JP2000114620A - Pulse waveform measurement device - Google Patents

Abstract

(57) [PROBLEMS] To use a pulse waveform signal display device for displaying a plurality of pulse waveforms or a synthesized pulse waveform synthesized based on a plurality of pulse waveform signals, thereby shortening the light beam of each amplifier in a short time. It is an object of the present invention to obtain a high-output and high-directivity pulse laser device capable of setting pulse waveforms equally. SOLUTION: A pulse waveform is incident on an aperture 18 of a laser light aperture 17 to be measured, and a pulse waveform signal capturing device 26 detects a pulse waveform signal 25 (intensity of a light beam with respect to time). The synchronization signal 31 for pulse waveform measurement from the synchronization signal generator 30
Synchronize with and import. Then, the pulse waveform signal 25 is stored in a file format in the pulse waveform signal storage device 27 with a file number corresponding to the element number of the optical splitter 4 attached. The pulse waveform signal processing device 28 automatically reads the file corresponding to the element number 12 stored in the pulse waveform signal storage device 27 according to the set element number.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pulse laser device for obtaining a high-output and high-directivity laser beam by utilizing, for example, an optical amplification function. The present invention relates to a method for measuring a plurality of pulse waveforms in a radial direction, a method for processing a plurality of pulse waveforms, and a method for displaying a pulse waveform.

[0002]

2. Description of the Related Art (1) Description of the configuration of the prior art A laser multistage amplifying device composed of an oscillator and a plurality of amplifiers is a laser light having a high directivity generated by an oscillator and having a high output by optical amplification. Drilling,
It can be used for processes such as welding and cutting and photochemical reactions such as isotope separation.

In particular, a dye laser multistage amplifying apparatus using a copper vapor laser that performs pulse oscillation as an excitation source can obtain a high-output and high-directivity laser beam of the kW class. FIG.
FIG. 1 is a diagram showing a simplified configuration of a conventional dye laser multi-stage amplification system described in, for example, JP-A-8-97493. In the figure, reference numeral 1 denotes an excitation laser device including a copper vapor laser device that performs pulse oscillation, and has a maximum of 100 mm.
It produces a beam of large diameter. 2 is an excitation laser device 1
3 is a light splitter for splitting and condensing the laser light 2 into a plurality of beams, 4 is a split and condensed light beam, and 5 is a light beam 4 incident on a plurality of optical fibers. 6 is an optical fiber entrance for entering the light beam 4, 7 is a plurality of optical fibers for transmitting the light beam incident on the optical fiber entrance 6 to the dye laser multistage amplifying device 8, and 9 is directional. An oscillator that generates good laser light,
Reference numerals 10 to 13 denote four amplifiers for optically amplifying the laser light emitted from the oscillator 9.

[0004] Reference numeral 10 denotes a first-stage amplifier, 11 denotes a second-stage amplifier, 12 denotes a third-stage amplifier, and 13 denotes a fourth-stage amplifier. Is configured. Reference numeral 14 denotes a light beam emitted from the optical fiber 7, and 15 denotes a light beam from the oscillator 9 or the amplifier 1.
A transfer optical system which is incident on 0 to 13; 16 is a dye laser beam emitted from the laser multistage amplifier 8; 17 is an aperture which transmits a laser beam to be measured, which is partially separated by a beam separator described later, to a predetermined beam diameter; Reference numeral 18 denotes an opening provided at the center of the aperture, which determines the beam diameter.

Reference numeral 19 denotes a pulse waveform measuring device, and reference numeral 20 denotes a condenser lens, which has a size larger than the beam diameter of the laser light 2. 21 is a pulse waveform detector such as an optical biplanar or a pin photodiode, and 22 is a beam separator.
When a metal-deposited mirror in which a metal such as aluminum or gold is deposited on a glass substrate is used as the beam separator, the laser beam is almost reflected.

In the case where a dielectric multilayer mirror manufactured by depositing several layers of several kinds of dielectrics on a glass substrate while adjusting the thickness thereof is used, it is almost reflected or partially reflected depending on the manufacturing conditions. You. Reference numeral 23 denotes a rail for moving an optical component for moving the beam separator, and reference numeral 24 denotes a laser beam to be measured for measuring a pulse waveform.

FIG. 12 is a configuration diagram of a rectangular lens array as an example of the light splitter 3 used in the optical coupling device 5, and has five rectangular condenser lenses in the X direction and five in the Y direction. This is a case where they are arranged side by side. 3a is an element constituting the lens array. 3b is an element number corresponding to the arrangement position of each element, such as A1 to A5, E1 to E5, etc. displayed in each element. 3a has a side length of 20m
It is an element of about m, and a beam passing through one element is incident on one optical fiber.

FIG. 13 is a view of the aperture 17 as viewed from the surface on which the laser light 24 to be measured is incident. FIG. 14 is a side view of the aperture 17. The aperture is provided with a drive device such as an XY axis table that can move in a direction (XY direction) perpendicular to the laser optical axis of the laser light 24 to be measured. The shape and size of the opening 18 are determined by one element 3b of the lens array shown in FIG.
Set the same as Note that when the aperture is manually or automatically moved in the XY direction with respect to the measurement target laser light 24, the laser light other than passing through the opening passes through the aperture and does not hit the condenser lens. , The size of the aperture is set.

(2) Description of the operation of the prior art Next, the operation will be described. An excitation laser beam 2 emitted from an excitation laser device 1 is split into a plurality of light beams 4 by a light splitter 3 and condensed. This light beam is coupled to the optical coupling device 5
As a result, the light enters the plurality of optical fibers 7 from the optical fiber entrance 6. The light beam 14 emitted from the optical fiber 7 is reduced by the transfer optical system 15 and irradiated to the regions of the amplifiers 10 to 13 where the dye solution is flowing. This laser beam gives energy to the dye molecules in the dye solution to excite the dye molecules. At this time, when the highly directional laser light generated by the oscillator 9 is sequentially passed through the amplifiers 10 to 13, light amplification occurs while absorbing the energy of the dye molecules, and a highly directional and high-output pulse oscillation is performed. Dye laser light 12 can be generated.

Here, in a dye laser multi-stage amplifying apparatus having a laser output of several hundred watts to kW class, in order to obtain the maximum laser output, the amplifiers 10 to 13 of the first to fourth stages are required.
Assuming that the intensity of the light beam incident on the first stage is the laser output incident on the first stage amplifier 10, the second stage amplifier 1
1, the third stage amplifier 12 becomes 6 times, the fourth stage amplifier 13 becomes 10 times, and the total laser intensity used by the amplifiers 6 to 9 becomes 20 times (= 1 + 3 + 6 + 10).
Therefore, the number of beams split by the light splitter is a multiple of 20 beams.

