JP2000330040A - Optical switching element - Google Patents

Abstract

(57) [Summary] (with correction) [PROBLEMS] To enable switching at a low driving voltage in an optical switching element that performs optical switching by moving an extraction unit close to and away from a waveguide and coupling the evanescent wave. An optical switching element includes a waveguide, a substantially transparent waveguide conductive film provided on a surface of the waveguide, and approaches and separates from the waveguide via the waveguide conductive film. The reflecting prism 3, a reflecting film which is a reflecting surface of the reflecting prism 3, a prism electrode 5 for moving the reflecting prism 3 by electrostatic force, and mechanically connecting the prism electrode 5 and the reflecting prism 3 so as to move integrally. A prism base 4, a substrate 10, a column 9 fixed on the substrate 10, one end of which is attached to the column 9, and another end of which is attached to the prism electrode 5, and a cantilever 6 which elastically supports the reflection prism 3. , The substrate 10 together with the prism electrode 5
, The upper electrode 7 and the lower electrode fixed with respect to.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical switching element for switching light by approaching and moving away from an optical member.

[0002]

2. Description of the Related Art A prior art related to the present invention will be described.

An optical switching element for switching light using evanescent wave coupling as shown in FIGS. 19 and 20 has been proposed. Hereinafter, the operation of the optical switching element will be briefly described with reference to the drawings.

First, a description will be given with reference to FIG. The optical switching element includes a waveguide 1, a reflecting prism 3 approaching and moving away from the waveguide 1, a prism electrode 5 for moving the reflecting prism 3 by electrostatic force, and the prism electrode 5 and the reflecting prism 3 being integrated. The prism base 4, the substrate 10, the support 9 fixed on the substrate 10, which is mechanically connected so as to move, one end is attached to the support 9, and the other end is attached to the prism electrode 5. It comprises a cantilever 6 that elastically supports it. Here, illumination light 11 is supplied to the waveguide 1 from an appropriate light source. The illumination light 11 is substantially parallel light, and light is repeatedly and totally reflected at all interfaces inside the waveguide 1 so that the inside of the waveguide 1 is incident at a constant incident angle such that the inside of the waveguide 1 is filled with light rays. Is set to In this state, the illumination light 11 is macroscopically confined inside the waveguide 1 and propagates through the waveguide 1 without loss. On the other hand, microscopically, in the vicinity of the surface of the waveguide 1 which is totally reflected, the illumination light 11 leaks once from the waveguide 1 by a very small distance of about the wavelength of light, and changes its course. Is returned into the waveguide 1 again. The leaked light is generally called an evanescent wave. The evanescent wave can be extracted by bringing another optical member close to the total reflection surface of the waveguide 1 at a distance of about the wavelength of light or less. That is, if an optically transparent member is approached as the optical member, the optical member can be transmitted and taken out. If an optically reflective member is approached as the optical member, the evanescent wave is reflected. Then, the waveguide 1 can be transmitted and taken out.
Therefore, if the optical member is moved toward and away from the actuator, an operation such as taking out or not taking out the illumination light 11 becomes possible.

[0005] This conventional example is an optical switching element utilizing the above phenomenon. The reflecting prism 3 is initially supported at a mechanical neutral point by the cantilever 6, but when a voltage is applied between the prism electrode 5 and the lower electrode 8, an attractive force due to electrostatic force is applied between the two. Working,
The prism electrode 5 moves downward in the figure. At this time, the reflection prism 3 connected to the prism electrode 5
Move downward, and separate from the waveguide 1. FIG. 19 shows this state. In this state, the illumination light 11 remains confined inside the waveguide 1. This is the optical switching OFF state.

Next, when a voltage is applied between the prism electrode 5 and the upper electrode 7, an attraction force is also exerted between the two by electrostatic force, and the prism electrode 5 moves upward in the drawing. . At this time, the reflection prism 3 connected to the prism electrode 5 also moves upward and approaches the waveguide 1. FIG. 20 shows this state. If the approach distance is sufficiently small, the waveguide 1
The illuminating light 11 leaking out of the optical path reaches the reflecting prism 3 and is reflected, changes its course, and enters the waveguide 1 again. At this time, the angle of the incoming light is no longer
Since the angle is not the angle of total internal reflection, the light penetrates the waveguide 1 as it is, and is emitted as derived light 12 to the outside. This is set to the optical switching ON state.

As described above, in this conventional example, the illumination light 11 is extracted from the waveguide 1 by selectively applying a voltage to each electrode. If a light receiving optical system is installed in the emission direction, the optical system has a configuration that functions as an optical switching element. In addition, a large number of the above configurations are arranged in a matrix to display an image.

[0008]

However, in the conventional optical switching element shown in FIGS. 19 and 20, a certain amount of force is required to move the reflection prism to reliably turn ON / OFF the optical switching. For that purpose, it is necessary to ensure a sufficient suction force between the prism electrode 5 and the upper and lower electrodes 7 and 8. In order to increase the attraction force, the opposing areas of the electrodes must be increased or a high voltage must be supplied between the electrodes. However, it is structurally difficult to increase the area of the electrode against the demand for miniaturization and miniaturization of the element, and there is great difficulty.
In addition, when the applied voltage is increased, a driving circuit with a high withstand voltage is required, and the size of the transistor is increased, so that miniaturization and miniaturization are also difficult, and noise generated during pulse driving is a new problem. There were challenges.

Therefore, the present invention compensates for the shortage of the driving force of the reflection prism, thereby turning ON the optical switching.
It is an object of the present invention to provide an optical switching element having a configuration capable of reliably performing / OFF.

[0010]

(1) An optical switching element according to the present invention comprises: a light guide section having a total reflection surface capable of transmitting an incident light by total reflection; and an evanescent wave to the total reflection surface. A first position approaching less than or equal to the extraction distance to be leaked, and a light-transmitting extraction unit movable to a second position further than the extraction distance, and a conductive member that moves integrally with the extraction unit;
Driving means for exerting a first driving force out of the driving force for moving the extraction unit, and the light guide unit, a first layer made of a conductive material on a surface facing the extraction unit, the First
A second driving force is exerted on the extraction unit by applying a voltage between the layer and the conductive member.

(2) The optical switching element according to the present invention is characterized in that, in the optical switching element according to item 1, the material of the conductive layer is ITO.

(3) The optical switching element according to the present invention, in the optical switching element according to item 1, wherein the conductive layer is made of a material having a higher refractive index than the light guide section or the extraction section. Features.

(4) In the optical switching element according to the first aspect of the present invention, in the optical switching element according to the first aspect, the driving unit suctions the extraction unit to a first position by electrostatic force.
It is characterized by comprising one electrode, a second electrode sucking to a second position, and a third electrode that moves integrally with the extraction unit, wherein the conductive member is the third electrode.

