JP2000088739A - Micro-thickness cell for measuring infrared properties of liquids - Google Patents

Abstract

(57) [Summary] A micrometer for measuring the infrared characteristics of a liquid, which can measure a known accurate minute film thickness of a liquid itself to be measured without using a substitute and register it as an initial value. Film thickness cell. An infrared characteristic measuring cell for containing a liquid whose infrared characteristics are to be measured by irradiating light in the form of a film having a predetermined thickness, wherein a first plate is provided on a second plate. The first plate body is formed of a material that is transparent at least at a central portion and transmits infrared light, and is formed by a plane that is flat and parallel at least over the entire lower surface and at least the central portion of the upper surface. The second plate has an annular concave portion between the center and the outside of the upper surface, the upper surface of the center and the upper surface of the outer are formed as flat and parallel surfaces, respectively, and the upper surface of the outer is And a micro-thickness cell for measuring infrared characteristics of a liquid, wherein the cell is configured to have a predetermined thickness higher than the upper surface of the central portion.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cell for measuring infrared characteristics in which a liquid whose infrared characteristics are measured by irradiating light is stored in a film having a predetermined thickness.

[0002]

2. Description of the Related Art When measuring a minute film thickness using infrared rays,
There are a transmission side and a reflection type, but there is a method of converting the film thickness value based on the ratio of the amount of incident light and the amount of reflected light in order to measure the reflection type. In this method, known film thickness information is required when converting the light ratio into a film thickness value.

Until now, when measuring a fixed film thickness of a liquid of the order of 1 μm, it is difficult to create a known film thickness value. A method to make it happen was adopted.

In this method, an apparatus for measuring a minute film thickness using infrared rays is converted into a film thickness by a ratio between an incident light amount and a reflected light amount, and is used as an initial value in an apparatus for measuring a minute film thickness using infrared rays. The film thickness value of the reference sample itself at the time of registration could not be known accurately.

[0005]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has as its object to solve the problem by using a known accurate and minute film thickness of a liquid to be measured without using a substitute. The present invention provides a micro-thickness cell for measuring the infrared characteristics of a liquid, which is capable of measuring and registering as an initial value.

[0006]

According to the present invention, in order to attain the above object, according to the first aspect, a liquid for measuring infrared characteristics by irradiating light is stored in a film having a predetermined thickness. A cell for measuring infrared characteristics, wherein the first plate is placed on a second plate, at least a central portion of the first plate is transparent and transmits infrared light. The entire lower surface and at least the central portion of the upper surface are formed of flat and parallel surfaces, and the second plate is
An annular recess between the center and the outside of the top surface, the top surface of the center and the top surface of the outside are each formed as a flat and parallel surface,
The outer upper surface is configured to be a micro-thickness cell for measuring infrared characteristics of a liquid, characterized in that the upper surface is configured to have a predetermined thickness higher than the upper surface of the central portion.

According to a second aspect of the present invention, there is provided the infrared ray of a liquid according to the first aspect, wherein a reflection film is formed on at least an upper surface of a central portion of the second plate by coating, vapor deposition, sputtering, or the like. This is a micro-thickness cell for measuring characteristics.

According to a third aspect of the present invention, the first plate or the second plate is placed in a state where the lower surface of the first plate is placed in contact with the outer upper surface of the second plate. 3. An infrared characteristic measuring liquid according to claim 1, wherein at least one of the first and second plates is provided with an air vent passage communicating the space between the first plate and the second plate with the outside. This is a cell having a very small thickness.

According to a fourth aspect of the present invention, the first plate is formed to have substantially the same outline as the outer shape of the second plate. This is a micro-thickness cell for measuring infrared characteristics of a liquid.

According to a fifth aspect of the present invention, a central portion of the second plate is placed in a state where the upper surface of the outside of the second plate and the lower surface of the first plate are placed in contact with each other. The upper surface and the first
5. The cell according to claim 1, wherein the gap with the lower surface of the plate is smaller than 500 μm.

According to a sixth aspect of the present invention, in a state where the lower surface of the first plate body is placed on the outer upper surface of the second plate body in contact with the upper surface, the upper surface of the central portion of the second plate body is When forming a gap with the lower surface of the first plate body smaller than 500 μm, on the outer upper surface of the second plate body or the first
6. A liquid thickness measuring cell according to claim 1, wherein a liquid thickness setting film is formed on the outer lower surface of the plate body by a method such as sputtering. It is.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a micro-thickness cell for measuring infrared characteristics of a liquid according to the present invention will be described in accordance with embodiments. FIG. 1 is a cross-sectional view of a state where the first plate is separated from the second plate (the placed position is indicated by a dotted line), FIG. 2 is a plan view of the second plate, and FIG. FIG. 4 is a partially enlarged cross-sectional view of a state where a liquid is applied to a central portion of the plate and a first plate is placed.

