JP2001058404A - Ink jet head and method of manufacturing ink jet head - Google Patents

Abstract

(57) Abstract: An ink jet head capable of preventing defective ejection due to ink bubbles and dust and performing normal printing, and capable of satisfactorily discharging the accumulated bubbles and dust, and manufacturing the same. Provide a way. A plurality of channel grooves for accommodating ink are formed in an actuator in an aligned state. Each of the manifold members 13 and 14 is connected to the inlet end of each of the channel grooves 31, extends in the direction in which the respective channel grooves 31 are aligned, and supplies ink supplied from the ink supply holes 22 to each of the inlet ends of each of the channel grooves 31. And an ink supply path 41 for supplying the ink to the supply path. At a predetermined interval from each inlet end of each channel groove 31, a plurality of substantially columnar filter members 43a and 43b are provided in two rows in parallel, and each filter member 43a is provided in a gap between each filter member 43b. The intervals between the semicircular ends of the filter members 43a and 43b are narrowly formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head, and more particularly, to an ink jet head used in an ink jet type printing apparatus for printing on a recording medium by ejecting ink, and a method of manufacturing the same.

[0002]

2. Description of the Related Art Among non-impact type printing apparatuses which have been replacing the conventional impact type printing apparatuses and are now expanding their markets, the principle is the simplest and the multi-gradation and colorization are possible. An easy-to-use printing apparatus is an ink jet printing apparatus.

[0003] In general, in an ink jet printing apparatus, an ink cartridge containing ink to be supplied to an ink jet head is replaceably provided. Fine air bubbles and dust may adhere to the inner wall surface of the ink flow path from the ink cartridge to the nozzle hole of the inkjet head, and the air bubbles and dust may cause poor ink ejection, resulting in poor print quality. It may decrease.

Therefore, it is known that a purge operation is performed in order to initially introduce ink from the ink cartridge to the ink jet head when the ink cartridge is replaced, and to recover and maintain the ink jetting function of the ink jet head. ing. In the purging operation, a large negative pressure is generated by a suction pump connected to the suction cap in a state where the suction cap is in contact with the nozzle surface of the ink jet head, and the ink inside the ink jet head is discharged together with bubbles and dust by a predetermined amount through the suction cap. The suction fills the ink in the ink flow path and discharges bubbles and dust in the ink flow path to the suction cap side.

[0005] By the way, in using an ink jet printer, when a user first installs an ink cartridge in a new printer, the ink flow path is filled with air. Also, if you replace the ink cartridge,
Air enters between the ink cartridge and the inkjet head. Also, if the user erroneously determines that ejection is impossible and performs a purge operation to recover the ejection function while the remaining amount of ink is low, the ink in the inkjet head runs out and the ink flow path is reduced. An air-filled condition results.

When a large negative pressure is applied at once to abruptly aspirate the ink when the purging operation is performed in a state where air is present in the ink flow path, the ink and the air are mixed and the ink is mixed into the ink jet head. Since the ink flows, the ink foams, and the ink in the ink jet head contains a large amount of air bubbles.

Particularly, when a mesh-shaped filter member is provided at a connection portion between the ink-jet head and the ink cartridge so that air bubbles and dust do not move to the ink-jet head side together with the ink, the ink is rapidly applied to the filter member. When passing, large bubbling occurs and a large amount of bubbles are easily generated. The bubbles gradually disappear while ink flows from the filter member to the nozzle holes of the ink jet head. However, as the volume of the ink flow path between the filter member and the nozzle holes increases, the bubbles remaining in the nozzle holes increase. Increases the amount, which adversely affects the initial introduction characteristics.

[0008] When minute bubbles are present in the ink flow path, especially when the ink jet head is not used in an environment where the ink tends to evaporate, such as high temperature and low humidity, the bubbles grow and become large. For this reason, when the ink jet head is reused, the enlarged air bubbles close the ink flow path, and the non-discharge of the ink (non-discharge after standing) tends to occur, which adversely affects the discharge characteristics after standing.

Therefore, it is desirable to reduce the volume of the ink flow path between the filter member and the nozzle hole. However, when the filter member is provided at the connection portion between the ink jet head and the ink cartridge, the ink is not required. It is difficult to reduce the volume of the channel. In order to reduce the volume of the ink flow path, it is conceivable to provide a filter member inside the inkjet head.
If the mesh-shaped filter member is mounted inside the ink jet head, the mounting work requires a great deal of work and may cause a mounting failure.

Therefore, as disclosed in JP-A-6-321506, an ejection port from which ink is ejected, an energy generation element for generating energy for ejecting ink from the ejection port, An ink jet head provided corresponding to the element and having a liquid flow path for supplying ink to the discharge port; (A) a structure in which a plurality of openings having a cross-sectional area smaller than the cross-sectional area of the discharge port form a curved path; and (b) a plurality of openings having projections, wherein the opening and the projections (C) a plurality of openings having a cross-sectional area smaller than the cross-sectional area of the discharge port are formed; and (D) a structure having a cross section in which a plurality of protrusions are provided in the width direction at intervals smaller than the width of the discharge port, (Hereinafter, these structures are collectively referred to as a filter structure) have been proposed.

According to the technique described in the publication, since the filter structure is provided, ink supplied from outside the ink jet head is discharged from the discharge port through the filter structure. At this time, if there is dust in the ink that is larger than the cross section or width of the ejection port, the dust is blocked by the filter structure, so that ink ejection failure due to the dust clogging in the vicinity of the ejection port is suppressed.

[0012]

According to the above publication, the filter structure of (a) has a substantially square cross section (see FIG. 14 in the publication), a rectangular cross section (see FIG. 15 in the publication), and a cross in cross section. A column (see FIG. 16 of the same publication) in which a plurality of pillars are evenly arranged is described. In addition, a description is given in which a plurality of pillars having a rectangular cross section are arranged substantially parallel to the aligned discharge ports.

[0013] In addition, the above-mentioned publication describes a filter structure having a needle-like projection and a columnar section having a rectangular cross section (see FIG. 18 of the publication) as the filter structure of (b). And a column having a plurality of needle-like projections (see FIG. 36 in the publication) are described as the filter structure (d). ing.

However, the filter structure is fine, and the shape of the column is substantially square in cross section, cross in cross section,
In the case of any of the concave cross-sections, the area of the bottom surface of the column is very small, so it is difficult to increase the fixing strength of the column to the ink flow path, and a large negative pressure is generated in the purge operation. When ink flows rapidly due to pressure, the column may fall down. When the pillar portion falls down, the cross-sectional shape of the ink flow path changes, so that the ink ejection characteristics may change and print unevenness may occur, or foreign matter that may lead to clogging or ejection bending may enter the ejection channel. .

Further, when a plurality of the pillar portions are arranged evenly, the flow resistance of the ink is increased, and the ink jetting characteristics are deteriorated, so that high-speed printing may be impossible. In particular, when a plurality of pillars having a rectangular cross section are arranged substantially in parallel to the aligned ejection ports, the flow resistance of the ink is significantly increased, so that the ink ejection characteristics are likely to be deteriorated.

