JP2000188113A - Totally solid lithium ion battery and its manufacture - Google Patents
Totally solid lithium ion battery and its manufactureInfo
- Publication number
- JP2000188113A JP2000188113A JP10366551A JP36655198A JP2000188113A JP 2000188113 A JP2000188113 A JP 2000188113A JP 10366551 A JP10366551 A JP 10366551A JP 36655198 A JP36655198 A JP 36655198A JP 2000188113 A JP2000188113 A JP 2000188113A
- Authority
- JP
- Japan
- Prior art keywords
- solid
- ion battery
- electrolyte layer
- solid electrolyte
- lithium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 title abstract 2
- 229910001416 lithium ion Inorganic materials 0.000 title abstract 2
- 239000007787 solid Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000007784 solid electrolyte Substances 0.000 abstract 3
- 239000010419 fine particle Substances 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 1
- 239000003792 electrolyte Substances 0.000 abstract 1
- 150000002642 lithium compounds Chemical class 0.000 abstract 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
- 150000004706 metal oxides Chemical class 0.000 abstract 1
- 238000000465 moulding Methods 0.000 abstract 1
- KHDSWONFYIAAPE-UHFFFAOYSA-N silicon sulfide Chemical compound S=[Si]=S KHDSWONFYIAAPE-UHFFFAOYSA-N 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- Y02E60/12—
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Physical Vapour Deposition (AREA)
- Primary Cells (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、全固体リチウムイ
オン電池およびその製造方法に係り、特に、陽極の外周
を被覆する固体電解質層を改良した全固体リチウムイオ
ン電池およびその製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an all-solid lithium-ion battery and a method of manufacturing the same, and more particularly, to an all-solid lithium-ion battery having an improved solid electrolyte layer covering the outer periphery of an anode and a method of manufacturing the same.
【０００２】[0002]
【従来の技術】メモリやプロセッサを搭載し、情報の記
憶や処理機能を有するＩＣカードが、マネーカードや運
転免許証などとして開発されている。この種のＩＣカー
ドとしては電池搭載型のものと電池不搭載型のものとが
あり、このうち電池搭載型のＩＣカードに使用する電池
としては、薄いＩＣカードに搭載しうる薄型のもので、
しかも人が携行するものであるため安全性の高いもので
ある必要がある。2. Description of the Related Art An IC card equipped with a memory and a processor and having a function of storing and processing information has been developed as a money card and a driver's license. This type of IC card includes a battery-mounted type and a non-battery-mounted type. Among them, the battery used for the battery-mounted type IC card is a thin type that can be mounted on a thin IC card,
Moreover, it must be highly secure because it is carried by people.
【０００３】このような薄型で安全性の高い電池とし
て、液を使用しないで封止が簡単な全固体リチウムイオ
ン電池が知られている。[0003] As such a thin and highly safe battery, an all-solid-state lithium ion battery that is easily sealed without using a liquid is known.
【０００４】この全固体リチウムイオン電池には、一例
として図４に示すような構成とされたものがある。すな
わち、この全固体リチウムイオン電池のステンレスなど
からなり陽極を兼ねる基板１上に陽極活物質層２が重積
されており、この陽極活物質層２の外周は固体電解質層
３により被覆されている。また、この固体電解質層３上
には負極活物質層４が積層されており、この負極活物質
層４の外周は負極５により被覆されている。さらに、前
記固体電解質層３および前記負極５の外周は耐湿用被覆
層６により被覆されている。[0004] As an example of this all-solid-state lithium ion battery, there is one having a configuration as shown in FIG. That is, an anode active material layer 2 is stacked on a substrate 1 made of stainless steel or the like of this all-solid lithium-ion battery and also serving as an anode, and the outer periphery of the anode active material layer 2 is covered with a solid electrolyte layer 3. . A negative electrode active material layer 4 is laminated on the solid electrolyte layer 3, and the outer periphery of the negative electrode active material layer 4 is covered with a negative electrode 5. Further, the outer periphery of the solid electrolyte layer 3 and the outer periphery of the negative electrode 5 are covered with a moisture-resistant coating layer 6.
