JP2000131640A - Image display device - Google Patents

Abstract

(57) [Problem] To provide an image display device which can realize miniaturization and high resolution, consumes little power, has high reliability such as earthquake resistance, and has low manufacturing cost. An end surface (2) of a free part (18) of a beam member (19).
A scanning motion in which one locus forms a surface is caused on the end face 21 by the vibration of the free portion 18 by the vibration means, and the scanning motion of the end face 21 and the light emission are synchronized by the synchronization means. For this reason,
The scanning motion surface of the end surface 21 becomes the image display surface, and the beam member 19
Since the vibration means and the vibration means can be manufactured by a manufacturing method of a micromachine, the image display surface and the like can be made extremely small. In addition, the higher the vibration frequency and the synchronization frequency, the higher the resolution.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image display device for displaying an image.

[0002]

2. Description of the Related Art An image display device mounted on a small portable terminal device or the like has a small size which is easy to carry, for example, 64.
Have a fixed resolution of 0 pixels × 480 pixels or more,
Performance such as low power consumption so that it can be driven by a battery, high reliability such as seismic resistance due to vibration when the device is carried, and low manufacturing cost are required. On the other hand, as an image display device, a cathode ray tube, a liquid crystal display device, a plasma display device and the like have been conventionally used.

[0003]

However, due to the structure of the cathode ray tube and the plasma display device, it is difficult to reduce the size and power consumption, and the reliability such as earthquake resistance is low. On the other hand, in the liquid crystal display device, although it is possible to reduce the size to some extent, it is necessary to arrange a plurality of pixels in a matrix, so that a resolution of, for example, 640 pixels × 480 pixels or more can be reduced to a size about the fingertip. It ’s extremely difficult to achieve,
In addition, images are often illuminated by a back light source, and it is not easy to reduce power consumption.

[0004] Further, in order to realize a virtual image display apparatus for forming an image directly on the fundus, an image forming optical system for forming a virtual image of an image is necessary. The size depends on the size of the image display surface. Therefore, when an image display device having a large image display surface is used, the size of the image forming optical system becomes large. For example, even in a liquid crystal display device capable of miniaturizing the image display surface, the diagonal length of the image display surface is limited to about 2 cm, and the depth, height, and width of the imaging optical system that forms a virtual image are also about 2 cm. Thus, it has been difficult to say that the entire size of the virtual image image display device is suitable for carrying.

Further, since any image display device such as a cathode ray tube, a liquid crystal display device, and a plasma display device requires a large number of components, the reliability such as earthquake resistance is low and the manufacturing cost is high. . Accordingly, it is an object of the present invention to provide an image display device which can realize miniaturization and high resolution, consumes less power, has high reliability such as earthquake resistance, and has a low manufacturing cost.

[0006]

According to the first aspect of the present invention, a scanning motion in which the trajectory of the light emitting portion in the free portion of the beam member forms a surface is caused in the light emitting portion by the vibration of the free portion by the vibration means. Since the scanning movement of the light emitting unit and the light emission are synchronized by the synchronization means, an image is displayed on the scanning movement surface of the light emitting unit.

That is, since the scanning motion surface of the light emitting portion in the free portion of the beam member becomes the image display surface, and the beam member can be manufactured by a micromachine manufacturing method, the image display surface can be made extremely small. Also, the vibration means can be formed by a micromachine manufacturing method, and furthermore, since an image can be displayed by the beam member, the vibration means and the synchronization means, the number of necessary parts is small and simple, and the image display surface is simple. Other parts can also be made extremely small.

If the vibration frequency of the vibration means and the synchronization frequency of the synchronization means are increased, the number of pixels in the image display surface, that is, the resolution of the image display surface is increased. Also,
The image is directly displayed by the light emission of the light emitting unit, and the light use efficiency is high, and there is no need to illuminate the image with the back light source.

In the image display device according to the second aspect, the optical fiber is a beam member, and a light emitting element is connected to the optical fiber at a portion of the optical fiber opposite to the free portion. The open end of the free part of the fiber is the light emitting part. Therefore, only the thin optical fiber needs to be vibrated during the scanning movement for displaying an image, and it is not necessary to vibrate the light emitting element, and the vibration frequency by the vibration means can be easily increased.

[0010] In the image display device according to the third aspect, the substrate of the optical waveguide is a beam member, the light emitting element is connected to the optical waveguide at a fixed portion of the beam member, and the open end of the optical waveguide at the free portion. Is a light emitting unit. Therefore, it is sufficient to vibrate only the elongated substrate including the optical waveguide during the scanning movement for displaying an image, and it is not necessary to vibrate the light emitting element, and the vibration frequency by the vibration means can be easily increased.

In the image display device according to the fourth aspect, since the light emitting element is attached to the free portion of the beam member, and the light emitting element is the light emitting portion, the structure is very simple.

In the image display device according to the fifth aspect, the tip end surface of the beam member is a light reflecting surface, and the light reflecting surface is a light emitting portion, and the light emitting element emits light incident on the light reflecting surface. Are provided in portions other than the beam member. Therefore, only the beam member needs to be vibrated during the scanning movement for displaying an image, and it is not necessary to vibrate the light emitting element, and the vibration frequency by the vibration means can be easily increased. Also, the structure is very simple.

