JP2000293219A - Processing apparatus and method - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To prevent loss of valid log information and facilitate acquisition of valid log information. SOLUTION: Processing means 49 for performing a predetermined processing on a workpiece, and log means 43, 46 for recording log information of an event occurring at the time of operation or control of the processing means,
47, the log information is recorded as one piece of log information by the log means based on the occurrence of the first event, and when a second event of the same type occurs, a log is generated. The means prevents the log information on the second event from being recorded as one new log information when the occurrence time of the second event has not elapsed from the occurrence time of the first event. Alternatively, the log means, when an event for which log information is to be recorded occurs, extracts log information on an event that occurred in the past within a predetermined time set for the type of the event from a log file, and Save the information as a separate file.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing apparatus and a processing method capable of recording, in a log file, the contents of an event that occurs, such as a program execution status and processing contents, and stores information recorded in the log file in time. And an event process (error, sequence process, etc.) that can be processed into a valid information group as a trigger.

[0002]

2. Description of the Related Art Generally, when an error or the like occurs in the execution or processing of a program in a processing apparatus, the contents of the error are sequentially recorded in a log file. Conventionally, when the remaining capacity for recording a log becomes insufficient, old log information is sequentially deleted. Further, it is possible to constantly record the occurrence events such as the program execution status and processing contents inside each unit device, input / output device, event processing device and the like in a log file.

[0003]

However, when sequentially deleting old log information in order to secure a capacity for recording a log, a fatal error or the like of a certain unit occurs during operation of the apparatus. In some cases, the contents may not be recorded in the log file. In such a case, it is necessary to perform a similar process again to acquire a log. In such a case, the same phenomenon may not be reproduced, which hinders problem analysis.

In the case of a device in which the same event occurs frequently, if the event is sequentially recorded in a log file, unnecessary information of the same event remains in the log file, and logs of other important events disappear. Problem.

[0005] Further, if the occurrence event is constantly recorded, the throughput of the apparatus is reduced due to the recording process. In addition, it takes a lot of skill and time to find out effective log information for investigating a failure from a huge amount of log information.

An object of the present invention is to prevent the loss of effective log information in a processing apparatus and a processing method in view of the problems of the related art. Another object is to facilitate acquisition of valid log information.

[0007]

In order to achieve the above object, a processing apparatus according to the present invention comprises a processing means for performing a predetermined processing on a workpiece, and a log of an event occurring when the processing means is operated or controlled. A log device for recording information, wherein the log information is recorded as one log information by the log device based on the occurrence of the first event, and a second event of the same type Occurs, the elapsed time from the occurrence of the first event, which is necessary for the log means to be able to record the log information of the second event as one new log information,
It is characterized by comprising means for setting the type of event.

Further, another processing apparatus according to the present invention comprises a processing means for performing a predetermined processing on a workpiece and a log means for recording log information of an event occurring when the processing means is operated or controlled. In the case where the log information is recorded as one piece of log information by the log means based on the occurrence of the first event in the processing apparatus provided with, when the second event of the same type occurs, the log means Does not record the log information about the second event as one new log information when the occurrence time of the second event has not elapsed from the occurrence time of the first event. There is a feature.

In these processing apparatuses, for example, when the predetermined time has not elapsed, the log means may store the time of occurrence of the second event and the log information in the log information recorded for the first event. The fact that an event of the same kind as the first event has occurred at that time, for example, the occurrence time and the number of occurrences of the same kind of event that occurred from the occurrence of the first event to the occurrence of the second event are recorded.

According to the processing apparatus of the present invention, when the same type of event occurs a plurality of times within a predetermined time set for the event, only one log information is recorded for these events. Efficient extraction of log data and prevention of loss of effective log data are achieved. Therefore, the cause of the failure can be quickly investigated by analyzing the effective log data, and the machine operation rate can be improved.

[0011] Still another processing apparatus of the present invention is a processing means for performing a predetermined processing on a workpiece, and log information of an event occurring when the processing means is operated or controlled is recorded in a log file. In a processing apparatus including a log unit, when an event for which log information is to be recorded occurs, the log unit stores log information about an event that has occurred in the past within a predetermined time set for the type of the event. The log information is extracted from the log file and the extracted log information is stored as a separate file. In this case, it is preferable to have means for setting the predetermined time in accordance with the importance set for each event.

