JP2000117033A - Air cleaning filter - Google Patents
Air cleaning filterInfo
- Publication number
- JP2000117033A JP2000117033A JP10295461A JP29546198A JP2000117033A JP 2000117033 A JP2000117033 A JP 2000117033A JP 10295461 A JP10295461 A JP 10295461A JP 29546198 A JP29546198 A JP 29546198A JP 2000117033 A JP2000117033 A JP 2000117033A
- Authority
- JP
- Japan
- Prior art keywords
- outer frame
- filter medium
- filter
- heater
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004140 cleaning Methods 0.000 title abstract description 11
- 239000000463 material Substances 0.000 claims abstract description 75
- 239000012768 molten material Substances 0.000 claims description 9
- 230000004927 fusion Effects 0.000 claims description 5
- 238000004887 air purification Methods 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 abstract description 12
- 230000001070 adhesive effect Effects 0.000 abstract description 12
- 239000004743 Polypropylene Substances 0.000 abstract description 6
- -1 polypropylene Polymers 0.000 abstract description 6
- 229920001155 polypropylene Polymers 0.000 abstract description 6
- 238000003466 welding Methods 0.000 abstract description 6
- 238000000034 method Methods 0.000 description 9
- 239000011368 organic material Substances 0.000 description 5
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003063 flame retardant Substances 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 239000004014 plasticizer Substances 0.000 description 3
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、外気調和機の中性
能フィルタやクリーンルームや局所クリーントンネルな
どにて用いられるＵＬＰＡあるいはＨＥＰＡフィルタに
代表される空気清浄化フィルタに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air purifying filter typified by a medium-performance filter of an outside air conditioner and a ULPA or HEPA filter used in a clean room or a local clean tunnel.
【０００２】[0002]
【従来の技術】従来の空気清浄化フィルタは、図１２の
斜視図及び図１３の断面図に示すように、ロ材２、スペ
ーサ３、外枠１、接着剤１２（ロ材と外枠とを接続する
ために用いるもの）などにて構成されている。この構成
部材であるロ材は空気を濾過するものであり、一般にガ
ラス繊維材が多く用いられているが、使用環境が酸やア
ルカリの雰囲気においてはポリプロピレンやテフロン材
が用いられている。スペーサはロ材の支持を安定させる
ものであり、紙やアルミ材が用いられている。外枠はそ
の内側にロ材を気密的に接続するとともにロ材を保持す
るものであり、材木、アルミ、ステンレス材等が用いら
れている。接着材はロ材と外枠との間を接続するもので
あり、ウレタン樹脂やエポキシ樹脂が用いられている。2. Description of the Related Art As shown in a perspective view of FIG. 12 and a cross-sectional view of FIG. 13, a conventional air purifying filter has a material 2, a spacer 3, an outer frame 1, and an adhesive 12 (a material and an outer frame). , Which are used to connect the. The material, which is a component of the filter, filters air. Generally, glass fiber material is often used, but polypropylene or Teflon material is used in an environment where the environment of use is acid or alkali. The spacer stabilizes the support of the material, and is made of paper or aluminum. The outer frame hermetically connects the rotatable material inside and holds the rotatable material, and is made of timber, aluminum, stainless steel, or the like. The adhesive connects the material and the outer frame, and is made of urethane resin or epoxy resin.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、空気清
浄化フィルタを構成する部材のうち、金属製以外の有機
系材料には可塑剤や難燃剤が含まれている場合が多いた
めに、極微量ではあるが空気中に有機ガス成分が発散さ
れる。この有機ガス成分は、最先端の半導体プロセスに
おいて、ウエハ表面に付着することによりデバイスの特
性を変化させる原因となっている。However, among the members constituting the air purifying filter, organic materials other than metallic materials often contain a plasticizer or a flame retardant. However, organic gas components are released into the air. This organic gas component causes a change in device characteristics by adhering to a wafer surface in a state-of-the-art semiconductor process.
