JP2000312810A - Air washer - Google Patents

Abstract

(57) [Problem] To provide an air washer capable of shortening a dimension in a flow direction of an air flow and reducing a replenishing water amount of pure water. SOLUTION: A main body casing 12 having an air inlet 12a and an air outlet 12b to form a water spray chamber 13, and a most upstream washer medium 14 arranged at the air inlet 12a.
A most downstream washer medium 15 arranged at the most downstream position of the water spray chamber 13, a spray nozzle 16 located in the water spray chamber 13 downstream of the most upstream washer medium 14, and a downstream side of the most downstream washer medium 15. And a heat exchange fin 31 of the cooling coil 30.
Has a wave-shaped heat transfer surface along the air flow direction or has a slit portion penetrating in the air flow direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air conditioner in a semiconductor factory or the like, which removes dust and harmful gas from the air, and treats outside air for humidification and removal of harmful gas with high saturation efficiency. Related to air washers.

[0002]

2. Description of the Related Art Conventional air washers include those shown in FIGS. Air washer 111
Are the front washer portion 111a and the rear cooling coil portion 1
11b, the washer portion 111a has a water spray chamber 113 of a predetermined length inside a main body casing 112 having a rectangular flow path cross section. The water spray chamber 113 is connected to a duct (not shown) at an air inlet 113a formed at one end of the water spray chamber 113.
Flows out from the air outlet 113b formed at the other end through the flow path of the water spray chamber 113.

In the water spray chamber 113, a most upstream washer media 114 is disposed at an air inlet 113a, and a most downstream washer media 115 is located at an air outlet 113b.
Are disposed, and each washer media 114, 115
Has a shape substantially equal to the cross-section of the flow path of the air flow, is made of polyvinyl chloride fiber, stainless steel wire, or the like, and has a mat shape having a thickness of, for example, about 25 mm to 50 mm.

In the water spray chamber 113, a plurality of first-stage nozzles 116 communicating with a circulating water supply system to be described later are disposed at a position downstream of the most upstream washer medium 114, and a supply water supply to be described later Multiple second communicating with the system
The stage nozzle 117 is arranged at substantially the same position as the first stage nozzle 116. The first stage nozzle 116 sprays the spray water reaching the uppermost washer media 114 in the direction opposite to the air flow, and the second stage nozzle 117 sprays the most downstream washer in the forward direction with the air flow. The spray water is sprayed on the medium 115.

A water storage tank 118 is provided below the water spray chamber 113 to receive the spray water flowing down.
A circulating water supply system 119 for circulating the circulating water staying in the nozzle 8 to the first stage nozzle 116 is provided in communication with the lower part of the water spray chamber 113. The circulating water supply system 119 is connected to a suction pipe 120 opened at a lower part of the water storage tank 118, a circulation pump 121 connected to the suction pipe 120, a motor 122 for driving the circulation pump 121, and a discharge port of the circulation pump 121. A discharge pipe 123 disposed above the water spray chamber 113 and a plurality of branch pipes 124 branching from the discharge pipe 123 and disposed vertically in the water spray chamber 113. The first stage nozzle 116 is provided.

[0006] A makeup water supply system 125 for supplying pure water as makeup water to the second stage nozzle 117 is connected to a clean water supply device (not shown) or a pure water supply device (not shown), and is connected to a water spray chamber. It has a water supply pipe 126 arranged above 113, and the water supply pipe 126 is provided with the plurality of second-stage nozzles 117 described above. In the water storage tank 118, an overflow pipe 127,
A makeup water supply pipe 128 for supplying clean water as makeup water communicates with the makeup water supply pipe 128, and the makeup water supply pipe 128 communicates with a makeup water supply device (not shown).