The log means records the time in the log file each time a preset time elapses, and stores the remaining time in the log file when an event for which log information is to be recorded occurs. When the capacity is insufficient, the log file is deleted, a new log file is created, and the log information to be recorded is recorded in the new log file. Further, when recording log information of an event that has occurred, the time of occurrence of the event is also recorded in the log file at the same time. Further, when an event occurs, the time of occurrence of the event depends on the device portion where the event occurred. It is to determine whether or not to record the log information of the event.

According to this, when an event for which log information is to be recorded occurs, log information on an event that occurred in the past within a predetermined time set for the type of the event is extracted from the log file, The extracted log information is saved as a separate file, so that it is possible to shorten the log search time for important events from a huge log file, extract logs efficiently, and prevent the loss of effective logs. . Therefore, it is possible to quickly investigate the occurrence of a failure by quickly analyzing the effective log data and improve the machine operation rate.

Further, according to the processing method of the present invention, a processing means for performing a predetermined processing on a workpiece is used, and while the log information of an event occurring at the time of operation or control of the processing means is recorded, the processing is performed. In a processing method for processing an object,
In the case where the log information is recorded as one log information by the log means based on the occurrence of the first event, when the second event of the same type as that occurs, the second
When the occurrence time of the event has not passed a predetermined time from the occurrence time of the first event, the log information on the second event is not recorded as one new log information. If the predetermined time has not elapsed,
For example, the occurrence time of the second event and the fact that an event of the same type as the first event has occurred at the time are recorded in the log information recorded for the first event.

According to another processing method of the present invention, a processing means for performing a predetermined processing on a workpiece is used, and log information of an event occurring at the time of operation or control of the processing means is stored in a log file. In the processing method of processing a workpiece while recording, when an event for which log information is to be recorded occurs, log information about an event that occurred in the past within a predetermined time set for the event is obtained from the log file. It is characterized by extracting and storing the extracted log information as a separate file.

According to the processing method of the present invention, as in the case of the above-described processing apparatus of the present invention, it is possible to quickly investigate the occurrence of a failure by quickly analyzing valid log data and improve the machine operation rate. Can be

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below through examples.

[0018]

1 is a perspective view showing the appearance of a semiconductor manufacturing apparatus according to one embodiment of the present invention. This device has a window system and is operated by operating a switch unit of an operation panel unit. As shown in FIG. 1, the semiconductor manufacturing apparatus has a temperature control chamber 10 for controlling the environmental temperature of the apparatus body.
1. CPU arranged inside thereof to control the apparatus main body
An EWS main unit 106 having an EWS, an EWS display device 102 for displaying predetermined information in the device,
A monitor TV 105 for displaying image information obtained via an image pickup means in the apparatus main body, an operation panel 103 for performing a predetermined input to the apparatus, and an EWS keyboard 104
And a console unit including the same. In the figure, 107 is O
N-OFF switch, 108 is an emergency stop switch, 10
9 is a switch, a mouse, etc., 110 is a LAN communication cable, 111 is an exhaust duct for generating heat from the console function, and 112 is an exhaust device for the chamber. The semiconductor manufacturing apparatus main body is installed inside the chamber 101. E
The WS display 102 is of a thin flat type such as EL, plasma, liquid crystal, etc.
It is housed on the front and is connected to the EWS main unit 106 by a LAN cable 110. An operation panel 103, a keyboard 104, a monitor TV 105, and the like are also installed on the front surface of the chamber 101 so that console operations similar to those of the related art can be performed from the front surface of the chamber 101.