【０００４】また、可塑剤や難燃剤の含有量が少ない有
機系材料も最近では市販され、普及しつつある。そして
この有機系材料は安価なものであるが、接着剤について
は他の材料に比べて２倍程度の高価なものであり、しか
も有機系の揮発成分を皆無にすることができないため
に、例えばこれを用いた場合には１〜２週間の長期間放
置して完全に揮発させなければならないという問題があ
った。[0004] Organic materials having a low content of plasticizers and flame retardants have recently been marketed and are becoming popular. Although this organic material is inexpensive, the adhesive is about twice as expensive as other materials, and it is not possible to eliminate organic volatile components. When this was used, there was a problem that it had to be left for a long period of one to two weeks to completely volatilize.
【０００５】よって本発明は前記問題点に鑑みてなされ
たものであり、ろ剤と外枠とを接着剤を使用せずに接続
し、有機ガス成分が発散しない安価な空気清浄化フィル
タの提供を目的とする。Accordingly, the present invention has been made in view of the above problems, and provides an inexpensive air purifying filter in which a filter medium and an outer frame are connected without using an adhesive and organic gas components do not emanate. With the goal.
【０００６】[0006]
【課題を解決するための手段】上記目的を達成するた
め、本発明における請求項１の発明は、外枠の内側にロ
材を気密的に接続した空気清浄化フィルタにおいて、前
記ロ材と外枠との間の接続部を融着により接続して成る
ことを特徴とするものである。In order to achieve the above-mentioned object, a first aspect of the present invention is an air purifying filter in which a material is hermetically connected to the inside of an outer frame. The connection portion between the frame and the frame is connected by fusion.
【０００７】請求項１によれば、ロ材と外枠との間を接
着剤を用いずに融着にて接続することにより、接着剤か
ら有機ガス成分が発散する問題が解消される。According to the first aspect, by connecting the material and the outer frame by fusion bonding without using an adhesive, the problem that an organic gas component is diffused from the adhesive is eliminated.
【０００８】請求項２の発明は、前記ロ材と前記外枠と
が同種の材料から成り、前記両者間を融着して成ること
を特徴とするものである。[0008] The invention of claim 2 is characterized in that the material and the outer frame are made of the same material, and the two are fused together.
【０００９】請求項２によれば、ロ材と外枠とが同種の
材料から成ることにより前記両者の接続部相互間を溶融
して接続することが可能となる。According to the second aspect of the present invention, since the material and the outer frame are made of the same material, it is possible to melt and connect the two connecting portions.
【００１０】請求項３の発明は、溶融した材料を流し込
み保持可能な皿形構造を内面に形成した外枠の皿形構造
に対して流し込まれた前記ロ材と同種の溶融材料とロ材
とを融着させて成ることを特徴とするものである。A third aspect of the present invention is a molten material of the same kind as the above-mentioned material and a material which are poured into a dish-shaped structure of an outer frame having a dish-shaped structure formed on an inner surface capable of pouring and holding a molten material. Are fused.
【００１１】請求項３によれば、外枠内面の皿形構造に
流し込んだロ材と同種の溶融材が、ロ材に融着すること
によりロ材と外枠との接続が可能となり、しかも固化し
た溶融材は外枠に対して皿形構造を介して一体化される
のでロ材が外枠に対して確実に保持される。According to the third aspect of the present invention, the molten material of the same type as the material of the material poured into the dish-shaped structure on the inner surface of the outer frame can be connected to the material by melting the material to the material. Since the solidified molten material is integrated with the outer frame via the dish-shaped structure, the material is securely held on the outer frame.
【００１２】[0012]
【発明の実施の形態】以下、本発明の実施の形態を図面
に基づいて説明する。なお各実施の形態において前記従
来の技術における共通の要旨は共通の符号を付して対応
させることにより重複する説明を省略する。Embodiments of the present invention will be described below with reference to the drawings. In each of the embodiments, common points in the above-mentioned conventional technology are assigned the same reference numerals and correspond to each other to omit redundant description.
【００１３】図１から図６は本発明の実施の形態１に係
り、図１は空気清浄化フィルタの断面図、図２は空気清
浄化フィルタの断面図、図３はロ材と支持治具の関係を
示す図、図４は図３のＡ−Ａ線矢視図、図５から図７は
ロ材と外枠との接続工程を示す図である。FIGS. 1 to 6 relate to a first embodiment of the present invention. FIG. 1 is a cross-sectional view of an air cleaning filter, FIG. 2 is a cross-sectional view of an air cleaning filter, and FIG. FIG. 4 is a view taken in the direction of arrows AA in FIG. 3, and FIGS. 5 to 7 are views showing a connection process between the material and the outer frame.