In the image display device according to the sixth aspect, the light emitting element that emits light is a semiconductor laser or a light emitting diode, and the semiconductor laser or the light emitting diode can be downsized. is there.

In the image display device according to the present invention, since a light emitting element which emits light of three or more wavelengths is used, by controlling the light emission from this light emitting element,
Color emission can be produced.

In the image display device according to the present invention, a first electrode provided at least in a free portion of the beam member, a second electrode provided opposite to the first electrode,
The vibration means has a power supply for applying a voltage between the first and second electrodes. Therefore, by controlling the frequency and waveform of the voltage applied between the first and second electrodes, the electrostatic force between the first and second electrodes can be controlled in various forms, and The member can be vibrated in various forms.

In the image display device according to the ninth aspect, at least the free portion of the beam member is formed of a polarized substance, and an electrode for generating a diverging electric field in the vibration space of the free portion, and a voltage is applied to the electrode. The vibration means has a power supply.
For this reason, the free part of the beam member can be vibrated only by the electrode that generates the diverging electric field, and the number of necessary components is further reduced and the configuration is simpler.

According to a tenth aspect of the present invention, the vibrating means has a piezoelectric element provided at a free portion of the beam member and a power supply for applying a voltage to the piezoelectric element. For this reason, the free part of the beam member can be vibrated only by the piezoelectric element, and the number of required components is further reduced and the configuration is simpler.

In the image display device according to the eleventh aspect, since the mechanical resonance frequency of the free portion of the beam member and the frequency of the scanning motion of the light emitting portion are equal to each other, the load on the vibration means is small.

In the image display device according to the twelfth aspect, since at least the free portion of the beam member is disposed in a vacuum,
Low loss due to vibration of beam members. For this reason, the load on the vibration means is small, and the vibration frequency by the vibration means can be easily increased.

In the image display device according to the thirteenth aspect, a position estimating unit for estimating the position of the light emitting unit during the scanning movement of the light emitting unit in the free part of the beam member, and synchronizing with the position of the light emitting unit obtained by the prediction. And a light-emitting power supply that emits light
The synchronization means has. For this reason, even if the scanning speed of the light emitting portion in the free portion of the beam member is not constant, the scanning motion of the light emitting portion and the light emission can be accurately synchronized.

In the image display device according to the fourteenth aspect, when displaying an image by raster scanning of the light emitting portion in the free portion of the beam member, the light emission luminance of the light emitting portion is controlled based on the positional relationship between the scanning line and the pixel. I do. For this reason, even if the scanning speed of the light emitting unit in the free part of the beam member is not constant and there is a pixel that the light emitting unit does not scan, an image close to the original image can be displayed as a human sense.

In the image display device according to the fifteenth aspect, since an image forming optical system for forming a virtual image of the image is provided, an image as a virtual image can be formed.

In the image display device according to the sixteenth aspect, since an image forming optical system for forming a real image of the image is provided, an image as a real image can be formed.

In the image display device according to the seventeenth aspect, since an image forming optical system formed by holography is provided, an image having no coma aberration or the like can be formed. An image superimposed on the image can be formed.

[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the first to eleventh aspects of the present invention will be described.
An embodiment will be described with reference to FIGS. FIG.
4 to 1 show the first embodiment. As schematically shown in FIG. 1, in the image display device 11 according to the first embodiment, an optical fiber fixing base 13 is fixed to one side of a top surface of a surface plate 12. An electrode pad 14 is provided on the top surface of the optical fiber fixing base 13, and the electrode pad 14 is connected to a power supply 15.

A part of the optical fiber 16 made of glass is fixed on the optical fiber fixing base 13, and this part is fixed to the fixing part 1.
7, one side of the fixed portion 17 extends above the surface plate 12 to be a free portion 18. That is, the beam member 19 is constituted by the fixed portion 17 and the free portion 18 of the optical fiber 16. An electrode 22 is provided on a portion of the beam member 19 other than the end face 21 by a metal deposited or the like, and the electrode 22 is connected to the electrode pad 14.

The end face 23 of the optical fiber 16 opposite to the end face 21 is optically connected to a light emitting element 24 such as a semiconductor laser or a light emitting diode by lens coupling or butt coupling. 25 and a power supply 26 for grounding. An electrode fixing pedestal 27 is fixed on the top surface of the surface plate 12 near the tip of the free portion 18, and electrodes 28, 29, 31, 32 are provided.

The electrodes 28, 29, 31, and 32 are respectively connected to a power source 3
3, 34, 35 and 36. In order to prevent a short circuit due to contact between the electrode 22 and the electrodes 28, 29, 31, 32, among the electrodes 28, 29, 31, 32, the electrode 2
It is preferable that an insulating film made of silicon oxide, plastic, or the like is provided in a portion facing 2.

When a voltage having the opposite polarity to that of the voltage is applied to any one of the electrodes 28, 29, 31, and 32 at the same time as the voltage is applied to the electrode 22, an attractive force acts between these electrodes, and a free force is generated. The part 18 is curved, and the electrodes 28, 29,
The end face 21 approaches one of the electrodes 31 and 32 to which a voltage is applied. Conversely, when a voltage having the same polarity as the voltage applied to the electrode 22 is applied to any one of the electrodes 28, 29, 31, and 32, a repulsive force acts between these electrodes, causing the free portion 18 to bend. And the electrodes 28, 29, 3
The end face 21 is separated from any one of the electrodes 1 and 32 to which a voltage is applied.