Incidentally, if the number of beam divisions is increased, the cost of parts such as expensive optical fibers increases, so the optimal number of beam divisions is 20. For example, when the lens array shown in FIG. 12 is used for a circular beam and the four elements at the upper and lower ends corresponding to the corners of the lens array are not used, the total number of elements is 21 and the above-mentioned optimum number is obtained. A condition close to the number of beam divisions can be obtained.

The first to fourth stage amplifiers 10-1
It is necessary that the pulse waveform of the light beam incident on 3 be substantially equal, and that the light beam be incident on the amplifier at the same time when the dye laser beam 16 passes through the amplifier. For this reason,
The transmission time of the light beam sent to each amplifier is adjusted according to the length of the optical fiber, for example, the arrival time of the peak value of the light beam incident on a predetermined amplifier and the peak value of the dye laser light passing through this amplifier. , The pulse timing of a predetermined amplifier is adjusted.

Hereinafter, a case in which the pulse waveform measurement device 19 measures the pulse waveform distribution in the radial direction of the laser light 24 to be measured will be described. First, while driving,
The beam splitter 22 is disposed outside the optical path of the excitation laser light 2, but when performing pulse waveform measurement, the beam splitter 22 is inserted into the optical path of the laser light 2 (FIG. This is the case where the insertion is performed at an angle, and → indicates the insertion direction). For example, by moving the beam separator 22 fixed on the rail 23, the beam separator 22 can be inserted into the same position with respect to the laser beam 2 with good reproducibility.

Next, the aperture 18 of the aperture 17 is set so as to be located at the center of the laser beam 24 to be measured. At this time, the laser light passing through the opening 18 is converged by a condenser lens 20 such as a convex lens, and converts a pulse waveform measured by a pulse waveform detector 21 such as a biplanar photoelectric tube or a pin photodiode into an electric signal. The signal is displayed on a screen by a synchroscope, and the pulse waveform displayed on the screen is recorded in a photograph or the like. A plurality of pulse waveforms corresponding to the light beam 4 passing through each element of the light splitter 3 are measured while sequentially moving the opening 18 by a predetermined distance in a direction perpendicular to the optical axis of the laser light 24.

[0015]

(1) Description of Problems of the Prior Art In the conventional pulse laser apparatus as described above, in order to obtain a pulse waveform of a light beam incident on a predetermined amplifier,
The time axis of a plurality of pulse waveforms recorded in a photograph or the like is delayed by a transmission time corresponding to the length of the optical fiber, and the plurality of pulse waveforms are superimposed. Next, the beam intensities of these light beams are integrated, and a plurality of pulse waveforms are superimposed to obtain a composite pulse waveform. conventionally,
Since this process was performed manually and a pulse waveform combination in which the pulse waveforms of all the amplifiers were equal was selected,
There is a problem that it takes an excessively long time to select an optimal combination of pulse waveforms.

(2) Description of the Object of the Invention The present invention has been made to solve the above-mentioned problems, and has a high output and a high output that can set the pulse waveform of the light beam of each amplifier equally in a short time. An object is to obtain a highly directional pulse waveform measuring device.

[0017]

According to a first aspect of the present invention, there is provided a pulse waveform measuring apparatus which emits an excitation laser beam, divides the emitted excitation laser beam into a plurality of light beams, and guides the laser beam to an amplifier. Pulse waveform detecting means disposed between the optical splitter for condensing the light on the fiber and detecting a pulse waveform of each of the divided excitation laser beams, a synchronizing signal generating means for generating a synchronizing signal for pulse waveform measurement, and pulse waveform measurement Pulse waveform signal capturing means for capturing a pulse waveform signal from a pulse waveform detecting means in synchronization with a synchronization signal for use; pulse waveform signal storing means for storing the captured pulse waveform signal;
There is provided a pulse waveform signal display means for displaying a plurality of pulse waveforms or a synthesized pulse waveform obtained by synthesizing a plurality of pulse waveforms based on the stored pulse waveform signal.

In the pulse waveform measuring device according to the second aspect of the present invention, the pulse waveform signal storage means stores a number corresponding to the pulse waveform signal as a part of a file number when storing the pulse waveform signal in a file format. It is something to attach.

According to a third aspect of the present invention, there is provided a pulse waveform measuring device for recalling a stored pulse waveform signal and correcting a time axis.

According to a fourth aspect of the present invention, in the pulse waveform measuring device, the pulse waveform signal processing means is provided with an input section for setting the number corresponding to the pulse waveform signal and the length of the optical fiber.

According to a fifth aspect of the present invention, in the pulse waveform measuring device, the pulse waveform signal processing means includes:
It has a function of displaying only a specific pulse waveform among a plurality of pulse waveforms incident on a predetermined amplifier.

In the pulse waveform measuring device according to the invention of claim 6, the pulse waveform signal processing means calls a plurality of stored pulse waveform signals in accordance with the element number and the length of the optical fiber set at the input section. It has a function of synthesizing a pulse waveform incident on a predetermined amplifier by moving the time axis of the waveform signal.

According to a seventh aspect of the present invention, in the pulse waveform measuring device, the pulse waveform signal processing means has a function of calculating a pulse width of the plurality of stored pulse waveforms or a composite pulse waveform.

In the pulse waveform measuring apparatus according to the present invention, the pulse waveform signal processing means automatically compares the number corresponding to the pulse waveform signal set at the input section with the file number storing the pulse waveform signal, and It has a function of reading a file in a targeted manner.

In the pulse waveform measuring apparatus according to the ninth aspect of the present invention, the pulse waveform signal display means has a function of displaying all pulse waveforms of the light beam passing through the elements of the light splitter on one screen. .

In the pulse waveform measuring device according to the tenth aspect of the present invention, the pulse waveform signal display means divides the light beam in the same manner as the element array of the optical splitter, and outputs the pulse of the light beam passing through each element corresponding to the element array position. It has a display function of displaying a waveform.

In the pulse waveform measuring device according to the eleventh aspect, the pulse waveform signal display means has a display function of displaying the pulse width of the pulse waveform on the same screen as the pulse waveform.

