JP2000306979A - Copying device - Google Patents

Abstract

(57) [Problem] To perform high-precision copying and prevent first to third members from rotating around a Z-axis. A first groove portion extending along the X-axis and having a first concave arc surface is formed in a lower block. The intermediate block 12 has a first concave arc surface 26a.
A first projection 30 having a first convex arcuate surface 30a disposed opposite to the first projection is formed. And the upper block 1
1 is received by the intermediate block 12 in a non-contact manner, and the upper block 11 is rotatable only in the Y-axis direction. The lower block 13 is formed with a second groove 16 extending along the Y-axis direction and having a second concave circular arc surface 16a. The lower block 13 includes the second concave arc surface 1.
A second protrusion 20 having a second convex circular arc surface 20a arranged opposite to 6a is formed. Then, the intermediate block 12 is received by the lower block 13 in a non-contact manner,
The intermediate block 12 is rotatable only in the X-axis direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a copying apparatus used for a chip mounter for transferring a diced semiconductor chip onto a lead frame of a die bonding apparatus.

[0002]

2. Description of the Related Art Conventionally, as this type of copying apparatus,
A copying ball having a convex and hemispherical curved surface is rotatably supported by a ball receiver having a concave and hemispherical curved surface. The copying ball is provided with a suction member for sucking the diced semiconductor chip. Then, when the tip surface of the suction member comes into contact with the surface of the semiconductor chip,
The copying ball is rotated according to the parallelism of the semiconductor chip. By this rotation, the tip surface of the suction member is tilted in accordance with the parallelism of the surface of the semiconductor chip. Due to this tilt, the tip surface of the suction member becomes parallel to the surface of the semiconductor chip.

[0003]

However, in the conventional copying apparatus, the ball receiver and the copying ball are always in mechanical contact with each other. For this reason, when the copying operation is performed, there is a problem that the sliding resistance of the copying ball against the ball receiver adversely affects the copying accuracy. There is also a problem that the copying ball is likely to rotate around the axis of the suction member, that is, the axis parallel to the direction orthogonal to the contact surface of the suction member.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and has as its object to perform high-precision copying, and to support around an axis parallel to a direction orthogonal to a contact surface of a copying member. An object of the present invention is to provide a copying apparatus capable of preventing a member from rotating.

[0005]

According to the first aspect of the present invention, a first member, a second member, and a third member are connected in the Z-axis direction in this order. And a pair of X-axis direction movement restrictors on either side surface of one of the first and second members so that the first and second members can relatively move only in the Y-axis direction. The first member is received by the second member in a non-contact state in a state where the Z-axis side end faces of the two members are opposed to each other, and the second and third members are connected to each other on the X-axis. In order to allow relative movement only in the direction, a pair of Y-axis direction movement restricting members are provided on both side surfaces of one of the second and third members, and the Z-axis side end surfaces of both members are connected to each other. The fact that the second member is received by the third member in a non-contact manner in the state of facing It is a fact.

According to the second aspect of the present invention, a first member, a second member, and a third member are sequentially provided in the Z-axis direction in that order, and one of the first and second members is provided. On the other hand, X
A first groove portion extending along the axial direction and having a first concave arc surface is provided, and a first protrusion having a first convex arc surface disposed opposite to the first concave arc surface is provided on the other side. The first and second members are received by the second member in a non-contact manner so that the first and second members can relatively move only in the Y-axis direction, and the second and third members are A second groove portion extending along the Y-axis direction and having a second concave arc surface, and a second convex arc surface disposed opposite to the second concave arc surface on the other side. The second member is received by the third member in a non-contact manner so that the first and second members can relatively move only in the X-axis direction. That is the main point.

According to a third aspect of the present invention, in the copying apparatus according to the first or second aspect, a pressurized fluid supply means for supplying a pressurized fluid for providing a static pressure to a gap between the respective members is provided. That is the main point.

Hereinafter, the "action" of the present invention will be described. According to the first aspect of the present invention, since the Z-axis side end faces of the first, second and third members are not in contact with each other, little sliding resistance acts between the members. Therefore, any one of the members can be brought into contact with the object, and the contact surface can be made parallel to the specific surface of the object, so that highly accurate copying can be performed.

The movement of the first and second members in the X direction is regulated by the X-direction movement regulating member. Therefore, the first and second members can relatively move only in the Y-axis direction. On the other hand, the movement of the second and third members in the Y direction is regulated by the Y direction movement regulating body. Therefore, the second and third members can relatively move only in the X-axis direction. Therefore, even if a force for rotating each member about the Z axis acts, each member does not rotate about the Z axis because each member interferes with the movement restricting body.

According to the second aspect of the invention, since the arc surfaces of the first and second members are not in contact with each other, the sliding resistance hardly acts on these two members. Further, since the arc surfaces of the second and third members are not in contact with each other, the sliding resistance hardly acts on these two members. Therefore,
Any one of the members abuts on the object, and the contact surface can be made parallel to a specific surface of the object,
High-accuracy copying can be performed.

The first concave arc surface provided on one of the first and second members and the first convex arc surface provided on the other are arranged to face each other. As a result, both members are restricted from moving in the X direction, and can be relatively moved only in the Y axis direction. On the other hand, the second concave arc surface provided on one of the second and third members and the second convex arc surface provided on the other are arranged to face each other. As a result, both members are restricted from moving in the Y direction, and can be relatively moved only in the X axis direction. Therefore, even if a force for rotating the first to third members about the Z axis is applied, the arc surfaces of the members interfere with each other, so that the members do not rotate about the Z axis. Absent.

According to the third aspect of the invention, the members are kept in a non-contact state by the action of the static pressure generated by the pressurized fluid supplied from the pressurized fluid supply means. When such a fluid is used, unlike a case where the members are not in contact with each other by, for example, a magnetic force, the members can be used without any problem even in an environment that affects magnetism.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings. In the present embodiment, the vertical (vertical) direction is Z
The directions perpendicular to the Z-axis direction and perpendicular to each other on the horizontal plane are defined as the X-axis direction and the Y-axis direction.

