JP2000174092A - Substrate loading / unloading device and transport system - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To convey an object to be conveyed such as a substrate while avoiding an interference object in a short time. SOLUTION: Among the degrees of freedom of the transfer robot TR4,
Movable space SP with two degrees of freedom YZ related to interference
Is defined. In this movable space SP, coordinate values of region critical points H1, H2, H3, and H4, which are vertices of the interference region, are set in advance. With the setting of the coordinate values of the region critical points H1 to H4, a plurality of zones A, B,
Divide into C, D and E. When the transfer robot is actually moved, the current position P1 and the target position P2, which are the starting positions, are acquired. Then, a virtual linear trajectory L1 connecting the current position P1 and the target position P2 is obtained, and the magnitudes of the coordinate values of the intersections M1, M2 of the zone boundaries and the linear trajectory L1 and the area critical points H1, H2 are compared. Thus, it is determined whether or not the straight path L1 passes through the interference area. Then, in the case of interference, the shortest transport trajectory SL having the area critical points H1 and H2 as the waypoints is set.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate loading / unloading system in which a transfer robot loads and unloads a thin precision substrate (hereinafter, simply referred to as a "substrate") such as a semiconductor wafer or a glass substrate for a liquid crystal display to a predetermined portion. The present invention relates to an unloading device, and more particularly to an improvement in a substrate transfer technique in such a device.

[0002] The present invention is not only suitable for realizing such a substrate loading / unloading apparatus, but also a novel transport system which can be used for transporting an object other than a substrate. Related.

[0003]

2. Description of the Related Art Conventionally, various substrate processing apparatuses for performing a predetermined process on a substrate are known. A transfer robot is provided inside such a substrate processing apparatus, and the transfer of the substrate by the transfer robot progresses the processing of the substrate inside the apparatus.

Meanwhile, in recent substrate processing apparatuses, the space is reduced from the viewpoint of the cost for maintaining the environment in a clean room, and the processing units and various members are arranged in the space saving. Therefore, when the transfer robot transfers the substrate, the transfer robot may interfere (contact) with an interference unit such as a processing unit or various members.

FIG. 12 is a view showing a substrate transfer mode in a conventional apparatus. In FIG. 12, a case where the transfer robot transfers a substrate from the current position P10 to the target position P20 will be described. The moving direction that is shortest in terms of time or distance is as shown by a solid line arrow connecting the current position P10 and the target position P20 with a straight line. However, if it moves in this linear direction, it will interfere with the interfering object B10.

For this reason, conventionally, the driving unit for the Y axis is first driven to move the current position P10 to the intermediate position P1.
The transfer robot is moved to 5 (the position indicated by the Y-axis coordinate position of the target position P20 and the Z-axis coordinate of the current position P10) and stopped there. After that, the drive unit for the Z axis is driven to move the transfer robot parallel to the Z axis, thereby moving the transfer robot to the target position P20.

[0007]

However, if the drive for each axis is performed to avoid the interference B10 as described above, the transfer robot moves from the current position P10 to the target position P20.
There is a problem that the moving time when moving to a longer distance is longer.

On the other hand, for example, when an exposure process is performed on a substrate, the exposed substrate is subjected to a post-exposure bake processing unit (PE).
It is necessary to shorten the time for transporting to B) and manage it in a fixed time. Therefore, it is particularly necessary to shorten the moving time of the transfer robot. Further, shortening the moving time of the transfer robot in this way is not limited to the apparatus including the substrate exposure processing, but is also necessary in various substrate processing apparatuses for improving the throughput.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and it is an object of the present invention to provide a substrate loading / unloading apparatus capable of transporting a substrate while avoiding an interfering object in a shorter time as compared with the related art. This is the purpose of 1.

It is a second object of the present invention to provide a novel transfer system which is not only particularly suitable for such a substrate loading / unloading apparatus but also applicable to the transfer of a transfer object other than a substrate. I do.

[0011]

According to a first aspect of the present invention, there is provided a substrate loading / unloading apparatus for loading / unloading a substrate using a transport robot.
(a) In a movable space in which a movable range of a plurality of degrees of freedom of the transfer robot is defined as a coordinate space, a range from a first position corresponding to a start position of the transfer robot to a second position corresponding to a target position is defined. Linear trajectory deriving means for determining a virtual linear trajectory to be connected; (b) determining means for determining whether the linear trajectory passes through a predetermined interference area in the movable space; and (c) the determination. When it is determined that the vehicle passes through the interference region, a transport trajectory that bypasses the interference region is set. When it is determined that the vehicle does not pass through the interference region, the linear trajectory is set as the transport trajectory. A transport trajectory setting means; and (d) a control means for controlling the operation of the transport robot by simultaneously driving and controlling the respective drive axes corresponding to the respective degrees of freedom along the transport trajectory.

According to a second aspect of the present invention, in the substrate loading and unloading device according to the first aspect, the determining means includes a coordinate value of a region critical point of the interference region in the movable space and a coordinate on the linear trajectory. It is characterized in that it is determined whether or not the vehicle passes through the interference area by comparing the value with a value.

According to a third aspect of the present invention, in the substrate loading and unloading apparatus according to the second aspect, the transfer trajectory setting means sets a transfer via point in a non-interference area near the area critical point, When it is determined that the linear trajectory passes through the interference area, the transport trajectory is set to pass through the transport via point.

According to a fourth aspect of the present invention, in the substrate carrying-in / out apparatus according to the third aspect, the control means performs simultaneous drive control without stopping each of the plurality of drive shafts at the transfer route point. It is characterized by:

Further, in order to achieve the second object,
The invention according to claim 5 is a transport system that transports a predetermined transport target using a transport robot, wherein (a) the movable range of the transport robot for a plurality of degrees of freedom is defined as a coordinate space. A linear trajectory deriving means for obtaining a virtual linear trajectory connecting a first position corresponding to a departure position of the transfer robot to a second position corresponding to a target position in the movable space; (b) the linear trajectory is Determining means for determining whether to pass through a predetermined interference area in the movable space; and (c) bypassing the interference area when the determination means determines that the vehicle passes through the interference area. A transport trajectory is set, and when it is determined that the vehicle does not pass through the interference area, a transport trajectory setting unit that sets the linear trajectory as a transport trajectory, and (d) corresponding to each degree of freedom along the transport trajectory. Each drive Control means for controlling the operation of the transfer robot by simultaneously controlling the driving of the axes.