In the pulse waveform measuring apparatus according to the twelfth aspect, the pulse waveform signal display means displays a plurality of pulse waveforms incident on a predetermined amplifier and a synthesized pulse waveform synthesized based on the plurality of pulse waveforms on one screen. It has a function to perform.

In the pulse waveform measuring apparatus according to the thirteenth aspect, the pulse waveform signal display means has a function of displaying, on one screen, a synthesized pulse waveform synthesized based on a plurality of pulse waveforms incident on all the amplifiers. Things.

In the pulse waveform measuring apparatus according to the fourteenth aspect, the pulse waveform signal display means selects a screen for displaying all the plurality of pulse waveforms, and displays a plurality of pulse waveforms of a predetermined amplifier and a composite pulse waveform. A selection unit is provided for selecting a screen or a screen for displaying a composite pulse waveform of all amplifiers.

In the pulse waveform measuring apparatus according to the fifteenth aspect, the synchronizing signal generating means receives the laser oscillation command signal output from the laser oscillation signal generating device for driving the excitation laser device and receives the pulse waveform measuring synchronizing signal. And a synchronous signal converter for converting the signal into a pulse waveform signal. The synchronous signal for pulse waveform measurement is input to the pulse waveform signal capturing device to capture the pulse waveform signal.

In the pulse waveform measuring apparatus according to the sixteenth aspect, the synchronizing signal generating means measures a pulse waveform of the laser light obtained by separating a part of the laser light to be measured by a pulse waveform detector, and measures the measured pulse waveform. Is a synchronization signal for pulse waveform measurement, and this signal is input to a pulse waveform signal capturing device to capture a pulse waveform signal.

A pulse waveform measuring device according to claim 17 is
A copper vapor laser device is used as an excitation laser device.

[0034]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 (1) Detailed Description of Configuration Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram of a pulse laser device using the pulse waveform measurement device according to the first embodiment of the present invention. In the figure, the same reference numerals as those in FIG. 11 indicate the same or corresponding parts. In the figure, reference numeral 25 denotes a pulse waveform signal output from the pulse waveform detector 21; 26, a pulse waveform signal capturing device for capturing the pulse waveform signal 25; and 27, a pulse waveform signal storage device for storing the captured pulse waveform signal 25. , 28 is a pulse waveform signal processing device for processing the stored pulse waveform signal 25, 29 is a pulse waveform signal display device for displaying the processed pulse waveform signal 25, and 30 is a pulse waveform signal for synchronizing the pulse waveform measurement synchronization signal 31 It is a synchronizing signal generator for outputting to the capturing device 26.

FIG. 2 shows the structure of the display unit when all the pulse waveforms of the light beam 4 passing through the lens array 3 are displayed. As an example, this is a case where all the pulse waveforms of the light beam 4 passing through the elements of the lens array are displayed on one screen by using the lens array shown in FIG. 12 as a light splitter. The horizontal axis is time, and the vertical axis is beam intensity. 3
2 is a screen, 33 is a display unit, and 34 is a pulse waveform of a light beam passing through the element. Further, symbols 35 of 1 to 5 and A to E in the drawing are symbols corresponding to the element number 3b. FIG. 3 shows a case where the pulse width of the pulse waveform 34 is displayed on the display unit 33 shown in FIG. 36 is a pulse width.

(2) Detailed Description of Operation Next, the operation of this embodiment will be described. In FIG.
When measuring the pulse waveform, the beam separator 22 is inserted into the optical path of the excitation laser light 2. The aperture 18 of the aperture 17 is installed so as to be located at the center of the laser light 24 to be measured. At this time, the measurement target laser beam 24 that has passed through the opening 18 is converged by the condenser lens 20 and enters the pulse waveform detector 21.

The synchronizing signal generator 30 generates a synchronizing signal 31 for pulse waveform measurement synchronized with the pulse repetition frequency of the pump laser device 1 and inputs it to the pulse waveform signal capturing device 26. First, the pulse waveform signal capturing device 26 captures the pulse waveform signal 25 (recording the intensity of the light beam with respect to time) from the pulse waveform detector 21 in synchronization with the pulse waveform measurement synchronization signal 31, and Waveform signal 25
Is stored in the pulse waveform signal storage device 27 in a file format.

At this time, the file is assigned a file number corresponding to the element number of the optical splitter 3. For example,
The file number is 980101A2-1 (980101 is the date of measurement, A2 is the element number, and -1 is the number of measurements). The file number has a one-to-one correspondence with the element number, and the file corresponding to the element number stored in the pulse waveform signal storage device 27 is automatically stored based on the element number set by the pulse waveform signal processing device 28. Can be read out.

Next, a plurality of pulses corresponding to the light beam 4 passing through each element of the light splitter 3 are sequentially moved by a predetermined distance in the direction perpendicular to the optical axis of the laser light 24 through the opening 18. Measure the waveform. Finally, a plurality of files stored in the pulse waveform signal storage device 27 are automatically recalled, and the pulse waveform signal display device 29 reads the files shown in FIGS.
Is displayed.

Although the condenser lens 20 is arranged in front of the pulse waveform detector 21 in FIG.
When the size of the first detection unit is larger than the opening 18 of the aperture 17, the condenser lens 20 does not need to be used.

In FIG. 2, the display section 33 is divided in the same manner as the element arrangement, and the pulse waveform 34 of the light beam 4 passing through each element is displayed corresponding to the element arrangement position. At this time, in the pulse waveform signal display device 29, the element arrangement position and the display position of the pulse waveform 34 are set in advance. As described above, it is assumed that the intensity ratio of the light beam incident on the amplifiers 10 to 13 is 1, 3, 6, and 10 and that the number of optical fibers is 20.

Since only one light beam enters the amplifier 10, a pulse waveform having a maximum pulse width is selected.
Next, since three light beams are incident on the amplifier 11 and their pulse widths are smaller than the pulse width of the pulse waveform of the amplifier 10, by selecting three light beams,
The pulse waveform of the light beam of the amplifier 11 is made equal to the pulse waveform of the amplifier 10.

Further, since six light beams enter the amplifier 12 and ten light beams enter the amplifier 13, the pulse waveform of each amplifier is made equal to the pulse waveform of the amplifier 10 as in the amplifier 11. . In FIG. 2, since the laser beam 2 does not pass through four elements at the corners of the lens array, no pulse waveform is displayed on the element.