FIG. 2 is a diagram showing the internal structure of the apparatus shown in FIG. FIG. 1 shows a stepper as a semiconductor manufacturing apparatus. In the drawing, reference numeral 202 denotes a reticle, and 203, a wafer. When a light beam emitted from the light source device 204 illuminates the reticle 202 through the illumination optical system 205, the pattern on the reticle 202 is exposed by the Can be transferred to a layer. The reticle 202 is supported by a reticle stage 207 for holding and moving the reticle 202. Wafer 203
Is exposed while being vacuum-sucked by the wafer chuck 291. The wafer chuck 291 is mounted on the wafer stage 20.
9 allows movement in each axis direction. Above the reticle 202, a reticle optical system 281 for detecting the amount of displacement of the reticle is arranged. Above the wafer stage 209, an off-axis microscope 282 is arranged adjacent to the projection lens 206. Off-axis microscope 282
The main function is to detect the relative position between the internal reference mark and the alignment mark on the wafer 203.

A reticle library 220 and a wafer carrier elevator 230, which are peripheral devices, are disposed adjacent to the stepper main body. Necessary reticles and wafers are stored in a reticle transport device 221 and a wafer transport device 231.
To the stepper body.

The chamber 101 is mainly composed of an air conditioner room 210 for controlling air temperature, a filter box 213 for filtering out minute foreign matters and forming a uniform flow of clean air, and a booth 214 for shutting off the environment of the apparatus from the outside. It is configured. In the chamber 101, air whose temperature has been adjusted by the cooler 215 and the reheat heater 216 in the air conditioner room 210 is supplied into the booth 214 via the air filter g by the blower 217. The air supplied to the booth 214 is returned to the air conditioner room 21 from the return port ra.
0 and circulates in the chamber 101. Normal,
This chamber 101 is not strictly a complete circulation system,
In order to constantly maintain the inside of the booth 214 at a positive pressure, about 10% of the circulating air amount outside the booth 214 is introduced through an outside air inlet oa provided in the air conditioner room 210 via a blower.
In this way, the chamber 101 can keep the environment temperature where the apparatus is placed at a constant level and keep the air clean.

The light source device 204 is provided with an intake port sa and an exhaust port ea in preparation for cooling of the ultra-high pressure mercury lamp and generation of toxic gas at the time of laser abnormality, and a part of the air in the booth 214 passes through the light source device 204. The air is forcibly exhausted to factory equipment via a dedicated exhaust fan provided in the air conditioner room 210. Further, a chemical adsorption filter cf for removing chemical substances in the air is provided so as to be connected to the outside air introduction port oa and the return port ra of the air conditioner room 210, respectively.

FIG. 3 is a block diagram showing an electric circuit configuration of the apparatus shown in FIG. In the figure, reference numeral 321 denotes a main unit C built in the EWS main unit 106, which controls the entire apparatus.
It is a PU and comprises a central processing unit such as a microcomputer or a minicomputer. 322 is a wafer stage driving device, 323 is an alignment detection system such as the off-axis microscope 282 or the like, 324 is a reticle stage driving device, 325 is an illumination system such as the light source device 204 or the like, 326
Is a shutter driving device, 327 is a focus detection system, 32
Reference numeral 8 denotes a Z drive device, which is controlled by the main body CPU 321. 329 is the reticle transport device 2
21, a transfer system such as a wafer transfer device 231. 330
Is a console unit having the display 102, the keyboard 104, the graphic board, and the like, for giving various commands and parameters relating to the operation of the exposure apparatus to the main body CPU 321. That is, it is for exchanging information with the operator. Reference numeral 332 denotes a hard disk, for example, in which a database is constructed, in which various parameters and their management data, operator groups, and the like are recorded.

FIG. 4 is a block diagram for explaining the principle of the present embodiment. In the figure, 41 is the display 10
2, an input / output control unit, 43, an event control unit, 44, a time management unit, 45, a DB (database), 46, a log storage control unit, 47, a log information recording unit. , 48 are unit control units, and 49 is a unit group.

The operation panel 41 is a device for inputting and outputting to the operator, and other input / output devices. The operation panel 41 is connected to the event control unit 43 via the input / output control unit 42. Event control unit 4
3 detects the occurrence of a trigger or the like of data or a signal from the input / output control unit 42 or the unit control unit 48 or from the event control unit 43, and detects the occurrence of an event. When an event is detected, the event is analyzed and
Items related to the event are extracted from the DB (database) 45, and the time is inquired to the time management unit 44.
Data corresponding to these is recorded in the log information storage unit 47 via the log storage control unit 46.