According to a sixth aspect of the present invention, in the transport system according to the fifth aspect, the determination unit determines a coordinate value of an area critical point of the interference area in the movable space and a coordinate value on the linear trajectory. By performing the comparison, it is determined whether or not the vehicle passes through the interference area.

According to a seventh aspect of the present invention, in the transport system according to the sixth aspect, the transport trajectory setting means sets a transport via point in a non-interference area near the area critical point, and When it is determined that the trajectory passes through the interference area, the transport trajectory is set to pass through the transport via point.

According to an eighth aspect of the present invention, in the transport system according to the seventh aspect, the control means performs simultaneous drive control without stopping each of the plurality of drive shafts at the transfer route point. Features.

The "position" such as the "departure position", "first position", "target position" and "second position" of the present invention.
Indicates the state when the transfer robot has specific values for the degrees of freedom such as translation and rotation,
Position in a narrow sense (Cartesian coordinate position defined in XYZ real space)
However, the present invention is not limited to this.

[0020]

FIG. 1 is a plan view showing a substrate processing apparatus 100 according to an embodiment of the present invention. The substrate processing apparatus 100 includes an indexer I along the X direction shown in FIG.
D, a unit arrangement section MP, an interface IF, and an exposure section EXP.

FIG. 2 is a plan view schematically showing an indexer ID and a unit arrangement section MP of the substrate processing apparatus 100. FIG. 3 is a cross-sectional view of the interface IF taken along the YZ plane from the exposure section EXP side. FIG.

The indexer ID includes a transport robot TR1 for transporting the substrate W and a table 1 on which the carrier CA is mounted.
The table 10 is provided with a plurality of carriers CA, which are containers for accommodating a plurality of substrates W. The transport robot TR1 is configured to be movable along the Y-axis direction as described later, and to be capable of extending and retracting along the Z-axis. Further, an arm for holding the substrate W is provided, and by bending and extending the arm, the substrate W can be transported linearly. Further, the transport robot TR1 is configured to be rotatable in the XY plane so that the arm is opposed to each carrier CA and the unit placement part MP side.

Then, the transport robot TR1 takes out the substrate W from the carrier CA, which is a storage container for the substrate W, and carries it out to the transfer position 11 of the unit arrangement section MP, or removes the substrate W having undergone a predetermined process from the unit arrangement section MP. And received in the carrier CA. As described above, the indexer ID functions as a substrate loading / unloading device in relation to the unit placement unit MP.

In the indexer ID, the inner wall 12 protrudes toward the trajectory side of the transfer robot TR1 at a boundary portion between the unit placement portion MP and the portion other than the portion corresponding to the transfer position 11 in the indexer ID. For this reason, the transfer robot TR1
In the case where the transfer robot TR1 is located at the portion where the transfer robot TR1 is located, the arm will interfere (contact) with the inner wall 12 if the rotation operation is performed at a certain angle or more, and the transfer robot TR1 can rotate depending on the position on the Y axis. The angle will be determined. That is, in the indexer ID, the inner wall 12 becomes an interfering object, and in the operation of the transfer robot TR1, it is necessary to efficiently transfer the substrate W while avoiding the interfering object. Will be described later.

The unit disposition portion MP includes coating processing units SC1 and SC2 (spin coaters) for applying a resist while rotating the substrate W as liquid processing units for processing the substrate W with the processing liquid at the four corners thereof. Development processing units SD1 and SD2 for performing development processing of the exposed substrate W
(Spin developer), and a cleaning unit SS for supplying a cleaning liquid such as pure water to the substrate W between the coating units SC1 and SC2 to rotate and clean the substrate W.
(Spin scrubber). Further, a plurality of heat treatment units for performing heat treatment of a post-exposure bake unit (PEB), a cool plate unit, a hot plate unit, and the like (not shown) are arranged above these liquid processing units.

A transfer robot TR2 is provided at the center of the unit arrangement section MP. The transfer robot TR2 sequentially transfers the substrates W between processing units, such as a liquid processing unit and a heat treatment unit, so that the substrates are transferred. A predetermined process for W can be performed. The transport robot TR2 transports the substrate W before exposure to the transfer unit 21 of the interface IF, and
The substrate after the exposure processing in P is received from the transfer unit 21 and transported to a predetermined processing unit to perform post-exposure processing.

The interface IF receives the substrate W before exposure from the unit arrangement section MP at the transfer section 21 and transfers it to the exposure section EXP.
From the exposure unit EXP and passed to the unit arrangement unit MP. As shown in FIG. 3, the interface IF includes, as shown in FIG. 3, the transfer unit 21, the two transfer robots TR3 and TR4, the buffer cassette 22, the carry-in robot 23, the carry-out robot 24, and the cassettes 26a and 26b.
Cassette tables 27a and 27 for setting
b.

The transfer robot TR3 loads and unloads the substrate W from the transfer unit 21 and the buffer cassette 2
The storage / removal of the substrate W is performed in any of the storage shelves.

The buffer cassette 22 includes a transfer unit 21
Is disposed between the transfer robots TR3 and TR4, and the side facing the transfer robot TR3 (+ Y direction side) and the side facing the transfer robot TR4 (−Y direction side).
And are open. Therefore, the transfer robots TR3 and TR3
4 can access the substrate W stored in the buffer cassette 22, and the transfer robot T
The transfer of the substrate W between R3 and TR4 is performed via the buffer cassette 22.