As shown in FIGS. 1 and 2, the copying apparatus 10
Are, in order from the top, an upper block 11 and an intermediate block 12
And a lower block 13.
To 13 are continuously provided along the Z-axis direction. An attachment recess 14 is formed on the upper surface of the lower block 13, and a porous material 15 is attached to the attachment recess 14 with an adhesive. A second groove 16 extending along the Y-axis direction is formed on the upper surface of the porous material 15, and an inner wall surface of the second groove 16 is a second concave arc surface 16a. As shown in FIG. 4B, the center of the upper surface of an object 33 such as a semiconductor chip mounted on the upper block 11 is the center of curvature C1 of the second concave arc surface 16a. Note that, in the present embodiment, the third member includes the lower block 13 and the porous material 15.

As a material for forming the porous material 15, for example, a metal material such as sintered aluminum, sintered copper, and sintered stainless steel can be used. In addition, synthetic resin materials such as sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered polyacetal resin, and the like, sintered carbon, sintered ceramics, and the like can be used.

On both left and right side surfaces (side surfaces corresponding to the Y-axis direction) of the lower block 13, a movement regulating plate 17 as a Y-axis direction movement regulating body is provided. Each Y-axis direction movement regulating plate 17 extends along the Z-axis direction, and its lower end is fixed to the lower block 13 using a screw (not shown).

As shown in FIG. 3, a pressurized air supply passage 13a is formed in the lower block 13. The air supply port of the pressurized air supply passage 13a is opened on the front surface of the lower block 13, and the exhaust port is opened on both left and right side surfaces and the upper surface (mounting recess 14) of the lower block 13. An air supply port p1 is formed at an air supply port of the pressurized air supply passage 13a, and a pressure supply source (not shown) is connected to the air supply port p1. When pressurized air as a pressurized fluid is supplied from the pressure supply source to the air supply port p1, the pressurized air is supplied to the second material of the porous material 15 through the upper exhaust port of the pressurized air supply passage 13a. It is ejected from the entire concave arc surface 16a.

The lower block 13 has a passage 1 for evacuation.
3b is formed. The suction port of the evacuation passage 13 b is located on the upper surface of the lower block 13, that is, the second opening of the porous material 15.
An opening is formed in the concave arc surface 16 a, and a suction port is opened in the front surface of the lower block 13. Also, the evacuation passage 13
An air suction port p2 is formed at the suction port b, and the air suction port p2 is connected to a suction pump (not shown). Then, when the air is evacuated from the air suction port p <b> 2, an object (see FIG. 1) 33 such as a semiconductor chip is sucked on the upper surface of the upper block 11.

Porous materials 18 opposing each other are buried in the side portions of the Y-axis direction movement restricting plates 17, and the surfaces thereof are substantially flush with the side surfaces of the respective Y-axis direction movement restricting plates 17. . As a material for forming the porous material 18, the same material as the porous material 15 can be used.

Each Y-axis direction movement restricting plate 17 is formed with a pressurized air supply passage 17a. The air supply port of the pressurized air supply passage 17a is connected to the left and right exhaust ports of the pressurized air supply passage 13a of the lower block 13. Three exhaust ports of the pressurized air supply passage 17a are arranged side by side along the X-axis direction. Two of the exhaust ports on both sides are opened near the back surface of the porous material 18, and the other one is opened on the surface of each Y-axis direction movement regulating plate 17 facing each other. And pressurized air is supplied to the air supply port p.
1 is supplied to the pressurized air supply passage 1
Porous material 15 facing each other via 3a, 17a
From the entire surface along the Y-axis direction.

As shown in FIGS. 1 and 2, the intermediate block 12 is arranged between the Y-axis direction movement regulating plates 17 at a position corresponding to the porous material 18. The movement of the intermediate block 12 in the Y-axis direction is regulated by the Y-axis direction movement regulating plate 17. At the lower part of the intermediate block 12, a second protrusion 20 that can be supported by the second groove 16 is formed. The second protrusion 20 is a portion formed below the two-dot chain line in the intermediate block 12 shown in FIG. The lower surface of the second protrusion 20 is a second convex arc surface 20a. This second convex arc surface 20
a is equal to the radius of curvature of the second concave arc surface 16a.

The static pressure generated by the pressurized air ejected from the porous material 15 is applied to the second convex circular surface 20a.
Act on. As a result, the intermediate block 12 floats and is received by the lower block 13 in a non-contact manner. Also, the static pressure generated by the pressurized air ejected from the porous material 18 of the Y-axis direction movement restricting plate 17 acts on the left and right side surfaces of the intermediate block 12, so that the intermediate block 12 is separated from the Y-axis. No contact is made with the direction movement restricting plate 17. At this time, the intermediate block 12 and the lower block 1
3 or between the intermediate block 12 and the Y-axis direction movement restricting plate 17.

On the upper surface of the intermediate block 12, a mounting recess 24 is provided.
Is formed, and a porous material 25 is attached to the attachment recess 24 with an adhesive. A first groove 26 extending along the X-axis direction is formed on the upper surface of the porous material 25, and an inner wall surface of the first groove 26 is a first concave arc surface 26a. As shown in FIG. 4A, the center of the upper surface of an object 33 such as a semiconductor chip mounted on the upper block 11 is the center of curvature C2 of the first concave arc surface 26a. In the present embodiment, the second member includes the intermediate block 12 and the porous material 25. As a material for forming the porous material 25, the same material as the porous material 15 can be used.

On both front and rear side surfaces (side surfaces corresponding to the X-axis direction) of the intermediate block 12, movement restriction plates 27 as X-axis direction movement restriction bodies are provided. The X-axis direction movement restricting plate 27 is disposed at a position that does not interfere with the Y-axis direction movement restricting plate 17. Each X-axis direction movement restricting plate 27 extends along the Z-axis direction, and its lower end is fixed to the intermediate block 12 using a screw (not shown).