【０００５】[0005]
【発明が解決しようとする課題】ところで、前述した記
全固体リチウムイオン電池の固体電解質層３としては、
ＬｉxＡｌyＴｉz(ＰＯ4)3 やこのＬｉxＡｌyＴｉz(ＰＯ
4)3 にＴｉＯ2 やＺｒＯ2 を加えた溶融混合物を固化し
たセラミック材が知られているが、このセラミック材は
もろいため、１００μｍ以下の厚さの薄板や薄膜を形成
することが困難であるし、また、逆にこのセラミック材
をターゲットなどの蒸着用ソースに適した比較的厚さの
厚い板に形成すると、内部ひずみが生じてひび割れなど
の生じるおそれがあった。By the way, as the solid electrolyte layer 3 of the above-mentioned all-solid-state lithium-ion battery,
Li x Al y Ti z (PO 4) 3 and the Li x Al y Ti z (PO
4 ) A ceramic material obtained by solidifying a molten mixture obtained by adding TiO 2 or ZrO 2 to 3 is known, but since this ceramic material is brittle, it is difficult to form a thin plate or a thin film having a thickness of 100 μm or less. Conversely, if this ceramic material is formed into a relatively thick plate suitable for a source for vapor deposition such as a target, internal strain may occur and cracks may occur.
【０００６】したがって、膜厚がきわめて薄く、しかも
高いイオン導電性を有する固体電解質層を形成すること
ができなかった。Therefore, it has not been possible to form a solid electrolyte layer having a very small thickness and high ionic conductivity.
【０００７】本発明は、このような点に鑑み、膜厚がき
わめて薄く、しかも高いイオン導電性を有する固体電解
質層を有する全固体リチウムイオン電池およびその製造
方法を提供することを目的としている。SUMMARY OF THE INVENTION In view of the foregoing, an object of the present invention is to provide an all-solid lithium-ion battery having a solid electrolyte layer having a very thin film thickness and high ionic conductivity, and a method for manufacturing the same.
【０００８】[0008]
【課題を解決するための手段】前述した目的を達成する
ため請求項１に係る本発明の全固体リチウムイオン電池
の特徴は、固体電解質層が、リチウム化合物、金属酸化
物および硫化化合物のうちの少なくとも２種類の粉体か
らなる成型物を蒸着用ソースとして飛散させてなる点に
ある。そして、このような構成を採用したことにより、
均一に混合された複数種の粉体が相互に固着されるよう
にして固体電解質層が形成されるため、膜厚がきわめて
薄く、しかも高いイオン導電性を有する固体電解質層と
することができる。According to a first aspect of the present invention, there is provided an all-solid lithium-ion battery according to the present invention, wherein the solid electrolyte layer comprises a lithium compound, a metal oxide and a sulfide compound. The point is that a molded product made of at least two kinds of powders is scattered as a vapor deposition source. And by adopting such a configuration,
Since the solid electrolyte layer is formed such that a plurality of powders uniformly mixed are fixed to each other, the solid electrolyte layer can have a very small thickness and high ionic conductivity.
【０００９】請求項２に係る本発明の全固体リチウムイ
オン電池の特徴は、リチウム化合物、金属酸化物または
硫化化合物の粉体の粒径を０．５〜３００μｍとした点
にある。そして、このような構成を採用したことによ
り、複数種の粉体を均一に混合して相互に良好に固着す
ることができる。A feature of the all-solid-state lithium ion battery of the present invention according to claim 2 is that the particle diameter of the powder of the lithium compound, metal oxide or sulfide compound is 0.5 to 300 μm. By adopting such a configuration, a plurality of types of powder can be uniformly mixed and fixed to each other.
【００１０】請求項３に係る本発明の全固体リチウムイ
オン電池の特徴は、固体電解質層を形成するための粉体
を、セラミックを粉砕したものとした点にある。そし
て、このような構成を採用したことにより、結晶化した
ものを粉砕して利用しているので、複数種の粉体をさら
に均一に混合して相互に良好に固着することができる。A feature of the all-solid-state lithium ion battery according to the third aspect of the present invention resides in that the powder for forming the solid electrolyte layer is formed by pulverizing ceramic. And, by adopting such a configuration, since the crystallized material is pulverized and used, a plurality of kinds of powders can be mixed more uniformly and fixed to each other well.
