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JP2001068796A - Resin circuit molded product for mounting electronic components and method of manufacturing electronic components - Google Patents

Resin circuit molded product for mounting electronic components and method of manufacturing electronic components

Info

Publication number
JP2001068796A
JP2001068796A JP23918099A JP23918099A JP2001068796A JP 2001068796 A JP2001068796 A JP 2001068796A JP 23918099 A JP23918099 A JP 23918099A JP 23918099 A JP23918099 A JP 23918099A JP 2001068796 A JP2001068796 A JP 2001068796A
Authority
JP
Japan
Prior art keywords
resin
molded product
metal layer
electronic component
conductive metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP23918099A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Ando
好幸 安藤
Hideki Asano
秀樹 浅野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP23918099A priority Critical patent/JP2001068796A/en
Publication of JP2001068796A publication Critical patent/JP2001068796A/en
Pending legal-status Critical Current

Links

Classifications

    • H10W72/0198
    • H10W72/5522
    • H10W90/754

Landscapes

  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
  • Structure Of Printed Boards (AREA)
  • Light Receiving Elements (AREA)

Abstract

(57)【要約】 【課題】 電子部品を簡単且つ高品質に製造できるよう
にすること。 【解決手段】 複数の凹部14A及び14B並びに複数
の貫通孔15を有し上記凹部が、段部17、18を備え
てフォトセンサ素子19を搭載可能とし、上記貫通孔
が、凹部近傍に直線状に複数配列された樹脂成形品12
と、この樹脂成形品の凹部から貫通孔内部へ至る領域に
形成された電気回路13とを有して構成された樹脂回路
成形品11において、上記電気回路は、樹脂成形品に一
体に圧着成形された銅箔16及び26を主要部として形
成されたものである。
(57) [Summary] [PROBLEMS] To enable easy and high-quality production of electronic components. SOLUTION: The concave portion has a plurality of concave portions 14A and 14B and a plurality of through holes 15, and the concave portion has stepped portions 17, 18 so that a photosensor element 19 can be mounted. Molded articles 12 arranged in plural
And an electric circuit 13 formed in a region extending from the concave portion of the resin molded product to the inside of the through-hole, the electric circuit is integrally press-molded with the resin molded product. The copper foils 16 and 26 thus formed are formed as main parts.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、特に、プリント基
板に表面実装可能なフォトセンサなどの電子部品を製造
する電子部品素子搭載用樹脂回路成形品、及びこの電子
部品素子搭載用樹脂回路成形品を用いて実施する電子部
品の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention particularly relates to a resin circuit molded product for mounting electronic components and elements for manufacturing electronic components such as a photosensor which can be surface-mounted on a printed circuit board, and a resin circuit molded product for mounting such electronic components. The present invention relates to a method of manufacturing an electronic component using the method.

【0002】[0002]

【従来の技術】プリント基板などに表面実装可能なフォ
トセンサなどの電子部品は、特開平10−261808
に記載の発明の如く、まず、樹脂成形品に複数の凹部及
び複数の貫通孔を形成し、次に、この樹脂成形品の凹部
から貫通孔内部に至る領域に、金属めっきを施すことに
よって電気回路を形成して樹脂回路成形品を構成し、次
に例えば、この樹脂回路成形品の凹部にフォトセンサ素
子などの電子部品素子を搭載して、この電子部品素子と
上記電気回路とをワイヤボンディングし、その後、直線
状に配列された複数の貫通孔の配列方向に沿って樹脂回
路成形品をダイシングすることによって製造している。
2. Description of the Related Art Electronic components such as photosensors that can be surface-mounted on a printed circuit board or the like are disclosed in Japanese Patent Application Laid-Open No. 10-261808.
First, a plurality of recesses and a plurality of through-holes are formed in a resin molded product, and then a region from the recess to the inside of the through-hole of the resin molded product is subjected to metal plating by applying metal plating. A circuit is formed to form a resin circuit molded product, and then, for example, an electronic component element such as a photosensor element is mounted in a concave portion of the resin circuit molded product, and the electronic component element and the electric circuit are wire-bonded. Then, the resin circuit molded product is manufactured by dicing along a direction in which a plurality of through holes arranged linearly are arranged.

【0003】ここで、上記電気回路は、樹脂成形品が非
導電性であることから、まず、この樹脂成形品の表面を
例えばクロム硫酸などの薬品を使って粗化させた後、め
っき触媒を塗布し、次に、その全表面に無電解銅めっき
を施し、その後、この無電解銅めっき層にマスク露光、
現像及びエッチング処理などを実施して形成している。
[0003] Here, since the resin molded article is non-conductive, the surface of the resin molded article is first roughened using a chemical such as chromic sulfuric acid, and then the plating catalyst is removed. Coating, then apply electroless copper plating on the entire surface, and then mask exposure on this electroless copper plating layer,
It is formed by performing development and etching.

【0004】[0004]

【発明が解決しようとする課題】ところが、上記電気回
路の形成工程では、樹脂成形品の表面粗化、めっき触媒
の塗布、無電解銅めっきなど、多数の煩雑な工程が必要
となる。しかも、これらの各工程においては、薬品の管
理や廃棄などに十分な注意を払わなければならない。
However, in the step of forming the electric circuit, a number of complicated steps such as surface roughening of a resin molded product, application of a plating catalyst, and electroless copper plating are required. In addition, in each of these steps, sufficient attention must be paid to the management and disposal of chemicals.

【0005】また、このような無電解銅めっきに基づき
形成された電気回路と電子部品素子とのワイヤボンディ
ングにおいては、図10(B)に示すように、無電解銅
めっき層100の表面の粗さが大きく、このため無電解
銅めっき層100表面の汚れを除去しにくいことも相俟
って、電気回路へのワイヤボンディング性が低下してし
まうおそれがある。
In wire bonding between an electric circuit formed based on such electroless copper plating and an electronic component element, as shown in FIG. 10B, the surface of the electroless copper plating layer 100 has a rough surface. Therefore, it is difficult to remove dirt on the surface of the electroless copper plating layer 100, and therefore, wire bonding to an electric circuit may be deteriorated.

【0006】更に、無電解銅めっきの前に、樹脂成形品
101の表面を薬品等を用いて粗化させているので、こ
の樹脂成形品101の表面の機械的強度が低下して、無
電解銅めっき層100、つまり電気回路と樹脂成形品1
01との結合強度(ピール強度)が不十分となるおそれ
がある。
Further, before the electroless copper plating, the surface of the resin molded article 101 is roughened by using a chemical or the like. Copper plating layer 100, that is, electric circuit and resin molded product 1
There is a possibility that the bonding strength (peel strength) with 01 may be insufficient.

【0007】これらワイヤボンディング性の低下及び電
気回路のピーク強度の低下の結果、電子部品たるフォト
センサの品質が低下してしまうおそれがある。
[0007] As a result of the reduction in the wire bonding property and the reduction in the peak strength of the electric circuit, there is a possibility that the quality of the photosensor as an electronic component is reduced.

【0008】本発明の目的は、上述の事情を考慮してな
されたものであり、電子部品を簡単且つ高品質に製造す
ることができる電子部品素子搭載用樹脂回路成形品及び
電子部品の製造方法を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention has been made in view of the above-mentioned circumstances, and a resin circuit molded product for mounting electronic components and a method of manufacturing an electronic component capable of manufacturing electronic components easily and with high quality. Is to provide.

