JP2000264724A - Dielectric ceramic composition and ceramic multilayered substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a ceramic multilayered substrate excellent in electrical characteristics, temperature characteristics, etc., and capable of being sintered at a relatively low temperature. SOLUTION: Insulating ceramic layers 3a and 3b having a low dielectric constant and a dielectric ceramic layer 2 having a high dielectric constant are laminated and sintered to obtain the objective ceramic multilayered substrate 1. The insulating ceramic layers 3a and 3b comprise a BaO-Al2O3-SiO2 ceramic composition sintered at a low temperature. the dielectric ceramic layer 2 comprises a dielectric ceramic composition obtained by mixing a dielectric ceramic component containing 85.0-90.0 wt.% barium titanate, 8.5-12.0 wt.% calcium zirconate, <=0.5 wt.% magnesium titanate, <=0.5 wt.% cerium oxide, 0.1-1.0 wt.% bismuth oxide and 0.1-1.0 wt.% tin oxide with a glass component prepared by mixing 10.0-65.0 mol% barium oxide, 1.0-55.0 mol% silicon dioxide and 10.0-75.0 mol% boron oxide.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a dielectric ceramic composition having a high dielectric constant, and a ceramic obtained by laminating and sintering a dielectric ceramic layer having a low dielectric constant and a dielectric ceramic layer having a high dielectric constant. The present invention relates to a multilayer substrate.

[0002]

2. Description of the Related Art In recent years, the performance of electronic components has been remarkably improved in the field of electronics. In particular, in information processing apparatuses such as large computers, mobile communication terminals, and personal computers that support the information society, the information processing speed has been increased. In addition, miniaturization and multifunctionalization of devices have been promoted. The performance improvement of such an information processing device is mainly
It is realized by high integration, high speed, and high functionality of semiconductor devices such as VLSI and ULSI. However, even if the speed of the semiconductor device is increased and the performance thereof is improved, the operation as a system is limited by noise due to signal delay, crosstalk, impedance mismatch, power supply fluctuation, and the like on a substrate connecting the devices. There was something.

For this reason, so-called multi-chip modules (MCMs), in which a plurality of high-performance semiconductor devices are mounted on a ceramic substrate, have been put to practical use as electronic components for performing high-speed and high-performance information processing. In such a module, a ceramic multilayer substrate in which line conductors are three-dimensionally arranged is useful for increasing the packaging density of LSIs and the like and electrically connecting the LSIs satisfactorily.
Alumina has been used as a material for the ceramic multilayer substrate.

However, since alumina alone has a high sintering temperature of 1300 ° C. or higher, it is necessary to use a refractory metal such as tungsten or molybdenum as a line conductor for the inner layer, and to prevent oxidation of the refractory metal. From this point, it was necessary to perform sintering in a reducing atmosphere. Also,
These refractory metals have a problem that high density wiring is difficult because of high specific resistance. Furthermore, alumina has a large dielectric constant of about 10, which causes a large signal delay when the mounted semiconductor device is operated at a high speed and a large thermal expansion coefficient as compared with silicon. In some cases, the reliability may be reduced.

Therefore, in order to solve these problems,
Research on a low-temperature sintered ceramic composition, which is a composite material of a ceramic composition and a glass component, is being actively conducted, and practical application as a substrate for a multilayer module or a multilayer device is in progress. Low-temperature sintered ceramic composition is a composition obtained by adding a glass component to a ceramic component serving as a base material,
By lowering the sintering temperature, the degree of freedom in designing the material properties and sintering temperature can be greatly expanded. In particular, a low-temperature sintered ceramic composition can be simultaneously sintered as a low-melting metal such as silver or copper having a low specific resistance as an electrode material.
A ceramic multilayer substrate excellent in high frequency characteristics can be formed.

[0006]

In recent years, a passive element such as a capacitor or an inductor, which has been a component of a surface mounted device (SMD), has been incorporated into a ceramic multilayer substrate to further increase the module. Attempts have been made to reduce the overall size.
When these elements are embedded in a ceramic multilayer substrate,
If the characteristics of the built-in element are deteriorated compared to the characteristics of the mounted components mounted on the board surface, the merit of incorporating the element is reduced by half, so the built-in element is equivalent to the element mounted on the board Or higher.

