JP2000205278A - Rolling/sliding component - Google Patents
Rolling/sliding componentInfo
- Publication number
- JP2000205278A JP2000205278A JP11010159A JP1015999A JP2000205278A JP 2000205278 A JP2000205278 A JP 2000205278A JP 11010159 A JP11010159 A JP 11010159A JP 1015999 A JP1015999 A JP 1015999A JP 2000205278 A JP2000205278 A JP 2000205278A
- Authority
- JP
- Japan
- Prior art keywords
- film
- rolling
- solid film
- oil
- ball
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005096 rolling process Methods 0.000 title claims abstract description 37
- 239000007787 solid Substances 0.000 claims abstract description 46
- 230000013011 mating Effects 0.000 claims abstract description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 16
- 229910052731 fluorine Inorganic materials 0.000 claims description 16
- 239000011737 fluorine Substances 0.000 claims description 16
- 229920002313 fluoropolymer Polymers 0.000 claims description 4
- 239000004811 fluoropolymer Substances 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 abstract description 9
- 125000001153 fluoro group Chemical class F* 0.000 abstract description 3
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 239000012530 fluid Substances 0.000 abstract 1
- 230000001050 lubricating effect Effects 0.000 abstract 1
- 239000003921 oil Substances 0.000 description 50
- 230000002093 peripheral effect Effects 0.000 description 11
- 239000000126 substance Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 239000000428 dust Substances 0.000 description 5
- 125000000524 functional group Chemical group 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 239000010702 perfluoropolyether Substances 0.000 description 5
- 239000004810 polytetrafluoroethylene Substances 0.000 description 5
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000004519 grease Substances 0.000 description 4
- 239000012948 isocyanate Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 3
- 238000005461 lubrication Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- CHDVXKLFZBWKEN-UHFFFAOYSA-N C=C.F.F.F.Cl Chemical compound C=C.F.F.F.Cl CHDVXKLFZBWKEN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical group [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 101150000971 SUS3 gene Proteins 0.000 description 1
- 229910018540 Si C Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical compound FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Chemical group CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 150000002513 isocyanates Chemical class 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910001105 martensitic stainless steel Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 238000004881 precipitation hardening Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Landscapes
- Bearings For Parts Moving Linearly (AREA)
- Rolling Contact Bearings (AREA)
- Transmission Devices (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、例えば転がり軸受
の軌道輪、送りねじのねじ軸やナット、直動型軸受のレ
ールや移動体などの転がり摺動部品に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rolling and sliding component such as a bearing ring of a rolling bearing, a screw shaft and a nut of a feed screw, a rail and a moving body of a linear motion bearing, and the like.
【０００２】[0002]
【従来の技術】従来から、上述した転がり軸受、送りね
じ、直動型軸受などを高温、真空あるいは清浄環境など
で使用する場合では、転動部位あるいは摺動部位に、ふ
っ素系グリースやふっ素系オイルなどの油膜を塗布した
り、あるいはふっ素系高分子成分からなる固形膜をコー
ティングすることが行われる。2. Description of the Related Art Conventionally, when the above-mentioned rolling bearing, feed screw, linear motion bearing, etc. are used in a high temperature, vacuum or clean environment, a fluorine-based grease or a fluorine-based An oil film such as oil is applied, or a solid film composed of a fluoropolymer component is coated.
【０００３】[0003]
【発明が解決しようとする課題】ところで、上述した油
膜は、金属製の母材に対する親和性があまり良好でない
ため、局部的な油膜切れが発生しやすいと言え、母材の
摩耗や焼き付きが起こり得る。また、固形膜は、金属製
の母材に対して定着されているものの、経時的な摩耗が
避けられないため、寿命という点において問題がある。However, since the above-mentioned oil film has a poor affinity for a metal base material, it can be said that local oil film breakage is likely to occur, and wear and seizure of the base material occur. obtain. In addition, although the solid film is fixed to the metal base material, there is a problem in terms of life because wear over time cannot be avoided.
【０００４】さらに、油膜では、１０-5Ｐａレベルの高
真空環境での使用だと、母材から離れやすくなり、環境
汚染につながることが懸念される。[0004] Furthermore, if the oil film is used in a high vacuum environment at a level of 10 -5 Pa, it is likely to separate from the base material, which may lead to environmental pollution.
【０００５】このような事情に鑑み、本発明では、転が
り摺動部品において、長期にわたって良好な潤滑性を発
揮できるようにすることを目的としている。In view of such circumstances, it is an object of the present invention to provide a rolling sliding component that can exhibit good lubrication for a long period of time.
【０００６】[0006]
【課題を解決するための手段】請求項１の発明にかかる
転がり摺動部品は、相手部材との間で相対的に転がり接
触またはすべり接触が生ずるもので、前記相手部材との
接触面に、ふっ素系高分子成分からなる固形膜が被覆形
成されており、この固形膜の表面にふっ素系油成分から
なる油膜が付着されている。According to a first aspect of the present invention, there is provided a rolling / sliding component in which rolling contact or sliding contact relatively occurs with a mating member. A solid film made of a fluorine-based polymer component is coated and formed, and an oil film made of a fluorine-based oil component is attached to the surface of the solid film.
