JP2000244198A - Substrate transfer device - Google Patents

Abstract

(57) [Summary] [Problem] To provide a substrate transfer device capable of securely fixing an entire edge of a substrate in close contact regardless of the size of the substrate. SOLUTION: An edge fixing mechanism 10 for transferring a substrate to a predetermined position and fixing the substrate over the entire length direction of the edge is provided. The edge fixing mechanism 10 is an edge clamp 12 for pressing the edge from below. And a board receiving plate 13 for holding down from above, and a lifting / lowering means 11 for driving the edge clamp 12 up and down, wherein the lifting / lowering means 11 keeps an air source 17 and air generated from the air source 17 constant. The pressure reducing valve 18 for converting the pressure to the pressure, the cylinders 16 and 22 for moving the edge clamp 12 up and down, and the cylinder 22 according to the length of the edge so that the edge is fixed over the entire length direction. And a control circuit 21 that can supply air at a pressure different from that of the cylinder 16.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a substrate transfer apparatus having an edge fixing mechanism for transferring a rectangular substrate to a predetermined position and fixing an edge of the substrate at the predetermined position.

[0002]

2. Description of the Related Art Conventionally, there has been known a board transfer apparatus for transferring a board to a predetermined place in order to mount components and the like on the board. Such a substrate transfer device is provided with an edge fixing mechanism for fixing an edge portion of the substrate to the predetermined location so as to sandwich the edge portion from above and below. FIG. 3 shows a conventional example of an edge fixing mechanism provided in such a substrate transfer apparatus. The edge fixing mechanism 1 shown in FIG. 3 includes an edge clamp 2, a substrate receiving plate 3, a backup table 4, cylinders 6 and 7, a solenoid valve (indicated by a symbol specified by Japanese Industrial Standard (JIS)) 8, and an air source 9. Become. In addition, backup pins 5, 5
There are many standing ... The edge clamp 2 and the substrate receiving plate 3 are both provided at two locations corresponding to the edges of the two long sides of the substrate 100, but in FIG. Only the plate 3 is shown.

In the edge fixing mechanism 1, the substrate 100 is fixed as follows. Air source 9 via solenoid valve 8
When the air supplied from is supplied to the cylinders 6 and 7, the cylinders 6 and 7 operate. As a result, when the backup table 4 rises, the swelling portions 4a, 4a on the backup table 4 become leg portions 2a, 2
a and the backup pins 5...
Abuts on the back surface of 00. In this state, the backup table 4 further moves up together with the edge clamp 2 and the substrate 100, and when the substrate 100 is sufficiently pressed against the substrate receiving plate 3, the backup table 4 stops, and as shown in FIG. 100 is fixed between the edge clamp 2 and the substrate receiving plate 3 from above and below.

In the above-described substrate transfer apparatus, there are various types of substrates that can be transferred and fixed. Since the substrate 100 shown in FIGS. 3 and 4 is the largest substrate used in the mounting process, the edge clamp 2
And the substrate 1 over substantially the entire length of the substrate receiving plate 3 in the longitudinal direction.
00 edge can be inserted.

[0005]

However, in the above-described conventional edge fixing mechanism of the substrate transfer apparatus, since the outputs of the cylinders 6 and 7 are the same, when a substrate of a smaller size is fixed, there is a backlash. This causes a problem that components cannot be mounted on the substrate or the adhesive cannot be applied in a stable state. This state is specifically shown in FIG. FIG. 5 shows a case where the substrate 200 is fixed, in which the length of the long side is less than half of the substrate 100. As described above, in order to fix the substrate 200 between the edge clamp 2 and the substrate receiving plate 3, both the cylinders 6 and 7 are operated, and the edge clamp 2 on which the substrate 200 is placed is raised. Then, since the thrusts of the cylinders 6 and 7 are the same,
The rod 7a, which is the output shaft of the cylinder 7 on which the substrate 200 does not intervene, is pushed upward from the rod 6a of the other cylinder 6, and the edge clamp 2 is moved from the end X of the substrate 200 to the substrate receiving plate 3 Approaching
As shown in FIG. 5, a gap M is generated between the substrate 200 and the edge clamp 2, so that reliable fixing cannot be performed. Such a gap becomes more conspicuous as the length a of the substrate 200 is smaller than the length L of the edge clamp 2 and the substrate receiving plate 3 that can sandwich the substrate.