For this reason, it is usual to select a material for the constituent layers of the ceramic multilayer substrate so as to sufficiently exhibit the electrical characteristics of each of the elements contained therein. A ceramic multilayer substrate has been developed in which a dielectric ceramic material having a high dielectric constant is selected and an insulating ceramic material having a low dielectric constant (particularly, a low-temperature sintered ceramic composition) is selected for other layers.

Here, as a material used for the low dielectric constant insulating ceramic layer, factors deteriorating electrical characteristics such as stray capacitance generated between elements such as built-in capacitors and inductors and coupling capacitance between wirings are used. Since it is necessary to keep it low, and when used in high frequency applications, the relative dielectric constant εr
It is generally advantageous to use a material satisfying εr ≦ 10 because the lower the

On the other hand, as a dielectric material having a high dielectric constant used for a multilayer capacitor or the like, the present applicant has disclosed Japanese Patent Publication No. 60-317.
No. 93, barium titanate is used in an amount of 85.0-9.
0.0% by weight, calcium zirconate 8.5 to 1
2.0% by weight, 0.5% by weight or less of magnesium titanate, 0.5% by weight or less of cerium oxide, 0.1 to 1.0% by weight of bismuth oxide, and 0.1 to 1.0% of tin oxide Proposal of a dielectric ceramic composition containing each wt%. This dielectric ceramic composition has a high relative permittivity εr, a small dielectric loss tanδ, and
It is useful as a dielectric ceramic composition having excellent temperature characteristics of dielectric constant.

However, although this dielectric ceramic composition has a relatively low firing temperature, it is difficult to sinter simultaneously with a low-melting-point metal such as copper or silver having a low specific resistance. (Especially, low-temperature sintered ceramic substrate) has poor adhesiveness, and when a ceramic multilayer substrate is manufactured using this, the strength of the obtained ceramic multilayer substrate may decrease. Further, inter-diffusion of components may occur between a dielectric ceramic layer having a high dielectric constant and an insulating ceramic layer having a low dielectric constant, which may cause fluctuations in substrate characteristics.

Further, when a glass component is added to the above dielectric ceramic composition for the purpose of lowering the sintering temperature,
Depending on the type and content of the glass component, the substrate strength may be significantly lower than that of an alumina substrate or the like, or the substrate characteristics such as electrical characteristics and temperature characteristics may be reduced even if the substrate strength is high. In particular, when emphasis is placed on the strength of the substrate, its relative dielectric constant is reduced, making it difficult to incorporate a capacitor having a large capacity in the substrate. Even if it can be incorporated, the electrode area occupied by the capacitor increases. hand,
This is disadvantageous for miniaturization of the substrate and high-density mounting. On the other hand, when importance is placed on the electrical characteristics and the temperature characteristics, the strength of the substrate is reduced, and it may be unsuitable as a mounting substrate on which electronic components such as semiconductor ICs are mounted.

The present invention has been made to solve the above-mentioned conventional problems, and an object of the present invention is to provide a dielectric ceramic composition which is excellent in electric characteristics and temperature characteristics and can be sintered at a relatively low temperature.
Another object of the present invention is to provide a ceramic multilayer substrate having high substrate strength, excellent substrate characteristics such as electric characteristics and temperature characteristics, and sinterable at a relatively low temperature.

[0013]

That is, according to the present invention, 85.0% to 90.0% by weight of barium titanate, 8.5% to 12.0% by weight of calcium zirconate and 0.5% by weight of magnesium titanate are used. % By weight, 0.5% by weight or less of cerium oxide, 0.1 to 1.0% by weight of bismuth oxide, and 0.1 to 1.0% by weight of tin oxide. , A glass component comprising barium oxide, silicon oxide and boron oxide.

Further, in the dielectric ceramic composition of the present invention, the glass component may include barium oxide of 15.0 to 15.0.
65.0 mol%, 5.0 to 55.0 mol% of silicon oxide, and 10.0 to 75.0 mol% of boron oxide are mixed, respectively.

Further, the dielectric ceramic composition of the present invention is characterized in that the content of the glass component is 5.0 to 35.0% by weight based on the dielectric ceramic component.