When the needle-like projection is used, the area of the bottom surface of the needle-like projection is smaller than that of the pillar, so that the fixing strength of the needle-like projection to the ink flow path is increased. Is very difficult, and when the ink suddenly flows due to a large negative pressure in the purge operation, the needle-like projections may fall and the ejection characteristics of the ink may be changed.

Further, when ink is supplied from the ink supply source through the filter structure over the entire length of the row formed by the multiple ejection channels, bubbles and dust tend to stay at the end of the filter structure. When the air bubbles and dust trapped in the filter structure grow or the dust grows, the filter structure is partially closed, causing printing unevenness. These bubbles and dust are difficult to remove even by a powerful suction purge.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to prevent defective printing due to ink bubbles and dust and to perform normal printing, and to collect ink. It is an object of the present invention to provide an ink jet head capable of satisfactorily discharging bubbles and dust, and a method of manufacturing the same.

[0019]

Means for Solving the Problems and Effects of the Invention According to the first aspect of the present invention, there is provided an ink jet recording apparatus comprising: a plurality of channels accommodating ink formed in an aligned state; An actuator for driving the ink to be ejected as droplets from a nozzle hole provided on the outlet end side of the channel, and an actuator connected to the inlet end side of the plurality of channels and extending in the alignment direction of the plurality of channels. And a manifold formed with an ink supply path for supplying ink supplied from an ink supply source to each of the entrance ends of the plurality of channels, wherein each of the entrances of the plurality of channels is provided. Between the end and the wall of the ink supply path of the manifold opposed to the inlet end. At a predetermined interval, a plurality of substantially cylindrical filter members are provided, and the plurality of filter members are arranged in a plurality of rows in parallel with the alignment direction of the plurality of channels. The gist is that the semi-circular ends of the filter members of each row are arranged at predetermined intervals, and are arranged corresponding to the gaps between the filter members of the other row.

Therefore, in the present invention, the ink supplied from the ink supply source in the ink supply path is sent to the inlet ends of the plurality of channels through the plurality of filter members. Here, the plurality of filter members form a substantially elongated columnar shape,
A plurality of channels are provided at predetermined intervals with respect to the respective inlet ends. Each of the filter members is arranged in a plurality of rows in parallel with the alignment direction of the plurality of channels, and the filter members in one row are arranged corresponding to the gaps between the filter members in the other row. Are arranged at predetermined intervals.

Therefore, when bubbles and dust are contained in the ink, first, relatively large bubbles and dust are blocked by the filter members in a row near the wall surface of the ink supply path.
Thereafter, the minute bubbles and dust are blocked by the respective semicircular ends of the filter members in each row. That is, since each filter member functions as an ink filter,
By preventing bubbles and dust from being sent to the inlet end of each channel, it is possible to prevent defective ejection of ink due to clogging of bubbles and dust near the inlet end of each channel.

Further, since each filter member is provided at a predetermined interval with respect to each inlet end of the plurality of channels, by setting the predetermined interval to be narrow, the distance between each filter member and the nozzle hole is reduced. The volume of the ink flow path can be reduced, and the amount of bubbles generated when ink passes through each filter member remaining in the nozzle hole can be reduced, thereby improving the initial introduction characteristics and the non-discharge characteristics after leaving. Can be done.

Further, by forming each filter member integrally with the manifold, it is possible to reduce the number of components of the ink jet head, and it is not necessary to mount each filter member, thereby reducing the manufacturing cost. In addition to the above, it is also possible to prevent the mounting failure of each filter member from occurring.

Since each of the filter members has a substantially long cylindrical shape, the above publication (Japanese Unexamined Patent Publication No. Hei 6-321506) is used.
It is possible to increase the area of the bottom surface of each filter member and increase the fixing strength to the ink supply path as compared with the column having the above-mentioned shape (substantially square shape, cross-shaped cross-section, concave-shaped cross-section). Therefore, it is possible to prevent each filter member from falling down even when the ink suddenly flows due to a large negative pressure in the purge operation. Accordingly, since the cross-sectional shape of the ink supply path does not change due to the falling of each filter member, it is possible to prevent the occurrence of print unevenness due to the change of the ink ejection characteristics and to perform clear printing.

Each of the filter members is arranged in a plurality of rows parallel to the direction in which the plurality of channels are arranged. One of the filter members is arranged corresponding to a gap between the other row of filter members. The semicircular ends of each of the members are spaced apart from each other by a predetermined distance. Therefore, the intervals between the filter members in the same row are set wide enough to avoid an increase in the flow resistance of the ink, and the semicircular ends of the filter members in each row are arranged close to each other. By doing so, the predetermined interval can be made narrow enough to prevent the flow of minute bubbles and dust. Accordingly, it is possible to reduce the flow resistance of the ink passing through each filter member without lowering the function of each filter member as a filter. High speed printing can be realized.

Next, a second aspect of the present invention is directed to the first aspect.
In the ink jet head described in the above, the gist is that a row formed by the filter member on the side closest to the entrance ends of the plurality of channels is arranged corresponding to a row formed by the entrance ends. Therefore, according to the present invention, the ink that has passed through each filter member in the row closest to each of the inlet ends of the plurality of channels flows smoothly toward each of the inlet ends of the channel, thereby avoiding an increase in the flow resistance of the ink. It is possible to more reliably obtain the operation and effect of the invention described in claim 1.

Next, the invention according to claim 3 is based on claim 1
Alternatively, in the ink jet head according to claim 2, the gist is that the filter member is not disposed near the inlet ends of the channels at both ends in the alignment direction of the plurality of channels. Therefore, according to the present invention, the flow resistance of the ink near the inlet ends of the channels at both ends in the alignment direction of the plurality of channels is reduced, so that each of the channels at the both ends in the alignment direction is subjected to the purge operation and the flushing operation. Bubbles and dust can be efficiently discharged from the entrance end, so that printing unevenness can be prevented and clear printing can be performed.

Next, according to a fourth aspect of the present invention, a plurality of channels accommodating ink are formed in an aligned state, and the ink in the channel is made to pass through a nozzle hole provided at the outlet end side of the channel. An actuator that is driven to eject as droplets, is connected to an inlet end of the plurality of channels, extends in an alignment direction of the plurality of channels, and transmits the ink supplied from an ink supply source to the plurality of channels. An ink supply path for supplying ink to each of the inlet ends of the plurality of channels, and an ink supply path of the manifold opposed to the inlet end. The flow path resistance member is provided between the wall and the wall except for the channel at the end in the alignment direction of the plurality of channels. And effect.

Therefore, according to the present invention, bubbles or dust trapped in the ink supply path or caught by the flow path resistance member can be effectively removed from the channel at the end in the alignment direction by the purging operation and the flushing operation. It is possible to discharge the paper, thereby preventing printing unevenness and performing clear printing.

Next, the invention according to claim 5 is directed to claim 4
The gist of the invention is that the flow path resistance member is a filter. Therefore,
According to the present invention, bubbles and dust that block the inlet end of the channel can be captured by the filter, and defective ejection of ink can be prevented. Further, as described above, the bubbles and dust can be removed.
By the purging operation and the flushing operation, it is possible to effectively discharge from the channel at the end in the alignment direction.

