display means 22 are viewed, and control information for abnormality countermeasures for responding to the abnormality is collected by the group management computer 21 External input means 3
When the information is manually input using the control information 2, the control information for the abnormality countermeasure is added to the remote operation control unit 46.

When the control information for the abnormality countermeasure is added, the remote operation control unit 46 selects the control information for the abnormality countermeasure in the same manner as when the control information for the change of the driving operation is added. Output to the control unit 39. The device selection control unit 39 recognizes the single crystal manufacturing apparatus 1 in which an abnormality has occurred based on external input information from the external input means 32, and transmits the control information for countermeasures for the abnormality to the single crystal manufacturing apparatus 1 in which the abnormality has occurred.
From the communication control unit 35B.

The control information for abnormality countermeasures output from the communication control unit 35B of the group management computer 21 is added to the change control unit 71 via the communication control unit 72B of the single crystal manufacturing apparatus 1. The change control unit 71 outputs the received control information for abnormality countermeasures to the sequence control unit 70 as a driving operation change command.

In response to the driving operation change command, the sequence control unit 70 changes the driving operation set value stored in the built-in information storage unit to a set value based on the control information for abnormality countermeasures, as described above. The control information is changed and the control operation is performed, and the control information for the abnormality countermeasure is output to the control calculation unit 61 as a driving operation change command. Upon receiving the command, the control calculation unit 61 changes the process recipe stored in the process recipe storage unit 62 based on the control information for changing the operation operation, and performs the control operation.

As described above, the occurrence of an abnormality can be automatically detected for each single crystal manufacturing apparatus 1, and when an abnormality occurs, the group management computer 21 can remotely control the single crystal manufacturing apparatus 1 in which the abnormality has occurred. Can be. In this embodiment, the process data, the process transition notification signal, and the abnormality notification signal notify the operation status of the single crystal manufacturing apparatus 1 to the group management computer 21 as the operation status notification signal. The operation of monitoring the operation status of the single crystal manufacturing apparatus 1 is performed by the operation status notification signal.

According to this embodiment, the group control computer 21 is provided with the remote control section 46 for outputting control information for changing the operation to the single crystal manufacturing apparatus 1 in operation. Each single crystal manufacturing apparatus 1 connected to the computer 21 is provided with a change control unit 71, and when the control information for changing the operation is added from the group management computer 21, the control operation is performed by the change control unit 71. The driving operation of the section 61 and the sequence control section 70 is changed to the driving operation based on the control information for changing the driving operation. With this configuration, it is possible to remotely control the operating single crystal manufacturing apparatus 1 from the group management computer 21.

In the related art, the monitoring person walks between a plurality of single crystal manufacturing apparatuses 1 and operates / operates each single crystal manufacturing apparatus 1.
Although there is a problem that monitoring is performed and labor productivity is low, in this embodiment, it is possible to intensively monitor the operation status of many single crystal manufacturing apparatuses 1 while staying in the central control room 23. In addition, as described above, since it is possible to remotely control each single crystal manufacturing apparatus 1 from the group management computer 21, it is desired to change, for example, when an abnormality occurs, the pulling condition of the single crystal 14, and the like. In this case, the operation of the single crystal manufacturing apparatus 1 can be performed by simply outputting the control information for changing the operation operation from the group management computer 21 to the desired single crystal manufacturing apparatus 1 without going to the single crystal manufacturing apparatus 1. The operation can be changed, and labor productivity can be dramatically improved.

Further, in this embodiment, since the configuration for automatically detecting the occurrence of an abnormality in the single crystal manufacturing apparatus 1 is provided, it is not necessary for a person to perform a troublesome abnormality occurrence diagnosis work. It is possible to prevent the occurrence of a serious problem of overlooking the occurrence.