Further, the present invention provides a ceramic multilayer substrate obtained by laminating and firing a low dielectric constant insulating ceramic layer and a high dielectric constant dielectric ceramic layer, wherein the insulating ceramic layer contains a glass component. The dielectric ceramic layer comprises a low-temperature sintered ceramic composition, wherein the dielectric ceramic layer contains 85.0 to 90.0% by weight of barium titanate, 8.5 to 12.0% by weight of calcium zirconate, and 0.1 to 0.2% by weight of magnesium titanate. 5% by weight or less, 0.5% by weight of cerium oxide
Hereinafter, a glass component having substantially the same composition as the above glass component is added to a dielectric ceramic component containing bismuth oxide in an amount of 0.1 to 1.0% by weight and tin oxide in an amount of 0.1 to 1.0% by weight. An object of the present invention is to provide a ceramic multilayer substrate comprising a mixed dielectric ceramic composition.

Further, the ceramic multi-layer substrate of the present invention comprises, as the glass component in the dielectric ceramic composition,
15.0 to 65.0 mol% of barium oxide, 5.0 to 55.0 mol% of silicon oxide, and 10.0 to 7 mol% of boron oxide
It is characterized by being mixed with 5.0 mol% each.

Further, in the ceramic multi-layer substrate of the present invention, the content of the glass component in the dielectric ceramic composition may be adjusted to 5.0 to 3 with respect to the dielectric ceramic component.
It is characterized by being 5.0% by weight.

Further, in the ceramic multilayer substrate of the present invention, the low-temperature sintered ceramic material is made of BaO—Al ₂ O ₃ —SiO
It is characterized by a _two- system glass composite material.

According to the dielectric ceramic composition of the present invention, 85.0 to 90.0% by weight of barium titanate, 8.5 to 12.0% by weight of calcium zirconate, and 0.5% by weight of magnesium titanate are used. % By weight, 0.5% by weight or less of cerium oxide, 0.1 to 1.0% by weight of bismuth oxide, and 0.1 to 1.0% by weight of tin oxide. , Barium oxide, silicon oxide, and a glass component consisting of boron oxide are mixed, so that the dielectric ceramic component retains excellent electrical and temperature characteristics, and has a low sintering temperature and strength after sintering. , A dielectric ceramic composition having a high value is obtained.

Further, according to the ceramic multi-layer substrate of the present invention, the dielectric ceramic layer is made of barium titanate.
5.0 to 90.0% by weight, calcium zirconate 8.5 to 12.0% by weight, and magnesium titanate 0.1% by weight.
5 wt% or less, cerium oxide 0.5 wt% or less, bismuth oxide 0.1-1.0 wt%, tin oxide 0.1-1.0
The insulating ceramic layer and the dielectric material are made of a dielectric ceramic composition in which a glass component having substantially the same composition as the glass component is mixed with a dielectric ceramic component containing 1.0% by weight of the dielectric ceramic component. The bondability with the ceramic layer is good, and the dielectric constant and excellent temperature characteristics of the dielectric ceramic layer are retained, and sintering can be performed at a relatively low temperature, and the strength after sintering is large. Thus, a ceramic multilayer substrate excellent in high frequency characteristics and stability can be obtained.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First, a ceramic multilayer substrate according to the present invention will be described in accordance with an embodiment.

First Embodiment As shown in FIG. 1, a ceramic multilayer substrate 1 according to the present embodiment has a thick film resistor 6 and a mounting component 7 such as a semiconductor IC or a chip capacitor mounted on one main surface. Te becomes, the dielectric ceramic composition of the present invention the dielectric ceramic layers 2 formed by sintering during the _{BaO-Al 2 O 3 -SiO 2} (BAS) made of a material such as an insulating ceramic layer 3a and 3b Is provided.

Further, on the dielectric ceramic layer 2, a capacitor composed of the electrodes 4a, 4b and 4c is formed. The electrodes 4a and 4c are connected via via holes 5b, and predetermined capacitances are formed between the electrodes 4a and 4b and between the electrodes 4b and 4c, respectively. It is the capacity of the entire capacitor. This capacitor is connected to the thick film resistor 6 via the via holes 5a and 5c.

Similarly, on the dielectric ceramic layer 2, a capacitor composed of the electrodes 4d, 4e and 4f is formed. The electrode 4d and the electrode 4f are connected via a via hole 5f, and a predetermined capacitance is formed between the electrode 4d and the electrode 4e and between the electrode 4e and the electrode 4f, respectively. Is the capacity of the whole. This capacitor is connected to the mounted component 7 via the via holes 5d and 5e.