Next, the invention according to claim 6 is based on claim 1
6. In the inkjet head according to any one of Items 5 to 5, the plurality of channels are formed in a plurality of rows and are aligned in each row, and the ink supply path is formed in each row of the plurality of channels. It is the gist that they are formed along each.

As in the present invention, a plurality of channels are formed in a plurality of rows and aligned in each row, and an ink supply path is formed along each row of the plurality of channels. For example, multicolor printing using different inks for each row can be realized. In this case, if the rows are close to each other, the cross-sectional area of the ink supply path cannot be so large, so that bubbles and dust cannot be retained in the ink supply path for a long time, and the bubbles and dust Since the ink is easily drawn into the channel and stays in the channel, poor ink ejection is likely to occur.
Therefore, it is important that bubbles and dust remaining in the ink supply path can be effectively removed as in the first to fifth aspects of the present invention.

Next, the invention according to claim 7 is based on claim 1
7. The method for manufacturing an inkjet head according to any one of claims 1 to 6, wherein a step of placing a resist material having a thickness corresponding to a depth of the ink supply path on a substrate; Irradiating a parallel light beam to a path or a position corresponding to a portion excluding the ink supply path; removing the portion of the resist material irradiated with the light beam or a portion not irradiated with the light beam; A mold material is adhered on the substrate including the material, and thereafter, a step of forming a mold by removing the resist material and the substrate, and injection molding in which a forming material of the manifold member is poured into the mold. And a step of preparing the manifold member.

Therefore, according to the present invention, by irradiating a parallel light beam to the resist material, a shape corresponding to the ink supply path or a portion excluding the ink supply path is accurately formed in the depth direction. Based on this, it is possible to form a precise mold. By using the precise mold, a manifold member having a sufficiently deep ink supply path and a portion excluding the ink supply path can be formed with high accuracy. In other words, with regard to the filter member according to the first to third aspects of the invention or the flow path resistance member according to the fourth and fifth aspects, the member can be formed with high precision, and the member can be integrally formed with the manifold member. .

The resist material may be of a type that removes a portion irradiated with light in the next step or a type of removing a portion that is not irradiated in the next step. Next, according to an eighth aspect of the present invention, in the method of manufacturing an ink jet head according to the seventh aspect, the step of irradiating the light beam corresponds to a shape of the ink supply path or a portion excluding the ink supply path. The gist of the invention is to irradiate a light beam through a mask having a light transmission window.

Therefore, according to the present invention, since the shape of the ink supply path or the portion excluding the ink supply path is determined by the shape of the light transmission window, the ink supply path or the ink supply path can be obtained simply by appropriately setting the shape of the transmission window. The shape of the portion excluding the ink supply path can be freely set, and it is easy to accurately create a fine shape.

Next, a ninth aspect of the present invention is directed to the seventh aspect.
Alternatively, in the method for manufacturing an inkjet head according to claim 8, the gist is that the light beam is synchrotron radiation light. Therefore, according to the present invention, since synchrotron radiation is a parallel ray of X-rays such as charged particle storage ring radiation, even if the resist material is thick, it is exposed in parallel in the thickness direction. In addition, the ink supply path can be formed to a sufficient depth, and the portion excluding the ink supply path can be accurately formed in a desired shape.

According to a tenth aspect of the present invention, in the method of manufacturing an ink jet head according to any one of the seventh to ninth aspects, at least the top surface of the substrate on which the resist material is placed has conductivity. The step of forming the molding die has a gist of electroforming a mold made of metal on the surface of the substrate having conductivity.

The eleventh aspect of the present invention relates to the seventh to ninth aspects.
The method of manufacturing an inkjet head according to any one of claims 1 to 3, further comprising, after the step of removing the resist material, a step of forming a conductive layer on the remaining resist material and the substrate. The gist of the step is to electrocast a mold made of metal on the conductive layer.

Therefore, according to the above two inventions, it is possible to easily form a mold, and it is possible to more reliably obtain the functions and effects of the invention according to any one of claims 7 to 9. In the embodiments of the invention described below, the "flow path resistance member" described in the claims or the means for solving the problem corresponds to the filter members 43a and 43b, and the "ink supply source" is also the same. Ink cartridge 50
Equivalent to 9.

[0041]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view illustrating a schematic configuration of a color inkjet printer 1 including an inkjet head 600 according to the present embodiment.

Guide rod 501 and guide member 50
2 is fixed to the printer frame 503. The carriage 504 includes a guide rod 501 and a guide member 5.
02 are slidably supported on the belt 505, fixed to a belt 505, and driven by a carriage motor 506 to reciprocate. The belt 505 is wound around pulleys 507 disposed near both ends of the elongated guide rod 501 and the guide member 502. One pulley 507 is connected to the drive shaft of the carriage motor 506.

The carriage 504 has a head unit 5 on which two sets of ink jet heads 600 are arranged.
08 is attached. Each inkjet head 6
A drive control circuit (not shown) described later is connected to 00. At the rear of each ink jet head 600, an ink cartridge 509 for supplying ink to each nozzle hole (not shown) described later is detachably mounted.

At a position facing the ink jet head 600, a transport mechanism LF for transporting the printing paper P as a recording medium is provided. The transport mechanism LF transports the printing paper P by rotation of a platen roller 511 that is rotated by driving a transport motor 510. Platen roller 51
One roller shaft 512 is rotatably supported by the printer frame 503.

As described above, in the color ink jet printer 1, the reciprocating movement of the carriage 504 and the conveyance of the printing paper P cooperate to form the ink jet head 600.
, A desired printing is performed by ejecting ink droplets to a desired area on the printing paper P. The color inkjet printer 1 has four colors (cyan, magenta, yellow, and black).
In order to perform color printing using the color ink of the above, four color inks are stored in the ink cartridge 509. Then, as described later, the ink jet head 6
Since 00 is configured to eject two color inks independently, two sets of inkjet heads 600 are provided for four color inks.

The color inkjet printer 1 is provided with a maintenance / recovery mechanism RM for maintaining / recovering the ink jetting operation of the inkjet head 600.
The maintenance / recovery mechanism RM includes a purge device 513 and a flushing ink absorbing member 516.

The purging device 513 includes a platen roller 51
On one side, the ink jet head 600 is disposed to face the inkjet head 600 in a reset state. Then, the purge device 513 generates a large negative pressure by the suction pump 515 connected to the suction cap 514 in a state where the suction cap 514 is in contact with the nozzle surface of the ink jet head 600, and the inside of the ink jet head 600 is moved through the suction cap 514. A purge operation is performed to suck a predetermined amount of the ink together with bubbles and dust. By this purging operation, it is possible to eliminate a jetting failure caused by bubbles or dust remaining inside the ink jet head 600, and it is possible to recover a good jetting state.

The flushing ink absorbing member 516 includes:
The inkjet head 6 which is made of a porous material having excellent ink absorbability and is in a reset state on the side of the platen roller 511 opposite to the purge device 513.
00 and are disposed opposite to each other. Then, prior to ejecting ink from the inkjet head 600 to the printing paper P, a flushing operation of ejecting ink from the inkjet head 600 to the flushing ink absorbing member 516 is performed. By this flushing operation, bubbles and dust remaining inside the ink jet head 600 are removed together with the ink by the flushing ink absorbing member 5.
Since it is possible to discharge the fuel to the fuel injection port 16, it is possible to eliminate poor injection and recover a good injection state in combination with the purge operation.

