JP2000002456A - Clean container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a compact clean container using an existing container with a small quantity of consumed power. SOLUTION: A clean container comprises a compact front chamber 2 and a clean zone 3. In the front chamber 2, a ceiling is provided with an illuminator 15, and the outer wall of the container 1 is provided with a fan filter unit 5 (called a FFU1) serving as an outside air intake and exhaust, a fan filer unit 6 (called a FFU2) provided on the upper part of a partition wall 4 relative to the clean zone 3, and a positive pressure damper. In the clean zone 3, a fan filter unit 9 (called a FFU3) and an illuminator are provided on its ceiling. The FFU2 is operated to maintain the cleanliness and the positive pressure of the clean zone 3, and the FFU1 is operated as desired to introduce outside air.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room and, more particularly, to a clean container capable of storing and transporting a precision instrument, a precision measuring instrument, and materials used therefor in a clean environment.

[0002]

2. Description of the Related Art In recent years, manufacturers of semiconductors, precision equipment and home appliances have tended to decentralize their factories and offices, and the performance of products such as semiconductors and precision equipment has become more sophisticated. As the measuring devices have become more precise, sophisticated and expensive, it has been difficult to provide a large number of measuring devices by a single company in terms of cost, and problems such as the frequency of using these measuring devices have arisen. Conventionally, when measuring and transporting product measurement equipment such as semiconductors and precision equipment, and materials used in such equipment in a clean place or clean room, when transporting them, they are transported out of the clean room by transport trolleys, sent by separate mail, and stored. In the procedure to be stored in a separate, discontinuous work was performed for each individual. further,
Few vehicles have a clean room, and most of them have a level of cleanliness with a purifier.

[0003]

However, the processing, measurement, transfer, storage, etc. related to the conventional semiconductor precision equipment,
Since work was carried out in individual places, it took time to clean up each time it was moved, it was not possible to maintain a constant cleanliness, and there was a problem with cleaning and storage of product performance measuring equipment. I have.

The present invention has been made in view of such circumstances, and can be constructed compactly without providing a duct space in a clean zone, and uses little power, thereby saving energy and expanding and moving equipment. It is an object of the present invention to provide a clean container using an existing container, which is possible and can easily store the product measuring device while keeping the cleanness constant.

[0005]

In order to achieve the above object, the present invention utilizes a clean container (hereinafter, referred to as a basic type clean container) comprising a compact front chamber and a clean zone. In the case of ordinary unmanned storage, air is circulated by operation of a fan filter unit provided above the partition wall between the front chamber and the clean zone and operation of the positive pressure damper, and a clean room class of 10,000 and a clean room is obtained. Maintain the indispensable positive pressure to increase cleanliness When entering and working, if necessary, keep the cleanliness class 100 and positive pressure constant by operating the fan filter unit installed on the ceiling of the clean zone And step operation for energy saving.

[0006]

According to the present invention, an existing container is used, a partition wall is divided into a front chamber and a clean zone in the container, and a fan filter unit and a positive pressure damper provided on the upper part of the partition wall. Thereby, the cleanliness can be maintained and adjusted during unattended storage. Therefore, the humidity in the container can be kept constant. In addition, when entering a room or working, the fan filter unit provided on the ceiling of the clean zone can be operated as required to obtain a higher cleanliness. In addition, since the dustless method is used, the space in the container is widened, and the processing of precision equipment, materials, and the like can be sufficiently performed. Furthermore, the work of processing, moving, and storing the precision equipment and materials, which has been conventionally performed individually, can be continuously performed by using a container, so that workability and efficiency can be improved.

In addition, the basic type clean container can be easily connected using a joining device according to the purpose, so that the facility can be easily expanded.