【００１１】請求項４に係る本発明の全固体リチウムイ
オン電池の製造方法の特徴は、リチウム化合物、金属酸
化物および硫化化合物のうちの少なくとも２種類の粉体
を混合し、この混合物に熱および圧力を作用させて成型
し、この成型物を蒸着用ソースとして飛散させて固体電
解質層を形成した点にある。そして、このような構成を
採用したことにより、膜厚がきわめて薄く、しかも高い
イオン導電性を有する固体電解質層を形成することがで
きる。A feature of the method for manufacturing an all-solid lithium-ion battery according to the present invention according to claim 4 is that at least two kinds of powders of a lithium compound, a metal oxide and a sulfide compound are mixed, and the mixture is subjected to heat and heat. Molding is performed by applying pressure, and the molded product is scattered as a deposition source to form a solid electrolyte layer. By adopting such a configuration, it is possible to form a solid electrolyte layer having a very small thickness and high ionic conductivity.
【００１２】請求項５に係る本発明の全固体リチウムイ
オン電池の製造方法の特徴は、リチウム化合物、金属酸
化物および硫化化合物のうちの少なくとも２種類を含む
セラミックを形成し、このセラミックを粉砕して粉体を
形成し、この粉体に熱および圧力を作用させて成型し、
この成型物を蒸着用ソースとして飛散させて固体電解質
層を形成した点にある。そして、このような構成を採用
したことにより、複数種の粉体をさらに均一に混合して
相互に良好に固着させて固体電解質層を形成することが
できる。According to a fifth aspect of the present invention, there is provided a method for manufacturing an all-solid lithium-ion battery, comprising forming a ceramic containing at least two of lithium compounds, metal oxides and sulfide compounds, and pulverizing the ceramic. To form a powder, and apply heat and pressure to the powder to form
The point is that this molded product was scattered as a deposition source to form a solid electrolyte layer. By adopting such a configuration, a plurality of types of powders can be more uniformly mixed and fixed to each other to form a solid electrolyte layer.
【００１３】[0013]
【発明の実施の形態】本発明は前述した図４に示す全固
体リチウムイオン電池の構成に適用できるが、図３に示
す構成にも適用できる。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention can be applied to the configuration of the all-solid-state lithium ion battery shown in FIG. 4 described above, but can also be applied to the configuration shown in FIG.
【００１４】そこでまず、この図３に示す全固体リチウ
ムイオン電池の構成について説明する。First, the configuration of the all solid state lithium ion battery shown in FIG. 3 will be described.
【００１５】すなわち、この全固体リチウムイオン電池
の基板１上には、陽極７と負極５とが相互に間隔を隔て
て積層されており、前記陽極７上には、陽極７より平面
寸法の小さい陽極活物質層２が積層されている。また、
前記陽極７および陽極活物質層２の外周は、前記陽極７
の一部を除き固体電解質層３により被覆されている。さ
らに、前記負極５と前記固体電解質層３の各一部は、負
極活物質４により被覆されている。さらにまた、前記陽
極７、負極５の各一部ならびに前記負極活物質４の外周
は耐湿用被覆層６により被覆されている。That is, an anode 7 and a negative electrode 5 are laminated on the substrate 1 of this all-solid-state lithium-ion battery at a distance from each other, and the anode 7 has a smaller planar dimension than the anode 7. The anode active material layer 2 is laminated. Also,
The outer periphery of the anode 7 and the anode active material layer 2 is
Are covered with the solid electrolyte layer 3 except for a part of the solid electrolyte layer. Further, a part of each of the negative electrode 5 and the solid electrolyte layer 3 is covered with a negative electrode active material 4. Furthermore, a part of each of the anode 7 and the anode 5 and the outer periphery of the anode active material 4 are covered with a moisture-resistant coating layer 6.