As described above, in the ceramic multilayer substrate 1, since the capacitor is formed in the ceramic multilayer substrate 1, the size of the substrate can be reduced, and the high dielectric constant between the electrodes forming the capacitor can be achieved. Since the dielectric ceramic layer 2 is interposed, a capacitor having a large capacitance can be formed with a relatively small electrode pattern.

Further, since the constituent material of the dielectric ceramic layer 2 is the dielectric ceramic composition of the present invention containing a glass component having substantially the same composition as the glass components in the insulating ceramic layers 3a and 3b, The adhesive strength between the layers 3a and 3b and the dielectric ceramic layer 2 is high, and fluctuations in substrate characteristics due to mutual diffusion of constituent components are suppressed. Furthermore, the high dielectric constant and excellent temperature characteristics of the dielectric ceramic material are maintained, and the ceramic multilayer substrate 1 having both high substrate strength and excellent substrate characteristics is formed.

Second Embodiment Next, a second embodiment according to the present invention will be described with reference to FIG.

The ceramic multilayer substrate 11 has mounted thereon mounting components 7 such as a chip resistor and a semiconductor IC on one main surface, and a dielectric ceramic layer 12a and a dielectric ceramic layer 12a formed by sintering the dielectric ceramic composition of the present invention. 12b are provided between the electrodes 14a and 14b and between the electrodes 14c and 14d provided in the insulating ceramic layer 13 made of, for example, a BAS material or the like by a thick film printing method or the like. I have.

The electrodes 14a, 14b, and
Dielectric ceramic layer 12a provided between these electrodes
A predetermined capacitance is formed by the
A predetermined capacitance is formed by 4c, the electrode 14d, and the dielectric ceramic layer 12b. And the electrode 14
The capacitor formed by a and the electrode 14b is connected to the mounting component 7 via the via hole 15a on the one hand, and is connected to the strip line 18 via the via hole 15b on the other hand. The capacitor formed by the electrode 14c and the electrode 14d is connected to the mounting component 7 via the via hole 15c and the line conductor 16 on the one hand, and is connected to the ground conductor 17 via the via hole 15d on the other hand. I have.

As described above, in the ceramic multilayer substrate 11, since the capacitor is formed in the ceramic multilayer substrate, the size of the substrate can be reduced, and a dielectric having a high dielectric constant can be provided between the electrodes forming the capacitor. Since the body ceramic layers 12a and 12b are sandwiched, a capacitor having a large capacitance is formed with a relatively small electrode pattern.

Further, the dielectric ceramic layers 12a and 1a
Since the constituent material 2b is the dielectric ceramic composition of the present invention containing a glass component having substantially the same composition as the glass component in the insulating ceramic layer 13, the insulating ceramic layer 13 and the dielectric ceramic layers 12a and 12b Has a high adhesive strength, and fluctuations in substrate characteristics due to interdiffusion of constituent components are suppressed. Further, the excellent electrical and temperature characteristics of the dielectric ceramic material are maintained, and the ceramic multilayer substrate 11 having both high substrate strength and excellent substrate characteristics is obtained.

Next, an example of a method for manufacturing the ceramic multilayer substrate according to the first embodiment will be described.

First, as a material for an insulating ceramic layer, a ceramic raw material powder containing alumina as a main component;
aO-, after preparing a glass component SiO ₂ as a main raw material, the glass component with respect to 100 parts by weight of alumina 20-3
0 parts by weight are added and mixed. If necessary, the main raw material before mixing may be calcined at about 800 to 1100 ° C.

The material for the insulating ceramic layer is, for example, Mg ₂ SiO ₄ , CaZrO ₃ , BaAl ₂ Si ₂ O ₈
For example, a material obtained by adding a glass component such as BaO or SiO ₂ or a material containing BaO, Al ₂ O ₃ , or SiO ₂ as a main component may be used. For _{example, B 2 O 3 -BaO-Al} 2 O 3 -S
When using the ceramic raw material powder for the iO ₂ as a main component, after mixing them, calcined at 800 to 1000 ° C..

Next, to the obtained ceramic raw material powder,
An organic slurry is prepared by adding an appropriate amount of a binder, a dispersant, a plasticizer, an organic solvent and the like and mixing them. This, if formed into a sheet by a doctor blade method or the like, a green sheet is obtained insulating ceramic layer made of BaO-Al ₂ O ₃ -SiO ₂ based glass composite material.