【0009】[0009]

【課題を解決するための手段】請求項1に記載の発明
は、複数の凹部及び複数の貫通孔を有し、上記凹部が、
2以上の段部を備えて電子部品素子が搭載可能に設けら
れ、上記貫通孔が、上記凹部近傍に直線状に複数配列さ
れた樹脂成形品と、この樹脂成形品の上記凹部から上記
貫通孔内部へ至る領域に形成された電気回路とを有して
構成された電子部品素子搭載用樹脂回路成形品におい
て、上記電気回路は、上記樹脂成形品に一体に圧着成形
された導電性金属層を主要部として形成されたことを特
徴とするものである。
The invention according to claim 1 has a plurality of recesses and a plurality of through holes.
A resin molded product provided with at least two steps so that the electronic component element can be mounted thereon, wherein the through holes are linearly arrayed in the vicinity of the concave portion; In an electronic component element mounting resin circuit molded product having an electric circuit formed in a region extending to the inside, the electric circuit includes a conductive metal layer integrally press-molded on the resin molded product. It is characterized by being formed as a main part.

【0010】請求項2に記載の発明は、請求項1に記載
の発明において、上記導電性金属層は、裏面に凹凸処理
が施されて構成され、この導電性金属層の凹凸処理面が
上記樹脂成形品に接合されて、これらの樹脂成形品と導
電性金属層とが一体に圧着成形されたことを特徴とする
ものである。
According to a second aspect of the present invention, in the first aspect of the present invention, the conductive metal layer is formed by subjecting a back surface of the conductive metal layer to an unevenness treatment. It is characterized by being joined to a resin molded product, and the resin molded product and the conductive metal layer are integrally formed by pressure bonding.

【0011】請求項3に記載の発明は、請求項1または
2に記載の発明において、上記樹脂成形品が熱硬化性樹
脂または熱可塑性樹脂から構成され、上記導電性金属層
が銅箔から構成されたことを特徴とするものである。
According to a third aspect of the present invention, in the first or second aspect, the resin molded article is made of a thermosetting resin or a thermoplastic resin, and the conductive metal layer is made of a copper foil. It is characterized by having been done.

【0012】請求項4に記載の発明は、2以上の段部を
備えて電子部品素子を搭載可能な複数の凹部が設けられ
た樹脂成形品に、導電性金属層を一体に圧着成形して樹
脂複合成形品とし、次に、上記凹部近傍に、上記樹脂成
形品及び上記導電性金属層を貫通して、複数の貫通孔を
直線状に配列して形成し、次に、上記導電性金属層を主
要部として、上記凹部から上記貫通孔内部へ至る領域に
電気回路を形成して樹脂回路成形品を製作し、次に、上
記凹部に電子部品素子を搭載した後、この電子部品素子
と上記電気回路とを接続し、その後、上記貫通孔の配列
方向に沿って上記樹脂回路成形品をダイシングして、電
子部品を製造することを特徴とする請求項5に記載の発
明は、2以上の段部を備えて電子部品素子を搭載可能な
複数の凹部が設けられた樹脂成形品に、導電性金属層を
一体に圧着成形して樹脂複合成形品とし、次に、上記凹
部近傍に、上記樹脂成形品及び上記導電性金属層を貫通
して、複数の貫通孔を直線状に配列して形成し、次に、
上記導電性金属層を主要部として、上記凹部から上記貫
通孔内部へ至る領域に電気回路を形成して樹脂回路成形
品を製作し、次に、上記貫通孔の配列方向に沿って上記
樹脂回路成形品をダイシングし、その後、上記凹部に電
子部品素子を搭載した後、この電子部品素子と上記電気
回路とを接続して、電子部品を製造することを特徴とす
るものである。
According to a fourth aspect of the present invention, a conductive metal layer is integrally press-molded on a resin molded product having two or more steps and provided with a plurality of recesses on which electronic component elements can be mounted. A resin composite molded article is formed. Next, in the vicinity of the concave portion, the resin molded article and the conductive metal layer are penetrated, and a plurality of through holes are linearly arranged and formed. With the layer as a main part, an electric circuit is formed in a region from the concave portion to the inside of the through hole to produce a resin circuit molded product, and then, after mounting the electronic component element in the concave portion, The invention according to claim 5, wherein the electronic circuit is manufactured by dicing the resin circuit molded product along the arrangement direction of the through holes after connecting the electric circuit. Provided with multiple recesses with electronic steps for mounting electronic components Then, a conductive metal layer is integrally formed on the molded resin article by pressure bonding to form a resin composite molded article. Next, in the vicinity of the concave portion, the resin molded article and the conductive metal layer are penetrated to form a plurality of through-holes. The holes are formed in a linear array, then
With the conductive metal layer as a main part, an electric circuit is formed in a region extending from the concave portion to the inside of the through hole to produce a resin circuit molded product, and then the resin circuit is formed along the arrangement direction of the through holes. The method is characterized in that a molded article is diced, an electronic component element is mounted in the concave portion, and the electronic component element is connected to the electric circuit to manufacture an electronic component.

【0013】請求項6に記載の発明は、請求項4または
5に記載の発明において、上記導電性金属層は、裏面に
凹凸処理が施されて構成され、この導電性金属層の凹凸
処理面が上記樹脂成形品に接合されて、これらの樹脂成
形品と導電性金属層とが一体に圧着成形されたことを特
徴とするものである。
According to a sixth aspect of the present invention, in the fourth or fifth aspect of the present invention, the conductive metal layer is formed by subjecting a back surface of the conductive metal layer to an uneven surface treatment. Are joined to the resin molded product, and the resin molded product and the conductive metal layer are integrally formed by pressure bonding.

【0014】請求項7に記載の発明は、請求項4乃至6
のいずれかに記載の発明において、上記樹脂成形品が熱
硬化性樹脂または熱可塑性樹脂から構成され、上記導電
性金属層が銅箔から構成されたことを特徴とするもので
ある。
[0014] The invention according to claim 7 is the invention according to claims 4 to 6.
In the invention described in any one of the above, the resin molded article is made of a thermosetting resin or a thermoplastic resin, and the conductive metal layer is made of a copper foil.

【0015】請求項1、3、4、5または7に記載の発
明には、次の作用がある。
The invention according to the first, third, fourth, fifth or seventh aspect has the following effects.

【0016】樹脂回路成形品を構成する樹脂成形品の凹
部から貫通孔内部へ至る領域に形成された電気回路が、
樹脂成形品に一体に圧着成形された導電性金属層を主要
部として構成されたことから、電気回路の表面が平滑性
及び平坦性に優れ、汚れも除去し易いので、この電気回
路と、樹脂回路成形品の凹部に搭載された電子部品素子
との間で、ワイヤボンディングを良好に実施できる。こ
のため、この樹脂回路成形品を用いて構成される電子部
品の品質を向上させることができる。
An electric circuit formed in a region extending from the concave portion to the inside of the through hole of the resin molded product constituting the resin circuit molded product,
Since the main part is formed of a conductive metal layer integrally formed by compression bonding on a resin molded product, the surface of the electric circuit is excellent in smoothness and flatness, and it is easy to remove dirt. Wire bonding can be favorably performed between the electronic component element mounted in the concave portion of the circuit molded product. Therefore, it is possible to improve the quality of an electronic component formed using the resin circuit molded product.