【００１６】前記陽極活物質層２としては、Ｖ2Ｏx（ｘ
＝１〜５）、ＬｉxＭｎＯy、ＬｉxＣｏＯy 、ＬｉＮｉ
Ｏy、 ＬｉxＦｅＯ2、Ｌｉx ＴｉＯy 、ＬｉxＳｃＯy、
ＬｉxＹＯy などが使用される。As the anode active material layer 2, V 2 O x (x
= 1-5), Li x MnO y , Li x CoO y , LiNi
O y , Li x FeO 2 , Li x TiO y , Li x ScO y ,
Li x YO y or the like is used.
【００１７】また、前記負極活物質層４としては、Ｌ
ｉ、Ｌｉ−Ａｌ、ＡｌにＬｉを拡散させた材料、各種グ
ラファイトおよびカーボンならびにこれらの類似体、あ
るいはスズ酸化物化合物であるＬｉxＳｉyＯz などが使
用される。Further, as the negative electrode active material layer 4, L
i, Li-Al, a material in which Li is diffused in Al, various graphites and carbons and analogs thereof, or a tin oxide compound such as Li x Si y O z are used.
【００１８】さらに、前記基板１としては、厚さ１０〜
５００μｍのステンレス、Ｃｕ、Ｎｉ、Ｖ、Ａｕ、Ｐ
ｔ、Ａｌなど、または、ポリアミド、ポリイミド、ＰＥ
Ｔ、ＰＰＳ、ポリプロピレンなどのフィルム、あるい
は、ガラスやシリコン板上にＣｕ、Ｎｉ、Ｖ、Ａｌ、Ｐ
ｔ、Ａｕなどの金属を蒸着したものなどが使用される。Further, the substrate 1 has a thickness of 10 to 10.
500 μm stainless steel, Cu, Ni, V, Au, P
t, Al, etc., or polyamide, polyimide, PE
Cu, Ni, V, Al, P on a film such as T, PPS, polypropylene, or glass or silicon plate
What deposited metal, such as t and Au, etc. are used.
【００１９】前述した全固体リチウムイオン電池におい
て前記固体電解質層３は以下のようにして形成される。In the above-described all-solid lithium ion battery, the solid electrolyte layer 3 is formed as follows.
【００２０】すなわち、固体電解質層３としては、ま
ず、ターゲット材料としてＬｉx Ｍ（Ｍ＝ＰＯ4 、Ｓ、
ＳｉＯ4 など）などのリチウム化合物、Ａｌ2Ｏ3、Ｔｉ
Ｏ2 、ＳｉＯ2 、ＺｒＯ2 、Ｆｅ2Ｏ3、Ｇａ2Ｏ3、Ｂ2
Ｏ3、Ｉｎ2Ｏ3などの金属酸化物、および、ＭxＳ （Ｍ
＝Ａｌ、Ｔｉ、Ｚｒ、Ｆｅ、Ｇａ、Ｉｎ Ｘ＝１〜５）
などの硫化化合物のうちの少なくとも２種類の粉体から
なる成型物を形成する。That is, as the solid electrolyte layer 3, Li x M (M = PO 4 , S,
Lithium compounds such as SiO 4 , Al 2 O 3 , Ti
O 2 , SiO 2 , ZrO 2 , Fe 2 O 3 , Ga 2 O 3 , B 2
Metal oxides such as O 3 and In 2 O 3 , and M x S (M
= Al, Ti, Zr, Fe, Ga, In X = 1-5)
A molded product made of at least two kinds of powders of the sulfide compound such as
【００２１】このための材料の一例を挙げると、リチウ
ム化合物としてＬｉ3ＰＯ4を６０ｍｏｌ％、金属酸化物
としてＡｌ2Ｏ3およびＴｉＯ2 を、Ａｌ2Ｏ3については
６ｍｏｌ％、ＴｉＯ2 については３４ｍｏｌ％の粉体を
相互に混合する。このとき、各材料の粉体の粉径は、
０．５〜３００μｍの間であることが好ましい。これ
は、各材料を均一に分散させるためには粉径は小さいほ
どよいが、成型物を形成するためには、ある程度大きな
粒径が必要となるからである。[0021] As an example of the material for this, 60 mol% of Li 3 PO 4 as the lithium compound, the Al 2 O 3 and TiO 2 as the metal oxide, 6 mol% for Al 2 O 3, for TiO 2 is 34 mol% of the powders are mixed with one another. At this time, the powder diameter of the powder of each material is
It is preferably between 0.5 and 300 μm. This is because the smaller the powder diameter is, the better in order to uniformly disperse the respective materials, but a certain large particle diameter is required in order to form a molded product.