Further, when voltages of opposite polarities are applied to a pair of electrodes located on both sides of the electrode 22 among the electrodes 28, 29, 31, and 32, the above-mentioned attractive force and repulsive force act simultaneously, and Of the free portion 18 and approach and separation of the end face 21 are effectively performed. Therefore, when a periodic voltage having an opposite phase is applied to the electrodes 28 and 29 while a DC voltage is applied to the electrode 22, the free portion 18 vibrates in the horizontal direction, and at the same time, the periodic voltages having the opposite phase are applied to the electrodes 31 and 32. Is applied, the free portion 18 also vibrates in the vertical direction, and as a result of these vibrations, the end surface 21 performs a scanning motion in which the trajectory of the end surface 21 forms a surface.

On the other hand, the light 37 emitted from the light emitting element 24
Since the light propagates through the optical fiber 16 and is emitted from the end face 21, the end face 21 is a light emitting portion. Therefore, an image is displayed on the scanning motion surface of the end face 21 by synchronizing the scanning motion of the end face 21 with the light emission of the light emitting element 24 as described later.

The distance between the electrodes 28, 29 and the electrodes 31, 3
Although there is no factor that regulates the distance between the two, that is, the size of the image display surface, it is assumed that the size of the near-field image of the light 37 on the end face 21 is about 2 μm, which is about the same as the core diameter of a normal optical fiber. And the resolution of the display image is 640 pixels × 480.
Assuming that the pixel is a pixel, the required movement distance of the end face 21 is at most (± 0.7 mm) × (± 0.5 mm), which prevents a short circuit caused by contact between the electrode 22 and the electrodes 28, 29, 31, 32. When an interval of about 0.5 mm is added to the image, the size of the image display surface is 2.3 mm × 2.0 mm at most.
It is about.

The length of the free portion 18 of the optical fiber 16 is such that the scanning motion surface of the end face 21 becomes approximately flat and the optical fiber 16 is not damaged within the vibration range of the free portion 18. Under the condition (1), it is at most 5 mm. Accordingly, the entire size of the image display device 11 is about 7 mm in the axial direction of the beam member 19, which is obtained by adding at most 2 mm, which is the length of the fixed portion 17, to 5 mm, which is the length of the free portion 18, and Member 1
In the direction perpendicular to the axis of No. 9, the platen 12 and the electrode fixing pedestal 2 have a size of the image display surface of 2.3 mm × 2.0 mm.
7 is 4.3 mm × 4.0 mm obtained by adding about 1 mm to each of the upper, lower, left and right sides.

However, the overall size of the image display device 11 may be increased depending on the resolution of the display image, the size of the near-field image of the light 37 on the end face 21 of the optical fiber 16, the cladding diameter of the optical fiber 16, and the like. It can be smaller.

Next, a specific method of the scanning movement of the end face 21 will be described with reference to FIG. First, as mentioned above,
While a DC voltage is applied from the power supply 15 to the electrode 22, periodic voltages having opposite phases are applied from the power supplies 33 and 34 to the electrodes 28 and 2.
9 is applied as a horizontal scanning periodic voltage to cause a lateral scanning motion on the end face 21. Power supply 3
The periods of the reference numerals 3 and 34 are synchronized by a reference synchronization signal generated from a reference synchronization signal generator 38. A sine wave, a triangular wave, or the like is used as the waveform of the periodic voltage.

Although the moving speed of the end face 21 is not uniform on the displayed image using any of the waveforms, the moving speed of the end face 21 is corrected by a method described later so that display of the image is not hindered. Simultaneously with the application of the voltage to the electrodes 28 and 29, a periodic voltage such as a sine wave or a triangular wave synchronized with the reference synchronizing signal and having mutually opposite phases is applied from the power supplies 35 and 36 to the electrodes 31 and 32 for vertical scanning. By applying the periodic voltage, a vertical scanning motion is generated on the end face 21.

The frequency of the horizontal scanning periodic voltage and the frequency of the vertical scanning periodic voltage vary depending on the resolution of the displayed image and the number of images to be displayed per second. For example, 60 images are displayed per second by raster scanning, and 1 image is displayed.
When the number of vertical scanning lines per image is 480 (the number of scanning lines is equivalent to 960 when displaying images in the entire forward and backward paths in both the vertical and horizontal directions), the horizontal scanning direction is used. The frequency of the periodic scanning voltage is 14.4 kHz, and the frequency of the vertical scanning periodic voltage is 60 Hz.

At this time, the length of the free portion 18, the thickness of the optical fiber 16, and the light are adjusted so that the mechanical resonance frequency in the horizontal direction of the free portion 18 approaches 14.4 kHz, which is the frequency of the horizontal scanning periodic voltage. If the hardness of the fiber 16 is adjusted at the stage of designing and manufacturing, even if the frequency is as high as 14.4 kHz, the optical fiber 16 can resonate like a tuning fork, so that the transverse direction can be applied to the end face 21 even with a relatively small periodic voltage. A scanning movement can occur.

The frequency of the horizontal scanning period voltage is 1
It can be lowered below 4.4 kHz. For example,
When the scanning movement of the end face 21 is interlaced scanning every 1/60 second and 480 scannings are performed in 1/30 second,
By performing scanning for displaying an image in the entire forward and backward paths in both the vertical and horizontal directions, the frequency of the horizontal scanning periodic voltage can be reduced to 7.2 kHz. Further, by setting the number of scanning lines to 240, the frequency of the horizontal scanning periodic voltage can be reduced to 3.6 kHz.

