JP2000183009A - Substrate-processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate-processing device wherein the weight of a rotator is reduced for smaller device. SOLUTION: An induction motor 1, comprising a rotator 3 formed into disc form from a conductive material and a stator 5 comprising a plurality of induction coils 9, wherein a magnetic field generated under polyphase current crosses the rotator 3 provided concentrically with the rotator 3 while being so provided as to rotate in the circumferential direction, a holding mechanism 7 provided at the rotator 3 which holds a substrate, are provided. Since the rotator 3 is configured of just a conductive material instead of simply a ferromagnetic body, its weight is lighter, and the substrate-processing device is made smaller using the induction motor.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning process for a substrate by rotating a semiconductor substrate, a glass substrate for a liquid crystal display, a glass substrate for a photomask, a substrate for an optical disk, etc. (hereinafter simply referred to as a substrate). The present invention relates to a substrate processing apparatus that performs a predetermined process such as a coating process of a coating liquid or a coating liquid.

[0002]

2. Description of the Related Art As a conventional substrate processing apparatus of this type, for example, there is one as disclosed in Japanese Patent Application Laid-Open No. Hei 10-112453.

This device comprises a rotor having a hollow part, a rotary motor provided concentrically with the rotor and having a stator having a hollow part, a support provided on the rotor and supporting a substrate. And a member. A plurality of permanent magnets are embedded in the rotor in a ring shape at regular intervals with their polarities inverted, and a plurality of coils are arranged in the stator in a ring shape. These coils are configured to be able to reverse the polarity by switching the direction of the current flowing through each of them, and are also divided into blocks each having a certain number, so that the polarity is reversed for each coil block. .

[0004] When processing a substrate by the apparatus configured as described above, the substrate is supported by a support member, and the polarity of each coil block is switched in a certain order. Then, since the permanent magnet of the rotor repels and attracts each coil block, the rotor is rotated in the direction of the polarity switching order, and the substrate is rotated in that direction.

[0005]

However, the prior art having such a structure has the following problems. That is, it is necessary to arrange a ferromagnetic material such as a permanent magnet capable of obtaining a sufficient magnetic flux in the rotor in order to increase the repulsion / attraction force with the stator. There is a problem that becomes large.

The present invention has been made in view of such circumstances, and has as its object to provide a substrate processing apparatus capable of reducing the weight of a rotor and reducing the size of the apparatus.

[0007]

The present invention has the following configuration in order to achieve the above object. In other words, the invention according to claim 1 is a substrate processing apparatus for rotating a substrate and performing a predetermined process on the substrate, wherein the rotor is formed of a conductive material in a disk shape, and the same as the rotor. A stator provided with a core and having a plurality of induction coils arranged in a circumferential direction of the rotor while a magnetic field generated by supplying a polyphase alternating current traverses the rotor; A motor is provided, and substrate holding means provided on the rotor for holding a substrate is provided.

[0008] The invention described in claim 2 is the first invention.
In the substrate processing apparatus described in (1), radial fins extending from a center of rotation to an outer peripheral portion are provided on a peripheral portion of the rotor.

[0009] The invention described in claim 3 is the first invention.
Alternatively, in the substrate processing apparatus according to claim 2, the rotor is supported by a static pressure gas bearing with respect to a stator of the induction rotary motor.

According to a fourth aspect of the present invention, there is provided a substrate processing apparatus for performing predetermined processing on a substrate by rotating the substrate, the substrate processing apparatus having a disk shape and having turbine blades all around the circumference. A fluid motor including a rotating body, a casing provided concentrically with the rotating body, surrounding a circumferential direction of the rotating body, and having a nozzle having a nozzle for supplying a fluid to the turbine blade; and a fluid motor provided with the rotating body. And substrate holding means for holding the substrate.

[0011] The invention described in claim 5 is the same as in claim 4.
In the substrate processing apparatus described in (1), radial fins extending from a center of rotation to an outer peripheral portion are provided on a peripheral portion of the rotating body.

[0012] The invention described in claim 6 is the invention according to claim 4.
Alternatively, in the substrate processing apparatus according to claim 5, the rotating body is supported by a hydrostatic gas bearing on a casing of the fluid motor.