The transfer robot TR4 stores / takes out the substrate W from / to an arbitrary storage shelf of the buffer cassette 22,
Placement of substrate W on loading robot 23, unloading robot 24
The substrate W is taken out of the cassette 26a, and the substrate W is stored in and taken out of the cassettes 26a and 26b.

The cassettes 26a and 26b are used to perform an exposure process on a trial basis or before and after the exposure process.
This is a cassette for accommodating such substrates when it is desired to perform a special process other than that performed in the above.

The carry-in robot 23 is a robot for carrying the substrate W to be exposed into the carry-in section 4a in the exposure section EXP. The carry-out robot 24 has completed the exposure processing from the carry-out section 4b in the exposure section EXP. The robot unloads the substrate W.

Here, the transport robot TR4 is configured to be movable along the Y-axis direction and to be able to expand and contract along the Z-axis. Further, an arm for holding the substrate W is provided, and by bending and extending the arm, the substrate W can be transported linearly. Further, the transfer robot TR4 connects the arm to the buffer cassette 22, the cassettes 26a, 26
b, it is configured to be rotatable in the XY plane so as to face the carry-in robot 23 and the carry-out robot 24.

Since the cassette tables 27a and 27b are provided in the trajectory on the Y axis of the transport robot TR4, the transport robot TR4 needs to be transported in order to access the loading robot 23 or the unloading robot 24. It is necessary to contract the robot TR4 in the -Z direction in order to reduce the height dimension. That is, with respect to the transport robot TR4, the cassette tables 27a and 27b become obstacles when moving along the Y axis. Therefore, it is necessary for the transfer robot TR4 to efficiently transfer the substrate W after exposure while avoiding the cassette tables 27a and 27b serving as an interference object. The operation control will be described later.

When the substrate W to be exposed is transferred to the exposure unit EXP in the interface IF, the transfer unit 21, the transfer robot TR3, the buffer cassette 22, the transfer robot TR4, and the carry-in robot 23 are normally performed in this order. . The substrate W that has been subjected to the exposure processing in the exposure unit EXP is transferred to the unloading robot 24, the transfer robot TR4, the buffer cassette 22, and the transfer robot TR.
3. Normal transfer is performed in the order of the transfer unit 21. As described above, the interface IF is connected to the unit
It functions as a substrate loading / unloading device in relation to P and in relation to the exposure unit EXP.

The substrate processing apparatus 100 configured as described above
In, the entire transfer system is constituted by transfer robot groups including the transfer robots TR1 to TR4, the carry-in robot 23, and the carry-out robot 24, and each control system for controlling these transfer robot groups. Of these, the operation of avoiding interference is required when the substrate W is transported because the transport robot T in the indexer ID and the interface IF functioning as a substrate loading / unloading device.
R1 and TR4, and the control of these transfer robots TR1 and TR4 is related to the main feature of the present invention. For this reason, the following description will focus on parts related to the transfer robots TR1 and TR4 and their control systems in the transfer system.

First, the transfer robot TR1 provided for the indexer ID and the transfer robot TR4 provided for the interface IF will be described. FIG.
It is a perspective view which shows the outline | summary of the transfer robot TR1 in an indexer ID, and the outline of the transfer robot TR4 in an interface IF. The transfer robots TR1 and TR4 have the same configuration. As shown in FIG. 4, the transport robots TR1 and TR4 can be moved in the ± Y direction by a Y-axis drive unit that is a drive mechanism in the Y-axis direction including a male screw 77, a guide rail 76, and the like.

Further, a telescoping elevating mechanism (not shown), which is a driving mechanism in the Z-axis direction, provided on the base 74 can move up and down in ± Z directions. This telescopic elevating mechanism is a so-called telescopic type telescopic mechanism, in which the cover 71a stores the cover 71b and the cover 71b stores the cover 71c.

When the transport robots TR1 and TR4 are lowered, the covers 71b to 71c are sequentially stored by driving a servo motor (not shown) provided inside the cover 71c in a predetermined direction. As a result, the transfer robots TR1 and TR4
Descends while contracting.

Conversely, when raising the transport robots TR1 and TR4, the covers 71b to 71c in the housed state are
Are sequentially drawn out. That is, by driving a servo motor or the like in the opposite direction, the covers 71b to 71c
1a-71b, and as a result,
The transfer robots TR1 and TR4 move upward while extending.

The transfer robots TR1 and TR4 have arms 7
The upper side including the stage 78 provided with the stage 5 is vertically (Z-direction) driven by a rotary drive mechanism (configured by a servomotor or the like) provided inside the stage 78.
Is realized so as to be able to rotate around the rotation axis θ.

Further, the arm 75 is configured to be able to convey the substrate W linearly while performing the bending / extending operation while maintaining the posture of the substrate W. Note that the arm 75 performs the bending / extending operation at a position where the arm 75 is opposed to the carrier CA or the transfer position 11 or the buffer cassette 22 to be stored, taken out, delivered, or placed at the time of transport. Only when the transfer robot TR
1, No interference of TR4 occurs.

As described above, the transfer robots TR1 and TR4
Are configured so as to effectively fulfill the functions of the transport robots TR1 and TR4 as the substrate loading / unloading device of the indexer ID or the interface IF.

FIG. 5 is a block diagram showing a control system for controlling the operation of each of the transport robots TR1 and TR4 having the above-described configuration. The control system shown in FIG. 5 is provided separately for each of the transport robots TR1 and TR4.

As shown in FIG. 5, a robot control unit 30 is provided for performing overall control of the operation of the transfer robot TR1, and the robot control unit 30 includes a Y-axis drive control unit 31 and a Z-axis drive The control unit 34 and the θ-axis drive control unit 37 are connected. In FIG. 5, a drive control system related to the arm 75 of the transport robot TR1 is not shown.