In order to realize a mechanical resonance frequency close to these frequencies with a glass beam member, its length and thickness in the vibration direction must be 5 in the case of 3.6 kHz.
mm and a thickness of about 100 μm.
In the case of 4.4 kHz, the length may be about 3.5 mm and the thickness may be about 150 μm.

Next, the scanning movement of the end face 21 and the light emitting element 24
Will be described with reference to FIGS. As described above, since the scanning movement of the end face 21 which is the light-emitting portion is linked to the reference synchronization signal, the trajectory of the scanning movement is measured in advance or calculated by simulation, and the position and speed are determined. For example, the position and speed of the end face 21 can be obtained from the reference synchronization signal by holding the time series table for one image display in the light emitting unit position calculator 41 and the light emitting unit speed calculator 42.

A predetermined periodic voltage is applied to the electrodes 28, 29,
Numerical expressions that approximately give the motion of the end face 21 when applied to 31 and 32 are held in the light emitting part position calculator 41 and the light emitting part speed calculator 42, and the position and speed of the end face 21 are obtained by calculation. You can also. The position information and the speed information of the end face 21 obtained by the light emitting unit position calculator 41 and the light emitting unit speed calculator 42 in this way are sent to the light emitting unit section brightness calculator 43 and the light emitting unit speed brightness corrector 44, respectively. .

Image information is stored in the image memory 45, and the light emitting section section brightness calculator 43 projects the image information in the image memory 45 onto the scanning motion plane of the end face 21. However, as shown in FIG. 3, the actual trajectory of the end face 21 does not always pass over all the pixels in the image memory 45, and the single trajectory is displayed during the display of one image. May pass over the pixel a plurality of times. Therefore, in order to form an image that does not cause any discomfort to humans, it is necessary to determine the emission intensity of the scanning line by the following method, for example.

For this purpose, as shown in FIG. 3, a unit pixel section in the direction of the image axis (X axis in this case) closer to the scanning direction is defined as a calculation unit section 46, and the calculation unit section 46 is set. The section luminance, which is the emission intensity of each scanning line, is calculated. The section luminance is obtained by adding the luminance of each pixel to the section luminance in the calculation unit section 46 according to the internal division ratio of the distance to the two adjacent scanning lines.

In a specific calculation, the calculation unit section 4
A center line 47 is assumed at the center of 6, and the light emission intensity of each pixel is represented by the light emission intensity at the center points 51 to 55 of each pixel. Then, the scanning line 5 passing through the calculation unit section 46
6, the scanning line 5 adjacent to this scanning line 56 in the + Y direction
7 and a scanning line 58 adjacent to the scanning line 56 in the −Y direction.
And the center line 47 are referred to as intersections 61 to 63, respectively.

The center point 5 between the intersection 61 and the intersection 62
1 to 55 are arranged in the order of p ₁ , p ₂ ,
, _Pn, and the light emission intensities of these pixels are j ₁ and j, respectively.
_2, ..., a j _n (in the example of FIG. 3 n = 3). Similarly, the center points 51 to 55 between the intersection 61 and the intersection 63
Q _1, q ₂ in order from close to the intersection 61, ..., and q _m, respectively the emission intensity of these pixels s k _1, k _2, ..., k
_m (m = 1 in the example of FIG. 3).

The distances from the intersection 61 to the intersections 62 and 63 are d ₁ and d _{2, respectively,} and p ₁ , p ₂ ,
..., respectively g ₁ a distance of up to p _n, g _2, ..., and g _n,
Q _1, q ₂ from the intersection 61, ..., husband a distance of up to q _m s h
_1, h _2, ..., and h _m. Then, the calculation unit section 46
Is the length of the scanning line 56 at D, and the section luminance P
Is calculated by the light emitting unit section brightness calculator 43 by the following equation.

P = [｛j ₁ × (d ₁ −g ₁ ) + j ₂ ×
(D ₁ −g ₂ ) +... + J _n × (d ₁ −g _n )｝ / d ₁ +
｛K ₁ × (d ₂ −h ₁ ) + k ₂ × (d ₂ −h ₂ ) + ... +
_{k m × (d 2 -h m} )} / d 2 ] / D

The information on the section brightness P obtained by the above equation is sent from the light emitting section section brightness calculator 43 to the light emitting section speed brightness corrector 44.
The section brightness P is multiplied by the moving speed of the end face 21 sent from the light emitting unit speed calculator 42, and this value is sent to the power supply 25. The power supply 25 is controlled so that the light emitting element 24 emits light in proportion to the value sent from the light emitting unit speed / luminance corrector 44.

FIG. 4 shows a configuration for realizing a virtual image display device for directly forming an image on the fundus by the image display device 11 of the first embodiment as described above. The virtual image display apparatus converts the image displayed by the image display apparatus 11 into a micro lens 64 and a crystalline lens 66 of an eyeball 65.
Through the image 68 as a virtual image on the fundus 67 of the eyeball 65
Is imaged.