In FIG. 3, as an example, the pulse width of the pulse waveform 36 corresponding to the element array position of the lens array is shown.
Is displayed. At this time, in the pulse waveform signal display device 29, the element arrangement position and the display position of the pulse width 36 are set in advance. In the figure, the display position of the pulse width is set to the upper left, but it may be displayed at an arbitrary position in the element.

For the calculation of the pulse width 36, first, a file in which the pulse waveform signal 25 is stored is called from the pulse waveform signal storage device 27. Next, the pulse waveform signal processor 28 normalizes the maximum value of the beam intensity as 1, sets a threshold value of the beam intensity, and obtains a pulse width corresponding to the threshold value. For example, a half width (a pulse width when the threshold of the beam intensity is half the beam intensity), which is one of the values representative of the pulse width of the pulse waveform, is displayed.

(3) Detailed Description of Effects As described above, according to the present invention, an aperture having an opening through which a part of excitation laser light passes, and a pulse waveform detection for detecting a pulse waveform of the excitation laser light A pulse waveform signal capture device that captures a pulse waveform signal in synchronization with a pulse waveform measurement synchronization signal generated by a synchronization signal generator, a pulse waveform signal storage device that stores the signal,
By using a pulse waveform measuring device composed of a pulse waveform signal display device that displays a plurality of pulse waveforms corresponding to the element array positions of the lens array, the pulse waveforms of the light beams of all the amplifiers are equalized in a short time. It is possible to select any combination and obtain a pulse laser device with high output and high directivity.

Further, the pulse waveform signal processing device calculates the pulse width of the light beam passing through the element of the lens array, and the pulse waveform signal display device displays the pulse width corresponding to the element arrangement position. The shape of the pulse waveform can be quantitatively determined, and a combination of pulse waveforms of the light beam used for each amplifier can be easily selected.

(4) Description of Diverting Example of Same Configuration to Another Use In the first embodiment, the pump laser device is
Although the description has been given with respect to the copper vapor laser device, for example, a gas laser device including an excimer laser, a CO ₂ laser, or a YA
A solid-state laser using G or the like may be used, and the same effects as described above can be obtained. The object to be measured does not need to be laser light, but may be an electric light or a light-emitting object that emits light, and has the same effects as described above.

In the first embodiment, the pulse laser device is described as a uranium enrichment dye laser multistage amplifying device. However, for example, a laser processing device or a laser medical device using a plurality of optical fibers may be used. The same effect as described above may be obtained.

In the first embodiment, the case where the pumping light is irradiated from one side of each amplifier has been described. However, the same effect can be obtained even when the pumping light is irradiated from both sides of each amplifier. .

Embodiment 2 (1) Detailed Description of Configuration Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG.
FIG. 9 is a configuration diagram of an input unit of a pulse waveform processing device that constitutes the pulse waveform measurement device according to the second embodiment of the present invention. 10 is a display section of a screen for inputting an element number of a lens array and a length of an optical fiber for transmitting a light beam 4. 37 is an amplifier number (for example, AMP1, AMP2, AMP3, AMP4), 38a is an amplifier number display section, 38b is an element number input section, and 38c is an optical fiber length input section.

FIG. 5 shows a configuration of a display section of a screen for displaying a plurality of pulse waveforms incident on a predetermined amplifier and a synthesized pulse waveform synthesized based on the plurality of pulse waveforms. As an example, there is a case where three pulse waveforms (element numbers are A1, B2, and C3) incident on AMP2 and a composite pulse waveform obtained by superimposing these pulse waveforms are displayed on one screen. The horizontal axis is time, and the vertical axis is beam intensity. 39 is a composite pulse waveform, 40 is the type of line displaying the pulse waveform, 4
1 is a pulse rising time.

(2) Detailed Description of Operation In the input setting section of FIG. 4, the length of the light beam entering each amplifier and the length of the optical fiber transmitting the light beam are set.
First, the amplifier number 37 is displayed on the amplifier number display section 38a. Next, among the pulse waveforms shown in FIG. 3, an element number used for a predetermined amplifier is input to an element number input section 38b provided on the right side of the amplifier number 37 of AMP1.
Similarly, input element numbers from AMP2 to AMP4. In the figure, corresponding to the intensity ratio of the light beam of each amplifier described in the first embodiment, the element number: A3 for AMP1, the element number: B1, B2, B3 for AMP2, and the element number: C for AMP3.
1, C2, C3, C4, C5, A2, AMP4 have element numbers: A4, B4,
The case where B5, D1, D2, D3, D4, D5, E2, and E3 are selected is shown.

Next, the length of an optical fiber for transmitting a light beam corresponding to the element number input to the element number input section 38b is input to an optical fiber length input section 38c provided on the right side of the element number input section 38b.

In the following, the above operation is carried out on AMP2
A case will be described in which the process is performed on the pulse waveforms of the light beams and displayed on the pulse waveform signal display device 29.

In FIG. 5, a pulse waveform signal corresponding to the element number A1 input to the element number input section 38b is called. For example, as described above, when the file number is 980101A1-1, the element numbers provided at the eighth and ninth positions before the file number are called.
This is automatically performed by comparing A1 with the element number A1 of the element number input section 38b.

Next, based on the optical fiber length of the optical fiber length input section 38c, the pulse waveform signal processor 28 calculates the transmission time to a predetermined amplifier. The time axis of the pulse waveform signal 25 recorded in the file called earlier is delayed by this transmission time. Similarly, the element number
The above procedure is performed on the pulse waveform signals corresponding to B2 and C3. The pulse rising time 41 and the pulse width are confirmed based on the displayed plural pulse waveforms. At this time, in order to make each pulse waveform easy to understand, the type and thickness of the line 40 for displaying the pulse waveform may be changed, and the element number may be displayed beside the line 40.

Further, the beam intensities of the three pulse waveforms obtained by delaying the time axis of the above-mentioned pulse waveforms are integrated, and a combined pulse waveform 39 is displayed. With this composite pulse waveform 39,
Check the pulse rise time and pulse width of the AMP2 pulse waveform. At this time, as described in the first embodiment, the pulse width may be calculated by the pulse waveform signal processing device 28 and displayed on the display unit 33. Further, the synthesized pulse 39 may be displayed by changing the type and thickness of the line in order to distinguish it from the other three pulse waveforms.

In FIG. 5, the amplifier number 37 is displayed at the upper left of the display unit 33. However, the amplifier number 37 may be displayed at another place on the display unit 33, and the element number 3b is displayed beside the line 40. May be displayed near the line.