FIG. 2 is a perspective view showing the ink jet head 600. The ink jet head 600 includes substrates 11 and 12 having piezoelectric elements, a manifold member 13,
14, a plate member 15, and a nozzle plate 16.

Plate-shaped rectangular substrates 11 and 12 are attached and fixed to both front sides of the plate-shaped rectangular plate member 15, and plate-shaped rectangular manifold members 13 and 14 are attached to both rear sides of the plate member 15. Fixed. That is,
The plate member 15 is extended to the rear end side from each of the substrates 11 and 12, and a manifold is formed at each corner formed by both side surfaces of the extended portion of the plate member 15 and the rear end surface of each of the substrates 11 and 12. The front ends of the members 13 and 14 are connected. The actuators 24 are constituted by the substrates 11, 12, the plate member 15, and the nozzle plate 16.

Each of the substrates 11 and 12 and the plate member 15
Is flat, and a flat nozzle plate 16 is attached and fixed so as to close the front end surface. Each connection portion between each of the substrates 11, 12 and each of the manifold members 13, 14 and the plate member 15 (each of the substrates 11, 1
2, a rear end portion, an outer peripheral portion of each of the manifold members 13 and 14,
A sealing material 17 made of an appropriate material (for example, silicon rubber or the like) is applied to the rear portion of the plate member 15, and the manifold members 13 and 14 are attached to the substrate 1 by the sealing material 17.
In addition to being fixed to the plate members 15, 12, the ink is prevented from leaking from the manifold members 13, 14.

A plurality of lead-out grooves 21 connected to and connected to a dummy groove (not shown) to be described later are provided at the front end of each of the substrates 11 and 12.
Are formed. Further, each of the manifold members 13, 1
4, a circular ink supply hole 22 is formed. FIG. 3 shows a state in which the sealing material 1
It is a perspective view showing the state where 7 was removed.

The front end of each of the manifold members 13 and 14 has a plurality of introduction grooves 2 connected and connected to a dummy groove to be described later.
3 are formed. In addition, as shown in FIG. 2, each introduction groove 23 is sealed with a sealing material 17. FIG. 4 is a partial vertical cross-sectional view of the inkjet head 600, and is a cross-sectional view taken along line YY in FIG.

FIG. 5 is a perspective view showing a state where a part of each of the substrates 11 and 12 is viewed from the front end side. FIG. 6 is a cross-sectional view of the inkjet head 600,
It is sectional drawing which follows the X-ray.

FIG. 7 is an exploded perspective view showing a state where the manifold members 13 and 14 are removed from the ink jet head 600. FIG. 8 is a perspective view showing a state where a part of the manifold member 14 is viewed from the back surface (the surface connected to the plate member 15).

FIG. 9 is a plan view showing the back surface side of a part of the manifold member 14 and the substrate 12. FIG.
FIG. 4 is a plan view showing a back surface side of the manifold member 13. FIG. 11 is a plan view showing the back side of the manifold member 14.

FIGS. 4 to 9 show the ink jet head 6.
FIG. 9 is a schematic diagram for explaining the configuration of the ink jet head 600, and there are places where dimensions of respective members of the ink jet head 600 do not match in each drawing, in order to make the configuration of each member easier to understand. Since FIGS. 10 and 11 show actual manifold members 13 and 14, FIG.
9 to FIG. 9, there are places where the dimensions and shapes of the members do not match.

As shown in FIGS. 4 and 5, each substrate 1
On the back surfaces (the surfaces connected to the plate members 15) of the first and second 12, channel grooves 31 and dummy grooves 32 having a linear groove shape are alternately arranged in parallel to the cross-sectional direction of the ink jet head 600 shown in FIG. A plurality is formed in a state. The open top of each channel groove 31 and each dummy groove 32 is covered by a plate member 15, and the ejection groove of the actuator 24 is formed by the channel groove 31 covered by the plate member 15. The dummy channel 31 of the actuator 24 is formed by the dummy groove 31 covered by.

Each channel groove 31 and each dummy groove 32
Are formed from a shear mode type upper wall 33 and a lower wall 34 made of a suitable piezoelectric material (for example, piezoelectric ceramics) polarized in the opposite direction. That is, the upper wall 33 is connected to the plate member 15 and in the direction of the plate member 15 (the direction of the arrow A).
Is polarized. Further, the lower wall 34 is provided with the respective grooves 31 and 3.
2 and is polarized in the direction opposite to the polarization direction of the upper wall 33 (the direction of arrow B).

Electrodes 35 are formed on the inner wall surface including the bottom of each channel groove 31, and electrodes 36 are formed on both side walls except the bottom of each dummy groove 32. The electrodes 35 provided in each channel groove 31 are grounded, and the electrodes 36 provided in each dummy groove 32 are connected to a drive control circuit 37, respectively. The drive control circuit 37 generates a drive signal and applies it to each electrode 36.

As shown in FIGS. 4 and 6, a nozzle hole 16a is formed at the outlet end of each channel groove 31 in the nozzle plate 16. As shown in FIG. 6, by connecting each of the substrates 11 and 12 to both surfaces of the plate member 15, a plurality of channel grooves 31 formed in each of the substrates 11 and 12 are aligned in two rows. The channels are arranged, and two independent channel groups are configured by the channel grooves 31 in each row. Further, each channel groove 31 and each dummy groove 32 are formed in the entire width direction of each substrate 11, 12, and both ends of each channel groove 31 and each dummy groove 32 are opened from both end surfaces of each substrate 11, 12. ing. The front end of each dummy groove 32 is connected to and communicated with each lead-out groove 21 of each of the substrates 11 and 12, and the rear end of each dummy groove 32 is connected and connected to each of the introduction grooves 23 of each of the manifold members 13 and 14, Each introduction groove 23 has a sealing material 17.
Is filled. The sealing material 17 in the introduction groove 23 is
This is to prevent ink supplied to the channel groove 31 from an ink supply path 41 described later from leaking into the dummy groove 32. In FIG. 6, the sealing material 17 is also provided in the dummy groove 32.
When the liquid sealing material placed outside the manifold member is filled into the introduction groove 23 by vacuum suction from the outlet groove 21 side, the dummy groove 3 is filled.
It has also flowed into 2 and is not really necessary.

As shown in FIGS. 6 to 11, each of the manifold members 13 and 14 has
The ink supply path 41 is formed of a recess formed at a constant depth in the thickness direction of the ink supply path. Each manifold member 1
An ink supply hole 22 is formed at the start end 41b of each of the ink supply paths 41, and an opening forming member 42, a filter member 43, and a rib-like projection 44 are formed in each ink supply path 41. The ink supply path 41 of each of the manifold members 13 and 14 is formed in a symmetrical structure with respect to the plate member 15 including the members 42 to 44 therein.

As shown in FIG. 7, FIG. 10, and FIG. 11, the planar shape of the ink supply passage 41 is changed from the start end 41b (the lower part of the ink supply passage 41) where the ink supply hole 22 is formed to the final end 41a ( (The upper part of the ink supply path 41), and the width is gradually narrowed.
The twelve channel grooves 31 extend in the alignment direction. One side of the ink supply path 41 is connected to each substrate 1.
Opening is common to the entrance ends of the channel grooves 31 of 1 and 12, and a plurality of opening forming members 42 are provided in the opening.