[0013]

The operation of the first aspect of the invention is as follows. When a rotating magnetic field is generated by a polyphase alternating current on a stator of an induction rotary motor having a rotor and a stator, the magnetic field moves across a conductive rotor, so that an induced electromotive force is generated by electromagnetic induction. As a result, an eddy current is generated in the rotor. The eddy current acts on the magnetic flux of the induction coil of the stator to generate a rotating force on the rotor in the same direction as the moving direction of the magnetic field. Therefore, the substrate held by the substrate holding means of the rotor can be rotated. The rotor only needs to generate an induced electromotive force by electromagnetic induction by a plurality of induction coils, and may be a conductive material instead of a ferromagnetic material such as a permanent magnet.

According to the second aspect of the present invention, when the rotor having the radial fins at the periphery rotates, the rotor operates as a centrifugal exhaust fan. Therefore, the cleaning liquid and the coating liquid supplied to the substrate for the predetermined processing can be discharged to the surroundings.

According to the third aspect of the present invention, the bearing of the rotor with respect to the stator is a static pressure gas bearing, so that the frictional resistance with respect to the stator when the rotor rotates can be reduced. Can be rotated at high speed. Further, it is possible to prevent the cleaning liquid or the coating liquid from entering the gap between the rotor and the stator.

The operation of the invention described in claim 4 is as follows. When the fluid is supplied from the nozzle to the casing of the fluid motor, impact / reaction is applied to the turbine blade, and as a result, a rotating force is applied to the rotating body. Therefore, the substrate held by the substrate holding means of the rotating body can be rotated. The rotating body only needs to be given a rotating force by a fluid, does not require a ferromagnetic body such as a permanent magnet, and simply has turbine blades provided on the entire circumference.

According to the fifth aspect of the present invention, when the rotating body having the radial fins on the peripheral edge rotates, the rotating body operates as an exhaust fan. Therefore, the cleaning liquid and the coating liquid supplied to the substrate for the predetermined processing can be discharged to the surroundings.

According to the sixth aspect of the present invention, the bearing of the rotating body with respect to the casing is a static pressure gas bearing, so that the frictional resistance with respect to the casing when the rotating body rotates can be reduced. Can be rotated at high speed. Further, it is possible to prevent the cleaning liquid or the coating liquid from entering the gap between the rotating body and the casing.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. <First Embodiment> FIG. 1 is a longitudinal sectional view showing a schematic configuration of a substrate processing apparatus according to the present embodiment, FIG. 2 is a longitudinal sectional view showing a main part of an induction rotary motor, and FIG. FIG. 4 is a plan view showing the arrangement of the induced coils, and FIG. 4 is an explanatory view of the operation of the holding mechanism.

In this substrate processing apparatus, a substrate W is rotatably held by an induction rotation motor 1 having a ring shape in plan view.
The induction rotary motor 1 includes a rotor 3 and a stator 5, and supports a substrate W in a horizontal position by a holding mechanism 7 (substrate holding means) disposed inside the hollow portion 3a of the rotor 3. In this state, it is rotated around the rotation center P.

The rotor 3 is formed of a conductive material (for example, aluminum) in the shape of a disk, and has a hollow portion 3a formed at the center thereof and a lateral portion formed at the periphery thereof. A guide ring 3c having an open recess 3b is formed. Also, on the upper and lower surfaces of the guide ring 3c,
A plurality of radial fins 4 are provided from the rotation center P toward the outer peripheral portion.

The stator 5 is disposed outside the rotor 3 and concentrically with the rotor 3, and the inner portion thereof has a concave portion 3 b of the rotor 3.
Has been loosely inserted. A plurality of induction coils 9 are provided inside the stator 5 to generate a magnetic field generated by the guide ring 3.
c is buried across the upper and lower surfaces. Further, the plurality of induction coils 9 are grouped and arranged so that a magnetic field generated by the supply of the polyphase alternating current rotates along the circumference of the rotor 3. For example, FIG. As shown, the groups are grouped so that every third unit is connected to an AC power supply having the same phase. That is, the first induction coil group 9a, the second induction coil group 9b, and the third induction coil group 9c are each supplied with alternating currents of different phases from a three-phase alternating current power supply (not shown). I have. In the present embodiment, the phase of the alternating current applied to the first coil group 9a is the most advanced, followed by the second coil group 9b, and then the third coil group 9c, as viewed in plan. A rotating magnetic field is generated counterclockwise.