SUMMARY OF THE INVENTION The present invention has been made in view of the above situation, and provides a substrate transfer apparatus having an edge fixing mechanism.
It is an object of the present invention to provide a substrate transfer apparatus capable of securely fixing the entire edge of a substrate in close contact regardless of the size of the substrate.

[0007]

According to a first aspect of the present invention, a rectangular substrate is transported to a predetermined location, and the edge of the substrate is located at the predetermined location. Has an edge fixing mechanism for fixing the edge over the entire length direction, the edge fixing mechanism pressing a first pressing member that presses from one of the front and back surfaces of the edge, and pressing from the other surface. A second holding member;
Driving means for reciprocatingly driving the first pressing member in the direction of the second pressing member, wherein the substrate is located between the first pressing member and the second pressing member. Wherein the driving means drives the first pressing member in the direction of the second pressing member to fix the edge, wherein the driving means comprises: According to the length of the edge, a different driving force is applied to the first holding member depending on a location so as to be fixed over the entire length direction.

According to the first aspect of the present invention, the driving means applies a different driving force to the first holding member depending on the position according to the length of the edge, and the edge of the substrate is moved to the second position. The edge is tightly fixed over the entire length direction of the edge by the first pressing member and the second pressing member. For example, if the area of the substrate to be fixed is small and the substrate does not intervene between the first contact member and the second contact member, the area of the first contact member is driven by the driving means. By suppressing the force, the entire edge of the substrate can be tightly and securely fixed without generating a gap unlike the conventional substrate transfer device.

Here, the edge fixing mechanism may be a mechanism for fixing one of four sides (edges) of the substrate, a mechanism for fixing two opposing edges, or a method for fixing all four sides. It may be fixed. When fixing a plurality of edges, all the edges to be fixed may be pressed by one first pressing member / second pressing member, or these members may be provided for each edge. Good.

According to a second aspect of the present invention, in the substrate transfer apparatus according to the first aspect, the driving means includes an air source for generating compressed air, and an air generated from the air source being maintained at a constant pressure. Pressure converting means for converting, air supplied through the pressure converting means, a plurality of air cylinders for driving the first holding member, and changing the pressure of air supplied from the pressure converting means. Pressure control means, and a control means for controlling the pressure control means, the control means, according to the length of the edge,
The pressure converter is controlled so that air having different pressures can be supplied to each of the plurality of air cylinders.

According to the second aspect of the present invention, the pressure control means is controlled by the control means, and different pressures are applied to the plurality of air cylinders for driving the first holding member in accordance with the length of the edge. Air can be supplied. Therefore, when the size of the substrate to be fixed is small, there is an area where the substrate does not intervene between the first contact member and the second contact member, but this area of the first contact member is driven. By keeping the pressure of the air supplied to the air cylinder that contributes most to the pressure lower than the pressure supplied to the other cylinders, the entire edge of the substrate can be tightly contacted without creating a gap unlike the conventional substrate transfer device. Can be fixed securely.

In this case, the plurality of air cylinders may be provided in a separated state corresponding to both ends of the first holding member, for example, if the first holding member is elongated, or may be provided with a first holding member. If the member has a frame shape, four members may be provided so as to correspond to four corners. Further, the pressure conversion means,
It may be provided so as to correspond to each of all the air cylinders, or one air cylinder may be provided with the pressure from the pressure conversion unit, and the other air cylinder may be provided with the pressure conversion unit. The driving force of these air cylinders may be directly applied to the first pressing member, or another member may be interposed between the air cylinder and the first pressing member and applied indirectly. .

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below with reference to FIG. In FIG.
1 shows an edge fixing mechanism 10 provided in a substrate transfer device according to an embodiment of the present invention. Further, in order to transport the substrate to the place where the edge fixing mechanism 10 is provided, the substrate transporting apparatus of this embodiment includes a pair of transport belts facing each other with a predetermined width, a motor for driving these transport belts, and the like. However, since these are well-known technologies, detailed descriptions thereof will be omitted.

