JP2000218584A - Rotary drive - Google Patents

Abstract

(57) [Summary] [Problem] The size of a magnet coupling is not affected by the size in the axial direction, and the structure of a partition wall interposed for sealing between each pair of magnet couplings is simplified. To be able to SOLUTION: A plurality of rotating shafts 24a and 24b are concentrically supported by a support member 22 so as to be rotatable, and a plurality of motor units 14a and 14b are concentrically arranged on the base end side of each rotating shaft. And the output member of each motor unit is provided concentrically so as to face the base end of the rotating shaft,
The base end of each rotating shaft and the output member of each motor unit,
The magnet couplings 28a and 28b are connected at substantially the same position in the axial direction of the rotating shaft, and a partition 21 that air-tightly separates the rotating shaft side and the motor unit side is interposed between the coupling opposing surfaces of the magnet couplings. did.

Description

DETAILED DESCRIPTION OF THE INVENTION

The present invention relates to a rotation driving device for rotating a plurality of rotation output members which are rotatably provided concentrically while being displaced in the direction of a rotation axis.

[0002]

2. Description of the Related Art As a rotary drive of this type, there are a semiconductor manufacturing apparatus having a rotary output section in a vacuum state, and an LC drive.
D manufacturing equipment. And, for example, as in a multi-chamber type semiconductor manufacturing apparatus, a process chamber serving as a plurality of stations is arranged around one transfer chamber, and a thin plate-like work such as a wafer processed in each process chamber is processed. It is used for a handling robot provided in the transfer chamber to be transported via the transfer chamber.

A multi-chamber type semiconductor manufacturing apparatus is shown in FIG.
Around the process chamber stations 2a, 2b, 2c, 2d, 2e comprising a plurality of process chambers;
A work transfer station 3 for transferring works to the outside is provided, and the inside of the transfer chamber 1 is always kept in a vacuum state by a vacuum device.

The transfer chamber 1 is shown in FIG.
A handling robot A is rotatably provided at the center of the processing chamber, and is provided on the peripheral wall and at the process chamber stations 2a, 2b, 2c, 2d,
A gate 6 is provided on the partition wall 5 facing the work transfer station 3 and the work transfer station 3 as an entrance and exit of a work to each process chamber station. The gates 6 are provided inside the transfer chamber 1 so as to face the respective gates 6 and are opened and closed by opening and closing doors (not shown).

The above-mentioned handling robot A is a so-called frog-leg type double-arm type, and the structure thereof is as shown in FIG. 3 to FIG.

Two arms 7 of the same length with respect to the center of rotation
a and 7b are provided rotatably. On the other hand, it has two carriages 8a, 8b of the same shape, and two links 9a, 9a,
One end of 9b is connected. These two links 9a, 9b
Is connected to the carriages 8a, 8b via a frog-leg-type carriage posture regulating mechanism, and both links 9a, 9b rotate completely symmetrically with respect to the carriages 8a, 8b. It has become. And each carrier 8a,
One of the two links connected to 8b is connected to one arm, and the other link is connected to the other arm.

FIG. 4 shows the above-mentioned frog-leg type carriage platform attitude regulating mechanism. The front ends of a pair of links 9a and 9b connected to the carriages 8a and 8b are mutually connected as shown in FIG. The link 9 is connected to the carriages 8a and 8b by a gear configuration including meshing gears 9c and 9c.
The attitude angles θR and θL of the a and 9b are always the same. Thus, the transfer tables 8a and 8b are always directed in the radial direction of the transfer chamber 1 and are operated in the radial direction. The link 9a, 9b may be connected by a belt 9d crossed as shown in FIG.

FIG. 5 shows a conventional rotary driving device for independently rotating the arms 7a and 7b. The bases of the arms 7a and 7b are fixed to arm brackets 10a and 10b formed in a ring shape, respectively. The ring-shaped arm brackets 10a, 10b are rotatably supported on the frame 1a of the transfer chamber 1 so as to be coaxial with the center of rotation.

On the other hand, disk-shaped bosses 11a and 11b are arranged inside the two arm brackets 10a and 10b so as to face each other and are concentric with each other. The opposed arm brackets and the disk-shaped bosses are magnetized. The couplings 12a and 12b are connected in the rotation direction.

The rotating shafts 13a, 13b of the disc-shaped bosses 11a, 11b are arranged concentrically.
The respective rotating shafts 13a, 13b are connected to output portions of motor units 14a, 14b which are concentrically supported by the frame 1a of the transfer chamber 1 and are displaced in the axial direction.