【０００７】請求項２の発明にかかる転がり摺動部品
は、上記請求項１の油膜が、前記固形膜の膜厚の半分以
下の膜厚に設定されている。According to a second aspect of the present invention, in the rolling sliding component, the oil film according to the first aspect is set to have a thickness equal to or less than half the thickness of the solid film.
【０００８】請求項３の発明にかかる転がり摺動部品
は、上記請求項１または２の構成であって、転がり軸受
の軌道輪、送りねじのねじ軸やナット、あるいは直動型
軸受のレールや移動体として用いられるものである。According to a third aspect of the present invention, there is provided a rolling sliding component according to the first or second aspect, wherein the bearing ring of a rolling bearing, a screw shaft or a nut of a feed screw, a rail of a linear motion type bearing, or the like. It is used as a moving object.
【０００９】要するに、本発明では、固形膜と油膜とを
併用することにより、油膜の親和性を良好とするととも
に、固形膜の摩擦抵抗を軽減するようにしている。これ
により、局部的な油膜切れが発生しにくくなるばかり
か、仮にそのような油膜切れが発生したところで、固形
膜の存在により互いに転動、摺動する２つの部材の直接
接触を回避できるようになる他、固形膜の摩耗進展を抑
制できるようになる。そのため、良好な潤滑性が長期間
継続されることになる。In short, in the present invention, by using a solid film and an oil film together, the affinity of the oil film is improved and the frictional resistance of the solid film is reduced. As a result, not only is it difficult for local oil film breaks to occur, but even if such oil film breaks occur, direct contact between the two members that roll and slide with each other due to the presence of the solid film can be avoided. In addition, the progress of abrasion of the solid film can be suppressed. Therefore, good lubricity is maintained for a long time.
【００１０】特に、請求項２のように油膜の膜厚を特定
すれば、固形膜に対する油膜の付着強度がより一層高め
られることになる。これにより、高真空環境での油膜の
分離による環境汚染を回避できるようになる。[0010] In particular, if the thickness of the oil film is specified as in claim 2, the adhesion strength of the oil film to the solid film is further enhanced. This makes it possible to avoid environmental pollution due to separation of the oil film in a high vacuum environment.
【００１１】[0011]
【発明の実施の形態】本発明の転がり摺動部品として
は、転がり軸受の軌道輪、送りねじのねじ軸やナット、
直動型軸受のレールや移動体などが挙げられるが、この
実施形態では、転がり軸受としての深溝玉軸受と、送り
ねじとしてのボールねじと、直動型軸受としての直動型
玉軸受との３つを例に挙げる。BEST MODE FOR CARRYING OUT THE INVENTION Rolling sliding parts of the present invention include a bearing ring of a rolling bearing, a screw shaft and a nut of a feed screw, and the like.
Although rails and moving bodies of direct-acting bearings are exemplified, in this embodiment, a deep groove ball bearing as a rolling bearing, a ball screw as a feed screw, and a direct-acting ball bearing as a direct-acting bearing are used. Three examples are given.
【００１２】図１は本発明の一実施形態にかかるボール
ねじの縦断面図である。図中、Ａは送りねじの全体を示
しており、１はねじ軸、２はナット、３はボール、４は
サーキュレータチューブである。FIG. 1 is a longitudinal sectional view of a ball screw according to an embodiment of the present invention. In the figure, A indicates the entire feed screw, 1 is a screw shaft, 2 is a nut, 3 is a ball, and 4 is a circulator tube.
【００１３】ねじ軸１は、その外周面に螺旋溝５が形成
されている。ナット２は、ねじ軸１に外嵌されており、
その内周面にねじ軸１の螺旋溝５に対応する螺旋溝６が
形成されている。複数のボール３は、ねじ軸１の螺旋溝
５と、ナット２の螺旋溝６との間に介装されている。サ
ーキュレータチューブ４は、ねじ軸１またはナット２の
いずれか一方の回転により両螺旋溝５，６間に介装され
るボール３を転動循環させるためのもので、ナット２に
取り付けられている。The screw shaft 1 has a spiral groove 5 formed on the outer peripheral surface thereof. The nut 2 is fitted around the screw shaft 1,
A spiral groove 6 corresponding to the spiral groove 5 of the screw shaft 1 is formed on the inner peripheral surface. The plurality of balls 3 are interposed between the spiral groove 5 of the screw shaft 1 and the spiral groove 6 of the nut 2. The circulator tube 4 is for rolling and circulating the ball 3 interposed between the spiral grooves 5 and 6 by rotation of either the screw shaft 1 or the nut 2, and is attached to the nut 2.