【００１４】本実施の形態における空気清浄化フィルタ
１０は、図１に示すように外枠１がポリプロピレン材か
ら成る中空方形のものであり、図２の断面図に示すよう
に内面は四方の各辺が平面をなすとともにその上下縁に
水平方向のフランジ１ａが連設されている。In the air purifying filter 10 of the present embodiment, as shown in FIG. 1, the outer frame 1 is a hollow square made of a polypropylene material, and as shown in the sectional view of FIG. The sides are flat, and horizontal flanges 1a are continuously provided on the upper and lower edges thereof.
【００１５】一方、ロ材２は外枠１と同様にポリプロピ
レン材から成り図３に示すような蛇腹４ａに形成したも
のである。そしてその両端における溶着代５を残した位
置が支持治具４にて支持され、さらに蛇腹４ａのひだ内
には図２に示すようなロ材を安定させるスペーサ３が配
設されている。On the other hand, the material 2 is made of a polypropylene material like the outer frame 1 and is formed in a bellows 4a as shown in FIG. A position where the welding margin 5 is left at both ends is supported by a support jig 4, and a spacer 3 for stabilizing a material as shown in FIG. 2 is provided in a fold of the bellows 4 a.
【００１６】このような構成において、ロ材２を外枠１
の内面にする場合は、第１の工程として図５に示すよう
にロ材２と外枠１との接続部相互間にヒータ６を配置す
る。In such a configuration, the material 2 is connected to the outer frame 1.
In the first step, as shown in FIG. 5, a heater 6 is arranged between the connecting portions of the material 2 and the outer frame 1 as shown in FIG.
【００１７】第２の工程として図６に示すようにロ材２
及び外枠１の接続面にてヒータ６を挟み込む。これによ
りロ材２の溶着代５及び外枠の内面１ｃが加熱され溶融
状態となる。As a second step, as shown in FIG.
Then, the heater 6 is sandwiched between the connection surfaces of the outer frame 1. As a result, the welding allowance 5 for the material 2 and the inner surface 1c of the outer frame are heated to a molten state.
【００１８】第３の工程としてロ材２及び外枠１の接続
面が溶着しうる状態に溶融した時点にてヒータ６からロ
材２と外枠１をはなし、ヒータ６を引き、再びロ材２と
外枠１を接近させ、相互間を圧接して所定時間放置す
る。これによりロ材２と外枠１の相互間が溶着し、気密
的に接続される。As a third step, when the connection surface between the material 2 and the outer frame 1 is melted so that it can be welded, the material 2 and the outer frame 1 are separated from the heater 6, the heater 6 is pulled, and the material 2 2 and the outer frame 1 are brought close to each other, pressed against each other, and left for a predetermined time. As a result, the material 2 and the outer frame 1 are welded to each other and are air-tightly connected.
【００１９】本実施の形態によれば、ロ材２及び外枠１
が同種の材料から成ることにより両者の接続部相互間を
接着剤を用いずに確実にかつ容易に溶着させ気密的に接
続することが可能となる。According to the present embodiment, the material 2 and the outer frame 1
Are made of the same kind of material, it is possible to reliably and easily weld between the two connecting portions without using an adhesive and to make an air-tight connection.
【００２０】図８から図１０は本発明の実施の形態２に
係り、図８は空気清浄化フィルタの断面図、図９及び図
１０はロ材と外枠との接続工程を示す図である。8 to 10 relate to a second embodiment of the present invention. FIG. 8 is a cross-sectional view of an air cleaning filter, and FIGS. 9 and 10 are views showing a connecting process between a material and an outer frame. .
【００２１】本実施の形態の空気清浄化フィルタ２０
は、ロ材が前記実施の形態１と同様にポリプロピレン材
から成り、外枠がアルミ又はステンレス材等から成って
おり、この外枠１の内面に対して、図８に示すように、
溶融した材料を流し込み保持可能な皿形構造１ｂを形成
したものである。The air purifying filter 20 of the present embodiment
As shown in FIG. 8, the material is made of a polypropylene material as in the first embodiment, and the outer frame is made of aluminum or stainless steel.