When such a rotating magnetic field is generated, the magnetic flux moves through the guide ring 3c of the rotor 3 made of a conductive material, and an induced electromotive force is generated in a direction that obstructs the change of the magnetic flux. An eddy current is generated in the guide ring 3c (Fleming's right-hand rule). The eddy current acts on the magnetic flux of the induction coil 9 to apply a rotating force to the rotor 3 in a counterclockwise direction (Fleming's left-hand rule). Therefore,
Since the rotation speed of the rotor 3 depends on the moving speed of the magnetic flux in the circumferential direction, it is determined by the arrangement interval of each coil 9 and the frequency of the AC power supply. Therefore, when it is necessary to vary the number of revolutions for processing the substrate W, the output from the three-phase AC power supply is supplied to the function generator, where the frequency is adjusted and supplied to the induction rotary motor 1. I just need.

As shown in FIG. 2, the stator 5 has a gas buffer section connected to a gas supply source 11 (FIG. 1) for supplying a gas such as air or an inert gas (eg, nitrogen gas). 13 is formed, and the gas supply path 15
Through the recess 3b outside the guide ring 3c of the rotor 3.
, And a gas is supplied to a gap between the inner portion of the stator 5 and the rotor 3 is supported by the static pressure gas bearing on the stator 5.

As the bearing, a dynamic pressure bearing such as a bearing may be adopted, but in this case, the friction resistance of the rotor 3 to the stator 5 becomes large, so that high-speed rotation becomes difficult. Further, since the processing liquid may enter these gaps, it is necessary to impart corrosion resistance to the dynamic pressure bearing. On the other hand, if a static pressure gas bearing is employed as in the present embodiment, members such as bearings become unnecessary, and gas is blown out from the gap to the outside, so that it is possible to prevent the processing liquid from entering. Therefore, when high-speed rotation or a processing liquid is used, it is preferable to employ a static pressure gas bearing as in this embodiment.

At least three holding mechanisms 7 are attached to the inside of the rotor 3 so as to protrude toward the hollow portion 3a of the rotor 3 so as to form substantially equal angles in plan view.
As shown in FIGS. 2 and 4, a tongue-shaped mounting projection 3d protruding toward the hollow portion 3a is formed inside the rotor 3, and a locking portion 17a having a concave longitudinal section is formed in this portion. A locking piece 17 for locking the edge of the substrate W is rotatably mounted at the rotation center P1. A tension coil spring 17b is mounted between the tail 17c of the outer peripheral surface of the locking piece 17 and the inner peripheral surface facing the hollow portion 3a of the rotor 3. Therefore, at normal times, the tension coil spring 17b acts as shown in FIG. 4 (a) and the locking portion 17a protrudes toward the rotation center P, and when the substrate is transferred, the locking piece 17a as shown in FIG. 4 (b). The locking portion 17a is moved outward by moving the tail portion 17c of the 17 to the rotation center P side by a drive pin (not shown).

In the induction rotary motor 1 configured as described above, the upper part and the lower part of the stator 5 are surrounded by the duct 19. A discharge port 19 a is formed in the lower duct 19, and discharges a processing liquid or the like supplied to the substrate W and exhausts air from the fins 4 and gas from the static pressure gas bearing. It has become.

A cleaning liquid is supplied above the induction rotary motor 1 so as to be movable above the rotation center P of the substrate W (solid line in FIG. 1) and laterally (two-dot chain line in FIG. 1). A nozzle 22 for supplying the cleaning liquid to the rotation center P at a fixed position is provided below the induction rotary motor 1.

Next, the operation of the apparatus configured as described above will be described.

First, the holding mechanism 7 holds the substrate W.
As shown in FIG. 4A, the holding mechanism 7 in which the locking portion 17a is moving toward the rotation center P is moved to the tail 17c of the locking piece 17 toward the rotation center P by a drive pin (not shown). The locking portion 17a is swung outward (FIG. 4B). In this state, after the substrate W supported by the substrate transport mechanism (not shown) is moved to the height position of the holding mechanism 7, the driving pin (not shown) is retracted so that the locking portion 17a contacts the peripheral edge of the substrate W. It is brought into contact and locked (FIG. 4 (a)).