As shown in FIG. 3, the intermediate block 12 has pressurized air supply passages 12a and 12b communicating with the pressurized air supply passages 17a. The air supply port of one pressurized air supply passage 12a is opened on the left side of the intermediate block 12, and the exhaust port is opened on the front of the intermediate block 12. The air supply port of the other pressurized air supply passage 12b is opened on the right side of the intermediate block 12, and the exhaust port is opened on the upper surface (mounting recess 24) and the rear surface of the intermediate block 12. The pressurized air supplied to the air supply port p1 is ejected from the entire first concave arc surface 26a of the porous material 25 via the upper exhaust port of the pressurized air supply passage 12b.

The intermediate block 12 has a vacuum passage 12c communicating with the vacuum passage 13b. The suction port of the evacuation passage 12 c is opened on the upper surface of the lower block 13, that is, on the back side of the porous material 25, and the suction port is opened on the lower surface (the second convex arc surface 20 a) of the intermediate block 12. .

A porous material 28 facing each other is embedded in the side of each X-axis direction movement restricting plate 27, and the surface thereof is substantially flush with the side surface of each X-axis direction movement restricting plate 27. . As a material for forming the porous material 28, the same material as the porous material 15 can be used.

Each X-axis direction movement restricting plate 27 is formed with a pressurized air supply passage 27a. The air supply port of the pressurized air supply passage 27a is
a, 12b are connected to the exhaust ports. Two exhaust ports of the pressurized air supply passage 27a are provided, and these exhaust ports are opened near the rear surface of the porous material 28. The pressurized air to be supplied to the air supply port p1 is jetted from the entire surface of the porous material 28 facing each other in the X-axis direction via the pressurized air supply passages 12a and 27a. You.

As shown in FIGS. 1 and 2, the upper block 11 as the first member is disposed between the X-axis direction movement restricting plates 27 at a position corresponding to the porous material 28. The upper block 11 is moved by the X-axis direction movement regulating plate 27.
Are restricted from moving in the X-axis direction. A first protrusion 30 is formed below the upper block 11. The first protrusion 30 is provided on the upper block 1 shown in FIG.
1 means a portion formed below the two-dot chain line. The lower surface of the first protrusion 30 is a first convex arc surface 30a. The first convex arc surface 30a has the same radius of curvature as the first concave arc surface 26a.

The static pressure generated by the pressurized air ejected from the porous material 25 is applied to the first convex circular surface 30a.
, The upper block 11 floats and is received by the intermediate block 12 in a non-contact manner. Also, the static pressure generated by the pressurized air ejected from the porous material 28 of the X-axis direction movement restricting plate 27 acts on the left and right side surfaces of the upper block 11, so that the upper block 11 is separated from the X-axis. No contact is made with the direction movement restricting plate 27. At this time, the upper block 11 and the intermediate block 1
2, or between the upper block 11 and the X-axis direction movement regulating plate 27, a gap of about several μm is formed.

As shown in FIG. 3, an evacuation passage 11b communicating with the evacuation passages 13b and 12c is formed in the center of the upper block 11. The suction port of the evacuation passage 11 c is opened at the upper surface of the upper block 11, and the suction port is opened at the lower surface of the upper block 11.

Next, the operation of the copying apparatus 10 according to the present embodiment will be described. When pressurized air is supplied from the air supply port p1, pressurized air is ejected from the upper surface of the porous material 15 of the lower block 13 through the pressurized air supply passage 13a, and the intermediate block 12 floats. Further, the Y-axis direction movement restricting plate 1 is connected via the pressurized air supply passages 13a and 17a.
Pressurized air is ejected from the porous material 18 of 7, and the intermediate block 12 is separated from the Y-axis direction movement regulating plate 17. Therefore, the intermediate block 12 is not in contact with the surrounding members,
It becomes rotatable only in the X-axis direction along the second concave arc surface 16a.

When the pressurized air is supplied from the air supply port p1, the pressurized air supply passages 13a, 17a, 12b
Pressurized air is ejected from the upper surface of the porous material 25 through
The upper block 11 floats. Further, pressurized air is ejected from the porous material 28 through the pressurized air supply passages 13a, 17a, 12a (12b), 27a, and
Is separated from the X-axis direction movement restricting plate 27. Therefore, the upper block 11 does not come into contact with the surrounding members, and is rotatable only in the Y-axis direction along the first concave arc surface 26a.

In the above state, as shown in FIG. 4, the copying apparatus 10 approaches an object (see FIG. 1) 33 such as a semiconductor chip fixed to a support member (not shown), and the upper block 11 Is brought into contact with the object 33. When the lower surface of the object 33 is inclined with respect to a reference plane, each of the blocks 12 and 11 is tilted so as to follow the inclination angle. That is, as shown in FIG. 4A, when the lower surface of the object 33 is inclined along the X-axis direction, the intermediate block 12 is inclined. Also, FIG.
As shown in (b), when the lower surface of the object 33 is inclined along the Y-axis direction, the upper block 11 is inclined. As a result, the upper surface of the upper block 11 is
, And the copying operation is completed.

During the copying operation, the surrounding vibration is transmitted to the copying apparatus 10, and there is a possibility that a force for rotating the upper block 11 about the Z axis acts on the floating upper block 11.
In this case, since the first concave arc surface 26a and the first convex arc surface 30a are arranged to face each other, even if such a force acts, the two arc surfaces 26a and 30a interfere with each other.
Thus, the upper block 11 does not rotate around the Z axis. Further, even if a force in the X-axis direction acts on the upper block 11, the movement in the X-axis direction is regulated by the X-axis direction movement regulating plate 27. Therefore, the upper block 11
Rotates only in the X-axis direction.