[0007] Downstream of the water spray chamber 113, the water spray chamber 1
An eliminator 129 that removes water droplets and the like contained in the air that has passed through 13 is provided, and is connected to an air outlet 113b of the water spray chamber 113 to provide a cooling coil unit 111b. The cooling coil unit 111b has a cooling chamber 130 of a predetermined length having a channel cross-sectional shape similar to that of the water spray chamber 113,
A cooling coil 131 is provided inside the cooling chamber 130 as a cooler.
The drain pan 13 is provided below the cooling chamber 130.
2 are formed. A drain pipe 133 communicating with the outside of the cooling chamber 130 is connected to the recess of the drain pan 132. A blower (not shown) is arranged downstream of the water spray chamber 113, and the blower is operated to guide air to the flow path of the water spray chamber 113.

[0008]

In the above-described configuration, the air washer 111 is divided into a front washer portion 111a and a rear cooling coil portion 111b due to dimensional restrictions during truck transportation. Are transported individually and are combined at the installation site. In order to perform this assembling work, a space is required for a worker to enter the inside of the apparatus and perform a connecting work. In the cooling coil section 111b, the cooling coil 13
1 needs to be inspected from the upstream side of the air flow, and a space for performing the inspection work is required. By providing these spaces, the size of the air washer 111 in the flow direction of the air flow is increased.

In the summer operation, the cooling coil 11
By cooling the air in 1b, excess water in the air becomes condensed water. FIG. 16 shows a state change of air in the air washer 111 during the summer operation, and FIG.
6 are the air washers 1 shown in FIG.
11 at the time of the air inlet 113a, the eliminator 129
And the absolute humidity difference X2 between and corresponds to the above-described condensed water. This condensed water is composed of (absolute humidity difference X1 between) and excess water of the air itself flowing into the air washer 111, and humidified water (X2-X1) added in the air washer 111.

The condensed water is discharged from the drain pan 132 through the drain pipe 133 to the outside of the system.
The humidified water (X2-X1) added in 11 flows out of the system, and it is necessary to supply extra pure water corresponding to this. An object of the present invention is to solve the above-mentioned problems, and to provide an air washer capable of reducing the dimension in the flow direction of the air flow and reducing the amount of pure water supplied.

[0011]

In order to solve the above-mentioned problems, an air washer according to the present invention has an air inlet and an air outlet, and a water spray chamber in which air flows from the air inlet to the air outlet. A main casing, a most upstream washer media disposed at the air inlet, a most downstream washer media disposed at the most downstream position of the water spray chamber, and an air located in the water spray chamber downstream of the most upstream washer media. A spray nozzle that generates spray water reaching the uppermost washer media in a direction opposite to the flow, and a cooling coil disposed downstream of the most downstream washer media. Has a corrugated heat transfer surface along the line, or has a slit portion or the like penetrating in the air flow direction.

Further, the heat exchange fin may have another shape (such as a louver) for preventing the water droplets in the air from being captured by the heat transfer surface and being scattered downstream of the cooling coil. With the above-described configuration, the air flowing into the cooling coil through the most downstream washer media is cooled while passing through the flow path between the adjacent heat exchange fins. At this time, the flow of air passing through the flow path between the heat exchange fins becomes non-linear due to the heat transfer surface having a wave shape or having a slit portion, and the heat transfer surface transmits water droplets in the air. Captures and prevents water droplets from splashing downstream of the cooling coil.

As described above, since the cooling coil exerts the effect of the eliminator, the eliminator in the conventional configuration is not required, the size of the air washer in the air flow direction is shortened, and the entire apparatus is integrated and transported. Becomes possible. Eliminating the eliminator also eliminates its air resistance, thereby reducing the blowing power. As a more preferable configuration, at least the most downstream washer medium is divided into a plurality of parts and is detachably disposed.

According to this configuration, the inspection work can be performed from the upstream side with respect to the cooling coil. Therefore, it is not necessary to provide a space for the inspection work between the most downstream washer medium and the cooling coil, and the air flow of the air washer is eliminated. Since the dimension in the direction is further shortened, it becomes easy to integrate and transport the entire apparatus. An inspection port may be provided on a side portion of the water spray chamber or the duct on the upstream side of the main body casing, and the uppermost stream washer media and the intermediate washer media may be divided and provided detachably. An inspection port is required on the upstream duct or the like for connection with the main casing.