FIG. 5 is an explanatory diagram of a log table in the log information storage unit 47 where data is recorded and one log information. As shown in the figure, the log table contains a date (Dat) at the time of occurrence of each of the events that have occurred in the input / output control unit 42, the unit control unit 48, or the event control unit 43.
e), time (Time), type (Type), code (Code), and title (Title) are recorded, and by selecting an item of the occurred event, one item of logging information is displayed on the operation panel 41. Is displayed. One log information table contains the date and time of the event, the type of the event (error, warning, etc.), the code, the title of the event, the content of the event, a guide showing the countermeasures after the event, and the Count information is recorded. If the same event occurs within the set time, this number is updated instead of newly registering the event.
That is, when a certain event has occurred, and when the same event has been recorded before, the frequency information of the logging information is updated. When the logging information whose frequency information is two or more times is selected, the history of the occurrence time of the event is displayed on the operation panel 41.

FIG. 6 is a flowchart showing a process for recording an occurrence event such as a program execution status and processing contents in a log file. In the system shown in FIG. 4, when the log recording control software is activated and is in an event waiting state, in step S1, the event control unit 43 determines whether the input / output control unit 42 or the unit control unit 48 When an event is detected by detecting the occurrence of a trigger or the like of data or a signal from inside the time management unit 43, the time management unit 44
To the current date and time when the event occurred. Further, in step S3, the generated event is analyzed to select which of the events registered in the DB 45 in advance, and in step S4, the event name, type, and code number are acquired.
Next, in step S5, the time recording unit 44 is inquired of the event recording period, and in step S6, it is determined whether the event occurrence date and time acquired in step S2 is within the preset event recording period.

As a result, if it is out of the recording period, the operation proceeds to step S7, and the log information recording unit 4 is sent to the log recording control unit 46.
Inquires whether the capacity of 7 is full. When the capacity of the log information recording unit 47 is full, the oldest log information in the log table of the log information recording unit 47 is deleted in step S8, and the generated event is registered in the log table in step S9, and the processing is performed. Finish. If it is determined in step S7 that there is free space in the log information recording unit 47, the generated event is immediately registered in the log table in step S9, and the process ends.

On the other hand, in step S6, step S2
If it is determined that the event occurrence date and time obtained in step S1 is within the preset event recording period, the process proceeds to step S1.
0, the event occurring during the recording period in the log table of the log information recording unit 47 is stored in the log storage control unit 46.
Extract all to Then, in step S11, an inquiry is made as to whether the same event as the occurred event exists in the events extracted in step S10. As a result, if the same event is not found in the log table of the log information recording unit 47, the processing of steps S7 to S9 is performed, and the processing ends. If it is determined in step S11 that the same event as the occurred event exists in the events extracted in step S10, the log information of the same event in the logging information table of the log information recording unit 47 is determined in step S12. The update of the count information and the addition of the occurrence date and time information are performed, and the process is completed.

FIG. 7 is a diagram showing a screen for setting a time for acquiring past log data for each event rank. In the figure, reference numeral 71 denotes a screen portion for setting the past data acquisition time, and 72 denotes an index of the past data acquisition set time, for recording the current time in a log file every time a fixed interval time elapses. It is a screen portion for setting an index time. The degree of importance (rank) is set in advance for the event that occurs, and the past data acquisition time can be set for each type of the event. Based on the time set in this way, of the log data recorded so far in the log file, log data on past events for the set time, including log data Extracted and recorded as a separate file.

FIG. 8 shows a screen for setting whether or not to record log data for the event for each device.
Reference numeral 81 denotes a screen portion for setting whether to record log data of an event that has occurred for each device.

FIG. 9 shows an example of the inside of a recorded log file. A log file 901 records the content of each event. 902 to 911 are log files 90
8 is set to record log data on the screen of FIG. 8 (the item of “presence / absence of data recording” is set to “YES”). Content. ★ mark,
The current time is recorded every time the time set in the index time setting screen portion 72 of FIG. 7 elapses.