In the same procedure as AMP2 described above, AMP3
And the composite pulse waveform of AMP4 is displayed, and the composite pulse waveform of each amplifier is compared (Note that the AMP1 has one pulse waveform, so the composite pulse waveform is unnecessary).

(3) Detailed Description of Effects As described above, according to the present invention, an input unit for inputting an element number and a length of an optical fiber for a light beam passing through each element of a light splitter. , A file saved in the pulse waveform signal storage device is called, and the pulse waveform signal processing device moves the time axis of the plurality of pulse waveform signals based on the setting of the input unit to synthesize and display the pulse waveform. The pulse rise time and pulse width of the composite pulse waveform used for each amplifier can be checked accurately, and the pulse of the light beam of all amplifiers can be quickly output without the need to output multiple pulse waveforms and composite pulse waveforms to a printer or the like. Waveforms can be equalized.

Embodiment 3 (1) Detailed Description of Configuration Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG.
FIG. 9 is a configuration diagram of an input unit of a pulse waveform processing device that constitutes a pulse waveform measurement device according to a third embodiment of the present invention. In the drawing, the same reference numerals as those in FIG. 4 indicate the same or corresponding parts. In the figure, reference numeral 42 denotes a pulse waveform display selection section provided on the right side of the input sections 38b and 38c for inputting the element number and the length of the optical fiber shown in FIG. In the above description, the pulse waveform display selection section 42 is provided on the right side of the input sections 38b and 38c, but may be provided at any position corresponding to the input sections 38b and 38c.

(2) Detailed Description of Operation Referring to FIG. 6, by setting the pulse waveform display selection section 42, which pulse waveform among a plurality of pulse waveforms 34 incident on a predetermined amplifier is transmitted to the pulse waveform display device 29. Select whether to display. For example, a display is selected by providing a switch in the pulse waveform display selection unit 42 so that the pulse waveform is displayed when the switch is turned on and the pulse waveform is not displayed when the switch is turned off.

As described with reference to FIG. 5 of the second embodiment,
The pulse widths of all the amplifiers are made equal by the combination of the element number and the optical fiber length. However, in some cases, the pulse width cannot be made equal with the above combination. For example, if the pulse width of AMP2 is wider than AMP1, of the three pulse waveforms in FIG. 5, the length of the optical fiber corresponding to the pulse waveform whose pulse rise time is later is cut off, and the pulse rise is determined. By shortening the pulse width of AMP2, the pulse width of all amplifiers can be made equal.

In performing the above operation, before cutting the optical fiber, the length of the optical fiber of the optical fiber input section 38c is changed, and a plurality of pulse waveforms 34 of a predetermined amplifier are confirmed on the display section of FIG. I do. At this time, for example, in AMP4, 10
Although one pulse waveform is displayed on one screen, since the pulse waveforms overlap, it is difficult to understand the shape of each pulse waveform and the rising time of the pulse. The pulse waveform display selection unit 4
In step 2, by selecting and displaying a specific pulse waveform, in particular, the rising time of the pulse waveform is accurately confirmed, the optical fiber to be cut is accurately selected, and the length of cutting the optical fiber is determined. Can be calculated.

(3) Detailed Description of Effects As described above, according to the present invention, the pulse waveform display selection unit selects a specific pulse waveform from a plurality of pulse waveforms incident on a predetermined amplifier. By displaying on the pulse waveform display device, in particular, it is possible to accurately confirm the rising time of the pulse and calculate the length of cutting the optical fiber,
The pulse waveforms of the light beams of all the amplifiers can be made equal in a short time.

Embodiment 4 (1) Detailed Description of Configuration Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG.
FIG. 9 is a configuration diagram of a pulse waveform display device that constitutes a pulse waveform measurement device according to a fourth embodiment of the present invention. The configuration of the display unit when displaying the composite pulse waveform 39 of all amplifiers is shown. 43 is the pulse rise time of the composite pulse, and 44 is the time axis of the composite pulse.

(2) Detailed Description of Operation Referring to FIG. 7, a composite pulse waveform 39 incident on the amplifier described in the third embodiment corresponds to a predetermined amplifier number 37.
Is displayed, and the combined pulse waveforms of all the amplifiers are displayed on one screen. At this time, the time axis 44 of the synthesized pulse of each amplifier is
Align display position of.

First, the pulse width of the composite pulse 39 of each amplifier can be easily compared with FIG. 7, so that it can be seen that the pulse widths of all the amplifiers match. Next, for example, the pulse rise time 44 of the composite pulse of AMP1 is set to T1
And the pulse rise time 44 of the composite pulse of AMP2 is
When T2, the difference between the two: ΔT = T2-T1 is AMP1 from AMP2
If it is equal to the propagation time of the dye laser light propagating to (= distance between AMP1 and AMP2 / propagation speed of dye laser light), AMP2
And the pulse timing of the dye laser beam passing through AMP2 coincides. From the difference between the pulse rise times 44 of the combined pulses of the amplifiers, it can be determined whether the pulse timings of all the amplifiers match.

(3) Detailed Description of Effects As described above, according to the present invention, the display positions on the time axis of the combined pulse waveforms of all the amplifiers are aligned and displayed on the same screen, so that It can be confirmed that the pulse widths of the composite pulses of all the amplifiers match. In addition, from the difference between the pulse rise times of the composite pulses of the amplifiers, it is possible to confirm the coincidence of the pulse timings of the incident light beam and the dye laser light in all the amplifiers.

Embodiment 5 FIG. (1) Detailed Description of Configuration Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG.
FIG. 14 is a configuration diagram of a pulse waveform selection unit of a pulse waveform processing device that constitutes the pulse waveform measurement device according to the fifth embodiment of the present invention. 45 is a pulse waveform selector, 46 is an amplifier pulse waveform selector, and 47 is a composite pulse waveform selector. In the pulse waveform selection unit 45 and the amplifier pulse waveform selection unit 47, for example, when a switch is turned on, a predetermined screen is selected. In the amplifier pulse waveform selection section 46, when a switch indicating the amplifier number is turned on, a predetermined amplifier screen is selected. In the figure, the pulse waveform selection unit 45 is located on the left side of the display unit, the amplifier pulse waveform selection unit 46 is located in the center, and the composite pulse waveform selection unit 47 is located on the right side.
Is arranged, but the relative positions of the three selection units may be changed.