【００２２】なお、前述した粉体を形成する前に、同一
の材料により圧力１０ｋｇ／ｃｍ2〜２０ｔ／ｃｍ2 、
温度０℃〜１０００℃でセラミックを形成し、このセラ
ミックを０．５〜３００μｍの粒径の粉体となるように
粉砕してもよい。このように予めセラミックを形成する
ことにより、さらなる均質化を可能とすることができ
る。Before the powder is formed, the same material is used to apply a pressure of 10 kg / cm 2 to 20 t / cm 2 ,
A ceramic may be formed at a temperature of 0 ° C. to 1000 ° C., and the ceramic may be pulverized to a powder having a particle size of 0.5 to 300 μm. By thus forming the ceramic in advance, further homogenization can be made possible.
【００２３】そして、これらの材料を均一に混合した
後、この材料に、図１に示すように、１０ｋｇ／ｃｍ2
〜２０ｔ／ｃｍ2 の圧力を０℃〜１０００℃程度の温度
範囲において作用させ、各粉体Ａ，Ｂ，Ｃを相互に固着
させることにより、直径３インチで厚さ５ｍｍの全体と
して固体のターゲットとしての成型物１０を形成するこ
とができる。After mixing these materials uniformly, as shown in FIG. 1, 10 kg / cm 2
By applying a pressure of about 20 t / cm 2 in a temperature range of about 0 ° C. to 1000 ° C. and fixing the powders A, B, and C to each other, a solid target having a diameter of 3 inches and a thickness of 5 mm is obtained. The molded article 10 can be formed.
【００２４】つぎに、陽極活物質層２上に固体電解質層
３を積層するための蒸着装置を図２により説明する。Next, a vapor deposition apparatus for laminating the solid electrolyte layer 3 on the anode active material layer 2 will be described with reference to FIG.
【００２５】蒸着装置１１は密閉ケーシング１２を有し
ており、この密閉ケーシング１２内の上部には、図示を
省略した陽極、陰極、陽極活物質層などが積層された基
板１が支持されており、この基板１の陽極活物質層上の
みに固体電解質層を蒸着しうるように蒸着不要の部位は
図示しないマスクにより被覆されている。The vapor deposition apparatus 11 has a closed casing 12, and a substrate 1 on which an anode, a cathode, an anode active material layer and the like (not shown) are laminated is supported on an upper part in the closed casing 12. In order to deposit a solid electrolyte layer only on the anode active material layer of the substrate 1, portions not requiring deposition are covered with a mask (not shown).
【００２６】前記密閉ケーシング１２内の下部には、外
部のＥＢ電源１３により励起される電子ビーム銃１４に
よって加熱されるボート１５が配設されており、このボ
ート１５には、蒸着用ソースすなわちターゲットとして
の前記成型物１０が配設されている。A boat 15 heated by an electron beam gun 14 excited by an external EB power supply 13 is provided at a lower portion in the closed casing 12. The molded article 10 as above is provided.
【００２７】また、前記基板１に向けて酸素ラジカルを
供給する酸素ラジカル発生装置１６が前記密閉ケーシン
グ１２の外部から内部に向けて配設されており、この酸
素ラジカル発生装置１６には、酸素供給源１７が接続さ
れるとともに、高周波電源１８が配設されている。さら
に、前記密閉ケーシング１２内には、上下を部分的に仕
切るシャッタ１９が配設されている。An oxygen radical generator 16 for supplying oxygen radicals to the substrate 1 is provided from the outside of the closed casing 12 to the inside thereof. A power source 17 is connected, and a high-frequency power supply 18 is provided. Further, a shutter 19 for partially partitioning the upper and lower portions is provided in the closed casing 12.