As shown in FIGS. 7 to 11, each of the opening forming members 42 has a substantially semi-spindle-shaped cross section, and openings 45 are respectively formed by gaps between the opening forming members 42. . Then, each opening forming member 42 is connected to each substrate 11,
12, each opening forming member 42 is arranged to face each dummy groove 32, and each opening 45 is arranged to face each channel groove 31. Is connected and connected. Introducing grooves 23 are formed on the end surfaces of the opening forming members 42 on the substrates 11 and 12 side, respectively.
One end of the opening opens outside each of the manifold members 13 and 14,
The other end of each introduction groove 23 is connected and connected to the rear end of each dummy groove 32.

As shown in FIGS. 7 to 11, in each of the manifold members 13 and 14, each opening 45 (the entrance end of each channel groove 31) between each opening forming member 42 faces each opening 45. Each of the filter members 43a and 43b having a long columnar shape is formed between the ink supply passage 41 and a wall surface 41c of the ink supply passage 41. The filter members 43a and 43b are arranged in two rows in parallel with the alignment direction of the openings 45, and the filter members 43a in the row closer to the opening forming members 42 correspond to the opening forming members 42. Each of the filter members 43b arranged in a row near the wall surface 41c of the ink supply path 41
Are arranged corresponding to the respective openings 45. That is,
Each filter member 43a is arranged corresponding to a gap between each filter member 43b. And each filter member 4
3a is arranged at a fixed interval t from the tip of each opening forming member 42. Further, each of the filter members 43a, 43
The semicircular ends of 3b are arranged close to each other, and the gap between the ends is formed narrow so as to prevent the flow of minute bubbles and dust. The filter members 43a and 43b are formed perpendicular to the bottom surface of the ink supply path 41 and the plate member 15.

Each of the filter members 43a and 43b has two openings 45a and 45b (entrance ends of the two channel grooves 31) located at the final end 41a of the ink supply path 41.
And the portion corresponding to the opening 45c (the entrance end of the channel groove 31) located at the start end 41b of the ink supply path 41 is not provided. That is, the filter members 43a and 43b are not arranged near the respective inlet ends at both ends in the alignment direction of the channel grooves 31. The opening forming members 42a and 42b adjacent to the openings 45b and 45c respectively extend and are connected to the filter member 43a.

As shown in FIGS. 7, 10 and 11, in each of the manifold members 13 and 14, each opening 45 between the opening forming members 42 (the entrance end of each channel groove 31).
And the wall surface 4 of the ink supply path 41 facing each opening 45
1c, the alignment direction ends of the openings 45 from the ink supply holes 22 (the alignment direction ends of the plurality of channel grooves 31).
The rib-shaped projections 44a to 44h each forming a thin plate shape for guiding the ink extend toward. That is, among the plurality of rib-like protrusions 44a to 44h, the rib-like protrusions 44g, 44g
4h is arranged between the ink supply hole 22 and each of the openings 45, and the other rib-like projections are spaced from the ink supply hole 22 toward the ends of the respective openings 45 in the alignment direction. The rib-like projections 44b, 4b in one row are arranged in two rows.
4d and 44f are rib-shaped projections 44a and 44 in the other row.
c, 44e, 44g, and 44h. Each of the rib-like projections 44a to 44h is located at an interval from the wall surface 41c of the ink supply path 41, and forms a flow path between the two from the ink supply hole 22 to the final end of the ink supply path 41. . The rib-shaped protrusion 44a near the final end 41a of the ink supply path 41 guides the flow of ink to the openings 45a and 45b at the final end, and is connected to the opening adjacent to the start end of the opening. Is also located to guide the ink. The rib-shaped protrusion 44h near the start end 41b is also located so as not to hinder the flow of ink from the ink supply hole 22 to the opening 45c at the start end. The rib-shaped projections 44 a to 44 h are formed perpendicular to the bottom surface of the ink supply path 41 and the plate member 15.

The tops of each opening forming member 42, each filter member 43, and each rib-shaped projection 44 are connected and fixed to the plate member 15 in a liquid-tight manner. Each of the manifold members 13 and 14 has an ink supply path 41, an opening forming member 42, a filter member 43, and a rib-like projection 44 integrally formed by injection molding of a synthetic resin material.

By the way, the ink jet head 600
The carriage 5 is positioned horizontally and horizontally as shown in FIG.
In this state, the ink supply holes 22 of the respective manifold members 13 and 14 are arranged on the lower side. In addition, the ink jet head 600 has a structure in which the nozzle plate 16 is directed downward and each of the manifold members 1
The color ink jet printer 1 may be arranged at an angle of about 45 ° with the upper and lower parts 3, 14 facing upward. In addition, the ink jet head 600 includes the nozzle plate 1
The color ink jet printer 1 may be arranged vertically downward with respect to the main body of the color inkjet printer 1 with the printer 6 facing downward.

Next, the operation and effect of this embodiment configured as described above will be described. The color inks of the respective colors stored in the ink cartridge 509 shown in FIG.
2 are independently supplied to each of the manifold members 13, 14
The ink supply hole 22 → the ink supply path 41 of each of the manifold members 13 and 14 → the opening 45 of each of the manifold members 13 and 14 → the channel groove 31 of each of the substrates 11 and 12 Supplied.

Here, each channel groove 31 formed in each of the substrates 11 and 12 is completely separated by the extension of the plate member 15. Therefore, each manifold member 1
When connecting the substrates 3 and 14 to the rear end surfaces of the substrates 11 and 12, respectively, even if it is a rough work, the channel grooves 31 between the substrates 11 and 12, which are the ink flow paths of different colors, and the manifold members 13 , 14 are not connected, and inks of different colors are not mixed. Therefore, it is possible to prevent ink from being mixed between two independent groups of channels formed by the respective channel grooves 31 formed on the substrates 11 and 12, and to perform reliable color separation. .

Then, as shown in FIG. 4, in a state where the ink is supplied into each channel groove 31, drive control is performed on the electrode 36 on the channel groove 31a side of the two dummy grooves 32 sandwiching an arbitrary channel groove 31a. When a drive signal of a predetermined voltage E (V) is applied from the circuit 37, the side walls (the upper wall 33 and the lower wall 34) of the channel groove 31a sandwiched between the respective dummy grooves 32 have the directions of arrows C and D, respectively. An electric field is generated, and the thickness of the side wall portion undergoes a piezoelectric thickness-shear deformation in a direction to increase the volume of the channel groove 31a. Then, the pressure in the channel groove 31a including the vicinity of the nozzle hole 16a decreases.

Here, when the application of the drive signal from the drive control circuit 37 is maintained for the one-way propagation time T of the pressure wave in the channel groove 31a, the ink is transferred from the ink cartridge 509 to the channel groove 31a by the above-mentioned path during that time. Is supplied. The one-way propagation time T is the time during which the pressure wave of the ink in the channel groove 31 propagates in one direction in the longitudinal direction of the channel groove 31. The length L of the channel groove 31 shown in FIG. Is calculated by the equation T = L / S based on the sound speed S in the ink.