【００１４】ねじ軸１の螺旋溝５およびナット２の螺旋
溝６の断面形状は、詳細に図示しないが、ゴチックアー
チ状（二つの曲率中心の異なる円弧をほぼＶ字形に組み
合わせた形状）あるいは円弧状に形成される。The cross-sectional shapes of the spiral groove 5 of the screw shaft 1 and the spiral groove 6 of the nut 2 are not shown in detail, but are a gothic arch shape (a shape in which two arcs having different centers of curvature are combined in a substantially V shape) or a circle. It is formed in an arc shape.
【００１５】このようなボールねじＡにおいて、ねじ軸
１、ナット２、ボール３ならびにサーキュレータチュー
ブ４は、例えばＪＩＳ規格ＳＵＳ４４０、ＳＵＳ４４０
Ｃ、ＳＵＳ６３０、ＳＵＳ３０４などの金属で形成され
る。但し、ボール３は、例えば窒化けい素（Ｓｉ
3Ｎ4）、アルミナ（Ａｌ2Ｏ3）や炭化けい素（Ｓｉ
Ｃ）、ジルコニア（ＺｒＯ2）などのセラミックスで形
成してもよい。In such a ball screw A, the screw shaft 1, the nut 2, the ball 3, and the circulator tube 4 are, for example, JIS standard SUS440, SUS440.
C, SUS630, SUS304 and other metals. However, the ball 3 is made of, for example, silicon nitride (Si
3 N 4 ), alumina (Al 2 O 3 ) and silicon carbide (Si
C) and ceramics such as zirconia (ZrO 2 ).
【００１６】この実施形態では、ねじ軸１の外周面とナ
ット２の内周面とに対して、ふっ素系高分子成分からな
る固形膜４０が被覆形成されているとともに、この固形
膜４０の表面にふっ素系油成分からなる油膜４１が付着
されている。In this embodiment, the outer peripheral surface of the screw shaft 1 and the inner peripheral surface of the nut 2 are coated with a solid film 40 made of a fluorine-based polymer component. An oil film 41 made of a fluorine-based oil component is attached to the oil film 41.
【００１７】なお、固形膜４０は、例えば含フッ素ポリ
ウレタン高分子化合物からなる。この含フッ素ポリウレ
タン高分子化合物は、−ＣXＦ2X−Ｏ−という一般式
（Ｘは１〜４の整数）で示される単位を主要構造単位と
し、いずれも平均分子量が数百万以上で硬化反応により
分子間がウレタン結合した３次元の網状構造を有してい
る。３次元の網状構造とは、化学構造上の表現であっ
て、膜の断面が網状になっているのではなく、分子間が
網状のように連続してつながって密に詰まった均質な構
造になっていることを意味している。このような化合物
としては、下記化学式４に示すような末端がイソシアネ
ートの官能基付き含ふっ素重合体を用いて、化学構造を
変化させたものとすることができる。前述の末端がイソ
シアネートの官能基付き含ふっ素重合体としては、パー
フルオロポリエーテル（ＰＦＰＥ）の誘導体、具体的に
例えばモンテカチーニ社の商品名フォンブリンＺ誘導体
（FOMBLIN Z DISOCなど）が好適に用いられる。The solid film 40 is made of, for example, a fluorine-containing polyurethane polymer compound. This fluorinated polyurethane polymer compound has a unit represented by the general formula -C X F 2X -O- (where X is an integer of 1 to 4) as a main structural unit, and all have an average molecular weight of several million or more and are cured. It has a three-dimensional network structure in which urethane bonds are formed between molecules by a reaction. The three-dimensional network structure is a chemical structural expression, in which the cross-section of the membrane is not a network, but a uniform structure in which the molecules are connected like a network and are densely packed. It means that it has become. As such a compound, a compound having a chemical structure changed by using a fluorine-containing polymer having a functional group of isocyanate at the end as shown in the following chemical formula 4 can be used. As the above-mentioned fluorine-containing polymer having a functional group having a terminal isocyanate, a derivative of perfluoropolyether (PFPE), specifically, for example, a Fomblin Z derivative (for example, FOMBLIN Z DISOC) (trade name of Montecatini) is preferably used. .
【００１８】[0018]
【化１】 Embedded image
【００１９】また、油膜４１は、例えばＣＴＦＥ（三フ
ッ化塩化エチレン樹脂）のオリゴマーやＰＦＰＥ（パー
フルオロポリエーテル）など分子内に塩素やエーテル結
合を有するオイルが好適に用いられる。前述のＰＦＰＥ
としては、モンテカチーニ社の商品名フォンブリンの
他、ダイキン工業（株）製の商品名デムナムやデュポン
社の商品名クライトックスなどが挙げられる。グリース
状のものでは、ＰＴＦＥ・フルオロカーボン油グリー
ス、ＰＴＦＥ・フロロシリコーン油グリースやＰＴＦＥ
・フッ素化ポリエーテル油グリースなどが挙げられる。The oil film 41 is preferably made of an oil having a chlorine or ether bond in a molecule, such as an oligomer of CTFE (ethylene trifluoride chloride resin) or PFPE (perfluoropolyether). The aforementioned PFPE
Examples thereof include Fembrin, a product name of Montecatini Co., Ltd., Demnum, a product name of Daikin Industries, Ltd., and Krytox, a product name of Dupont. For grease-like materials, PTFE / fluorocarbon oil grease, PTFE / fluorosilicone oil grease, PTFE
-Fluorinated polyether oil grease and the like.