The motor units 14a and 14b are, for example, a motor 15 using an AC servomotor and a speed reducer 16 using a harmonic drive (trade name, hereinafter the same).
Are integrally connected, and the output portions of the speed reducers 16, 16 are connected to the base ends of the rotary shafts 13a, 13b.

Since the inside of the transfer chamber 1 in which the arms 7a and 7b are located is maintained in a vacuum state, the transfer mechanism 1 is provided between the arm brackets 10a and 10b of the arm rotating mechanism and the disc-shaped bosses 11a and 11b, that is, A sealing partition 17 is provided between the facing surfaces of the magnet couplings 12a and 12b.

FIGS. 6A and 6B show the operation of the above-mentioned handling robot A. As shown in FIG. 6A, both arms 7a and 7b are diametrical with respect to the center of rotation. Is symmetrical, the links 9a and 9b are rotated so that the links 9a and 9b are most widened with respect to the two carriages 8a and 8b. Therefore, the two carriages 8a and 8b are moved to the rotation center side.

In this state, by rotating both arms 7a and 7b in the same direction, both carriers 8a and 8b are rotated with respect to the center of rotation while maintaining the position in the radial direction. Further, from the state shown in FIG. 6A, both arms 7a, 7b
Are rotated in a direction in which they approach each other (opposite directions to each other), so that both arms 7 are rotated as shown in FIG.
The transfer table 8a located on the side where the angle formed by a and 7b becomes smaller is pushed by the links 9a and 9b and protrudes outward in the radial direction, and is provided adjacent to the transfer chamber 1 outward in the radial direction. Stations 2a, 2b,
The station enters one of the stations 2c, 2d, 2e and 3.

At this time, the other carrier is moved toward the center of rotation, but the amount of movement is small due to the angle between the arms 7a, 7b and the links 9a, 9b.

[0016]

In the above-mentioned conventional rotary drive device for rotationally driving the handling robot A and the like, the arm brackets 10a and 10b arranged in a stack in the axial direction of the rotary shaft are provided. Inside, each disk-shaped boss 11a, 11b rotatably driven by each motor unit 14a, 14b is disposed concentrically, and each of the arm brackets 10a, 10b and the disk-shaped boss 11a,
11b are connected by magnet couplings 12a and 12b, and the magnet couplings 12a and 12b are arranged so as to face each other on the inner and outer cylindrical surfaces.

The coupling force of the magnet couplings 12a and 12b is proportional to the axial size (height of the circumferential surface) of the magnet couplings. The axial size (height) of 12a and 12b must be increased to some extent. If the magnet couplings 12a and 12b of each pair are not large, the arm brackets 10a and 10b that house the magnet couplings also have the disk-shaped bosses 11a and 11b that are large in the axial direction.
There is a problem in that the field product of 0a and 10b in the axial direction becomes large. In particular, each magnet coupling 1
Since 2a and 12b are arranged inside each of the arm brackets 10a and 10b which are arranged in a stack in the axial direction, the size of the magnet couplings 12a and 12b in the axial direction is directly adjusted by the axes of the arm brackets 10a and 10b. It is affected by the size of the direction. Further, the partition wall 17 has a thin structure due to its function. However, when the size (height) in the axial direction is large, processing becomes difficult, accuracy is hardly obtained, and the processing time is long. Further, the bearings supporting the arm brackets 10a and 10b are structurally provided with a partition 1
Therefore, there is a problem in that it is necessary to use a special purpose which is inexpensive because it has to be located outside of the diameter 7 and becomes large in the radial direction.

The present invention has been made in view of the above, and the size of the magnetic coupling does not affect the field of the arm bracket in the transfer chamber. It is an object of the present invention to provide a rotary drive device capable of simplifying the structure of a partition interposed as a sealing device interposed in a vehicle and the structure of supporting an arm bracket.

[0019]

In order to achieve the above object, a rotary drive device according to the present invention comprises a plurality of rotating shafts concentrically supported by a supporting member so as to be rotatable.
Also, a plurality of motor units are concentrically arranged on the base end side of each rotating shaft, and the output members of each motor unit are provided concentrically and provided opposite to the base end of the rotating shaft. The base end of the motor unit and the output member of each motor unit are connected by a magnet coupling at substantially the same position in the axial direction of the rotation shaft, and between the connection opposing surfaces of the magnet couplings, the rotation shaft side and the motor unit side And a partition interposed in an airtight manner. Each pair of the magnetic couplings for each of the rotating shafts is configured to face in the axial direction of the rotating shaft or to face in the radial direction of the rotating shaft. Further, the supporting members were supported on the respective rotating shafts at substantially the same positions in the axial direction via bearings.