The liquid used here is assumed to have an OH group. In that case, the first plate body 2 is formed in a circular shape in plan view using anhydrous quartz glass.

The lower surface 11 and the upper surface 12 of the first plate 2 are formed as parallel flat surfaces.

The thickness of the first plate 2 is equal to the thickness of the second plate 3
When the liquid 15 is dropped on the upper surface 14 of the central portion inside the concave portion 6, the first plate 2 is formed with a thickness that does not warp due to the force of the liquid 15 when the first plate 2 is placed. I have.

The second plate 3 has upper surfaces 4, 5, other than the recess 6.
The lower surfaces 16 are parallel to each other, and the upper surfaces 4 and 5 are formed as flat surfaces having the same height. The material is made of a hard material with little thermal distortion, for example, quartz glass here.

A reflective film 7 is uniformly formed on the upper surface 4 outside the concave portion of the second plate body 3 and the upper central portion 5 inside the concave portion with a reflective material such as aluminum by a method such as coating, vapor deposition, or sputtering. To a mirror finish. Then, a protective film 8 is formed thereon. Even in this state, since the film thickness at each location is very thin and the same processing is performed on both the upper surfaces 4 and 5, the upper surface 14 in which the central portion inside the concave portion is processed and the outer surface than the concave portion in this state are processed. The thickness, the parallelism, and the surface accuracy with respect to the upper surface 17 that has been processed are the same.

Next, as shown in FIG. 4, a mask 18 for concealing a part of the upper surface 14 on which the reflective film 7 and the protective film 8 are formed on the inner side of the concave portion of the second plate body 3 and the protective film 8 and the concave portion is mounted. Then, a process such as coating, vapor deposition, or sputtering is performed on the upper surface 17 on which the reflective film 7 and the protective film 8 are formed outside the concave portion 6 to form a liquid thickness setting film 9. Increase by thickness. Examples of other processing methods include a method in which a central portion inside the concave portion of the second plate 3 is uniformly etched by a flat surface by an etching process, and a method in which a uniform portion is formed only outside the concave portion of the second plate 3. There is also a method of placing a film of a thickness. In any case, in this treatment, it is necessary to select a material and a treatment method which do not cause peeling. With such a process, it is possible to form the liquid thickness setting film 9 which is extremely thin and has excellent parallelism and surface accuracy.

As described above, the projections 20 formed when the coating, vapor deposition, sputtering, or the like is performed using the mask 18 are formed in portions other than the portion where the accurate film thickness is formed, so that the mask processing can be performed without any problem.

FIG. 2 shows that the space between the first plate 2 and the second plate 3 communicates with the outside of the second plate 3 processed as described above.
Are opened as shown in FIG. At this time, if the air vent path 10 is opened near the bottom surface of the concave portion 6 of the second plate body 3, the possibility that the liquid 15 flows out of the cell 1 when the liquid 15 is added becomes large. It is better to provide the air vent path 10 at a place slightly higher than the bottom of the air vent.

The liquid 15 is dropped on the upper surface 14 of the central portion inside the concave portion 6 of the second plate member 3 formed by the above processing, and the lower surface 11 of the first plate member 2 is placed on the outside of the second plate member. When placed on the upper surface 13, a liquid film thickness 19 corresponding to the thickness of the liquid thickness setting film 9 is formed.

A plurality of the second plate members 3 processed as described above are prepared, and the upper surface 17 which has been processed outside the concave portion is coated, vapor-deposited, sputtered or the like, and the thickness of the liquid thickness setting film 9 is formed. By changing the thickness, a plurality of film thicknesses 19 of the liquid to be finally formed can be prepared, and can be registered as initial values of the minute film thickness for measuring infrared characteristics.

[0023]

As described above, the present invention has the following effects. That is, a minute film thickness can be formed by performing a process such as coating, vapor deposition, sputtering, etching, or film insertion when forming the film thickness of the liquid.