【００２０】この固形膜４０の形成手法の一例について
説明する。固形膜４０を形成するための溶液を対象部材
に付着させる。この溶液の付着はスプレーを用いて行う
こともできるし、また、溶液中に浸漬してもよい。ここ
で用意する溶液は、末端がイソシアネートの官能基付き
含ふっ素重合体〔フォンブリンＺ誘導体（FONBLIN ZDIS
OC）〕を希釈溶媒（ふっ素系溶剤ＳＶ９０Ｄ）で含ふっ
素重合体の濃度を１ｍａｓｓ％にまで希釈したものであ
る。次に、液状膜を付着した対象部材を４０〜５０度で
約１分間加熱し、液状膜に含む溶媒を除去する。この
後、例えば１５０〜３００度で１５〜３０分間、加熱す
る。これにより、液状膜の化学構造が変化することによ
り硬化反応して固形膜４０が得られる。ちなみに、この
硬化処理では、液状膜に存在している官能基付き含ふっ
素重合体の個々について、下記化学式２〜５に示すよう
な４種の硬化反応でもって末端のイソシアネート（ＮＣ
Ｏ）が消失し、各官能基付き含ふっ素重合体が互いにウ
レタン結合することにより３次元の網状構造となる。ウ
レタン結合は、化学式２，３に示すような硬化反応でも
って、図２（ａ）に模式的に示すように直線的に架橋す
るとともに、化学式４，５に示すような硬化反応でもっ
て、図２（ｂ）に模式的に示すように３次元方向で架橋
する。なお、図２では、下記化学式６に示すように、上
記化学式１を簡略化して模式的に表している。An example of a method for forming the solid film 40 will be described. A solution for forming the solid film 40 is attached to the target member. The deposition of the solution may be performed by using a spray, or may be immersed in the solution. The solution prepared here is a fluorine-containing polymer having a functional group of terminal isocyanate [FONBLIN ZDIS
OC)] is diluted with a diluting solvent (fluorine-based solvent SV90D) to a concentration of 1 mass% of the fluoropolymer. Next, the target member to which the liquid film is adhered is heated at 40 to 50 degrees for about 1 minute to remove the solvent contained in the liquid film. Thereafter, heating is performed, for example, at 150 to 300 degrees for 15 to 30 minutes. Thereby, the solid film 40 is obtained by a curing reaction due to a change in the chemical structure of the liquid film. Incidentally, in this curing treatment, each of the functional group-containing fluoropolymers present in the liquid film is subjected to a terminal isocyanate (NC) by four kinds of curing reactions as shown in the following chemical formulas 2 to 5.
O) disappears, and the respective fluorine-containing polymers having functional groups are bonded to each other by urethane to form a three-dimensional network structure. The urethane bond is formed by a curing reaction as shown in chemical formulas 2 and 3 to form a linear cross-link as schematically shown in FIG. Crosslinking is performed in a three-dimensional direction as schematically shown in FIG. In addition, in FIG. 2, as shown in the following chemical formula 6, the above chemical formula 1 is simplified and schematically represented.
【００２１】[0021]
【化２】 Embedded image
【００２２】[0022]
【化３】 Embedded image
【００２３】[0023]
【化４】 Embedded image
【００２４】[0024]
【化５】 Embedded image
【００２５】[0025]
【化６】 Embedded image
【００２６】この固形膜４０の膜厚は、例えば１０μｍ
以下に管理され、また、表面粗さは、Ｒａ（中心線平均
粗さ）で５μｍに管理される。The thickness of the solid film 40 is, for example, 10 μm.
The surface roughness is controlled to 5 μm in terms of Ra (center line average roughness).
【００２７】このようにして形成した固形膜４０の表面
に、油膜４１をスプレーを用いて吹き付けたりあるいは
液中浸漬により塗布する。この油膜４１の膜厚は、固形
膜４０の膜厚の１／２以下に管理される。The oil film 41 is applied to the surface of the solid film 40 thus formed by spraying or dipping in a liquid. The thickness of the oil film 41 is controlled to be １ ／ or less of the thickness of the solid film 40.