As a more preferable configuration, a water storage tank for receiving spray water flowing down from the water spray chamber and condensed water flowing down from the cooling coil, a circulating water supply system for circulating the circulating water in the water storage tank to the spray nozzle, And a makeup water supply system for supplying makeup water. With this configuration, during summer operation, condensed water generated in the cooling coil flows into the water storage tank. This condensed water consists of retained water that the air had before flowing into the air washer, and humidification water added in the air washer. The retained water is supplied to the water storage tank as makeup water, and the humidification water is also recovered. Therefore, the amount of pure water supplied from the supply water supply system can be significantly reduced.

As a more preferable configuration, a heating coil is arranged upstream of the most upstream washer medium. During winter operation, the air flowing into the air washer is heated by the heating coil and then guided to the most upstream washer media. In this case, an inspection port is provided in the water spray chamber.

[0017]

Embodiments of the present invention will be described below with reference to the drawings. Embodiment 1 As shown in FIGS. 1 to 3, the air washer 11 has a water spray chamber 13 having a predetermined length inside a main body casing 12 having a rectangular flow path cross section. Body casing 12
Is connected to a duct (not shown) at an air inlet 12 a formed at one end of the main casing 1.
2 flows out from an air outlet 12b formed at the other end.

The main casing 12 has an inspection port (not shown) which is opened and closed by a door at a side portion corresponding to the water spray chamber 13, and a most upstream washer medium 14 is disposed at the air inlet 12 a. The most downstream washer media 15 is arranged at the most downstream position. Each washer media 14,
Reference numeral 15 denotes a mat-like member having a shape substantially equal to the cross section of the air flow, made of polyvinyl chloride fiber or stainless steel wire, and having a thickness of, for example, about 25 mm to 50 mm. Reference numeral 15 is divided into a plurality of parts and is detachably provided.

Inside the water spray chamber 13, a plurality of first-stage nozzles 16 communicating with a circulating water supply system described later are arranged at a position downstream of the most upstream washer medium 14, and a supply water supply system described later is provided. A plurality of second stage nozzles 17 communicating with the system are arranged at substantially the same positions as the first stage nozzles 16. The first stage nozzle 16 sprays the spray water reaching the most upstream washer media 14 in the direction opposite to the air flow, and the second stage nozzle 17 sprays the most downstream washer in the forward direction with the air flow. The spray water is sprayed on the medium 15.

The pressure of the spray water from the first stage nozzle 16;
The distance between the first stage nozzle 16 and the most upstream washer medium 14 is about a predetermined spray angle (60 ° to 70 °), and when a predetermined flow rate of air is flowing into the water spray chamber 13, It is set to such an extent that a part (about 1/3) collides with the most upstream washer medium 14. Further, a part of the remaining water (about 1/3, 2/9 of the total water amount) collides with the ceiling surface, the wall surface, and the like in the water spray chamber 13, and the remaining water (5/9 of the total water amount). Is set to move along the flow of air and collide with the most downstream washer media 15.

The pressure, the installation position, and the spray direction of the spray water of the second stage nozzle 17 are such that when a predetermined flow rate of air is flowing into the water spray chamber 13, the spray water is widely diffused to the most downstream washer medium 15. To collide with each other, for example, spray angle
The angle is set to about 0 to 70 degrees, the upper part of the nozzle position, and the oblique downward spray. A water storage tank 18 is provided below the water spray chamber 13 for receiving the spray water flowing down. A circulating water supply system 19 for circulating the circulating water staying in the water storage tank 18 to the first stage nozzle 16 is provided in the water spray chamber. 13 is provided in communication with the lower part.

The circulating water supply system 19 includes a suction pipe 20 opening below the water storage tank 18, a circulation pump 21 connected to the suction pipe 20, a motor 22 for driving the circulation pump 21, and a discharge port of the circulation pump 21. And a plurality of branch pipes 24 branched from the discharge pipe 23 and arranged in the water spray chamber 13 in a vertical direction. The plurality of first-stage nozzles 16 described above are provided.