As shown in FIG. 9, event 9 of rank B
Since the setting time of the B rank event set in the past data acquisition setting time setting screen portion 71 in FIG. 7 is 2 minutes due to the occurrence of the B rank event 509 in FIG. Events that occur and are recorded in
Extracted from the log file 901 and saved as a file 912. In addition, since the setting time of the A rank event set in the past data acquisition setting time screen portion 71 of FIG. 7 is 5 minutes due to the occurrence of the rank A event 909, the past including the time at which the rank A event 909 occurred is included. The event that occurs and is recorded for five minutes is extracted from the log file 901 and stored as a file 913.

FIG. 10 is a flowchart showing a process of extracting an event that has occurred in the past for a set time from the time when a certain event has occurred and converting it to a file. In the system shown in FIG. 4, when the log recording control software is activated and is in an event waiting state, in step T1, the event control unit 43 When an event is detected by detecting the occurrence of a trigger or the like of data or a signal from the inside, in step T2, the time management unit 44 is inquired of the current time at which the event occurred. Further, in step T3, it is checked whether or not an event has been acquired for each device, which is set in FIG. 8, and it is determined whether or not the occurred event is an event to be recorded in a log file. If the event is for a device that is not recorded in the log file (an event for a device for which the setting in FIG. 8 is NO), the process returns to the event waiting state.

If it is determined in step T3 that the event occurred is an event to be recorded in the log file (an event of the apparatus for which the setting in FIG. 8 is YES), the process proceeds to step T3.
At 4, it is checked whether or not the capacity of the log file in the log information recording unit 47 is full. When it is determined that the capacity of the log file is full, the log file is deleted in step T5, a new log file is created in step T6, and the process proceeds to step T7.
If it is determined in step T4 that there is free space in the log file capacity, the process proceeds directly to step T7.

At step T7, the time and contents of the event that occurred are recorded in a log file. Then, in step T8, the rank for each event set on the screen of FIG. 7 is checked. As a result, if the occurred event is out of the rank (C rank event), the process returns to the event waiting state. If the occurred event is an event of rank A or B, in step T9, past log data for a time set according to the rank is extracted. Then, step T1
0, create a file of extracted log data,
Return to the event waiting state.

Each time the time set on the index time setting screen portion 72 in FIG. 7 elapses, a timer interrupt is generated in step T11.
, The current time is recorded in the log file of FIG.

[0038]

As described above, according to the present invention, duplicate recording of log information for the same type of event that has occurred within a certain period is eliminated, so that efficient log data extraction is performed. And effective data can be prevented from being lost. Therefore, the occurrence of a failure can be quickly determined by rapid analysis of valid data. Therefore, the operating rate of the machine can be improved.

When an event for which log information is to be recorded occurs, log information on an event that occurred in the past within a predetermined time set based on the importance of the event or the like for the type of the event is separated. Saved as a file, it is possible to shorten the time to search important events from a huge log file, extract log data efficiently, and prevent loss of effective log data . Therefore, the occurrence of a failure can be quickly investigated by rapid analysis of effective log data, and the operating rate of the machine can be improved.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a semiconductor manufacturing apparatus according to one embodiment of the present invention.

FIG. 2 is a diagram showing the internal structure of the device of FIG.

FIG. 3 is a block diagram showing an electric circuit configuration of the device shown in FIG.

FIG. 4 is a block diagram for explaining the principle of a portion particularly related to the present invention in the apparatus of FIG. 1;

5 is a diagram showing a log table of a log information storage unit of FIG. 4 and one piece of logging information.

FIG. 6 is a flowchart showing a process for recording the contents of an event, such as a program execution status and a process content, in a log file (log table) in the configuration of FIG. 4;

FIG. 7 is a diagram showing a screen for setting a time to acquire past log data for each event rank in the configuration of FIG. 4;

8 is a diagram showing a screen for setting whether or not log data is to be recorded for the event for each device in the configuration of FIG. 4;

FIG. 9 is an explanatory diagram showing an example of the inside of a log file recorded in the log information storage unit of FIG. 4;

FIG. 10 shows a process of extracting the contents of an event that has occurred in the past for a time set for each importance of the event from the log file in the configuration of FIG. It is a flowchart.