(5) The optical switching device according to the first aspect of the present invention is the optical switching device according to the first aspect, wherein the extraction unit includes a second layer made of a conductive material on a surface facing the light guide unit. The conductive member is the second layer.

(6) In the optical switching element according to the first aspect of the present invention, in the optical switching element according to the first aspect, the extraction unit has a support made of a conductive material, and the conductive member is the support. It is characterized by the following.

(7) In the optical switching device according to the first aspect of the present invention, in the optical switching device according to the first aspect, the extracting section has a reflecting surface for reflecting the extracted light, and the reflecting surface is conductive. The conductive member is the reflection surface.

(8) The optical switching element according to the present invention is characterized in that, in the optical switching element according to item 1, the extraction section is conductive, and the conductive member is the extraction section.

(9) In the optical switching element of the present invention, a light guide section made of a conductive material having a total reflection surface capable of transmitting the reflected light by total reflection, and an evanescent wave is applied to the total reflection surface. A first position approaching below the leaking extraction distance,
A light-transmitting extraction unit movable to a second position separated by more than the extraction distance, a conductive member that moves integrally with the extraction unit, and a first driving force among driving forces for moving the extraction unit And a driving unit for applying a voltage between the light guide unit and the conductive member, thereby applying a second voltage to the extraction unit.
The driving force is applied.

[0019]

(Embodiment 1) An embodiment of the present invention will be described below with reference to the drawings.

FIGS. 1 and 2 are explanatory views showing the structure of an optical switching element according to one embodiment of the present invention.

First, a description will be given with reference to FIG. The optical switching element includes a waveguide 1, a substantially transparent waveguide conductive film 2 provided on the surface of the waveguide 1, and a reflecting prism 3 approaching and separating from the waveguide 1 via the waveguide conductive film 2. ,
A reflection film 18 which is a reflection surface of the reflection prism 3, a prism electrode 5 for moving the reflection prism 3 by electrostatic force,
A prism base 4, a substrate 10, a column 9 fixed on the substrate 10, one end of which is connected to the column 9, wherein the prism electrode 5 and the reflection prism 3 are mechanically connected to move integrally.
The other end is attached to the prism electrode 5 and comprises a cantilever 6 for elastically supporting the reflection prism 3, an upper electrode 7 and a lower electrode 8 fixed to the substrate 10. The upper electrode 7 and the lower electrode 8 together with the prism electrode 5 form a first driving mechanism. Also,
The waveguide conductive film 2 also forms a driving mechanism together with the prism electrode 5. These drive mechanisms will be described later in detail.

The material of the waveguide conductive film 2 is ITO, IT, I, which is often used for a transparent electrode.
O, SnO ₂ or the like may be used. Alternatively, the use of diamond-like carbon made conductive by nitrogen has a great effect in preventing adsorption by moisture.

The waveguide 1 is supplied with illumination light 11 from an appropriate light source. The illumination light 11 is substantially parallel light, and light is repeatedly and totally reflected at all interfaces inside the waveguide 1 so that the inside of the waveguide 1 is incident at a constant incident angle such that the inside of the waveguide 1 is filled with light rays. Is set to In this state, the illumination light 11 is macroscopically confined inside the waveguide 1 and propagates through the waveguide 1 without loss. On the other hand, microscopically, in the vicinity of the surface of the waveguide 1 which is totally reflected, the illumination light 11 leaks once from the waveguide 1 by a very small distance of about the wavelength of light, and changes its course. Is returned into the waveguide 1 again. The leaked light is generally called an evanescent wave. The evanescent wave can be extracted by bringing another optical member close to the total reflection surface of the waveguide 1 at a distance of about the wavelength of light or less. If a light transmissive member is approached as the optical member, the optical member can be transmitted and taken out. On the other hand, if the light-reflecting member is brought closer, the evanescent wave can be extracted and reflected, and then transmitted through the waveguide 1 and extracted. Therefore, if the optical member is moved toward and away from the light by some drive mechanism, an operation such as taking out or not taking out the illumination light 11 becomes possible.

That is, in the present embodiment, the optical switching can be performed by moving the reflecting prism 3 toward and away from the waveguide 1. First, FIG. 1 shows a state where the reflection prism 3 is separated from the waveguide 1. In this state, the illumination light 11
Remains confined inside the waveguide 1. This is a state where the optical switching is OFF. Next, FIG. 2 shows a state in which the reflection prism 3 is approaching the waveguide 1. If the approaching distance is sufficiently small, the illumination light 11 leaked from the waveguide 1 is reflected after reaching the reflection prism 3 via the waveguide conductive film 2, changes its course, and then returns to the waveguide 1. To enter. At this time, since the angle of the incoming light is no longer the angle of total reflection inside the waveguide 1, it penetrates the waveguide 1 as it is, and exits as derived light 12 to the outside. This is the optical switching ON state. This embodiment is an optical switching element that performs optical switching as described above. Also, a large number of the above-described configurations may be arranged in a matrix to display an image.

Next, the reflection prism 3 is connected to the waveguide 1.
A driving mechanism for moving the robot toward and away from the vehicle will be described.
The driving mechanism includes the prism electrode 5, the upper electrode 7,
The reflection prism 3 is moved by electrostatic force using the lower electrode 8 and the waveguide conductive film 2.

First, the upper electrode 7 is set to 0 V, and the lower electrode 8 is applied with a positive voltage + Vd. On the other hand, 0 V or a positive voltage + Vd is applied to the prism electrode 5 according to the necessity of ON / OFF of the optical switching by the drive circuit. That is, the voltage is set to + Vd when the optical switching is turned on, and to 0 V when the optical switching is turned off. Then, since the prism electrode 5 receives an attractive force on the side having a potential difference due to an electrostatic force, the reflection prism 3 connected to the prism electrode 5 has a zero value.
In the case of V, it is on the substrate 10 side.
Try to move to the side. This will be referred to as a first drive mechanism.

FIG. 3 is a graph showing how the reflecting prism 3 is moved by the first driving mechanism.
Here, the relationship between the electric field applied by the prism electrode 5, which is the source of the driving force, and the amount of movement of the reflection prism 3 will be described. The horizontal axis represents the magnitude E of the electric field applied by the prism electrode 5, and the vertical axis represents the moving amount x of the reflecting prism 3.
As shown in the drawing, when the electric field E is increased, a steep movement occurs in an electric field E2 of a certain magnitude, and the reflection prism 3
Stops to move up to _{x 0.} On the other hand, when gradually subtracting the intensity of the electric field, but the reflection prism 3 even if the E2 smaller field remains held in the position of x _0, start to move and become E2 smaller is the electric field E1, also Return to the position. As described above, the amount of movement x with respect to the electric field E has a steep and hysteretic characteristic. Note that the difference between E1 and E2 is ΔE1.