A make-up water supply system 25 for supplying pure water as make-up water to the second stage nozzle 17 is connected to a clean water supply device (not shown) or a pure water supply device (not shown) to connect to a water spray chamber. 13 and a water supply pipe 26 disposed above the water supply pipe 2.
6 is provided with the plurality of second-stage nozzles 17 described above. An overflow pipe 27 and a makeup water supply pipe 28 for supplying clean water as makeup water communicate with the water storage tank 18, and the makeup water supply pipe 28 communicates with a clean water supply device (not shown).

The main body casing 12 forms a cooling chamber 29 downstream of the water spray chamber 13, and a cooling coil 30 is provided as a cooler inside the cooling chamber 29, and the cooling coil 30 is located above the water storage tank 18. ing. As shown in FIG.
The cooling coil 30 is provided with a plurality of heat exchange fins 31 arranged along the air flow direction in parallel with an appropriate gap, and provided with a plurality of cold water circulation tubes 32 through the heat exchange fins 31. Each heat exchange fin 31 has a wave-shaped heat transfer surface along the air flow direction.

FIG. 5 shows another configuration of the cooling coil 30. Each heat exchange fin 31 has a plurality of slits 33 formed on its heat transfer surface.
Reference numeral 3 denotes a protrusion 33a formed on the heat transfer surface and a slit 33b penetrating in the air flow direction. Water spray chamber 13
A blower (not shown) is arranged on the downstream side of the air-conditioning apparatus. By operating the blower, air is guided to the flow path of the water spray chamber 13.

The operation of the above configuration will be described. The air A flows from the air inlet 12a to the washer media 14 at the uppermost stream.
Through the water spray chamber 13. For this airflow,
The circulating water from the water storage tank 18 is sprayed from the first stage nozzle 16 so as to face the flow. The spray water collides with dust and harmful gas in the air, and the colliding dust and harmful gas in the air reaches the most upstream washer media 14 together with the spray water, and the most upstream washer media 14 sprays water with dust and harmful gas. To capture. In the most upstream washer media 14, the spray water rinses away dust attached to the most upstream washer media 14, flows down, takes in harmful gas, and flows into the water storage tank 18. The spray water evaporates in the process of flowing down to humidify the air.

Part of the spray water that has not collided with the uppermost washer media 14 collides with the ceiling surface, wall surface, or water storage surface of the water spray chamber 13, but otherwise moves along with the air flow, and the process proceeds. In addition to evaporating the air to humidify the air, it takes in dust and harmful gas in the air and reaches the most downstream washer media 14, and the most downstream washer media 14 captures spray water with dust and harmful gas.

Then, with respect to the air flow in the water spray chamber 13,
When clean water or pure water is sprayed from the second stage nozzle 17, the spray water of clean water or pure water arrives at the most downstream washer media 15 together with dust and harmful gas remaining in the air, and the most downstream washer media 15 Capture spray water with harmful gases. In the most downstream washer media 15, the spray water rinses away dust attached to the most downstream washer media 15 and flows down, while taking in harmful gases and flowing into the water storage tank 18. The spray water evaporates in the process of flowing down to humidify the air. The clean water or pure water that has flowed into the water storage tank 18 joins the circulating water as makeup water, passes through the circulating water supply system 19, and is sprayed as circulating water from the first stage nozzle 16.

The air that has passed through the most downstream washer media 15 flows into the cooling coil 30 of the cooling chamber 29 as purified and sufficiently humidified clean air, and passes through the flow path between the adjacent heat exchange fins 31. Is cooled. At this time, FIG.
As shown in FIG. 5, the heat transfer surface of the heat exchange fins 31 has a wavy shape, or has slits 33 as shown in FIG. The air has a non-linear flow, and the heat transfer surface catches water droplets in the air, thereby preventing the water droplets from being scattered downstream of the cooling coil 30.

As described above, since the cooling coil 30 exhibits the effect of the eliminator, the eliminator becomes unnecessary, and the size of the air washer in the air flow direction is shortened.
It is possible to convey the entire apparatus in one piece. Further, the elimination of the eliminator also eliminates the air resistance, thereby reducing the blowing power. Cooling coil 30
Performs inspection work from the upstream side by entering the water spray chamber 13 through an inspection port (not shown) and removing the most downstream washer media 15. As a result, there is no need to provide a space for inspection work between the most downstream washer media 15 and the cooling coil 30, the size of the air washer in the air flow direction is further reduced, and the entire apparatus can be integrated and transported. It will be easier.