A dish-shaped structure 1b capable of pouring and holding a molten material is formed.
【００２２】このような構成において、ロ材２を外枠１
の内面に接続場合は、第１の工程として、図９に示すよ
うに、この皿形構造１ｂに対して溶融炉７にて溶融した
ロ材と同種の材料８を流し込む。In such a configuration, the material 2 is
As a first step, as shown in FIG. 9, a material 8 of the same kind as the material melted in the melting furnace 7 is poured into the dish-shaped structure 1b.
【００２３】第２の工程として、図１０に示すように、
皿形構造１ｂに流し込まれた溶融材料８中にロ材２を押
し込んで所定時間放置することにより、ロ材２と溶融材
料８とが溶着し、気密的に接続される。As a second step, as shown in FIG.
By pushing the metal material 2 into the molten material 8 poured into the dish-shaped structure 1b and leaving it for a predetermined time, the metal material 2 and the molten material 8 are welded and air-tightly connected.
【００２４】本実施の形態によれば、外枠の材料がロ材
料の材料と異なる場合でも前記実施の形態１と同様にロ
材２及び外枠１の両者間を接着剤を用いずに確実にかつ
容易に溶着させ気密的に接続することが可能となる。According to the present embodiment, even when the material of the outer frame is different from the material of the outer material, the space between the outer material 2 and the outer frame 1 can be secured without using an adhesive, as in the first embodiment. And can be welded easily and hermetically connected.
【００２５】なお、前記実施の形態１及び２におけるロ
材２及び外枠１の材料はポリプロピレン材に限らず、テ
フロンその他の有機材料に対しても融着による接続が可
能である。また、ロ材２及び外枠１の材料として可塑剤
や難燃剤の含有量が少ない有機系材料を用いることが望
ましい。In the first and second embodiments, the material of the material 2 and the outer frame 1 is not limited to the polypropylene material, but can be connected to Teflon and other organic materials by fusion. Further, it is desirable to use an organic material having a small content of a plasticizer or a flame retardant as a material of the material 2 and the outer frame 1.
【００２６】[0026]
【発明の効果】本発明によれば、ロ材と外枠との間を高
価な接着剤を用いずに融着にて接続することにより、短
時間に接続工程を完了することができ製品の滞在期間が
短縮されるとともに製造コストを低減することが可能と
なる。According to the present invention, the connection process can be completed in a short time by connecting the material and the outer frame by fusion bonding without using an expensive adhesive. The staying period can be shortened and the manufacturing cost can be reduced.
【００２７】また、有機ガス成分を発生する接着剤やロ
材又は外枠を用いないことにより、従来のような、有機
ガス成分が飛散する問題が解消され、半導体を高精度に
製造することが可能となる。In addition, by eliminating the use of an adhesive, a material, or an outer frame that generates an organic gas component, the problem of scattering of the organic gas component as in the prior art can be solved, and a semiconductor can be manufactured with high precision. It becomes possible.
【００２８】さらに、空気清浄化フィルタのロ材や外枠
を同一材料にて構成することによりリサイクル材料とし
て再利用が容易になる。また外枠が同一材料でなくても
本発明の構成は分解が簡単であるために再利用が可能で
ある。Further, the material for the air filter and the outer frame of the air cleaning filter are made of the same material, so that the filter can be easily reused as a recycled material. Even if the outer frames are not made of the same material, the structure of the present invention can be reused because the structure is easy to disassemble.
【図１】本発明の実施の形態１に係る空気清浄化フィル
タの正面図。FIG. 1 is a front view of an air cleaning filter according to Embodiment 1 of the present invention.
【図２】空気清浄化フィルタの断面図。FIG. 2 is a cross-sectional view of an air cleaning filter.
【図３】ロ材と支持治具の関係を示す図。FIG. 3 is a diagram showing a relationship between a material and a support jig.
【図４】図３のＡ−Ａ線矢視図。FIG. 4 is a view taken in the direction of arrows AA in FIG. 3;
【図５】ロ材と外枠との接続工程を示す図。FIG. 5 is a diagram showing a process of connecting a material and an outer frame.