Next, the nozzle 21 is moved from the retracted position shown by the two-dot chain line in FIG. 1 to the supply position shown by the solid line in FIG.

Then, in this state, a three-phase alternating current of a predetermined frequency is supplied to the plurality of coils 9 from the three-phase alternating current power supply as described above. As a result, a rotational force is generated in the rotor 3 according to the principle described above, and the induction rotary motor 1 rotates,
The substrate W rotates at a predetermined speed. When the induction rotary motor 1 starts to rotate in this manner, the rotor 3 having the radial fins 4 at the periphery rotates and operates as an exhaust fan by centrifugal force. The air of the flow is discharged toward the periphery of the rotor 3,
Air is exhausted through the exhaust port 19a.

When a predetermined speed is reached, a cleaning liquid is supplied from the nozzles 21 and 22 to perform a cleaning process on both surfaces of the substrate W. Next, pure water is supplied from the nozzles 21 and 22 to rinse both surfaces of the substrate W. Both the cleaning liquid and pure water supplied in this manner are discharged around the rotor 3 by the effect of the exhaust fan described above, and the exhaust port 19a
Drained from

When a predetermined time has elapsed, the nozzles 21 and 22
The supply of pure water from, and increase the frequency of the three-phase AC to increase the rotation speed. As a result, the cleaning liquid, pure water, and the like adhering to the substrate W are shaken off to dry the substrate W.

After the drying time has elapsed and the substrate W has dried,
The supply of the three-phase AC from the three-phase AC power supply to the plurality of coils 9 is stopped, the rotation of the induction rotary motor 1 is stopped, and the rotation of the substrate W is stopped. Then, the nozzle 21 is moved to the retracted position, and the substrate W is supported by the substrate transport mechanism (not shown), and then the holding of the holding mechanism 7 is released by the drive pin (not shown). Thereafter, the substrate W is unloaded by the substrate transport mechanism.

According to the substrate processing apparatus having the above configuration, a rotating magnetic field is generated by the three-phase alternating current in the stator 5 of the induction rotating motor 1 and a rotating force is generated in the rotor 3 by electromagnetic induction. The rotor 3 can be made of a simple conductive material instead of a ferromagnetic material. Therefore,
The weight of the rotor 3 can be reduced, and the size of the substrate processing apparatus can be reduced.

In the induction rotary motor 1 described above, a hollow portion 3a is formed in the rotor 3, and a stator 5 is arranged concentrically with the hollow portion 3a. The stator 5 also has a hollow central portion. So
Both surfaces of the substrate W can be processed simultaneously from above and below. Therefore, in the substrate processing apparatus using this, the substrate W
Can be efficiently performed in a short time.

Although the induction rotary motor 1 is driven by three-phase alternating current, it may be driven by two-phase alternating current. In this case, a plurality of coils 9 may be grouped every other coil, and an alternating current having a different phase may be applied to each group.

The above-described holding mechanism 7 is an example,
A substrate holding member as disclosed in Japanese Patent Application Laid-Open No. H10-112453 may be adopted, and any other mechanism that can hold a substrate may be used.

<Second Embodiment> Next, a second embodiment will be described with reference to FIGS.

FIG. 5 is a longitudinal sectional view showing a schematic configuration of the substrate processing apparatus according to the present embodiment, FIG. 6 is a longitudinal sectional view showing a main part of a fluid motor, and FIG. 7 shows an arrangement of turbine blades and nozzles. It is a top view. The same components as those in the first embodiment are denoted by the same reference numerals, and the detailed description is omitted.

In the substrate processing apparatus according to this embodiment, a substrate W is rotatably held by an annular fluid motor 31 in plan view, and this fluid motor 31 includes a rotating body 33 and a casing 35.

The rotating body 33 is made of a lightweight and highly rigid material in the shape of a disc, and has a hollow portion 33a in the center thereof.
And a concave portion 3 having an outer surface opened in the peripheral portion.
A guide ring 33c having 3b is formed. Turbine blades 34 made of a material having high rigidity and light weight are attached to the recess 33b at predetermined intervals over the entire circumference. Further, a holding mechanism 7 similar to that of the first embodiment is provided on the mounting projection 33d on the inner surface of the hollow portion 33a, so that the substrate W is held in a horizontal posture.