Since the circulating water decreases with the humidification of the air, the required amount of the replenishing water is required to compensate for the decrease in the circulating water and maintain the harmful gas concentration in the circulating water at a certain value or less. To the circulating water circulation system. Since clean water or pure water flows into the water storage tank 18 as make-up water at the second stage nozzle 17, this water amount is subtracted from the necessary make-up water amount, and the amount is supplied from the make-up water supply pipe 28 to the water storage tank 18 as make-up water. . The replenishing water supplied from the water supply pipe 28 is not pure water but is purified water such as tap water which has been appropriately purified (with chlorine removed). Second stage nozzle 17
The supply water supply system 25 for supplying the supply water may supply all of the necessary supply water with clean water or pure water, and supply it from the supply water supply pipe 28 only in an emergency.

During summer operation, condensed water generated in the cooling coil 30 flows into the water storage tank 18. This condensed water is composed of retained water that the air had before flowing into the air washer 11 and humidification water added in the air washer. The retained moisture is supplied to the water storage tank 18 as makeup water, and Is also collected, so the makeup water supply system 25
The amount of pure water supplied from the tank can be greatly reduced.

FIG. 7 shows changes in the state of air in the air washer 11 during summer operation.
Are the air inlet 12 of the air washer 11 shown in FIG.
a, a point downstream of the most downstream washer media 15, and a point of time of the air outlet 12b.
The absolute humidity difference X2 between the above corresponds to the condensed water described above,
The absolute humidity difference between X1 and X1 corresponds to the initial moisture content of the air, and the difference between X2 and X1 corresponds to the humidification water added in the air washer 11.

Embodiment 2 As shown in FIG. 8, the air washer 11 has an intermediate washer medium 41 disposed between the most upstream washer medium 14 and the most downstream washer medium 15, and has the most downstream washer medium 15 and the intermediate washer medium 41. In between, the second stage nozzle 17 and the makeup water supply system 25 can be arranged.

In this configuration, the intermediate washer media 41
Clean water or pure water to the air flow passing through
When sprayed from the stage nozzle 17 toward the intermediate washer media 41, the spray water of clean water or pure water, together with the dust and harmful gas remaining in the air, forms the most downstream washer media 1.
5, the washer media 15 at the most downstream catches the spray water with dust and harmful gas. Other functions and effects are the same as those in the first embodiment.

Embodiment 3 As shown in FIG. 9, the air washers 11 can be arranged in multiple stages. In this configuration, it is not necessary to provide the cooling coil 30, the second stage nozzle 17, and the make-up water supply system 25 in the air washer 11 arranged on the upstream side, and the two water storage tanks 18 are communicated by a bypass pipe (not shown). I do.

Embodiment 4 As shown in FIG. 10, the air washer 11 may be provided with a heating coil 51 at the air inlet 12a of the main body casing 12 at a position upstream of the most upstream washer medium 14. With this configuration, during operation in winter, the air flowing into the air washer 11 is heated by the heating coil 51.
After heating in, it is guided to the most upstream washer media 14.

FIG. 11 shows the air washer 1 during operation in winter.
FIG. 11 shows a change in the state of air in FIG.
,... Correspond to the time point of the air inlet 12a of the air washer 11, the time point downstream of the heating coil 51, the time point downstream of the most downstream washer medium 15, and the time point of the air outlet 12b shown in FIG.