Further, in this embodiment, when the occurrence of an abnormality is automatically detected, a configuration is provided for immediately notifying the occurrence of the abnormality. In addition, as described above, the single crystal manufacturing apparatus 1 is The remote control allows the time from when an abnormality is automatically detected to when the countermeasure is taken to be taken to be extremely short. It is possible to avoid the problem of being continued for a long time.

Note that the present invention is not limited to the above-described embodiment, but can adopt various embodiments. For example, in the above-described embodiment, each of the single crystal manufacturing apparatuses 1 is provided with two monitoring cameras 50a and 50b, respectively, but the monitoring camera 5 provided in one single crystal manufacturing apparatus 1 is provided.
The number of zeros may be one or three or more, and the number of monitoring cameras 50 provided in each single crystal manufacturing apparatus 1 is not limited.

In the example shown in FIG. 1, an example is shown in which four single crystal manufacturing apparatuses 1 are connected to the group management computer 21 by signals.
The number of single crystal manufacturing apparatuses 1 connected to the signal generator may be less than four or five or more, and is not limited to the number.

Further, in the above embodiment, the image of the monitoring camera 50 of each single crystal manufacturing apparatus 1 is sequentially switched and displayed on the monitor 75 of the image centralized display means 22. The images of the monitoring cameras 50 of two or more of the plurality of single crystal manufacturing apparatuses 1 that are connected to the management computer 21 by signal may be displayed on the screen collectively.

Further, in the above embodiment, the number of the image centralized display means 22 is one. However, for example, a plurality of the image centralized display means 22 may be provided at different places.

Further, in the above embodiment, the single crystal manufacturing apparatus 1 is an apparatus for manufacturing a single crystal by the CZ method. However, the present invention provides a single crystal manufacturing apparatus for manufacturing a single crystal by a method other than the CZ method. It can also be applied to a centralized management system.

[0092]

According to the present invention, the group control computer is provided with a remote control unit for outputting control information for changing the operation to the single crystal manufacturing apparatus in operation. A change control unit is provided, and the change control unit issues a driving operation change command to the driving control unit to change the driving operation of the driving control unit to the operation based on the control information for driving operation change added from the group management computer. The configuration was adopted.
With this configuration, it was possible to remotely control the operating single crystal manufacturing apparatus by the group management computer.

Thus, it is possible for a person to monitor and operate a large number of single crystal manufacturing apparatuses while staying in the central control room without going around a plurality of single crystal manufacturing apparatuses in charge. Can be monitored and operated by a small number of people, and labor productivity can be dramatically improved.

An operation abnormality detecting section for automatically detecting the occurrence of an operation abnormality of the single crystal manufacturing apparatus is provided, and an alarm means for notifying the occurrence of the abnormality when the operation abnormality is detected by the operation abnormality detection section is provided. Further, in the case where the group management computer is configured to output control information for abnormality countermeasures to the single crystal manufacturing apparatus in which an abnormality has occurred, when an abnormality occurs in the single crystal manufacturing apparatus, It is only necessary to output control information for abnormality countermeasures from the group management computer without going to the device where the error occurred, and it is possible to significantly reduce the time taken from the occurrence of the error to the time of responding to the error. You can do it. This can avoid the problem that the abnormal state is continued for a long time.

Further, in the case where the process data detecting section and the process data storing section are provided, the process data can be automatically detected. When a person records the process data, the work is very troublesome and may be inaccurate. However, as in the present invention, the process data is automatically detected, so that the troublesome process data is obtained. Recording work can be eliminated, and accurate process data can be obtained.

Further, by comparing and verifying the process data detected and stored as described above with the manufactured single crystal product, the operating state of the single crystal manufacturing apparatus during the single crystal manufacturing and the product are obtained. It becomes easy to examine the relationship with the quality of the single crystal, and based on the result, it is possible to develop a single crystal with better quality.

[Brief description of the drawings]

FIG. 1 is an explanatory view schematically showing an embodiment of a centralized management system for a single crystal manufacturing apparatus according to the present invention.