If the driving force of the first driving mechanism is sufficiently large, the optical switching element can be turned ON / OFF only by controlling the voltage applied to the prism electrode 5. However, it is actually difficult to secure a sufficient driving force for the mass of the reflection prism 3 and the rigidity of the cantilever 6. In order to increase the driving force, there is a method of increasing the areas of the prism electrode 5 and the upper electrode 7 and the lower electrode 8 facing each other. As another method for increasing the driving force, there is a method for increasing the positive applied voltage. However, to increase the applied voltage, a driving circuit using a transistor with a high withstand voltage is required. The drive circuit is formed as an IC on the substrate 10 when a large number of the present optical switching elements are arranged and used as a video display element. However, a transistor with a high breakdown voltage occupies a large space, and it is difficult to miniaturize and reduce the size. When a driving voltage exceeding 5 V is required, a power supply system of a normal logic circuit cannot be used as a driving voltage source as it is, so that a high voltage line must be provided separately. This contributes to the difficulty of IC design. Also, the driving voltage is generally a high voltage pulse, and in image display, tens of thousands of optical switching elements must be driven several hundred times per second, so that the higher the driving voltage, the more noise is generated. The noise affects other circuits,
It is not preferable because it is radiated as unnecessary electromagnetic waves and adversely affects the surrounding electromagnetic environment. Therefore, it is desirable that the driving voltage be as small as possible, at most about 5V. However, as described above, it is difficult to secure a driving force for the reflection prism 3 when the applied voltage is 5 V. Therefore, in the present embodiment, a second driving mechanism is also used using the waveguide conductive film 2. The operation will be described below.

First, a negative voltage, for example, -Vb, is constantly applied to the waveguide conductive film 2 provided on the surface of the waveguide 1. On the other hand, a voltage of 0 V or + Vd, for example, a voltage of +5 V is applied to the prism electrode 5 by a drive circuit as required for ON / OFF of optical switching. That is, when the optical switching is turned on, the voltage is set to + 5V, and when it is turned off, the voltage is set to 0V. Then, a relatively small electric field works at 0 V and a large electric field works at +5 V between the prism electrode 5 and the waveguide conductive film 2. Further, the prism electrode 5 receives an attractive force due to an electrostatic force on a side having a potential difference, and further receives a larger force as the potential difference increases.
The reflection prism connected to the prism electrode 5
Reference numeral 3 indicates that the prism electrode 5 is weakly attracted to the waveguide 1 when the voltage is 0 V and strongly attracted when the prism electrode 5 is +5 V. This is the second
Will be referred to as a drive mechanism. Here, Vb is set to +5
At the time of V, the electric field acting between the prism electrode 5 and the waveguide conductive film 2 is set to a voltage such that it becomes E1 in FIG. Then, even when the prism electrode 5 is at +5 V, the reflection prism 3 does not start moving, but it starts moving when the electric field becomes slightly stronger.

On the other hand, the first drive mechanism is also used. That is, 0 V is applied to the upper electrode 7 and + Vd, here +5 V, is applied to the lower electrode 8. Then, when the prism electrode 5 is at 0V, the electric field acting between the prism electrode 5 and the waveguide conductive film 2 is smaller than E1, so that the reflection prism 3 does not move, but the prism electrode 5 is at + 5V. Then, E by the second drive mechanism
In addition to the electric field of 1, the electric field of ΔE1 by the first driving mechanism is applied, and the electric field of E2 acts, so that the reflection prism 3 starts to move. Here, the prism electrode 5 is +5
The electrode area, the value of Vb, and the like are set in advance so that an electric field of ΔE1 is applied when the voltage becomes V.

As described above, by using the waveguide conductive film 2 to operate the second driving mechanism, the reflection prism 3 can be moved only by applying a small voltage + Vd to the prism electrode 5. be able to. Therefore, it can be easily driven by a low-voltage driving circuit formed on the substrate 10, and an IC can be formed by a low-voltage process.
Also, noise due to switching can be reduced. This embodiment is particularly effective when E1 and E2 are close to each other.

In the above example, the upper electrode 7
0V, + Vd for the lower electrode 8, 0V or + Vd for the prism electrode 5, and -V for the waveguide conductive film 2.
b was applied. In addition, the same effect can be obtained by applying + Vd to the upper electrode 7, 0V to the lower electrode 8, + Vd or 0V to the prism electrode 5, and + Vb to the waveguide conductive film 2. Is obtained. Further, the prism electrode 5 is fixed at 0 V, and the waveguide conductive film 2 is fixed.
Is set to + Vb, and the upper electrode 7 is set to 5 V and the lower electrode 8 is set to ON when the optical switching element is ON.
Is set to 0 V and turned off when turned off.
An equivalent effect can be obtained. Further, the prism electrode 5 is
V, the waveguide conductive film 2 is set to −Vb, the upper electrode 7 is set to 5 V when ON, and the lower electrode 8 is set to 0 V according to ON / OFF of the optical switching element. The same effect can be obtained even if such a configuration is adopted.

By the way, in the conventional optical switching element to which the above evanescent wave coupling is applied,
Since the intensity of the evanescent wave oozing out of the waveguide 1 exponentially attenuates exponentially with distance, it has been difficult to always achieve a sufficient and uniform approach of the reflection prism 3. Since there are manufacturing errors, surface roughness, and variations in distance when a plurality of the reflecting prisms 3 are arranged, as a result, a sufficient amount of light cannot be obtained or a large amount of variation occurs in the amount of light. Or there was a fear.

If a material having a higher refractive index than the waveguide 1 or the reflection prism 3 is used as the material of the waveguide conductive film 2 and the thickness is set to an appropriate thickness,
The above problems can be improved. This is shown in FIG. When the solid line curve 13 does not have the waveguide conductive film 2, the dotted line curve 14 has the waveguide conductive film 2, and the curve represents the distance x between the waveguide 1 and the reflective prism 3. 3 shows a change in the amount of light P taken out of FIG. First, when the waveguide conductive film 2 is not provided, the amount of light extracted is maximum when the distance is 0, and shows a sharp peak. Then, it decreases monotonously rapidly as the distance increases. On the other hand, when the waveguide conductive film 2 exists, the curve has a gentle peak at a certain distance and gradually decreases. It should be particularly noted that in the range of a certain distance x1 to x2, the amount of light extracted is larger than in the case where the waveguide conductive film 2 is not provided. That is, in the optical switching element, even if the waveguide 1 and the reflecting prism 3 are not sufficiently close to each other due to an error, surface roughness, variation, or the like, not only is the degree of output reduction suppressed but also increased. Indicates that it can be done. Further, as described above, since the curve at the peak portion becomes gentle, the waveguide 1
Also, the variation in the amount of light taken out even with the variation in the distance between the reflection prism 3 and the reflection prism 3 is reduced. In other words, it is possible to increase the margin for the variation in distance.
This is effective in suppressing unevenness in brightness between pixels when an image display device or the like is configured by arranging a large number of optical switching elements of this embodiment in an array or a matrix.