Similarly, even if a force for rotating the floating intermediate block 12 about the Z-axis acts on the intermediate block 12, the second concave arc surface 16a and the second convex arc surface 20a interfere with each other. Thus, the intermediate block 12 does not rotate around the Z axis. Further, even if a force in the Y-axis direction acts on the intermediate block 12, the movement in the Y-axis direction is regulated by the Y-axis direction movement regulating plate 17. Therefore, the intermediate block 12 rotates only in the Y-axis direction. FIG. 4 shows the upper block 11
In order to easily explain the copying operation of the object 33,
The gaps and the sizes of the blocks 11 to 13 are exaggerated from the actual ones.

Therefore, according to the present embodiment, the following effects can be obtained. (1) The lower block 13 is formed with a second groove 16 extending along the Y-axis direction and having a second concave arcuate surface 16a. A second protrusion 20 having a second convex arc surface 20a is formed on the intermediate block 12, and the second protrusion 20 is arranged to face the second concave arc surface 16a. The lower block 13 receives the intermediate block 12 in a non-contact manner, and the intermediate block 12 is rotatable only in the X-axis direction. The first groove 2 extending along the X-axis and having the first concave arc surface 26a is formed in the intermediate block 12.
6 are formed. The upper block 11 is formed with a first protrusion 30 having a first convex arcuate surface 30a.
The protrusion 30 is disposed so as to face the first concave arc surface 26a. Then, the upper block 1 is added to the intermediate block 12.
The upper block 11 is rotatable only in the Y-axis direction.

Therefore, each block 11 in the Z-axis direction
13 are non-contact, so that there is almost no sliding resistance between these members. Therefore, it is possible to make the upper surface of the upper block 11 abut on the object 33 and make the abutting surface parallel to the lower surface of the object 33, thereby enabling high-accuracy copying.

(2) The second material formed on the porous material 15
The concave arc surface 16a and the second convex arc surface 20a formed on the intermediate block 12 are arranged to face each other.
Also, the first concave arc surface 26 formed on the porous material 25
a and the first convex arc surface 30a formed on the upper block 11 are arranged to face each other. For this reason, even if a force for rotating each of the blocks 11 to 13 around the Z-axis acts, the arc surfaces 16a, 20a and 26a, 30a interfere with each other. Therefore, it is possible to prevent each of the blocks 11 to 13 from rotating around the Z axis.

(3) Lower block 13 and intermediate block 1
2 and the gap between the intermediate block 12 and the upper block 11 are supplied with pressurized air for generating a static pressure. For this reason, for example, when the blocks 11 to 13 are brought into non-contact with each other by a magnetic force, the blocks cannot be used in an environment that affects magnetism. There is no need to consider the effects. Therefore, it can be used even in an environment that affects magnetic force. Further, since the pressurized air is used, a drip-proof structure may not be adopted unlike the case where a liquid is used, so that the configuration of the copying apparatus 10 can be simplified.

(4) Pressurized air is blown to the left and right sides of the intermediate block 12 on the opposite side of each Y-axis direction movement regulating plate 17. Pressurized air is blown to the left and right sides of the upper block 11 on the side of each X-axis direction movement restricting plate 27. For this reason, the Y-axis direction movement restricting plate 17 and the intermediate block 12,
Since the X-axis direction movement restricting plate 27 and the upper block 11 are not in contact with each other, almost no sliding resistance acts between these members. Therefore, it is possible to perform copying with higher accuracy.

(5) The lower block 13 is provided with a porous material 15 capable of ejecting pressurized air toward the intermediate block 12. The intermediate block 12 has an upper block 1
A porous material 25 capable of ejecting pressurized air toward 1 is provided. For this reason, when the pressurized air is jetted, the pressurized air is jetted from the entire porous members 15 and 25 with substantially uniform pressure. Therefore, blocks 11, 1
2 can be stabilized.

(6) A porous material 18 capable of ejecting pressurized air toward the intermediate block 12 is provided on the Y-axis direction movement regulating plate 17.
Is provided. A porous material 28 capable of ejecting pressurized air toward the upper block 11 is provided on the X-axis direction movement regulating plate 27.
Is provided. For this reason, when the pressurized air is jetted, the pressurized air is jetted from the whole of the porous members 18 and 28 with substantially equal pressure. Therefore, when the blocks 11 and 12 float, the postures of the blocks 11 and 12 can be stabilized.

(Second Embodiment) Next, a second embodiment of the present invention will be described focusing on parts different from the first embodiment.

As shown in FIGS. 5 to 7, on the upper part of the lower block 43 of the copying apparatus 40 according to the present embodiment, a first projection 44 having a first convex arc surface 44a on the upper surface is formed. . A pair of connecting plates 46 and 47 having a porous material 45 are fixed to both front and rear surfaces of the lower block 43. The porous material 45 is disposed to face the front and rear of the intermediate block 42. A connecting plate 48 as a connecting member is fixed to the distal end surfaces (free ends) of both connecting plates 46 and 47 using screws (not shown). That is, the base ends of the connection plates 46 and 47 are connected by the lower block 43, and the front ends are connected by the connection plate 48. A hemispherical mounting concave portion 49 is formed on the lower surface of the lower block 43, and a porous material 50 is mounted on the mounting concave portion 49 with an adhesive. The lower surface of the porous material 50 is a hemispherical concave surface 50a. In the present embodiment, the first member is
It is composed of a lower block 43 and a porous material 50.

As shown in FIG. 8, an air supply port p1 and an air suction port p2 are formed at both ends of the connection plate 48. Then, pressurized air is supplied from the air supply port p1. Air is evacuated from the air suction port p2.

The air supply port p1 is connected to one of the connecting plates 47.
Are communicated with two pressurized air supply passages 47a and 47b formed in the second passage. Both pressurized air supply passages 47a and 47b extend to the back surface of the porous material 45. Further, one pressurized air supply passage 47a is communicated with a pressurized air supply passage 43a formed in the lower block 43. Then, pressurized air passing through the pressurized air supply passage 43a is jetted from the lower surface of the porous material 50.

The air suction port p2 communicates with a vacuum passage 46a formed in the other connecting plate 46. The evacuation passage 46a communicates with an evacuation passage 43b formed in the lower block 43.