【0017】また、電気回路を金属めっきを用いて構成
した場合には、樹脂成形品が非導電性であることから、
この樹脂成形品の表面を粗化した後にめっき触媒を塗布
し、次に無電解めっきを実施しなければならず、多数の
煩雑な工程が必要になる。これに対し、本発明の場合に
は、樹脂成形品に導電性金属層が一体に圧着され、この
導電性金属層を主要部として電気回路が形成されるの
で、金属めっき処理による場合に比べ工程数を減少で
き、電気回路を簡単に形成できる。
When the electric circuit is formed by using metal plating, since the resin molded product is non-conductive,
After roughening the surface of the resin molded product, a plating catalyst must be applied, and then electroless plating must be performed, which requires many complicated steps. On the other hand, in the case of the present invention, the conductive metal layer is integrally press-bonded to the resin molded product, and an electric circuit is formed with the conductive metal layer as a main part. The number can be reduced, and the electric circuit can be easily formed.

【0018】請求項2または6に記載の発明には、次の
作用がある。
The invention according to claim 2 or 6 has the following operation.

【0019】導電性金属層の凹凸処理面が樹脂成形品に
接合されて、これらの樹脂成形品と導電性金属層とが一
体に圧着成形されたことから、凹凸処理面の凹凸が樹脂
成形品に食い込んで投錨効果が発揮される。また、樹脂
成形品は、金属めっきを施す場合のように、薬品等によ
ってその表面が粗化されて機械的強度が低下してしまう
ことがない。これらの結果、導電性金属層を主要部とし
て形成される電気回路と樹脂成形品との結合強度、即ち
ピール強度が向上し、これら樹脂成形品及び電気回路か
ら成る樹脂回路成形品を用いて構成された電気部品の品
質を、より一層向上させることができる。
The uneven surface of the conductive metal layer is joined to the resin molded product, and the resin molded product and the conductive metal layer are integrally formed by pressure bonding. The anchor effect is exhibited by digging into. In addition, unlike a case of applying metal plating, the surface of a resin molded product is not roughened by a chemical or the like, and the mechanical strength is not reduced. As a result, the bonding strength, that is, the peel strength between the electric circuit formed mainly of the conductive metal layer and the resin molded product, that is, the peel strength is improved, and the resin circuit molded product including the resin molded product and the electric circuit is used. The quality of the obtained electrical component can be further improved.

【0020】[0020]

【発明の実施の形態】以下、本発明の実施の形態を、図
面に基づき説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0021】[A]一実施の形態(図1〜図8、図1
0) 図1は、本発明に係る電子部品素子搭載用樹脂回路成形
品の一実施の形態である樹脂回路成形品を示す断面図で
ある。図2は、図1の樹脂回路成形品の平面図である。
[A] Embodiment (FIGS. 1 to 8 and FIG. 1)
0) FIG. 1 is a cross-sectional view showing a resin circuit molded product as an embodiment of the electronic component element mounting resin circuit molded product according to the present invention. FIG. 2 is a plan view of the resin circuit molded product of FIG.

【0022】電子部品としての図5に示すフォトセンサ
10を製造するための、電子部品素子搭載用樹脂回路成
形品としてのフォトセンサ素子搭載用の樹脂回路成形品
11は、図1及び図2に示すように、樹脂成形品12と
電気回路13とを有して構成される。上記樹脂成形品1
2は、複数の凹部14A及び14B、並びに複数の貫通
孔15を備えてなる。また、上記電気回路13は、樹脂
成形品12に一体に圧着成形された、導電性金属層とし
ての銅箔16及び26を主要部として形成される。
A resin circuit molded product 11 for mounting a photosensor element as a resin circuit molded product for mounting an electronic component element for manufacturing the photosensor 10 shown in FIG. 5 as an electronic component is shown in FIGS. 1 and 2. As shown, it is configured to include a resin molded product 12 and an electric circuit 13. The above resin molded product 1
2 comprises a plurality of recesses 14A and 14B and a plurality of through holes 15. Further, the electric circuit 13 is formed mainly of copper foils 16 and 26 as conductive metal layers, which are integrally press-molded on the resin molded product 12.

【0023】上記各凹部14A及び14Bは、樹脂成形
品12に2個の段部17、18が設けられたことにより
形成される。凹部14Aは、凹部14Bよりも深い位置
に形成され、フォトセンサ素子19(図5)を搭載可能
とする。また、凹部14Bは、凹部14Aにフォトセン
サ素子19が搭載されたとき、このフォトセンサ素子1
9の上面とほぼ同一面となる位置に形成される。
Each of the recesses 14A and 14B is formed by providing two stepped portions 17 and 18 on the resin molded product 12. The concave portion 14A is formed at a position deeper than the concave portion 14B, so that the photosensor element 19 (FIG. 5) can be mounted. When the photosensor element 19 is mounted on the concave section 14A, the concave section 14B
9 is formed at a position that is substantially flush with the upper surface of the substrate 9.

【0024】上記複数の貫通孔15は、各凹部14Bの
近傍に、この凹部14Bの長手方向に沿って直線状に配
列して形成される。これらの貫通孔15は、後述の如
く、樹脂成形品12に銅箔16、26が一体に圧着成形
された後に、これらの樹脂成形品12及び銅箔16、2
6に貫通して形成される。この貫通孔15の断面形状
は、図2では円形状のものを示すが、楕円形状または四
角形状であっても良い。
The plurality of through-holes 15 are formed in the vicinity of each recess 14B in a straight line along the longitudinal direction of the recess 14B. As will be described later, these through-holes 15 are formed after the copper foils 16 and 26 are integrally formed on the resin molded product 12 by pressure bonding.
6 to be formed. The cross-sectional shape of the through-hole 15 is shown in FIG. 2 as being circular, but may be elliptical or square.

【0025】上記電気回路13は、凹部14Bから貫通
孔15内部を経て樹脂成形品12裏面へ至る領域に形成
される。このため、フォトセンサ10は、その裏面をプ
リント基板(不図示)の表面に接合させて、このプリン
ト基板に表面実装可能に設けられる。また、この電気回
路13は、後に詳説するように、樹脂成形品12の表
面、裏面にそれぞれ一体化された銅箔16、26と、貫
通孔15内部に形成された後述の銅めっき層24とを連
続させ、これら銅箔16、26及び銅めっき層24をマ
スク露光、現像及びエッチング処理することにより形成
される。
The electric circuit 13 is formed in a region extending from the concave portion 14B through the inside of the through hole 15 to the back surface of the resin molded product 12. For this reason, the photo sensor 10 is provided such that its back surface is joined to the surface of a printed board (not shown) so that the photo sensor 10 can be mounted on the printed board. As will be described in detail later, the electric circuit 13 includes copper foils 16 and 26 integrated on the front surface and the back surface of the resin molded product 12, and a copper plating layer 24 described later formed inside the through hole 15, respectively. Are formed, and the copper foils 16 and 26 and the copper plating layer 24 are formed by mask exposure, development and etching.