The edge fixing mechanism 10 fixes the substrate 100 conveyed by the conveying mechanism at an edge portion thereof, and includes an edge clamp 12, a substrate receiving plate 13, a backup table 14, and an elevating mechanism 11. Consists of

The edge clamp 12 is a horizontally long plate-like member, is a first holding member for supporting an edge portion of a long side of the substrate 100 from below, and has a horizontal length (horizontal direction in FIG. 1). Is substantially equal to the length of the long side of the largest substrate among the substrates used for mounting (hereinafter, referred to as L). Legs 12a, 12a are provided below the edge clamp 12, and are pushed by the bulging portions 14a, 14a of the backup table 14 via these legs 12a, 12a when ascending. Further, guide portions 12b, 12b for guiding the edge clamp 12 linearly in the vertical direction are provided on the side portions.

The substrate receiving plate 13 has concave surfaces 13a, 1
3a is a horizontally long plate-shaped member on which the substrate 100
Is a second pressing member for pressing the edge portion of the long side from above, and the length in the lateral direction is substantially equal to the length L of the long side of the maximum substrate, like the edge clamp 12. The edge clamp 12 and the substrate receiving plate 13 are provided two by two corresponding to two long sides of the substrate 100 as in FIG.
Then, only one is shown. One of the two sets of the edge clamp 12 and the substrate receiving plate 13 can be moved according to the width (length of the short side) of the substrate. Further, the substrate is transported from the left side of FIG. 1 onto the two edge clamps 12 by the transport mechanism. Regardless of the size of the substrate, the right short side of the substrate is almost over the right end of the edge clamp 12. It is transported so as to be aligned.

The backup table 14 is formed in a rectangular table shape, and the swelling portions 14a, 1
4a (only two shown) are formed, and these bulging portions 14a are formed.
Push up the leg portions 12a of the two edge clamps 12 to move the edge clamps 12 upward. On the backup table 14, backup pins 15, 15, 15, 15 are erected to support the substrate 100 from below. These backup pins 15 are inside the two opposing edge clamps 12 when viewed from above, and are located at positions where they do not interfere with the edge clamps 12.

The edge fixing mechanism 10 has a backup table 14 for driving the edge clamp 12 up and down.
Is provided with elevating means (driving means) 11 for driving up and down. The lifting means 11 includes a cylinder (air cylinder) 1
6, 22, an air source 17, a pressure reducing valve 18, a solenoid valve 19, and an electropneumatic regulator 20. In FIG. 1,
Pressure reducing valve 18, solenoid valve 19, and electropneumatic regulator 20
Indicates according to the JIS standard.

Each of the cylinders 16 and 22 is provided with two air supply / exhaust ports, and is a double-acting cylinder operated by air pressure. Rod 1, which is an output shaft projecting upward
6a, 22a, and the rods 16a, 22a reciprocate vertically. The tips of the rods 16a and 22a are attached to the lower surface of the backup table 14.

The air source 17 comprises an air compressor or the like, and supplies compressed air of about 7 kg / cm ² . The pressure reducing valve 18 as a pressure converting means is of a type that is manually operated, and converts the compressed air from the air source 17 to a constant pressure, for example, 5 kg / cm ² . The solenoid valve 19 has an electromagnetic switching valve that can be switched to two positions, and has five ports, that is, a so-called 5-port 2
Position directional control valve. Two supply / exhaust lines 23 and 24 are connected to the solenoid valve 19, and these are connected to the cylinders 16 and 22, respectively. The solenoid valve 19 controls the pressure reducing valve 1 under the control of a control circuit 21 described later.
8 is sent to the air supply / exhaust line 23 when the cylinders 16 and 22 rise,
Is sent to the supply / exhaust line 24 at the time of falling.