As shown in FIGS. 5 to 7, an upper block 41 as a third member is provided between the connecting plates 46 and 47 at a position above the lower block 43.
The lower surface of the upper block 41 has a second concave arc surface 5 on the lower surface.
A second groove 51 having 1a is formed. A pair of connecting plates 53 and 54 are fixed to both front and rear surfaces of the upper block 41.

A connecting block 55 as a connecting member is fixed to the end surfaces (free ends) of the connecting plates 53 and 54 using screws (not shown). That is, the connecting plates 53, 5
The base end of 4 is connected by an upper block 41, and the front end is connected by a connection block 55. Connecting block 5
The upper surface of 5 is a hemispherical convex surface 55a, which can engage with the hemispherical concave surface 50a of the porous material 50. A long tubular suction holder 56 extending along the Z-axis direction is provided on the central lower surface of the connection block 55.
Are protruding.

The connection block 55 has a vacuum passage 5
5b are formed. The upper end of the evacuation passage is communicated with the evacuation passage 43b of the lower block 43, and the lower end is communicated with the inside of the suction holder 56.

As shown in FIGS. 5 to 7, the intermediate block 4
2 is disposed between the upper and lower blocks 41 and 43 and in a space surrounded by the connecting plates 46, 47, 53 and 54. A second protrusion 60 is formed on an upper portion of the intermediate block 42, and a second convex arc surface 61 is formed on an upper surface of the protrusion 60.
A porous material 61 having a is provided. The radius of curvature of the second convex arc surface 61a is the same as the radius of curvature of the second concave arc surface 51a. A first groove 62 is formed in the lower part of the intermediate block 42, and the first groove 62 is provided with a porous material 63 having a first concave arc surface 63a. The radius of curvature of the first concave arc surface 63a is the same as that of the first convex arc surface 44a. In the present embodiment, the intermediate block 42 and the porous members 61 and 63 constitute a second member.

As shown in FIG. 8, a pressurized air supply passage 42a is formed in the intermediate block 42. Passage 42a
Is connected to a pressurized air supply passage 47b of the connecting plate 47. The other end of the passage 42a communicates with the pressurized air supply passage 45a of the connecting plate 46. The pressurized air flowing through the pressurized air supply passage 45 a is blown from the porous material 45. And the pressurized air supply passage 4
Pressurized air passing through 2 a is blown from the upper surface of the porous material 61 and the lower surface of the porous material 63.

Incidentally, as shown in FIG.
The center of the lower surface of the object 33 adsorbed on the first convex arc surface 44a, the second concave arc surface 51a, and the hemispheric convex surface 55
a, the center of curvature C3 of the second convex arc surface 61a and the first concave arc surface 63a.

Next, the copying apparatus 40 according to the second embodiment will be described.
The operation of will be described. When pressurized air is supplied from the air supply port p1, the pressurized air supply passages 47b and 42a
The porous material 61 provided on the intermediate block 42 through
Pressurized air is ejected from 63. Then, each block 4
1 to 43 are separated from each other to be in a non-contact state. When pressurized air is ejected from the porous material 50 provided in the lower block 43 via the pressurized air supply passage 47a, the lower block 43 and the connection block 55 are separated from each other and come into a non-contact state. Further, the pressurized air supply passages 42a, 45a, 47
Pressurized air is spouted from the porous material 45 provided on each of the connecting plates 46 and 47 via b. As a result, the intermediate block 42 is separated from the connecting plates 46 and 47. Therefore,
The lower block 43 is rotatable in the X-axis and Y-axis directions, the intermediate block 42 is rotatable in the X-axis direction, and the upper block 41 is rotatable in the Y-axis direction. The clearance between the intermediate block 42 and the connecting plates 46 and 47 is 5
μm, the pressurized air supply passages 47b, 42a, 4
There is no pressure drop due to air leakage from the communicating portion (boundary portion) of 5a.

In the above-described state, the air is evacuated from the air suction port p2 through the evacuation passages 46a, 43b, 55b and the internal passage of the suction holder 56, and the object 3
3 is attracted to the tip surface of the suction holder. In this state, the copying apparatus 40 is moved down to a predetermined position. Copying device 40 for an object 33 such as a semiconductor chip (see FIG. 5) 33
Approach, and the tip end surface of the suction holder 56 comes into contact with the object 33. When the upper surface of the object 33 is inclined with respect to the reference surface, the suction holder 56 is tilted so as to follow the inclination angle. The upper surface is parallel to each other.

Therefore, in the second embodiment, substantially the same effects as in the first embodiment can be exerted. The ends of the connection plates 46 and 47 facing each other are connected by a connection plate 48. Also, connecting plate 5
The distal ends of the members 3 and 54 are connected by a connecting block 55. Therefore, the connecting plates 46 and 47 (53, 54) can be firmly connected to each other. Therefore, it is possible to prevent the connecting plates 46, 47, (53, 54) from expanding in the direction in which the connecting plates 46, 47, (53, 54) are separated by the pressure of the pressurized air jetted from the porous materials 45, 50, 61, 63, It is possible to prevent the copying accuracy from being reduced.

(Third Embodiment) Next, a third embodiment of the present invention will be described focusing on parts different from the first embodiment.

As shown in FIG. 9, in the copying apparatus 70 according to the present embodiment, unlike the copying apparatuses 10 and 40 described in the first or second embodiment, the interface between the blocks 71 to 73 is flat. I have. On the upper surface of the lower block 73, a plate-shaped porous material 73a is provided. Then, pressurized air is ejected upward from the porous material 73a through an air supply port p1 provided below one of the X-axis direction movement restricting plates 75 described later. In the present embodiment, the first member includes a lower block 73 and a porous material 73a.