[0008]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a clean container according to the present invention. As shown in FIG. 1, FIG. 2 and FIG. 3, the clean container uses an existing container (for example, standard: ISO standard 20-foot size), and after lining the entire interior of the container 1, the clean room 2
And a clean zone 3 with a partition wall 4. In the front room 2, a fan filter unit 5 (hereinafter referred to as “FFU”) and an illumination 15 provided on the outer wall (side) of the container 1 for both introducing and exhausting outside air, and a fan filter unit 6 above the partition partition wall 4. (Hereinafter F
FU) and a positive pressure damper 7 are provided. A fan filter unit 9 (hereinafter referred to as FFU) and lighting (16, 17, 18, 1) are provided on the ceiling surface of the clean zone 3.
9) is provided. By operating the FFU 6 and circulating the clean air through the positive pressure damper 7, the room pressure in the clean zone 3 can be maintained at a positive pressure which is indispensable to the clean room. When it is necessary to introduce outside air when a worker enters or works, the FFU 5 is operated. If necessary, FFU
9 is circulated by blowing clean air toward the clean zone 3 from the outlet through the HEPA filter through the HEPA filter. By this circulation, the cleanliness can be improved, and a step operation for energy saving can be performed.

Further, equipment necessary for processing precision equipment, materials and the like is installed in the front room 2 and the clean zone 3. In the front room 2, the cleaning kids 20, the clothes locker 21, the transformer converter 22, the shoe shelf 23 and the switchboard 24 are installed, and in the clean zone 3, the work table, the measuring device and the like are installed.

FIG. 4 shows a clean operation system when the clean container of the present invention is installed, and FIG. 5 shows a clean operation system during the transfer operation. For clean operation during installation, wire from outside (AC200V x 3φ) or
Alternatively, the FFU 6 is operated by using the battery 12 charged by the generator 25 by wind power, solar heat, or the like, and the FFU 5 and the FF are used as needed to improve the level of cleanliness.
Drive U9. In addition, in the case of installing as a storage, it is possible to install an air conditioner (as an outdoor unit) on the roof of the container as needed to control the temperature and humidity. In the clean operation during the transfer operation, the battery 12 is charged by the wind power generator 25 utilizing the wind speed, and the FFU 6 is operated with the battery 12. However, the temperature / humidity adjustment function is optional and is not operated.

According to the basic type clean container 1 of the present invention, depending on the purpose of use, the size of the installation place, etc., the container 1 can be combined vertically and vertically as shown in FIGS. Can be easily integrated. In this joining device 14, a container opening surface is joined by welding, a separately manufactured metal frame is fitted to the opening, and this frame is united and connected with a flexible connection cylinder. As shown in FIG. 11, the basic clean container 1 is a hexahedron, and has four side surfaces (1a, 1b, 1c, 1d), an upper surface 1E, and a lower surface 1F. Flat container 1
Are combined, the sides to be combined (for example, 1a and 1
a ') is removed and the two openings are welded together. Furthermore, the use of the door portion of the container for the connection portion allows the connection between the containers to be performed more easily. Alternatively, joining is performed using a joining device 14 such as connecting with a connecting cylinder made of canvas, plastic, or the like, for example, a bellows type curtain. Further, when the container 1 is vertically assembled, as shown in FIGS. 7 and 9, a protrusion 37 provided on the upper surface of the base steel frame material 34 of the container 1 is used.
Are fitted into holes 36 provided in the deck plate 32 of the container 1 to position and join the upper and lower surfaces (for example, 1E, 1E,
E ') is welded.

[0012] The clean container of the present invention comprises a moving device 3
3, the container 1 can be easily moved without dismantling. The moving device 33 has a connecting plate 35 having holes 38 at both ends of the base steel material 34 having a width slightly smaller than that of the steel material 34 and a wire 41 at the end thereof.
With a welding machine to produce a U-shaped cross section.
The wire 41 is fixed to the hole 38 at the end of the connection plate 35 through the wire 41, or the protrusion 40 of the connection jig 39 with the wire 41 is fixed.
Is fitted in the hole 38 of the connection plate 35, and the clean container 1 is lifted and moved using a crane or the like. When moving to a distant place, the clean container 1 is loaded on the vehicle body 11 of the carrier 10. This moving device 33 is a container 1
It is preferable to attach at least three or more pieces to the bottom surface of the base by welding or the like. When the container 1 is installed, the moving device 33 can be used as a base of the container 1 in the attached state. Further, it is also possible to remove the moving device 33 from the container 1 and install the container 1 on a newly provided base.

