JP2000000765A - Sandblasting equipment - Google Patents

Abstract

(57) Abstract: Provided is a sandblasting device used for sandblasting of a barrier on a back plate of a PDP and the like, which is capable of preventing foreign substances from adhering to a cutting portion during cutting. SOLUTION: The blast nozzle position is moved, and
A sand blasting device that blows abrasive sand from a blast nozzle with high-pressure air to a processing substrate through a mask provided on a processing surface side of the processing substrate to selectively cut and remove surface materials on the processing substrate. An air blow nozzle is provided near the blast nozzle to prevent foreign matter that hinders cutting from adhering to the cutting portion.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sandblasting apparatus for performing sandblasting by injecting abrasive sand powder such as glass beads using high-pressure air.

[0002]

2. Description of the Related Art In recent years, plasma display panels (hereinafter, also referred to as PDPs) have been used in various display devices because of their small depth, light weight, clear display, and wide viewing angle compared to liquid crystal panels. It is being used.
Generally, a plasma display panel (PDP) has two
A pair of regularly arranged electrodes are provided on a pair of opposed glass substrates, and a gas mainly containing neon, xenon, or the like is sealed between the pair of electrodes. Then, a voltage is applied between these electrodes, and a discharge is generated in minute cells around the electrodes, so that each cell emits light and display is performed. In particular, in order to display information, regularly arranged cells are selectively discharged to emit light.

Here, the structure of the PDP is shown in FIG.
An example of the type PDP will be described. FIG. 4 is a perspective view of the PDP structure, but shows the front plate (glass substrate 710) and the rear plate (glass substrate 720) apart from the actual case for easy understanding. As shown in FIG. 4, two glass substrates 710 and 720 are disposed in parallel and opposed to each other, and both are provided in parallel with each other on a glass substrate 720 serving as a back plate (cell barrier). 730)
Are held at regular intervals. On the back side of the glass substrate 710 serving as a front plate, composite electrodes composed of a transparent electrode 740 serving as a discharge sustaining electrode and a metal electrode 750 serving as a bus electrode are formed in parallel with each other.
A dielectric layer 760 is formed, and a protective layer (MgO layer) 770 is further formed thereon. In addition, an address electrode 780 is positioned on the front side of the glass substrate 720 serving as a back plate, between the barriers 730 so as to be orthogonal to the composite electrode.
Are formed in parallel with each other, and a phosphor 790 is provided so as to cover the wall surface of the barrier 730 and the cell bottom surface. The barrier 730 is for defining a discharge space, and each partitioned discharge space is called a cell or a unit light emitting region.
This AC type PDP is of a surface discharge type, and has a structure in which an AC voltage is applied between composite electrodes on the front panel to cause discharge.
In this case, since the alternating current is applied, the direction of the electric field changes according to the frequency. The fluorescent material 790 emits light by the ultraviolet light generated by the discharge, and the light transmitted through the front plate can be visually recognized by an observer. In addition, DC type PD
In the case of P, the electrode is different from the AC type in that the electrode has a structure not coated with the dielectric layer, but the discharge effect is the same. 4 has a structure in which an underlayer 767 is provided on one surface of a glass substrate 720 and a dielectric layer 765 is provided thereon, but the underlayer 767 and the dielectric layer 76 are provided.
5 is not necessarily required.

[0004] Conventionally, as a method of forming a barrier of a back plate used in the above-mentioned PDP, a barrier forming material is repeatedly printed on a glass substrate in a barrier pattern shape by screen printing a plurality of times, and a required pattern is formed. The first method of stacking and drying at a height (called a screen printing method), or applying a barrier-forming material over the entire surface of a glass substrate and then patterning a resist having sandblast resistance on the applied surface into a predetermined shape A second method (called a sandblast method) of forming a barrier-forming material into a predetermined shape by sandblasting using the resist as a mask has been employed. However, in forming the barrier of the back plate used in the PDP by the first method, it is necessary to screen-print the paste several times to several tens times to obtain a predetermined thickness as the barrier, which is troublesome. In addition, it is necessary to control the printing accuracy, and it is difficult to obtain satisfactory printing quality. At present, the second method is mainly used.