【0026】また、銅箔16及び26は、図10(A)
に示すように、裏面に凹凸処理が施されて凹凸処理面2
0が形成され、銅箔16及び26と樹脂成形品12との
一体圧着成形時に、樹脂成形品12が銅箔16及び26
の凹凸処理面20に食い込んで密着して接合される。ま
た、銅箔16及び26の表面は平滑面及び平坦面として
形成される。
The copper foils 16 and 26 are formed as shown in FIG.
As shown in the figure, the back surface is subjected to the unevenness treatment, and the unevenness-treated surface 2
0 is formed, and when the copper foils 16 and 26 and the resin molded product 12 are integrally pressed and formed, the resin molded product 12 is
And is closely adhered and joined. The surfaces of the copper foils 16 and 26 are formed as a smooth surface and a flat surface.

【0027】ここで、前記樹脂成形品12は、フォトセ
ンサ10を図示しないプリント基板に表面実装するため
にハンダ耐熱性を有する必要があり、例えば熱硬化性樹
脂が用いられる。この熱硬化性樹脂としては、エポキシ
樹脂、不飽和ポリエステル、フェノール樹脂などが好適
である。
Here, the resin molded article 12 needs to have solder heat resistance in order to surface-mount the photosensor 10 on a printed board (not shown), and for example, a thermosetting resin is used. As the thermosetting resin, epoxy resin, unsaturated polyester, phenol resin, and the like are preferable.

【0028】次に、上述の樹脂回路成形品11を含めた
フォトセンサ10の製造工程を、図3及び図4などを用
いて説明する。
Next, a manufacturing process of the photosensor 10 including the above-described resin circuit molded article 11 will be described with reference to FIGS.

【0029】(1)まず、図3(A)及び図7に示すよ
うに、複数の凹部14A及び14Bを有する樹脂成形品
12の表面に銅箔16を、裏面に銅箔26をそれぞれ一
体に圧着成形して、樹脂複合成形品21を構成する。こ
のとき、銅箔16は、複数の凹部14A及び14Bを覆
うようにして一体成形される。
(1) First, as shown in FIGS. 3A and 7, a copper foil 16 is integrally formed on the surface of a resin molded product 12 having a plurality of recesses 14A and 14B, and a copper foil 26 is integrally formed on the back surface. The resin composite molded article 21 is formed by compression molding. At this time, the copper foil 16 is integrally formed so as to cover the plurality of recesses 14A and 14B.

【0030】この樹脂成形品12と銅箔16及び26と
の一体圧着成形は、図6に示すように、まず、複数の凹
部14A及び14Bが予め型成形された未硬化の樹脂成
形品12と、上記凹部14A及び14Bに対応して凹凸
形状に予め型成形された銅箔16と、平坦面形状の銅箔
26とを、上型22と下型23との間に配置する。この
とき、銅箔16及び26の凹凸処理面20を樹脂成形品
12側に向ける。次に、これら上型22及び下型23を
用いて、例えば180℃の加熱状態下で、樹脂成形品1
2と銅箔16及び26に2分間、100kgf/cm2
の圧力を作用する。このようにして、未硬化の樹脂成形
品12を溶融、成形、硬化させることによって、図10
(A)に示すように、銅箔16及び26の凹凸処理面2
0を溶融状態の樹脂成形品12に食い込ませ、樹脂成形
品12の硬化後、銅箔16及び26を樹脂成形品12に
密着させて一体に圧着成形する。
As shown in FIG. 6, the resin molded product 12 and the copper foils 16 and 26 are integrally press-molded together with an uncured resin molded product 12 in which a plurality of recesses 14A and 14B are molded in advance. Then, a copper foil 16 preformed in an uneven shape corresponding to the concave portions 14A and 14B and a copper foil 26 having a flat surface shape are arranged between the upper mold 22 and the lower mold 23. At this time, the uneven surface 20 of the copper foils 16 and 26 faces the resin molded product 12 side. Next, using the upper mold 22 and the lower mold 23, for example, under a heating state of 180 ° C., the resin molded product 1 is heated.
2 and copper foils 16 and 26 for 2 minutes at 100 kgf / cm 2
Acting pressure. In this way, the uncured resin molded product 12 is melted, molded, and cured to obtain the resin molded product 12 shown in FIG.
As shown in (A), the uneven surface 2 of the copper foils 16 and 26
0 is cut into the resin molded product 12 in a molten state, and after the resin molded product 12 is cured, the copper foils 16 and 26 are brought into close contact with the resin molded product 12 and integrally press-molded.

【0031】(2)次に、図3(B)及び図8に示すよ
うに、樹脂複合成形品21の各凹部14B近傍に、これ
ら凹部14Bの長手方向に沿って、複数の貫通孔15を
直線状に配列して穿設する。各貫通孔15は、樹脂成形
品12と、この樹脂成形品12の表面、裏面にそれぞれ
一体化された銅箔16、26とを貫通して形成される。
(2) Next, as shown in FIGS. 3B and 8, a plurality of through holes 15 are formed in the vicinity of each of the recesses 14B of the resin composite molded article 21 along the longitudinal direction of these recesses 14B. Drilled in a straight line. Each through-hole 15 is formed through the resin molded product 12 and the copper foils 16 and 26 integrated on the front and back surfaces of the resin molded product 12, respectively.

【0032】(3)次に、図3(C)に示すように、貫
通孔15の内部を主目的として、樹脂複合成形品21の
全表面及び全裏面に薄付け無電解銅めっきを実施して、
厚さ約1μmの無電解銅めっき層を形成する。その後、
この無電解銅めっき層の上に電解銅めっきを実施して、
厚さ約10μmの電解銅めっき層を形成する。こうし
て、主に貫通孔15の内部に、樹脂複合成形品21表面
の銅箔16と裏面の銅箔26とを連続する銅めっき層2
4が形成される。
(3) Next, as shown in FIG. 3 (C), thin electroless copper plating is performed on the entire surface and the entire back surface of the resin composite molded article 21 mainly for the inside of the through hole 15. hand,
An electroless copper plating layer having a thickness of about 1 μm is formed. afterwards,
Perform electrolytic copper plating on this electroless copper plating layer,
An electrolytic copper plating layer having a thickness of about 10 μm is formed. In this way, the copper plating layer 2 is formed mainly in the through-hole 15 by connecting the copper foil 16 on the surface of the resin composite molded product 21 and the copper foil 26 on the back surface.
4 are formed.

【0033】(4)次に、図示しないが、樹脂複合成形
品21の全表面にポジ型電着レジストを塗布してレジス
ト層を形成し、このレジスト層をマスキングフィルムで
覆って紫外線露光し現像する。この現像により、電気回
路13の形成に不必要な部分のレジスト層が除去され
る。次に、エッチング処理を実施して、レジスト層で覆
われていない部分の銅箔16及び26並びに銅めっき層
24をエッチング除去し、その後、残余のレジスト層を
除去する。
(4) Next, although not shown, a positive electrodeposition resist is applied to the entire surface of the resin composite molded article 21 to form a resist layer, and the resist layer is covered with a masking film and exposed to ultraviolet light for development. I do. By this development, a portion of the resist layer unnecessary for forming the electric circuit 13 is removed. Next, an etching process is performed to etch away the portions of the copper foils 16 and 26 and the copper plating layer 24 that are not covered with the resist layer, and then remove the remaining resist layer.