Next, separately from this, barium titanate was used as a material for the dielectric ceramic layer having a high dielectric constant.
7. 0 to 90.0% by weight of calcium zirconate.
5 to 12.0% by weight, 0.5% by weight or less of magnesium titanate, 0.5% by weight or less of cerium oxide, 0.1 to 1.0% by weight of bismuth oxide, and 0.1 to 1% of tin oxide .
Dielectric ceramic powders, each of which is mixed at 0% by weight, are prepared and calcined in a reducing atmosphere at 1000 ° C. for 1 hour or more.

Subsequently, after the obtained calcined raw material is pulverized, for example, 10.0 to 65.0 mol% of barium oxide, 1.0 to 55.0 mol% of silicon oxide, and 10. After mixing with 0 to 75.0 mol%, and 5.0 to 35.0% by weight of the glass components mixed respectively, an appropriate amount of an organic vehicle, a dispersant, a plasticizer, an organic solvent and the like are added, and these are mixed. Thereby, an organic slurry is prepared. If this is formed into a sheet by a doctor blade method or the like, a green sheet for a dielectric ceramic layer can be obtained.

The thus obtained green sheet for the insulating ceramic layer and the green sheet for the dielectric ceramic layer were formed with holes for via holes as necessary, and filled with electrode paste or electrode powder to form via holes. Thereafter, an electrode paste is printed so that a capacitor having a predetermined pattern is formed on each green sheet, and the green sheet for the dielectric ceramic layer and the green sheet for the insulating ceramic layer are stacked.

Thereafter, the stacked green sheets are pressed to form blocks. If necessary, the produced block may be cut into an appropriate size or a groove may be formed. Then, the obtained block is sintered at 1000 ° C. or lower to obtain a ceramic multilayer substrate having a built-in capacitor as shown in FIG.

As described above, the material for the dielectric ceramic layer may be formed into a green sheet and embedded in a ceramic multilayer substrate, but the raw material powder for the dielectric ceramic layer may be formed in an organic vehicle. Alternatively, a dielectric ceramic layer may be formed by mixing the mixture with an organic solvent, a plasticizer, or the like, forming a paste, and printing the obtained dielectric paste on a necessary portion in a thick film (see FIG. 2). Also in this case, after the formation of the dielectric ceramic layers, the green sheets are stacked, and a ceramic multilayer substrate can be manufactured through processes such as pressing, cutting, and sintering.

Next, the dielectric ceramic composition of the present invention and the ceramic multilayer substrate of the present invention will be described in more detail. In the ceramic multilayer substrate of the present invention, barium oxide, silicon oxide and boron oxide are used as the glass components. By using a glass component obtained by mixing, ceramics that can be sintered at a low temperature, have high substrate characteristics, and have excellent substrate characteristics such as electrical characteristics and temperature characteristics, while maintaining the characteristics of the dielectric ceramic component well. A multilayer substrate is obtained.

The glass component obtained by mixing barium oxide, silicon oxide and boron oxide is, for example, BaO
-Al ₂ O _3- SiO _{2 and} other low-temperature sintered ceramic materials have almost the same composition as glass components, so that an insulating ceramic substrate made of an insulating ceramic material and a dielectric ceramic layer made of a dielectric ceramic material And a ceramic multilayer substrate having high substrate strength can be obtained.

In particular, in the ceramic multilayer substrate of the present invention and the dielectric ceramic composition of the present invention, 10.0 to 65.0 mol% of barium oxide (BaO) and 1.0 to 55 mol% of silicon oxide (SiO ₂ ) are used. When a glass component obtained by mixing 10.0 to 75.0 mol% of boron oxide (B ₂ O ₃ ) with the dielectric ceramic composition is used in the dielectric ceramic composition, for example, the relative dielectric constant εr is 4000 to 5500. , Dielectric loss ta
Excellent electrical characteristics with nδ of 0.5 or less are achieved, and a stable temperature coefficient Tcc of dielectric constant is achieved, and excellent temperature characteristics can also be achieved.