FIG. 2 is a block diagram showing a main control configuration of a group management computer according to the embodiment.

FIG. 3 is a block diagram showing a main control configuration of the single crystal manufacturing apparatus according to the embodiment.

FIG. 4 is a block diagram showing a main control configuration of a video centralized display unit in the embodiment.

FIG. 5 is an explanatory view schematically showing a configuration example of a single crystal manufacturing apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Single crystal manufacturing apparatus 12 Control apparatus 20 Centralized management system 21 Group management computer 22 Image central display means 30 Display 31 Control unit 34 Alarm means 37 Process data storage unit 40 Process recipe storage unit 45 Process data display control unit 46 Remote operation control unit 51 display 52 external input means 53 alarm means 55 process control unit 56 sequencer 60 process data storage unit 61 control calculation unit 62 process recipe storage unit 65 operation abnormality detection unit 70 sequence control unit

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 4G077 AA02 BA04 CF10 EH06 PF51 5B049 BB07 CC21 DD01 EE07 EE56 FF02 FF03 FF04 GG04 GG07 5F053 AA12 BB04 BB08 DD01 FF04 GG01 RR05

Claims (3)

[Claims] 1. A plurality of single crystal manufacturing apparatuses are arranged, and each single crystal manufacturing apparatus stores status information collecting means for collecting status information on the operation of the apparatus, and operation control information for controlling the operation of the apparatus. And an operation control unit for controlling the operation of the apparatus based on the situation information collected by the situation information collecting unit and the operation control information stored in the information storage unit. Each of the single crystal manufacturing apparatuses is connected to a common group management computer by a signal, and each single crystal manufacturing apparatus outputs an operation status notification signal to the group management computer to notify the operation status of the apparatus. A centralized management system for a single crystal manufacturing apparatus in which each operation status of the plurality of single crystal manufacturing apparatuses is intensively monitored by the group management computer based on the group management computer; The computer is provided with a remote operation control unit that outputs control information for changing the operation operation to the selected operating single crystal manufacturing apparatus, and each of the single crystal manufacturing apparatuses has a group management computer during operation. A change control unit for issuing an operation operation change command when receiving the operation information for control operation change from the above.The operation control unit of each single crystal manufacturing apparatus is provided with the operation operation change instruction. Sometimes, instead of the operation control information previously stored in the information storage unit, the device operation control is performed based on the operation operation change control information added from the group management computer. A centralized management system for a single crystal manufacturing apparatus, comprising a configuration capable of remotely controlling a single crystal manufacturing apparatus in operation from a group management computer. 2. An operation abnormality detection unit for automatically detecting an abnormality of the apparatus operation based on the situation information collected by the situation information collecting means, and detecting an abnormality of the apparatus operation in each single crystal manufacturing apparatus. A warning device for notifying the occurrence of the abnormality, and an abnormality notification unit for outputting an abnormality notification signal for notifying the occurrence of the abnormality to the group management computer. A group management computer side alarm means for notifying the occurrence of an abnormality when the above-mentioned abnormality notification signal is added, and an external input for manually inputting control information for abnormality countermeasures to the single crystal manufacturing apparatus in which the abnormality has occurred. Means is provided, and the remote operation control unit of the group management computer is operable to convert the control information for abnormality countermeasures externally input by the external input means into control for changing the driving operation. 2. The centralized management system for a single crystal manufacturing apparatus according to claim 1, wherein the information is output to the single crystal manufacturing apparatus in which the abnormality has occurred. 3. A process data detecting unit for detecting predetermined process data based on status information collected by status information collecting means, and stores the detected process data in each single crystal manufacturing apparatus. And a process data storage unit.
A process data display control unit for reading process data stored in a process data storage unit of each single crystal manufacturing apparatus at a predetermined timing and displaying the process data on a screen is provided. 3. A centralized management system for a single crystal production apparatus according to claim 1 or 2.