Then, the Y-axis drive control section 31 gives a drive command to the servomotor 32 to move the transport robot TR1 along the Y-axis. As a result, when the servo motor 32 operates, the transport robot TR1 moves
Move along an axis. The operation amount of the transport robot TR1 by the servomotor 32 is configured to be detected by the encoder 33, and the position on the Y axis of the transport robot TR1 detected by the encoder 33 is fed back to the Y-axis drive control unit 31. It is configured to be. That is, the Y-axis drive control unit 31 drives the servo motor 32 while detecting the position of the transfer robot TR1, and thereby controls the transfer robot TR1 in accordance with the Y-axis drive control signal from the robot control unit 30. It is configured to move along.

Further, the Z-axis drive control section 34 gives a drive command to the servo motor 35 to move the transport robot TR1 up and down along the Z-axis. As a result, the transfer robot TR1 moves the Z
Perform a vertical movement along the axis. Further, the amount of elevation of the transport robot TR1 by the servomotor 35 is configured to be detected by the encoder 36.
The position on the Z-axis of the transport robot TR1 detected by the control unit is configured to be fed back to the Z-axis drive control unit. Also in this case, the Z-axis drive control unit 34 detects the position of the transfer robot TR1 and
Is driven to move the transport robot TR1 up and down along the Z-axis in response to a drive control signal for the Z-axis from the robot control unit 30.

Further, the θ axis drive control unit 37 controls the rotation axis θ
A drive command is given to a servomotor 38 for rotating a portion above the stage 78 of the transfer robot TR1 with the center as the center. As a result, the servo motor 38 operates,
The transfer robot TR1 performs a rotation operation about the rotation axis θ. The transfer robot TR1 by the servo motor 38
Is configured to be detected by the encoder 39, and the rotation angle of the transport robot TR1 about the rotation axis θ detected by the encoder 39 is fed back to the θ-axis drive control unit 37. ing. Also in this case, the θ-axis drive control unit 37 drives the servo motor 38 while detecting the position (rotation angle, that is, the direction of the arm 75) of the transfer robot TR1 with respect to the θ-axis. The transfer robot TR1 is configured to rotate around the θ axis in response to a drive control signal for the θ axis.

Here, a controller (not shown) that performs overall control of the entire substrate processing apparatus 100 is located above the robot control unit 30. The position where the W exists and the transfer destination for transferring the substrate W are specified.

The transfer robot TR4 has the same control system as described above.

With such a control system, the transfer robot T
Since the operation control is performed on R1 and TR4, the indexer I
The operation of avoiding an interfering object at D or the interface IF also depends on this control system. In the following, an embodiment of an operation for avoiding an interference object will be specifically described.

FIG. 6 is a diagram showing the principle of the operation of avoiding interference by the transfer robot TR1 or TR4 in this embodiment.

First, the transfer robot TR4 will be considered. As to the transfer robot TR4, as is clear from FIG. 3, the presence or absence of interference during operation is determined based on the relationship between the position on the Y axis and the position on the Z axis.

First, the YZθ of the transfer robot TR4
Among the three degrees of freedom, a virtual movable space (degree of freedom space) SP defined by two orthogonal axes of the Y axis and the Z axis corresponding to the two degrees of freedom YZ is defined as shown in FIG. I do. The movable space SP is a partial space for two degrees of freedom YZ in which the problem of interference must be taken into consideration in a three-dimensional orthogonal coordinate space defining a movable range of the transfer robot TR4 in each degree of freedom YZθ. I have. An arbitrary point in the movable space SP expresses one state of a set of YZ degrees of freedom of the transport robot TR4.

In response to the transfer robot TR4 having three degrees of freedom of YZθ, 3
The following determination may be made in the three-dimensional space, but since there is no problem of θ-axis interference in this transfer robot TR4,
The result is the same as the result determined only by the movable space SP defined corresponding to the two degrees of freedom YZ (see FIG. 6 and FIG.
In FIG. 3, the vertical axis and the θ axis in parentheses are for the other transport robot TR1, and the vertical axis for the transport robot TR4 is the Z axis. Therefore,
Hereinafter, the movable space S for these two degrees of freedom YZ will be described.
The discussion will proceed based on P.

First, in such a movable space SP, an interference area (hatched portion in the figure) and a non-interference area are determined by the position of the interference object on the YZ plane.

For this reason, the region critical points H1, H2, which are the vertices of the interference region (points protruding from the non-interference region) in advance.
The coordinate values of H3 and H4 on the YZ plane are set.
With the setting of the coordinate values of the region critical points H1 to H4, the movable space is divided into a plurality of zones A, B, C, D, and E by the Y-axis coordinate values of the region critical points H1 to H4. The boundary between zones A and B is Y = y which is the Y-axis coordinate value of area critical point H1.
1 and the boundary between zones B and C is Y at the region critical point H2.
Y = y2 which is the axis coordinate value. Also, the following Zone C
The same applies to the boundary between D and E and the boundary between zones D and E.

Then, it is assumed that the current position of the transport robot TR4 (this current position is the starting position) is the position of P1, and the target position as the movement destination is the position of P2. The robot control unit 30 connects the current position P1 to the target position P2 with a straight line as shown by a dashed line in FIG. This linear locus L1 is Y
And Z are expressed by a linear equation.

Then, the robot control unit 30 converts the linear expression into a value of Y as a linear equation, “Y = y1” and “Y = Y1”.
y2 ”and performing the operation, zone A,
The value on the Z-axis at each of the boundary between B and the boundary between zones B and C is obtained. As a result, as shown in FIG. 6, an intersection M between the virtual straight line trajectory L1 and the boundary line between the zones is obtained.
1 and M2 can be obtained.

Then, a comparison between the coordinate value of the Z axis of the region critical point H1 of the interference region and the coordinate value of the Z axis of the point M1 on the linear locus L1, and the coordinate value of the Z axis of the region critical point H2 and the linear locus L
By comparing the coordinate value of the point M2 on 1 with the coordinate value of the Z axis, it is possible to determine whether or not the transfer robot TR4 passes through the interference area when the transfer robot TR4 linearly moves to the target position P2. .