If the content of the glass component is in the range of 5.0 to 35.0% by weight with respect to the dielectric ceramic material, the electrical characteristics such as the relative dielectric constant εr and the dielectric loss tan δ and the dielectric constant The balance with temperature characteristics such as the temperature coefficient Tcc is excellent. The content of the glass component was 5.0.
If it is less than 10% by weight, the sintering temperature tends to increase,
On the other hand, when the content of the glass component exceeds 35.0% by weight, the substrate strength (flexural strength) tends to decrease.

Further, BaO-A is used for the insulating ceramic layer.
Using the l ₂ O ₃ -SiO ₂ based low-temperature co-fired ceramic material made of a glass composite material, small silver resistivity in the ceramic multilayer substrate, a silver - palladium, copper, low-melting-point metal such as gold (or alloy) Can be disposed as an electrode material and can be simultaneously sintered, so that a ceramic multilayer substrate excellent in high-frequency characteristics can be formed. In particular, since the low-temperature sintered ceramic material has substantially the same composition as the glass component obtained by mixing barium oxide, silicon oxide and boron oxide, the compatibility is good, and therefore, the adhesive strength with the dielectric ceramic layer described above. And variations in substrate characteristics are small.

As described above, the present invention has been described in accordance with the embodiments. However, the present invention is not limited to these embodiments.

For example, the material of the low-temperature sintered ceramic substrate is not limited to the BAS material.
It is also possible to use _{-SrO-SiO 2, BaO-SiO} 2 -Li 2 O low-temperature co-fired ceramic material, such as. These low-temperature sintering ceramic materials are made of BaO, Si
It is a material containing a glass component having substantially the same composition as the glass component composed of O ₂ and B ₂ O ₃ .

The ceramic multilayer substrate of the present invention is used not only as a ceramic substrate on which electronic components such as semiconductor ICs are mounted, but also as a material for electronic components such as a dielectric resonator for microwaves and an LC filter. Can be used as a ceramic package or the like. Further, by forming a resistor on or on the back surface of the ceramic multilayer substrate, or by forming a choke coil or a strip line in the insulating ceramic substrate or the dielectric ceramic layer, the size of the substrate can be further reduced. Can be achieved.

[0050]

The present invention will be described below with reference to specific examples.

First, barium titanate (BaTi
O ₃ ), calcium zirconate (CaZrO ₃ ), magnesium titanate (MgTiO ₃ ), cerium oxide (CeO ₂ ), bismuth oxide (Bi ₂ O ₃ ), and tin oxide (SnO ₂ ) are shown in Table 1 below. A predetermined amount was mixed and calcined in air at 1000 ° C. or more for 1 hour or more. Then, after crushing the ceramic material powder after calcination,
A glass component composed of BaO, SiO ₂ and B ₂ O ₃ mixed in the ratio shown in 1 is added in a predetermined amount, and further, an appropriate amount of a binder, a dispersant, a plasticizer, and an organic solvent are added and mixed to form a dielectric ceramic layer. An organic slurry was prepared.

[0052]

[Table 1]

Next, this was formed into a sheet shape based on the doctor blade method to produce a green sheet for a dielectric ceramic layer. Then, the green sheets were stacked by a required thickness and pressed. It was cut into an appropriate shape. Then, this is placed in a reducing atmosphere at 1000
Sintered below ℃. Electrodes are applied to both surfaces of the obtained sheet-shaped dielectric ceramic, and the relative permittivity εr, the dielectric loss tanδ, the temperature coefficient Tcc of the permittivity at −25 ° C., and the permittivity at 85 ° C. Were measured respectively. The measurement results are shown in Table 2 below.

Also, a green sheet prepared by molding a low-temperature sintered ceramic material made of a BAS material into a sheet and the above-described green sheet for a dielectric ceramic are stacked to form a ceramic multilayer substrate as shown in FIG. It was fabricated and its substrate strength and sintering temperature were measured. The measurement results of the substrate strength and the sintering temperature are also shown in Table 2 below. In addition,
The sintering temperature in Table 2 indicates the temperature at which the density becomes highest.

[0055]

[Table 2]

As shown in Tables 1 and 2, Examples 1 to 9
As shown in the three-component diagram of FIG. 3, the composition ratio of the glass component consisting of BaO, SiO ₂ and B ₂ O ₃
O is 10.0 to 65.0 mol%, SiO ₂ is 1.0 to 5
When 5.0 mol% and B ₂ O ₃ are 10.0 to 75.0 mol%, they have a high relative dielectric constant εr, and exhibit excellent values of tan δ and temperature coefficient of dielectric constant Tcc. In addition, it can be seen that there are advantages such as high substrate strength (flexural strength) and low sintering temperature.