【００２８】そして、ＥＢ電源１３から供給された電力
により励起される電子ビーム銃１４から発生した電子ビ
ームをボート１５に供給してターゲットとしての前記成
型物１０を蒸発させＥＢ蒸着させるとともに、酸素ラジ
カル発生装置１６により基板１に向けてアシストとして
の酸素ラジカルを供給することにより、基板１上の陽極
活物質層を被覆するように固体電解質層が形成される。An electron beam generated from an electron beam gun 14 excited by electric power supplied from an EB power supply 13 is supplied to a boat 15 to evaporate the molded article 10 as a target to perform EB vapor deposition and oxygen radicals. By supplying oxygen radicals as an assist toward the substrate 1 by the generator 16, a solid electrolyte layer is formed so as to cover the anode active material layer on the substrate 1.
【００２９】このようにして形成された陽極活物質層
は、各成分が均質化されているので、膜厚を０．２〜１
０μｍと薄くし、しかも、イオン導電性のよい固体電解
質層を形成することができる。The anode active material layer thus formed has a thickness of 0.2 to 1 since each component is homogenized.
A solid electrolyte layer which is as thin as 0 μm and has good ionic conductivity can be formed.
【００３０】したがって、このような固体電解質層を有
する本実施形態の全固体リチウムイオン電池は、充放電
サイクル寿命が長く、かつ、電流密度を高くすることが
できる。Therefore, the all-solid lithium-ion battery of the present embodiment having such a solid electrolyte layer can have a long charge / discharge cycle life and a high current density.
【００３１】本実施形態の全固体リチウムイオン電池の
充放電試験を行って電池特性を測定した結果、下表に示
すように、１ｃｍ2 当たり２００μＡの電流を流して
も、電池容量に大きな変化はみられなかった。As a result of performing a charge / discharge test of the all-solid-state lithium-ion battery of this embodiment and measuring the battery characteristics, as shown in the following table, even when a current of 200 μA per 1 cm 2 was passed, a large change in the battery capacity was observed. I didn't see it.
【００３２】 なお、本発明は、前述した実施の形態に限定されるもの
ではなく、必要に応じて種々の変更が可能である。たと
えば、本発明は、前述したＥＢ蒸着法に限定されるもの
ではなく、スパッタ法、レーザアブレーション法など他
の成膜方法も適用可能である。[0032] Note that the present invention is not limited to the above-described embodiment, and various modifications can be made as necessary. For example, the present invention is not limited to the EB vapor deposition method described above, and other film forming methods such as a sputtering method and a laser ablation method can be applied.
【００３３】[0033]
【発明の効果】以上説明したように本発明によれば、膜
厚がきわめて薄く、しかも高いイオン導電性を有する固
体電解質層を有する全固体リチウムイオン電池およびそ
の製造方法を提供することができる。As described above, according to the present invention, it is possible to provide an all-solid lithium-ion battery having a solid electrolyte layer having a very thin film thickness and high ionic conductivity, and a method for manufacturing the same.
【００３４】すなわち、本発明の全固体リチウムイオン
電池は、固体電解質層が、リチウム化合物、金属酸化物
および硫化化合物のうちの少なくとも２種類の粉体から
なる成型物を蒸着用ソースとして飛散させているので、
均一に混合された複数種の粉体が相互に固着されるよう
にして固体電解質層が形成されるため、膜厚がきわめて
薄く、しかも高いイオン導電性を有する固体電解質層と
することができる。That is, in the all-solid-state lithium ion battery of the present invention, the solid electrolyte layer scatters a molded product composed of at least two kinds of powders of a lithium compound, a metal oxide and a sulfide compound as a deposition source. Because
Since the solid electrolyte layer is formed such that a plurality of powders uniformly mixed are fixed to each other, the solid electrolyte layer can have a very small thickness and high ionic conductivity.
【００３５】また、リチウム化合物、金属酸化物または
硫化化合物の粉体の粒径を０．５〜３００μｍとすれ
ば、複数種の粉体を均一に混合して相互に良好に固着す
ることができる。When the particle diameter of the lithium compound, metal oxide or sulfide compound powder is 0.5 to 300 μm, a plurality of kinds of powders can be uniformly mixed and fixed to each other well. .