The casing 35 has a recess 35a formed on the inner peripheral surface thereof. The casing 35 is disposed so as to surround the rotating body 33 in the circumferential direction.
It is arranged to be located inside. Further, the gas supply source 11 is provided in the casing 35 in the same manner as in the first embodiment.
Buffer section 13 and gas supply path 15 connected to
Are formed, and the rotating body 33 is supported by a static pressure gas bearing.

As shown in FIG. 7, the casing 35 has nozzles 37 for injecting gas to the turbine blades 34 of the rotating body 33 to apply a rotational force to the turbine blades 34 at four positions every 90 ° in a plan view. It is arranged. Further, a discharge port 39 for discharging gas is formed in the gas injection direction of each nozzle 37. A supply source (not shown) capable of adjusting the flow rate and supplying a gas is connected to each nozzle 37, and a control unit (not shown) adjusts the flow rate according to the processing content.

Next, the operation of the thus configured device will be described.

First, the substrate W is held by the holding mechanism 7 in the same manner as in the first embodiment. Then, the nozzle 21 is moved from the retreat position shown by the two-dot chain line in FIG. 5 to the supply position shown by the solid line in FIG.

In this state, a gas having a flow rate corresponding to the rotation speed is injected from all the nozzles 37. Then, since impact / reaction for gas is given to the turbine blade 34, a rotating force in the counterclockwise direction is given to the rotating body 33. Therefore,
The substrate W rotates counterclockwise. When the fluid motor 31 starts rotating, the rotating body 33 provided with the fins 4 rotates and operates as a centrifugal exhaust fan, and the downflow air flowing down from above to the upper surface of the substrate W flows around the rotor 33. The exhaust gas is discharged toward the exhaust port 19a.

When the predetermined speed is reached, a cleaning liquid is supplied from the nozzles 21 and 22 to perform a cleaning process on both surfaces of the substrate W. Then, pure water is supplied from the nozzles 21 and 22 to supply both surfaces of the substrate W. Then, rinse cleaning is performed. Both the cleaning liquid and the pure water have an exhaust port 1 due to the effect of the exhaust fan described above.
The liquid is discharged from 9a.

After a lapse of a predetermined time, the supply of pure water is stopped, and the rotational speed is increased by increasing the flow rate of the gas supplied to the nozzle 37. As a result, the cleaning liquid, pure water, and the like adhering to the substrate W are shaken off to dry the substrate W.

When the drying time has elapsed and the substrate W has dried,
The supply of gas to the nozzle 37 is stopped and the outlet 3
The rotation of the fluid motor 1 is stopped by stopping the exhaust from the nozzle 9, and the rotation of the substrate W is stopped. Then, after the nozzle 21 is retracted, the substrate W is carried out.

According to the substrate processing apparatus having the structure as in the present embodiment, when gas is supplied to the fluid motor 31, the turbine blade 34 is given an impact / reaction operation to apply a rotational force to the rotating body 33. And the substrate W can be rotated. Therefore, the rotating body 33 only needs to be provided with a rotating force by gas, does not require a ferromagnetic body such as a permanent magnet, and may simply be the rotating body 33 in which the turbine blades 34 are provided all around. As a result, the weight of the rotating body 33 can be reduced,
By using this fluid motor 31, the size of the substrate processing apparatus can be reduced.

In the present embodiment, the rotating force is applied to the rotating body 33 by supplying the gas, but the rotating body may be rotated by supplying the liquid instead of the gas.

In the first and second embodiments, an apparatus for supplying a cleaning liquid to a substrate to perform a cleaning process has been described as an example. However, an apparatus for supplying a coating liquid to perform a coating process may be used. The present invention can also be applied to the present invention.

[0055]

As is apparent from the above description, according to the first aspect of the present invention, a rotating magnetic field is generated by a polyphase alternating current in a stator of an induction rotary motor having a rotor and a stator. Since the rotating force is generated in the rotor by electromagnetic induction, the rotor can be made of a simple conductive material instead of a ferromagnetic material. Therefore, the weight of the rotor can be reduced, and the size of the substrate processing apparatus can be reduced by using the induction rotation motor.

According to the second aspect of the present invention, since the rotor operates as an exhaust fan by centrifugal force, the cleaning liquid and the coating liquid supplied to the substrate for predetermined processing are discharged to the surroundings. And the configuration of the discharge mechanism can be simplified.