【0034】これにより、図3(D)、図1及び図2に
示すように樹脂回路成形品11が製作される。この樹脂
回路成形品11の電気回路13は、樹脂成形品12の表
面及び裏面並びに貫通孔15内部に、銅箔16及び26
を主要部として、各凹部14Bと、この凹部14Bに対
応する複数の貫通孔15内部と、樹脂成形品12裏面の
貫通孔15周縁部とを連続して形成される。
Thus, the resin circuit molded article 11 is manufactured as shown in FIGS. 3 (D), 1 and 2. The electric circuit 13 of the resin circuit molded product 11 has copper foils 16 and 26 on the front and back surfaces of the resin molded product 12 and inside the through hole 15.
Each of the concave portions 14B, the inside of the plurality of through holes 15 corresponding to the concave portions 14B, and the peripheral portion of the through hole 15 on the back surface of the resin molded product 12 are continuously formed.

【0035】(5)次に、図4(E)及び図5に示すよ
うに、図1の各凹部14Aにフォトセンサ素子19をダ
イボンディングして搭載し、その後、このフォトセンサ
素子19と凹部14B上の電気回路13とを、金線25
を用いてワイヤボンディングして電気的に接続する。
(5) Next, as shown in FIGS. 4 (E) and 5, a photosensor element 19 is mounted by die bonding in each recess 14A of FIG. The electric circuit 13 on 14B and the gold wire 25
And electrically connected by wire bonding.

【0036】(6)その後、図4(F)及び図2に示す
ように、樹脂回路成形品11を複数の貫通孔15の配列
方向に沿って、図4(F)の破線に示すようにダイシン
グし、更に、フォトセンサ10となる部分毎にダイシン
グする。
(6) Thereafter, as shown in FIGS. 4 (F) and 2, the resin circuit molded product 11 is moved along the arrangement direction of the plurality of through holes 15 as shown by the broken line in FIG. 4 (F). Dicing is performed, and further, dicing is performed for each part to be the photosensor 10.

【0037】(7)最後に、図4(G)に示すように、
上記(6)の如くダイシングされたものの凹部14A及
び14Bを覆うようにして透明板27を固着し、フォト
センサ10を製造する。
(7) Finally, as shown in FIG.
The transparent plate 27 is fixed so as to cover the concave portions 14A and 14B of the dicing as in the above (6), and the photosensor 10 is manufactured.

【0038】従って、上記実施の形態によれば、次の効
果〜を奏する。
Therefore, according to the above embodiment, the following effects are obtained.

【0039】樹脂成形品12の凹部14Bから貫通孔
15内部を経て樹脂成形品12裏面の貫通孔15周縁部
へ至る領域に、電気回路13が形成されることによって
樹脂回路成形品11が構成され、この電気回路13が、
樹脂成形品12に一体に圧着成形された銅箔16及び2
6を主要部として構成されたことから、図10(A)に
示すように、電気回路13の表面が平滑性及び平坦性に
優れ、汚れも除去しやすいので、この電気回路13と、
凹部14Aに搭載されたフォトセンサ素子19との間
で、金線25を用いてワイヤボンディングを良好に実施
できる。このため、この樹脂回路成形品11を用いて構
成されるフォトセンサ10の品質を向上させることがで
きる。
The electric circuit 13 is formed in a region extending from the concave portion 14B of the resin molded product 12 to the peripheral portion of the through hole 15 on the back surface of the resin molded product 12 through the inside of the through hole 15, thereby forming the resin circuit molded product 11. , This electric circuit 13
Copper foils 16 and 2 formed integrally with resin molded product 12 by pressure bonding
6 as a main part, as shown in FIG. 10A, the surface of the electric circuit 13 is excellent in smoothness and flatness, and dirt is easily removed.
Wire bonding can be favorably performed using the gold wire 25 with the photosensor element 19 mounted in the recess 14A. For this reason, the quality of the photo sensor 10 configured using the resin circuit molded product 11 can be improved.

【0040】銅箔16及び26の凹凸処理面20が樹
脂成形品12に接合され、これら樹脂成形品12と銅箔
16及び26とが一体に圧着成形されて、樹脂複合成形
品21が構成されたことから、凹凸処理面20の凹凸が
樹脂成形品12に食い込んで投錨効果が発揮される。ま
た、樹脂成形品12は、金属めっきを施す場合のよう
に、薬品などによってその表面が粗化されて機械的強度
が低下してしまうことがない。これらの結果、銅箔16
及び26を主要部として形成される電気回路13と樹脂
成形品12との結合強度、すなわちピール強度が向上
し、樹脂複合成形品21から形成された樹脂回路成形品
11を用いて構成されるフォトセンサ10の品質を、よ
り一層向上させることができる。
The uneven surface 20 of the copper foils 16 and 26 is joined to the resin molded product 12, and the resin molded product 12 and the copper foils 16 and 26 are integrally press-molded to form a resin composite molded product 21. As a result, the irregularities of the irregularity treated surface 20 bite into the resin molded product 12 and an anchoring effect is exhibited. Further, unlike the case of applying metal plating, the surface of the resin molded product 12 is not roughened by a chemical or the like, and the mechanical strength is not reduced. As a result, the copper foil 16
And 26, the bonding strength between the electric circuit 13 and the resin molded product 12 formed as a main part, that is, the peel strength is improved, and the photo formed by using the resin circuit molded product 11 formed from the resin composite molded product 21 is improved. The quality of the sensor 10 can be further improved.

【0041】電気回路13を金属めっきを用いて構成
した場合には、樹脂成形品12が非導電性であることか
ら、この樹脂成形品12の表面を粗化した後にめっき触
媒を塗布し、次に無電解銅めっきを実施しなければなら
ず、多数の煩雑な工程が必要になる。これに対し、本実
施の形態の場合には、樹脂成形品12に銅箔16及び2
6が一体に圧着成形され、この銅箔16及び26を主要
部として電気回路13が形成されるので、金属めっき処
理による場合に比べ工程数を減少でき、電気回路13を
簡単に形成できる。この結果、フォトセンサ10を容易
に製造できる。
When the electric circuit 13 is formed using metal plating, since the resin molded product 12 is non-conductive, the surface of the resin molded product 12 is roughened, and then a plating catalyst is applied. Must be performed, and many complicated steps are required. On the other hand, in the case of the present embodiment, the copper foils 16 and 2
6 are integrally formed by pressure bonding, and the electric circuit 13 is formed by using the copper foils 16 and 26 as main parts. Therefore, the number of steps can be reduced as compared with the case of metal plating, and the electric circuit 13 can be formed easily. As a result, the photo sensor 10 can be easily manufactured.

【0042】上述の銅めっき処理により電気回路を形
成する場合には、樹脂成形品の表面粗化、めっき触媒の
塗布、無電解銅めっき処理において各種の薬品が必要に
なるが、本実施の形態において、主に貫通孔15内に無
電解銅めっき及び電解銅めっきを施す場合には、使用さ
れる薬品の数が少なく、従って、薬品の管理及び廃棄が
容易となる。
When an electric circuit is formed by the above-described copper plating treatment, various chemicals are required in the surface roughening of the resin molded product, the application of the plating catalyst, and the electroless copper plating treatment. In the case where electroless copper plating and electrolytic copper plating are mainly performed in the through holes 15, the number of chemicals used is small, and therefore, the management and disposal of the chemicals are facilitated.