In Examples 1, 16 to 18, when the balance between the substrate strength and the sintering temperature is considered, the content of the glass component with respect to the dielectric ceramic component is 5.0 to 3
It turns out that 5.0 weight% is desirable.

In particular, from Examples 1 to 9 and Example 17, BaO,
When the composition ratio of the glass component composed of SiO ₂ and B ₂ O ₃ is B
aO is 10.0 to 65.0 mol%, SiO ₂ is 1.0
55.0 mol%, a B ₂ O ₃ is from 10.0 to 75.0 mol%, and, when the content of the glass component to the dielectric ceramic component is 5.0 to 35.0 wt%, the ratio It shows excellent electrical characteristics with a dielectric constant εr of 4000 to 5500 and a tan δ of 0.5 or less, and has a temperature coefficient of capacitance Tcc
Is ± 50% at both -25 ° C. and + 85 ° C.
It can be seen that excellent temperature characteristics are shown. In addition, since the sintering temperature is as low as 1000 ° C. or less,
It can be seen that the insulating ceramic substrate made of BAS and the low melting point metal can be simultaneously sintered, and the substrate strength is excellent.

On the other hand, when the composition ratio of BaO in the glass component is 15.0 mol% or less as in Example 10, the sintering temperature becomes too high, and the Q value tends to decrease. Also, as in Example 11, BaO in the glass component
If the composition ratio exceeds 65.0 mol%, the above-mentioned temperature characteristics tend to deteriorate.

Further, when the composition ratio of SiO _{2 in} the glass component is less than 5.0 mol% as in Example 12, the flexural strength is reduced, and it is difficult to use as a substrate. On the other hand,
As in Example 13, when the composition ratio of SiO ₂ exceeds 55.0 mol%, the sintering temperature becomes higher than the sintering temperature of Cu, and the electrode made of Cu may be damaged.

Further, as in Example 14, when the composition ratio of B ₂ O ₃ in the glass component is less than 10.0 mol%, the sintering temperature is high and the ceramic must be fired at a temperature higher than the sintering temperature of Cu. And the electrode made of Cu may be damaged. On the other hand, as can be seen from Example 15, when the composition ratio of B ₂ O ₃ exceeds 75.0 mol%, the sintering temperature is lowered, and sintering of the electrode made of Cu to be co-fired becomes difficult.

Further, with respect to the amount of the glass component to be added to the dielectric ceramic component, the sintering temperature is increased if the content is less than 5.0% by weight from Example 16, and from Example 18, the sintering temperature is increased.
It has been found that when the content exceeds 5.0% by weight, the substrate strength tends to decrease.

As described above, according to the present embodiment, a ceramic composition having a low dielectric constant is used for a portion that is considered to be disadvantageous in terms of characteristics when a stray capacitance is generated, and a dielectric material having a high dielectric constant is used for a portion requiring a large capacitance. By using the ceramic composition, a large-capacity capacitor can be built in, and the ceramic multilayer substrate is significantly reduced in size and height.

At the same time, since a dielectric ceramic layer having a high dielectric constant is built only in necessary portions, stray capacitance between electrodes and between wirings can be minimized. In addition, when the dielectric ceramic layer portion having a high dielectric constant is built in as a green sheet or the like, for example, since the dielectric film thickness between the capacitors can be made constant, a very high-precision large-capacity capacitor is used. There is no need to trim
Can be formed.

Further, since the low-permittivity insulating ceramic layer and the high-permittivity dielectric ceramic layer contain glass components having substantially the same composition, their joining works properly, and the insulating ceramic layer and the dielectric ceramic layer have a high dielectric constant. The bonding strength with the body ceramic layer is very large, and the strength of the substrate is greatly improved.

[0066]

The dielectric ceramic composition of the present invention has a barium titanate content of 85.0 to 90.0% by weight, a calcium zirconate content of 8.5 to 12.0% by weight, and a magnesium titanate content of 0.5%. Weight% or less, and cerium oxide in an amount of 0.
5% by weight or less, bismuth oxide 0.1 to 1.0% by weight,
0.1 to 1.0% by weight of tin oxide, relative dielectric constant ε and dielectric loss tanδ of dielectric ceramic components each containing tin oxide
It is a dielectric ceramic composition that maintains good electrical characteristics such as temperature coefficient of dielectric constant such as temperature coefficient Tcc in a well-balanced manner, can be sintered at a relatively low temperature, and has high strength after sintering.