【００２８】以上説明した固形膜４０と油膜４１は、互
いに同種のふっ素原子を含むために、固形膜４０に対す
る油膜４１の親和性がきわめて良好となり、仮にボール
３のひきずり現象が発生しても局部的な油膜切れが発生
しにくくなるばかりか、仮にそのような油膜切れが発生
したところで、固形膜４０の存在によりねじ軸１やナッ
ト２に対するボール３の直接接触つまり母材相互の直接
接触を回避できるようになる。一方、油膜４１の存在に
よって固形膜４０の摩擦係数が軽減されることになるの
で、固形膜４０の摩耗進展を抑制できるようになる。こ
のように固形膜４０と油膜４１とが相互に助長し合うこ
とによって、転動、摺動部位の良好な潤滑性を長期間継
続できるようになる。しかも、上述したように油膜４１
の膜厚を固形膜４０の膜厚の１／２以下に設定していれ
ば、固形膜４０に対する油膜４１の付着強度がより一層
高められるので、低発塵性を確保できて環境清浄化に貢
献できるようになる。この油膜４１の付着強度は、例え
ば１０-5Ｐａレベルの高真空環境においても十分なもの
となるなど、使用環境範囲を拡大できるようになる。図
７に膜厚と発塵量との関係についての試験結果を示す。
この結果から、油膜４１の膜厚を固形膜の１／２以下と
したものは、使用開始時から発塵量が少なく、また、時
間が経過しても終始発塵量が低くなっていることが判
る。Since the solid film 40 and the oil film 41 described above contain the same kind of fluorine atoms, the affinity of the oil film 41 for the solid film 40 becomes extremely good. In addition to the fact that the oil film breakage is unlikely to occur, if such oil film breakage occurs, the solid film 40 prevents the ball 3 from directly contacting the screw shaft 1 and the nut 2, that is, avoiding direct contact between the base materials. become able to. On the other hand, since the friction coefficient of the solid film 40 is reduced by the presence of the oil film 41, the progress of wear of the solid film 40 can be suppressed. As described above, the solid film 40 and the oil film 41 promote each other, so that good lubrication of the rolling and sliding portions can be maintained for a long time. Moreover, as described above, the oil film 41
If the thickness of the oil film 41 is set to be equal to or less than 膜厚 of the thickness of the solid film 40, the adhesion strength of the oil film 41 to the solid film 40 can be further increased. Be able to contribute. The adhesion strength of the oil film 41 becomes sufficient even in a high vacuum environment of, for example, a level of 10 -5 Pa, and the range of use environment can be expanded. FIG. 7 shows test results on the relationship between the film thickness and the amount of dust generation.
From these results, it was found that the oil film 41 having a film thickness of 以下 or less of the solid film had a small amount of dust generation from the start of use, and also had a low amount of dust generation even after a lapse of time. I understand.
【００２９】図３ないし図５に本発明の一実施形態にか
かる直動型玉軸受を示している。図３は、直動型玉軸受
の上半分を断面にした側面図、図４は、直動型玉軸受の
一部を断面にした端面図、図５は、図３中のレールの断
面図である。FIGS. 3 to 5 show a direct acting ball bearing according to an embodiment of the present invention. 3 is a side view in which the upper half of the direct acting ball bearing is sectioned, FIG. 4 is an end view in which a part of the direct acting ball bearing is sectioned, and FIG. 5 is a sectional view of the rail in FIG. It is.
【００３０】図中、Ｂは直動型玉軸受の全体を示してお
り、１１は円筒形の軸からなるレール、１２は円筒部材
からなる移動体、１３は保持器、１４は転動体としての
ボール、１５は環体である。In the drawing, B indicates the entire linear motion ball bearing, 11 is a rail made of a cylindrical shaft, 12 is a moving body made of a cylindrical member, 13 is a cage, and 14 is a rolling body. The ball 15 is a ring.
【００３１】レール１１は、その外周面の円周六箇所に
軸方向に沿う直線状の溝１６が全長に及んで設けられて
いる。The rail 11 is provided with linear grooves 16 extending along the axial direction along the entire length at six circumferential positions on the outer peripheral surface thereof.
【００３２】移動体１２は、その内周面の軸方向中間領
域の円周六箇所にレール１１の溝１６に径方向で対向す
るようにそれぞれ負荷循環ボール列および無負荷循環ボ
ール列用の溝１７，１８が設けられている。The moving body 12 has grooves for a load-circulating ball row and a no-load circulating ball row at six axially intermediate regions on its inner peripheral surface so as to radially oppose the grooves 16 of the rail 11. 17 and 18 are provided.
【００３３】保持器１３は、移動体１２の内周面の一部
に沿うように湾曲加工された円筒形状をなす。その両端
部分は、環体１５により支持されている。保持器１３の
軸方向中間領域には、平面的に見ると横長の輪状溝１９
が周方向に合計六つ設けられている。輪状溝１９の軸方
向に沿う片方の直線部１９ａは、底が貫通されて底無し
とされ、残り片方の直線部１９ｂは底有りとされてい
る。The retainer 13 has a cylindrical shape that is curved along a part of the inner peripheral surface of the moving body 12. Both end portions are supported by the ring 15. In the axially intermediate region of the retainer 13, a horizontally long annular groove 19 when viewed in a plan view.
Are provided in the circumferential direction in total. One straight portion 19a along the axial direction of the annular groove 19 has a bottom penetrated and has no bottom, and the other straight portion 19b has a bottom.