Here, by setting the thickness of the waveguide conductive film 2 to an appropriate value, it is possible to maximize the amount of light that can be taken out at a target distance or minimize the variation with respect to the distance. This is shown in FIG. In the figure, curve 13 indicates the case where the waveguide conductive film 2 is not provided.
Curve 15 indicates that the optical thickness of the waveguide conductive film 2 is 1 at the wavelength.
In the case of / 30, the curve 16 shows the case where the optical thickness of the waveguide conductive film 2 is 1/8 of the wavelength, and the curve 17 shows the case where the optical thickness of the waveguide conductive film 2 is 1/3 of the wavelength. Here, the optical thickness is obtained by multiplying the physical thickness, that is, the actual size, by the refractive index. With the addition of the waveguide conductive film 2, the curve of the quantity of light taken out changes from a high and sharp peak at a distance of 0 to a gradually decreasing curve with a gentle peak at a certain distance. Further, as shown in FIG. 5, when the thickness of the waveguide conductive film 2 is changed, the shape of the curve also changes. That is, the waveguide conductive film 2
The curve 15 wherein the optical thickness of
In this case, the peak 13 shifts and becomes slower than the curve 13 in the case where the waveguide conductive film 2 is not provided, and the peak value decreases. In the curve 16 in which the optical thickness of the waveguide conductive film 2 is ８ of the wavelength, the peak is shifted and dulled further and the peak value is reduced with respect to the curve 15. The optical thickness of the waveguide conductive film 2 is ３ of the wavelength.
In the case of the above curve 17, the shape of the curve near the peak becomes extremely gentle, and the amount of light decreases as a whole. Comparing the above curves, the curve 11 has the maximum light amount from the distance 0 to x0, which is the most advantageous. Similarly,
From distance x0 to x1, curve 15 is most advantageous from distance x1 to x2. Therefore, it is expected when actually manufacturing or manufacturing an optical switching element,
The light can be extracted most efficiently by selecting an appropriate thickness of the waveguide conductive film 2 according to the distance between the waveguide 1 and the reflection prism 3 and its error, the roughness of the boundary surface, the variation, and the like. According to FIG. 5, in consideration of the generally expected distance between the waveguide 1 and the reflecting prism 3 and its error, the roughness of the interface, and the variation, the optical thickness of the waveguide conductive film 2 is 1/1 of the wavelength. 30 to 1/3
It is appropriate to take any value between the two. According to the above configuration, it is possible to obtain an optical switching element capable of efficiently extracting light with a small amount of light.

(Embodiment 2) FIG. 6 is an explanatory diagram for explaining a configuration of an optical switching element according to another embodiment of the present invention. In the first embodiment, as shown in FIG.
The reflection prism 3 responds to the electric field E with hysteresis. A large electric field of E2 is required to start the movement, but once the movement is completed, the electric field can be maintained at a smaller electric field than E2. Therefore, a configuration may be adopted in which the + Vb is added only at the start of the movement of the reflection prism 3. This will be described with reference to FIG.

First, the intensity of an electric field that can be held while the reflecting prism 3 is moved is defined as a holding electric field E3. The first
The area of the electrode, Vd, and the like are set in advance so that E3 can be secured by the driving mechanism described above. An electric field of ΔE2 is applied by the second driving mechanism, and the area of the electrode, Vb, and the like are set so that the electric field E2 capable of moving the reflection prism 3 can be secured.

Now, the first driving mechanism and the second driving mechanism are both used to start the movement of the reflection prism 3. However, once it has moved, the electric field required for holding is E3, so the second drive mechanism is no longer necessary, and is held only by the first drive mechanism.

FIG. 7 shows the waveform vp of the voltage applied to the prism electrode 5 and the waveform vl applied to the waveguide conductive film 2. As shown in FIG.
Need only be applied at the start of movement, and power consumption is low. Further, when a large number of the present optical switching elements are arranged as cells to form an image display element, a voltage is applied to the prism electrode 5 at a constant cycle corresponding to the maximum cycle of each cell to activate the second drive mechanism, It is sufficient that the first drive mechanism is operated only for the cells that need the ON operation.

With the above configuration, in this embodiment as well, the reflection prism 3 can be moved only by applying a small voltage + Vd to the prism electrode 5. Therefore, it can be easily driven by a low-voltage driving circuit formed on the substrate 10, and an IC can be formed by a low-voltage process.
Also, noise due to switching can be reduced. This embodiment is particularly effective when E3 is small and the difference from E2 is large.

The other configurations and effects are the same as those of the first embodiment, and a detailed description thereof will be omitted.

(Embodiment 3) FIG. 8 is an explanatory view showing a configuration of an optical switching element according to another embodiment of the present invention, showing an optical switching OFF state. In the first embodiment, the second driving mechanism utilizes the electric field between the waveguide conductive film 2 provided in the waveguide 1 and the prism electrode 5. The second driving mechanism may be configured by providing a conductive film 19 and applying a voltage between the waveguide conductive film 2 and the reflective prism conductive film 19. In addition, any one of the opposing surfaces of the waveguide conductive film 2 and the reflective prism conductive film 19 is subjected to an insulation treatment to prevent a short circuit. In this embodiment, since the distance between the two films to which the voltage is applied is small, a larger driving force can be obtained at a low voltage.

Other configurations and effects are the same as those of the first embodiment, and therefore, detailed description is omitted.

(Embodiment 4) FIG. 9 is an explanatory view showing a configuration of an optical switching element according to another embodiment of the present invention, showing an optical switching OFF state. In the first embodiment, the second driving mechanism uses the electric field between the waveguide conductive film 2 provided in the waveguide 1 and the prism electrode 5. The second driving mechanism may be configured by applying a voltage between the waveguide conductive film 2 and the prism base 4. In the present embodiment, the distance between the waveguide conductive film 2 to which a voltage is applied and the prism base 4 is small and the area of the opposing surface is enlarged. Driving force can be obtained.

Other configurations and effects are the same as those of the first embodiment, and a detailed description thereof will be omitted.

(Embodiment 5) FIG. 10 is an explanatory view showing the configuration of an optical switching element according to another embodiment of the present invention, showing an optical switching OFF state. In the first embodiment, the second driving mechanism utilizes the electric field between the waveguide conductive film 2 provided in the waveguide 1 and the prism electrode 5. The second driving mechanism may be configured by applying a voltage between the waveguide conductive film 2 and the reflection film 18. In this embodiment, the distance between the waveguide conductive film 2 to which a voltage is also applied and the prism base 4 is small, and the area of the opposing surface is enlarged. Driving force can be obtained. In addition, the reflection film 18 is often made of metal, and is easily made conductive.

The other configurations and effects are the same as those of the first embodiment, and a detailed description thereof will be omitted.