According to the ceramic multi-layer substrate of the present invention, the insulating ceramic layer and the dielectric ceramic layer are satisfactorily joined together, and the dielectric ceramic layer has electrical characteristics such as relative permittivity ε and dielectric loss tan δ, It is excellent in balance with temperature characteristics such as the temperature coefficient Tcc of the ratio, and has high strength after sintering and can be sintered at low temperature, so that a ceramic multilayer substrate excellent in stability and high frequency characteristics can be obtained.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view of a ceramic multilayer substrate according to a first embodiment of the present invention.

FIG. 2 is a schematic sectional view of a ceramic multilayer substrate according to a second embodiment of the present invention.

FIG. 3 is a three-component diagram showing a composition range of a glass component in the dielectric ceramic composition of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Ceramic multilayer substrate, 2 ... Dielectric ceramic layer, 3a, 3b ... Insulating ceramic layer, 4a, 4b, 4c, 4d, 4e, 4f ... Electrode, 5a, 5b, 5c, 5d, 5e, 5f ... Via hole, 6,7 ... Surface mount components

 ────────────────────────────────────────────────── ─── Continued on the front page F term (reference) 4G031 AA03 AA04 AA06 AA07 AA11 AA12 AA28 AA30 AA31 AA35 BA09 CA03 5E346 AA12 AA13 AA15 AA23 AA36 BB01 BB20 CC18 DD02 DD13 DD34 EE24 EE29 FF45 GG03 AB06 AB12 AB15 BA06 BA12 CA03 CB02 CB03 CB05 CB06 CB08 CB17 CB30 CB31 CB35 CB39

Claims (7)

[Claims] 1. The method according to claim 1, wherein the barium titanate is from 85.0 to 90.0.
Weight%, calcium zirconate 8.5 to 12.0
Weight%, magnesium titanate 0.5% by weight or less, cerium oxide 0.5% by weight or less, bismuth oxide 0.1%
To 1.0% by weight and 0.1 to 1.0% by weight of tin oxide, respectively, and a glass component comprising barium oxide, silicon oxide and boron oxide mixed with a dielectric ceramic component. A dielectric ceramic composition, characterized by: 2. The glass component according to claim 1, wherein the glass component is barium oxide.
5.0-65.0 mol%, silicon oxide is 5.0-55.
The dielectric ceramic composition according to claim 1, wherein 0 mol% and boron oxide are mixed at 10.0 to 75.0 mol%, respectively. 3. The dielectric ceramic according to claim 1, wherein the content of the glass component is 5.0 to 35.0% by weight based on the dielectric ceramic component. Composition. 4. A ceramic multilayer substrate obtained by laminating and firing a low dielectric constant insulating ceramic layer and a high dielectric constant dielectric ceramic layer, wherein the insulating ceramic layer is a low-temperature sintered ceramic containing a glass component. The dielectric ceramic layer comprises barium titanate.
7. 0 to 90.0% by weight of calcium zirconate.
5 to 12.0% by weight, 0.5% by weight or less of magnesium titanate, 0.5% by weight or less of cerium oxide, 0.1 to 1.0% by weight of bismuth oxide, and 0.1 to 1% of tin oxide .
A ceramic multilayer substrate comprising a dielectric ceramic composition obtained by mixing 0% by weight of a dielectric ceramic component and a glass component having substantially the same composition as the glass component. 5. The glass component in the dielectric ceramic composition is 15.0 to 65.0 mol% of barium oxide, 5.0 to 55.0 mol% of silicon oxide, and 10.0 to 75 mol% of boron oxide. 5. The ceramic multilayer substrate according to claim 4, wherein each of the ceramic multilayer substrates is mixed with each other. 6. The dielectric ceramic composition, wherein the content of the glass component is 5.0 to 35.0% by weight based on the dielectric ceramic component.
The ceramic multilayer substrate according to claim 4. 7. The low-temperature sintered ceramic material is BaO-
Characterized in that the Al ₂ O ₃ -SiO ₂ -based glass composite material, a ceramic multilayer substrate according to claim 4.