According to the pressure wave propagation theory, when the one-way propagation time T elapses from the application of the drive signal, the channel groove 3
The pressure in 1a reverses and turns to a positive pressure, but the voltage of the drive signal is returned to 0 (V) at this timing. Then, the side wall of the channel groove 31a returns to the state before deformation, and pressure is applied to the ink. As a result, the pressure that has turned positive and the pressure generated when the side wall portion returns to the state before deformation are added, and a relatively high pressure is generated near the nozzle hole 16a in the channel groove 31a, and the nozzle hole Ink droplets are ejected from 16a.

Here, if a material having flexibility (for example, silicon rubber or the like) is used as the sealing material 17 filled in the dummy grooves 32, the dummy grooves 32 may be filled with the sealing material 17. However, since the side wall portion can be freely deformed, a change in the volume of the channel groove 31a at the time of ink ejection is not hindered.

In this embodiment, the openings 45a to 45a of the start end 41b and the end 41a of the ink flow path 41 are provided.
Each injection channel corresponding to 5c is provided exclusively for the flushing operation. That is, during the printing operation on the printing paper, the carriage 504 is moved to the position facing the flushing ink absorbing member 516 at regular intervals, and
By causing ink to be ejected from the flushing ejection channel, the end portions 41 a and 4
Ink that tends to stagnate near 1b can be discharged. Further, thereby, an ink flow is generated between the rib-shaped projections 44a to 44h and the wall surface of the ink supply path 41,
Air bubbles and dust trapped in the vicinity of the final end portion 41a and trapped by the filter member 43 can also be discharged. In addition, since the flow of the ink does not receive the resistance of the filter member 43, the flow velocity can be increased, and the effect of discharging bubbles is high.

In addition to the above-mentioned flushing operation, performing a flushing operation for driving all ejection channels as is well known is effective in preventing the ink from thickening in the non-ejection channels. Further, when the ink is suctioned from all the ejection channels by operating the purge device 513, a high flow velocity is obtained along the wall surface of the ink supply path in the same manner as described above. Bubbles and dust caught by the member 43 can be effectively discharged. Opening 45a at the end
The suction through each of the openings 45 except for the holes 45 to 45c also passes between the plurality of rib-shaped protrusions 44a to 44h.
The ink flow can be generated in the entire ink supply path 41 together with the suction through a through 45c. Therefore, in the initial introduction after the replacement of the ink cartridge or in the purge operation at regular intervals, the ink introduction property is extremely good.

Even during a normal printing operation, a plurality of rib-like projections 44a are formed by the operation of the ejection channel corresponding to each of the openings 45 except for the openings 45a to 45c at the ends.
By supplying the ink through the interval of ~ 44h, a high flow velocity is obtained along the wall surface of the ink supply path, and the minute bubbles are easily discharged together with the ink ejection. Therefore, it is less likely that the bubbles grow due to stagnation.

Conventionally, it has been attempted to reduce the cross-sectional area of the ink supply path in order to improve the ink introduction property and the air bubble discharge property. However, in such a case, there is a problem that crosstalk occurs. Was. However, by configuring as described above, it is possible to sufficiently secure the cross-sectional area of the ink supply path while improving the ink introduction property and the bubble discharge property,
As a result, crosstalk was able to be improved.

In the above embodiment, the ink flow path 4
Although the ejection channels corresponding to the openings 45a to 45c of the first end portions 41a and 41b are dedicated to the flushing operation, the same operation and effect can be obtained by using all the ejection channels for the printing operation. That is, in this case,
(1) With the above configuration, the openings 45a to 45c at the ends are provided.
May be used for printing,
(2) The filter member 43 is connected to the openings 45a to 45c at the ends.
Or all filter members 4
Alternatively, ink may be supplied to all ejection channels with the same resistance.

In the case of (1), as described above, a high-speed ink flow is generated between the rib-shaped projections 44a to 44h and the wall surface of the ink supply path 41 by ink ejection (including flushing) or suction purge. And the final end 4
Air bubbles and dust trapped in the vicinity of 1a or captured by the filter member 43 can be effectively discharged. (2)
In this case, even if the pressure acting on all the openings 45 (including 45a to 45c) is the same,
Due to the presence of 44h, the flow of ink toward the final end 41a is ensured between the rib-shaped protrusions 44a to 44h and the wall surface of the ink supply path 41, and the ink stays near the final end 41a or is caught by the filter member 43. The generated bubbles and dust can be effectively discharged.

As described above, the ink supplied in the ink supply path 41 passes through the filter members 43a and 43b and is close to each opening 45 between the opening forming members 42 (the inlet of each channel groove 31). To the end). Therefore, when bubbles and dust are contained in the ink, first, relatively large bubbles and dust are blocked by each filter member 43b,
Thereafter, minute bubbles and dust are removed from each filter member 43a,
Each of the semicircular ends of 43b is blocked.
That is, since each of the filter members 43a and 43b functions as an ink filter, it is possible to prevent bubbles and dust from being sent to each of the openings 45, and to eject ink due to the bubbles and dust being clogged in the vicinity of each of the openings 45. Defects can be prevented.

Further, by setting the distance t between the tip end of each opening forming member 42 and the filter member 43a to be small, each filter member 43a, 43b and each nozzle hole 16a
Can be reduced, and the amount of bubbles generated when ink passes through each of the filter members 43a and 43b remaining in each of the nozzle holes 16a can be reduced. The characteristics and the discharge characteristics after standing can be improved.

Further, by forming each of the filter members 43a and 43b integrally with each of the manifold members 13 and 14, it is possible to reduce the number of components of the ink jet head 600 and to make each of the filter members 43a and 4b.
Since the mounting operation of the filter member 43b is not required, the manufacturing cost can be reduced, and each filter member 43
It is also possible to prevent the mounting failure of the a and 43b from occurring.

Since each of the filter members 43a and 43b has a substantially long cylindrical shape, the above-mentioned publication (Japanese Unexamined Patent Application Publication No.
12506), the area of the bottom surface of each of the filter members 43a and 43b is increased to increase the fixing strength to the ink supply path 41, as compared with the column portion having the above-mentioned shape (substantially square shape, cross shape, concave shape). Since the height can be increased, it is possible to prevent the filter members 43a and 43b from falling down even when the ink suddenly flows due to a large negative pressure in the purge operation. Therefore, since the filter members 43a and 43b do not fall and the cross-sectional shape of the ink supply path 41 does not change, it is possible to prevent printing unevenness due to a change in ink ejection characteristics and perform normal printing. it can.

Further, the distance between the filter members 43a and the distance between the filter members 43b are made wide enough to avoid an increase in the flow resistance of the ink. Can be made narrow enough to prevent the flow of minute bubbles and dust. Therefore, the flow resistance of the ink passing through each of the filter members 43a and 43b can be reduced without lowering the function of each of the filter members 43a and 43b as a filter. Thus, high-speed printing can be realized by preventing deterioration of the ejection characteristics due to the above.