That is, “(coordinate value of point M1 on Z axis)> (Z value of area critical point H1)
(Coordinate value of axis)) or ((coordinate value of Z axis of point M2)> (Z of area critical point H2)
(Coordinate value of axis), the virtual straight line trajectory L1 passes through the interference area (shaded area) as shown in the figure.

On the other hand, “(coordinate value of point M1 on Z axis) ≦ (Z value of area critical point H1)
(Coordinate value of axis)) and ((coordinate value of Z axis of point M2) ≦ (Z of area critical point H2)
(The coordinate value of the axis) ", the virtual linear trajectory L1 can move without passing through the interference area (shaded area) as shown in the figure. If the determination is made by comparing the magnitudes of the coordinate values in this way, it is possible to efficiently determine whether to pass through the interference area.

When making this comparison, the current position P
It is sufficient to recognize the zone to which the zone 1 belongs and the zone to which the target position P2 belongs, and compare the Z-axis coordinate values only for the area critical points located between these zones. In other words, by dividing the movable space SP into zones, a region critical point not located between the zone to which the current position P1 belongs and the zone to which the target position P2 belongs can be excluded from comparison. It is possible to determine whether or not to pass through the interference area.

In FIG. 6, since a virtual linear trajectory L1 connecting the current position P1 and the target position P2 passes through the interference area, the area critical point H is set to avoid this interference area.
1, a transport path SL passing through H2 is set. That is, the transport locus SL shown in FIG. 6 is derived by connecting the area critical point H1 from the current position P1, connecting the area critical points H1 and H2, and connecting the area critical point H2 and the target position P2.

Therefore, the operation control is performed so that the transfer robot TR4 moves from the current position P1 to the target position P2 via the region critical points H1 and H2. Robot controller 3
0 sends operation control signals to the Y-axis drive control unit 31 and the Z-axis drive control unit 34 almost simultaneously, so that the Y-axis drive control unit 31 and the Z-axis drive control unit 34 The transfer robot TR4 is moved to the position specified for the transfer robot TR4. For this reason, the robot control unit 30 sends an operation control signal to the Y-axis drive control unit 31 and the Z-axis drive control unit 34 so as to move to the area critical point H1 in the movable space SP when located at the current position P1. And then the area critical point H2
An operation control signal is sent to the Y-axis drive control unit 31 and the Z-axis drive control unit 34 so as to cause the movement. Finally, an operation control signal is sent to the Y-axis drive control unit 31 and the Z-axis drive control unit 34 to move to the target position P2. In this way, simultaneous drive control can be performed for the Y axis and the Z axis, and the transport path SL shown in FIG.
Can be moved along the transport robot TR4.

Here, the fact that the transport robot TR4 moves via the region critical points H1 and H2 means that it passes through the boundary between the interference region and the non-interference region. In other words, it moves along the transport trajectory that does not interfere with the interfering object in the interference area and has the shortest moving distance. For this reason, the transport robot TR4 can transport the substrate efficiently in the shortest time in both the moving time and the moving distance.

Next, FIG. 7 shows that, in the movable space SP having the same interference area as in FIG. 6, the starting position of the transport robot TR4 is the position P1, and the target position as the moving destination is the position P3. Is shown. In this case, since the current position P1 belongs to the zone A and the target position P3 belongs to the zone E, the area critical points H1 to H4 located between the zones A and E are compared with the points M1 to M4. Becomes Then, when the same comparison determination as described above is performed,
In the case shown in FIG. 7, a determination result is obtained that the virtual straight trajectory connecting the current position P1 and the target position P3 does not pass through the interference area. For this reason, in FIG. 7, a straight path connecting the current position P1 and the target position P2 is set as the transfer path SL. The operation control is performed so that the transfer robot TR4 moves linearly by performing the above-described simultaneous drive control of the Y axis and the Z axis from the current position P1 to the target position P3.

As described above, in the present embodiment, a virtual linear trajectory connecting the starting position and the target position at the time of substrate transfer is obtained, and the linear trajectory is set in the movable space SP of the transfer robot in a predetermined interference area. It is determined whether or not the vehicle passes through the interference region, and if it is determined that the vehicle does not pass through the interference region, the transport trajectory is set so as to bypass the interference region. It is configured to set a simple linear trajectory as the transport trajectory.

Although the transfer robot TR4 has been mainly described above, the same principle can be applied to the case where the transfer robot TR1 avoids the inner wall 12 which becomes an obstacle. That is, for the transfer robot TR1, the presence or absence of interference during operation is determined based on the relationship between the position on the Y axis and the rotation angle about the rotation axis θ. Therefore, FIG.
If the vertical axis indicating the movable space SP in FIG. 7 is set to the rotation angle of the transport robot TR1 with respect to the θ axis, it is clear that the same theory as described above can be applied.

The above is the principle of the interfering object avoiding operation of the transport robot TR1 or TR4 in this embodiment. However, if the above-mentioned principle is actually applied to the indexer ID or the transport robots TR1 and TR4 of the interface IF, the area is limited. There is a possibility that the transport robots TR1 and TR4 may come into contact with the interfering object when going through the critical points H1 and H2. In other words, in the above principle, each position of the transfer robot was considered as a point, but in practice, the transfer robot has a certain size. Since it is not reflected, there is a possibility of interference during actual operation.

For this reason, when the above principle is applied to an actual apparatus, it is preferable to set the transfer via points as follows. FIG. 8 is a diagram illustrating a transfer via point when setting a transfer trajectory. For example, considering the transfer robot TR4 of the interface IF, the area critical point H1,
H2 is the lower left point of the cassette tables 27a and 27b.
In this case, as shown in FIG. 8, K1 is set as a transfer via point corresponding to the area critical point H1, and K2 is set as a transfer via point corresponding to the area critical point H2. That is, each of the transfer via points K1 and K2 is set in the non-interference area near the area critical points H1 and H2 in consideration of the size of the transfer robot TR4. More specifically, the region critical point H is determined by the maximum width D of the mechanism portion of the transfer robot where interference is a problem.
The transfer via points K1 and K2 are set closer to the non-interference area from H1 and H2. In this case, if the transfer trajectory serving as the detour route is set via the transfer via points K1 and K2 when the transfer robot TR4 interferes with the interference area, the transfer robot TR4 may interfere with the interfering object. Can be avoided.