Here, the second method (sand blast method)
FIG. 3 shows an example of the formation of the barrier by the above method, and the method of forming the barrier by the sandblast method will be further described. FIG.
As shown in (a), after an electrode wiring 630 is formed on one surface of a glass substrate 610 via an undercoat layer 620, the electrode wiring 630 is formed so as to cover the glass substrate 610 surface.
Further, a dielectric layer 650 is formed. Next, the dielectric layer 6
After a processing material 660 made of a low-melting glass paste for forming a barrier is applied to the entire surface of the substrate 50 (FIG. 3B), a photosensitive resist 640 resistant to sandblasting is applied on the processing material 660. Then, only a predetermined area of the resist 640 is exposed by using a photomask having a pattern of a predetermined shape corresponding to the shape of a barrier to be formed, and is developed and Pattern into shape. (FIG. 3D) Then, the resist 640 is used as a mask when the processing material 660 is sandblasted, and sandblasting is performed, and only the processing material 660 exposed from the mask is cut into a predetermined shape. I do. (FIG. 3E) Thereafter, the resist 640 is removed and a baking process is performed to form a barrier 660A on the dielectric layer 650. (FIG. 3
(F))

In forming a barrier on a glass substrate serving as a back plate used in a PDP by the second method, a barrier-forming material coated on the glass substrate is covered with a sandblast-resistant mask to form a plurality of barriers. Polishing sand such as glass beads was blown from a nozzle with high-pressure air, and a portion exposed from the mask was selectively cut to form a barrier. However, in this method, when sticky foreign matter or the like is mixed in the polishing sand, the foreign matter adheres between the rib barriers, hinders sandblasting, and as a result, the cutting quality may be poor.

[0007] Alternatively, in the case of the second method,
As shown in FIG. 2, the shaft 211 moving along the slit 295 is pressed from both sides of the slit 295 by a shielding member 220 made of natural rubber, and
0, seal so as to cover the entire slit 295,
Although the abrasive sand was prevented from being scattered to the outside, the friction between the moving shaft 211 and the shielding member 220 made of natural rubber generated powder of adhesive rubber, which adhered to the cut portion, and caused the powder to adhere to the rib barrier. In some cases, the foreign matter adhered to the surface, hindering sand blasting and resulting in poor cutting quality.

[0008]

As described above, the PDP
In the case where the barrier of the back plate used in the method is formed by sandblasting, foreign matter adheres between the rib barriers during cutting, hinders sandblasting, and may cause poor quality of the cutting process, which has been a problem. Under the above circumstances, the present invention particularly provides a sandblasting apparatus used for sandblasting a barrier or the like of a back plate of a PDP.
It is an object of the present invention to provide a sandblasting device that can prevent foreign matter from adhering between rib barriers, which are cutting portions, during cutting.

[0009]

According to the present invention, there is provided a sand blasting apparatus for moving a blast nozzle position and polishing sand by a high pressure air with respect to a processing substrate through a mask provided on a processing surface side of the processing substrate. Is a sandblasting device that selectively cuts and removes surface materials on a processing substrate by spraying a blast nozzle from a blast nozzle.
It is provided near the blast nozzle. In the above, the blast nozzle is inserted into the processing chamber via the supporting shaft, and the blast nozzle is moved by moving the shaft along a slit provided on the ceiling of the processing chamber, thereby moving the blast nozzle position. It is assumed that. Further, in the above, the air blow nozzle is characterized by being provided along the blow-out opening of the blast nozzle, having substantially the same length, and being provided on both sides thereof.

[0010]

According to the sand blasting apparatus of the present invention, the blast nozzle position can be moved by adopting such a structure.
In a sand blasting apparatus that blows polishing sand from a blast nozzle with high-pressure air to a processing substrate through a mask provided on the processing surface side of the processing substrate to selectively cut and remove surface materials on the processing substrate. In addition, it is possible to prevent foreign matter that hinders cutting from adhering to the cut portion. Specifically, this is achieved by providing an air blow nozzle near the blast nozzle for preventing foreign matter that hinders cutting from adhering to the cut portion.
In particular, the blast nozzle used for forming the barrier of the back panel of the PDP is inserted into the processing chamber via a supporting shaft, and the sand blasting apparatus of the type in which the shaft is moved along a slit provided on the ceiling of the processing chamber is also used. It can be applied and the cutting quality can be improved. More specifically, since the air blow nozzle is provided along the blow-out portion of the blast nozzle and substantially at the same length and on both sides thereof, it is possible to cope with movement in both directions along the slit of the blast nozzle. It is assumed.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the sandblasting apparatus of the present invention will be described with reference to the drawings. FIG. 1A is a schematic cross-sectional view of a sand blasting device according to an example of the embodiment, and FIG. 1B is a diagram of a blast nozzle portion viewed from an A1-A2 direction in FIG. In FIG. 1, reference numeral 100 denotes a sand blast apparatus, 105 denotes a processing chamber, 110 denotes a blast nozzle, 111 denotes a shaft (also a polishing sand pipe), 113
Is a shaft fixing portion, 115 is a shaft transport portion, 117 is a blow-out portion, 118 is abrasive sand, 120 is a transport plate, 130 is a slideway, 150 is an air blow nozzle, 151 is air, 155 is an air pipe, and 170 is a transport. Roll, 180, substrate, 190, processing chamber wall, 19
1 is a ceiling, 195 is a slit. As shown in FIG. 1A, the sand blasting apparatus of the present invention connects a blast nozzle 110 to a processing chamber 10 through a supporting shaft 111.
5 and the shaft 110 is attached to the ceiling 1 of the processing chamber 105.
Along the slit 195 for moving the shaft for fixing the blast nozzle provided at 91, the blast nozzle position is moved while repeatedly reciprocating, and the abrasive sand is removed from the blast nozzle by high-pressure air through the mask. This is a sandblasting apparatus that selectively cuts and removes surface materials on a processing substrate by spraying, and is used for sandblasting processing such as formation of a barrier on a back plate of a PDP. Further, an air blow nozzle 150 for preventing adhesion of foreign matter that hinders cutting to the cut portion is provided near the blast nozzle 110. In FIG. 1,
To make the explanation easier to understand,
However, in practice, a plurality of blast nozzles are used, and an air blow nozzle is provided for each blast nozzle as shown in FIG. Further, in FIG. 1A, a shielding material for shielding the slit 195 is omitted. W1 shown in FIG. 1A is the width of the abrasive sand outlet 117 of the blast nozzle 110.