The electropneumatic regulator 20 is provided in the supply / exhaust line 23 between the solenoid valve 19 and the cylinder 22, and according to a voltage input signal from the control circuit 21,
Pressure control means for controlling the pressure of the air sent from the solenoid valve 19. Therefore, the air pressure sent from the pressure reducing valve 18 is directly applied to the cylinder 16 via the solenoid valve 19, and the pressure is applied to the cylinder 22 if the pressure is reduced by the electropneumatic regulator 20. The air pressure sent out from the valve 18 is applied.

The control circuit 21 controls the edge fixing mechanism 10
Is a control means for controlling various operations. For example, when the length of the long side of the substrate (value a) is input from an operation panel (not shown) provided in the substrate transfer device, the control circuit 21 compares the value a with the length L described above. . When the lateral length a value of the substrate to be fixed is smaller than 1/2 of L, the edge of the substrate is fixed over the entire length direction according to the magnitude of the a value. The air pressure sent from the electropneumatic regulator 20 to the cylinder 22 is
Air pressure sent from If the value a is equal to or more than の of L, control is performed such that air is sent to the cylinder 22 while maintaining the pressure sent from the solenoid valve 19.

The operation of fixing a substrate in the substrate transfer apparatus having the edge fixing mechanism 10 having the above configuration will be described. First, the substrate 100 is transported onto the edge clamp 12 by the transport mechanism. Next, an operator operates the operation panel to fix the substrate 100 by the edge fixing mechanism 10. At this time, the length of the substrate is also input. next,
When the air source is turned on, compressed air is sent out, reaches a constant pressure via the pressure reducing valve 18, and is sent to the electromagnetic valve 19. Next, while the solenoid valve 19 is driven, the substrate 10
The electropneumatic regulator 20 is controlled according to the length of the long side of 0, and air at a predetermined pressure is sent to each of the cylinders 16 and 22.

When air is sent to the cylinders 16 and 22,
The rods 16a and 22a move up, and the backup table 14 moves up. Thereby, the backup table 1
The bulges 14a, 14a on the abutment 4 contact the legs 12a, 12a of the edge clamp 12, and the backup pins 15 of the backup table 14 abut on the back surface of the substrate 100. In this state, the edge clamp 12
Then, the backup table 14 moves up together with the substrate 100, and when the substrate 100 is sufficiently pressed against the substrate receiving plate 3, the cylinders 16 and 22 stop moving and the substrate 1
00 is fixed by being sandwiched between the edge clamp 2 and the substrate receiving plate 3 from above and below.

Next, based on the flowchart of FIG.
The control process of the pressure of the air supplied to the cylinders 16 and 22 performed by the control circuit 21 will be described. First, in step S1, the value a of the length of the long side of the substrate to be actually fixed is input via the operation panel. In response to this value, in step S2, the value a is compared with a half of the maximum length L that can be fixed by the edge clamp 12 and the substrate receiving plate 13. If it is determined that L / 2 is smaller than the value a, the process proceeds to step S4. If it is determined in step S2 that L / 2 is larger than the value a, the process proceeds to step S3. In step S3, the air pressure F exerted on the cylinder 22, against the pressure F ₀ fed from the solenoid valve 19, F = {a / ( L-
a) A process for instructing the electropneumatic regulator 20 is performed so that｝ × F ₀ , and the process proceeds to step S4. Step S
In step 4, a process for driving the solenoid valve 19 is performed, and the control process ends.

According to the above substrate transfer device, the control circuit 2
Under the control of 1, the electropneumatic regulator 20 controls the cylinder 22 of the cylinders 16 and 22 that drive the edge clamp 12 so that the edge is fixed over the entire length direction according to the length of the substrate. It is possible to supply air having a pressure different from that of the air. That is, when the size of the substrate to be fixed is small, the edge clamp 12
There is an area where no substrate is interposed between the edge clamp 12 and the substrate receiving plate 13. If the pressure of the air supplied to the cylinder 22 which most contributes to driving this area of the edge clamp 12 is reduced by the electropneumatic regulator 20, In addition, the entire edge of the substrate can be securely fixed in close contact with each other without forming a gap unlike the conventional substrate transfer device.