Further, since the concave portion is formed in the second plate member, the liquid to be measured is dropped on the central portion inside the concave portion of the second plate member, and then the first plate member is moved to the second plate member. When placed on the plate, the liquid overflowing from the gap between the lower surface of the first plate and the inside of the recess of the second plate is stored in the recess. Therefore, the liquid was prevented from entering between the lower surface of the first plate and the contact portion of the upper surface outside the recess of the second plate, and was processed by coating, vapor deposition, sputtering, etching, film insertion, or the like. It is possible to form an accurate film thickness.

In addition, a known accurate minute film thickness of a liquid to be measured itself is measured without using a substitute as in the prior art.
It is possible to provide a micro-thickness cell for measuring the infrared characteristics of a liquid, which can be registered as an initial value.

[0026]

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a state where a first plate is separated from a second plate.

FIG. 2 is a plan view of a second plate body.

FIG. 3 is a partially enlarged cross-sectional view illustrating a state in which a liquid is dropped on a central portion inside a concave portion of a second plate member and the first plate member is placed.

FIG. 4 is a cross-sectional view of a mask when a liquid thickness setting film is formed by performing processing such as coating, vapor deposition, and sputtering only on the outside of a concave portion of a second plate body.

[Explanation of symbols]

 1 1 Micro-thickness cell for measuring infrared characteristics of liquid 2 1st plate 3 2nd plate 4 outer upper surface 5 central upper surface 6 concave portion 7 reflective film 8 Protective film 9 Liquid thickness setting film 10 Air vent path 11 Lower surface of first plate 12 Upper surface of first plate 13 Upper surface of liquid thickness setting film 14 Center Upper surface on which reflective film and protective film are formed 15 形成 Liquid 16 ‥‥ Lower surface of second plate 17 ‥‥ Upper surface on which reflective film and protective film are formed outside 18 ‥‥ Mask 19 ‥‥ Film thickness of liquid 20 ‥‥ projection

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Norifumi Furuya 1-5-1, Taito, Taito-ku, Tokyo Letterpress Printing Co., Ltd. (72) Inventor Masao Mogi 1-15-1 Taito, Taito-ku, Tokyo Letterpress F term (for reference) in Printing Co., Ltd. 2G057 AA01 AB02 AB06 AC01 AD17 BA01 BB02 BD02 CA03 DB05 GA05 2G059 AA02 BB04 DD12 DD20 EE01 HH01 JJ13 JJ21 MM14

Claims (6)

[Claims] 1. A cell for measuring infrared characteristics, in which a liquid for measuring infrared characteristics by irradiating light is stored in a film of a predetermined thickness, wherein the first plate is formed of a second plate. The first plate body is configured to be placed on an upper surface, at least a central portion is formed of a material that is transparent and transmits infrared rays, and the entire lower surface and at least the central portion of the upper surface are flat and parallel. The second plate body has an annular concave portion between a central portion and an outer surface of an upper surface, and the upper surface and the outer upper surface of the central portion are formed as flat and parallel surfaces, respectively, and the outer upper surface is formed. A micro-thickness cell for measuring infrared characteristics of a liquid, wherein the cell is configured so that a predetermined thickness is higher than an upper surface of the central portion. 2. A thin film for measuring infrared characteristics of a liquid according to claim 1, wherein a reflection film is formed on at least a central portion of the second plate body by coating, vapor deposition, sputtering or the like. cell. 3. A state in which the lower surface of the first plate is placed in contact with the lower surface of the first plate on the outer upper surface of the second plate, and the first plate or the second plate is attached to at least one of the first plate and the second plate. 3. The micro-thickness cell for measuring infrared properties of a liquid according to claim 1, wherein an air vent path is provided for communicating the space between the first plate member and the second plate member with the outside. 4. An apparatus for measuring infrared characteristics of a liquid according to claim 1, wherein said first plate has substantially the same contour as the outer shape of said second plate. Small film thickness cell. 5. The first plate body and an outer upper surface, the first plate body being connected to the first plate body.
In a state where the lower surface of the first plate member is placed in contact with the lower surface of the second plate member, the gap between the upper surface of the central portion of the second plate member and the lower surface of the first plate member is 50.
5. The micro-thickness cell for measuring infrared characteristics of a liquid according to claim 1, wherein the cell is smaller than 0 μm. 6. An upper surface of a central portion of the second plate and the first plate in a state where the lower surface of the first plate is placed in contact with the outer upper surface of the second plate. 500μ gap
The liquid thickness setting film is formed on the outer upper surface of the second plate member or on the outer lower surface of the first plate member by a method such as sputtering when forming the liquid thickness smaller than m. A micro-thickness cell for measuring infrared characteristics of a liquid according to any one of claims 1 and 5.