A pair of X-axis direction movement restricting plates 75 are fixed to both front and rear surfaces of the lower block 73, and their ends are fixed by connecting plates 76. A plate-shaped porous material 7 is provided at the lower portion of the inner side surface of each X-axis direction movement regulating plate 75.
5a is provided. Then, pressurized air is ejected from each porous material 75a along the X-axis direction so as to face each other. Further, a pair of closing plates 77 are fixed to both ends of the X-axis direction movement restricting plate 75 in the Y-axis direction. Further, a space for accommodating the intermediate block 72 and the upper block 71 is formed by being surrounded by the lower block 73, the X-axis direction movement restricting plate 75, the connecting plate 76, and the closing plate 77. On the lower surface of the connecting plate 76, a plate-shaped porous material 76a is provided. Then, pressurized air supplied to the air supply port p1 is jetted downward from the porous material 76a.

An intermediate block 72 is provided on the upper surface of the lower block 73. The lower surface of the intermediate block 72 is opposed to the porous material 73a, and the front and rear sides are opposed to another porous material 75a. An accommodation hole 80 is formed on both left and right side surfaces (side surfaces in the Y-axis direction) of the intermediate block 72, and a compression spring 81 is accommodated therein. And this compression spring 8
One end is supported by the inner back surface of the housing hole 80, and the other end is supported by the inner back surface of the housing hole 77a formed on the inner surface of the closing plate 77. On the upper surface of the intermediate block 72, a plate-like porous material 72a is provided. The pressurized air supplied to the air supply port p1 is supplied to the porous material 7 through an air passage 72b provided in the intermediate block 72.
It is jetted upward from 2a. In the present embodiment, the second member includes an intermediate block 72 and a porous material 72a.
It is composed of

A Y-axis direction movement restricting plate 82 is provided upright on the upper surface of the intermediate block 72, and a porous material 82a is provided on the inner surface thereof. Then, pressurized air supplied to the air supply port p1 is supplied from the porous material 82a to Y.
They are jetted along the axial direction and opposite to each other.

An upper block 71 is provided on the upper surface of the intermediate block 72, and the lower surface thereof is disposed to face the porous material 72a, and the left and right side surfaces are disposed to face another porous material 82a. Housing holes 83 are formed on both front and rear surfaces (side surfaces in the X-axis direction) of the upper block 72, and a compression spring 84 is housed therein. And this compression spring 84
Is supported by the inner back surface of the accommodation hole 83, and the other end is supported by the inner back surface of a not-shown accommodation hole formed on the inner surface of the X-axis direction movement regulating plate 75.

On the lower surface of the upper block 71, a cylindrical suction holder 85 is projected, and the suction holder 85 is provided with an intermediate block 72, a porous material 72a, a lower block 73,
It penetrates through the porous material 73a and projects outside. The inside of the suction holder 85 is the one X-axis direction movement regulating plate 75.
Is communicated with an air suction port p2 provided at the upper part.
Then, the air is sucked from the tip of the suction holder 85 by evacuating the air from the air suction port p2.

Therefore, according to the copying apparatus 70 of the third embodiment, the porous material 73 in the blocks 73, 72, 76 can be used.
The blocks 71 to 73 are brought into a non-contact state by jetting the pressurized air from a, 72a, and 76a. or,
When the pressurized air is ejected from the porous material 75a on the X-axis direction movement regulating plate 75, the movement regulating plate 75 and the intermediate block 72 are brought into a non-contact state. Further, the pressurized air is ejected from the porous material 82a on the Y-axis direction movement restricting plate 82, so that the movement restricting plate 82 and the upper block 7 are moved.
1 is in a non-contact state.

The supply of pressurized air is supplied, and the air is evacuated via the internal passage of the suction holder 85. Thus, the target object is suction-held at the tip of the holder 85. In this state, when the distal end surface of the suction holder 85 is brought into contact with an object (not shown), the suction holder 85 is tilted along the inclined surface of the object to perform copying. Therefore, in the present embodiment, since the interface between the blocks 71 to 73 is flat, it is not necessary to form an arc surface unlike the first and second embodiments. Therefore, each of the blocks 71 to 71
73 can be easily manufactured, which can lead to cost reduction.

(Fourth Embodiment) Next, a fourth embodiment of the present invention will be described focusing on parts different from the second embodiment.

In the present embodiment, as shown in FIG. 10, the connecting plates 46, 47 and 48 are omitted. The lower block 43 is attached to a supporting portion (not shown) via a fixing portion 69. This prevents the lower block 43 from moving in the X-axis direction and the Y-axis direction.

In the second embodiment, the connecting plate 48
The air suction port p <b> 2 provided on the fixing portion 69 is provided on the fixing portion 69. A hose (not shown) for evacuating air is connected to the air suction port p2. Further, in the second embodiment, the binding plate 48
The air supply port p1 provided in the lower block 43, the fixed portion 69, and the intermediate block 42 is provided. A hose (not shown) for supplying air is connected to the air supply port p1. In addition,
Since the lower block 43 is fixed, the tension of the hose that supplies air does not affect the lower block 43.

According to this configuration, when air is supplied to the air supply port p1 via a flexible hose (not shown), the second convex arc surface 6 provided on the intermediate block 42
Air is ejected from the first concave arc surface 1a and the first concave arc surface 63a.
At the same time, air is ejected from the porous material 50 provided in the lower block 43. Thereby, each block 4
1 to 43 are separated from each other to be in a non-contact state. At this time,
The clearance between the blocks 41 to 43 is 5 μm. The reason why the clearance is maintained at the optimum value is that the upper block 41 and the connection block 55 are fixed by the connection plates 53 and 54. Subsequent operations are substantially the same as those in the second embodiment, and thus description thereof is omitted. Therefore, in the present embodiment, the connecting plate 48 and the connecting plates 53 and 54 can be omitted.
The configuration of the copying apparatus 40 can be simplified.

The embodiments of the present invention may be modified as follows. Each block 11 to 11 is another example of the first to third embodiments.
13, 41 to 43, 71 to 73 are made of a magnetic material, and the blocks 11 to 13, 41
43, 71 to 73 may be changed to a non-contact configuration. With this configuration, the passage for sending the pressurized air can be omitted, so that the copying apparatuses 10, 40, and 70 can be simplified.