When the temperature inside the container 1 is 35 ° C. or more,
When the cleanliness (out of the specified value) is reached, a warning signal is transmitted via a receiver 42 provided in correspondence with the transmitter 30,
Since it is displayed on the connected alarm monitor 44, it is easy to manage. When the container 1 is being transported, it can be managed by installing an alarm monitor 44 in the cab 43 of the transport vehicle 10.

[0014]

According to the transportable clean container according to the present invention, since the existing standard size (ISO) container is used, uniform standardized parts can be used, and the construction can be performed in a short time at a low price. it can. Further, the degree of cleanliness in the container can be kept uniform and the same. Further, since a continuous processing operation for precision equipment materials and the like can be performed in the same container, the cleanliness can be kept constant. Further, since the container can be easily moved and stored without changing the cleanliness in the container, the workability is good and the work can be completed in a short time.

[Brief description of the drawings]

FIG. 1 is a side sectional view of a transport vehicle loaded with a clean container of the present invention.

FIG. 2 is a longitudinal sectional view of a basic clean container of the present invention.

FIG. 3 is a plan view of a basic clean container of the present invention.

FIG. 4 is a system diagram of a clean operation when a clean container is installed and fixed according to the present invention.

FIG. 5 is a system diagram of a clean operation during transport of a clean container according to the present invention.

FIG. 6 is a schematic diagram showing a combination of the clean containers of the present invention.

FIG. 7 is a partially cutaway sectional view showing a clean container installation state of the present invention.

FIG. 8 is a sectional view of the moving device of the present invention.

FIG. 9 is a plan view of the moving device of the present invention.

FIG. 10 is a sectional view in which a connecting jig is fitted to the moving device of the present invention.

FIG. 11 is a developed plan view of the clean container of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Container (basic type clean container) 2 Front room 3 Clean zone 4 Partition partition 5 Fan filter unit (FFU) 6 Fan filter unit (FFU) 7 Positive pressure damper 8 Fan 9 Fan filter unit (FFU) 10 Carrier 11 Body 12 Battery 13 Moving device 14 Joining device 15 Front room lighting (FL) 16 Clean zone lighting (FL) 17 Clean zone lighting (FL) 18 Clean zone lighting (FL) 19 Clean zone lighting (FL) 20 Cleaning kids DESCRIPTION OF SYMBOLS 21 Clothes locker 22 Trans converter 23 Shoe shelf 24 Switchboard 25 Generator 26 Converter 27 Transformer 28 Door 29 Door 30 Transmitter 31 Insulation material 32 Deck plate 33 Moving device 34 Steel material for base 35 Continued plate 36 deck plate hole 37 protrusion 38 connecting plate holes 39 connecting jig 40 projecting portion 41 the wire 42 receiver 43 cab 44 alarm monitor 45 HEPA filter of

Claims (5)

[Claims] 1. An existing lined container 1 is partitioned into a front room 2 and a clean zone 3 by a partition wall 4, and the front room 2 serves both for introducing and exhausting outside air provided on the outer wall of the container 1. A fan filter unit 5 and a fan filter unit 6 above the partition 4
And a positive pressure damper 7, and clean air is blown toward the clean zone 3 from a fan filter unit 9 including a fan 8 that sends the return air from the clean zone 3 toward the HEPA filter 45 on the ceiling surface of the clean zone 3. Clean container. 2. Only by operating the fan filter unit 6 and the positive pressure damper 7 provided above the partition 4,
2. The clean container according to claim 1, wherein the clean zone is maintained at a constant cleanliness level and a positive pressure. 3. The clean container according to claim 1, wherein the container 1 can be easily loaded and moved on the vehicle body 11 of the carrier 10 by using the moving device 13 without disassembly. 4. The clean container according to claim 1, wherein a battery 12 capable of utilizing a wind power generator, solar heat 15, or the like is provided as an electric power source. 5. The clean container according to claim 1, wherein the basic type containers 1 are combined according to the purpose and use conditions, and are integrated using a joining device 14.