In the image display device 11, the size of the image displayed on the scanning movement plane of the end face 21 is 1.5 mm × 1 mm.
Since it can be set to the following, as the microlens 64, a small one having a diameter of about 2 to 4 mm can be used. Particularly, among the aberrations caused by the microlenses 64, the distortion is particularly large when the image stored in the image memory 45 is projected on the scanning motion plane of the end face 21 by the light emitting section section brightness calculator 43. The aberration can be corrected by projecting an image on which inverse space mapping operation has been performed.

FIG. 5 shows a second embodiment. In the image display device 71 of the second embodiment, the optical waveguide module 72, the horizontal scanning electrode module 73, and the vertical scanning electrode module 74 shown in FIG.
As shown in (b), the module is integrally bonded in a laminated state to form a module. Optical waveguide module 72
In this method, an optical waveguide 75 and a semiconductor laser, a light emitting diode, and the like, which are a light emitting element 76 of a waveguide type, are integrally manufactured by a normal process for forming a semiconductor light emitting element on a gallium arsenide substrate or the like.

The optical waveguide module 72 also serves as a beam member. Of the optical waveguide module 72, an elongated projection on which a part of the optical waveguide 75 is formed is a free portion 77, and other than the free portion 77. The part is a fixed part.
Electrodes 78 and 79 for the light-emitting element 76 are provided on the front and back of the optical waveguide module 72, and the free portion 77 and its vicinity in a state where the base is covered with an insulating film such as silicon oxide or silicon nitride. Is provided with an electrode 81.

In the horizontal scanning electrode module 73 and the vertical scanning electrode module 74, an electrode pad 84 and an electrode 85 connected to the electrodes 82, 83 and the electrode 79 are provided on an insulating substrate such as glass or plastic. , Power supply 2
Parts other than the connection parts with 6, 33, 34 and 35 are covered with an insulating film.

The image display device 7 of the second embodiment
In FIG. 1, a pair of electrodes 82 and 83 are used for horizontal vibration of the free portion 77, but only a single electrode 85 is used for vertical vibration of the free portion 77.
This is for simplification of the manufacturing method. However, if a voltage that is two to three times that of a case where a pair of electrodes is used is applied, the free portion 77 can be vertically moved even with a single electrode 85 alone. Can be vibrated. However, a pair of electrodes may be used for vertical vibration of the free portion 77.

Further, by setting the cross-sectional shape of the free portion 77 to, for example, a rectangular shape, the mechanical resonance frequency can be set independently for each of the horizontal and vertical vibration directions. Therefore, the load on the power supplies 33 to 35 can be further reduced by matching the mechanical resonance frequencies in the horizontal and vertical directions with the scanning frequencies in the horizontal and vertical directions.

FIG. 6 shows a third embodiment. The image display device 71 of the third embodiment is made monolithic by using a formation process of a micromachine together with a formation process of the image display device 71 of the second embodiment. In order to insulate the electrodes 82, 83, 85 from the substrate,
An insulating film is provided under the electrodes 82, 83, and 85.

FIG. 7 shows a fourth embodiment. The fourth embodiment has a configuration for displaying a color image. In the fourth embodiment, an electrode 92 is provided on the lower surface of the step of the substrate 91, and the electrode 92 is connected to the power supply 26 for grounding. Light emitting elements 93 to 95 that emit light of different wavelengths are fixed on the electrode 92,
These light emitting elements 93 to 95 are connected to electrodes 96 to 98, respectively. A converging type optical waveguide 99 is formed on the upper surface of the step of the substrate 91, and the light emitting elements 93 to 95 are formed.
The light emitted from the optical waveguide 99 merges in the optical waveguide 99.

In order to apply the fourth embodiment to the image display device 11 of the first embodiment shown in FIG. 1, the optical waveguide 99 may be connected to the end face 23 of the optical fiber 16.
Further, in order to apply the fourth embodiment to the image display device 71 of the second embodiment shown in FIG. 5, for example, an optical waveguide module 72 is manufactured on a glass substrate, and an optical waveguide 99 is formed.
The optical waveguide 75 may be formed on the extension of the above. In this case, the optical waveguide 75 can be formed by patterning a plastic on a glass substrate or performing proton diffusion.

The steps on the substrate 91 can be formed by dry etching or the like. The electrode 92 and the electrode 2
2 and 81 are formed by vapor deposition after forming the optical waveguide 99. In order to display a color image, it is necessary to independently control the light emission at three wavelengths.
In FIG. 2, the image memory 45, the light emitting section section brightness calculator 4
3. This is achieved by providing the light emitting unit speed / luminance corrector 44 and the power supply 25 for driving the light emitting element for each wavelength.

FIG. 8 shows a fifth embodiment. In the image display apparatus 101 according to the fifth embodiment, light beams having different wavelengths are applied to the tip of the beam member 102 which is made of titanium, tungsten carbide, beryllium, or the like, which is lightweight and has a high elastic modulus and also serves as an electrode. Emitting light emitting element 93
95 are fixed, and an insulating film 103 made of silicon oxide or the like is provided in a region other than a region where the light emitting elements 93 to 95 are fixed on the upper surface of the beam member 102.

The wirings 104 to 106 are provided on the insulating film 103, and the light emitting elements 93 to 95 are connected to these wirings 104 to 106, respectively. The beam member 102
Through the electrode pad 84, the horizontal scanning electrode module 7
3 and connected to a power supply 15. The beam member 102 includes not only the electrode for vibration but also the light emitting element 9.
The power supply 26 shown in FIG. 2 is not grounded in the image display apparatus 101 of the fifth embodiment, and has the same potential as the power supply 15 because the common power supply also serves as 3 to 95 common electrodes.