【0043】フォトセンサ素子19を搭載可能な複数
の凹部14Aを有する樹脂回路成形品11を一括成形に
より得、これをダイシングすることにより、フォトセン
サ10を製造できるので、個別部品としてのフォトセン
サ10を効率的に複数同時に製造することができる。
A resin circuit molded article 11 having a plurality of recesses 14A on which the photosensor element 19 can be mounted is obtained by collective molding, and the resultant is diced, whereby the photosensor 10 can be manufactured. Can be efficiently manufactured at the same time.

【0044】凹部14Aにフォトセンサ素子19を搭
載させることにより、このフォトセンサ素子19の上面
と凹部14Bの上面とがほぼ同一面となるので、フォト
センサ素子19と凹部14B上の電気回路13とのワイ
ヤボンディングを容易に実施できる。
By mounting the photosensor element 19 in the concave portion 14A, the upper surface of the photosensor element 19 and the upper surface of the concave portion 14B are substantially flush with each other. Can be easily carried out.

【0045】凹部14Bから貫通孔15内部を経て樹
脂成形品12裏面の貫通孔15周縁部に至る領域に形成
された電気回路13が、全体としてメタライズ電極とな
るので、フォトセンサ10を図示しないプリント基板に
容易に表面実装することができる。
The electric circuit 13 formed in a region extending from the concave portion 14B to the peripheral portion of the through hole 15 on the back surface of the resin molded product 12 through the through hole 15 serves as a metallized electrode as a whole. It can be easily surface-mounted on a substrate.

【0046】[B]他の実施の形態(図9) 図9は、本発明に係る電子部品の製造方法の他の実施の
形態が適用されたフォトセンサ製造工程を示す工程断面
図である。この他の実施の形態において、前記実施の形
態と同様な部分は、同一の符号を付すことにより説明を
省略する。
[B] Another Embodiment (FIG. 9) FIG. 9 is a process sectional view showing a photosensor manufacturing process to which another embodiment of the method for manufacturing an electronic component according to the present invention is applied. In the other embodiments, the same parts as those in the above embodiment are denoted by the same reference numerals, and the description thereof will be omitted.

【0047】フォトセンサ10を製造するこの他の実施
の形態が、前記一実施の形態と異なるのは、樹脂回路成
形品11をダイシングした後に、凹部14Aにフォトセ
ンサ素子19を搭載する点である。
The other embodiment of manufacturing the photosensor 10 is different from that of the first embodiment in that the photosensor element 19 is mounted in the recess 14A after the resin circuit molded article 11 is diced. .

【0048】(1)つまり、図3に示すように、樹脂成
形品12に銅箔16及び26を一体化させて樹脂複合成
形品21を製作し(図3(A))、次に、この樹脂複合
成形品21に貫通孔15を穿設し(図3(B))、次
に、この樹脂複合成形品21に銅めっき処理を実施し
(図3(C))、その後、この樹脂複合成形品21に電
気回路13を形成して樹脂回路成形品11を製作する
(図3(D))までは、上記一実施の形態と同様であ
る。
(1) That is, as shown in FIG. 3, the copper foils 16 and 26 are integrated with the resin molded product 12 to produce a resin composite molded product 21 (FIG. 3A). A through hole 15 is formed in the resin composite molded article 21 (FIG. 3 (B)), and then a copper plating process is performed on the resin composite molded article 21 (FIG. 3 (C)). The steps up to the step of forming the electric circuit 13 on the molded article 21 to produce the resin circuit molded article 11 (FIG. 3D) are the same as those of the above-described embodiment.

【0049】(2)次に、図9(A)に示すように、樹
脂回路成形品11を複数の貫通孔15の配列方向に沿っ
て、同図破線に示すようにダイシングし、更に、フォト
センサ10となる部分毎にダイシングする。
(2) Next, as shown in FIG. 9A, the resin circuit molded product 11 is diced along the direction in which the plurality of through holes 15 are arranged as shown by the broken lines in FIG. Dicing is performed for each part to be the sensor 10.

【0050】(3)その後、図9(B)に示すように、
上記ダイシングされたものの凹部14Aにフォトセンサ
素子19をダイボンディングして搭載し、このフォトセ
ンサ素子19と凹部14B上の電気回路13とを、金線
25を用いてワイヤボンディングして電気的接続する。
(3) Thereafter, as shown in FIG.
The photosensor element 19 is mounted on the recessed portion 14A of the diced product by die bonding, and the photosensor element 19 and the electric circuit 13 on the recessed portion 14B are electrically connected by wire bonding using a gold wire 25. .

【0051】(4)最後に、図9(C)に示すように、
上記(2)においてダイシングされたものの凹部14A
及び14Bを覆うようにして透明板27を固着し、フォ
トセンサ10を製造する。
(4) Finally, as shown in FIG.
The recessed portion 14A of the product diced in the above (2)
Then, the transparent plate 27 is fixed so as to cover 14B and 14B, and the photosensor 10 is manufactured.

【0052】従って、この他の実施の形態においても、
前記一実施の形態の効果〜と同様の効果を奏する。
Therefore, in the other embodiments,
The same effects as the effects of the first embodiment are obtained.

【0053】以上、本発明を上記実施の形態に基づいて
説明したが、本発明はこれに限定されるものではない。
As described above, the present invention has been described based on the above embodiment, but the present invention is not limited to this.

【0054】例えば、樹脂成形品12は熱硬化性樹脂に
限らず、熱可塑性樹脂にて構成されても良い。この熱可
塑性樹脂としては、芳香族ポリエステルである液晶ポリ
マ(LCP)、ポリエーテルサルホン(PES)、ポリ
フェニレンサルファイド(PPS)等が好適である。
For example, the resin molded article 12 is not limited to a thermosetting resin, but may be made of a thermoplastic resin. As the thermoplastic resin, liquid crystal polymer (LCP), polyethersulfone (PES), polyphenylene sulfide (PPS) or the like, which is an aromatic polyester, is preferable.

【0055】また、導電性金属層として銅箔16の場合
を述べたが、銅板またはニッケルもしくは金の箔または
板であっても良い。
Although the case where the conductive metal layer is the copper foil 16 has been described, a copper plate or a nickel or gold foil or plate may be used.

【0056】更に、両実施の形態では、電子部品がフォ
トセンサの場合を述べたが、温度センサ、湿度センサま
たはガスセンサなどにも本発明を適用できる。
Further, in both embodiments, the case where the electronic component is a photo sensor has been described, but the present invention can be applied to a temperature sensor, a humidity sensor, a gas sensor, or the like.

【0057】[0057]

【発明の効果】以上のように、請求項1に記載の発明に
係る電子部品素子搭載用樹脂回路成形品によれば、樹脂
成形品の複数の凹部から複数の貫通孔へ至る領域に形成
された電気回路が、樹脂成形品に一体に圧着成形された
導電性金属層を主要部として構成されたことから、電子
部品を簡単且つ高品質に製造することができる。
As described above, according to the resin circuit molded article for mounting electronic parts and elements according to the first aspect of the present invention, the resin molded article is formed in the region from the plurality of recesses to the plurality of through holes. The electronic circuit can be manufactured easily and with high quality because the main part of the electric circuit is a conductive metal layer integrally formed by compression bonding on a resin molded product.