As another example of the first embodiment, the second protrusion 20 may be formed on the upper part of the lower block 13, and the second groove 16 may be formed on the lower part of the intermediate block 12 opposed thereto. Alternatively, the first protrusion 30 may be formed on the upper part of the intermediate block 12, and the first groove 26 may be formed on the lower part of the upper block 11 opposed thereto.

As another example of the first embodiment, as shown in FIG. 11, rectangular grooves 15a, 25a thinner than the thickness thereof may be formed on the surfaces of the porous members 15, 25. An air suction port p3 is provided in the lower block 13 separately from the air suction port p2, and an unillustrated evacuation passage communicating with the port p3 is provided. The evacuation passage is formed by the porous material 1 corresponding to the grooves 15a and 25a.
Opening at the back of 5, 25. The air suction port p3
The pressure of the air that is evacuated from the
It is higher than the pressure of the pressurized air ejected from 3a and 12b. Therefore, even if the pressurized air is ejected to the porous materials 15 and 25 and the air is evacuated at the same time, the pressurized air is not ejected from the grooves 15a and 25a.

With this configuration, when performing copying, the porous members 15, 25 except for the grooves 15a, 25a are used.
Pressurized air is ejected from the surface of the slab. At the same time, air is sucked from the inner inner surfaces of the grooves 15a and 25a. As a result, the upper block 11 and the intermediate block 12 float at positions where the pressure of the pressurized air and the pressure of the suction air are balanced. As described above, if the pressure of the pressurized air and the pressure of the suction air are used to levitate each of the blocks 11 and 12, even if the object (see FIG. 1) 33 is placed on the upper block 11, The influence of the weight of the object 33 is reduced. That is, even if the weight of the object 33 is added to each of the blocks 11 to 13, the fluctuation of the distance between the upper block 11 and the intermediate block 12 and the distance between the intermediate block 12 and the lower block 13 are reduced. Can be. Therefore,
The rigidity between the blocks 11 to 13 during the copying operation can be increased. Even if the copying apparatus 10 shown in FIG. 11 is turned upside down, the blocks 11 to 13 do not fall.

After the copying is completed, the grooves 15a, 2
The evacuation of the air in 5a is continued, and only the ejection of the pressurized air passing through the pressurized air supply passages 13a and 12b is stopped. Thus, the blocks 11 to 13 are sucked by the pressure of the air to be evacuated. Therefore, each of the blocks 11 to 12 can be reliably held at the position where the copying operation has been performed.

As another example of the second embodiment, the first groove 62 may be formed on the upper part of the lower block 43, and the first protrusion 44 may be formed on the lower part of the intermediate block 12 opposed thereto. Alternatively, the second groove 51 may be formed in the upper part of the intermediate block 12, and the second protrusion 60 may be formed in the lower part of the upper block 11 opposed thereto.

As another example of the second embodiment, during the copying operation, the pressures of the pressurized air ejected from the porous members 18 and 28 are adjusted by the blocks 11 and 12 so that each of the movement regulating plates 1
7, 27 may be weakened so as not to contact. In this way, when performing the copying operation, the upper block 11
The blocks 11 and 12 can be positively inclined along the inclined surface of the object 33 without sliding the upper surface of the object 33 against the object 33. Therefore, it is possible to prevent the target object 87 from being damaged.

As another example of the first embodiment, the configuration shown in FIG. 12 may be adopted. That is, on the lower surface of the upper block 11, the first convex hemispherical surface 30 having the first protrusion 301 is provided.
1a is formed. On the upper surface of the intermediate block 12,
A first concave portion 261 having a first concave hemispheric surface 261a engageable with the first convex hemispheric surface 301 is formed. On the lower surface of the intermediate block 12, a second protrusion 201 having a second convex hemispherical surface 201a is formed. On the upper surface of the lower block 13, a second concave portion 161 having a second concave hemispherical surface 161a engageable with the second convex hemispherical surface 201a is formed. According to this configuration, each of the blocks 11 to 11
Since the interface of 13 is formed in a hemispherical shape, each of the blocks 11 to 13 can be easily manufactured by turning, grinding, and polishing.

As another example of the second embodiment, the configuration shown in FIG. 13 may be adopted. That is, the second concave portion 5 having the second concave hemispherical surface 511a is provided on the lower surface of the upper block 41.
11 are formed. On the upper surface of the intermediate block 42,
A second protrusion 601 having a second convex hemisphere 611a engageable with the second concave hemisphere 511a is formed.
On the lower surface of the intermediate block 42, a first concave hemispherical surface 631a
Is formed. A first protrusion 441 having a first convex hemisphere 441a engageable with the first concave hemisphere 631a is provided on the upper surface of the lower block 43.
Are formed. According to this configuration, each block 41
Since the interface of 〜43 is formed in a hemispherical shape, the blocks 41１〜43 can be easily and easily manufactured by turning, grinding and polishing.

Next, in addition to the technical ideas described in the claims, the technical ideas grasped by the above-described embodiments will be enumerated below together with their effects. (1) In Claim 2 or 3, the movement restricting body is provided with a pressurized fluid ejection means for ejecting a pressurized fluid to any one of the side surfaces of the first to third members. A copying apparatus characterized by the following.

According to this configuration, the movement regulating body and each member can be kept in a non-contact state by the action of the static pressure generated by the pressurized fluid supplied from the pressurized fluid supply means.

(2) The copying apparatus according to any one of (2) and (3), wherein the free ends of the two movement restricting bodies facing each other are connected via a connecting member. .

According to this configuration, the movement restricting bodies can be firmly connected to each other, and the movement restricting plates can be prevented from being separated by the pressure of the pressurized fluid. (3) In any one of claims 3, (1) and (2), the pressurized fluid supply means is configured to include a porous material capable of ejecting pressurized air. Copying device.