Since the rows formed by the filter members 43a are arranged corresponding to the rows formed by the openings 45, the ink that has passed through each filter member 43a flows smoothly toward each opening 45. An increase in the flow resistance of the ink can be avoided. As described in detail above, according to the present embodiment, each of the filter members 43a, 43
3b, the above publication (Japanese Unexamined Patent Publication No. Hei 6-31
No. 2506) can be solved, and defective printing of ink from the inkjet head 600 can be prevented, and normal printing can be performed.

Next, a method of forming each of the manifold members 13 and 14 will be described with reference to FIGS. First, as shown in FIG. 12, a conductive layer 101 is formed on an upper surface of a substrate 100 by a plating method, a PVD method, or the like.
The conductive layer 101 serves as an electrode for electroforming in a later step. Note that the conductive layer 101 may be omitted by forming the substrate 101 using a conductive material.

The resist material 10 is formed on the upper surface of the conductive layer 101.
2 and baked to form a resist material 102 on the conductive layer 101.
Is adhered by heat welding. This resist material 102
A positive or negative resist is formed to a thickness substantially corresponding to the depth of each of the manifold members 13 and 14 in the ink supply path 41 in the plate thickness direction.

Then, the resist material 102 is irradiated with parallel light rays 105 through the mask 103. Mask 103
Has a light transmission window corresponding to the planar shape of the ink supply path 41 at a position corresponding to the ink supply path 41, and a portion excluding the ink supply path 41 (the opening forming member 42, the filter member 43, the rib-shaped portion). The projection has a light-impermeable portion 104 corresponding to the planar shape of the projection 44). In this case, the exposed portion of the resist material 102 is removed in a later step. Conversely, when the unexposed portion of the resist material 102 is removed, the opaque portion 104 is The transmission window is provided corresponding to the planar shape of the opening forming member 42, the filter member 43, and the rib-like projection 44.

Here, it is desirable to use synchrotron radiation as the light beam 105 and to use an acrylic material as the resist material 102. Synchrotron radiation is a parallel ray of X-rays such as charged particle storage ring radiation. For this reason, even if the coating film of the resist material 102 is thick, it is exposed in parallel with the thickness direction as shown by a broken line 102a in FIG. 12, and as a result, as shown in FIG. The exposed portion 102c is formed with high accuracy. Thus, the ink supply path 41 is formed at a sufficient depth, and the opening forming member 42 and the filter member 4 are formed.
3. The rib-like projections 44 can be formed in a desired shape.

Thereafter, when development is performed with a developing solution, the exposed portion 102b is dissolved in the developing solution and removed, and only the unexposed portion 102c remains on the substrate 100 as shown in FIG.
The unexposed portion 102c has a shape corresponding to the opening forming member 42, the filter member 43, and the rib-shaped protrusion 44. Then, as shown in FIG. 15, using the conductive layer 101 on the substrate 100 as an electrode,
A metal material to be a forming die 106 is applied onto the substrate 100 and the unexposed portion 102c by electroforming to be deposited thereon. Here, the metal that forms the mold 106 is formed to a height that completely covers at least the unexposed portion 102c of the resist. Subsequently, when the substrate 100, the conductive layer 101, and the unexposed portion 102c are removed, as shown in FIG.
06 is formed. By forming the mold 106 in this manner, a precise mold 106 having a desired shape can be easily obtained.

Note that, without forming the conductive layer 101 on the substrate 100 in advance, the resist material 102 is developed to form a predetermined pattern, and then a conductive layer is formed on the substrate 100 and the resist material 102 by vapor deposition or the like. Electroforming can also be performed as described above using the conductive layer as an electrode.

Then, as shown in FIG.
As shown in FIG. 18, the ink supply path 41 and the opening forming member are mounted on the molding die main body 107 by injection molding in which a synthetic resin material 108 is poured into a gap between the molding die 106 and the molding die main body 107. 42 (not shown), a filter member 43, and a rib-like projection 44 (not shown) are integrally formed, and each of the manifold members 13 and 14 made of a synthetic resin material 108 is formed.
To form Here, the opening forming member 42, the filter member 43, and the rib-shaped protrusion 44 are formed by the unexposed portion 12c, and the ink supply path 41 is formed by the exposed portion 12b.

As described above, when the manifold members 13 and 14 are formed by the method shown in FIGS. 12 to 18, by irradiating the resist material 102 with parallel rays, the ink supply path 41 and the opening forming member 42 are formed. , Filter member 4
3. The shape corresponding to the rib-like protrusion 44 is formed with high precision in the depth direction, and the precise mold 106 can be formed based on the shape. Then, the precise mold 106
Is used, the ink supply paths 41,
Opening forming member 42, filter member 43, rib-shaped protrusion 4
4 can be accurately formed on the manifold members 13 and 14. Further, since the shapes of the ink supply path 41, the opening forming member 42, the filter member 43, and the rib-like projections 44 are determined by the shapes of the opaque portion 104 and the transparent window of the mask 103, the shapes of the opaque portion 104 and the transparent window are changed. The shape of each of the members 41 to 44 can be freely set only by appropriately setting, and it is easy to form the fine filter members 43 and the gaps between them in an accurate shape.

Further, in order to arrange the injection channels at a high density, the width of the channel is reduced and the depth is increased.
When a predetermined height of the side wall is required to obtain the ink ejection pressure as in the actuator according to the present embodiment,
Correspondingly, the opening forming member 42 and the filter member 43
And forming the filter member 44 at a sufficient height,
The above manufacturing method is suitable.

The present invention is not limited to the above embodiment, but may be modified as described below. Even in such a case, the same or higher operation and effect as in the above embodiment can be obtained. . (1) The above embodiment is embodied in the ink jet head 600 having the piezoelectric elements on the respective substrates 11 and 12, but the ink jet head of another method (for example, a thermal jet method using a heating element) is used. May be applied.

(2) In the above embodiment, the two substrates 1
Channel grooves 31 are formed in each of the ink jet heads 1 and 12, and the channel grooves 31 form two rows.
However, one of the substrates 11 and 12 may be omitted and the channel grooves 31 may be formed in only one row, and the channel grooves may be formed in three or more rows using three or more substrates. It may be.

Here, as in the above embodiment, each substrate 1
In the case where 31 rows of channel grooves are formed in each of the channels 1 and 12 and both rows are arranged close to each other, and the ink supply path 41 is formed along each row of the plurality of channel grooves 31, Since the cross-sectional area of the supply path 41 cannot be so large, bubbles and dust cannot be retained in the ink supply path 41 for a long period of time, and the bubbles and dust are drawn into the channel groove 31 and the inside of the channel groove 31 Ink tends to stagnate, and ink ejection failures are likely to occur. Therefore, the final end 4 of the ink supply path 41
It is important to be able to effectively remove bubbles and dust remaining near 1a.

(3) In the above embodiment, each dummy groove 32 is provided on both sides of each channel groove 31, but each dummy groove 32 may be omitted and only each channel groove 31 may be adjacent. (4) In the above embodiment, the ink supply path 41 is formed at a constant depth in the plate thickness direction of each of the manifold members 13 and 14, but the plate of each of the manifold members 13 and 14 in the ink supply path 41 is formed. The depth in the thickness direction may be changed. That is, the cross-sectional area of the ink supply path 41 may be gradually reduced by changing not only the width of the ink supply path 41 but also the depth of the ink supply path 41.