【００３４】前述のレール１１側と移動体１２側の対向
する二つの直線状の溝１６，１７がそれぞれ対となって
合計六本の負荷用ボール転送路２０を構成している。こ
のボール転送路２０に、保持器１３の輪状溝１９の底無
しの直線部１９ａが位置する。また、移動体１２の溝１
８と保持器１３の輪状溝１９の底有りの直線部１９ｂと
が対となって合計六本の無負荷用ボール循環路２１を構
成している。これら、六本のボール転送路２０それぞれ
とそれに近い側に隣り合う六本のボール循環路２１それ
ぞれとが保持器１３の輪状溝１９の周方向に沿う部分に
よって一本ずつ連通連結されていて、それでボール循環
回路を構成している。このため、レール１１と移動体１
２との相対的な軸方向スライド動作に伴って、このボー
ル転送路２０とボール循環路２１との間でボール１４群
が転動循環されるようになっている。なお、レール１１
の溝１６と移動体１２の溝１７の横断面は、例えばＶ字
形に形成されていて、これら対向する一対の溝１６，１
７に対してボール１４が２点ずつ計四点で接触するよう
になっている。The two opposing linear grooves 16 and 17 on the rail 11 side and the moving body 12 side respectively constitute a pair to form a total of six load ball transfer paths 20. In this ball transfer path 20, the bottomless straight portion 19a of the annular groove 19 of the retainer 13 is located. The groove 1 of the moving body 12
8 and a straight portion 19b having a bottom of the annular groove 19 of the retainer 13 constitute a pair to form a total of six no-load ball circulation paths 21. Each of the six ball transfer paths 20 and each of the six ball circulation paths 21 adjacent to the six ball transfer paths 20 are connected and connected one by one by a portion along the circumferential direction of the annular groove 19 of the retainer 13, This constitutes a ball circulation circuit. Therefore, the rail 11 and the moving body 1
The ball group 14 is rolled and circulated between the ball transfer path 20 and the ball circulation path 21 in accordance with the relative axial movement of the ball 14. The rail 11
The cross section of the groove 16 of the moving body 12 and the groove 17 of the moving body 12 is formed in, for example, a V-shape.
The ball 14 comes in contact with 7 at two points at a total of four points.
【００３５】このような直動型玉軸受Ｂにおいて、レー
ル１１の外周面と移動体１２の内周面に対して、上述し
た固形膜４０が被覆形成されるとともに、この固形膜４
０の表面にふっ素系油成分からなる油膜４１が付着され
る。In such a linear motion type ball bearing B, the outer peripheral surface of the rail 11 and the inner peripheral surface of the moving body 12 are coated with the above-described solid film 40 and the solid film 4 is formed.
An oil film 41 made of a fluorine-based oil component is attached to the surface of the oil film 41.
【００３６】直動型玉軸受Ｂにおいて、レール１１、移
動体１２、保持器１３ならびにボール１４は、例えばＪ
ＩＳ規格ＳＵＳ４４０、ＳＵＳ４４０Ｃ、ＳＵＳ６３
０、ＳＵＳ３０４などの金属で形成され、環体１５は、
例えばポリテトラフルオロエチレン（ＰＴＦＥ）、エチ
レンテトラフルオロエチレン（ＥＴＦＥ）などのふっ素
系樹脂やポリエーテルエーテルケトン（ＰＥＥＫ）、ポ
リフェニレンサルファイド（ＰＰＳ）、ポリエーテルサ
ルフォン（ＰＥＳ）、ナイロン（ＰＡ）などのエンジニ
アリングプラスチックスで形成される。但し、ボール１
４は、例えば窒化けい素（Ｓｉ3Ｎ4）、アルミナ（Ａｌ
2Ｏ3）や炭化けい素（ＳｉＣ）、ジルコニア（Ｚｒ
Ｏ2）などのセラミックスで形成してもよい。また、保
持器１３は、例えば黄銅やチタン、あるいは上記合成樹
脂などで形成してもよい。In the linear motion ball bearing B, the rail 11, the moving body 12, the retainer 13 and the ball 14 are, for example, J
IS standard SUS440, SUS440C, SUS63
0, a metal such as SUS304, and the ring 15
For example, fluorine resins such as polytetrafluoroethylene (PTFE) and ethylenetetrafluoroethylene (ETFE), polyetheretherketone (PEEK), polyphenylenesulfide (PPS), polyethersulfone (PES), nylon (PA), and the like. Made of engineering plastics. However, ball 1
4 is, for example, silicon nitride (Si 3 N 4 ), alumina (Al
2 O 3 ), silicon carbide (SiC), zirconia (Zr
It may be formed of ceramics such as O 2 ). Further, the retainer 13 may be formed of, for example, brass, titanium, or the above-described synthetic resin.
【００３７】図６は本発明の一実施形態にかかる転がり
軸受の上半分の縦断面図である。図中、Ｃは転がり軸受
の全体を示しており、深溝型玉軸受と呼ばれる形式を例
示している。この転がり軸受Ｃは、内輪３１と、外輪３
２と、転動体としてのボール３３と、波形の保持器３４
とを備えている。FIG. 6 is a longitudinal sectional view of the upper half of a rolling bearing according to one embodiment of the present invention. In the drawing, C indicates the entire rolling bearing, and illustrates a type called a deep groove ball bearing. The rolling bearing C includes an inner ring 31 and an outer ring 3.