When the area critical points H1 and H2 are set in advance, it is conceivable that the above-mentioned transfer via points K1 and K2 are set as area critical points. In other words, the coordinate value set as the area critical point is not used as the coordinate value on the actual interference object such as the cassette tables 27a and 27b, but has some margin (a margin that does not interfere with the transfer robot, specifically, the width D).
Above) may be set. By doing so, it is not necessary to separately set the transfer via point as described above, but it can be said that the transfer points are conceptually the same.

The transfer robot TR of the indexer ID
It goes without saying that the same applies to 1.

Next, a procedure for controlling the operation of the transport robots TR1 and TR4 by the above-described control system will be described. FIG. 9 shows a transfer robot TR in this embodiment.
1 is a flowchart showing an operation control procedure of TR4.

First, in step S1, coordinate values of area critical points between an interference area and a non-interference area are set. In addition,
The coordinate value of the region critical point is determined by the inner wall 12, the cassette table 27a,
27b based on the design position.
Further, the coordinate values of the region critical points may be stored in a storage unit such as a memory in advance at the time of assembling the apparatus.

Then, the robot control unit 30 divides the movable space of the transport robots TR1 and TR4 into blocks based on the coordinate values of the area critical points set in step S1 (step S2).

In step S3, the robot controller 30 obtains the current position of the transport robot TR1 or TR4 by using coordinate values. The coordinate value of the current position acquired here becomes the current position P1 of the transfer robot TR1 or TR4.

In step S4, it is determined whether or not the current position obtained in step S3 is located within the interference area.
If “YES”, the process proceeds to step S14, and if “NO”, the process proceeds to step S5. Transfer robot TR1, TR
If the current position of No. 4 is within the interference area, it means that the transport robots TR1 and TR4 have already interfered with the interfering object, and it is not in a normal state. Therefore, error processing is performed in step S14.

Then, in step S5, the robot control unit 30 determines the target position as the movement destination by the robot control unit 30.
Obtained from the controller located at a higher level.

In step S6, it is determined whether or not the target position acquired in step S5 is located within the interference area.
If “YES”, the process proceeds to step S14, and if “NO”, the process proceeds to step S7. Transfer robot TR1, TR
The fact that the target position of No. 4, that is, the coordinate value of the movement destination is within the interference area, means that the transfer robot T
If R1 and TR4 are moved, they will interfere with the interfering object, and it is not in a normal state. Therefore, error processing is performed in step S14.

If "NO" is determined in the step S6, it means that both the current position and the target position are not in the interference area, and the transport trajectory can be set based on the above principle. In the processing after step S7, the setting of the transport trajectory based on the above principle is performed.

In step S7, the robot controller 30 moves the transfer robot T from two points, the current position and the target position.
A virtual linear trajectory is obtained assuming that R1 and TR4 move linearly from the current position to the target position. This linear trajectory is expressed by a linear equation in the movable space SP in which the setting of the interference object has been performed. At this time, the robot controller 30 functions as a linear trajectory deriving unit.

In step S8, the robot control unit 30 specifies a zone to which the current position and the target position belong, and sets the zone to be inspected when determining whether or not the specified zone passes through the interference area. Identify the region critical point. Specifically, by extracting all the region critical points located between the zone to which the current position belongs and the zone to which the target position belongs, the region critical points to be inspected can be obtained.

In step S9, the robot control unit 30 functions as a determination unit, and performs calculations by substituting predetermined coordinate values of the region critical points specified in step S8 into linear trajectories expressed by linear equations. Thus, it is determined whether or not the transfer robots TR1 and TR4 pass through the interference area when moving along the virtual straight trajectory. The determination here is made by comparing the coordinate values of the area critical point with the coordinate values on the linear trajectory, as described in the above principle.

Then, Step S10 is replaced with Step S9
If the result of determination in step S1 passes through the interference area, the next process is step S11. If not, the next process is step S12.

When the process proceeds to step S11, that is,
When the linear trajectory passes through the interference area, the robot control unit 30 sets a transport trajectory via an area critical point or a transport via point in order to avoid the interference area. here,
If the coordinate value of the area critical point includes a margin that does not interfere with the transfer robot, the transport trajectory may pass through the area critical point, but if the margin is not included, set separately. Then, the transport trajectory via the specified transport via point is set.

On the other hand, if the process proceeds to step S12, that is, if the linear trajectory does not pass through the interference area, the robot control unit 30 sets the virtual linear trajectory connecting the current position and the target position as the actual transport trajectory. Set.

In steps S10 to S12, the robot control unit 30 functions as a transfer path setting unit.

Then, in step S13, the robot controller 30 moves the transfer robots TR1 and TR4 along the transfer locus set in step S11 or S12.
A drive control signal is sent to each of the Y-axis drive control unit 31, the Z-axis drive control unit 34, and the θ-axis drive control unit 37 so that the. That is, the robot control unit 30
Robots TR1 and TR4 along the transport trajectory by simultaneously driving and controlling the axes and the θ axis or the Y and Z axes.
Is moved to the target position in the shortest time. At this time, the robot control unit 30 functions as control means for controlling the operations of the transfer robots TR1 and TR4.

By performing the above-described processing procedure, the transfer robots TR1 and TR4 can move around the interfering object when there is an interfering object on the linear trajectory connecting the current position and the target position, and can move the target robot in the shortest time. It will move to the position.

Here, the operation speed of each axis at the region critical point or the transfer via point when the transfer robots TR1 and TR4 move through the region critical point or the transfer via point to avoid the interference region will be described. . Note that a case where the transport robots TR1 and TR4 are moved along the transport locus SL as shown in FIG. 6 is illustrated.