(5) In the above embodiment, the ink supply path 4
1 is gradually narrowed from the start end 41b to the end 41a.
The width of 1 may be constant from the start end 41b to the end end 41a. That is, even if the cross-sectional area of the ink supply path 41 is made constant by appropriately setting the number, size, shape, and location of each rib-shaped protrusion 44 in the ink supply path 41, as in the above embodiment, When the cross-sectional area of the supply path 41 is gradually reduced, it is possible to obtain substantially the same effects as those of the above-described embodiment, although the result is slightly inferior.

(6) In the above embodiment, the filter members 43a and 43b are arranged in two rows, but may be arranged in three or more rows. (7) In the above embodiment, the ink flows in the manifold member from one end of the ejection channel row to the other end. However, an ink supply hole 22 is provided in the center of the ink supply path 41, and both ends are provided. The ink may be caused to flow toward. Along with this, the rib-shaped protrusions, the filter members, and the like are also arranged from the ink supply holes 22 to both ends.

(8) In the above embodiment, the inkjet head 600 is applied to a printer that reciprocates with the carriage 504, but may be applied to a so-called line printer or the like in which the inkjet head 600 is fixed to the main body of the color inkjet printer 1.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating a schematic configuration of a color inkjet printer including an inkjet head according to an embodiment of the invention.

FIG. 2 is a perspective view showing an inkjet head according to one embodiment.

FIG. 3 is an exemplary perspective view showing a state in which a sealing material is removed from the inkjet head according to the embodiment;

FIG. 4 is a partial vertical cross-sectional view of the ink jet head of one embodiment.

FIG. 5 is a perspective view showing a state in which a part of each substrate in the inkjet head according to the embodiment is viewed from the front end side.

FIG. 6 is a cross-sectional view of the inkjet head according to one embodiment.

FIG. 7 is an exploded perspective view illustrating a state where a manifold member is removed from the inkjet head according to the embodiment.

FIG. 8 is a partial perspective view of a manifold member in the inkjet head according to one embodiment.

FIG. 9 is a partial plan view of a manifold member and a substrate in the inkjet head according to one embodiment.

FIG. 10 is a plan view of a manifold member in the inkjet head according to one embodiment.

FIG. 11 is a plan view of a manifold member in the inkjet head according to one embodiment.

FIG. 12 is a cross-sectional view for explaining a method for manufacturing a manifold member in the ink jet head of one embodiment.

FIG. 13 is a cross-sectional view illustrating a method of manufacturing a manifold member in the inkjet head according to one embodiment.

FIG. 14 is a cross-sectional view for explaining a method for manufacturing a manifold member in the ink jet head of one embodiment.

FIG. 15 is a cross-sectional view for explaining a method for manufacturing a manifold member in the inkjet head of one embodiment.

FIG. 16 is a cross-sectional view for explaining a method for manufacturing a manifold member in the inkjet head of one embodiment.

FIG. 17 is a cross-sectional view for explaining a method of manufacturing a manifold member in the inkjet head of one embodiment.

FIG. 18 is a cross-sectional view for explaining a method for manufacturing a manifold member in the inkjet head of one embodiment.

[Explanation of symbols]

509 ... Ink cartridge 600 ... Inkjet head 11,12 ... Substrate 13,14 ... Manifold member 15 ... Plate member 15 16 ... Nozzle plate 16a ... Nozzle hole 22 ... Ink supply hole 24 ... Actuator 31 ... Channel groove 41
... Ink supply paths 43a and 43b ... Filter members

Claims (11)

[Claims] An actuator configured to form a plurality of channels accommodating ink in an aligned state, and to drive the ink in the channel to be ejected as droplets from a nozzle hole provided at an outlet end of the channel. And ink that is connected to the inlet ends of the plurality of channels, extends in the alignment direction of the plurality of channels, and supplies ink supplied from an ink supply source to each of the inlet ends of the plurality of channels. An inkjet head comprising: a manifold having a supply path formed therein, wherein each of the plurality of channels is disposed between an inlet end of the plurality of channels and a wall surface of the ink supply path of the manifold facing the inlet end. A plurality of filter members having a substantially long columnar shape are provided at predetermined intervals with respect to each of the inlet ends,
The plurality of filter members are arranged in a plurality of rows parallel to the alignment direction of the plurality of channels, and one row of filter members is arranged corresponding to a gap between the other rows of filter members,
An ink-jet head, wherein the semicircular ends of the filter members in each row are arranged at a predetermined interval. 2. The ink jet head according to claim 1, wherein a row formed by the filter member on a side closest to an inlet end of the plurality of channels is arranged corresponding to a row formed by the inlet end. An ink jet head characterized by the following. 3. The ink jet head according to claim 1, wherein the filter member is not arranged near each of the inlet ends of the channels at both ends in the alignment direction of the plurality of channels. Inkjet head. 4. An actuator in which a plurality of channels for accommodating ink are formed in an aligned state, and the ink in the channel is driven to be ejected as droplets from a nozzle hole provided at an outlet end side of the channel. And ink that is connected to the inlet ends of the plurality of channels, extends in the alignment direction of the plurality of channels, and supplies ink supplied from an ink supply source to each of the inlet ends of the plurality of channels. An inkjet head comprising: a manifold having a supply path formed therein, wherein each of the plurality of channels is disposed between an inlet end of the plurality of channels and a wall surface of the ink supply path of the manifold facing the inlet end. An ink jet head comprising a flow path resistance member provided except for a channel at an end in the alignment direction. 5. The ink jet head according to claim 4, wherein the flow path resistance member is a filter. 6. The ink jet head according to claim 1, wherein the plurality of channels are formed in a plurality of rows and are aligned in each row, and the ink supply path is An ink jet head formed along each row of the plurality of channels. 7. The method of manufacturing an ink jet head according to claim 1, wherein a resist material having a thickness corresponding to a depth of the ink supply path is placed on a substrate. Irradiating a parallel light beam to a position corresponding to the ink supply path or a part excluding the ink supply path of the resist material; and a part of the resist material irradiated with the light beam or a part not irradiated with the light beam. Removing a mold material on the substrate including the resist material, and thereafter, removing the resist material and the substrate to form a molding die; and forming the mold member on the molding die. Forming the manifold member by injection molding by pouring a forming material. 8. The method of manufacturing an ink jet head according to claim 7, wherein the step of irradiating the light beam includes a mask having a light transmission window corresponding to a shape of the ink supply path or a portion excluding the ink supply path. A method of manufacturing an ink jet head, comprising irradiating a light beam through the ink jet head. 9. The method for manufacturing an ink jet head according to claim 7, wherein the light beam is synchrotron radiation light. 10. The method for manufacturing an ink jet head according to claim 7, wherein at least an upper surface of the substrate on which the resist material is placed has conductivity, and the mold is formed. The method of manufacturing an ink jet head according to claim 1, wherein the step of forming includes electroforming a mold made of metal on the surface of the conductive substrate. 11. The method of manufacturing an ink jet head according to claim 7, further comprising, after the step of removing the resist material, forming a conductive layer on the remaining resist material and the substrate. A method for manufacturing an ink jet head, comprising a step of forming, and the step of forming a molding die, wherein a mold material made of metal is electroformed on the conductive layer.