The sandblasting device 10 of the present embodiment shown in FIG.
At 0, the blast nozzle 110 reciprocates along the slit 195 in the direction of arrow A4 in FIG.
The substrate 180 to be processed cuts while moving in the direction of arrow A3 in FIG. Since the blast nozzle 110 is provided along the blowout portion 117 of the abrasive sand (118 in FIG. 1B) and has substantially the same length and is provided on both sides thereof, cutting is performed for movement in both directions along the slit 195. Before the cutting, the air from the air blow nozzle 150 hits to remove foreign substances attached to the cut portion, and thereafter, cutting with abrasive sand can be performed.

Incidentally, in FIG.
Is integrated with the precision polished bearing 121 and integrally supports the shaft transport unit 115. By moving along the slide way 130, the shaft 111 supported by the shaft transport unit 115 is moved along the slit 195. It is something to move. Also, slide way 13
0 is fixed to the ceiling 191, but is omitted in FIG. 1 (a).

[0014]

As described above, according to the present invention, the blast nozzle is moved, and the polishing sand is blasted against the processing substrate by high-pressure air through a mask provided on the processing surface side of the processing substrate. In a sandblasting apparatus that selectively cuts and removes a surface material on a processing substrate by spraying from a nozzle, it has become possible to provide a sandblasting apparatus that can prevent foreign substances from adhering to a cut portion. In particular, when the present invention is applied to a sandblasting device when forming a barrier or the like of a back plate used for a PDP by a sandblasting method, it is particularly effective in terms of quality and production.

[Brief description of the drawings]

FIG. 1 is a schematic view of an example of a sandblasting apparatus according to an embodiment.

FIG. 2 is a view for explaining a conventional sandblasting apparatus.

FIG. 3 is a diagram illustrating formation of a barrier by sandblasting.

FIG. 4 is a diagram illustrating a PDP substrate.

[Explanation of symbols]

REFERENCE SIGNS LIST 100 Sand blasting device 105 Processing chamber 110 Blast nozzle 111 Shaft (also a polishing sand pipe) 113 Shaft fixing part 115 Shaft transport part 118 Polishing sand 120 Transport plate 130 Slide way 150 Air blow nozzle 151 Air 155 Air pipe 170 Transport roll 180 Substrate 190 Processing chamber wall 191 Ceiling 195 Slit 210 Nozzle 211 Shaft 213 Shaft fixing section 215 Shaft transport section 220 Shielding member 270 Transport roll 280 Glass substrate (back plate) 290 Sandblast processing chamber wall 291 Ceiling 295 Slit

Claims (3)

[Claims] 1. A blast nozzle position is moved, and
A sand blasting device that blows abrasive sand from a blast nozzle with high-pressure air to a processing substrate through a mask provided on a processing surface side of the processing substrate to selectively cut and remove surface materials on the processing substrate. A sand blasting device, wherein an air blow nozzle for preventing foreign matter that hinders cutting from adhering to a cutting portion is provided near the blast nozzle. 2. The blast nozzle according to claim 1, wherein the blast nozzle is inserted into the processing chamber via a supporting shaft, and the blast nozzle is moved by moving the shaft along a slit provided on a ceiling of the processing chamber. A sandblasting device characterized by the following. 3. The sandblasting apparatus according to claim 1, wherein the air blow nozzles are provided along the outlet of the blast nozzle, have substantially the same length, and are provided on both sides thereof.