(Embodiment 6) FIG. 11 is an explanatory view showing a configuration of an optical switching element according to another embodiment of the present invention, showing an optical switching OFF state. In the first embodiment, the second driving mechanism utilizes the electric field between the waveguide conductive film 2 provided in the waveguide 1 and the prism electrode 5. The second driving mechanism may be configured by applying a voltage between the waveguide conductive film 2 and the reflection prism 3. Further, the waveguide conductive film 2
Any one of the opposing surfaces of the reflection prism 3 and the reflection prism 3 is subjected to insulation treatment to prevent a short circuit. In this embodiment, since the distance between the waveguide conductive film 2 to which a voltage is applied and the prism base 4 is also reduced, a larger driving force can be obtained with a low voltage despite a simple configuration.

The other configurations and effects are the same as those of the first embodiment, and a detailed description thereof will be omitted.

(Embodiment 7) FIG. 12 is an explanatory view showing the configuration of an optical switching element according to another embodiment of the present invention, showing an optical switching OFF state. In the third embodiment, the second driving mechanism utilizes the electric field between the waveguide conductive film 2 provided on the waveguide 1 and the prism electrode 5. The second driving mechanism may be configured by applying a voltage between the waveguide 1 and the reflective prism conductive film 19. In addition, any one of the opposing surfaces of the waveguide 1 and the reflective prism conductive film 19 is subjected to an insulation treatment to prevent a short circuit. In this embodiment, the same effect as that of the third embodiment can be obtained without forming the waveguide conductive film 2.

The other configurations and effects are the same as those of the first embodiment, and a detailed description thereof will be omitted.

(Embodiment 8) FIG. 13 is an explanatory view showing a configuration of an optical switching element according to another embodiment of the present invention, showing an optical switching OFF state. Example 1
The optical switching element shown in FIG. 3 is provided with the reflection prism 3 by the first driving mechanism and the second driving mechanism.
Is moved, but if a sufficiently large force can be generated by the second drive mechanism, a configuration having only the second drive force may be adopted.

The optical switching element includes a waveguide 1, a substantially transparent waveguide conductive film 2 provided on the surface of the waveguide 1, and approaches and separates from the waveguide 1 via the waveguide conductive film 2. The reflecting prism 3, the reflecting film 18 which is the reflecting surface of the reflecting prism 3, the prism electrode 5 for moving the reflecting prism 3 by electrostatic force, and mechanically moving the prism electrode 5 and the reflecting prism 3 integrally. A prism base 4 to be connected, a substrate 10, a support 9 fixed on the substrate 10, one end attached to the support 9, and another end attached to the prism electrode 5, and a cantilever elastically supporting the reflection prism 3. 6. The lower electrode 8 is fixed to the substrate 10. The waveguide conductive film 2 forms a driving mechanism together with the lower electrode 8 and the prism electrode 5. Further, the first drive mechanism existing in the first embodiment does not exist in the present embodiment.

Then, the reflection prism 3 is connected to the waveguide 1
A driving mechanism for moving the robot toward and away from the vehicle will be described.
The driving mechanism includes the prism electrode 5, the lower electrode 8,
The reflection prism 3 is moved by electrostatic force using the waveguide conductive film 2.

First, the waveguide conductive film 2 is set at 0 V, and a positive voltage + Vd is applied to the lower electrode 8. On the other hand, 0 V or a positive voltage + Vd is applied to the prism electrode 5 according to the necessity of ON / OFF of the optical switching by the drive circuit. That is, the voltage is set to + Vd when the optical switching is turned on, and to 0 V when the optical switching is turned off. Then, since the prism electrode 5 receives an attractive force due to electrostatic force on the side having a potential difference, the reflection prism 3 connected to the prism electrode 5 moves toward the substrate 10 when the prism electrode 5 is at 0V. , + Vd, it moves to the waveguide 1 side. As described above, the switching of the light can be performed by moving the reflection prism 3 toward and away from the conductive film 2.

In this embodiment, the structure is simple, and therefore, the manufacture is easy. Therefore, when a semiconductor process is used, the number of steps can be reduced, and manufacturing at low cost is possible. Also, the failure rate can be reduced.

In the above example, the lower electrode 8
Is + Vd, and the prism electrode 5 is 0V or + V.
d, 0 V was applied to the waveguide conductive film 2. In addition, 0 V is applied to the lower electrode 8 and + V is applied to the prism electrode 5.
The same effect can be obtained by a configuration in which Vd or 0 V is applied and + Vd is applied to the waveguide conductive film 2. Further, the prism electrode 5 is fixed at 0 V or 5 V, and according to ON / OFF of the optical switching element, the waveguide conductive film 2 is set to 5 V at the time of ON, and the lower electrode 8 is set to 0 V at the time of OFF. The same effect can be obtained even if such a configuration is adopted.

(Embodiment 9) FIG. 14 is an explanatory view showing a configuration of an optical switching element according to another embodiment of the present invention, showing an optical switching OFF state. Example 3
The optical switching element shown in FIG. 3 is provided with the reflection prism 3 by the first driving mechanism and the second driving mechanism.
Is moved, but if a sufficiently large force can be generated by the second drive mechanism, a configuration having only the second drive force may be adopted.

The optical switching element includes a waveguide 1, a substantially transparent waveguide conductive film 2 provided on the surface of the waveguide 1, and approaches and separates from the waveguide 1 via the waveguide conductive film 2. The reflecting prism 3, the reflecting film 18 which is a reflecting surface of the reflecting prism 3, the reflecting prism conductive film 19 provided on the reflecting prism 3, the prism base 4, the substrate 10, the support 9 fixed on the substrate 10, one end Is the post 9
In addition, the other end is attached to the prism base 4 and includes a cantilever 6 for elastically supporting the reflection prism 3 and a lower electrode 8 fixed to the substrate 10. In addition, any one of the opposing surfaces of the waveguide conductive film 2 and the reflective prism conductive film 19 is subjected to an insulation treatment to prevent a short circuit. The waveguide conductive film 2, together with the lower electrode 8 and the reflective film conductive film 19,
Form a drive mechanism. Further, the first drive mechanism existing in the first embodiment does not exist in the present embodiment.

Then, the reflection prism 3 is connected to the waveguide 1
A driving mechanism for moving the robot toward and away from the vehicle will be described.
The driving mechanism moves the reflection prism 3 by electrostatic force using the reflection prism conductive film 19, the lower electrode 8, and the waveguide conductive film 2.

First, the waveguide conductive film 2 is set to 0 V, and a positive voltage + Vd is applied to the lower electrode 8. On the other hand, 0 V or a positive voltage + Vd is applied to the reflective prism conductive film 19 by a drive circuit as required for ON / OFF of optical switching. That is, the voltage is set to + Vd when the optical switching is turned on, and to 0 V when the optical switching is turned off. Then, the reflective prism conductive film 19 receives an attractive force on the side having a potential difference due to electrostatic force, so that the reflective prism conductive film 19 is integrated with the reflective prism conductive film 19.
3 moves to the substrate 10 side when the reflection prism conductive film 19 is 0V, and moves to the waveguide 1 side when + Vd.
As described above, the reflection prism 3 is connected to the conductive film 2.
, And optical switching can be performed.