Except for the above points, the image display device 101 of the fifth embodiment has substantially the same configuration as the image display device 71 of the second embodiment shown in FIG. In the image display apparatus 101 of the fifth embodiment, the light emission points of the three wavelengths of light 107 are different from each other as is apparent from FIG. 8B, and the light emission points of the fourth embodiment shown in FIG. Not the same. However, the information including the displacement of the light emitting point of the light 107 of three wavelengths is used as the light emitting part position calculator 41 of each wavelength.
, Images of three wavelengths can be displayed without shifting each other.

FIG. 9 shows a sixth embodiment. In the image display device 111 according to the sixth embodiment, the light reflecting surface of the beam member 112, which is made of titanium, tungsten carbide, beryllium, or the like, which is lightweight and has a high elasticity coefficient and which also serves as an electrode, has a mirror-polished tip end surface. 113
Light emitting elements 93 to 95 that emit light 107 incident on the light reflecting surface 113 are fixed to the horizontal scanning electrode module 73.

The light reflecting surface 113 may be flat so that the reflected light 107 travels in the axial direction of the beam member 112, and the reflected light 107 diffuses around the axial direction of the beam member 112. It may have an uneven surface so as to perform. Except for the above points, the image display device 111 of the sixth embodiment also
It has substantially the same configuration as the image display device 101 of the fifth embodiment shown in FIG.

FIG. 10 shows a seventh embodiment. The seventh embodiment is a configuration for realizing a virtual image display device that directly forms an image on the fundus using the image display device 11, for example. In the first embodiment described above, FIG.
As shown in FIG. 7, a microlens 64 for realizing a virtual image display device is used, but in the seventh embodiment, the transmission type hologram 114
4 has been used instead.

Although coma appears in the microlens 64, coma can be corrected by designing the hologram 114 so that an arbitrary point on the scanning motion plane of the end face 21 forms an image on the fundus 67. it can. Even when the hologram 114 is used, the distortion can be corrected by performing inverse mapping conversion of the distortion on the position information from the light emitting unit position calculator 41.

FIG. 11 shows an eighth embodiment. The eighth embodiment is also a configuration for realizing a virtual image display device that directly forms an image on the fundus using the image display device 11, for example. In the eighth embodiment, the light 37 emitted from the light emitting element 24 is of a reflection type,
Hologram 1 that is a transmission type for light of other wavelengths
15 are used. In the eighth embodiment, not only can the image displayed on the image display device 11 be directly formed on the fundus 67, but also the image displayed on the image display device 11 and the hologram 115 can be transmitted through the hologram 115. An image obtained by superimposing the image of the coming external world can be directly formed on the fundus 67.

FIG. 12 shows a ninth embodiment. The ninth embodiment has a configuration for forming an image on a screen and visually checking the image on the screen. Therefore, in the ninth embodiment, the transmission type hologram 11 that forms the image 117 as a real image on the screen 116 is used.
8 is used.

FIG. 13 shows a tenth embodiment. In the tenth embodiment, as shown in FIG. 13A, a beam member in which at least the free portion 121 is formed of a polarized substance is used, and a pair of electrodes arranged on both sides of the free portion 121 are used. 122 and 123 are connected to a power supply 124. One electrode 1 of the pair of electrodes 122 and 123
Reference numeral 22 denotes a concave portion with respect to the free portion 121, and the other electrode 1
23 is convex with respect to the free part 121.

When a voltage is applied between the electrodes 122 and 123 from the power supply 124, an electric field 125 is generated between the electrodes 122 and 123 and polarization is induced in the cross section of the free portion 121. In addition, since the electric field 125 diverges from the electrode 123 to the electrode 122, a force 126 toward the dense portion of the electric field 125 acts on the free portion 121 due to the interaction between the electric field 125 and the polarization. , The free portion 121 can be vibrated in a direction perpendicular to its cross section.

Therefore, in order to vibrate the free portion 121, it is not necessary to provide an electrode in the free portion 121 or to make the free portion 121 also serve as an electrode. As shown in FIG. 13B, when planar electrodes 127 and 128 are used instead of the concave and convex electrodes 122 and 123, an electric field 129 generated between these electrodes 127 and 128 diverges. Otherwise, no force acts on the free part 121.

FIG. 14 shows an eleventh embodiment. In the eleventh embodiment, the elongated protrusion of the beam member 131 is the free portion 132, and the portion other than the free portion 132 is the fixed portion. Both ends of the piezoelectric element 133 are fixed to a portion near the portion where the free portion 132 protrudes from the fixed portion and an arbitrary intermediate portion of the free portion 132. In the eleventh embodiment, a pair of piezoelectric elements 133 is provided in the vibration direction of the free portion 132 indicated by an arrow in FIG. 14, but at least one piezoelectric element 133 is provided in each of these vibration directions. Should just be provided.