2, a ball 33 as a rolling element, and a wave-shaped cage 34
And
【００３８】上述した内・外輪３１，３２、ボール３３
ならびに保持器３４は、各種の金属材で形成される。こ
の金属材としては、例えばＪＩＳ規格ＳＵＳ４４０Ｃな
どのマルテンサイト系ステンレス鋼、例えばＪＩＳ規格
ＳＵＳ６３０などの析出硬化型ステンレス鋼に適当な硬
化熱処理を施した金属材、あるいはＪＩＳ規格ＳＵＳ３
０４などのオーステナイト系ステンレス鋼などが挙げら
れる。The above-described inner / outer rings 31, 32 and balls 33
Further, the retainer 34 is formed of various metal materials. Examples of the metal material include a metal material obtained by subjecting a martensitic stainless steel such as JIS standard SUS440C or the like to a precipitation hardening type stainless steel such as JIS standard SUS630 or the like and subjecting it to an appropriate hardening heat treatment, or a JIS standard SUS3.
For example, austenitic stainless steel such as A.04.
【００３９】このような転がり軸受Ｃの場合、内輪３１
の外周面および外輪３２の内周面に対して、上述した固
形膜４０が被覆形成されるとともに、この固形膜４０の
表面にふっ素系油成分からなる油膜４１が付着される。In the case of such a rolling bearing C, the inner race 31
The above-described solid film 40 is formed on the outer peripheral surface of the outer ring 32 and the inner peripheral surface of the outer ring 32, and an oil film 41 made of a fluorine-based oil component is attached to the surface of the solid film 40.
【００４０】以上説明したように、ボールねじＡ、直動
型玉軸受Ｂあるいは転がり軸受Ｃにおいてボール３，１
４，３３の転動部位あるいは摺動部位に固形膜４０と油
膜４１とを形成すれば、仮にボール３，１４，３３のひ
きずり現象が発生してもボール３，１４，３３をその転
動、摺動相手に対して必ず固形膜４０や油膜４１を介し
て接触させることができて、金属材どうしの直接接触を
避けるようにできる。したがって、良好な潤滑性を長期
にわたって継続できるようになり、長寿命化を達成でき
るようになる。As described above, in the ball screw A, the direct acting ball bearing B or the rolling bearing C, the balls 3, 1
If the solid film 40 and the oil film 41 are formed on the rolling portions or sliding portions of the balls 4, 14, 33, even if the balls 3, 14, 33 are dragged, the balls 3, 14, 33 are rolled. The sliding member can always be brought into contact via the solid film 40 or the oil film 41, so that direct contact between metal materials can be avoided. Therefore, good lubricity can be maintained for a long time, and a longer life can be achieved.
【００４１】なお、本発明は上記実施形態のみに限定さ
れるものではなく、種々な応用や変形が考えられる。It should be noted that the present invention is not limited to only the above embodiment, and various applications and modifications can be considered.
【００４２】（１）上記実施形態で例示したボールねじ
Ａ、直動型玉軸受Ｂならびに転がり軸受Ｃは、あくまで
も本発明の対象の一例であって、転がり摺動部品の範疇
に含まれる周知の各種機器に対して本発明を適用でき
る。(1) The ball screw A, the direct acting ball bearing B, and the rolling bearing C exemplified in the above embodiment are merely examples of the object of the present invention, and are well-known in the category of rolling sliding parts. The present invention can be applied to various devices.
【００４３】（２）上記実施形態では、ボールねじＡの
ねじ軸１とナット２とに対して、また、直動型玉軸受Ｂ
のレール１１と移動体１２に対して、さらに、転がり軸
受Ｃの内・外輪３１，３２に対して、それぞれ固形膜４
０と油膜４１とを形成したが、いずれも、ボール３，１
４，３３に対して固形膜４０と油膜４１とを形成しても
よい。また、ボールねじのサーキュレータチューブ４や
直動型玉軸受の保持器１３にも膜を形成してもよい。(2) In the above embodiment, the linear motion ball bearing B is used for the screw shaft 1 and the nut 2 of the ball screw A.
The solid film 4 is applied to the rail 11 and the moving body 12 of the
0 and the oil film 41 were formed.
A solid film 40 and an oil film 41 may be formed on the layers 4 and 33. Also, a film may be formed on the circulator tube 4 of a ball screw or the retainer 13 of a direct acting ball bearing.
【００４４】[0044]
【発明の効果】請求項１ないし３の発明では、転動部位
あるいは摺動部位に形成してある固形膜および油膜が長
期にわたって排除されずに安定して存在するから、転動
部位あるいは摺動部位の潤滑性を長期にわたって良好に
保つことができて、寿命の向上に貢献できる。According to the first to third aspects of the present invention, since the solid film and the oil film formed at the rolling portion or the sliding portion are stably present without being removed for a long period of time, the rolling portion or the sliding portion is not removed. The lubricity of the part can be kept good for a long time, which can contribute to the improvement of the life.