【0058】請求項4に記載の発明に係る電子部品の製
造方法によれば、2以上の段部を備えて電子部品素子を
搭載可能な複数の凹部が設けられた樹脂成形品に、導電
性金属層を一体に圧着成形して樹脂複合成形品とし、次
に、上記凹部近傍に、上記樹脂成形品及び上記導電性金
属層を貫通して、複数の貫通孔を直線状に配列して形成
し、次に、上記導電性金属層を主要部として、上記凹部
から上記貫通孔内部へ至る領域に電気回路を形成して樹
脂回路成形品を製作し、次に、上記凹部に電子部品素子
を搭載した後、この電子部品素子と上記電気回路とを接
続し、その後、上記貫通孔の配列方向に沿って上記樹脂
回路成形品をダイシングして、電子部品を製造すること
から、電子部品を簡単且つ高品質に製造することができ
る。
According to the method of manufacturing an electronic component according to the fourth aspect of the present invention, a resin molded product having two or more steps and provided with a plurality of recesses on which electronic component elements can be mounted is provided. The metal layer is integrally pressed and formed into a resin composite molded product, and then, in the vicinity of the concave portion, a plurality of through holes are linearly arranged through the resin molded product and the conductive metal layer. Then, using the conductive metal layer as a main portion, an electric circuit is formed in a region from the concave portion to the inside of the through hole to produce a resin circuit molded product, and then an electronic component element is formed in the concave portion. After mounting, the electronic component element is connected to the electric circuit, and then the resin circuit molded product is diced along the arrangement direction of the through holes to manufacture the electronic component. And it can be manufactured with high quality.

【0059】請求項5に記載の発明に係る電子部品の製
造方法によれば、2以上の段部を備えて電子部品素子を
搭載可能な複数の凹部が設けられた樹脂成形品に、導電
性金属層を一体に圧着成形して樹脂複合成形品とし、次
に、上記凹部近傍に、上記樹脂成形品及び上記導電性金
属層を貫通して、複数の貫通孔を直線状に配列して形成
し、次に、上記導電性金属層を主要部として、上記凹部
から上記貫通孔内部へ至る領域に電気回路を形成して樹
脂回路成形品を製作し、次に、上記貫通孔の配列方向に
沿って上記樹脂回路成形品をダイシングし、その後、上
記凹部に電子部品素子を搭載した後、この電子部品素子
と上記電気回路とを接続して、電子部品を製造すること
から、電子部品を簡単且つ高品質に製造することができ
る。
According to the method of manufacturing an electronic component according to the fifth aspect of the present invention, a resin molded product having two or more steps and provided with a plurality of recesses on which electronic component elements can be mounted is provided. The metal layer is integrally pressed and formed into a resin composite molded product, and then, in the vicinity of the concave portion, a plurality of through holes are linearly arranged through the resin molded product and the conductive metal layer. Then, with the conductive metal layer as a main part, an electric circuit is formed in a region from the concave portion to the inside of the through hole to produce a resin circuit molded product, and then in the arrangement direction of the through holes. After dicing the resin circuit molded product along with the electronic component element in the concave portion and connecting the electronic component element and the electric circuit to manufacture the electronic component, the electronic component can be easily manufactured. And it can be manufactured with high quality.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る電子部品素子搭載用樹脂回路成形
品の一実施の形態である樹脂回路成形品を示す断面図で
ある。
FIG. 1 is a cross-sectional view showing a resin circuit molded product as an embodiment of a resin circuit molded product for mounting electronic components according to the present invention.

【図2】図1の樹脂回路成形品の平面図である。FIG. 2 is a plan view of the resin circuit molded product of FIG.

【図3】本発明に係る電子部品の製造方法の一実施の形
態が適用されたフォトセンサの製造工程における前半部
分を示す断面工程図である。
FIG. 3 is a cross-sectional process diagram showing a first half of a photosensor manufacturing process to which an embodiment of the electronic component manufacturing method according to the present invention is applied.

【図4】図3のフォトセンサの製造工程における後半部
分を示す断面工程図である。
FIG. 4 is a sectional process view showing the latter half of the manufacturing process of the photosensor of FIG. 3;

【図5】図3及び図4の製造工程により製造されたフォ
トセンサを示す平面図である。
FIG. 5 is a plan view showing a photosensor manufactured by the manufacturing steps of FIGS. 3 and 4;

【図6】図3(A)の樹脂複合成形品を製作するための
製作工程を示す断面図である。
FIG. 6 is a cross-sectional view showing a manufacturing process for manufacturing the resin composite molded article of FIG. 3 (A).

【図7】図3(A)に示す断面図の切断箇所(IIIA
−IIIA線)を付加した樹脂複合成形品の平面図であ
る。
FIG. 7 is a cross-sectional view (IIIA) of the cross-sectional view shown in FIG.
FIG. 3B is a plan view of the resin composite molded product to which (−IIIA line) is added.

【図8】図3(B)に示す断面図の切断箇所(IIIB
−IIIB線)を付加した樹脂複合成形品の平面図であ
る。
FIG. 8 is a cross-sectional view (IIIB) of the cross-sectional view shown in FIG.
FIG. 3 is a plan view of the resin composite molded product to which (−IIIB line) is added.

【図9】本発明に係る半導体の製造方法の他の実施の形
態が適用されたフォトセンサの製造工程を示す断面工程
図である。
FIG. 9 is a sectional process view showing a photosensor manufacturing process to which another embodiment of the semiconductor manufacturing method according to the present invention is applied.

【図10】(A)は、図1に示す電気回路を構成する銅
箔と樹脂成形品との結合状態を示す断面図であり、
(B)は、従来の電気回路を構成する無電解銅めっきと
樹脂成形品との結合状態を示す断面図である。
FIG. 10A is a cross-sectional view showing a connection state between a copper foil and a resin molded product constituting the electric circuit shown in FIG. 1,
(B) is a cross-sectional view showing a state of connection between a resin molded product and electroless copper plating constituting a conventional electric circuit.

【符号の説明】[Explanation of symbols]

10 フォトセンサ(電子部品) 11 樹脂回路成形品 12 樹脂成形品 13 電気回路 14A、14B 凹部 15 貫通孔 16、26 銅箔 17、18 段部 19 フォトセンサ素子(電子部品素子) 20 凹凸処理面 21 樹脂複合成形品 24 銅めっき層 REFERENCE SIGNS LIST 10 photosensor (electronic component) 11 resin circuit molded product 12 resin molded product 13 electric circuit 14 A, 14 B recess 15 through hole 16, 26 copper foil 17, 18 step 19 photosensor element (electronic component element) 20 uneven surface 21 Resin composite molded product 24 Copper plating layer

フロントページの続き Fターム(参考) 5E317 AA24 BB01 BB02 BB12 CC03 CC13 CC31 CD34 GG17 5E338 AA16 BB03 BB19 BB25 BB63 BB75 CD01 EE31 5F088 BA18 CB20 FA09 JA03 Continued on the front page F term (reference) 5E317 AA24 BB01 BB02 BB12 CC03 CC13 CC31 CD34 GG17 5E338 AA16 BB03 BB19 BB25 BB63 BB75 CD01 EE31 5F088 BA18 CB20 FA09 JA03