[0039]

As described above, according to the present invention, since the heat exchange fins of the cooling coil have a wave shape or have slits, water droplets in the air are captured by the heat transfer surface. Thus, it is possible to prevent water droplets from being scattered downstream of the cooling coil. This eliminates the need for an eliminator, thus reducing the size of the air washer in the airflow direction, making it possible to integrate and transport the entire device.
Due to the reduction of the air resistance, the blowing power is reduced. In addition, by providing an inspection port on the side of the water spray chamber and detachably installing the most downstream washer media, there is no need to provide a space for inspection work between the most downstream washer media and the cooling coil. The size of the washer is further shortened, so that the entire apparatus can be easily integrated and transported. In addition, since a water storage tank is provided for receiving the spray water flowing down from the water spray chamber and the condensed water flowing down from the cooling coil, the air condensed by circulating the condensed water of the cooling coil to the water storage tank during operation in summer. In addition to supplying the retained water to the water storage tank as makeup water, the humidifying water can be collected, and the amount of pure water supplied from the makeup water supply system can be significantly reduced.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of an air washer showing an embodiment of the present invention.

FIG. 2 is a plan sectional view of the air washer.

FIG. 3 is a front view of the air washer.

FIG. 4 is a perspective view of a cooling coil of the air washer.

FIG. 5 is a perspective view of another cooling coil of the air washer.

FIG. 6 is a schematic view of the air washer.

FIG. 7 is a psychrometric chart showing changes in the state of air during operation in summer.

FIG. 8 is a longitudinal sectional view of an air washer showing another embodiment of the present invention.

FIG. 9 is a longitudinal sectional view of an air washer according to another embodiment of the present invention.

FIG. 10 is a longitudinal sectional view of an air washer showing another embodiment of the present invention.

FIG. 11 is a psychrometric chart showing changes in the state of air during operation in winter.

FIG. 12 is a longitudinal sectional view of a conventional air washer.

FIG. 13 is a plan sectional view of the air washer.

FIG. 14 is a front view of the air washer.

FIG. 15 is a schematic view of the air washer.

FIG. 16 is a psychrometric chart showing changes in the state of air during operation in summer.

[Explanation of symbols]

 A Air 11 Air washer 12 Main body casing 12a Air inlet 12b Air outlet 13 Water spray chamber 14 Uppermost washer media 15 Lowermost washer media 16 First stage nozzle 17 Second stage nozzle 18 Water storage tank 19 Circulating water supply system 25 Supply water supply System 28 Supply water supply pipe 29 Cooling chamber 30 Cooling coil 31 Heat exchange fin

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[Procedure amendment]

[Submission date] August 4, 1999 (1999.8.4)

[Procedure amendment 1]

[Document name to be amended] Drawing

[Correction target item name] Fig. 8

[Correction method] Change

[Correction contents]

FIG. 8

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tsutsuaki Uemura 28, Hirade Industrial Park, Utsunomiya City, Tochigi Prefecture Kubota Air Quality Co., Ltd. F-term (reference) in Tochigi Plant of Tochigi Co., Ltd. 4D020 AA10 BA23 BB03 CB27 CB28 CC01 CC06 CC09 CC15 CC16 CD02 DA01 DA02 DA03 DB02 DB03 DB12 DB20 4D032 AB02 AC04 AC07 AC08 BA03 BB08 DA10

Claims (4)

[Claims] 1. A main body casing having an air inlet and an air outlet and forming a water spray chamber in which an air flow is generated from the air inlet toward the air outlet, a most upstream washer medium disposed at the air inlet, and a water spray The most downstream washer media located at the most downstream position of the chamber, and the spray that is located in the water spray chamber downstream of the most upstream washer media and generates the spray water that reaches the most upstream washer media in the direction opposite to the air flow. A nozzle and a cooling coil disposed downstream of the most downstream washer media, wherein the heat exchange fins of the cooling coil have a wave-shaped heat transfer surface along the air flow direction or penetrate in the air flow direction. An air washer having a slit portion and the like. 2. The air washer according to claim 1, wherein at least the most downstream washer medium is divided into a plurality of parts and arranged detachably. 3. A water storage tank for receiving spray water flowing down from the water spray chamber and condensed water flowing down from the cooling coil, a circulating water supply system for circulating the circulating water in the water storage tank to the spray nozzle, and supplying makeup water. 3. The air washer according to claim 1, further comprising a makeup water supply system. 4. The air washer according to claim 1, wherein a heating coil is arranged upstream of the most upstream washer medium.