A rotary drive device using a plurality of rotary shafts and motor units is provided by providing a magnet coupling for connecting each rotary shaft and an output member of each motor unit at substantially the same position in the axial direction of the rotary shaft. At
This magnet coupling is no longer stacked in the axial direction, so that the magnetic coupling does not increase the field of the rotating shaft in the transfer chamber in which the rotating shaft portion is housed. The axial field product of the shaft portion can be reduced.

Further, since the magnet couplings are arranged at substantially the same position in the axial direction of the rotating shaft, the connecting surfaces of the magnet couplings are provided in order to hermetically separate the rotating shaft and the motor unit from each other. The structure of the bulkhead interposed can be simplified, and the parts can be manufactured by simple machining or pressing. further,
Since the bearings supporting the respective rotating shafts can be arranged concentrically at substantially the same position on the upper side of the partition wall, the bearings become smaller in the radial direction, and standard ones can be used instead of special ones.
In addition, since the housing of the bearing is shared, the structure is simplified.

[0022]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to FIG. In the description of this embodiment, the same members as the conventional constituent members shown in FIG.

FIG. 7 shows a first embodiment of the present invention. A base member 21 having a partition 21a for partitioning the inside and outside of the transfer chamber 1 in an airtight manner is fixed to the center of the transfer chamber 1. A support member 22 formed in a cylindrical shape is fixed above the base member 21, that is, inside the transfer chamber 1. The first rotation shaft 24a and the arm bracket 25a are rotatably supported inside the support member 22 via a bearing 23a. The first rotating shaft 24a and the arm bracket 25a are cylindrical, and the second rotating shaft 24b and the arm bracket 25b are rotatably supported inside the first arm bracket 25a via a bearing 23b. Have been. Thereby, the first and second rotating shafts 24
a and 24b are concentrically supported by the support member 22 at substantially the same position in the axial direction so as to be mutually rotatable.

A first rotating shaft 24a and a second rotating shaft 24b
A first arm bracket 25a and a second arm bracket 25b are integrally connected to each of them. Each of the arm brackets 25a, 25b is
4b are formed in a hat shape so as to cover the bearing portion, and are arranged in a laminated manner in the axial direction. The base ends of the first and second arms 7a and 7b are connected to the arm brackets 25a and 25b.

The base ends of the first and second rotating shafts 24a and 24b are substantially in the same plane, and are opposed to the partition 21a of the base member 21 at a predetermined interval.

The lower side of the base member 21 (outside of the transfer chamber 1) is cylindrical, and motor units 14a and 14b for rotationally driving the arm brackets 25a and 25b are shown in FIG. In the same manner as in the conventional configuration, they are supported concentrically and displaced in the axial direction. Each of the motor units 14a and 14b is the same as a conventional motor unit including a reduction gear. The output shaft 26b of the lower second motor unit 14b is connected to the upper first motor unit 14a. And is concentric with the output shaft 26a of the first motor unit 14a, and faces the lower side of the partition 21a of the base member 21.

First and second motor units 14a, 14
The first and second joint members 27a and 27b are fixed concentrically to the respective distal ends of the output shafts 26a and 26b. Output shaft 26 of first motor unit 14a
The end face of the first joint member 27a fixed to the first joint member 27a is formed in a disk shape and located outside, and the second joint member 27b fixed to the output shaft 26b of the second motor unit 14b has an end face of a ring shape. It is formed in a shape. And the two joint members 2
The end surfaces of 7a and 27b are substantially in the same plane, and are opposed to the lower surface of the partition 21a of the base member 21 at a predetermined interval.

Thus, the first rotation shaft 24a and the first
And the second rotary shaft 24b and the second joint member 27b are axially opposed to each other with the partition 21a interposed therebetween, and the partition 21a is provided between the opposed portions.
The first and second magnet couplings 28a, which are composed of a pair of magnets which are fixed to
28b is interposed, and this magnet coupling 2
At 8a and 28b, the output shafts 26a and 26b are magnetically connected to the rotary shafts 24a and 24b at substantially the same position in the axial direction via the joint members 27a and 27b. That is, each of the magnet couplings 28a and 28b has an annular shape, but the connecting surfaces of each pair are flat.

Thus, the first and second magnet couplings 28a, 28b are provided at substantially the same position in the axial direction of the rotating shafts 24a, 24b. The first and second bearings 23a and 23b are provided concentrically at substantially the same position above the partition 21a.