(2) Detailed Description of Operation When the pulse waveform selecting section 45 is selected in FIG. 8, a screen displaying a pulse waveform at the lens array arrangement position shown in FIG. 2 or FIG. 3 is displayed. When a switch corresponding to a predetermined amplifier of the amplifier pulse waveform selection section 46 is selected, a plurality of pulse waveforms and a composite pulse waveform incident on the predetermined amplifier shown in FIG. 5 are displayed. When the synthesized pulse waveform selection section 47 is selected, the synthesized pulse waveforms of all the amplifiers shown in FIG. 7 are displayed.

When selecting the combination of the element number and the length of the optical fiber so as to make the pulse waveform and pulse width of each amplifier equal, first, the amplifier pulse waveform selection unit 4
By selecting 6, a plurality of pulse widths and pulse rise times incident on each amplifier are examined. Next, according to the selection of the pulse waveform selection unit 45, the pulse width of each pulse waveform is compared with the rising time of the pulse on the screen of FIG. 5 to select which amplifier receives the pulse waveform corresponding to the element number. Thereafter, the process moves to the input sections 38b and 38c relating to the element number and the optical fiber, and resets both input values.

Then, the pulse width and pulse rise time of the composite pulse waveform are confirmed in FIG. 7 by the selection of the composite pulse waveform selection section 47. As described above, the three screens are freely selected by the three selection units, and by moving between the screens, the combined pulse waveforms of all the amplifiers are equal, and the light beam and the dye laser light incident on the amplifiers are equal. Match the pulse timing.

Although the above description has been given of the case where three selection units are provided, the pulse waveform and the element number shown in FIG. 3 are displayed on the display unit of FIG. 5 selected by the selection of the amplifier pulse waveform selection unit 46. Therefore, it is not always necessary to provide the pulse waveform selection unit 45.

Although not described in the figure, the above 3
In order to freely select one screen, it is necessary to provide a switch for returning to the selection unit shown in FIG. 8 on the display unit shown in FIG. 2, FIG. 5, and FIG. Further, if necessary, a switch for selecting another display unit in the display units of FIGS. 2, 5, and 7 and moving the screen may be provided.

(3) Detailed Description of Effects As described above, according to the present invention, the pulse waveform selecting unit,
The amplifier pulse waveform selection unit is provided with a composite pulse waveform selection unit. By freely selecting three screens and moving the screens, it is easy to match the pulse widths of the composite pulses of all amplifiers and make them incident on the amplifiers. The coincidence of the pulse timings of the light beam and the dye laser light can be confirmed.

Embodiment 6 FIG. (1) Detailed Description of Configuration Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG.
FIG. 14 is a configuration diagram of a synchronization signal generator used in the pulse waveform measurement device according to the sixth embodiment of the present invention, in which components other than the excitation laser device and the pulse waveform measurement device are omitted. In FIG. 1, FIG.
The same parts and the same reference numerals indicate the corresponding parts. In the figure, reference numeral 48 denotes a laser oscillation signal generator, 49 denotes a laser oscillation command signal, and 50 denotes a synchronization signal converter.

FIG. 10 is a block diagram showing another configuration of the synchronizing signal generator used in the pulse waveform measuring device according to the sixth embodiment of the present invention, except for the pump laser device and the pulse waveform measuring device. Similarly, the same parts as those in FIG. In the figure, the synchronization signal generator 30 is
It comprises a condenser lens 20 such as a convex lens for condensing the laser light 24 to be measured and a pulse waveform detector 21.

(2) Detailed Description of Operation Referring to FIG. 9, a laser oscillation command signal 49 output from a laser oscillation signal generator 48 for driving an excitation laser device is separated and input to a synchronous signal converter 50. . The synchronizing signal converter 50 generates a synchronizing signal 31 for pulse waveform measurement in accordance with the pulse repetition frequency of the laser oscillation command signal 49 and inputs it to the pulse waveform signal capturing device 26.

In FIG. 10, the laser beam 24 to be measured is partially separated by the beam splitter 22. When the laser light is larger than the detection unit of the pulse waveform detector 21, the laser light is condensed by the condenser lens 20 and is incident on the detection unit of the pulse waveform detector 21. The pulse waveform detector 21 outputs the measured pulse waveform of the laser beam as a pulse waveform measurement synchronization signal 31. Pulse waveform signal capture device 26
Uses the synchronizing signal 31 as a trigger signal for setting the time of capturing a waveform, always captures the pulse waveform signal 25 at the same time, and stores it in the pulse waveform signal storage device 27 as a file.

(3) Detailed Description of Effects As described above, according to the present invention, a pulse waveform measurement synchronization signal is generated based on a laser oscillation command signal for driving an excitation laser device or a laser beam to be measured. Accordingly, it is possible to obtain a pulse waveform measurement device capable of accurately measuring the pulse waveform of the excitation laser light passing through the element of the optical splitter even if the laser oscillation time of the excitation laser device fluctuates.

[0083]

According to the first aspect of the present invention, a laser device that emits an excitation laser beam, and a light splitting device that splits the emitted excitation laser beam into a plurality of light beams and condenses the light beams on an optical fiber for guiding to an amplifier. Pulse waveform detecting means disposed between the device and detecting the pulse waveform of each of the divided excitation laser light,
Synchronous signal generating means for generating a synchronous signal for pulse waveform measurement, pulse waveform signal acquiring means for acquiring a pulse waveform signal from a pulse waveform detecting means in synchronization with the synchronous signal for pulse waveform measurement, and storing the acquired pulse waveform signal The pulse waveform signal storage means and the pulse waveform signal display means for displaying a plurality of pulse waveforms based on the stored pulse waveform signal or a composite pulse waveform obtained by synthesizing the plurality of pulse waveforms. Thus, there is an effect that a pulse laser device having high output and high directivity can be obtained by selecting a combination in which the pulse waveforms of the light beams are equal.

According to the second aspect of the present invention, the pulse waveform signal storing means assigns a number corresponding to the pulse waveform signal to a part of the file number when storing the pulse waveform signal in a file format. There is an effect that the file management becomes easy and the automatic call of the file becomes easy.

According to the third aspect of the invention, the stored pulse waveform signal is called and the time axis is corrected, so that the combination in which the pulse waveforms of the light beams of all the amplifiers are equal in a short time can be easily achieved. The effect is that you can choose.

According to the fourth aspect of the present invention, the pulse waveform signal processing means is provided with an input section for setting the number corresponding to the pulse waveform signal and the length of the optical fiber, so that the length for cutting the optical fiber can be reduced. The calculation can be performed, and the pulse waveforms of the light beams of all the amplifiers can be made equal in a short time.