[Explanation of symbols]

41: operation panel, 42: input / output control unit, 43: event control unit, 44: time management unit, 45: DB (database), 46: log storage control unit, 47: log information recording unit,
48: unit control unit, 49: unit group, 71, 7
2, 81: screen part, 901: log file, 902
911: Content of event, 912, 913: File.

Continued on the front page F term (reference) 5B042 GB07 LA08 MA08 MA18 MC35 MC40 5F046 AA21 AA22 AA28 BA03 CD01 CD02 DD01 DD06 5H223 AA05 CC08 DD03 EE06 EE30 FF08 5H269 AB17 BB07 BB11 EE11 KK03 NN08 QB15 QC01 QC01 QC01 QC01

Claims (12)

[Claims] 1. A processing apparatus comprising: processing means for performing a predetermined processing on a workpiece; and log means for recording log information of an event occurring during operation or control of the processing means. In the case where the log information is recorded by the log means as one log information based on the occurrence of the event, when a second event of the same type occurs, the log information of the second event is added to a new one. A processing device for setting, for the type of the first event, an elapsed time from the time of occurrence of the first event, which is necessary for the log means to be able to record the log information of the first event. 2. A processing apparatus comprising: processing means for performing a predetermined processing on a workpiece; and log means for recording log information of an event occurring when the processing means is operated or controlled. When the log information is recorded as one piece of log information by the log means based on the occurrence of the event, and when a second event of the same type occurs, the log means determines the time of occurrence of the second event A processing apparatus which does not record log information on the second event as one new log information when a predetermined time has not elapsed from the occurrence time of the first event. 3. The log means, when the predetermined time has not elapsed, stores the occurrence time of the second event and the first time in the log information recorded for the first event.
The processing apparatus according to claim 2, wherein the fact that an event of the same type as the event has occurred at that time is recorded. 4. A processing apparatus comprising: processing means for performing predetermined processing on a workpiece; and log means for recording log information of an event occurring during operation or control of the processing means in a log file. When an event for which log information is to be recorded occurs, the log unit extracts log information on an event that has occurred in the past within a predetermined time set for the type of the event from the log file, and A processing device for storing information as a separate file. 5. The processing apparatus according to claim 4, further comprising means for setting the predetermined time in accordance with the importance set for each event. 6. The log means according to claim 4, wherein the log means records the time at the time each time a preset time elapses in the log file.
The processing apparatus according to item 1. 7. The log means deletes the log file and creates a new log file when the remaining capacity of the log file is insufficient when an event for which log information is to be recorded occurs. The processing apparatus according to claim 4, wherein the log information to be recorded is recorded after that. 8. The log means according to claim 4, wherein, when recording log information of an event that has occurred, said log means simultaneously records the event occurrence time in said log file. The processing device according to claim 1. 9. The log means, when an event occurs,
The processing apparatus according to any one of claims 4 to 8, wherein it is determined whether or not log information of the event that has occurred should be recorded according to a part of the apparatus where the event has occurred. 10. A processing method for processing a workpiece while using processing means for performing a predetermined processing on the workpiece and recording log information of an event occurring at the time of operation or control of the processing means. In the case where the log information is recorded by the log means as one log information based on the occurrence of one event, when a second event of the same type occurs, the occurrence time of the second event is changed to the second event. If no predetermined time has elapsed since the occurrence time of one event, the log information on the second event is not recorded as one new log information. 11. When the predetermined time has not elapsed, an event of the same type as the first event is recorded in the log information recorded for the first event at the time of occurrence of the second event and the time. The processing method according to claim 10, wherein the occurrence is recorded. 12. A processing method for processing a workpiece by using processing means for performing predetermined processing on the workpiece and recording log information of an event occurring when the processing means is operated or controlled in a log file. In the case where an event for which log information is to be recorded occurs, log information about an event that occurred in the past within a predetermined time set for the event is extracted from the log file, and the extracted log information is stored as a separate file. A processing method characterized by storing.