【００３６】さらに、固体電解質層を形成するための粉
体を、セラミックを粉砕したものとすれば、一度結晶化
したものを粉砕して利用しているので、複数種の粉体を
さらに均一に混合して相互に良好に固着することができ
る。Furthermore, if the powder for forming the solid electrolyte layer is a powder obtained by pulverizing a ceramic, a powder that has been crystallized once is used after being pulverized. They can be mixed and fixed to each other well.
【００３７】一方、本発明の全固体リチウムイオン電池
の製造方法は、リチウム化合物、金属酸化物および硫化
化合物のうちの少なくとも２種類の粉体を混合し、この
混合物に熱および圧力を作用させて成型し、この成型物
を蒸着用ソースとして飛散させて固体電解質層を形成し
たので、膜厚がきわめて薄く、しかも高いイオン導電性
を有する固体電解質層を形成することができる。On the other hand, in the method of manufacturing an all solid lithium ion battery according to the present invention, at least two kinds of powders of a lithium compound, a metal oxide and a sulfide compound are mixed, and the mixture is subjected to heat and pressure. Since the solid electrolyte layer was formed by molding and scattering the molded product as a source for vapor deposition, a solid electrolyte layer having a very small film thickness and high ionic conductivity can be formed.
【００３８】また、リチウム化合物、金属酸化物および
硫化化合物のうちの少なくとも２種類を含むセラミック
を形成し、このセラミックを粉砕して粉体を形成し、こ
の粉体に熱および圧力を作用させて成型し、この成型物
を蒸着用ソースとして飛散させて固体電解質層を形成す
れば、複数種の粉体をさらに均一に混合して相互に良好
に固着させて固体電解質層を形成することができる。Further, a ceramic containing at least two of lithium compounds, metal oxides and sulfide compounds is formed, and this ceramic is pulverized to form a powder, and heat and pressure are applied to the powder to form a powder. If a solid electrolyte layer is formed by molding and scattering this molded product as a source for vapor deposition, it is possible to form a solid electrolyte layer by mixing a plurality of types of powders more uniformly and fixing them well to each other. .
【図１】 本発明に係る全固体リチウムイオン電池を製
造するための蒸着用ソースの実施形態を示す説明図FIG. 1 is an explanatory view showing an embodiment of a deposition source for manufacturing an all-solid-state lithium-ion battery according to the present invention.
【図２】 本発明に係る全固体リチウムイオン電池を製
造するためのスパッタ装置の実施形態を示す正面図FIG. 2 is a front view showing an embodiment of a sputtering apparatus for manufacturing an all solid-state lithium ion battery according to the present invention.
【図３】 本発明に係る全固体リチウムイオン電池の実
施形態を示す縦断面図FIG. 3 is a longitudinal sectional view showing an embodiment of the all solid state lithium ion battery according to the present invention.
【図４】 本発明および従来の全固体リチウムイオン電
池の一例を示す縦断面図FIG. 4 is a longitudinal sectional view showing an example of the present invention and a conventional all solid-state lithium ion battery.