In the present embodiment, the structure is simple and the manufacture is easy. Therefore, when a semiconductor process is used, the number of steps can be reduced, and manufacturing at low cost is possible. Also, the failure rate can be reduced.

In the above example, the lower electrode 8
+ Vd is applied to the reflective prism conductive film 19, and 0 V is applied to the waveguide conductive film 2. In addition, the same effect can be obtained by a configuration in which 0 V is applied to the lower electrode 8, + Vd or 0 V is applied to the reflective prism conductive film 19, and + Vd is applied to the waveguide conductive film 2. Further, the reflection prism conductive film 19 is fixed at 0 V or 5 V, and ON / OFF of the optical switching element is performed.
Accordingly, the same effect can be obtained even when the waveguide conductive film 2 is set to 5 V and the lower electrode 8 is set to 0 V when ON, and inverted when OFF.

(Embodiment 10) FIG. 15 is an explanatory view showing the configuration of an optical switching element according to another embodiment of the present invention, showing an optical switching OFF state. In the optical switching element described in the fourth embodiment, the reflection prism 3 is moved by the first driving mechanism and the second driving mechanism. However, if the second driving mechanism can generate a sufficiently large force. Alternatively, a configuration having only the second driving force may be adopted.

The optical switching element includes a waveguide 1, a substantially transparent waveguide conductive film 2 provided on the surface of the waveguide 1, and approaches and separates from the waveguide 1 via the waveguide conductive film 2. A reflective prism 3, a reflective film 18 as a reflective surface of the reflective prism 3, a prism base 4 made of a conductive material, a substrate 10, a support 9 fixed on the substrate 10,
One end is attached to the support 9 and the other end is attached to the prism base 4. The cantilever 6 elastically supports the reflection prism 3, and the lower electrode 8 is fixed to the substrate 10. The waveguide conductive film 2 forms a driving mechanism together with the lower electrode 8 and the prism base 4. Further, the first drive mechanism existing in the first embodiment does not exist in the present embodiment.

Then, the reflecting prism 3 is connected to the waveguide 1
A driving mechanism for moving the robot toward and away from the vehicle will be described.
The driving mechanism moves the reflection prism 3 by electrostatic force using the prism base 4, the lower electrode 8, and the waveguide conductive film 2.

First, the waveguide conductive film 2 is set at 0 V, and a positive voltage + Vd is applied to the lower electrode 8. On the other hand, 0 V or a positive voltage + Vd is applied to the prism base 4 by a drive circuit as needed for ON / OFF of optical switching. That is, optical switching O
The voltage is set to + Vd when set to N, and set to 0V when set to OFF. Then, since the prism base 4 receives an attractive force due to electrostatic force on the side having a potential difference, the reflection prism 3 connected to the prism base 4 moves toward the substrate 10 when the prism base 4 is at 0V. , + Vd, it moves to the waveguide 1 side. As described above, the switching of the light can be performed by moving the reflection prism 3 toward and away from the conductive film 2.

In the present embodiment, the structure is simplified and the manufacture is easy. Therefore, when a semiconductor process is used, the number of steps can be reduced, and manufacturing at low cost is possible. Also, the failure rate can be reduced.

In the above example, the lower electrode 8
+ Vd, and 0 V or + Vd on the prism base 4.
0 V was applied to the waveguide conductive film 2. In addition, the same effect can be obtained by a configuration in which 0 V is applied to the lower electrode 8, + Vd or 0 V is applied to the prism base 4, and + Vd is applied to the waveguide conductive film 2. Further, the prism base 4 is fixed to 0 V or 5 V, and according to ON / OFF of the optical switching element, the waveguide conductive film 2 is set to 5 V when the optical switch is ON, and the lower electrode 8 is set to 0 V when the optical switching element is OFF. The same effect can be obtained even if such a configuration is adopted.

(Embodiment 11) FIG. 16 is an explanatory view showing a configuration of an optical switching element according to another embodiment of the present invention, showing an optical switching OFF state. In the optical switching element shown in the fifth embodiment, the reflection prism 3 is moved by the first driving mechanism and the second driving mechanism. However, if the second driving mechanism can generate a sufficiently large force. Alternatively, a configuration having only the second driving force may be adopted.

The optical switching element includes a waveguide 1, a substantially transparent waveguide conductive film 2 provided on the surface of the waveguide 1, and approaches and separates from the waveguide 1 via the waveguide conductive film 2. The reflecting prism 3, a reflecting film 18 which is a reflecting surface of the reflecting prism 3 and is made of a conductive material, a prism base 4, a substrate 10, a support 9 fixed on the substrate 10, one end of which is connected to the support 9. One end is attached to the prism base 4, and the cantilever 6 elastically supports the reflection prism 3, and the lower electrode 8 is fixed to the substrate 10.
It is composed of The waveguide conductive film 2 forms a driving mechanism together with the lower electrode 8 and the reflection film 18.
Further, the first drive mechanism existing in the first embodiment does not exist in the present embodiment.

Then, the reflecting prism 3 is connected to the waveguide 1
A driving mechanism for moving the robot toward and away from the vehicle will be described.
The drive mechanism moves the reflection prism 3 by electrostatic force using the reflection film 18, the lower electrode 8, and the waveguide conductive film 2.

First, the waveguide conductive film 2 is set to 0 V, and a positive voltage + Vd is applied to the lower electrode 8. On the other hand, 0 V or a positive voltage + Vd is applied to the reflective film 18 by a drive circuit as needed for ON / OFF of optical switching. That is, optical switching ON
+ Vd to turn off, and 0 V to turn off.
Then, since the reflection film 18 receives an attractive force on the side having a potential difference by electrostatic force, the reflection prism 3 connected to the reflection film 18 moves toward the substrate 10 when the reflection film 18 is at 0V. , + Vd, it moves to the waveguide 1 side. As described above, the switching of the light can be performed by moving the reflection prism 3 toward and away from the conductive film 2.

In this embodiment, the structure is simple, and therefore, the manufacture is easy. Therefore, when a semiconductor process is used, the number of steps can be reduced, and manufacturing at low cost is possible. Also, the failure rate can be reduced.

In the above example, the lower electrode 8
+ Vd, 0 V or + Vd to the reflective film 18, and 0 V to the waveguide conductive film 2. In addition, 0 V is applied to the lower electrode 8 and + Vd or 0 is applied to the reflection film 18.
V, the same effect can be obtained by a configuration in which + Vd is applied to the waveguide conductive film 2. Further, the reflection film 18 is fixed at 0 V or 5 V, and according to ON / OFF of the optical switching element, the waveguide conductive film 2 is set to 5 V at the time of ON, and the lower electrode 8 is set to 0 V at the time of OFF. The same effect can be obtained even if such a configuration is adopted.