In the above-described embodiment, since the transported substrate is fixed to one side of the edge clamp, the determination is made based on each equation of step S2 or step S3 in the flowchart of FIG. However, these formulas may be changed according to a specific place where the substrate is fixed. In the above description, a pneumatic cylinder is used, but the driving means of the present invention is not limited to this, and uses a hydraulic cylinder or a driving force that does not use a cylinder structure, such as an electrically controlled motor. It may be something. Further, in the above description, the length of the substrate is input through the operation panel. However, the length of the substrate may be automatically detected by the length detecting means such as a CCD camera. .

[0028]

According to the first aspect of the present invention, the driving means applies a different driving force to the first pressing member depending on the position according to the length of the edge, and the edge of the substrate is formed. The edge is fixed over the entire length direction of the edge by the first pressing member and the second pressing member. For example, when the substrate to be fixed is small and there is an area where the substrate does not intervene between the first contact member and the second contact member, the area of the first contact member is added from the driving unit. By suppressing the driving force, the entire edge of the substrate can be tightly and securely fixed without forming a gap unlike the conventional substrate transfer device.

According to the second aspect of the present invention, the pressure control means is controlled by the control means to apply different pressures to the plurality of air cylinders for driving the first pressing member in accordance with the length of the edge. Air can be supplied. Therefore, when the size of the substrate to be fixed is small, there is an area where the substrate does not intervene between the first contact member and the second contact member, but this area of the first contact member is driven. By keeping the pressure of the air supplied to the air cylinder that contributes most to the pressure lower than the pressure supplied to the other cylinders, the entire edge of the substrate can be tightly contacted without creating a gap unlike the conventional substrate transfer device. Can be fixed securely.

[Brief description of the drawings]

FIG. 1 is a view schematically showing an edge fixing mechanism provided in a substrate transfer device of the present invention.

FIG. 2 is a flowchart showing a control process of a pressure of air supplied to a cylinder, which is performed by a control circuit of the edge fixing mechanism of FIG. 1;

FIG. 3 is a view schematically showing an edge fixing mechanism provided in a conventional substrate transfer device.

FIG. 4 is a view showing a state in which the substrate is fixed in the edge fixing mechanism of FIG. 3;

FIG. 5 is a view showing a state where a smaller substrate is fixed to the edge fixing mechanism of FIG. 3;

[Explanation of symbols]

 REFERENCE SIGNS LIST 10 edge fixing mechanism 11 elevating mechanism (driving means) 12 edge clamp (first pressing member) 13 substrate receiving plate (second pressing member) 14 backup table 15 backup pin 16, 22 cylinder (air cylinder) 16a, 22a rod 17 air source 18 pressure reducing valve (pressure conversion means) 19 solenoid valve 20 electropneumatic regulator (pressure control means) 21 control circuit (control means)

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Toru Hiramatsu 1-2-8 Kokuryo-cho, Chofu-shi, Tokyo F-term in Juke Corporation (reference) 5E313 AA11 CC02 CC09 DD01 DD02 DD05 DD12 DD13 FF12 FF25 FF40

Claims (2)

[Claims] 1. An edge fixing mechanism for transporting a rectangular substrate to a predetermined location, and fixing an edge of the substrate at the predetermined location over the entire length thereof. A first pressing member that presses from one of the front and back surfaces of the edge, a second pressing member that presses from the other surface, and the first pressing member in the direction of the second pressing member. Driving means for reciprocatingly driving the substrate;
A substrate configured to fix the edge by driving the first pressing member in the direction of the second pressing member by the driving means while being positioned between the pressing member and the second pressing member. In the transport apparatus, the driving unit applies a different driving force to the first holding member depending on a length of the edge so that the edge is fixed over the entire length direction thereof. A substrate transfer device, characterized in that: 2. The driving unit includes: an air source that generates compressed air; a pressure conversion unit that converts air generated from the air source into a constant pressure; and air supplied via the pressure conversion unit. A plurality of air cylinders for driving the first pressing member, a pressure control means capable of changing the pressure of air supplied from the pressure conversion means, and a control means for controlling the pressure control means. The control means controls the pressure conversion means so that air having different pressures can be supplied to each of the plurality of air cylinders according to the length of the edge. 3. The substrate transfer device according to claim 1.