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 複数の凹部及び複数の貫通孔を有し、上
記凹部が、2以上の段部を備えて電子部品素子が搭載可
能に設けられ、上記貫通孔が、上記凹部近傍に直線状に
複数配列された樹脂成形品と、 この樹脂成形品の上記凹部から上記貫通孔内部へ至る領
域に形成された電気回路とを有して構成された電子部品
素子搭載用樹脂回路成形品において、 上記電気回路は、上記樹脂成形品に一体に圧着成形され
た導電性金属層を主要部として形成されたことを特徴と
する電子部品素子搭載用樹脂回路成形品。
1. A semiconductor device comprising: a plurality of recesses and a plurality of through holes; wherein the recess has two or more steps, and is provided so that an electronic component element can be mounted; A plurality of resin molded products, and an electric circuit formed in an area extending from the concave portion of the resin molded product to the inside of the through hole. A resin circuit molded product for mounting electronic component elements, characterized in that the electric circuit is formed mainly of a conductive metal layer formed integrally with the resin molded product by pressure bonding.
【請求項2】 上記導電性金属層は、裏面に凹凸処理が
施されて構成され、この導電性金属層の凹凸処理面が上
記樹脂成形品に接合されて、これらの樹脂成形品と導電
性金属層とが一体に圧着成形されたことを特徴とする請
求項1に記載の電子部品素子搭載用樹脂回路成形品。
2. The conductive metal layer is formed by subjecting a back surface of the conductive metal layer to a concavo-convex treatment. The resin circuit molded product for electronic component element mounting according to claim 1, wherein the metal layer and the metal layer are integrally formed by pressure bonding.
【請求項3】 上記樹脂成形品が熱硬化性樹脂または熱
可塑性樹脂から構成され、上記導電性金属層が銅箔から
構成されたことを特徴とする請求項1または2に記載の
電子部品素子搭載用樹脂回路成形品。
3. The electronic component element according to claim 1, wherein the resin molded product is made of a thermosetting resin or a thermoplastic resin, and the conductive metal layer is made of a copper foil. Resin circuit molded product for mounting.
【請求項4】 2以上の段部を備えて電子部品素子を搭
載可能な複数の凹部が設けられた樹脂成形品に、導電性
金属層を一体に圧着成形して樹脂複合成形品とし、 次に、上記凹部近傍に、上記樹脂成形品及び上記導電性
金属層を貫通して、複数の貫通孔を直線状に配列して形
成し、 次に、上記導電性金属層を主要部として、上記凹部から
上記貫通孔内部へ至る領域に電気回路を形成して樹脂回
路成形品を製作し、 次に、上記凹部に電子部品素子を搭載した後、この電子
部品素子と上記電気回路とを接続し、 その後、上記貫通孔の配列方向に沿って上記樹脂回路成
形品をダイシングして、電子部品を製造することを特徴
とする電子部品の製造方法。
4. A resin composite molded article obtained by integrally pressing a conductive metal layer on a resin molded article provided with a plurality of recesses provided with two or more steps and capable of mounting an electronic component element. In the vicinity of the concave portion, a plurality of through-holes are formed in a straight line by penetrating the resin molded product and the conductive metal layer, and then forming the conductive metal layer as a main part, An electric circuit is formed in a region extending from the concave portion to the inside of the through hole to produce a resin circuit molded product. Next, after mounting an electronic component element in the concave portion, the electronic component element is connected to the electric circuit. Thereafter, a method of manufacturing an electronic component, comprising: dicing the resin circuit molded product along the arrangement direction of the through holes to manufacture an electronic component.
【請求項5】 2以上の段部を備えて電子部品素子を搭
載可能な複数の凹部が設けられた樹脂成形品に、導電性
金属層を一体に圧着成形して樹脂複合成形品とし、 次に、上記凹部近傍に、上記樹脂成形品及び上記導電性
金属層を貫通して、複数の貫通孔を直線状に配列して形
成し、 次に、上記導電性金属層を主要部として、上記凹部から
上記貫通孔内部へ至る領域に電気回路を形成して樹脂回
路成形品を製作し、 次に、上記貫通孔の配列方向に沿って上記樹脂回路成形
品をダイシングし、 その後、上記凹部に電子部品素子を搭載した後、この電
子部品素子と上記電気回路とを接続して、電子部品を製
造することを特徴とする電子部品の製造方法。
5. A resin composite molded article obtained by integrally pressing a conductive metal layer on a resin molded article having two or more steps and provided with a plurality of recesses on which electronic component elements can be mounted. In the vicinity of the concave portion, a plurality of through-holes are formed in a straight line by penetrating the resin molded product and the conductive metal layer, and then forming the conductive metal layer as a main part, An electric circuit is formed in a region extending from the concave portion to the inside of the through hole to produce a resin circuit molded product. Next, the resin circuit molded product is diced along the arrangement direction of the through holes. A method for manufacturing an electronic component, comprising: mounting an electronic component, connecting the electronic component to the electric circuit, and manufacturing an electronic component.
【請求項6】 上記導電性金属層は、裏面に凹凸処理が
施されて構成され、この導電性金属層の凹凸処理面が上
記樹脂成形品に接合されて、これらの樹脂成形品と導電
性金属層とが一体に圧着成形されたことを特徴とする請
求項4または5に記載の電子部品の製造方法。
6. The conductive metal layer is formed by subjecting a back surface of the conductive metal layer to a concavo-convex treatment. The method for manufacturing an electronic component according to claim 4, wherein the metal layer and the metal layer are integrally formed by pressure bonding.
【請求項7】 上記樹脂成形品が熱硬化性樹脂または熱
可塑性樹脂から構成され、上記導電性金属層が銅箔から
構成されたことを特徴とする請求項4乃至6のいずれか
に記載の電子部品の製造方法。
7. The method according to claim 4, wherein the resin molded product is made of a thermosetting resin or a thermoplastic resin, and the conductive metal layer is made of a copper foil. Manufacturing method of electronic components.
JP23918099A 1999-08-26 1999-08-26 Resin circuit molded product for mounting electronic components and method of manufacturing electronic components Pending JP2001068796A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23918099A JP2001068796A (en) 1999-08-26 1999-08-26 Resin circuit molded product for mounting electronic components and method of manufacturing electronic components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23918099A JP2001068796A (en) 1999-08-26 1999-08-26 Resin circuit molded product for mounting electronic components and method of manufacturing electronic components

Publications (1)

Publication Number Publication Date
JP2001068796A true JP2001068796A (en) 2001-03-16

Family

ID=17040921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23918099A Pending JP2001068796A (en) 1999-08-26 1999-08-26 Resin circuit molded product for mounting electronic components and method of manufacturing electronic components

Country Status (1)

Country Link
JP (1) JP2001068796A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7898075B2 (en) 2007-09-07 2011-03-01 Samsung Electronics Co., Ltd. Semiconductor package having resin substrate with recess and method of fabricating the same
JP2012248583A (en) * 2011-05-25 2012-12-13 Jjtech Co Ltd Manufacturing method of semiconductor device, semiconductor device and manufacturing method of intermediate plate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7898075B2 (en) 2007-09-07 2011-03-01 Samsung Electronics Co., Ltd. Semiconductor package having resin substrate with recess and method of fabricating the same
JP2012248583A (en) * 2011-05-25 2012-12-13 Jjtech Co Ltd Manufacturing method of semiconductor device, semiconductor device and manufacturing method of intermediate plate

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