【００４５】特に、請求項２のように、油膜の膜厚を特
定すれば、油膜の付着強度をより一層高めることができ
るので、潤滑性のさらなる長期安定化を図ることができ
るだけでなく、低発塵性を確保できて環境清浄化に貢献
できるようになる。In particular, when the thickness of the oil film is specified, the adhesion strength of the oil film can be further increased, so that not only long-term stabilization of lubricity but also low lubrication can be achieved. It is possible to secure dust generation and contribute to environmental cleanup.
【図１】本発明の一実施形態にかかるボールねじの縦断
面図FIG. 1 is a longitudinal sectional view of a ball screw according to an embodiment of the present invention.
【図２】固形膜の構造を模式的に表した構造図FIG. 2 is a structural diagram schematically showing the structure of a solid film.
【図３】本発明の他の実施形態にかかる直動型玉軸受の
上半分を断面にした側面図FIG. 3 is a side view in which an upper half of a direct acting ball bearing according to another embodiment of the present invention is sectioned.
【図４】図３の直動型玉軸受の一部を断面にした端面図FIG. 4 is an end view showing a part of the direct acting ball bearing of FIG. 3 in section;
【図５】図３中のレールの断面図FIG. 5 is a sectional view of the rail in FIG. 3;
【図６】本発明の他の実施形態にかかる転がり軸受の上
半分の断面図FIG. 6 is a sectional view of an upper half of a rolling bearing according to another embodiment of the present invention.
【図７】各油膜の膜厚毎の発塵量の測定結果を示すグラ
フFIG. 7 is a graph showing the measurement results of the amount of dust generated for each oil film thickness.
Ａ ボールねじ １ ねじ軸 ２ ナット ３ ボール ５ ねじ軸の螺旋溝 ６ ナットの螺旋溝 Ｂ 直動型玉軸受 １１ レール １２ 移動体 １３ 保持器 １４ ボール １６ レールの溝 １７，１８ 移動体の溝 Ｃ 転がり軸受 ３１ 内輪 ３２ 外輪 ３３ ボール ４０ 固形膜 ４１ 油膜 A Ball Screw 1 Screw Shaft 2 Nut 3 Ball 5 Screw Shaft Groove 6 Nut Spiral Groove B Linear Ball Bearing 11 Rail 12 Moving Body 13 Cage 14 Ball 16 Rail Groove 17, 18 Moving Body Groove C Rolling Bearing 31 Inner ring 32 Outer ring 33 Ball 40 Solid film 41 Oil film
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 3J101 AA02 AA32 AA42 AA52 AA62 AA64 AA65 BA10 BA50 BA70 EA31 EA33 EA36 EA37 EA42 EA43 EA44 EA53 EA67 FA32 ────────────────────────────────────────────────── ─── Continued on the front page F term (reference) 3J101 AA02 AA32 AA42 AA52 AA62 AA64 AA65 BA10 BA50 BA70 EA31 EA33 EA36 EA37 EA42 EA43 EA44 EA53 EA67 FA32
Claims (3)
はすべり接触が生ずる転がり摺動部品であって、 前記相手部材との接触面に、ふっ素系高分子成分からな
る固形膜が被覆形成されており、この固形膜の表面にふ
っ素系油成分からなる油膜が付着されている、ことを特
徴とする転がり摺動部品。1. A rolling sliding part in which rolling contact or sliding contact relatively occurs with a mating member, wherein a solid film made of a fluoropolymer component is coated on a contact surface with the mating member. A rolling sliding part, characterized in that an oil film composed of a fluorine-based oil component is attached to the surface of the solid film.
されている、ことを特徴とする転がり摺動部品。2. The rolling sliding component according to claim 1, wherein said oil film is set to a thickness of not more than half the thickness of said solid film.
ナット、あるいは直動型軸受のレールや移動体として用
いられる、請求項１または２の転がり摺動部品。3. The rolling and sliding part according to claim 1, which is used as a bearing ring of a rolling bearing, a screw shaft or a nut of a feed screw, or a rail or a moving body of a linear motion bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01015999A JP3857449B2 (en) | 1999-01-19 | 1999-01-19 | Low dust generation rolling sliding parts |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP01015999A JP3857449B2 (en) | 1999-01-19 | 1999-01-19 | Low dust generation rolling sliding parts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000205278A true JP2000205278A (en) | 2000-07-25 |
| JP3857449B2 JP3857449B2 (en) | 2006-12-13 |
Family
ID=11742512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP01015999A Expired - Fee Related JP3857449B2 (en) | 1999-01-19 | 1999-01-19 | Low dust generation rolling sliding parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3857449B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003013974A (en) * | 2001-06-29 | 2003-01-15 | Nsk Ltd | Rolling unit |
-
1999
- 1999-01-19 JP JP01015999A patent/JP3857449B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003013974A (en) * | 2001-06-29 | 2003-01-15 | Nsk Ltd | Rolling unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3857449B2 (en) | 2006-12-13 |
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