According to the third aspect of the present invention, the friction resistance against the stator when the rotor rotates can be reduced by employing the static pressure gas bearing, and the rotor can be rotated at high speed. The cleaning liquid and the coating liquid can be prevented from entering the gap between the rotor and the stator.

According to the fourth aspect of the present invention, when the fluid is supplied from the nozzle to the casing of the fluid motor,
The turbine blade is given an impact / reaction action to apply a rotational force to the rotating body, thereby rotating the substrate. Therefore, the rotating body only needs to be provided with a rotating force by a fluid, does not need a ferromagnetic body such as a permanent magnet, and may be a rotating body having turbine blades simply arranged all around. As a result, the weight of the rotating body can be reduced, and the size of the substrate processing apparatus can be reduced by using the fluid motor.

Further, according to the fifth aspect of the present invention, since it operates as an exhaust fan by centrifugal force, it is possible to discharge the cleaning liquid and the coating liquid supplied to the substrate for a predetermined process to the surroundings. The configuration of the discharge mechanism can be simplified.

According to the sixth aspect of the present invention, the friction resistance against the casing when the rotating body rotates can be reduced by employing the static pressure gas bearing, and the rotating body can be rotated at high speed. While being able to
The cleaning liquid and the coating liquid can be prevented from entering the gap between the rotating body and the casing.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view illustrating a schematic configuration of a substrate processing apparatus according to a first embodiment.

FIG. 2 is a longitudinal sectional view showing a main part of the induction rotary motor.

FIG. 3 is a plan view showing an arrangement of an induction coil provided on a rotor.

FIG. 4 is a diagram showing the operation of the holding mechanism.

FIG. 5 is a longitudinal sectional view illustrating a schematic configuration of a substrate processing apparatus according to a second embodiment.

FIG. 6 is a longitudinal sectional view showing a main part of the fluid motor.

FIG. 7 is a plan view showing the arrangement of turbine blades and nozzles.

[Explanation of symbols]

 W ... substrate 1 ... induction rotation motor 3 ... rotor 4 ... fins 5 ... stator 7 ... holding mechanism 9 ... induction coil 11 ... gas supply source 13 ... gas buffer unit 15 ... gas supply path 19 ... ducts 21 and 22 ... nozzles 31 ... fluid motor 33 ... rotating body 34 ... turbine blade 35 ... casing 37 ... nozzle

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H02K 17/02 H02K 17/02 B (72) Inventor Sadao Hiratoku 4-chome Tenjin 1-1-1 Kitamachi Dai Nippon Screen Manufacturing Co., Ltd. F-term (reference) 4G075 AA24 AA30 BD08 BD16 BD26 DA02 EA01 EC01 ED01 ED08 5H607 AA00 BB06 BB13 CC01 CC05 FF04 GG13 KK01

Claims (6)

[Claims] 1. A substrate processing apparatus for performing a predetermined process on a substrate by rotating the substrate, comprising: a rotor formed of a conductive material in a disk shape; and a rotor coaxially provided with the rotor. An induction rotary motor including a stator having a plurality of induction coils arranged in a circumferential direction of the rotor while a magnetic field generated by supplying a polyphase alternating current traverses the rotor; and And a substrate holding means for holding the substrate provided in the substrate processing apparatus. 2. The substrate processing apparatus according to claim 1, further comprising a radial fin extending from a center of rotation to an outer peripheral portion at a periphery of the rotor. 3. The substrate processing apparatus according to claim 1, wherein the rotor is supported by a static pressure gas bearing with respect to a stator of the induction rotation motor. 4. A substrate processing apparatus for rotating a substrate and performing predetermined processing on the substrate, wherein the rotating body is formed in a disk shape and has turbine blades over the entire circumference on the circumferential side. A fluid motor provided in a core shape and surrounding a circumferential direction of the rotating body and having a casing having a nozzle for supplying a fluid to the turbine blade; a substrate holding means provided on the rotating body and holding a substrate; A substrate processing apparatus comprising: 5. The substrate processing apparatus according to claim 4, wherein a radial fin extending from a center of rotation to an outer peripheral portion is provided on a peripheral portion of the rotating body. 6. The substrate processing apparatus according to claim 4, wherein the rotating body is supported by a static pressure gas bearing on a casing of the fluid motor.