According to the fifth aspect of the present invention, the pulse waveform signal processing means has a function of displaying only a specific pulse waveform among a plurality of pulse waveforms incident on a predetermined amplifier at the input section. Thus, there is an effect that the shape of the pulse waveform can be quantitatively determined, and a combination of pulse waveforms of the light beam used for each amplifier can be easily selected.

According to the sixth aspect of the present invention, the pulse waveform signal processing means calls a plurality of stored pulse waveform signals according to the element number and the length of the optical fiber set at the input section, and generates the pulse waveform signal. By moving the time axis, the function of synthesizing and displaying a pulse waveform incident on a predetermined amplifier can be confirmed, so that the pulse rising time and pulse width of the synthesized pulse waveform used for each amplifier can be accurately confirmed. There is an effect that the pulse waveforms of the light beams of all the amplifiers can be equalized in a short time without having to output a pulse waveform or a composite pulse waveform to a printer or the like.

According to the seventh aspect of the present invention, the pulse waveform signal processing means has a function of calculating the pulse widths of the plurality of stored pulse waveforms or the combined pulse waveforms, so that the plurality of pulse waveforms or the combined pulse There is an effect that the pulse waveforms of the light beams of all the amplifiers can be made equal in a short time without having to output the waveform to a printer or the like.

According to the eighth aspect of the present invention, the pulse waveform signal processing means automatically compares the number corresponding to the pulse waveform signal set at the input unit with the file number in which the pulse waveform signal is stored, and automatically generates the file. With the function of reading out a file, there is an effect that reading of a desired file becomes easy together with file management.

According to the ninth aspect of the present invention, the pulse waveform signal display means has a function of displaying all the pulse waveforms of the light beam that has passed through the element of the optical splitter on one screen, so that the pulse waveform signal can be displayed in a short time. There is an effect that a combination in which the pulse waveforms of the light beams of all the amplifiers are equal can be selected.

According to the tenth aspect of the present invention, the pulse waveform signal display means divides the light in the same manner as the element arrangement of the optical splitter, and displays the pulse waveform of the light beam passing through each element in accordance with the element arrangement position. With such a display function, it is possible to select a combination in which the pulse waveforms of the light beams of all the amplifiers are equal in a short time.

According to the eleventh aspect of the present invention, the pulse waveform signal display means has a display function of displaying the pulse width of the pulse waveform on the same screen as the pulse waveform, so that the rising edge and the time of the pulse waveform used for each amplifier are displayed. And that the pulse width can be accurately confirmed.

According to the twelfth aspect, the pulse waveform signal display means has a function of displaying a plurality of pulse waveforms incident on a predetermined amplifier and a synthesized pulse waveform synthesized based on the plurality of pulse waveforms on one screen. With this configuration, the rise, time, and pulse width of the composite pulse waveform used for each amplifier can be accurately confirmed.

According to the thirteenth aspect of the present invention, the pulse waveform signal display means has a function of displaying, on a single screen, a composite pulse waveform synthesized based on a plurality of pulse waveforms incident on all the amplifiers. There is an effect that the pulse waveforms of the light beams of all the amplifiers can be equalized in a short time without having to output the pulse waveform and the composite pulse waveform to a printer or the like.

According to the fourteenth aspect of the present invention, the pulse waveform signal display means selects a screen for displaying all the plurality of pulse waveforms, and selects a screen for displaying the plurality of pulse waveforms of a predetermined amplifier and the composite pulse waveform. Or by having a selection part for selecting a screen that displays the combined pulse waveform of all amplifiers, it is possible to accurately confirm the rise time of the pulse and calculate the length of cutting the optical fiber, and all the amplifiers in a short time There is an effect that the pulse waveforms of the light beams can be made equal.

According to the fifteenth aspect, the synchronizing signal generating means inputs the laser oscillation command signal output from the laser oscillation signal generating device for driving the excitation laser device and converts it into a pulse waveform measuring synchronizing signal. A synchronization signal converter is provided, and a synchronization signal for pulse waveform measurement is input to the pulse waveform signal acquisition device to acquire the pulse waveform signal, so that the element of the optical splitter can be operated even when the laser oscillation time of the excitation laser device fluctuates. This has the effect that the pulse waveform of the passing excitation laser beam can be accurately measured.

In the pulse waveform measuring apparatus according to the sixteenth aspect, the synchronizing signal generating means measures the pulse waveform of the laser light obtained by separating a part of the laser light to be measured by a pulse waveform detector, and measures the measured pulse waveform. Is a synchronization signal for pulse waveform measurement, and this signal is input to the pulse waveform signal acquisition device to acquire the pulse waveform signal, so that the laser beam passes through the element of the optical splitter even if the laser oscillation time of the excitation laser device fluctuates. There is an effect that the pulse waveform of the excitation laser light can be accurately measured.

A pulse waveform measuring device according to claim 17 is
Even if a copper vapor laser device is used as the pumping laser device, a combination in which the pulse waveforms of the light beams of all the amplifiers can be selected in a short time can be selected, and a pulse laser device with high output and high directivity can be obtained. There is an effect that can be.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a pulse laser device using a pulse waveform measurement device according to a first embodiment of the present invention.

FIG. 2 shows a configuration of a display unit for displaying pulse waveforms of all light beams passing through the light splitter according to the first embodiment of the present invention.

FIG. 3 is a configuration of a display unit for displaying a pulse width of a pulse waveform according to the first embodiment of the present invention.

FIG. 4 is a configuration diagram of an input unit of a pulse waveform processing unit included in the pulse waveform measurement device according to the second embodiment of the present invention.

FIG. 5 shows a configuration of a display unit for displaying a plurality of pulse waveforms incident on a predetermined amplifier according to the second embodiment of the present invention and a composite pulse waveform obtained by superimposing a plurality of pulse waveforms.

FIG. 6 is a configuration diagram of an input unit of a pulse waveform processing device included in a pulse waveform measurement device according to a third embodiment of the present invention.

FIG. 7 is a configuration diagram of a pulse waveform display device included in a pulse waveform measurement device according to a fourth embodiment of the present invention.

FIG. 8 is a configuration diagram of a pulse waveform selection unit of a pulse waveform processing device included in a pulse waveform measurement device according to a fifth embodiment of the present invention.

FIG. 9 is a configuration diagram of a synchronization signal generator used in a pulse waveform measurement device according to a sixth embodiment of the present invention.