(Embodiment 12) FIG. 17 is an explanatory view showing a configuration of an optical switching element according to another embodiment of the present invention, showing an optical switching OFF state. In the optical switching element described in the sixth embodiment, the reflection prism 3 is moved by the first driving mechanism and the second driving mechanism. However, if the second driving mechanism can generate a sufficiently large force. Alternatively, a configuration having only the second driving force may be adopted.

The optical switching element includes a waveguide 1, a substantially transparent waveguide conductive film 2 provided on the surface of the waveguide 1, and approaches and separates from the waveguide 1 via the waveguide conductive film 2. The reflecting prism 3 made of a conductive material, the reflecting film 18 which is a reflecting surface of the reflecting prism 3, the prism base 4, the substrate 10, the support 9 fixed on the substrate 10, one end of the support 9 One end is attached to the prism base 4, and the cantilever 6 elastically supports the reflection prism 3, and the lower electrode 8 is fixed to the substrate 10.
It is composed of In addition, any one of the opposing surfaces of the waveguide conductive film 2 and the reflection prism 3 is subjected to an insulation treatment to prevent a short circuit. The waveguide conductive film 2
Is, together with the lower electrode 8 and the prism electrode 5,
Form a drive mechanism. Further, the first drive mechanism existing in the first embodiment does not exist in the present embodiment.

Then, the reflection prism 3 is connected to the waveguide 1
A driving mechanism for moving the robot toward and away from the vehicle will be described.
The driving mechanism includes the reflection prism 3, the lower electrode 8,
The reflection prism 3 is moved by electrostatic force using the waveguide conductive film 2.

First, the waveguide conductive film 2 is set to 0 V, and a positive voltage + Vd is applied to the lower electrode 8. On the other hand, 0 V or a positive voltage + Vd is applied to the reflection prism 3 as required by the drive circuit to turn ON / OFF the optical switching. That is, the voltage is set to + Vd when the optical switching is turned on, and to 0 V when the optical switching is turned off. Then, the reflection prism 3 receives an attractive force on the side having a potential difference due to electrostatic force. Therefore, the reflection prism 3 connected to the reflection prism 3 moves toward the substrate 10 when the reflection prism 3 is at 0V. , + Vd, it moves to the waveguide 1 side. As described above, the switching of the light can be performed by moving the reflection prism 3 toward and away from the conductive film 2.

In the present embodiment, the structure is simple, so that the manufacture is easy. Therefore, when a semiconductor process is used, the number of steps can be reduced, and manufacturing at low cost is possible. Also, the failure rate can be reduced.

In the above example, the lower electrode 8
Is + Vd, and the reflection prism 3 is 0V or + V.
d, 0 V was applied to the waveguide conductive film 2. In addition, 0 V is applied to the lower electrode 8 and + V is applied to the reflection prism 3.
The same effect can be obtained by a configuration in which Vd or 0 V is applied and + Vd is applied to the waveguide conductive film 2. Further, the reflection prism 3 is fixed at 0 V or 5 V, and according to ON / OFF of the optical switching element, the waveguide conductive film 2 is set to 5 V at the time of ON, and the lower electrode 8 is set to 0 V at the time of OFF. The same effect can be obtained even if such a configuration is adopted.

(Embodiment 13) FIG. 18 is an explanatory view showing a configuration of an optical switching element according to another embodiment of the present invention, showing an optical switching OFF state. In the optical switching element described in the seventh embodiment, the reflection prism 3 is moved by the first driving mechanism and the second driving mechanism. However, if the second driving mechanism can generate a sufficiently large force. Alternatively, a configuration having only the second driving force may be adopted.

The optical switching element comprises a waveguide 1 made of a conductive material, and the waveguide conductive film 2
The reflecting prism 3 approaching and separating from the reflecting prism 3, the reflecting film 18 which is a reflecting surface of the reflecting prism 3, the reflecting prism conductive film 19 provided on the reflecting prism 3, the prism base 4, the substrate 10, and the substrate 10 A fixed support 9, one end of which is attached to the support 9, the other end of which is attached to the prism base 4, a cantilever 6 for elastically supporting the reflection prism 3, and a lower electrode 8 fixed to the substrate 10.
It is composed of In addition, any one of the opposing surfaces of the waveguide 1 and the reflective prism conductive film 19 is subjected to an insulation treatment to prevent a short circuit. The waveguide conductive film 2 comprises:
A driving mechanism is formed together with the lower electrode 8 and the prism electrode 5. Further, the first drive mechanism existing in the first embodiment does not exist in the present embodiment.

Then, the reflecting prism 3 is connected to the waveguide 1
A driving mechanism for moving the robot toward and away from the vehicle will be described.
The driving mechanism includes the prism electrode 5, the lower electrode 8,
The reflection prism 3 is moved by electrostatic force using the waveguide conductive film 2.

First, the waveguide conductive film 2 is set to 0 V, and a positive voltage + Vd is applied to the lower electrode 8. On the other hand, 0 V or a positive voltage + Vd is applied to the prism electrode 5 according to the necessity of ON / OFF of the optical switching by the drive circuit. That is, the voltage is set to + Vd when the optical switching is turned on, and to 0 V when the optical switching is turned off. Then, since the prism electrode 5 receives an attractive force due to electrostatic force on the side having a potential difference, the reflection prism 3 connected to the prism electrode 5 moves toward the substrate 10 when the prism electrode 5 is at 0V. , + Vd, it moves to the waveguide 1 side. As described above, the switching of the light can be performed by moving the reflection prism 3 toward and away from the conductive film 2.

In this embodiment, the structure is simple, and therefore, the manufacture is easy. Therefore, when a semiconductor process is used, the number of steps can be reduced, and manufacturing at low cost is possible. Also, the failure rate can be reduced.

In the above example, the lower electrode 8
Is + Vd, and the prism electrode 5 is 0V or + V.
d, 0 V was applied to the waveguide conductive film 2. In addition, 0 V is applied to the lower electrode 8 and + V is applied to the prism electrode 5.
The same effect can be obtained by a configuration in which Vd or 0 V is applied and + Vd is applied to the waveguide conductive film 2. Further, the prism electrode 5 is fixed at 0 V or 5 V, and according to ON / OFF of the optical switching element, the waveguide conductive film 2 is set to 5 V at the time of ON, and the lower electrode 8 is set to 0 V at the time of OFF. The same effect can be obtained even if such a configuration is adopted.

[0088]

According to the present invention, the following effects can be obtained.