Four electrode pads 134 are provided on the upper surface of the fixed portion of the beam member 131, and one end of each of the piezoelectric elements 133 is connected to each of the electrode pads 134 by wiring 135. The electrode 13 is provided on the entire lower surface of the beam member 131.
6 are provided, and the other end of each of the piezoelectric elements 133 and the electrode 136 are connected by a wiring 137. Each electrode pad 134 is connected to a power source 33 to 36 shown in FIG.
, And the electrode 136 is grounded,
By applying a voltage from the power supplies 33 to 36 to the piezoelectric element 133, the free portion 132 can be vibrated in the direction indicated by the arrow in FIG.

The beam member 131 of the eleventh embodiment is different from the optical waveguide module 72 of the image display device 71 of the second embodiment shown in FIG. 5 and the image display device 101 of the fifth embodiment shown in FIG. It can be applied to the beam member 102 and the beam member 112 in the image display device 111 of the sixth embodiment shown in FIG.
Of course, 2, 83, 85, etc. are unnecessary.

In any of the above embodiments,
As the waveform of the scanning periodic voltage, it is assumed that an analog waveform such as a sine wave or a triangular wave whose value continuously changes is assumed, but a rectangular wave is turned on / off at a time interval equal to or less than a mechanical resonance cycle of the beam member, By changing the on / off duty ratio of the rectangular wave, the same control as in the case of the analog waveform can be performed. If the scanning is digitized in this way, the number of components can be reduced, and circuit adjustment and the like become unnecessary.

In any of the above embodiments, the atmosphere of the beam member is not particularly limited. However, if the image display device is sealed in a container and the inside of the container is evacuated, the atmosphere is air or the like. In comparison, the loss due to the vibration of the beam member is reduced. For this reason, the load on the vibrating means is reduced and power consumption is reduced, and the vibration frequency of the vibrating means can be easily increased to realize high resolution.

[0078]

In the image display device according to the first aspect, both the image display surface and the portion other than the image display surface can be made extremely small, so that downsizing can be realized. Further, if the vibration frequency of the vibration means and the synchronization frequency of the synchronization means are increased, the resolution of the image display surface is increased, so that higher resolution can be realized. Further, since the light use efficiency is high and there is no need to illuminate an image with a back light source, power consumption is low. Further, since the number of necessary parts is small and simple, the reliability such as earthquake resistance is high and the manufacturing cost is low.

In the image display device according to the second aspect, only the thin optical fiber needs to be vibrated during the scanning movement for displaying an image, and it is not necessary to vibrate the light emitting element.
Since the vibration frequency by the vibration means can be easily increased, high resolution can be easily realized.

In the image display device according to the third aspect, it is sufficient that only the elongated substrate including the optical waveguide is vibrated during the scanning movement for displaying an image, and it is not necessary to vibrate the light emitting element. Can easily be increased, so that high resolution can be easily realized.

In the image display device according to the fourth aspect, since the structure is very simple, the manufacturing cost is very low.

In the image display device according to the fifth aspect, it is sufficient to vibrate only the beam member during the scanning movement for displaying the image, there is no need to vibrate the light emitting element, and the vibration frequency by the vibrating means can be easily increased. Therefore, high resolution can be easily realized. Also, since the structure is very simple, the manufacturing cost is very low.

In the image display device according to the sixth aspect, the size of the light emitting element can be reduced, so that the overall size can be easily reduced.

In the image display device according to the seventh aspect, since color light emission can be generated, a color image can be displayed.

In the image display device according to the eighth aspect, since the beam member can be vibrated in various forms, images can be displayed in various forms.

In the image display apparatus according to the ninth aspect, since the number of necessary parts is further reduced and simpler, the reliability such as earthquake resistance is higher and the manufacturing cost is lower.

In the image display device according to the tenth aspect, since the number of necessary components is further reduced and the configuration is simpler, the reliability such as earthquake resistance is higher and the manufacturing cost is lower.

In the image display device according to the eleventh aspect, since the load on the vibration means is small, the power consumption is further reduced.

In the image display device according to the twelfth aspect, since the load on the vibrating means is small, the power consumption is further reduced, and the vibration frequency by the vibrating means can be easily increased, so that high resolution can be easily realized. can do.

In the image display device according to the thirteenth aspect, even if the scanning speed of the light emitting portion in the free portion of the beam member is not constant, the scanning movement of the light emitting portion and the light emission can be accurately synchronized, so that the quality can be improved. Can be displayed.

In the image display device according to the fourteenth aspect, even if the scanning speed of the light emitting portion in the free portion of the beam member is not constant and there is a pixel that the light emitting portion does not scan, the original image is perceived by humans. Since a close image can be displayed, it is possible to display an image that is not uncomfortable for humans.

In the image display device according to the fifteenth aspect, since an image as a virtual image can be formed, a virtual image visual display device that forms an image directly on the fundus can be realized.

In the image display device according to the sixteenth aspect, since an image as a real image can be formed, an image display device that forms an image on a screen can be realized.

In the image display device according to the seventeenth aspect, it is possible to form an image having no coma aberration or the like, so that it is possible to display a high quality image and to superimpose the display image and the external image. Since an image can be formed, a complicated image can be displayed.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of a first embodiment of the present invention.

FIG. 2 is a block diagram of a vibration unit according to the first embodiment.

FIG. 3 is a diagram for explaining a method of calculating luminance in the first embodiment.

FIG. 4 is a perspective view showing an application method of the first embodiment.

5A and 5B schematically show a second embodiment of the present invention, wherein FIG. 5A is a perspective view in an exploded state, and FIG. 5B is a perspective view in an assembled state.