【図６】ロ材と外枠との接続工程を示す図。FIG. 6 is a view showing a process of connecting a material and an outer frame.
【図７】（ａ），（ｂ）はロ材と外枠との接続工程を示
す図。FIGS. 7A and 7B are diagrams showing a connection process between a material and an outer frame.
【図８】本発明の実施の形態２に係る空気清浄化フィル
タの断面図。FIG. 8 is a sectional view of an air cleaning filter according to Embodiment 2 of the present invention.
【図９】ロ材と外枠との接続工程を示す図。FIG. 9 is a view showing a process of connecting a material and an outer frame.
【図１０】ロ材と外枠との接続工程を示す図。FIG. 10 is a view showing a connection process between a material and an outer frame.
【図１１】従来の空気清浄化フィルタの斜視図。FIG. 11 is a perspective view of a conventional air cleaning filter.
【図１２】従来の空気清浄化フィルタの断面図。FIG. 12 is a cross-sectional view of a conventional air cleaning filter.
１……外枠 ２……ロ材 ３……スペーサ ４……ロ材支持具 ５……溶着代（接続部、溶着部） ６……ヒータ ７……溶融炉 ８……溶融材料 １０，２０…空気清浄化フィルタ DESCRIPTION OF SYMBOLS 1 ... Outer frame 2 ... Material 3 ... Spacer 4 ... Material support 5 ... Welding allowance (connecting part, welding part) 6 ... Heater 7 ... Melting furnace 8 ... Melting material 10, 20 … Air purification filter
フロントページの続き (72)発明者 広瀬 多郁三 神奈川県厚木市岡田２丁目９番８号 野村 マイクロ・サイエンス株式会社内 Ｆターム(参考） 4D058 JA14 JB14 KA08 KA13 KA14 KA23 SA04 Continuation of the front page (72) Inventor Takumazo Hirose 2-9-8 Okada, Atsugi-shi, Kanagawa F-term in Nomura Micro Science Co., Ltd. 4D058 JA14 JB14 KA08 KA13 KA14 KA23 SA04
Claims (3)
気清浄化フィルタにおいて、 前記ロ材と前記外枠との間の接続部を融着により接続し
て成ることを特徴とする空気清浄化フィルタ。1. An air purifying filter in which a material is hermetically connected to the inside of an outer frame, wherein a connection between the material and the outer frame is connected by fusion. Air purification filter.
成り、前記両者間を融着して成ることを特徴とする請求
項１記載の空気清浄化フィルタ。2. The air purifying filter according to claim 1, wherein the material and the outer frame are made of the same material, and the two are fused together.
構造を内面に形成した外枠の皿形構造に対して流し込ま
れた前記ロ材と同種の溶融材料とロ材とを融着させて成
ることを特徴とする請求項１記載の空気清浄化フィル
タ。3. A molten material of the same kind as that of the above-mentioned material, which is poured into a dish-shaped structure of an outer frame having an inner surface formed with a dish-shaped structure capable of pouring and holding a molten material, and the material being fused. The air purifying filter according to claim 1, wherein the filter is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10295461A JP2000117033A (en) | 1998-10-16 | 1998-10-16 | Air cleaning filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10295461A JP2000117033A (en) | 1998-10-16 | 1998-10-16 | Air cleaning filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000117033A true JP2000117033A (en) | 2000-04-25 |
Family
ID=17820895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10295461A Withdrawn JP2000117033A (en) | 1998-10-16 | 1998-10-16 | Air cleaning filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000117033A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006500203A (en) * | 2002-09-23 | 2006-01-05 | スリーエム イノベイティブ プロパティズ カンパニー | Filter element having a thermoformed housing around the filter material |
-
1998
- 1998-10-16 JP JP10295461A patent/JP2000117033A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006500203A (en) * | 2002-09-23 | 2006-01-05 | スリーエム イノベイティブ プロパティズ カンパニー | Filter element having a thermoformed housing around the filter material |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A300 | Withdrawal of application because of no request for examination |
Free format text: JAPANESE INTERMEDIATE CODE: A300 Effective date: 20060110 |