(1) As described above, the optical switching element of the present invention has a configuration in which the second driving mechanism is provided in addition to the first driving mechanism, so that the reflection prism can be operated with a small driving voltage. 3 can be moved. Therefore,
It can be easily driven by a low-voltage driving circuit formed on the substrate 10, and an IC can be formed by a low-voltage process. This allows production at low cost. Further, a low breakdown voltage transistor occupies a small space, which is advantageous for miniaturization and miniaturization. Further, the generation of heat is small, the risk of destruction due to heat generation is reduced, and the heat radiation design needs to be reduced. Also, noise due to switching can be reduced.

(2) The optical switching element of the present invention can perform switching with low power consumption by using the second drive mechanism only at the start of movement.

(3) In the optical switching element of the present invention, the reflective prism 3 is provided with a reflective prism conductive film 19, and a voltage is applied between the waveguide conductive film 2 and the reflective prism conductive film 19 to form the optical switch. When the second drive mechanism is configured, the distance between the two films to which the voltage is applied is small,
A larger driving force can be obtained at a lower voltage.

(4) In the optical switching element of the present invention, the second driving mechanism is formed by making the prism base 4 conductive and applying a voltage between the waveguide conductive film 2 and the prism base 4. In the case of a configuration, the distance between the waveguide conductive film 2 to which a voltage is applied and the prism base 4 is small, and the area of the opposing area is enlarged. Can be obtained.

(5) In the optical switching element of the present invention, the reflection prism 3 is made conductive, and a voltage is applied between the waveguide conductive film 2 and the reflection prism 3 to operate the second drive mechanism. With this configuration, a driving force can be obtained with a simple configuration.

(6) In the optical switching element of the present invention, the second driving mechanism is formed by making the prism base 4 conductive and applying a voltage between the waveguide conductive film 2 and the prism base 4. In the case of a configuration, the distance between the waveguide conductive film 2 to which a voltage is applied and the prism base 4 is small, and the area of the opposing area is enlarged. Can be obtained.

(7) In the optical switching element of the present invention, the waveguide 1 itself is made conductive and the reflection prism 3
When the second driving mechanism is configured by providing a reflective prism conductive film 19 on the substrate and applying a voltage between the waveguide 1 and the reflective prism conductive film 19, a large driving force can be obtained with a simple configuration. Can be.

(8) When the optical switching element of the present invention is configured to have only the second drive mechanism, the configuration is simplified and the manufacture is easy. Therefore, when a semiconductor process is used, the number of steps can be reduced, and manufacturing at low cost is possible. Also, the failure rate can be reduced.

[Brief description of the drawings]

FIG. 1 is an explanatory view showing one embodiment of an optical switching element of the present invention.

FIG. 2 is an explanatory view showing one embodiment of the optical switching element of the present invention.

FIG. 3 is an explanatory diagram for explaining an embodiment of the optical switching element of the present invention.

FIG. 4 is an explanatory diagram for explaining an embodiment of the optical switching element of the present invention.

FIG. 5 is an explanatory diagram for explaining one embodiment of the optical switching element of the present invention.

FIG. 6 is an explanatory diagram for explaining another embodiment of the optical switching element of the present invention.

FIG. 7 is an explanatory diagram for explaining another embodiment of the optical switching element of the present invention.

FIG. 8 is an explanatory view showing another embodiment of the optical switching element of the present invention.

FIG. 9 is an explanatory view showing another embodiment of the optical switching element of the present invention.

FIG. 10 is an explanatory view showing another embodiment of the optical switching element of the present invention.

FIG. 11 is an explanatory view showing another embodiment of the optical switching element of the present invention.

FIG. 12 is an explanatory view showing another embodiment of the optical switching element of the present invention.

FIG. 13 is an explanatory view showing another embodiment of the optical switching element of the present invention.

FIG. 14 is an explanatory view showing another embodiment of the optical switching element of the present invention.

FIG. 15 is an explanatory view showing another embodiment of the optical switching element of the present invention.

FIG. 16 is an explanatory view showing another embodiment of the optical switching element of the present invention.

FIG. 17 is an explanatory view showing another embodiment of the optical switching element of the present invention.

FIG. 18 is an explanatory view showing another embodiment of the optical switching element of the present invention.

FIG. 19 is an explanatory view showing an example of a conventional optical switching element.

FIG. 20 is an explanatory view showing an example of a conventional optical switching element.

[Explanation of symbols]

REFERENCE SIGNS LIST 1 waveguide 2 waveguide conductive film 3 reflective prism 4 prism base 5 prism electrode 6 cantilever 7 upper electrode 8 lower electrode 9 support 10 substrate 11 illumination light 12 derived light 13 curve without waveguide conductive film 14 waveguide conductive film 15 The optical thickness of the waveguide conductive film is 1/30 of the wavelength of light
16 Curve when the optical thickness of the waveguide conductive film is 1/8 of the wavelength of light 17 Curve when the optical thickness of the waveguide conductive film is 1/3 of the wavelength of light 18 Reflection Film 19 Reflective frame conductive film

Claims (9)

[Claims] 1. A light guide section having a total reflection surface capable of transmitting reflected light by total reflection, a first position approaching the extraction distance at which an evanescent wave leaks to the total reflection surface, and A light-transmitting extraction unit movable to a second position separated by more than the extraction distance, a conductive member that moves integrally with the extraction unit, and a first driving force of the driving force that moves the extraction unit. A driving unit, and a first layer made of a conductive material on a surface of the light guide unit facing the extraction unit, and applying a voltage between the first layer and the conductive member. An optical switching element that exerts a second driving force on the extraction unit. 2. The optical switching element according to claim 1, wherein said first layer is made of ITO. 3. The optical switching element according to claim 1, wherein said first layer is made of a material having a higher refractive index than said light guide section or said extraction section. 4. The driving means moves together with the extraction unit, a first electrode for sucking the extraction unit at a first position by electrostatic force, a second electrode for sucking the extraction unit at a second position. The optical switching element according to claim 1, comprising a third electrode, wherein the conductive member is the third electrode. 5. The extractor includes a second layer made of a conductive material on a surface facing the light guide, and the conductive member is the second layer. The optical switching element according to claim 1. 6. The optical switching element according to claim 1, wherein said extraction section has a support made of a conductive material, and said conductive member is said support. 7. The apparatus according to claim 1, wherein the extraction unit has a reflection surface for reflecting the extracted light, the reflection surface is conductive, and the conductive member is the reflection surface. 1
The optical switching element as described in the above. 8. The optical switching element according to claim 1, wherein said extraction unit is conductive, and said conductive member is said extraction unit. 9. A light guide portion made of a conductive material having a total reflection surface capable of transmitting reflected light by total reflection, and a light guide portion which is shorter than an extraction distance at which an evanescent wave leaks to the total reflection surface. 1 and a light-transmitting extraction unit movable to a second position separated by more than the extraction distance, a conductive member that moves integrally with the extraction unit, and a driving force that moves the extraction unit. 1. An optical switching element, comprising: driving means for exerting a first driving force; and applying a second driving force to the extraction section by applying a voltage between the light guide section and the conductive member.