FIG. 6 is a schematic perspective view of a third embodiment of the present invention.

FIG. 7 is a perspective view of a main part according to a fourth embodiment of the present invention.

8A and 8B schematically show a fifth embodiment of the present invention, wherein FIG. 8A is an overall perspective view, and FIG. 8B is an enlarged perspective view of a main part.

9A and 9B schematically show a sixth embodiment of the present invention, wherein FIG. 9A is an overall perspective view, and FIG. 9B is an enlarged perspective view of a main part.

FIG. 10 is a perspective view showing a method of applying a seventh embodiment of the present invention.

FIG. 11 is a perspective view showing an application method of an eighth embodiment of the present invention.

FIG. 12 is a perspective view showing a method of applying a ninth embodiment of the present invention.

FIG. 13A is a schematic diagram of a main part of a tenth embodiment of the present invention, and FIG. 13B is a schematic diagram for explaining a difference in operation due to a difference in configuration from FIG.

FIG. 14 is a perspective view of a main part according to an eleventh embodiment of the present invention.

[Explanation of symbols]

11 image display device, 15 power supply, 16 optical fiber,
17: fixed part, 18: free part, 19: beam member, 21: end face (light emitting part), 22: electrode (first electrode), 24: light emitting element, 28, 29, 31, 32: electrode (second) Electrode),
33, 34, 35, 36 power supply, 64 microlens (imaging optical system), 71 image display device, 72 optical waveguide module (substrate of optical waveguide), 75 optical waveguide, 76
.., Light emitting element, 77, free portion, 81, electrode (first electrode), 82, 83, 85, electrode (second electrode), 93
94, 95: light emitting element, 101: image display device, 102
... beam member, 111 ... image display device, 112 ... beam member, 1
13: light reflecting surface, 114, 115, 118: hologram (imaging optical system), 121: free part, 122, 123 ... electrode (electrode for generating divergent electric field), 124: power supply
5 electric field (diverging electric field), 131 beam member, 132 free part, 133 piezoelectric element

Claims (17)

[Claims] 1. A beam member having a fixed portion and a free portion extending from the fixed portion and capable of vibrating and provided with a light emitting portion, and a scanning motion in which the trajectory of the light emitting portion forms a surface. An image display apparatus comprising: a vibration unit that causes the light emitting unit to generate the light by the vibration of the free unit; and a synchronizing unit that synchronizes the scanning motion with the light emission of the light emitting unit. 2. An optical fiber is said beam member,
The light emitting element is connected to the optical fiber at a part opposite to the free part, and an open end of the optical fiber in the free part is the light emitting part. Image display device. 3. The substrate of the optical waveguide is the beam member, a light emitting element is connected to the optical waveguide at the fixed portion, and an open end of the optical waveguide in the free portion is the light emitting portion. The image display device according to claim 1, wherein: 4. The image display device according to claim 1, wherein a light emitting element is attached to said free part, and said light emitting element is said light emitting part. 5. A light-emitting element that emits light incident on the light-reflecting surface, wherein the light-emitting element emits light incident on the light-reflecting surface. The image display device according to claim 1, wherein the image display device is provided at a portion of the image display device. 6. The image display device according to claim 1, wherein the light emitting element that emits light is a semiconductor laser or a light emitting diode. 7. The image display device according to claim 1, wherein a light-emitting element that emits the light having three or more wavelengths is used. 8. A first electrode provided at least in the free part, a second electrode provided opposite to the first electrode, and a voltage between the first and second electrodes. 2. The image display device according to claim 1, wherein the vibration means has a power supply for applying the voltage. 9. The vibrating means includes at least an electrode for generating a divergent electric field in a vibration space of the free portion, wherein the free portion is formed of a polarized substance, and a power supply for applying a voltage to the electrode. The image display device according to claim 1, wherein: 10. The image display device according to claim 1, wherein said vibration means has a piezoelectric element provided in said free portion and a power supply for applying a voltage to said piezoelectric element. . 11. The image display device according to claim 1, wherein a mechanical resonance frequency of the free part and a frequency of the scanning motion are equal to each other. 12. The image display device according to claim 1, wherein at least the free portion is disposed in a vacuum. 13. The synchronizing means includes: a position estimating unit for estimating the position of the light emitting unit during the scanning movement; and a light emitting power supply unit for emitting the light in synchronization with the position obtained by the estimation. The image display device according to claim 1, wherein: 14. An image is displayed by raster scanning of the light emitting unit, and the scanning line is moving in one pixel section in one of the vertical and horizontal directions of a pixel grid forming the image. Each distance from each pixel existing between the scanning line and a scanning line adjacent to this scanning line in the pixel column in the section in the vertical direction to each of the adjacent scanning lines. Divide by the distance between the scanning line in progress and the adjacent scanning line in the vertical direction, and calculate a value proportional to the sum of the product of the divided value and the luminance information of each pixel in the interval. 2. The image display apparatus according to claim 1, wherein the light emission unit divides by a time during which the light emitting unit stays, and performs the light emission at a luminance proportional to the divided value. 15. The image display device according to claim 1, further comprising an imaging optical system for forming a virtual image of the image. 16. The image display device according to claim 1, further comprising an imaging optical system for forming a real image of the image. 17. The image display device according to claim 1, further comprising an imaging optical system formed by holography.