FIGS. 10 and 11 show the operating speed of each axis when the transfer robot moves from the current position to the target position. FIGS. 10 and 11 show the relationship between speed and time on the Y axis and the Z axis or the Y axis and the θ axis. Therefore, the moving distance is represented by the area in each figure.

First, when the speed control as shown in FIG. 10 is performed, the speed is temporarily reduced to 0 when the transfer robot passes through the area critical point or the transfer via point for the Y axis and the Z axis or the Y axis and the θ axis. The stop is performed for the Y axis and the Z axis or the Y axis and the θ axis. Even if such a speed control is performed, the transfer robot can move on the shortest path via the area critical point or the transfer via point, so that it is apparent that the transfer time can be shortened as compared with the related art.

Next, in the case of performing the speed control as shown in FIG. 11, when the Y-axis and the Z-axis or the Y-axis and the .theta. Instead, the speed is changed so as to be the speed at which the vehicle goes to the next waypoint or the target position. Therefore, in this case, since a complete stop does not occur when each axis passes through the via point, a more efficient transport operation can be performed as compared with the case of FIG. However, in this case, the transfer robots TR1 and TR4 pass through a position shifted from the area critical point or the transfer via point to the interfering object side. Therefore, when setting the coordinate values of the area critical point or the transfer via point, It is preferable that a slight allowance is included in consideration of the deviation amount.

As described above, in this embodiment, the robot controller 30 for controlling the operation of the transfer robots TR1 and TR4 provided in the indexer ID and the interface IF connects the virtual position connecting the current position to the target position. A linear trajectory is obtained, and this linear trajectory is
It is determined whether or not the vehicle passes through an interference region set in advance, and if it is determined that the vehicle passes through the interference region, it is determined that the vehicle does not pass through the interference region while setting a transport path that bypasses the interference region. In this case, a virtual straight trajectory is set as the transport trajectory. Since the operation of the transfer robots TR1 and TR4 is controlled by simultaneously controlling a plurality of drive axes along the set transfer trajectory, interference can be avoided in a shorter time as compared with the related art. The transfer of the substrate W can be performed while performing. Accordingly, in the indexer ID and the interface IF, the transfer robot T
The movement time of R1 and TR4 can be shortened. Particularly, in the interface IF, by performing the above-described operation control, it is possible to shorten the time when the exposed substrate W is transported to the post-exposure bake processing unit (PEB).

The above description is an example when embodying the present invention, and is not limited to this.

For example, in the above description, the transfer robot TR1 in the indexer ID and the interface I
Although only the transfer robot TR4 in F has been described, other transfer robots provided in the substrate processing apparatus 100 may similarly interfere with the interfering object.
The above operation control can be applied to efficiently transfer the substrate W while avoiding the interference.

In the above description, the indexer I
For the transfer robot TR1 of D, the movable space between the Y axis and the θ axis is considered. For the transfer robot TR4 of the interface IF, the movable space SP between the Y axis and the Z axis is considered.
The transport trajectory is set by considering the above, but the axis to be considered as the movable space SP is not limited to the above because the axis necessary for avoiding the interfering object may be adopted. Absent.

Further, when avoiding an interference object, the movable space SP
Is required to be three-dimensionally captured, it is necessary to define the movable space SP three-dimensionally. Even in this case, the principle described in this embodiment can be applied.

Generally, for a transfer robot having N degrees of freedom (N is an integer of 2 or more), M degrees of freedom (M is M
When ≦ N (an integer of 2 or more) is related to interference, an M-dimensional space is defined as the movable space. At this time, M
The interference area is divided into a plurality of zones (see FIG. 6) by the coordinate values of one specific degree of freedom (let it be XL; XL = Y in FIG. 6) among the variables Xi to XM corresponding to the degrees of freedom. In the case of No. 6, the coordinates are divided into A to E), and the coordinate values of the linear trajectory (L1) and the area critical points (H1, H2,...) Are Xi to XM axes (excluding the XL axis) on these division boundaries. ), The same determination as in the above embodiment can be made. In general, the region critical point is set at a portion where the boundary between the non-interference region and the non-interference region is bent or inflected, such as the vertex of the convex portion or the bottom point of the concave portion of the interference region.

Although FIGS. 6 and 7 show only the plus direction of each drive shaft, if the movable shaft SP can move in the minus direction as well, the movable space SP includes the minus direction area and the minus direction area. In the case where there is an interfering object, it is only necessary to define the interference area.

Further, the transfer system described above can be applied not only to the substrate transfer field but also to the operation control of a transfer robot for general industry. In other words, by applying the technology of performing simultaneous multi-axis drive control based on the transfer trajectory that avoids the above-mentioned interference object to the operation control of the transfer robot for general industry, the transfer robot for general industry can transfer the transfer target other than the substrate. When transporting an object, it is possible to efficiently transport the transport object while avoiding an interference object.

[0103]

As described above, according to the first and fifth aspects of the present invention, the movable range of the transfer robot in a plurality of degrees of freedom is defined as a coordinate space in the movable space. The first corresponding to the starting position
A virtual linear trajectory connecting the position from the position to the second position corresponding to the target position is determined, it is determined whether or not the linear trajectory passes through a predetermined interference area in the movable space. If it is determined that, the transport trajectory that bypasses the interference area is set, and if it is determined that the vehicle does not pass through the interference area, the straight trajectory is set as the transport trajectory, and then along the transport trajectory that is set. Since the respective drive shafts corresponding to the respective degrees of freedom are simultaneously driven and controlled, the substrate or the object to be transferred can be transported in the shortest time and the shortest distance and efficiently while avoiding the interference.

According to the second and sixth aspects of the present invention, whether to pass through the interference area is determined by determining the coordinate value of the area critical point of the interference area in the movable space and the coordinate value on the linear trajectory. Is performed by performing the comparison, it is possible to efficiently determine whether or not to pass through the interference area.

According to the third and seventh aspects of the present invention, the transfer via point is set in the non-interference area near the area critical point, and when it is determined that the linear trajectory passes through the interference area, Since the transport trajectory is set so as to pass through the transport trajectory, no interference occurs even if the transport trajectory moves along the transport trajectory.