FIG. 10 is another configuration diagram of the synchronization signal generator used in the pulse waveform measurement device according to the sixth embodiment of the present invention.

FIG. 11 is a diagram showing a simplified configuration of a conventional dye pulse laser device.

FIG. 12 is a structural diagram of a lens array as an example of a light splitter.

FIG. 13 is a view of the aperture as viewed from a surface on which a laser beam to be measured enters.

FIG. 14 is a side view of the aperture.

[Explanation of symbols]

Reference Signs List 1 pump laser device, 2 pump laser beam, 3 beam splitter, 7 optical fiber, 8 laser multistage amplifier, 4 light beam, 25 pulse waveform signal acquisition device, 26 pulse waveform signal acquisition device, 27 pulse waveform signal storage device, 28 pulse Waveform signal processing device, 29 pulse waveform signal display device, 30
Synchronization signal generator, 31 pulse waveform measurement synchronization signal, 32 screens, 33 display unit, 34 pulse waveform of light beam passing through element, 35 symbol corresponding to element number, 36 pulse width, 37 amplifier number, 3
8a Amplifier number display section, 38b Element number input section, 38c Optical fiber length input section, 39 Composite pulse waveform, 40 Line type for displaying pulse waveform, 41 Pulse rising time, 42 Pulse waveform display selection section, 43
Synthetic pulse rising time, 44 Synthetic pulse time axis, 45 pulse waveform selector, 46 Amplifier pulse waveform selector, 47 Synthetic pulse waveform selector, 48
Laser oscillation signal generator, 49 laser oscillation command signal,
50 Synchronous signal converter.

Claims (17)

[Claims] 1. An excitation laser device for emitting an excitation laser beam, and an optical splitter for splitting the emitted excitation laser beam into a plurality of light beams and condensing the plurality of light beams on an optical fiber leading to an amplifier, Pulse waveform detection means for detecting the pulse waveform of each of the divided excitation laser beams, synchronization signal generation means for generating a pulse waveform measurement synchronization signal, and a pulse waveform signal from the pulse waveform detection means in synchronization with the pulse waveform measurement synchronization signal Pulse waveform signal acquisition means, pulse waveform signal storage means for storing the acquired pulse waveform signal, displaying a plurality of pulse waveforms or a composite pulse waveform obtained by synthesizing a plurality of pulse waveforms based on the stored pulse waveform signal A pulse waveform measuring device comprising: a pulse waveform signal display unit for performing the following. 2. The method according to claim 1, wherein said pulse waveform signal storage means adds a number corresponding to said pulse waveform signal to a part of a file number when storing said pulse waveform signal in a file format. Item 2. The pulse waveform measuring device according to Item 1. 3. The pulse waveform measuring apparatus according to claim 1, further comprising a pulse waveform signal processing means for retrieving the stored pulse waveform signal and correcting a time axis. 4. The pulse waveform measuring apparatus according to claim 3, wherein said pulse waveform signal processing means has an input section for setting a number corresponding to said pulse waveform signal and a length of an optical fiber. . 5. The apparatus according to claim 1, wherein said pulse waveform signal processing means has a function of displaying only a specific pulse waveform among a plurality of pulse waveforms incident on a predetermined amplifier at said input section. Item 5. The pulse waveform measuring device according to item 3 or 4. 6. The pulse waveform signal processing means calls a plurality of stored pulse waveform signals according to an element number of the splitter set at the input section and a length of the optical fiber. 6. A function of synthesizing a pulse waveform incident on a predetermined amplifier by moving a time axis of the signal.
The pulse waveform measuring device according to any one of the above. 7. The pulse waveform signal processing means according to claim 3, wherein said pulse waveform signal processing means has a function of calculating a pulse width of said plurality of stored pulse waveforms or said composite pulse waveform. A pulse waveform measuring apparatus according to any one of the above. 8. A function for automatically reading a file by collating a number corresponding to the pulse waveform signal set in the input section with a file number in which the pulse waveform signal is stored, wherein the pulse waveform signal processing means automatically reads a file. The pulse waveform measuring device according to claim 3, further comprising: 9. The apparatus according to claim 1, wherein said pulse waveform signal display means has a function of displaying, on one screen, all pulse waveforms of a light beam that has passed through an element of said optical splitter. Pulse waveform measuring device. 10. The pulse waveform signal display means has a display function of dividing a light beam in the same manner as the element array of the light splitter and displaying a pulse waveform of a light beam passing through each element in accordance with an element array position. The pulse waveform measuring device according to claim 9, wherein: 11. The pulse waveform according to claim 9, wherein the pulse waveform signal display means has a display function of displaying a pulse width of the pulse waveform on the same screen as the pulse waveform. measuring device. 12. The pulse waveform signal display means has a function of displaying, on one screen, a plurality of pulse waveforms incident on a predetermined amplifier and a synthesized pulse waveform synthesized based on the plurality of pulse waveforms. The pulse waveform measuring device according to claim 1. 13. The apparatus according to claim 1, wherein said pulse waveform signal display means has a function of displaying a composite pulse waveform based on a plurality of pulse waveforms incident on all amplifiers on one screen. The pulse waveform measuring device according to the above. 14. The pulse waveform signal display means selects a screen for displaying all of a plurality of pulse waveforms, selects a screen for displaying a plurality of pulse waveforms of a predetermined amplifier and a composite pulse waveform, or combines all amplifiers. The pulse waveform measurement device according to claim 1, further comprising a selection unit that selects a screen on which a pulse waveform is displayed. 15. The synchronizing signal generating means includes a synchronizing signal converter for inputting a laser oscillation command signal output from a laser oscillation signal generating device for driving an excitation laser device and converting it into a pulse waveform measuring synchronizing signal. The pulse waveform measurement device according to claim 1, wherein the pulse waveform measurement synchronization signal is input to the pulse waveform signal capture device to capture a pulse waveform signal. 16. The synchronizing signal generating means measures a pulse waveform of a laser beam obtained by separating a part of a laser beam to be measured by a pulse waveform detector, and uses the measured pulse waveform as a pulse waveform measuring synchronization signal; 2. The pulse waveform measuring device according to claim 1, wherein the signal is input to the pulse waveform signal capturing device to capture a pulse waveform signal. 17. The apparatus according to claim 1, wherein a copper vapor laser device is used as the excitation laser device.
The pulse waveform measuring device according to any one of the above.