１ 基板 ２ 陽極活物質層 ３ 固体電解質層 ４ 負極活物質層 ５ 負極 ６ 体質用被覆層 ７ 陽極 １０ 成型物（ターゲット） １１ 蒸着装置 １２ 密閉ケーシング １３ ＥＢ電源 １４ 電子ビーム銃 １５ ボート １６ 酸素ラジカル発生装置 １７ 酸素供給源 １８ 高周波電源 １９ シャッタ DESCRIPTION OF SYMBOLS 1 Substrate 2 Anode active material layer 3 Solid electrolyte layer 4 Negative electrode active material layer 5 Negative electrode 6 Constructive coating layer 7 Anode 10 Molded object (target) 11 Vapor deposition device 12 Closed casing 13 EB power supply 14 Electron beam gun 15 Boat 16 Oxygen radical generation Device 17 Oxygen supply source 18 High frequency power supply 19 Shutter
─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成１１年１月１８日（１９９９．１．１
８）[Submission date] January 18, 1999 (1999.1.1)
8)
【手続補正１】[Procedure amendment 1]
【補正対象書類名】図面[Document name to be amended] Drawing
【補正対象項目名】図２[Correction target item name] Figure 2
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【図２】 FIG. 2
フロントページの続き Ｆターム(参考） 4G030 AA02 AA16 AA36 AA41 BA03 CA04 4K029 BA64 BC03 CA07 DB05 DB21 DC05 5H024 AA12 BB00 BB01 BB05 BB07 BB18 CC04 FF23 HH13 Continued on the front page F term (reference) 4G030 AA02 AA16 AA36 AA41 BA03 CA04 4K029 BA64 BC03 CA07 DB05 DB21 DC05 5H024 AA12 BB00 BB01 BB05 BB07 BB18 CC04 FF23 HH13
Claims (5)
体リチウムイオン電池において、前記固体電解質層は、
リチウム化合物、金属酸化物および硫化化合物のうちの
少なくとも２種類の粉体からなる成型物を蒸着用ソース
として飛散させてなることを特徴とする全固体リチウム
イオン電池。1. In an all-solid lithium-ion battery in which an electrolyte is formed by a solid electrolyte, the solid electrolyte layer comprises:
An all-solid-state lithium-ion battery, wherein a molded product comprising at least two kinds of powders of a lithium compound, a metal oxide, and a sulfide compound is scattered as a deposition source.
化合物の粉体の粒径を０．５〜３００μｍとしたことを
特徴とする請求項１に記載の全固体リチウムイオン電
池。2. The all-solid lithium ion battery according to claim 1, wherein the particle diameter of the lithium compound, metal oxide or sulfide compound powder is 0.5 to 300 μm.
されている請求項１または請求項２に記載の全固体リチ
ウムイオン電池。3. The all-solid-state lithium-ion battery according to claim 1, wherein the powder is obtained by pulverizing a ceramic.
体リチウムイオン電池の製造方法において、リチウム化
合物、金属酸化物および硫化化合物のうちの少なくとも
２種類の粉体を混合し、この混合物に熱および圧力を作
用させて成型し、この成型物を蒸着用ソースとして飛散
させて固体電解質層を形成することを特徴とする全固体
リチウムイオン電池の製造方法。4. A method for producing an all solid lithium ion battery in which an electrolyte is formed by a solid electrolyte, wherein at least two kinds of powders of a lithium compound, a metal oxide and a sulfide compound are mixed, and the mixture is subjected to heat and pressure. And forming the solid electrolyte layer by scattering the molded product as a deposition source to form a solid electrolyte layer.
体リチウムイオン電池の製造方法において、リチウム化
合物、金属酸化物および硫化化合物のうちの少なくとも
２種類を含むセラミックを形成し、このセラミックを粉
砕して粉体を形成し、この粉体に熱および圧力を作用さ
せて成型し、この成型物を蒸着用ソースとして飛散させ
て固体電解質層を形成することを特徴とする全固体リチ
ウムイオン電池の製造方法。5. A method for manufacturing an all-solid-state lithium-ion battery in which an electrolyte is formed by a solid electrolyte, comprising forming a ceramic containing at least two of a lithium compound, a metal oxide and a sulfide compound, and crushing the ceramic. A method for producing an all-solid lithium-ion battery, comprising: forming a powder, applying heat and pressure to the powder, molding the powder, and scattering the molded product as a deposition source to form a solid electrolyte layer. .
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10366551A JP2000188113A (en) | 1998-12-24 | 1998-12-24 | Totally solid lithium ion battery and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10366551A JP2000188113A (en) | 1998-12-24 | 1998-12-24 | Totally solid lithium ion battery and its manufacture |
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| Publication Number | Publication Date |
|---|---|
| JP2000188113A true JP2000188113A (en) | 2000-07-04 |
Family
ID=18487074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10366551A Pending JP2000188113A (en) | 1998-12-24 | 1998-12-24 | Totally solid lithium ion battery and its manufacture |
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| Country | Link |
|---|---|
| JP (1) | JP2000188113A (en) |
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