According to the fourth and eighth aspects of the present invention, simultaneous drive control is performed without stopping each of the plurality of drive shafts at the transfer route point, so that a more efficient transfer operation can be performed. .

[Brief description of the drawings]

FIG. 1 is a plan view showing a substrate processing apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view schematically showing an indexer and a unit arrangement section.

FIG. 3 is a schematic view of a cross section of the interface taken along the YZ plane as viewed from an exposure unit side.

FIG. 4 is a perspective view illustrating an outline of a transfer robot.

FIG. 5 is a block diagram showing a control system for controlling the operation of the transfer robot.

FIG. 6 is a diagram illustrating a principle of an interference object avoiding operation of the transfer robot.

FIG. 7 is a diagram showing a case where no interference occurs in the same movable space as in FIG. 6;

FIG. 8 is a diagram illustrating a transfer route point when a transfer path is set.

FIG. 9 is a flowchart illustrating an operation control procedure of the transfer robot according to the embodiment.

FIG. 10 is a diagram illustrating an example of an operation speed of each axis when the transfer robot moves from a current position to a target position.

FIG. 11 is a diagram illustrating an example of an operation speed of each axis when the transfer robot moves from a current position to a target position.

FIG. 12 is a view showing a substrate transfer mode in a conventional apparatus.

[Explanation of symbols]

 12 Inner wall 26a, 26b Cassette 27a, 27b Cassette table 30 Robot controller 31 Y-axis drive controller 34 Z-axis drive controller 37 θ-axis drive controller 32, 35, 38 Servo motor 33, 36, 39 Encoder 100 Substrate processing device SP movable space ID indexer MP unit placement section IF interface EXP exposure section TR1-TR4 transport robot W board

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Yasuo Kawamatsu 4-chome Tenjin Kitamachi 1-chome, Horikawa-dori, Nokyo, Kamigyo-ku, Kyoto Dainippon Screen Mfg. Co., Ltd. (72) Inventor Kazuhiro Nishimura Kamigyo, Kyoto-shi 4-110, Tenjin, Horikawa-dori-Tenouchi-ku, 1-1-1, Kita-machi, Dainippon Screen Mfg. Co., Ltd. (72) Inventor Masatoshi Sano 1-1, Kawasaki-cho, Akashi-shi, Hyogo Kawasaki Heavy Industries, Ltd. Akashi Factory (72) Inventor Masaya Yoshida 1-1-1, Kawasaki-cho, Akashi-shi, Hyogo Kawasaki Heavy Industries, Ltd. Akashi Plant F-term (reference) 3F059 AA01 AA14 AA16 BA01 CA06 FB01 3F060 AA01 AA07 AA08 BA00 DA07 DA09 DA10 EB12 EC12 HA35 5F031 CA02 GA05 FA07 FA07 GA43 GA47 GA48 GA49 GA50

Claims (8)

[Claims] 1. A substrate loading / unloading device for loading / unloading a substrate using a transfer robot, comprising: (a) a movable space defining a movable range of a plurality of degrees of freedom of the transfer robot as a coordinate space; Linear trajectory deriving means for obtaining a virtual linear trajectory connecting a first position corresponding to the departure position of the transfer robot to a second position corresponding to the target position; and (b) the linear trajectory is within the movable space. Determining means for determining whether to pass through a preset interference area; and (c) setting a transport trajectory that bypasses the interference area when the determination means determines that the vehicle passes through the interference area. When it is determined that the vehicle does not pass through the interference area, the transport trajectory setting means for setting the linear trajectory as the transport trajectory; and (d) simultaneously driving each drive shaft corresponding to each degree of freedom along the transport trajectory. Drive Substrate loading and unloading apparatus characterized by comprising a control means for controlling the operation of the transport robot by Gosuru. 2. The substrate loading / unloading device according to claim 1, wherein the determination unit compares a coordinate value of an area critical point of the interference area in the movable space with a coordinate value on the linear trajectory. A determination as to whether or not to pass through the interference area. 3. The substrate loading / unloading device according to claim 2, wherein the transport trajectory setting means sets a transport via point in a non-interference area near the area critical point, and the linear trajectory is the interference area. Wherein the transport trajectory is set so as to pass through the transport via point when it is determined that the substrate passes through the transport route. 4. The substrate loading / unloading device according to claim 3, wherein the control unit controls the driving of the plurality of drive shafts simultaneously without stopping each of the plurality of drive shafts at the transfer route point. Unloading device. 5. A transport system for transporting a predetermined transport object using a transport robot, comprising: (a) a movable space defining a movable range of a plurality of degrees of freedom of the transport robot as a coordinate space; Linear trajectory deriving means for obtaining a virtual linear trajectory connecting a first position corresponding to the departure position of the transfer robot to a second position corresponding to the target position; and (b) the linear trajectory is within the movable space. Determining means for determining whether to pass through an interference area set in advance; and (c) setting a transport trajectory that bypasses the interference area when the determination means determines that the vehicle passes through the interference area. However, when it is determined that the vehicle does not pass through the interference area, a transport trajectory setting unit that sets the linear trajectory as a transport trajectory, and (d) each drive shaft corresponding to each degree of freedom along the transport trajectory. simultaneous Transport system characterized in that it comprises a control means for controlling the operation of the transport robot by turning control. 6. The transport system according to claim 5, wherein the determination unit compares a coordinate value of an area critical point of the interference area in the movable space with a coordinate value on the linear trajectory. A transport system for determining whether or not to pass through the interference area. 7. The transport system according to claim 6, wherein the transport trajectory setting means sets a transport via point in a non-interference area near the area critical point, and the linear trajectory passes through the interference area. If it is determined that the transport path is set, the transport path is set so as to pass through the transport via point. 8. The transport system according to claim 7, wherein the control unit performs simultaneous drive control without stopping each of the plurality of drive shafts at the transport route point.