FIG. 8 shows a second embodiment of the present invention.
In this embodiment, the base ends of the rotating shafts 24a 'and 24b' are cylindrical. Then, the first rotating shaft 24
The outer peripheral surface of the base end of the first magnetic unit a ′ and the inner peripheral surface of the joint member 27a ′ fixed to the output shaft 26a ′ of the first motor unit 14a form a first magnetic coupling 28a having a cylindrical coupling surface. '. Further, the inner peripheral surface of the base end of the second rotating shaft 24b 'and the second motor unit 14
b is connected to the outer peripheral surface of the output shaft 26b 'by a second magnet coupling 28b' having a cylindrical connecting surface. And each of these magnet couplings 28
a ′, 28b ′ between the connecting surfaces,
A partition 21a 'that air-tightly separates the motor unit 14a and the motor unit 14b side from the motor unit 14a, 14b side is provided fixed to the base member 21' side. Also in this embodiment, the magnet couplings 28a 'and 28b' are connected to the rotating shafts 24a 'and 24b.
It is provided at substantially the same position in the axial direction of b '.

FIG. 9 shows a third embodiment of the present invention.
In this embodiment, the bearings 23a and 23b of both rotating shafts 24a and 24b in the first embodiment shown in FIG. 7 are configured to be displaced in the axial direction.

In this embodiment, the size in the direction perpendicular to the axis is smaller than that in the axis direction, and the apparatus is compact in the direction perpendicular to the axis.

In each of the above embodiments, the motor unit is A
In the case of the C servo motor and the speed reducer, the case where the number of rotary shafts is two has been described. However, in principle, other rotary actuators can be used in the motor unit, and the number can be two or more. .

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a semiconductor manufacturing apparatus which is an example of a multi-chamber type manufacturing apparatus.

FIG. 2 is an exploded perspective view showing a relationship between a transfer chamber and a handling robot.

FIG. 3 is a perspective view showing an example of a handling robot.

FIGS. 4A and 4B are explanatory views showing a transport table attitude regulating mechanism.

FIG. 5 is a cross-sectional view showing a conventional example of a rotation drive device used for an arm rotation mechanism of a handling robot.

FIGS. 6A and 6B are explanatory diagrams of the operation of the handling robot.

FIG. 7 is a sectional view schematically showing a main part of the first embodiment of the present invention.

FIG. 8 is a sectional view schematically showing a main part of a second embodiment of the present invention.

FIG. 9 is a cross-sectional view schematically showing a main part of a third embodiment of the present invention.

[Explanation of symbols]

A: Robot for hand link 1 1: Transfer chamber 2a, 2b, 2c, 2d, 2e: Process chamber station 3: Work transfer station 5: Partition wall 6: Gate 7a, 7b: Arm 8a, 8b: Transfer stand 9a, 9b: Link 9d belt 10a, 10b, 25a, 25b arm bracket 11a, 11b disk-shaped boss 12a, 12b, 28a, 28b, 28a ', 28b'
... Magnet couplings 13a, 13b, 24a, 24b, 24a ', 24b'
... Rotating shafts 14a, 14b ... Motor units 17, 21a, 21a '... Partition walls 21, 21' ... Base members 22 ... Support members 23a, 23b ... Bearings 26a, 26b, 26a ', 26b' ... Output shafts 27a, 27b, 27a '... Joint member

 ──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Matsuo Nose 1200 Manda, Hiratsuka-shi, Kanagawa F-term in the Komatsu Ltd. Research Laboratory 3F060 AA01 AA08 AA09 BA06 EB12 FA02 GA05 GA13 GB00 HA30 5F031 CA05 GA47 GA50 LA07 MA04 NA05 5H649 BB02 BB03 BB07 GG08 GG13 GG16 GG18 HH08 HH13 HH16 HH18 JK04

Claims (4)

[Claims] 1. A plurality of rotating shafts are concentrically supported by a supporting member so as to be rotatable, and a plurality of motor units are concentrically arranged on the base end side of each rotating shaft. Are provided concentrically and opposed to the base end of the rotating shaft, and the base end of each rotating shaft and the output member of each motor unit are placed at substantially the same position in the axial direction of the rotating shaft. A rotary drive device which is connected by a ring, and has a partition wall interposed between the connection opposing surfaces of the respective magnetic couplings to partition the rotary shaft side and the motor unit side in an airtight manner. 2. The rotation drive device according to claim 1, wherein each pair of magnet couplings is opposed to each other in the axial direction of the rotation shaft for each shaft. 3. The rotation drive device according to claim 1, wherein each pair of magnet couplings is opposed to each other in a radial direction of a rotation shaft for each shaft. 4. The rotary drive device according to claim 1, wherein each rotary shaft is supported by a support member via a bearing at substantially the same position in the axial direction.