According to this configuration, the pressurized air can be blown out with a uniform pressure, so that the copying can be performed with higher accuracy. (4) The copying apparatus according to any one of the above (1) to (3), wherein the pressurized fluid jetting means is configured to include a porous material capable of jetting pressurized air.

According to this configuration, the pressurized air can be blown out with a uniform pressure, so that the copying can be performed with higher accuracy. (5) The copying apparatus according to (4), wherein the porous material is made of a synthetic resin.

According to this configuration, the weight of the porous material can be reduced, and the porous material can be easily manufactured at low cost. (6) The copying apparatus according to (4), wherein the porous material is made of a lightweight metal.

According to this configuration, the weight of the porous material can be reduced, and the porous material can be easily manufactured at low cost. (7) The copying apparatus according to any one of claims 1 to 3, and (1) to (6), wherein air is evacuated from a part of the pressurized fluid supply means.

According to this configuration, the rigidity between the blocks 11 to 13 during the copying operation can be increased. (8) A first member, a second member, and a third member are sequentially provided on the Z-axis direction in that order, and a first concave hemispheric surface is provided on one of the first and second members. And a first protrusion having a first convex hemispherical surface disposed opposite to the first concave hemispherical surface is provided on the other side, and the first and second members are connected to each other by Y. In order to allow relative movement only in the axial direction, the first member is received by the second member in a non-contact manner, and one of the second and third members is moved along the Y-axis direction. A second concave portion having a second concave hemispheric surface, the second concave portion having a second concave hemispheric surface, and a second convex portion having a second convex hemispheric surface disposed opposite to the second concave hemispheric surface. And the second member is not in contact with the third member so that the second member can relatively move only in the X-axis direction. Copying apparatus is characterized in that allowed to accept.

[0089]

As described in detail above, according to the first or second aspect of the present invention, high-precision copying can be performed, and the first to third members are centered on the Z axis. Can be prevented from rotating.

According to the third aspect of the present invention, since the non-contact between the two members is performed by the static pressure generated by the pressurized fluid, it can be used, for example, under an environment that affects the magnetic force. .

[Brief description of the drawings]

FIG. 1 is a perspective view of a copying apparatus according to a first embodiment.

FIG. 2 is an exploded perspective view of the copying apparatus.

FIG. 3 is an exploded perspective view showing an air passage of the copying apparatus.

FIG. 4 is a schematic explanatory view showing the operation of the copying apparatus.

FIG. 5 is a perspective view of a copying apparatus according to a second embodiment.

FIG. 6 is an exploded perspective view showing the copying apparatus with a part thereof assembled.

FIG. 7 is an exploded perspective view of the copying apparatus.

FIG. 8 is an exploded perspective view showing an air passage of the copying apparatus.

FIG. 9 is an exploded perspective view of a copying apparatus according to a third embodiment.

FIG. 10 is an exploded perspective view of a copying apparatus according to a fourth embodiment.

FIG. 11 is an exploded perspective view of a copying apparatus showing another example of the first embodiment.

FIG. 12 is an exploded perspective view of a copying apparatus showing another example of the first embodiment.

FIG. 13 is an exploded perspective view of a copying apparatus showing another example of the second embodiment.

[Explanation of symbols]

11 upper block (first member), 12 intermediate block (second member), 13 lower block (third member), 15 porous material (third member), 16 second groove , 16a: second concave arc surface, 17: Y-axis direction movement restricting plate (Y-axis direction movement restricting body), 20: second protrusion, 20a ...
2nd convex arc surface, 25 ... porous material (2nd member), 26
.., A first groove, 26 a, a first concave arc surface, 27, an X-axis direction movement restricting plate (X-axis direction movement restricting body), 30, a first projection,
30a: first convex arc surface, 41: upper block (third member), 42: intermediate block (second member), 43: lower block (first member), 44: first protrusion, 44a …
First convex arc surface, 50... Porous material (first member), 51
... Second groove portion, 51a ... Second concave arc surface, 61, 63 ... Porous material (second member), 61a ... Second convex arc surface, 60
.., A second projection, 62 a first groove, 63a a first concave arc surface, 71 an upper block, 72 a middle block, 72a
... intermediate block, 73 ... lower block, 73a ... porous material, 75 ... X-axis direction movement regulating plate (X-axis direction movement regulating body), 82 ... Y-axis direction movement regulating plate (Y-axis direction movement regulating body).

Claims (3)

[Claims] 1. A first member, a second member, and a third member are connected in this order on a Z-axis direction, and the first and second members are relatively movable only in the Y-axis direction. For this purpose, a pair of X-axis direction movement restricting members are provided on both side surfaces of one of the first and second members, and the Z-axis side end surfaces of both members are opposed to each other in the state where the Z-axis side end surfaces face each other. One of the second and third members so that the first member is received by the second member in a non-contact manner, and the second and third members are relatively movable only in the X-axis direction. A pair of Y-axis direction movement restricting members are provided on one of both side surfaces, and the second member is received by the third member in a non-contact manner with the Z-axis side end surfaces of both members facing each other. Copying apparatus characterized in that: 2. A first member, a second member, and a third member are sequentially provided in the Z-axis direction in that order, and one of the first and second members is arranged in the X-axis direction. A first groove having a first concave arcuate surface extending along the first concave arcuate surface, and a first protrusion having a first convex arcuate surface arranged opposite to the first concave arcuate surface on the other side; The first member is received by the second member in a non-contact manner so that the first member and the second member can relatively move only in the Y-axis direction, and any one of the second member and the third member On one side, a second groove portion extending along the Y-axis direction and having a second concave arc surface is provided, and on the other side, a second convex arc surface arranged opposite to the second concave arc surface is provided. The first and second members are provided so as to be relatively movable only in the X-axis direction. Copying apparatus characterized by a member that was allowed contactlessly received in the third member. 3. The copying apparatus according to claim 1, further comprising a pressurized fluid supply unit for supplying a pressurized fluid for providing a static pressure to a gap between the respective members.